Germanium FET for Low Power CMOS Technology Th-P.205 Th

Transcription

Germanium FET for Low Power CMOS Technology Th-P.205 Th
Th-P.205
Th-P.205
Negative Capacitance (NC) Germanium FET for Low Power CMOS
Technology
Yue Peng, Qinglong Li, Genquan Han#, Chunfu Zhang, and Yue Hao
State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology, School of
Microelectronics, Xidian University, Xi’an 710071, China
#
Email: [email protected]; [email protected]
We study the ferroelectric material operating in the negative capacitance (NC) region, which
could act as a step-up converter of the surface potential in a metal-oxide-semiconductor structure [1,2].
We calculate the ferroelectric dielectric Germanium (Ge) channel field effect transistor (FET) by
coupling Pao-Sah double integral with the nonlinear Landau description of the field and polarization
of ferroelectric insulator [3].
Fig. 1 shows the schematic diagram of the NC Ge channel FET with BaTiO3 ferroelectric
dielectric. The resultant solution for surface potential Φs versus gate voltage Vg relations at the source
side is depicted in Fig. 2. Fig. 3 presents the voltage drop across the ferroelectric film Vins as a function
of the Vg. Fig. 4 shows the inversion charge density Qi versus the gate voltage Vg and electron-Fermi
potential V.
From Figs. 2 and 4, it can be clearly seen that surface potential Φs and inversion charge density Qi
can be effectively amplified with the using of BiTiO3 material, which would contribute to the
steepening of the Ge FET.
(b)
VG
0.2
CFE
COX
VS
C
Csource S
0.1
VD
Cdrain
Fig. 1 (a) Schematic
diagram and (b)
capacitance model
of the NC-FET.
0.16
0.00
0.4
0.3
0.05
Vins (V)
0.5
Drain
0.20
Fermi potential V:
0.6
Ge Channel
Source 2×1015cm-3
0.10
2
Gate
0.7
Qi (C/m )
BaTiO3
Surface Potential s (V)
(a) Insulator
-0.05
tins:
5 nm
50 nm
200 nm
-0.10
-0.15
Fig. 2 surface potential Φs versus
gate voltage at the source side.
BaTO3 is used as the ferroelectric
dielectric. The results show that the
hysteresis loops sensitive to the
ferroelectric-insulator thickness.
0.1 V
0.3 V
0.12
0.08
0.04
0.0
0.0 0.5 1.0 1.5 2.0
VG - VFB (V)
0V
0.2 V
0.0 0.1 0.2 0.3 0.4
0.00
0.0
VG (V)
Fig. 3 Simulation results for
Vins-VG relation with an
insulator thickness of 50 nm.
It is clearly to see that the Vins
is negative when the VG
varies from zero to 0.35 V.
0.2
0.4
VG (V)
Fig.
4
Inversion
charge density Qi
versus gate voltage
VG at a fixed V, which
versus from 0 to 0.3
V in steps of 0.1 V.
References
[1] Sayeef Salahuddin, Supriyo Datta, Nano Lett. 8, 405-410 (2008).
[2] Cheng-I Lin, Asif Islam Khan, Sayeef Sayeef Salahuddin, Chenming Hu, Tran. Elec.
Device. , 99 1-3 (2015).
[3] Han-Ping Chen, Vincent C. Lee, Atsushi Ohoka, Jie Xiang, Yuan Taur, Tran. Elec.
Device. 58, 2401-2405 (2011).