SolaryX II Laser Scribe System SolaryX® II Laser Scribe

®
SolaryX II
Laser Scribe System
For High Throughput Production of
Thin Film Photovoltaic Panels
Solutions to Make, Manage and Measure Light
®
2
SolaryX II – Laser Scribe Systems
SolaryX® II Thin Film PV Laser Scribing System
As demand for solar-generated energy increases, so
does the need for cost-effective manufacturing
solutions. That’s why Newport developed the SolaryX®
Series thin film laser patterning systems. SolaryX
systems are installed at three positions along a
photovoltaic production line. The three scribe
patterning steps are P1, P2 and P3. These nextgeneration scribing systems provide industry-leading
performance to minimize dead zone and maximize
throughput.
SolaryX II P1, P2, P3 Scribe Systems
The system automatically loads, aligns the glass panel or previous scribe line with machine vision, indexes the glass
through the process area where the layers are scribed with multiple laser beams and unloads the glass after
processing is complete.
Phone: 1-978-667-9449 • Fax: 1-978-667-6109
SolaryX II – Laser Scribe Systems
Flexible design supports all
major glass sizes.
Key Features and Benefits:
• High precision, high speed air bearing motion stage
• Unique optical head design with laser ‘cartridge’
assembly with four scribing nozzles
• Variable pitch control - closed loop control of line pitch
spacing for high accuracy;
• Real time focus adjustment to maintain scribe quality
• High powered laser systems
• Small footprint conserves factory floor space
• Ability to scribe orthogonal isolation scribes
• Tri-color (red, green, and blue) stadium lighting and
advanced machine vision
• Touch screen and user friendly graphical interface
• Climate control of work envelope for optimum precision
• Stationary debris and fume extraction
• Low power consumption for improved cost of ownership
E m a i l : s a l e s @ m a . n e w p o r t . c o m • We b : n e w p o r t . c o m
3
4
SolaryX II – Laser Scribe Systems
Each scribe station features:
• High precision, high speed air bearing motion stage that is capable of speeds over 2.5 m/sec and 2.5G of acceleration used to
move the laser scribe ‘cartridge’ under the glass.
• Laser ‘cartridge’ assembly with four scribing nozzles at the required pitch setting mounted on the scribe axis to scribe the
glass. Each pass of the scribe axis under the glass can make up to 4 scribes. Individual beams can be turned off through
software control to scribe one, two, three or all four beams.
• Variable pitch feature including the addition of four motorized axis within the optical cartridge to adjust the pitch and two
downstream vision cameras and associated software to provide closed loop control of line pitch spacing.
• Real time focus adjustment to maintain scribe quality. The scribe axis is equipped with dual laser profiling sensors (on either
side of scribe nozzles) to sense the glass waviness and adjust the beam focus accordingly.
• High powered laser systems with excellent pulse to pulse stability and high repetition rate. Laser system includes a fail safe
laser safety shutter, a computer controlled laser power supply, and a re-circulating water chiller.
• Dual edge grippers (one on each side of the glass) to grip the glass along the feed direction and move it through the scribing
zone. The grippers are driven by two linear motor axes (one on each side of the glass) with linear encoders to ensure high
positional accuracy and fast index times.
• Ability to scribe ‘isolation scribes orthogonal to scribe lines along the glass edge to allow downstream process checks.
• Motorized Input and output positioners with bottom vacuum grippers to load and unload glass from the process area. These
motorized slides reduce the glass load/unload times to minimize system TAKT time.
• Roller conveyors allow the glass to move freely during loading and unloading and support the glass during processing.
• Four cameras upstream of the laser scribe area to process the previously scribed lines and position the glass accurately over
the scribe area. Each camera has a programmable intensity Tri-color (red, green, and blue) stadium lighting and thru the lens
lighting to enable processing of the widest range of glass edges, scribe lines and fiducials to maximize the contrast in the
image by optimizing the mix of colors. This dramatically increases the capability of the vision recognition.
• Machine vision prior to each glass index to compute scribe line distortion and compensate with the glass index positioning.
• Computer workstation to provide overall system control and monitor the system laser safety interlocks. Industrial PC
operating MS Windows®. Includes flat touch screen monitor and keyboard and Ethernet connector for network connection
to customer factory computer system. A rear monitor and keyboard provides for both front and back system access and
control.
• Software with a user friendly graphical interface to integrate all system operations related to scribing, log scribe station
performance, and send performance data to factory computer system.
• Motion control of all closed loop axes and all critical IO handling through a high speed servo motion controller. Integrated
air conditioning unit keeps the inside of the system at a constant temperature for accurate scribing and maintaining system
calibration.
• Stationary debris and fume extraction located above the glass in the scribe area connected to a suction filter unit to pull in
debris generated during the process.
Phone: 1-978-667-9449 • Fax: 1-978-667-6109
SolaryX II – Laser Scribe Systems
5
Factory Integration
Newport offers various options for input and output material handling conveyors, bar code writers and
bar code readers, and more. By selecting Newport, you will benefit from our industry leading lasers,
optics and precision motion products, as well as our expertise in providing and supporting complex
integrated solutions.
• Input and output glass handlers with
‘light tight’ safety gates.
• Fully integrated to system controls to
maximize UPH and ease of setup
• Barcode reader on input handler for panel
traceability
• Can easily integrate to factory control
systems
• Allows for handling of incoming and
outgoing glass while another panel is
being scribed
Unique Optical Head Design
Featuring Independent motorized pitch and focus adjustment, the optical
head travels on a high precision, high speed, air bearing motion stage. The
laser ‘cartridge’ assembly features four scribing nozzles mounted on the scribe
axis to scribe the glass. The variable pitch feature includes the addition of
four motorized axes within the optical cartridge to adjust the pitch, and two
downstream vision cameras and associated software to provide closed-loop
control of line pitch spacing.
Real-time focus adjustment maintains scribe quality when scribing tempered
glass. The scribe axis is equipped with dual laser profiling sensors (on either
side of the scribe nozzles) to sense the glass waviness and adjust the beam
focus accordingly.
E m a i l : s a l e s @ m a . n e w p o r t . c o m • We b : n e w p o r t . c o m
6
SolaryX II – Laser Scribe Systems
The Spectra-Physics® Lasers Advantage
The unique optical design of the SolaryX P-series beam delivery optics
combined with the exceptional beam quality and excellent pulse to
pulse stability of Newport Spectra-Physics lasers provides for very small
spot sizes together with excellent depth of focus. Our industry leading
beam quality means that spot size variations across the panel are far
smaller than achievable with lesser quality lasers. Unique laser cavity
designs yields very narrow pulse widths of less than 20ns ensuring that
the peak power is well above the material ablation threshold even at very
high repetition rates. These high rep rates and high peak powers allow
for fast scribing speeds and hence high throughput tools. This
combination of top quality optics and lasers results in a wide process
window and highly reliable scribe processes.
SolaryX P-series systems can incorporate any of the wide range of
Q-switched lasers from the company’s Spectra-Physics Lasers Division.
These include the thin film industries benchmark lasers, namely the
HIPPO™, Navigator™, Mosaic® and Explorer® series lasers.
Top view and 3D Profile of a 40mm wide P1 level scribe
made using a Spectra-Physics Q-switched Laser
Available Laser Sources for the SolaryX™ P-series
“Newport’s Spectra-Physics Q-Switched DPSS lasers have emerged as the technology of choice for
thin film PV customers in 24/7 manufacturing.. In fact more than 80% of the worlds thin film PV
panels are currently produced with these lasers….”
The Dead Space Advantage
The exceptional straightness of the
scribe platform at the heart of the
SolaryX design means that adjacent
scribe lines can be laid down with
incredibly high accuracy and long-term
repeatability creating panels with the
smallest possible dead zones and
highest possible efficiencies.
Phone: 1-978-667-9449 • Fax: 1-978-667-6109
SolaryX II – Laser Scribe Systems
Flexible Laser and
Optics Design
All SolaryX platforms are configurable with
different lasers and optical systems to address a
broad range of materials, panel handling, and
processing requirements. Laser plate design
supports multiple lasers, wavelengths,
attenuators and beam shaping
Hybrid Development Tool
The SolaryX II is available in a “Hybrid”
development tool configuration with both green
and infrared laser capability. This allows you to
perform full panel P1, P2, and P3 scribing on a
single tool. The tool is easily converted to a
single wavelength for full production.
The Newport Advantage
The Newport advantage means you can count on
your system being available 24/7. You can rely
on Newport’s design and manufacturing
excellence, combined with our worldwide
support and service organization to deliver the
results that you need.
Newport offers a range of process development tools for R &D
and process development.
E m a i l : s a l e s @ m a . n e w p o r t . c o m • We b : n e w p o r t . c o m
7
SolaryX II Specification Summary
Substrate
glass sizes
600 mm x 1200 mm, 1100 mm x 1200 mm, 1100 mm x 1300 mm,
1100 mm x 1400 mm
substrate handling
Inline, moving glass
thickness range
nominal 3.2 mm up to 6 mm
Laser Patterning
scribing pattern
P1, P2, P3 & hybrid combined
Optical System
cartridge and laser/optics plate
depth-of-focus
3 mm plus autofocus range
number of scribe heads
4 beams
distance between scribe lines (pitch)
automatically adjustable 7-12 mm
wavelength
1064 nm, 532 nm or 355 nm
scribing line width (typical)
35 - 90 mm
Process Control
substrate position control
yes
scribing line position control
yes
laser focus control
yes
temperature control
yes
fume extraction system
fume extract with filtration
System
working conveyor height
1000 mm or customer requirement
automatic loading/unloading
Yes
position accuracy
+/- 5 mm
accuracy of scribing line
+/- 5 mm per m
parallelism is scribing lines
+/- 10 mm
scribe speed
Up to 2500 mm/sec
maximum throughput
TAKT 20 to 60 sec per panel
®
Newport and the Newport logo are registered trademarks of Newport Corporation in Austria, Barbados, Benelux, the Peoples Republic of China, Denmark, Germany, Ireland, Japan, the Republic of
®
Korea, and Sweden. The Newport logo, and SolaryX are registered trademarks of Newport Corporation in the United States are trademarks of Newport Corporation. Make, Manage and Measure
SM
Light is a service mark of Newport Corporation. Newport Logo are registered trademarks of Newport Corporation in Argentina, Australia, Benelux, Brazil, Canada, France, Germany, Israel, Italy,
Japan, Norway, Sweden, Switzerland, Taiwan, the Peoples Republic of China, the United Kingdom, and the United States.
www.newport.com
Newport Corporation, Global Headquarters
1791 Deere Avenue, Irvine, CA 92606, USA
PHONE: 1-800-222-6440 1-949-863-3144
FAX: 1-949-253-1680
EMAIL: [email protected]
Complete listings for all global office locations are available online at www.newport.com/contact
North America
Telephone: 978-667-9449
Facsimile: 978-667-6109
[email protected]
Asia Pacific
Telephone: +65-90100974
Facsimile: +978-667-6109
[email protected]
Newport Corporation, Irvine and Santa Clara, California and Franklin, Massachusetts;
Evry and Beaune-La-Rolande, France; Stahnsdorf, Germany and Wuxi, China have
all been certified compliant with ISO 9001 by the British Standards Institution.
Europe
Telephone: +49-6151-708-0
Facsimile: +978-667-6109
[email protected]
BR-061102 (06/11)