Plasma dicing: benefits and process considerations

September 2016
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Plasma dicing: benefits and process considerations
P
lasma dicing has gained acceptance within the semiconductor industry as a
viable alternative to conventional singulation methods using saw blades or lasers, with significant adoption across a
range of applications.
The technology is based on deep reactive
ion etching (DRIE)—also known as the
“Bosch Process”—a dry plasma etch process
that has been in production use for over 20
years within the MEMS and 3D Packaging
markets.
Richard Barnett
Etch Product Mgr.
SPTS Technologies Ltd.
Newport, UK
[email protected]
orbotech.com
Etches narrow, deep trenches
DRIE, which can etch very narrow, deep
vertical trenches, can be used to etch dicing lanes from <10µm to >100µm wide on
wafer thicknesses from <50µm to full thickness to separate individual die.
Production-ready DRIE equipment for
plasma dicing is available for wafers from
100mm to 300mm.
Plasma dicing offers considerable benefits
for die singulation, with opportunities to
achieve increased throughput and die count
on the silicon area; flexibility for die layout
and design; and perhaps most important of
all—improved die quality and strength.
This plasma dicing system uses DRIE-based technology.
(Orbotech)
As such, it’s well positioned to become the
benchmark technology for fabs seeking to
increase throughputs and yields for small
or thinned fragile die.
Etching before or after grind
The plasma etch process can be carried out
before grind, where deep dicing lanes are
etched into the wafer and the die are singulated by a final backside grind operation,
or after grind, where DRIE is used to etch
through thinned wafers mounted on taped
frames.
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September 2016
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Plasma dicing (from 14)
Dicing before grinding (DBG)
In the DBG approach, die are defined by
partially etching the front side of a masked
wafer, typically to etch depths of 100µm to
200µm.
The wafer is then attached face-down to a
dicing frame, and the backside of the wafer
is ground away until the die is singulated.
Exceptional control needed
This method, although relatively straightforward, requires exceptional control of
etch-depth uniformity to ensure the subsequent grind operation does not leave die
unsingulated or cause over-grinds that result in die loss.
DBG using well-established DRIE processing has been successfully employed in volume production for many years.
Dicing after grinding (DAG)
In DAG (below), device wafers are thinned
(a), then taped onto frames (b). The die
are then singulated by etching through the
complete silicon thickness, to the tape (c).
This is a “drop-in” replacement for conventional mechanical saw processing.
(a)
(b)
(c)
DAG, however, is more challenging as the
etch continues until the tape is exposed, at
which point the insulating tape can act in
a way similar to the insulating layer when
etching slicon-on-insulator (SOI) wafers.
In the graphic above representing dicing before
grinding, image a. is patterning; b. is a front-side
partial cut; c. is grinding and d. shows the final singulation. SEM below shows DBG.
Electrical charge build-up on the insulator
tends to deflect ions into the sidewall at the
interface of the silicon and tape/insulator
and cause damage or “notching” of the silicon at the interface.
Avoid notching
Care must be taken to avoid this notching
of the die due to the potential side effects,
while preventing any damage to the tape,
which has to endure prolonged exposure to
the process after singulation begins.
As die sizes shrink, allowing more die to be
patterned onto wafers, the number of dicing lanes increases. Consequently, the dicSee next page
September 2016
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Plasma dicing (from 15)
speeds need to be reduced to prevent damaging these fragile devices.
ing time for a serial process like conventional mechanical saw or laser dicing becomes significantly longer.
Conversely, for plasma dicing, thinner wafers are quicker to etch through, which inceases throughput, while preserving the
physical integrity of the die.
Parallell process
Because the plasma etch process is a parallel process, with all dicing lanes etched
simultaneously, the throughput of plasma
dicing is largely governed by the etch rate
and wafer thickness—not by the number of
dicing lanes or die per wafer.
Also, with the industry generally driven toward thinner die, mechanical sawing and
laser dicing become more difficult and
cause decreases in throughput as feed
Increased die counts
When using a conventional dicing saw, the
lane width is determined by the width of the
saw and the various tolerances used to account for accuracy and damage limitation.
Plasma dicing lanes are not restricted in
the same way and therefore can be much
narrower than the width of a blade, freeing
valuable silicon real-estate for more die per
wafer.
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Plasma dicing (from 16)
rings and positioning of die/test groups to
make better use of the wafer area.
For smaller die—RFID chips for example
(at ~0.04mm2)—this saved real-estate
can yield a potential increase of 80 percent
more die per wafer.
A simple example, illustrated below, shows
how even for large die, where reduction
in lane width is less significant, the ability
to shift the die positions may increase the
number of die per wafer.
Increase in die per wafer
Even disregarding the possibility of reducing
the width of the dicing lanes, a significant
increase in die per wafer can be achieved
when using plasma dicing because the wafer layout is not constrained by the need to
have linear dicing paths.
Plasma dicing can offer device designers
much greater flexibility with regard to fundamental die shape/size, removing guard
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Increasing die count by using “non-linear” dicing
lanes allows more efficient use of silicon real estate.
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September 2016
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Plasma dicing (from 17)
Increased yields
In mechanical dicing, especially for small,
thin die or when using high feed speeds,
chipping at the edge of the die may be an
issue.
In laser dicing, there is also heat damage
to account for, which becomes more significant for smaller die.
Plasma dicing is non-damaging and produces die with significantly improved strength
compared to traditional methods, a valuable
attribute as form-factor roadmaps push die
thicknesses below 50µm.
Attractive for fragile devices
Plasma dicing is also attractive for fragile
devices such as MEMS, since there are no
physical forces to vibrate the wafer.
Two patented technologies, already wellestablished and proven in SOI MEMS applications, can be employed to prevent
damage to the silicon and the tape during
plasma dicing.
First, a proprietary end-pointing technology
[2] can accurately monitor the progress of
the etch front and trigger a change in recipe conditions when the tape is exposed.
“Bias Pulsing”
Patented “bias pulsing” [3] can then be
used during the final stage of die singulation to control the final stages of the etch,
preventing any lateral underetching (notching) of the die.
The graph (at left) shows how the strength
of plasma-diced die with “small” or optimized (reduced) notching is typically twice
that of a blade or blade/laser approach.
Plasma dicing with no control of
the notching, however, will severely compromise die strength.
Challenges
Introducing plasma dicing into
an existing process flow can be
less than straightforward.
This figure shows die strength comparison between singulation techniques with varying patterning methods.
The keys to improving the strength of a die
is to reduce damage at the die edges and
to minimize notching at the Si-to-tape interface.
One of the main obstacles is that
DRIE will not etch any metal layers in the dicing lanes. This can
be “designed out” for new device
layouts, but for existing products
it may be necessary to remove
the metal layers earlier in the process flow,
or use either lasers or mechanical saws to
“pre-define” the dicing lanes.
Using this method is more typically valid for
larger die, which will be less affected by the
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Plasma dicing (from 18)
obvious throughput impediments of the
definition step.
Using existing layers
Other methods for defining the dicing lane
include standard photolithography and use
of existing layers, extended to allow for
erosion of the material during etching. This
latter method can be described as maskless.
Recent work [4] shows that a significant
strength/yield increase can still be achieved
for a combination of laser or blade pre-definition and plasma dicing.
The graph (page 18) also emphasizes the
importance of plasma processing control, illustrating how plasma dicing—even defined
by photolithography—may, in fact, reduce
die strength if the process control is poor
and a large notch is allowed to form.
Plasma dicing can offer significant advantages over conventional dicing methods, but
without good process control these benefits
can be negated by undesirable damage to
the die.
Summary
Designing-in plasma dicing from the outset
of a device life cycle is perhaps the only
way to realize all the benefits that plasma
dicing can provide.
Novel approaches within current device
process flows, however, have proven that
plasma dicing can be immediately adopted and significant advantages can be realized—namely improved device quality.
Plasma dicing after grind is at the early
stages of adoption for volume production,
however, the trend toward thinner, smaller
die distinguishes it as an increasingly attractive alternative to mechanical saw or
laser solutions.
References
1. Thin Wafer Processing and Dicing Equipment Market report, Yole Développement,
(May 2016)
2. U.S. Patent No. 9,159,599, “Apparatus
for chemically etching a workpiece.”
3. U.S. Patent No. 6,187,685 , “Method and
apparatus for etching a substrate”
4. R. Barnett, D. Thomas, O. Ansell, et al.,
“Improving Device Yields and Throughput
using Plasma Dicing,” Proc. IWLPC, (2015).
An analyst’s perspective
Amandine Pizzagalli, Technology & Market Analyst from Yole Développement
comments: “Dicing technology today
is applied in numerous device applications such as logic and memory; MEMS &
power electronics devices; RFID components; and CMOS image sensors. Driven
by the rising demand for thinner wafers
and stronger die, dicing technology is
evolving and ready for innovative equipment. The promising plasma dicing approach will grow in the semiconductor
sector.
Mr. Barnett is etch product manager at SPTS,
an Orbotech company, with 20 years’ experience in the semiconductor and electronics
manufacturing industries. Prior to his current
role, he worked in product management and
as a process engineer at both Aviza and Surface Technology Systems (STS), prior to their
merger to form SPTS.
He earned a Bachelor’s degree in engineering
for material engineering and electronics at the
University of Nottingham, England.