NC Linear S_.indd

Transcription

NC Linear S_.indd

Digital Scale and DRO System
NC Linear Scale
Catalog No. E4189-539, 579
Exposed/sealed Type Linear Encoders for
Numerical Motion/Position Control System
Mitutoyo Linear Scales for Numerical Motion/
Position Control System
The Linear Scales for the Numerical Motion Control System are high-accuracy
linear measurement systems for a wide range of applications. These types
of linear scales are designed to be integrated into precision machines and
instruments including measuring machines and instruments, as well as
machine tools, optics, data equipment, industrial robots, etc..
A wide variety of specifications are available, from the high-resolution type
for ultra-precision positioning, to the long-scale type for control over a
long distance. Select your linear scale according to the size, response speed,
accuracy, or according to the specification of output signal, etc. that best suits
your application.
Two types of linear scales for the Numerical Motion Control System are
available: the AT series have the high-accuracy glass scale and the detector
head encased together in an aluminum casing for improved durability and
resistance against vibration; the ultra-portable and lighter ST series have the
scale and the detector head separately.
Disk
APPLICATIONS
• Positioning dicing saw in semiconductor
production process
• Positioning IC tip for wire-bonding
• Positioning the stage of microscope for
observation of IC mask, measurement of pattern
circuit, and quality control inspection
• High-accuracy, full closed loop control of various
machine tools
• High-speed, high-accuracy installation of
electronics in industrial robots
• Improving seek-time of disk drive system
Magnetic domain
Recording track
Optical head
Motor
Voice coil motor
Linear scale
Electronic beam
Silicon wafer
CCD camera
XY table
(linear scales built in)
Workchamber
Monitor
Vacuum pump
Linear scales
2
Index
Linear Scale selection guide ————————————————4 - 8
ST models - sealed type - —————————————————————— 4 - 5
AT models - exposed type - ————————————————————— 6 - 7
Quality information ———————————————————8 - 9
Ultra precision manufacture eleven meters underground ——————————
Products with CE marking ——————————————————————
Measurement uncertainty ———————————————————————
Traceability system ——————————————————————————
8
8
8
9
Photoelectric detecting principles ——————————— 10 - 11
Exposed type incremental Linear Scale————————— 12 - 17
ST34C —————————————————————————————12 - 13
ST322/323 ———————————————————————————14 - 15
ST422 —————————————————————————————16 - 17
Sealed type incremental Linear Scale ————————— 18 - 29
AT202 —————————————————————————————18 - 19
AT211 —————————————————————————————20 - 23
AT332 —————————————————————————————24 - 25
AT353 —————————————————————————————26 - 27
AT553 —————————————————————————————28 - 29
Pulse signal unit ———————————————————————————30 - 31
PSU-200 ————————————————————————————30 - 31
Technical Information ———————————————— 32 - 37
Signal output: ST models ———————————————————————32
Signal output: AT models ———————————————————————33
Structure and Features of the AT Series Sealed type Linear Scale ———————34
Effect of Temperature on the Scale (linear-expansion coefficient) ——————35
Handling Precautions for the Linear Scale Signal Cable———————————35
Divisional Principle of the Electrical Unit (PSU: Pulse Signal Unit) ———————35
Alarm Functions ———————————————————————————36
Test methods to Evaluate the Linear Scale ————————————————37
Explanation of Terms —————————————————————————37
Linear scale
Check Sheet to Order ST34C ——————————————— 38
Check Sheet to Order AT211 ——————————————— 39
Workpiece
Sliding table
Cutting tool
Lead frame
IC chip
Linear scale
Linear scales
3
Base
Linear Scale Selection Guide
ST models –exposed type–
Features
1 The ST Series linear scales come in three models to suit diverse
applications, from the 0.02µm high-resolution type to the 5µm
reading type for low-resolution measurements.
2 The maximum effective measurement length is 500mm (ST34C),
350mm (ST322/323) or 1000mm (ST422).
3 Since they have no protective aluminum frames, the ST Series
linear scales are smaller and lighter than the assembly types (AT
Series). These compact scales occupy a very small amount of space
and are therefore ideal for use in lightweight precision equipment
or high-speed machines.
Sectional dimension
2.8±0.1
22
18
Accuracy
Effective range L0
L0 ≤ 300mm/12"
±0.5µm
L0 ≥ 350mm/14"
±1.0µm
10mm/.4" to 500mm/20"
(Oversize up to 1000mm/40"
are available by specially
ordered.)
±3µm
50mm/2" to 350mm/14"
±3µm
50mm/2" to 350mm/14"
L0 ≤ 300mm/12"
±1µm
350mm/14"≤L0 ≤ 500mm/20"
±2µm
600mm/24"≤L0
±3µm
10mm/1.4" to 1000mm/40"
0.8±0.2
0.8±0.2
Up to 75mm (L0)
4.8 +0.2
0
1±0.2
7
22.5
19
13
ST322
• Incremental linear encoder
• Glass scale
• (8±1)x10-6/K, scale thermalexpansion coefficient
1.8
1±0.2
7
22.5
19
13
ST323
• Glass scale
1.8
10.5±0.2
7.5
1.8
24.8
Up to 350mm (L0)
6
13.5±0.2
7.5
24.8
ST422
• Glass scale
18
22
ST34C
• Glass scale
5.4±0.2
Model
4 The advance lithography technology developed in our special
laboratory constructed 11 meters below ground achieves an ideal
combination of high accuracy, high resolution and wide glass-scale
range.
5 In addition to square-wave pulse output that can be used as
position-information feedback signal in general servo-controlled
systems, the ST Series linear scales provide additional interfaces
for connection with various control systems such as digital value
output, which is ideal for inputting data to a computer.
4.8
4
System Configuration
Reflective glass scale
Connector
plug
Detector head with cable
Feedback cable*
(*not available from Mitutoyo)
Interface box
Motion
control
unit
Scale retaining springs
Standard components
PSU200
Signal cable
Feedback cable*
(*not available
from Mitutoyo)
Motion
control
unit
Resolution
Min. edge separation
Maximum response speed
Reference
page
0.02µm
0.05µm
0.1µm
4µm*
125ns to 1µs
125ns to 1µs
125ns to 1µs
150 to 15mm/s (5.9"/s to .59"/s)
360 to 45mm/s (14"/s to 1.7"/s)
720 to 90mm/s (28"/s to 3.5"/s)
1200mm/s (47"/s)**
Page 14 - 15
250ns
250ns
600mm/s (23"/s)
600mm/s (23"/s)
1200mm/s (47"/s)**
Page 16 - 17
Vpp = 2V
1µm
2µm
40µm*
250ns
250ns
1500mm/s (59"/s)
1500mm/s (59"/s)
3000mm/s (118"/s)**
Page 16 - 17
Vpp = 2V
2.5µm
5µm
100µm*
0.2µm
0.5µm
1µm
5µm
40µm*
125ns to 1µs
125ns to 1µs
125ns to 1µs
125ns to 1µs
1500 to 150mm/s (59"/s to 5.9"/s)
3600 to 450mm/s (141"/s to 17.7"/s)
5000 to 900mm/s (196"/s to 35.4"/s)
5000 to 1800mm/s (196"/s to 70.8"/s)
5000mm/s (196"/s)**
Page 18 - 19
Output signal
RS422
A
B
Vpp = 2V
A
B
RS422
A
B
A
B
RS422
A
B
A
B
RS422
A
B
Vpp = 2V
A
B
*Sinusoidal signal pitch
**Sinusoidal signal
5
Linear Scale Selection Guide
AT models –sealed type–
Features
1 The scale and detector parts are enclosed by an aluminum frame,
which ensures excellent durability and resistance to dust and
vibration.
2 Ideal for table position control in machine tools
Model
3 Signal adjustment is not necessary, making installation easy.
4 The detector head offers flexibility in installation.
5 Solid construction protects against the harmful effects of magnetic
force.
Sectional
dimension
Accuracy
Effective range L0
L0 ≤ 1500mm/60"
(3+3L0/1000)µm
L0 ≥ 1600mm/64"
(5+5L0/1000)µm
100mm/.4"
to 3000mm/120"
37.5
20
22
52
58
AT211
• Glass scale
• (8±1)x10-6/K, scale thermal-expansion coefficient
• Two choice of scale mounting
(multi-point or scale-end)
80
AT202
• Glass scale
A
B
High accuracy type*
(2+2L0/1000)µm
Standard type
(3+3L0/1000)µm
*up to L0 = 500mm/20"
100mm/4"
to 1500mm/60"
A: Double-end fixing type
B: Multi-point fixing type
37.5
80
AT332
• Absolute linear encoder
• Glass scale
• 110m/min response speed with 0.5µm resolution
• Direct connection with FANUC NC controller
L0 ≤ 1500mm/60"
(3+3L0/1000)µm
L0 ≥ 1600mm/64"
(5+5L0/1000)µm
100mm/4"
to 3000mm/120"
L0 ≤ 1500mm/60"
(3+3L0/1000)µm
L0 ≥ 1600mm/64"
(5+5L0/1000)µm
100mm/4"
to 3000mm/120"
(3+3L0/1000)µm
100mm/4"
to 1500mm/60"
37.5±0.2
23
62
AT553
• Glass scale
95.5
AT353
• Glass scale
6
Scale unit
Connector
plug
Detector head
Feedback cable*
(*not available from Mitutoyo)
Head cable
Standard components
Motion
control
unit
Resolution
Min. edge
separation
Reference
page
0.5µm
1µm
250ns
500ns
72m/min (47"/s)
72m/min (47"/s)
Page 20 - 21
0.1µm
0.2µm
0.5µm
1µm
2.5µm
5µm
125ns to 1µs
125ns to 1µs
125ns to 1µs
250ns to 1µs
500ns to 1µs
1µs
42.6 to 5.4m/min (27"/s to 3.5"/s)
84 to 10.8m/min (55"/s to 8"/s)
120 to 27m/min (78"/s to 17"/s)
120 to 54m/min (78"/s to 35"/s)
120m/min (78"/s)
120m/min (78"/s)
Page 22 - 25
0.5µm
250ns
110m/min (72"/s)
Page 26 - 27
FANAC serial interface
0.05µm
——
120m/min (78"/s)
Page 28 - 29
0.05µm
——
120m/min (70"/s)
Page 30 -31
Output signal
RS422
A
B
RS422
A
B
RS422
A
B
7
Quality Information
Ultra precision manufacture eleven meters
underground
Mitutoyo Kiyohara Plant, which is a factory exclusively for the
production of Linear Scales and other precision scales, has a
complete system for producing master scales to be used in finished
products, such as CMM, vision measuring system, profile projectors,
and measuring microscopes. To improve the accuracy of scales and
quality control technologies, the integral laboratory of Kiyohara
Plant was constructed eleven meters underground. It provides
an optimum environment (cleanliness factor: 100) for the ultraprecision manufacture and evaluation of scales. Its unique design
and construction isolate the laboratory from external vibrations and
ensure minimal variations in temperature and humidity.
Measurement accuracy
The measurement accuracy of every exposed/sealed type Linear Scale
is determined in the factory and is detailed on attached inspection
certificate.
Products with CE marking
Each model of Mitutoyo Linear Scale bears the CE mark. It indicates
that the product complies with the requirements drawn up by the
European Community for safety, health, environment and customer
protection.
8
Traceability system
Mitutoyo, a manufacturer of precision measuring instruments, offers a wide variety of measuring
machines and instruments that are in full compliance with the national standards of various countries.
They are traceable to the national standards through the physical standards, which are calibrated
by specified secondary standards owned by Mitutoyo. Our calibration laboratories are accredited to
provide calibration services in three fields of length-measurement (length-measuring laser units, gauge
blocks, and linear scales.)
Traceability System of Length Standard
Relationship between National Stanard
Provision Scheme and Calibration
Laboratory Accreditation Scheme under
JCSS
National Institute of Advanced
Industrial Science & Technology
(AIST)
AIST
633nm Iodine Stabilized
He-Ne Laser
(National (Primary) Standard)
JQA
(Designated Calibration Organization)
633nm Iodine Stabilized He-Ne Laser
(National (Sub-primary) Standard)
Overseas NMls
International
comparisons
Designated Calibration
Laboratories
once/3years
Calibration with National Primary/Sub-Primary
Standards and Issuing JCSS Calibration Certificate
once/3years
Mitutoyo
Miyazaki Plant
(Accredited Calibration
Laboratory No.0030)
633nm Stabilized
He-Ne Laser
(Secondary Standard)
(NITE)
Accreditation
Body
Accredited Calibration Laboratories
Assessment & Accreditation
with Guide25 (ISO/IEC 17025),
Proficiency Testing with Guide43
once/3years
Mitutoyo
Tsukuba Cal. Center
Laboratory No.0031)
633nm Iodine Stabilized
He-Ne Laser
once/2years
Mitutoyo
Utsunomiya Cal. Center
Laboratory No.0078)
Standard Gauge Block
Calibration of User’s Reference Standards
and Issuing JCSS Calibration Certificate
User (Laboratories, plants, etc.)
Iodine Absorption Stabilized HENe Laser as the standard for length
measurement
(at Tsukuba Calibration Center)
Mitutoyo
Kiyohara Plant
Laboratory No.0067)
633nm Stabilized
He-Ne Laser
Interferometer as the standard for
Linear Scale calibration (at Kiyohara
Plant)
Laser Length
Measuring Machine
(Working Standard)
Standard Scale
(Working Standard)
Reference
Gauge Block
(Working Standard)
Calibration of User’s Reference
Standards and Issuing JCSS
Calibration Certificate
User (Laboratories, plants, etc.)
Calibration
Equipment
(Working Standard)
Gauge Block
Laser Source
Interferometer as the standard for
Gauge Block calibration (at Miyazaki
Plant)
Standard Scale
Measuring Instruments
Japan
Singapore
Taiwan
USA
UK
The Netherlands
AIST
PSB
NML
NIST
NPL
NMi
Germany Switzerland
PTB
OFMET
Italy
Brazil
Malaysia
Thailand
Mexico
IMGC
IMMETRO
SIRIM
NIMT
CENAM
ILAC <MRA>
JCSS
JQA
EA <MRA>
APLAC <MRA>
NITE
Mitutoyo
Miyazaki
Plant
Mitutoyo
Tsukuba
Cal.Center
Mitutoyo
Kiyohara
Plant
Mitutoyo
Utsunomiya
Cal.Center
# 0030
# 0031
# 0067
# 0078
Mitutoyo
Asia
Pacific
# LA19960102-C
A2LA
CNLA
SAC
RvA
NKO
UKAS
DKD
SAS
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Mitutoyo
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(IL)
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(UK)
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geräte
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Calibration
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# : Accreditation No.
AIST :
JCSS:
JQA:
NITE:
PSB:
SAC:
NML:
CNLA:
NIST:
A2LA:
NPL:
UKAS:
NMi:
NKO:
PTB:
DKD:
National Institute of Advanced Industrial Science and Technology
Japan Calibration Service System
Japan Quality Assurance Organization
National Institute of Technology and Evaluation
Singapore Productivity and Standards Board
Singapore Accreditation Council
National Measurement Laboratory
Chinese National Laboratory Accreditation
National Institute of Standards and Technology
American Association for Laboratory Accreditation
National Physical Laboratory
United Kingdom Accreditation Service
Nederlands Meetinstituut
Nederlandse Kalibratie Organisatie
Physikalisch-Technische Bundesanstalt
Deutscher Kalibrierdienst
9
OFMET:
SAS:
IMGC:
SIT:
INMETRO:
RBC:
SIRIM:
DSM:
NIMT:
TISI:
CENAM:
EMA:
(ILAC):
(APLAC):
(EA):
(MRA):
Swiss Federal Office of Metrology
Swiss Accreditation Service
Istituto di Metrologia GUSTAVO COLONNETTI
Servizio di Taratura in Italia
Instituto Nacional de Metrologia Normalização e Qualidade Industrial
Rede Brasileira de Calibração
Standards and Industrial Research Institute of Malaysia
Department of Standards Malaysia
National Institute of Metrology Thailand
Thailand Industrial Standard Institute
Centro Nacional de Metrología
Entidad Mexican de Acreditación, a.c.
International Laboratory Accreditation Corperation
Asia-Pacific Laboratory Accreditation Corperation
European Accreditation Corperation
Mutual Recognition Agreement
Photoelectric detecting principles
Incremental glass reflective linear encoder
ST34C, ST322, ST323, ST422
Incremental glass transparent linear encoder
AT202, AT211
The coherent light emitted from the LED (point light source) is
gathered by the condenser lens and reflected on the grading face
on the main scale. After passing through the index scale gratings,
the light enters the photoelectric element to be converted to an
electrical signal. At this time, the gratings on the main scale serve as
diffraction gratings, so that a light-intensity distribution caused by
Fresnel diffraction appears on the index scale.
When the index scale moves relative to the main scale, this lightintensity distribution caused by diffraction also moves. The quantity
of light received by the photoelectric element becomes the greatest
when the luminous part of the light-intensity distribution aligns
with the transmission part of the gratings on the index scale. The
quantity of light becomes the smallest when the dark part aligns
with the transmission gratings. Therefore, the light quantity changes
in a sinusoidal manner when one scale moves continuously, where
the light-intensity distribution created by the main scale is amplified
twofold after passing through the gratings on the index scale.
When the light-intensity distribution is amplified twofold, the period
of change in light quantity becomes one-half the grating pitch on
the main scale (4µm with the ST34C model, which has an 8µ m
grating pitch). The electrical signal converted by the photoelectric
element generates a sine wave having exactly the same pitch as this
period (4µm).
Four sets of light-receiving areas are provided in the vertical and
horizontal directions to determine the direction of movement and
achieve higher resolutions. Each of these light-receiving areas can
output four-phase sine-wave signals having a phase difference of
90° (1/4 period). Each ST Series linear scale uses a preamplifier to
convert these four-phase sine-wave signals to two-phase sine-wave
signals having a phase difference of 90°, which are then converted
to two-phase square waves via an internal electrical element to be
finally output to the external device. (It is also possible to output
two-phase sine waves.)
The detector used in each AT Series linear scale consists of a light
source (LED) and a photoelectric element, which face each other
with the main scale and index scale between them. When the main
scale moves relative to the index scale, the quantity of light that is
transmitted through the gratings on the index scale varies with the
same period as the grating pitch. This variation in light intensity
is converted into electrical signals and output as two-phase sine
waves with a phase difference of 90°. The counter for linear scale
(AT115/102/111/112/181) divides these signals in order to determine
the direction of the scale movement, then digitally displays the
displacement of the scale.
Each scale has absolute origin markings at a 50mm pitch for
generation of pulse signal. The generated absolute origin signal
is used to stop or start counting, thus making is easy to restore a
machining reference or mechanical origin.
Models AT202, AT211, AT353 and AT332 are each equipped with
a dedicated preamplifier unit that converts two-phase sine waves
to two-phase square waves and outputs the square-wave signals
directly to the control unit. AT353 and AT332 are absolute scales
in which the display is never reset to zero, even when the power is
turned off.
Main scale
LED (light source)
Index scale
Condenser lens
Reference point marking
Index scale gratings
Phototransistor (receiver)
Main scale gratings
Photoelectric element
LED (light source)
10
Absolute glass transparent linear encoder
AT332, AT353, AT553
• Absolute Linear Scales
• Reinforced Alarm Functions
The AT353, AT332 and AT553 linear scales are equipped with
Mitutoyo's proprietary full-absolute detector. The absolute position
patterns drawn on the main scale reflect both the capacitance
and photoelectric detection principles, so the detector can read
the pattern information in any position. This saves the effort of
resetting the measurement origin over again each time the system
is started or upon recovery from a sudden power failure. Even if the
scale (detector) has been moved while the power supply was cut
off, just turn on the power and the detector will read the absolute
position on the scale. This design requires no backup power source,
eliminating the need for cumbersome maintenance work such as
the periodic replacement of batteries.
The absolute linear scales have two built-in detectors--a capacitance
detector and a photoelectric detector--to read the absolute patterns
on the main scale. These detectors have separate alarm functions. In
addition, the position data obtained by the two detectors are verified
against each other, so malfunctions that cannot be detected by one
detector's alarm circuit can be identified via the complementary
functions of the two detectors. There are other functions to increase
the reliability of alarm detection, such as a memory-check function
and a watchdog timer to monitor the built-in processor against
runaway action. If any of these functions should detect a scale error,
an alarm signal will be output immediately to allow the user to
identify the problem scale on the monitor of the CNC unit.
Note) The alarm-signal monitor method varies, depending on the CNC unit to be connected.
• Sufficient Environmental Resistance
In addition to an advanced absolute detection function, these
absolute linear scales are designed to offer excellent environmental
resistance equal to or better than the conventional incremental
scales. They also ensure sufficient resistance to external
electromagnetic noise, which is often a concern in systems using
capacitance detectors.
Capacitance
detector/circuit
Position
comparison
Flow of position data
Flow of alarm signal
Photoelectric
detector/circuit
Alarm
control/
judgment
Memory
Alarm (to the CNC unit)
Watchdog timer
Cycle
COA
Capacitance
sensor
ME
(Division)
Resolution
3768mm
(512)
7.36mm
58.88mm
(512)
0.115mm
0.92mm
(512)
Approx. 1.8µm
20µm
(40)
0.05µm
FI
Photoelectric
sensor
OP
3768mm
11
Exposed type incremental Linear Scale
with very fine resolution up to 0.02µm
ST34C
Features
Technical data
• 0.02µm/0.05µm/0.1µm resolution
(selectable)
• ±0.5µm/±1.0µm accuracy
• Simultaneous sinusoidal signal (2 Vpp)
and quadrature signal outputs
• with scale reference mark
• 1200mm/s max. traversing speed (for
sinusoidal signal)
• Compact design
• 0.8±0.2mm wide scale/detector gap
allowance
• Alarm LED error indication with fault
detection signal output for over speed
and sinusoidal signal anomaly* errors
*Vref≤0.5V or Vref≤2.9V for phase A/B
Reflective glass scale
Model
Length standard
ST34C
Incremental linear encoder
Reflective glas scale
(8±1)x10-6/K thermal expansion coefficient
8µm scale grating pitch
±0.5µm (L0 ≤ 300mm/12")
±1.0µm (350mm/14" ≤ L0 ≤ 500mm/20")
±2µm (over 500mm/20")
10mm/.4", 25mm/1", 50mm/2", 75mm/3", 100mm/4",
150mm/6", 200mm/8", 250mm/10", 300mm/12",
350mm/14", 400mm/16", 450mm/18", 500mm/20"
At every 50mm/2" intervals or one at midpoint of L0
(selectable) (less than 100mm/4": one at midpoint of L0)
See the table below.
Quadrature signal: See the table below.
Sinusoidal signal: 1200mm/s
0°C to 40°C
+5V±5% DC/250mA max.
Two 90° phase-shifted sinusoidal signals (signal period: 4µm)
Two 90° phase-shifted quadrature signals
Standard or reverse counting (selectable)
1m/40" or 0.5m/20" (selectable)
Accuracy (at 20°C)
Effective range* (L0)
* Oversizes up to 1000mm/40" are special order.
Scale reference point
Resolution/electric division
Minimum edge separation
Maximum traversing speed
Operating temperature
Power supply/consumption
Output signal
Counting direction
Head cable length
Detecting head
with cable
Interface box
Order No. of basic models
• 0.1µm resolution
250ns edge separation
360mm/s max. traversing speed
• ±0.5µm accuracy
(±1.0µm: over 300mm/12")
• Scale reference points at every 50mm
interval of L0 (one at midpoint of L0: up
to 75mm/3")
• Standard counting direction
• 1m/40" head cable
Order No.
579-281
579-282
579-283
579-284
579-285
579-286
579-287
579-288
579-289
579-290
579-291
579-292
579-293
Effective range L0
10mm/.4"
25mm/1"
50mm/2"
75mm/3"
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
400mm/16"
450mm/18"
500mm/20"
Quadrature signal
Twelve choices of resolution/edge separation combination are available.
Resolution (µm) 0.02
Electric division
40
Min. edge
125
separation (ns)*1
Max. traversing
150
speed (mm/s)*2
Model code
A
0.02
40
250
0.02 0.02 0.05
40
40
80
500 1000 125
0.05
80
250
0.05 0.05
80
80
500 1000
0.1
200
125
0.1
200
250
0.1
200
500
0.1
200
1000
70
30
15
360
180
90
45
720
360
180
90
B
C
D
E
F
G
H
J
K
L
M
*1 Assured within a range of -10% to +0%. *2 Approx. 90% of the designed value.
Model No. for special order
Choose your specification and complete the 16-digit model No.
Example: ST34C-0010BS-K11S-A
ST34C
Effective range L0
eg. 0010 (for 10mm/.4")
0025 (for 25mm/1")
0500 (for 500mm/20")
1000 (for 1000mm/40")
A: one at midpoint of L0
B: at every 50mm/2"
interval of L0
Accuracy (at 20°C)
S: (±0.5µm)
M: (±1.0µm)
Determined by the
effective range L0
12
Head cable length
A: 1m/40"
B: 2m/80"
Alarm function
S: alarm signal output
H: high impedance
Output signal
1: sinusoidal & quadrature
2: quadrature & reset
Counting direction
1: standard
2: reverse
Resolution & max. traversing speed
A - M: See the table above.
Dimensions
4-R
0.01/100 G
0.01/100
2.8±0.1
Head cable
(1m)
R4
M5, through 4
(x 2pcs.)
(5)
68±0.2
80
14±0.2
19
22
(9)
5
Mounting
surface
8
14.5
4
M3, depth 6
(x 2pcs.)
11
ø2 (for adjustment)
L0/2
10±0.2
2
42±0.2
50
ø22
(18.8)
Center of detector
A
13±0.2
9.5
32±0.2
R4
4
ø6
M3, depth 6 (x 2pcs.)
4
Unit: mm
Center of detector
32±0.2
36
L0
L1
0.05 A
18
0.8±0.2
21
5
(L1-L0)/2
25
M3, depth 6 (x 2pcs.)
(18.8)
21
5
22
2-ø4.5
0.8±0.2
+0.5
0
Spring B
25
35
1.5
0.4
5.4±0.2
Mounting
surface
12
Spring A
L2
18
0.05 A
4.8
+0.2
0
11 or more
Center of
detector
5.4±0.2
2 ø2 (for adjustment)
14±0.2
L2
0.4
22
(20)
11
14.5
M3, depth 6
(x 2pcs.)
Scale reference points
(every 50mm intervals)
4
(20)
L1
L0
36
32±0.2
2
1.5
35
G: Machine guide way
13±0.2
9.5
32±0.1
Center of
detector
2-ø4.5
0.01/100 G
0.01/100
A
Effective range L0
10mm/.4"
25mm/1"
50mm/2"
75mm/3"
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
400mm/16"
450mm/18"
500mm/20"
Overall length L1
30mm/1.18"
45mm/1.77"
70mm/2.76"
90mm/3.54"
140mm/5.51"
190mm/7.48"
240mm/9.45"
290mm/11.42"
340mm/13.39"
390mm/15.35"
440mm/17.32"
490mm/19.29"
540mm/21.26"
Retaining interval L2
—
—
—
—
50mm/1.97"
75mm/2.95"
100mm/3.94"
60mm/2.36"
75mm/2.95"
85mm/3.35"
100mm/3.94"
75mm/2.95"
80mm/3.15"
13
Mass
0.25kg/.55 lbs.
0.25kg/.55 lbs.
0.25kg/.55 lbs.
0.25kg/.55 lbs.
0.3kg/.66 lbs.
0.32kg/.70 lbs.
0.34kg/.75 lbs.
0.36kg/.79 lbs.
0.38kg/.84 lbs.
0.4kg/.88 lbs.
0.42kg/.92 lbs.
0.44kg/.97 lbs.
0.46kg/1.01 lbs.
Number of scale retaining spring supplied
—
—
—
—
Type A (1pc.), type B (2pcs.)
with very thin/compact detector head
ST322/323
Features
Technical data: ST322
• 1µm/2µm (ST323: 2.5µm/5µm) resolution
(switchable)
• ±3µm accuracy
• 1500mm/s max. traversing speed (ST322:
600mm/s max.)
• Ultra compact design
• 1±0.2mm wide scale/detector gap
allowance
Model
Length standard
Accuracy (at 20°C)
Effective range (L0)
Resolution
Electric division
Output signal
Detecting head with cable
Counting direction
Head cable length
ST322
±3µm
50mm/2", 100mm/4", 150mm/6", 200mm/8", 250mm/10",
300mm/12", 350mm/14"
At every 50mm/2" intervals of L0
(L0=50mm/4" model: one at midpoint)
1µm or 2µm (switchable)
40 or 20
220ns
600mm/s
(sinusoidal signal with -3dB cutoff)
(50mm/s for detecting a scale reference point signal)
0°C to 40°C
Standard/reverse counting (switchable)
1m/40"
Interface box
Technical data: ST323
Model
Length standard
Order No.: ST322
Order No.
579-601
579-602
579-603
579-604
579-605
579-606
579-607
Effective range L0
50mm/2"
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
Order No.: ST323
Order No.
579-611
579-612
579-613
579-614
579-615
579-616
579-617
Effective range L0
50mm/2"
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
Accuracy (at 20°C)
Resolution
Electric division
Output signal
Counting direction
Head cable length
ST322
±3µm
50mm/2", 100mm/4", 150mm/6", 200mm/8", 250mm/10",
300mm/12", 350mm/14"
(L0=50mm/4" model: one at midpoint)
2.5µm or 5µm (switchable)
40 or 20
220ns
1500mm/s
(sinusoidal signal with -3dB cutoff)
(50mm/s for detecting a scale reference point signal)
0°C to 40°C
Standard/reverse counting (switchable)
1m/40"
Detecting head traveling direction
Counting Direction
Standard counting (PA goes ahead)
1
8
PA
PB
Reverse counting (PB goes ahead)
PA
PB
14
(9.8)
Unit: mm
30
7
7
20
L1±1
// 0.05 B
(ST323)
A
A
0.01
0.01
// 0.02 G // 0.05 G
(ST322)
(ST323)
80
6
72±0.2
4
Head cable
Braided shield portion
(100mm), must clamp
and ground hear.
41±0.2
// 0.05 A
(ST323)
Detector
L0
// 0.02 B
// 0.03 A
4.1
8
0.5
1
10
0.01
// 0.05 G
(ST323)
Scale
10±1
1.8
B
2-ø2.2
25±0.1
12
0.01
// 0.02 G
(ST322)
22.5
B
19
13
2.5
6.5
0.8±0.1
1±0.2
53
Dimensions
5
10
ø4.5
Max. 36
Overall length L1
70mm/2.76"
120mm/4.72"
170mm/6.69"
220mm/8.66"
270mm/10.63"
320mm/12.60"
370mm/14.57"
Mass
0.24kg/.53 lbs.
0.24kg/.53 lbs.
0.24kg/.53 lbs.
0.25kg/.55 lbs.
0.25kg/.55 lbs.
0.25kg/.55 lbs.
0.25kg/.55 lbs.
15
9.8
0.5
9.8
25.5
22.3
13.8
ø3.5
Effective range L0
50mm/2"
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
14.8
16
6
3.5x6
5000mm/s maximum traversing speed
ST422
Features
Technical data
• 0.2µm/0.5µm/1µm/2µm resolution
(switchable)
• ±1µm/±2µm/±3µm accuracy
• 5000mm/s max. traversing speed
• Compact design
• 1.2±0.2mm wide scale/detector gap
allowance
• Alarm LED error indication with fault
detection signal output for over speed
and sinusoidal singal anomaly* errors
*Vref≤0.5V or Vref≤2.9V for phase A/B
Model
Length standard
ST422
±1.0µm (L0 ≤ 300mm/12")
±2.0µm (350mm/14" ≤ L0 ≤ 500mm/20")
±3.0µm (600mm/24" ≤ L0 ≤ 1000mm/40")
10mm/.4", 25mm/1", 50mm/2", 75mm/3", 100mm/4",
150mm/6", 200mm/8", 250mm/10", 300mm/12", 350mm/14",
400mm/16", 450mm/18", 500mm/20", 600mm/24",
700mm/28", 800mm/32". 900mm/36", 1000mm/40"
At every 50mm/2" intervals or one at midpoint of L0 (selectable)
(less than 100mm/4": one at midpoint of L0)
5000mm/s (sinusoidal signal with -3dB cutoff)
(Quadrature signal: see the table below.)
0°C to 40°C
1m/40"
Accuracy (at 20°C)
Output signal
Interface box
Counting direction
Head cable length
Detecting head
with cable
Quadrature signal
Order No.
Order No.
579-631
579-632
579-633
579-634
579-635
579-636
579-637
579-638
579-639
579-640
579-641
579-642
579-643
579-644
579-645
579-646
579-647
579-648
Effective range L0
10mm/.4"
25mm/1"
50mm/2"
75mm/3"
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
400mm/16"
450mm/18"
500mm/20"
600mm/24"
700mm/28"
800mm/32"
900mm/36"
1000mm/40"
Resolution (µm)
Electric division
Edge separation (ns)*1
Max. traversing speed
(mm/s)*2
5
8
125
5000
5
8
250
5000
5
8
500
3600
5
8
1000
1800
1
40
125
5000
1
40
250
3600
1
40
500
1800
1
40
1000
900
Resolution (µm)
Electric division
Edge separation (ns)*1
(mm/s)*2
0.5
80
125
3600
0.5
80
250
1800
0.5
80
500
900
0.5
80
1000
450
0.2
200
125
1500
0.2
200
250
700
0.2
200
500
300
0.2
200
1000
150
Counting Direction
When the SW1-8 of interface box is OFF.
PA
PB
Detecting head
traveling direction
When the SW1-8 of interface box is ON.
PA
PB
16
Unit: mm
4
Dimensions
Cable clamp
0.4
16
6
ø3.5
Head cable (1m)
2-M2.5,
through hole
10.5±0.2
68±0.2
80
5
7.5
4
R4
(5)
R4
Head cable
Braided shield portion (100mm),
must clamp and ground hear.
50
3.5x6
42±0.2
10
1
A
12
3.5
(24.8)
10
20
Scale reference
points (every
50mm intervals)
1.8
19
(1.2)
Head cable connector
10±1
4.6
25
2-M2.5, through hole
7.5
( 1.2 )
Head cable connector
B
4.8
L0
25
(2)
4.6
4.7
(24.8)
5.5
30
A
4.6
2-M2.5,
through hole
X
6
L1±1
3.5
1
30
(L1-L0)/2
0.7
5
13.5±0.2
4.6
20
22
5
B
25
35
2-ø4.5
0.4
1.2
L2
L2
L0
(L1-L0)/2
Scale retaining spring B
12 +0.5
0
5
21
10
Scale retaining spring A
Scale retaining spring
25
35
Effective range L0
10mm/.4"
25mm/1"
50mm/2"
75mm/3"
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
400mm/16"
450mm/18"
500mm/20"
600mm/24"
700mm/28"
800mm/32"
900mm/36"
1000mm/40"
2-ø4.5
0.4
Overall length L1
30mm/1.18"
45mm/1.77"
70mm/2.76"
90mm/3.54"
140mm/5.51"
190mm/7.48"
240mm/9.45"
290mm/11.42"
340mm/13.39"
390mm/15.35"
440mm/17.32"
490mm/19.29"
540mm/21.26"
640mm/25.20"
740mm/29.13"
840mm/33.07"
940mm/37.01"
1040mm/40.94"
(2)
5
21
5.5
L1±1
4.7
1.2
Retaining interval L2
—
—
—
—
—
—
—
—
—
—
100mm/3.94"
75mm/2.95"
80mm/3.15"
100mm/3.94"
85mm/3.35"
100mm/3.94"
90mm/3.54"
100mm/3.94"
17
Mass
175.4g/.39 lbs.
176.2g/.39 lbs.
177.5g/.39 lbs.
178.8g/.39 lbs.
180.1g/.40 lbs.
182.7g/.40 lbs.
185.3g/.41 lbs.
187.9g/.41 lbs.
190.5g/.42 lbs.
193.1g/.42 lbs.
288.8g/.64 lbs.
301.8g/.66 lbs.
314.8g/.69 lbs.
340.8g/.75 lbs.
366.8g/.81 lbs.
392.8g/.86 lbs.
418.8g/.92 lbs.
444.8g/.98 lbs.
Number of scale retaining spring supplied
—
—
—
—
—
—
—
—
—
—
Sealed type incremental Linear Scale
Suitable for feedback system of NC machine tools
AT202
Features
Technical data
• 0.5µm/1µm resolution (switchable)
• (3+3L0/1000)µm/(5+5L0/1000)µm accuracy
• Quadrature signal outputs (conforming to
RS422A)
• 72m/min max. traversing speed
• Wide selection of effective range L0 from
100mm/4" to 3000mm/120"
Scale unit
Detecting head
Signal cable
Order No.
Order No.
539-411
539-412
539-413
539-414
539-415
539-416
539-417
539-418
539-419
539-421
539-423
539-424
539-425
539-426
539-427
539-428
539-429
539-430
539-431
539-432
539-433
539-434
539-435
539-436
539-437
539-438
539-439
539-440
539-441
539-442
Effective range L0
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
400mm/16"
450mm/18"
500mm/20"
600mm/24"
700mm/28"
750mm/30"
800mm/32"
900mm/36"
1000mm/40"
1100mm/44"
1200mm/48"
1300mm/52"
1400mm/56"
1500mm/60"
1600mm/64"
1700mm/68"
1800mm/72"
2000mm/80"
2200mm/88"
2400mm/96"
2500mm/100"
2600mm/104"
2800mm/112"
3000mm/120"
Model
Length standard
Accuracy (at 20°C, L0: mm)
Vibration (IEC68-2-6)
Shock (IEC68-2-27)
Detecting head sliding force
Dust/water protection level
Output signal
Counting direction
Head cable length
Effective range
L0
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
400mm/16"
450mm/18"
500mm/20"
600mm/24"
700mm/28"
750mm/30"
800mm/32"
900mm/36"
AT202
Transparent glass scale
(3+3L0/1000)µm (L0 ≤ 1500mm/60")
(5+5L0/1000)µm (L0 ≥ 1600mm/64")
100mm/4", 150mm/6", 200mm/8", 250mm/10", 300mm/12",
350mm/14", 400mm/16", 450mm/18", 500mm/20", 600mm/24",
700mm/28", 750mm/30", 800mm/32". 900mm/36",
1000mm/40", 1100mm/44", 1200mm/48", 1300mm/52",
1400mm/56", 1500mm/60", 1600mm/64", 1700mm/68",
1800mm/72", 2000mm/80", 2200mm/88", 2400mm/96",
2500mm/100", 2600mm/104", 2800mm/112"
0.5µm/40 or 1µm/20
250ns (0.5µm resolution) or 500ns (1µm resolution
72m/min (3m/min when detecting a scale ref
≤150m/s2 (55 to 2000Hz)
≤200m/s2 (1/2Sin, 11ms)
5N or less
IP53 (scale unit)
0°C to 45°C
Standard or reverse counting (switchable)
5m/16.4feet
Travel range
L1
120mm/4.72"
170mm/6.69"
220mm/8.66"
270mm/10.63"
330mm/12.99"
380mm/14.96"
430mm/16.93"
480mm/18.90"
540mm/21.26"
650mm/25.59"
760mm/29.92"
810mm/31.89"
860mm/33.86"
960mm/37.80"
18
Mount interval
L2
248mm/9.76"
298mm/11.73"
348mm/13.70"
398mm/15.67"
458mm/18.03"
508mm/20.00"
558mm/21.97"
608mm/23.94"
668mm/26.30"
778mm/30.63"
888mm/34.96"
938mm/36.93"
988mm/38.90"
1088mm/42.83"
Overall length
L3
268mm/10.55"
318mm/12.52"
368mm/14.49"
418mm/16.46"
478mm/18.82"
528mm/20.79"
578mm/22.76"
628mm/24.72"
688mm/27.09"
798mm/31.42"
908mm/35.75"
958mm/37.72"
1008mm/39.69"
1108mm/43.62"
Mass
1.9kg/4.18 lbs.
2.0kg/4.40 lbs.
2.1kg/4.62 lbs.
2.2kg/4.84 lbs.
2.3kg/5.06 lbs.
2.3kg/5.06 lbs.
2.4kg/5.28 lbs.
2.5kg/5.50 lbs.
2.6kg/5.72 lbs.
2.9kg/6.38 lbs.
3.1kg/6.82 lbs.
3.2kg/7.04 lbs.
3.3kg/7.26 lbs.
3.6kg/7.92 lbs.
Dimensions
Unit: mm
L3
10
37.5
20
10
L0
27
10
27
7
31±0.2
7
ø17
(47.4)
2-M6x1.0 through ø9
Countersunk, depth 4.5 (both sides)
60±0.2
90
42
G: Machine guide
// 0.2 G
(16)
29
7
11.6
12.6
8
// 0.1 A
ø10.5
36
(41.2)
1.5±0.2
Spar mounting
surface
// 0.2 G
29
X
80
1.5±0.2
49.5
32
37
A
10
L2
L1
7
7
10
10
20
20
View from X direction
Detecting head
mounting surface
10
Spar mounting
surface
L4-1
L4-2
L4-3
L4-3
20
Bracket
6
8
Adjustable
28.5
Mounting
method 1
Adjustable
6
2.2
Bracket
23.5
Mounting
method 1
6
Detecting head
mounting surface
Effective range
L0
Travel range
L1
Mount interval
L2
Overall length
L3
1000mm/40"
1100mm/44"
1200mm/48"
1300mm/52"
1400mm/56"
1500mm/60"
1600mm/64"
1700mm/68"
1800mm/72"
2000mm/80"
2200mm/88"
2400mm/96"
2500mm/100"
2600mm/104"
2800mm/112"
3000mm/120"
1060mm/41.73"
1160mm/45.67"
1260mm/49.61"
1360mm/53.54"
1460mm/57.48"
1560mm/61.42"
1690mm/66.54"
1790mm/70.47"
1890mm/74.41"
2100mm/82.68"
2300mm/90.55"
2500mm/98.43"
2600mm/102.36"
2700mm/106.30"
2900mm/114.17"
3100mm/122.05"
1188mm/46.77"
1288mm/50.71"
1388mm/54.65"
1488mm/58.58"
1588mm/62.52"
1688mm/66.46"
1818mm/71.57"
1918mm/75.51"
2018mm/79.45"
2228mm/87.72"
2428mm/95.59"
2628mm/103.46"
2728mm/107.40"
2828mm/111.34"
3028mm/119.21"
3228mm/127.09"
1208mm/47.56"
1308mm/51.50"
1408mm/55.43"
1508mm/59.37"
1608mm/63.31"
1708mm/67.24"
1838mm/72.36"
1938mm/76.30"
2038mm/80.24"
2248mm/88.50"
2448mm/96.38"
2648mm/104.25"
2748mm/108.19"
2848mm/112.13"
3048mm/120.00"
3248mm/127.87"
19
Posion L4-1
594mm/23.39"
644mm/25.35"
694mm/27.32"
744mm/29.29"
794mm/31.26"
844mm/33.23"
—
—
3100mm/122.05"
—
—
1314mm/51.73"
1364mm/53.70"
1414mm/55.67"
1514mm/59.61"
1614mm/63.54"
Supporting bracket
Interval L4-2
—
—
—
—
—
—
610mm/24.02"
650mm/25.59"
670mm/26.38"
740mm/29.13"
800mm/31.50"
1300mm/51.18"
1340mm/52.76"
1400mm/55.12"
1500mm/59.06"
1600mm/62.99"
Mass
Interval L4-3
—
—
—
—
—
—
—
—
—
—
—
650mm/25.59"
670mm/26.38"
700mm/27.56"
750mm/29.53"
800mm/31.50"
4.0kg/8.80 lbs.
4.3kg/9.46 lbs.
4.5kg/9.90 lbs.
4.7kg/10.34 lbs.
4.9kg/10.78 lbs.
5.1kg/11.22 lbs.
5.4kg/11.88 lbs.
5.6kg/12.32 lbs.
5.8kg/12.76 lbs.
6.3kg/13.86 lbs.
6.7kg/14.74 lbs.
7.4kg/16.28 lbs.
7.6kg/16.72 lbs.
7.8kg/17.16 lbs.
8.2kg/18.04 lbs.
8.6kg/18.92 lbs.
Sealed type incremental Linear Scale
Suitable for feedback system of NC machine tools
AT211
Features
Technical data
• 0.1µm/0.2µm/0.5µm/1µm/2.5µm/5µm
resolution (selectable)
• (2+2L0/1000)µm/(3+3L0/1000)µm accuracy
• Two choices of mounting method for easy
installation.
Frame mounting: Ensures high resistance
to vibration (200m/s2) and shock
(250m/s2).
End mounting: Can be installed on a nonmachined surface.
• With scale reference mark
• Provides LED alarm indication for easy
diagnostics.
• Direct connection with a machine
controller via a quadrature signal output
(conforming to RS-422A).
Scale unit
Detecting head
Model
Length standard
AT211 (double-end fixing)
AT211 (multi-point fixing)
(3+3L0/1000)µm or
(2+2L0/1000)µm (available up to L0: 500mm/20")
100mm/4", 150mm/6", 200mm/8", 250mm/10", 300mm/12",
350mm/14", 400mm/16", 450mm/18", 500mm/20", 600mm/24",
700mm/28", 750mm/30", 800mm/32". 900mm/36",
1000mm/40", 1100mm/44", 1200mm/48", 1300mm/52",
1400mm/56", 1500mm/60"
At every 50mm/2" intervals or one at midpoint/left end/right
end of L0 (selectable)
Not assured
≤200m/s2 (55 to 2000Hz)
Not assured
≤250m/s2 (1/2Sin, 11ms)
5N or less
IP53 (scale unit)
Available
0°C to 45°C
0.3m/.98feet, 1m/3.2feet, 3m/9.8feet, 4m/13.1feet,
5m/16.4feet, 6m/19.6feet, 7m/22.9feet, 8m/26.2feet,
9m/29.5eet (selectable)
Vibration (IEC68-2-6)
Compressed air supply
Output signal
Counting direction
Head cable length
Signal cable
Quadrature signal
Resolution (µm)
Electric division
Minimum edge
separation (ns)*1
(m/min)*2
5
4
1000
2.5
8
500
2.5
8
1000
1.0
20
250
1.0
20
333
1.0
20
500
1.0
20
1000
120
120
120
120
120
108
54
Resolution (µm)
Electric division
Minimum edge
separation (ns)*1
(m/min)*2
0.5
40
125
0.5
40
250
0.5
40
333
0.5
40
500
0.5
40
1000
0.2
100
250
0.2
100
250
120
108
78
54
27
84
42.6
Resolution (µm)
Electric division
Minimum edge
separation (ns)*1
(m/min)*2
0.2
100
333
0.2
100
500
0.2
100
1000
0.1
200
125
0.1
200
250
0.1
200
333
0.1
200
500
0.1
200
1000
31.8
21.6
10.8
42.6
21.6
15.6
10.8
5.4
20
HOW TO ORDER AT211
• The AT211 linear scale can be customized with a choice of specifications. Please select the specifications for respective items that best
suit your application. When placing an order, specify the model number followed by an 16-digit number consisting of the corresponding
specification codes.
• If you have no specific preference for a given item, please choose the standard specification.
• Use the check sheet given below for the selection of specification codes.
Unit: mm
(Example) AT211-0500A1S-L1-AB
Scale unit
ALARM
Scale alarm
indicator (LED)
Signal cable
Head cable
56.4
50
Spec. you need
Code
Conduit-armed cable (3m)
A
Normal cable (3m)
B
C
Normal cable (5m)
D
E
Normal cable (7m)
F
Head cable
At the right end
10
10
Spec. you need
Standard (PA signal goes ahead)
Reverse (PB signal goes ahead)
MADE IN JAPAN
Effective range end
ø10.5
Normal cable
(0.3m or 1m)
ø9
34
30
Detector head
Code
1
2
4
Mounting method
Spec. you need
Remarks
Multi-point fixing Durable against vibration
Double-end fixing
Space-saving design
Coil-covered cable
(0.3m)
Lead wires
Counting direction
AT211
30
ø6.5
At the midpoint of effective range
At the left end
Code
A
B
C
D
E
F
G
H
J
K
34
At every 50mm/2" intervals
Code
1
2
3
4
Conduit-armed cable
(3m, 5m, or 7m)
Scale alarm LED
Spec. you need
Coil-covered cable (0.3m)
Normal cable (0.3m)
Normal cable (1m)
Normal cable (3m) w/o connector
Spec. you need
At every 50mm intervals
At the middle point of effective range
At the left end of effective range
At the right end of effective range
47.4
ø6.5
Code
S
H
Normal cable
(3m, 5m, or 7m)
56.4
50
Scale alarm LED
41.2
Accuracy (at 20°C)*
Spec. you need
Remarks
±0.5µm
—
±1.0µm
L0≤ 500mm only
*Depending on the effective range
41.2
Signal cable
ø6.5
47.4
45
L: 3m to 9m
Color of lead Function
0V
White
Black
0V
+5V
Brown
Red
+5V
Orange
PA
PA
Yellow
Green
PB
Blue
PB
Violet
PZ
Gray
PZ
Pink
ALM
AT211
MADE IN JAPAN
Code
A
B
Detecting
headtraveling
direction
Double-end fixing
PA
PB
PA
PB
Resolution
& maximum response speed
Multi-point fixing
Res.
0.1µm
0.2µm
Effective range
Spec. you need
100mm (4")
150mm (6")
200mm (8")
250mm (10")
300mm (12")
350mm (14")
400mm (16")
450mm (18")
500mm (20")
600mm (24")
Code
0100
0150
0200
0250
0300
0350
0400
0450
0500
0600
Spec. you need
700mm (28")
750mm (30")
800mm (32")
900mm (36")
1000mm (40")
1100mm (44")
1200mm (48")
1300mm (52")
1400mm (56")
1500mm (60")
Code
0700
0750
0800
0900
1000
1100
1200
1300
1400
1500
0.5µm
1.0µm
2.5µm
5.0µm
Spec. you need
Code
Min.edge gap Max. response speed
710mm/s
125ns
A
360mm/s
250ns
B
260mm/s
333ns
C
180mm/s
500ns
D
90mm/s
1000ns
E
1400mm/s
125ns
F
710mm/s
250ns
G
530mm/s
333ns
H
360mm/s
500ns
J
180mm/s
1000ns
K
2000mm/s
125ns
L
1800mm/s
250ns
M
1300mm/s
333ns
N
900mm/s
500ns
P
450mm/s
1000ns
Q
2000mm/s
250ns
R
2000mm/s
333ns
S
1800mm/s
500ns
T
900mm/s
1000ns
U
2000mm/s
500ns
W
2000mm/s
1000ns
X
2000mm/s
1000ns
Y
21
Head cable
without connector
ALM signal
Alarm circuit
1KΩ
Equivalent to
TC7S08 (TOSHIBA C-MOS)
ALM
HIGH
LOW
(When alarm occurs)
Conduit-armed signal cable
Coil-covered head cable
Mounting Dimensions: Double-end fixing type
Unit: mm
L3
22
A
L2-1
9
9
L4-1
1
0.2 G
L4-3
5
0.1 G
Middle
support
Scale unit
mounting surface
le)
ø5 (ho
(Fixed)
28±0.2 17.5
(Fixed)
17
35
52
21.5
10
(Fixed)
7
14
80±0.2 (3.150±.008)
94 (3.70)
L0
Countersunk, depth 6.5
Signal cable
16
(56.4)
(50)
2-M6x1.0 through ø9 countersunk,
depth 4.5 (both sides)
Coil spring
(ø9)
(50)
(30)
(34)
(41.2)
(ø10.5)
(47.4)
L1
Head cable (0.3m)
19 (.75)
Flexible metallic tube
2-ø7 through ø14 countersunk,
Scale alarm display LED
L2-2
17
0.1 G
80±0.2
0.2 G
Support C
(Fixed)
17
Middle support
1
Effective range
L0
Travel range
L1
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
400mm/16"
450mm/18"
500mm/20"
600mm/24"
700mm/28"
750mm/30"
800mm/32"
900mm/36"
1000mm/40"
1100mm/44"
1200mm/48"
1300mm/52"
1400mm/56"
1500mm/60"
120mm/4.72"
170mm/6.69"
220mm/8.66"
270mm/10.63"
330mm/12.99"
380mm/14.96"
430mm/16.93"
480mm/18.90"
540mm/21.26"
640mm/25.20"
740mm/29.13"
780mm/30.71"
840mm/33.07"
940mm/37.01"
1040mm/40.94"
1140mm/44.88"
1240mm/48.82"
1340mm/52.76"
1440mm/56.69"
1540mm/60.63"
5
15
11
2-M4x0.7, depth 5
1
0.1 A
1
19
1.5±0.2
Support B
(Fixed)
L4-2
Mount interval Mount interval Overall length
L2-1
L2-2
L3
258mm/10.16"
308mm/12.13"
358mm/14.09"
408mm/16.06"
468mm/18.43"
518mm/20.39"
568mm/22.36"
618mm/24.33"
678mm/26.69"
778mm/30.63"
878mm/34.57"
918mm/36.14"
978mm/38.50"
1078mm/42.44"
1178mm/46.38"
1278mm/50.31"
1378mm/54.25"
1478mm/58.19"
1578mm/62.13"
1678mm/66.06"
242mm/9.53"
292mm/11.50"
342mm/13.46"
392mm/15.43"
452mm/17.80"
502mm/19.76"
552mm/21.73"
602mm/23.70"
662mm/26.06"
762mm/30.00"
862mm/33.94"
902mm/35.51"
962mm/37.87"
1062mm/41.81"
1162mm/45.75"
1262mm/49.69"
1362mm/53.62"
1462mm/57.56"
1562mm/61.50"
1662mm/65.43"
276mm/10.87"
326mm/12.83"
376mm/14.80"
426mm/16.77"
486mm/19.13"
536mm/21.10"
586mm/23.07"
636mm/25.04"
696mm/27.40"
796mm/31.34"
896mm/35.28"
936mm/36.85"
996mm/39.21"
1096mm/43.15"
1196mm/47.09"
1296mm/51.02"
1396mm/54.96"
1496mm/58.90"
1596mm/62.83"
1696mm/66.77"
22
Support A
(Fixed)
ø5
L4-3
(ho
le)
Scale unit mounting surface
Supporting bracket
Position L4-1
Position L4-2
Interval L4-3
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
339mm/13.35" 331mm/13.03"
—
389mm/15.31" 381mm/15.00"
—
439mm/17.28" 431mm/16.97"
—
459mm/18.07" 451mm/17.76"
—
489mm/19.25" 481mm/18.94"
—
539mm/21.22" 531mm/20.91"
—
589mm/23.19" 581mm/22.87"
—
—
—
430mm/16.93"
—
—
460mm/18.11"
—
—
490mm/19.29"
—
—
530mm/20.87"
—
—
560mm/22.05"
Mass
1.4kg/3.08 lbs.
1.4kg/3.08 lbs.
1.5kg/3.30 lbs.
1.5kg/3.30 lbs.
1.6kg/3.52 lbs.
1.6kg/3.52 lbs.
1.7kg/3.74 lbs.
1.8kg/3.96 lbs.
1.9kg/4.18 lbs.
2.0kg/4.40 lbs.
2.1kg/4.62 lbs.
2.2kg/4.84 lbs.
2.2kg/4.84 lbs.
2.3kg/5.06 lbs.
2.4kg/5.28 lbs.
2.5kg/5.50 lbs.
2.6kg/5.72 lbs.
2.8kg/6.16 lbs.
2.9kg/6.38 lbs.
3.0kg/6.60 lbs.
Normal signal cable
Coil-covered head cable
Mounting Dimensions: Multi-point fixing type
20
A
14.3
58
25
40
0.5±0.2
19
0.1 A
100±0.2
100±0.2
100±0.2
Air supply hole (M5)
at both ends
ø5 drill
ø8.6 countersunk
(both sides), depth 6.5
Fixing screw:
Hex socket headed screw
M4x20 or longer
80±0.2
94
L0
Flexible metallic tube
(4.8)
L2
5.5
0.1 G
L2
Unit: mm
0.1 G
L3
(4.8)
46±0.2
Scale unit
mounting
surface
L1
Signal cable
(19)
(16)
Head cable (0.3m)
2-M6x1.0 through ø9 countersunk,
Coil spring
(50)
(30)
(ø9)
(34)
(41.2)
(ø10.5)
(47.4)
(56.4)
(50)
Scale alarm display LED
80±0.2
2-M4x0.7, depth 5
10
(When installing in a reversed direction)
(When installing in a regular direction)
Effective range
L0
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
400mm/16"
450mm/18"
500mm/20"
600mm/24"
700mm/28"
750mm/30"
800mm/32"
900mm/36"
1000mm/40"
1100mm/44"
1200mm/48"
1300mm/52"
1400mm/56"
1500mm/60"
Travel range
L1
120mm/4.72"
170mm/6.69"
220mm/8.66"
270mm/10.63"
330mm/12.99"
380mm/14.96"
430mm/16.93"
480mm/18.90"
540mm/21.26"
640mm/25.20"
740mm/29.13"
780mm/30.71"
840mm/33.07"
940mm/37.01"
1040mm/40.94"
1140mm/44.88"
1240mm/48.82"
1340mm/52.76"
1440mm/56.69"
1540mm/60.63"
Mount interval
L2
19.5mm/.77"
44.5mm/1.75"
19.5mm/.77"
44.5mm/1.75"
24.5mm/.96"
49.5mm/1.95"
29.5mm/1.16"
49.5mm/1.95"
29.5mm/1.16"
29.5mm/1.16"
29.5mm/1.16"
49.5mm/1.95"
29.5mm/1.16"
29.5mm/1.16"
29.5mm/1.16"
29.5mm/1.16"
29.5mm/1.16"
29.5mm/1.16"
29.5mm/1.16"
29.5mm/1.16"
Overall length
Number of
L3
mounting holes
239mm/9.41"
3
289mm/11.38"
3
339mm/13.35"
4
389mm/15.31"
4
449mm/17.68"
5
499mm/19.65"
5
549mm/21.61"
6
599mm/23.58"
6
659mm/25.94"
7
759mm/29.88"
8
859mm/33.82"
9
899mm/35.39"
9
959mm/37.76"
10
1059mm/41.69"
11
1159mm/45.63"
12
1259mm/49.57"
13
1359mm/53.50"
14
1459mm/57.44"
15
1559mm/61.38"
16
1659mm/65.31"
17
23
Mass
1.4kg/3.08 lbs.
1.4kg/3.08 lbs.
1.5kg/3.30 lbs.
1.5kg/3.30 lbs.
1.6kg/3.52 lbs.
1.6kg/3.52 lbs.
1.7kg/3.74 lbs.
1.8kg/3.96 lbs.
1.9kg/4.18 lbs.
2.0kg/4.40 lbs.
2.1kg/4.62 lbs.
2.2kg/4.84 lbs.
2.3kg/5.65 lbs.
2.4kg/5.28 lbs.
2.5kg/5.50 lbs.
2.6kg/5.72 lbs.
2.7kg/5.94 lbs.
2.8kg/6.16 lbs.
3.0kg/6.60 lbs.
3.1kg/6.82 lbs.
0.1 G
0.03/100
Sealed type absolute Linear Scale
Suitable for feedback system of high-speed NC machine tools
AT332
Features
Technical data
• Hybrid real absolute glass scale with
electrostatic capacitance/photoelectric
technology
• No origin point restoration required
• (3+3L0/1000)µm/(5+5L0/1000)µm accuracy
• Direct connection with FANUC NC
controller
• 109.8m/min max. traversing speed
100mm/4" to 3000mm/120"
Scale unit
Signal cable
Detecting head
Model
Length standard
Resolution
Vibration (55 to 2000Hz)
Shock (1/2Sin, 11ms)
Output method
Output interface
Head cable length
AT332
Capacitance/photoelectric composite absolute linear encoder
(3+3L0/1000)µm (L0 ≤ 1500mm/60")
(5+5L0/1000)µm (L0 ≥ 1600mm/64")
100mm/4", 150mm/6", 200mm/8", 250mm/10", 300mm/12",
350mm/14", 400mm/16", 450mm/18", 500mm/20", 600mm/24",
700mm/28", 750mm/30", 800mm/32". 900mm/36",
1000mm/40", 1100mm/44", 1200mm/48", 1300mm/52",
1400mm/56", 1500mm/60", 1600mm/64", 1700mm/68",
1800mm/72", 2000mm/80", 2200mm/88", 2400mm/96",
2500mm/100", 2600mm/104", 2800mm/112", 3000mm/120"
0.5µm
109.8m/min
≤150m/s2 (IEC68-2-6)
≤200m/s2 (IEC68-2-27)
5N or less
IP53 (scale unit)
0°C to 45°C
+5V+5%/-3% DC/300mA max.
Differential line driver
EIA RS-422A, compatible with the FANUC high-speed serial
interface
2m/6.5feet
Order No.
Order No.
539-501
539-502
539-503
539-504
539-505
539-506
539-507
539-508
539-509
539-511
539-513
539-514
539-515
539-516
539-517
539-518
539-519
539-520
539-521
539-522
539-523
539-524
539-525
539-526
539-527
539-528
539-529
539-530
539-531
539-532
Effective range L0
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
400mm/16"
450mm/18"
500mm/20"
600mm/24"
700mm/28"
750mm/30"
800mm/32"
900mm/36"
1000mm/40"
1100mm/44"
1200mm/48"
1300mm/52"
1400mm/56"
1500mm/60"
1600mm/64"
1700mm/68"
1800mm/72"
2000mm/80"
2200mm/88"
2400mm/96"
2500mm/100"
2600mm/104"
2800mm/112"
3000mm/120"
Output Connector Pin Assignment
8
1
9
Pin No.
1
2
3
4
5
15
Function
A phase
A phase
B phase
B phase
Z phase
I/O
O
O
O
O
O
• Output connector:
RM21WTR-15P (Manufacturer: Hirose Denki)
• Applicable plug (standard accessory):
RM21WTPK-15S (Manufacturer: Hirose Denki)
Pin No.
6
7
8
9
10
Function
Z phase
GND
GND
NC
NC
I/O
O
I
I
Scale Origin Position and Counting Direction
Pin No.
11
12
13
14
15
Function
SIN (check)
REQ
SIN (check)
+5V
+5V
I/O
I
I
I
I
I
Scale origin position
Counting direction
The serial data will increase when the
detector moves this direction.
Linear Scale
Connector
Connector
FANUC NC controller
Head cable (2m/40")
Standard accessory
24
Feedback cable
(max. 28m/91.8feet)
Ground the shield to the earth bar.
Air intake
10
27
7
11.6
60±0.2
26
Countersunk
depth 6.5
90
// 0.2 G
7
10
10
20
20
Detecting head mounting surface
Middle support
L4-2
L4-3
20
L4-3
Adjustable
28.5
6
6
Scale unit
mounting surface
8
Middle support
Mounting
method A
Scale unit
mounting surface
8
12.6
ø8
Head
cable (2m)
7
// 0.1 A
ø18
36
// 0.2 G
54
ø31
1.5±0.2
29
X
10
Unit: mm
10
31±0.3 27
7
15±0.2
49.5
80
37
A
L3
L2
L1
L0
10
37.5
20
11 (hex)
Countersunk,
depth 5
Dimensions
L4-1
Adjustable
23.5
Mounting
method B
Middle support
6
10
2.2
Detecting head mounting surface
Effective range
L0
Travel range
L1
Mount interval
L2
Overall length
L3
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
400mm/16"
450mm/18"
500mm/20"
600mm/24"
700mm/28"
750mm/30"
800mm/32"
900mm/36"
1000mm/40"
1100mm/44"
1200mm/48"
1300mm/52"
1400mm/56"
1500mm/60"
1600mm/64"
1700mm/68"
1800mm/72"
2000mm/80"
2200mm/88"
2400mm/96"
2500mm/100"
2600mm/104"
2800mm/112"
3000mm/120"
120mm/4.72"
170mm/6.69"
220mm/8.66"
270mm/10.63"
330mm/12.99"
380mm/14.96"
430mm/16.93"
480mm/18.90"
540mm/21.26"
650mm/25.59"
760mm/29.92"
810mm/31.89"
860mm/33.86"
960mm/37.80"
1060mm/41.73"
1160mm/45.67"
1260mm/49.61"
1260mm/49.61"
1460mm/57.48"
1560mm/61.42"
1690mm/66.54"
1790mm/70.47"
1890mm/74.41"
2100mm/82.68"
2300mm/90.55"
2500mm/98.43"
2600mm/102.36"
2700mm/106.30"
2900mm/114.17"
3050mm/120.07"
248mm/9.76"
298mm/11.73"
348mm/13.70"
398mm/15.67"
458mm/18.03"
508mm/20.00"
558mm/21.97"
608mm/23.94"
668mm/26.30"
778mm/30.63"
888mm/34.96"
938mm/36.93"
988mm/38.90"
1088mm/42.83"
1188mm/46.77"
1288mm/50.71"
1388mm/54.65"
1488mm/58.58"
1588mm/62.52"
1688mm/66.46"
1818mm/71.57"
1918mm/75.51"
2018mm/79.45"
2228mm/87.72"
2428mm/95.59"
2628mm/103.46"
2728mm/107.40"
2828mm/111.34"
3028mm/119.21"
3228mm/127.09"
268mm/10.55"
318mm/12.52"
368mm/14.49"
418mm/16.46"
478mm/18.82"
528mm/20.79"
578mm/22.76"
628mm/24.72"
688mm/27.09"
798mm/31.42"
908mm/35.75"
958mm/37.72"
1008mm/39.69"
1108mm/43.62"
1208mm/47.56"
1308mm/51.50"
1408mm/55.43"
1508mm/59.37"
1608mm/63.31"
1708mm/67.24"
1838mm/72.36"
1938mm/76.30"
2038mm/80.24"
2248mm/88.50"
2448mm/96.38"
2648mm/104.25"
2748mm/108.19"
2848mm/112.13"
3048mm/120.00"
3248mm/127.87"
Position L4-1
—
—
—
—
—
—
—
—
—
—
—
—
—
—
594mm/23.39"
594mm/23.39"
694mm/27.32"
744mm/29.29"
794mm/31.26"
844mm/33.23"
—
—
740mm/29.13"
—
1314mm/51.73"
1364mm/53.70"
1414mm/55.67"
1514mm/59.61"
1614mm/63.54"
25
Supporting bracket
Interval L4-2
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
610mm/24.02"
650mm/25.59"
670mm/26.38"
—
800mm/31.50"
1300mm/51.18"
1340mm/52.76"
1400mm/55.12"
1500mm/59.06"
1600mm/62.99"
Mass
Interval L4-3
—
—
—
—
—
—
—
—
—
—
—
—
—
3.5kg/7.70 lbs.
—
—
—
—
—
—
—
—
—
6.2kg/13.64 lbs.
—
650mm/25.59"
670mm/26.38"
700mm/27.56"
750mm/29.53"
800mm/31.50"
1.7kg/3.74 lbs.
1.8kg/3.96 lbs.
1.9kg/4.18 lbs.
2.0kg/4.40 lbs.
2.1kg/4.62 lbs.
2.2kg/4.84 lbs.
2.3kg/5.06 lbs.
2.4kg/5.28 lbs.
2.5kg/5.50lbs.
2.8kg/6.38 lbs.
3.0kg/6.60 lbs.
3.1kg/6.82 lbs.
3.2kg/7.04 lbs.
—
3.9kg/8.80 lbs.
4.2kg/9.24 lbs.
4.4kg/9.68 lbs.
4.6kg/10.12 lbs.
4.8kg/10.56 lbs.
5.0kg/11.00 lbs.
5.3kg/11.66 lbs.
5.5kg/12.10 lbs.
5.7kg/12.54 lbs.
—
6.6kg/14.52 lbs.
7.3kg/16.06 lbs.
7.5kg/16.50 lbs.
7.7kg/16.94 lbs.
8.1kg/17.82 lbs.
8.5kg/18.70 lbs.
with very fine resolution up to 0.05µm
AT353
Features
Technical data
technology
• (3+3L0/1000)µm/(5+5L0/1000)µm accuracy
controller
100mm/4" to 3000mm/120"
Scale unit
Detecting head
Signal cable
Model
Length standard
Resolution
Output signal
Output interface
Signal cable length
AT353
8x10-6/K thermal expansion coefficient
(3+3L0/1000)µm (L0 ≤ 1500mm/60")
(5+5L0/1000)µm (L0 ≥ 1600mm/64")
100mm/4", 150mm/6", 200mm/8", 250mm/10", 300mm/12",
350mm/14", 400mm/16", 450mm/18", 500mm/20", 600mm/24",
700mm/28", 750mm/30", 800mm/32". 900mm/36",
1000mm/40", 1100mm/44", 1200mm/48", 1300mm/52",
1400mm/56", 1500mm/60", 1600mm/64", 1700mm/68",
1800mm/72", 2000mm/80", 2200mm/88", 2400mm/96",
2500mm/100", 2600mm/104", 2800mm/112", 3000mm/120"
0.05µm
120m/min
≤150m/s2 (IEC68-2-6)
≤200m/s2 (IEC68-2-27)
5N or less
IP53 (scale unit)
0°C to 45°C
+5V+5%/-3% DC/250mA max.
Absolute position serial data
EIA RS-422A, compatible with the FANUC high-speed serial
interface
5m/16.4feet
Order No.
Order No.
539-541
539-542
539-543
539-544
539-545
539-546
539-547
539-548
539-549
539-551
539-553
539-554
539-555
539-556
539-557
539-558
539-559
539-560
539-561
539-562
539-563
539-564
539-565
539-566
539-567
539-568
539-569
539-570
539-571
539-572
Effective range L0
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
400mm/16"
450mm/18"
500mm/20"
600mm/24"
700mm/28"
750mm/30"
800mm/32"
900mm/36"
1000mm/40"
1100mm/44"
1200mm/48"
1300mm/52"
1400mm/56"
1500mm/60"
1600mm/64"
1700mm/68"
1800mm/72"
2000mm/80"
2200mm/88"
2400mm/96"
2500mm/100"
2600mm/104"
2800mm/112"
3000mm/120"
8
1
9
Pin No.
1
2
3
4
5
15
Function
0V
0V
+5V
+5V
SD
RDAD-15P-LNA (Manufacturer: Hirose Denki)
HDAB-15S (Manufacturer: Hirose Denki)
Pin No.
6
7
8
9
10
Function
_SD
REQ
_REQ
A phase (test)
B phase (test)
Pin No.
11
12
13
14
15
Function
+5V
NC
0V
NC
GND
Counting direction
Linear Scale
Connector
Connector
FANUC NC controller
Signal cable (5m/16.4feet)
Standard accessory
26
Feedback cable
(max. 28m/91.8feet)
Dimensions
Unit: mm
L3
L2-1
L2-2
(Adjustable)
ø8
(Adjustable)
(Fixed)
0.2 G
7
1.5±0.2
50.5
95.5
Detecting head
mounting surface
2-
66±0.3
15
Scale unit
mounting
surface
60±0.2
15
C1
23
L2-2
80
7
7.5
Air intake (M5)
(at both ends)
32.5
A
0.1 A
Countersunk,
depth 6.5
11.6
60±0.2
90
Head cable (5m)
(Flexible metallic tube)
L0
L1
0.2 G
G: Machine guide
Detecting head
mounting surface
2.5
11 (hex.)
Countersunk,
depth 5
7
12.6
8
(42)
41.2
36
(ø16)
ø10.5
(46.3)
1.5±0.2
(0.5)
29
X
Effective range
L0
Travel range
L1
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
400mm/16"
450mm/18"
500mm/20"
600mm/24"
700mm/28"
750mm/30"
800mm/32"
900mm/36"
1000mm/40"
1100mm/44"
1200mm/48"
1300mm/52"
1400mm/56"
1500mm/60"
1600mm/64"
1700mm/68"
1800mm/72"
2000mm/80"
2200mm/88"
2400mm/96"
2500mm/100"
2600mm/104"
2800mm/112"
3000mm/120"
120mm/4.72"
170mm/6.69"
220mm/8.66"
270mm/10.63"
330mm/12.99"
380mm/14.96"
430mm/16.93"
480mm/18.90"
540mm/21.26"
650mm/25.59"
760mm/29.92"
810mm/31.89"
860mm/33.86"
960mm/37.80"
1160mm/45.67"
1160mm/45.67"
1260mm/49.61"
1360mm/53.54"
1460mm/57.48"
1560mm/61.42"
1690mm/66.54"
1790mm/70.47"
1890mm/74.41"
2100mm/82.68"
2300mm/90.55"
2500mm/98.43"
2600mm/102.36"
2700mm/106.30"
2900mm/114.17"
3050mm/120.07"
Supporting bracket
Position L2-1
Interval L2-2
65mm/2.55"
100mm/3.93"
65mm/2.55"
150mm/5.90"
65mm/2.55"
200mm/7.87"
65mm/2.55"
250mm/9.84"
220mm/8.66"
150mm/5.90"
245mm/9.64"
175mm/6.88"
270mm/10.62"
200mm/7.87"
295mm/11.61"
225mm/8.85"
325mm/12.79"
250mm/9.84"
380mm/14.96"
300mm/11.81"
435mm/17.12"
350mm/13.77"
460mm/18.11"
375mm/14.76"
485mm/19.09"
400mm/15.74"
535mm/21.06"
450mm/17.71"
585mm/23.03"
500mm/19.68"
635mm/25.00"
275mm/10.82"
685mm/26.96"
300mm/11.81"
735mm/28.93"
325mm/12.79"
785mm/30.90"
350mm/13.77"
835mm/32.87"
375mm/14.76"
900mm/35.43"
400mm/15.74"
950mm/37.40"
425mm/16.73"
1000mm/39.37"
450mm/17.71"
1105mm/43.50"
335mm/13.18"
1205mm/47.44"
370mm/14.56"
1305mm/51.37"
400mm/15.74"
1355mm/53.34"
315mm/12.40"
1405mm/55.31"
325mm/12.79"
1505mm/59.25"
350mm/13.77"
1605mm/63.18"
375mm/14.76"
Scale unit
mounting surface
Overall length
L3
No. of bracket
Mass
230mm/9.05"
280mm/11.02"
330mm/12.99"
380mm/14.96"
440mm/17.32"
490mm/19.29"
540mm/21.25"
590mm/23.22"
650mm/25.59"
760mm/29.92"
870mm/34.25"
920mm/36.22"
970mm/38.18"
1070mm/42.12"
1170mm/46.06"
1270mm/50.00"
1370mm/53.93"
1470mm/57.87"
1570mm/61.81"
1670mm/65.74"
1800mm/70.86"
1900mm/74.80"
2000mm/78.74"
2210mm/87.00"
2410mm/94.88"
2610mm/102.75"
2710mm/106.69"
2810mm/110.62"
3010mm/118.50"
3210mm/126.37"
2
2
2
2
3
3
3
3
3
3
3
3
3
3
3
5
5
5
5
5
5
5
5
7
7
7
9
9
9
9
1.7kg/3.74 lbs.
1.8kg/3.96 lbs.
1.9kg/4.18 lbs.
2.0kg/4.40 lbs.
2.1kg/4.62 lbs.
2.2kg/4.84 lbs.
2.3kg/5.06 lbs.
2.4kg/5.28 lbs.
2.5kg/5.50lbs.
2.8kg/6.38 lbs.
3.0kg/6.60 lbs.
3.1kg/6.82 lbs.
3.2kg/7.04 lbs.
3.5kg/7.70 lbs.
3.9kg/8.80 lbs.
4.2kg/9.24 lbs.
4.4kg/9.68 lbs.
4.6kg/10.12 lbs.
4.8kg/10.56 lbs.
5.0kg/11.00 lbs.
5.3kg/11.66 lbs.
5.5kg/12.10 lbs.
5.7kg/12.54 lbs.
6.2kg/13.64 lbs.
6.6kg/14.52 lbs.
7.3kg/16.06 lbs.
7.5kg/16.50 lbs.
7.7kg/16.94 lbs.
8.1kg/17.82 lbs.
8.5kg/18.70 lbs.
27
Slim spar design with very fine resolution up to 0.05µm
AT553
Features
Technical data
technology
• (3+3L0/1000)µm accuracy
• High resistance to vibration (200m/s2) and
shock (250m/s2)
controller
100mm/4" to 1500mm/60"
Scale unit
Model
Length standard
AT553
8x10-6/K thermal expansion coefficient
(3+3L0/1000)µm
100mm/4", 150mm/6", 200mm/8", 250mm/10", 300mm/12",
350mm/14", 400mm/16", 450mm/18", 500mm/20", 600mm/24",
700mm/28", 750mm/30", 800mm/32". 900mm/36",
1000mm/40", 1100mm/44", 1200mm/48", 1300mm/52",
1400mm/56", 1500mm/60"
0.05µm
120m/min
≤150m/s2 (IEC68-2-6)
≤200m/s2 (IEC68-2-27)
5N or less
IP53 (scale unit), IP64 (interface unit)
0°C to 45°C
+5V+5%/-3% DC/270mA max.
Absolute position serial data
EIA RS-422A, compatible with the FANUC hig
5m/16.4feet
Resolution
Output signal
Output interface
Head cable length
Detecting head with signal cable
8
1
9
Order No.
Order No.
539-761
539-762
539-763
539-764
539-765
539-766
539-767
539-768
539-769
539-771
539-773
539-774
539-775
539-776
539-777
539-778
539-779
539-780
539-781
539-782
Effective range L0
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
400mm/16"
450mm/18"
500mm/20"
600mm/24"
700mm/28"
750mm/30"
800mm/32"
900mm/36"
1000mm/40"
1100mm/44"
1200mm/48"
1300mm/52"
1400mm/56"
1500mm/60"
Pin No.
1
2
3
4
5
15
D-Sub 15P
D-Sub 15S
Function
0V
0V
+5V
+5V
ST
Pin No.
6
7
8
9
10
Function
_ST
REQ
_REQ
A phase (test)
B phase (test)
Pin No.
11
12
13
14
15
Function
+5V
NC
0V
NC
GND
Counting direction
Linear Scale
Interface unit
Connector
Connector
FANUC NC controller
Head cable
(5m/16.4feet)
Standard accessory
28
Signal cable
(4m/13.1feet)
Feedback cable
(max. 28m/91.8feet)
Dimensions
Unit: mm
L3
Interval between mounting holes =100mm x (n-1)
(4.8)
23
15.5
14
L2
8.5
5
1.5
62
43
45.2±0.2
30
4
n-ø
(4.8)
1±0.2
66±0.2
22
L0
L1
Effective range
L0
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350mm/14"
400mm/16"
450mm/18"
500mm/20"
600mm/24"
700mm/28"
750mm/30"
800mm/32"
900mm/36"
1000mm/40"
1100mm/44"
1200mm/48"
1300mm/52"
1400mm/56"
1500mm/60"
31±0.2
40
2-M6, through hole
13.4
20
4.5
4.5
(41.2)
(16)
71±0.2
80
Travel range
L1
120mm/4.72"
170mm/6.69"
220mm/8.66"
270mm/10.63"
320mm/12.59"
370mm/14.56"
420mm/16.53"
470mm/18.50"
520mm/20.47"
620mm/24.40"
720mm/28.34"
770mm/30.31"
820mm/32.28"
920mm/36.22"
1020mm/40.15"
1120mm/44.09"
1220mm/48.03"
1320mm/51.96"
1420mm/55.90"
1520mm/59.84"
Mount interval
L2
12.5mm/.49"
37.5mm/1.47"
12.5mm/.49"
37.5mm/1.75"
12.5mm/.49"
37.5mm/1.47"
12.5mm/.49"
37.5mm/1.47"
12.5mm/.49"
12.5mm/.49"
12.5mm/.49"
37.5mm/1.47"
12.5mm/.49"
12.5mm/.49"
12.5mm/.49"
12.5mm/.49"
12.5mm/.49"
12.5mm/.49"
12.5mm/.49"
12.5mm/.49"
2-M6x1.0 through ø9
Countersunk, depth 4.5 (both sides)
ø6.5
ø6.5
(47)
92
84
Overall length
L3
225mm/8.85"
275mm/10.82"
325mm/12.79"
375mm/14.76"
425mm/16.73"
475mm/18.70"
525mm/20.66"
575mm/22.63"
625mm/24.60"
725mm/28.54"
825mm/32.48"
875mm/34.44"
925mm/36.41"
925mm/36.41"
1125mm/44.29"
1225mm/48.22"
1325mm/52.16"
1425mm/56.10"
1525mm/60.03"
1625mm/63.97"
29
Number of
mounting holes
3
3
4
4
5
5
6
6
7
8
9
9
10
11
12
13
14
15
16
17
Mass
1.19kg/2.61 lbs.
1.24kg/2.72 lbs.
1.29kg/2.83 lbs.
1.34kg/2.94 lbs.
1.39kg/3.05 lbs.
1.44kg/3.16 lbs.
1.49kg/3.27 lbs.
1.55kg/3.41 lbs.
1.60kg/3.52 lbs.
1.70kg/3.74 lbs.
1.80kg/3.96 lbs.
1.85kg/4.07 lbs.
1.90kg/4.18 lbs.
2.00kg/4.40 lbs.
2.11kg/4.64 lbs.
2.21kg/4.86 lbs.
2.31kg/5.08 lbs.
2.41kg/5.30 lbs.
2.51kg/5.52 lbs.
2.62kg/5.76 lbs.
Pulse signal conversion interface
PSU-200
Featrues
Technical data
• +5VDC external power supply.
• Applicable with Linear Scales with the sinusoidal
signal output.
• Quadrature signal output (conforming to EIA
standard RS422-A).
• Alarm function for detecting broken wires or
short circuits in the detector, over-speed and
fluctuation errors in the input signal from the detector.
• LED indications
Origin signal input
Alarm for power supply (voltage drop and noise)
• DIP switch functions
Direction switching
Mode switching (high impedance/alarm signal output)
Division selection (4/8/10/20/40/80/100/200)
Min. edge interval selection (1000/500/250/125/62.5ns)
Code No.
Number of axes
Number of deviation
Functions
Power supply
Consumption
Mass
539-005
1 axis
4, 8, 10, 20, 40, 80, 100 or 200 (switchable)
Division setting:
4/8/10/20/40/80/100/200
Min. edge interval setting:
1000/500/250/125/62.5ns
Direction switching
LED for alarm indication:
Broken wires and short circuits in the scale,
abnormal signal, overspeed
Alarm output mode switching:
High impedance output/alarm signal
output External alarm reset (photocoupler
input)
LED for origin detection
LED for low-level power supply voltage warning
5VDC±5% on the power terminal
200mA (except the scale)
0°C to 40°C
Approx. 620g (1.4 lbs)
Applicable Linear Scales
AT115
Vpp = 2V
A
B
Input Connector
AT102
• Connector:
D-Sub 15S
Pin No.
1, 2
3, 4
5
6
7
8
9
10 - 14
15
AT111
AT112
øA
AT181
øB
V ref = 2.5V
V p-p = 2V
See the leaflet of DRO System
(E4072) for details.
30
Signal name
0V
+5V
ØA
ØB
Vref
ØZ
AL
NC
F.GND
V p-p
V ref
GND
100
PA
PB
Phase B
PB
PZ
17
14
PZ
15
AL
7
0V
0V
0V
0V
1.2kΩ AL (anode)
AL (cathode)
Reset input
R1
2kΩ
*2
TTL
F.G
Line receiver
AM26C32: T1
R1: 560Ω
R2: 110Ω
4
5
6
2-ø5
+5V
TLP521
R2
*1
+5V
+5V
R1
R1
*1
+5V
+5V
R1
R2
19
AL
Line driver
AM26C31: T1
R1
18
Phase Z
+5V
R2
1
2
3
+V
10
Deviation
Min. edge
interval*3
4
62.5ns
125ns
250ns
500ns
1ms
62.5ns
125ns
250ns
500ns
1ms
62.5ns
125ns
250ns
500ns
1ms
62.5ns
125ns
250ns
500ns
1ms
62.5ns
125ns
250ns
500ns
1ms
62.5ns
125ns
250ns
500ns
1ms
62.5ns
125ns
250ns
500ns
1ms
62.5ns
125ns
250ns
500ns
1ms
Ry
11
20
+V
Shield
-V
When using
relay
When using
photocoupler
OUTPUT connector
Reset input: Design the connection so that the current of the alarm reset input is between 3mA
and 10mA. An alarm can be reset by supplying a voltage of 5V to 12V between the anode and
cathode terminals because a resistor (1.2kW) is provided inside the PSU200. If the voltage is grater
than 12V, add an appropriate external resistor.
10
B
Output Connector
• Connector:
MR20RM [Manufacturer: Honda Tsushin]
MR20LF [Manufacturer: Honda Tsushin]
V OH
PA
8
RS422
A
V OL
20
Pin No.
1, 2
3, 4
5
6
7
8
9
10 - 14
15
Signal name
0V
+5V
ØA
ØB
Vref
ØZ
AL
NC
F.GND
40
80
PA
100
PB
PB
td, d
V OH = 2.5V (min.)
V OL = 0.5V (max.)
td: Edge interval
d: Resolution
200
PZ
Z-phase
pulse width
(20±10mm)
PZ
190
Phase A
R1
16
175 mounting hole pitch
PA
Control device
Unit: mm
28
15
Connecting cable
PSU 200
Dimensions
7.5
Arrangement of cable connection
The Z-phase pulse width depends
on the Linear Scale connected.
(This is for AT100 series Linear Scale.)
Input signal pitch*2
4µm
8µm
120m/min
240m/min
120m/min
240m/min
120m/min
240m/min
120m/min
240m/min
60m/min
120m/min
120m/min
240m/min
120m/min
240m/min
120m/min
240m/min
60m/min
120m/min
30m/min
60m/min
120m/min
240m/min
120m/min
240m/min
96m/min
192m/min
48m/min
96m/min
24m/min
48m/min
120m/min
240m/min
96m/min
192m/min
48m/min
96m/min
24m/min
48m/min
12m/min
24m/min
96m/min
192m/min
48m/min
96m/min
24m/min
48m/min
12m/min
24m/min
6m/min
12m/min
48m/min
96m/min
24m/min
48m/min
12m/min
24m/min
6m/min
12m/min
3m/min
6m/min
38.4m/min
76.8m/min
19.2m/min
38.4m/min
9.6m/min
19.2m/min
4.8m/min
9.6m/min
2.4m/min
4.8m/min
19.2m/min
38.4m/min
9.6m/min
19.2m/min
4.8m/min
9.6m/min
2.4m/min
4.8m/min
1.2m/min
2.4m/min
20µm
600m/min
600m/min
600m/min
600m/min
300m/min
600m/min
600m/min
600m/min
300m/min
150m/min
600m/min
600m/min
480m/min
240m/min
120m/min
600m/min
480m/min
240m/min
120m/min
60m/min
480m/min
240m/min
120m/min
60m/min
30m/min
240m/min
120m/min
60m/min
30m/min
15m/min
192m/min
96m/min
48m/min
24m/min
12m/min
96m/min
48m/min
24m/min
12m/min
6m/min
* The maximum response speed may be limited depending on the response speed of the scale
itself.
31
Technical Information
Signal output: ST models
Scale output signal
• A/B-phase sinusoidal signal
Wave cycle: ST34C
ST322
ST323
ST422
D-Sub 15P
4µm
40µm
100µm
40µ
Phase A
9
Vref.= 2.5V
DC typically
Vpp= 2V
typically
Vref.= 2.5V
DC typically
Vpp= 2V
typically
Pin No.
1
2
3
4
5*
6*
7
8
Phase difference: 90° typically
Phase B
8
1
• A/B-phase quadrature signal (PA, PB, PA and PB)
Function
0V (for grounding)
0V (for grounding)
+5V (Vcc)
+5V (Vcc)
Phase A sine wave
Phase B sine wave
Vref. (Vcc/2)
PZ quadrature
15
Pin No.
9
10
11
12
13
14
15
Function
ALM (Alarm signal)
PA quadrature
PA quadrature
PB quadrature
PB quadrature
PZ quadrature
F.G.
* ST34C with quadrature/reset signal output
5: Reset input AL (anode)
6: Reset input AL (cathode)
PA
PA
+V
TLP521
PB
1.2kΩ AL (anode)
PB
AL (cathode)
λ
5
6
Ry
-V
When using
relay
Reset input
ST34C
ST322
ST323
ST422
+V
When using
photocoupler
Reset input: Design the connection so that the current of the alarm reset input is between 3mA
and 10mA. An alarm can be reset by supplying a voltage of 5V to 12V between the anode and
cathode terminals because a resistor (1.2kΩ) is provided inside the scale. If the voltage is grater
than 12V, add an appropriate external resistor.
Min. edge separation (λ) Resolution (λ/4)
125ns - 1µs
0.05µm - 0.1µm
220ns
1µm - 2µm
220ns
2.5µm - 5µm
125ns - 1µs
0.2µm - 5µm
• Scale reference signal (PZ and PZ)
D-Sub 15S
PZ
PZ
200µm±100µm
Note: Phase difference of PZ signal and PA signal (or PB signal) cannot
have influence.
I/F box
Phase A
Phase B
• A/B-phase sinusoidal
signal output circuit
Phase A and phase B
PA, PB, ALM
R1
10
R1
12
AL
Line driver
AM26C31: T1
AL
9
-
+5V
3
4
2
10Ω
0V
Vref.
µPC844
32
F.G
15
R1
2kΩ
1
+
R1: 560Ω
R2: 110Ω
R2
+5V
PA, PB, ALM
R1
R1
8
14
R1
R2
13
PZ
+5V
R2
11
Phase Z
µPC844
Applicable line
receiver (equivalent
to AM26LS32)
• Reference signal (Vref)
output circuit
Vcc/2≈2.5V
PB
PZ
10Ω
-
+
Vref. (Vcc/2≈2.5V)
• A/B-phase quadrature
signal output circuit
PA
PB
Signal output circuits
Control device
Connecting cable
PA
Shield
TTL
Line receiver
AM26C32: T1
Scale Reference Signal Output Point
Counting Direction (ST34C*)
ST34C:
At every 50mm/2" intervals or one at midpoint of L0 (less than
100mm/4": one at midpoint of L0)
ST322:
(L0 =50mm/4" model: one at midpoint)
ST323:
(L0 =50mm/4" model: one at midpoint)
ST422:
At every 50mm/2" intervals or one at midpoint of L0 (less than
100mm/4": one at midpoint of L0)
*ST322, ST323 and ST422: Refer to the respective pages.
Signal output: AT models Incremental scale type
Scale output signal
Scale Reference Signal Output Point
• A/B-phase quadrature signal (PA, PB, PA and PB)
AT202: At every 50mm/2" intervals of L0
AT211: At every 50mm/2" intervals
of one at midpoint/left end/right end of L0
D-Sub 15P
Pin No.
1
2
3
4
5
6
7
8
• Scale reference signal (PZ and PZ)
Signal output circuits
Function
0V
0V
+5V
+5V
PA quadrature
PA quadrature
PB quadrature
PB quadrature
D-Sub 15S
• Reference signal (Vref)
output circuit
Scale
PA
PA
Counting Direction
PB
PB
PZ
PZ
+5V
PA
+5V
PB
* AT211, AT332, AT353
and AT553: Refer to the respective pages.
Function
PZ quadrature
PZ quadrature
+5Ve
Not connected
0V
Not connected
F.G.
• A/B-phase sinusoidal signal
output circuit
Detecting head
traveling direction
Pin No.
9
10
11
12
13
14
15
+5V
0V
PA
0V
PB
0V
F.G
33
Control device
Connecting cable
R1 +5V
5
R2
6
R1
7
R1
R2
8
R1
R1
9
R2
10
+5V
3
R1
Line receiver
SN75ALS195: T1
4
11
1
2
13
14
R1: 560Ω
R2: 110Ω
Shield
Structure and Features of the AT Series Sealed Linear Scale
Joint Mechanism of the AT Series Detector
(Adoption of simple joint structure offering high
rigidity)
Adoption of Rubber Lip Thrust Method (Mitutoyo's
Proprietary Technology)
The thrust part (see the figure below) pushes aside water like the structure
at the bottom of a ship.
The detector head and slider (sensor) are connected by a ball-joint, as shown
in the figure. This structure eliminates error in the detector head's direction
of movement, thus ensuring accurate detection even when the directions
of the slider and detector head are offset. This assures ample degree of
freedom upon installation. The structure is very simple, but it provides high
rigidity and excellent durability.
Resonance Points on the Linear Scale
Each object has its own natural frequency as determined by the shape,
length, material, etc. The scale frame also has its natural frequency and
resonates at specific cycles. In general, the natural frequency of the machine
tool is different from the natural frequency of the scale frame, so problems
won't occur under normal cutting conditions. However, the following
measures should be taken if the natural frequencies of the machine tool
and scale agree under given conditions.
1. Increase the rigidity of the scale-mounting bracket.
2. Add an intermediate support at the center to
Scale side
move the resonance point.
3. Install the scale in a location where machine vibration
does not easily Scale sideMachine sidetransmit.
Machine side
4. Operate the machine inside the specified cutting
conditions.
Advantage of Special Waterproof Connectors
Adopting waterproof, oil-proof connectors enables the separation of the
signal cable, making installation and maintenance easy.
Signal Cable Conduit
The signal cable is enclosed in a spiral, stainless-steel conduit for protection.
The stainless cover will not rust or corrode, so the proper function of the
cable is ensured over an extended period.
Air Supply (improvement of dust/oil resistance)
The dust/oil resistance of the assembly linear scale can be improved by
supplying clean air to the scale unit. Connect a pipe to one of the screw
holes (M5) provided on both sides of the scale unit to supply air.
(Available with AT202, AT332, AT353 and AT553)
Supply air pressure: 50kPa (approx. 0.5kg/cm2)
Air-flow rate: 10 to 20Nl/min.
Adoption of Specially Formed Urethane Rubber Lip
with Reinforcing Wire
Resistance to oil and dust has been improved.
(Available with AT202, AT332 and AT353)
Recommended air equipment
1. Air equipment
2. Air filter 1
3. Air filter 2
4. Air filter 3
5. Differential
6. Regulator
7. Flow-rate
8. Pressure gage
Specifications
Nominal filtration rating 5µm
Nominal filtration rating 0.1µm, minimum oil-removal
raitio 99.9%
Nominal filtration rating 0.01µm, minimum oil-removal
ratio 99.9999%
Used for monitoring the life of the air pressure gage
filter 3
Capable of setting the pressure to 50kPa
(approx. 0.5kg/cm2)
Capable of setting the flow rate to 10 to 20NL/min
adjustment valve
Capable of confirming a pressure of 50kPa
(approx. 0.5kg/cm2)
Note: Do not set the flow rate too high, since doing so may cause the dust in the ambient air
to be sucked in.
34
Maintenance of the Dustproof Rubber
To maintain the dustproof property of the rubber and extend its life, at least
once a year apply small amounts of quality silicone grease (Shin-Etsu Silicone
G-30L) to the contacting area of the
rubber and detector head. (Maintenance
intervals vary slightly, depending on the
operating condition of the scale.)
Effect of Temperature on the Scale (linear-expansion coefficient)
pulled by the aluminum and the coefficient becomes unstable. To solve
this problem, the adjoining surface in the linear scale is affixed elastically,
allowing the linear-expansion coefficient of the frame to conform to the
coefficient of the glass unit. (A custom low-expansion glass specification is
available.)
Mitutoyo's standard linear scales have a linear-expansion coefficient of (8
±1) x 10-6/°C. With the assembly linear scales, however, the frame is made
of aluminum (linear-expansion coefficient of approx. 23x10-6/°C), while
the main scale placed inside the frame is made of glass (linear-expansion
coefficient of approx. 8x10-6/°C). Therefore, in a natural state the glass is
Handling Precautions for the Linear-Scale Signal Cable
When installing a Mitutoyo linear scale, pay attention to the following
points regarding the handling of the signal cord.
When using the cable in a fixed application
If the signal cable is fixed to the machine, etc., and its radius of curvature
does not change, set the radius of curvature to R50 or greater.
If a cable bear cannot be used due to wiring limitations, install a protective
rubber bushing, etc., at the cable-fixing point, as shown in Figure 3, to
prevent the area immediately near the fixing point from receiving sudden
bending force. (* Figure 3 doesn't apply to the AT Series.)
If the cable moves, determine the wiring route carefully so as to prevent the
cable from contacting the machine parts, etc. Avoid letting the cable rub
the machine, since it will cause the cable cover to wear.
When using the cable in a moving application
When the detector is installed to the moving component of the machine,
the cable receives repeated bending force. In this case the cable should be
wired with some allowance, by setting its radius of curvature to R100 or
greater. The moving cable should ideally be protected with a cable bear,
etc., as shown in Figure 2.
Other
The signal cable is designed to withstand repeated bending of approx. 2
million times (based on R100). If the cable will be subject to more bending
cycles, provide relay connectors to allow the moving part of the cable to
be replaced. This will facilitate maintenance. The ST Series can also be
connected to robot cables.
35
Divisional Principle of the Electrical Unit (PSU: Pulse Signal Unit)
Resistance Division Method
AD Division Method
Phase-difference signals are generated by a resistance circuit using phase-A,
phase-B and phase-A (reversed phase of A) signals. (In the circuit below, 10
signals of 0°, 18°, 36° ... 162° are generated.)
Next, these sine-wave signals are respectively converted to rectangularwave signals. (In the circuit below, The rectangular-wave signals are finally
synthesized at every other phase difference using exclusive-OR logic to
generate two-phase rectangular waves having phases A and B.)
In this method, processing uses the phase A and phase B input from the
scale and the phase-difference signal data stored in ROM corresponding to
the interpolation number. A pulse is generated to make the result constant,
and the ROM data is updated accordingly. As the scale moves, phases A
and B change and a pulse is output to conform to the change. This pulse
is output as an up/down signal. This method is ideal when the division
number is high, since a highly accurate, compact division circuit can be
realized without being affected by the characteristics of resistance and other
circuit elements.
Alarm Functions
Detection of detector open/short-circuit error
Detection of detector circuit error
Detect an open-circuit or short-circuiting with 0 V of the phase-A/B signal
lines from the linear scale, or other similar errors.
Detect an error in the incremental count or absolute count in the absolute
linear scale.
Detection of excess response speed of detector
feed (overspeed)
Detection of CPU error (detection of internal error)
When the CPU in the linear scale, counter, etc., has for some reason
stopped operating normally, it is detected as an error.
Detect an excessive feed speed of the linear scale (detector) beyond the
maximum feed speed, or other similar errors.
Note: Certain alarm functions cannot be used, depending on the product. Please check the
specific alarm functions available with each product.
The allowable range of each alarm detection varies from one product to another.
Detection of input signal error
Detect an amplitude voltage, DC voltage or phase difference of the
phase-A/B signals from the linear scale being outside each allowable range,
or other similar errors.
Alarm Detection Functions Available with Each Product
Product
name
Drop in line voltage
ST34C
ST322
ST323
ST422
AT202
AT211
AT332
AT353
AT553
AT115
AT102
AT111
AT112
AT181
PSU200
When the line voltage supplied to the linear scale, PSU, etc. (particularly a
device using a DC power supply) has dropped below the allowable range, it
is detected as an error.
Detection of momentary power failure
When a momentary power failure has occurred or otherwise the line voltage
supplied to the PSU, counter, etc. (a device using an AC power supply) has
dropped below the allowable range, it is detected as an error.
Detection of scale error
Detect an error that has occurred inside the linear scale.
36
Scal
error
Over
speed
✔
✔
✔
✔
✔
✔
✔
✔
✔
✔
✔
✔
Input
signal
error
✔
✔
✔
✔
✔
✔
✔
✔
✔
✔
✔
Scale
Open/ Detection
error shot-circuit circuit
detection error
error
✔
CPU
error
✔
✔
✔
✔
✔
✔
✔
✔
✔
✔
✔
✔
Test Methods to Evaluate the Linear Scale
Operating temperature range test
Vibration test (acceleration test)
Check for operation and signal error under the specified conditions.
Check for error at specific non-resonant frequencies using a jig (at around
10 G).
Temperature cycle (dynamic characteristic) test
Check for error in current-carrying state under the specified
conditions.
Noise test
The linear scales conform to the following standards: EMC directives
EN61326-1+A1: 1998
Vibration test (sweep test)
Check for error in the frequency range from 30 Hz to 300 Hz at a
constant G (3 G).
Package drop test
The linear scales conform to JIS Z 0200 (heavy-article drop test).
Explanation of Terms
Absolute
GP-IB
Refers to a measurement system where all position coordinates are
measured with respect to a fixed origin regardless of the coordinate value
measured immediately before.
A function that shifts the origin of the coordinate system relative to a fixed
origin. Origin offset requires the storage of a permanent origin.
A standard general-purpose interface bus used to connect a measuring
instrument to another measuring instrument or to a computer. The GPIB standard was established by the Institute of Electrical and Electronic
Engineers (IEEE) in the U.S.
• If they are GP-IB-compliant, measuring instruments by different
manufacturers can be connected to the same GP-IB system network.
• Devices with varying speeds of data transmission can be used in the same
network.
• Data can be transmitted from one device to multiple devices. Unlike
RS-232C, Centronics or BCD, data transmission between devices is not
limited to one-on-one correspondence.
Origin restoration
RS-422
Incremental
Refers to a measurement system where all displacements are measured from
a position measured immediately before.
Origin offset
A function that causes each axis to decelerate and stop exactly at a position
specific to the machine, using the limit switches installed in the machine.
A balanced interface standard. A balanced configuration has perfectly
symmetrical feed and return paths. One advantage of RS-422 is that it
ensures excellent transmission capability at a single power source of +5V.
Sequence control
Indicator accuracy
A type of control in which the respective control steps are executed in
accordance with the predetermined order.
Refers to the maximum value of (measured value) - (true value) when the
scale is fed by the maximum stroke. Since length-measuring units are not
governed by any international standard such as ISO, each manufacturer
adopts its own indicator accuracy standard. The values shown in this catalog
are measured by Mitutoyo's scale-accuracy indication method using a laser
length-measuring device.
Numerical control
A type of control in which the tool position relative to the work is given by a
corresponding numerical control command.
Binary output
Error in narrow range
Binary numbers in which each place is valued as 2 to the nth power starting
at zero (20, 21, 22, 23, and so on).
Although the specific pitch varies depending on the type of scale, the
gratings engraved in the scale usually have a 20µm pitch. "Error in narrow
range" refers to the error generated when the length of this unit pitch is
measured at resolution pitch intervals (e.g., 1µm intervals).
RS-232C
A type of serial interface used to transmit data between transmission
devices located relatively close to each other. The RS-232C standard was
established by EIA in the U.S. in 1969. It defines a communication protocol
useful mainly when connecting a PC with an external device.
Protection grade
• IP54 protection grade
Type
Line-driver output
Line-driver output is characterized by a high operating speed of several tens
to hundreds of nanoseconds and a relatively long transmission range of
several hundred meters. In the linear scale system, a differential-voltage line
driver (RS422A-compliant) is used as the interface with the NC controller.
Level
Description
BCD
Human safety and protection
against foreign matter
5: Protected against dust
Protected against harmful
dust
Protection against water
4: Splash-proof type
Exposure to splashing water
from all directions produces no
produces no harmful effect.
• IP53 protection grade
A method in which a number between 0 and 9 comprising each digit in
a decimal number is represented by a four-bit binary code. BCD is monodirectional output data using the TTL or open-collector output mode.
Type
Level
Description
37
Human safety and protection
against foreign matter
5: Protected against dust
Protected against harmful
dust
Protection against water
3: Protected against
sprinkled water
Sprinkling water from all
directions has no negative
effect on operation.
Check Sheet to Order ST34C
Example: ST34C-0150AS-E11S-B
• The ST34C linear scale can be customized with a choice of
specifications. Please select the specifications for respective items
that best suit your application. When placing an order, specify the
model number followed by an 11-digit number consisting of the
corresponding specification codes.
• If you have no specific preference for a given item, please choose
the standard specification.
• Use the check sheet given below for the selection of specification
codes.
Item
Effective range L0
Item
Specification you need
10mm/.4"
25mm/1"
50mm/2"
75mm/3"
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350m/14"
400mm/16"
450mm/18"
500mm/20"
Code
0010
0025
0050
0075
0100
0150
0200
0250
0300
0350
0400
0450
0500
At every 50mm interval
At the midpoint
Code
A
B
Item
Accuracy (at 20°C)
±0.5µm (10mm ≤ L0 ≤ 300mm
±1.0µm
Code
S
M
Item
Resolution/
max. traversing speed
0.02µm (125ns*)/150mm/s
0.02µm (250ns*)/70mm/s
0.02µm (500ns*)/30mm/s
0.02µm (1000ns*)/15mm/s
0.05µm (125ns*)/360mm/s
0.05µm (250ns*)/180mm/s
0.05µm (500ns*)/90mm/s
0.05µm (1000ns*)/45mm/s
0.1µm 125ns*)/720mm/s
0.1µm (250ns*)/360mm/s
0.1µm (500ns*)/180mm/s
0.1µm (1000ns*)/90mm/s
Code
A
B
C
D
E
F
G
H
J
K
L
M
*Edge separation assured within a range of -10% to 0%.
38
Item
Counting direction
Standard (PA goes ahead)
Reverse (PB goes ahead)
Code
1
2
Item
Output signal
Sine wave and quadrature
Quadrature and reset signal
Code
1
2
Item
Alarm output
Alarm signal
High-impedance
Code
S
H
Item
Head cable
Cable length: 1m/40"
Cable length: 0.5m/20"
Code
A
B
Check Sheet to Order AT211
Example: ST34C-0150AS-E11S-B
• The AT211 linear scale can be customized with a choice of
specifications. Please select the specifications for respective items
that best suit your application. When placing an order, specify the
model number followed by an 16-digit number consisting of the
corresponding specification codes.
• If you have no specific preference for a given item, please choose
the standard specification.
• Use the check sheet given below for the selection of specification
codes.
Item
Effective range L0
100mm/4"
150mm/6"
200mm/8"
250mm/10"
300mm/12"
350m/14"
400mm/16"
450mm/18"
500mm/20"
600mm/24"
700mm/28"
750mm/30"
800mm/32"
900mm/36"
1000mm/40"
1100mm/44"
1200mm/48"
1300mm/52"
1400mm/56"
1500mm/60"
Code
0100
0150
0200
0250
0300
0350
0400
0450
0500
0600
0700
0750
0800
0900
1000
1100
1200
1300
1400
1500
Item
Mounting method
Multi-point fixing
Double-end fixing
Code
A
B
Item
At every 50mm interval
At the midpoint
At the left end
At the right end
Code
1
2
3
4
Item
Accuracy (at 20°C)
(3+3L0/1000)µmm
(2+2L0/1000)µmm
Code
S
H
Standard (PA goes ahead)
Reverse (PB goes ahead)
Code
1
2
Item
Counting direction
Item
Resolution/
max. traversing speed
0.1µm (125ns*)/710mm/s
0.1µm (250ns*)/360mm/s
0.1µm (333ns*)/260mm/s
0.1µm (500ns*)/180mm/s
0.1µm (1000ns*)/90mm/s
0.2µm (125ns*)/1400mm/s
0.2µm (250ns*)/710mm/s
0.2µm (333ns*)/530mm/s
0.2µm (500ns*)/360mm/s
0.2µm (1000ns*)/180mm/s
0.5µm 125ns*)/2000mm/s
0.5µm (250ns*)/1800mm/s
0.5µm (333ns*)/1300mm/s
0.5µm (500ns*)/900mm/s
0.5µm (1000ns*)/450mm/s
1.0µm (250ns*)/2000mm/s
1.0µm (333ns*)/2000mm/s
1.0µm (500ns*)/1800mm/s
1.0µm (1000ns*)/900mm/s
2.5µm (500ns*)/2000mm/s
2.5µm (1000ns*)/2000mm/s
5.0µm (1000ns*)/2000mm/s
Code
A
B
C
D
E
F
G
H
J
K
L
M
N
P
Q
R
S
T
U
W
X
Y
*Edge separation assured within a range of -10% to 0%.
Item
Head cable
Coil-covered cable*: 0.3m/12"
Normal cable*: 0.3m/12"
Normal cable*: 1m/40"
Normal cable**: 3m/120"
Code
A
B
C
D
E
F
G
H
J
K
*Provided with a waterproof connector. **no connector provided.
Item
Signal cable
*Provided with a waterproof connector.
39
Conduit-armed cable*: 3m/120"
Code
A
B
C
D
E
F
247.000606 (7) AFP, Printed in Japan
Mitutoyo Corporation
20-1, Sakado 1-Chome,
Takatsu-ku, Kawasaki-shi,
Kanagawa 213-8533, Japan
Phone (044) 813-8230
Fax (044) 813-8231
http://www.mitutoyo.co.jp
Note: All information regarding our products, and in particular the illustrations, drawings, dimensional and performance data contained
in this pamphlet, as well as other technical data are to be regarded as approximate average values. We therefore reserve the right to
make changes to the corresponding designs, dimensions and weights. The stated standards, similar technical regulations, descriptions and
illustrations of the products were valid at the time of printing. In addition, the latest applicable version of our General Trading Conditions
will apply. Only quotations submitted by ourselves may be regarded as definitive.

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