SEMView - SEMTech Solutions

Transcription

SEMView - SEMTech Solutions
SEMView
An 8k SEM Active Image Control System
History of STS Imaging Systems
SEMView – Features
• Connects to all SEMs with a USB
interface
• Various scan rates allow images to
be captured from 512 to 8,192
pixels wide
• SEMView does not override
existing SEM Functionality
• Active state saving for repeated
system parameters at start-up and
imaging.
• STS (SEM To Screens) ShareView
SEMView –
8192 pixel Image vs. 640 pixel Image
Same SEM (SEMView vs. No-SEMView)
8192 x 6144 Image (4:3 Ratio)
AMRAY 1830
640 x 480 Image (4:3 Ratio)
SEMView -
8192 pixel Image vs. 640 pixel Image
(Digital Zoom) Same SEM (SEMView vs. No-SEMView)
8192 Pixels
640 Pixels
SEMView – Why 8k Imaging?
8.5” x 300 ppi = 2550 pixels
11” x 300 ppi = 3300 pixels
• For professional print graphics 300
pixels per inch (ppi) is standard
o Assuming a standard landscape paper
letter size width of 11 inches; 3,300
pixel width resolution would be
required to keep the image as sharp
as possible.
o For large scientific posters, the
maximum size for 300 ppi resolution
of an 8k image would be 26.7 inches.
o By comparison,
 A 640 pixel image would print best at
2.1 inches or less
 A 1028 pixel image would print best at
3.4 inches or less
 A 2048 pixel image would print best at
6.8 inches or less
SEMView – AMRAY SEM Hardware Upgrade
• Replaces the following boards on
the AMRAY 3000 Series:
−
−
−
−
−
−
−
PC 20 Frame Grabber
PC 21 Video
VME/CPU
Nibblenet (VME)
PC 8 Scan Generator
PC 12 (Bit 3)
PC 19
• Replaces the following boards on
the AMRAY 1800 Series:
− PC 10/10A Frame Grabber
− PC 8 Scan Generator
− PC 7 Video
SEMView – Additional Image Acquisition Features
• Up to 5 Analog Inputs
• SE, BSE, CL, others
• USB 2.0 Interface
• Active Scan Generator for
Electron Beam Control
• External Interface for X-ray
control of SEM column
• Improved Kalman
Averaging
• Multiple Scan Rates and
Frame sizes
• 4:3 and 1:1 Size Ratios
SEMView – Software Features (Toolbar)
• File saving (.jpg, .bmp, .gif, .tiff,
or .png)
• Text & Symbol Annotation
• Measurements
• Wobble, Degauss, Tilt Focus
• TV Rate, Line Scan, Spot Mode
• Pre-programmed SEM States
for Semi-Auto Operation for
repetitive tasks
SEMView Pre-programmed States
• Unlimited States can be set
• Very useful for repetitive
production parts
• Each State has a name that can
be appended and shows when
hovering the mouse
• S0 State is typically used for
Start-up conditions
• S1 State and beyond (S2 - S∞)
can be used for the imaging
of different production
parts, X-ray set up
conditions, etc.
SEMView – Software Features
Red (Scan Function Bar):
• Rapid Scan, Slow Scans, RS
“Frame” Averaging
Blue (Image Adjustment Bar):
• Contrast & Brightness
• Stigmation & Focus
• Magnification
SEMView – Software Features
Red (Tab Pane):
Software Controls for Gun,
Video, Stage, Loadlock, and IR
ChamberScope - (an STS
option)
Blue (Quick Settings):
The controls outlined in blue are
multifunction controls that
allow custom pre-set quick
selection values (green) of
common tasks that can be
saved.
...
ShareView –
SEM To Screen Collaboration
Joint Team Collaboration
• One SEM, multiple remote
viewers
SEM operator dictates
security
Remote Diagnostics
• Communicate directly with
SEMTech Solutions
SEM operator dictates
security