Apollo 300 - LOT Quantum Design

CamScan
Superior Electron Optics By Design
Apollo 300
CamScan Apollo 300 Field Emission SEM
Apollo 300, versatility without compromise;
designed by microscopists
Obducat CamScan has worked in partnership with its customers for more
than 35 years to produce outstanding solutions for Scanning Electron
Microscopists.
The world class engineering and electron optical design has ensured a
reliable and long service life. This coupled with one of the most versatile
vacuum sample chambers available ensures the CamScan SEM range
brings value for money to all users.
Variable energy optics provide excellent
Low kV performance
A low energy electron beam suffers from increased
aberrations as the electrons travel through the column. The
concept of variable energy optics allows higher electron
energies to be used for the electron beam in the column,
and minimises degradation of the beam.
Electrostatic Lens C1
Anode
Gun Alignment
Gun Stigmator Coils
Gun Alignment
6 Position Aperture Changer
Condenser Lens C2
Isolation Valve
In Column Back Scattered Detector (BSTL)
In Column SED (SETL)
Scan Coils
Stigmator Coils
Final Condenser
Scan Coils
Dynamic Focus Coils
Chamber SE Detector
Through lens detectors for
high resolution at short
working distances
(Less than 10 mm)
The Apollo 300 column is designed
to incorporate the Delphi* Through
Lens Detector assembly This provides
both Secondary and Back scattered
detectors in the column. *(Gk:Delphi
– the location for the Oracle used as
a source of information by the Ancient
Gods)
- Superior Electron Optics by Design
Helios software; one platform for all CamScan SEM’s
The Helios software incorporates an easy to use GUI which allows the operator to
choose the setup which most suits their style of operation, whether it is mouse control
or keyboard shortcuts. Appearance may be changed to include preferred tool bars
and multiple windows or a more simple layout with one window and pegged control
panels
The optional Delta pad desktop
module enables the microscope
to be operated in a more
traditional way through manual
controls. Operators quickly find
the simultaneous use of both
mouse and Delta pad control
leads to greater efficiency.
CamScan Apollo 300 Field Emission SEM
Optimised Chamber
The spacious CamScan chamber
has gained a reputation for excellent
geometry and has evolved to provide
the most effective solution for the
critical analytical tasks of today. The
superior quality of the engineering and
the position of ports make this the
first choice for demanding analytical
research.
The euccentric stage is door
mounted which allows easy sample
or sub-stage exchange. Nitrogen gas
backfill minimises water vapour and
environmental particle contamination
improving pump down time.
• Large or awkward samples can be both loaded
and moved around with minimal restriction
• Major detector systems including EDX, WDX
and EBSD are mounted on the same side of the
chamber and face the tilt axis of the stage
• Sixteen (16) ports are optimised for multiple
detector analysis and extended research
applications
Standard airlock
system
Specialist Load-lock
systems
Large swing-out door
for easy access
Large capacity stage
- Superior Electron Optics by Design
One platform - multiple signal detection
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The precision eucentric stage complements
the functional geometry of the large multiported sample chamber to fulfil the demands
of routine and research applications.
The location of the detectors for high or
variable vacuum modes gives optimal sample
information and workflow.
WDX
SEI
EDX
EDX
Sample stage
The robust sample stage is a 6 axis, true eucentric
design which is capable of millions of operations
without compromising accuracy and reliability. Choices
of motorisation and position encoders provide ideal
solutions for all applications. The stage will accept
large heavy samples without effecting eucentricity or
the ability to tilt through 90 degrees; allowing edge
observation without having to remount the sample.
Various stages may be fitted to the door to allow
experiments such as heating, cooling and tensile tests
to be carried out.
Cathodoluminescence stage
STEREO OPTICAL
MICROSCOPE
Delphi
through lens
detectors
WDX
VIEWING
WINDOW
EBSD
CAMERA
AIRLOCK
Vacuum System
• The meticulous design of the vacuum system on
the CamScan Apollo 300 ensures efficient pump
down and ultimate cleanliness:
• Careful material selection and component design
for best vacuum practice.
• Nitrogen chamber venting (eliminates influx of
water vapour).
• Turbomolecular Pump with isolation interlock.
• Foreline Trap to prevent rotary pump back
streaming.
• Large vacuum reservoir (enables Rotary Pump to
be automatically switched off to give a quiet environment).
• Optional liquid nitrogen trap.
• Ion Pumps for gun and column with automatic
isolation during sample exchange.
• Sample Load-lock fitted as standard.
• Dry backing pump options.
Nanotechnology Materials Science
PCB contacts
York stone
IC bond contact
Zinc Oxide on glass
Lithography grid
Woven cotton sample
Life Science
Site Requirements
Services:
Electrical Supply:
Single Phase:
220/240v ±10v, 50Hz, 3.5kVA
Connection should be through a 16A IPP44 Industrial Socket to
IEC/EN 6039-2. A 20A in line isolation switch should be included.
Water: Mains Water:
OR
Water Re-circulator: Whole mammalian cochlea
sample courtesy of Dr D.N.Furness, Keele University
Nitrogen:
Dry Nitrogen:
Liquid Nitrogen:
Environment:
Temperature:
Humidity:
Vibration:
Magnetic Field:
2Litres/min; temperature 15ºC ± 5°C
Minimum pressure 2bar
Heat Extraction Capacity1.5kW
Minimum Pressure 3bar.
99.99% purity regulated to 5.5 bar (80psi)
Not required for SEM
20°C ± 5°C
70° RH
< 3μm p-p for frequencies >5HzAC
< 5mG p-p (W/LaB6)
< 3mG p-p (FE)
Weight: Approximate total weight 900kg (Column 500kg approx.)
Segment of butterfly wing
The site requirements for the Scanning Electron Microscope
should be selected to ensure the minimum disturbance from
both mechanical vibration and stray magnetic fields.
Lift motors, plant machinery, heating and ventilating plant,
machine tools and electrical transport facilities (trams, railways
etc.) should be as far away as can be achieved.
A ground floor location is recommended to fulfil the vibration
specification.
Allow approximately 60 cm between rear of console and wall
Water Out
Water In
Rotary
Pump
256 cm
60 cm
Fan Box: do not restrict air flow
92 cm
Allow approx.
30 cm for EDS
detector
E.D.S.
Segment of cochlea showing the inner and outer steriociliary bundles
Sample courtesy of Dr. D.N.Furness, Keele University
127 cm
400kg approx weight
60 cm
500kg approx.
weight
74 cm
Height of Electron Gun = 180 cm
All dimensions are approximate. Scale 1 : 20
CamScan
Superior Electron Optics By Design
Obducat CamScan Limited
CamScan House, Pembroke Avenue, Waterbeach, Cambridge. CB25 9PY UK
Tel: +44 (0)1223 861 066 Fax: +44 (0)1223 861 077 [email protected]
www.camscan.com
A member of the Obducat Group
Local Distributor
LOT-Oriel GmbH & Co. KG
contact:
www.lot-oriel.com
[email protected]