MC 380H TECHNICAL INSTALLATION MANUAL

MC 380H
TECHNICAL INSTALLATION
MANUAL
CODE : A6000200N-400D
MC 380H
HIGH VACUUM LENS COATING MACHINE
TECHNICAL INSTALLATION MANUAL
GENERAL INDEX
REFERENCE
DESCRIPTION
INSTALLATION / GENERAL
CONNECTIONS
- PREPARATION PROCEDURE FOR THE INSTALLATION
- LAYOUT
- POWER DISTRIBUTOR (WIRING DIAGRAM)
- GROUND TEST DIAGRAM
MC 380H
TECHNICAL DATA:
- H.V. BOX COATER
- GAS TECHNICAL DATA
BOX COATER SYSTEM
MC 380H / MC 380 KIT
PREPARATION PROCEDURE FOR THE
INSTALLATION
Water circuit connections
For the tap water supply provide for a pipe line with 2 taps of ¾”G [(3/4” fpt USA) — female thread)] in order to feed:
•
Water deionizer and T10
•
Box coater.
The water discharges coming from different components are as follows (5 pipe lines):
a)
b)
c)
no. 3 water pipe lines from the cleaning system; 2 of them for water exhaust with a PVC flexible hose (int. dia.
25 mm/ext. dia. 32 mm); 1 of them for detergent exhaust, still made of PVC but with different diameters (int.
dia. 16 mm/ext. dia. 22 mm).
No. 1 pipe line from the deionizer with a PVC flexible hose (int. dia. 16 mm/ext. dia. 22 mm).
No. 1 pipe line from the box coater with a PVC flexible hose (int. dia. 25 mm/ext. dia. 32 mm).
IMPORTANT:the main discharge must be close to the floor (at a distance of max. 300 mm) in order to allow a
better drainage coming from the different units.
The requested minimal dimension is a pipe with a 3”G internal diameter.
Modem connection
Provide for a direct phone line (that is by-passing your eventual switchboard).
Electrical wiring connection
See drawing regarding “Power Distributor”.
Compressed air connection
For the compressed air line you must provide for a plastic hose (int. dia. 8 mm/est. dia. 10 mm).
This will be connected to the “COMPRESSED AIR DRYING UNIT” which will feed the “BOX COATER” and the
“IONIZED AIR SYSTEM”.
Plant dimensions
Please verify that the dimensions of your entry door as well as of your working area are consistent with the
dimensions indicated on our suggested lay out and on the technical data sheet named “Dimensions of SATISLOH
MC 380H”.
Chiller water circuit connection (on request)
For city water supply you have to provide for a line with ¾”G female thread.
REMARKS: for the above mentioned connections please refer to the standard lay out as per our drawing no.
B6000200N-820L or to the personalized lay out requested by the customer.
Technical details are subject to change without prior notice
FILE: 380H.DOC
REV. A-0305
SATIS BOX COATER SYSTEM
SATIS MC 380H / MC380 KIT
PREPARAZIONE AREA PER L’INSTALLAZIONE
Collegamenti circuito acqua
Per l’erogazione dell’acqua di rete dovete predisporre una linea con 2 rubinetti da ¾”G femmina, di cui uno
destinato all’unità di lavaggio (deionizzatore e T10) e l’altro all’impianto di deposizione.
Gli scarichi dell’acqua provenienti dagli utilizzi sono 5, così suddivisi:
a)
b)
c)
no. 3 linee provenienti dall’unità di lavaggio, due delle quali per lo scarico dell’acqua, con un tubo flessibile in
PVC (diam. int. 25 mm/est. 32 mm) e l’altro per lo scarico dei detergenti, con lo stesso tipo di tubo, ma con
diametri diversi (int. 16 mm/est. 22 mm).
No. 1 linea proveniente dal deionizzatore, con un tubo flessibile in PVC (diam. int. 16 mm/est. 22 mm).
No. 1 linea proveniente dall’impianto di deposizione, con un tubo flessibile in PVC (diam. int. 25 mm/est. 32
mm).
IMPORTANTE:lo scarico generale che dovete installare deve essere posto vicino al pavimento (ad una distanza di
max. 300 mm) in modo tale da permettere un miglior drenaggio delle macchine.
La dimensione minima richiesta è un tubo avente il diametro interno di 3”G.
Collegamento modem
Preghiamo predisporre una linea telefonica diretta (vale a dire senza passare dal Vs. eventuale centralino).
Collegamento circuito elettrico
Vedi disegno “Power Distributor”.
Collegamento aria compressa
Predisporre una linea di aria compressa con un raccordo per tubo in plastica del diam. int. di 8 mm ed est. di 10
mm.
Questa linea sarà collegata al “COMPRESSED AIR DRYING UNIT” che, a sua volta, alimenterà l’impianto MC380H
(“BOX COATER” e “IONIZED AIR SYSTEM”).
Dimensioni impianto
Preghiamo verificare che le dimensioni della Vs. porta d’ingresso nonché dell’area di lavoro siano compatibili con le
dimensioni indicate sul lay out da noi consigliato e sul foglio informativo chiamato “Dimensioni SATISLOH MC
380H”.
Collegamento circuito acqua del “chiller” (su richiesta)
Per l’erogazione dell’acqua di rete dovete predisporre una linea con 1 rubinetto da ¾”G femmina.
N.B.:
per i punti di collegamento sopraccitati fare riferimento al lay out standard di cui al dis. B6000200N-820L
oppure al lay out personalizzato richiesto dal cliente.
I dati tecnici sono soggetti a variazioni senza preavviso
FILE: 380H.DOC
REV. A-0305
Satisloh AG
Neuhofstrasse 12
CH-6340 Baar
Phone +41 (0)41 766 16 16
Fax
+41 (0)41 766 16 10
www.satisloh.com
[email protected]
Summary of Installation requirements for MC-380-H
Electrical
Connection*
Equipment
ERC 504
Air compressor
3x400 V 50 or 60 Hz
15 kVA;
average cosφ = 0,86
35 A Fuse or breaker
3x400 V 50 Hz
3x460 V 60 Hz
8,9 kVA
7,3 kVA Typ; cosφ =0.78
15A Fuse or breaker 400 V
18A Fuse or breaker 460 V
3x400 V 50 Hz
3x460 V 60 Hz
8,8 kVA; typ. cosφ = 0.8
25 A Fuse or breaker
3x400V 50 or 60Hz
3kW
6A
3x400V 50 or 60Hz
7.5kW
16A
230V 50 or 60Hz
120W
1A
230V 50 or 60Hz
0.6kW
4A
230V 50 or 60Hz
2kW
10A
230V 50 or 60Hz
3kW
16A
230V 50 or 60Hz
0.6kW
4A
3x400V 50Hz
5.2Kw
9.5A
3x400V 50Hz
8kW
17,7A
3x400V 50 or 60Hz
1.5kW
4A
230V 50 or 60Hz
0.6kW
2,6A
230V 50 or 60Hz
0.35kW
2A
3x400V 50 or 60Hz
4kW
10A
SPL 012
Air Drying unit
230V 50Hz
0.25kW
2A
MC-380-H
Box coater
CC-10-S
Cascade cooler
CC-5-S
Cascade cooler
T-10-Ecoline-2
Cleaning unit
RWH 40
Rinsing water
heater
SAT 100
Projector
CV 400
Oven
CV 400D
Oven
ES 26
Ionized air
FB 260
Flow box
GCC 9
Chiller
GCC 15/T
Chiller tropic
SA 20
Sandblasting
SW12 AR
Lens ring cleanig
CF 90
Suction Hood
Gas
Compressed
Air
Water
Air
exhaust
Comment
1 tank O2
1 tank Ar
inlet tube O.D. 10
mm
inlet tube 1/2" G male
outlet tube 1/2" G male
65 m3/h
rotary
pump
outlet 1 tube
O.D. 40 mm
behind the plant
_
_
included in the plant
_
_
_
included in the plant
_
_
_
inlet tube 1/2" G female
outlet to see T.I.M.
city water 225 L/h
300 m3/h
_
_
inlet tube 1/2" G male
outlet tube 1/2" G male
_
_
_
_
_
_
_
_
_
_
_
_
_
_
inlet tube O.D. 10
mm
_
_
_
_
_
_
_
_
inlet tube 1/2" G male
4000
m3/h
_
_
inlet tube 1/2" G male
6000
m3/h
_
_
_
_
_
_
_
_
_
inlet tube O.D. 12
mm
inlet tube 1/2" G male
_
_
inlet tube I.D. 16
mm
condensed water drain
_
_
inlet tube I.D. 16
mm outlet tbe
O.D. 10 mm for
plant
condensed water drain
_
outlet 1 tube
O.D. 100 mm
behind the plant
Notes:
For other technical details see the T.I.M. (Technical Installation Manual)
*: For all other voltage than 400 V and 230V or 60 Hz, if not specified, refer to T.I.M. (Technical Installation Manual).
Besides all the power supply cables must have PE (yellow – green ground) wire, neutral wire couldn’t be necessary
in some application please refer to T. I. M.
Data sheet
Technical details are subject to change without prior notice
Rev.B-943
MC380-H Summary of installation requirements (B943).doc
Appendix A – Suggested earth system and earth leakage breaker
In order to have the optimal operation of the electronic equipment, Satisloh
MC260/350/360/360R/380/380R/380H/380Kit plants must be grounded to an earth system with resistance ≤ 3Ω and
sized according to the plant power supply line.
To reduce high frequency electrical noise to the control equipment Satisloh suggest realizing an earth system complying with
general rules and with the following preferred implementations, see Fig 1. This configuration can be used with several plants
installed on the same room as long as each connection length to the rods is ≤ 20 m.
Fig. 1
VIETATA LA RIPRODUZIONE. SENZA AUTORIZZAZIONE SCRITTA DELLA satisloh Italy
COPYRIGHT BY satisloh Italy S.p.A. ALL RIGHTS RESERVED
S.p.A.
Pag. 1-2
Earth leakage breaker
In order to protect against electric shock, the standard distribution box, supplied with the plant, include a 500 mA Residual
Current Device (earth leakage breaker). For proper operation no other similar protection devices with lower value is allowed
on the plant power supply line.
Additional notes on grounding circuits
The Satis MC series plants use two grounding connections:
- from the power supply line (to comply with the Standard requirement)
- direct connection to the ground rod (to reduce high frequency electrical noise due to E.B.G.)
If other machines (not Satisloh with similar or greater power requirement) are installed on the same power supply line and
share a common ground path, in case of fault the current can go trough the direct connection (of the Satisloh plant) to the rod.
Since this current is coming from an external fault no protection can be provided by the earth leakage breaker and a danger
condition can be generated. To avoid these situations one of these solutions can be used:
- use a local earth leakage breaker for each plant line
- avoid sharing ground line between different plants
ATTENTION PLEASE
If for any reason the devices are not supplied trough our distribution box (without leakage breaker) a general earth
leakage breaker with 500 mA (phases and neutral) must be provided on the supply line.
In the “GROUND RESISTANCE TEST DIAGRAM” is indicated how to measure the ground resistance.
VIETATA LA RIPRODUZIONE. SENZA AUTORIZZAZIONE SCRITTA DELLA satisloh Italy
COPYRIGHT BY satisloh Italy S.p.A. ALL RIGHTS RESERVED
S.p.A.
Pag. 2-2
Satisloh AG
Neuhofstrasse 12
CH-6340 Baar
Phone +41 (0)41 766 16 16
Fax
+41 (0)41 766 16 10
www.satisloh.com
[email protected]
MC-380-H Technical data
Typical system configuration (refer to MC-380-H dimensions and quotation)
A
B
C
D
MC-380-H Box coater (including water thermo conditioner)
CC-10-S Cascade cooler for Meissner trap (CC-5-S on request)
GCC-9 Water chiller
Transformer for box coater, cascade cooler, flow box, de-ionizer, cleaning unit, oven, ionized air, projector
(for other voltage than 400 V)
Box coater
15 kW cos ϕ 0.75
400 V (± 10%) 50/60 Hz (± 2%)
≤ 3 Ohm
5%
35 A Standard version
25 A Reduced power version (see note *)
Rated power consumption
Nominal rated voltage (3P + N + E) and rated frequency
Grounding resistance
Max. harmonic distortion
Fuses or breaker at 400 V
CC-10-S Cascade cooler ( CC-5-S on request)
Rated power consumption
Nominal rated voltage (3P + N + E) and rated frequency
8.9 kVA
400 V (± 10%) 50 Hz (± 2%)
460 V (± 10%) 60 Hz (± 2%)
25 A
Fuses or breaker at 400 V
GCC-9 Water chiller
Rated power consumption
Nominal rated voltage (3P + N + E) and rated frequency
Fuses or breaker at 400 V
Water temperature
4.5 kW (50 Hz) 4.93 kW (60 Hz)
400 V (± 10%) 50/60 Hz (± 2%)
9.5 A (50 Hz)
18 ÷ 20°C
Coating room conditioning requirements
Temperature
Relative humidity
Clean room
20 ÷ 25 C°
40 ÷ 55%
Class 100.000
Box coater compressed air
Pressure
Consumption
Typical gas for coating process
Pressure
Consumption
Purity
Transformer D (for other voltage than 400 V)
6/600 bar/kPa minimum
10 l/batch (typical)
Oxygen
0.35/35 bar/kPa
3
60 cm /batch (typical)
99,995% (N45)
Nominal power
Argon
0.7/70 bar/kPa
30 cm3/batch (typical)
99,995% (N45)
45 kVA
Weight approx.
MC-380-H Box coater components
• Vacuum chamber assembly (electrical cabinet included)
• Water thermo conditioner
• Preliminary vacuum pump
CC-10-S Cascade cooler
CC-5-S Cascade cooler (on request)
GCC-9 Water chiller
Transformer (for other voltage than 400 V)
Note:
1320 kg
60 kg
73 kg
243 kg
408 kg
130 kg
320 kg
This data sheet does not include any other peripheral equipment consumption.
* Contact technical dept. in Satisloh Italy
Data sheet
Technical details are subject to change without prior notice
Rev. D-947
Satisloh AG
Neuhofstrasse 12
CH-6340 Baar
Phone +41 (0)41 766 16 16
Fax
+41 (0)41 766 16 10
www.satisloh.com
[email protected]
MC-380-H Major components
Vacuum system
Vacuum chamber volume with rotating substrate holder
Preliminary vacuum pump (rotary pump)
Turbomolecular pump
Meissner trap
End vacuum after 24 hours outgassing at 300°C
374 l
62 m3/h
1900 l/s
50000 l/s
1 E – 4 Pa
Electron beam evaporation system
Emission current
High voltage output
Crucible diameter
Beam deflection
0.5 A max.
10 kV max.
133 mm
270°C
Quartz film thickness measuring unit
Quartz measuring head
Frequency
1
6 MHz
Plasma rod (optional)
Voltage (output)
Emission current
1500 V typical
250 mA typical
Ion beam gun (optional)
Gun type
Anode current
Anode voltage
gridless
1 A max.
160 V max.
Substrate heating systems available (depending on process)
Bottom heater
Top heater
maximum temperature 150°C
maximum temperature 300°C
Substrate holders systems available
Three-sector dome
Flip-over
external diameter 710 mm
external diameter max. 700 mm
Process control system type
Type
S-9380 (Industrial PC – IBM compat.)
Water thermo conditioner (included)
Pressure
Water flow (closed circuit)
Data sheet
3/300 bar/kPa
1200 l/h approx.
Technical details are subject to change without prior notice
Rev. A-415
Satisloh AG
Neuhofstrasse 12
CH-6340 Baar
Phone +41 (0)41 766 16 16
Fax
+41 (0)41 766 16 10
www.satisloh.com
[email protected]
MC-380-H Packing details
Description
Dimensions of wooden case
(approx.) (W x D x H)
Gross weight
(approx.)
MC-380-H
275 x 120 x 238 cm
1370 kg
Std. spare parts, water thermo conditioner
210 x 150 x 167 cm
900 kg
CC-10-S Cascade cooler
81 x 76 x 187 cm
360 kg
CC-5-S Cascade cooler (on request)
120 x 90 x 208 cm
600 kg
GCC-9 Water chiller
87 x 85 x 166 cm
237 kg
GCC-15T Water chiller, Tropical version
130 x 92 x 198 cm
360 kg
Transformer (for other voltage than 400 V)
95 x 95 x 125 cm
411 kg
CV-400-D Degassing oven (for Dome)
115 x 110 x 110 cm
212 kg
CV-400 Degassing oven (for F/O)
80 x 80 x 112 cm
120 kg
T-10 Ultrasonic cleaning unit
169 x 125 x 160 cm
425 kg
LMRE-7 Water de-ionizer
Additional equipment for LMRE-7
110 x 110 x 190 cm
77 x 67 x 65 cm
380 kg
114 kg
FB-260 Flow box (for MC-380-D Coating lab)
240 x 110 x 207 cm
460 kg
Table for FB-260 Flow box (for MC-380-H Coating
lab)
235 x 95 x 115 cm
180 kg
FLV-72 Flow box
208 x 116 x 255 cm
633 kg
SA-20 Sand blasting unit
150 x 140 x 207 cm
490 kg
Data sheet
Technical details are subject to change without prior notice
Rev. C-943
Satisloh AG
Neuhofstrasse 12
CH-6340 Baar
Phone +41 (0)41 766 16 16
Fax
+41 (0)41 766 16 10
www.satisloh.com
[email protected]
MC-380-H Dimensions
A
B
C
D
**
MC-380-H Box coater (including water thermo conditioner)
CC-5-S Cascade cooler
GCC-9 Water chiller
Transformer for box coater, cascade cooler, flow box, de-ionizer, cleaning unit, oven, ionized air,
Light projector (for other voltage than 400 V)
Dimensions with wheels but without top cover
Dome version 2200 mm
Flip-over version 2170 mm
Data sheet
Technical details are subject to change without prior notice
REV. B-817
POSIZIONAMENTO IMPIANTO
Una volta in posizione,
togliere le ruote e regolare i piedini fino
alla messa in bolla.
PLANT POSITIONING
After positioning adjust the feet to level
the plant off.
STELLUNG DER ANLAGE
Die anlage in die Betriebstellung
schieben.
Nachdem die Anlage in der richtigen
stellung gefahren worden ist, die
raeder mit Hilfe eines Hebels, siehe
oben) abnehmen und die Fuesse
justieren, um die Anlage auszurichten.
h
min.
30mm
Prima della regolazione
Before level adjusting
Vor der justierung
h
max.
40mm
Dopo la regolazione
After level adjusting
Nach der justierung
1500mm~
2
1
Cylinder Ø : 250mm approx.
Cylinder height : 1,5m approx.
Ø 250mm~
Vietata la riproduzione senza autorizzazione della
1) OXYGEN CYLINDER FOR ION SOURCE
AND REACTIVE EVAPORATION
- purity
:
- content :
- pressure :
99,995% (N45)
7,5 cu.m. approx.
150 ÷ 200 bar
2) PRESSURE REDUCER
- outlet pressure
- inlet pressure
:
:
0 ÷ 2 bar
10 ÷ 200 bar
NOTE: FILE : OTI_91_04_09.CDR
REV.
NUMERO C.O.
DATA
FIRMA
CONTR.
DEVIAZIONE SU QUOTE SENZA TOLL.
>0 a 50
+ - 0.1
>50 a 250
+ - 0.2
>250 a 800 >800 a 2000
+ - 0.4
+ - 0.8
Ra N12 N11 N10 N9 N8 N7 N6 N5 N4 N3 N2 N1
:
:
:
: : : : : : : : : DIM/mm
(um) 50 25 12.5 6.3 3.2 1.6 0.8 0.4 0.2 0.1 .05 .025
FIRMA E. Tunesi DESCRIZIONE
CONTR.C. Minnaja
DATA 07.04.2008
DISEGNO Nr.
OXYGEN CYLINDER FOR ION SOURCE
MAT.
TT.
SMUSSI:
FIN.
O.T.I. 91.04.09
REV. PAG.
B 1/1
1500mm~
2
1
Cylinder Ø : 250mm approx.
Cylinder height : 1,5m approx.
Ø 250mm~
1) ARGON CYLINDER FOR ION SOURCE
Vietata la riproduzione senza autorizzazione della
- purity
:
- content :
- pressure :
99,995% (N45)
10 cu.m. approx.
150 ÷ 200 bar
2) PRESSURE REDUCER
- outlet pressure
- inlet pressure
:
:
0 ÷ 2 bar
10 ÷ 200 bar
NOTE: FILE : ATI_91_04_09.CDR
REV.
NUMERO C.O.
DATA
FIRMA
CONTR.
DEVIAZIONE SU QUOTE SENZA TOLL.
>0 a 50
+ - 0.1
>50 a 250
+ - 0.2
>250 a 800 >800 a 2000
+ - 0.4
+ - 0.8
Ra N12 N11 N10 N9 N8 N7 N6 N5 N4 N3 N2 N1
:
:
:
: : : : : : : : : DIM/mm
(um) 50 25 12.5 6.3 3.2 1.6 0.8 0.4 0.2 0.1 .05 .025
FIRMA E. Tunesi DESCRIZIONE
CONTR.C. Minnaja
DATA 07.04.2008
DISEGNO Nr.
ARGON CYLINDER FOR ION SOURCE
MAT.
TT.
SMUSSI:
FIN.
A.T.I. 91.04.09
REV. PAG.
B 1/1