AIST, Japan

Strategic Nanotechnology Global
Networking:
Current Status and Proposal of AIST
Hiroshi Yokoyama
Nanotechnology Research Institute
National Institute of
Advanced Industrial Science and Technology(AIST)
AIST
Nanotechnology
“Creation of Useful Materials, Devices and Systems by
Manipulation of Materials with Atomic and Molecular
Precision.”
This concept of nanotechnology has existed since or even from before the famous APS
address by Nobel Physicist, Richard Feynman in 1959. Owing to the tremendous
development of nanometer scale science in the last two decades, such as the invention of
the scanning probe microscopy, the nanotechnology is now evolving into a real from
hype with a great deal of industrial expectations in the 21st century in diverse fields from
electronics, information technology, materials engineering to biotechnology. The start
of the National Nanotechnology Initiative in USA in the year 2000 was, among others,
the epoch that fueled the field to become as active as it is today.
Business:
Layer
55
Business:
Layer
What
is
crucial:
What is crucial:
1mm
100µm
Productive
Alliance
Leveraging
Individual
R&D
Development:
Layer
44
10µm
Productive
Alliancefor
for
Leveraging
Individual
R&DEfforts
Efforts
Development:
Layer
and
Basic
Research:
Layer
3
Basic Research: Layer 3 and
1µm
Making
MakingPossible
PossibleContinual
ContinualStream
Streamof
ofInnovations
Innovationsfrom
fromBasic
Basic
Infrastructure
/
Facility:
Layer
2
Infrastructure
/ Facility: Layer 2
Research
to
Research
toMarket
MarketPlace
Place
100nm
Strategy
Strategy&
&Policy:
Policy: Layer
Layer11
10nm
Ex.
Ex.Adaptive
Adaptive//On-demand
On-demandProduction
ProductionSystem
System
enabling
Friendly
enablingLess
LessCostly
Costly&
&More
MoreEnvironmental
Environmental1nm
FriendlyManufacturing
Manufacturing
AIST
Quantum Leap of Industrial
Technology
Destructive Technology! For
Existing Industries
Nanotechnology
AIST
TOYOTA’s latest hybrid car on the market:
35 km/l !
What if we could make it 100km/l or larger
by nanotechnology?
Consumers are becoming more and more
environment and cost conscious.
So are we!
AIST
従来の
Conventional Inkjet
インクジェット技術
２pl
２ μ
空気中
In
Air
∼ 16 μ m
超微細
Super-Inkjet
インクジェット技術
Less than 1 fl
従来の 1/1000
1/1000
以下の体積
>>20 μ m Sub
サブ μ m
基盤上
Substrate
AIST
Super Inkjet Technology: Trend in On-Demand
Manufacturing
10µm
AIST
Multi-stable Liquid Crystal Device:
AFM-Fabricated Microscopic Surface Pattern
Appl. Phys. Lett. 78 (3035) 2001.
20µm
Nature, November 14, 2002.
AIST
AIST
Spintronic Device:
Single-crystal-junction TMR
for Gbit MRAM
TMR: Tunneling Magnetic Resistance, MRAM: Magnetic RAM
AIST
Carbon Nanotube Quantum Effect Transistor
Carbon
Nanotube
Source
Gate
Source
Drain
Drain
(a) Single electron transistor（SET)
(b) CNT channel
Gate
Drain
Source
Defect Induced CNT
SiO2
Si Substrate
(c) Schematic view of SET with defect induced
CNT channel
Collaboration with Fujitsu
(d) I-V characteristics of SET
AIST
Nanotechnology
“Creation of Useful Materials, Devices and Systems by
Manipulation of Materials with Atomic and Molecular
Precision.”
This concept of nanotechnology has existed since or even from before the famous APS
address by Nobel Physicist, Richard Feynman in 1959. Owing to the tremendous
development of nanometer scale science in the last two decades, such as the invention of
the scanning probe microscopy, the nanotechnology is now evolving into a real from
hype with a great deal of industrial expectations in the 21st century in diverse fields from
electronics, information technology, materials engineering to biotechnology. The start
of the National Nanotechnology Initiative in USA in the year 2000 was, among others,
the epoch that fueled the field to become as active as it is today.
Business:
Business: Layer
Layer55
Development:
Development: Layer
Layer44
Basic
BasicResearch:
Research: Layer
Layer33
Infrastructure
Infrastructure//Facility:
Facility: Layer
Layer22
Strategy
Strategy&
&Policy:
Policy: Layer
Layer11
1mm
100µm
10µm
1µm
100nm
10nm
1nm
AIST
General
General Council
Council of
of Science
Science and
and Technology
Technology
General Council of Science and Technology
Chair: Prime Minister
Ministry of Economy,
Trade & Industry (METI)
AIST
AIST
Ministry of Education,
Culture, Sports,
Science and
Technology (MEXT)
Universities
National Institute for Materials Science
RIKEN
AIST３
Japanese Government is ever more strongly
committed to Science & Technology to revive
her economy, making pledge to invest
250 Billion US$
over 5 years.
AIST
Global Funding (M USD)
1200
1000
800
600
400
200
0
2003
EU
2002
USA
Japan
2001
Germany
Courtesy Lerwen Liu, NanoGlobe Ltd.
AIST
Research Bases of AIST around Japan
Researcher:
Researcher: 2400
2400
Total:
Total: 3100
3100
Hokkaido 68
Visitor:
Visitor: 3000
3000
Annual
Annual Budget:
Budget: ~~ 11 BB US$
US$
Tohoku 35
Kansai 188
Tsukuba 1,832
Chugoku 34
Tokyo Waterfront 39
Kyushu 56
Chubu 143
Shikoku 31
AIST
FY2002 AIST Revenue
(total budget: ∼1B US$)
+ Extra: 700 M
Payroll: 310 M
R & D: 220 M
Utility Expense &
Others: 110 M
Grants from Government: 110 M
Other Income: 30 M
Funds from Sectors
other than Government: 70 M
Contract Research &
Research Grants: 180 M
AIST
FY2002 Distribution of R&D Investment
(total budget: ∼1B US$)
+ Extra: 700 M
Geological Survey&
Geoscience, Marine Science
9.2%
Life Science &
Technology
15.4%
Standards &
Measurement 7.7%
Nanotechnology,
Materials &
Manufacturing
20.7%
Information
Technology
19.0%
Environment
& Energy
28.0%
AIST
Nanotechnology
“Creation of Useful Materials, Devices and Systems by
Manipulation of Materials with Atomic and Molecular
Precision.”
This concept of nanotechnology has existed since or even from before the famous APS
address by Nobel Physicist, Richard Feynman in 1959. Owing to the tremendous
development of nanometer scale science in the last two decades, such as the invention of
the scanning probe microscopy, the nanotechnology is now evolving into a real from
hype with a great deal of industrial expectations in the 21st century in diverse fields from
electronics, information technology, materials engineering to biotechnology. The start
of the National Nanotechnology Initiative in USA in the year 2000 was, among others,
the epoch that fueled the field to become as active as it is today.
Business:
Business: Layer
Layer55
Development:
Development: Layer
Layer44
Basic
BasicResearch:
Research: Layer
Layer33
Infrastructure
Infrastructure//Facility:
Facility: Layer
Layer22
Strategy
Strategy&
&Policy:
Policy: Layer
Layer11
1mm
100µm
10µm
1µm
100nm
10nm
1nm
AIST
Sequential Deployment of Nanotech Outputs
for Sustainable R&D
•Molecular Device/ Quantum Computer
•Artificial Photo-Synthesis
•Computational Materials Design
Display Technology:
•CNT FED
•Multi-Stabe LCD
Manufacturing:
•Super-Inkjet
•Probe fabrication
Drug Delivery System:
•Sugar/Protein DDS
•Cubic LC Absorbent
•Nano-particle (DNA Tag)
Characterization Tool:
•CNT Probe
AIST
Current Nanotechnology Programs in AIST
Nanostructure Polymer Project
Nanotechnology Glass Project
Nanotechnology Carbon Project
Nano-Materials,
Processing
Nanostructure Coating Project
Nanotechnology Material Metrology Project
Synthetic Nano-Function Materials Project
AIST
Nanotechnology
R&D
Nano Structure Forming for Ceramics Integration Project
R & D of 3D NanoScale Certified Reference Materials Project
Advanced Nanocarbon Application Project
NanoManufacturing,
Measuring
Focus21
Advanced Diamond Technology Project
MIRAI (Millennium Research for Advanced
Information Technologies) Project
Nanotechnology Support Project
Tokura ERATO Project
Yokoyama ERATO Project
CREST” Functional High-Axial-Ratio Nanostructure Assembly
for Nano-Space Engineering”
Advanced Semiconductor
Device Project
MEXT
JST Program
AIST
Government R & D Investment
Billion US$
Investment (Billion US$)
4
Extra Spending for
Economic Stimulus
3
?
2
1
-
96
97
98
99
2000
2001
2002
１７
AIST
Nanotechnology
“Creation of Useful Materials, Devices and Systems by
Manipulation of Materials with Atomic and Molecular
Precision.”
This concept of nanotechnology has existed since or even from before the famous APS
address by Nobel Physicist, Richard Feynman in 1959. Owing to the tremendous
development of nanometer scale science in the last two decades, such as the invention of
the scanning probe microscopy, the nanotechnology is now evolving into a real from
hype with a great deal of industrial expectations in the 21st century in diverse fields from
electronics, information technology, materials engineering to biotechnology. The start
of the National Nanotechnology Initiative in USA in the year 2000 was, among others,
the epoch that fueled the field to become as active as it is today.
Business:
Business: Layer
Layer55
Development:
Development: Layer
Layer44
Basic
BasicResearch:
Research: Layer
Layer33
Infrastructure
Infrastructure//Facility:
Facility: Layer
Layer22
Strategy
Strategy&
&Policy:
Policy: Layer
Layer11
1mm
100µm
10µm
1µm
100nm
10nm
1nm
AIST
MEXT
Nanotechnology Support Project
NanoFoundry Group
NanoProcessing Partnership Program (NPPP)
http://www.nanoworld.jp/nppp/index.htm
[email protected]
AIST
Resources/Activity
Strengthening of R&D Infrastructure
→
Lowering the Entrance Barrier
Lowering the Cost of R&D
•Expensive Equipments
Infrastructure
•Huge Know-Hows
Materials-----Devices----------BioTech
AIST
E-Beam
AIST NPF- NPPP
Waseda Univ.
Tokyo Inst. Tech.
Osaka Univ.
Hiroshima Univ.
AIST
Nanotechnology
“Creation of Useful Materials, Devices and Systems by
Manipulation of Materials with Atomic and Molecular
Precision.”
This concept of nanotechnology has existed since or even from before the famous APS
address by Nobel Physicist, Richard Feynman in 1959. Owing to the tremendous
development of nanometer scale science in the last two decades, such as the invention of
the scanning probe microscopy, the nanotechnology is now evolving into a real from
hype with a great deal of industrial expectations in the 21st century in diverse fields from
electronics, information technology, materials engineering to biotechnology. The start
of the National Nanotechnology Initiative in USA in the year 2000 was, among others,
the epoch that fueled the field to become as active as it is today.
Business:
Business: Layer
Layer55
Development:
Development: Layer
Layer44
Basic
BasicResearch:
Research: Layer
Layer33
Infrastructure
Infrastructure//Facility:
Facility: Layer
Layer22
Strategy
Strategy&
&Policy:
Policy: Layer
Layer11
1mm
100µm
10µm
1µm
100nm
10nm
1nm
AIST
Nanotechnology Business Creation
Initiative, consisting of 300 member
companies, is now being established in
Japan by METI’s lead.
Its mission is to enhance competence of
Japanese nanotech community in the
highly competitive international arena.
AIST
Nanotechnology
“Creation of Useful Materials, Devices and Systems by
Manipulation of Materials with Atomic and Molecular
Precision.”
This concept of nanotechnology has existed since or even from before the famous APS
address by Nobel Physicist, Richard Feynman in 1959. Owing to the tremendous
development of nanometer scale science in the last two decades, such as the invention of
the scanning probe microscopy, the nanotechnology is now evolving into a real from
hype with a great deal of industrial expectations in the 21st century in diverse fields from
electronics, information technology, materials engineering to biotechnology. The start
of the National Nanotechnology Initiative in USA in the year 2000 was, among others,
the epoch that fueled the field to become as active as it is today.
Business:
Business: Layer
Layer55
Development:
Development: Layer
Layer44
Basic
BasicResearch:
Research: Layer
Layer33
Infrastructure
Infrastructure//Facility:
Facility: Layer
Layer22
Strategy
Strategy&
&Policy:
Policy: Layer
Layer11
1mm
100µm
10µm
1µm
100nm
10nm
1nm
AIST
Expectation on Network
• Complementary R&D
• Mutual Benefit (Technology,
Information, Patent, Business…)
• Human Resource Development
• Standardization
AIST
Toward Nanotechnology Global Network
•• CNRS,
CNRS, France
France
•• KISTI,
KISTI, Korea
Korea
•• ITRI,
ITRI, Taiwan
Taiwan
•• Cambridge
Cambridge University,
University, UK
UK (in
(in progress)
progress)
•• etc.
etc.
AIST
Global Public Funding Comparison
1400
Million USD
1200
1000
800
600
400
2004
2003
2002
200
0
EU
USA
Asia
Courtesy Lerwen Liu, NanoGlobe Ltd.
AIST
Asian Funding during 2003-2007
1000
900
800
700
600
Million USD 500
400
300
200
100
0
Korea
China
Australia
China
Taiwan
Hong Kong
Korea
India
Malaysia
New
Zealand
Singapore
Taiwan
Courtesy Lerwen Liu, NanoGlobe Ltd.
Thailand
AIST
AIST
Toward the Gateway to Nanotech Asia
Across All Layers of Nanotechnology
- 2nd Asian Nanotech Forum Summit in Thailand, March
2004. Jointly Sponsored by Royal Thai Government and
NEDO, METI & AIST
- Networking of Nanotech Support Facilities (MEXT)
- Nano2B AIST Symposium at Nanotech 2004 in March, 2004
- Call for Further Joint Research Programs
And More…
AIST
Let’s enjoy nanotechnology!
AIST
Government R&D Investment: FY2001
Nanotechnology : US$ 500 M
US$100M
US$100M
MEXT
IT
METI
Environment
Medical & Biotech
Grant
Metrology
Materials
National Project
AIST
Crossover of Top-down and Bottom-up Technologies
1µm
Top-down
Moore’s
Law
1nm
Bottom-up
1970 1980 1990 2000 2010
2020
AIST
Materials
Life Sciences
Electronics
Environment
Energy
Carbon Nanotube
Drug Delivery
Single Electron
Transistor
High-efficiency Solar Cell
Ultra-hight density
Storage
Molecular Machine
DNA, Quantum
Devices
Toxic Compound Filter
Manipulation of Matter with
atomic and molecular
precision
AIST
Next Generation Semiconductor Technology
Millennium Research for Advanced Information
Technology (MIRAI) Project (FY 2001-2007)
70-50nm node and beyond for SoC
Schematic Cross Section of CMOS Transistor/Interconnect
and Five R&D Focuses of MIRAI Project
AIST
Noritake-Ise Electric／AIST 40-Inch CNT FED Panel
Nanotech 2003 + Future
AIST
AIST
Emitter-Grid Voltage
AIST
Emitter-Grid Electron Emission
30
-30 90
210
150 90
30
150 90
Liquid Crystal
50µm
Patterned Surface
Nature, November 14, 2002.
Sate1
State2
State3
AIST
The world's largest High-Tc
superconducting film
a) YBa2Cu3O7 superconducting film
(30cm x 10cm) made by coating
pyrolysis process.
b) Superconductive
characteristic of the film.
AIST
Use of Carbon Nanotube SPM Tip for DNA Imaging
100 nm
20 nm
AIST
Scanning Probe
Anodically Oxidized
Line
Electrons
Scanning
Adsorbed Water
10 - 100 nm
silicon, metal
Oxide lines on n-type silicon.
10 V, 0.2 micron/s
AIST
Environment Control + in situ Current Measurement
Environment SPM
Humidity Controller
Sensor
Joint Development with Seiko Instruments
AIST