Probe Station Accessories Catalog.book

Transcription

ProbeStation
Accessory Catalog
Cascade Microtech offers a complete set
of accessories to enhance the productivity
and capability of your probe station.
Precision measurement capability does
not end with the probe and probe station.
We offer a complete set of accessories to
allow you to position, navigate, determine
signal fidelity, and contact the wafer or
device under test.
Contents
Tesla Accessories .......................................................................................................................................... 1
Probe Holders and Probe Tips................................................................................................................. 2
HCP-1-B — High-Current Parametric Probe Holder ........................................................................ 3
HCP-TIP-3-350 — High-Current Replaceable Probe Tips, 5-pack ................................................... 4
HVP-13 — High-Voltage Parametric Probe Holder ........................................................................... 5
Interface Panels and Cables .................................................................................................................... 6
144-524 — High-Voltage Triax Interface Panel ................................................................................. 7
144-525 — High-Current Banana Interface Panel ............................................................................. 8
144-526 — High-Voltage Triax Connection Cable – Interface Panel to High-Voltage Coax .............. 9
144-527 — High Voltage Triax Connector Cable – Interface Panel to High-Voltage Triax ............. 10
Elite 300 Accessories ...................................................................................................................................11
Connection Panels ................................................................................................................................. 12
141-790 —Connection Panel ........................................................................................................... 13
Monitors................................................................................................................................................. 15
144-350 — Dual LCD Monitor ........................................................................................................... 16
Probe Card Holders ............................................................................................................................... 17
142-338 — MicroChamber Probe Card Holder ................................................................................ 18
141-861 — Probe Card Holder ......................................................................................................... 20
Dark Boxes............................................................................................................................................. 22
141-588 — Dark Box ......................................................................................................................... 23
Accessory Shelves ................................................................................................................................. 26
144-340 — Side Accessory Shelf Kit ................................................................................................ 27
143-420 — Rear Instrument Shelf System ...................................................................................... 28
Seismic Restraints ................................................................................................................................. 30
141-418 — Seismic Restraints ......................................................................................................... 31
Positioners and Positioner Upgrades .................................................................................................... 32
139-311B — RF/Microwave Positioner (E/W) ................................................................................... 33
144-410 — S300 RF Positioner (E/W) Upgrade Kit ........................................................................... 35
139-312B — RF/Microwave Positioner (W) ...................................................................................... 36
144-411 — S300 RF Positioner (W) Upgrade Kit .............................................................................. 38
139-313B — RF/Microwave Positioner (N/S) ................................................................................... 39
144-412 — S300 RF Positioner (N/S) Upgrade Kit ........................................................................... 40
141-770B — RF/Microwave Positioner (SW) .................................................................................... 41
141-778 — mmW Large Area Positioner (E) .................................................................................... 43
141-779 — mmW Large Area Positioner (W) ................................................................................... 44
MS1-8-40 — RF Motorized Microwave Positioner (E/W) ................................................................. 45
DCM-400-V — Submicron Resolution DC Positioner, Vacuum Base .............................................. 47
Probe Mounts and Holders .................................................................................................................... 49
Cascade Microtech Probe Station Accessory Catalog
141-400, 06/22/10, Rev F
•i
141-800 — DCP Probe Mount (triax, MS1) ........................................................................................50
139-370 — DCP Probe Mount (triax, DCM) .......................................................................................51
141-804 — DCP Probe Mount (DCM) .................................................................................................52
141-806 — PTT Needle Probe Mount and Enhanced Jack Lock Holder (DCM) ..............................53
141-802 — PTT Needle Probe Mount and Enhanced Jack Lock Holder (MS1) ................................54
144-388 — Universal Probe Holder with Dovetail Adapter Kit .........................................................55
144-389 — Universal Probe Holder with MS1 Adapter ....................................................................56
144-887 — Mount, Pico Probe, Stud Grip .........................................................................................57
Probes ................................................................................................................................................... 58
144-392 — Unshielded Probe Kit ......................................................................................................59
139-331 — Coaxial Probe (Straight) ..................................................................................................60
139-870 — Coaxial Probe (Bent) .......................................................................................................61
144-390 — Triaxial Probe (Straight) ..................................................................................................62
144-391 — Triaxial Probe (Bent) .......................................................................................................63
142-259 — Coaxial Probe, Straight, DCM-400, Jack Lock ...............................................................64
144-963 — Coaxial Probe, Bent, DCM-400, Jack Lock .....................................................................65
142-258 — Triaxial Probe, Straight, DCM-400, Jack Lock ...............................................................66
144-962 — Triaxial Probe, Bent, DCM-400, Jack Lock .....................................................................67
Mounting Kits and Plates ...................................................................................................................... 68
143-428 — Agilent 42941 Mounting Kit .............................................................................................69
143-429 — Mounting Plate for B1500A SCUU ..................................................................................70
144-422 — Mounting Plate for B1500A ASU, E5288A Atto Sense Unit .............................................71
M150 Accessories ........................................................................................................................................ 73
System Modules .................................................................................................................................... 74
M150-MSM-1 — Scope Mount Boom Arm for Low Power Scopes ...................................................75
M150-MSM-2 — Scope Mount Large Area High Stability Bridge for High/Low Power Scopes .......76
M150-DTH-1 — DUT Holder, 150mm Chuck with 2 Aux Chucks and Dual Triax Connectors .........77
M150-DTH-4 — DUT Holder for PCB and Irregular Parts ................................................................78
M150 Microscope/Video Accessories .................................................................................................... 79
M150-ACC-6 — Z Lift Scope Mount for High Power Scope ..............................................................80
M150-ACC-10 — High Power Scope Mount, Fixed, for High Power Scopes ....................................81
M150-ACC-15 — Low Power Scope Mount, Fixed, for Low Power StereoZoom microscopes .......82
M150-ACC-14 — Monitor Stand for LCD Monitors ...........................................................................83
M150 Station Accessories ..................................................................................................................... 84
M150-ACC-2 — Raised Chuck Kit .....................................................................................................85
M150-ACC-13 — Vacuum Manifold, Magnetic Base .........................................................................86
M150-ACC-16 — Magnetic cable clamp kit for M150 .......................................................................87
M150-ACC-18 — Pin to Banana Interface Kit ...................................................................................88
M150-ACC-19 — Triax Panel, Magnetic Base ...................................................................................89
M150-ACC-28 — Coax Panel, Magnetic Base ...................................................................................90
M150-ACC-20 — Absorbing ISS Holder, M150 .................................................................................91
M150-ACC-22 — Optional Dual Triax Connector Block, 150mm+Aux Chuck (M150-DTH3) ...........92
141-400, 06/22/10, Rev F
• ii
M150-ACC-25 — Platen Insert for Multipurpose Platen/Station .................................................... 93
M150-ACC-26 — 4 Port Option for mmW Stations .......................................................................... 94
M150-ACC-27 — Raised Platen Extension for mmW Platen/Station .............................................. 95
M150 DC Probes, Probe Arms and Accessories .................................................................................... 96
139-332 — Needle Probe Mount for DCM-200/DCM-300 Series Positioners, 40mm ..................... 97
139-331 — Coaxial Probe, Straight, for DCM Series Positioners, 40mm (PE5-02 for M150) ......... 98
139-330 — Triaxial Probe, Straight, for DCM Series Positioners, 40mm (PE5-32 for M150) ........ 99
139-870 — Coaxial Probe, Bent 35°, for DCM Series Positioners, 40mm, (45° PTT Tips) ............ 100
139-865 — Triaxial Probe, Bent 35°, for DCM Series Positioners, 40mm, (45° PTT Tips) ............ 101
143-450 — DCP Probe Mount, Dual Triax Adapter (Kelvin) for DCM-200/300 Positioners ........... 102
146-166 — DCP Probe Mount, Direct Coax SSMC for DCM-200/300 Positioners ......................... 103
PHJ-408 — Jack Lock Probe Holder, Unshielded, Bent 35°, 40mm, M150 (45° PTT Tips) ........... 104
PHJ-40 — Jack Lock Probe Holder, Unshielded, 40mm ............................................................... 105
PHW-40B — Wrench Lock Probe Holder, Unshielded, Bent 35°, 40mm (Straight PTT Tips) ....... 106
PHQ-40B — Quick Lock Probe Holder, Unshielded, Bent 35°, 40mm (Straight PTT Tips) ........... 107
133-464 — mmW Positioner for 150mm Stations, Manual, East Position ................................... 108
133-463 — mmW Positioner for 150mm Stations, Manual, West Position .................................. 109
141-858 — FPC Mount for M150 RF Positioners ............................................................................ 110
POS-RF-01 — West RF Positioner for M150 Platform ................................................................... 111
POS-RF-02 — North or South RF Positioner for M150 Platform, 40mm ...................................... 112
POS-RF-03 — East or West RF Positioner for M150 Platform ...................................................... 113
POS-RF-04 — North, East, or West RF Positioner for M150 mmWave Platform ......................... 114
Summit Accessories ...................................................................................................................................115
Optical Bridge Mounts and Transports ................................................................................................ 116
114-468 — Large Area Optics Bridge Mount for Summit Systems .............................................. 117
114-739 — High Stability Optics Bridge Mount for Summit Systems ............................................ 118
115-416 — Low Power Optics Boom Stand for Summit Systems ................................................. 119
123-224 — High Stability Optics Bridge Mount (2-inchx2-inch) for Summit Systems .................. 120
131-923 — Motorized Theta Upgrade Kit for Summit 12K Stations (with 80 Pin Interconnect) ... 121
131-924 — Motorized Theta Upgrade Kit for Summit 12K Stations (with 68 Pin Interconnect) ... 122
Summit/S300 Connection Panels (Coax, Triax, Pin jack, Banana Vacuum) ......................................... 123
105-626 — Triax Connection Panel, Side Mount, for Summit Stations ......................................... 124
106-171 — Triax Connection Panel for Summit, Lg Area Optical Bridge/Boom Stand Config ..... 125
114-737 — Vacuum Manifold Kit for S300, Summit, High Stability Optics Bridge ........................ 126
118-640 — Triax Connection Panel for S300, High Stability Bridge Config ................................... 127
134-710 — Triax Connection Panel for Summit, High Stability Bridge Config .............................. 128
RAC-92 — Pin Jack to Banana Interface Panel for S300, Summit, High Stblty Optical Bridge .... 129
RAC-96 — Pin Jack to Coax Interface Panel for S300, Summit, High Stability Optical Bridge ..... 130
Summit/S300 Mounting Kits and Miscellaneous Accessories ............................................................. 131
105-588 — Thermal Flow Meter Kit ............................................................................................... 132
106-768 — Mounting Adapter Kit for Agilent 4291 Test Head ....................................................... 133
106-889 — Dust Cover for Summit Systems .................................................................................. 134
141-400, 06/22/10, Rev F
• iii
107-088 — Bracket Mount for Bias Tee/Agilent E4991A Module, for Summit RF Positioners .....135
114-849 — Xandex Inker and DCM-100 Positioner Mounting Kit for Summit 12K or S300 ...........136
116-441 — Enhanced RF Shielded MicroChamber TopHat Kit for Summit/S300 Systems ..........137
116-511 — MicroChamber Large TopHat Upgrade Kit for Summit Systems ...............................138
116-512 — MicroChamber Large TopHat Objective Ring/Cover for Summit Systems .................139
133-492 —High Stability Bridge Mounting Bracket for Agilent E5288A Atto Sense Unit ..............140
135-038 — Mounting plate for B1500A SCUU (SMU-CMU Unit), High Stability Bridge Config ......141
Summit/S300 Probe Card Holder (PCHs) and Accessories................................................................. 142
110-367 — Probe Card Holder for 6-inch Round Cards .................................................................143
114-338 — High Force Probe Card Holder for S300, Summit Stations, Non-MicroChamber .......144
115-418 — MicroChamber High Force Probe Card Holder for Summit Stations .........................145
122-437 — Edge Connector Kit for Summit/S300 Probe Card Holders .........................................146
124-118 — Low-Profile Probe Card Holder for Summit Stations with MicroChamber .................147
138-022 — Clamp Kit for LLPC, in LowProfile Card Holder ...........................................................148
Microscope Mounting plates (Summit/S300 and Alessi)..................................................................... 149
122-248 — Microscope Mntg Kit for eVue/A-Zoom2, Man Xport, Lg Area, Summit B and S300 ...150
122-244 — Microscope Mntg Kit for eVue/A-Zoom2, Man Xport, Hi Stblty, Summit B and S300 ..151
131-783 — Microscope Mounting Kit, Leica, Man Xport, Summit, S300, R48, R61, MTS ..............152
122-615 — Microscope Mounting Kit, Summit, S300, Manual/Programmable transport .............153
122-246 — Microscope Mounting Kit, Man Xport, Large Area Summit 11K/12K, S300, MTS ........154
Lab Accessories .................................................................................................................................. 155
142-026 — LCD, Keyboard, Joystick and Mouse Mounting Kit for Vibration Isolation Table ........156
142-033 — Vibration Isolation Table, DELUX Package for 200mm Stations ..................................157
142-032 — Vibration Isolation Table, STANDARD for 200mm Stations, 40-inch x 40-inch ...........158
143-567 — Side Instrument Shelf for Vibration Isolation Table .....................................................159
DC Positioners (DCMs and MS1s)........................................................................................................ 160
DCM-100-L — DCM 100 Left Positioner, Magnetic Base ...............................................................161
DCM-100-R — DCM 100 Right Positioner, Magnetic Base .............................................................162
DCM-205-ML — Probe Positioner, Magnetic Base, Left, 50 TPI ....................................................163
DCM-205-MR — Probe Positioner, Magnetic Base, Right, 50 TPI .................................................164
DCM-205-VL — Probe Positioner, Vacuum Base, Left, 50 TPI .......................................................165
DCM-205-VR — Probe Positioner, Vacuum Base, Right, 50 TPI ....................................................166
DCM-210-ML — Probe Positioner, Magnetic Base, Left, 100 TPI ..................................................167
DCM-210-MR — Probe Positioner, Magnetic Base, Right, 100 TPI ...............................................168
DCM-210-VL — Probe Positioner, Vacuum Base, Left, 100 TPI .....................................................169
DCM-210-VR — Probe Positioner, Vacuum Base, Right, 100 TPI ..................................................170
DCM-320-ML — Probe Positioner, Magnetic Base, Left, 200 TPI ..................................................171
DCM-320-MR — Probe Positioner, Magnetic Base, Right, 200 TPI ...............................................172
DCM-320-VL — Probe Positioner, Vacuum Base, Left, 200 TPI .....................................................173
DCM-320-VR — Probe Positioner, Vacuum Base, Right, 200 TPI ..................................................174
DCM-400-M — Submicron Resolution DC Positioner, Magnetic Base ..........................................175
DCM-400-V — Submicron Resolution DC Positioner, Vacuum Base .............................................176
S300, Summit and Alessi Probe Arms/Mounts ................................................................................... 177
141-400, 06/22/10, Rev F
• iv
138-014 — Enhanced Jack Lock Needle Probe Holder for DCM-200 Series Positioners ............ 178
104-030K — DCP Probe Mount, Dual Triax Adapter (Kelvin) for E/W RF Positioners .................. 179
104-856K — DCP Probe Mount, Dual Triax Adapter (Kelvin) for N/S RF Positioners ................... 180
114-818 — DCP Probe Mount, Dual Triax Adapter (Kelvin), for DCM-200 Series Positioners ..... 181
114-842 — Needle Probe Mount and Jack Lock Holder for DCM-200 Series Positioners ........... 182
114-843 — Needle Probe Mount and Jack Lock Holder for MS1 Series Positioners ................... 183
114-847 — Needle Probe Mount and Jack Lock Holder for MH2 Positioners .............................. 184
115-596 — DCP Probe Mount, Dual Triax Adapter (Kelvin) for MS1 Series Positioners .............. 185
116-031 — DCP Probe Mount for DCM-200 Series Positioners, direct probe/cable conn ........... 186
129-116 — PTT Probe Mount (MMP-01/J) and Adapter Kit for DCM Positioners ......................... 187
DCM-100 Probes and Probe Arms/Mounts (for use with PPT needles) .............................................. 188
MPC-01 — Standard MDL Probe Mount ......................................................................................... 189
MPC-05 — 90º down MDL probe mount ........................................................................................ 190
MPC-12 — Pico Probe Model 12 Mount for DCM-100 Series Positioner ...................................... 191
PE5-01 — Coaxial Probe Holder for DCM-100 Series Positioner .................................................. 192
PHJ — Jack Lock Probe Holder ..................................................................................................... 193
PHJ/DL — Jack Lock Probe Holder for MPC-05 ............................................................................ 194
PHQ — Quick Lock Probe Holder ................................................................................................... 195
PHW — Wrench Lock Probe Holder ............................................................................................... 196
PHW/DL — Wrench Lock Probe Holder for MPC-05 ..................................................................... 197
Alessi Series Probe Arms/ Mounts...................................................................................................... 198
MMP-05/J — 90º Down Probe Mount and Jack Lock Probe Holder ............................................. 199
MMP-05/W — 90º Down Probe Mount and Wrench Lock Probe Holder ....................................... 200
MMP-12/5 — Pico Probe Mount for R48/R61 ................................................................................. 201
MMP-51/J — Probe Arm Assembly and Jack Lock Probe Holder ................................................ 202
MMP-51/Q — Probe Arm Assembly and Quick Lock Probe Holder .............................................. 203
MMP-51/W — Probe Arm Assembly and Wrench Lock Probe Holder .......................................... 204
DC Probes, Coax and Triax, DCP and PE5 Style Probe Holders........................................................... 205
DCP-HTR — High Performance DC Probe Holder ......................................................................... 206
DCP-105R — DC Coaxial Probe, Single Line, 0.5 Micron Radius, Replaceable Tip ...................... 207
DCP-115R — DC Coaxial Probe, Single Line, 1.5 Micron Radius, Replaceable Tip ...................... 208
DCP-150R — DC Coaxial Probe, Single Line, 5.0 Micron, Replaceable Tip .................................. 209
DCP-150GPR-50 — DC Coaxial Probe with Ground Needle, 50 Micron Pitch ............................... 210
DCP-150K-25 — DC Coaxial Probe, Kelvin, 25 Micron Pitch, 5.0 Micron Tip Radius .................... 211
DCP-150K-50 — DC Coaxial Probe, Kelvin, 50 Micron Pitch, 5.0 Micron Tip ................................ 212
PE5-02/5 — Coaxial Probe for R48/R61 ......................................................................................... 213
PE5-32 — Triaxial Probe ................................................................................................................ 214
PE5-32/5 — Triaxial Probe for R48/R61 ......................................................................................... 215
S300/Summit RF/Microwave Positioners ............................................................................................ 216
114-746B — East or West RF Positioner for S300, Summit Stations ............................................ 217
114-845B — North or South RF Positioner for S300, Summit Stations ........................................ 218
115-597B — West RF Positioner for S300, Summit Stations ........................................................ 219
133-528 — mmW Positioner for S300, Manual, East Position, for Summit Stations .................... 220
141-400, 06/22/10, Rev F
•v
133-525 — mmW Positioner, Manual, West Position, for S300 Summit Stations .........................221
MS1-8E — East Positioner, Programmable, for S300 and Summit 12K Stations .........................222
MS1-8W — West Positioner, Programmable, for S300 and Summit 12K Stations ........................223
MPH Universal RF/Microwave Positioners ......................................................................................... 224
MPHV-L — Probe Positioner, RF, Vacuum Base, 4-inch, Left .......................................................225
MPHV-R — Probe Positioner, RF, Vacuum Base, 4-inch, Right .....................................................226
MPHM-L — Probe Positioner, RF, Magnetic Base, 4-inch, Left .....................................................227
MPHM-R — Probe Positioner, RF, Magnetic Base, 4-inch, Right ..................................................228
MPHF-4BL-TH-01 — Probe Positioner, Bolt-Down Base, 4-inch, Top-Hat Compatible, South ...229
MPHF-4BL-TH-05 — Probe Positioner, Bolt-Down Base, 4-inch, Top-Hat Compatible, North ...230
MPHM-4BL-TH-01 — Probe Positioner, Magnetic Base, 4-inch, Top-Hat Compatible, South .....231
MPHM-4BL-TH-05 — Probe Positioner, Magnetic Base, 4-inch, Top-Hat Compatible, North .....232
RF, Microwave and mmWave Adaptors and Accessories.................................................................... 233
123-723 — Adapter Kit for Summit 9K and Agilent E4991A Module Interface ..............................234
123-724 — Adapter Kit for Summit Stations and Agilent E4991A Module Interface ....................235
Module Probe Positioners ................................................................................................................... 236
FPD-100 — Fine Pitch Dual Positioner ...........................................................................................237
EZ-PROBE — EZ-Probe Positioner with Joystick, Base, Articulating Arm ....................................238
Accessories for Legacy Systems ......................................................................................................... 239
138-023 — Bracket for Keithley 4200-PA-1 for DCM positioner ...................................................240
Microscopes and Microscope Accessories ................................................................................................. 241
Microscopes for Elite 300, with Motorized Scope Transport............................................................... 242
143-416 — Seiwa Microscope with Accy Kit for Elite 300, No F-Block ..........................................243
143-417 — Seiwa Microscope for IR Lasers with Accy Kit for Elite 300, No F-Block ....................244
144-287 — Seiwa Microscope, Tilt Head, with Accy Kit for Elite 300, No F-Block .........................245
143-414 — A-Zoom2 10X Video Out, Manual Zoom and Eyepieces, for Elite 300 (No F-Block) .....246
143-415 — A-Zoom2 40X Vid Out, Dig Zoom, Eyepcs, RemFcs, Lsr Rdy, Elite 300 (No F-Block) ..247
143-410B — eVue-II Digital Imaging System,10X, RemFocus, for Elite 300, No F-Block .............248
143-411B — eVue-II Digital Imaging System, 40X RemFocus, for Elite 300, No F-Block .............249
143-412B — eVue-II Dig Imaging System, 10X RemFocus, Pro Pkg for Elite 300, No F-Block .....250
143-413B — eVue-II Dig Imaging System, 40X RemFocus, Pro Pkg for Elite 300, No F-Block .....251
Standard Microscopes with Focus Blocks........................................................................................... 252
144-286 — Seiwa Microscope, Tilt Head, with Accy Kit ..................................................................253
120-987 — A-Zoom2 (10X) Microscope, Video Out, Manual Zoom and Eyepieces .........................254
122-009 — A-Zoom2 40X Vid Out, Dig Zm, PC Ctrl/SW, Eyepcs, RemFcs, Lsr Rdy (No F-Blk) .....255
131-964 — eVue-II Digital Image System, Pro Package Upgrade ..................................................256
131-952B — eVue-II Digital Imaging System, 10X RemFocus ........................................................257
131-959B — eVue-II Digital Imaging System, 10X RemFocus, Pro Package .................................258
135-722B — eVue-II Digital Imaging System, 10X RemFocus for Manual Stations .......................259
135-724B — eVue-II Dig Imaging System, 10X RemFocus Pro Package for Manual Stations ......260
131-953B — eVue-II Digital Imaging System, 40X RemFocus ........................................................261
131-963B — eVue-II Digital Imaging System, 40X RemFocus Pro Package ..................................262
141-400, 06/22/10, Rev F
• vi
135-723B — eVue-II Digital Imaging System, 40X RemFocus for Manual Stations ...................... 263
135-725B — eVue-II Dig Imaging System, 40X RemFocus Pro Package for Manual Stations ..... 264
131-954 — eVue Digital Imaging System, Intelligent Objective Lens Mount ................................. 265
131-785 — Leica S6 Stereo Zoom Microscope Kit, 0.63 - 4.0 X Zoom ........................................... 266
132-770 — Leica S8 APO StereoZm Microscope Kit, Wide FOV, MTS Stations, Video Ready ....... 267
131-780 — Leica S8 Stereo Zoom Microscope Kit, 1.0 - 8.0 X Zoom, Video-Ready ...................... 268
VMS-70L — Mitutoyo Finescope FS-70 for IR Lasers, Obj., 10X Eyepcs, Fiber Optic Illumntrs ... 269
VMS-70Z — Mitutoyo Finescope FS-70, Objectives, 10X Eyepieces, Fiber Optic Illuminator ....... 270
VMS-70LP — Mitutoyo Finescope FS-70 for IR Lsrs, Obj, 10X Eyepcs, Fiber Optic Illumntrs ...... 271
VMS-70ZP — Mitutoyo Finescope FS-70, Objectives, 10X Eyepieces, Fiber Optic Illuminator ..... 272
VMS-888L — Seiwa Microscope for IR Lasers with Manual Focus and Accy Kit .......................... 273
VMS-888LP — Seiwa Microscope for IR Lasers with Programmable Focus and Accy Kit ........... 274
VMS-888 — Seiwa Microscope with Manual Focus and Accy Kit ................................................... 275
VMS-888P — Seiwa Microscope with Programmable Focus and Accy Kit ................................... 276
Microscope Objectives/Eye Pieces....................................................................................................... 277
120-873 — A-Zoom2 Objective, 10X, 19mm Working Distance (.45 N.A.), Tophat Compatible ..... 278
120-875 — A-Zoom2 Objective, 5X,33mm working distance (.225 N.A.), Tophat Compatible ...... 279
132-509 — A-Zoom2 Objective, 20X, 13mm, Working Distance (0.6N.A.), Tophat Compatible .... 280
132-109 — Leica 0.63 Auxiliary Lens for S8 Leica Microscope .................................................... 281
131-788 — Leica 25 X Eye Pieces, High Performance, Extended Relief for Leica Microscopes .. 282
131-789 — 30x Eyepieces for Leica S6/S8 Microscopes ................................................................ 283
VMA-60-96 — Mitutoyo Objective, 100X, 1mm Working Distance (0.9 N.A.)) ............................... 284
VMA-60-99 — Mitutoyo Objective, 100X, 6mm Working Distance (0.7 N.A.) ................................. 285
102-517 — Mitutoyo Objective, 10X, 33.5mm Working Distance (0.28 N.A.) .................................. 286
115-246 — Mitutoyo Objective, 200X, 13mm Working Distance (0.62 N.A.) ................................... 287
102-518 — Mitutoyo Objective, 20X, 20mm Working Distance (0.42 N.A.) .................................... 288
102-516 — Mitutoyo Objective, 2X, 34mm Working Distance (0.055 N.A.) .................................... 289
VMA-60-50 — Mitutoyo Objective, 50X,13mm Working Distance (0.55 N.A.) ................................ 290
102-293 — Mitutoyo Objective, 50X, 20.5mm Working Distance (0.42 N.A.) .................................. 291
106-762 — Mitutoyo Objective, 5X, 34mm Working Distance (0.14 N.A.) ...................................... 292
VMA-60-97 — Mitutoyo Objective, NIR100X, 12mm Working Distance, I.R. Passive (0.5 N.A.) .... 293
VMA-60-52 — Mitutoyo Objective, NIR50X, 17mm Working Distance, I.R. Passive (0.42 N.A.) .... 294
VMA-60-95 — Mitutoyo Objective, NUV100X, 11mm Working Distance, U.V. Passive .................. 295
VMA-60-54 — Mitutoyo Objective, NUV50X, 15mm Working Distance, U.V. Passive .................... 296
VMA-60-98 — Mitutoyo Objective, SL100X, 13mm Working Distance (0.55 N.A.) ......................... 297
VMA-60-80 — Mitutoyo Objective, SL80X, 15mm Working Distance (0.5 N.A.) ............................. 298
126-255 — Seiwa Objective, 2.5X, 32mm Working Distance (0.06 N.A.) IR/Green ........................ 299
126-256 — Seiwa Objective, 5X, 35.1mm Working Distance (0.15 N.A.) IR/Green ....................... 300
126-257 — Seiwa Objective, 10X, 36.9mm Working Distance (0.25 N.A.) IR/Green ...................... 301
126-258 — Seiwa Objective, 20X, 22mm Working Distance (0.40 N.A.) IR/Green ( ....................... 302
Microscope Accessories ...................................................................................................................... 303
122-526 — A-Zoom Microscopes, Programmable 2-inch Heavy Duty F-Block ............................ 304
106-763 — A-Zoom Mitutoyo Objective Mount ............................................................................... 305
141-400, 06/22/10, Rev F
• vii
102-363 — Mitutoyo Video Adapter, 1.0X Magnification .................................................................306
101-454 — Spare Bulb for Mitutoyo, A-Zoom, Vid-Rdy Olympus and Optem Illuminators ...........307
Board Test System Accessories ................................................................................................................. 309
134-422, 134-423 — Multi-Orientation Positioners ............................................................................ 310
131-906 — Vacuum Mount Spacer Block ........................................................................................... 311
134-420 — Vacuum Base Board Clamp............................................................................................... 312
134-421 — Vacuum Base PCB Bottom Support .................................................................................. 313
129-691 — Vacuum Based Auxiliary Chuck......................................................................................... 314
125-058 — Video Monitor .................................................................................................................... 315
106-564 — Variable Pitch Mount ......................................................................................................... 316
EZ-PROBE — EZ-Probe Positioner ..................................................................................................... 317
FPD-100 — Fine Pitch Dual-Armed Positioners ................................................................................. 318
SQ-132-667-01 — Vacuum Mount Gantry Top Plate ........................................................................... 319
SQ-129-032-01 — Bottom Side Viewing Camera Kit ........................................................................... 320
005-018 — Contact Substrate ............................................................................................................. 321
141-050 — Portable Vacuum System .................................................................................................. 322
142-171 — WinCal XE Software........................................................................................................... 323
SQ-115-330-03 — Removable 6-inch Pedestal Wafer Chuck ............................................................. 324
M150-ACC-16 — Cable Clamp Kit ....................................................................................................... 325
142-032— Vibration Isolation Table for BTS Packages....................................................................... 326
142-033 — Deluxe Vibration Isolation Table for BTS Packages.......................................................... 327
Consult factory for PN — Dark Box/Vibration Isolation Table for BTS 1000/2000.............................. 328
141-400, 06/22/10, Rev F
• viii
Tesla
Accessories
Item
Page
Probe Holders and Probe Tips
12
Interface Panels and Cables
16
141-400, 06/22/10, Rev F
Tesla Accessories • 11
Probe Holders and Probe Tips
Item
Page
HCP-1-B — High-Current Parametric Probe Holder
13
HCP-TIP-3-350 — High-Current Replaceable Probe Tips, 5-pack
14
HVP-13 — High-Voltage Parametric Probe Holder
15
141-400, 06/22/10, Rev F
HCP-1-B — High-Current Parametric
Probe Holder
Product Features
HCP high-current parametric probe holder for
use with the Tesla on-wafer characterization
system.
Specifications
• Maximum voltage: 500V DC
• Maximum current (DC): 10A
• Maximum current (pulse): 60A, 1 msec max PW,
5% max duty cycle
Tip installed
• Operating temperature range: -55×C to 300×C
• Total resistance with tip: 10mW (typical)
• Isolation resistance: >100GW @ 500V
• Connector type: Dual banana jack
• Length of cable: 1m
• Positioner capability: Summit RF positioner
Ordering Information
Part Number: HCP-1-B
141-400, 06/22/10, Rev F
HCP-TIP-3-350 — High-Current
Replaceable Probe Tips, 5-pack
Product Features
• Includes five tips for use with the HCP-1-B,
high-current parametric coax
• Patented tip design provides low contact
resistance and superior current
dissipation
Specifications
• Maximum voltage: 500V DC
• Maximum current (DC): 10A
• Maximum current (pulse): 60A, 1 msec
max PW, 5% max duty cycle
• Tip material: Tungsten
• Number of tips: 3
• Tip pitch: 350 µm
• Total footprint: 751 µm
• Typical contact resistance on Al: 20mW
• Recommended range of overtravel: 75-125 µm
• Contact force: 20 gms per tip (60 grams total) @ 100 µm overtravel
• Scrub: 75µm
Part Number: HCP-TIP-3-350
141-400, 06/22/10, Rev F
HVP-13 — High-Voltage Parametric Probe
Holder
Product Features
• HVP high-voltage parametric probe for use with the
Tesla on-wafer characterization system.
• Uses replaceable tips available in a variety of
diameters to accommodate device dimensions.
Specifications
• Maximum voltage guarded: 1100V DC
• Maximum voltage unguarded: 3000V DC
• Maximum current: 100mA
• Operating temperature range: -55×C to 300×C
• Isolation resistance (force to guard): >1Tohm @ 1,100V
Shown with DCM-205 positioner
• Typical residual capacitance (with PTT needle): >0.5pF
• Cable characteristics: Approximately 50W (48W)
• Connector type: Amphenal triax threaded 11/16-24
• Replaceable tip type: Straight PTT style needles
• Recommended range of overtravel: 50µm to 100µm
• Scrub: 20um to 40um
• Positioner compatibility: DCM family
• Physical dimensions:
Part Number: HVP-13
141-400, 06/22/10, Rev F
Interface Panels and Cables
Item
Page
144-524 — High-Voltage Triax Interface Panel
17
144-525 — High-Current Banana Interface Panel
18
144-526 — High-Voltage Triax Connection Cable – Interface Panel to High-Voltage Coax
19
144-527 — High Voltage Triax Connector Cable – Interface Panel to High-Voltage Triax
20
141-400, 06/22/10, Rev F
144-524 — High-Voltage Triax
Interface Panel
Product Features
• Eight high-voltage triax connections:
– Four force
– Four sense
• Includes grounding strap
Specifications
• Max Voltage: 3000V (coax)/1100V (triax)
• Connector type: Amphenol triax threaded 11/1624
Part Number: 144-524
141-400, 06/22/10, Rev F
144-525 — High-Current Banana
Interface Panel
Product Features
Front view
• Four pairs standard red and black banana
jacks
– Four force
– Four ground
• Includes grounding strap
Specifications
• Max Current: 10A continuous/60A pulsed,
1msec max PW, 5% max duty cycle
• Max Voltage: 500V
• Connector type: Banana jack
Side view
141-400, 06/22/10, Rev F
144-526 — High-Voltage Triax
Connection Cable – Interface Panel to
High-Voltage Coax
Product Features
• Provides connection between high-voltage triax
interface panel and coaxial instruments
• Includes female (Amphenol MHV) bulkhead
plug for convenient adaptation to other coax
connectors
Specifications
• Maximum voltage: 3,000V (coax guard-shield
connected) 1, 100V (triax)
• Maximum current: 10A
• Length: 1m
• Cable characteristics
– Impedance F-S: 48
– Withstand voltage F-S: 3,000V
– Isolation resistance, F-S: 1T @ 3,000V
• Terminating connector types
– Amphenol triax threaded, 11/16-24
– MHV high-voltage coaxial
141-400, 06/22/10, Rev F
144-527 — High Voltage Triax
Connector Cable – Interface Panel to
High-Voltage Triax
Product Features
• Provides connection between high-voltage triax
interface panel and:
– High-voltage SMUs (Agilent, Keithley)
– Standard triax connectors
Specifications
• Maximum voltage: 1100V (triax)
• Maximum current: 10A
• Length: 1m
• Cable characteristics:
– Withstand voltage: 1,100V (F-G), (G-S)
– Isolation resistance: 1T @ 1,100V (F-G), 100G @ 1,100V (G-S)
• Terminating connector types:
– Amphenol triax threaded, 11/16-24
– High-voltage BNC triaxial
141-400, 06/22/10, Rev F
Elite 300
Accessories
Item
Page
Connection Panels
13
Monitors
15
Probe Card Holders
17
Dark Boxes
17
Accessory Shelves
26
Seismic Restraints
30
Positioners and Positioner Upgrades
32
Probe Mounts and Holders
49
Probes
58
Mounting Kits and Plates
68
141-400, 06/22/10, Rev F
Elite 300 Accessories • 11
Connection Panels
Item
Page
141-790 —Connection Panel
13
141-400, 06/22/10, Rev F
141-790 —Connection Panel
Product Features
• Complete kit of cable connection panels
and accessories
• Optimized for Elite 300 universal accessory
mounting rail system
• All accessories can be mounted on the
platen simultaneously, in any location (left,
right and back sides of the probe station
platen)
Kit Contents
• 2 triaxial connection panels – each panel features 8 triaxial (3-lug) feed through connectors (f),
and 2 BNC coax (2-lug) connectors (f). Panel connections support single triax cables and Agilent
dual triax SMU cable assemblies. (For Agilent Quadrax SMU connections, please contact the
factory).
Front view
Top view
• 1 coaxial connection panel – each panel features 10 BNC coax (2-lug) connectors (f).
(continued on page14...)
141-400, 06/22/10, Rev F
(141-790 —Connection Panel, continued...)
• 2 vacuum manifolds – each manifold features 5 vacuum inlets with integrated on/off pull switches.
• 2 positioner mounts – used for holding DCM positioners above the platen while changing probe
tips.
141-400, 06/22/10, Rev F
Monitors
Item
Page
144-350 — Dual LCD Monitor
16
141-400, 06/22/10, Rev F
144-350 — Dual LCD Monitor
Product Features
• Adds second LCD screen (20-inch) for dual monitor
configuration with Elite 300
• Includes ergonomic dual LCD VESA monitor mounting kit
• Articulated arm for free floating placement of second
LCD monitor
• Universal design can mount in multiple different
configurations
Specifications
• Supports LCD monitor with VESA mount (weight range 1229 lbs)
• Monitor arm has 16-inch height range and tilt/swivel
adjustment
• VESA mounting plates (70/100mm)
• Second LCD monitor can be mounted in two locations:
– to the existing Elite 300 LCD monitor mount (both on one side)
– alone on the Elite 300 system frame (opposite side to existing LCD monitor)
141-400, 06/22/10, Rev F
Probe Card Holders
Item
Page
142-338 — MicroChamber Probe Card Holder
18
141-861 — Probe Card Holder
20
141-400, 06/22/10, Rev F
142-338 — MicroChamber Probe Card
Holder
Product Features
• Universal probe card holder for 4.5-inch rectangular
probe cards
• Maintains dark, dry, EMI-RFI shielded environment
(Elite with MicroChamber)
• PCH can be oriented E/W/S/N for short cables run
to test equipment
• Low profile design allows simultaneous probe card
and internal node needle probes
• Quick changeover from positioners to probe card
• Supports multiple probing configurations with removable access covers
• Supports multiple probe card needle drafts with height adjustment
• Easy 3-point probe card planarization
Specifications
• Temperature range supported: -60°C to 300°C
• Probe card support:
– 4.5-inch wide rectangular cards
– Max. probe card length with edge connector: 11 3/8
– Needles for 8.5-inch long cards can be up to 2.5-inch off center
• Height adjustability:
– 2.16-2.92mm (0.085-inch - 0.115-inch)
– 3.81-4.70mm (0.150-inch - 0.185-inch)
– 5.59mm (0.220-inch)
– 7.11mm (0.280-inch)
• Theta rotation: ± 7.5°
• Max planarization height range: up to 40 mils compression at each planarization point (3)
• Max probe card force: 20 kg (44 lbs)
Kit Contents
• Probe card holder
• MicroChamber cover (supports TopHat microscope objective seal)
• Edge connector kit with 48 and 70 pin connectors (f)
• Rear cable heat shield/support
• Probe card height adjustment kit (4 height settings)
• Cable access/exit kit (2)
(continued on page19...)
141-400, 06/22/10, Rev F
(142-338 — MicroChamber Probe Card Holder, continued...)
• Quick access covers (4)
Shown with all quick
access covers, exit
panels and TopHat
cover removed
Shown with all quick
access covers in place
Shown with TopHat cover
removed
141-400, 06/22/10, Rev F
141-861 — Probe Card Holder
Product Features
• Universal probe card holder for 4.5-inch rectangular
probe cards
• PCH can be oriented E/W/S/N for short cables run to
test equipment
• Low profile design allows simultaneous probe card
and internal node needle probes
• Quick changeover from positioners to probe card
• Supports multiple probe card needle drafts with height
adjustment
• Easy 3-point probe card planarization
Specifications
• Temperature Range supported: -60°C to 300°C
• Probe card support:
– 4.5-inch wide rectangular cards
– Max. probe card length with edge connector: 11 3/8
– Needles for 8.5-inch long cards can be up to 2.5-inch off center
• Height adjustability:
– 2.16-2.92mm (0.085-inch - 0.115-inch)
– 3.81-4.70mm (0.150-inch - 0.185-inch)
– 5.59mm (0.220-inch)
– 7.11mm (0.280-inch)
• Theta rotation: ± 7.5°
• Max planarization height range: up to 40 mils compression @ each planarization point (3)
• Max probe card force: 20 kg (44 lbs)
Kit Contents
• Probe card holder
• Edge connector kit with 48 and 70 pin connectors (f)
• Rear cable heat shield/support
• Probe card height adjustment kit (4 height settings)
141-400, 06/22/10, Rev F
(continued on page 19...)
(141-861 — Probe Card Holder, continued...)
Probe Card
Holder (top
view) with
edge
connector and
cable heat
shield installed
141-400, 06/22/10, Rev F
Dark Boxes
Item
Page
141-588 — Dark Box
23
141-400, 06/22/10, Rev F
141-588 — Dark Box
Product Features
• Provides dark, EMI shielded environment probing
• Easy opening vertical lift front door, with multiple
height open detents
• Large open access to Elite 300 station platen/test
area with vertical door open
• Locking front door handle with keyed lock for
security
• Accommodates laser/video camera microscopes
• Internal low voltage LED lighting with automatic
on/off switching
• Integrated adjustable shelving
• Lift handles for easy installation and removal
• Removable large covers for maximum rear access to station accessories
• Multiple rear and side cable connection access panels, with dark sleeve for large cable, probe
card cable bundles
• Removable blank access panels that allow custom triax/coax feed thru’s
• BNC safety interlock switch for use with instrument or LASER
• 100-240V 50/60Hz compatible
Specifications
• Dimensions
– Dark Box: width 126 cm (49.5-inch) x depth 110 cm (43.5-inch) x height with door closed 91 cm
(36-inch)/height with door open 118 cm (46.5-inch)
– Rear shelves: width 50 cm (20-inch) x depth 25 cm (10-inch), adjustment height: 43 cm (17-inch)
– Large rear access cover: 18-inch x 18-inch
– Access ports for cable connections: 7-inch x 7-inch
• Door lift force: Opening door 5.5 kgs (12 lbs), Closing door 6. 8kgs (15 lbs)
• Door open: 3 detent positions, in addition to full up and down
• Automatic light On/Off switching with door open/close, and manual override
• 12VDC low power high intensity LED lights
141-400, 06/22/10, Rev F
(141-588 — Dark Box, continued...)
• AC/DC powers supply (100-220V, 50/60Hz) CE mark
Side view with front door
in open position
Side view with front door
in closed position
Vertical lift door in open
position
Door lifts vertically and
folds back out of the
way for maximum head
clearance
Front view showing
lights and rear shelves
141-400, 06/22/10, Rev F
Rear view showing
removable panels
(141-588 — Dark Box, continued...)
Kit Contents
• Dark box
• Seismic restraint attachment to frame
• Locking twist handle with keyed lock (2 keys provided)
• 2 internal ceiling mounted low power lights
• 2 adjustable rear shelves
• 2 side mounting locations for ergonomic arm rest kit (not included)
• Extension bracket kit for mounting Elite 300 LCD monitor and Computer Accessory Kit (keyboard,
joystick, mouse) outside dark box
• 2 rear mounting locations for ergonomic LCD monitor arm (not included)
• 2 BNC safety interlocks
• 2 large removable rear access covers
• 4 access panels on rear, with 2 blank covers, and 2 panels with large cable bundle hole and dark
flexible sleeve
• 3 access panels (one on each side), with 2 blank covers, and 1 panels with large cable bundle
hole and dark flexible sleeve
• 4 lift handles and mounting hardware
141-400, 06/22/10, Rev F
Accessory Shelves
Item
Page
144-340 — Side Accessory Shelf Kit
27
143-420 — Rear Instrument Shelf System
28
141-400, 06/22/10, Rev F
144-340 — Side Accessory Shelf
Kit
Product Features
• Side accessory shelf kit easily attaches to the
Elite 300 system frame
• Instruments and accessories can be
conveniently placed at the side of the Elite
300
• Keyboard/mouse accessory tray allows easy
front panel control of test instruments
• Height adjustable
• Adjustable instrument tray can be positioned
over the Elite 300 platen surface, allowing
test instruments to be located close to probes for short cable interconnects
• Seismic restraint straps and attachment points on swiveling platform
Specifications
• Maximum load supported by platform: 68 kg (150 lbs)
• Dimensions
– Platform: width 43 cm (17-inch) x depth 53 cm (21-inch’), Adjustment height: 30.5 cm (12“)
– Keyboard/mouse tray: width 50.8 cm (20-inch) x depth 44.45 cm (17.5-inch)
– Adjustment height: None
• Weight
– Platform and mounting arm: 13.166 kg (29 lbs)
– Keyboard/mouse tray: 9.988 kg (22 lbs)
Kit Contents
• Swiveling instrument/accessory platform
• Mounting hardware
• Keyboard/mouse tray
• Removable/adjustable lower shelf instrument tray
• Removable/adjustable upper shelf
• Seismic restraint straps
141-400, 06/22/10, Rev F
143-420 — Rear Instrument Shelf
System
Product Features
• Shelf system easily attaches to the Elite 300 system
frame
• Instruments and accessories can be conveniently
placed at the rear of the Elite 300
• Seismic restraint straps and attachment points on
all shelving
• Height adjustable upper shelf
• Adjustable instrument tray can be positioned
forward over the Elite 300 platen surface, allowing
test instruments to be located close to probes for
short cable interconnects
Specifications
• Maximum supported instrument load
– Lower shelf and tray: 90.8 kg (200 lbs)
– Upper shelf: 45.4 kg (100 lbs)
• Dimensions
– Lower shelf: width 120 cm (47.24-inch) x depth 46 cm (18.11-inch) x height 76.8 cm (30.23-inch)
– Lower tray: width 75 cm (29.52-inch) x depth 75 cm (29.52-inch), Adjustment forward: 29 cm
(11.41-inch)
– Upper shelf: width 120.6 cm (47.48-inch) x depth 47.9 cm (18.86-inch), Adjustment height: 24.4
cm (9.60-inch)
• Weight
– Lower shelf and tray: 14.98 kg (33 lbs)
141-400, 06/22/10, Rev F
(143-420 — Rear Instrument Shelf System, continued...)
Upper shelf: 12.26 kg (27 lbs)
Complete rear
instrument shelf
system
Bottom shelf and adjustable
instrument tray in the forward position
Bottom shelf
Kit Contents
• Lower shelf and mounting hardware
• Removable/adjustable lower shelf instrument tray
• Removable/adjustable upper shelf
• Seismic restraint straps
141-400, 06/22/10, Rev F
Seismic Restraints
Item
Page
141-418 — Seismic Restraints
31
141-400, 06/22/10, Rev F
141-418 — Seismic Restraints
Product Features
• Provides seismic restraint for Elite 300 Station
Platform
• Installation at time of station facilities setup
• Compatible with Elite standard and low
profile height kits
Kit Contents
• 4 restraint brackets
• Installation guide and bolt mounting recommendations
Floor
restraint
bracket
141-400, 06/22/10, Rev F
Positioners and Positioner Upgrades
Item
Page
139-311B — RF/Microwave Positioner (E/W)
33
144-410 — S300 RF Positioner (E/W) Upgrade Kit
35
139-312B — RF/Microwave Positioner (W)
36
144-411 — S300 RF Positioner (W) Upgrade Kit
38
139-313B — RF/Microwave Positioner (N/S)
39
144-412 — S300 RF Positioner (N/S) Upgrade Kit
40
141-770B — RF/Microwave Positioner (SW)
41
141-778 — mmW Large Area Positioner (E)
43
141-779 — mmW Large Area Positioner (W)
44
MS1-8-40 — RF Motorized Microwave Positioner (E/W)
45
DCM-400-V — Submicron Resolution DC Positioner, Vacuum Base
47
141-400, 06/22/10, Rev F
139-311B — RF/Microwave
Positioner (E/W)
Product Features
• Precision 4 axis probe positioner for RF/
microwave probes
• Optimized for Elite 300 Station Platform
• New one-click positioner quick release
control allows fast setup and effortless
gross positioning of RF probes
• Ultra rigid design for best probe placement
• Smooth glide micrometer controls for
accurate probe placement
• Best probe-to-probe separation
• Multi position RF cable clamp and offset
probe mounting arm for optimized RF
cable connection
• Micrometer set planarity adjustment
• EMI grounding strap
• Industry standard RF probe mount
Specifications
• XY travel: 12.5mm (0.5-inch) fully captured
• Resolution: (1.39 um per degree of rotation) 50 TPI
• Z travel: 11.7mm (.46-inch)
• Micrometer set planarity adjust: ±5°
• Gross X travel: 26.42mm (1.04-inch) with Tophat; 68.07mm (2.68-inch) with no TopHat/insert
• Weight: 3.18 kg (7 lbs)
• 2-Port probe tip separation
– With MicroChamber TopHat: 40mm (1.6-inch)
– Without MicroChamber TopHat: 92.96mm (3.66-inch)
• Probe mount interface: 3 hole Cascade Microtech standard design, with locating pin
• Configurations:
– Use on platen right location as EAST positioner
– Use on platen left location as WEST positioner (4-port)
– Use on platen top/bottom location as NORTH/SOUTH positioners (4-port)
141-400, 06/22/10, Rev F
(139-311B — RF/Microwave Positioner (E/W), continued...)
)
4-port configuration using 2 E/W
positioners and 2 N/S positioners
4 E/W positioners can be used
for alternative 4-port
configuration on the Elite 300
Part Number: 139-311B
141-400, 06/22/10, Rev F
144-410 — S300 RF Positioner (E/W)
Upgrade Kit
Product Features
• Includes a base and arm for use with existing S300 RF positioner (E/W)
RF Positioner (E/W)
Upgrade Kit base
RF Positioner (E/W)
Upgrade Kit arm
141-400, 06/22/10, Rev F
139-312B — RF/Microwave Positioner
(W)
Product Features
• Precision 4 axis probe positioner for RF/microwave
probes
• New one-click positioner quick release control
allows fast setup and effortless gross positioning of RF
probes
• Smooth glide micrometer controls for accurate
probe placement
• Multi position RF cable clamp and offset probe mounting arm for optimized RF cable connection
Specifications
• Resolution (1.39 um per degree of rotation) 50 TPI
• Gross X travel: 26.42mm (1.04-inch) with TopHat; 68.07mm (2.68-inch) with no TopHat/insert
• Configurations:
141-400, 06/22/10, Rev F
(Part Number: 139-312B, continued...)
W positioner and E/W
positioner in 2-port
configuration
Y micrometers on each
positioner face forward for
ease of use
141-400, 06/22/10, Rev F
144-411 — S300 RF Positioner (W)
Upgrade Kit
Product Features
• Includes a base and arm for use with existing S300 RF positioner (W).
RF Positioner (W)
Upgrade Kit base
RF Positioner (W)
Upgrade Kit arm
141-400, 06/22/10, Rev F
139-313B — RF/Microwave Positioner (N/
S)
Product Features
probes
• New one-click positioner quick release control allows
fast setup and effortless gross positioning of RF probes
• Smooth glide micrometer controls for accurate probe
placement
• Multi position RF cable clamp and offset probe
mounting arm for optimized RF cable connection
Specifications
• Gross Y travel: 26.42mm (1.04-inch) with TopHat; 68.07mm (2.68-inch) with no TopHat/insert
• Configurations:
– Use on platen front-left location as SOUTH positioner (4-port)
– Use on platen back-right location as NORTH positioner (4-port)
– Use on platen front-right location as SOUTH-EAST positioner
141-400, 06/22/10, Rev F
144-412 — S300 RF Positioner (N/S)
Upgrade Kit
Product Features
• Includes a base and arm for use with existing S300 RF positioner (N/S)
RF Positioner (N/S)
Upgrade Kit base
RF Positioner (N/S)
Upgrade Kit arm
141-400, 06/22/10, Rev F
141-770B — RF/Microwave
Positioner (SW)
Product Features
microwave probes
• New one-click positioner quick release
control allows fast setup and effortless
gross positioning of RF probes
Specifications
• Configurations:
– Use on platen front-left location as S-WEST positioner
141-400, 06/22/10, Rev F
(141-770B — RF/Microwave Positioner (SW), continued...)
S/W and N/S positioners in a
2-port front configuration,
useful for attaching external
test modules to the
positioners for load-pull,
noise parameters, or
external bias tee
applications
S/W and N/S positioners
with 2 E/W positioners
added in alternate N/S
locations for a 4-port
configuration
141-400, 06/22/10, Rev F
141-778 — mmW Large Area
Positioner (E)
Product Features
• Precision 3 axis large area positioner for
mmWave probes
Specifications
• XY travel: 150mm (6-inch)
• Z travel: 12.5mm (0.5-inch)
• Weight: TDB
– Without MicroChamber TopHat: TBDmm (y-inch)
• Configurations:
– Use on platen left location as EAST positioner (2-port)
4-port configuration using
E mmWave positioner, W
mmWave positioner, and 2
E/W RF positioners placed
in N/S positions.
141-400, 06/22/10, Rev F
141-779 — mmW Large Area
Positioner (W)
Product Features
mmWave probes
Specifications
• Z travel: 12.5mm (0.5-inch) Micrometer set planarity adjust: ±5°
• Weight: TDB
• Configurations:
141-400, 06/22/10, Rev F
MS1-8-40 — RF Motorized Microwave
Positioner (E/W)
Product Features
• Fully programmable high resolution positioner
for RF/microwave probes
• Provides 3 axes of linear motion with 1 in. of
travel
• Video point-and-click movement with Nucleus
prober control software
• New one-click positioner quick release control
allows fast setup and effortless gross positioning
of RF probes
• Manual override of XYZ controls without losing
software position
Specifications
• Z travel: 15mm (0.6-inch)
• Accuracy: 1 µm
• Repeatability: 1 µm
• High resolution at 0.1 micron step size
• Closed loop motor-encoder system
• Speed: 1mm/sec
• Dimensions: height 140mm (5.5-inch) x width 160mm (6.28-inch) x depth 148mm (5.8-inch)
– With MicroChamber TopHat: 40.64mm (1.6-inch)
• Includes 1 ECA-53 motor controller card for ECX-56D high resolution controller (not included)
• Configurations:
– Use on platen left location as WEST positioner
141-400, 06/22/10, Rev F
(Part Number: MS1-8-40, continued...)
Two MS1-8-40 positioners
shown in East and West
positions with 2 139-311B
positioners (in N/S positions)
Part Number: MS1-8-40
141-400, 06/22/10, Rev F
DCM-400-V — Submicron Resolution DC
Positioner, Vacuum Base
Product Features
• Base mounted stage controls – Rigidly mounted controls
minimize tip movement associated with hand-coupled
deflections for rapid and reliable contact on submicron
features.
• Ergonomic access to stage controls – Rear-control
mounting means there is no need to change hand
position when switching between axis controls, while
allowing close placement of adjacent positioners.
• Vacuum base – Quick-release button for fast gross
positioning on platen.
• Extra-fine stage controls – High-sensitivity controls enable
smooth motion, and anti-backlash construction provides predictable probe placement.
• Kinematic linkages for motion transfer – Eliminates mechanical cross talk between axes and run-out
error associated with radial bearings to make touchdown on submicron features effortless.
• Oversized precision mechanical components – Allows for high bearing preloads and stiff linkages
for stable probe contact and long service life.
• Measurement suitability – Compatible with coax, triax and high-impedance probes to match your
device measurements. Can be used simultaneously with probe card holder. Not compatible with
TopHat.
• Integrated mini-triax or SMA connectors – Dedicated probes mount the connector securely to the
positioner base and eliminate cable induced deflections at the tip. Standard probe cables can be
attached to the base with a strain relief clamp.
Specifications
• Feature resolution: < 1µm
• Screw resolution: 200µm/rev (127 TPI)
• Screw sensitivity: 0.56µm/deg
• X, Y stage travel: 0.38 in. (10mm)
• Z stage travel: 0.32 in. (8mm)
• Platen footprint: 2.0 in. x 4 in. (5.08cm x 10.16cm)
• Overall height: 3.2 in. (8.13cm) top of stage
• Maximum height: 4.5 in. (11.43cm) top of Z screw
• Platen attachment: Vacuum base with quick release
141-400, 06/22/10, Rev F
(Part Number: DCM-400-V, continued...)
Easily control XY and Z
without moving your hand
Quick release vacuum
control for fast setup
DCM-400 positioner shown
with universal probe holder,
triaxial probe (straight), and
PTT needle
To minimize cable induced
vibration for sensitive submicron probing, the triaxial
probe integrates a short
triaxial low-noise cable with
a mini triaxial bulkhead
connector that mounts to
the back of the positioner
Part Number: DCM-400-V
141-400, 06/22/10, Rev F
Probe Mounts and Holders
Item
Page
141-800 — DCP Probe Mount (triax, MS1)
50
139-370 — DCP Probe Mount (triax, DCM)
51
141-804 — DCP Probe Mount (DCM)
52
141-806 — PTT Needle Probe Mount and Enhanced Jack Lock Holder (DCM)
53
141-802 — PTT Needle Probe Mount and Enhanced Jack Lock Holder (MS1)
54
144-388 — Universal Probe Holder with Dovetail Adapter Kit
55
144-389 — Universal Probe Holder with MS1 Adapter
56
144-887 — Mount, Pico Probe, Stud Grip
57
141-400, 06/22/10, Rev F
141-800 — DCP Probe Mount
(triax, MS1)
Product Features
• Probe mount for DCP probes (DCP-1xx, DCPHTR)
• Compatible with MS1 programmable
positioners
• Compatible with MicroChamber TopHat
Specifications
• Usable from -60°C to 300°C (above 250°C: 8
hours max. operation),
• Precision Industry Standard SSMC
connectors
• 50 Ohm characteristic impedance
• Breakdown voltage: >500Volts
• Max Current = 1Amp
Kit Contents
• Probe to positioner mount
• Dual triaxial adapter (Kelvin), mini triax (f) to SSMC (m)
• EMI shielding cap
141-400, 06/22/10, Rev F
139-370 — DCP Probe Mount (triax,
DCM)
Product Features
• Compatible with DCM-200/300 series
positioners
Specifications
• Usable from -60°C to 300°C (above 250°C: 8
hours max. operation),
• Precision Industry Standard SSMC connectors
• Max Current = 1Amp
Kit Contents
• Dual triaxial adapter (Kelvin), mini triax (f) to SSMC (m)
• EMI shielding cap
141-400, 06/22/10, Rev F
141-804 — DCP Probe Mount (DCM)
Product Features
• Direct probe/cable connection (SSMC)
• Compatible with DCM-200/300 series positioners
Kit Contents
141-400, 06/22/10, Rev F
141-806 — PTT Needle Probe Mount
and Enhanced Jack Lock Holder
(DCM)
Product Features
• Enhanced probe mount for PTT needle probes
(45°)
• Compatible with DCM-200/300 series
positioners
• Easy probe needle replacement without tools
• Compatible with all 45o PTT series probe
needles
Kit Contents
• Jack lock holder with SSMC (f) and pin jack (f) connectors
• 1m coax (m) to SSMC (m)
• 18-inch cable with pin jack (m) to (m)
141-400, 06/22/10, Rev F
141-802 — PTT Needle Probe
Mount and Enhanced Jack Lock
Holder (MS1)
Product Features
• Enhanced probe mount for PTT needle
probes (45°)
• Compatible with all 45o PTT series probe
needles
• Compatible with MS1 programmable
positioners
Kit Contents
• Jack lock holder with SSMC (f) and pin jack (f) connectors
• 1m coax (m) to SSMC (m)
141-400, 06/22/10, Rev F
144-388 — Universal Probe Holder with
Dovetail Adapter Kit
Product Features
• Universal probe holder for DCM-2/3/400 series positioners
(non-TopHat compatible)
• Locking universal “swivel-inch joint for quick probe setup
• Gross Z height adjustment for easy probe tip
replacement
• Standard probe interface supports multiple probes
(coax, triax, unshielded, picoprobe)
Kit Contents
• Universal probe holder
• Cable clamp
• Mounting screws
Universal probe holder shown
mounted on DCM-300 series
positioner, with a straight
coaxial probe and PTT needle
combination
141-400, 06/22/10, Rev F
144-389 — Universal Probe Holder with MS1
Adapter
Product Features
• Universal probe holder for MS1-44 programmable positioners
(non-TopHat compatible)
• Locking universal “swivel-inch joint for quick probe setup
• Gross Z height adjustment for easy probe tip replacement
• Standard probe interface supports multiple probes (coax, triax,
unshielded, pico probe)
• Side cable clamp for minimizing cable vibration to the probe
Kit Contents
• Universal probe holder
• Cable clamp
• Mounting screws
141-400, 06/22/10, Rev F
144-887 — Mount, Pico Probe, Stud Grip
Product Features
• Adapts pico probe high impedance probes to the universal probe holder
Picoprobe high impedance
probe on the DCM-300
positioner
Picoprobe high impedance
probe on the DCM-400
positioner
141-400, 06/22/10, Rev F
Probes
Item
Page
144-392 — Unshielded Probe Kit
59
139-331 — Coaxial Probe (Straight)
60
139-870 — Coaxial Probe (Bent)
61
144-390 — Triaxial Probe (Straight)
62
144-391 — Triaxial Probe (Bent)
63
142-259 — Coaxial Probe, Straight, DCM-400, Jack Lock
64
144-963 — Coaxial Probe, Bent, DCM-400, Jack Lock
65
142-258 — Triaxial Probe, Straight, DCM-400, Jack Lock
66
144-962 — Triaxial Probe, Bent, DCM-400, Jack Lock
67
141-400, 06/22/10, Rev F
144-392 — Unshielded Probe Kit
Product Features
• Interchangeable probe arms (unshielded)
• Easy probe needle replacement without
tools
• Pin jack for DC electrical connection
• Compatible with all PTT series probe needles
Kit Contents
• Collet adapter with pin lock connector (f)
• Straight unshielded probe arm with jack lock
• 35° bent unshielded probe arm with jack lock
Unshielded probe
(straight) and collet
shown attached to
universal probe holder
and DCM-200 series
positioner
141-400, 06/22/10, Rev F
139-331 — Coaxial Probe
(Straight)
Product Features
• Shielded DC measurements with coaxial
probe
• Straight configuration for multiple probing
applications when using straight or 45°
needles for steep access
• Replaceable SMA cable
• Easy connection to Elite 300 coax connection panel on platen
Kit Contents
• Straight shielded probe
• Integrated SMA (f) connector
• Shielded coaxial cable, 30-inch with SMA (m) to BNC (m)
2 DCM positioners and
universal probe mounts,
one using the straight
coax probe with straight
needle, and the other
using a bent coax probe
with 45° bent PTT needle
141-400, 06/22/10, Rev F
139-870 — Coaxial Probe (Bent)
Product Features
probe
• Bent configuration for increased
microscope objective clearance with high
magnification/low working distance
objective lenses
• Easy probe needle replacement without
tools
• Compatible with all bent PTT series probe needles
• Replaceable SMA cable
• Easy connection to Elite 300 coax connection panel on platen
Kit Contents
• Bent 35° shielded probe
• Integrated SMA (f) connector
• Shielded coaxial cable, 30-inch with SMA (m) to BNC (m)
Coaxial probe (bent) with
45° PTT needle, shown
attached to universal probe
holder and DCM-200 series
positioner.
141-400, 06/22/10, Rev F
144-390 — Triaxial Probe
(Straight)
Product Features
• Guarded DC measurements with triaxial
probe
• Integrated triaxial cable for low-noise
measurements
• Easy connection to Elite 300 triaxial
connection panel on platen
applications when using straight or 45°
Kit Contents
• Straight triax probe
• Integrated triaxial low-noise cable, 30-inch with triax (m) connector
141-400, 06/22/10, Rev F
144-391 — Triaxial Probe (Bent)
Product Features
probe
measurements
• Easy connection to Elite 300 triaxial connection panel on platen
• Bent configuration for increased microscope objective clearance with high magnification/low
working distance objective lenses
• Compatible with all 45° PTT series probe needles
Kit Contents
• Bent 35 ° triax probe
• Integrated triaxial low-noise cable, 30-inch with triax (m) connector
141-400, 06/22/10, Rev F
142-259 — Coaxial Probe,
Straight, DCM-400, Jack Lock
Product Features
probe
applications when using straight or 45o
• Coax connector mounts to DCM-400
positioner for reduced cable induced
vibration to the sub-min probe tip needle
• Compatible with DCM-400 and universal probe holder
Kit Contents
• Straight shielded probe
• Integrated coaxial cable and SMA(f) connector
• SMA (f) bulkhead connector mounts to the DCM-400 positioner
Coax probe (DCM straight) shown on
DCM-400 precision submicron positioner
Dovetail with
short spacer
141-400, 06/22/10, Rev F
144-963 — Coaxial Probe, Bent,
DCM-400, Jack Lock
Product Features
probe
• Bent configuration for increased
microscope objective clearance with high
magnification/low working distance
objective lenses
• Coax connector mounts to DCM-400 positioner for reduced cable induced vibration to the submin probe tip needle
Kit Contents
• Bent 35° shielded probe
• Integrated coaxial cable and SMA(f) connector
Coaxial probe (DCM bent) shown on DCM-400
precision sub-micron
positioner
141-400, 06/22/10, Rev F
142-258 — Triaxial Probe,
Straight, DCM-400, Jack Lock
Product Features
probe
measurements
• Bulkhead triax connector mounts to DCM400 positioner for reduced cable induced
vibration to the sub-min probe tip needle
• Straight configuration for multiple probing applications when using straight or 45° needles for steep
access
• Compatible with PTT series probe needles
Kit Contents
• Straight triax probe
• Integrated short triaxial low-noise cable
• Mini triax (f) bulkhead connector mounts to the DCM-400 series positioner
Triax probe (DCM straight) shown on DCM
positioner and mount
141-400, 06/22/10, Rev F
144-962 — Triaxial Probe, Bent,
DCM-400, Jack Lock
Product Features
probe
measurements
• Bulkhead triax connector mounts to DCM400 positioner for reduced cable induced vibration to the sub-micron probe tip needle
• Bent configuration for increased microscope objective clearance with high magnification/low
working distance objective lenses
Kit Contents
• Bent 35° triax probe
• Integrated short triaxial low-noise cable
• Mini triax (f) bulkhead connector mounts to the DCM-400 series positioner
Triax probe (DCM - bent)
shown on DCM
positioner and mount
141-400, 06/22/10, Rev F
Mounting Kits and Plates
Item
Page
143-428 — Agilent 42941 Mounting Kit
69
143-429 — Mounting Plate for B1500A SCUU
70
144-422 — Mounting Plate for B1500A ASU, E5288A Atto Sense Unit
71
141-400, 06/22/10, Rev F
143-428 — Agilent 42941 Mounting Kit
Product Features
• Mounting bracket to hold Agilent 42941 probe
• Compatible with Elite 300 RF positioners
Kit Contents
• 2 cables:
– SMA (m) to SMA (m)
– 120mm (4.7-inch)
• Mounting bracket for RF positioner
Shown on RF positioner
with Agilent high
impedance probe
141-400, 06/22/10, Rev F
143-429 — Mounting Plate for B1500A SCUU
Agilent SCUU mounted to plate
Plate mounts on universal
accessory mounting rails
141-400, 06/22/10, Rev F
144-422 — Mounting Plate for B1500A ASU,
E5288A Atto Sense Unit
Agilent ASU mounted to plate
Plate mounts on universal
accessory mounting rails
141-400, 06/22/10, Rev F
141-400, 06/22/10, Rev F
M150
Accessories
Item
Page
System Modules
12
M150 Microscope/Video Accessories
17
M150 Station Accessories
22
M150 DC Probes, Probe Arms and Accessories
34
141-400, 06/22/10, Rev F
M150 Accessories • 11
System Modules
Item
Page
M150-MSM-1 — Scope Mount Boom Arm for Low Power Scopes
13
M150-MSM-2 — Scope Mount Large Area High Stability Bridge for High/Low Power Scopes
14
M150-DTH-1 — DUT Holder, 150mm Chuck with 2 Aux Chucks and Dual Triax Connectors
15
M150-DTH-4 — DUT Holder for PCB and Irregular Parts
16
141-400, 06/22/10, Rev F
M150-MSM-1 — Scope Mount Boom
Arm for Low Power Scopes
Product Features
• Parallel shaft ball bearing design
• Precise, effortless manual placement of
microscope
• Optimized for StereoZoom microscopes
• Quick release clamps for height, extension and
swing
Specifications
• 1.5-inch (37.2mm) stainless steel vertical post
• Dual 0.75-inch(19.05mm) stainless steel horizontal posts
Part Number: M150-MSM-1
141-400, 06/22/10, Rev F
M150-MSM-2 — Scope Mount Large
Area High Stability Bridge for High/Low
Power Scopes
Product Features
• Large travel range enables view of entire wafer
• Simple adjustment using X/Y knobs
• Rigid design optimized for high magnification
microscopes
Specifications
• 150mm(6-inch) X/Y travel
• Precise alignment to wafer or DUT stage (low run-out)
Part Number: M150-MSM-2
141-400, 06/22/10, Rev F
M150-DTH-1 — DUT Holder, 150mm
Chuck with 2 Aux Chucks and Dual Triax
Connectors
Product Features
• Triaxial wafer chuck
• Equipped with dual-triax connectors
• 2 isolated auxiliary chucks for use with ISS or
contact substrate
• Lack of vacuum rings enables optimal microwave
measurements
Specifications
• Designed for up to 150mm (6-inch) wafers
• Vacuum zone control is compatible with delicate wafers and/or RF measurements
• Precise alignment to wafer or DUT stage (low run-out)
Part Number: M150-DTH-1
141-400, 06/22/10, Rev F
M150-DTH-4 — DUT Holder for PCB and
Irregular Parts
Product Features
• Device holder for printed circuit boards, modules or
packaged devices
• Clamps and supports for high quality measurements
Specifications
• 4-inchx6-inch circuit board clamping capability
• T-slots position clamps an supports
Part Number: M150-DTH-4
141-400, 06/22/10, Rev F
M150 Microscope/Video Accessories
Item
Page
M150-ACC-6 — Z Lift Scope Mount for High Power Scope
18
M150-ACC-10 — High Power Scope Mount, Fixed, for High Power Scopes
19
M150-ACC-15 — Low Power Scope Mount, Fixed, for Low Power StereoZoom microscopes
20
M150-ACC-14 — Monitor Stand for LCD Monitors
21
141-400, 06/22/10, Rev F
M150-ACC-6 — Z Lift Scope Mount for
High Power Scope
Product Features
• Mounts high magnification microscopes to large
area high stability bridge
• Enables quick removal of microscope from work
zone
• Simplifies probe replacements
• Enables safe probe tip changes
Specifications
• 100mm pneumatic vertical lift
Part Number: M150-ACC-6
141-400, 06/22/10, Rev F
M150-ACC-10 — High Power Scope Mount, Fixed,
for High Power Scopes
Product Features
• Mounts high magnification microscopes to large area high
stability bridge
Specifications
• Fixed and rigid mount
141-400, 06/22/10, Rev F
M150-ACC-15 — Low Power Scope Mount, Fixed, for Low Power
StereoZoom microscopes
Product Features
• Mounts StereoZoom microscopes to large area high stability bridge
Specifications
• Fixed and rigid mount
141-400, 06/22/10, Rev F
M150-ACC-14 — Monitor Stand for LCD
Monitors
Product Features
• Mounts flat panel display to probe station base
• Simplifies ergonomics when using a video camera on
microscopes
• Relays instrumentation interface to a convenient location
for operator comfort
Specifications
• Standard VESA mount
• Optimized for 20-inch class flat panel monitors
Kit Contents
141-400, 06/22/10, Rev F
M150 Station Accessories
Item
Page
M150-ACC-2 — Raised Chuck Kit
23
M150-ACC-13 — Vacuum Manifold, Magnetic Base
24
M150-ACC-16 — Magnetic cable clamp kit for M150
25
M150-ACC-18 — Pin to Banana Interface Kit
26
M150-ACC-19 — Triax Panel, Magnetic Base
27
M150-ACC-28 — Coax Panel, Magnetic Base
28
M150-ACC-20 — Absorbing ISS Holder, M150
29
M150-ACC-22 — Optional Dual Triax Connector Block, 150mm+Aux Chuck (M150-DTH3)
30
M150-ACC-25 — Platen Insert for Multipurpose Platen/Station
31
M150-ACC-26 — 4 Port Option for mmW Stations
32
M150-ACC-27 — Raised Platen Extension for mmW Platen/Station
33
141-400, 06/22/10, Rev F
M150-ACC-2 — Raised Chuck Kit
Product Features
• Chuck and microscope riser kit
• Elevates chuck surface to above platen levels
• For use with mmWave configuration or other
configuration that require the chuck surface above
the platen surface
• Sets chuck level to ensure compatibility with cable
and adapter setup for Summit 9000 series and large
area positioner applications
Specifications
• Elevates chuck and microscope by 56.5mm
Kit Contents
• Dovetail mount to mate with stage
• Dovetail mount to mate with chuck
• Microscope riser plate
141-400, 06/22/10, Rev F
M150-ACC-13 — Vacuum Manifold,
Magnetic Base
Product Features
• 5 port vacuum manifold
• Magnet base mounts at the most convenient
location (e.g., on platen)
• For use with vacuum based positioners or
other vacuum based accessories
• Easy push-pull on/off controls
Specifications
• Input connection: 1/8-inch ID push on connector
• Output connections: 1/16-inch ID
141-400, 06/22/10, Rev F
M150-ACC-16 — Magnetic cable clamp kit for
M150
Product Features
• Magnetic base cable clamp
• Enables easy cable routing
• Helps to minimize cable vibration that can affect
measurements
• Groove in base holds cable securely
Kit Contents
• One each cable clamp
141-400, 06/22/10, Rev F
M150-ACC-18 — Pin to Banana
Interface Kit
Product Features
• Six port pin jack to banana jack interface with
magnetic base
• Used with unshielded probes (e.g. MMP-01 or 139332) to convert to a banana style output
• Magnet base enables convenient placement
based on your positioner locations
Kit Contents
• One 6 port interface
141-400, 06/22/10, Rev F
M150-ACC-19 — Triax Panel,
Magnetic Base
Product Features
• Triaxial connection panel for convenient cable
management
• Magnet base enables convenient placement
based on your positioner location
• 10 triaxial (3-lug) feed through connectors
(female)
• Panel connections support single triax cables
and Agilent dual triax SMU cable assemblies. For
Agilent Quadrax SMU connections, please contact the factory.
Kit Contents
• Magnet base connection panel
• Ground strap
141-400, 06/22/10, Rev F
M150-ACC-28 — Coax Panel,
Magnetic Base
Product Features
• Coxial connection panel for convenient cable
management
• Magnet base allows for convenient placement
based on your positioner location
• 10 Coaxial feed through connectors (female)
Kit Contents
• Magnet base connection panel
• Ground strap
141-400, 06/22/10, Rev F
M150-ACC-20 — Absorbing ISS
Holder, M150
Product Features
• Microwave absorber top for auxiliary
chucks/ISS holders
• Attenuates unwanted mods when using ISSs
above 75 GHz
• Secured by vacuum
Kit Contents
• One each aux chuck absorber top
141-400, 06/22/10, Rev F
M150-ACC-22 — Optional Dual Triax
Connector Block, 150mm+Aux Chuck
(M150-DTH3)
Product Features
• Adds dual triax connection port to a M150-DTH-3
Chuck
• Provides Kelvin connection to the chuck
• Provides a guarded chuck connection
Kit Contents
• Dual triax connection housing with pre-mounted connectors
141-400, 06/22/10, Rev F
M150-ACC-25 — Platen Insert for
Multipurpose Platen/Station
Product Features
• Provides extra surface area for placing probe
positioners on platen
• Compatible with vacuum and magnetic base
positioners
141-400, 06/22/10, Rev F
M150-ACC-26 — 4 Port Option for mmW
Stations
Product Features
• Adds 4-port capability to mmW stations by adding
platen area in front
• Includes true North and true South RF positioners
• Compatible only with stations equipped with raised
chuck kits
• Enables wafer loading with roll-out stage
141-400, 06/22/10, Rev F
M150-ACC-27 — Raised Platen
Extension for mmW Platen/Station
Product Features
• Adds 4-port capability to mmW stations by adding
platen area in front
• Useful for DC positioners
• Compatible only with stations equipped with raised
chuck kits
• Enables wafer loading with roll-out stage
141-400, 06/22/10, Rev F
M150 DC Probes, Probe Arms and Accessories
Item
Page
139-332 — Needle Probe Mount for DCM-200/DCM-300 Series Positioners, 40mm
35
139-331 — Coaxial Probe, Straight, for DCM Series Positioners, 40mm (PE5-02 for M150)
36
139-330 — Triaxial Probe, Straight, for DCM Series Positioners, 40mm (PE5-32 for M150)
37
139-870 — Coaxial Probe, Bent 35°, for DCM Series Positioners, 40mm, (45° PTT Tips)
38
139-865 — Triaxial Probe, Bent 35°, for DCM Series Positioners, 40mm, (45° PTT Tips)
39
143-450 — DCP Probe Mount, Dual Triax Adapter (Kelvin) for DCM-200/300 Positioners
40
146-166 — DCP Probe Mount, Direct Coax SSMC for DCM-200/300 Positioners
41
PHJ-408 — Jack Lock Probe Holder, Unshielded, Bent 35°, 40mm, M150 (45° PTT Tips)
42
PHJ-40 — Jack Lock Probe Holder, Unshielded, 40mm
43
PHW-40B — Wrench Lock Probe Holder, Unshielded, Bent 35°, 40mm (Straight PTT Tips)
44
PHQ-40B — Quick Lock Probe Holder, Unshielded, Bent 35°, 40mm (Straight PTT Tips)
45
133-464 — mmW Positioner for 150mm Stations, Manual, East Position
46
133-463 — mmW Positioner for 150mm Stations, Manual, West Position
47
141-858 — FPC Mount for M150 RF Positioners
48
POS-RF-01 — West RF Positioner for M150 Platform
49
POS-RF-02 — North or South RF Positioner for M150 Platform, 40mm
50
POS-RF-03 — East or West RF Positioner for M150 Platform
51
POS-RF-04 — North, East, or West RF Positioner for M150 mmWave Platform
52
141-400, 06/22/10, Rev F
139-332 — Needle Probe Mount for
DCM-200/DCM-300 Series Positioners,
40mm
Product Features
• Probe mount for DCM200/300 series positioner
mounted on M150 station
• Adjustable probe pitch/angle of the probe holder
• Adjustable yaw pivots the probe right or left
• Gross Z adjustment
Specifications
• This probe mount is compatible with the following probes/needle holders:
– 139-331 Coaxial probe, straight, for DCM series positioners, 40mm (PE5-02 for M150)
– 139-330 Triaxial probe, straight, for DCM series positioners, 40mm (PE5-32 for M150)
– 139-870 Coaxial probe, bent 35°, for DCM series positioners, 40mm, M150 (use 45° PTT probe tips
only)
– 139-865 Triaxial probe, bent 35°, for DCM series positioners, 40mm, M150 (use 45° PTT probe tips
only)
– PHJ-40B Jack lock probe holder, unshielded, bent 35°, for DCM series positioners, 40mm, M150
(use 45° PTT probe tips only)
– PHJ-40 - Jack lock probe holder, unshielded, for DCM series positioners, 40mm
– PHW-40B Wrench lock probe holder, unshielded, bent 35° for DCM series positioners, 40mm,
M150 (use straight PTT probe tips only)
– PHQ-40B Quick lock probe holder, unshielded, bent 35° for DCM series positioners, 40mm, M150
(use straight PTT probe tips only)
141-400, 06/22/10, Rev F
139-331 — Coaxial Probe, Straight, for
DCM Series Positioners, 40mm (PE5-02
for M150)
Product Features
• Coaxial probe holder for M150 systems, straight
• Uses PTT style replaceable needle probes (not
included)
• 50 ohm impedance
• Replaceable cable
Kit Contents
• Probe/needle holder
• 30-inch cable (SMA male to BNC male)
• Compatible with DCM-100 or DCM200/300 using the 139-332 probe mount
141-400, 06/22/10, Rev F
139-330 — Triaxial Probe, Straight, for
DCM Series Positioners, 40mm (PE5-32
for M150)
Product Features
• Triaxial probe holder for M150 systems, straight
• For triaxial instrumentation and guarded
applications
included)
• Cable length 30-inches
Kit Contents
141-400, 06/22/10, Rev F
139-870 — Coaxial Probe, Bent 35°, for
DCM Series Positioners, 40mm, (45°
PTT Tips)
Product Features
• Coaxial probe holder for M150 systems, bent 35°
included)
Kit Contents
141-400, 06/22/10, Rev F
139-865 — Triaxial Probe, Bent 35°, for
DCM Series Positioners, 40mm, (45°
PTT Tips)
Product Features
• Triaxial probe holder for M150 systems, bent 35°
• For triaxial instrumentation and guarded
applications
included)
• Cable length 30-inches
Kit Contents
141-400, 06/22/10, Rev F
143-450 — DCP Probe Mount, Dual
Triax Adapter (Kelvin) for DCM-200/
300 Positioners
Product Features
• Enables Kelvin connection to DCP style probes
• Supports DCM200/300 positioner and DCP probes
Specifications
• Instrument connections are female mini-triax
connectors
• Probe connections are cables with SSMC male
connectors, for use with DCP style probes
• Usable from -60°C to 300°C (above 250°C: 8 hours max. operation),
• Max current = 1Amp
Kit Contents
141-400, 06/22/10, Rev F
146-166 — DCP Probe Mount, Direct
Coax SSMC for DCM-200/300
Positioners
Product Features
• Mounting bracket for DCP probes
• For use on DCM-200/300 series positioners
• For use with direct cable from instrument to DCP
probe (e.g., 105-540 or 124-562
• BNC to SSMC cables
Kit Contents
• Ground strap
141-400, 06/22/10, Rev F
PHJ-408 — Jack Lock Probe Holder,
Unshielded, Bent 35°, 40mm, M150 (45°
PTT Tips)
Product Features
• Basic PTT needle probe holder with jack lock, bent
35°
• Uses pin jack style connection (e.g., MAE cables,
one included)
• Brass needle holder can be user formed as needed
Kit Contents
• Probe holder arm
• MAE-44/18 cable, 18-inch
Part Number: PHJ-40B
141-400, 06/22/10, Rev F
PHJ-40 — Jack Lock Probe
Holder, Unshielded, 40mm
Product Features
• Basic PTT needle probe holder with jack
lock, straight
• Uses pin jack style connection (e.g., MAE
cables, one included)
Kit Contents
• MAE-44/18 cable 18-inch
Part Number: PHJ-40
141-400, 06/22/10, Rev F
PHW-40B — Wrench Lock Probe
Holder, Unshielded, Bent 35°, 40mm
(Straight PTT Tips)
Product Features
• Basic PTT needle probe holder with wrench lock,
bent 35°
one included)
Kit Contents
Part Number: PHW-40B
141-400, 06/22/10, Rev F
PHQ-40B — Quick Lock Probe Holder,
Unshielded, Bent 35°, 40mm (Straight
PTT Tips)
Product Features
• Basic PTT needle probe holder with quick lock,
bent 35°
one included)
• Brass needle holder can be user formed as
needed
Kit Contents
Part Number: PHQ-40B
141-400, 06/22/10, Rev F
133-464 — mmW Positioner for 150mm
Stations, Manual, East Position
Product Features
Waveguide and 1.0mm coaxial probes
• True vertical Z-axis – avoids probe damage when
probes are in close proximity to each other (thru
measurements) and easy to view initial contact for
• Quick release mechanism on X and Y axes for
rapid test set-up
• Includes brackets to secure common test heads
Specifications
• Configurations:
– Use on platen left location as EAST positioner
141-400, 06/22/10, Rev F
133-463 — mmW Positioner for 150mm
Stations, Manual, West Position
Product Features
Waveguide and 1.0mm coaxial probes
• True vertical Z-axis – avoids probe damage when
• Quick release mechanism on X and Y axes for
rapid test set-up
Specifications
• Configurations:
141-400, 06/22/10, Rev F
141-858 — FPC Mount for M150 RF
Positioners
Product Features
• Adapts between standard Cascade Microtech 3hole mount to FPC style mount
• Allows the FPC probe to swing to address probing
target
Specifications
• Compatible with standard 40mm chuck below
platen configurations
• Compatible with POS-RF positioners
141-400, 06/22/10, Rev F
POS-RF-01 — West RF Positioner for
M150 Platform
Product Features
probes
• Rigid design for best probe placement
probe placement
• Multi position RF cable clamp for optimized RF
cable connection
Specifications
• Configurations:
Part Number: POS-RF-01
141-400, 06/22/10, Rev F
POS-RF-02 — North or South RF
Positioner for M150 Platform, 40mm
Product Features
probes
probe placement
cable connection
Specifications
• Configurations:
– Use on platen left front location as SOUTH positioner
– Use on platen right rear location as NORTH positioner
141-400, 06/22/10, Rev F
POS-RF-03 — East or West RF
Positioner for M150 Platform
Product Features
probes
probe placement
cable connection
Specifications
• Configurations:
141-400, 06/22/10, Rev F
POS-RF-04 — North, East, or West RF
Positioner for M150 mmWave Platform
Product Features
probes
probe placement
cable connection
Specifications
• Designed for chuck above platen mmWave configuration
• Configurations:
– Use on platen rear location as NORTH positioner
141-400, 06/22/10, Rev F
Summit
Accessories
Item
Page
Optical Bridge Mounts and Transports
12
Summit/S300 Connection Panels (Coax, Triax, Pin jack, Banana Vacuum)
19
Summit/S300 Mounting Kits and Miscellaneous Accessories
27
Summit/S300 Probe Card Holder (PCHs) and Accessories
38
Microscope Mounting plates (Summit/S300 and Alessi)
45
Lab Accessories
51
DC Positioners (DCMs and MS1s)
56
56
S300, Summit and Alessi Probe Arms/Mounts
73
DCM-100 Probes and Probe Arms/Mounts (for use with PPT needles)
84
Alessi Series Probe Arms/ Mounts
94
DC Probes, Coax and Triax, DCP and PE5 Style Probe Holders
101
S300/Summit RF/Microwave Positioners
MPH Universal RF/Microwave Positioners
120
RF, Microwave and mmWave Adaptors and Accessories
129
Module Probe Positioners
132
Accessories for Legacy Systems
135
135
129
132
135
141-400, 06/22/10, Rev F
Summit Accessories • 11
Optical Bridge Mounts and Transports
Item
Page
114-468 — Large Area Optics Bridge Mount for Summit Systems
114-739 — High Stability Optics Bridge Mount for Summit Systems
115-416 — Low Power Optics Boom Stand for Summit Systems
123-224 — High Stability Optics Bridge Mount (2-inchx2-inch) for Summit Systems
131-923 — Motorized Theta Upgrade Kit for Summit 12K Stations (with 80 Pin Interconnect)
131-924 — Motorized Theta Upgrade Kit for Summit 12K Stations (with 68 Pin Interconnect)
105-626 — Triax Connection Panel, Side Mount, for Summit Stations
106-171 — Triax Connection Panel for Summit, Lg Area Optical Bridge/Boom Stand Config
114-737 — Vacuum Manifold Kit for S300, Summit, High Stability Optics Bridge
118-640 — Triax Connection Panel for S300, High Stability Bridge Config
134-710 — Triax Connection Panel for Summit, High Stability Bridge Config
RAC-92 — Pin Jack to Banana Interface Panel for S300, Summit, High Stblty Optical Bridge
RAC-96 — Pin Jack to Coax Interface Panel for S300, Summit, High Stability Optical Bridge
13
14
15
16
17
18
20
21
22
23
24
25
26
141-400, 06/22/10, Rev F
114-468 — Large Area Optics Bridge
Mount for Summit Systems
Product Features
• Larger area 6-inch x 8-inch XY movement range
• Linear Z lift
• Compatible with most common microscopes used
on probing systems
• Manual lead screw driven XY movement
Specifications
• 6-inch X axis movement range (± 3-inch from center of travel)
• 8-inch Y axis movement range (± 4-inch from center of travel)
• 3-inch linear manual Z lift
A microscope mounting plate matching the selected microscope and microscope transport is
required.
NOTE
Fine Z range/focus control is managed using the microscope focus mechanism. Select
microscope models offer optional programmability for this feature.
141-400, 06/22/10, Rev F
114-739 — High Stability Optics Bridge
Mount for Summit Systems
Product Features
• High Stability 1-inch x 1-inch XY microscope
transport
• Easy coaxial manual XY drive controls
• Pneumatic tilt back Z lift
• Supports laser and very small structure work
Specifications
• 1-inch X axis movement range (± 0.5-inch from center of travel)
• 1-inch Y axis movement range (± 0.5-inch from center of travel)
A microscope mounting plate matching the selected microscope and microscope transport is
required.
NOTE
141-400, 06/22/10, Rev F
115-416 — Low Power Optics Boom Stand for
Summit Systems
Product Features
• Microscope boom stand for low power microscopes/optics
• Provides for a wide range of movement
• Enables movement of the microscope fully out of the probing area
• Not compatible with eVue, Mitutoyo, Seiwa, or A-Zoom
microscopes
• Fits Summit 11/12K systems
• Uses standard bonder arm mounts
Includes illuminator mounting tray.
141-400, 06/22/10, Rev F
123-224 — High Stability Optics Bridge
Mount (2-inchx2-inch) for Summit
Systems
Product Features
• Programmable high stability 2-inch x 2-inch XY
microscope transport
• Motorized XY control with rotary encoders for
precision positioning
• Pneumatic tilt back Z lift
• Supports laser and very small structure work
• Knobs for manual control provided
Specifications
• 2-inch X axis movement range (± 1-inch from center of travel)
• 2-inch Y axis movement range (± 1-inch from center of travel)
• Encoder driven positioning provides resolution of 0.1 micron
ECA-53 drive card included.
NOTE
An ECX-56 equipped system is required.
141-400, 06/22/10, Rev F
131-923 — Motorized Theta Upgrade Kit
for Summit 12K Stations (with 80 Pin
Interconnect)
Product Features
This kit supports new Automatic wafer alignment and
new productivity tools in Nucleus and Nucleus VISION
software packages.
Specifications
• Travel ± 5.5°
• Resolution 0.65µm (0.03 mils)*
• Repeatability ± 2µm (0.08 mils)*
• Accuracy ± 2µm (0.08 mils)* standard moves, ± 3µm (0.12 mils)* large moves
* Measured at edge of 200mm chuck
Kit Contents
• New motorized Theta/Z-stage assembly
• Interconnect board electronics for 80-pin motor controller
• Motor driver and complete accessories
• Requires Nucleus 3.0 (or higher) prober control software
• Automatic wafer alignment requires Nucleus VISION (p/n 123-572)
• Installation must be ordered with kit (p/n SRV-STATION-UP)
• Must be used with PC48 OR PC38, not compatible with PCI motor card
141-400, 06/22/10, Rev F
131-924 — Motorized Theta Upgrade Kit
for Summit 12K Stations (with 68 Pin
Interconnect)
Product Features
This kit supports new Automatic wafer alignment and
new productivity tools in Nucleus and Nucleus VISION
software packages.
Specifications
• Travel ± 5.5°
• Resolution 0.65µm (0.03 mils)*
• Repeatability ± 2 µm (0.08 mils)*
• Accuracy ± 2 µm (0.08 mils)* standard moves, ± 3µm (0.12 mils)* large moves
*Measured at edge of 200mm chuck
Kit Contents
• New motorized Theta/Z-stage assembly
• Interconnect board electronics for 68-pin motor controller
• Motor driver and complete accessories.
• Requires Nucleus 3.0 (or higher) prober control software
• Automatic wafer alignment requires Nucleus VISION (p/n 123-572)
• Installation must be ordered with kit (p/n SRV-STATION-UP)
141-400, 06/22/10, Rev F
Summit/S300 Connection Panels (Coax, Triax, Pin jack,
Banana Vacuum)
Item
105-626 — Triax Connection Panel, Side Mount, for Summit Stations
106-171 — Triax Connection Panel for Summit, Lg Area Optical Bridge/Boom Stand Config
114-737 — Vacuum Manifold Kit for S300, Summit, High Stability Optics Bridge
118-640 — Triax Connection Panel for S300, High Stability Bridge Config
134-710 — Triax Connection Panel for Summit, High Stability Bridge Config
RAC-92 — Pin Jack to Banana Interface Panel for S300, Summit, High Stblty Optical Bridge
RAC-96 — Pin Jack to Coax Interface Panel for S300, Summit, High Stability Optical Bridge
141-400, 06/22/10, Rev F
Page
20
21
105-626 — Triax Connection Panel, Side
Mount, for Summit Stations
Product Features
• Optional triaxial connection panel for convenient
cable management
• Designed to mount to the side of the Summit series
platen
• 8 triaxial (3-lug) feed through connectors (female)
• Panel connections support single triax cables and
Agilent dual triax SMU cable assemblies. For Agilent
Quadrax SMU connections, please contact the
factory.
Kit Contents
• Panel with triax feed-throughs mounted
NOTE
Cables are not included.
141-400, 06/22/10, Rev F
106-171 — Triax Connection Panel for
Summit, Lg Area Optical Bridge/Boom
Stand Config
Product Features
• Connection/vacuum panel
• Supports triax, BNC, pin-to-banana style connects t
• Triax connections support single triax cables and
quadrax SMU connections, please contact the
factory.
• 6 vacuum ports with on/off toggle switches
Specifications
• 12 triaxial (3-lug) feed through connectors (f)
• 2 BNC coax (2-lug) feed through connectors (f).
• 4 BNC to pin jack feed through connections
• Shorting bar to set the plane float or grounding setting
• Six 1/8-inch barb output vacuum manifold for vacuum base positioner support
141-400, 06/22/10, Rev F
114-737 — Vacuum Manifold Kit
for S300, Summit, High Stability
Optics Bridge
Product Features
• One set of 5 port vacuum manifolds (10
total output ports) mounted on each side
of the high stability microscope bridge
• Easy push on hose connection
Manifolds
• Easy push/pull, on and off flow toggle
Specifications
• 5 ports per manifold
• 2 manifolds
• Outputs supports 1/8-inch vacuum hose
141-400, 06/22/10, Rev F
S300, High Stability Bridge Config
Product Features
• Set of triaxial connection panels for convenient
cable management
• Designed to mount to the high stability optical
bridge mount
factory.
Specifications
• 16 total triaxial (3-lug) feed through connectors (female), 8 on each side
• Ground straps for each panel
141-400, 06/22/10, Rev F
Summit, High Stability Bridge Config
Product Features
• Set of triaxial connection panels for convenient
cable management
• Designed to mount to the high stability optical
bridge mount
factory.
Specifications
• 14 total triaxial (3-lug) feed through connectors (female), 8 on each side
• One set of banana feed through
• 8 triax on one side
• 6 triax on the side with the banana connection
• Ground strap on each side
141-400, 06/22/10, Rev F
RAC-92 — Pin Jack to Banana Interface
Panel for S300, Summit, High Stblty
Optical Bridge
Product Features
• Includes two brackets, with six each Pin Jack to
Banana connection interfaces
• Mounts at rear of station onto the high stability
bridge mount
Part Number: RAC-92
141-400, 06/22/10, Rev F
RAC-96 — Pin Jack to Coax
Interface Panel for S300, Summit,
High Stability Optical Bridge
Product Features
• Includes two brackets, with six each pin
jack to coax interface connections
• Mounts at rear of station onto the high stability bridge mount
Part Number: RAC-96
141-400, 06/22/10, Rev F
Summit/S300 Mounting Kits and Miscellaneous
Accessories
Item
Page
142-026 — LCD, Keyboard, Joystick and Mouse Mounting Kit for Vibration Isolation Table
105-588 — Thermal Flow Meter Kit
106-768 — Mounting Adapter Kit for Agilent 4291 Test Head
106-889 — Dust Cover for Summit Systems
107-088 — Bracket Mount for Bias Tee/Agilent E4991A Module, for Summit RF Positioners
114-849 — Xandex Inker and DCM-100 Positioner Mounting Kit for Summit 12K or S300
116-441 — Enhanced RF Shielded MicroChamber TopHat Kit for Summit/S300 Systems
116-511 — MicroChamber Large TopHat Upgrade Kit for Summit Systems
116-512 — MicroChamber Large TopHat Objective Ring/Cover for Summit Systems
133-492 —High Stability Bridge Mounting Bracket for Agilent E5288A Atto Sense Unit
135-038 — Mounting plate for B1500A SCUU (SMU-CMU Unit), High Stability Bridge Config
52
28
29
30
31
32
33
34
35
36
37
141-400, 06/22/10, Rev F
105-588 — Thermal Flow Meter Kit
Product Features
• Provide dry air/nitrogen flow control to Summit MicroChamber
• Allow for optimization of the air flow to achieve stable measurement
conditions at various set temperatures
Specifications
• Input/output ports are 1/2-inch OD quick connect style
• Scale resolution is 0.5 SCFM
141-400, 06/22/10, Rev F
106-768 — Mounting Adapter Kit for Agilent
4291 Test Head
Product Features
• Mounting kit for Agilent 4291 test head onto Summit RF
positioners
• Positions the test head close to the probe to minimize
cable loss
Kit Contents
• 1 base adapter
• 1 Plate adapter
• 2 side adapters
NOTE
Requires connecting cable between test head (APC 7mm connector) to probe (connector depends on probe type) approximately 4-inch in length.
141-400, 06/22/10, Rev F
106-889 — Dust Cover for Summit Systems
Product Features
• Semi-transparent vinyl dust cover for Summit 11/12K system
• Provides protection for periods when the system is not in use
141-400, 06/22/10, Rev F
107-088 — Bracket Mount for Bias Tee/
Agilent E4991A Module, for Summit RF
Positioners
Product Features
• Accessory mounting kit for RF positioners
• Used for bias tees
• Used for test head modules such as Agilent E4991
test heads
• Slotted mounting holes for easy multiple use
adaptation
Kit Contents
• Mounting plate
• Plate mounting hardware
141-400, 06/22/10, Rev F
114-849 — Xandex Inker and DCM-100 Positioner Mounting Kit for Summit
12K or S300
Product Features
• Inker kit for DCM-100 positioner
• Enables marking/binning of selected dies
• Controlled by Cascade Microtech’s Nucleus software or external software
• Solenoid controlled inker
• For Summit 11/12k or S300 systems
Specifications
• 12 volt Xandex inker system
Kit Contents
• Cartridge, Xandex die mark ink, 1.25-inch needle
• Cartridge, Xandex die mark ink, S-bend needle
141-400, 06/22/10, Rev F
116-441 — Enhanced RF Shielded
MicroChamber TopHat Kit for Summit/
S300 Systems
Product Features
• Provides for an additional 20db of RF shielding
• Upgrades older Summit systems to the current style
and size of TopHat
• Enables compatibility with newer accessories and
system options
• Provides for compatibility with Current Wave Guide
and Unity-MW probes
141-400, 06/22/10, Rev F
116-511 — MicroChamber Large TopHat
Upgrade Kit for Summit Systems
Product Features
• Upgrades older Summit systems to the current style
and size of TopHat
• Enables compatibility with newer accessories and
system options
• Provides for compatibility with Current Wave Guide
and Unity-MW probes
141-400, 06/22/10, Rev F
116-512 — MicroChamber Large TopHat
Objective Ring/Cover for Summit
Systems
Product Features
• Provides for objective light/environmental seal
when used with Summit TopHat
• Collapsible seal prevent damage to microscope or
objective
141-400, 06/22/10, Rev F
133-492 —High Stability Bridge
Mounting Bracket for Agilent E5288A
Atto Sense Unit
Product Features
• Mounts Agilent B1500 Atto sense unit in a thermally
isolated position close to the probing environment
• Keeps cables lengths short for optimal
performance
• For use on Summit 11/12k and S300 systems
• Triax feed through direct connection paths support
single triax cables and Agilent dual triax SMU cable assemblies. For Agilent Quadrax SMU
connections, please contact the factory.
Specifications
• Mount for two Agilent B1500 Atto Sense units
• 4 triaxial (3-lug) feed through connectors (female)
141-400, 06/22/10, Rev F
135-038 — Mounting plate for B1500A
SCUU (SMU-CMU Unit), High Stability
Bridge Config
Product Features
• Mounts Agilent B1500 SCUU (SMU-CMU unify unit) in
a thermally isolated position close to the probing
environment
• Keeps cables lengths short for optimal
performance
• For use on Summit 11/12k and S300 systems with
high stability optics bridge
Kit Contents
• Mounting bracket
141-400, 06/22/10, Rev F
Summit/S300 Probe Card Holder (PCHs) and Accessories
Item
Page
110-367 — Probe Card Holder for 6-inch Round Cards
114-338 — High Force Probe Card Holder for S300, Summit Stations, Non-MicroChamber
115-418 — MicroChamber High Force Probe Card Holder for Summit Stations
122-437 — Edge Connector Kit for Summit/S300 Probe Card Holders
124-118 — Low-Profile Probe Card Holder for Summit Stations with MicroChamber
138-022 — Clamp Kit for LLPC, in Low
39
40
41
42
43
43
141-400, 06/22/10, Rev F
110-367 — Probe Card Holder for 6inch Round Cards
Product Features
• Probe card holder for 6-inch round cards
• Mounts onto S300 and Summit 12K series
Specifications
• 6-inch round probe card holder (for Pyramid probe cards)
• Theta adjustment
• No Z (height) adjustment (probe station Z is required)
141-400, 06/22/10, Rev F
114-338 — High Force Probe Card
Holder for S300, Summit Stations,
Non-MicroChamber
Product Features
• Easy-to-use probe card clamp
• Screw removal is not required to change similar
types of probe cards
• No tools required to clamp the probe card in
place
• Back pivoting edge connector for easy mating
of edge card connector
• Support for 4.5-inch rectangular probe cards up
to 11 3/8-inch long
• Stable three-point planarization adjustment
• Easy probe card height setting (three incremental settings)
• Probe card height adjustment accommodates Cascade Microtech low leakage probe cards and
regular (non-Cascade Microtech) probe cards
• Theta micrometer control located in front of the HF-PCH
• Includes 48 pin and 70 pin edge connectors
Specifications
• Maximum probe needle force: 20 Kg (2,000 needles)
• Temperature range:
– System with MicroChamber -55º to 300º C
– System without MicroChamber Ambient to 300º C
• Theta range: ±3º
• Maximum planarization height compensation: 1.27mm (0.050-inch)
• Probe card maximums:
– W = 11.4 cm ±3mm (4.5-inch ±.012-inch)
– L = 15.25 cm 28.9 cm (6-inch 11.375-inch)
– Thickness = 0.15 cm 0.32 cm (0.060-inch 0.125-inch)
141-400, 06/22/10, Rev F
115-418 — MicroChamber High Force
Probe Card Holder for Summit Stations
Product Features
• Screw removal is not required to change similar
types of probe cards
• No tools required to clamp the probe card in
place
• Back pivoting edge connector for easy mating of
edge card connector
• Support for 4.5-inch rectangular probe cards up to
11 3/8-inch long
• Maintains a dark and dry EMI-RFI shielded environment (MicroChamber version only)
• Easy probe card height setting (three incremental settings)
• Theta micrometer control located in front of the HF-PCH
Specifications
• Maximum probe needle force: 20 Kg (2,000 needles)
– System with MicroChamber -55º to 300º C
– System without MicroChamber Ambient to 300º C
• Theta range: ±3º
– W = 11.4 cm ±3mm (4.5-inch ±.012-inch)
– L = 15.25 cm 28.9 cm (6-inch 11.375-inch)
141-400, 06/22/10, Rev F
122-437 — Edge Connector Kit for
Summit/S300 Probe Card Holders
Product Features
• Edge connector kit for Summit 4.5-inch probe card
holders
• Support both 48 and 70 pin standard edge
connectors
• Pivots for easy loading of probe card
Kit Contents
• Edge connector mount
• 48 pin edge connector
• 70 pin edge connector
141-400, 06/22/10, Rev F
124-118 — Low-Profile Probe Card
Holder for Summit Stations with
MicroChamber
Product Features
• Support for 4.5-inch rectangular probe cards up to
11 3/8-inch long
• Simultaneous use of a probe card and multiple
positioners/DC probe needles
• DC probe needles can be used with the LP-PCH
left in place
• Screw removal is not required to change similar types of probe cards
• No tools required to clamp the probe card in place
• Back pivoting edge connector for easy mating of edge card connector
• Adjustable edge connector mounting brackets to support long probe cards
• Allows use of DCP probes without probe card in place
• Quick switch-over between the TopHat cover and the LP-PCH
• Maintains a dark and dry EMI-RFI shielded environment (MicroChamber version only)
• Accurate, front-located theta adjustment wheel
Specifications
• Maximum probe needle force: 1 Kg (100 needles)
– System with MicroChamber -55 to 200 °C
– System without MicroChamber ambient to 200°C
• Theta range ±3°
– W = 11.4 cm ±3mm (4.5-inch ±.012-inch)
– L = 15.25 cm 28.9 cm (6-inch 11.375-inch)
138-022 — Clamp Kit for LLPC, in Low
141-400, 06/22/10, Rev F
138-022 — Clamp Kit for LLPC, in
LowProfile Card Holder
Product Features
• Option to allow use of shallow draft probe cards
• For use on Low Profile Probe Card Holder 120-935
Specifications
• Increases the draft from 0.08” to 0.18” (2.03mm to
4.57mm)
141-400, 06/22/10, Rev F
Microscope Mounting plates (Summit/S300 and Alessi)
Item
Page
122-248 — Microscope Mntg Kit for eVue/A-Zoom2, Man Xport, Lg Area, Summit B and S300
122-244 — Microscope Mntg Kit for eVue/A-Zoom2, Man Xport, Hi Stblty, Summit B and S300
122-244 — Microscope Mntg Kit for eVue/A-Zoom2, Man Xport, Hi Stblty, Summit B and S300
131-783 — Microscope Mounting Kit, Leica, Man Xport, Summit, S300, R48, R61, MTS
122-615 — Microscope Mounting Kit, Summit, S300, Manual/Programmable transport
122-246 — Microscope Mounting Kit, Man Xport, Large Area Summit 11K/12K, S300, MTS
46
47
47
48
49
50
141-400, 06/22/10, Rev F
122-248 — Microscope Mntg Kit for
eVue/A-Zoom2, Man Xport, Lg Area,
Summit B and S300
Product Features
• Dovetail mounting block for eVue and A-Zoom2
• Select when ordering a manual, large area
microscope transport system
• For Summit 11000B, 12000B, S300
141-400, 06/22/10, Rev F
122-244 — Microscope Mntg Kit for
eVue/A-Zoom2, Man Xport, Hi Stblty,
Summit B and S300
Product Features
• Dovetail mounting block for eVue and A-Zoom2
• Select when ordering a manual, high stability
• For Summit 11000B, 12000B, S300
• Adjustable stop to adapt to legacy probe stations
141-400, 06/22/10, Rev F
131-783 — Microscope Mounting Kit,
Leica, Man Xport, Summit, S300, R48,
R61, MTS
Product Features
• Dovetail mounting block for Leica S6 and S8
• Adapts standard dovetail to bonder pin common
to stereo zoom microscopes
• Universal design for Summit 11000B, 12000B, S300
and legacy probe stations
141-400, 06/22/10, Rev F
Summit, S300, Manual/Programmable
transport
Product Features
• Dovetail mounting block for Seiwa VMS-888 family
and Mitutoyo VMS-70
• Select when ordering a manual or programmable,
high stability microscope transport system
• For Summit 11000B, 12000B, S300B
141-400, 06/22/10, Rev F
Man Xport, Large Area Summit 11K/
12K, S300, MTS
Product Features
• Dovetail mounting block for Seiwa VMS-888 family
and Mitutoyo VMS-70
• Select when ordering a manual large area
• For Summit 11000B, 12000B, S300B and legacy
probe stations
141-400, 06/22/10, Rev F
Lab Accessories
Item
Page
142-026 — LCD, Keyboard, Joystick and Mouse Mounting Kit for Vibration Isolation Table
142-033 — Vibration Isolation Table, DELUX Package for 200mm Stations
142-032 — Vibration Isolation Table, STANDARD for 200mm Stations, 40-inch x 40-inch
143-567 — Side Instrument Shelf for Vibration Isolation Table
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53
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55
141-400, 06/22/10, Rev F
142-026 — LCD, Keyboard, Joystick and Mouse
Mounting Kit for Vibration Isolation Table
Product Features
• Ergonomic platform for computer keyboard, mouse, joystick
• LCD monitor support (VESA) with articulated arm for free
floating placement
• Universal design can mount on left or right side of table
• Easy mounting allows for quick reconfiguration
Specifications
• Supports LCD monitor with VESA mount (weight range 1229lbs)
• Monitor arm has 16-inch height range, and tilt/swivel
adjustment.
• VESA mounting plates (70/100mm)
• Accessory mounting posts (2) are height adjustable
141-400, 06/22/10, Rev F
142-033 — Vibration Isolation Table,
DELUX Package for 200mm Stations
Product Features
• Heavy duty frame and steel tabletop
• Integrated rolling casters
• Seismic restraint kit
• Storage shelf below tabletop
• Ergonomic front support bar
• Optional side instrument shelves and accessories
available
• Computer accessory mounting kit for keyboard, mouse, joystick
• Multi-directional LCD monitor support arm (VESA)
• Enclosed system (side walls and front access door)
Specifications
• Dimensions:
– Steel tabletop is 40-inch wide x 40-inch deep
– Table operating height is 32-inch
• Weights:
– Steel tabletop is 230lbs.
– Complete system (including tabletop) is approximately 480lbs
• Operation:
– Optimum air pressure: 25 - 60 psi
– Input air pressure: min 20 psi (approx.) - max 80 psi
– Max weight capacity 1,150 lbs. (@ 80 psi)
– Optimum load on the tabletop is 200 to 800 lbs. (Since the pressure is directly related to the
mass sitting on the tabletop, the operating pressure determines this range)
– Vibration isolation: typical performance better than 0 db at 6 Hz, with –6 dB per octave roll-off
to 48 Hz and >–18 dB attenuation above 48 Hz (with a Summit 12K series probe station or
equivalent load)
141-400, 06/22/10, Rev F
142-032 — Vibration Isolation
Table, STANDARD for 200mm
Stations, 40-inch x 40-inch
Product Features
• Heavy duty frame and steel tabletop
• Integrated rolling casters
• Seismic restraint kit
• Storage shelf below tabletop
• Ergonomic front support bar
• Optional side instrument shelves and
accessories available
Specifications
• Dimensions:
– Steel tabletop is 40-inch wide x 40-inch deep
– Table operating height is 32-inch
• Weights:
– Steel tabletop is 230lbs.
– Complete system (including tabletop) is approximately 480lbs
• Operation:
– Optimum air pressure: 25 - 60 psi
– Input air pressure: min 20 psi (approx.) - max 80 psi
– Max weight capacity 1,150 lbs. (@ 80 psi)
– Optimum load on the tabletop is 200 to 800 lbs. (Since the pressure is directly related to the
mass sitting on the tabletop, the operating pressure determines this range)
– Vibration isolation: typical performance better than 0db at 6 Hz, with –6 dB per octave roll-off to
48 Hz and >–18 dB attenuation above 48 Hz (with a Summit 12K series probe station or
equivalent load)
141-400, 06/22/10, Rev F
143-567 — Side Instrument Shelf for
Vibration Isolation Table
Product Features
• Universal design can mount on left or right side of
table
• Heavy duty design can hold multiple instruments
• Easy mounting enables quick reconfiguration
Specifications
• Dimensions:
– Side shelf is 21-inch (W) x 40-inch (D), and is
positioned with a 1-inch space between the side shelf and main steel tabletop.
– With 2 side shelves installed (left and right), the overall width of the table is 86-inch
141-400, 06/22/10, Rev F
Item
Page
DCM-100-L — DCM 100 Left Positioner, Magnetic Base
DCM-100-R — DCM 100 Right Positioner, Magnetic Base
DCM-205-ML — Probe Positioner, Magnetic Base, Left, 50 TPI
DCM-205-MR — Probe Positioner, Magnetic Base, Right, 50 TPI
DCM-205-VL — Probe Positioner, Vacuum Base, Left, 50 TPI
DCM-205-VR — Probe Positioner, Vacuum Base, Right, 50 TPI
DCM-400-M — Submicron Resolution DC Positioner, Magnetic Base
DCM-400-V — Submicron Resolution DC Positioner, Vacuum Base
57
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141-400, 06/22/10, Rev F
DCM-100-L — DCM 100 Left Positioner,
Magnetic Base
Product Features
• True linear motion in X,Y,Z for precise probe-tip
placement
• Compact footprint for high count probe applications
• Versatile: hand-formable stainless-steel probe holder
enables micropositioner to adapt to a variety of test
situations
• Configured for use on left hand side of platen
• Switch type magnetic base
• Active or coaxial probes for low-level and high frequency measurements
• Zero backlash: Hand-lapped dovetails combined with precision leadscrew mechanism to facilitate
accurate positioning and probe over travel
Specifications
• Ideal for 3um feature resolution
• 0.5-inch (12.7mm) Travel in X, Y and Z stages
• 5.3-inchx1.7-inch footprint in X,Y
• 3.1-inch Tall
Kit Contents
• MPC-01 - probe mount
• PHJ -jack lock probe
Part Number: DCM-100-L
141-400, 06/22/10, Rev F
DCM-100-R — DCM 100 Right Positioner,
Magnetic Base
Product Features
• True linear motion in X,Y,Z for precise probe-tip
placement
• Compact footprint for high count probe applications
• Versatile: hand-formable stainless-steel probe holder
enables micropositioner to adapt to a variety of test
situations
• Configured for use on right hand side of platen
• Switch type magnetic base
• Active or coaxial probes for low-level and high frequency measurements
• Zero backlash: Hand-lapped dovetails combined with precision leadscrew mechanism to facilitate
accurate positioning and probe over travel
Specifications
• Ideal for 3um feature resolution
• 0.5-inch (12.7mm) travel in X, Y and Z stages
• 5.3-inchx1.7-inch footprint in X,Y
• 3.1-inch tall
Kit Contents
• MPC-01 probe mount
• PHJ jack lock probe holder
Part Number: DCM-100-R
141-400, 06/22/10, Rev F
DCM-205-ML — Probe Positioner, Magnetic
Base, Left, 50 TPI
Product Features
• Accurate X and Y placement and precise probe over travel
with easily adjusted knobs
• Switch type magnetic base with residual holding force
• Adjustable probe arm mounting plate
• Optimized for Cascade Microtech’s triaxial probing
accessories and MicroChamber
• With probe and triaxial accessories, micropositioner
configures to state-of-the-art, guarded, low-noise triaxial probing in minutes
• Captivated stages with leadscrew design
• High precision cross-roller bearings
Specifications
• Ideal for 3um or larger feature resolution
• 50 TPI (1.4 micron per degree)
• 0.5-inch x 4.0-inch footprint in X,Y
Part Number: DCM-205-ML
141-400, 06/22/10, Rev F
DCM-205-MR — Probe Positioner,
Magnetic Base, Right, 50 TPI
Product Features
• Accurate X and Y placement and precise probe
over travel with easily adjusted knobs
• Switch type magnetic base with residual holding
force
• With probe and triaxial accessories, micropositioner configures to state-of-the-art, guarded, lownoise triaxial probing in minutes
Specifications
Part Number: DCM-205-MR
141-400, 06/22/10, Rev F
DCM-205-VL — Probe Positioner,
Vacuum Base, Left, 50 TPI
Product Features
• Vacuum base
• With probe and triaxial accessories,
micropositioner configures to state-of-the-art, guarded, low-noise triaxial probing in minutes
Specifications
Part Number: DCM-205-VL
141-400, 06/22/10, Rev F
DCM-205-VR — Probe Positioner,
Vacuum Base, Right, 50 TPI
Product Features
• Vacuum base
• Optimized for Cascade Microtech’s triaxial
probing accessories and MicroChamber
Specifications
Part Number: DCM-205-VR
141-400, 06/22/10, Rev F
DCM-210-ML — Probe Positioner,
Magnetic Base, Left, 100 TPI
Product Features
force
Specifications
141-400, 06/22/10, Rev F
Product Features
force
Specifications
141-400, 06/22/10, Rev F
Product Features
• Vacuum base
Specifications
141-400, 06/22/10, Rev F
Product Features
• Vacuum base
Specifications
141-400, 06/22/10, Rev F
DCM-320-ML — Probe Positioner,
Magnetic Base, Left, 200 TPI
Product Features
force
Specifications
141-400, 06/22/10, Rev F
Product Features
force
Specifications
141-400, 06/22/10, Rev F
Product Features
• Vacuum base
Specifications
141-400, 06/22/10, Rev F
Product Features
• Vacuum base
Specifications
141-400, 06/22/10, Rev F
DCM-400-M — Submicron Resolution DC
Positioner, Magnetic Base
Product Features
• Base mounted stage controls - Rigidly mounted controls
minimize tip movement associated with hand-coupled
deflections for rapid and reliable contact on submicron
features.
• Ergonomic access to stage controls - Rear-control
position when switching between axis controls, while
allowing close placement of adjacent positioners.
• Vacuum base - One handed operation with residual holding force
• Extra-fine stage controls - High-sensitivity controls enable smooth motion, and anti-backlash
construction provides predictable probe placement.
• Kinematic linkages for motion transfer - Eliminates mechanical cross talk between axes and run-out
• Oversized precision mechanical components - Allow for high bearing preloads and stiff linkages for
stable probe contact and long service life
• Measurement suitability - Compatible with coax, triax and high-impedance probes to match your
TopHat.
• Integrated mini-triax or SMA connectors - Dedicated probes mount the connector securely to the
Specifications
Part Number: DCM-400-M
141-400, 06/22/10, Rev F
DCM-400-V — Submicron Resolution DC
Positioner, Vacuum Base
Product Features
• Base mounted stage controls - Rigidly mounted
controls minimize tip movement associated with
hand-coupled deflections for rapid and reliable
contact on submicron features.
• Ergonomic access to stage controls - Rear-control
position when switching between axis controls,
while allowing close placement of adjacent
positioners.
• Vacuum base - Quick-release button for fast gross positioning on platen
• Extra-fine stage controls - High-sensitivity controls enable smooth motion, and anti-backlash
construction provides predictable probe placement.
• Kinematic linkages for motion transfer - Eliminates mechanical cross talk between axes and run-out
• Oversized precision mechanical components - enables high bearing preloads and stiff linkages for
stable probe contact and long service life.
• Measurement suitability - Compatible with coax, triax and high-impedance probes to match your
TopHat.
• Integrated mini-triax or SMA connectors - Dedicated probes mount the connector securely to the
Specifications
• Platen attachment: Vacuum base with quick release
Part Number: DCM-400-V
141-400, 06/22/10, Rev F
S300, Summit and Alessi Probe Arms/Mounts
Item
Page
138-014 — Enhanced Jack Lock Needle Probe Holder for DCM-200 Series Positioners
104-030K — DCP Probe Mount, Dual Triax Adapter (Kelvin) for E/W RF Positioners
104-856K — DCP Probe Mount, Dual Triax Adapter (Kelvin) for N/S RF Positioners
114-818 — DCP Probe Mount, Dual Triax Adapter (Kelvin), for DCM-200 Series Positioners
114-842 — Needle Probe Mount and Jack Lock Holder for DCM-200 Series Positioners
114-843 — Needle Probe Mount and Jack Lock Holder for MS1 Series Positioners
114-847 — Needle Probe Mount and Jack Lock Holder for MH2 Positioners
115-596 — DCP Probe Mount, Dual Triax Adapter (Kelvin) for MS1 Series Positioners
116-031 — DCP Probe Mount for DCM-200 Series Positioners, direct probe/cable conn
129-116 — PTT Probe Mount (MMP-01/J) and Adapter Kit for DCM Positioners
74
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78
79
80
81
82
83
141-400, 06/22/10, Rev F
138-014 — Enhanced Jack Lock Needle Probe
Holder for DCM-200 Series Positioners
Product Features
• Needle probe holder (PTT style needles) for DCM-200/300 series
positioners
• Jack lock style holding mechanism
• Top hat compatible
• Will work on positioners equipped for DCP probes
• Uses mini pin jack style cable connection
Specifications
• Includes additional probe mount holder that attaches to the
probe shaft
• Best if used with 45× PTT series tips
Kit Contents
• Includes arm and mounting hardware
• Recommended for use with PTT-XX/4-25 (45degree) style needles (not included)
141-400, 06/22/10, Rev F
104-030K — DCP Probe Mount, Dual Triax Adapter
(Kelvin) for E/W RF Positioners
Product Features
• Enables Kelvin connection to DCP style probes on East/West RF
positioners
• Supports Summit 11/12K and S300 systems
Specifications
• Instrument connections are female mini-triax connectors
• Probe connections are cables with SSMC male for use with DCP
style probes
• Usable from -60°C to 300°C (above 250°C: 8 hours max.
operation)
Kit Contents
Part Number: 104-030K
141-400, 06/22/10, Rev F
104-856K — DCP Probe Mount, Dual
Triax Adapter (Kelvin) for N/S RF
Positioners
Product Features
• Enables Kelvin connection to DCP style probes
on North/South RF positioners
Specifications
• Instrument connections are female mini-triax
connectors
• Probe connections are cables with SSMC
male for use with DCP style probes
• • Usable from -60°C to 300°C (above 250°C: 8
hours max. operation)
• • 50 Ohm characteristic impedance
• • Breakdown voltage: >500Volts
• • Max current = 1Amp
Kit Contents
Part Number: 104-856K
141-400, 06/22/10, Rev F
114-818 — DCP Probe Mount, Dual Triax Adapter
(Kelvin), for DCM-200 Series Positioners
Product Features
• Enables Kelvin connection to DCP style probes on DCM 200/
300 series positioners
Specifications
• Instrument connections are female mini-triax connectors
• Probe connections are cables with SSMC male for use with
DCP style probes
operation)
Kit Contents
141-400, 06/22/10, Rev F
114-842 — Needle Probe Mount and Jack
Lock Holder for DCM-200 Series Positioners
Product Features
• Needle probe holder (PTT style needles) for DCM-200/300
series positioners
Kit Contents
• Recommended for use with PTT-XX/4-25 (45degree) style
needles (not included)
141-400, 06/22/10, Rev F
Lock Holder for MS1 Series Positioners
Product Features
• Needle probe holder (PTT style needles) for MS1 series
programmable positioners
Kit Contents
• Recommended for use with PTT-XX/4-25 (45degree) style
needles (not included)
141-400, 06/22/10, Rev F
Lock Holder for MH2 Positioners
Product Features
• Needle probe holder (PTT style needles) for MH2 series
positioners
Kit Contents
• Recommended for use with PTT-XX/4-25 (45degree)
style needles (not included)
141-400, 06/22/10, Rev F
115-596 — DCP Probe Mount, Dual Triax Adapter
(Kelvin) for MS1 Series Positioners
Product Features
• Enables Kelvin connection to DCP style probes on MS1 series
programmable positioners
Specifications
• Instrument connection are female mini-triax connectors
• Probe connections are cables with SSMC male for use with DCP
style probes
operation)
Kit Contents
141-400, 06/22/10, Rev F
116-031 — DCP Probe Mount for DCM200 Series Positioners, direct probe/
cable conn
Product Features
• Mounting bracket for DCP probes, for use on
DCM-200/300 series positioners
• To be used with direct cable from instrument to
DCP probe (e.g., 105-540 or 124-562 BNC to SSMC
cables
• Top Hat compatible
Kit Contents
141-400, 06/22/10, Rev F
129-116 — PTT Probe Mount (MMP-01/
J) and Adapter Kit for DCM Positioners
Product Features
• For use with DCM-200/300 series positioners
needed
• Uses pin jack style connection (e.g., MAE cables),
one included
• Has gross Z adjustment via thumb screw on holder
arm
• Holder also pivots
• Not recommended for Top Hat use
Kit Contents
• MAE-44/18 Cable 18-inch
141-400, 06/22/10, Rev F
DCM-100 Probes and Probe Arms/Mounts (for use with PPT
needles)
Item
Page
MPC-01 — Standard MDL Probe Mount
MPC-05 — 90º down MDL probe mount
MPC-12 — Pico Probe Model 12 Mount for DCM-100 Series Positioner
PE5-01 — Coaxial Probe Holder for DCM-100 Series Positioner
PHJ — Jack Lock Probe Holder
PHJ/DL — Jack Lock Probe Holder for MPC-05
PHQ — Quick Lock Probe Holder
PHW — Wrench Lock Probe Holder
PHW/DL — Wrench Lock Probe Holder for MPC-05
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93
141-400, 06/22/10, Rev F
MPC-01 — Standard MDL Probe Mount
Product Features
• Basic PTT needle probe holder with Jack lock
• Uses pin jack style connection (e.g., MAE cables),
one included
• For use with DCM-100 series positioners
Kit Contents
Part Number: MPC-01
141-400, 06/22/10, Rev F
MPC-05 — 90º down MDL probe mount
Product Features
• Basic PTT needle probe holder with Jack lock
• ·Uses pin jack style connection (e.g., MAE cables), one included
• ·Nickel plated brass needle holder can be user formed as needed
• ·For use with DCM-100 series positioners
• ·Not recommended for Top Hat use
Kit Contents
Part Number: MPC-05
141-400, 06/22/10, Rev F
MPC-12 — Pico Probe Model 12 Mount for DCM-100 Series Positioner
Product Features
• Active probe mount, Pico Probe Model 12
• For use on DCM-100 Series positioners
• Pivot for gross Z position
Kit Contents
Part Number: MPC-12
141-400, 06/22/10, Rev F
PE5-01 — Coaxial Probe Holder for DCM-100 Series Positioner
Product Features
• Coaxial probe holder for DCM-100 series positioners
• Uses PTT style replaceable needle probes (not included)
• replaceable cable
Kit Contents
• Probe holder
Part Number: PE5-01
141-400, 06/22/10, Rev F
PHJ — Jack Lock Probe Holder
Product Features
• Replacement probe tip holder for MMP probes
• Jack lock needle holding mechanism (friction fit)
• Constructed of nickel plated brass that can be user
formed as needed
Specifications
• 4.5-inch in length
• Nickel plated brass
Kit Contents
• Probe tip holder
• Jack lock mechanism
Part Number: PHJ
141-400, 06/22/10, Rev F
PHJ/DL — Jack Lock Probe Holder
for MPC-05
Product Features
• Replacement probe tip holder for MPC
probes
• Jack lock needle holding mechanism
(friction fit)
• Constructed of nickel plated brass that can
be user formed as needed
Specifications
• Jack lock mechanism
Kit Contents
Part Number: PHJ/DL
141-400, 06/22/10, Rev F
PHQ — Quick Lock Probe Holder
Product Features
• Quick lock needle holding mechanism (spring
loaded Collette style)
• Constructed of nickel plated brass that can be
user formed as needed
Specifications
• Quick lock mechanism
Kit Contents
Part Number: PHQ
141-400, 06/22/10, Rev F
PHW — Wrench Lock Probe Holder
Product Features
• Wrench lock needle holding mechanism (set screw
hold)
• Constructed of nickel plated brass that can be user
formed as needed
Specifications
• Wrench lock mechanism
Kit Contents
• Allen wrench
Part Number: PHW
141-400, 06/22/10, Rev F
PHW/DL — Wrench Lock Probe Holder for MPC05
Product Features
• Replacement probe tip holder for MPC probes
• Wrench lock needle holding mechanism (set screw hold)
• Constructed of nickel plated brass that can be user formed as
needed
Specifications
• Wrench lock mechanism
Kit Contents
• Allen wrench
Part Number: PHW/DL
141-400, 06/22/10, Rev F
Alessi Series Probe Arms/ Mounts
Item
Page
MMP-05/J — 90º Down Probe Mount and Jack Lock Probe Holder
MMP-05/W — 90º Down Probe Mount and Wrench Lock Probe Holder
MMP-12/5 — Pico Probe Mount for R48/R61
MMP-51/J — Probe Arm Assembly and Jack Lock Probe Holder
MMP-51/Q — Probe Arm Assembly and Quick Lock Probe Holder
MMP-51/W — Probe Arm Assembly and Wrench Lock Probe Holder
95
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98
99
100
141-400, 06/22/10, Rev F
MMP-05/J — 90º Down Probe
Mount and Jack Lock Probe Holder
Product Features
for deep reach applications
• Jack lock needle holding mechanism
(friction hold)
needed
cables), one included
• Has gross Z adjustment via thumb screw on
holder arm
Kit Contents
Part Number: MMP-05/J
141-400, 06/22/10, Rev F
MMP-05/W — 90º Down Probe
Mount and Wrench Lock Probe
Holder
Product Features
• For use with DCM-200/300 and MPH series
positioners for deep reach applications
• Wrench lock needle holding mechanism
(set screw hold)
needed
• Has gross Z adjustment via thumb screw on holder arm
Kit Contents
• Allen wrench
Part Number: MMP-05/W
141-400, 06/22/10, Rev F
MMP-12/5 — Pico Probe Mount for
R48/R61
Product Features
• Active probe mount, for Pico Probe Model 12
• For use on DCM-200/300 and MH Series
positioners
• Pivot for gross Z position
Kit Contents
Part Number: MMP-12/5
141-400, 06/22/10, Rev F
MMP-51/J — Probe Arm Assembly
and Jack Lock Probe Holder
Product Features
• Basic PTT needle probe holder with Jack
lock mechanism (friction hold)
needed
Kit Contents
Part Number: MMP-51/J
141-400, 06/22/10, Rev F
MMP-51/Q — Probe Arm Assembly
and Quick Lock Probe Holder
Product Features
• Basic PTT needle probe holder with quick lock
needle holding mechanism (spring loaded
Collette style)
needed
• Uses pin jack style connection (e.g., MAE cables), one included
Kit Contents
Part Number: MMP-51/Q
141-400, 06/22/10, Rev F
MMP-51/W — Probe Arm
Assembly and Wrench Lock Probe
Holder
Product Features
• Basic PTT needle probe holder with wrench
lock needle holding mechanism (set screw
hold).
• Uses pin jack style connection (e.g., MAE cables), one included
Kit Contents
Part Number: MMP-51/W
141-400, 06/22/10, Rev F
DC Probes, Coax and Triax, DCP and PE5 Style Probe
Holders
Item
Page
DCP-HTR — High Performance DC Probe Holder
DCP-105R — DC Coaxial Probe, Single Line, 0.5 Micron Radius, Replaceable Tip
DCP-115R — DC Coaxial Probe, Single Line, 1.5 Micron Radius, Replaceable Tip
DCP-150R — DC Coaxial Probe, Single Line, 5.0 Micron, Replaceable Tip
DCP-150GPR-50 — DC Coaxial Probe with Ground Needle, 50 Micron Pitch
DCP-150K-25 — DC Coaxial Probe, Kelvin, 25 Micron Pitch, 5.0 Micron Tip Radius
DCP-150K-50 — DC Coaxial Probe, Kelvin, 50 Micron Pitch, 5.0 Micron Tip
PE5-02/5 — Coaxial Probe for R48/R61
PE5-32 — Triaxial Probe
PE5-32/5 — Triaxial Probe for R48/R61
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103
104
105
106
107
108
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110
111
141-400, 06/22/10, Rev F
DCP-HTR — High Performance DC
Probe Holder
Product Features
• High-quality construction with low-noise electrical
performance
• Fully guarded measurements to fA and fF levels
• Great for modeling and characterization work
• Configurable for triax usage
• Full temperature range coverage
• Dual Precision SSMC 50 ? connection allow for
Kelvin configuration to the probe body
• Individual connectors for force sense connections
• Replaceable microstrip probe tips (Not included)
Specifications
• Frequency range: dc - 100 MHz
• 500 V breakdown voltage, isolation resistance 1E13 ohms
• Temperature range -65 to +300°C
• Leakage noise:
• ± 10fA, -65 to +200°C± 20fA, 200 to 300°C
• Does not include replaceable tip
• See the DCP-HTR High Performance DC probe data sheet
Part Number: DCP-HTR
141-400, 06/22/10, Rev F
DCP-105R — DC Coaxial Probe, Single Line,
0.5 Micron Radius, Replaceable Tip
Product Features
performance
• Ultra-low, fA and fF measurements from -65ºC to 150ºC
• Dual Precision SSMC 50 ohm connections allow for Kelvin
configuration to the probe body
• Integrally designed as part of Cascade Microtech’s complete measurement solution
• Replaceable coax probe tips (Not included)
Specifications
• Breakdown voltage: >500 V
• Isolation resistance: > 1 x 1013 ohms
• Frequency response (3 dB): 150 MHz
• Temperature range: -65°C to 150°C
• Characteristic impedance: 50 ohms
• Body material: Gold plated
• Connector type: SSMC
• 0.5 micron radius probe tip
• See the DCP-100 Series DC probe data sheet
Part Number: DCP-105R
141-400, 06/22/10, Rev F
1.5 Micron Radius, Replaceable Tip
Product Features
performance
• Fully guarded measurement to fA and fF levels
Specifications
• 1.5 micron radius probe tip
141-400, 06/22/10, Rev F
5.0 Micron, Replaceable Tip
Product Features
performance
Specifications
• 5 micron radius probe tip
141-400, 06/22/10, Rev F
DCP-150GPR-50 — DC Coaxial Probe with Ground Needle, 50 Micron Pitch
Product Features
• High-quality construction with low-noise electrical performance
• High Frequency performance due to Signal/ground configuration
• Precision SSMC 50 ohm connection
Specifications
• Signal Ground pitch, 50 microns
Part Number: DCP-150GPR-50
141-400, 06/22/10, Rev F
DCP-150K-25 — DC Coaxial Probe, Kelvin, 25
Micron Pitch, 5.0 Micron Tip Radius
Product Features
• True Kelvin Probe, two 5 micron radius tips separated by 25
microns
performance
• Dual Precision SSMC 50 ohm connections, one for each tip
• Individual connectors for each tip
Specifications
• Probe Tip separation: 25 Microns
Part Number: DCP-150K-25
141-400, 06/22/10, Rev F
DCP-150K-50 — DC Coaxial Probe, Kelvin, 50
Micron Pitch, 5.0 Micron Tip
Product Features
• True Kelvin Probe, two 5 micron radius tips separated by
50 microns
performance
• Fully guarded measurements to fA and fF levels Great for
Modeling and
• Characterization work
• Dual Precision SSMC 50 ohm connections, one for each tip
• Individual connectors for each tip
Specifications
• Probe Tip separation: 50 Microns
Part Number: DCP-150K-50
141-400, 06/22/10, Rev F
PE5-02/5 — Coaxial Probe for R48/
R61
Product Features
• Coaxial probe holder for DCM-100 series
positioners
• Uses PTT style replaceable needle probes
(not included)
• 0 ohm impedance
Kit Contents
• Probe holder
Part Number: PE5-02/5
141-400, 06/22/10, Rev F
PE5-32 — Triaxial Probe
Product Features
• Triaxial probe holder for DCM-200/300 and MH
series positioners
included)
Kit Contents
• Probe holder with integral triax cable, 9-foot
Part Number: PE5-32
141-400, 06/22/10, Rev F
PE5-32/5 — Triaxial Probe for R48/R61
Product Features
• Triaxial probe holder for DCM-200/300 and MH
series positioners
included)
Kit Contents
• Probe holder with integral triax cable, 9-foot
Part Number: PE5-32/5
141-400, 06/22/10, Rev F
S300/Summit RF/Microwave Positioners
Item
Page
114-746B — East or West RF Positioner for S300, Summit Stations
114-845B — North or South RF Positioner for S300, Summit Stations
115-597B — West RF Positioner for S300, Summit Stations
133-528 — mmW Positioner for S300, Manual, East Position, for Summit Stations
133-525 — mmW Positioner, Manual, West Position, for S300 Summit Stations
MS1-8E — East Positioner, Programmable, for S300 and Summit 12K Stations
MS1-8W — West Positioner, Programmable, for S300 and Summit 12K Stations
113
114
115
116
117
118
119
141-400, 06/22/10, Rev F
114-746B — East or West RF Positioner
for S300, Summit Stations
Product Features
probes
probe placement
cable connection
Specifications
• Configurations:
141-400, 06/22/10, Rev F
114-845B — North or South RF
Positioner for S300, Summit
Stations
Product Features
microwave probes
cable connection
Specifications
• Configurations:
– Use on platen front-left location as SOUTH positioner
– Use on platen back-right location as NORTH positioner
141-400, 06/22/10, Rev F
115-597B — West RF
Positioner for S300, Summit
Stations
Product Features
microwave probes
• Ultra rigid design for best probe
placement
• Multi position RF cable clamp for
optimized RF cable connection
Specifications
• Configurations:
141-400, 06/22/10, Rev F
133-528 — mmW Positioner for S300,
Manual, East Position, for Summit
Stations
Product Features
• Precision 3 axis large area positioner for Waveguide
and 1.0mm coaxial probes
• True vertical Z-axis avoids probe damage when
• Quick release mechanism on X and Y axes for rapid
test set-up
Specifications
• Configurations:
– Use on platen left location as EAST positioner
141-400, 06/22/10, Rev F
133-525 — mmW Positioner, Manual,
West Position, for S300 Summit Stations
Product Features
• Precision 3 axis large area positioner for Waveguide
and 1.0mm coaxial probes
• True vertical Z-axis avoids probe damage when
• Quick release mechanism on X and Y axes for rapid
test set-up
Specifications
• Configurations:
– Use on platen right location as West positioner
141-400, 06/22/10, Rev F
MS1-8E — East Positioner,
Programmable, for S300 and Summit
12K Stations
Product Features
• Fully programmable high resolution positioner for
RF/microwave probes
• Provides 3 axes of linear motion with 1 in. of travel
• Video point and click movement with Nucleus
• Manual override of XYZ controls without losing software position
• Multi position RF cable clamp for optimized RF cable connection
Specifications
• Accuracy: 1 µm
• Speed: 1mm/sec
• Configurations:
Part Number: MS1-8E
141-400, 06/22/10, Rev F
MS1-8W — West Positioner,
Programmable, for S300 and Summit
12K Stations
Product Features
• Fully programmable high resolution positioner for
RF/microwave probes
• Provides 3 axes of linear motion with 1 in. of travel
• Video point and click movement with Nucleus
• Manual override of XYZ controls without losing software position
• Multi position RF cable clamp for optimized RF cable connection
Specifications
• Accuracy: 1 µm
• Speed: 1mm/sec
• Configurations:
Part Number: MS1-8W
141-400, 06/22/10, Rev F
MPH Universal RF/Microwave Positioners
Item
Page
MPHV-L — Probe Positioner, RF, Vacuum Base, 4-inch, Left
MPHV-R — Probe Positioner, RF, Vacuum Base, 4-inch, Right
MPHM-L — Probe Positioner, RF, Magnetic Base, 4-inch, Left
MPHM-R — Probe Positioner, RF, Magnetic Base, 4-inch, Right
MPHF-4BL-TH-01 — Probe Positioner, Bolt-Down Base, 4-inch, Top-Hat Compatible, South
MPHF-4BL-TH-05 — Probe Positioner, Bolt-Down Base, 4-inch, Top-Hat Compatible, North
MPHM-4BL-TH-01 — Probe Positioner, Magnetic Base, 4-inch, Top-Hat Compatible, South
MPHM-4BL-TH-05 — Probe Positioner, Magnetic Base, 4-inch, Top-Hat Compatible, North
121
122
123
124
125
126
127
128
141-400, 06/22/10, Rev F
MPHV-L — Probe Positioner, RF, Vacuum
Base, 4-inch, Left
Product Features
• Rigid probe platform yields repeatable
measurements at microwave frequencies
• Economical conversion for probe stations originally
configured for needle probing
• Vacuum base
Specifications
• Configurations:
– Use on platen front location as SOUTH positioner
Part Number: MPHV-L
141-400, 06/22/10, Rev F
MPHV-R — Probe Positioner, RF, Vacuum
Base, 4-inch, Right
Product Features
• Rigid probe platform yields repeatable measurements
at microwave frequencies
• Accurate X and Y placement and precise probe over
travel with easily adjusted knobs
• Vacuum base
Specifications
• Configurations:
Part Number: MPHV-R
141-400, 06/22/10, Rev F
MPHM-L — Probe Positioner, RF,
Magnetic Base, 4-inch, Left
Product Features
force
Specifications
• Configurations:
Part Number: MPHM-L
141-400, 06/22/10, Rev F
MPHM-R — Probe Positioner, RF,
Magnetic Base, 4-inch, Right
Product Features
• Accurate X and Y placement and precise probe over
travel with easily adjusted knobs
force
Specifications
• Configurations:
Part Number: MPHM-R
141-400, 06/22/10, Rev F
MPHF-4BL-TH-01 — Probe Positioner,
Bolt-Down Base, 4-inch, Top-Hat
Compatible, South
Product Features
• Use with mmWave positioners for 4-port
applications
• Bolt down base
• Optimized for Cascade Microtech’s MicroChamber
Specifications
• Configurations:
Part Number: MPHF-4BL-TH-01
141-400, 06/22/10, Rev F
MPHF-4BL-TH-05 — Probe Positioner,
Bolt-Down Base, 4-inch, Top-Hat
Compatible, North
Product Features
applications
• Bolt down base
Specifications
• Configurations:
Part Number: MPHF-4BL-TH-05
141-400, 06/22/10, Rev F
MPHM-4BL-TH-01 — Probe Positioner,
Magnetic Base, 4-inch, Top-Hat
Compatible, South
Product Features
applications
Specifications
• Configurations:
Part Number: MPHM-4BL-TH-01
141-400, 06/22/10, Rev F
MPHM-4BL-TH-05 — Probe Positioner,
Magnetic Base, 4-inch, Top-Hat
Compatible, North
Product Features
applications
Specifications
• Configurations:
Part Number: MPHM-4BL-TH-05
141-400, 06/22/10, Rev F
Item
Page
123-723 — Adapter Kit for Summit 9K and Agilent E4991A Module Interface
123-724 — Adapter Kit for Summit Stations and Agilent E4991A Module Interface
130
131
141-400, 06/22/10, Rev F
123-723 — Adapter Kit for Summit 9K
and Agilent E4991A Module Interface
Product Features
• Mount kit for Agilent E4991 test head module such as
test heads Accessory mounting kit for RF positioners
• Also can be used to mount bias tees
• Include cable to go between test head and probe
(probe side is 2.92mm, K connector)
adaptation
Kit Contents
• Mounting plate
• Cable
141-400, 06/22/10, Rev F
123-724 — Adapter Kit for Summit
Stations and Agilent E4991A Module
Interface
Product Features
• Mount kit for Agilent E4991 test head module such
as test heads Accessory mounting kit for RF
positioners
• Also can be used to mount bias tees
• Include cable to go between test head and probe
(probe side is 2.92mm, K connector)
adaptation
Kit Contents
• Mounting plate
• Cable
141-400, 06/22/10, Rev F
Item
Page
FPD-100 — Fine Pitch Dual Positioner
EZ-PROBE — EZ-Probe Positioner with Joystick, Base, Articulating Arm
133
134
141-400, 06/22/10, Rev F
FPD-100 — Fine Pitch Dual Positioner
Features
• Probe holder for FPA-200 series and FPM series signal
and ground contacts
• Provides three-axis position adjustments for each
probe contact
• Includes 2 articulating arm sets for flexibility in
addressing probing targets
• Includes 2 DCM-210 type positioners
• Vacuum base with common Z-axis lift for both
positioners
Specifications
• ·Ideal for 2um or larger feature resolution
• ·100 TPI (0.7 micron per degree)
• ·0.5-inch (12.7mm) Travel in X, Y and Z stages
Part Number: FPD-100
141-400, 06/22/10, Rev F
EZ-PROBE — EZ-Probe Positioner with
Joystick, Base, Articulating Arm
Product Features
• Simple and intuitive joystick operation in 3 axes
• Comfortable hand rest for quick and sure probe
placement
• Quick hunt and peck operation for bench top setups lacking a platen lift mechanism
• Variable mechanical reduction
• Adjustable arm for flexible placement of probes
• Separate tension adjustments for the X, Y and Z axes
• Ideal for module/wafer pads or PCB traces
Specifications
• Positioning range: 0.65 in x 0.65 in x 0.5 in (17mm x 17mm x 13mm)
• Placement: 50 microns (2 mil)
• Vacuum or weighted gravity base
• Three-dimensional joystick with 3:1 motion reduction
• Weight: 2.65 lbs. (1.2 Kg)
• Maximum arm reach: 8.7 in. (220mm)
Part Number: EZ-PROBE
141-400, 06/22/10, Rev F
Item
Page
138-023 — Bracket for Keithley 4200-PA-1 for DCM positioner
136
141-400, 06/22/10, Rev F
138-023 — Bracket for Keithley 4200PA-1 for DCM positioner
Product Features
• Gets the Preamp close to the wafer/device under
test
• Isolated from the thermal environment of the wafer
and station platen for highly stable measurements
• Mounts to Z axis to minimize cable flexure between
the Amp and probe
Kit Contents
141-400, 06/22/10, Rev F
Microscopes
and
Microscope
Accessories
Item
Page
Microscopes for Elite 300, with Motorized Scope Transport
12
Standard Microscopes with Focus Blocks
22
Microscope Objectives/Eye Pieces
47
Microscope Accessories
73
141-400, 06/22/10, Rev F
Microscopes and Microscope Accessories • 11
Microscopes for Elite 300, with Motorized Scope Transport
Item
Page
143-416 — Seiwa Microscope with Accy Kit for Elite 300, No F-Block
13
143-417 — Seiwa Microscope for IR Lasers with Accy Kit for Elite 300, No F-Block
14
144-287 — Seiwa Microscope, Tilt Head, with Accy Kit for Elite 300, No F-Block
15
143-414 — A-Zoom2 10X Video Out, Manual Zoom and Eyepieces, for Elite 300 (No F-Block)
16
143-415 — A-Zoom2 40X Vid Out, Dig Zoom, Eyepcs, RemFcs, Lsr Rdy, Elite 300 (No F-Block)
17
143-410B — eVue-II Digital Imaging System,10X, RemFocus, for Elite 300, No F-Block
18
143-411B — eVue-II Digital Imaging System, 40X RemFocus, for Elite 300, No F-Block
19
143-412B — eVue-II Dig Imaging System, 10X RemFocus, Pro Pkg for Elite 300, No F-Block
20
143-413B — eVue-II Dig Imaging System, 40X RemFocus, Pro Pkg for Elite 300, No F-Block
21
141-400, 06/22/10, Rev F
143-416 — Seiwa Microscope with Accy Kit
for Elite 300, No F-Block
Product Features
• Seiwa PS-888 Series Super Scope
• Cost effective and robust optical design
• High resolution at high magnification
• Eyepiece viewing with camera port for optional camera
• Coaxial illumination
• Kit is optimized for Elite300 microscope transport systems
Specifications
• Zoom 1X wavelength range 486-656nm
• Brightfield Kohler illumination with field and aperture stop
• Color filter and polarizer/analyzer slots
• Approx. 6.8kg (15lb)
• Approx. 460mm tall x 192mm wide x 360mm deep
Kit Contents
• Microscope body with 1X-2X zoom
• 4 objective manual turret
• Eyepieces: 10X wide field
• Objectives: 2.5X, 10X, 20X long working distance
• IR/1064nm - Green/532nm compatible (M Plan APO)
• Fiber optic Illuminator (90-250 VAC/47-63Hz CE)
• Spare lamp bulb, 150W
• 'C-mount' video adapter
141-400, 06/22/10, Rev F
143-417 — Seiwa Microscope for IR Lasers
with Accy Kit for Elite 300, No F-Block
Product Features
• Seiwa PS-888L Series Super Scope for 355-1064nm laser
cutters
• Eye piece viewing
• Selectable wavelength ranges through tube lens turret
Specifications
• Zoom 2X wavelength range 486-656nm (laser cannot
be used in this position)
Kit Contents
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
141-400, 06/22/10, Rev F
144-287 — Seiwa Microscope, Tilt Head,
with Accy Kit for Elite 300, No F-Block
Product Features
• Ergonomic eyepiece viewing with up/down tilt
• Camera port for optional camera
Specifications
• Brightfield Kohler illumination with field and aperture
stop
Kit Contents
141-400, 06/22/10, Rev F
143-414 — A-Zoom2 10X Video Out,
Manual Zoom and Eyepieces, for Elite 300
(No F-Block)
Product Features
• A-Zoom2 10X series microscope
• 10:1 continuous zoom
• Eyepiece viewing
• Video output
• Kit is optimized for Elite300
Specifications
• 1.4-14X manual zoom
• Approx. 14.25-inch tall x 4-inch wide x 4.38-inch deep
Kit Contents
• Microscope body
141-400, 06/22/10, Rev F
143-415 — A-Zoom2 40X Vid Out, Dig Zoom,
Eyepcs, RemFcs, Lsr Rdy, Elite 300 (No FBlock)
Product Features
• 40:1 digital zoom
• Laser compatible
• Video output
• Kit is optimized for Elite 300
Specifications
• 0.75-30X digital zoom
• Compatible with 355-1064nm laser cutter systems
Kit Contents
• Microscope body
• Wired remote control unit
141-400, 06/22/10, Rev F
143-410B — eVue-II Digital Imaging
System,10X, RemFocus, for Elite 300, No FBlock
Product Features
• Optimized for on-wafer test with Cascade Microtech's
probe stations
• Revolutionary multi-optical path, multi-cam design
• Perfect balance of optical resolution, digital zoom and
live motion video
• Integrated long life LED illuminator
• Integrated, remote and auto focus mechanism
Specifications
• 2 optical path/2 camera system with high resolution
image sensors
• 0.5-10X zoom range
• 0.1X zoom resolution
• 2mm remote focus range
• 0.2um remote focus resolution
• 18 frame per second live motion video (color)
• 54 frame per second live motion video (mono)
• AGC illumination leveling, auto-exposure mode
• 3 color field sequential LED illuminator (470, 530, 625nm)
Kit Contents
• Multi-CCD microscope/imager
• 10X standard zoom range (2 camera)
• Sub-micron programmable remote focus stage
• Integrated LED Illumination system
• USB remote control box
• Elite 300 microscope mount
• Intelligent objective lens mount (1)
• Digital video PC interface card
• Video processing software
• Nucleus prober software integration module
141-400, 06/22/10, Rev F
143-411B — eVue-II Digital Imaging System, 40X
RemFocus, for Elite 300, No F-Block
Product Features
• Optimized for on-wafer test with Cascade Microtech's probe
stations
• Perfect balance of optical resolution, digital zoom and live
motion video
Specifications
• 3 optical path/3 camera system with high resolution image
sensors
Kit Contents
• 20X standard zoom range (3 cameras)
141-400, 06/22/10, Rev F
143-412B — eVue-II Dig Imaging System, 10X
RemFocus, Pro Pkg for Elite 300, No F-Block
Product Features
stations
motion video
• Advanced Nucleus prober software radically eases wafer
navigation, speeds test set up and increases probe contact
accuracy
Specifications
sensors
Kit Contents
141-400, 06/22/10, Rev F
RemFocus, Pro Pkg for Elite 300, No F-Block
Product Features
stations
motion video
accuracy
Specifications
sensors
Kit Contents
141-400, 06/22/10, Rev F
Standard Microscopes with Focus Blocks
Item
Page
144-286 — Seiwa Microscope, Tilt Head, with Accy Kit
23
120-987 — A-Zoom2 (10X) Microscope, Video Out, Manual Zoom and Eyepieces
24
122-009 — A-Zoom2 40X Vid Out, Dig Zm, PC Ctrl/SW, Eyepcs, RemFcs, Lsr Rdy (No F-Blk)
25
131-964 — eVue-II Digital Image System, Pro Package Upgrade
26
131-952B — eVue-II Digital Imaging System, 10X RemFocus
27
131-959B — eVue-II Digital Imaging System, 10X RemFocus, Pro Package
28
135-722B — eVue-II Digital Imaging System, 10X RemFocus for Manual Stations
29
135-724B — eVue-II Dig Imaging System, 10X RemFocus Pro Package for Manual Stations
30
131-953B — eVue-II Digital Imaging System, 40X RemFocus
31
131-963B — eVue-II Digital Imaging System, 40X RemFocus Pro Package
32
135-723B — eVue-II Digital Imaging System, 40X RemFocus for Manual Stations
33
135-725B — eVue-II Dig Imaging System, 40X RemFocus Pro Package for Manual Stations
34
131-954 — eVue Digital Imaging System, Intelligent Objective Lens Mount
35
131-785 — Leica S6 Stereo Zoom Microscope Kit, 0.63 - 4.0 X Zoom
36
132-770 — Leica S8 APO StereoZm Microscope Kit, Wide FOV, MTS Stations, Video Ready
37
131-780 — Leica S8 Stereo Zoom Microscope Kit, 1.0 - 8.0 X Zoom, Video-Ready
38
VMS-70L — Mitutoyo Finescope FS-70 for IR Lasers, Obj., 10X Eyepcs, Fiber Optic Illumntrs
39
VMS-70Z — Mitutoyo Finescope FS-70, Objectives, 10X Eyepieces, Fiber Optic Illuminator
40
VMS-70LP — Mitutoyo Finescope FS-70 for IR Lsrs, Obj, 10X Eyepcs, Fiber Optic Illumntrs
41
VMS-70ZP — Mitutoyo Finescope FS-70, Objectives, 10X Eyepieces, Fiber Optic Illuminator
42
VMS-888L — Seiwa Microscope for IR Lasers with Manual Focus and Accy Kit
43
VMS-888LP — Seiwa Microscope for IR Lasers with Programmable Focus and Accy Kit
44
VMS-888 — Seiwa Microscope with Manual Focus and Accy Kit
45
VMS-888P — Seiwa Microscope with Programmable Focus and Accy Kit
46
141-400, 06/22/10, Rev F
144-286 — Seiwa Microscope, Tilt Head, with
Accy Kit
Product Features
• Ergonomic eyepiece viewing with up/down tilt
• Camera port for optional camera
Specifications
Kit Contents
• 2-inch heavy duty manual focus block
141-400, 06/22/10, Rev F
120-987 — A-Zoom2 (10X) Microscope, Video
Out, Manual Zoom and Eyepieces
Product Features
• Video output
Specifications
• 1.4-14X manual zoom
• 2-inch focus range
Kit Contents
• Microscope body
141-400, 06/22/10, Rev F
122-009 — A-Zoom2 40X Vid Out, Dig Zm, PC
Ctrl/SW, Eyepcs, RemFcs, Lsr Rdy (No F-Blk)
Product Features
• 40:1 digital zoom
• Laser compatible
• Video output
• Kit is optimized for Elite 300
Specifications
• 0.75-30X digital zoom
• Compatible with 355-1064nm laser cutter systems
Kit Contents
• Microscope body
• Wired remote control unit
141-400, 06/22/10, Rev F
131-964 — eVue-II Digital Image System, Pro
Package Upgrade
Product Features
• High Performance Pro Package upgrade for eVue digital
Imaging Systems
• Valid for basic 10X and 40X systems
Specifications
• Multi-Z (optical Z-contact system, autofocus)
• Multi-Cam (wafer-probe navigation, picture-in picture)
• Multi-View (hi-res video, probe card alignment, multi-needle views)
Kit Contents
• Pricing includes on-site installation
141-400, 06/22/10, Rev F
RemFocus
Product Features
stations
motion video
Specifications
sensors
Kit Contents
141-400, 06/22/10, Rev F
RemFocus, Pro Package
Product Features
stations
motion video
accuracy
Specifications
sensors
Kit Contents
• 10X standard zoom range (2 CCD)
141-400, 06/22/10, Rev F
RemFocus for Manual Stations
Product Features
stations
motion video
• Kit includes a certified controller, software and LCD display
Specifications
sensors
Kit Contents
• High performance computer
• 20-inch LCD monitor
141-400, 06/22/10, Rev F
RemFocus Pro Package for Manual Stations
Product Features
stations
motion video
accuracy
Specifications
sensors
Kit Contents
141-400, 06/22/10, Rev F
RemFocus
Product Features
stations
motion video
Specifications
sensors
Kit Contents
• 2-inch heavy duty microscope mount
141-400, 06/22/10, Rev F
RemFocus Pro Package
Product Features
stations
motion video
accuracy
Specifications
sensors
Kit Contents
141-400, 06/22/10, Rev F
RemFocus for Manual Stations
Product Features
stations
motion video
Specifications
sensors
Kit Contents
141-400, 06/22/10, Rev F
RemFocus Pro Package for Manual Stations
Product Features
stations
motion video
accuracy
Specifications
sensors
Kit Contents
141-400, 06/22/10, Rev F
131-954 — eVue Digital Imaging System,
Intelligent Objective Lens Mount
Product Features
• Designed to mount M Plan objectives
• Standardized interface for eVue digital Imaging System
• Programmability enables recording of objective specific
information
• Facilitates rapid changeover between objectives with
automatic configuration (once programmed)
Specifications
• Records and configures the following:
– Magnification
– NA – numerical aperture
– Pixel geometry correction factors
– Brand
– Serial Number
141-400, 06/22/10, Rev F
131-785 — Leica S6 Stereo Zoom
Microscope Kit, 0.63 - 4.0 X Zoom
Product Features
• Wide field of view for probing larger features
• Good resolution for low power microscopy
• Continuously variable zoom
• Long life LED ring light
• Economical choice for many probing needs
Specifications
• 0.63X to 4.0X zoom
• 432 line pairs/mm resolution
• 110mm working distance (without optional
objective installed)
• Variable illuminator output with auxiliary control
Kit Contents
• Leica S6 E StereoZoom microscope
• 30X eyepieces (pair)
• Mounting arm
• Long working distance solid state LED ring illuminator
• Illumination control box and cables
• Universal power supply (100-240VAC, 50/60Hz)
141-400, 06/22/10, Rev F
132-770 — Leica S8 APO StereoZm
Microscope Kit, Wide FOV, MTS Stations,
Video Ready
Product Features
• Excellent resolution for low power microscopy
• Video ready optical port
• High value choice for many probing needs
Specifications
• 8:1 zoom
• Apochromatic optical design
• 100mm working distance with 0.63X objective
installed
• 75mm working distance without 0.63X objective installed
Kit Contents
• Leica S8 APO StereoZoom microscope, with 1.0 to 8.0 zoom
• Wide FOV objective (0.63X)
• Mounting arm with focus control
• Video adapter 1.0X
141-400, 06/22/10, Rev F
131-780 — Leica S8 Stereo Zoom
Microscope Kit, 1.0 - 8.0 X Zoom, VideoReady
Product Features
• Excellent resolution for low power microscopy
• Video ready optical port
• High value choice for many probing needs
Specifications
• 8:1 zoom
• 75mm working distance
Kit Contents
• Leica S8 APO StereoZoom microscope, with 1.0 to 8.0 zoom
• Mounting arm with focus control
• Video adapter 0.63X
141-400, 06/22/10, Rev F
VMS-70L — Mitutoyo Finescope FS-70 for IR Lasers, Obj., 10X Eyepcs, Fiber
Optic Illumntrs
Product Features
• Mitutoyo Finescope FS70L series
• 1X magnification
• Selectable eye piece or laser port viewing
Specifications
• For 355-1064nm laser cutters
• Approx. 6.4kg (14.1lb)
Kit Contents
• Microscope body
• Objectives: 2X, 10X, 20X long working distance
Part Number: VMS-70L
141-400, 06/22/10, Rev F
VMS-70Z — Mitutoyo Finescope FS-70,
Objectives, 10X Eyepieces, Fiber Optic
Illuminator
Product Features
• Mitutoyo Finescope FS70Z series
• Camera port
Specifications
• 1X-2X magnification
• Brightfield Kohler illumination with field and aperture
stop
Kit Contents
• Microscope body
Part Number: VMS-70Z
141-400, 06/22/10, Rev F
VMS-70LP — Mitutoyo Finescope
FS-70 for IR Lsrs, Obj, 10X Eyepcs,
Fiber Optic Illumntrs
Product Features
• Mitutoyo Finescope FS70L series
• Selectable eye piece or laser port viewing
Specifications
• For 355-1064nm laser cutters
• Brightfield Kohler illumination with field and
aperture stop
Kit Contents
• Microscope body
• 2-inch Heavy duty programmable focus block
Part Number: VMS-70LP
141-400, 06/22/10, Rev F
VMS-70ZP — Mitutoyo Finescope
FS-70, Objectives, 10X Eyepieces,
Fiber Optic Illuminator
Product Features
• Mitutoyo Finescope FS70Z series
• Camera port
Specifications
• 1X-2X magnification
aperture stop
Kit Contents
• Microscope body
Part Number: VMS-70ZP
141-400, 06/22/10, Rev F
VMS-888L — Seiwa Microscope for IR
Lasers with Manual Focus and Accy Kit
Product Features
• Seiwa PS-888L Series Super Scope for 355-1064nm
laser cutters
• Selectable wavelength ranges through tube lens
turret
Specifications
• Zoom 2X wavelength range 486-656nm (laser
cannot be used on in this position)
Kit Contents
Part Number: VMS-888L
141-400, 06/22/10, Rev F
VMS-888LP — Seiwa Microscope for IR
Lasers with Programmable Focus and
Accy Kit
Product Features
• Seiwa PS-888L Series Super Scope for 355-1064nm
laser cutters
• Selectable wavelength ranges through tube lens
turret
• Programmable focus (requires video camera to
operate, sold separately)
Specifications
• Zoom 2X wavelength range 486-656nm (laser cannot be used on in this position)
Kit Contents
• 2-inch heavy duty programmable focus block
Part Number: VMS-888LP
141-400, 06/22/10, Rev F
VMS-888 — Seiwa Microscope with
Manual Focus and Accy Kit
Product Features
• Seiwa (Super Scope) microscope with accessory
kit
Product Features
• Eyepiece viewing with port for optional camera
Specifications
Kit Contents
Part Number: VMS-888
141-400, 06/22/10, Rev F
VMS-888P — Seiwa Microscope with
Programmable Focus and Accy Kit
Product Features
• Eyepiece viewing with port for optional camera
• Programmable focus (requires video camera to
operate, sold separately)
Specifications
aperture stop
Kit Contents
• 2-inch heavy duty programmable focus block
Part Number: VMS-888P
141-400, 06/22/10, Rev F
Microscope Objectives/Eye Pieces
Item
Page
120-873 — A-Zoom2 Objective, 10X, 19mm Working Distance (.45 N.A.), Tophat Compatible
48
120-875 — A-Zoom2 Objective, 5X,33mm working distance (.225 N.A.), Tophat Compatible
49
132-509 — A-Zoom2 Objective, 20X, 13mm, Working Distance (0.6N.A.), Tophat Compatible
50
132-109 — Leica 0.63 Auxiliary Lens for S8 Leica Microscope
51
131-788 — Leica 25 X Eye Pieces, High Performance, Extended Relief for Leica Microscopes
52
131-789 — 30x Eyepieces for Leica S6/S8 Microscopes
53
VMA-60-96 — Mitutoyo Objective, 100X, 1mm Working Distance (0.9 N.A.))
54
VMA-60-99 — Mitutoyo Objective, 100X, 6mm Working Distance (0.7 N.A.)
55
102-517 — Mitutoyo Objective, 10X, 33.5mm Working Distance (0.28 N.A.)
56
115-246 — Mitutoyo Objective, 200X, 13mm Working Distance (0.62 N.A.)
57
58
59
VMA-60-50 — Mitutoyo Objective, 50X,13mm Working Distance (0.55 N.A.)
60
102-293 — Mitutoyo Objective, 50X, 20.5mm Working Distance (0.42 N.A.)
61
62
VMA-60-97 — Mitutoyo Objective, NIR100X, 12mm Working Distance, I.R. Passive (0.5 N.A.)
63
VMA-60-52 — Mitutoyo Objective, NIR50X, 17mm Working Distance, I.R. Passive (0.42 N.A.)
64
VMA-60-95 — Mitutoyo Objective, NUV100X, 11mm Working Distance, U.V. Passive
65
VMA-60-54 — Mitutoyo Objective, NUV50X, 15mm Working Distance, U.V. Passive
66
VMA-60-98 — Mitutoyo Objective, SL100X, 13mm Working Distance (0.55 N.A.)
67
VMA-60-80 — Mitutoyo Objective, SL80X, 15mm Working Distance (0.5 N.A.)
68
126-255 — Seiwa Objective, 2.5X, 32mm Working Distance (0.06 N.A.) IR/Green
69
126-256 — Seiwa Objective, 5X, 35.1mm Working Distance (0.15 N.A.) IR/Green
70
126-257 — Seiwa Objective, 10X, 36.9mm Working Distance (0.25 N.A.) IR/Green
71
126-258 — Seiwa Objective, 20X, 22mm Working Distance (0.40 N.A.) IR/Green (
72
141-400, 06/22/10, Rev F
120-873 — A-Zoom2 Objective, 10X, 19mm Working
Distance (.45 N.A.), Tophat Compatible
Product Features
• Optem objective for A-Zoom2 microscopes
• M Plan apochromatic
• High resolution optical design
Specifications
• NA = 0.45
• WD = 19.0mm
• Resolving power = 0.74um
• Focal depth = ±1.3um
141-400, 06/22/10, Rev F
120-875 — A-Zoom2 Objective, 5X,33mm working
distance (.225 N.A.), Tophat Compatible
Product Features
Specifications
• NA = 0.225
• WD = 33.0mm
141-400, 06/22/10, Rev F
132-509 — A-Zoom2 Objective, 20X, 13mm, Working
Distance (0.6N.A.), Tophat Compatible
Product Features
Specifications
• NA = 0.60
• WD = 13.0mm
141-400, 06/22/10, Rev F
132-109 — Leica 0.63 Auxiliary Lens
for S8 Leica Microscope
Product Features
• Objective for Leica S8 StereoZoom microscope
• Increases field of view
• Increases working distance
Specifications
• 0.63X magnification
• 100mm working distance
141-400, 06/22/10, Rev F
131-788 — Leica 25 X Eye Pieces, High Performance,
Extended Relief for Leica Microscopes
Product Features
• Wide-field eyepieces compatible with eyeglasses
Specifications
141-400, 06/22/10, Rev F
131-789 — 30x Eyepieces for Leica S6/S8 Microscopes
Product Features
• Wide field eye-pieces
Specifications
141-400, 06/22/10, Rev F
VMA-60-96 — Mitutoyo Objective, 100X, 1mm
Working Distance (0.9 N.A.))
Product Features
• Premium Mitutoyo objective
• High resolution design
Specifications
• NA = 0.90
• WD = 1.3mm
• Wavelength correction = 436-656nm
Part Number: VMA-60-96
Mitutoyo objectives are compatible with the FS70, e-Vue, A-Zoom, and
Seiwa microscopes .
141-400, 06/22/10, Rev F
VMA-60-99 — Mitutoyo Objective, 100X, 6mm
Working Distance (0.7 N.A.)
Product Features
Specifications
• NA = 0.70
• WD = 6.0mm
Seiwa microscopes .
141-400, 06/22/10, Rev F
102-517 — Mitutoyo Objective, 10X, 33.5mm Working
Distance (0.28 N.A.)
Product Features
Specifications
• NA = 0.28
• WD = 33.5mm
Seiwa microscopes .
141-400, 06/22/10, Rev F
115-246 — Mitutoyo Objective, 200X, 13mm Working
Product Features
• Super long working distance design
Specifications
• NA = 0.62
• WD = 13.0mm
Seiwa microscopes .
141-400, 06/22/10, Rev F
Product Features
Specifications
• NA = 0.42
• WD = 20.0mm
Seiwa microscopes .
141-400, 06/22/10, Rev F
Product Features
Specifications
• NA = 0.055
• WD = 34.0mm
• Focal depth = ±91um
Seiwa microscopes .
141-400, 06/22/10, Rev F
VMA-60-50 — Mitutoyo Objective, 50X,13mm
Product Features
Specifications
• NA = 0.55
• WD = 13.0mm
Seiwa microscopes .
141-400, 06/22/10, Rev F
102-293 — Mitutoyo Objective, 50X, 20.5mm Working
Product Features
Specifications
• NA = 0.42
• WD = 20.5mm
Seiwa microscopes .
141-400, 06/22/10, Rev F
Product Features
Specifications
• NA = 0.14
• WD = 30.4mm
Seiwa microscopes .
141-400, 06/22/10, Rev F
VMA-60-97 — Mitutoyo Objective, NIR100X, 12mm
Working Distance, I.R. Passive (0.5 N.A.)
Product Features
• NIR design for IR laser cutter
Specifications
• NA = 0.50
• WD = 12.0mm
Seiwa microscopes .
141-400, 06/22/10, Rev F
VMA-60-52 — Mitutoyo Objective, NIR50X, 17mm
Working Distance, I.R. Passive (0.42 N.A.)
Product Features
• NIR design for IR laser cutter
Specifications
• NA = 0.42
• WD = 17.0mm
Seiwa microscopes .
141-400, 06/22/10, Rev F
VMA-60-95 — Mitutoyo Objective, NUV100X, 11mm
Working Distance, U.V. Passive
Product Features
• NUV design for UV laser cutter
Specifications
• NA = 0.5
• WD = 11.0mm
Seiwa microscopes .
141-400, 06/22/10, Rev F
VMA-60-54 — Mitutoyo Objective, NUV50X, 15mm
Working Distance, U.V. Passive
Product Features
• NUV design for UV laser cutter
Specifications
• NA = 0.42
• WD = 15.0mm
Seiwa microscopes .
141-400, 06/22/10, Rev F
VMA-60-98 — Mitutoyo Objective, SL100X, 13mm
Product Features
Specifications
• NA = 0.55
• WD = 13.0mm
Seiwa microscopes .
141-400, 06/22/10, Rev F
VMA-60-80 — Mitutoyo Objective, SL80X, 15mm
Product Features
Specifications
• NA = 0.50
• WD = 15.0mm
Seiwa microscopes .
141-400, 06/22/10, Rev F
126-255 — Seiwa Objective, 2.5X, 32mm Working
Distance (0.06 N.A.) IR/Green
Product Features
• Seiwa objective
Specifications
• 2.5X magnification
• NA = 0.06
• WD = 32.5mm
141-400, 06/22/10, Rev F
126-256 — Seiwa Objective, 5X, 35.1mm Working
Product Features
• Seiwa objective
Specifications
• NA = 0.16
• WD = 36.1mm
141-400, 06/22/10, Rev F
126-257 — Seiwa Objective, 10X, 36.9mm Working
Product Features
• Seiwa objective
Specifications
• NA = 0.23
• WD = 38.9mm
141-400, 06/22/10, Rev F
126-258 — Seiwa Objective, 20X, 22mm Working
Distance (0.40 N.A.) IR/Green (
Product Features
• Seiwa objective
Specifications
• NA = 0.35
• WD = 22.2mm
141-400, 06/22/10, Rev F
Microscope Accessories
Item
Page
122-526 — A-Zoom Microscopes, Programmable 2-inch Heavy Duty F-Block
74
106-763 — A-Zoom Mitutoyo Objective Mount
75
102-363 — Mitutoyo Video Adapter, 1.0X Magnification
76
101-454 — Spare Bulb for Mitutoyo, A-Zoom, Vid-Rdy Olympus and Optem Illuminators
77
141-400, 06/22/10, Rev F
122-526 — A-Zoom Microscopes,
Programmable 2-inch Heavy Duty FBlock
Product Features
• Programmable focus block
• High stability focus mount for microscopes without
internal focus drive
• Custom mounting patterns for Mitutoyo, A-Zoom
and Seiwa
Specifications
• 50mm (2-inch) travel
• High load capacity suitable for microscopes
configured with lasers
141-400, 06/22/10, Rev F
106-763 — A-Zoom Mitutoyo Objective Mount
Product Features
• Required for each objective used on A-Zoom microscopes
• Enables quick change over between objectives
Specifications
• Design to mount M Plan objectives
• Standard interface to A-Zoom microscopes
141-400, 06/22/10, Rev F
102-363 — Mitutoyo Video Adapter, 1.0X
Magnification
Product Features
• Connect video camera to microscope for remote
viewing
Specifications
141-400, 06/22/10, Rev F
101-454 — Spare Bulb for Mitutoyo, AZoom, Vid-Rdy Olympus and Optem
Illuminators
Product Features
• Replacement bulb for halogen illuminators
Specifications
• 120V
• 150W
• EKE bulb
141-400, 06/22/10, Rev F
141-400, 06/22/10, Rev F
Board Test
System
Accessories
Item
Page
134-422, 134-423 — Multi-Orientation Positioners
12
131-906 — Vacuum Mount Spacer Block
13
134-420 — Vacuum Base Board Clamp
14
134-421 — Vacuum Base PCB Bottom Support
15
129-691 — Vacuum Based Auxiliary Chuck
16
125-058 — Video Monitor
17
106-564 — Variable Pitch Mount
18
EZ-PROBE — EZ-Probe Positioner
19
FPD-100 — Fine Pitch Dual-Armed Positioners
20
SQ-132-667-01 — Vacuum Mount Gantry Top Plate
21
SQ-129-032-01 — Bottom Side Viewing Camera Kit
22
005-018 — Contact Substrate
23
141-050 — Portable Vacuum System
24
142-171 — WinCal XE Software
25
SQ-115-330-03 — Removable 6-inch Pedestal Wafer Chuck
26
M150-ACC-16 — Cable Clamp Kit
27
142-032— Vibration Isolation Table for BTS Packages
28
142-033 — Deluxe Vibration Isolation Table for BTS Packages.
29
Consult factory for PN — Dark Box/Vibration Isolation Table for BTS 1000/2000
30
141-400, 06/22/10, Rev F
Board Test System Accessories • 11
134-422, 134-423 — MultiOrientation Positioners
Product Features
Vacuum based MPH positioner with a dovetail arm
attachment allowing vertical circuit board probing with a
vertical range of 4-inches.
Specifications
• 2.5-inches of range in dovetail
• Potential 11+ inches in 180º orientation
• Arm can be positioned at 0º, 90º, 180º, and 270º in reference
to the platen base
• Compatible with FPC probes
• Reconfiguration converts positioner for horizontal probing
Package Compatibility
BTS 1000
BTS 2000
BTS-VERT
YES
YES
YES
Part Number: 134-422 (left-orientation), 134-423 (right-orientation)
141-400, 06/22/10, Rev F
131-906 — Vacuum Mount Spacer
Block
Product Features
Vacuum based spacer block for BTS packages to provide
additional positioner height for probing with vertical
PCBA and other boards. Can be used to create
adjustable height and position gantry.
Specifications
• Height is a nominal 2.5-inches and is stackable
• Compatible with MPH style positioners 134-422 and 134423
BTS 1000
BTS 2000
BTS-VERT
YES
YES
included in
package
141-400, 06/22/10, Rev F
134-420 — Vacuum Base Board
Clamp
Product Features
Circuit board hold down clamp with vacuum base used
for mounting PCB in a horizontal probing orientation.
Specifications
• Approximately 1/2-inch clamping area to hold PCBs
• Accommodates PCBs with 0.125-inch keep out on
edges, and thickness from 0.0- to 0.125-inches
• Easily adjust height in 1/4-inch increments from
approximately 3.3-inches (minimum) to 7.5-inches
(height can be increased with additional spacers, not
included)
• Four clamps are typically required hold the 4 corners of
the PCB
BTS 1000
BTS 2000
BTS-VERT
included in
package
included in
package
YES
141-400, 06/22/10, Rev F
134-421 — Vacuum Base PCB
Bottom Support
Product Features
Circuit board bottom support with vacuum base.
Use with vacuum base board clamp (134-420)
setup.
Specifications
• PCB bottom support can be configured using the
bullet tip (insulating material) touching bottom of
the PCB, or by removing the bullet tip (6-32 screw)
and attaching the PCB to support shaft with 6-32
hardware
• Adjustable height from nominal. Nominal is with
bullet tip removed, top of adjust shaft in same as
bottom PCB plane of 134-420 hold down clamps
BTS 1000
BTS 2000
BTS-VERT
included in
package
included in
package
YES
141-400, 06/22/10, Rev F
129-691 — Vacuum Based
Auxiliary Chuck
Product Features
Adjustable height auxiliary chuck mounted on a
vacuum base.
Specifications
(height can be increased with additional spacers,
not included)
• Base requires a vacuum manifold (sold separately)
BTS 1000
BTS 2000
BTS-VERT
YES
YES
YES
141-400, 06/22/10, Rev F
125-058 — Video Monitor
Product Features
19-inch LCD, multi-function video monitor.
Specifications
• 100/240 VAC
• 50/60 Hz
• (CSA,CE,UL)
BTS 1000
BTS 2000
BTS-VERT
YES
YES
included in
package
141-400, 06/22/10, Rev F
106-564 — Variable Pitch Mount
Product Features
Adds second FP-mount for variable pitch SGS probing.
Specifications
Up to 18 GHz bandwidth when used with brush contact
ground
BTS 1000
BTS 2000
BTS-VERT
YES
YES
YES
141-400, 06/22/10, Rev F
EZ-PROBE — EZ-Probe Positioner
Product Features
Vacuum mount joystick positioner for assisted PCB probe
positioning. Provides easy, precise manual probe
positioning control in 3 axes.
Specifications
• Positioning range: 0.65 x 0.65 x 0.5 in. (17 x 17 x 13mm)
• Placement: 50 microns (2 mil)
• Operates with vacuum (requires -15.75 in. Hg) or
weighted gravity base
• Three dimensional joystick with 3:1 motion reduction
• Weight: 2.65 lbs. (1.2 Kg)
• Adjustable arm reach: 3.9 - 8.7 in. (100-220mm)
• Arm sweep angle: +90°
BTS 1000
BTS 2000
BTS-VERT
YES
YES
YES
Part Number: EZ-PROBE
141-400, 06/22/10, Rev F
FPD-100 — Fine Pitch DualArmed Positioners
Product Features
Fine pitch dual positioner, optimized for variable pitch
probing on PCB with FPx probes.
Specifications
• Vacuum-based
• 100 TPI pitch
• Mounts (2) 104-134 articulating arm probe mount
BTS 1000
BTS 2000
BTS-VERT
YES
YES
YES
Part Number: FPD-100
141-400, 06/22/10, Rev F
SQ-132-667-01 — Vacuum Mount
Gantry Top Plate
Product Features
Vacuum mounted gantry for mounting vacuum-based
positioners for PCB probing.
Specifications
• Overall board width 18 inches
• Requires (2) vertical probe station spacer blocks (131906) for each nominal height increase of 2.5-inches
BTS 1000
BTS 2000
BTS-VERT
YES
YES
YES
Part Number: SQ-132-667-01
141-400, 06/22/10, Rev F
SQ-129-032-01 — Bottom
Side Viewing Camera Kit
Product Features
Vacuum-mounted camera for double-sided
probing on printed circuit boards. Monitor is sold
separately.
Specifications
• 70x video scope on a vacuum base with fine x/ymovement control and coarse z-control
• Video scope includes color camera
• Includes (2) aux chucks mounted on a variable height vacuum base.
• Includes (4) extension arms for bottom side probing (all arms are compatible with MPHM
positioners)
BTS 1000
BTS 2000
BTS-VERT
YES
YES
YES
141-400, 06/22/10, Rev F
005-018 — Contact Substrate
Product Features
Impedance Standard Substrates used in probe calibration.
Specifications
For detailed specifications and product information, see the
Cascade Microtech Online Product Guide.
BTS 1000
BTS 2000
BTS-VERT
YES
YES
included in
package
Part Number: 005- 018
141-400, 06/22/10, Rev F
141-050 — Portable Vacuum System
Product Features
Portable vacuum system for facilities without a house vacuum system.
Specifications
• Recommended for use with no more that 8 vacuum mounted positioners and/or accessory mounts
• 2.12 cfm, 110V, continuous duty cycle
BTS 1000
BTS 2000
BTS-VERT
YES
YES
YES
141-400, 06/22/10, Rev F
142-171 — WinCal XE Software
Product Features
WinCal XE enhances RF measurement accuracy and productivity
through guided system setup, automatic calibration and validation,
and other advanced RF measurement related tools.
BTS 1000
BTS 2000
BTS-VERT
YES
YES
YES
141-400, 06/22/10, Rev F
SQ-115-330-03 — Removable 6inch Pedestal Wafer Chuck
Product Features
Planarizable 150mm wafer chuck for PCB probing.
Specifications
• Fixed x/y/z/theta
• Bolt-down base mount
• 6-inch round chuck
• Includes vacuum manifold for chuck vacuum zones
BTS 1000
BTS 2000
BTS-VERT
YES
YES
NO
141-400, 06/22/10, Rev F
M150-ACC-16 — Cable Clamp Kit
Product Features
Magnetic cable clamp kit used for securing probe cables to the
station platen. Reduces probe movement and measurement
error due to cable vibration.
Specifications
• Each kit includes the necessary hardware for one cable
• Maximum cable diameter = 1/8-inch
• Must be used with steel base
BTS 1000
BTS 2000
BTS-VERT
YES
YES
YES
141-400, 06/22/10, Rev F
142-032— Vibration Isolation Table for BTS Packages
Product Features
Heavy duty frame and steel tabletop.
Specifications
Dimensions: 40-inches(W) x 40-inches(D) X 32-inches(H)
BTS 1000
BTS 2000
BTS-VERT
YES
YES
YES
141-400, 06/22/10, Rev F
142-033 — Deluxe Vibration Isolation Table for BTS
Packages.
Product Features
Heavy duty frame and steel tabletop. Includes computer accessory mounting kit for keyboard,
mouse, joystick and multi-directional LCD monitor support arm.
Specifications
Dimensions: 40-inches (W) x 40-inches (D) X 32-inches (H)
BTS 1000
BTS 2000
BTS-VERT
YES
YES
YES
141-400, 06/22/10, Rev F
Consult factory for PN — Dark Box/Vibration Isolation
Table for BTS 1000/2000
Product Features
Combination anti-vibration table and dark box for applications with probing features smaller than 50
microns, and with light sensitive tests or I/R laser probing.
BTS 1000
BTS 2000
BTS-VERT
YES
YES
NO
Part Number: Consult factory
141-400, 06/22/10, Rev F
Cascade Microtech, Inc.
Corporate Headquar ters
toll free: +1-800-550-3279
phone: +1-503-601-1000
email: [email protected]
Germany
+49-811-60005-0
phone: +65-6873-7482
Japan
phone: +81-3-5615-5150
Taiwan
phone: +886-3-5722810
phone:
China
phone:
email:
www.cascademicrotech.com
+86-21-3330-3188
[email protected]
Singapore
email:
[email protected]

Probe Station Accessories Catalog.book

Transcription

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