Penzum i TFE4180

Penzum i TFE4180
A: Core syllabus. Knowledge can be tested with detailed questions in the examination.
Kapittel
Jenkins: 1.3 + 1.4 (21-26)
Jenkins: 2.3.5 (74-77)
Jenkins: 2.5.2 (95)
Jenkins: 3.2.1 (105-108)
Jenkins: 3.3 (142-147)
Jenkins: 6.3 (328-331)
Jenkins: 7.1 (354)
QS: Chapter 2 (slides)
QS: Chapter 7 (161-166)
QS: Chapter 7 (171-177)
QS: Chapter 8 (181-197)
QS: Chapter 9 (199-224)
QS: Chapter 11 (257-296)
QS: Chapter 12 (299-333)
QS: Chapter 13 (335-366)
QS: Chapter 14 (367-412)
QS: Chapter 15 (413-423)
QS: Chapter 16
QS: Chapter 17 unntatt 504
QS: Chapter 18
QS: Chapter 20 (571-586)
Tema
The structure of
semiconductors
Bulk and epitaxial growth
of semiconductors
Insulating films on
semiconductors
The conduction of
electricity in
semiconductors
Electrical conductivity,
mobility and the Hall
effect in semiconductors
Secondary ion mass
spectrometry
Optical microscopy and
imaging
Characteristics of
semiconductor materials
Defect inspection: quality
measures
Defect inspection:
analytical equipment
Gas control in process
chambers
IC fabrication process
overview
Deposition
Metallization
Photolithography I (vapor
prime to soft bake)
Photolithography II
(alignment and exposure)
Photolithography III (postexposure bake, develop &
develop inspect)
Etch
Ion implant
Chemical mechanical
planarization
Assembly and packaging
Spesifiseringer
Kun om om MBE.
Kun: ligninger for R og NA,
bright field, dark field,
Nomarski, confocal
microscopy.
Kun det som står på slides.
Kun SIMS, AFM, TEM, FIB
Kun frem til s. 423
Ikke DPS/MERIE s. 453
Ikke s. 504
Kun frem til s. 586
B: Syllabus, but not core syllabus. This part of the syllabus is often necessary to understand in order to
understand the core syllabus better. Knowledge can be tested with questions, but normally not with
detail questions, in the examination.


Jenkins: 2.3.5 om VPE og LPE (65-74)
Jenkins: 3.3 (148-149)
C - This part of the syllabus should be read and understood, but there will not be direct questions in
the examination. However, understanding may be tested indirectly through questions to the core
syllabus.







Jenkins: 3.2.5, fig. 3.14 (129)
Jenkins: 6.2 (326-328)
Jenkins: 7.1, alt som ikke er nevnt i A-kategori unntatt Photoluminescence, Raman
Spectroscopy og OBIC
QS: Chapter 3, alt som ikke er nevnt i D-kategori. Fig. 3.6 + 3.7 + 3.8 + 3.9 + 3.16 + 3.17 + 3.19
+ 3.20 + 3.22 + 3.23 + 3.26
QS: Chapter 7 (167)
QS: Chapter 20 (587-595)
Guest lecture on EBL and Nanoimprinting (det som står på slides)
D - Supporting literature that will be useful to read for better understanding of parts of the syllabus.





Jenkins: 2.4 + 2.5 + 2.6 + 2.7 (80-103)
Jenkins: 3.2.5, fig. 3.15 + 3.16 + 3.18 (132-134)
Jenkins. 3.2.6 (136-142)
QS: Chapter 3 om BJT (49-51), BiCMOS (57-58), IC (60-62)
QS: Chapter 18 (if student lectures)
Errors

Fig. 3.22 + fig. 3.23: V SS and V DD should switch places.