single sensors - Inland Europe

QUALITY CRYSTALS HARDWARE
REMOVABLE SENSOR HEADS
WELD FREE 1 NO WATER LEAKS
SPECIAL ORDER SENSORS AVAILABLE
DUAL SENSORS WITH SHUTTER
SINGLE SENSORS
In Line QIprrr
In Line QI*rrr
Shutter
Shutter
Microdot electrical connection
MicroDot Electrical Connection
TWj”
T
Wj
LTwW
LTwW”
LT4U”
LT4U
LTL4
LT44
vTwj
vTwj”
x4T44
x4T44”
LT44” LTL4”
TjL
TjL”
x4T44”
Shutter air actuator
Shutter Air Actuator
x4T44
Right Angle QIcrrr
TWj”
Right Angle QI,rrr
LT44”
TWj
LT44
Microdot electrical connection
TjL
TjL”
LTww”
LTww
LTw4”
LTw4
Shutter
Shutter
vTwj
vTwj”
x4T44”
x4T44
xTvw
xTvw”
Round Perpendicular QIp5rrg
Shutter
Shutter
Air Actuator
air
actuator
TMM
TMM”
LTL4
LTL4”
x4T44
x4T44”
All sensor lines Lhj” OD stainless tubing
All sensors have Microdot connectors
yHead not removable
xhLM” OD water lines available
SENSOR HEAD PARTS7 OSCILLATORS 3 CABLES
Parts
Cables
Fil1Tech
Inf con
Ceramic Retainer
Finger Spring
Crystal Holder
Crystal Holder
Oscillator
44WG4vx
Ww4GLWLGPL
Ww4GLWvGGL
FilGTech style
WjxGw44G4Lx
Fil1Tech
Inf con
QIW4vx
QI4LWL
QI4LWv
QIx4L4
Lj4G4L4
44WG4,,
Special Length
QIW4,,
QIW4,,X
All FilGTech cables have an extra layer of Tef on to protect the
shielded cable from deposition materiald insuring longer lifeT
FEEDTHROUGHS
Single G p4c” Flange QIGrcp
Single M” Bolt QIGrcG
For Single Sensors
For Single Sensors
LvT44”
LvT44
wT44”
wT44
UT44”
LTw4”Hex
UT44
LTw4 Hex
Dual M” Bolt QIGrrr
LTU4”
LTU4
vTWw”
vTWw
For Dual Sensors
,TMx”
,TMx
xTLx”
xTLx
LTw4”Hex
LvT44”
LvT44
LTw4 Hex
POSITIONAL SENSOR HEADS
Ultra Torr compression f ttings
Lhj7
Lhj” Water Lines
xhLM7
xhLM” Sleeves
QILL44
v
Custom sensor headsd
feedthroughs and assemblies availableT
X
X
X=
G”rB
To GG”rrB
X GAdjustable
Adjustable
vT4”
To LWT44”
LT44”
LT44
jTUM”
jTUM
x4T447
x4T44”
FIL-TECH
QI”DUD
QI”DUY
QI”DD”
QI”DUZ
QI”DDm
MAXTEK
DD”TDUDTGUD
NKA
.VDT.PmTGU
NKA
DD”TDDmTGUD
FIL-TECH
QBUDZG
QBUDZGL
QBUDZA
QBUDZS
QUZmm”
QUZmm”GL
QUZmm”A
QUZmm.
FIL-TECH
QSBmVY
QSBmVYGL
QSBmVZ
QSBmVD
QUVBPD
QUVBPDA
FIL-TECH
QV.UYD
QV.UYDS
QV.U.DT.
FIL-TECH
QI”DUDF
QI”DUYF
QI”DD”F
QI”DDmF
INFICON
UDBYYD
NKA
UDBYZD
NKA
UDBYYU
BALZERS
UMICORE
BZ”mTDYVTT
NKA
NKA
BN”ZVTUDZTT
NKA
NKA
NKA
NKA
.DZmmP
NKA
NKA
.DZmmV
.DZmm”
NKA
NKA
.DZmm.
ELECTRODE
FREQUENCY
Gold
Longer Life Gold®
Stress Relieving Alloy®
Advanced Adhesion Alloy®
Silver
PMHz
PMHz
PMHz
PMHz
PMHz
ELECTRODE
FREQUENCY
Gold
Longer Life Gold
Stress Relieving Alloy
Silver
Gold
Longer Life Gold
Stress Relieving Alloy
Silver
VMHz
VMHz
VMHz
VMHz
PMHz
PMHz
PMHz
PMHz
ULVAC
SLOAN
ELECTRODE
FREQUENCY
UDUZDZ”
NKA
NKA
UDYBmP”
UDDVBPD
NKA
UDBmVY
NKA
NKA
UDBmVD
NKA
NKA
Gold
Longer Life Gold
Stress Relieving Alloy
Silver
Gold
Stress Relieving Alloy
VMHz
VMHz
VMHz
VMHz
VMHz
VMHz
PHELPS
VEECO
ELECTRODE
PEUDVTDY
PEUDVTDU
PEUDPTDZ
UZ”.TUYD
NKA
UZ”.TU.D
INTELLEMETRICS
FREQUENCY
Gold
Silver
Gold
ZEZMHz
ZEZMHz
VMHz
ELECTRODE
SNPPNG
NKA
NKA
SNPPNS
FREQUENCY
Gold
Longer Life Gold
Stress Relieving Alloy
Silver
PMHz
PMHZ
PMHz
PMHz
LIQUID PLATING CRYSTALS
FIL-TECH
QMUDDU
QMUDDB
QMUDDZ
QMUDD.
QMUDD”
QMUDUU
QMUDUY
QMUDUB
QMUDUV
QMUDU.
QMUDU”
U”Diameter VMHz Polished PlanoKPlano
ELECTRODE
SRS
CrKAu
TiKAu
TiKPt
TiKNi
Stress Relieving Alloy
TiKMo
TiKCu
TiKZn
TiKSiOY
Fe
CrKCr
INFICON
DUDDRXU
DUDDRXB
DUDDRXZ
UZmY.BTU
UZmYV.TU
UZmY.ZTU
Q-SENSE CRYSTALS
EVVD”Diameter ZEmVMHz Polished PlanoKPlano
FIL-TECH
ELECTRODE
QTSENSE
QSXDBDU
Au
QSX BDU
SiOY
QSX BDB
QSXDBUZ
Pt
QSX BUZ
QSXDBUm
Fe
QSX BUm
QSXDBDB
`
B
MULTI-FILM RATE/THICKNESS MONITORS/CONTROLLERS
SQMUD”P MultiUFilm Rate8Thickness Monitor
SQM-160 Multi-Film Rate/Thickness Monitor has two sensor inputs
standard with an option for four additional sensor inputsB Two recorder
outputs provide analog rate and thickness signalsB Sensor inputs can be
assigned to different materialsx averaged for accurate deposition control in
large systems or conf gured for a dual sensorB Rate displays of PBDA8sec
or PBPDA8sec are user selectable and frequency or mass displays can
be selectedB Four relay outputs allow the SQMUD”P to control source or
sensor shuttersx signal time and thickness set pointsx and unit signals to
start8stop and zero readingsB The SQMUD”P comes with a RSUCHC port
and Windows software that allows instrument setup from your computerB
The software can be used to set and store all parametersx operate the
instrumentx and save process data in Excel f le formatB USB or Ethernet
options are availableB
SQMUCPP Dual Channel Rate8Thickness Monitor
SQM-200 Dual Channel Rate/Thickness Monitor is the next generaU
tion Rate8Thickness Monitor with O programmable digital inputsx O
programmable digital outputsx and I analog outputsB The SQMUCPP can
manage simple single sensor processes as well as more complicated
coUdeposition and alloy processes with an independent mode allowing
it to function as two completely separate monitorsB The SQMUCPP has
temporal averaging for superior accuracy at low rates and spatial
averaging for superior accuracy in large chambers using planetary
f xturesB The SQMUCPP has a shutter delay for precise control of f lm
quality with rate sampling capability and displays units in mass or
thickness with a Time8Power feature allowing f lms to complete even
with crystal failureB The SQMUCPP is the perfect instrument for semiU
automatic deposition control and monitoring controller power in a
monitor at a low costB
SQMUCCP Rate8Thickness Monitor8Controller
Our SQM-220 Rate/Thickness Monitor/Controller lets you easily operate
your multiUcrystal sensor head and control each individual crystal sepaU
ratelyB The SQMUCCP controls up to O shutters and up to C multiUcrystal
sensor heads and is I8O programmableB The SQMUCCP features ” channels
for sensor inputs and has additionallyx C channel inputs for active vacuum
gaugesB It has C reprogrammable analog outputs for rate thickness monitors
with D” bits resolutionB The SQMUCCP can also compile your favorites list
for frequently used materialsB Our SQMUCCP communicates with RSCHC8IO7
or Ethernet IPB
TYPICAL SYSTEM
Sensor Head
QIHPPP
Substrate
Microdot
Cable
QINPII
Ion8TC Control
”” BNC Cable
DOPUPDD
I
TC Gauge
TC7HD
Oscillator
DOPUPDP
Ion Gauge
GN7K
DP’ BNC Cable
DOPUPDC
MONITOR/CONTROLLER OPTIONS
SQMUD”P
SQMUCPP
SQMUCCP
Rate8thickness monitor
Rate8thickness monitor
Rate8thickness monitor8controller
COMPONENTS REQUIRED FOR COMPLETE TYPICAL SYSTEM
Source
Shutter
Feedthrough
QICPIC
ORDERING INFORMATION
Rate8Thickness Monitor
See Options
DOPUPDP
DOPUPDD
DOPUPDC
QIHPPP
QINPII
QICPIC
TC7HD
GN7K
Remote analog oscillator
”” BNC cable M8F
DP’ BNC cable M8M
Sensor head single sensor
HP” Microdot cable
Feedthrough D” bolt
Thermocouple gauge
Ion gaugex H8I” kovarx iridium
SPUTTER HARDWARE AND SPUTTER GUN SWITCH
SPUTTER SENSOR HEADS
With Internal Oscillator
Features
• Easy crystal replacement
• Sputter applications
• Stainless steel body
• Compact head
• Sealed unit
• Internal oscillator
• Water cooling option
Cables
Phelps
PeMW”MW f”
PeMW”Mf vW”
PeMW”b” xf”
5MHz
Phelps
Sputter Head
PeMx”M”
Sputter Head1 water cooled N*A
Sputter Head CapP
PeMx”Mx
Fil,Tech
QPMx”M”
QPMx”Mf
QPMx”Mx
6MHz
Fil,Tech
Phelps
Sputter Head
N*A
Sputter Head1 water cooled N*A
Sputter Head CapP
PeMx”MW
QPMW”MW
QPMW”Mf
QPMW”b”
Fil,Tech
QPMx”Mb
QPMx”b”
QPMx”MW
PReplacement Part
All Microdot cables have exposed metal sheathw
With Internal Oscillator R Deep Water Pocket
Sputter Head1 SS
Sputter Head Cap1 SS
Sputter Head1 Copper
Sputter Head Cap1 Copper
QPxy””
QPxy”M
QPxW””
QPxW”M
Specify crystal diameter for correct crystal holder style
Features
• Internal oscillator for yMHz and WMHz
• Removable from water lines for easy repair
• Deep water pocket for superior cooling
• Stainless steel construction
• Copper construction option for superior cooling
””Round Magnetron Sputter Source
Sputter Gun Switch
QPb””b
HN connector
Attached HN female electrical
connector6 For easy installation6
SGSM”M
Superior cooling for long runs
bwvv”
bwvv
6”5 flexible cooling tubing
wM a hideaway comparment
for easy installation
Adjustable shield
6&”5 to 6”5 Target thickness
xw”b”
xw”b
wgy”
wgy
Features
• Direct target contact with larger water cooling pocket
• HN female electrical connector attached for easy install
• wby” f exible cooling tubing in hideaway compartment
• Adjustable shield for wMby” to wby” target thickness
• Stainless steel construction
• Cooled source body via conduction
• High temp magnets maintain magnetic f eld
• Wide pressure range operation to M”,f torr
Specify in Vacuum Length fw”””,bxw”””
fw”” , bxw””
Specify in Vacuum Length
Our SGSM”M Magnetron
Power Supply Switch allows
you to sequentially operate
x sputter guns from one power
supply through a touch screen interfacew You can disconnect
the power supply from one of your sputter guns and
reconnect it to another without needing another power
supplyw The SGSM”M has process control functionally with
two internally energized Mb” VAC onboard outlets and two
non,powered Mb VDC relays that are activated from the user
interface when the “Start” button is pressedw You control the
gas,valves and carousels and operate as you requirew
FEEDTHROUGHS AND SENSOR HEADS
SINGLE
QIb”xb
DUAL
QIb”””
SINGLE
DUAL
QIv”””
QIW”””
QIvyy”
Copper
QIvW””
y
MULTI POCKET EMITTERS
Telemark and Temescal parts
are interchangeableA
Telemark parts can be ordered using
Temescal part numbersA
Locating insulator cross
EByHvI
Beam former
EBIPvv
Anode
EB“vNv
Cathode block left
EBNTyv
Filament HAK turn
EByPHI
EBNTKI
Filament KAK turns
EBKRRI
Washer f at Fy uv places9
EBIv“I
Socket hdA screw
FygTv x IMR” uN places9
EBIvKv
Flanged insulator collar
uRgplaces9EBTITI
Mounting bar
EB“Tvv
“L” Shaped insulator
EBPvKI
Mounting bracket
EB“TIv
Socket hdA screw
FygTv x TMP” uR places9
EBIvKR
Socket hdA screw
FygTv x IMv”uv places9
EBIvKK
Cathode block right
EBNTHv
Insulator high voltage uv places9
EBPHPI
Filament clamp uv places9
EBNTPv
Socket hdA screw
FygTv x TMP”
EBIvKR
MULTI POCKET
EMITTER ASSEMBLY
Insulator shield uv places9
EB“T“v
Filament bus bar pair
EB“TRT
Filament alignment gauge
EBRIvI
Screws vented and moly coated
Screw kit EBIvP“
TEMESCAL
TELEMARK
Emitter support bar
EB“TTv
Socket hdA screw
FygTv x TMIy” uR places9
EBIvKI
Anode mounting bracket
EBPvIv
Beam former left
EBPIHv
Beam former right
EBPIPv
HIGH PERFORMANCE
EMITTER ASSEMBLY
Cathode block right
EBPIKv
Filament
EBPTI“
EBPITv
Anode
EBPINv
Socket hdA screw
FygTv x TMP” uv places9
EBIvKR
Emitter mounting bar
EBPvTv
Cathode block Insulator
EBPvKI
TEMESCAL
Filament clamp uv places9
EBPIyv
Filament bus bar right
EBPvRTR
Socket hdA screw
FygTv x TMP” uv places9
EBIvKR
Socket hdA screw
FygTv x IMv”uv places9
EBIvKK
Emitter Mounting bracket
EBPvvv
Socket hdA screw
FygTv x IMR” uR places9
EBIvKv
Insulator uv places9
EBTITI
Washer f at Fy uv places9
EBIv““
Emitter support bar
EBPv“v
EMITTER ASSEMBLIES
TEMESCAL
TELEMARK
High Performance
Multi Pocket
Single Pocket
Emitter rebuilding serviceC
“NIygPvNRg“
“v“Rg“vPRg“
“T“RgINIRg“
NMA
NMA
vHTg“IK“gI
vKTg“IK“gI
NMA
Socket hdA screw
FygTv x TMP” uR places9
EBIvKR
Fil-Tech
EBPvNR
EB“vPR
EBINIR
EBREBLD
CIncludes glass beading and chemically cleaning all metal partsL replacing f lamentL screws uall vented9L insulatorsL and reassemblingA Metal parts not includedA
ELECTROMAGNETIC COIL
Coil New
y
TEMESCAL
“TIvgyNvTg“
EBPvNR
All items stock
Insulator high voltage uv places9
EBPHPI
EBRyTI
Cathode block left
EBPIRv
Insulator shield uv places9
EB“T“v
Filament bus bar left
EBPvRTL
Beam former spacing gauge
EBPvPI
Filament location gauge rod
EBPvHI
Filament location gauge handle EBPvyI
All screws vented and moly coated
Screw kit EBIvN“
EB“vPR
EB“IK“M
Fil-Tech
EByNvT
TEMESCALp SATISLOH h TELEMARK
ELECTRON BEAM GUN PARTS
FI L A ME NTS
I NSUL ATORS
E MI TTE RS
FILAMENTS
TEMESCAL
TELEMARK
THERMIONICS
SATISLOH
SLOAN
LEYBOLD
JEOL
Fil-Tech
SuperSource
SuperSource
SuperSource
High Performance®
High Performance
Multi Pocket
Multi pocket
Multi Pocket
SuperSource
SuperSource
S Type
mYP Gun
Hooked Ends
S Type
Half moon
PNfY9GDYf9P
PNPN9bNJf9P
PJfJ9Jyyf9P
PbfG9DNfP9P
PbfG9DfNm9P
mYN9PPPf9f
mYN9PPPm9f
AffmfJN
AYJPPDmNP9fmmM
AYJPPDmNP9PPJM
AYJPPNNGJ9PPNM
fmG9YfP
fP9Pby9mmG
DyDNP9PPJ
DfmfDPNfN
TEMESCAL
TEMESCAL
TELEMARK
Flanged®Collar
Locating®Cross
High Voltage
High Voltage
Cathode Block ”L” Shaped
Sloan Insulator
PNPN9NfNf9P
PNPN9GYmf9P
PGPm9DYDf9P
PyfD9yGNf9P
PbfG9DmJf9P
fmG9ffG
mYN9PPPG9f
mYN9PPPJ9f
mYN9PPfP9f
®
EBGDYf
EBbNJf
EBJyyf
EBDNfP
EBDfNm
EBPPPf
EBPPPm
EBGDYf
EBGDYf
EBGDYf9f
EBDyDN9J
EBYbfP
EBymmG
EBDyDN9J
EBPNfN
All f laments J per box except otherwise indicatedu
INSULATORS
MULTI POCKET EMITTER PARTS
Anode
Beam Former
Beam Formerp Tantalum
Cathode Blockp Left
Cathode Blockp Right
Emitter Support Bar
Filament Clamp
Filament Bus Bar Set
Insulator Shield
Mounting Bar
Mounting Bracket
Sealp Quad Ring
Sealp RL Gasket
EBNfNf
EBGYmf
EBDYDf
EByGNf
EBDmJf
EBGffG
TEMESCAL
TELEMARK
Fil-Tech
PmPy9Pmbm9P
PyfJ9fDmm9P
PNPN9bNbm9P
PNPN9bNGm9P
PNPN9bNYm9P
PmPy9PNNm9P
PNPN9bNDm9P
PmPy9PNyN9P
PmPy9PNPm9P
PmPy9PNmm9P
PmPy9PNfm9P
mfPD9PmfJ9P
PPmP9yDff9m
mYN9PPPN9f
mYN9PPPy9m
N®A
mYN9PPNf9f
mYN9PPNm9f
mYN9PPfD9f
mYN9PPNN9f
mYN9PPNJ®PPNG
mYN9PPff9f
mYN9PPfY9f
mYN9PPfb9f
N®A
N®A
EBPmbm
EBfDmm
EBbNbm
EBbNGm
EBbNYm
EBPNNm
EBbNDm
EBPNyN
EBPNPm
EBPNmm
EBPNfm
EBPmfJ
EByDff
HIGH PERFORMANCE EMITTER PARTS
Anode
Anode Mounting Bracket
Beam Formerp left
Beam FormerpRight
Beam Former Spacing Gauge
Cathode Block Insulator
Cathode Blockp Left
Cathode Blockp Right
Emitter Mounting Bar
Emitter Mounting Bracket
Emitter Support Bar
Filament Bus Barp Left
Filament Bus Barp Right
Filament Clamp
mYN9PPPD9f
Fil-Tech
TEMESCAL
Fil-Tech
PbfG9Dfbm9P
PbfG9Dmfm9P
PbfG9DfYm9P
PbfG9DfDm9P
PbfG9DmDf9P
PbfG9DmJf9P
PbfG9Dfym9P
PbfG9DfJm9P
PbfG9DmNm9P
PbfG9Dmmm9P
PbfG9DmPm9P
PbfG9DmyN9f
PbfG9DmyN9m
PbfG9DfGm9P
EBDfbm
EBDmfm
EBDfYm
EBDfDm
EBDmDf
EBDmJf
EBDfym
EBDfJm
EBDmNm
EBDmmm
EBDmPm
EBDmyNL
EBDmyNR
EBDfGm
Y
CRUCIBLE
LINERS
Graphite
Tungsten
GRAPHITE
SIZE
REMARKS
(CC
axCC
fxCC
fxCC
vGCC
vGCC
dGCC
d Pocket
@ Pocket
WmWeb
WmO Web
TUNGSTEN
SIZE
REMARKS
(CC
axCC
fxCC
fxCC
vGCC
vGCC
dGCC
d Pocket
@ Pocket
WmWeb
WmO Web
MOLYBDENUM
SIZE
REMARKS
(CC
axCC
fxCC
fxCC
vGCC
vGCC
dGCC
d Pocket
@ Pocket
WmWeb
WmO Web
Molybdenum
TEMESCAL
TELEMARK
G@f(p@a(fpa
G@f(p@a(fpv
G@f(p@a(fpx
NmA
NmA
NmA
G@f(p@a(fp(
f(ap(GG(pa
f(ap(Gaxpa
f(ap(Gfxpa
f(ap(Gfxpf
f(ap(GvGpa
f(ap(GvGpf
f(ap(GdGpa
TEMESCAL
TELEMARK
G@f(p@axfpa
G@f(p@axfpv
G@f(p@axfpx
NmA
NmA
NmA
G@f(p@axfp(
NmA
NmA
NmA
NmA
NmA
NmA
NmA
FIL.TECH
ECGGG(pa
ECGGaxpa
ECdGfxpa
EC@Gfxpa
ECWGvGpa
ECGGvGpa
ECGGdGpa
FIL.TECH
ECGGG(pf
ECGGaxpf
ECdGfxpf
EC@Gfxpf
ECWGvGpf
ECGGvGpf
ECGGdGpf
TEMESCAL
TELEMARK
G@f(p@a@fpa
G@f(p@a@fpv
G@f(p@a@fpx
NmA
NmA
NmA
G@f(p@a@fp(
f(ap(GG(pv
f(ap(Gaxpv
f(ap(Gfxpv
f(ap(Gfxpd
f(ap(GvGpv
f(ap(GvGpd
f(ap(GdGpv
FIL.TECH
ECGGG(pv
ECGGaxpv
ECdGfxpv
EC@Gfxpv
ECWGvGpv
ECGGvGpv
ECGGdGpv
Aluminum Oxide Boron Nitride Copper Intermetallic Vitreous Carbon
And Custom Liners Available.
CRUCIBLES
All Crucibles andCovers areOFHC
Fil.Tech
TEMESCAL
dxaxcc Pockets
@xaxcc Pockets
dxfxcc Pockets
G(axp)dddpG
G(axp)xGdpG
G(axp)dxdpG
EB)ddd
EB)xGd
EB)dxd
TELEMARK
@xaxcc Pockets
dxfxcc Pockets
@xfxcc Pockets
All high water f ow
f(apGfxxpv
f(apGffGpv
f(apGfx(pv
EBGfxxpv
EBGffGpv
EBGfx(pv
CRUCIBLE COVERS
Fil.Tech
TEMESCAL
d Pockets
@ Pockets
G(axp)advpG
G(axp)axvpG
EB)adv
EB)axv
TELEMARK
d Pockets
@ Pockets
f(apGG(vpa
f(apGG(dpa
EBGG(v
EBGG(d
SILICON DIOXIDE
High purity SO specif cally designedfor electron beamevaporation
i 2
SPECIFICATIONS
Purity
Form
)
ssFssi
Granular
Melting point
Refractive index
ORDERING INFORMATION
a(av C
n d
m aFd@ @xGG nm
G
PART NOF
EMGGfdpx
GRANULAR SIZE .mm%
fpd
xGGg
ION SOURCE PARTS
VEECO MARK I e MARK IIB
ION TECH e SATISLOH
INSULATORS
FILAMENTS
VEECO
MARK I
SATISLOH
FIL-TECH
AgsFDf
ADksswssQG/g/M
ISgsFDf
MARK II A/bvbF
ADksswssQG/s/M
IS/bvbF
/k
VEECO/ION
TECH
FIL-TECH
gekcm Cathode sksgG/sD
ISg/sD
gcm Neutralizer sksgGsbg
ISgsbg
GAS DISTRIBUTORS
VEECO
SATISLOH
VEECO
FIL-TECH
ADksswssQG/gbM
ADksswssQG/bDM
IS/ss/
IS/sgF
IS/sgFF
ISsbgFM
ISsbMS
ISFkFsM
ISFkFsF
VEECO/ION TECH 3 & 5cm
FIL-TECH
skssGsgk Male
skssGsgb Female
skssGsgD Male
ISssgk
ISssgb
ISssgD
FIL-TECH
MARK I
B/wsskG/ Graphite
ADksswssQG/gfM
IS/wsskG
B/wsskGg Stainless
ADksswssQG/gkM
IS/wsskS
B/wsskGk Titanium
SATISLOH
MARK I
/fk/ss/
MARK I & II /sGgFM
/sGgFF
bGgFM
bGMS
/nfGFsM
/nfGFsF
IS/wsskT/
MARK II
B/bvg/G/ Graphite
ADksswssQG/DfM
IS/bvg/G
B/bvg/GF Stainless
ADksswssQG/kfM
IS/bvg/S
B/bvg/Gk Titanium
ADksswssQGFsFM
IS/bvg/T
ANODES
VEECO
MARK I
B/wssgG/ Graphite
B/wssgGF Stainless
s
MARK II
B/bvggG/ Graphite
B/bvggGF Stainless
SATISLOH
FIL-TECH
ADksswssQG/gFM
ADksswssQG/ggM
IS/wssgG
IS/wssgS
ADksswssQG/DkM
ADksswssQG/bbM
IS/bvggG
IS/bvggS
MARK II PARTS
CATHODE TIP & KEEPER
VEECO
FIL-TECH
MARK II Cathode Tip
B/DvbwnSP
IS/Dvbw
MARK II Keeper
A/DvDg
IS/DvDg
MARK II
DESCRIPTION
FIL-TECH
B/bvFg
B/bvFD
B/bvFw
B/bvFv
B/bvgs
B/bvgF
B/bvgf
B/bvgk
B/bvgb
B/bvgD
B/bvgw
B/bvgv
B/bvfs
B/bvff
B/bvfb
B/bvfD
BFvvkw
BFvvkv
BFvvbs
BFvvb/
Pole PieceB Outer
AlnicoGk Magnet
Support Plate
Baff e
Spacer
SupportB Back Anode
SupportB Front Anode
Tie RodB Short
Tie RodB Long
Cathode Connection
Anode Connection
SupportB Cathode
KnobB Hold Down
RetainerB Cable
CoverB Empty Socket
Work Station
PinB Alignment
ScrewB Hold Down
Socket
Plug
IS/bvFg
IS/bvFD
IS/bvFw
IS/bvFv
IS/bvgs
IS/bvgF
IS/bvgf
IS/bvgk
IS/bvgb
IS/bvgD
IS/bvgw
IS/bvgv
IS/bvfs
IS/bvff
IS/bvfb
IS/bvfD
ISFvvkw
ISFvvkv
ISFvvbs
ISFvvb/
v
THERMOCOUPLE
GAUGE TUBES
SEMICONDUCTOR APPLICATIONS
Competition
VACUUM APPLICATIONS
Fil-Tech
Competition
Fil-Tech
Axcelis
””dddd8
TCddWV
Agilent
FdWLP”d.
TC*”.
Axcelis
””dd.””d
TCddWKF.:
Agilent
FdWLP”.d
TC*”.VCR
Axcelis
AMAT
””dddWW
FP*.8dd.
TC””WW
TCddWV
Hastings
DVb:M
TC:M
Hastings
DVb:bVCR
TC:MVCR
AMAT
””.dbddP”:
TC:M
Hastings
DVb:bKF.:
TC:MKF.:
AMAT
””.dbd.d.P
TC*”.
Hastings
DVb:bKFP*
TC:MKFP*
AMAT
””.dbd.dL.
TC:MVCR
CVC
GTCbddW
TCddW
AMAT
””.dbd.dLW
TC*”.VCR
MKS
PLddd:
TC:M
Temescal
:9PdbWP:”bd
TC:M
CTIqBrooks
8..P.d*
TC:MVCR
Novellus
:dbdddd*bdd
TC:M
Thermionics
:”W”bddWM
TCddWV
Novellus
:dbdd.8dbdd
TC:MKFP*
THERMOCOUPLE CONTROLLERS
Panel Mount Single Station
TC.d.
TCPd.
TC*”. Tube
TC:M Tube
Cabinet Mount Single Station
TC.d.C
TC*”. Tube
TCPd.C
TC:M Tube
All units come with required tubes and cables and are .Pd voltsw
Panel Mount Single Analog
CONVECTION GAUGES
®
Directly Replace Convectrons
Plug Compatible No Process Changes Required
Guaranteed Identical Performance
Drop-In Replacement
Fitting
Fil-Tech
MKS
Convection Gauge
Fil-Tech
MKS
Mini Convection Gauge
Super Bee
.q8” NPT
PL*dL.
CVG.d.GA
PL*8dd
CVMP..GAA
CVMPd.GAA
NW.:KF
PL*Pd”r
CVG.d.GB
PL*8d:
CVMP..GBA
CVMPd.GBA
NWP*KF
PL*.9:
CVG.d.GC
PL*8dL
CVMP..GCA
CVMPd.GCA
.qW” VCR
PL*.8*rr
CVG.d.GG
PL*8d.
CVMP..GGA
CVMPd.GGA
r PL*Pd”: Axcelis
rr PL*.8*: AMAT
NovellusqLam
Novellus
.d
””dd”.L
PL*P:P
LLb.d9dW*”bdd.
:dbddd**bdd
Fil-Tech
IONIZATION
GAUGE TUBES
A
ll Fil)Tech ionization gauge tubes are identical or
functionally equivalent to the competitive tubes listed8
They are all manufactured by two companies and pri)
vately labeled8
IONIZATION
GAUGE TUBES
BY TYPE
IRIDIUM FILAMENT
AMAT/VSEA ION IMPLANTATION
Thoria coated iridium f lament assures longer life8
FT PART NO.
DESCRIPTION
GV9P
R6q” Pyrex
GV9K
R6q” Kovar
GWNNP
W” Pyrex
GWNNK
W” Kovar
FIL-TECH
9RNNNW9
KVR,NRNW
qN9RN9N
FX9WMNNW
W” Pyrex
W” Pyrex
W” Kovar- X R6q” Flange
TC Tube
AXCELIS ION IMPLANTATION
RRNNNNX
RRNNNNM
R6q” Pyrex
TC Tube
AMAT/APPLIED ION IMPLANTATION
TWIN TUNGSTEN FILAMENTS
External switching of tungsten f laments without disturbing vacuum8
FT PART NO.
DESCRIPTION
FIL-TECH
GV9PT
R6q” Pyrex
GV9KT
R6q” Kovar
GWNNPT
W” Pyrex
GWNNKT
W” Kovar
Platinum coating minimizes electrostatic charge8
FT PART NO.
DESCRIPTION
GV9PC
R6q” Pyrex
GV9KC
R6q” Kovar
GWNNPC
W” Pyrex
GWNNKC
W” Kovar
FIL-TECH
W” Pyrex
TC Tube
TC Tube
AGILENT BROAD RANGE
W” Pyrex
W” Kovar
NWqN Flanged
MKS
Kovar tube mounted on X R6q” rotatable ultra high vacuum f ange8
FT PART NO.
DESCRIPTION
FIL-TECH
GV9KF
R6q” Iridium Flanged
GWNNKF
W” Iridium Flanged
BROAD RANGE PLATINUM COATED
FIL-TECH
TRIODES ULVAC
FIL-TECH
Tungsten
Iridium
W” Pyrex
W” Kovar Coated
TC Tube
TC Tube
TC Tube
TC Tube
NOVELLUS SPUTTERING
KX9NNRNW
KX9NNRNX
KX9NNRWW
FLANGED
Operating pressure qIWN)WNO to 9IWN)XOtorr8
FT PART NO.
DESCRIPTION
GMWR,P6W
W” Pyrex
GMWR,K6W
W” Kovar
GMWR,F
X R6q” Flange
GMWR,KFqN
NWqN Flanged
RRWN)9NNNR
RRWN)NWNWq
RRWN)NNXR,
RRWN)NWNWX
RRWN)NWNVW
RRWN)NWNVq
XV)XX9)VNN)NN
,N)NNNN9)NN
,N)NNWMN)NN
PLATINUM COATED
In)line tube X)ray limit W IWN) VOtorr8
FT PART NO.
ULVAC PART NO.
GTWMT
WIT)WM
GTWMIR
WIT)WMIR
CROSS REFERENCE
FIL-TECH
GV9PT
TCNNqV
FIL-TECH
GWNNPT
GWNNKC
TC,M
TC9RW
TC,MVCR
TC9RWVCR
FIL-TECH
GMWR,P6W
TC,M
TC,MVCR
FIL-TECH
GMWR,P6W
GMWR,K6W
GMWR,KFqN
FIL-TECH
XVqNNX
XVqNNR
XVqNN9
XVqNN,
XVqNNV
XVqNNM
XVqNWX
XVqNWR
XVqNW9
XVqNW,
GV9P
GV9K
GWNNP
GWNNK
GV9KF
GWNNKF
GV9PT
GV9KT
GWNNPT
GWNNKT
AGILENT
FIL-TECH
KXq,,RNW
KXq,,RNX
KXq,,RNR
KXqVWRNW
KXqVWRNX
KXqVWRNR
KVR,NRNW
KVR,NRNR
GWNNPC
GWNNKC
GWNNKCF
GWNNP
GWOOK
GWNNKF
GWNNPT
GV9PT
MRC
qN9NRNN
FIL-TECH
GWNNPT
GWNNPT
GWNNKTF
TCNNqV
FIL-TECH
8VN9” Pyrex
GVWPT
WW
LEAK DETECTOR FILAMENTS
ALCATEL
FILZTECH
Filament
wYxOB6
Collector Single wvxBvY
Collector Double OwOOpy
LDOw
LDOO
LDOp
AGILENT
Ion Source
Ion Source
Ion Source
FilPTech’s LDOw’s are drop in replacements for the OEM
partV Our f lament is welded into the slotted posts for
greater reliability and longer lifeV
FILAMENT
vpvYwxwO
vpvYwxwp
VSFL
NEW
Tungsten
Iridium
Iridium
REPAIR EXCHANGE
LDy
LDv
NFA
LDyRE
LDvRE
VSFLRE
CALIBRATED HELIUM LEAKS
RECALIBRATION
NEW
CLy
CLv
Certif cation
Ow ccHeFsec
OwPvccHeFsec
Py
NIST Traceable Certif cation
FILZTECH FLUID vs TORRLUBE
FilPTech Fluid dramatically increases bearing life in vacuum
and semiconductor processes by reducing frictionV It has excepP
tional lubricating properties for sliding and rotating applicaP
tions to OwPv torrV FilPTech Fluid functions in a wide temperature
range dPpwwC to p6wwCm and is chemically inert in the presence
of most semiconductor gasses such as f uorine at pwwwC and
trif uoride at YwwCV
FT PART NO®
TORRLUBE®
SIZE
FTFwwO
O cc Syringe
FTFwwx
x cc Syringe
FTFOww
pPYw cc Bottles
FILZTECH FLUIDTM
NUDE GAUGES c FILAMENTS
AGILENT
Flange 2 3/4”
AGILENT
.yOYwwv
.yOYwwy
Flange 2 3/4”
UHV GAUGES
Header Ceramic to Metal Seal
MKS
pyBwpp
pyBwpx
pyBwBx
One f lament per box
DESCRIPTION
Twin Tungsten
Twin Iridium
DESCRIPTION
Tungsten Dual
Iridium Dual
Iridium Single With Pin Guard
Header Ceramic to Metal Seal
FILZTECH
GUpOT
GUpOIR
GUBxIR
Degas EZBeam or I2R
DESCRIPTION
Tungsten Dual
Iridium Single
REPLACEMENT FILAMENTS
FILZTECH
GFOv
GFpv
MKS
pyBwpB
pyBwpY
pyBwp.
One f lament per box
Op
Degas EZBeam Only
BAYARD ALPERT GAUGES
FILZTECH
GBppT
GBppIR
AGILENT
.yOwwOv
.yOwwpv
MKS
DESCRIPTION
Twin Tungsten
Twin Tungsten
Single Iridium
FILZTECH
GFpB
GFpY
GFp.