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sensors Article Improved Tuning Fork for Terahertz Quartz-Enhanced Photoacoustic Spectroscopy Angelo Sampaolo 1,2 , Pietro Patimisco 1,2 , Marilena Giglio 1 , Miriam S. Vitiello 3 , Harvey E. Beere 4 , David A. Ritchie 4 , Gaetano Scamarcio 1 , Frank K. Tittel 2 and Vincenzo Spagnolo 1, * 1 2 3 4 * Dipartimento Interateneo di Fisica, Università degli studi di Bari Aldo Moro e Politecnico di Bari, Via Amendola 173, Bari I-70126, Italy; [email protected] (A.S.); [email protected] (P.P.); [email protected] (M.G.); [email protected] (G.S.) Department of Electrical and Computer Engineering, Rice University, 6100 Main Street, Houston, TX 77005, USA; [email protected] NEST, CNR-Istituto Nanoscienze and Scuola Normale Superiore, Piazza San Silvestro 12, Pisa I-56127, Italy; [email protected] Cavendish Laboratory, University of Cambridge, J. J. Thomson Avenue, Cambridge CB3 0HE, UK; [email protected] (H.E.B.); [email protected] (D.A.R.) Correspondence: [email protected]; Tel.: +39-080-544-2373 Academic Editor: Markus W. Sigrist Received: 8 February 2016; Accepted: 23 March 2016; Published: 25 March 2016 Abstract: We report on a quartz-enhanced photoacoustic (QEPAS) sensor for methanol (CH3 OH) detection employing a novel quartz tuning fork (QTF), specifically designed to enhance the QEPAS sensing performance in the terahertz (THz) spectral range. A discussion of the QTF properties in terms of resonance frequency, quality factor and acousto-electric transduction efficiency as a function of prong sizes and spacing between the QTF prongs is presented. The QTF was employed in a QEPAS sensor system using a 3.93 THz quantum cascade laser as the excitation source in resonance with a CH3 OH rotational absorption line located at 131.054 cm´1 . A minimum detection limit of 160 ppb in 30 s integration time, corresponding to a normalized noise equivalent absorption NNEA = 3.75 ˆ 10´11 cm´1 W/Hz½ , was achieved, representing a nearly one-order-of-magnitude improvement with respect to previous reports. Keywords: quartz enhanced photoacoustic spectroscopy; quartz tuning fork; gas sensing; THz spectroscopy; quantum cascade laser 1. Introduction Spectroscopic techniques for trace gas sensing and monitoring have shown great potential for non-invasive chemical analysis requiring high sensitivity and selectivity. While trace gas detection in the near-infrared (IR) and mid-IR ranges demonstrated excellent performance, the use of far-IR or terahertz (THz) radiation for sensing purposes is still underdeveloped. In the wavelength range from 50 µm to 3 mm wavelengths (0.1–6 THz), numerous gas molecules have well-defined spectral THz “fingerprints” absorptions, due to strong rotational transitions between molecular energetic levels. Hence, the THz spectral region can provide higher detection selectivities compared to those provided by the characteristic ro-vibrational complex structures in the mid-IR range. A number of THz optical systems have been proposed for gas sensing and spectroscopy. Terahertz Time-Domain Spectroscopy (THz-TDS) is based on frequency conversion employing nonlinear optics and femtosecond laser pulses for the generation and detection of THz radiation [1]. Spectral measurements over a very broad bandwidth in the THz range can be performed using THz-TDS, allowing spectroscopic investigation of a large number of gases, such as water vapor, methyl chloride and nitrous oxide [2–4]. However, Sensors 2016, 16, 439; doi:10.3390/s16040439 www.mdpi.com/journal/sensors Sensors 2016, 16, 439 2 of 8 THz-TDS is strongly limited by the available µW-range output optical powers. Furthermore, such a technique usually provides a limited control of the selected frequency bandwidth. The sensitivity of THz gas spectroscopy can be enhanced by increasing the available optical power. So far, THz quantum cascade lasers (QCLs) represent an attractive solution in the far-IR spectral region in terms of output power [5,6] and spectral purity [7]. THz QCLs can provide single-mode emission with output powers of up to 138 mW in continuous wave (cw) operation at cryogenic temperatures [8]. Wavelength modulation spectroscopy, employing liquid-He-cooled cw-operating QCLs combined with low-noise bolometer detectors, is promising in terms of THz-sensing performances [9,10]. This approach would allow reaching high sensitivity and selectivity, but suffers from complexity and the disadvantage of using cryogenic cooling systems for both generation and detection of THz radiation. Recently, THz quartz-enhanced photoacoustic (QEPAS) sensors were reported [11–13]. QEPAS permits overcoming some issues traditionally associated with THz spectroscopy, such as the use of cryogenic systems for the detection of THz radiation and complex signal analysis processes. QEPAS is based on the detection of acoustic waves produced by the absorbing gas target by means of a piezoelectric quartz tuning fork (QTF) acting as an acousto-electric transducer [11–16]. The merits of QEPAS include high detection sensitivity, high selectivity, and fast time response using a compact and relatively low-cost acoustic detection module [16–19]. Since rotational levels are up to three orders of magnitude faster with respect to mid-IR vibrational levels, the THz spectral range is particularly suitable for the QEPAS technique. Indeed, the fast relaxation times characteristic of THz transitions allow low-pressure operation, providing high QTF resonance Q-factors, and thereby large QEPAS signals [16]. The extension of QEPAS in the THz range was made possible by the realization of a custom-made QTF [11,12] (denoted in this work as C-QTF) having the same geometry as the commercial 32.78 kHz-QTF, but size six times larger, with prong lengths of L = 20.0 mm, prong widths of T = 1.4 mm and a crystal thickness of w = 0.8 mm. The QTF prongs are separated by a ~1 mm gap, required to focus a THz laser beam between the prongs without illuminating them. It is worth noting that the standard QTF structure is optimized for timing purposes and is not ideal for spectroscopic applications. In a previous study [20], we investigated the electro-elastic properties of a set of six QTFs with different geometries and the objective of determining the optimal design for optoacoustic gas sensing. This study allowed us to identify a novel QTF design (denoted in this work as N-QTF), optimized for THz QEPAS. The performance of a QEPAS sensor can be considered in terms of its QEPAS signal (S) which can be expressed as S = KP0 Qαε, where K represents the QTF efficiency in converting the acoustic pressure wave incident on the internal side of the two prongs into transversal in-plane deflections, P0 is the laser power, Q is the QTF quality factor, α is the gas absorption coefficient and ε is the conversion efficiency of the absorbed optical power into sound. The factor Q¨ K can be used as the figure of merit to compare the sensing performance of the two QTFs in a QEPAS sensor, if all other sensor parameters (e.g., laser power, absorption strength, gas pressure and sound conversion efficiency) are kept constant. The N-QTF was used in the same QEPAS platform as previously used with the C-QTF to detect methanol [11,12]. A comparison of the performances between the two THz QEPAS sensor systems shows a sensitivity enhancement of approximately one order of magnitude when using the N-QTF. 2. Quartz Tuning Fork Design and Implementation To investigate the influence of QTF sizes on the acousto-electric transduction efficiency, i.e., the conversion efficiency of the acoustic wave in piezoelectric charges, we selected three QTF parameters that directly influence this process: (i) the QTF resonance frequency f ; (ii) its quality factor Q; and (iii) the spacing s between the two prongs [20]. In a typical QEPAS sensor, the laser modulation frequency f L is set at one of the QTF resonance frequencies or the related sub-harmonics [16]. To ensure that the gas non-radiative energy transfer, which generates acoustic waves, follows the fast modulation f L of the incident laser radiation efficiently, Sensors 2016, 16, 439 Sensors 2016, 16, 439 3 of 8 3 of 8 the condition << 1/2πτ must be satisfied [21], τ ison thethe time constant non-radiative gas relaxationf Lprocesses. The time constant τ where depends specific gasofcarrier as wellgas as relaxation processes. The time constant τ depends on the specific gas carrier as well as intermolecular intermolecular interactions and typically falls in the microseconds range [22]. Hence, the QTF interactionsfrequency and typically fallsbeinreduced the microseconds range Hence, the QTFkHz resonance resonance should with respect to [22]. the standard 32.78 QTF, infrequency order to should bethe reduced respecttime to the standard 32.78inkHz QTF, in order to approach the typical approach typicalwith relaxation of gases, resulting more efficient sound wave generation and relaxation time of gases, resulting in more efficient sound wave generation and providing an increase providing an increase of the QEPAS signal. Recently, a QTF with a resonance frequency of 30.72 kHz of theemployed QEPAS signal. Recently, a QTF with a resonance frequency of 30.72 kHzItswas employed was in a was in a QEPAS sensor operating in the near-IR spectral region. performance QEPAS sensor the near-IR region. Its aperformance waskHz compared with same compared withoperating the same in QEPAS sensorspectral architecture with standard 32.78 QTF, and anthe increase QEPAS sensorsignal architecture with of a standard 32.78 kHz[23]. QTF, and an increase of the QEPAS signal by a of the QEPAS by a factor 1.5 was measured factorThe of 1.5 was measured [23]. are defined by the QTF’s material properties and its geometry and resonance frequencies Thecalculated resonancebyfrequencies areone defined by the the fork QTF’s properties andprong. its geometry and can be considering arm of asmaterial a cantilever-vibrating In QEPAS can be calculated one arm of the fork where as a cantilever-vibrating prong. directions, In QEPAS spectroscopy, onlyby theconsidering QTF symmetric flexural modes, the tines move in opposite spectroscopy, only theflexural QTF symmetric flexural modes, wherefrequencies the tines move in opposite directions, are excited. For these modes, the related resonance depend on prong sizes as 2 are excited. For these flexural modes, the related resonance frequencies depend on prong sizes as f~T/L [20]. For a QTF operating in air at the fundamental flexural mode, the Q was shown to be 2 f~T/L [20]. For QTF[20]. operating at the fundamental flexural mode, proportional the Q was shown be proportional to aTw/L Since in theairQTF piezoelectric signal is directly to Q,tothis proportional to Tw/L Since QTF piezoelectric signal is directly proportional to Q, this parameter parameter should be[20]. as high asthe possible. should be as possible. Even if fhigh and as Q are not influenced by the prong spacing s, this parameter plays a crucial role in Even if f and Q transduction are not influenced by theFor prong spacinglaser s, thisbeam, parameter playsofa incident crucial role in the the acousto-electric efficiency. a focused the decay acoustic acousto-electric transduction efficiency. For a focused laser beam, the decay of incident acoustic wave wave pressure on the prong depends critically on the distance between the focused laser beam pressure on the depends on the distance between the focused beam position and position and theprong internal prong critically surface. On other hand, the larger the laserlaser beam waist, the larger prongbesurface. Ontothe other hand, thebeam largerprofile the laser beam waist, largerand thethereby s value the internal s value must in order avoid the power tails hitting thethe prongs must be in order to avoid the power beam profile noise. tails hitting thes prongs therebybased introducing introducing a modulated fringe-like background Hence, should and be chosen on the a modulated fringe-like noise.toHence, s should In be achosen based reported on the expected beam expected beam waist ofbackground the laser source be employed. previously THz QEPAS waist the laser source to be employed. In a previously reported QEPAS [12], the laser sensorof[12], the laser beam was focused between a prong gap s =THz 1 mm with sensor a ~430-μm-diameter focused prongof gap 1 mm withtoa pass ~430-µm-diameter beam waistC-QTF and it without allowed beam was waist and itbetween alloweda100% thes =laser light through the employed 100% of the lightThis to pass through the employed C-QTFofwithout touching the prongs. This result touching thelaser prongs. result indicated that a reduction s is feasible. Hence, s was decreased to indicated that a reduction of s is feasible. Hence, s was decreased to 700 µm in the design of the N-QTF. 700 μm in the design of the N-QTF. A reduced prong thickness of T = 1 mm (1.4 mm for the C-QTF) A reduced prong decrease thicknessofofthe T =resonance 1 mm (1.4 mm for the C-QTF) allowed a further decrease of the allowed a further frequency. In addition, the prong length was reduced to resonance addition, thetoprong length was quality reducedfactor, to L = Q. 17 The mmfabrication from L = 20ofmm order L = 17 mm frequency. from L = 20Inmm in order maintain a high thein N-QTF to maintain high quality factor,CA, Q. The fabrication the N-QTF was realizedwby Statek, CA, was realizedaby Statek, Orange, starting from aof crystal plate of thickness = 250 μmOrange, (a standard starting from a crystal plate of thickness w = 250 µm (a standard for commercial QTF resonators). for commercial QTF resonators). Figure 1 shows the design of the N-QTF and its main geometrical geometrical parameters. parameters. Figure geometrical parameters. parameters. Figure 1. 1. Picture Picture of of the the N-QTF N-QTF including including the the size size of of the the main main geometrical The electrical characterization of the N-QTF was carried out by applying a sinusoidal voltage The electrical characterization of the N-QTF was carried out by applying a sinusoidal voltage provided by a wave-function generator. The electrical response of the resonator was processed by a provided by a wave-function generator. The electrical response of the resonator was processed by transimpedance amplifier and then demodulated at the same frequency of the voltage excitation by a transimpedance amplifier and then demodulated at the same frequency of the voltage excitation means of a lock-in amplifier. The resonance frequency measured in standard air at a pressure of by means of a lock-in amplifier. The resonance frequency measured in standard air at a pressure 10 Torr is f = 2871 Hz lower than that measured for the C-QTF (4250 Hz). A quality factor of Q = 18,600 of 10 Torr is f = 2871 Hz lower than that measured for the C-QTF (4250 Hz). A quality factor of was obtained, which is lower than that obtained for the C-QTF (>30,000) with the same experimental Q = 18,600 was obtained, which is lower than that obtained for the C-QTF (>30,000) with the same conditions. This is mostly due to the smaller crystal thickness of w = 250 μm with respect to w = 800 μm experimental conditions. This is mostly due to the smaller crystal thickness of w = 250 µm with respect for the C-QTF. to w = 800 µm for the C-QTF. Sensors 2016, 16, 439 Sensors 2016, 16, 439 Sensors 2016, 16, 439 4 of 8 4 of 8 4 of 8 THzQEPAS QEPASSensor SensorArchitecture Architecture 3. 3.THz 3. THz QEPAS Sensor Architecture The CH 3OH QEPASsensor sensorscheme, scheme,similar similarto tothe theone one reported reported in in [11,12], is depicted The CH QEPAS depicted in in Figure Figure 2. 3 OH CH3OHthe QEPAS sensor scheme, similar to thetargeting one reported in [11,12], is depicted inlocated Figure WeThe employed same source, which allowed the methanol absorption line We2.employed the same laserlaser source, which allowed targeting the methanol absorption line located at 2. νWe employed the samecm laser) with source, which allowed targeting methanol line located −21 ´ 21 cm/mol = 3.9289 (131.054 line-strength of 10the cm/mol inabsorption HITRAN units. ν =at3.9289 THzTHz (131.054 cm´1 )−1with aaline-strength of SS ==4.28 4.28׈ 10 in HITRAN units. at ν = 3.9289 THz (131.054 cm−1) with a line-strength of S = 4.28 × 10−21 cm/mol in HITRAN units. Figure 2. 2. Schematic ofofthe Figure Schematic theQEPAS QEPAStrace tracegas gassensor sensorusing usingaaTHz THzQuantum QuantumCascade Cascade Laser Laser (THz (THz QCL) as Figure 2. Schematic of thePM—Parabolic QEPAS trace gas sensor using a THz Quantum Cascade Laser (THz QCL) the excitation source. Mirror; ADM—Acoustic Detection Module; QTF—Quartz theas excitation source. PM—Parabolic Mirror; ADM—Acoustic Detection Module; QTF—Quartz Tuning as the excitation source. PM—Parabolic Mirror; ADM—Acoustic Detection Module; QTF—Quartz Tuning Fork; PC—Personal Computer. Fork; PC—Personal Computer. Tuning Fork; PC—Personal Computer. The THz laser beam was focused between the N-QTF prongs by using two off-axis paraboloidal The THz laser beam was focused between the prongsby byusing usingtwo twooff-axis off-axisparaboloidal paraboloidal The THz laser beam was focused between the N-QTF N-QTF prongs aluminum reflectors (PM#1 with f-number = 2 and PM#2 with f-number = 5). The N-QTF is fixed on aluminum reflectors (PM#1 with f-number = 2 and PM#2 with f-number = 5). The N-QTF fixed with f-number = 2 and PM#2 with f-number = 5). The N-QTF is is fixed onon aaluminum mountingreflectors structure(PM#1 and housed in an acoustic detection module (ADM), with polymethylpentene a mounting structure and housed an acoustic detection module (ADM), (ADM),with withpolymethylpentene polymethylpentene a mounting structure and housedinin acoustic detection module (TPX) input and output windows. Anan optical power of 40 W was measured between the prongs of (TPX) input and output windows. An optical power of µW was measured between the prongs (TPX) input and output windows. An optical power 40 W was measured between the prongs of of the QTF by means of a pyroelectric detector (not shown in Figure 2). The THz laser beam exiting the the QTF by means of a pyroelectric detector (not shown Figure 2). The THz laser beam exiting the theADM QTF by means of a pyroelectric detector (not shown in Figure 2). The THz laser beam exiting was re-focused onto a pyroelectric camera (Spiricon Pyrocam III-C) by means of an additionalthe ADM was re-focused ontoa apyroelectric pyroelectric camera (Spiricon (Spiricon Pyrocam III-C) anan additional ADM was re-focused Pyrocam III-C)by bymeans means additional aluminum paraboliconto mirror (PM#3 withcamera f-number = 2). QEPAS measurements wereofof performed by aluminum parabolic mirror (PM#3 with f-number = QEPAS measurements were performed byby aluminum parabolic mirror (PM#3 with f-number = 2). QEPAS measurements were performed applying a sinusoidal waveform provided by a function generator (Tektronix model AFG3102) at the applying a sinusoidal waveform provided by a function generator (Tektronix model AFG3102) at the applying a sinusoidal waveform provided by a function generator (Tektronix model AFG3102) QTF resonance frequency f to the current driver while demodulating the QTF response at f by using at resonance frequency f toResearch current driver while demodulating the QTF response at LabViewf by using theaQTF QTF resonance frequency f the to the current driver while demodulating the QTF response at f by lock-in amplifier (Stanford Model SR830). Both instruments were controlled by a lock-in amplifier (Stanford Research Model SR830). Both instruments were controlled by LabViewusing a lock-in amplifier Research SR830). were through controlled based software. A slow (Stanford voltage ramp allowsModel scanning of theBoth THz instruments laser wavelength the by based software. A slow voltage ramp allows scanning of the THz laser wavelength through the selected methanol absorption line for spectral acquisition. LabView-based software. A slow voltage rampline-shape allows scanning of the THz laser wavelength through selected methanol absorption line for spectral line-shape acquisition. the selected methanol absorption line for spectral line-shape acquisition. Figure 3. Two-dimensional beam profile of the THz-QCL acquired by means of an IR pyrocamera Figure 3. Two-dimensional beam profile the acquired by means ofan anIRIRpyrocamera pyrocamera Figure 3. Two-dimensional beam profile of the THz-QCL THz-QCL means after mirror PM#3 (see Figure 2) when theof beam is focused acquired out of theby N-QTF (a)ofor between the two after mirror PM#3 (see Figure 2) when the beam is focused out of the N-QTF (a) or between the two after mirror PM#3 (see Figure when the beam is focused out of the N-QTF (a) or between prongs (b). Both beam profiles are shown together with an illustration representing the position ofthe prongs (b). Both beam profiles are shown together with an illustration representing the position of of two prongs (b). Both beam profiles are shown together with an illustration representing the position the focused THz beam (red spot) with respect to the N-QTF. focused THz beam (redspot) spot)with withrespect respectto tothe the N-QTF. N-QTF. thethe focused THz beam (red Sensors 2016, 16, 439 5 of 8 Figure 3 depicts the observed two-dimensional (2D) laser beam profiles after mirror PM#3. First 5 of 8 the profile is measured with the focused laser beam positioned out of the N-QTF (Figure 3a) and then between the N-QTF prongs (Figure 3b). A comparison between the two beam profiles clearly indicated that the THzthe beam is not obstructed by the QTF when is focused between prongs. The Figure 3 depicts observed two-dimensional (2D) laserit beam profiles afterits mirror PM#3. total the image intensity was measured summing pixel values forout both profiles, from3a) which First profile is measured with theby focused laserall beam positioned of beam the N-QTF (Figure and we estimated that 96.4% of the light intensity passes between the prongs. Hence, a reduction of the then between the N-QTF prongs (Figure 3b). A comparison between the two beam profiles clearly prong spacing from s = 1000 μm to s = 700 μm should not significantly affect the noise level of the indicated that the THz beam is not obstructed by the QTF when it is focused between its prongs. The QEPAS signal. total image intensity was measured by summing all pixel values for both beam profiles, from which Sensors 2016, 16, 439 we estimated that 96.4% of the light intensity passes between the prongs. Hence, a reduction of the 4. THzspacing QEPASfrom Sensor Performance prong s =Calibration 1000 µm to and s = 700 µm should not significantly affect the noise level of the QEPAS Thesignal. sensor calibration was performed by using a trace gas standard generator. Starting from a certified 100 part per million (ppm) CH3OH in N2 mixture, we produced lower methanol 4. THz QEPAS Sensor Calibration and Performance concentrations using pure N2 as the diluting gas. A laser modulation amplitude of 600 mV was employed in the calibration QEPAS experiments, similarby to those in [11,12]. High-resolution QEPAS The sensor was performed using reported a trace gas standard generator. Starting scans of CH 3 OH:N 2 calibrated mixtures with different concentrations are shown in Figure 4a, together from a certified 100 part per million (ppm) CH3 OH in N2 mixture, we produced lower methanol with a spectral scan pure N2 flows the modulation ADM. The lock-in integration was concentrations usingacquired pure N2when as the diluting gas.inside A laser amplitude of 600 time mV was set to 3 s for employed inall themeasurements. QEPAS experiments, similar to those reported in [11,12]. High-resolution QEPAS calibration curve shown in Figure 4b was obtained using CH OH concentrations derived scansThe of CH mixtures with different concentrations are 3shown in Figure 4a, together 3 OH:N2 calibrated fromathe gas mixture generator andpure the QEPAS peak signals acquired theintegration related scans. with spectral scan acquired when N2 flows inside the ADM. Thefrom lock-in timeThese was results confirm that the QEPAS signal is proportional to the methanol concentration. set to 3 s for all measurements. 4. (a) QEPAS QEPAS spectral spectral scans scans of of gas gas mixture mixture containing containing different different concentrations concentrations of of methanol in Figure 4. Torr acquired acquired with with 33 ss lock-in lock-in integration integration time. time. The The spectral spectral scan scan obtained obtained N22 at a gas pressure of 10 Torr for pure pure N22 under the same operating conditions is also depicted. (b) Calibration curve (solid red line) Calibration from the the linear linear fit fit of of measured measured QEPAS QEPASpeak peaksignals signals(‚) (●)vs. vs.methanol methanolconcentrations. concentrations. obtained from Figure 5 shows a comparison between the QEPAS scan measured for 100 ppm methanol in N2 The calibration curve shown in Figure 4b was obtained using CH3 OH concentrations derived from using the N-QTF (Figure 5a) based on the scan obtained at the same concentration for the C-QTF the gas mixture generator and the QEPAS peak signals acquired from the related scans. These results (Figure 5b). In both cases, the QEPAS sensors operated at 10 Torr gas pressure with a lock-in confirm that the QEPAS signal is proportional to the methanol concentration. integration time of 3 s. A 1σ minimum detection limit (MDL) using the N-QTF was measured from Figure 5 shows a comparison between the QEPAS scan measured for 100 ppm methanol in N2 the analysis of the signal-to-noise ratio and results in an approximately nine-times-better MDL than using the N-QTF (Figure 5a) based on the scan obtained at the same concentration for the C-QTF that previously obtained with the C-QTF. Since the N-QTF is characterized by a lower Q, the observed (Figure 5b). In both cases, the QEPAS sensors operated at 10 Torr gas pressure with a lock-in integration enhancement in the QEPAS sensitivity can be attributed to a reduction of s, thus demonstrating its time of 3 s. A 1σ minimum detection limit (MDL) using the N-QTF was measured from the analysis of effective influence on the QTF acousto-electric transduction efficiency. The QTF resonance frequency the signal-to-noise ratio and results in an approximately nine-times-better MDL than that previously reduction also contributes to the QEPAS signal enhancement. The MDL was 1.7 ppm compared to obtained with the C-QTF. Since the N-QTF is characterized by a lower Q, the observed enhancement in the previously reported MDL of 15 ppm, while the noise fluctuations (1σ value) recorded with the the QEPAS sensitivity can be attributed to a reduction of s, thus demonstrating its effective influence new QTF are ±30 μV of the same order of those reported in [11] (±25 μV). In principle, a further on the QTF acousto-electric transduction efficiency. The QTF resonance frequency reduction also reduction of the prong spacing can enhance the QEPAS signal even more. However, an increase of contributes to the QEPAS signal enhancement. The MDL was 1.7 ppm compared to the previously the background noise can be also expected, because s becomes comparable with the focused laser reported MDL of 15 ppm, while the noise fluctuations (1σ value) recorded with the new QTF are beam size. ˘30 µV of the same order of those reported in [11] (˘25 µV). In principle, a further reduction of the prong spacing can enhance the QEPAS signal even more. However, an increase of the background noise can be also expected, because s becomes comparable with the focused laser beam size. Sensors 2016, 16, 439 Sensors 2016, 16, 439 Sensors 2016, 16, 439 6 of 8 6 of 8 6 of 8 Figure 5. Spectral scan of 100 ppm methanol 2 at pressure Torr acquired with Figure (a) inin NN a agas pressure ofof 1010 Torr acquired with a 3 asa 2Nat Figure5. 5. (a) (a)Spectral Spectralscan scanof of100 100ppm ppmofof ofmethanol methanol in 2 at a gas gas pressure of 10 Torr acquired with 2 obtained 3lock-in s lock-in integration time using the N-QTF. (b) Spectral scan of 100 ppm of methanol in N integration timetime using the N-QTF. (b) Spectral scanscan of 100 of methanol in Nin for 2 obtained 3 s lock-in integration using the N-QTF. (b) Spectral of ppm 100 ppm of methanol N2 obtained for the experimental conditions the with geometry. The lower data the experimental conditions using using the C-QTF with a standard geometry. The lower data sampling for same the same same experimental conditions using the C-QTF C-QTF with aa standard standard geometry. The lower data sampling in isis due to ramp in work respect in panel (a) due to(a) a faster rampvoltage employed in employed this work with respect the measurements sampling inispanel panel (a) duevoltage to aa faster faster voltage ramp employed in this this worktowith with respect to to the the measurements reported in [11]. reported in [11]. measurements reported in [11]. An variance analysis [24] was performed in order to determine the An Allan-Werle Allan-Werlevariance varianceanalysis analysis[24] [24]was wasperformed performed in in order orderto todetermine determine the the best best achievable achievable An Allan-Werle best achievable sensitivity of the THz QEPAS sensor. We measured and averaged the QEPAS signal at zero CH sensitivity of of the the THz THz QEPAS QEPASsensor. sensor.We Wemeasured measuredand andaveraged averagedthe theQEPAS QEPASsignal signalat atzero zeroCH CH333OH OH sensitivity OH concentration (pure N 2 at 10 Torr) and obtained the Allan-Werle deviation in ppm, shown in Figure 6. concentration (pure (pure N N22 at 10 Torr) and obtained the Allan-Werle concentration Allan-Werle deviation deviation in in ppm, ppm, shown shown in inFigure Figure6.6. Figure 6. Allan-Werle deviation in ppm as a function of the lock-in integration integration time for the QEPAS Figure 6. Allan-Werle deviation in ppm as a function of the lock-in integration time time for the QEPAS sensor. The curve was calculated by analyzing 120-min-long acquisition periods of the signal measured sensor. sensor. The The curve curve was was calculated calculated by by analyzing analyzing 120-min-long 120-min-long acquisition acquisition periods periods of of the the signal signal for pure Nfor at 10 Torr and settingand the lock-inthe integrationintegration time at 100 ms. at 100 ms. measured measured 2forpure pureN N22at at10 10Torr Torr andsetting setting thelock-in lock-in integrationtime time at 100 ms. For 30 averaging time, detection sensitivity of 160 part per billion (ppb), corresponding For corresponding toto a For aaa30 30sssaveraging averagingtime, time,aaadetection detectionsensitivity sensitivityof of160 160part partper perbillion billion(ppb), (ppb), corresponding to −11 −1 ½ ´ 11 ´ 1 ½ anormalized normalized noise equivalent absorption NNEA = 3.75 × 10 cm W/Hz (laser power of ~40 μW), −11 −1 ½ noise equivalent absorption NNEA = 3.75 ˆ 10 cm W/Hz (laser power of ~40 µW), a normalized noise equivalent absorption NNEA = 3.75 × 10 cm W/Hz (laser power of ~40 μW), was which value trace gas was achieved, represents new record for QEPAS sensing. These results clearly wasachieved, achieved,which whichrepresents representsaaanew newrecord recordvalue valuefor forQEPAS QEPAStrace tracegas gassensing. sensing.These Theseresults resultsclearly clearly demonstrate that the N-QTF geometry provides better sensor system performances with respect to demonstrate that the N-QTF geometry provides better sensor system performances with respect to the demonstrate that the N-QTF geometry provides better sensor system performances with respect to the standard geometry. An even higher sensitivity can be expected by increasing the QTF crystal standard geometry. An even higher sensitivity can be expected by increasing the QTF crystal thickness the standard geometry. An even higher sensitivity can be expected by increasing the QTF crystal thickness w; chemical etching for aacrystal of >>11mm cannot sharp edge w; however, chemical for a crystal w > 1 mm sharp edge profiles. thickness w;however, however,etching chemical etching forof crystal ofw wcannot mmguarantee cannotguarantee guarantee sharp edgeprofiles. profiles. Conclusions 5. 5. Conclusions Conclusions In QEPAS THz sensor for CH In this this work work we we reported reported on onaaQEPAS QEPASTHz THzsensor sensorfor forCH CH333OH OHdetection, detection, implementing implementing aa QTF QTF with design, the prong width and length were reduced with respect to the novel geometry. the new design, the prong width and length were reduced with respect to withaaanovel novelgeometry. geometry.InIn Inthe thenew new design, the prong width and length were reduced with respect to the previously employed C-QTF with a standard design in order to reduce the resonance frequency the previously employed C-QTF with a standard design in order to reduce the resonance frequency Sensors 2016, 16, 439 7 of 8 previously employed C-QTF with a standard design in order to reduce the resonance frequency while maintaining a high quality factor. We also reduced the prong spacing, enhancing the acousto-electric transduction efficiency. To evaluate the N-QTF performance, we utilized the same QEPAS THz sensor for CH3 OH detection as reported in [11]. A MDL of 160 ppb at 30 s integration time and a corresponding record of NNEA = 3.75 ˆ 10´11 cm´1 W/Hz½ were achieved. The CH3 OH sensing system performance was enhanced by nearly an order of magnitude with respect to the QEPAS sensor employing a C-QTF with a standard geometry. Acknowledgments: The authors from the Dipartimento Interateneo di Fisica di Bari acknowledge financial support from Italian research projects PON02 00675, PON02 00576 and PON03 “SISTEMA”. F.K. Tittel acknowledges support by the Robert Welch Foundation (grant C-0586) and an US National Science Foundation ERC MIRTHE award. Author Contributions: A.S., P.P, M.G., G.S., F.K.T. and V.S. conceived and designed the experiments; A.S., P.P. and M.G. performed the experiments and analyzed the data; M.S.V., H.E.B. and D.A.R. provided the THz QCL source; All wrote the paper. 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