XL30 ESEM Brochure TSS297 - Technical Sales Solutions

 Instrument Bulletin FEI-­‐Philips XL30 ESEM Model Year: 2000 Status: Refurbished Worldwide Installation Available The FEI XL30 ESEM is known as a reliable SEM that produces quality images in low and high vacuum modes. The XL30 is capable of imaging wet, dirty and outgassing samples and furthermore low vacuum mode is very helpful on beam sensitive charging samples. The XL30 is capable of easy acquisition of images at 100KX and beyond. Key Specifications • SEM o Tungsten thermal • Detectors o SE and BSE • Resolution o 3.5nm @ 30KV high and low vac o <15nm @ 3KV in low vac o Long WD imaging capabilities • Software o Windows NT OS o FEI MCNT UI • Stage o 4-­‐axis motorized eucentric o 50x50 mm full travel o -­‐15 to 75 degree manual tilt o Can easily fit 4-­‐6” wafer in chamber (8” possible) • Vacuum o Turbo pump with dual mechanical RP o Low vacuum capable – ESEM mode! • Analytical o EDS and EBSD capable o Probers, EBIC, cryo-­‐stage and other options available The FEI XL30 ESEM can be custom configured to your specifications! www.TechnicalSalesSolutions.com +1 (503) 616-­‐4710