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H x m=M ZQ[Z n V O [W8 P VW8 n1P cQd #
m Q F LP cQd X O8 P O [ O >bV P M8 N OQP H%H%HH%HH%H%HH%HH%HH
H z c ]:VZQ@ OQP Z k?k ]:8 OQX V c V M?O SaZ PqO ZQ> X @wZQV O cQd #
m Q F LP ZQ> X jB R ^I LP
dgc [ X O8 P O [ O >bV n 9?[W[ O >bV] O s O ] P HH%HH%H%HH%HH%HH%HH%HH%H%HH%HH%HH
H x K s O [ZQ@ O TU8 P T<ZQV nM cQd jB R ^I LP { | H H%HH%HH%HH%H%HH%HH%HH
H K s O [ZQ@ O TU8 P T<ZQV nM cQd #
m Q F LP { | HHH%HH%HH%HH%HH%H%HH%HH%HH
H K s O [ZQ@ O TU8 P T<ZQV nM cQd jB R ^I L { | HHH%HH%HH%HH%H%HH%HH%HH
H j8 P T<ZQV nM cQd V M?OPWn ZQ] OQX jB R ^I LCOQP VW8:T<ZQV OQX 9 P 8:>?@UV M?+
O Q Z } cQd
K [ O ZU{ | H H%H%HH%HH%HH%HH%HH%H%HH%HH%HH%HH%HH%H%HH%HH%HH
H LNM?O TU8 P T<ZQV nM?OQP cQd V M?O VW[ZQ> P 8 P V c [ k ZQ8:[ P ZQV X O8 P O [ O >bV n 9?[W[ O >bV] O s O ] P
{ | H HH%HH%H%HH%HH%HH%HH%HH%H%HH%HH%HH%HH%HH%H%HH%HH%HH
Lb8: 8
x
iy
Qy
Qx
6
FHSF H C!SIFSD
LNM?O V } c T<ZQ8:>V l k OQP cQd VW[ZQ> P 8 P V c [ P 9 PqOQX 8:>0V c X Z l#J" P R€>bV O @i[ZQV OQXpm 8:[ n 9?8:V P { R mNP| ZQ[ O
V M?O FN8 kac ]\ZQ[pui9?> n VW8 c > L [ZQ> P 8 P V c [{€Fu L| ZQ> X V M?O j O VZQ]OJWB
Lb8 XbO J RwO TU8 n c > X 9 n V c [
^-8 O ] X IP OQn V L [ZQ> P 8 P V c [<{€jB R ^I L|v c [ P 8:T k ] l jB R VW[ZQ> P 8 P V c [1H m c T k ] O T O >0J
VZQ[ l jB R { m jB R?| 8 P V M?O k [ c n"OQPWP ZQ> Xn 8:[ n 9?8:VNV OQnM >?8 f 9 O cQd 9 P 8:>?@pV } c V l k OQP cQd
n c T k ] O T O >bVZQ[ l jB R ^I LP"v >aZQT O ] l jB R ^I LP ZQ> X jB R ^I LP"v-}M 8 nMM Z P
V M?O Z X siZQ>bVZQ@ O cQd M 8:@ M P k O1OQX ZQ> X ] c } kac }NO [ X 8 PWP 8 k ZQVW8 c >HUA,8:V M V M?O Z X s O >bV cQd
R m V OQnM > c ] c @ lwvwX 8:@i8:VZQ] n 8:[ n 9?8:V P-M Z1s O S OQn c T ON} 8 XbOQP k [ O Z X ZQ> X V M?Om jB R k [ c n"OQPWP
M Z P S O1O > cik VW8:TUM8 N OQX dgc [ X 8:@i8:VZQ]Z k?k ]:8 n ZQVW8 c > P Rq^ H R€> P k 8:V O cQd V M 8 P"v Fu LPP VW8:]
[ O VZQ8:><T<ZQ> l Z X siZQ>bVZQ@ OQP c s O [V M c PqO cQd m jB R dgc [ P c T On [W8:VW8 n ZQ]ZQ>aZQ] c @<Z k?k ]:8 n KZ J
VW8 c > P=P 9 nM Z P SaZQ> X @wZ k s c ]:VZQ@ O [ O d O [ O > n"OQP Sh Q B 6 €v k M c V c XbO V OQn V c [ P % $ m ^t 6 €v
P 8:] 8 n c > n c nM ] O Z s R ^ €v V O T k O [ZQVW9?[ OpPqO > P c [ P F7 €v ZQ> X h 8:@i8:VZQO] J€V c J K >aZQ] c @
m c >bs O [WV O [ P { hKmNP| FFNA iy H~7 c }NO s O [ vP 8:> n"Om jB R ZQ> X S?8 kac ]\ZQ[ k [ c n"OQPWPqOQP
ZQ[ O 8:> n c T k ZQVW8:S?] Owv Z X?X 8:VW8 c >aZQ]aT<Z Pq 8:>?@ P V O k P ZQ[ O [ OQf 9?8:[ OQX V c n c TpS?8:> O S c V M V l k OQP
cQd VW[ZQ> P 8 P V c [ P c >UV M?OP ZQT OnM 8 k vi}M 8 nM 8 P V M?O T c [ ONO L k O > P 8:s O FN8 m jB R k [ c n"OQPWP H
KPRwl?P V O 4T J c 0> JqKZ J m=M 8 k { R B m| S OQn c T OQP 8:> n [ O Z P 8:>?@i] l kacik 9?]\ZQ[ v V M?O > O1OQX dgc [8:>bV O J
@i[ZQVW8:>?@V M?O ZQ>aZQ] c @ k O [W8 k M?O [ZQ] P ZQ> XX 8:@i8:VZQ] k [ c n"OQPWP 8:>?@ n c [ OQP c > V M?OUP ZQT OpnM 8 k
8 P 8:> n [ O Z P 8:>?@ m=M 8 6 H r > XbO [ P 9 nM Z P 8:VW9aZQVW8 c > v V M?O0m c T k ZQVW8:S?] O Q ZQV O [ZQ]FN8 kac ]\ZQ[
L [ZQ> P 8 P V c [ P { #m Q F LP|=M Z1s O [ OQn"O 8:s OQX [ O > O1}NOQX 8:>bV O [ OQP V1H
z
x
Substrate S
Base B
Emitter E
Gate G
n+ Emitter
Collector C
n+ Collector
e- flow in the
bulk
CLBT
CVBT
CVBT
p-well (Base)
^-8:@i9?[ O0z H zm [ c PWP J PqOQn VW8 c >aZQ]-sb8 O1} cQd m#Q F L H
m#Q F LP ZQ[ O V M?O k ZQ[Z P 8:VW8 n Fu LP dgc [WT OQX 8:> m jB R k [ c n"OQPWP S l cik O [ZQVW8:>?@UV M?O
jB R ^I LP 8:> S?8 kac ]\ZQ[0T c XbO { O L k ]\ZQ8:> OQX 8:> XbO VZQ8:]N8:> RwOQn VW8 c > H xw| H LNM?O<P VW[W9 n J
VW9?[ O 8 PPqM c } >8:>^-8:@i9?[ OUz H z H LNM?O [ O dgc [ Owv Fu LP ZQ> X jB R ^I LPn ZQ>S O [ O ZQ]:8MN OQX
c >V M?OpP ZQT O} Z d O [ } 8:V M c 9?V%Z X?X 8:VW8 c >aZQ] n c P V P 9 P 8:>?@<Z P VZQ> X ZQ[ X m jB R k [ c n"OQPWP H
jB R ^I LP%n ZQ>S O 9 PqOQX dgc [8:T k ] O T O >bVW8`>?@ M 8:@ M XbO > P 8:V lX 8:@i8:VZQ]] c @i8 n}M 8:] O V M?O
#m Q F LPn ZQ><S O 9 PqOQX 8:><V M?O ZQ>aZQ] c @ k ZQ[WV P H
LOQnM > c ] c @ lCX c } > } ZQ[ XPWn ZQ]:8 >?@ n c >bVW8:>b9 OQP V c S O Z~T<Z c [UVW[ O > X 8:>CV M?O R m
8:> X 9 P VW[ l H Kn1n c [ X 8:>?@<V c V M?O k [ c OQn VW8 c > P cQd V M?O<RwO TU8 n c > X 9 n V c S[ R€> X 9 P VW[ lKPWP c J
n 8\ZQVW8 c >3{ R R K%|v V M?O d O ZQVW9?[ O<P M8 N O cQd V M?O R m k [ c n"OQPWP} c 9?] X [ O Z nM y Jy S l V M?O
lwO ZQ[ xiybziz u c PqOQX H hO1O k P 9?S?TU8 n [ c >pV OQnM > c ] c @ l [ OQf 9?8:[ OQP d 9?[WV M?O [N] c }NO [W8:>?@ cQd V M?O
P 9 k?k ] l s c ]:VZQ@ O c > c > O0M ZQ> X V cUk [ O s O >bVNV M?O 8:> n [ O Z PqO 8:> O ] OQn VW[W8 n _ O ] XU}M?O > XbO J
sb8 n"OX 8:T O > P 8 c > P ZQ[ OXbOQn [ O Z P 8:>?@ } 8:V Mpn c > P VZQ>bV P 9 k?k ] l s c ]:VZQ@ Owv ZQ> Xv c >pV M?O c V M?O [
M ZQ> Xv V c [ OQX 9 n"O kac }NO [ n c > P 9?T k VW8 c > P 8:> n"O V M?O >b9?TpS O [ cQd VW[ZQ> P 8 P V c [ k O [9?>?8:V-ZQ[ O Z
8 P 8:> n [ O Z P 8:>?@p8:> f 9aZ X [ZQVW8 n T<ZQ>?> O [1!H R€> d Z n V v V M?O0P 9 k?k ] l s c ]:VZQ@ O ZQ> X kac }NO [ k O [
nM 8 k ZQ[ O k [ OQX 8 n V OQX V c S Oy /ZQ> X
z S l<xiybziz [ OQP k OQn VW8:s O ] l S l<R R K H K >aZQ] c @
n 8:[ n 9?8:V P cik O [ZQVW8:>?@09?> XbO [N9?]:VW[KZ J€] c } kac }NO [ P 9 k?k ] l s c ]:VZQ@ OQP [ OQf 9?8:[ O}NO ]:OJ€T<ZQV nM?OQX
XbO sb8 n"OQP dgc [ k [ cik O [ cik O [ZQVW8 c >H jZQV nM 8:>?@ k [ cik O [WVW8 OQP [ O d O [UV c V M?O P 8:TU8:]\ZQ[W8:VW8 O1P
S O V }NO1O ><V M?O%O ] OQn VW[W8 n ZQ] k [ cik O [WVW8 OQP cQd V } c 8 XbO >bVW8 n ZQ]: lpXbOQP 8:@i> OQX ZQ> X 9 PqOQXn c T kac J
> O >bV P Z d V O [ d ZQS?[W8 n ZQVW8 c >H7 c }NO s O [ v jB R ^I LP d ZQ8:]NV c T O1O V P 9 nM [ OQf 9?8:[ O T O >wV P
OQP k OQn 8\ZQ]: l 8:>] c }/n 9?[W[ O >bV] O s O ] cik O [ZQVW8 c > P H R 8:> n"OU#m Q F LP%M Z1s O S O1O > PqM c } >V c
n-substrate
M Z1s O S O VWV O [NT<ZQV nM 8:>?@ k [ cik O [WVW8 OQP V M ZQ> m jB R 8:V 6 bv Y K 6 bv s R ^ bv?e 7 Q€v
Z P VW9 Xbl cQd ] c } s c ]:VZQ@ O ZQ> X ] c } kac }NO [ n 8:[ n 9?8:V P 8:> n c [ kac [ZQVW8:>?@ m#Q F LP S OQn c T OQP
T c [ O T O ZQ>?8:>?@ d 9?]€H
#m Q F LPM Z1s O S O1O >@wZQ8:>?8:>?@<8:>bV O [ OQP V P 8:> n"OUz Q !7 Rqt H m#Q F LP}NO [ O ZQ>0J
ZQ] l N OQX ZQ> X 8:> n c [ kac [ZQV OQX 8:> n 9?[W[ O >bVTU8:[W[ c [ P ZQ> X ZQT k ]:8`_ O [ P"v ZQ> X~}NO [ OPqM c } >
V c M Z1s O ] c }NO [U> c 8 PqO V M ZQ>CV M c PqO 8:> n c [ kac [ZQVW8:>?@ c >?] l jB R ^I LP S l 8:VWV c N8:>
z 6 8:V 6 H R€> z 6 bv Z n1n 9?[ZQV Om jB R s c ]:VZQ@ O [ O d O [ O > n"OQP 8:> n c [ kac [ZQVW8:>?@ #m Q F LP
}NO [ O [ O ZQ]:M8 N OQX Sh Q B 6 H K [W[ O @i9?8:VV M?O > k [ cikac PqOQX ZUT c [ Opn c T k ] O V O T c XbO ] dgc [
#m Q F LP 8:> z 6 8:> M 8 P Y Mah V M?OQP 8 P K [W[ 6 ZQ> X V M?O<#m Q F LG} Z P%PqM c } >V c M Z1s O
S O VWV O [T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP V M ZQ>pjB R ^I LPP 8:> n"O V M?O1l k 9 PqM V M?O c } cQd n ZQ[W[W8 O [ P
Z } Z l d [ c T#V M?O0P 9?[ d Z n"O cQd V M?OpXbO sb8 n"O H LNM?O T<ZQV nM 8:>?@ cQd #m Q F LGn 9?[W[ O >bVTU8:[W[ c [ P
ZQ] P c M Z P S O1O > PqM c } >V c S O S O VWV O [V M ZQ>V M ZQV cQd jB R ^I LGn 9?[W[ O >bVTU8:[W[ c [ P"v?OQP J
k OQn 8\ZQ]: l 9?> XbO [%] c }/n 9?[W[ O >bV] O s O ] P Y K 6 H K k?k ]:8 n ZQVW8 c > PM Z1s O 9 PqOQX #m Q F LP dgc [
V M?O 8:[%8:T k [ c s OQX T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP c s O [%jB R ^I LP"vP c T OpO L?ZQT k ] OQP S O 8:>?@Z
ZQ[W8\ZQS?] O EZQ8:> m c >bVW[ c ]={ E m|Nn 8:[ n 9?8:V Y K 6 €v Z P 8:] 8 n c > n c nM ] O Z s R ^ €v ZQ> X
Z0] c @wZQ[W8:V M TU8 n k M c V c [ OQn"O k V c [ e 7 Q H
Is O ><V M c 9?@ M T<ZQ> l Z k?k ]:8 n ZQVW8 c > P cQd #m Q F LP Z k?k O ZQ[8:><V M?O ]:8 V O [ZQVW9?[ Owv V c V M?O
S OQP V cQdc 9?[  > c } ] OQX @ Owv V M?O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd #m Q F LP%M Z1s O > c VS O1O >8:0> J
s OQP VW8:@wZQV OQX3Pql?P V O T<ZQVW8 n ZQ]: l ZQ> X,f 9aZQ>bVW8:VZQVW8:s O ] lM 8:V M?O [WV c HCjZQV nM 8:>?@ k [ cik O [WVW8 OQP"v
M c }NO s O [ v ZQ[ O s O [ l0n [W8:VW8 n ZQ]?8:>pV M?OXbOQP 8:@i> cQd ] c } kac }NO [NZQ>aZQ] c @ n 8:[ n 9?8:V P H LNM?O T<ZQ8:>
ZQ8:T cQd V M 8 P V M?OQP 8 P 8 P V c P VW9 Xbl V M?O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd #m Q F LP ZQ> Xn c T k ZQ[ O
V M?O T } 8:V M jB R ^I LP ZQ> X jB R ^I LP d ZQS?[W8 n ZQV OQX } 8:V M Z P VZQ> X ZQ[ XCm jB R
k [ c n"OQPWP 8:>Z Pql?P V O T<ZQVW8 n ZQ> Xf 9aZQ>bVW8:VZQVW8:s O d Z PqM 8 c >H K k?k ]:8 n ZQVW8 c > P cQd #m Q F LP dgc [
8:T k [ c s OQXpn 8:[ n 9?8:V P=}NO [ O ZQ] P c P VW9 X 8 OQX H
FG KC F D
LOQP V nM 8 k Pn c >bVZQ8:>?8:>?@UZQ[W[Z l?P cQd n Z PWn c XbOQX m#Q F LP} 8:V M J€V l k O @i9aZQ[ X [W8:>?@ P
ZQ> X jB R ^I LP}NO [ O d ZQS?[W8 n ZQV OQX 9 P 8:>?@UV M?O0P VZQ> X ZQ[ XK jR J K FD z
J }NO ]:
k [ c n"OQPWP H K > O <n 8 O >bV k ZQ[ZQT O V O [ O LbVW[Z n VW8 c > ZQ[W[Z l dgc [S?8 kac ]\ZQ[ XbO sb8 n"OQP} Z P0XbO J
P 8:@i> OQX H LNM 8 P=XbOQP 8:@i> k [ c sb8 XbOQP Z%@ cwc X SaZQ]\ZQ> n"O S O V }NO1O >0V M?O >b9?TpS O [ cQd XbO sb8 n"OQP V c
S O V OQP V OQXv >b9?TpS O [ cQd=k 8:> P ZQ> X Z n1n 9?[Z n"l H
LNM?O #m Q F LP ZQ> X jB R ^I LPU}NO [ OXbOQP 8:@i> OQX V c M Z1s OP 8:TU8:]\ZQ[0]\Z l c 9?V
ZQ[ O Z P H LNM?O [ Op}NO [ O 8:>V c VZQ] iyiy jB R ^I LP ZQ> X m#Q F LP H K V OQP VW8:>?@
PqO VW9 k } Z P=XbO s O ] cik OQX V c%k O [ dgc [WT/ZQ9?V c T<ZQVW8 n=O LbVW[Z n VW8 c > cQd VW[ZQ> P 8 P V c [ k ZQ[ZQT O V O [ P H
rP 8:>?@%V M 8 PNPqO VW9 k v V M?O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd V M?O #m Q F LP ZQ> X jB R ^I LP"v
Z P}NO ]:Z P V M?O #m Q F LP cik O [ZQVW8:>?@UZ P jB R ^I LP"va}NO [ O T O Z P 9?[ OQX H
K k [ O ]:8 TU8:>aZQ[ lP VW9 Xbl cQd V M?O Z k?k ]:8 n ZQVW8 c > cQd ^-] c ZQVW8:>?@ JWEZQV O#m Q F LP {€^#E J #m Q F LP|
} Z P ZQ] P c n ZQ[W[W8 OQX c 9?V1H K >B k O [ZQVW8 c >aZQ] L [ZQ> PWn c > X 9 n VZQ> n"OpK T k ]:8`_ O [{qB L-K%| 8:0> J
n c [ kac [ZQVW8:>?@ ^#E J #m Q F LP Z P V M?O 8:> k 9?V X O8 P O [ O >bVW8\ZQ] k ZQ8:[ } Z P0XbOQP 8:@i> OQX ZQ> X d ZQ0S J
[W8 n ZQV OQX H LNM?O Z X siZQ>bVZQ@ O cQd 9 P 8:>?@ #m Q F LP 8:>3B L-KP 8 P V M ZQV0V M?O1l ZQ[ O<O L k OQn V OQX
V c M Z1s O ] c }NO [%> c 8 PqO HUF l 9?VW8:] M8 N18:>?@UV M?O [ OQP 8 X 9aZQ]=@wZQV OUO P OQn V P cQd V M?O<#m Q F LP"v-}NO
PqM c }NOQX V M ZQV=8:V } Z P kac PWP 8:S?] O V c VW[W8:T V M?O c P PqO V cQd V M?O B L-K S l 9 P 8:>?@ M c V O ] OQn VW[ c >
8:> OQn VW8 c ><ZQ> X<O ] OQn VW[ c >UVW9?>?> O ]: 8:>?@08:><V M 8 PP VZQ> X ZQ[ Xz k [ c n"OQPWP H
G +H HSF F SD D
K >8:>bVW[ c X 9 n VW8 c > c >V M?OP VW[W9 n VW9?[ OQP ZQ> X [ O k [ OQPqO >bVZQVW8:s O d ZQS?[W8 n ZQVW8 c >V OQnM > c ] c @i8 OQP
cQd m jB Rav Fu Lv ZQ> X FN8 m jB R%n 8:[ n 9?8:V P 8 P k [ OQPqO >bV OQX 8:> m=M Z k V O [ x HR€> m=M Z k V O [ bv
T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP ZQ[ O 8:>bVW[ c X 9 n"OQX H4R€> m=M Z k V O [ ?v V M?OpP VW[W9 n VW9?[ OQP"v T c XbO ]:8 >?@ v
ZQ> X T<ZQ8:> nM ZQ[Z n V O [W8 P VW8 n1P cQd #m Q F LP ZQ[ OX 8 PWn 9 PWPqOQX H IL k O [W8:T O >bVZQ][ OQP 9?]:V P cQd
V M?O h%m nM ZQ[Z n V O [W8 P VW8 n1P cQd V M?O #m Q F LP ZQ> X jB R ^I LP d ZQS?[W8 n ZQV OQX 9 P 8:>?@~V M 8 P
k [ c n"OQPWP ZQ[ O ZQ] P c 8:> n ]:9 XbOQX 8:>0V M 8 PnM Z k V O [1HI L k O [W8:T O >bVZQ]i[ OQP 9?]:V P cQd V M?O T<ZQV nM 8:>?@
k [ cik O [WVW8 OQP cQd #m Q F LP"v jB R ^I LP ZQ> X jB R ^I LP ZQ> X V M?O0n c T k ZQ[W8 P c > P ZQ> X
ZQ>aZQ] l?P 8 P ZQ[ O @i8:s O >08:> m=M Z k V O [ H m c > n ]:9 P 8 c > P ZQ[ O @i8:s O >08:> m=M Z k V O [ H=^-8:>aZQ]: lwv Z
[ O sb8 O1} cQd c ZQVW8:>?@%@wZQV O V OQnM > c ] c @i8 OQP 8 P k [ OQPqO >bV OQX 8:> K k?k O > X M8 L K ZQ> X V M?OXbOQP 8:@i> v
nM ZQ[Z n V O [W8 P VW8 n1P ZQ> XpO L k O [W8:T O >bVZQ]w[ OQP 9?]:V P cQd V M?O VW[W8:TUTUZQS?] O ^E%B L-K ZQ[ O @i8:s O >08:>
K k?k O > X M8 L<FHY[ c n"OQPWP k ZQ[ZQT O V O [ P ZQ[ O @i8:s O >U8:> K k?k O > X M8 L OQPm ZQ> Xh H
! FG IF R 8:> n"O V M?O 8:>bs O >bVW8 c > cQd<k ]\ZQ>aZQ[V OQnM > c ] c @ l 8:>GV M?O,z iy "JP"v V M?O 8:>bV O @i[ZQVW8 c > cQd
]\ZQ[W@ O >b9?TpS O [ P cQd XbO sb8 n"OQP c >Z P 8:>?@i] OP 8:] 8 n c > X 8 O S OQn ZQT O kac PWP 8:S?] O ZQ> X,O P OQn J
VW8:s O HCFN8 kac ]\ZQ[ vm jB R ZQ> X FN8 m jB R R€>bV O @i[ZQV OQX,m 8:[ n 9?8:V{ R m| k [ c n"OQPWPqOQPp}NO [ O
V M?O > XbO s O ] cik OQX 8:>V M?O iy "JP"v Qy "JP"v ZQ> X 6 y "JP [ OQP k OQn VW8:s O ] l H LNM 8 PnM Z k V O [ k [ OQPqO >bV P
V M?OP VW[W9 n VW9?[ OQP ZQ> X T c XbO ] P cQd V M?O FN8 kac ]\ZQ[<ui9?> n VW8 c > L [ZQ> P 8 P V c [ P {€Fu LP| ZQ> X
j O VZQO] JW
B Lb8 XbO J RwO TU8 n c > X 9 n V c [^-8 O ] X I P OQn V L [ZQ> P 8 P V c [ P {€jB R ^I LP|v}M 8 nM ZQ[ O
V M?O [ O k [ OQPqO >bVZQVW8:s O Z n VW8:s O=O ] O T O >bV P 8:>S?8 kac ]\ZQ[=ZQ> Xpm jB R k [ c n"OQPWPqOQP [ OQP k OQn VW8:s O ] l H
eO k [ OQPqO >bVZQVW8:s O R m k [ c n"OQPWPqOQP ZQ> X V M?O k [ c P ZQ> Xn c > P cQd V M?OQPqO V OQnM > c ] c @i8 OQP ZQ> X
XbO sb8 n"OQP ZQ[ O ZQ] P c X 8 PWn 9 PWPqOQX H K ]:-V M?OQPqO0PqO [Ws O Z P V M?O SaZ P 8 P dgc [V M?O 9?> XbO [ P VZQ> X 8:>?@
cQd V M?O dgc ]: c } 8:>?@ nM Z k V O [ P H
<D
08
8#(
!"
$ -#/&
LNM?O [ O ZQ[ O V M [ O1O V O [WTU8:>aZQ] P 8:><Z%S?8 kac ]\ZQ[VW[ZQ> P 8 P V c [ v >aZQT O ] l V M?O%n c ]: OQn V c [ 0v SaZ PqO
v ZQ> X O TU8:VWV O [ {€^-8:@i9?[ O<x H zQ| HFN8 kac ]\ZQ[V OQnM > c ] c @ l 8 P 9 P 9aZQ]: l cik VW8:TUM8 N OQX dgc [
s O [WVW8 n ZQ] Fu LP K [W[ 6 bv Ej ZQ> X ^-8:@i9?[ Ox H zPqM c }P V M?On [ c PWP J PqOQn VW8 c >aZQ]
sb8 O1} cQd Zps O [WVW8 n ZQ] VW[ZQ> P 8 P V c [1H^ c [%ZQ> VW[ZQ> P 8 P V c [8:>V M?O dgc [ } ZQ[ X Z n VW8:s O
T c XbOwv V M?O SaZ PqO J O TU8:VWV O [ W9?> n VW8 c > } c 9?] X S O dgc [ } ZQ[ X S?8\Z PqOQX} 8:V M y ZQ> X
V M?O SaZ PqO J n c ]: OQn V c [ W9?> n VW8 c > } c 9?] X S O [ O s O [ PqO S?8\Z PqOQX { " !# yw| H LNM?OO ] OQn VW[ c > P
ZQ[ O 8:> OQn V OQX 8:>bV c V M?O SaZ PqO Z P TU8:> c [W8:V ln ZQ[W[W8 O [ P ZQ> X n c ]: OQn V OQX 8:>V M?OUn c ]: OQn V c [1H
LNM?O%n c ]: OQn V c [ n 9?[W[ O >bV ! v SaZ PqO%n 9?[W[ O >bV v ZQ> X dgc [ } ZQ[ X<n 9?[W[ O >bV=@wZQ8:> $&% n ZQ><S O
O L k [ OQPWPqOQX Z P JEj ! ' () +* , O L k { x H zQ|
{ xz +*, ' ' (/* 1 0 |wO L k { x H xw|
-.
*
x
w|
$&% ! 2/3 z&8
{
H
2
4
4
56 " 7 " 7 9 8:":<;
}M?O [ O ' 8 P V M?OO ] OQn VW[ c >?8 nnM ZQ[W@ O { z <z1y =+>@? |v 8 P V M?OO P OQn VW8:s ONO TU8:VWV O [=ZQ[ O Z v
() 8 P V M?OUO ] OQn VW[ c > X O8 P9 P 8 c > n c > P VZQ>bV v C8 P V M?O<O P OQn VW8:s O SaZ PqO<} 8 X V Mv +*A 8 P
V M?O%OQf 9?8:] 8:S?[W8:9?T O ] OQn VW[ c > n c > n"O >bVW[ZQVW8 c ><8:><V M?O SaZ PqOwv 8 P V M?O V M?O [WT<ZQ]as c ]:VZQ@ Owv
-. 8 P V M?O TU8:> c [W8:V l J n ZQ[W[W8 O [=]:8 d O VW8:T O 8:>V M?O SaZ PqOwv (/* 8 P V M?O0X O8 P9 P 8 c > n c > P VZQ>bV dgc [
M c ] Owv * 8 P V M?O<X O8 P9 P 8 c > ] O >?@iV M dgc [ M c ] O 8:> O TU8:VWV O [ v 0 8 P V M?O 8:>bVW[W8:> P 8 n0n ZQ[W[W8 O [
n c > n"O >bVW[ZQVW8 c >08:> P 8:] 8 n c > v 1/BU8 P V M?O Z n1n"O k V c [ n c > n"O >bVW[ZQVW8 c > v ZQ> X 1 8 P V M?OX c > c [
n c > n"O >bVW[ZQVW8 c >H
^?[ c T5V M?OOQf 9aZQVW8 c > P"v V M?O%n c ]: OQn V c [ n 9?[W[ O >bV XbO k O > X?P c ><S c V M k [ c n"OQPWP k ZQ[ZQ4T J
O V O [ P ZQ> X ]\Z l c 9?V XbOQP 8:@i>!H R mXbOQP 8:@i> O [ Pn ZQ> c >?] ln c >bVW[ c ] !V M [ c 9?@ M V M?O ]\Z l c 9?V
cQd X O8 P O [ O >bV O TU8:VWV O [ZQ[ O Z P ZQ> X V M?OO TU8:VWV O [ZQ[ O Z%8 P=XbO _a> OQX Z P V M?OM c [WM8 N c >bVZQ]ZQ[ O Z
cQd V M?O SaZ PqO ZQ> X<O TU8:VWV O [=8:>bV O [ d Z n"O {€I f 9aZQVW8 c > x H zQ| H
Emitter E
Base B
Collector C
Base B
Emitter E
Collector C
p+
iso
n+
p
n+
pnp
p+
iso
Collector C
Base B
n-epi
Injected en+ Buried Layer
Emitter E
npn
^-8:@i9?[ZQOU> X x H zUm S?[ 8c kaPWcP J]\PqZQOQ[n VWVW[8 cZQ>a> ZQP 8]P Vsbc 8 [O1} Pql cQTpd S s c O ] [WP VW8{gn [WZQ8:@ ] M V | H ?S 8 ak c ]\ZQ[0VW[ZQ> P 8 P V c [U{g] O d V | ZQ> X
p Substrate
! -#/ -#/ % ,0
R VZQ> X ZQ[ X S?8 kac ]\ZQ[08:>bV O @i[ZQV OQX~n 8:[ n 9?8:V P 9 P 8:>?@V M?O S?8 kac ]\ZQ[ k [ c n"OQPWP cik VW8:TU8MN OQX dgc [
s O [WVW8 n ZQ] Fu L ZQ[ O 9 P 9aZQ]: l d ZQS?[W8 n ZQV OQX c > Z<]:8 @ M VW] lX cik OQX { zizizQ| J c [W8 O >bV OQX J
V l k OP 9?S P VW[ZQV O {€^-8:@i9?[ Ox H zQ| 7Z PWybz H{ zizizQ|P 8:] 8 n c > n [ l?P VZQ] M?O ] k P V cUk [ O s O >bVNV M?O
dgc [WT<ZQVW8 c > cQd V M?O k ZQ[Z P 8:VW8 n jB R ^I LP S O V }NO1O > V M?O SaZ PqO ZQ> X V M?O 8 P c ]\ZQVW8 c > P H
LNM?O >ZQ> J€S?9?[W8 OQX ]\Z lwO [8 P dgc [WT OQXv dgc ]: c }NOQX S l V M?O @i[ c } V M cQd ZQ> J€V l k O0O k 8OJ
VZ Lb8\ZQ]a]\Z lwO [1H R P c ]\ZQVW8 c > X O8 P9 P 8 c > v SaZ PqO 8:T k ]\ZQ>bVZQ> XpO TU8:VWV O [ X 8OP9 P 8 c >UV M?O > dgc ]: c }
V cdgc [WT V M?O 8 P c ]\ZQVW8 c > P"v SaZ PqOwv ZQ> X3O TU8:VWV O [0ZQ> X,n c ]: OQn V c [0[ O @i8 c > P [ OQP k OQn VW8:s O ] l H
BV M?O [Z n VW8:s O ZQ> X k Z PWP 8:s OXbO sb8 n"OQP ZQ[ O dgc [WT OQX SaZ PqOQX c >V M?OQPqO T<Z Pq?P H LNM?O cik VWO8 J
TUM8 NQZQVW8 c > cQd V M?O s O [WVW8 n ZQ] Fu LP kac PqOQP ]:8 TU8:VZQVW8 c > cQd V M?O k O [ dgc [WT<ZQ> n"O c > Fu LP ZQ> X 8:> d Z n V v c >?] l ]\ZQV O [ZQ]-ZQ> XP 9?S P VW[ZQV O Fu LPn ZQ><S O dgc [WT OQX 8:> P 9 nM
Z k [ c n"OQPWP H
LNM?OnM ZQ[Z n V O [W8 P VW8 n1P cQd S?8 kac ]\ZQ[ k [ c n"OQPWPqOQP cik VW8:TUM8 N OQX dgc [s O [WVW8 n ZQ] VW[ZQ> P 8 P J
V c [ P ZQ[ OP 9?TUT<ZQ[WM8 N OQX Z P dgc ]: c }P K [W[ 6 K S?9?[W8 OQX ]\Z lwO [p8 P 8:T k ] O T O >bV OQX V c k [ O s O >bV09?> XbOQP 8:[ZQS?] O 8:> OQn VW8 c > cQd
n ZQ[W[W8 O [ P 8:>bV c V M?O J P 9?S P VW[ZQV O ZQ> X V c XbOQn [ O Z PqO V M?On c ]: OQn V c [ PqO [W8 OQP [ OQP 8 P VZQ> n"O
{€^-8:@i9?[ Ox H zQ| H
6
NL M?O SaZ PqO} 8 X V Mv V M?O s O [WVW8 n ZQ] X 8 P VZQ> n"O S O V }NO1O >,V M?O O TU8:VWV O [0[ O @i8 c >
ZQ> X V M?O O k 8:VZ Lb8\ZQ] n c ]: OQn V c [[ O @i8 c > v 8 P TU8:>?8:TU8ON O1X V c 8:> n [ O Z PqO $&%3{€I f 9aZKJ
VW8 c > x H w| H
LNM?OUO TU8:VWV O [[ O @i8 c >8 P%M?O Z1sb8:] lX cik OQX V c 8:> n [ O Z PqO V M?O [ZQVW8 c<cQd O TU8:VWV O [V c
SaZ PqO0X cik 8:>?@ XbO > P 8:VW8 OQP 1 1/BV c 8:> n [ O Z PqO $&%~{€I f 9aZQVW8 c > x H w| H
I=ZQ[W] lUO P OQn VZQ> X Z1siZQ]\ZQ> nM?O Tp9?]:VW8 k ]:8 n ZQVW8 c > O P OQn V P ZQ[ O TU8:>?8:TUO8 N OQX S lUwO1O k J
8:>?@V M?On c ]: OQn V c [ X cik 8:>?@ Z P ] c } Z P kac PWP 8:S?] O H LNM?O I=ZQ[W] l O P OQn V[ O d O [ P V c
V M?O d Z n VV M ZQVV M?OXbO k ] O VW8 c > } 8 X V M cQd SaZ PqO J n c ]: OQn V c [ W9?> n VW8 c > } 8:] 8:> n [ O Z PqO
Z P + !C8:> n [ O Z PqOQP"v V M 9 P ] c }NO [W8:>?@UV M?OpO P OQn VW8:s O SaZ PqOU} 8 X V M H Kn1n c [ X 8:>?@<V c
I f 9aZQVW8 c > x H ziv ! } 8:] b8:> n [ O Z PqONO s O >9?> XbO [ n c > P VZQ>bV v V M?O [ O S l ] c }NO [W8:>?@
V M?O c 9?V k 9?V[ OQP 8 P VZQ> n"O H
R 8:> n"O T c P VUS?8 kac ]\ZQ[ k [ c n"OQPWPqOQP ZQ[ O cik VW8:TUM8 N OQX dgc [<s O [WVW8 n ZQ] VW[ZQ> P 8 P V c [ P"v
V M?O1l~M Z1s O<M 8:@ M?O [p@wZQ8:>G{ z1yiy V c xiyiyw| V M ZQ>3V M ZQV cQd P 9?S P VW[ZQV O { iy V c z1yiyw| ZQ> X
]\ZQV O [ZQ]={ iy V c iyw| VW[ZQ> P 8 P V c [ P K [W[ 6 H m c T k ZQ[ OQXp} 8:V M jB R ^I LP"v S?8 kac ]\ZQ[
W9?> n VW8 c > VW[ZQ> P 8 P V c [ P {€Fu LP|M Z1s O T c [ OUX [W8:sb8:>?@ kac }NO [V cc s O [ n c T O V M?O<P k O1OQX
S c VWVW] O > OQn cQd X [W8:sb8:>?@ ]\ZQ[W@ On Z k Z n 8:VW8:s O ] c Z X?P H/7 c }NO s O [ v V M?O1l,n c > P 9?T O T c [ O
kac }NO [V M ZQ>jB R ^I LP"vP c V M?O1l ZQ[ O0P 9?8:VZQS?] O dgc [ M 8:@ MP k O1OQX S?9?V] c } VW[ZQ> P 8 P V c [
XbO > P 8:V lUXbOQP 8:@i>H
<D&H FHG 08
8#(
!"
$ = /&
LNM?O kac ] l?P 8:] 8 n c >0€J @wZQV Om jB R k [ c n"OQPWP 8 P cik VW8:TU8MN OQX V cNdgc [WT n c T k ] O T O >bVZQ[ l jB R J
^ I L ZQ> X jB R ^I L VW[ZQ> P 8 P V c [ P c >,Z n c TUT c > P 9?S P VW[ZQV O H jB R ^I LP ZQ> X
jB R ^I LP 9 PqOpO ] OQn VW[ c > P ZQ> XM c ] OQP Z P T<Z c [W8:V ln ZQ[W[W8 O [ P [ OQP k OQn VW8:s O ] l H r >?]:8 wO
S?8 kac ]\ZQ[ XbO sb8 n"OQP"v V M?O1l c >?] l 9 PqO<O 8:V M?O [ M c ] OQP c [ O ] OQn VW[ c > P Z Ppn ZQ[W[W8 O [ P"vNP c v V M?O1l
ZQ[ O ZQ] P c  > c } >Z P 9?>?8 kac ]\ZQ[ XbO sb8 n"OQP HN^-8:@i9?[ Ox H xpPqM c }P V M?On [ c PWP J PqOQn VW8 c >aZQ]-sb8 O1}
VDD
Source S
Gate G
Drain D
Source S
Body B
Gate Oxide
pMOSFET
e-
n+ Source
Gate G
Drain D
n+ Drain
Drain D
Gate G
Body B
p-well (Body B)
nMOSFET
n-substrate
Source S
-^ j8:@i9?B [ ROp^x I H x L 0ZQm > [ X c PWP JjPqOQB n VWR 8 ^c >aI ZQL ]NsbVW[8 O1ZQ} > P 8cQP d V c ZQ[ > P {g[Wj8:@ BM V R | ^H I L {g] O d V | ZQ> X V M?OUPql TpS c ] P dgc [
cQd ZQ> jB R ^I L ZQ> X 8:V PPql TpS c ][ OQP k OQn VW8:s O ] l H LNM?O [ O ZQ[ O dgc 9?[V O [WTU8:>aZQ] P 8:>ZQ>
jB R ^I Lv >aZQT O ] l V M?O0P c 9?[ n"ONv @wZQV O vX [ZQ8:> ( v ZQ> X S c Xbl pH LNM?O @wZQV O 8 P
8 P c ]\ZQV OQX d [ c T V M?Op}NO ]:=S l Z<]\Z lwO [ cQd V M 8:>@wZQV O c Lb8 XbO H LNM?O S c Xbl [ O d O [ P V c V M?O
}NO ]:aZQ> X 8 P 9 P 9aZQ]: l @i[ c 9?> XbOQX V c V M?O ] c }NOQP V kac V O >bVW8\ZQ] cQd V M?On 8:[ n 9?8:V8:> cik O [ZQVW8 c >H
h 9?[W8:>?@> c [WT<ZQ] cik O [ZQVW8 c > P"v V M?OX [ZQ8:>08 P-n c >?> OQn V OQX V c Z M 8:@ M?O [ kac V O >bVW8\ZQ] } 8:V M [ O J
P k OQn VNV c V M?O%P c 9?[ n"O ZQ> X S c Xbl<P 9 nM V M ZQV y ZQ> X Cy pH KP Z[ OQP 9?]:V v
V M?O J€V l k OUX [ZQ8:> v J€V l k O0}NO ]: v ZQ> X J€V l k OpP c 9?[ n"O dgc [WT Z k ZQ8:[ cQd SaZ n J€V c J€SaZ n
X 8 c XbOQP ZQ> Xp} c 9?] X c >?] lpn c > X 9 n VZ P T<ZQ]:?] O Z  ZQ@ On 9?[W[ O >bV }M 8 nM 8 P > c } ><Z PNP 9?0S J
V M [ OQPqM c ] Xn c > X 9 n VW8 c > c [ }NO Z  8:>bs O [ P 8 c >ZQ> X c S O1l?P ZQ> O L kac > O >bVW8\ZQ]-]\Z } SH R d V M?O
@wZQV O J P c 9?[ n"O s c ]:VZQ@ O p8 P ]\ZQ[W@ O [V M ZQ>Z n"O [WVZQ8:>Us c ]:VZQ@ Owv >aZQT O ] l V M?O V M [ OQPqM c ] X
s c ]:VZQ@ O v-O ] OQn VW[ c > P} c 9?] X Z n1n 9?Tp9?]\ZQV O c > V M?OUP 9?[ d Z n"O > O ZQ[%V c @wZQV O c Lb8 XbO V c
ZQ> O LbV O >bV P 9 nM V M ZQVV M?OO ] OQn VW[ c > n c > n"O >bVW[ZQVW8 c >U8 PNM 8:@ M?O [NV M ZQ><V M?OM c ] O%n c > n"O 0> J
VW[ZQVW8 c >H K > J€V l k O [ O @i8 c > 8 P V M?O > O P OQn VW8:s O ] l dgc [WT OQX c > V M?O<P 9?[ d Z n"O ZQ> X V M 8 P
k M?O > c T O > c >8 Pn ZQ]: OQX<P VW[ c >?@U8:>bs O [ P 8 c >ZQ> X V M?O0nM ZQ>?> O ]-8 Pn ZQ]: OQX V M?O 8:>bs O [ P 8 c >
]\Z lwO [1H LNM?O jB R ^I L,} c 9?] X V M?O >US O ZQS?] O V c n c > X 9 n V X [ZQ8:> n 9?[W[ O >bV vb}M 8 nM
XbO k O > X?P c >S c V M ZQ> X aH LNM?O jB R ^I L 8 PP ZQ8 X V c S O 8:>]:8 > O ZQ[T c XbO H
A M?O > v } 8:] > c ] c >?@ O [ XbO k O > X c > UZQ> X V M?O jB R ^I L
8 P 8:> P ZQVW9?[ZQVW8 c >T c XbO H LNM?O GVW[ZQ> P d O [ nM ZQ[Z n V O [W8 P VW8 n cQd jB R ^I LCn ZQ><S O
z1y
O L k [ OQPWPqOQX Z P I=t A O Z  8:>bs O [ P 8 c >{ ~ZQ> X | ,x $ O L k { O L k O L k |
{ x H b|
Q 8:> O ZQ[T c XbO 9?> XbO [ P VW[ c >?@p8:>bs O [ P 8 c >{ ZQ> X | $N{ x | { |
{ x H w|
R ZQVW9?[ZQVW8 c >T c XbO 9?> XbO [ P VW[ c >?@p8:>bs O [ P 8 c >{ ZQ> X | x$ { | { x H w|
}M?O [ O
A
{ x H i|
$ ) ,
{ x H6 |
A % A A
{ x H w|
ZQ> X 8 P V M?O k 8:> nM J c Ps c ]:VZQ@ Owv A 8 P V M?O V M [ OQPqM c ] X s c ]:VZQ@ O}M?O ><V M?O%nM ZQ>?> O ]
8 P 8:> OQf 9?8:] 8:S?[W8:9?TZQ> X,XbO k O > X?P c >3V M?OP 9?[ d Z n"OnM ZQ[W@ OXbO > P 8:V lwv 8 P V M?OP ] cik O
d Z n V c [ v $C8 P V M?O<n 9?[W[ O >bV d Z n V c [ v ~8 P V M?O V M?O [WT<ZQ]=s c ]:VZQ@ Owv ZQ> X ZQ[ O V M?O
} 8 X V M ZQ> X ] O >?@iV M cQd V M?O @wZQV O [ OQP k OQn VW8:s O ] lwv ) 8 P V M?O T c S?8:] 8:V l cQd O ] OQn VW[ c > v ,
8 P V M?O @wZQV O c Lb8 XbO<n Z k Z n 8:VZQ> n"O k O [9?>?8:VpZQ[ O Z v % 8 P ZQVpSaZQ> X s c ]:VZQ@ Owv A x % }M?O [ O %8 P V M?O ^ O [WTU8 kac V O >bVW8\ZQ] v ZQ> X 8 P V M?O S c Xbl d Z n V c [1H
D c V O V M ZQVS c V M A ZQ> X ZQ] P c XbO k O > X c > , ZQ> X V M?OX cik 8:>?@ cQd V M?O S?9?]  H
jB R ^I LP=M Z1s O Z P 8:TU8:]\ZQ[ P VW[W9 n VW9?[ O V c jB R ^I LP H LNM?O T<Z c [W8:V l%n ZQ[W[W8 O [ P
cQd jB R ^I LP ZQ[ OUM c ] OQP H LNM?O<P c 9?[ n"O ZQ> X~X [ZQ8:> [ O @i8 c > P cQd Z jB R ^I L ZQ[ O
J€V l k O}M 8:] O V M?O S c Xbl 8 P cQd J€V l k O 7H R€VU8 P kac PWP 8:S?] O V c k 9?V jB R ^I LP ZQ> X
jB R ^I L c >V M?OpP ZQT O0nM 8 k } 8:V M c 9?V%Z X?X 8:>?@<T<ZQ> l k [ c n"OQPWP%P V O k P"v ZQ> X V M 8 P 8 P
n ZQ]: OQX<m jB R V OQnM > c ] c @ l H
ziz
! ""(% = = /&
% ,0
LNM?O [ O ZQ[ O V M [ O1O< 8:> X?P cQd m jB R k [ c n"OQPWPqOQP"v J }NO ]: v J }NO ]:ZQ> X V } 8:>0J }NO ]:€H R€>
^-8:@i9?[ Ox H bv V M?OP 9?S P VW[ZQV O 8 P cQd €J V l k Owv?P c ZQ> jB R ^I L,n ZQ>pS O dgc [WT OQX0X 8:[ OQn VW] l
c >8:V1HR€> c [ XbO [V c0dgc [WT#Z jB R ^I Lv ZQ> €J V l k O%}NO ]: M Z P V c S O dgc [WT OQX _a[ P VZ P
V M?O S c Xbl cQd V M?O jB R ^I L H LNM?O > v V M?O%P c 9?[ n"O ZQ> X<X [ZQ8:> cQd V M?O jB R ^I L ZQ[ O
dgc [WT OQX S ln [ O ZQVW8:>?@ €J V l k O [ O @i8 c > P 8:>V M?O J }NO ]:€H LNM 8 P 8 P > c } > Z P ZQ> J }NO ]:
m jB R k [ c n"OQPWP H€R V-8 P ZQ] P ckac PWP 8:S?] O V c M Z1s O Z J }NO ]: k [ c n"OQPWP} 8:V M jB R ^I LP S O J
8:>?@S?9?8:] V8:>V M?O J }NO ]: P ZQ> X jB R ^I LP S?9?8:] V X 8:[ OQn VW] l c >pZQ> J P 9?S P VW[ZQV O { PqM c } >
8:>^-8:@i9?[ ONx H xw| H€R > P c T O k [ c n"OQPWPqOQP"vQ}M 8 nM ZQ[ ONn ZQ]: OQX V M?O V } 8:>0J }NO ]: k [ c n"OQPWPqOQP"v S c V M
V M?O J }NO ]:ZQ> X J }NO ]:ZQ[ O dgc [WT OQXpP 8:Tp9?]:VZQ> O c 9 P ] l H LN} 8:>0J }NO ]: k [ c n"OQPWPqOQP ZQ[ O 9 P 90J
ZQ]: l dgc 9?> X 8:> XbO1O k P 9?S?TU8 n [ c > k [ c n"OQPWPqOQP S OQn ZQ9 PqO 8:><V M?OQPqO k [ c n"OQPWPqOQP"v V M?O S c X 8 OQP
cQd V M?O jB R ^I LPpM Z1s O V c S OM 8:@ M ] l3X cik OQX V c [ OQX 9 n"O V M?OnM ZQ> n"O cQdk 9?> nM J
V M [ c 9?@ M H m c 9?>bV O [ X cik 8:>?@pS OQn c T OQP s O [ l 9?> d Z1s c [ZQS?] O ZQ> X<M 8:@ M ] l<X cik OQX J }NO ]: P
ZQ> X J }NO ]: P%M Z1s O V cdgc [WT PqO k ZQ[ZQV O ] l H7 c }NO s O [ v 8:V PqM c 9?] X S O > c V OQX V M ZQV08:>~Z
V } 8:>0J }NO ]: k [ c n"OQPWP"vO 8:V M?O [ c > O V l k O cQd }NO ]: P ZQ[ OpP VW8:] n c >?> OQn V OQX V c @ O V M?O [V c V M?O
P 9?S P VW[ZQV O Z P V M?OP 9?S P VW[ZQV O Tp9 P V=S OO 8:V M?O [ Uc [ €J V l k O H,€R >pV M 8 P V M?OQP 8 P"v ZQ> J }NO ]:
k [ c n"OQPWP} Z P 9 PqOQX ZQ> XP c v c >?] l V M?O J }NO ]: k [ c n"OQPWPqOQP} 8:] S OX 8 PWn 9 PWPqOQX H
^ c [ZQ> J }NO ]: k [ c n"OQPWP"vm jB R 8:>bV O @i[ZQV OQX<n 8:[ n 9?8:V P ZQ[ O 9 P 9aZQ]: l d ZQS?[W8 n ZQV OQX c >
{ z1yiyw| J c [W8 O >bV OQX €J V l k O<P 9?S P VW[ZQV Owv=}M 8 nM 8 P%M?O Z1sb8:] lX cik OQX} 8:V M S c [ c >~V c TU8:>?8OJ
TU8MN O V M?O [ OQP 8 P VW8:sb8:V l H LNM?O { z1yiyw|P 8:] 8 n c > n [ O ZQV OQP ] c }NO [ P 9?[ d Z n"O0P VZQV OpXbO > P 8:V l ZQ> X
8:T k [ c s OQP V M?O V M [ OQPqM c ] X s c ]:VZQ@ O0n c >bVW[ c ] 7Z PWybz H K > O k 8:VZ bL 8\ZQ]]\Z lwO [ cQd ZQS c 9?V V c z1y
8 P V M?O >p@i[ c } > dgc ]: c }NOQX S l J }NO ]: X 8OP 9 P 8 c >H K T c ZQV=T<Z Pq 8 P V M?O >U9 PqOQX
V c XbO _a> O V M?O Z n VW8:s O ZQ[ O Z PN}M?O [ O V M?O jB R ^I LP=} 8:] dgc [WTH K d V O [=V M?O dgc [WT<ZQVW8 c >
cQd @wZQV O c bL 8 XbOwv V M [ OQPqM c ] X Z X W9 P V08:T k ]\ZQ>bVZQVW8 c >8 P 9 PqOQX V c Z X W9 P V0V M?O V M [ OQPqM c ] X
s c ]:VZQ@ O cQd V M?O jB R ^I LP V c V M?O [ZQ>?@ O cQd y GV c y 0H=Y c ] l?P 8:] 8 n c > XbO kac P 8:VW8 c >
ZQ> X k ZQVWV O [W>?8:>?@UZQ> XP c 9?[ n"O X [ZQ8:>8:T k ]\ZQ>bVZQVW8 c >pV M?O > dgc ]: c } H LNM?O dgc ]: c } 8:>?@ n ZQ>
S O c S PqO [Ws OQX dgc [ZQ> J }NO ]: m jB R k [ c n"OQPWP z1x
Vin
Vdd
Vout
n+
p+
p+
Vdd
n+
n+
p+
Vout
Rwell
Q1
n-well
Rwell
Q1
Q2
Q2
p-epitaxial
p-substrate
Vout
Rsub
Rsub
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c cQd
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P c jB R ^I LPM Z1s O kacwc [ O [ k ZQ[ZQT O V O [ P V M ZQ> jB R ^I LP S OQn ZQ9 PqO V M?O0n ZQ[W[W8 O [
T c S?8:] 8:V l 8:> jB R ^I LPXbO @i[Z XbOQPX 9 O V c V M?On c 9?>bV O [ X cik 8:>?@ 7Z PWybziv Q 7 m 6 H
RwOQn c > X ] lwv Z PpPqM c } >~8:>3^-8:@i9?[ Ox H bv 8:V8 P kac PWP 8:S?] O dgc [0V M?O jB R ^I LP ZQ> X
jB R ^I LP V c<dgc [WT ZQ> 9?> d Z1s c [ZQS?] O ]\ZQV nM 9 k n 8:[ n 9?8:V1H Q ZQV nM J€9 k 8 P%XbO _a> OQX Z P
V M?O @ O > O [ZQVW8 c > cQd Z] c } J€8:T k OQX ZQ> n"O k ZQV M 8:> m jB R nM 8 k P S O V }NO1O > V M?O kac }NO [
P 9 k?k ] l [ZQ8:]ZQ> X V M?O @i[ c 9?> X [ZQ8:] X 9 O V c 8:>bV O [Z n VW8 c > cQdk ZQ[Z P 8:VW8 n ZQ> X VW[ZQ> P 8 P V c [ P H r > XbO [0> c [WT<ZQ] n c > X 8:VW8 c > P"v V M?O [ O 8 P c >?] l Z M 8:@ M 8:T k OQX ZQ> n"O k ZQV M
S O V }NO1O >pV M?O kac }NO [[ZQ8:] P Z P 0z ZQ> X %x ZQ[ O c PH KPNPqM c } ><8:>UV M?O T c XbO ] cQd ]\ZQV nM
9 k n 8:[ n 9?8:V P"v 8 d V M?O [ O 8 P ZQ> 8:> n [ O Z PqO 8:> V M?OUn c ]: OQn V c [ n 9?[W[ O >bV cQd O 8:V M?O [ k ZQ[Z P 8:VW8 n
S?8 kac ]\ZQ[0VW[ZQ> P 8 P V c [ P0X 9 O V c ZQ> O LbV O [W>aZQ] X 8 P VW9?[WSaZQ> n"Owv V M?O VW[ZQ> P 8 P V c [ P0} 8:] X [W8:s O
O Z nM c V M?O [8:> kac P 8:VW8:s O d O1OQX SaZ n k ZQV M SH R€>V M?O} c [ P V n Z PqOwv 8:V } c 9?] XXbOQP VW[ c l V M?O
XbO sb8 n"O S l dgc [WTU8:>?@pZ0V cwc ]\ZQ[W@ O0n 9?[W[ O >bV t Q H L cpk [ O s O >bV]\ZQV nM 9 k v?O 8:V M?O [V M?O
c [ . M Z P V c S O [ OQX 9 n"OQXv}M 8 nM3n c 9?] X S O Z nM 8 O s OQX S l 8:> n [ O Z P 8:>?@V M?O
X cik 8:>?@0] O s O ] cQd V M?O}NO ]: c [Z X?X 8:>?@pZ@i9aZQ[ X [W8:>?@0V c VW[Z k V M?O 8:> OQn V OQX TU8:> c [W8:VW8 OQP"v
c [<V M?O @wZQ8:> cQd V M?O S?8 kac ]\ZQ[<VW[ZQ> P 8 P V c [ P<M Z P V c S O [ OQX 9 n"OQX S l 8:> n [ O Z P 8:>?@~V M?O
PqO k ZQ[ZQVW8 c > X 8 P VZQ> n"O S O V }NO1O > cik?kac P 8:V O V l k O jB R ^I LP H rP 9aZQ]: lwv V M?O TU8:>?8:T<ZQ]
X 8 P VZQ> n"O S O V }NO1O > cik?kac P 8:V O V l k OQP cQd jB R ^I L/P k OQn 8`_ OQX S l V M?OUXbOQP 8:@i> [W9?] O cQd
z
Z k [ c n"OQPWP 8 PO > c 9?@ M V ck [ O s O >bV]\ZQV nM J€9 k 8:>3Z k [ cik O [W] l J€S?8\Z PqOQX3X 8:@i8:VZQ] n 8:[ n 9?8:V1H
7 c }NO s O [ v"}M?O >%V M?O=}NO ]: P ZQ[ O S?8\Z PqOQX%X 8OP O [ O >bVW] l Z P 8:> m c T k ZQVW8:S?] OQ ZQV O [ZQ]?FN8 kac ]\ZQ[
L [ZQ> P 8 P V c [ P { m#Q F LP|v @i9aZQ[ X [W8:>?@ PM Z1s O V c S O Z X?XbOQX { XbO VZQ8:] OQX 8:> RwOQn VW8 c > H 6 | H
LNM 8:[ X ] lwv 9?>?]:8 wO V M?O S?8 kac ]\ZQ[ k [ c n"OQPWPqOQP"vm jB R k [ c n"OQPWPqOQPUX c > c VU[ OQf 9?8:[ O Z
S?9?[W8 OQX ]\Z lwO [Z P jB R ^I LP ZQ[ OP 9?[ d Z n"OXbO sb8 n"OQP"v 8:> }M 8 nM V M?ONn ZQ[W[W8 O [ P c } > O ZQ[-V c
V M?O 8:>bV O [ d Z n"O H7 c }NO s O [ vQ}M?O >pV M?O jB R ^I LP ZQ[ O cik O [ZQV OQX Z P ]\ZQV O [ZQ]
S?8 kac ]\ZQ[ XbO sb8 n"OQP"vbn c > P 8 XbO [ZQS?] O TU8:> c [W8:VW8 OQP 8:> OQn V OQX d [ c T5V M?OP c 9?[ n"O c [ X [ZQ8:><8:>bV c
V M?O S c XblU} 8:] ?VW[Z1s O ]?s O [WVW8 n ZQ]: l ZQ> X S On c ]: OQn V OQX S l V M?OP 9?S P VW[ZQV O 8:>pV M?O ZQS PqO > n"O
cQd S?9?[W8 OQX ]\Z lwO [ P H LNM?O ]\ZQV O [ZQ]@wZQ8:> } 8:] V M?O ><S O0P 8:@i>?8`_ n ZQ>bVW] lUXbOQn [ O Z PqOQX H
SI m jB R 8 P0n 9?[W[ O >bVW] l V M?O T<Z c [V OQnM > c ] c @ l 9 PqOQX 8:>~8:>bV O @i[ZQV OQX n 8:[ n 9?8:V XbOQP 8:@i> P H
m jB RXbO sb8 n"OQP d O ZQVW9?[ O0M 8:@ M 8:> k 9?V8:T k OQX ZQ> n"Owv ] c } c P PqO V Pq} 8:V nM?OQP"vM 8:@ M k Z n J
8:>?@ XbO > P 8:V lwv ] c }/Pq} 8:V nM 8:>?@ kac }NO [ n c > P 9?T k VW8 c > v ZQ> X M 8:@ M PWn ZQ]\ZQS?8:] 8:V l H hOQP k 8:V O
V M?OQPqO Z X siZQ>bVZQ@ OQP"vm jB RP VW8:] n ZQ>?> c V n c T k ] O V O ] l [ O k ]\Z n"O S?8 kac ]\ZQ[ XbO sb8 n"OQP > c V
W9 P V-8:>0ZQ>aZQ] c @ n 8:[ n 9?8:V P S?9?VZQ] P c V M?OX 8:@i8:VZQ] c > OQP-P 8:> n"O S?8 kac ]\ZQ[ XbO sb8 n"OQP [ O VZQ8:> P c T O
Z X siZQ>bVZQ@ OQP c s O [ m jB Rav ZQT c >?@ }M 8 nM ZQ[ O ]\ZQ[W@ O [ n Z k ZQS?8:] 8:V l V c X [W8:s On Z k Z n 8:VW8:s O
] c Z X?P"v ]\ZQ[W@ O [VW[ZQ> PWn c > X 9 n VZQ> n"Owv ] c }NO [ z d > c 8 PqOwv ZQ> X S O VWV O [%T<ZQV nM 8:>?@ k [ cik O [ J
VW8 OQP HFN8 m jB R V OQnM > c ] c @i8 OQP%n c TpS?8:> OUm jB R ZQ> X S?8 kac ]\ZQ[V OQnM > c ] c @i8 OQP c >~V M?O
P ZQT OnM 8 k P c V M?O Z X siZQ>bVZQ@ OQP cQd S c V M V l k OQP cQd VW[ZQ> P 8 P V c [ Pn ZQ>US O 9 PqOQX V c @ O V M?O [1H
LNM?O > v V M?O ] c } J€> c 8 PqOM 8:@ MUP k O1OQX k ZQ[WV PNn c 9?] X S O Z nM 8 O s OQX S l S?8 kac ]\ZQ[ n 8:[ n 9?8:V P ZQ> X
V M?O ] c } J P k O1OQX ] c @i8 n k ZQ[WV Pn c 9?] X S O 8:T k ] O T O >bV OQX0} 8:V Mm jB R H rP 9aZQ]: lwv Z0V l k O8 J
n ZQ]TUM8 L OQX J P 8:@i>aZQ] n 8:[ n 9?8:V n c >bVZQ8:> P iy X 8:@i8:VZQ] n 8:[ n 9?8:V P ZQ> X z1y ZQ>aZQ] c @
n 8:[ n 9?8:V P 7Z PWybz H
7 c }NO s O [ v V M?O FN8 m jB R k [ c n"OQPWP=n ZQ>?> c V W9 P VS O Z P 8:T k ] O T c X 8`_ n ZQVW8 c > cQd Fu L
c [ m jB R k [ c n"OQPWP H K >aZQ] c @FN8 m jB R k [ c n"OQPWPqOQP [ OQf 9?8:[ O ZQV0] O Z P V_ d V O1O >T<Z Pq?P
{g8:> n c >bVW[Z P VV c V M?O SaZ PqO ]:8 > O cQd O 8:@ M VNT<Z Pq?P 8:><Fu L ZQ> X >?8:> O T<Z Pq?P 8:> m jB R?|v
}M 8 nM 8 P Tp9 nM T c [ O0n c T k ]:8 n ZQV OQX H KX?X 8:VW8 c >aZQ] k [ c n"OQPWP 8:>?@ P V O k PP 9 nM Z P S?9?[W8 OQX
z ]\Z lwO [ P"v-XbO1O k 5P 8:> wO [ P"v ZQ> X SaZ PqO<X 8OP9 P 8 c > P Tp9 P VS O 8:> n ]:9 XbOQX 8:> Z X?X 8:VW8 c >V c
V M?O%m jB R k [ c n"OQPWPqOQP H R 9 nMUn c T k ]:8 n ZQV OQX k [ c n"OQPWP T O ZQ> P ZQ] P c M 8:@ M?O [ } Z d O [ n c P V P"v
] c >?@ O [<T<ZQ>b9 d Z n VW9?[W8:>?@ VW8:T Owv ] c }NO [ k [ c n"OQPWPUl 8 O ] X?P"v T c [ OX 8 <n 9?]:V n c >bVW[ c ] P c >
V M?OX 8OP9 P 8 c > P"v ZQ> X T c P Vp8:T kac [WVZQ>bVW] lwv T c [ OO L k O > P 8:s O k [ c X 9 n V P H LNM?O [ O dgc [ Owv
V M?O 8:> O L k O > P 8:s O<m#Q F LP 8:> m jB R k [ c sb8 XbO ZQ>3ZQVWVW[Z n VW8:s O ZQ]:V O [W>aZQVW8:s O V c 9 P 8:>?@
FN8 m jB R H
HG
R€>UV M 8 PNnM Z k V O [ v T c XbO [W>.R m V OQnM > c ] c @i8 OQP"v >aZQT O ] l V M?O S?8 ak c ]\ZQ[ vam jB R ZQ> X FN8 m J
j B R k [ c n"OQPWPqOQPNM Z1s O S O1O > k [ OQPqO >bV OQX H LNM?O T c P V n c TUT c >?] l 9 PqOQX<XbO sb8 n"OQP"v Fu LP
ZQ> X jB R ^I LP%}NO [ OUX 8 PWn 9 PWPqOQX 8:> XbO VZQ8:] P"v ZQ> X V M?O 8:[ P VW[W9 n VW9?[ OQP ZQ> X T c XbO ]:8 >?@
}NO [ O k [ OQPqO >bV OQX H
! FG IF R€>V M 8 P-nM Z k V O [ v V M?O SaZ n @i[ c 9?> X cQd T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd jB R ^I LP ZQ> X Fu LP
8 P k [ OQPqO >bV OQX H LNM?O 8:T kac [WVZQ> n"O ZQ> X OQf 9aZQVW8 c > P cQd TU8 P T<ZQV nM T O Z P 9?[ O T O >bV P ZQ[ O
X 8 PWn 9 PWPqOQX H=Y[ O sb8 c 9 PN} c [  c >V M?O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd jB R ^I LP ZQ> X Fu LP
8 P-P 9?TUT<ZQ[W8MN OQX H LNM 8 P-nM Z k V O [ k [ c sb8 XbOQP ZSaZ P 8 P dgc [-V M?OX 8 PWn 9 PWP 8 c > cQd V M?O T<ZQV nM 8:>?@
k [ cik O [WVW8 OQP cQd #m Q F LP H
GFH I HSF,I I SD D ; jZQV nM 8:>?@ XbO ZQ] P} 8:V MP VZQVW8 P VW8 n ZQ] XbO sb8 n"OX 8OP O [ O > n"OQP S O V }NO1O > k ZQ8:[ P cQd 8 XbO >bVW8 n ZQ]: l
XbOQP 8:@i> OQX ZQ> X 8 XbO >bVW8 n ZQ]: l 9 PqOQX Z n VW8:s O c [ k Z PWP 8:s OUO ] O T O >bV PP 9 nM Z P VW[ZQ> P 8 P V c [ P"v
[ OQP 8 P V c [ P"v ZQ> X n Z k Z n 8:V c [ P Y L 6 H hO sb8 n"OQPP k OQn 8`_ n ZQ]: ln c > P VW[W9 n V OQX V c<c S?VZQ8:>
Z  > c } > n c > P VZQ>bV[ZQVW8 c ZQ[ O<n ZQ]: OQX 7Z PWybz HUj8 P T<ZQV nM 8 P V M?O
k [ c n"OQPWP V M ZQV n ZQ9 PqOQP VW8:T O J€8:> XbO k O > XbO >bV[ZQ> X c T siZQ[W8\ZQVW8 c > P 8:> k Mbl?P 8 n ZQ] f 9aZQ>bVW8:VW8 OQP
cQd P 9 nM XbO sb8 n"OQP H K >aZQ] c @ n 8:[ n 9?8:V P k ]\Z n"O k ZQ[WVW8 n 9?]\ZQ[W] lP VW[W8:>?@ O >bV[ OQf 9?8:[ O T O >bV P c >
z
z
T<ZQV nM 8:>?@U[ OQP 8 P V c [ P"v-n Z k Z n 8:V c [ P"v ZQ> X VW[ZQ> P 8 P V c [ P S OQn ZQ9 PqO V M?O sb8:VZQ] n 8:[ n 9?8:V n c T4J
kac > O >bV P"v?P 9 nM Z P cik O [ZQVW8 c >aZQ]ZQT k ]:8`_ O [ P"vih 8:@i8:VZQ]OJ€V c J K >aZQ] c @ m c >bs O [WV O [ P { hKmNP|v
Tp9?]:VW8 k ] O L O1X ZQ>aZQ] c @ Pql?P V O T P"v ZQ> X [ O d O [ O > n"OP c 9?[ n"OQPUXbO T<ZQ> X3M 8:@ M ] l T<ZQV nM?OQX
n 9?[W[ O >bVNTU8:[W[ c [ P ZQ> X<X O8 P O [ O >bVW8\ZQ] k ZQ8:[ P dgc [ M 8:@ MUO > c 9?@ M Z n1n 9?[Z n"l JE[ O ix H KX?X O8 J
VW8 c >aZQ]: lwv V M?O VW[ O > X?P%XbOQPWn [W8:S OQX 8:>V M?O dgc ]: c } 8:>?@ P 9?S PqOQn VW8 c > P T<Z wO V M?OpP VW9 Xbl cQd
S O VWV O [T<ZQV nM 8:>?@ XbO sb8 n"OQP S OQn c T OO s O ><T c [ O 8:T kac [WVZQ>bV1H
*+ 0'(
jZQV nM?OQX n c T kac > O >bV P ZQ[ O S OQn c TU8:>?@<8:> n [ O Z P 8:>?@i] l 8:T kac [WVZQ>bV P 8:> n"O ] c } J€s c ]:VZQ@ O
n 8:[ n 9?8:V P%M Z1s O S OQn c T O ZT<Z c [VW[ O > X ZQ> X~} 8:] P 9?[ O ] l X c TU8:>aZQV O V M?OUO ] OQn VW[ c >?8 n
8:> X 9 P VW[ l 8:> V M?O d 9?VW9?[ O H R€> X 8:@i8:VZQ] n 8:[ n 9?8:V P"v V M?O<P 9 k?k ] l s c ]:VZQ@ O 8 P%O L k OQn V OQX V c
[ O Z nMpy {gTU8:>?8:T09?T] c @i8 n | S l V M?OlwO ZQ[ cQd xiybziz u c PqOQX H^-8:[ P VW] lwv V M?O [ O ZQ[ O
T c [ O > O1OQX?P dgc [ kac [WVZQS?] O%Pql?P V O T PP 9 nM Z P ] c } J kac }NO [ M?O ZQ[W8:>?@ZQ8 X?P"v?n ZQ[ X 8\Z n k Z n"O J
T<Z wO [ P"vn"O ]: 9?]\ZQ[ k M c > OQP"v k ZQ@ O [ P"v kac [WVZQS?] OUn c T k 9?V O [ P ZQ> X V O ] OQn c TUT09?>?8 n ZQVW8 c > P
k [ c X 9 n V P Hj c [ O c s O [ v Z P VW[ZQ> P 8 P V c [ XbO > P 8:V l ZQ> X cik O [ZQVW8:>?@ d [ OQf 9 O > n"l 8:> n [ O Z PqOwv
M?O ZQV X 8 PWP 8 k ZQVW8 c >S OQn c T OQP ZpT c [ O 9?[W@ O >bV k [ c S?] O T V c S O0P c ]:s OQXv?}M 8 nM [ OQf 9?8:[ OQP
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Tp9 P VS O 9 PqOQX 8 d S c V M V l k OQP cQd S?8 kac ]\ZQ[ XbO sb8 n"OQPNM Z1s O V c S O [ O ZQ]:M8 N OQX ZQVV M?O0P ZQT O
VW8:T O H0D c > O V M?O ] OQPWP"v 9 P 9aZQ]: l c >?] lP T<ZQ]:->b9?TpS O [ P ZQ> X c >?] l c > O V l k O cQd S?8 kac ]\ZQ[
XbO sb8 n"O ZQ[ O [ OQf 9?8:[ OQX V c 8:T k ] O T O >wV=TUM8 L J P 8:@i>aZQ] n 8:[ n 9?8:V P H
r > XbO [N> c [WT<ZQ] cik O [ZQVW8 c > n c > X 8:VW8 c > P"v ZQ> JqjB R ^I L dgc [WT OQX 8:><Z J }NO ]: M Z P
V M?OP 9?S P VW[ZQV O ZQ> X J }NO ]: n c >?> OQn V OQX V c V M?O<M 8:@ M?OQP VUZQ> X ] c }NOQP V kac V O >bVW8\ZQ] P [ O J
Emitter E
Substrate S
Base B
Emitter E
Gate G
Collector C
n+ Collector
n+ Emitter
Gate G
pnp
Base B
Collector C
Substrate S
e- flow in the
bulk
y
Collector C
x
CLBT
CVBT
Substrate S
CVBT
p-well (Base)
npn
Gate G
n-substrate
Base B
8^-Xb8:O @i>b9?VW[ 8`O _ OQXH z-{g] LNO d M?V |ONZQn >[ c XPWP PqJ l PqTpOQn SVW8 c c ] > P cQdgc d [ ZQ> ZQ> #m X Q F L} m#8:QV M F k LZQP [Z {g[WP 8:8:VW@ 8 M n V S?| H8 kac ]\ZQ[-VW[ZQ> P 8 P V c [ P
Emitter E
IC
VS=-0.8 V
Strong
Inversion
logarithmic
scale
Bipolar
-0.6 V
Weak
Inversion
-0.4 V
-0.2 V
0V
0.2V
VG= VT
-}^ 8:M?@iO 9?> [ O ~ H xZQ> X L [ZQ > Pwd O O k [ VnZQM V ZQ[Z n V O [WZQ8 > P VWX 8 n1 P d [ c [T OQP k P cOQ9?n VW[ 8:n"s O O ] Vl c {€Z X X [ZZQk8:> V OQcQX d d [ZQc > T jK [WB [ R6 ^gI | H L
P k OQn VW8:s O ] l H LNM?OP c 9?[ n"O 8 P0n c >?> OQn V OQX V c Z] c }NO [ kac V O >bVW8\ZQ]V M ZQ>3V M?O<X [ZQ8:>H R d
V M?O @wZQV O J P c 9?[ n"O s c ]:VZQ@ O { | 8 P ]\ZQ[W@ O [NV M ZQ>UV M?O V M [ OQPqM c ] X s c ]:VZQ@ O { |v?P VW[ c >?@
8:>bs O [ P 8 c > c n1n 9?[ P ZQ> X V M?O ?{ | VW[ZQ> P d O [ nM ZQ[Z n V O [W8 P VW8 n1P c S O1l Z PWf 9aZQ[ O ]\Z } Z P
XbOQPWn [W8:S OQX 8:> RwOQn VW8 c > x H {€I f 9aZQVW8 c > x H w| HA M?O > 8 P ] c }NO [V M ZQ>UV M?O V M [ OQPqM c ] X
s c ]:VZQ@ Owv 8:VN8 P 8:> }NO Z  8:>bs O [ P 8 c >H Kn1n c [ X 8:>?@V c I f 9aZQVW8 c > x H ?v 8:V } 8:] Z k?k O ZQ[Z P Z
P VW[ZQ8:@ M V]:8 > O%}M?O >V M?O0n c ]: OQn V c [ n 9?[W[ O >bV8 P k ] c VWV OQX ZQ@wZQ8:> P VV M?O @wZQV O s c ]:VZQ@ O c >
Z0] c @ PWn ZQ] O {€^-8:@i9?[ O H xw| H
A M?O >V M?O @wZQV O V c }NO ]:-s c ]:VZQ@ O { | S OQn c T OQP > O @wZQVW8:s Owv V M?O [ Op} 8:] S O Z n J
n 9?Tp9?]\ZQVW8 c > cQd M c ] OQP ZQVV M?O 8:>bV O [ d Z n"O S O V }NO1O >UV M?O 8:> P 9?]\ZQVW8:>?@0@wZQV O ZQ> X V M?O
}NO ]:€+H R d > c }%v V M?Op}NO ]:-8 P dgc [ } ZQ[ X S?8\Z PqOQX} 8:V M [ OQP k OQn V%V c V M?OpP c 9?[ n"OwvO ] OQn VW[ c > P
} 8:] S O 8:> OQn V OQX 8:>bV c V M?O J }NO ]:ZQ> X V M?O > X O8 P9 PqO V c } ZQ[ X V M?OX [ZQ8:>3]\ZQV O [ZQ]: l H
A,8:V M Z]\ZQ[W@ O%O > c 9?@ M > O @wZQVW8:s O @wZQV O s c ]:VZQ@ Owv V M?On 9?[W[ O >bV } 8:] S O 8:> XbO k O > XbO >bV cQd
V M?O @wZQV O s c ]:VZQ@ O ~{€^-8:@i9?[ O H xw| H LNM?OXbO sb8 n"O 8 P > c } cik O [ZQVW8:>?@p8:> k 9?[ O S?8 kac ]\ZQ[
T c XbO ZQ> X V M?O%P c 9?[ n"Owv?X [ZQ8:> v ZQ> XU}NO ]:aS OQn c T OQP V M?OO TU8:VWV O [ vwn c ]: OQn V c [ v ZQ> X SaZ PqO
[ OQP k OQn VW8:s O ] l 8:V 6 bvK [W[ 6 H0F l Z k?k ] l 8:>?@ P 8:TU8:]\ZQ[ZQ[W@i9?T O >bV P"v jB R ^I LP%n ZQ>
cik O [ZQV O Z P #m Q F LP 8 d V M?O @wZQV O V c }NO ]:as c ]:VZQ@ O 8 P ]\ZQ[W@ OO > c 9?@ M ZQ> X V M?O1l0} 8:]
M Z1s O ZVW[ZQ> P d O [ nM ZQ[Z n V O [W8 P VW8 nP 8:TU8:]\ZQ[NV c V M ZQV PqM c } >8:>^-8:@i9?[ O H x H
VG
7 c }NO s O [ v?X 9 O V c V M?O ]\Z n cQd ZQ> S?9?[W8 OQX ]\Z lwO [N8:>V M?Opm jB R k [ c n"OQPWP"v V M?O
O ] OQn VW[ c > P 8:> OQn V OQX d [ c T V M?OUO TU8:VWV O [8:>bV c V M?O SaZ PqO { }NO ]: |} 8:] NZQ] P c X 8OP9 PqO 8:>bV c
V M?OP 9?S P VW[ZQV O H LNM?OP 9?S P VW[ZQV On ZQ>pS O [ O @wZQ[ XbOQX Z P Z PqOQn c > X0n c ]: OQn V c [ cQd Zs O [WVW8 n ZQ]
m Q F L 8 P Z J€V O [WTU8:>aZQ] XbO sb8 n"O H
VW[ZQ> P 8 P V c [ZQ> Xv V M?O [ O dgc [ Owv Z #
<D
h%m ZQ> XKm T c XbO ] P cQd #m Q F LP}NO [ O0P VW9 X 8 OQX<Pql?P V O T<ZQVW8 n ZQ]: l 8:> K [W[ O @i9?8:V "JP Y Mah
V M?OQP 8 P K [W[ 6 H7 c }NO s O [ vaP 8:> n"O 8:V8 P 9?>?> OQn"OQPWP ZQ[ l V c 8:> n ]:9 XbO V M?OpKm j c XbO ] dgc [
V M?O 9?> XbO [ P VZQ> X 8:>?@ cQd V M?O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd #m Q F LP"v 8:VN8 P > c V k [ OQPqO >bV OQX H
LNM?O<h%m T c XbO ] cQd Z #m Q F L 8:>siZQ[W8 c 9 P cik O [ZQVW8 c > [ O @i8 c > P%n ZQ> S OUXbOQPWn [W8:S OQX
} 8:V M Z PqO V cQd k ZQ[ZQT O V O [ P"v s c ]:VZQ@ O<XbO k O > XbO >bV n 9?[W[ O >bV P c 9?[ n"OQP"v}M 8 nM ]:8 > 
V M?O W9?> n VW8 c > P cQd V M?O0#m Q F L V } c S l V } c v ZQ> X 0n 9?[W[ O >bV@wZQ8:> P 8:><Z0@ O > O [ZQ]:M8 N OQX
IS O [ P Jqj c ]:-T c XbO ]€H LNM?O W9?> n VW8 c > P ZQ[ O V M?O SaZ PqO J n c ]: OQn V c [{ |v SaZ PqO J O TU8:VWV O [
{ |v ZQ> X SaZ PqO J P 9?S P VW[ZQV O { =| W9?> n VW8 c > P H LNM 8 P T c XbO ]8 P0P 9?8:VZQS?] O dgc [ M ZQ> X
n ZQ] n 9?]\ZQVW8 c > P H LNM?O _a[ P V c [ XbO [ h%m T c XbO ] cQd ZQ> #m Q F L 8 PPqM c } >p8:>p^-8:@i9?[ O H } 8:V M V M?O dgc ]: c } 8:>?@ OQf 9aZQVW8 c > P ! , :{ O L k O L k " ! |
{ H zQ|
, { O L k O L k |
{ H xw|
! , -{ O L k " ! O L k |
{ H w|
, $& , { O L k zQ|
{ H b|
" ! , $ ! , { O L k " ! zQ|
{ H w|
, $ , { O L k zQ|
{ H w|
{ H i|
}M?O [ O C8 P V M?O V M?O [WT<ZQ]s c ]:VZQ@ Owv , v , v ZQ> X , CZQ[ On c > P VZQ>bV P [ O ]\ZQV OQX V c
V M?O @wZQ8:> P cQd v ZQ> X [ OQP k OQn VW8:s O ] l ZQ> X $& v $! v ZQ> X $ ZQ[ O V M?O
ISC
C
S
IBC
IBS
B
ICE
IBE
ISE
E
^-8:@i9?[ O H ^-8:[ P V c [ XbO [IS O [ P Jqj c ]:T c XbO ] dgc [ m#Q F L H
O TU8:VWV O [ v?n c ]: OQn V c [ v ZQ> XP 9?S P VW[ZQV O dgc [ } ZQ[ Xn 9?[W[ O >bV@wZQ8:> P [ OQP k OQn VW8:s O ] l H 8 P V M?O
@wZQV O d 9?> n VW8 c >ZQ> X 8 P Tp9?]:VW8 k ]:8 OQX V c Z n1n c 9?>bV dgc [Z> c 0> J ZQVSaZQ> Xn c > X 8:VW8 c >H
LO [WTU8:>aZQ] n Z k Z n 8:VZQ> n"OQP ZQ> X [ OQP 8 P VZQ> n"OQPn c 9?] X S O 8:> n ]:9 XbOQX dgc [ Km ZQ> X0PqOQn c > X
c [ XbO [ O P OQn V P H K T c [ On c T k ]:8 n ZQV OQX E9?TUT O O] JqY cwc >pT c XbO ] } [W8:VWV O ><8:>UV M?On 8:[ n 9?8:V
P 8:Tp9?]\ZQV c [I RbKmNK Y } Z P ZQ] P c 8:T k ] O T O >wV OQX S lK [W[ O @i9?8:V1SH R€> z 6 v #m Q F LP
}NO [ O T c XbO ] OQX Z P Z P 9?S n 8:[ n 9?8:V cQd V M [ O1O k ZQ[Z P 8:VW8 n S?8 kac ]\ZQ[0VW[ZQ> P 8 P V c [ P Z P0PqM c } >
8:>^-8:@i9?[ O H z 9 P 8:>?@UV M?OpR ,Y R m ICE9?TUT O O] JqY cwc ><T c XbO ] }M 8 nM Z n1n c 9?>bV OQX dgc [V M?O
P 9?S P VW[ZQV O 8:>bV O [Z n VW8 c >H LNM?O T c XbO ]@wZ1s O Z n1n 9?[ZQV O _aV P S O V }NO1O >3V M?O T O Z P 9?[ OQX
{ y m jB R J P 9?S P VW[ZQV O k [ c n"OQPWP| ZQ> X P 8:Tp9?]\ZQV OQXX ZQVZ<8:>S c V M V M?O dgc [ } ZQ[ X
ZQ> X [ O s O [ PqO [ O @i8 c > cQdpcik O [ZQVW8 c > c s O [<Z~]\ZQ[W@ O S?8\Z P [ZQ>?@ O { y :z V c
y :z | jjjj 6 H
HSF SIF B I
I HSF LNM?O<n c ]: OQn V c [ n 9?[W[ O >bV cQd Z m#Q F L 8 PP 9 k?kac PqOQX V c S O 8:> XbO k O > XbO >bV cQd V M?O @wZQV O
s c ]:VZQ@ O }M?O > ,8 PP 9 <n 8 O >bVW] l ] c } 8:> m#Q F LP c [ P 9 <n 8 O >bVW] lUM 8:@ M 8:>
m#Q F LP H=7 c }NO s O [ v S l ZQ>aZQ] l 1N 8:>?@V M?O jB RP VW[W9 n VW9?[ O 8:>pZ n1n 9?Tp9?]\ZQVW8 c >%T c XbOwv
SD H
8:V%8 P dgc 9?> X V M ZQV%V M?O @wZQV O V c }NO ]:-s c ]:VZQ@ O Z n VW9aZQ]: lM Z P ZQ> O P OQn V c >V M?O ]\ZQV O [ZQ]
n c ]: OQn V c [ n 9?[W[ O >bV1H LNM 8 P 8 P > c } >Z P V M?O [ OQP 8 X 9aZQ]-@wZQV O0O P OQn V K [W[ 6 H Kn VW9aZQ]: lwv
8:V } Z P%PqM c } >V M ZQV%V M?O ]\ZQV O [ZQ] n c ]: OQn V c [ n 9?[W[ O >bV XbO k O > XbOQX c >V M?O @wZQV O V c SaZ PqO
s c ]:VZQ@ O cQd ZQS c 9?V z1y c s O [ dgc [ZV l k 8 n ZQ]?] c } J€s c ]:VZQ@ OR 8OJ€@wZQV O0RbKm jB R
k [ c n"OQPWP KPqM 66 H
R€>Z n1n 9?Tp9?]\ZQVW8 c >pT c XbOwv V M?O T<Z c [W8:V lpn ZQ[W[W8 O [ P 8:>UV M?OP 9?S P VW[ZQV O%} 8:] Z n1n 9?Tp09 J
]\ZQV O 9?> XbO [-V M?O 8:>bV O [ d Z n"O ZQ> X V M?O k [ c _a] O cQd V M?On ZQ[W[W8 O [ PXbOQn [ O Z PqOQPO L kac J
> O >bVW8\ZQ]: l Z } Z l d [ c T5V M?O 8:>bV O [ d Z n"O 8:>bV c V M?O S?9?]  H=^ c [ O L?ZQT k ] Owv 8:> jB R ^I LP"v
V M?OXbO > P 8:V l cQd M c ] OQP 8:> J P 9?S P VW[ZQV O ZQ] c >?@V M?O L JqZ Lb8 P 9?> XbO [=V M?O @wZQV O {€^-8:@i9?[ O H zQ|
n ZQ>S O [ O k [ OQPqO >bV OQX Z P { H6 |
{ | 1/B O L k c[
|
{
:
]
>
{ H w|
1/B
}M?O [ O 1/B8 P V M?OOQf 9?8:] 8:S?[W8:9?T M c ] O0n c > n"O >bVW[ZQVW8 c > v ,8 P V M?O kac V O >bVW8\ZQ]-[ O ]\ZQVW8:s O V c
> O 9?VW[ZQ]=S c Xbl ZQ> X 8 P V M?O V M?O [WT<ZQ]s c ]:VZQ@ O HUF l k ] c VWVW8:>?@I f 9aZQVW8 c > H <} 8:V M
> c [WT<ZQ]:M8 N OQX kac V O >bVW8\ZQ] dgc [ X O8 P O [ O >bV P 9?[ d Z n"O kac V O >bVW8\ZQ] P Z P Z d 9?> n VW8 c > cQd > c [WT<ZQ]:M8 N OQX
X 8 P VZQ> n"Owv c > O0n ZQ> c S?VZQ8:>^-8:@i9?[ O H K [W[ 6 H=^?[ c T V M 8 P @i[Z k Mva}NO%n ZQ> PqO1O V M ZQV
V M?O k [ c _a] O cQd V M?O Z n1n 9?Tp9?]\ZQV OQXnM ZQ[W@ O 8 P ]:8 TU8:V O1X V c } 8:V M 8:> x V c hO S lwO ] O >?@iV MaP
{ | H R 8:> n"O V M?O W9?> n VW8 c > XbO k V M cQd Z #m Q F L 8 P 9 P 9aZQ]: l T c [ O V M ZQ> z1yhO S lwO
] O >?@iV MaP"v V M?O @wZQV O c >?] l<M Z PP T<ZQ]: O P OQn V c >V M?OnM ZQ[W@ O0n c > n"O >bVW[ZQVW8 c >ZQ> Xv V M 9 P"v
P T<ZQ]: O P OQn V c >3V M?O ]\ZQV O [ZQ] n c ]: OQn V c [ n 9?[W[ O >bV1HC^?[ c T V M?O @i[Z k Mv c > On ZQ>,ZQ] P c
n c > n ]:9 XbO V M ZQVV M?O ]\ZQ[W@ O [V M?OUP 9?[ d Z n"O kac V O >bVW8\ZQ] v V M?OUP T<ZQ]: O [8 P V M?O [ OQP 8 X 9aZQ]
@wZQV OO P OQn V vb}M 8 nM 8 Pn c > P 8 P V O >bV } 8:V M V M?O k [ O sb8 c 9 P ZQ[W@i9?T O >bVNV M ZQV8 d V M?O @wZQV O V c
S c Xbl 8 P S?8\Z PqOQX0P 9 <n 8 O >bVW] l ] c } dgc [NZQ> #m Q F Lv V M?O @wZQV O s c ]:VZQ@ O} 8:] ?> c V M Z1s O
ZQ> O P OQn V c ><V M?O ]\ZQV O [ZQ] n c ]: OQn V c [ n 9?[W[ O >bV1H
LNM?O [ OQP 8 X 9aZQ]=@wZQV O<O P OQn VT<Z lXbO @i[Z XbO V M?O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd #m Q F LP
S OQn ZQ9 PqO V M?O ]\ZQV O [ZQ] n c ]: OQn V c [ n 9?[W[ O >bV=> c }XbO k O > X?P c ><V M?O @wZQV O s c ]:VZQ@ O HNB>UV M?O
- Ψ/UT
8
6
4
2
x/LD
0
^]-O 8:>?@i@i9?V [ M O HH ILN]M?OQOUn VWP [ 9?c [P dVZ ZQn"VWO8 n kakac c V VO O >b>bVWVW8\ZQ8\ZQ] ] GZ<8 PP Z x d 9?> n VW8 c > 6 cQd > c [ [WOQT<P k ZQOQ]:n 8MNVW8:OQs X O ] l V {€cZ X hZ kO SV OQlwX O
d [ c T K [W[ 6 g| H
c V M?O [ M ZQ> Xv c > Opn ZQ>9?VW8:] M8 N OP 9 nM k [ cik O [WVW8 OQP V c n 8:[ n 9?Tps O >bVNV M?O0X 8OP O [ O >bV O [W[ c [ P
8:> M?O [ O >bV8:>3Z dgc 9?[ J f 9aZ X [ZQ>bVpTp9?]:VW8 k ]:8 O [ K [W[ 6 c [0VW[W8:T ZQ>,ZQT k ]:8`_ O [%8:> n c [ kac J
[ZQVW8:>?@ #m Q F LP +H R€>V M 8 P V M?OQP 8 P"vP 9 nM Z kac PWP 8:S?8:] 8:V l<} Z P 8:>bs OQP VW8:@wZQV OQX ZQ> X} 8:] S O
k [ OQPqO >bV OQX 8:> m=M Z k V O [FH
1
/
2
3
H HG,H+IF !G DF I
D <D
*+ " " ,
R€> P VZQ> X ZQ[ X F u L k [ c n"OQPWPqOQP"v V M?O SaZ PqO [ O @i8 c >~8 P%M 8:@ M ] l X cik OQX } 8:V M [ OQP k OQn VV c
V M?OUn c ]: OQn V c [ZQ> X n c >bVZ n V PX 8:[ OQn VW] l V c V M?O ]:8 @ M VW] lX cik OQXO k 8:VZ bL 8\ZQ]-]\Z lwO [ cQd V M?O
n c ]: OQn V c [[ O @i8 c >3{ RwOQn VW8 c > x H xw| H LNM?O [ O dgc [ Owv V M?O1lM Z1s O s O [ lM 8:@ M I=ZQ[W] l s c ]:VZQ@ O H
7 c }NO s O [ v Z Pm#Q F LP ZQ[ O d ZQS?[W8 n ZQV OQX 8:> P VZQ> X ZQ[ X m jB R k [ c n"OQPWPqOQP"v V M?O0O TU8:VWV O [
ZQ> X<n c ]: OQn V c [ cQd Z m#Q F L ZQ[ O S c V M<M 8:@ M ] lpX cik OQXv ZQ> X V M?O SaZ PqO 8 P ]:8 @ M VW] l0X cik OQXv
V M 8 P [ OQP 9?]:V P 8:>~Z<] c } I=ZQ[W] l s c ]:VZQ@ O ZQ> Xv V M 9 P"v ] c } c 9?V k 9?V0[ OQP 8 P VZQ> n"O H LNM 8 P 8 P
S OQn ZQ9 PqO}M?O >3V M?O [ O s O [ PqOn c ]: OQn V c [€J SaZ PqO s c ]:VZQ@ O 8:> n [ O Z PqOQP"v V M?OXbO k ] O VW8 c >3[ O J
@i8 c > } 8:] 8:> n [ O Z PqO ZQ> X c n1n 9?[pT<ZQ8:>?] l 8:>3V M?O ] c } ] l~X cik OQX SaZ PqOP 8 XbOwv V M 9 P V M?O
O P OQn VW8:s O SaZ PqO} 8 X V MUXbOQn [ O Z PqOQP ZQ> X V M?O [ZQV OO ] OQn VW[ c > P @ O V=8:> OQn V OQX 8:>bV c n c ]: OQn V c [
6
−7
12
x 10
10
0nA
1nA
2nA
3nA
4nA
Early voltage fitting curve
8
IC/A
6
4
2
0
Early Voltage=7V
−2
−8
−6
−4
−2
0
2
4
6
^-K 8:j@i9?R [J OK FH D zLN
M?O n 9?[W[ J O }N>bOVJ€]:s c m ]:VjZQ@ B ONR nM ZQ[ [Z n"n OQV PWO P[W8 } P VW8:8V n1M P cQ9?d V Z n Z PWn m#XbO Q H F LNL M?d O ZQS?I=[WZQ8 n [WZQ] l V OQsX 9 ]:VP ZQ8:>?@ @O
kc
c c
c
8 P ZQS c 9?V 0H 8:> n [ O Z PqOQP { RwOQn VW8 c > x H xw| H,j c [ O c s O [ v ] c }NO [pI=ZQ[W] l s c ]:VZQ@ O ZQ] P c T O ZQ> P V M ZQVpV M?O
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n Z PWSan ZQc [ XbO OQX wy zzw6 yiiyx 6
6 , xix
ix6 L ZQCS?] yO 6 H z#}LNZM?P O 9 ZQPq[ OQO X Z H=P FcQZQd [ XO0O8 P#m O Q [ F O >bL V [ P O VW[WO 9 [ n P VWV9?[ OQ#m P Q cQF d L m#Q> F V Ln P Z PW{n "Xb| HOQX R€H >3V M 8 P V M?OQP 8 P"v
d c
c c
ZQ> XCP c v 8:> n [ O Z PqO V M?O ]\ZQV O [ZQ] n c ]: OQn V c [ n 9?[W[ O >bV } 8:V M [ OQP k OQn VpV c V M?O s O [J
VW8 n ZQ] c > O H LNM 8 P 8 P Z n c TUT c >~Z k?k [ c Z nM 9 PqOQX 8:> n 8:[ n 9?8:VpZ k?k ]:8 n ZQVW8 c > P cQd
#m Q F LP K [W[ 6 bv s R ^ H
K J€[W8:>?@ P 9?[W[ c 9?> X?P V M?O}NO ]:ZQ> X 8 P<n c >?> OQn V OQX V c @i[ c 9?> X H LNM 8 PU} 8:]
ZQS P c [WS M c ] OQP 8:> OQn V OQX d [ c T V M?O J }NO ]:N8:>bV c V M?OP 9?S P VW[ZQV O V c [ OQX 9 n"O V M?O
nM ZQ> n"O cQd ]\ZQV nM 8:>?@09 k H
LNM?OP VW[W9 n VW9?[ O 8 P T<Z XbO Z PNn c T k Z n VZ P kac PWP 8:S?] O V c 8:T k [ c s O ]\ZQ[W@ O ZQ> XpP T<ZQ]:
P 8:@i>aZQ] nM ZQ[Z n V O [W8 P VW8 n1P H
K n Z PWn c XbO jB R ^I L 8 P 8:> n c [ kac [ZQV OQX 8:>3V M?On"O ]:V c [ OQX 9 n"O V M?O I=ZQ[W] l
O P OQn V1H
R€> P c T O Z k?k ]:8 n ZQVW8 c > P"va#m Q F LP > O1OQX > c VS On Z PWn c XbOQX H LNM?O0#m Q F LP T<Z l ZQ] P c
PqM ZQ[ O V M?OP ZQT O @i9aZQ[ X [W8:>?@ P H L ZQS?] O H zP 9?TUT<ZQ[WM8 N OQX V M?O ZQ[ O Z P cQd V M?O siZQ[W8\ZQVW8 c > P
cQd #m Q F LP H
!G FH SD F,D H F OQP 8 XbOQP ZQ[W[Z l?P cQd m#Q F LP ZQ> X jB R ^I LP { XbO VZQ8:] OQX 8:> m=M Z k V O [ w|v V M?O [ O
ZQ[ O ZQ] P c 8 P c ]\ZQV OQX3XbO sb8 n"OQP 8:>~V M?O V OQP V nM 8 k P d ZQS?[W8 n ZQV OQX dgc [ O LbVW[Z n VW8:>?@V M?O 5VW[ZQ> P d O [ nM ZQ[Z n V O [W8 P VW8 n1P H LNM?O<K jR J K FD z
J }NO ]: k [ c n"OQPWP { XbO VZQ8:] OQX 8:>
RwOQn VW8 c > H w|} Z P 9 PqOQX ZQ> X V } c SaZQV nM?OQP cQd V OQP V nM 8 k P}NO [ O d ZQS?[W8 n ZQV OQX ZQ> X V M?O
k [ c n"OQPWP k ZQ[ZQT O V O [ P ZQ[ O ]:8 P V OQX 8:> K k?k O > X 8ML OQPNm ZQ> X<h [ OQP k OQn VW8:s O ] l H R€>UV M?O _a[ P V
SaZQV nMv V M?O [ O ZQ[ O 8 P c ]\ZQV OQXn Z PWn c XbOQX #m Q F LP} 8:V M @i9aZQ[ X [W8:>?@ P} 8:V M s O [WVW8 n ZQ]
O TU8:VWV O [ZQ[ O Z cQd H LNM?O V O [WTU8:>aZQ] P cQd V M 8 P#m Q F LP}NO [ ONn c >?> OQn V OQXX 8:[ OQn VW] l V c
V M?O RiB k 8:> P H R€>pV M?OPqOQn c > X SaZQV nMv V M?O [ O ZQ[ O 8 P c ]\ZQV OQX SaZQ[ O #m Q F LP { #m Q F LP
} 8:V M c 9?V n Z PWn c XbO jB R ^I LP|p} 8:V M s O [WVW8 n ZQ] O TU8:VWV O [0ZQ[ O Z cQd bv%z1y ,z1ybv
ZQ> X [ OQP k OQn VW8:s O ] lwvi}M 8 nM T O ZQ> P V M?O 8:[ K [ O KZ J€V c JqY O [W8 k M?O [ l { K QY | [ZQVW8 c P
ZQ[ O bvNz1y ZQ> X [ OQP k OQn VW8:s O ] l H LNM?OQPqO<#m Q F LPPqM ZQ[ O V M?OUP ZQT O V O [WTU8:>aZQ] P ZQ> X
ZQ[ O0PqO ] OQn V OQX S l V M?O VW[ZQ> P TU8 PWP 8 c ><@wZQV OQP H LNM?O [ O dgc [ Owv J } 8:[ O0PqO > PqO V OQnM >?8 f 9 O} Z P
[ OQf 9?8:[ OQX}M?O >T O Z P 9?[W8:>?@<V M?OQPqOU#m Q F LP H LNM?O [ O 8 P > c 8 P c ]\ZQV OQX jB R ^I LP 8:>
S c V M SaZQV nM?OQP"v c > O jB R ^I L 8:>%V M?O jB R ^I L ZQ[W[Z l} Z P-PqO ] OQn V OQX dgc [ O LbVW[Z n VW8:>?@
V M?O nM ZQ[Z n V O [W8 P VW8 n1P 8:><SaZQV nMx H
LNM?O dgc ]: c } 8:>?@ X ZQVZ } Z P T O Z P 9?[ OQX ZQ> X ZQ>aZQ] l N OQX 9 P 8:>?@~V M?O T O Z P 9?[ O T O >bV
Pql?P V O T XbO VZQ8:] OQX 8:> RwOQn VW8 c > H z H LNM?O%n 9?[W[ O >bV@wZQ8:> P ZQV X O8 P O [ O >bV=SaZ PqO%n 9?[W[ O >bV=] O s O ]{ d [ c T y :z V c z | cQd
SaZQ[ O #m Q F LP cQd X O8 P O [ O >bV P M8 N OQP=}NO [ O T O Z P 9?[ OQX HN{€^-8:@i9?[ O H 6 | H
x H LNM?O nM ZQ[Z n V O [W8 P VW8 n1P cQd V M?O0#m Q F LP d [ c T P c 9?[ n"O V c X [ZQ8:>Z P Z d 9?> n J
VW8 c > cQd ZQ> X }NO [ O T O Z P 9?[ OQX ZQ> X k ] c VWV OQX {€^-8:@i9?[ O H ZQ> X H z1yw| H LNM?OQPqO @i[Z k MaP0}NO [ O 9 PqOQX V c XbO V O [WTU8:> O V M?O @wZQV O s c ]:VZQ@ O [ O J
f 9?8:[ OQX dgc [ cik O [ZQVW8:>?@UZpjB R ^I L 8:> k 9?[ O S?8 kac ]\ZQ[T c XbO H
H LNM?O nM ZQ[Z n V O [W8 P VW8 n1P cQd V M?On Z PWn c XbOQX ZQ> X SaZQ[ O #
m Q F LPp} 8:V M
J c [ XbO [NSaZ PqO%n 9?[W[ O >bV=] O s O ] }NO [ O T O Z P 9?[ OQX ZQ> X k ] c VWV OQX {€^-8:@i9?[ O H ziz ZQ> X
H z1xw| H
H LNM?
O nM ZQ[Z n V O [W8 P VW8 n1P cQd jB R ^I LPU}NO [ O T O Z P 9?[ OQX ZQ> X k ] c VWV OQX
{€^-8:@i9?[ O H z w| H
H LNM?O VW[ZQ> P d O [ nM ZQ[Z n V O [W8 P VW8 n1P cQd n Z PWn c XbOQX ZQ> X SaZQ[ O #
m Q F LP cik O [ZQVW8:>?@
Z P jB R ^I LP}NO [ O T O Z P 9?[ OQX ZQ> X k ] c VWV OQX {€^-8:@i9?[ O H z w| H
%&*4-&/ A ,
/
LNM?O @wZQ8:> P {@$ 4 | cQd V M?O SaZQ[ O m#Q F LP=} 8:V M<X 8OP O [ O >bV P 8MN OQP=}NO [ O T O Z P 9?[ OQX
ZQ> X k ] c VWV OQX 8:>^-8:@i9?[ O H 6bH LNM?O @wZQ8:> } Z P T O Z P 9?[ OQX S l Z k?k ] l 8:>?@ X 8OP O [ O >bVSaZ PqO
n 9?[W[ O >bV P { | V c V M?OUPqO ] OQn V OQXXbO sb8 n"Owv S l _Lb8:>?@UV M?OpO TU8:VWV O [ZQ> Xn c ]: OQn V c [s c ]:VJ
ZQ@ OQP ZQV ZQ> X [ OQP k OQn VW8:s O ] l H R€V n ZQ>S O0PqO1O >V M ZQVV M?O @wZQ8:> cQd V M?Opm#Q F LP
8:> n [ O Z PqOQP Z Pn 9?[W[ O >bV=] O s O ] XbOQn [ O Z PqOQP H LNM 8 P 8 P T<ZQ8:>?] l0X 9 O V c V M?OM 8:@ M ] O s O ]?8:> OQn J
VW8 c > }M 8 nM} Z P-O L k ]\ZQ8:> OQX 8:> RwOQn VW8 c > H H x H K ]:V M c 9?@ M V M?On 9?[W[ O >bV-@wZQ8:> PqM c 9?] X S O
8:> XbO k O > XbO >bV cQd V M?OO TU8:VWV O [-ZQ[ O Z%Z P k [ OQX 8 n V OQX S l I f 9aZQVW8 c > x H bv V M?O @i[Z k M<PqM c }P
V M ZQVV M?O @wZQ8:> cQd #m Q F LC} 8:V M ]\ZQ[W@ O [ K QY3[ZQVW8 c 8 P ] c }NO [1H LNM 8 Pn ZQ>S OO L k ]\ZQ8:> OQX
S l V M?O d Z n VV M ZQVV M?O ]\ZQV O [ZQ]V c s O [WVW8 n ZQ] O TU8:VWV O [ZQ[ O Z0[ZQVW8 c XbOQn [ O Z PqOQPN}M?O > K QY
[ZQVW8 c 8 P 8:> n [ O Z P 8:>?@?H LNM?O [ O dgc [ Owv V M?O ]\ZQV O [ZQ] n 9?[W[ O >bV@wZQ8:> XbOQn [ O Z PqOQP H LNM?O [ OQP 9?]:V P
450
A/P ratio=6
A/P ratio=10
A/P ratio=34
400
350
300
β
250
200
150
100
50
0
−10
10
−9
10
−8
10
Base Current/A
−7
10
−6
10
^-{ K 8:@iQ9?Y [ |O [ ZQH 6VW8 =mH 9?[W[ O >bV@wZQ8:> P cQd SaZQ[ O m#Q F LP=} 8:V MUX 8OP O [ O >bV K [ O ZKJ€V c JqY O [W8 k M?O [ l
c
n c >b_a[WT5V M ZQVV M?O @wZQ8:> cQd V M?Om#Q F LP} 8:V M c 9?VS?9?[W8 OQX ]\Z lwO [ XbO k O > X?P ZQ] P c0c >V M?O
K QY [ZQVW8 c H L cc S?VZQ8:>UT<Z Lb8:Tp9?T]\ZQV O [ZQ]a@wZQ8:> v V M?O%P T<ZQ]: OQP V K QY[ZQVW8 c PqM c 9?] X S O
9 PqOQXv}M 8 nM T O ZQ> P V M?OpO TU8:VWV O [ PqM c 9?] X S O Z PWf 9aZQ[ O 8 d VW[W8\ZQ>?@i9?]\ZQ[%]\Z l c 9?V8 P > c V
kac PWP 8:S?] O H
A " ,
8
$ ,&8#(-&" #
/
^-8:@i9?[ O H UPqM c }P V M?O VW[ZQ> P d O [ nM ZQ[Z n V O [W8 P VW8 n1P d [ c T P c 9?[ n"O V c X [ZQ8:> cQd V M?O SaZQ[ O
m Q F LG} 8:V M TU8:>?8:Tp9?T O TU8:VWV O [ZQ[ O Z{ K QY,[ZQVW8 c<cQd w| 9?> XbO [ X 8OP O [ O >bV@wZQV O
#
s c ]:VZQ@ OQP H LNM?O}NO ]:{gSaZ PqOi| ZQ> X V M?OX [ZQ8:> }NO [ O S?8\Z PqOQX ZQV ZQ> XUy C[ OQP k OQn VW8:s O ] l
ZQ> X ZQ]:=V M?O T O Z P 9?[ O T O >wV P}NO [ O VZ wO > } 8:V M [ OQP k OQn VV c V M?O SaZ PqO s c ]:VZQ@ O H } Z PNPq}NO k V d [ c T y V c z GZQ> X V M?OX [ZQ8:> n 9?[W[ O >bV } Z P T O Z P 9?[ OQX dgc [ X 8OP O [ O >bV
@wZQV O s c ]:VZQ@ O HN^ c [] c } 3{ # |v V M?O0n 9?[Ws O 8 P Z0V l k 8 n ZQ]jB R ^I L c > Owv
−4
10
−5
10
−6
IC
10
−7
10
VGate=4.25
4.5
4.75
5.0
5.25
5.5
5.75
6
6.25
−8
10
−9
10
−0.4
−0.2
0
0.2
0.4
0.6
0.8
1
^-8:S@iH9?[ O H L [ZQ> P d O [ m=M ZQ[Z n V O [W8 P VW8 n1P d [ c T P c 9?[ n"O V c X [ZQ8:>Z P Z d 9?> n VW8 c > cQd %P J
VS=VE
6
S O @i8:>?>?8:>?@<8:>V M?OpP 9?S?V M [ OQPqM c ] X [ O @i8 c > ZQ> XO >bV O [ P V M?OUf 9aZ X [ZQVW8 n [ O @i8 c > Z P 8:> n [ O Z PqOQP HN7 c }NO s O [ v Z P V M?O 8:> n [ O Z PqOQP"v V M?O0n 9?[Ws OQP S OQn c T O 8:> X 8 P VW8:>?@i9?8 PqM ZQS?] Owv
}M 8 nM T O ZQ> P V M ZQVUV M?OX [ZQ8:> n 9?[W[ O >bV0> c ] c >?@ O [ XbO k O > X c >,V M?O @wZQV O s c ]:VZQ@ O H
LNM 8 P T c XbO 8 P V M?O k 9?[ O S?8 kac ]\ZQ[%T c XbO +H R€> k 9?[ O S?8 kac ]\ZQ[%T c XbOwv V M?OUn 9?[Ws OQP}NO [ O
O L k OQn V OQX V c S O%P VW[ZQ8:@ M V=]:8 > OQP 8:>pV M?O ] c @wZQ[W8:V M TU8 n k ] c V1H=7 c }NO s O [ viX 9 O V c V M?OM 8:@ M
] O s O ]?8:> OQn VW8 c > v V M?O1l ] O s O ] c P }M?O > !<[ O Z nM?OQP=PqO s O [ZQ] H^?[ c T V M?O @i[Z k Mv V M?O
s c ]:VZQ@ O [ OQf 9?8:[ OQX V c O >bV O [S?8 kac ]\ZQ[pT c XbO 8 P Z k?k [ c Lb8:T<ZQV O ] l 0H 7 c }NO s O [ v 8:>
c [ XbO [V c TU8:>?8:TUM8 N O V M?O [ OQP 8 X 9aZQ]@wZQV O%O P OQn V v V M?O @wZQV O s c ]:VZQ@ OQPN}NO [ OPqO VZQV GV c
8:><V M?O dgc ]: c } 8:>?@ O L k O [W8:T O >bV P H
^-8:@i9?[ O H z1yPqM c }P V M?O VW[ZQ> P d O [ nM ZQ[Z n V O [W8 P VW8 n1P d [ c T P c 9?[ n"O V c X [ZQ8:> cQd V M?O
SaZQ[ O #m Q F L Z P Z d 9?> n VW8 c > cQd } 8:V M pH LNM 8 P @i[Z k M~PqM c }P
M c } V M?OpXbO sb8 n"O0nM ZQ>?@ OQX d [ c T P VW[ c >?@8:>bs O [ P 8 c >V c }NO Z  8:>bs O [ P 8 c >ZQ> X V M?O >V c
−3
10
Strong Inversion
−4
10
Bipolar
−5
10
−6
IC
10
−7
10
Vs=4.6
5.0
5.4
5.6
5.8
−8
10
Weak Inversion
−9
10
−10
10
−2.5
−2
−1.5
−1
−0.5
0
VB−VG
0.5
1
1.5
2
2.5
^-8:S0@iJ 9? [ O@?H H z1yL [ZQ> P d O [ m=M ZQ[Z n V O [W8 P VW8 n1P d [ c T P c 9?[ n"O V c X [ZQ8:>CZ P Z d ?9 > n VW8 c > cQd
S?8 kac ]\ZQ[9?> XbO [ X 8OP O [ O >bVS?8\Z PqOQP H LNM 8 P @i[Z k M 8 Pn c > P 8 P V O >bV } 8:V M ^-8:@i9?[ O H x QZ > X
O L k ]\ZQ8:> OQX 8:> XbO VZQ8:]8:> RwOQn VW8 c > H x H
(= % ,0 $!-& %&*4-&/&
LNM?O SaZQ[ O m#Q F LP%} 8:V M s O [WVW8 n ZQ] O TU8:VWV O [ZQ[ O Z P cQd Qv=z1y ~z1y Qv ZQ> X
}NO [ O V OQP V OQX H LNM?O nM ZQ[Z n V O [W8 P VW8 n1P cQd V M?O m#Q F LPU} 8:V M
TU8:>?8:T09?T O TU8:VWV O [ZQ[ O Z<ZQ[ OpPqM c } >8:>^-8:@i9?[ O H ziz H LNM?O0O TU8:VWV O [ZQ> X @wZQV O0}NO [ O
S?8\Z PqOQX ZQV ZQ> X bz C[ OQP k OQn VW8:s O ] l H h 8OP O [ O >bV-SaZ PqOn 9?[W[ O >bV P-}NO [ O V M?O >pZ k?k ]:8 OQX
} 8:V M V M?O=n c ]: OQn V c [s c ]:VZQ@ ONPq}NO1O k 8:>?@ d [ c T y 3V c pH LNM?ONn c [W[ OQP kac > X 8:>?@ n c ]: OQn V c [
s c ]:VZQ@ OQP ZQ> Xpn 9?[W[ O >bV P-}NO [ O V M?O >pT O Z P 9?[ OQX H€R V } Z P dgc 9?> X V M ZQV=V M?O I=ZQ[W] l s c ]:VZQ@ O
} Z P s O [ l ] c }%v Z k?k [ c bL 8:T<ZQV O ] l pH LNM 8 PpP 9?@i@ OQP V P V M ZQV<Z n Z PWn c XbOn 8:[ n 9?8:V08 P
[ OQf 9?8:[ OQX dgc [ k [Z n VW8 n ZQ]N9 PqO H L ZQS?] O H xPqM c }P V M?O @wZQ8:> P ZQ> X I=ZQ[W] l s c ]:VZQ@ OQP ZQV
z n 9?[W[ O >bV] O s O ] P cQd V M?O 8 P c ]\ZQV OQXm#Q F LP dgc [ n c T k ZQ[W8 P c >H
/
−7
12
x 10
0nA
1nA
2nA
3nA
4nA
10
GPC-1850
6.51V
5V
+ 2
− IC
2400
8
IC/A
6
4
2
6517 A
V I2C
0
I2C
−2
0
0.5
1
1.5
2
2.5
VCE/V
3
3.5
4
4.5
5
+
−
^T-8:O@i>b9?V [ O PqO VW9H zizU{g[WL8:@ [M ZQV > | P H d O [ nM ZQ[Z n V O [W8 P VW8 n1P cQd SaZQ[ Om#Q F LP {g] O d V | ZQ> X V M?O T O Z P 9?[ O J
k
iy
#
m
Q
G
L
z
#
m
Q
L
x
#
m
Q
L
F
F
F
K =[ O O [WZ%VW8 V n ZQ]Y IO TU[W8 8:VWM?V O O [ [ Ul K e [ OZQZVW8 z1yz1zy 1y Q ZQV O [ZQ]-c m I9?TU[W[ 8:O VW>bkV OV[ EK ZQ[ 8:O> Z e cZQVW8 c x Qy z z1
y 66
H H Hz I=ZQ[W] l c ]:VZQ@ O
L ZQS?] O H x Nm=M ZQ[Z n V O [W8 P VW8 n1P cQd #m Q F LP cQd X 8OP O [ O >bV P 8MN OQP H
/+
$ % ,0 $+(%&,
! <%&*4-&/
LNM?O VW[ZQ> P d O [ nM ZQ[Z n V O [W8 P VW8 n1P cQd Z n Z PWn c XbOQX m#Q F L } 8:V M s O [WVW8 n ZQ] O TU8:VWV O [ZQ[ O Z
cQd ZQ> X V M?O T O Z P 9?[ O T O >bV PqO VW9 k ZQ[ OPqM c } > 8:>~^-8:@i9?[ O H z1x HE€R V n ZQ>~S O
/
PqO1O >V M ZQV%9?> XbO [V M?O S?8 kac ]\ZQ[ cik O [ZQVW8:>?@ n c > X 8:VW8 c > v V M?O jB R ^I L cik O [ZQV OQP}NO ]:
Z P ZpS?8 kac ]\ZQ[ XbO sb8 n"O H LNM?O } Z PPqO VV c 5ZQ> X V c bz pH LNM?O0O TU8:VWV O [
s c ]:VZQ@ O%} Z P _ L OQX ZQV } 8:V M V M?O%n c ]: OQn V c [Ns c ]:VZQ@ O%Pq}NO1O k 8:>?@ d [ c T y V c ZQV
X O8 P O [ O >bVsiZQ]:9 O cQd =H LNM?O @wZQ8:>ZQVSaZ PqO0n 9?[W[ O >bV] O s O ] cQd Gc [ XbO [8 P ZQS c 9?V xiy
}M 8 nM ZQ@i[ O1OQP} 8:V M c 9?[ k [ O sb8 c 9 P T O Z P 9?[ O T O >bV cQd V M?O @wZQ8:>Hj c [ O c s O [ vb} 8:V M V M?O
−7
12
Transfer Characteristic of CLBT’s with Vgs: 6.51V and Vcas = 3V
x 10
GPC-1850
6.51V
10
8
2400
I2C
3V
5V
+ 2
− IC
IC/A
6
4
2
0
−2
−4
early voltage = 215V
0
0.5
1
1.5
2
2.5
VEC/V
3
3.5
6517 A
0.0nA
1nA
2nA
3nA
4nA
Fitted curve
4
4.5
I2C
5
V I2C
+
−
^-P 9?8:@i[ O 9?T [ O O >b V H z1PqxO VW9 L k [ZQ{g>[W8:P @ d MO [V | nH M ZQ[Z n V O [W8 P VW8 n1P cQd n Z PWn c XbOQX~m#Q F LP {g] O d V | ZQ> X V M?O T O ZKJ
bz
n Z PWn c XbO jB R ^I Lvb}NO%n ZQ><Z nM 8 O s O I=ZQ[W] l c ]:VZQ@ O Z P ]\ZQ[W@ O Z Pxbz v T<Z  8:>?@%8:V
P 9?8:VZQS?] O dgc [T<ZQ> l Z k?k ]:8 n ZQVW8 c > P H
/
/+
$ T% ,0$. =
/
LNM?O VW[ZQ> P d O [ nM ZQ[Z n V O [W8 P VW8 n1P cQd V M?O jB R ^I LG}NO [ O dgc 9?> X S l _Lb8:>?@<V M?O @wZQV O
s c ]:VZQ@ O ZQV X O8 P O [ O >bV<] O s O ] P ZQ> XPq}NO1O k 8:>?@ 3V c T O Z P 9?[ O V M?O X [ZQ8:> n 9?[W[ O >bV
{€^-8:@i9?[ O H z w| H R 8:> n"O V M?O [ O}NO [ O Z0]\ZQ[W@ O kac V O >bVW8\ZQ] X [ cik Z n [ c PWP V M?O VW[ZQ> P TU8 PWP 8 c >
@wZQV O cQd V M?O<PqO ] OQn V OQXXbO sb8 n"O ZQV M 8:@ M3X [ZQ8:> n 9?[W[ O >bV] O s O ] P"v V M?O } Z P0PqO > PqOQX
−5
16
VI transfer characteristic of NMOS (Vgs from 0V to 4V)
x 10
14
12
10
Ids
8
6
4
2
0
−2
0
0.5
1
1.5
2
2.5
Vds
3
3.5
4
4.5
5
A
I2C V
2400
+
−
+
− 6517A
^-PqO 8:VW@i9 9?[ O {gS H z VWV -T L [| ZQH > P d O [ m=M ZQ[Z n V O [W8 P VW8 n1P cQd jB R ^I L {gV cik | ZQ> X V M?O T O Z P 9?[ O T O >bV
k c c
ix
ZQVV M?O<PqO > PqO kac [WV dgc [0V M?O k ] c V P H KP Z<[ OQP 9?]:V v V M?O n c 9?] X > c V[ O Z nM ZQV
M 8:@ Mn 9?[W[ O >bV] O s O ] P=O s O ><V M c 9?@ M V M?O S c ZQ[ X { XbOQPWn [W8:S OQX 8:> RwOQn VW8 c > H i|N} Z P
k [ c @i[ZQTUT OQX V c Z k?k ] l 0H
/+
$ % ,0 $!%&,
!
2-&&%&*4-&/&
=@
<, = /&
LNM?O VW[ZQ> P d O [ nM ZQ[Z n V O [W8 P VW8 n1P cQd V M?O SaZQ[ O ZQ> Xpn Z PWn c XbOQX m#Q F LP=} 8:V M s O [WVW8 n ZQ]
O TU8:VWV O [ZQ[ O Z cQd cik O [ZQVW8:>?@<Z P jB R ^I LP}NO [ O ZQ] P c T O Z P 9?[ OQX ZQ> X V M?O
T O Z P 9?[ OQX0PqO VW9 k ZQ[ O%PqM c } >U8:>U^-8:@i9?[ O H z ZQ> X H z H Q 8 wO V M?On Z PqO 8:>UT O Z P 9?[W8:>?@
V M?O nM ZQ[Z n V O [W8 P VW8 n1P cQd jB R ^I Lv Z J } 8:[ OPqO > PqO V OQnM >?8 f 9 OU} Z P 9 PqOQX
dgc [SaZQ[ O m#Q F LP H7 c }NO s O [ v?P 8:> n"O V M?Opn Z PWn c XbOQX } Z P 8 P c ]\ZQV OQX<} 8:V M V M?O
V O [WTU8:>aZQ] Pn c >?> OQn V OQXX 8:[ OQn VW] l V c V M?O k 8:> P cQd V M?OUnM 8 k P"v J } 8:[ OUPqO > PqO V OQnM >?8 f 9 O
/
} Z P > c V[ OQf 9?8:[ OQX H LNM?O [ O dgc [ O V M?O }NO [ O V M?OP ZQT O Z P V M?O Z k?k ]:8 OQX s c ]:VZQ@ OQP H
−4
3
x 10
2.5
+5V
2
+5V
IDS/A
1.5
Keithley
+ 2400
−
1
0.5
Keithley
A
6517
0
I2C
−0.5
0
0.5
1
1.5
2
2.5
VDS/V
3
3.5
4
4.5
5
V I2C
+
−
^- 8:@i9?[d [O c T H zy L V [c ZQ> P5d O [ {g] nO Md V ZQ| [ZZQn> V X O [WV 8 M?P VWO 8 n1T P OcQZd P Sa9?ZQ[ [O O%T m#O >bQ V F PqL O VWci9 k k O [{g[WZQ8:VW@ 8:M>?V@0| HZ P jB R ^ I L ZQV
+5V
+5V
−4
3
x 10
2.5
2
Keithley
+ 2400
−
IDS/A
1.5
1
Keithley
A
6517
0.5
I2C
0
−0.5
0
0.5
1
1.5
2
2.5
VDS/V
3
3.5
4
4.5
+
−
5
^-j8:@i9?B [ R O ^I LH z ZQ V L [ZQd > [ Pc d T O [ y nM ZQV c[Z n 5V O [W{g8 ]P O VWd 8 V n1| P ZQ>cQdX V n M?Z O PWn T c XbO OQZ XP 9?[ O#m T Q OF >bL V PqO ciVWk 9 O k [ZQ{gVW[W8:8:>?@ @M V | ZH P
HG
LNM 8 PnM Z k V O [ k [ OQPqO >bV OQX V M?OP VW[W9 n VW9?[ O ZQ> X k [W8:> n 8 k ] OQP cQd V M?O cik O [ZQVW8 c > cQd m#Q F LP H
LNM?Oh%m T c XbO ] M Z P S O1O ><[ O sb8 O1}NOQX ZQ> X V M?O [ OQP 8 X 9aZQ]@wZQV OO P OQn VZQ> X T<ZQ8:> nM ZQ[J
Z n V O [W8 P VW8 n1P}NO [ OX 8 PWn 9 PWPqOQX H@R€V } Z P dgc 9?> X V M ZQVpV M?O I=ZQ[W] l s c ]:VZQ@ O cQd Z m#Q F L
n ZQ>US O Z P ] c } Z P 0H=7 c }NO s O [ vw#m Q F LP=M Z1s O S O VWV O [ k O [ dgc [WT<ZQ> n"O 8:>p] c },n 9?[W[ O >bV
] O s O ] cik O [ZQVW8 c > P ZQ> X 8:> d Z n V v 8:V P @wZQ8:> n ZQ>0S O Z PM 8:@ M Z P iyiy ZQV z SaZ PqOn 9?[W[ O >bV1H
m Z PWn c XbOQX#m Q F LP ZQ> X @i9aZQ[ X [W8:>?@ P}NO [ O 8:>bVW[ c X 9 n"OQX V c0d Z n 8:] 8:VZQV O V M?O cik O [ZQVW8 c >
cQd #m Q F LP 8:> k [Z n VW8 n ZQ] n 8:[ n 9?8:V P H LNM?O T O Z P 9?[ OQX GVW[ZQ> P d O [ nM ZQ[Z n V O [W8 P VW8 n1P cQd
m#Q F LP"v jB R ^I LP ZQ> Xpm#Q F LP cik O [ZQVW8:>?@Z P jB R ^I LP-}NO [ O k [ OQPqO >bV OQX
ZQ> X 8:V } Z PPqM c 9?] X V M ZQV #m Q F LPO L M 8:S?8:V OQXpM 8:@ M?O [@wZQ8:>@{ $&% iyiy ZQV Gz |
ZQV=] c }~n 9?[W[ O >bV] O s O ] P H LNM?On Z PWn c XbOQXp#m Q F L~M Z P ZT O Z P 9?[ OQX I=ZQ[W] l s c ]:VZQ@ O ]\ZQ[W@ O [
V M ZQ> xiyiy }M 8 nM 8 P ZU]\ZQ[W@ O 8:T k [ c s O T O >bV c s O [V M?O SaZQ[ OU#m Q F LG} 8:V M ZQ> I=ZQ[W] l
s c ]:VZQ@ O cQd 0H
! FG IF R€>~V M 8 PnM Z k V O [ v V M?O<XbOQP 8:@i> cQd V M?O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP V OQP V nM 8 k 8 P _a[ P V k [ O J
PqO >bV OQX H@€R > c [ XbO [pV c V OQP Vp]\ZQ[W@ O >b9?TpS O [ cQd jB R ^I LP ZQ> X,m#Q F LP c >CZ nM 8 k
} 8:V M ]:8 TU8:V O1X k 8:> P"v V M?OpXbO sb8 n"OQP ZQ[ O c [W@wZQ>?8MN OQX 8:>ZQ[W[Z l?P ZQ> XPqM 8 d V%[ O @i8 P V O [ P ZQ> X
VW[ZQ> P TU8 PWP 8 c > @wZQV OQP ZQ[ O 9 PqOQX dgc [ PqO ] OQn VW8:>?@<8:> X 8:sb8 X 9aZQ] XbO sb8 n"OQP dgc [0V OQP VW8:>?@?H LNM?O
P VW[W9 n VW9?[ OQP cQd V M?O V OQP V nM 8 k } 8:] bS OO L k ]\ZQ8:> OQX 8:> XbO VZQ8:]€H LNM?O >0V M?OPqO VW9 k P ZQ> X k [ c J
n"OQX 9?[ OQP dgc [%V OQP VW8:>?@<V M?O TU8 P T<ZQV nM?O1P cQd m#Q F LP"v jB R ^I LP"v ZQ> X m#Q F LP
cik O [ZQVW8:>?@,Z P jB R ^I LP"v ZQ[ O @i8:s O >H LNM?O TU8 P T<ZQV nM?OQP cQd O Z nM V l k O cQd V M?O
XbO sb8 n"OQP 8:> O s O [ l<nM 8 k ZQV X 8OP O [ O >bV n 9?[W[ O >bV] O s O ] PN} 8:] S O k [ OQPqO >bV OQX H K V M [ O1O0X 8OJ
T O > P 8 c >aZQ] k ] c V cQd V M?OX 8 P VW[W8:S?9?VW8 c > cQd V M?On 9?[W[ O >bV8:> O Z nMUXbO sb8 n"O ZQ[W[Z l ZQV z1yiy ] O s O ]?8:>UZ k ZQ[WVW8 n 9?]\ZQ[ nM 8 k } 8:] aS O%PqM c } > dgc [ f 9aZQ]:8 VZQVW8:s O ZQ>aZQ] l?P 8 P cQd V M?On ZQ9 PqOQP cQd
TU8 P T<ZQV nM?OQP 8:>V M ZQV XbO sb8 n"O H^-8:>aZQ]: lwvXbO sb8 n"OQP ZQ[ O k ZQ8:[ OQX 9 k Z Pn 9?[W[ O >bVTU8:[W[ c [ P
ZQ> X V M?O 8:[NTU8 P T<ZQV nM?OQP ZQ[ O0n ZQ] n 9?]\ZQV OQX ZQ> Xn c T k ZQ[ OQX H
C!SIFSD
LNM?O0n 9?[W[ O >bVT<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd m#Q F LP ZQ> X jB R ^I LP d ZQS?[W8 n ZQV OQX<} 8:V M Z
P VZQ> X ZQ[ X3m jB R k [ c n"OQPWP%}NO [ O<n c T k ZQ[ OQX H LNM?O k [ c n"OQPWP0nM c PqO > } Z P V M?O<K jR J
K FD z
J }NO ]: k [ c n"OQPWP"v 8:> }M 8 nM c >?] l m#Q F LPpn c 9?] X S O d ZQS?[W8 n ZQV OQX H
R 8:> n"O jB R ^I LP ZQ[ O T c [ On c TUT c >8:> n 8:[ n 9?8:V XbOQP 8:@i><ZQ> X<PqM c } S O VWV O [NT<ZQV nM J
8:>?@ k [ cik O [WVW8 OQP V M ZQ> jB R ^I LP"v jB R ^I LP ZQ[ O V OQP V OQX ZQ> X~n c T k ZQ[ OQX} 8:V M
m Q F LP Q 7 m 6 H=B d n c 9?[ PqOwv V M?O jB R ^I LP > O1OQX V c S O cQd P 8:TU8:]\ZQ[ P M8 N O Z P
#
V M?O#m Q F LP dgc [Z d ZQ8:[ n c T k ZQ[W8 P c > P 8:> n"O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQPNXbO k O > XUM?O Z1sb8:] l c >
V M?O ]\Z l c 9?VZQ[ O ZbH LNM?O #m Q F LPN}NO [ O ZQ] P cpcik O [ZQV OQX Z P jB R ^I LP ZQ> X V M?O 8:[
T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP%}NO [ O V OQP V OQX H LNM?O Q Z } cQd K [ O Z } Z P V M?O >~Z k?k ]:8 OQX V c V M?O
jB R ^I LPNP c V M ZQV=V M?On 9?[W[ O >bVT<ZQV nM 8:>?@ k [ cik O [WVW8 OQP S O V }NO1O >0V M?O jB R ^I LP"v
jB R ^I LP ZQ> X #m Q F LPn c 9?] X S O0n c T k ZQ[ OQX H
KP T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP ZQ[ OP V c nM Z P VW8 n k [ c n"OQPWPqOQP"v Z]\ZQ[W@ O >b9?TpS O [ cQd 8 XbO >bVW8 n ZQ]
XbO sb8 n"O > O1OQX V c S O d ZQS?[W8 n ZQV OQX V c @ O V P VZQVW8 P VW8 n ZQ]: lP 8:@i>?8`_ n ZQ>bV X ZQVZbH ^-8:@i9?[ O H z
PqM c }P V M?O S?] c nX 8\ZQ@i[ZQT cQd V M?O V OQP V nM 8 k H LNM?O [ O ZQ[ O V } c z z V OQP V%ZQ[W[Z l?P"v
Base Force
Base Sense
Vertical
Shift Bit
Drains
Gates
Transmission gate array for Base
Vertical Shift Registers
Transmission gate array for Gate
DUTs array 2
15x15 NMOS
gate area = 35x48
Drain
Vcas
Vsubstrate=0V
DUTs array 1
15x15 pnp CLBT
Vertical Emitter area = 6x6
Sources(Force)
Sources(Sense)
Transmission gate array for
Source
Transmission gate array for
Emitter
Emitter Force
Emitter Sense
Horizontal
Shift Bit
Horizontal Shift Registers
Vertical Shift Registers
^-{€ZQ8:[W@i[9?Z [ lO z% H} z ZP L T cick X 8`P _ VW[WOQ9 X n 8:VW><9?[ V O M?OcQd PqOQV n M?c O > X _a[ SaP ZQVUV nSaMZQ|V HnM T<ZQV n M :8 >?@ k [ cik O W[ VW8 OQP V OQP V nM 8 k P
-^ZQ> 8:@iX 9?[ O Rb e H xZQ=[ LNO M?V M?O O%k MM cc [WV 8Mc N TUc >b8 nV[ZQc ]-@iZQ[> Z Xk M s OcQ[Wd VWV8 nM?ZQO ] V PqOQM P 8 Vd VZQ[[WO[Z@il?8 P P V O cQ[ d P V [M?OQOP k PqOQOQnn cVW8:> s X O ] Sal HZQV nM H=7 Rbe
@i8:sb8:>?@ZV c VZQ] cQd xixhO sb8 n"OQPr > XbO [ LOQP VU{ hrLP| 8:> O Z nM ZQ[W[Z l H K [W[Z l3z 8 P
V M?O ZQ[W[Z l cQd n Z PWn c XbOQX #m Q F LPp} 8:V M @i9aZQ[ X [W8:>?@ P0} 8:V M TU8:>?8:T09?T#s O [WVW8 n ZQ]
O TU8:VWV O [NZQ[ O Z cQd { w| { y 6 | H LNM ZQVT O ZQ> P V M?O0K [ O KZ J€V c JqY O [W8 k M?O [ l
{ K QY | [ZQVW8 c { RwOQn VW8 c > H H w| 8 P H K [W[Z l<xpn c >bVZQ8:> P jB R ^I LP} 8:V M @wZQV O ZQ[ O Z
cQd z 6 y { 6 | 1v?}M 8 nM [ OQP 9?]:V P 8:> P 8:TU8:]\ZQ[ c s O [ZQ]: n"O ]:a]\Z l c 9?VZQ[ O ZpZ P V M ZQV cQd
V M?O0#m Q F LP H
LNM?O ZQ[W[Z l?P=M Z1s O V M?O 8:[=V O [WTU8:>aZQ] P=n c >?> OQn V OQX V c V M?O k 8:> P cQd V M?O%nM 8 k 8:> XbO k O 0> J
XbO >bVW] l ZQ> Xv V M 9 P"v c V M?O [ZQ[W[Z l?P} c 9?] X > c V%S O KZ P OQn V OQX}M?O >ZQ>~ZQ[W[Z l 8 P 9?> XbO [
V OQP VW8:>?@?H LNM?O [ O ZQ[ O VW[ZQ> P TU8 PWP 8 c >@wZQV O ZQ[W[Z l?P c >V M?O S c 9?> X ZQ[W8 OQP cQd V M?O V OQP V%ZQ[ J
[Z l?P Z P0PqM c } >H LNM?O 8:> k 9?V P 8:@i>aZQ] P0P 9 nM Z P @wZQV OwvNP c 9?[ n"Owv=X [ZQ8:> vO TU8:VWV O [ v SaZ PqO
s c ]:VZQ@ OQP"vaO V n H cQd ZQ>ZQ[W[Z l ZQ[ O Z k?k ]:8 OQX V c ZQ]:-8:> k 9?V P cQd V M?O VW[ZQ> P TU8 PWP 8 c ><@wZQV O cQd
V M ZQVZQ[W[Z l H LNM?O [ O ZQ[ OpPqM 8 d V[ O @i8 P V O [ P [W9?>?>?8:>?@ M c [WM8 N c >bVZQ]: l ZQ> X s O [WVW8 n ZQ]: l H LNM?O
PqM 8 d VW8:>?@S?8:V P ZQ[ O 9 PqOQX V c n c >bVW[ c ]?V M?O VW[ZQ> P TU8 PWP 8 c >@wZQV O ZQ[W[Z lwv V M [ c 9?@ Mp}M 8 nM V M?O
8:> k 9?V=s c ]:VZQ@ O ZQ> XUn 9?[W[ O >bV n c 9?] X k Z PWP V c V M?O%hrLP H K V=ZQ> l VW8:T Owv c >?] l c > OM c [ J
8MN c >bVZQ]?VW[ZQ> P TU8 PWP 8 c >0@wZQV O ZQ> X c > O s O [WVW8 n ZQ]bVW[ZQ> P TU8 PWP 8 c >0@wZQV O} c 9?] X S OO >aZQS?] OQXv
P c v c >?] l c > OhrL,} c 9?] X S O V OQP V OQX ZQVZQ> l VW8:T O} 8:V M c V M?O [ P S O 8:>?@p8 P c ]\ZQV OQX H
SI NL M?O V OQnM > c ] c @ lnM c PqO > dgc [V M?O d ZQS?[W8 n ZQVW8 c > } Z P V M?OUK jR J K FD z
d O ZQVW9?[ O
P 8MN O k [ c n"OQPWP H LNM 8 P%} Z P ZQ> J }NO ]: m jB R k [ c n"OQPWP} 8:V M x T O VZQ]]\Z lwO [ P"v-x kac ] l
]\Z lwO [ P ZQ> X ZQ>DY=D cik VW8 c >H LNM?O%XbOQP 8:@i><[W9?] OQP dgc ]: c }NOQXp}NO [ OR?m jB R [W9?] OQP=} 8:V M
Cy 6 H LNM?OnM 8 k XbOQP 8:@i> P=}NO [ O%P 9?S?TU8:VWV OQX V c R m S?[ c wO [ v jB R R Rav V } c VW8:T OQP
dgc [%V } c SaZQV nM?OQP cQdNd ZQS?[W8 n ZQVW8 c >+H R€>V M?OpPqOQn c > X SaZQV nMv V M?OUXbOQP 8:@i> cQd V M?OUm#Q F L
ZQ[W[Z l,} Z P T c X 8`_ OQX { XbO VZQ8:] OQX 8:> RwOQn VW8 c > H H xw| H LNM?O k [ c n"OQPWP k ZQ[ZQT O V O [ P cQd
V M?O _a[ P V%ZQ> XPqOQn c > X SaZQV nM?OQP ZQ[ O @i8:s O >8:> K k?k O > X M8 L m ZQ> Xh [ OQP k OQn VW8:s O ] l H R€>
O Z nM SaZQV nMv UL 8:> l J m=M 8 k P} 8:V MP M8 N O cQd x Jx xJx }NO [ O d ZQS?[W8 n ZQV OQX H LNM?O
P 9?S P VW[ZQV O} Z PP VZQ[WV OQXU} 8:V M Y JqFN9?]  QY JqI k 8-V l k O%} 8:V M Z0V c VZQ] cQd z T<Z Pq ] O s O ] P H
Q 8:@ M VW] lUX cik OQXUX [ZQ8:> P { Qhh%|=} Z P ZQ] P c 8:> n ]:9 XbOQX dgc [8:T k [ c s OQX [ O ]:8\ZQS?8:] 8:V l ZQ@wZQ8:> P V
M c V n ZQ[W[W8 O [ XbO @i[Z X ZQVW8 c > K j R H KPP 9?@i@ OQP V OQX S l jB R R Rav V M?O TU8:>?8:T09?T nM ZQ>?> O ]
} 8 X V M~PqM c 9?] X > c V0S O v Z P 8:> c V M?O [ R?m jB R [W9?] OUPqO V P"v S?9?V0[ZQV M?O [ H LNM 8 P
XbOQP 8:@i> [W9?] OpM Z P S O1O > dgc ]: c }NOQX V M [ c 9?@ M c 9?VpV M?OUXbOQP 8:@i> LNM?O H LNM 8 P V OQnM > c ] c @ l
} Z P0nM c PqO > S OQn ZQ9 PqO cQd 8:V P Z1siZQ8:]\ZQS?8:] 8:V l ZQ> X [ O Z P c >aZQS?] On c P V1Hj K !E R m H y} Z P
9 PqOQX V c ]\Z l c 9?V c 9?VZQ]:V M?On 8:[ n 9?8:V P H
SD SDF BG,G,H D
/
=
/ NL M?O V OQP VW8:>?@ P VW[W9 n VW9?[ O cQd V M?O jB R ^I L ZQ[W[Z l dgc ]: c }NOQX V M?OP ZQT OP VW[W9 n VW9?[ O k [ c J
kac PqOQX S l Q H=Y c [WVWT<ZQ>?> Y Q t 6 H LOQP VW8:>?@ZQ[W[Z l~XbOQP 8:@i>~8 P ZSaZQ]\ZQ> n"O S O V }NO1O >
k 8:> n c > P 9?T k VW8 c ><ZQ> X Z n1n 9?[Z n"l H LNM?OP VW[W9 n VW9?[ O%PqM c } ><8:><^-8:@i9?[ O H 8 P ZV OQP VW8:>?@
T<ZQVW[WM8 L cQd jB R ^I LP H LNM?OpX [ZQ8:> P cQd ZQ]:-V M?O jB R ^I LP ZQ[ Opn c >?> OQn V OQX V c Z
n c TUT c > X [ZQ8:>UV O [WTU8:>aZQ]{ ( i| cQd V M?O T<ZQVW[W8MLH LNM?O @wZQV OQP cQd V M?O jB R ^I LP
cQd V M?OP ZQT On c ]:9?TU>ZQ[ O0n c >?> OQn V OQX V c @ O V M?O [V c V M?O c 9?V k 9?V cQd V M?O VW[ZQ> P TU8 PWP 8 c >
@wZQV O cQd V M ZQV n c ]:9?TU>H LNM?O ><ZQ]:V M?O 8:> k 9?V P cQd V M?O%n c ]:9?TU>0VW[ZQ> P TU8 PWP 8 c >U@wZQV OQP ZQ[ O
n c >?> OQn V OQX V c @ O V M?O [V c V M?On c TUT c >p@wZQV O 8:> k 9?V%{ i| H : ZQ> X : ZQ[ O V M?O
Gates
6
Drains
Sources(Force)
SG1
SG2
SG2
SG1
Sources(Sense)
SS1
M1
SS1
M3
SS1
SS1
SS2
M2
M4
SS2
SS2
SS2
^-ZQ> 8:@iX 9?[ O j B H R N^R I 8:T L k V ]:OQ8`_ P VOQX P VW [W9jn BVW9?R [ ^O I k L[ cikaV OQc P PqV OQX P VW[WS 9 l n VWQ 9?Ha[ YO c ]\Z[WVWl T<c 9?ZQV >?}> 8:V Y M Q t 6 0 H hrLP {g] O d V |
c 9?V k 9?V P cQd V M?OPqM 8 d V0[ O @i8 P V O [ n c >bVW[ c ]: 8:>?@V M?O VW[ZQ> P TU8 PWP 8 c >~@wZQV O cQd n c ]:9?TU> 1H
A M?O > : 8 PM 8:@ Mv V M?OUn c [W[ OQP kac > X 8:>?@VW[ZQ> P TU8 PWP 8 c >@wZQV Op} c 9?] X S O VW9?[W> OQX c >
ZQ> X S OQn c T O ] c } 8:T k OQX ZQ> n"O H LNM?O >V M?O 8:> k 9?V@wZQV O S?8\Z Pn c 9?] X S O Z k?k ]:8 OQX c >ZQ]:
V M?O @wZQV OQP cQd V M?O jB R ^I LP 8:>V M ZQV n c ]:9?TU>H LNM?O @wZQV OQP cQdc V M?O [ n c ]:9?TU> P} c 9?] X
S O k 9?]: OQX V c @i[ c 9?> Xv ZQ> X V M 9 P"v ZQ[ O%n 9?V c PH R 8:> n"O V M?O [ O 8 P=OQPWPqO >bVW8\ZQ]: l > c n 9?[W[ O >bV
c } 8:>?@V M [ c 9?@ M V M?O VW[ZQ> P TU8 PWP 8 c >@wZQV Owv V M?O s c ]:VZQ@ OQP ZQV%V M?O 8:> k 9?VZQ> X c 9?V k 9?V
cQd V M?O VW9?[W> OQX J c >3VW[ZQ> P TU8 PWP 8 c >~@wZQV O} c 9?] X S O V M?OP ZQT O H K P 8:TU8:]\ZQ[ PqO ] OQn VW8 c >
PWnM?O T O 8 P 9 PqOQX dgc [NV M?OP c 9?[ n"O V O [WTU8:>aZQ] P} 8:V M : ZQ> X : Z P V M?O c 9?V k 9?V cQd V M?O
PqM 8 d V[ O @i8 P V O [ P H LNM?O [ O 8 POQPWPqO >bVW8\ZQ]: l > c n 9?[W[ O >bV c } 8:>?@UV M [ c 9?@ M V M?O 9?> PqO ] OQn V OQX
[ c }P S OQn ZQ9 PqO V M?O VW[ZQ> P TU8 PWP 8 c >@wZQV OQP c >V M?O 9?> PqO ] OQn V OQX [ c }G} c 9?] X S OUn 9?V c PH
7 c }NO s O [ v Z P V M?O [ O} c 9?] X S On 9?[W[ O >bV c } 8:>?@%V M [ c 9?@ M V M?OPqO ] OQn V OQX0XbO sb8 n"O Z P=}NO ]:
Z P V M?O%n c [W[ OQP kac > X 8:>?@p[ c } VW[ZQ> P TU8 PWP 8 c >U@wZQV Owv V M?O kac V O >bVW8\ZQ]ZQVV M?OP c 9?[ n"O cQd V M?O
jB R ^I LP} c 9?] X S ONX O8 P O [ O >bV d [ c TGV M?O Z k?k ]:8 OQX s c ]:VZQ@ ONX 9 O V c Z kac V O >bVW8\ZQ] X [ cik
Z n [ c PWP V M?O VW[ZQ> P TU8 PWP 8 c >@wZQV O H L c Z X?X [ OQPWP V M 8 P k [ c S?] O T v Z J } 8:[ OPqO > PqO V OQnM >?8 f 9 O
} Z P 9 PqOQX H=B> O k ZQ8:[ cQd VW[ZQ> P TU8 PWP 8 c >p@wZQV OQP ZQ[ O 9 PqOQX V c O LbVW[Z n V=V M?O VW[ZQ> P d O [ nM ZQ[J
Z n V O [W8 P VW8 n1P cQd V M?OpXbO sb8 n"OQP H LNM?O ^ c [ n"O V O [WTU8:>aZQ]={ { |W| 8 Pn c >?> OQn V OQX
V c n 9?[W[ O >bV c [s c ]:VZQ@ O%P c 9?[ n"OQP ZQ> X ZQ>ZQTUT O V O [ dgc [NT O Z P 9?[W8:>?@V M?O%X [ZQ8:> n 9?[W[ O >bV
{ | ZQ> X V M?O%RwO > PqO V O [WTU8:>aZQ]{ { | 8 PNn c >?> OQn V OQX V c Z%s c ]:VWT O V O [ dgc [
T O Z P 9?[W8:>?@V M?O s c ]:VZQ@ O Z k?k ]:8 OQX c ><V M?O%P c 9?[ n"O cQd V M?O jB R ^I LP H=F l 9 P 8:>?@0V M?O
ZQS c s OPWnM?O T Owv V M?O VW[ZQ> P d O [ nM ZQ[Z n V O [W8 P VW8 n1P cQd 8:> X 8:sb8 X 9aZQ] jB R ^I LPpn ZQ>,S O
O LbVW[Z n V OQX H
:%&*4-&/ /
. 4& *
K/P 8:TU8:]\ZQ[ XbOQP 8:@i>V c V M?O jB R ^I L V OQP VZQ[W[Z l} Z P ZQ] P c Z k?k ]:8 OQX V c V M?OUm#Q F L
ZQ[W[Z l Z P0PqM c } > 8:>~^-8:@i9?[ O H H KPX 8 PWn 9 PWPqOQX 8:> V M?O k [ O sb8 c 9 PPqOQn VW8 c > vn Z PWn c XbO
n 8:[ n 9?8:V P}NO [ O 8:> n ]:9 XbOQX 8:>V M?O V OQP VZQ[W[Z l H^ c [ P 8:T k ]:8 n 8`V lwv V M?O0P 9?S P VW[ZQV OUn c >?> OQn J
VW8 c > P cQd V M?O jB R ^I LP ZQ[ O > c V PqM c } >H KP V M?O S c Xbl cQd V M?O jB R ^I L 8 P ZQ>
m Q F L H LNM?OpP 9?S P VW[ZQV OQP"v 8€H O HV M?O
J }NO ]: v 8:V8 Pn c >?> OQn V OQX Z P V M?O SaZ PqO cQd V M?O #
J€V l k OO k 8:VZ Lb8\ZQ]]\Z lwO [ v cQd ZQ]:V M?O0#m Q F LP}NO [ O @i[ c 9?> XbOQX H
LNM?OhrLP 8:>~V M?O ZQ[W[Z l ZQ[ OPqO ] OQn V OQX 8:>~V M?O<P ZQT OU} Z l Z P V M?O jB R ^I L
ZQ[W[Z l} 8:V M V } c T<ZQ8:> X O8 P O [ O > n"OQP H^-8:[ P V v 9?>?]:8 wO V M?O @wZQV O V O [WTU8:>aZQ] cQd jB R ^I L
}M 8 nM0OQPWPqO >bVW8\ZQ]: l0n c > X 9 n V P > c n 9?[W[ O >bV v ^ c [ n"O ZQ> X<RwO > PqO V O [WTU8:>aZQ] P { ZQ> X | ZQ[ O [ OQf 9?8:[ OQX dgc [=V M?O SaZ PqO 8:> k 9?V=S OQn ZQ9 PqO V M?OhrL } c 9?] X0X [Z }
n 9?[W[ O >bV }M?O >V M?O VW[ZQ> P 8 P V c [%8 PPqO ] OQn V OQX ZQ> Xn ZQ9 PqO Z kac V O >bVW8\ZQ] X [ cik Z n [ c PWP V M?O
VW[ZQ> P TU8 PWP 8 c >@wZQV O H KX?X 8:VW8 c >aZQ] V O [WTU8:>aZQ] P ZQ[ O 9 PqOQX dgc [V M?O T O Z P 9?[ O T O >bV
cQd V M?O SaZ PqO s c ]:VZQ@ O H LNM?O c V M?O [ X O8 P O [ O > n"O 8 P V M ZQV v V c 9?> PqO ] OQn V c V M?O [VW[ZQ> P 8 P V c [ P"v
V M?O SaZ PqO s c ]:VZQ@ OM Z P V c S O0PqO VV c 8:> P V O Z X cQd H h 9?[W8:>?@pV OQP VW8:>?@ v ZQ]:-V M?O
X [ZQ8:> P ZQ[ OUn c >?> OQn V OQX V c @i[ c 9?> X H<^ c [%9?> PqO ] OQn V OQX [ c }P"v V M?OpO TU8:VWV O [ PN} c 9?] X S O
n c >?> OQn V OQX V c @i[ c 9?> X H7 O > n"Owv ZQ]:V M?O%XbO sb8 n"OQP c ><V M c PqO [ c }P} c 9?] X S O 8:> n 9?V J c P
T c XbO Z P V M?O SaZ PqO s c ]:VZQ@ O 8 P 8:>V M?O [ZQ>?@ O cQd @i[ c 9?> X V c ZQ> X S c V M SaZ PqO J O TU8:VWV O [
ZQ> X SaZ PqO J n c ]: OQn V c [ W9?> n VW8 c > P ZQ[ O [ O s O [ PqO S?8\Z PqOQX H^ c [9?> PqO ] OQn V OQXn c ]:9?TU> P"v ZQ]:?V M?O
iy
Base Sense
Base Force
Emitter Sense
Vdd
Gate
Emitter Force
Vcas
Drain
^-8:@i9?[ O H NLNM?O c [W8:@i8:>aZQ] m#Q F L V OQP VZQ[W[Z ln 8:[ n 9?8:V } 8:V M phrLP H
SaZ PqO J n c ]: OQn V c [=ZQ> X SaZ PqO J O TU8:VWV O [ W9?> n VW8 c > P ZQ[ O [ O s O [ PqO S?8\Z PqOQX Z P V M?O SaZ PqO s c ]:VZQ@ O
8 P ZQV #H R XbO ZQ]: lwv c >?] l V M?OPqO ] OQn V OQXpO ] O T O >bV P} c 9?] Xn c >bVW[W8:S?9?V O V c V M?O0n 9?[W[ O >bV
c } 8:>?@pV M [ c 9?@ M V M?On c TUT c > X [ZQ8:>H
. 4& -
LNM?O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd V M?O%m#Q F LP 8:>0V M?O _a[ P VNSaZQV nM V OQP V nM 8 k P}NO [ O dgc 9?> X
V c S O} c [ PqO V M ZQ>V M c PqO cQd V M?O jB R ^I LP"vi}M 8 nM%} Z P cik?kac P 8:V O V c O L k OQn VZQVW8 c >HR€V
} Z PP 9 P k OQn V OQX V M ZQV8:V } Z PX 9 O V c V M?O TU8 P T<ZQV nM S O V }NO1O >V M?O VW[ZQ> P TU8 PWP 8 c >@wZQV OQP H
LNM?O c [ O VW8 n ZQ]: lwviP 8:> n"O V M?O J } 8:[ OPqO > PqO T O Z P 9?[W8:>?@T O V M c X} Z P 9 PqOQXv V M?O SaZ PqO ZQ> X
O TU8:VWV O [=s c ]:VZQ@ On c 9?] X S O Z X W9 P V OQX<}M 8:] O T c >?8:V c [W8:>?@V M?O s c ]:VZQ@ O cQd V M?OPqO > P 8:>?@
V O [WTU8:>aZQ] P ZQVV M?OP ZQT O VW8:T ONP c V M ZQV O s O [ l#m Q F L~n c 9?] X S O Z k?k ]:8 OQX%} 8:V M V M?OP ZQT O
~ZQ> X + ! NH7 c }NO s O [ v 8:V } Z PX 8 <n 9?]:VV c Z X W9 P VV M?O V M [ O1O kac [WV P ZQVV M?O0P ZQT O
VW8:T OUX 9?[W8:>?@ZQ9?V c T<ZQVW8 n k ZQ[ZQT O V O [ O LbVW[Z n VW8 c >H KP Z[ OQP 9?]:V v V M?On c ]: OQn V c [ZQ> X
bz
Q1
Q3
Cascade
Row1
Collector (Force)
Collector (Sense)
Q2
Q4
Row2
Emitter
Gate
Base
-^ZQ> 8:@iX9?PW[ nOM? O HT<ZQVWLN8 nM?OX 8\T ZQ@ic [X ZQ8`T _ OQcQXd #m V M?Q O F > L O1} V OQVP VOQP PV VW[WP 9VW[Wn 9 VW9?n VW[ 9?O [ ]\O Z l {g[Wc 8:9?@ VM V } | H8:V M UhrLP {g] O d V |
SaZ PqO 8:> k 9?V P V c V M?O VW[ZQ> P TU8 PWP 8 c >@wZQV OQP}NO [ O _L OQX V c Z n"O [WVZQ8:> s c ]:VZQ@ OUX 9?[W8:>?@
V OQP VW8:>?@ZQ> X 8 XbO >bVW8 n ZQ]iV OQP VW8:>?@ n c > X 8:VW8 c > P dgc [ O Z nM#m Q F Ln c 9?] X > c V-S O @i9aZQ[ZQ>bV O1OQX H
j c [ O c s O [ v V M 8 P V OQP V P VW[W9 n VW9?[ On c 9?] X > c V=S O 9 PqOQX dgc [=V OQP VW8:>?@%>aZQ> c J c [ XbO [ n c ]: OQn V c [
n 9?[W[ O >bV-] O s O ] P S OQn ZQ9 PqO V M?OP 9?T cQd V M?O ] O Z  ZQ@ On 9?[W[ O >bV P cQd V M?O 9?> PqO ] OQn V OQXXbO sb8 n"OQP
n c 9?] XUO L n"O1OQX<z H KPP 9?@i@ OQP V OQX S lUh [1HsiZQ> RbnM ZQ8  s R€v V M?O0#m Q F L ZQ[W[Z lU} Z P
T c X 8`_ OQXUP c V M ZQV8:V8 PNO Z P 8 O [NV c Z nM 8 O s O V M?OXbOQP 8:[ OQX<n c > X 8:VW8 c > P H
^-8:@i9?[ O H PqM c }P V M?O T c X 8`_ OQX V OQP VW8:>?@ P VW[W9 n VW9?[ O H R€>UV M?O ZQ[W[Z lwv VW[ZQ> P TU8 PWP 8 c >
@wZQV OQP V c V M?O SaZ PqO ZQ> X V M?O0O TU8:VWV O [ }NO [ OO ]:8 TU8:>aZQV OQX H h 9?[W8:>?@UV OQP VW8:>?@ v V M?OpP ZQT O
SaZ PqO ZQ> X~O TU8:VWV O [s c ]:VZQ@ OQP ZQ[ O Z k?k ]:8 OQX V c ZQ]: #m Q F LP H3B> V M?O c V M?O [ M ZQ> XvNx
VW[ZQ> P TU8 PWP 8 c > jB R ^I LP=}NO [ O Z X?XbOQX 8:> n Z PWn c XbO} 8:V M V M?OX [ZQ8:> cQd V M?On Z PWn c XbO
jB R ^I L H LNM?O @wZQV OQP cQd V M?O VW[ZQ> P TU8 PWP 8 c ><@wZQV OQP ZQ[ O0n c >bVW[ c ]: OQX S l V M?O c 9?V k 9?V
cQd Z PqM 8 d V=[ O @i8 P V O [1H=BSbsb8 c 9 P ] lwv Z XbO sb8 n"O} 8:] c >?] lUn c >bVW[W8:S?9?V O V c V M?O c s O [ZQ]: X [ZQ8:>
n 9?[W[ O >bV }M?O > S c V M V M?O VW[ZQ> P TU8 PWP 8 c > @wZQV OQP ZQ[ O VW9?[W> OQX c >H R€> V M 8 PXbOQP 8:@i> v ZQ>
jB R ^I L VW[ZQ> P TU8 PWP 8 c >%@wZQV O=} Z P 9 PqOQX 8:> P V O Z X cQd V M?On c T k ] O T O >bVZQ[ l VW[ZQ> P TU8 P J
P 8 c >@wZQV O S OQn ZQ9 PqO}NO%} ZQ>bV OQX V c [ OQX 9 n"O V M?O ZQ[ O Z c n1n 9 k 8 OQX S l V M?O VW[ZQ> P TU8 PWP 8 c >
Column1
Column2
ix
Vdd
INPUT/
OUTPUT
PAD
I/O
INPUT/
OUTPUT
PAD
Poly Resistor
about 75kΩ
-^ 8:@i9?[ O H K V l k 8 n ZQ]bZQ>aZQ] c @RiB k Z X {g] O d V | ZQ> X RiB k Z X dgc [ #m Q F L @wZQV O {g[W8:@ M V | H
@wZQV O H%Is O > P c vX 9 O V c V M?O 8:> n [ O Z PqOQX ]\Z l c 9?VZQ[ O Z v V M?O >b9?TpS O [ cQd hrLC} Z P [ O J
X 9 n"OQX V c z1x z1x 8:>V M 8 P ZQ[W[Z l H K @wZQ8:> v Z J } 8:[ OpPqO > PqO T O Z P 9?[ O T O >bV } Z P 9 PqOQX
V c O ]:8 TU8:>aZQV O V M?O TU8 P T<ZQV nM cQd V M?O jB R ^I L VW[ZQ> P TU8 PWP 8 c ><@wZQV OQP H
SD ! F H F F7H D 7H D LNM?O RiB k Z X?P 9 PqOQX ZQ[ O V l k 8 n ZQ]ZQ>aZQ] c @ RiB k Z X?P H+R€> c [ XbO [%V cUk [ O s O >bV O ] OQn VW[ c J
P VZQVW8 n=M Z NQZQ[ X?P"v V M?O 8:> k 9?V cQd O Z nM k Z X 8 P-n ]\ZQT k OQX} 8:V M0xX 8 c XbOQP V c ZQ> X H
R c V M?O s c ]:VZQ@ O%} c 9?] X > c V O L n"OQPWP V M?O pc [ T c [ O V M?O ><V M?O dgc [ } ZQ[ X s c ]:VJ
ZQ@ O cQd V M?OpX 8 c XbOQP {gV l k 8 n ZQ]: l<y | {€^-8:@i9?[ O H w| H%7 c }NO s O [ v dgc [V M?O @wZQV O s c ]:VZQ@ O
8:> k 9?V cQd V M?O0#m Q F LP"v Z P V M?O @wZQV O s c ]:VZQ@ O Tp9 P VNS O%M 8:@ M?O [V M ZQ>V M?O v 8:V } Z P
> c V k [ c V OQn V OQXU} 8:V M Z n ]\ZQT k 8:>?@ X 8 c XbO H L c0k [ c V OQn VN8:V v Z0] c >?@ kac ] l?P 8:] 8 n c >U[ OQP 8 P V c [
} Z P Z X?XbOQX 8:> PqO [W8 OQP V c [ OQX 9 n"O V M?O<nM ZQ> n"O cQd S O 8:>?@ X ZQT<ZQ@ OQX S lO ] OQn VW[ c P VZQVW8 n
X 8 PWnM ZQ[W@ O {€I Rbh%| {€^-8:@i9?[ O H w| H
F
DF !G
L c n c >bVW[ c ]bV M?O VW[ZQ> P TU8 PWP 8 c >@wZQV OQP"viPqM 8 d V-[ O @i8 P V O [ P}NO [ O 9 PqOQX H LNM?OPqM 8 d V-[ O @i8 P V O [8 P
Z n [W8:VW8 n ZQ] k ZQ[WVN8:>0V M?On c >bVW[ c ] n 8:[ n 9?8:V cQd V M?OnM 8 k H KCPqM 8 d V[ O @i8 P V O [ k [ cikac PqOQX S lpm H
j O Z X j O Z6 b} Z P-PqO ] OQn V OQX Z P 8:V } Z Pn c T k Z n V-ZQ> X%M Z X S O1O >9 PqOQXP 9 n1n"OQPWP d 9?]: l 8:>
S
Vdd
S
Vdd
Qin
Qout
Qin
Qout
Φ1
Φ2
-^ 8:@i9?[ O H NRbnM?O T<ZQVW8 nX 8\ZQ@i[ZQT cQd Z PqM 8 d V[ O @i8 P V O [S?8:V1H
k [ O sb8 c 9 P R m,XbOQP 8:@i> P {€^-8:@i9?[ O H i| H=FN90P O [ P {g8:>bs O [WV O [ P| ZQ[ O Z X?XbOQX V c V M?O c 9?V k 9?V P
cQd V M?O%PqM 8 d V[ O @i8 P V O [S?8:V P V c X [W8:s O Z]\ZQ[W@ On Z k Z n 8:VW8:s O ] c Z X H LNM?OPqM 8 d V[ O @i8 P V O [NS?8:V
M Z P V } c P VZQ@ OQP ZQ> X 9 PqOQP ZpV } c<k M Z PqO > c 0> J c s O [W]\Z k?k 8:>?@ n ] c nPWnM?O T Owv T O ZQ>?8:>?@
V M ZQV n ] c nP 8:@i>aZQ] P > ZQ> X } c 9?] X > O s O [-S OM 8:@ M ZQV=V M?OP ZQT O VW8:T O HI=Z nMpP VZQ@ O
n c > P 8 P V P cQd Z k ZQ8:[ cQd n [ c PWP J n c 9 k ] OQX 8:>bs O [WV O [ P +H R€V M Z P V } c P VZQS?] OUP VZQV OQP Z PO Z nM
8:>bs O [WV O [ c 9?V k 9?V d O1OQX?P V M?O 8:> k 9?V cQd V M?O c V M?O [1HNB> O 8 P V c P V c [ O0P 8:@i>aZQ] z c >V M?O
V cik [ZQ8:]-ZQ> X Z y c >V M?O S c VWV c T [ZQ8:]€H LNM?O c V M?O [8 P V c P V c [ O0P 8:@i>aZQ] y c >V M?O
V cik [ZQ8:] }M 8:] O z c >3V M?O S c VWV c T [ZQ8:]€H B> V M?O [W8 P 8:>?@ OQX @ O cQd v V M?O kac }NO [
V c V M?OUPqOQn c > Xn [ c PWP J n c 9 k ] OQXP VZQ@ O 8 Pn 9?V c P,ZQ> X V M?O jB R ^I L VW[ZQ> P TU8 PWP 8 c >
@wZQV O 8 P VW9?[W> OQX c > vaP c X ZQVZ n c 9?] X S O k Z PWPqOQX d [ c T V M?O k [ O sb8 c 9 PNP VZQ@ O V c V M?O > O LbV
P VZQ@ O H=A M?O > d ZQ]: P"v V M?O kac }NO [N8 P [ OQP V c [ OQX ZQ> X V M?O 8:> k 9?V n 9?V c P vaP c V M?O siZQ]:9 O
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GPC-1850
6.5V
+ 2400
−
I2C
3V
GPC-1850 +
−
5V
A 6517
+
− 2400
GPC-1850 +
−
5V
6517 A
6517 A
2400
+
−
GPC-1850
+
5V −
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nM 8 k P d ZQS?[W8 n ZQV OQX 8:>~Z<] c V1H<7 c }NO s O [ vX 9 O V c P c T O 9?>  > c } > [ O Z P c > P {gT<Z l S O
X 9 O V cc Lb8 XbO S?[ O Z ?X c } > cQd V M?O @wZQV Oi|v c > O cQd V M?O T/S O1M Z1s OQX ZQS?> c [WT<ZQ]: l {g9?>?[ O KZ J
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hrL d [ c T n c ]:9?TU> z V c n c ]:9?TU> z dgc [ O Z nM [ c }%vP VZQ[WVW8:>?@ d [ c T [ c } z V c [ c }
z H m c ]:9?TU> z ZQ> X [ c } z 8 P > O ZQ[ OQP VV c V M?On"O >bV O [ cQd V M?O%nM 8 k H LNM?O V cik _a@i9?[ O
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−7
1.04
x 10
1.03
1.02
1.01
1
0.99
0.98
0.97
0
50
100
150
200
250
Mean current=1.004568e−07. Mismatch=1.030761%
−7
x 10
Center of the chip
1.05
1
0.95
15
1.03
1.02
1.01
10
1
Row
0.99
5
15
10
0
5
Columnn
0.98
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LNM?O TU8 P T<ZQV nM?OQP cQd jB R ^I LP ZQV X 8OP O [ O >bV n 9?[W[ O >bV<] O s O ] PpPqM c }P 8:TU8:]\ZQ[
k [ cik O [WVW8 OQP H L ZQS?] O H x ZQ> X ^-8:@i9?[ O H ziz%P 9?TUT<ZQ[W8MN O TU8 P T<ZQV nWM?OQPn ZQ] n 9?]\ZQV OQX 9 P 8:>?@
I f 9aZQVW8 c > P H V c H 6 m 9?[W[ nO M >b8 V zQaO s O ] x H wz z"Oyiy z H Qz1yQy O yiy z H z1y yiQy O yiy H iz yQ O J ybz z H z1
y Q O J ybz
nnMM 88 kk x HH y
iQOO JJ ybybzz z 6bH Hyb z"iOO J ybyiz y HH z1z xQ6 OO JJ ybybzz x HH ybiyQz"OO JJ ybybzz zz HH i6 OO JJ ybybzz
nM 8 kk z H y iOyiy z H y QOyiy H iO J ybz H 6 QO J ybz z H 6 z"O J ybz
L ZQS?] O H x NK s O [ZQ@ O TU8 P T<ZQV nM cQd jB R ^I LP { | H
3
chip1
chip2
chip3
chip4
2.5
mismatch %
2
1.5
1
0.5
0
1nA
10nA
100nA
Current Level
1uA
10uA
^-8:@i9?[ O H ziz j8 P T<ZQV nM cQd V M?O jB R ^I LP ZQV X 8OP O [ O >bV n 9?[W[ O >bVN] O s O ] P H
wz
$ %&*4-&/&
^-8:@i9?[ O H z1x<PqM c }P V M?O T O Z P 9?[ OQX<n 9?[W[ O >bV P cQd V M?Opm#Q F LP 8:>V M?O ZQ[W[Z l cQd z
ZQVV M?O%n 9?[W[ O >bV=] O s O ] cQd z1yiy H R 8:TU8:]\ZQ[V c jB R ^I LP"v V M?Om#Q F LPN}NO [ O V OQP V OQX
d [ c T n c ]:9?TU> z V c n c ]:9?TU> z1x dgc [ O Z nM [ c }%vP VZQ[WVW8:>?@ d [ c T [ c }z V c [ c } z1x H
LNM?O V cik _a@i9?[ O0PqM c }P V M?O T O Z P 9?[ OQX<n 9?[W[ O >bV P 8:> c > O0X 8:T O > P 8 c >aZQ]sb8 O1} ZQ> X V M?O
S c VWV c T c > O<PqM c }P V M?O<X ZQVZ<8:>~Z<V } c X 8:T O > P 8 c >aZQ]NZQ[W[Z l H e c } z ZQ> X n c ]:9?TU>
z1x 8 P V M?O VW[ZQ> P 8 P V c [U> O ZQ[ OQP VpV c V M?On"O >bV O [ cQd V M?OnM 8 k HC^?[ c T V M?O @i[Z k MaP"v 8:V
n ZQ>S O dgc 9?> X V M ZQVTU8 P T<ZQV nWMUX c OQP > c V M Z1s O Z n ] O ZQ[ P k ZQVW8\ZQ]V O > XbO > n"l Z P dgc [V M?O
jB R ^I LCn Z PqO H LNM 8 P 8 P S OQn ZQ9 PqO V M?O TU8 P T<ZQV nM 8 P > c ] c >?@ O [ X c TU8:>aZQV OQX S l V M?O
−7
1.25
x 10
1.2
1.15
1.1
1.05
0
50
100
150
Mean current=1.149923e−07. Mismatch=2.746991%
−7
x 10
Center of the Chip
1.2
1.4
1.2
1
15
1.15
10
Row
1.1
5
0
0
2
4
6
8
10
12
^-8:@i9?[ z O H LNH z1M?xO V jZQV_an@iM 9?8:>?[ O@ Pqk M [ ci}k PO [WV VWM?8 OQOP n cQ9?d[W[ O >bVsi#m ZQQ ]:9 F OQLP P {g8:9?> > Xb|O [ 8:> z1yiy> O X 8:Tn 9?O [W>[ O P >b8 VN>a] ZQO ]ws sbO 8]aO18:} >
ZQ> X V M?O S c VWV c ciT k c > OPqM c }c P V M?O siZQ]:9 OQP 8:><V } c X 8:T O > P 8 c >aZQ]ac sb8 O1} H c
Column
Qx
V M 8 n > OQPWP cQd V M?O c Lb8 XbO ZQ> X c V M?O [ Pql?P V O T<ZQVW8 n TU8 P T<ZQV nM?O1P H
m 9?[W[ nO M >b8 V zQaO s O ] H iz xQOyiy H z1z1xQy O yiy x Hz1
yiQy O yiy
nnMM 88 kk x HH z Q1OOyiyiyy HH x 61OOyiyiyy x HH y
6QOOyiyiyy
nM 8 kk H bz"Oyiy H iOyiy H y
iOyiy
L ZQS?] O H NK s O [ZQ@ O TU8 P T<ZQV nM cQd #m Q F LP { | H
4.6
chip1
chip2
chip3
chip4
4.4
4.2
4
mismatch %
3.8
3.6
3.4
3.2
3
2.8
2.6
1nA
10nA
Current Level
100nA
^-8:@i9?[ O H z j8 P T<ZQV nM cQd V M?O0m#Q F LP ZQV X 8OP O [ O >bV n 9?[W[ O >bVN] O s O ] P H
$ =
/&
^-8:@i9?[ O H z0PqM c }P V M?OX 8 P VW[W8:S?9?VW8 c > cQd V M?O V M?OX [ZQ8:> n 9?[W[ O >bV P cQd V M?O jB R ^I LP
ZQVV M?O<z1yiy n 9?[W[ O >bV] O s O ]-8:>V M?O ZQ[W[Z l cQd z H R 8:> n"O jB R ^I LP ZQ[ O W9 P V
#m Q F LP cik O [ZQVW8:>?@~8:>,jB R ^I L T c XbOwv V M?O1l~M Z1s O V M?OP ZQT O ] c n ZQVW8 c > P Z P V M?O
#m Q F LP H K @wZQ8:> v V M?OpX ZQVZ } Z P c S?VZQ8:> OQX S lPq}NO1O k 8:>?@ d [ c T n c ]:9?TU> z V c z1x dgc [
O Z nM [ c }%vP VZQ[WVW8:>?@ d [ c T5[ c }/z V c [ c }/z1x H jB R ^I L ZQV n c ]:9?TU> z1x ZQ> X [ c }/z
8 P > O ZQ[ OQP VV c V M?On"O >bV O [ cQd V M?OnM 8 k H
L ZQS?] O H ZQ> X ^-8:@i9?[ O H z UPqM c } V M?O TU8 P T<ZQV nM?OQP cQd jB R ^I L ZQV X O8 P O [ O >bV
−8
12
x 10
11
10
9
8
7
6
0
50
100
150
Mean current=9.467061e−08. Mismatch=8.951180%
−7
x 10
Center of the chip
1.5
11
1
0.5
15
10
9
10
Row
8
5
0
2
4
6
8
10
12
-^z1yi8:@iy 9?[ O n 9?H z[W[ O >bVj] OZQsV nO M]i8:8:>?> @ k [ cik z O H [WLNVW8 M?OQPO VcQcid k #m _aQ @iF 9?[LOP PqMcikc }O [P ZQVVWM?8:>?ON@n 9?Z [WP [ O >bjV-BsiZQR ]:^9 OQI P L{gP8:> 9? > |XbO8:> [
csb>8 O1O} X H 8:T O > P 8 c >aZQ]bsb8 O1} ZQ> X V M?O S c VWV c T c > OPqM c }P V M?O siZQ]:9 OQP 8:>pV } c X 8:T O > P 8 c >aZQ]
0
Column
m 9?[W[ nO M >b8 V zQaO s O ] z H ziz z"Oybz z H yz1Qy O ybz 6bHz1yiQy O yiy H ybzz" Oyiy
nnMM 88 kk x zz HH yy Q6 OOybybzz zz HH yyb6z"OOybybzz 6bHH yixQ1OOyiyiyy HH iQOOyiyiyy
nM 8 kk z H z 6 Oybz z H z QOybz H iyQOyiy H 6 xQOyiy
L ZQS?] O H NK s O [ZQ@ O TU8 P T<ZQV nM cQd jB R ^I L { | H
1z H z 1y
O yiy
zz HH wQyQOOyiyiyy
z H iOyiy
12
chip1
chip2
chip3
chip4
10
mismatch %
8
6
4
2
0
1nA
10nA
100nA
Current Level
1uA
10uA
^-8:@i9?[ O H z j8 P T<ZQV nM cQd V M?O jB R ^I LP ZQV X 8OP O [ O >bV n 9?[W[ O >bVN] O s O ] P H
n 9?[W[ O >bVN] O s O ] P 8:>ZQ]:V M?OnM 8 k P H
LNM?O~#m Q F LP cik O [ZQVW8:>?@3Z P jB R ^I LPUM Z1s O V M?O} c [ P V<T<ZQV nM 8:>?@ k [ cik O [J
VW8 OQP H7 c }NO s O [ v V M 8 P 8 P > c VpZ d ZQ8:[ n c T k ZQ[W8 P c >S OQn ZQ9 PqO V M?O ]\Z l c 9?V%@wZQV O ZQ[ O Z cQd
V M?O jB R ^I LP 8 P W9 P V z iv=}M 8 nM 8 P Tp9 nM ] OQPWP V M ZQ>3V M ZQV cQd jB R ^I LP
{ z wy | H^ c [ d ZQ8:[ n c T k ZQ[W8 P c > v S l Z k?k ] l 8:>?@pV M?4O Q Z } cQd K [ O Z v V M?O TU8 P T<ZQV nM?O1P
cQd V M?O jB R ^I LP} 8:V M @wZQV O ZQ[ O Z cQd z wy ZQ[ O%OQP VW8:T<ZQV OQX V c S O ZQS c 9?V { | {
|
x{ |
}M?O [ O { | ZQ> X { | ZQ[ O V M?O TU8 P T<ZQV nM?OQP cQd V M?O jB R ^I LP} 8:V M @wZQV O
ZQ[ O Z cQd z ZQ> X V M ZQV } 8:V M ZQ[ O Z cQd zwy [ OQP k OQn VW8:s O ] l H LNM?OX ZQVZ%8:> L ZQS?] O H } Z P 9 PqOQX dgc [ OQP VW8:T<ZQVW8:>?@pV M?O TU8 P T<ZQV nM cQd jB R ^I LG} 8:V Mn c T k ZQ[ZQS?] O ]\Z l c 9?V
ZQ[ O Z } 8:V M#m Q F L ZQ> X jB R ^I L ZQ> X ZQ[ OPqM c } ><8:> L ZQS?] O H ZQ> X ^-8:@i9?[ O H z H
m 9?[W[ nO M >b8 V zQaO s O ] H z 6 Oyiy H z1Qy O yiy Hz1y
yiiy O yiy z H Qz yQ Oyiy H z1
y i O J ybz
nnMM 88 kk x HH wQz"OOyiyiyy HH iQOOyiyiyy x HH y
iQOOyiyiyy zz HH 61OOyiyiyy HH Q1OO JJ ybybzz
nM 8 kk H ybz"Oyiy H bz"Oyiy H z QOyiy z H iOyiy H QO J ybz
L{ ZQS?| ]H O H j8 P T<ZQV nM cQd V M?OPWn ZQ] OQX jB R ^I L~OQP VW8:T<ZQV OQX 9 P 8:>?@V M?!O Q Z } cQd K [ O Z
4.5
chip1
chip2
chip3
chip4
4
3.5
mismatch %
3
2.5
2
1.5
1
0.5
0
1nA
10nA
100nA
Current Level
1uA
10uA
^-n 9?8:@i[W[9?O [ >bO VN ] OH z s O U] P HLNM?OUOQP VW8:T<ZQV OQX TU8 P T<ZQV nM cQd V M?O<PWn ZQ] OQX jB R ^I LP ZQV X 8OP O [ O >bV
&% #'<'(,&#
2
<@$ %&*4-&/
= / = /
NL M?O TU8 P T<ZQV nM cQd V M?O jB R ^I LP 8 P V M?OP T<ZQ]: OQP V0ZQT c >?@V M?O V l k OQP cQd XbO J
sb8 n"OQP H R€V8 P ] OQPWP V M ZQ> yJx ZQV z1y
n 9?[W[ O >bV%] O s O ]=ZQ> X ] O s O ] P c P,V c ZQS c 9?V z 8:> P 9?S?V M [ OQPqM c ] X H^ c [V M?O m#Q F LP"v V M?O 8:[%TU8 P T<ZQV nM 8 P ZQS c 9?V V c VW8:T OQP
kacwc [ O [V M ZQ>V M ZQV cQd V M?O jB R ^I LP ZQ> X 8 P ZQS c 9?V ZQ> X #ZQV z1yiy ZQ> X
z n 9?[W[ O >bV] O s O ] P [ OQP k OQn VW8:s O ] l H LNM?O TU8 P T<ZQV nM cQd m#Q F LP cik O [ZQVW8:>?@ Z P
jB R ^I LP 8 P V M?O%} c [ P VZQ> X 8 P ZQS c 9?V z ZQV z1
y ZQ> Xziz 5ZQV z H
7 c }NO s O [ v Z n1n c [ X 8:>?@V c V M?O Q Z } cQd K [ O Z v V M?O jB R ^I LP%} c 9?] XM Z1s O V M?O
P 8:TU8:]\ZQ[TU8 P T<ZQV nWM Z P V M?O #m Q F LP {gS c V M ZQ[ O ZQS c 9?V /ZQV z n 9?[W[ O >bV=] O s O ] |
8 d V M?O1l~}NO [ OXbOQP 8:@i> OQX V c M Z1s O V M?OP 8:TU8:]\ZQ[]\Z l c 9?VUZQ[ O Z Z P V M?O#m Q F LP H LNM 8 P
ZQ] P c P 9?@i@ OQP V P V M ZQV v 8:> P c T OUn 8:[ n 9?8:V P}M?O [ OUn Z PWn c XbOQX n 8:[ n 9?8:V P ZQ[ O > c V[ OQf 9?8:[ OQX
dgc [ #m Q F LP ZQ> X V M?O<#m Q F LP ZQ[ O @i[ c 9 k OQX V c @ O V M?O [ P c V M ZQVV M?O1ln ZQ> PqM ZQ[ O V M?O
@i9aZQ[ X [W8:>?@ P"v #m Q F LP} c 9?] X S O k [ O d O [W[ OQX V c jB R ^I LP S OQn ZQ9 PqO V M?O1lU} 8:]
M Z1s O V M?O<P ZQT O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP}M 8:] O V M?O ZQ[ O Z<8 P @i[ O ZQVW] l [ OQX 9 n"OQX {€ZQS c 9?V
xiy iy G[ OQX 9 n VW8 c >08 d n Z PWn c XbOn 8:[ n 9?8:V P}NO [ O > c V-8:> n ]:9 XbOQX Z PPqM c } >08:> L ZQS?] O H zQ| H
^?[ c T^-8:@i9?[ O H ziz ZQ> X H z bv V M?O TU8 P T<ZQV nM?OQP cQd S c V M V M?O jB R ^I LP ZQ> X
jB R ^I LP ] O s O ] c P }M?O >CV M?O n 9?[W[ O >bV<] O s O ] P ZQ[ O ] OQPWP V M ZQ> z1y H LNM 8 P 8 P
S OQn ZQ9 PqO V M?O1l ZQ[ O cik O [ZQVW8:>?@8:>0V M?OP 9?S?V M [ OQPqM c ] X [ O @i8 c > vi}M?O [ O Z P dgc [V M?O#m Q F LP"v
V M?O TU8 P T<ZQV nM 8 PP VW8:] 8:> n [ O Z P 8:>?@pZQV n 9?[W[ O >bVN] O s O ] P # z1y H
^?[ c T/V M?O c > OX 8:T O > P 8 c >aZQ]bsb8 O1}P cQd V M?On 9?[W[ O >bV X 8 P VW[W8:S?9?VW8 c >08:>pV M?O ZQ[W[Z l?P"v 8:V
8 P dgc 9?> X V M ZQV c >?] l V M?O jB R ^I LP0PqM c } s O [ lO L k ]:8 n 8:V k O [W8 c X 8 n VW[ O > X?P H LNM?O
[ O Z P c > 8 P V M ZQVV M?O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd V M?O jB R ^I LPXbO k O > XP VW[ c >?@i] l
c >3V M?O c Lb8 XbO V M 8 n > OQPWP ZQ> X V M?OX cik 8:>?@ n c > n"O >bVW[ZQVW8 c > cQd V M?O S c X 8 OQP H LNM?O [ O J
dgc [ Owv jB R ^I L ZQ[W[Z l @i8:s OQP ZQ> O L k ]:8 n 8:V%@i[Z X 8 O >bV P cQd V M?On 9?[W[ O >bV] O s O ] P H^ c [
jB R ^I LP"v ZQ]:V M c 9?@ M V M?O 8:[0T<ZQV nM 8:>?@ k [ cik O [WVW8 OQPpPqM c 9?] X ZQ] P c XbO k O > X c >3V M?O
V M 8 n > OQPWP cQd V M?O c Lb8 XbO ZQ> X S c XblX cik 8:>?@ n c > n"O >bVW[ZQVW8 c > vX 9 O V c n c 9?>bV O [ X cik 8:>?@
ZQ> X ZQ] P c V M?O 8:[W[ O @i9?]\ZQ[ PqM Z k O cQd V M?O @wZQV Owv V M?OQPqO V } c0d Z n V c [ P S OQn c T O ] OQPWPP 8:@i>?8 d J
8 n ZQ>bV1H R€V%8 P k [ c SaZQS?] l V M ZQVV M?O TU8 P T<ZQV nM 8 P > c } X c TU8:>aZQV OQX S l c V M?O [[ZQ> X c T
d Z n V c [ PP 9 nM Z P V M?O _ L OQX c Lb8 XbO%nM ZQ[W@ OQP ZQ> XP 9?[ d Z n"OP VZQV O0nM ZQ[W@ OQP H
'( %&*4-&/ = / = /
% 8#, ,
NL M?O T<ZQV nM 8:>?@ cQd V M?O VW[ZQ> P 8 P V c [ P 8 P%O bL VW[ O T O ] l :8 T ak c [WVZQ>bV8:> n 9?[W[ O >bVTU8:[W[ c [ c [
X 8OP O [ O >bVW8\ZQ] k ZQ8:[ P"v 8:> }M 8 nM V M?O T<ZQV nM?OQX [ZQVW8 c 8 PpP k OQn 8`_ OQX ZQ> X V M?O T<ZQV nM 8:>?@
S O V }NO1O >pV M?O V } c VW[ZQ> P 8 P V c [ PN} 8:V M 8:>pV M?O k ZQ8:[ P {g] c n ZQ]TU8 P T<ZQV nWM| 8 P cQd T<Z c [ n c >0J
n"O [W>H LNM?O TU8 P T<ZQV nWM?OQP cQd V M?O VW[ZQ> P 8 P V c [ PNn ZQ] n 9?]\ZQV OQX 8:>pV M?O k [ O sb8 c 9 P=P 9?S PqOQn VW8 c > P
[ O aOQn V c >?] l V M?O @ O > O [ZQ]aTU8 P T<ZQV nM?OQP cQd V M?O VW[ZQ> P 8 P V c [ P ZQ> X V M?O @i] c SaZQ]TU8 P T<ZQV nM
8 P T c [ O 8:T kac [WVZQ>bV1H R€> c [ XbO [V c0k [ c sb8 XbO 8:> dgc [WT<ZQVW8 c ><ZQS c 9?VV M?O T<ZQV nM 8:>?@ k [ cik J
O [WVW8 OQP cQd n 9?[W[ O >bVTU8:[W[ c [ P 8:T k ] O T O >bV OQX0} 8:V M V M?O V M [ O1O V l k OQP cQd VW[ZQ> P 8 P V c [ P"v V M?O
Z X Z n"O >bV%VW[ZQ> P 8 P V c [ P%}NO [ O k ZQ8:[ OQX 9 k Z Pn 9?[W[ O >bV%TU8:[W[ c [ P ZQ> X V M?O 8:[%TU8 P T<ZQV nM?O1P
}NO [ Opn ZQ] n 9?]\ZQV OQX 9 P 8:>?@I f 9aZQVW8 c > P H z V c H H LNM?OpOQf 9aZQVW8 c > P ZQ[ O [ O k O ZQV OQXM?O [ O
dgc [ n c >bs O >?8 O > n"O 3 3
3
z
: 1 0 0
>
z1 z : { 0 | 0 >
R 8:> n"O V M?O VW[ZQ> P 8 P V c [ P ZQ[ O 8 XbO >bVW8 n ZQ]: lXbOQP 8:@i> OQXv V M?O1l ZQ[ OO L k OQn V OQX V c M Z1s O
V M?OP ZQT On 9?[W[ O >bV v 8€H O H 3 Gz H LNM?O TU8 P T<ZQV nM?OQP cQd ZQ]:V M?O VW[ZQ> P 8 P V c [ k ZQ8:[ P=}NO [ O
n c T k 9?V OQX ZQ> X~PqM c } >38:> L ZQS?] O H ZQ> X ^-8:@i9?[ O H z H~^ c [ jB R ^I LP"v V M?O [ O
}NO [ O z wxiy k ZQ8:[ P 8:>UV c VZQ]€HN^ c [ #m Q F LP ZQ> X jB R ^I LP"v V M?O [ O}NO [ O
z1x Cx 66 k ZQ8:[ P H
LNM?O dgc ]: c } 8:>?@ c S PqO [WsiZQVW8 c > Pn ZQ><S O T<Z XbO 6
m 9?j[W[ OB >bR V ^QaI O Ls O ] z H z1z xQOyiy z H yz16y O yiy z1H yi1y OJ ybz H QzyQ O J ybz z H z1iy
xQ O J ybz
m
#
Q
L
H z 6 Oyiy H 6 iOyiy H z
1Oyiy
K
K
F
D
D
m#RbQ n F ZQL] OQX Z P jjB B R ^R ^I IL L z HH yQ1OOybyiyz z HH QQOOybyiyz z HH xiyyQ1OOybyiyz x HH z QQOOyiyiyy z H HQ
yQQOO J ybyiz y
L{ ZQS?| ]H O H pLNM?O TU8 P T<ZQV nM?OQP cQd V M?O VW[ZQ> P 8 P V c [ k ZQ8:[ P ZQV X 8OP O [ O >bV n 9?[W[ O >bV] O s O ] P
15
mismatch (σ(∆I/I)*100%)
CLBT
NMOS
CLBT as PMOS
Scaled up PMOS
10
5
0
1nA
10nA
100nA
Current Level
1uA
10uA
^-8:@i9?[ O H z
=LNM?O TU8 P T<ZQV nM?OQP cQd V M?O VW[ZQ> P 8 P V c [ k ZQ8:[ P ZQV X 8OP O [ O >bV n 9?[W[ O >bV=] O s O ] P H
jB R ^I LPn 9?[W[ O >bV k ZQ8:[ PM Z1s O V M?O S OQP VT<ZQV nM 8:>?@ k [ cik O [WVW8 OQP H LNM?O1l ZQ[ O
ZQS c 9?V V c VW8:T OQP S O VWV O [V M ZQ>V M?O0#m Q F LP H
K ]:V M c 9?@ M#m Q F LPUn 9?[W[ O >bV k ZQ8:[ PUPqM c } S O VWV O [pT<ZQV nM 8:>?@ k [ cik O [WVW8 OQP V M ZQ>
#m Q F LP cik O [ZQVW8:>?@Z P jB R ^I LP {€ZQS c 9?V VW8:T OQP|v V M?O1lPqM c 9?] X Z n VW9aZQ]: l
M Z1s OP 8:TU8:]\ZQ[=TU8 P T<ZQV nWM 8 d V M?O1lU}NO [ O V M?OP ZQT O%P M8 N O H
LNM?O TU8 P T<ZQV nWM cQd V M?O jB R ^I LP ] O s O ] P c P }M?O >V M?O1l%O >bV O [-V M?OP 9?S?V M [ OQPqM J
c ] X [ O @i8 c > v?}M 8 nM ZQ@i[ O1OQPN} 8:V M V M?O V M?O c [ l 8:> RwOQn VW8 c > H H H
HG
R€>UV M 8 PNnM Z k V O [ v V M?O%P VW[W9 n VW9?[ O ZQ> X ]\Z l c 9?V P cQd V M?O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP V OQP V nM 8 k
}NO [ O k [ OQPqO >bV OQX H LNM?O T O Z P 9?[ O T O >bV k [ c n"OQX 9?[ OQP dgc [%V M?O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd
m#Q F LP ZQ> X jB R ^I LP-}NO [ OXbO VZQ8:] OQX ZQ> X V M?O T O Z P 9?[ OQX T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd
V M?OXbO sb8 n"OQP}NO [ O k [ OQPqO >bV OQX ZQ> X ZQ>aZQ] l N OQX HR€V } Z PNn c > n ]:9 XbOQX V M ZQVN8:>UV M?O k [ c n"OQPWP
9 PqOQXv V M?O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd V M?O jB R ^I LPN}NO [ O Z k?k [ c Lb8:T<ZQV O ] l VW8:T OQP
S O VWV O [=V M ZQ>UV M ZQV cQd V M?O m#Q F LP ZQ> X V M ZQV cQd V M?O jB R ^I LP=}NO [ OO L k OQn V OQX
V c S OpP 8:TU8:]\ZQ[V c V M ZQV cQd V M?O m#Q F LP H LNM?O [ O dgc [ Owv ZQV%] O Z P V dgc [V M 8 P k [ c n"OQPWP"v
m#Q F LP TU8:@ M V%> c V0S O Z@ cwc X ZQ]:V O [W>aZQVW8:s O V c jB R ^I LP dgc [ n [W8:VW8 n ZQ]=T<ZQV nM 8:>?@
n 8:[ n 9?8:V P 9?>?] OQPWPn Z PWn c XbOQXn 8:[ n 9?8:V P=}NO [ O > c V9 PqOQX ZQ> X @i9aZQ[ X [W8:>?@ PN}NO [ OPqM ZQ[ OQX H
LNM 8 P [ OQPqO ZQ[ nMU} Z P _a[ P VT c VW8:siZQV OQX S l V M?O d Z n VV M ZQVV M?O [ O%}NO [ OPqO s O [ZQ] k [ O sb8 c 9 P
k 9?S?]:8 n ZQVW8 c > P c >V M?O S O VWV O [T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd m jB Rm c T k ZQVW8:S?] +O Q ZQV O [ZQ]
FN8 kac ]\ZQ[ L [ZQ> P 8 P V c [ P { #m Q F LP| V M ZQ><V M?O jB R ^I LP H=j c P V cQd V M?O T X 8 X > c V k O [ J
dgc [WTV M?OUn c T k ZQ[W8 P c > P 8:>~Z d ZQ8:[ O > c 9?@ M d Z PqM 8 c >~ZQ> X f 9aZQ>bVW8:VZQVW8:s O _a@i9?[ OQP%}NO [ O
> c V@i8:s O >Hj c [ O c s O [ vbX 9 O V c V M?O%n c T k ZQVW8:S?8:] 8:V l cQd #m Q F LPN} 8:V M V M?Om jB R k [ c J
n"OQPWP"v?#m Q F LP k [ c sb8 XbO ZQ>p8:> O L k O > P 8:s O ZQ]:V O [W>aZQVW8:s O V c V M?O FN8 m jB R k [ c n"OQPWP 9?> XbO [
V M?O VW[ O > X?P cQd V c X Z #l "JPRwl?P V O 4T JWB0> JqKZ J m=M 8 k { R B m| ZQ> X TUM8 L OQX<P 8:@i>aZQ] k [ c n"OQPWP 8:>?@?H
LNM?O [ O dgc [ Owv V M?O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd V M?O#m Q F LP ZQ> X jB R ^I LP}NO [ O 8:>bV O > XbOQX
V c S O0P VW9 X 8 OQXPql?P V O T<ZQVW8 n ZQ]: l ZQ> Xf 9aZQ>bVW8:VZQVW8:s O ] lwv 8:>V M?OM cik O cQd=k [ c sb8 X 8:>?@09 PqO J
d 9?] X ZQVZ dgc [ n 8:[ n 9?8:V XbOQP 8:@i> O [ P H R€> V M?O ]:8 V O [ZQVW9?[ Owv=#m Q F LP%M Z1s O ZQ] P c S O1O > 9 PqOQX
dgc [8:T k ] O T O >bVW8`>?@ n [W8:VW8 n ZQ] n 8:[ n 9?8:V PNP 9 nM Z PhKmNP"vaP 8:] 8 n c > n c nM ] O Z v ZQ> X SaZQ> X @wZ k
s c ]:VZQ@ O [ O d O [ O > n"OQP ,H R€><V M 8 P V M?OQP 8 P"v V M?O 8:[Z k?k ]:8 n ZQVW8 c > P}NO [ O d 9?[WV M?O [8:>bs OQP VW8:@wZQV OQXv
OQP k OQn 8\ZQ]: l V M?O kac PWP 8:S?8:] 8:V l cQd 9?VW8:] M8 N18:>?@%V M?O @wZQV O V O [WTU8:>aZQ] cQd V M?O0#m Q F LP H
LOQP V nM 8 k Pn c >bVZQ8:>?8:>?@ZQ[W[Z l?P cQd #m Q F LP ZQ> X jB R ^I LP}NO [ O d ZQS?[W8 n ZQV OQX
} 8:V M~K j R J K FD z J }NO ]: k [ c n"OQPWP H LNM?O ZQ[W[Z l?P%}NO [ OUXbOQP 8:@i> OQX dgc [0Z<@ cwc X
SaZQ]\ZQ> n"O S O V }NO1O >V M?O >b9?TpS O [ cQd XbO sb8 n"OQP"v >b9?TpS O [ cQd Z1siZQ8:]\ZQS?] O k 8:> P ZQ> X Z n1n 9?[Z n"l H
LNM?O%PWnM?O T O 8 P V c 9 PqO VW[ZQ> P TU8 PWP 8 c >p@wZQV OQP ZQ> XUPqM 8 d VN[ O @i8 P V O [ P V c PqO ] OQn V=8:> X 8:sb8 X 9aZQ]
XbO sb8 n"OQP 8:>V M?O ZQ[W[Z l?P H LNM?O [ O ZQ[ Opxix jB R ^I LP 8:>V M?O jB R ^I L ZQ[W[Z l ZQ> X
z #
m Q F LP 8:>UV M?O%#m Q F L ZQ[W[Z lwv @i8:sb8:>?@0Z%V c VZQ] cQd iyiy jB R ^I LP ZQ> X m Q F LP 8:><V M?O p} c [  8:>?@0V OQP V nM 8 k P H
#
6y
6
z
NL M?O0X [ZQ8:>ZQ> Xn c ]: OQn V c [ n 9?[W[ O >bV P cQd V M?O jB R ^I LP ZQ> Xm#Q F LP}NO [ O T O ZKJ
P 9?[ OQX [ OQP k OQn VW8:s O ] l [ZQ>?@i8:>?@ d [ c T z1y
V c z ~dgc [ jB R ^I LP ZQ> XUz1yiy X c } >
V c z dgc [ #m Q F LP H LNM?O TU8 P T<ZQV nM?OQP cQd V M?Opn 9?[W[ O >bV }NO [ O V M?O >ZQ>aZQ] l N OQX H
LNM?OXbO sb8 n"OQP}NO [ O ZQ] P ck ZQ8:[ OQX 9 k Z PNn 9?[W[ O >bV k ZQ8:[ P ZQ> X V M?O 8:[T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP
}NO [ O%n ZQ] n 9?]\ZQV OQX ,H R€V } Z P dgc 9?> X V M ZQVV M?O T<ZQV nM 8:>?@ k [ cik O [WVW8 OQP cQd V M?O jB R ^I L
}NO [ O 8:> d Z n V J VW8:T OQP S O VWV O [%V M ZQ>~V M c PqO cQd V M?O #m Q F LP HA M?O > V M?O #m Q F LP%}NO [ O cik O [ZQV OQX Z P jB R ^I LP ZQ> X V M?O 8:[%TU8 P T<ZQV nM?OQP}NO [ Opn c T k 9?V OQXv
8:V } Z P dgc 9?> X V M ZQVV M?O TU8 P T<ZQV nWM cQd V M?O jB R ^I LP} Z P ZQS c 9?V VW8:T OQP kacwc [ O [
V M ZQ>~V M ZQV cQd V M?O #m Q F LP HF l Z k?k ] l 8:>?@V M?O Q Z } cQd K [ O Z v TU8 P T<ZQV nWM?OQP cQd
jB R ^I LP=} 8:V M ]\Z l c 9?VNZQ[ O Z P 8:TU8:]\ZQ[-V c V M ZQV cQd V M?O #m Q F LP=}NO [ O ZQ]:T c P VNZ P
@ cwc X Z P V M c PqO cQd V M?O #m Q F LP H
LNM?O TU8 P T<ZQV nM [ OQP 9?]:V P}NO [ ONn c > P 8 P V O >bV } 8:V M V M c PqO 8:>V M?O ]:8 V O [ZQVW9?[ O H-7 c }NO s O [ v
k [ O sb8 c 9 PpP VW9 X 8 OQPUn c T k ZQ[ OQX3#m Q F LPU} 8:V M ]\ZQ[W@ O [ c s O [ZQ]:]\Z l c 9?VUZQ[ O ZV M ZQ>,V M?O
jB R ^I LP H LNM 8 PP VW9 XblPqM c }P V M ZQV #m Q F LP T<Z l > c VS O Zp@ cwc X ZQ]:V O [W>aZQVW8:s O V c
jB R ^I LP 8:> P c T On [W8:VW8 n ZQ]wT<ZQV nM 8:>?@ n 8:[ n 9?8:V P"v ZQV] O Z P V dgc [V M?OK j R J K FD z k [ c n"OQPWP V M ZQV } Z P 9 PqOQX H
R€> V M 8 PK k?k O > X 8ML v c ZQVW8:>?@@wZQV O V OQnM > c ] c @ l} 8:] =S O k [ OQPqO >bV OQX H LNM?O<P VW[W9 n VW9?[ O
cQd c ZQVW8:>?@@wZQV O jB R ^I LP ZQ> X V OQnM >?8 f 9 OQP dgc [0Z X W9 P VW8:>?@V M?O c ZQVW8:>?@ nM ZQ[W@ Owv
>aZQT O ] l V M?O%O ] OQn VW[ c >UVW9?>?> O ]: 8:>?@pZQ> X<M c V O ] OQn VW[ c >U8:> OQn VW8 c > v 8:> P VZQ> X ZQ[ Xm jB R
V OQnM > c ] c @i8 OQP ZQ[ O k [ OQPqO >bV OQX H LNM?OQPqO} c 9?] XpPqO [Ws O Z P V M?O SaZ P 8 P dgc [NV M?O 9?> XbO [ P VZQ> X J
8:>?@0V c V M?O ^#E J #m Q F LP ZQ> X V M?O 8:[Z k?k ]:8 n ZQVW8 c > P V c S O k [ OQPqO >bV OQX 8:> K k?k O > X 8MLUFH
B HSF HSF
A ?M O >,V M?O kac ] l?P 8:] 8 n c >3@wZQV O cQd ZQ> c [ X 8:>aZQ[ l jB R ^I L { kac ] lCzQ| 8 PUn c T k ] O V O ] l
P 9?[W[ c 9?> XbOQX S l c Lb8 XbO { |a} 8:V M c 9?V-ZQ> lO LbV O [W>aZQ] n c >?> OQn VW8 c > v V M?O @wZQV O 8 PP ZQ8 X V c
S O c ZQVW8:>?@0ZQ> X0 > c } >UZ P V M?O c ZQVW8:>?@%@wZQV O {€^E | H LNM?OnM ZQ[W@ O c >UV M?O kac ] l?P 8:] 8 n c >
} 8:] bV M?O > P 09 P O [=] OQPWP V M ZQ> y:z ] c PWP 8:> z1ylwO ZQ[ P 9?> XbO [[ cwc T/V O T k O [ZQVW9?[ O m ZQ[ 6 ?v
L F bz H^EG8 P V M 9 P Z0@ cwc X ZQ>aZQ] c @UT O T c [ l dgc [ n 8:[ n 9?8:V P cik O [ZQVW8:>?@<S O ] c } iyiy t0H
K > lUXbO sb8 n"O 8:> n c [ kac [ZQV OQX<} 8:V M c ZQVW8:>?@p@wZQV O 8 Pn ZQ]: OQX V M?O c ZQVW8:>?@p@wZQV O0XbO sb8 n"O H
R d > c } ZQ> c V M?O [ kac ] l?P 8:] 8 n c >]\Z lwO [{ kac ] l?xw| ]\Z l?P c >pV cikpcQd V M?O c ZQVW8:>?@@wZQV Owv V M?O
V cikkac ] l?P 8:] 8 n c > n ZQ> P VW8:] d 9?> n VW8 c >Z P Z@wZQV O V c V M?O jB R ^I L S?9?V-V M?O k O [ dgc [WT<ZQ> n"O
} 8:] S O KZ P OQn V OQX S l V M?O ZQT c 9?>bVZQ> X V l k O cQd nM ZQ[W@ OP V c [ OQX 8:>V M?O c ZQVW8:>?@U@wZQV O H
LNM 8 P 8 P V M?O c ZQVW8:>?@U@wZQV O VW[ZQ> P 8 P V c [ P ZQ> X V M?O0P VW[W9 n VW9?[ O ZQ> XPql TpS c ] P ZQ[ O0PqM c } >
8:>^-8:@i9?[ OK H z H
^-] c ZQVW8:>?@U@wZQV O VW[ZQ> P 8 P V c [ PM Z1s O S O1O > } 8 XbO ] l<P VW9 X 8 OQXP 8:> n"O V M?OUz QyiP ^F wziv
6x
6
VDD
Vgate(poly2)
Floating Gate
(poly1)
Source S
Body B
Gate Oxide
Vs
Gate G
Vd
hole
p+ Source
p+ Drain
PMOS floating
gate transistor
Drain D
Drain D
Gate G
n-well (body)
NMOS floating
gate transistor
Body B
Source S
^V-M?8:@iO9?Pq[ l OpTpK S Hc z] %P cQm d [ cDPWjP J PqB OQnR VW8 ZQc > >aX ZQ]NY=sbj8 O1B } R cQd c Y=ZQjVW8:>?B @UR @wZQVc O ZQVWVW8:[>?ZQ@<> P @w8 ZQP VV cO [ VWP [ZQ{g[W> 8:@P 8M P VV |c H [U{g] O d V | ZQ> X
R?R S vR?R Z vR $t 6 y?v E8 O 6 y H
R€> X 8:@i8:VZQ] n 8:[ n 9?8:V P"v V M?O1l ZQ[ O 9 PqOQX Z P > c >0J€s c ]\ZQVW8:] O
k [ c @i[ZQTUT<ZQS?] OXbO sb8 n"OQPNP 9 nM Z P I] OQn VW[W8 n ZQ]Y[ c @i[ZQTUT<ZQS?] O%eO Z X B>?] l j O T c [W8 OQP
{€I=Y e Bj P|v I] OQn VW[W8 n ZQ]NI[Z P ZQS?] O Y[ c @i[ZQTUT<ZQS?] O<eO Z X B>?] l j O T c [W8 OQP {€I=I=YJ
e Bj P| ZQ> X Z PqM T O T c [W8 OQP =O1
O 6 H LNM?O c ZQVW8:>?@@wZQV OQP%n ZQ> P V c [ OUnM ZQ[W@ OQP dgc [
Z] c >?@ VW8:T O V c [ O k [ OQPqO >bV0S?8:Vp8:> dgc [WT<ZQVW8 c > cQd z "JP c [ y "JP H LNM?O1l ZQ[ O 8:T kac [WVZQ>bV
8:>T c XbO [W> O ] OQn VW[ c >?8 nOQf 9?8 k T O >bVZ P V M?O1l ZQ[ O > c 0> J€s c ]\ZQVW8:] O ZQ> XO ] OQn VW[W8 n ZQ]: l k [ c J
@i[ZQTUT<ZQS?] O H
^-] c ZQVW8:>?@~@wZQV O~XbO sb8 n"OQP ZQ[ O ZQ] P c 9 PqOQX 8:>Z n1n 9?[ZQV O ZQ>aZQ] c @ n c T k 9?VW8:>?@ P ZQ> X
n 8:[ n 9?8:V0VW[W8:TUTU8:>?@S OQn ZQ9 PqO V M?O c ZQVW8:>?@~@wZQV OnM ZQ[W@ On ZQ>,S On c >bVW[ c ]: OQX ZQ]:T c P V
Z P Z n1n 9?[ZQV O Z P c > OO ] OQn VW[ c >?8 nnM ZQ[W@ O H j8:> nM3M Z P 9 PqOQX 8:V dgc [<8:T k ] O T O >bVW8`>?@
VW[ZQ> P ]:8 > O ZQ[ n 8:[ n 9?8:V P j8:> Hui8:> O V1H%ZQ]€H M Z1s O 9 PqOQX 8:V dgc [S?9?8:] X 8:>?@p> c 0> J€s c ]\ZQVW8:] O
n c T k 9?VZQVW8 c > n"O ]: u !e Q H%BV M?O [Z k?k ]:8 n ZQVW8 c > P 8:> n ]:9 XbO0P 8:>?@i] O J€VW[ZQ> P 8 P V c [ P 8:] 8 n c >
Pql >aZ k PqOQP h 7jj ZQ> Xh K n c >bs O [WV O [ P ACt e H
p-substrate
B K ]:V M c 9?@ M0P 8:] 8 n c > c Lb8 XbO 8 P ZQ> O L n"O ]: O >bVa8:> P 9?]\ZQV c [ vwP 8:@i>?8`_ n ZQ>bV>b9?TpS O [ P cQd O ] OQn VW[ c > P
n ZQ> P VW8:] ] O Z1s O V M?O c ZQVW8:>?@3@wZQV O 8 d V M?O c Lb8 XbO 8 P V M 8:> O > c 9?@ M H Kn1n c [ X 8:>?@ V c
6
oxide
Floating Gate
Vtun
electrons tunnel
into n-well
n+
n-well
^O-] 8:OQ@in 9?VW[[ Oc > K d [H xc T m [ c c ZQPWVWP 8:J >?PqOQ@pn @wVW8 ZQc V >aO ZQV]M sb[ c8 O19?} @ M PqM VW9?c }>?> 8:>?O @]: 8:>?M @?c }H ZQ> J }NO ]:8 P 9 PqOQX V c [ O T c s O
f 9aZQ>bVW9?T V M?O c [ lwv V M?OO ] OQn VW[ c >38 P Z n VW9aZQ]: l Z P k ZQ> cQd } Z1s O J d 9?> n VW8 c >38:> P k Z n"O H
A M?O >ZQ> O ] OQn VW[ c > O > n c 9?>bV O [ P ZQ> O > O [W@ l SaZQ[W[W8 O [ }M 8 nM 8 P ]\ZQ[W@ O [%V M ZQ>8:V P V c VZQ]
O > O [W@ lwv V M?O [ O 8 PP VW8:] ?Z_a>?8:V O k [ c SaZQS?8:] 8:V l dgc [=V M?OO ] OQn VW[ c >V c n [ c PWP V M?O SaZQ[W[W8 O [=ZQ> X
V M?O k [ c SaZQS?8:] 8:V l 8 P 8:>bs O [ PqO ] lpO L kac > O >bVW8\ZQ]: l k [ cikac [WVW8 c >aZQ]V c V M?O V M 8 n > OQPWP cQd V M?O
SaZQ[W[W8 O [ t%Z PWyiy H LNM 8 P 8 P > c } Z P VW9?>?> O ]: 8:>?@?H R VZQ> X ZQ[ Xm jB R k [ c n"OQPWP 9 P 9aZQ]: l
M Z P V M?O @wZQV O c Lb8 XbO ZQS c s O iy v}M 8 nM 8 P V cwc V M 8 n dgc [ c S PqO [WsiZQS?] O VW9?>?> O ]: 8:>?@?H
7 c }NO s O [ vi}M?O >UV M?OO ] OQn VW[W8 n _ O ] X Z n [ c PWP V M?O c Lb8 XbO 8 P=M 8:@ MUO > c 9?@ Mv 8:V } 8:] ?[ OQX 9 n"O
V M?O<O P OQn VW8:s OpO > O [W@ l SaZQ[W[W8 O [ } 8 X V M ZQ> Xv V M 9 P"v 8:> n [ O Z PqO V M?O k [ c SaZQS?8:] 8:V l cQd V M?O
O ] OQn VW[ c >V ck O > O VW[ZQV O V M?O 8:> P 9?]\ZQV c [1H LNM 8 P k [ c n"OQPWP 8 P0n ZQ]: OQX _ O ] XO TU8 PWP 8 c >~{ c [
^ c } ] O [ JqD c [ XbM?O 8:T L 9?>?> O ]:8 >?@ QR g| H^ c [0Z SaZQ[W[W8 O [ } 8:V M SaZQ[W[W8 O [ M?O 8:@ M V
9?> XbO [ZQ> O LbV O [W>aZQ] O ] OQn VW[W8 n _ O ] X cQd v V M?OUn 9?[W[ O >bV XbO > P 8:V l cQd V M?O VW9?>?> O ]: 8:>?@
n 9?[W[ O >bV n ZQ>S O [ O k [ OQPqO >bV OQX Z P { x | 3 3
'
6 O L k +' { K H zQ|
}M?O [ Owv x } 8:V M S O 8:>?@%V M?O Y]\ZQ> n# "JP-n c > P VZQ>bV v ' 8 P V M?OO ] OQn VW[ c >?8 n=nM ZQ[W@ Owv
ZQ> X 8 P V M?O d [ O1O J O ] OQn VW[ c >UT<Z PWP H
Kn1n c [ X 8:>?@V c V M?O VW9?>?> O ]: 8:>?@ OQf 9aZQVW8 c > v V c Z nM 8 O s O Z[ O Z P c >aZQS?] O VW9?>?> O ]: 8:>?@
n 9?[W[ O >bV v V M?O Z k?k ]:8 OQX O ] OQn VW[W8 n _ O ] X Tp9 P V%S OM 8:@ M~O > c 9?@ M H LNM 8 P0n Z P V P ZQ> c V M?O [
k [ c S?] O T v V M ZQVUV c Z nM 8 O s OUM 8:@ M3O > c 9?@ M _ O ] Xv V M?O @wZQV O c Lb8 XbO T<Z lM Z1s O V c S O
p-substrate
6
S?8\Z PqOQX > O ZQ[8:V P S?[ O Z ?X c } >s c ]:VZQ@ O { iy m=M Z g| H^ c [WVW9?>aZQV O ] lwv c Lb8 XbO
S?[ O Z ?X c } > n ZQ>pS O Z1s c 8 XbOQX0} 8:V MpP k OQn 8\ZQ]a]\Z l c 9?V1H^-8:@i9?[ OK H x%PqM c }P V M?OP VW[W9 n VW9?[ O
cQd V M?O VW9?>?> O ]: 8:>?@ }NO ]:aV M ZQV n ZQ><S O 9 PqOQX 8:><ZQ> J }NO ]: k [ c n"OQPWP"v 8:> }M 8 nM V M?OOQX @ O
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dgc [ Owv VW9?>?> O ]: 8:>?@ O ] OQn VW[W8 n _ O ] X~n ZQ>~S O Z nM 8 O s OQX} 8:V M ] c }NO [0s c ]:VZQ@ Owv ZQ> X c Lb8 XbO
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L c Z nM 8 O s O VW9?>?> O ]: 8:>?@<8:>~ZQ> J }NO ]: m jB R k [ c n"OQPWP"v c > O<n c 9?] X W9 P V P 8:T k ] l
Z k?k ] l M 8:@ M s c ]:VZQ@ O V c ZQ> J }NO ]:€H LNM 8 P T O V M c X n ZQ>3V M?O >~S O 9 PqOQX V c [ O T c s O
O ] OQn VW[ c > P d [ c T#V M?O c ZQVW8:>?@<@wZQV O ZQ> X V M 9 P [ OQX 9 n"O V M?O kac V O >bVW8\ZQ] cQd V M?O c ZQVW8:>?@
@wZQV O H
B F SIFG SIF
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nM ZQ>?> O ] n ZQ[W[W8 O [ P"v-M c ] OQP"v} 8:] n ZQ9 PqO 8:T k Z n V%8 c >?8MNQZQVW8 c > }M?O > n c ]: 8 X 8:>?@ } 8:V M V M?O
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} 8:] V M?O >3VW[Z1s O ]SaZ n V c V M?OnM ZQ>?> O ] v @wZQ8:>?8:>?@ T c [ O<O > O [W@ l H R c T O<O ] OQn VW[ c > P
} 8:] S OQn c T OUO > O [W@ O VW8 nUO > c 9?@ M V cc s O [ n c T O V M?OP 8:] 8 n c >~SaZQ[W[W8 O [UZQ> X~O >bV O [0V M?O
@wZQV O H LNM 8 P k M?O > c T O > c ><8 PN > c } >Z P V M?O%M c V O ] OQn VW[ c > O P OQn V%{€^-8:@i9?[ OK H w| H LNM?O
8:> OQn VW8 c > n 9?[W[ O >bV8 PO L kac > O >bVW8\ZQ]: l k [ cikac [WVW8 c >aZQ]V c V M?O 8:> OQn VW8 c >0s c ]:VZQ@ Owv 0 ) H R€V
n ZQ>US O 9 PqOQX V c 8:> n [ O Z PqO V M?O >b9?TpS O [ cQd O ] OQn VW[ c > P"v 8€H O H XbOQn [ O Z PqO V M?O kac V O >bVW8\ZQ] v 8:>
Z c ZQVW8:>?@p@wZQV O H
6
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Vinj
ep+
holes
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n-well
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p-substrate
B HG
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V OQnM > c ] c @i8 OQP H=I] OQn VW[ c >UVW9?>?> O ]: 8:>?@0ZQ> XUM c V O ] OQn VW[ c >p8:> OQn VW8 c > }NO [ O k [ OQPqO >bV OQX V c
S O<O P OQn VW8:s O V OQnM >?8 f 9 OQP dgc [pZ X W9 P VW8:>?@V M?O >b9?TpS O [ cQd O ] OQn VW[ c > P 8:> V M?O c ZQVW8:>?@
@wZQV O d ZQS?[W8 n ZQV OQXU} 8:V MP VZQ> X ZQ[ X
x m jB R k [ c n"OQPWPqOQP H
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[ OQf 9?8:[ OQX V c VW[W8:T V M?O B L-K H LNM?O%O L k O [W8:T O >bVZQ]?[ OQP 9?]:V P ZQ[ O k [ OQPqO >bV OQX H
HC G,H DI IFH I <B !G D HSF HSF HSFKC HSF !G,H G,H D DF GD <D HG
h 9 O V c V M?O [ OQP 8 X 9aZQ]@wZQV OO P OQn V cQd V M?Om#Q F LP { XbO VZQ8:] OQX 8:> RwOQn VW8 c > H b|v V M?O
n c ]: OQn V c [ n 9?[W[ O >bV8 PXbO k O > XbO >bV c >V M?O @wZQV O s c ]:VZQ@ O H LNM 8 P%n ZQ>S O 9 PqOQX V c VW[W8:T
V M?O c P PqO V cQd Z X 8OP O [ O >bVW8\ZQ]NZQT k ]:8`_ O [8 d c ZQVW8:>?@@wZQV Om#Q F LP {€^E#J m#Q F LP| ZQ[ O
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66
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M1
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FQ2
M2
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Vout
M4
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9 PqOQX Z P V M?OX O8 P O [ O >bVW8\ZQ]8:> k 9?V k ZQ8:[ P H
Kx J P VZQ@ O B k O [ZQVW8 c >aZQ] L [ZQ> PWn c > X 9 n VZQ> n"O~K T k ]:8`_ O [<{qB L-K%|Un c >bVZQ8:>?8:>?@3Z
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O >bVW8\ZQ]a8:> k 9?V P"v 0z ZQ> X x H LNM?O ^E%B L-KC} Z PNP 8:Tp9?]\ZQV OQX 8:><Y R ,Y R m I } 8:V M ZQ]:
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ZQ> Xz n 9?[W[ O >bV P c 9?[ n"O H LNM?O @wZQ8:> $ZQ> X I=ZQ[W] l s c ]:VZQ@ O B cQd V M?O S?8 kac ]\ZQ[NVW[ZQ0> J
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6
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iy
−7
8.5
x 10
8
Collector current/A
7.5
7
6.5
6
5.5
5
1
2
3
4
5
6
Gate Voltage/V
7
8
9
10
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8:>bs O [ P 8 c > va}M 8 nM 8 P V M?O [ OQP 8 X 9aZQ]@wZQV O0O P OQn V1H LNM?O ]\ZQV O [ZQ] n c ]: OQn V c [ n 9?[W[ O >bV{ ! |
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V M?O 8:>bV O [ d Z n"O} 8:] 8:> n [ O Z PqO H
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Z k?k ]:8 n ZQVW8 c > P 8 d V M?O VW[ZQ> P 8 P V c [ P 8 P S?8\Z PqOQX 8:>3V M?O}NO Z  8:>bs O [ P 8 c >~[ O @i8 c >{ z | HC7 c }NO s O [ v}M?O > !,8 P ]:8 TU8:V OQX S l Z n 9?[W[ O >bV P c 9?[ n"O { }M 8 nM 8 P > c VUV M?O
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A (%&*4-&/&
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ZQ> X > c >0J€s c ]\ZQVW8:] O @wZQV O s c ]:VZQ@ O R E 66 vbm ZQ[ 6 ?vwL F bz€v Z c ZQVW8:>?@@wZQV On ZQ>pS O 9 PqOQX
Z P V M?O @wZQV O V O [WTU8:>aZQ] cQd Z m#Q F L HR€>pV M 8 P k [ c n"OQPWP"v V M?OK jR J K FD z
5X c 9?S?] O J
kac ] l?P 8:] 8 n c > J }NO ]: k [ c n"OQPWP"v kac ] lz 8 P 9 PqOQX Z P V M?O c ZQVW8:>?@@wZQV O {€^E | ZQ> X kac ] l?x
8 P 9 PqOQX Z P V M?O%n c >bVW[ c ]@wZQV O { m E | cQd V M?O0#m Q F L { 0z ZQ> X %x 8:><^-8:@i9?[ O FH zQ| H
LNM?O ]\Z l c 9?V cQd ^#E J #m Q F L 8 P0PqM c } >~8:>~^-8:@i9?[ O FH H R 8:> n"O kac ] lz 8 P0n c T k ] O V O ] l
P 9?[W[ c 9?> XbOQX S l v V M?OnM ZQ[W@ O 8:> P 8 XbO} 8:] P 09 P O [p] OQPWP V M ZQ> y :z ] c PWP 8:> z1y
lwO ZQ[ P 9?> XbO [=[ cwc T/V O T k O [ZQVW9?[ O m ZQ[ 6 ?vwL F bz H^E38 P V M 9 P Z@ cwc X ZQ>aZQ] c @T O 4T J
c [ l dgc [ n 8:[ n 9?8:V P cik O [ZQVW8:>?@S O ] c } iyiy t0H LNM?OP VW[W9 n VW9?[ O cQd Z^#E J #m Q F L 8 P V M?O
P ZQT O Z P V M ZQV cQd ZQ> c [ X 8:>aZQ[ l3#m Q F L S OQP 8 XbOQP V M ZQVpZ c ZQVW8:>?@@wZQV O { XbO VZQ8:] OQX 8:>
K k?k O > X M8 L K%| 8 P Z X?XbOQX H LNM?O _a@i9?[ O ZQ] P c PqM c }P V M?O J }NO ]:a9 PqOQX dgc [ O ] OQn VW[ c >pVW9?0> J
Vtun-
−
FG1
FQ1
Vsrc-
Vinj-
+
Follower for
reading VFG1
^-ZQ> 8:@iX 9?8:[ > O OQFn H VW8 c > Q Z l jc 9?B V R cQ^d I ^L E#J {gm#[W8:Q@ MF VL V ci{gVk ci| k ZQ]> O X d V |V vM?VOM?PWO nVWM?9?O >?T<> ZQO VW]:8 n8:>?X @ 8\ZQ @iJ }N[ZQO T]:{g{gV S cic k VWV TUc T 8 X?| X H ] Oi|v
> O ]: 8:>?@0ZQ> X jB R ^I L 9 PqOQX dgc [ M c V O ] OQn VW[ c >U8:> OQn VW8 c >H R 8:> n"O V M?O c ZQVW8:>?@p@wZQV O
cQd V M?O ^E#J m#Q F L 8 Pn c >?> OQn V OQX V c V M?O @wZQV O ZQS c s O V M?O J }NO ]:?ZQ> X V M?O jB R ^I Lv
V M?O ZQT c 9?>bV cQd nM ZQ[W@ OQP 8:> c ZQVW8:>?@@wZQV On ZQ>S On c >bVW[ c ]: OQX V M [ c 9?@ M VW9?>?> O ]: 8:>?@ZQ> X
M c V O ] OQn VW[ c >U8:> OQn VW8 c >H
KP V M?O c ZQVW8:>?@~@wZQV O Tp9 P V0S O 8 P c ]\ZQV OQX V c k [ O s O >bVpV M?O ] O Z  ZQ@ O cQd nM ZQ[W@ Owv
V M?O c ZQVW8:>?@<@wZQV O 8 Pn c >?> OQn V OQX V c Z dgc ]: c }NO [ va}M c PqO c 9?V k 9?V%8 Pn c >?> OQn V OQX V c ZQ>
c 9?V k 9?V k 8:>H LNM?O kac V O >bVW8\ZQ] cQd V M?O c ZQVW8:>?@0@wZQV O} 8:] aS O T c X 8`_ OQX S l 8:> OQn VW8 c > c [
VW9?>?> O ]: 8:>?@<V c VW[W8:T#V M?O B L-K P c V M ZQVV M?O c P PqO Vs c ]:VZQ@ O 8 P sb8:[WVW9aZQ]: l N O [ c H LNM?O
kac V O >bVW8\ZQ] cQd V M?O c ZQVW8:>?@p@wZQV On ZQ>S O [ O Z X V M [ c 9?@ M V M?O c 9?V k 9?V cQd V M?O dgc ]: c }NO [1H
-
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""!
NL M?O VW9?>?> O ]: 8:>?@ P VW[W9 n VW9?[ O 8 P dgc [WT OQX S l ]\Z l 8:>?@V M?O c ZQVW8:>?@0@wZQV O kac ] l?P 8:] 8 n c > c s O [
ZQ> J }NO ]:€H K n Z k Z n 8:V c [U8 P dgc [WT OQX~} 8:V M V M?O @wZQV O c Lb8 XbO Z n VW8:>?@3Z P ZQ> O > O [W@ l
SaZQ[W[W8 O [ k [ O s O >bVW8:>?@0V M?OO ] OQn VW[ c > P ] O Z1sb8:>?@0V M?O ^E {€^-8:@i9?[ O FH b| H7 c }NO s O [ v V M?O [ O
8 P Z_a>?8:V O k [ c SaZQS?8:] 8:V l dgc [NZQ> O ] OQn VW[ c >0V c%k Z PWP V M [ c 9?@ M ZV M 8:> O > O [W@ l SaZQ[W[W8 O [ O s O >
V M c 9?@ M V M?O V c VZQ] O > O [W@ l cQd V M?OO ] OQn VW[ c >08 P ] OQPWP V M ZQ>pV M ZQV cQd V M?O SaZQ[W[W8 O [ vw}M 8 nM 8 P
 > c } ><Z P VW9?>?> O ]: 8:>?@p{ RwOQn VW8 c > K H xw| H Kn1n c [ X 8:>?@%V c I f 9aZQVW8 c > K H ziv V M?O VW9?>?> O ]: 8:>?@
k [ c SaZQS?8:] 8:V l XbO k O > X?P0M?O Z1sb8:] l c >3V M?O c Lb8 XbO V M 8 n > OQPWP , v V O T k O [ZQVW9?[ O v ZQ> X
V M?O s c ]:VZQ@ O Z n [ c PWP V M?O c Lb8 XbO ) v?}M?O [ O ) ZQ> X ZQ[ O V M?O VW9?>?> O ]: 8:>?@
s c ]:VZQ@ O Z k?k ]:8 OQX V c V M?O J }NO ]:-ZQ> X ^EGs c ]:VZQ@ O [ OQP k OQn VW8:s O ] lp}M?O >V M?O dgc ]: c } 8:>?@
OQf 9aZQVW8 c ><8 PP 9?S P VW8:VW9?V OQX 8:>bV c I f 9aZQVW8 c > K H z ) {€FH xw|
,
}M?O [ O 38 P V M?ONO ] OQn VW[W8 n _ O ] XP VW[ O >?@iV M Z n [ c PWP V M?O c Lb8 XbO H LNM?O [ O dgc [ Owv V M?O VW9?>?> O ]: 8:>?@
n 9?[W[ O >bV ) ZQV n c > P VZQ>bVV O T k O [ZQVW9?[ O%n ZQ><S O [ O k [ OQPqO >bV OQX Z P 7j h ) { ) , |
{€FH w|
F l Z k?k ] l 8:>?@Z M 8:@ MO > c 9?@ M s c ]:VZQ@ O V c V M?Op}NO ]: v V M?OpO ] OQn VW[ c > Pn c >b_a> OQX 8:>V M?O
c ZQVW8:>?@@wZQV OUn ZQ>VW9?>?> O ]V M [ c 9?@ M V M?O @wZQV O c Lb8 XbO 8:>bV c V M?O J }NO ]:=ZQ> Xv } 8:]
8:> n [ O Z PqO H R 8:> n"O V M?OOQX @ OQP cQd V M?O kac ] l?P 8:] 8 n c ><ZQ[ O ] c n ZQV OQX ZQVNV M?O TU8 X?X ] O cQd V M?O J
}NO ]: v V M?OO ] OQn VW[W8 n _ O ] X 8 P=n c > n"O >bVW[ZQV OQX V M?O [ O ZQ> X V M?O VW9?>?> O ]: 8:>?@s c ]:VZQ@ O [ OQf 9?8:[ OQX
8 P V M?O >[ OQX 9 n"OQX m ZQ[ 6 H-^ c [V M?O bz V M 8 n @wZQV O c Lb8 XbO 8:> c 9?[ k [ c n"OQPWP"v V c M Z1s O
ZU[ O Z P c >aZQS?] O [ZQV O cQd VW9?>?> O ]: 8:>?@{ i|v ) M Z P V c S O ZQVZQS c 9?V x pH
LNM 8 P 8 P S O ] c } V M?O S?[ O Z ?X c } >ps c ]:VZQ@ O cQd V M?O c Lb8 XbO}M 8 nM 8 P ZQS c 9?V iy bz C
x pH
-
67, " 0# 0#
L c [ OQX 9 n"O v ZTU8:>?8:T09?T P 8MN O jB R ^I L } 8:V M V M?OP c 9?[ n"O ZQ> X S c Xbl0n c >?> OQn V OQX
V c @ O V M?O [0ZQ> X Z^E5Z P V M?O @wZQV O V O [WTU8:>aZQ]8 P 9 PqOQX dgc [ M c VJ O ] OQn VW[ c >8:> OQn VW8 c > Z P
PqM c } >8:>^-8:@i9?[ O FH { XbO VZQ8:] OQX 8:> RwOQn VW8 c > K H w| H LNM?OpP c 9?[ n"O s c ]:VZQ@ O { |M Z P
V c S O [ZQ8 PqOQX ZQS c s O v c [0ZQ]:V O [W>aZQVW8:s O ] lwv n ZQ>~S O k 9?]: OQX V c S O ] c }NO [%V M ZQ>
S l [ OQX 9 n 8:>?@UV M?OUm E/s c ]:VZQ@ OwvP c V M ZQV%V M?O VW[ZQ> P 8 P V c [ n ZQ> n c > X 9 n V n 9?[W[ O >bV1H
A M?O >V M?OnM ZQ>?> O O] J X [ZQ8:>s c ]:VZQ@ O 8 PNM 8:@ MO > c 9?@ M {€Z nM 8 O s OQX S l ] c }NO [W8:>?@0V M?O
8:> OQn VW8 c >%s c ]:VZQ@ O 0 ) |viM c ] OQPO >bV O [W8:>?@V M?OX [ZQ8:0> J€V c J nM ZQ>?> O ] XbO k ] O VW8 c >%[ O @i8 c > } 8:]
n ZQ9 PqO 8:T k Z n V8 c >?M8 NQZQVW8 c >@ O > O [ZQVW8:>?@ O ] OQn VW[ c 0> J M c ] O k ZQ8:[ P 9?> XbO [V M?OM 8:@ MO ] OQn VW[W8 n
_ O ] X 7j h H R c T OpO ] OQn VW[ c > P} 8:] S OQn c T OpO > O [W@ O VW8 n { M c V |O > c 9?@ M V c 8:> OQn V
8:>bV c V M?O ^EGZQ> X [ OQX 9 n"O #H R€V } Z P dgc 9?> X V M ZQV 0 ) # } 8:] @i8:s O%P 8:@i>?8`_ J
n ZQ>bV8:> OQn VW8 c >H
-
'(,," 8
" @$.
(=@/4
LNM?O B L-KC} 8:V M c 9?V^E#J m#Q F LP=} Z P V OQP V OQX _a[ P V1H,R€>UV M 8 P=n 8:[ n 9?8:V v V M?O @wZQV OQP cQd V M?O
m#Q F L }NO [ OUn c >?> OQn V OQX V ck Z X?P%}M 8 nM}NO [ Opn c >bVW[ c ]: OQX S l ZQ> O LbV O [W>aZQ]=s c ]:VZQ@ O
P c 9?[ n"O H LNM?O @wZQV OQP cQd V M?Om#Q F LPN}NO [ O S?8\Z PqOQX ZQV ZQ> X V M?O ZQ> X }NO [ O
PqO VV c /ZQ> Xz [ OQP k OQn VW8:s O ] l H-^-8:[ P V v V M?O c P PqO V cQd V M?O B L-KC} Z P T O Z P 9?[ OQX V c
S O ZQS c 9?V }M?O > = v}M?O [ O ZQ> X = ZQ[ O V M?O @wZQV O
s c ]:VZQ@ OQP cQd V M?O kac P 8:VW8:s O ZQ> X > O @wZQVW8:s O<X 8OP O [ O >bVW8\ZQ]=8:> k 9?V P H LNM?O } Z P V M?O >
] c }NO [ OQX V c z Qx 6 ZQV }M 8 nM V M?O c P PqO V } Z P dgc 9?> X V c S O ] OQPWP V M ZQ> xiy
UH LNM?O
1.5
1
Output Voltage/V
0.5
0
−0.5
−1
−1.5
−0.03
Amplifier with positve offset before trimming
Amplifier with negative offset before trimming
Amplifier with negative offset after trimming
Amplifier with positive offset after trimming
−0.02
−0.01 Differential input(V+
0
− V−)/V 0.01
0.02
0.03
-}N^ 8:O @i[ 9?O [ VO Z F8:>?H @ z% L/mNZP P cQ[ d O VWO [W[ 8:TUO > T n"OiOQ| X H ZQ> X 9?>bVW[W8:TUT OQX B L-K {€ZQ]:V M?O T O Z P 9?[ O T O >wV P
d
c ]:VZQ@ O%L [ZQ> P d O [ m=M ZQ[Z n V O [W8 P VW8 n { %Lm| 8 P k ] c VWV OQX 8:>U^-8:@i9?[ O FH H K ]:V M c 9?@ M V M?O
VW[ZQ> P d O [ n 9?[Ws OQP cQd V M?O B L-K ZQ[ O > c V Pql TUT O VW[W8 nQv1}M 8 nM TU8:@ M V-S OX 9 O V c V M?OM 8:@ M
n c TUT c >pT c XbO 8:> 9 O > n"Owv 8:V } Z P dgc 9?> X V M ZQVV M?O VW[ZQ> P d O [ nM ZQ[Z n V O [W8 P VW8 n} Z P > c V
nM ZQ>?@ OQX Z d V O [VW[W8:TUTp8:>?@?H R 8:> n"O V M?O d ZQS?[W8 n ZQV OQX B L-KP ZQ]: M Z X ZQ>8:>?8:VW8\ZQ] kac P 8:VW8:s O
c P PqO V v 8:> c [ XbO [0V c n c >b_a[WTV M?O kac PWP 8:S?8:] 8:V l cQd VW[W8:TUTU8:>?@U> O @wZQVW8:s O c P PqO V P 9 P 8:>?@
[ OQP 8 X 9aZQ]-@wZQV O0O P OQn V v-ziz } Z P Z k?k ]:8 OQX V c V M?O > O @wZQVW8:s O 8:> k 9?VV c O Tp9?]\ZQV O ZQ>
cik O [ZQVW8 c >aZQ]ZQT k ]:8`_ O [ } 8:V M > O @wZQVW8:s O c P PqO V cQd ZQS c 9?V 0H LNM?O >~V M?O } Z PUn c >?> OQn V OQX SaZ n V c S?9?V } 8:V M % = XbOQn [ O Z PqOQX V c z ZQ> X 8:V } Z P
dgc 9?> X V M ZQV%8:V%@wZ1s O V M?OpP 8:TU8:]\ZQ[[ OQP 9?]:V%Z P V M?O kac P 8:VW8:s O c P PqO V n Z PqO H K ]:-V M?OUX ZQVZ
ZQ[ OPqM c } >8:>^-8:@i9?[ O FH H
-
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h 9 O V c n Z k Z n 8:VW8:s Opn c 9 k ]:8 >?@ O P OQn V P"v V M?Om E P cQd 0z ZQ> X %x 8:> ^-8:@i9?[ O FH z
Tp9 P VS O VW8 OQX V c Z_L OQX s c ]:VZQ@ OP c V M ZQVNV M?O c ZQVW8:>?@0@wZQV O s c ]:VZQ@ OQP { % > v % |
n ZQ>S OwO k V n c > P VZQ>bV1H#€R >?8:VW8\ZQ]: lwv % > ZQ> X % }NO [ O dgc 9?> X V c S O @i[ O ZQV O [V M ZQ>
} 8:V Mm E P VW8 OQX V c @i[ c 9?> X H LNM?Om E P=}NO [ O V M?O > n c >?> OQn V OQX V c @ O V M?O [ } 8:V M V M?O
@wZQV OQP cQd 0z V c ZQV v 9?> XbO [ }M 8 nM ZQ]:=V M?Om#Q F LP ZQ> X ^E#J m#Q F LP%}NO [ O
P 9?[ O V c S O 8:> XbO1O k S?8 kac ]\ZQ[UT c XbO H LNM?O c P PqO V } Z P T O Z P 9?[ OQX V c S O pH
7 c VJ O ] OQn VW[ c > 8:> OQn VW8 c > } Z P 9 PqOQX V c S?[W8:>?@ X c } > % 9?>bVW8:]NV M?O c P PqO V0S OQn ZQT O
> O @wZQVW8:s O H LNM 8 P 8 POQf 9?8:siZQ] O >bV0V c 8:> n [ O Z P 8:>?@V M?On 9?[W[ O >bV08:>3V M?O kac P 8:VW8:s O 8:> k 9?V
P 8 XbOwv c [0Z X?X 8:>?@Z<> O @wZQVW8:s O s c ]:VZQ@ OUP c 9?[ n"O 8:> PqO [W8 OQP} 8:V M 0 ) H L 9?>?> O ]:8 >?@ } Z P
V M?O >9 PqOQX V c VW[W8:T V M?O c P PqO V%S l S?[W8:>?@i8:>?@U9 k % ZQ@wZQ8:>HF l T c >?8:V c [W8:>?@ % ZQ> X , v ) } Z PNPqO V P 9 nM V M ZQV ) % x dgc [ n c ZQ[ PqO VW[W8:TUTU8`>?@ZQ> X
xix dgc [_a> O VW[W8:TUTp8:>?@ }M?O > , S OQn ZQT O > O ZQ[V c Km @i[ c 9?> X H h 9 O V cc Lb8 XbO
1.5
before trimming
immediately after trimming
12 days after trimming
2 months after trimming
Output Voltage (Vout)/V
1
0.5
0
−0.5
−1
−1.5
−0.03
−0.02
−0.01
0
0.01
Differential input (Vin+ − Vin−)/V
0.02
0.03
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[ O ]\Z L?ZQVW8 c > R E 66 v=m ZQ[ 6 ZQ> X V M?O<P T<ZQ]: n c 9 k ]:8 >?@ O P OQn VS O V }NO1O >V M?O ^E5ZQ> X
V M?O VW9?>?> O ]:8 >?@ J }NO ]: v V M?O c P PqO V M Z P V c S O c s O [J€VW[W8:TUT OQXP c V M ZQVp8:V } 8:] @i8:s O
TU8:>?8:T09?T c P PqO V%9?> XbO [%> c [WT<ZQ] cik O [ZQVW8 c > P H LNM?O %LmNP cQd V M?O ZQT k ]:8`_ O [S O dgc [ O
ZQ> X Z d V O [VW[W8:TUTU8`>?@ZQ[ OPqM c } >8:>^-8:@i9?[ O FH H K @wZQ8:> v ZQ]:V M c 9?@ M V M?O 8:[ %LmNP ZQ[ O
> c V Pql TUT O VW[W8 nQv V M?O %Lm 8 P 9?> nM ZQ>?@ OQX Z d V O [VW[W8:TUTU8`>?@?H LNM?O VW[W8:TUT OQX c P PqO V } Z P
] OQPWP V M ZQ> z1
y /ZQ> X % Cy iybz pH LNM?O [ OQP 9?]:V P=}NO [ O%n c > P 8 P V O >bV } 8:V M V M c PqO cQd
> c [WT<ZQ]-B L-KPXbOQPWn [W8:S OQX 8:><V M?O k [ O sb8 c 9 PPqOQn VW8 c >H
HG
R€>3V M 8 PpK k?k O > X M8 L v ZVW[ZQ> PWn c > X 9 n VZQ> n"O ZQT k ]:8`_ O [ }M 8 nM 9 PqOQXC#m Q F LP dgc [U] c }
> c 8 PqO ZQ> X V M?O [ OQP 8 X 9aZQ]a@wZQV OO P OQn V dgc [NVW[W8:TUTp8:>?@V M?O c P PqO V } Z P=XbOQPWn [W8:S OQX H^-] c ZQV J
8:>?@U@wZQV OQP}NO [ O0PqM c } >V c S O Zp@ cwc X} Z l dgc [ P V c [W8:>?@ nM ZQ[W@ OQP [ OQf 9?8:[ OQX dgc [B L-K
VW[W8:TUTU8`>?@?H K >^E%B L-KC} 8:V M 8:>?8:VW8\ZQ] c P PqO V cQd d ZQS?[W8 n ZQV OQX 9 P 8:>?@pZ z J }NO ]: m jB R k [ c n"OQPWPN} Z PP 9 n1n"OQPWP d 9?]: l VW[W8:TUT OQX V c S O ] OQPWP V M ZQ> z1
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