September 2013

aixACCT Systems GmbH
Talbotstr. 25
52068 Aachen
Germany
Phone: +49 (0) 241-47 57 03 0
Fax:
+49 (0) 241-47 57 03 66
www.aixacct.com  [email protected]
Newsletter • September 2013
Welcome to aixACCT Systems,
the world leader in metrology of piezoelectrics is expanding production!
aixACCT products have been selected for two production lines starting their activities in
early 2014. Both lines focus on production of piezoelectric MEMS. AixACCT has been one
of the driving forces of this market since 2005. Due to deep involvement into this market
we have foreseen the potential of this technology since 2002, our development of the
aixDBLI technology for wafer size samples has started at that time. Thorsten SchmitzKempen Chief Technical Officer at aixACCT has been
heading this development and made it successful, even
though many people did not believe in the possibility to
make this technology suitable for industrial application.
But Thorsten and his team managed it!
A new development that underlines our mission to build
customized system solution is our low loss tangent measurement down to 10-4.
Happy reading!
Yours sincerely,
Stephan Tiedke

TF Analyzer offers tan delta measurements down to 10-4
aixACCT development team headed by Thorsten Schmitz-Kempen did a great job by
developing a loss tangent measurement version that offers accuracy down to 10 -4,
which is really unique in the low frequency range of sub 100Hz and even better than
specialized manufacturers.
In a development project with US based cable industry aixACCT has developed a
complete system solution to achieve this goal. We managed to establish the solution in
less than 4 month. This is further proof of our company mission, building Advanced
Customized Characterization Technology - aixACCT.
aixACCT Systems GmbH
Talbotstr. 25
52068 Aachen
Germany
Phone: +49 (0) 241-47 57 03 0
Fax:
+49 (0) 241-47 57 03 66
www.aixacct.com  [email protected]
Newsletter • September 2013
 UFFC/ISAF has been the biggest conference ever held in this field
Prof. Ahmad Safari of Rutgers University organized the largest conference ever held in
this field. About 1800 participants have been counted in the large congress center in
Prague, where the excellently organized conference took place. AixACCT participated
with one of the largest booths in the exhibition and demonstrated live its scanning PES
technology and its aixPES system. For the latter one aixACCT offers piezoelectric
measurements with its high temperature sample holder that can go up to 600°C.
Thorsten at our booth at UFFC/ISAF in Prague before conference start
 AixACCT products have been selected for two production lines of
piezoelectric MEMS
aixACCT is proud to announce the selection of its products for a pilot line of
piezoelectric MEMS in Europe and a production line of one of the most promising piezo
based MEMS devices for mass production that is set up in Asia.
aixACCT Systems GmbH
Talbotstr. 25
52068 Aachen
Germany
Phone: +49 (0) 241-47 57 03 0
Fax:
+49 (0) 241-47 57 03 66
www.aixacct.com  [email protected]
Newsletter • September 2013
 AixACCT Systems Germany continues CDS membership
aixACCT Systems has decided to continue its CDS membership. The Center of
Dielectric Studies (CDS) at Penn State University is the world leading hot spot for
research and innovations in electroceramic materials. AixACCT has benefited from
CDS developments in the past and sees further potential by the activities of the
evolving Center for Dielectrics and Piezoelectrics (CDP) in the field of piezoelectric thin
films, which are driven by Prof. Susan Trolier-McKinstry.
AixACCT recommends the activities of the CDP to its customers for joint efforts in this
field. The idea of the center is that its members pay a membership fee that is used to
clarify scientific problems that are of interest for its members. The center has
successfully demonstrated its power for e.g. MLCC technology or multilayer actuators,
now it has started since a few years to do the same for piezoelectric MEMS technology.
Susan´s group owns different deposition and characterization tools and owns the
theoretical backgroud to give this field a decisive push forward.
Please consider a membership in the CDP.
 Scanning PES system extended for piezoMEMS structures
The scanning PES system has recently been introduced for characterization of arrays
e.g. of ultrasound devices and other structures that require consecutive measurements
on a larger number of devices.
Now this technology is available for thin film devices as well, cantilevers or membrane
can be characterized automatically in view of electrical as well as piezoelectric
propoerties. This capability completes aixACCT´s characterization tools for material
and device properties of piezoelectric thin films.
 Recent publications
"Electrode Size Dependence of Piezoelectric Response of Lead Zirconate Titanate
Thin Films Measured by Double Beam Laser Interferometer”, S. Subramanian, P.
Mardilovich, A. Mason, A.Roelofs, T. Schmitz-Kempen and S.Tiedke, accepted by APL