SUPERSCAN II

2-axis deflection units
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Highest precision with extreme performance
•Lowest drift values through twin-shell design
•Laser power capabilities up to 5 kW*
•Water tempering option (LD)
Available input apertures: 10, 12, 15, 20, 30 mm
YOUR BENEFITS
The innovative thermal management and modular design
make the SUPERSCAN II the perfect deflection unit for
demanding laser applications.The “enhanced” option offers a
50% better long-term drift performance. Long-term drift can
even be further minimized by an additional water tempering.
Innovation and Quality
Innovation and maintaining high product quality standards are
our priorities at RAYLASE. All our products are developed, built
and tested in our own laboratories and production facilities.
Through our world-wide support network we can offer best
maintenance and rapid service for our customers.
*at 50% duty cycle
Mirrors and Objectives
Scan mirrors and objectives with optimized mounts are available
for all typical laser types, wavelengths, power densities, focal
lengths and working fields. Customer specific configurations are
also possible.
Interfaces
The deflection units are compatible to the XY2-100 standard.
They can be digitally controlled by a control card, such as the
SP-ICE-1 PCI PRO.
Typical applications
Material processing such as engraving, marking, ablation, cutting,
welding, perforating, or high speed processing on the fly.
The LD option is extremely suitable for very precise application
requirements with low tolerance such as micro machining, drilling, ITO structuring or Ag patterning.
For challenging industrial applications
2-axis deflection units
SUPERSCAN II
General Specifications
Voltage
±15 to ±18 V
Repeatability (RMS) (1)
2 µrad
Current
3 A, RMS, max. 10 A
Max. Gaindrift (2)
50 ppm/K
Ripple / Noise
Max. 200 mVpp, @ 20 MHz bandwidth
Max. Offsetdrift (2)
Digital
XY2-100 Protocol
Long-term drift over 8 hours (2, 3)
SUPERSCAN II
Ambient temperature
+15 to +35 °C
Long-term drift over 24 hours (2, 3)
SUPERSCAN II-LD
< 200 µrad
Storage temperature
-10 to +60 °C
Long-term drift over 8 hours (2, 3)
SUPERSCAN IIE
< 150 µrad
Humidity
≤ 80 % non-condensing
Long-term drift over 24 hours (2, 3, 4)
SUPERSCAN IIE
< 100 µrad
Typical deflection (optical)
±0.393 rad
Auto-calibration option:
Resolution
12 µrad
Position accuracy (5)
Power supply
Interface signals
30 µrad/K
< 300 µrad
< 50 µrad
(1) SUPERSCAN IIE: 1 µrad (for low noise tuning). (2) Drift per axis. (3) After warming-up, variations of ambient temperature <1K. Variations of coolingwater 1K.
(4) SUPERSCAN IIE-LD, SUPERSCAN IIE-HS-LD options. (5) Depending on the interval between auto-calibration cycles.
Aperture Dependent Specifications – Mechanical Data
SUPERSCAN II-10
SUPERSCAN II-12
SUPERSCAN II-15
SUPERSCAN II-20
SUPERSCAN II-30
Input aperture (mm)
Deflection unit
10.0
12.0
15.0
20.0
30.0
Beam displacement (mm)
12.4
14.0
18.3
26.0
35.7
approx. 3.1
approx. 3.7
approx. 3.7
approx. 3.9
approx. 5.9
165 x 120 x 115
170 x 125 x 126
170 x 125 x 126
168.5 x 130 x 121
200 x 159 x 150
Weight (without objective) (kg)
Dimension (L x W x H) (mm)
Aperture Dependent Specifications – Dynamic Data
Deflection unit
Options
SUPERSCAN II-10
SUPERSCAN II-12
SUPERSCAN II-15
Standard
Low Drift
Autocal.
Standard
Low Drift
Autocal.
Standard
Low Drift
Autocal.
Acceleration time (ms)
≤ 0.19
≤ 0.19
≤ 0.22
≤ 0.25
≤ 0.25
≤ 0.30
≤ 0.32
≤ 0.32
≤ 0.36
Writing speed (cps) (1, 2)
> 800
> 800
> 700
> 650
> 650
> 550
> 500
> 500
> 435
Positioning speed (m/s) (1)
> 10.0
> 10.0
> 8.8
> 9.0
> 9.0
> 8.0
> 7.0
> 7.0
> 6.0
Deflection unit
SUPERSCAN II-20
Options
SUPERSCAN II-30
Standard
Low Drift
Autocal.
Standard
Low Drift
Autocal.
Acceleration time (ms)
≤ 0.60
≤ 0.60
≤ 0.69
≤ 0.75
≤ 0.75
≤ 0.80
Writing speed (cps) (1, 2)
> 350
> 350
> 300
-
-
-
Positioning speed (m/s) (1)
> 6.0
> 6.0
> 5.2
> 5.0
> 5.0
> 4.0
(1) With F-Theta lens f=163 / field size 120 mm x 120 mm. (2) Single-stroke font with 1 mm height.
Options
Water Tempering Specification
• Water tempering for low drift (LD)
Temperature (°C)
• Combination with 3-axis laser beam submodules
Recommended water pressure (bar)
2 - 3
Recommended water flow rate (l/min.)
4 - 6
Water (1)
• Camera adapter for process monitoring
Clean tap water with additives
22 - 28
(1) Caution: When using cooling water including deionized water, suitable additives must be
used to prevent the growth of algae and protect the aluminium parts against corrosion.
Additive recommendations: Standard industrial applications: e. g. CCL105 (NALCO).
Food & beverage, packaging applications: e. g. polypropylene glycol (Dow Chemical).
Please consult your additive supplier for dosage information.
• Enhanced option (E) for low long term drift values
High Speed Option: SUPERSCAN II-HS
SUPERSCAN II is also available for high speed applications as a HIGH
SPEED model (HS). Optimized high performance mirrors make this
superior speed possible. Optional water tempering (LD) ensures
additional excellent low drift.
Aperture Dependent Specifications – Dynamic Data
Deflection unit
Options
SUPERSCAN II-HS-15
SUPERSCAN II-HS-20
SUPERSCAN II-HS-30
Standard
Low Drift
Autocal.
Standard
Low Drift
Autocal.
Standard
Low Drift
Autocal.
UHS
Acceleration time (ms)
≤ 0.24
≤ 0.24
≤ 0.28
≤ 0.40
≤ 0.40
≤ 0.45
≤ 0.56
≤ 0.56
≤ 0.56
≤ 0.43
Writing speed (cps) (1, 2)
> 615
> 615
> 550
> 450
> 450
> 400
-
-
-
-
>9
>9
>8
>7
>7
>7
>6
>6
>6
>7
Positioning speed (m/s) (1)
(1) With F-Theta lens f=200 mm / field size 140 mm x 140 mm. (2) Single-stroke font with 1 mm height.
30
30
be 10
am
in
pu
t
47,60
4 x M4
60 ±0,01
2x
8
5 F8
6
15
50
12,40
beam displacement
17,48
13,20
M85x1
0
For challenging
30
30
industrial47,60
applications
17,48
be 10
am
in
pu
t
0
125
48,50
62,50
13,20
M85x1
12,40
0
beam displacement
Enhanced Option: SUPERSCAN IIE
4 x M4
50
15
>7
0
125
SUPERSCAN IIE is available with two different tuning options:
• LN = Low noise tuning
• W = Short acceleration time tuning
6
F8
5
> 615
>7
14
0beam displacement
Tuning
W
4 x M4
5
2x
≤ 0.24
60 ±0,01
> 450
> 9M85x1
(1) With F-Theta lens f=160 / field size 110 mm x 110 mm. (2) Single-stroke font with 1 mm height.
30
48,50
≤ 0.40
> 615
17,96
>6
Positioning speed (m/s) (1)
13,20
> 450
30
be 12
am
in
pu
t
-
Writing speed (cps) (1, 2)
5014
beam ≤
displacement
0.24
15
≤ 0.40
LN
>9
13,20
≤ 0.55
SUPERSCAN IIE-HS-LD-15
W
62,50
LN
44,20
LN
30
30
be 12
am
in
pu
t
Acceleration time (ms)
M85x1
SUPERSCAN IIE-HS-15
17,96
0
SUPERSCAN IIE-LD-15
Tuning
5
0
48,50
62,50
125
Aperture Dependent Specifications – Dynamic Data
Deflection unit
6
5 F8
2x
60 ±0,01
48,50
50
4 x M4
6
5 F8
5
15
0
62,50
44,20
125
2x
60 ±0,01
M85x1
30
be 15
am
in
pu
t
30
17,48
13,20
0
50
18,30
beam displacement
4 x M4
SUPERscan II-20
6
5 F8
5
30
be 15
am
in
pu
t
0
39
65
30
17,48
0
47,60
60
120
130
0
120
47,60
60
M85x1
2x
15
60 ±0,01
13,20
SUPERscan II-10
44,20
5
17,48
19
15
t
17,48
19
t
17,48
t
t
ut
4 x M4 6
7.50
5 F8
2x
6 F8
4 x M4
6
7.50
5 F8
2x
6 F8
5
6
4 x M4
6
5 F8
2x
5
13,20
15
be 12
am
in
pu
t
6
4 x M4
60 ±0,01
30
30
2x
5 F8
5
48,50
30
30
44,20
6
4 x M4
60 ±0,01
5 F8
0
2x
5
15
15
5
6
30
17,96
be 10
am
in
pu
15
13,20
be 10
am
in
pu
1513,20
13,20
be 10
am
in
pu
48,50
6
30
17,96
13,20
15
15
13,2
15
2x
30
38,10
60 ±0,01
t
5 F8
18,30
beam displacement
62,50
M85x1
57,15
be 15
am
in
pu
6
125
2x
60 ±0,01
30
ut
inp
13,20
17,96
17,48
4 x M4
44,20
be 15
am
in
pu
t
44,20
0
62,50
125
44,20
50
18,30
beam displacement
30
OPTION SUPERSCAN II LD
48,50
4 x M6
8
5 F8
17,48
ut
15
13,20
13,20 1
15
be 2
am
in
pu
t
14
beam displacement
SUPERscan II-15
30
30
SUPERscan
IIE-15
48,50
38,10
60 ±0,01
57,56
0
30
5
62,50
30
6
5 F8
44,20
2x
60 ±0,01
be
M85x1
125
0
62,50
44,20
125
M85x1
14
0beam displacement
50
14
M120x1
beam displacement
35,74
beam displacement
4 x M6
30
95,25 ±0,01 57,56
13,20
17,96
5
am
4 x M4
M85x1
35
20
15
13,20
be 12
am
in
p
6
5 F8
2x
am
be
0
4 x M4
48,50
60 ±0,01
62,50
30
44,20
50
M85x1
35,74
0
beam displacement
30
0
65
4 x M4
2x
2x
47,60
30
57,15
8
6
47,60
60 ±0,01
39
95,25 ±0,01
30
ut
inp
35
5
20
5 F8
2x
50
14
M120x1
beam displacement
30
20
60 ±0,01
30
30
be 12
am
in
pu
17,48
17,96
48,50
6
48,50
62,50
be 12
am
in
pu
t
4 x M4
60 ±0,01
0
12,40
beam displacement
15
t
t
13,20
15
be 10
am
in
pu
t
0
125
5014
0beam displacement
0
M85x1
125
0
62,50
125
44,20
M85x1
0
30
57,56
30
48,50
62,50
47,60
4 x M4
8
2 x 5 F8
5 F8
5
4 x M5
SUPERscan II-30
be
M85x1
93,30
125
65
47,60
60 ±0,01
39
30
be 12
am
in
p
50
5
30
20
2x
50
20 ut
p
in
am
8
6
15
17,48
17,48
6
5 F8
159
13,20
4 x M4
2x
6030
±0,01 30
0
6
50
0
12,40
26
beam displacement
beam displacement
0
48,50
62,50
125
0
13,2
15
13,20
be 10
am
in
pu
15
13,20
be 10
am
in
pu
15
5 F8
0
SUPERscan II-12 2 x
0
8
4 x M4
60 ±0,01
M85x1
57,56
47,60
0
48,50
62,50
125
12,40
0
M85x1
beam displacement
0
M85x1
48,50
62,50
30
93,30
125
30
30
50
20 ut
p
in
4 x M4
8
2 x 5 F8
5 F8
5
4 x M5
2x
m
a
be
0
6
60 ±0,01
0
5 F8
120
2x
47,60
60
8
4 x M4
60 ±0,01
50
12,40
26
beam displacement
beam displacement
159
M85x1
5014
beam displacement
M85x1
47,60
0
48,50
62,50
125
50
12,40
0
beam displacement
50
0
M85x1
0
0
30
39
30
65
M85x1
0
6
130
0
120
47,60
60
50
12,40
beam displacement
5 F8
120
0
47,60
60
120
M85x1
0
2x
50
8
4 x M4
60 ±0,01
47,60
60
50
44,20
17,96
0
018,30
beam displacement
0
6
5 F8
5
18,30
0
beam displacement
17,48
13,20
17,48
4 x M4
2x
60 ±0,01
30
be 15
am
in
pu
t
be 15
am
in
pu
t
44,20
0
30
65
30
39
50
018,30
beam displacement
130
0
65
39
130
13,20
0
30
44,20
5 F8
50
17,48
5
44,20
50
20
39
70 ±0,01
4 x M5
2x
19
19
15
8
5 F8
t
0
50
26
57,56
0
20
93,3
13,2
0
65
M85x1
159
0
93,30
57,56
20 ut
p
in
m
50
39
0
5
50
ut
8
5 F8
be 20
am
in
pu
4 x M5
2x
130
39
50
26
beam displacement
2x
19
13,20
15
13,20
be 15
am
in
pu
t
19
20
4 x M5
70 ±0,01
30
30
15
13,2
M85x1
18,30
0
beam displacement
13,20
17,48
t
be 15
am
in
pu
15
5
0
50
be
65
159
26
44,20
am
39
130
0
8
5 F8
65
20 ut
p
in
All dimensions26in mm.
M85x1
2x
39
M85x1
018,30
beam displacement
beam displacement
30
130
0
65
39
130
13,20
4 x M5
30
5
15
15
2x
M85x1
6
4 x M4
60 ±0,01
20
8
5 F8
5
2-axis deflection units
SUPERSCAN II
RAYLASE AG
Argelsrieder Feld 2–4
82234 Wessling
Germany
Phone: +49-(0)8153-8898-0
Fax: +49-(0)8153-8898-10
E-mail: [email protected]
www.raylase.com
For challenging
industrial applications
RAYLASE Laser Technology (Shenzhen) Co., Ltd
5. Fl, No. 6 Qiancheng Rd, Henggang 228 Industrial Park
Longgang District, Shenzhen
518115 Guangdong, China
March 2013. Information is subject to change without prior notice.
Phone: +86-(0)755-8222 8324
Fax: +86-(0)755-8222 8193
E-mail: [email protected]
www.raylase.cn
v 1.0