Motorized Stages Catalogue

Transcription

M o t i o n C o n t ro l
34 uKSA Series Ultra- Precision Linear Stages
70 RSA Series Motorized Rotation Stages
36
72 Integration&Customize System
KSAXXX-11/12-X Stepper Motor ,High-Precision
Linear Stages,Application for Labs
Motorized Vertical Stages
38
73 PSAG Series High Precision Motorized Goniometer
KSAXXX-13-X Stepper Motor ,High-Precision Linear
Stage Application for Industry
40
Motorized Goniometer Stages 73
PSAXXX-11-X Stepper Motor,Precision Linear Stage
Application for Labs
42
75 Integrated&Customize System
PSAXXX-113P-X 3 Phase Stepper Motor,Precision
Linear Stage
44
PSAXXX-11AS-X
Servo Motor ,Precision Linear
Stage
46
74 TSAG Series Precision Motorized Goniometer
PSAXXX-13-X Stepper Motor,Precision Linear Stage
Motion Controllers
76
76 MC600 Controller
78 SC300 Controller
79 HC-1OO single axis stepper motor controller by hand
Application for Industry
48 TSAXXX-C Stepper Motor,Ultra-Thin Linear Stage
48 TSA Series Linear Stages
49 TSAX Stepper Motor,Linear Stage
51 TSAXXX-B(F) Stepper Motor,Linear Stage,Large Load
54 TSAW1000X100-XY Integrated Two Dimension Linear
Stage
55 Integration System
57
KSAV Series Ultra-High Precision Motorized Vertical
Stage
58 KSAxxx-Z High Precision Motorized Vertical Stage
60
PSAXXX-11-Z Stepper Motor,Precision Linear Stage
Application for Industry
62 PSAV Series High Precision Motorized Vertical Stages
Motorized Rotation Stages
RAuK Series Ultra-High Precision Motorized Rotation
Stages
66 RAK Series High Precision Motorized Rotation Stage
68 RAP Series Precision Motorized Rotation Stage
ZOLIX INSTRUMENTS CO.,LTD.
64
63
Motion Control ÿ uKSA Ultra-Precision Linear Stage
Motorized Linear Stages
uKSA Series Ultra- Precision Linear Stages
class
3
Grating
Encoder
Cross Roller
Guide
3D
0.1μm
Ball Screw
SUS
U-Grade
Resolution
Specification:
uKSA series ultra-high precision motorized translation stage,includes
travels are below: 50,100,150,200mm;It is our new product, specification
is international standards: for example: closed-loop resolution is
0.1μm,straightness and parallel during whole travel is less than
6μm,,yaw,pitch is less than 15ȷ.Application:ultra-high precision fileds;for
example: ultra-high precision laser marking,laser scanning measurement.
Characteristic:
Ɣ import ultra-precision grating internal, closed-loop
resolution is 0.1μm in conjunction with MC600
controller
Ɣ import ultra-high level balll screw,achieve high position
Ɣ import ultra-high level cross roller rail, ensure
straightness,parallel,yaw,pitch and related
specification in conjunction with zolix special precision
grinding craft(including Al base precision grind)
Ɣ assemble craft and test method that higher
international, ensure all the products performance
Motorized Goniometers
Ɣ closed dust-cover, suit for any condition
Ɣ planning servo-motor of this series
Specification:
Ɣ Travel: 50,100,150,200mm
Combinated Stages
Ɣ Motor: 3 Phase Motor
Ɣ Resolution(Closed-Loop): 0.1 um
Ɣ Straightness&Parallism: <6um
Ɣ Yaw&Pitch: <15ą
Model Sheet:
Model
uKSA50
uKSA100
uKSA150
uKSA200
50
100
150
200
Travel (mm)
Pitch (mm)
4
Motor Model
FHB366-D(3 Phase)
Closed-Loop Resolution
(μm)
0.1
Max Speed (mm/s)
40
Repeatability (μm)
İ2
İ2
Backlash (μm)
İ1
İ1
Straightness (μm)
İ6
İ10
Parallism (μm)
İ6
İ10
Weight (Kg)
15
18
Load (Kg)
25
30
Grating Diagram:
Related Products:
1K 1/4W
MC6003P Controller
TMC Controller
7
+
Zero Sensor+
E
D
3 Phase Step Motor
U
6
Cotrollers
U
1
V
5
8
24V
W
GND
4
2
LIMIT-
Application:
3
Zero Sensor
LIMIT+
Motor Diagram:
1
5V
A+
B+
GND
34
22
Tel: +86 10 56370168
http://www.zolix.com.cn
5
2
4
3
V
W
Motion Control ÿ uKSA Ultra-Precision Linear Stage
Drawing:
uKSA50
uKSA100
4-Ø6.5 thru
4-Ø6.5 thru
70
150
334
384
75
463.5
75
413.5
25
4-Ø11
195
150
100
50
180
23
50
100
150
180
150
25
4-Ø11
17-M6
100
150
245
17-M6
100
150
295
uKSA200
4-Ø6.5 thru
135
4-Ø6.5 thru
150
Combinated Stages
150
150
150
95
434
489
513.5
566.5
75
75
Cotrollers
65
4-Ø11
250
180
150
100
50
245
50
23
100
uKSA150
150
23
180
150
150
150
45
25
100
150
345
15-M6
4-Ø11
23
125
115
50
17-M6
125
150
400
Tel: +86 10 56370168
35
Motion Control ÿ KSAxxx-11/12-X High Precision Linear Stage
KSAXXX-11/12-X Stepper Motor ,High-Precision Linear Stages,Application for Labs
1μm
Ball Screw
SUS
K-Grade
class
5
Grating
Encoder
Linear slide
guide
Resolution
3D
Model Sheet:
Model
Travel(mm)
KSA05011/12-X
KSA10011/12-X
KSA15011/12-X
KSA20011/12-X
KSA30011/12-X
KSA40011/12-X
50
100
150
200
300
400
Pitch(mm)
4
Closed-loop
Resolution(μm)
5
1
Resolution(μm)
2.5
3.125
Max Speed(mm/sec)
40
50
Related Products:
TMC Controller
MC600 Controller
˘5
Backlash (μm)
Application:
Yaw (Ċ)
˘15
˘20
˘25
˘30
Pitch (Ċ)
˘15
˘25
˘30
˘40
Straightness(μm)
˘10
˘12
˘15
˘20
Parallism (μm)
˘10
˘12
˘15
˘20
Stepper Motor(angle)
Grating Diagram:
Combinated Stages
1
6
2
7
3
8
4
9
5
42(1.8e)
57(1.8e)
Current(A)
1.7
2.4
Load Capacity(Kg)
30
50
Motor Diagram:
AA+
GND
5V
BB+
1K 1/4W
1
24V
6
A+
2 LIMIT7
A3 LIMIT+
8
B+
4
GND
9
B5 zero sensor
Z+
Z-
D Connector 9(Z)
D Connector 9(Z)
Cotrollers
36
˘3
Repeatability(μm)
Tel: +86 10 56370168
+
Zero sensor
E
Step Motor
+
D
A+
M
Opposite side limit sensor(-)
A-
Motor side limit sensor(+)
B+
B-
Motion Control ÿ KSAxxx-11/12-X High Precision Linear Stage
Drawing:
KSA100-11/12-X
KSA150-11/12-X
KSA200-11/12-X
KSA300-11/12-X
KSA400-11/12-X
KSA050-11/12-X
Combinated Stages
Cotrollers
Tel: +86 10 56370168
37
Motion Control ÿ KSAxxx-13-X High Precision Linear Stage
KSAXXX-13-X Stepper Motor ,High-Precision Linear Stage Application for Industry
class
K-Grade
Grating
Encoder
Linear slide
guide
5
3D
1μm
Ball Screw
Resolution
Model Sheet:
Model
Travel(mm)
Combinated Stages
KSA10013-X
KSA20013-X
KSA30013-X
KSA40013-X
50
100
200
300
400
Pitch(mm)
4
Closed-loop
Resolution(μm)
Related Products:
TMC Controller
MC600 Controller
5
1
Resolution(μm)
2.5
3.125
Max Speed(mm/
sec)
40
50
Repeatability(μm)
˘3
Backlash (μm)
˘5
Yaw (Ċ)
˘15
˘20
˘25
˘30
Pitch (Ċ)
˘15
˘25
˘30
˘40
Straightness(μm)
˘10
˘12
˘15
˘20
Parallism (μm)
˘10
˘12
˘15
˘20
Stepper
Motor(angle)
57(1.8e)
Current(A)
2.4
Grating Diagram:
1
6
2
7
3
8
4
9
5
AA+
GND
5V
BB+
Motor Diagram:
Z+
Z-
Step Motor
D Connector 9(Z)
1
6
A+
2 LIMIT7
A3 LIMIT+
8
B+
4
GND
9
B5
Cotrollers
38
KSA05013-X
D Connector 9(Z)
Tel: +86 10 56370168
A+
M
A-
B+
B-
Motion Control ÿ KSAxxx-13-X High Precision Linear Stage
Drawing:
KSA050-13-X
KSA100-13-X
u
150
u
150
KSA300-13-X
KSA200-13-X
u
u
Combinated Stages
150
150
KSA400-13-X
Cotrollers
150
u
Tel: +86 10 56370168
39
Motion Control ÿ PSAxxx-11-X Precision Linear Stage
PSAXXX-11-X Stepper Motor,Precision Linear Stage Application for Labs
3D
Ball Screw
P-Grade
class
5
Linear slide
guide
Model Sheet:
Model
PSA10011-X
PSA15011-X
PSA20011-X
PSA30011-X
PSA40011-X
50
100
150
200
300
400
Travel(mm)
Pitch(mm)
Related Products:
SC300
4
5
Resolution(8 subdivision) (μm)
2.5
3.125
Max Speed(mm/
sec)
40
50
Repeatability(μm)
˘3
Backlash(μm)
˘5
MC600
Straightness
˘10μm
˘10μm/100mm
Parallism
˘15μm
˘15μm/100mm
Stepper
Motor(angle)
Application:
42(1.8e)
57(1.8e)
Current(A)
1.7
2.4
Max. Center
Load(Kg)
30
50
Diagram:
1K 1/4W
1
24V
6
A+
2 LIMIT7
A3 LIMIT+
8
B+
GND
4
9
B5 zero sensor
Combinated Stages
D Connector 9(Z)
Cotrollers
40
PSA05011-X
Tel: +86 10 56370168
+
Zero sensor
E
Step Motor
+
D
A+
M
A-
B+
B-
Drawing:
PSA100-11-X
PSA150-11-X
PSA200-11-X
PSA300-11-X
PSA400-11-X
PSA050-11-X
Combinated Stages
Cotrollers
Tel: +86 10 56370168
41
Motion Control ÿ PSAxxx-113P-X Precision Linear Stage
PSAXXX-113P-X 3 Phase Stepper Motor,Precision Linear Stage
Ball Screw
P-Grade
Linear slide
guide
5
3D
Model Sheet:
Model
PSA050113P-X
PSA100113P-X
PSA150113P-X
PSA200113P-X
PSA300113P-X
PSA400113P-X
50
100
150
200
300
400
Travel(mm)
Pitch(mm)
Related Products:
SC300
4
5
Resolution(μm)
2.5
3.125
Max Speed(mm/
sec)
40
50
Repeatability(μm)
˘3
Backlash(μm)
˘5
MC600
Straightness
˘10μm
˘10μm/100mm
Parallism
˘15μm
˘15μm/100mm
Stepper
Motor(Angle)
57(1.2e)
Current(A)
5.8
Load
Capacity(Kg)
50
* Note: 1600pulse/rev
Diagram:喟
1K 1/4W
Combinated Stages
1
24V
6
U
2 LIMIT7
V
3 LIMIT+
8
W
4
GND
9
5 zero sensor
D Connector 9(Z)
Cotrollers
42
class
Tel: +86 10 56370168
+
Zero sensor
E
+
3 Phase Step Motor
D
Motion Control ÿ PSAxxx-113P-X Precision Linear Stage
Drawing:
PSA100-113P-X
PSA150-113P-X
PSA200-113P-X
PSA300-113P-X
PSA400-113P-X
PSA050-113P-X
Combinated Stages
Cotrollers
Tel: +86 10 56370168
43
Motion Control ÿ PSAxxx-11AS-X Precision Linear Stage
PSAXXX-11AS-X Servo Motor ,Precision Linear Stage
class
Linear slide
guide
5
Model Sheet:
Model
PSA05011AS-X
PSA10011AS-X
PSA15011AS-X
PSA20011AS-X
PSA30011AS-X
PSA40011AS-X
50
100
150
200
300
400
Travel(mm)
Related Products:
MC600ASP Controller
TMC Controller
Pitch(mm)
4
5
Resolution
(μm)
0.4
0.5
Max Speed
(mm/sec)
200
250
Repeatability
(μm)
˘3
Backlash
(μm)
˘5
Straightness
˘10μm
˘10μm/100mm
Parallism
˘15μm
˘15μm/100mm
Servo Motor
Power (W)
100
200
Load
Capacity(Kg)
20
30
*Note: 1000pulse/rev
Diagram:喟
1K 1/4W
Combinated Stages
1
24V
6
2 LIMIT7
3 LIMIT+
8
4
GND
9
5 zero sensor
D Connector 9(Z)
Cotrollers
44
3D
Ball Screw
P-Grade
Tel: +86 10 56370168
+
Zero sensor
E
+
V
U
D
W
-PS
FG
PS
GND
5V
Motion Control ÿ PSAxxx-11AS-X Precision Linear Stage
Drawing:
PSA050-11AS-X
PSA100-11AS-X
413
463
299
50
50
92
50
65
120
100
349
50
50
4- ¢ 6.5thru
ĭ11 counterbore
120
65
92
8- ¢ 6.5thru
59
125
100
50
125
100
50
59
ĭ11 counterbore
50
100
25-M6
125
PSA150-11AS-X
PSA200-11AS-X
513
50
65
50
50
563
449
50 50 50
92
120
50
50
92
399
50 50
120
50
65
50
100
125
25-M6
12- ¢ 6.5thru
ĭ11 counterbore
59
125
100
50
Combinated Stages
125
100
50
59
10- ¢ 6.5thru
ĭ11 counterbore
50
25-M6
50
25-M6
100
100
125
125
PSA300-11AS-X
PSA400-11AS-X
50 50 50 50
65
100
100
100
808
707
100
100
79
100
160
50
100
160
50
65
79
Cotrollers
708
607
12- ¢ 6.5thru
ĭ11 counterbore
160
125
75
160
125
75
71
71
14- ¢ 6.5thru
ĭ11 counterbore
32-M6
75
125
32-M6
75
125
Tel: +86 10 56370168
45
PSAXXX-13-X Stepper Motor,Precision Linear Stage Application for Industry
P-Grade
class
5
Linear slide
guide
Model Sheet:
Model
Travel(mm)
Related Products:
Application:
SC300 Controller
TMC Controller
PSA05013-X
PSA10013-X
PSA20013-X
PSA30013-X
PSA40013-X
50
100
200
300
400
Pitch(mm)
4
5
8 Sub
-Resolution
(μm)
2.5
3.125
Max Speed
(mm/sec.)
40
50
Repeatability
(μm)
˘3
Backlash (μm)
˘5
Straightness
˘10μm
˘10μm/100mm
Parrallism
˘15μm
˘15μm/100mm
Stepper Motor
57(1.8e)
Current(A)
Max. Center
Load(Kg)
2.4
50
70
We can customize if you have any special requirement!
Diagram:喟
Combinated Stages
Step Motor
1
6
A+
2 LIMIT7
A3 LIMIT+
8
B+
4
GND
9
B5
D Connector 9(Z)
Cotrollers
46
3D
Ball Screw
Tel: +86 10 56370168
A+
M
A-
B+
B-
Drawing:
PSA050-13-X
PSA100-13-X
55
55
423
PSA300-13-X
633
55
523
55
PSA200-13-X
363
Combinated Stages
PSA400-13-X
Cotrollers
763
55
Tel: +86 10 56370168
47
Motion Control ÿ TSAxx-C Ultra-Thin Linear Stage
TSA Series Linear Stages
TSAXXX-C Stepper Motor,Ultra-Thin Linear Stage
T-Grade
Model Sheet:
Model
TSA30-C
Travel(mm)
Pitch(mm)
Resolution(8 subdivision) (μm)
Max speed (mm/sec.)
Repeatability (μm)
Stepper Motor
Working Current(A)
Max. Center Load(Kg)
Weight(Kg)
TSA50-C
30
50
1
0.625
10
˘5
42(1.8e)
1.7
10
1.25
1.4
Please add BP-20 when you integrate TSA50-C
Related Products:
SC300 Controller
Diagram:
HC-100 Controller
1K 1/4W
1
24V
6
A+
2 LIMIT7
A3 LIMIT+
8
B+
GND
4
9
B5 zero sensor
Application:
+
Zero sensor
Step Motor
+
E
D
A+
M
A-
B+
D Connector 9(Z)
Combinated Stages
Drawing:
TSA50-C
TSA30-C
Cotrollers
counterbore
counterbore
9
48
Tel: +86 10 56370168
B-
Motion Control ÿ TSAX Linear Stage
T-Grade
Model Sheet:
Model
Travel(mm)
TSA50
TSA100
TSA150
TSA200
50
100
150
200
Pitch(mm)
4
1.25
Max Speed (mm/sec.)
40
˘5
Repeatability (μm)
Stepper Motor
42(0.9e)
Working Current(A)
42(1.8e)
1.7
SC300 Controller
2.5
20
15
Weight(Kg)
2.75
3
10
7
3.3
3.8
HC-100 Controller
Resolution(μm)
Related Products:
TSAX Stepper Motor,Linear Stage
Diagram:喟
Application:
1
24V
6
A+
2 LIMIT7
A3 LIMIT+
8
B+
4
GND
9
B5 zero sensor
+
Zero sensor
E
Step Motor
+
D
A+
M
A-
B+
B-
1K 1/4W
D Connector 9(Z)
Combinated Stages
Cotrollers
Tel: +86 10 56370168
49
Motion Control ÿ TSAX Linear Stage
Drawing:
TSA100
TSA150
TSA200
TSA50
32
100
7
Combinated Stages
50
50
50
50
50
50
55
50
34
8-M4
112
120
Cotrollers
25-M6
63
120
401
50
Tel: +86 10 56370168
55
Motion Control ÿ TSAxx-B(F) Linear Stage
T-Grade
Model Sheet:
Model
TSA TSA TSA
TSA
TSA
TSA
TSA TSA TSA
TSA
50-B 100-B 150-B 200-B(F) 300-B(F) 400-B(F) 500-B 600-B 800-B 1000-B
Travel (mm)
50
100
150
300
400
500
600
4
5
Resolution
(μm)
1.25
2.5
3.125
Max Speed
(mm/s)
20
40
50
Repeatablity
(μm)
˘5
42(0.9e)
42(1.8e)
57(1.8e)
Related Products:
Current (A)
1.7
2.4
SC300 Controller
Load
Capacity(Kg)
30
50
Diagram:喟
1K 1/4W
Zero sensor
E
Step Motor
+
D
A+
M
A-
B+
B-
D Connector 9(Z)
1
24V
6
A+
2 LIMIT7
A3 LIMIT+
8
B+
4
GND
9
B5 zero sensor
+
1000
Stepper
Motor
800
Pitch(mm)
200
TSAXXX-B(F) Stepper Motor,Linear Stage,Large Load
Combinated Stages
Cotrollers
Tel: +86 10 56370168
51
TSA100-B
55
55
TSA50-B
120
100
50
25-M6
50
51.5
100
51.5
251
3X50(=150)
301
55
55
55
TSA200-B
120
100
50
120
100
50
16-Ø6.5
16-Ø11 counterbore
25-M6
25-M6
120
100
50
10-Ø6.5
Ø11 counterbore
120
100
50
TSA150-B
4X50(=200)
351
50
55
TSA400-B
16-Ø6.5
16-Ø11 counterbore
120
100
50
160
144
110
100
50
25-M6
22-Ø6.5
22-Ø11 counterbore
27-M6
160
144
110
100
50
Combinated Stages
55
61
TSA300-B
7X50(=350)
435
55
120
100
50
43.5
50
51.5
43.5
50
Cotrollers
7X50(=350)
535
64.5 50
55
10X50(=500)
686
TSA500-B
52
120
100
50
8-Ø6.5
Ø11 counterbore
25-M6
55
120
100
50
4-Ø6.5
Ø11 counterbore
120
100
50
Drawing:
TSA600-B
Tel: +86 10 56370168
71
TSA800-B
TSA1000-B
TSA200-BF
Combinated Stages
TSA400-BF
Cotrollers
TSA300-BF
Tel: +86 10 56370168
53
Motion Control ÿ TSAW100100-XY Integrated Linear Stage
TSAW1000X100-XY Integrated Two Dimension Linear Stage
T-Grade
Model Sheet:
TSAW100100-XY
Model
Travel(X*Y)(mm)
100h100
Pitch(mm)
4
˘5
Repeatability (μm)
8 sub -Resolution (μm)
42(0.9e)
Working Current(A)
1.7
20
Related Products:
SC300 Controller
Diagram:喟
2
A+
1
4
AB+
Application:
2
3
Drawing:
TSA100×100-XY
Combinated Stages
Cotrollers
B-
1
5
Tel: +86 10 56370168
Step Motor
M
3
4
54
1.25
Stepping Motor
LIMIT-
LIMIT+
GND
8.2k 1/4W
Motion Control ÿ Integration System
Integration System
KSA XY Stage
PSA-13 XY Stage
Combinated Stages
XY Ultra-thin Stage
Robert Stage
Scanning System
Cotrollers
Large Travel Integrated Stage
Integrated 18 Axis Stage
Tel: +86 10 56370168
55
Motion Control ÿ Customize Stage
Customize Stage
12 Inches Wafer Cutting System
Large Travel Stage(travel 2000mm)
3D Scanning System (scanning
area: 500x500mm)
Combinated Stages
Fiber Alignment Stage( travel 10-25mm)
Fiber System
Cotrollers
56
Tel: +86 10 56370168
Motion Control ÿ Customize Stage
Linear slide
guide
K-Grade
Cross Roller
Guide
3D
Model Sheet:
Model
KSAV2030-ZF
10
30
Pitch (mm)
1
1
0.23
0.4
6
6.5
Resolution of 8 sub-division(μm)
Max Speed (mm/sec)
Repeatability (μm)
<5
<5
42(1.8e)
57(1.8e)
Current (A)
1.7
2.4
Load Capacity (Kg)
10
20
Stepper Motor (angle)
Related Products:
Diagram:喟
SC300 Controller
KSAV1010-ZF
Travel (mm)
KSAV Series Ultra-High Precision Motorized Vertical Stage
Step Motor
M
A-
B+
B-
D Connector 9(Z)
Drawing:
125
71
44.5
4-Ø6.5
Ø11 counterbore
252.5
200
175
125
Cotrollers
75
64-M6
Combinated Stages
147.5~177.5
KSAV2030-ZF
25
KSAV1010-ZF
A+
1
6
A+
2 LIMIT7
A3 LIMIT+
8
B+
4
GND
9
B5
25
25
7X25(=175)
220
Tel: +86 10 56370168
57
Motion Control ÿ KSAxxx-Z High Precision Motorized Vertical Stage
KSAxxx-Z High Precision Motorized Vertical Stage
Specification:
Ball Screw
KSAxxx-Z is designed on the basis of KSAxxx-11/12-X and
5
class
K-Grade
Linear slide
guide
1μm
Grating
Encoder
Resolution
used in vertical direction. All the specification are the same with
KSAXXX-11/12/13-X except load capacity and moving direction.
KSA050-12-Z
KSA100-11/12-Z
445
415
A
151.5
125
100
50
50
100
25-M6
50
100
25-M6
4-M4
120
120
100
120
100
120
KSA100-13-Z
541
518
111.5
A
Cotrollers
169
150
120
100
50
155
A
73.5
56.5
121.5
94
497
467
151.5
125
100
50
Combinated Stages
KSA100-11AS-Z
50
100
25-M6
50
100
29-M6
4-M4
110
120
4-Ø6.5 thru
A View
150
100
100
120
A View
100
100
150
120
58
4-Ø6.5 thru
A View
4-Ø6.5 thru
100
A View
4-M4
120
120
100
151.5
125
100
50
A
56.5
121.5
94
56.5
400
365
121.5
94
Drawing:
Tel: +86 10 56370168
4-Ø6.5 thru
3D
Motion Control ÿ KSAxxx-Z High Precision Motorized Vertical Stage
KSA400-12-Z
545
816
793
129.5
99
56.5
A
50
151.5
125
100
50
121.5
94
100
A
25-M6
50
100
25-M6
50
100
4-M4
4-M4
120
120
A View
4-Ø6.5 thru
100
100
120
120
4-Ø6.5 thru
A View
100
120
100
120
KSA400-13-Z
155
A
Combinated Stages
169
150
120
100
50
111.5
73.5
881
858
50
100
29-M6
110
4-Ø6.5 thru
150
100
Cotrollers
A View
151.6
515
125
KSA200-11-Z
100
150
Tel: +86 10 56370168
59
Motion Control ÿ PSAxxx-11-Z Precision Linear Stage
PSAXXX-11-Z Stepper Motor,Precision Linear Stage Application for Industry
Ball Screw
P-Grade
class
5
3D
Linear slide
guide
Model Sheet:
Model
PSA05011-Z
PSA10011-Z
PSA15011-Z
PSA20011-Z
PSA30011-Z
PSA40011-Z
Load
5
(Kg)
Max
Speed
40
(mm/s)
other specification is the same with PSAxxx-11-X
10
50
Diagram:
1
2
1K 1/4W
1
24V
6
A+
2 LIMIT7
A3 LIMIT+
8
B+
4
GND
9
B5 zero sensor
+
Zero sensor
Step Motor
+
E
A+
D
M
A-
B+
B-
D Connector 9(Z)
Power-off brake
PSA050-11-Z
PSA100-11-Z
446
396
366
416
59
124
A
100
50
50
100
125
100
120
120
120
100
A View
A View
Tel: +86 10 56370168
125
120
100
50
25-M6
125
100
Cotrollers
25-M6
100
60
94.5
124
A
100
50
125
Combinated Stages
94.5
59
Drawing:
Motion Control ÿ PSAxxx-11-Z Precision Linear Stage
PSA200-11-Z
496
546
516
59
124
94.5
A
A
100
50
25-M6
125
100
50
125
100
50
100
50
125
125
100
100
120
100
120
100
120
PSA400-11-Z
PSA300-11-Z
A view
A view
120
25-M6
59
466
124
94.5
PSA150-11-Z
Combinated Stages
Cotrollers
Tel: +86 10 56370168
61
Motion Control ÿ PSAV High Precision Motorized Vertical Stage
PSAV Series High Precision Motorized Vertical Stages
3D
P-Grade
Model Sheet:
Model
Table size(mm)
Min Height(mm)
Travel (mm)
Pitch(mm)
Resolution of 8 subdivision (μm)
Worm Gear Ration
Max Speed(mm/sec)
Stepper Motor (angle)
Load Capacity(Kg)
PSAV30-ZF
238h238
238
30
PSAV100-ZF
238h238
308
100
4
0.24
21:2
3.8
57(1.8e)
80
Diagram:喟
Related Products:
1
6
A+
2 LIMIT7
A3 LIMIT+
8
B+
4
GND
9
B5
A+
M
B+
D Connector 9(Z)
PSAV30-ZF
PSAV100-ZF
238
238
308~408
Combinated Stages
381
25
25
45-M6
45-M6
25
8-6.5
6X25(=150)
6X25(=150)
275
275
300
300
Tel: +86 10 56370168
25
300
275
6X25(=150)
275
Cotrollers
6X25(=150)
381
300
Drawing:
8- 6.5
62
A-
238~268
Step Motor
SC300 Controller
B-
Motion Control ÿ Motorized Rotation Stages
Selection Guide
Table Size(mm)
Resolution
Max Speed(Deg./seg)
Load Capacity(Kg)
RAuK Series Ultra-High Precision Motorized Rotation
Stages
100/200
1.2-1.8"
25
30/50
100/200/350
0.00125e
25
30/50/100
100/125/200/220
0.00125e
25
30-50
60/100/200/300/400
0.0025e
50
30/50/60/80
RAK Series High Precision Motorized Rotation
Stages
RAP Series Precision Motorized Rotation Stages
RSA Series Motorized Rotation Stages
Motor
Stepper
Motor
Series
Combinated Stages
Cotrollers
Tel: +86 10 56370168
63
Motion Control ÿ RAuK Ultra-High Precision Motorized Rotation Stage
RAuK Series Ultra-High Precision Motorized Rotation Stages
U-Grade
Cross Roller
Ring Bearing
Circular
grating encoder
Model Sheet:
Model
Resolution of 8 subdivision(e)
Closed-loop Resolution(ȷ)
Drive Ratio
Max Speed(deg./sec.)
Repeatability (e)
Radial Runout(μm)
Axial Runout(μm)
Stepper Motor(angle)
Current(A)
Load Capacity(Kg)
RAuK200
0.00125
0.00125
1.8
180:1
25
啿0.005
啿15
啿15
42(1.8e)
1.7
30
1.2
180:1
25
啿0.005
啿10
啿10
57(1.8e)
2.4
50
Diagram:喟It will stop when it comes across zero switch (unclockwise)
Related Products:
MC600 Controller
RAuK100
TMC Controller
RAuK100
Step Motor
A+
1
24V
6
A+
2 LIMIT7
A3
8
B+
4
GND
9
B5
Application:
M
AB+
B-
8.2k 1/8W
D Connector 9(Z)
RAuK200
Combinated Stages
8.2K 1/4W
1
24V
6
A+
2 LIMIT7
A3
8
B+
4
GND
9
B5
Cotrollers
64
D Connector 9(Z)
Tel: +86 10 56370168
68
17W
Step Motor
A+
M
A-
24V
GND LIMIT-
B+
B-
Motion Control ÿ RAuK Ultra-High Precision Motorized Rotation Stage
Grating Diagram:喟
AA+
GND
5V
BB+
Z+
Z-
1
6
2
7
3
8
4
9
5
D Connector 9(Z)
Drawing:
RAuK200
RAuK100
Combinated Stages
Cotrollers
Tel: +86 10 56370168
65
Motion Control ÿ RAK High Precision Motorized Rotation Stage
RAK Series High Precision Motorized Rotation Stage
K-Grade
Model Sheet:
Model
Worm Gear Ratio
RAK100
RAK200
180喟1
Stepper Motor
Resolution(e)
Repeatability(e)
Radial Runout(um)
Axial Runout (um)
42(1.8e)
30
0.00125
0.005
<15
<15
57(1.8e)
Max. Speed(e/Sec.)
25
25
Current (A)
1.7
2.4
100
Load Capacity(Kg)
30
50
100
Material
Combinated Products
SC300 Controller
RAK350
AL
57(1.8e)
100
0.0007
0.003
<20
50
0.00125
0.005
<10
<10
<20
14
TMC Controller
Diagram:喟It will stop when it come across zero switch (unclockwise)
RAK100
Step Motor
A+
1
24V
6
A+
2 LIMIT7
A3
8
B+
GND
4
9
B5
Application:
Satellite Tracking System
M
A-
B+
B-
8.2k 1/8W
D Connector 9(Z)
RAK200/350
8.2K 1/4W
Combinated Stages
1
24V
6
A+
2 LIMIT7
A3
8
B+
4
GND
9
B5
D Connector 9(Z)
Cotrollers
66
3D
Cross Roller
Ring Bearing
Tel: +86 10 56370168
68
17W
Step Motor
A+
M
A-
24V
GND LIMIT-
B+
B-
Motion Control ÿ RAK High Precision Motorized Rotation Stage
Drawing:
RAK100
RAK200
Combinated Stages
27.5
73.5
372.5
350
300
250
150
50
25
390
250
350
50
Cotrollers
150
30
16-M6
Ø196
150
250
250
RAK350
4-Ø6.5thru
Ø11 counterbore 8
Tel: +86 10 56370168
67
Motion Control ÿ RAP Precision Motorized Rotation Stage
RAP Series Precision Motorized Rotation Stage
3D
Cross Roller
Ring Bearing
Model Sheet:
Model
Base Material
Worm and Gear Ratio
Resolution (e)
Max Speed(e/sec)
Repeatability(e)
Radial Runout(um)
Axial Runout(um)
Stepper Motor(Angle)
Current(A)
Load Capacity(Kg)
Weight (Kg)
Related Products:
SC300 Controller
RAP100
RAP125
RAP200
Al
180:1
0.00125
25
˘0.005
˘20
˘20
42(1.8e)
1.7
30
2
RAP220
˘25
˘25
57(1.8e)
2.4
50
2.4
7.5
7.5
Diagram:喟It will stop when it comes across zero switch (unclockwise)
RAP100/125
Step Motor
A+
1
24V
6
A+
2 LIMIT7
A3
8
B+
GND
4
9
B5
M
AB+
B-
8.2k 1/8W
D Connector 9(Z)
RAP200/220
8.2K 1/4W
1
24V
6
A+
2 LIMIT7
A3
8
B+
4
GND
9
B5
Combinated Stages
D Connector 9(Z)
Cotrollers
68
P-Grade
Tel: +86 10 56370168
68
17W
Step Motor
A+
M
A-
24V
GND LIMIT-
B+
B-
Motion Control ÿ RAP Precision Motorized Rotation Stage
Drawing:
RAP125
45
45
RAP100
182
100
43
3-Ø6.5thru
Ø11counterbore
9
14-M6
50
132.5
75
122
125
66
RAP220
66
RAP200
50
100
125
11
50
100
Ø28
75
50
14-M6
100
4-Ø6.5thru
Ø11counterbore
190
283.5
4-Ø6.5thru
Ø11counterbore
15
4-Ø6.5thru
Ø11counterbore
272.5
Ø6
200
200
Combinated Stages
175
50
100
150
100
150
Cotrollers
220
Tel: +86 10 56370168
238
50
100
150
175
200
250
225
150
100
22-M6
69
Motion Control ÿ RSA Motorized Rotation Stage
RSA Series Motorized Rotation Stages
Model Sheet:
Model
Worm and Gear Ratio
Relsolution (8
subdivision)(μm)
Max Speed(Deg./sec)
Repeatability (μm)
Stepper Motor(Angle)
Current(A)
Max Load(Kg)
Weight (Kg)
RSA60
90喟1
RSA100
RSA200
180喟1
RSA400
720喟1
0.0025
0.00125
0.0003125
50
25
5
啿0.01
啿0.005
啿0.003
42(1.8e)
57(1.8e)
1.7
2.4
30
50
60
80
1
1.54
7.7
19.75
Related
Diagram:喟
SC300 Controller
Step Motor
1
6
2
7
3
8
4
9
5
Products:
A+
A+
A-
M
A-
B+
B-
D Connector 9(Z)
Attention: RSA series donot have home switch.
Combinated Stages
Cotrollers
70
T-Grade
Tel: +86 10 56370168
B+
B-
Motion Control ÿ RSA Motorized Rotation Stage
Drawing:
RSA100
RSA200
RSA400
RSA60
Combinated Stages
Cotrollers
Tel: +86 10 56370168
71
Motion Control ÿ Integration&Customize System
Integration&Customize System
Satellite Tracking System
Scanning System
Motorized Mount
Motorized Gimbal System(Large
Size Mirror)
6 Axes System
Combinated Stages
Cotrollers
72
Tel: +86 10 56370168
Si Scanning System
Motion Control ÿ PSAG High Precision Motorized Goniomter
PSAG Series High Precision Motorized Goniometer
P-Grade
3D
Motorized Goniometer Stages
Model Sheet:
SC300 Controller
TMC Controller
PSAG15-250
f15
250h250
250
Arc
610:1
PSAG15-370
f15
340h250
370
870:1
0.00037
0.00026
57(1.8)
2.4
50
Related Products:
Model
Angle(e)
Table Dimension (mm)
Height of Axis (mm)
Guide
Worm Gear Ratio
Resolution (8 subdivision)
(e)
Stepper Motor
Working Current (A)
Max Center Load (Kg)
Drawing:
PSAG15-250
PSAG15-370
Combinated Stages
n
n
Cotrollers
Tel: +86 10 56370168
73
Motion Control ÿ TSAG Precision Motorized Goniometer
TSAG Series Precision Motorized Goniometer
Model Sheet:
Model
Travel(mm)
Table Size
Guides
Transmission Ratio
Resolution(8 sub-division) (μm)
Repeatability (μm)
Stepper Motor
Working Current(A)
Height of axis(mm)
Weight(Kg)
Related Products:
SC300 Controller
Drawing:
TSAG15-W
TSAG10-W
Combinated Stages
Cotrollers
74
T-Grade
Tel: +86 10 56370168
TSAG10-W
f10e
352:1
0.00032e
0.0043e
TSAG15-W
f15e
65 x 65
Arc Guide
252:1
0.00045e
0.0047e
42(0.9e)
1.7
4
75
70
0.75
3D
Motion Control ÿ Integrated&Customize System
Integrated&Customize System
Laser Alignment System(motorized 8 axis and
manual 4 axis)
Three Way Laser Welding System
Multi-axis High Load System Application:
High load, Large Travel,Multi-axes
adjustment.
Visual Analogue System uKSA/KSA/PSA/
TSA+RAuK/RAK/RSA+SC300/MC600
Application:Scanning/Tracking
Combinated Stages
Multi-axis High Load System
Translation,Rotation,Goniometer of X
Axes,High Load(80Kg) Very Flexible
IRUFRQ¿JXUDWLRQ$GGWKHYHUWLFDORI<
and Z axes. Application for : Multi-axis
adjustment, high load, high accuracy.
Cotrollers
Interference Microscope System
High Load System(3 axis)
Tel: +86 10 56370168
High Load System(5 axis)
75
Motion Control ÿ MC600 Controller
Motion Controllers
MC600 Controller
Many years of precision mechanical design, fabrication and motion control experience and expertise, Zolix has developed an
extensive catalog of motorized positioning and motion control products. From integrated OEM motion systems used by leading
semiconductor equipment manufacturers for wafer inspection,
MC600 includes 3 sub-division :
Nubers of axis
Ɣ 2 phase stepper motor :MC600-2B/4B
Ɣ 3 phase stepper motor :MC6003P-2B/4B
Ɣ panasonic AC servo-motor controller :
servo-motor high cost, large size,we divde
into control cabinet MC600ASP and drive
cabinet ASP-XXXX.
1 axis
2 axes
3 axes
Ɣ control cabinet is universal product,
drive cabinet includes from 1 to 4 axis
product,different servo-motor 100W or
200W,divide below models
4 axes
Model
ASP-1000
ASP-2000
ASP-1100
ASP-1200
ASP-2200
ASP-1110
ASP-1120
ASP-1220
ASP-2220
ASP-1111
ASP-1112
ASP-1122
ASP-1222
ASP-2222
Specification
100W
200W
100W
One Axis:100W,another is 200W
200W
100W
One Axis: 200w,others is 100W
One Axis:100w,others is 200W
200W
100W
Two axes :200W,two axes is 100W
200W
MC series is a multi-functions product,used to measuring and position controling ,excellent quality and high cost perfomance.
MC 600 achieve point to point (control 4 axis or 2 axis) of translation and rotation and goinometers stages.equipped with stepping
motor drive or swap-actuaor driver .Aboundant parameters,flexible online communication commands ,make the system easier and
more effectiveness, can achieve the linear interporlation of 3 axis and the circle interporlation of 2 axis.
Characteristic喟
Combinated Stages
Cotrollers
This system adopted 32 bits DSP processors,achieved high
ƵDecided the speed of return original,initial speed constant
precision control of high arithmetics,the closed-loop control
speed and accelerate speed and software position limit
of digital PID ensure deceleration or acceleration of accuracy
,suitable for different control;For example:the system need
and position control ;stepping motor drive achieve 128 sub-
limit response time,set up larger original or accelerate speed
division,ensure stable ability of low speed stepping positional
;system need stable motion,light force,set up small original or
repeatability
accelerate speed ;system need constant speed can choose
The use of servomotor meet the indication of high speed motion.
constant motion model
ƵTwo models :inching and increment
Set up any postion as the working origion
ƹInching:quickly locate to target ,accelerate process of
ƵThe design of zero simple operation ,composited photonic
experiment
sensor combine with posiiton arimethic,increase the accuracy
ƹIncrement:suitable for postional locating applications
of the physical zero
ƵMeet to the combination control of many motoried stages and
ƵRead logical position,real position ,driver speed,accelerate
rotation stages
speed all the time in motion etc status parameters
ƹAngle value:display of angle displacement
Ƶ16 road I/O set up output exter or trigger output by
ƹMm unit:display of linear displacement(motorized linear
operate special processing
displacement stages
ƵFour axises have closed-loop control function (achieve by
grating ruler/rotation encoder external
ƵMake the adjustment of positon and position accuration
ƵThe accuracy of position system is depend on accuracy of
grating ruler and encoder
76
Tel: +86 10 56370168
program.when I/O is input internal,as stop motion or signal of
ƵWhen I/O is input I/O as the interface hardware of monitor
device status
ƵAchieve indication of motion control by zolix MC antivex.
additionally ,finishing simple programme by MC control
software,set up motion parameters and location parameters
conveniently
Motion Control ÿ MC600 Controller
parameter is set up , can memory, avoid the reset parameter
ƵDisplay surface of 240x128 lattice LCD,aboundant
when open and close PC,avoiding the error from artificial.
content,the design of style of menu .is easy to set up parameter
ƵJoy stick achieve manual scanning of three directions and
ƹMulti-menu function,convenient for set up parameter
target tracing.,flexible control, it achieve manual control by yaw,
ƹDisplay the parameter of x y z t axises simultaneously
pitch, tilt ,clickwise rotation, convenient for remote prelocate
ƹChoose different model of operating
and range scanning.the speed of joy stick have plus and minus
ƵStore the parameter ,non- loss electric,simple operating
convenient and flexibile
process
Lead meachanism of translation .radium of ratation and motion
‫ݺ‬䲏Წᠴ⹧ఫ喟
ऻ䲏Წᠴ⹧ఫ喟
Keyboard
Emergency
! Stop Switch
Model
$%
Menu
"#
Interface
Function
Keys Joystick
Model&Number
Fan
Baterry
Socket USB
Interface
USB RS232
RS-232
Model Sheet:
Model
Indication
MC600-4B
4 axes 2 phase
stepper motor
MC600-2B
2 axes2 phase
stepper motor
Motor control
Motion control
software
Interface
I/O
Memory
Display pannel
Power
Size
Weight
3 phase stepper motor(24V,5.8 A max
MC600ASP+ASP-XXXX
Servo-motor cabinet+servo-motor
drive cabinet
Panasonic AC servo-motor
(220V,200W max)
Open or closed-loop control
300kHz pulse frequency
2mHzpulse frequency
128 sub-division max
51200 max,numbers of pulse
1048576max
32 digital,150Mhz DSP controller
PID servo control
Terraced speed adjust
Point to point,synchronous or dy synchronous motion
Inching and increment
3 axes linear interpolation , 2 axes circle interpolation
Open collector output
Zero switch,left and right limited switches
Joystick
ZolixMC600 software
MC600 control software
RS-232,USB2.0
16 digital programmable TTL I/O
512KB flash non-volatile firmware
LCD,240X128,105X56MM
115/220V,60/50Hz,400W(max)
440x395x145mm
4.5Kg
Tel: +86 10 56370168
Cotrollers
Output trigger
Sensor
Option
MC6003P-2B
2 axes3phase
stepper motor
Combinated Stages
2 phase stepper motor(24V,3.5Amax)
MC6003PB
4 axes 3 phase
stepper motor
LCD
LCD
Screen
Digital I/O Interface
Grating Interface
Power Switch
Motor Interface
MC600 can operate by SD card:
total 8 achieve switch by tilt angle of ratation and stop time.
ƹDisplay measure units
ƵCompare with self-made, reducing workload
77
Motion Control ÿ SC300 Controller
SC300 Controller
SC300 series stepper motor box is a integralted system of 1-3 axis point
to point location target ,particular to translation and rotation stages.
equipped with stepper motor drive ,strong control function ,control panel
achieve man-manchine design,operate stages without PC,providing RS232
interface,users can control by zolix motion manager stages software;program
by communication protocol or OCS activex.,control the whole stage by SC300
Specification
Ɣ Power voltage:220V/50HZ
Ɣ Numbers of axis:1-3 axis (each axis has separate function key ,directly control axises
Ɣ Motor and driving:2 phase stepper motor
Ɣ Subdivision
SC300A:2,4,8,16,32,64
SC300B:2,4,8,16,32,64,128
Ɣ
Ɣ
Ɣ
Ɣ
Ɣ
Ɣ
Pulse speed:400PPS-18KPPS
RS232 standard interface
Acceleration deceleration model :triangle or terranced
8 untis lead display
Appreance size :365X132X360
Weight:6Kg
SC300 Model Sheet
Combinated Stages
SC300-1A
1 axis 42 stepper motor controller(64 sub-division max )
SC300-2A
2 axes 42 stepper motor controller(64 sub-division max )
SC300-3A
3 axes 42 stepper motor controller(64 sub-division max )
SC300-1B
1 axis 57stepper motor controller(128 sub-division max)
SC300-2B
2 axes 57stepper motor controller(128 sub-division max)
SC300-3B
3 axes 57stepper motor controller(128 sub-division max)
SC3003P Model Sheet
SC3003P-1B
1 axis three phase stepper motor
SC3003P-2B
2 axes three phase stepper motor
SC3003P-3B
3 axes three phase stepper motor
Cotrollers
78
Tel: +86 10 56370168
Motion Control ÿ HC-100 Controller
HC-100 is Simple and Robust function motion controller ,low price,outstanding
performance,continuous adjust speed, In the single-step operation and can run
HC-1OO single axis stepper motor controller by hand
continuously switch between the built-in high-performance stepper motor drive to
stepper motor, the maximum current of 3.5A, detailed details , please contact us.
Model Sheet
Model
HC-100(2 phase stepper motor)
HC3P-100(3 phase stepper motor)
5KHz max
Power
AC220V change to DC24V power adaptor
Motion mode
Continous mode, single step both can change
Current
3.5A MAX
5.8A MAX
Division
128 max
51200 pulse /turn
112h62h158
152h75h160
Size(mm)
Frequency
support high number of segments (256 segments), support a variety of 2-phase
Combinated Stages
Cotrollers
Tel: +86 10 56370168
79

Motorized Stages Catalogue

Transcription

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