SYRUSpro

Optical coating systems and processes
complete solution for the production of high end
optical coatings
Optatec 2008, 17th June 08
Dr. Karl Matl
Leybold Optics GmbH
LEYBOLD OPTICS - At a Glance
Headquarters
Alzenau, Germany
Shareholder
EQT, Sweden
Employees
430 (260 at Headquarters)
Subsidiaries
EUROPE:
AMERICAS:
ASIA:
Benelux, France, Germany, Italy,
Liechtenstein, Spain, Sweden, UK
USA
China, Japan, Korea, Taiwan
Sales
appr. € 120 Mill. (2007)
Products
Thin Film Coating Equipment and Customer
Support
Ophthalmics, Precision Optics, 3-D coatings,
Web, R&D - and Special Systems ( Dresden ), Display,
Architectural Glass, Solar ( sputtering, PECVD ).
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Applications
Precision Optics
2
Global Reach
Germany
Alzenau-HQ
Germany
Subsidiary
Dresden
China
Subsidiary
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US
Subsidiary
Precision Optics
3
SYRUSpro – Evaporation systems portfolio
SYRUSpro 710
SYRUSpro 1110 DUV
SYRUSpro 910
SYRUSpro 1110
Precision Optics
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SYRUSpro 1510
4
Optics systems portfolio – Helios und DLCcs
DLCcs – compact PECVD – system
für DLC - coatings
Precision Optics
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Helios – high precision sputtering
system for optical coatings
5
SYRUSpro - 1110
System
Systemequipment
equipment: :
••Calotte
Calottesystem
system––1000
1000mm
mm
diameter
diameter
••APSpro
APSpro––source
source
•Evaporator
•EvaporatorHPE6,
HPE6,22pc
pc
••Thermal
Thermalevaporator,
evaporator,22pc
pc
••Heater
Heaterfrom
fromtop
top
See the light.
••OMS
OMS- -5000
5000
Precision Optics
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See the light.
SYRUSpro - 1110
Precision Optics
7
APSpro: High Output Plasma Source
The APSpro - Advanced Plasma Source
for deposition of highly dense and
temperature shift-free films with high deposition rates
Fully dense, shift-free films
Low temperature for thermally sensitive materials
See the light.
Increased wide useful substrate area for excellent distribution over large diameters
Precision Optics
8
Insitu optical monitoring – OMS 5000
Dr. Karl Matl
Leybold Optics GmbH
Optical in – situ – monitoring directly on calotte
Motivation :
Limiting factors in production due to tooling factor between testslide and
substrate :
accuracy of optical layer thickness on substrate
reproducibility from batch to batch
Next step in innovation :
optical monitoring directly on the substrate on the calotte
Breakthrough in accuracy :
See the light.
Elimination of tooling factor by direct monitoring
Precision Optics
10
Direct optical monitoring on calotte
SYRUSpro1100 PIAD Box Coater with direct monitoring in intermittent mode
OMS 5000
See the light.
Multiple wavelength monitoring on
dome
Transmission measurement with
optical fibers.
Monitor glass located on the
substrate holder 330 mm out of
center.
Rotation speed: 30 rpm.
Precision Optics
11
Direct optical monitoring on calotte, SYRUSpro 1110
PlAD Box Coater with direct monitoring, coated as designed
Biosensor Application with TiO2/SiO2 (1st and 2nd Run)
100
Transmittance (%)
90
80
first run
70
second run
design
60
50
40
30
20
10
0
450
500
550
600
650
700
750
800
Wavelength (nm)
See the light.
Optical Performance of the monitor glasses on calotte
Precision Optics
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Direct optical monitoring on calotte, SYRUSpro 1110
PIAD Box Coater with direct monitoring
6-Cavity Filter with TiO2/SiO2 (4 consecutive Runs)
0,00
3dB (50%) BW – 10,5 nm
-2,00
10dB (10%) BW – 13,2 nm
CWL – 500,5 nm + 0,28 nm (0,055 %)
-6,00
-8,00
-10,00
-12,00
Monitorglass Run_120805
Monitorglass Run_170805
-14,00
Monitorglass Run_180805
Monitorglass Run_190805
-16,00
480
485
490
495
500
505
510
515
520
Wavelength (nm)
Optical Performance of the monitor glasses on calotte
Precision Optics
See the light.
Transmittance (dB)
-4,00
13
Direct optical monitoring on calotte, SYRUSpro 1110
5 consecutive batches – all substrate positions ( 25 )
100
90
Transmittance [%]
80
70
60
50
40
30
20
10
0
350
400
450
500
550
600
650
w avelength [nm ]
Precision Optics
700
750
800
850
52-2
52-3
52-4
52-5
52-6
53-2
53-3
53-4
53-5
53-6
54-2
54-3
54-4
54-5
54-6
55-2
55-3
55-4
55-5
55-6
56-1
56-2
56-3
56-4
56-5
56-6 14
See the light.
OMS on calotte, 5 consecutive repro - batches
Direct optical monitoring on calotte, SYRUSpro 1110
OMS on calotte, 5 consecutive repro - batches
100
excellent uniformity
and reproducibility
90
Transmittance [%]
80
< ± 0,3 % (± 2 nm)
70
60
50
40
30
20
10
0
635
Spec.
637
639
641
643
645
647
w avelength [nm ]
Precision Optics
649
651
653
655
52-2
52-3
52-4
52-5
52-6
53-2
53-3
53-4
53-5
53-6
54-2
54-3
54-4
54-5
54-6
55-2
55-3
55-4
55-5
55-6
56-1
56-2
56-3
56-4
56-5
56-6
See the light.
5 consecutive batches – all substrate positions
15
Optical in – situ – monitoring - Results on full calotte
Summary :
Excellent reproducibility was demonstrated with direct monitoring on the
testslide on calotte in a SYRUSpro 1100 PIAD Box Coater (± 0,055%, 330mm
out of center).
With direct monitoring calibration runs can be widely avoided.
Uniformity and repeatability achieved was ± 2 nm at 645 nm ( ± 0,3 % )
on all radial positions of a 1 m diameter calotte ( for IR – cut filter, 40 layers )
Increased production yield is expected with direct monitoring since a
variable tooling factor doesn’t exist.
Direct optical monitoring on calotte with OMS 5000 opens new
dimensions for accuracy, repeatability and yield in mass production
Precision Optics
See the light.
For optical monitoring with test slide changer, the most unsafe is the
outside position with the highest number of substrates, with OMS 5000 on
calotte this uncertainty eliminated
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SYRUSpro 1100 DUV
for 248 nm and 193 nm
Dr. Karl Matl
Leybold Optics GmbH
SYRUSpro 1100 DUV
System
Systemequipment
equipment: :
••Planetary
Planetarysystem
system––400
400mm
mm
diameter
diameterplanet
planetplate
plate
••APSpro
APSpro––source
source
•Evaporator
•EvaporatorHPE6,
HPE6,22pc
pc
••Thermal
Thermalevaporator,
evaporator,22pc
pc
••Heater
Heaterfrom
frombottom
bottom
See the light.
••OMS
OMS- -5000
5000
Precision Optics
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Recent Innovations: DUV / Semiconductor – SYRUSpro DUV
Low loss, high reflectivity and
environmental stable coatings with APS at 193 nm
APS assisted DUV HR Mirror with Al2O3/SiO2
100
Improved
Improveddesign
design
Reflection
Reflection98
98%
%
90
HR_193_Run 46
HR_ 193_Run 48
HR_193_Run 83
85
80
Reflection
Reflection96
96%%-97
97%
%
75
70
180
185
190
195
200
205
Wavelength (nm)
Precision Optics
210
215
220
See the light.
Reflectance (%)
95
19
SYRUSpro 1510
high throughput and high precision
Dr. Karl Matl
Leybold Optics GmbH
SYRUSpro – 1510 with planetary, system equipment
Systemequipment
equipment::
System
Planetarysystem
system––524
524mm
mm
••Planetary
diameterplanet
planetplate,
plate,66pc
pc
diameter
APSpro––source,
source,2pc
2pc
••APSpro
EvaporatorHPE12/10,
HPE12/10,22pc
pc
••Evaporator
Heaterfrom
frombottom
bottom
••Heater
See the light.
OMS––5000
5000with
withtestslide
testslide-••OMS
changer
changer
Precision Optics
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SYRUSpro 1510 with calotte and direct monitoring
See the light.
New high
precision
production plant
Dateiname.ppt
Precision Optics
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HPE 12 – new large volume e – beam gun evaporator
• compact design
• turnable around flange
for optimum position
See the light.
• high volume
20 pockets crucible
Dateiname.ppt
Precision Optics
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Direct optical monitoring on calotte, SYRUSpro 1510
5 consecutive batches – all substrate positions ( 25 )
UV - IR - Cut filter, SYRUSpro 1510, Repro Runs #29 - #33
R29-2
R29-3
R29-4
100
R29-5
R29-6
90
R30-2
R30-3
80
R30-4
R30-5
R30-6
R31-2
60
R31-3
R31-4
50
R31-5
40
R31-6
R32-2
30
R32-3
R32-4
20
R32-5
R32-6
10
R33-2
R33-3
0
R33-4
350
400
450
500
550
600
650
700
750
800
850
wavelength [nm]
Precision Optics
900
950
1000
1050
1100
1150
1200
1250
R33-5
R33-6
See the light.
transmittance [%]
70
24
Direct optical monitoring on calotte, SYRUSpro 1510
5 consecutive batches – all substrate positions
UV - IR - Cut filter, SYRUSpro 1510, Repro Runs #29 - #33
100
R29-2
excellent uniformity
and reproducibility
90
R29-3
R29-4
R29-5
80
R29-6
< ± 0,6 % (± 4 nm)
R30-2
R30-3
R30-4
60
R30-5
R30-6
R31-2
50
R31-3
R31-4
40
R31-5
R31-6
30
R32-2
R32-3
20
R32-4
R32-5
10
R32-6
R33-2
0
R33-3
710
712
714
716
718
720
722
724
726
wavelength [nm]
728
730
732
734
736
738
740
R33-4
R33-5
R33-6
See the light.
transmittance [%]
70
Precision Optics
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SYRUSpro 1510 calotte – for shiftfree filter applications
Features of SYRUSpro 1510 for shiftfree filters :
Equipped with a full high precision calotte ( diameter 1400 mm ),
movable uniformity masks
New e – beam – gun evaporators HPE 12 for large volume
Direct optical monitoring on calotte with OMS 5000 installed,
for highest accuracies in repeatability and uniformity over the calotte
See the light.
APSpro plasma sources for highest deposition rates and excellent layer
quality
Precision Optics
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HELIOS
High precision thin film filter production
by magnetron sputtering
HELIOS Technology
HELIOS Technology
Magnetron Sputtering with 2 MF Dual Mag
- Plasma Assisted Reactive Process
- Sputtering from Metal Target or DC-conducting Oxide Target
- 1 Dual Mag for high - , 1 Dual Mag for low Index material
- Co-sputtering with 2 Dual Mag for medium indices
Dynamic Deposition on rotating Substrate Turn-table
In-situ direct on Substrate Optical Thickness Control
See the light.
Load Lock with automated Single Substrate Handling System
Precision Optics
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HELIOS – Service Position Production Tool
■ Helios with automated single substrate load lock
See the light.
- Door in service position for cleaning, shutter open
Precision Optics
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HELIOS – Service Position Production Tool
■ Helios with automated single substrate load lock
See the light.
- substrate holder and OMS 5000 in transmission and reflection
Precision Optics
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HELIOS – Service Position Production Tool
■ Helios with automated single substrate load lock
See the light.
- view into the load lock with single substrate holder
Precision Optics
31
Principle of PARMS
Reactive Assist Process with RF – Plasma Source
TMP1
TMP3
TMP2
MF DualMag1
Si
Ar
MF DualMag2
Si
Nb
Ar
O2
RF Plasma Source
Nb
O2
O2
v
1. Thin layer/rotation
N1.
2.
N2.
.
.
SiOx
NbOx
Thin layer/rotation
SiO2 / Nb2O5
Thin layer/rotation
(SiOx, absorbing)
-------.
.
Final thickness of SiO2 single layer
(SiO2, non absorbing)
--------(NbOx, absorbing)
.
.
Final thickness of Nb2O5 single layer
(Nb2O5, non absorbing)
Precision Optics
See the light.
SiOx
32
HELIOS – Single layer Results
Layer Results
- Optical properties, surface roughness and dynamic deposition
rate of 500 nm thick single layers.
Material
Ref. index n
@ 550nm
Roughness
RMS [nm]
(Si 0.1)
Rate
[nm/s]
SiO2
1.485
0.36
0.45
Ta2O5
2.17
0.21
0.6
Nb2O5
2.37
0.25
0.55
See the light.
Precision Optics
33
HELIOS – Results with Lab HELIOS
■ Results of NBPF Runs at 1064nm (Result with OSA)
Repro on Monitoring Position P2 of 3 Runs
Run1_Pos2
Run2_Pos2
Run3_Pos2
1,00E+00
9,00E-01
7,00E-01
6,00E-01
5,00E-01
4,00E-01
FWHM =2nm
3,00E-01
2,00E-01
1,00E-01
0,00E+00
1060
1061
1062
1063
1064
1065
1066
Wavelength / nm
Precision Optics
1067
1068
1069
1070
See the light.
Transmission / %
8,00E-01
34
Notch Filter Results
Single Notch Filter, Repro Run to Run (AOI 0°)
Notch Filter 532nm, OD >4, Repro Run to Run
Run 2 P3
Run 3 P3
Design
Design with absorp.
Tavg (Spec.)
100
90
70
60
50
40
30
20
10
0
380
405
430
455
480
505
530
555
580
Wellenlänge [nm]
Precision Optics
605
630
655
680
705
730
See the light.
Transmission [%]
80
35
Notch Filter Results
Single Notch Filter, Repro Run to Run
Notch Filter 532nm, OD >4, Repro Run
Run 2 P3
Run 3 P3
Design
Design with absorp.
100
90
80
70
60
50
Repro < 0,4nm
(< 0,1%)
40
30
20
10
0
515
520
525
530
Wellenlänge [nm]
Precision Optics
535
540
545
See the light.
Transmission [%]
FWHM = 16nm
36
Notch Filter Results
Multi_Notch Filter (AOI 10°)
Development done in co-operation with MSO, Jena
Filter Design
- Layer material:
Nb2O5, SiO2
- No. of layer:
198
- Total thickness:
20µm
- Thickness Nb2O5:
> 16µm
- Thickness Control:
Optical combined with time
See the light.
Total Process Time < 14h
Precision Optics
37
Notch Filter Results
Multi_Notch Filter (AOI 0°),
Development done in co-operation with MSO, Jena
Multi_Notch Filter based on Nb2O5/SiO2 (AOI 0°)
Theory
071122-1_P5
071122-1_P7
071122-1_P9
Tavg_Spec
Tmin_Spec
100
90
70
60
50
40
30
20
10
0
400
450
500
550
600
Wavelength [nm]
Precision Optics
650
700
750
800
See the light.
Transmittance [%]
80
38
Notch Filter Results
Multi_Notch Filter (AOI 0°)
Development done in co-operation with MSO, Jena
OD of Multi_Notch Filter
OD_071122-1_P5
OD_Spec
5
4,5
4
3,5
2,5
2
1,5
1
0,5
0
400
450
500
550
600
Wavelength [nm]
Precision Optics
650
700
750
See the light.
OD
3
800
39
Helios - Production of Challenging Thin Film Filter
Summary Helios
High quality coatings for classical filter designs by
PARMS ( Plasma Assisted Reactive Magnetron Sputtering )
Excellent reproducibility by in-situ direct on-substrate
optical monitoring
Fully automated and clean room compatible production
solution with low particle/defect level
High productivity compared to IBS
Precise preparation of complex interference filter
demonstrated at various notch filter designs
See the light.
Precision Optics
40
Complete Solutions
LO is providing coating systems for applications from DUV to VIS,
NIR to IR
We have developed our own components, optimized for the
process requirements
Our coatings systems are modular, the standard components are
selected according to the process requirements
LO is providing the coating system and the process according to
customer’s requirements. The function of the machine and the
process will be set up and demonstrated, also at customer’s
site
After the process installation finished, you can start with production
Precision Optics
See the light.
Complete Solutions for the production of
high end optical coatings
41
Thank you very much
for your attention !
More Questions, interested ?
Please visit us on our booth
F 38 in Hall 3.0
Leybold Optics GmbH
Precision Optics
See the light.
Dr. Karl Matl
42