Installation Instructions VersaPort 2200

Transcription

VersaPort 2200
with BOLTS Interface
(Wafer or Reticle)
Installation Instructions
P/N:2000-1276-01 Revision A
Printed on Cleanroom Paper
DISCLAIMER
This manual may not be reproduced, either wholly or in part, for any reason whatsoever, without prior written permission from Asyst Technologies, Inc. Material contained within this manual is provided for informational purposes only, and is subject to change without prior notice. Asyst Technologies, Inc. assumes no
responsibility for any errors which may appear in this manual, nor for any damages resulting from such
errors.
Any change, alteration, or modification to the equipment described herein, as well as application in a manner inconsistent with its design and intent, without prior written permission from Asyst Technologies Engineering Staff will void the system warranty and may render the equipment unsafe for use or unfit for its
intended purposes.
It is the responsibility of the customer to comply with all local, state, and federal ordinances, regulations,
and laws applicable to the installation and operation of this equipment.
Asyst Technologies, Inc. assumes no liability, whatsoever, for any personal injuries or damages resulting
from the operation or maintenance of this equipment in any manner inconsistent or contrary to the methods supplied in Asyst Technologies, Inc. literature including, but not limited to, manuals, instructions, bulletins, communications, and recommendations.
Responsibility
It is the responsibility of the customer to comply with all local, state, and federal ordinances, regulations,
and laws applicable to the installation and operation of this equipment.
Asyst Technologies, Inc. assumes no liability, whatsoever, for any personal injuries or damages resulting
from the operation or maintenance of this equipment in any manner inconsistent or contrary to the
methods supplied in Asyst Technologies, Inc. literature including, but not limited to, manuals, instructions,
bulletins, communications, and recommendations.
Equipment Modification
Any change, alteration, or modification to the equipment described herein, as well as application in a manner inconsistent with its design and intent, without prior written permission from Asyst Technologies’
Engineering Staff will void the system warranty and may render the equipment unsafe for use or unfit for its
intended purposes.
Asyst Technologies, Inc.
48761 Kato Road
Fremont, California 94538
Telephone: (510) 661-5000
FAX: (510) 661-5166
VersaPort Installation Instructions — Revision A
2
Table of Contents
Installation Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Technical Data (Specifications and Outline Drawing)
......................... 6
About This Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
ESD / EMI Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
EMO & Electrical Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Equipment Lockout/Tagout Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Laser Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Safety Interlocks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
ISIM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Seismic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Pinch Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Ergonomic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Environmental . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Labeling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Description of Labels used on the VersaPort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Location of Labels used on the VersaPort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Verify Asyst Supplied Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Prepare the Installer-Provided Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Mounting Interface Frame . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
RFID Cables (Optional). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Ground Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Communications Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Mount the VersaPort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Prepare the Process Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Prepare the VersaPort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Attach the VersaPort to the Process Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Adjust and Level the VersaPort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Open the VersaPort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Set Up the Rough Positioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Perform Final Adjustments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Verify Proper Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Connect the Cabling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Verify Laser System DAC Values. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Perform the Self Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Verify/Modify the Device ID. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Calibrate the Cassette Offset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Verify Wafer Mapping. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Perform Auto Cycling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
Complete the Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
VersaPort Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
3
Operation with Manual Open Cassette Adapter (MOCA) . . . . . . . . . . . . . . . . . . 40
Cassette Placement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Connect the Cabling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Verify Door Lock Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
ECID Change . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Using HyperTerminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Verify Laser System DAC Values. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Perform the Self Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Verify/Modify the Device ID. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Perform Auto Cycling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Complete the Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
40
40
41
41
41
43
44
45
45
45
ISIM (VersaPort Simulation Program) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Starting ISIM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Menu Lists. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Main Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
AUTO (F1 from Main Menu) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MANUAL (F2 from Main Menu) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MSC (F3 from Main Menu)) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
NON-PC CYCLES (F4 from Main Menu)). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
STATUS (F5 from Main Menu) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
CONFIG (F6 from Main Menu) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TAG 8400 (F7 from Main Menu) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
EXIT (F8 from Main Menu) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SMIF OPTION (F9 from Main Menu) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Typical Operations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4
47
47
48
48
49
50
51
51
51
52
55
56
56
57
Installation Instructions
Introduction
The VersaPort 2200 is a 200mm class load port for presenting wafers or reticles to the process tool while maintaining better-than-Class 1 cleanroom environment for the substrate.
This manual describes how to install the VersaPort.
The person installing this equipment must be thoroughly familiar with its operation, and
must understand and comply with all safety requirements described in this manual.
Structure of This Document
Technical Data (Specifications and Outline Drawing) section on page 6, includes specifications and outline drawing for the VersaPort.
About This Manual section on page 10, explains the conventions used in this manual for software descriptions, figures & tables, and key words.
Safety section on page 10, describes the necessary precautions that must be taken when
installing or operating the equipment.
Labeling section on page 14, describes each VersaPort label and where it is placed.
Installation section on page 18, explains the installation procedure. The VersaPort installation proceeds in five main steps:
1. Verify Asyst Supplied Materials.
2. Prepare Installer Provided Materials.
3. Mount and level the VersaPort.
4. Verify proper operation of the VersaPort.
5. Complete the installation.
Table , VersaPort Configuration, on page 39, lists the default software configuration (ECID
values) of the VersaPort.
Operation with Manual Open Cassette Adapter (MOCA) section on page 40, describes operation
of the VersaPort with the Manual Open Cassette Adapter (MOCA).
Starting ISIM section on page 47, explains how to use the ISIM software to operate and configure the VersaPort from a PC.
5
TABLE 1
VersaPort Specifications
Port Size
200mm
Height (BOLTS
interface)
1385mm (54.53 in.)
Width
VersaPort = 370.84mm (14.60 in.)
BOLTS interface = 470mm (18.50 in.)
Depth
VersaPort = 396.24mm (15.60 in.)
VersaPort on BOLTS interface = 415.3mm (16.35 in.)
Weight (without
SMIF-Pod)
~56.70Kg (~125 lbs.)
Port Plate Height
while operating (at
Stage position)
1188.5mm (46.79 in.)
NOTE- See Figure 1, VersaPort Outline Drawing- Revision 3, on page 7 for height
requirements for rear shroud and Pod.
Port Plate Height
at Home position
900mm (35.43 in.)
Speed
~76.2mm (~3.0 in.) per second (constant velocity)
Mounting
Direct mount to Process Tool using a SEMI E63 BOLTS interface frame
Power
24 vdc (+10%, -5%) from external source
1.5 Amps standby; 3.0 Amps typical during operation; 4.0 Amps maximum
Laser
Diode laser; Wavelength =670nm
Laser Power <1mW (Class II)
NOTE- VersaPort is a Class I laser product when used with a SMIF-Pod
See “Laser Safety” on page 12 for a complete description.
Communications
Serial RS-233C, SECSI/II, ASCII, Parallel
Environmental
Operating Temperature
Operating Humidity
Storage Temperature
Storage Humidity
Cleanliness
Performs better-than-Class 1 (in accordance with FED-STD-209E)
Maximum allowable particle concentration = 1 particle/cu.ft at 0.5µ, or 35 particles/
cu.ft. at 0.1µ. ‘See “Installation Requirements” on page 25.
10°to 40° C
10%- 75%
-10° to +55° C
5%- 90%
6
FIGURE 1
VersaPort Outline Drawing- Revision 3
7
Process-Tool Side
(front)
Vertical Drive
Column
Port Door
Minienvironment
Port Plate
Connector
Panel (behind
minienvironment shield)
User/operator
side
FIGURE 2
VersaPort terms
FIGURE 3
VersaPort with Multi-Reticle (with Pod top removed)
8
FIGURE 4
VersaPort with 230mm Reticle (with Pod top removed)
FIGURE 5
VersaPort with 150mm Reticle (with Pod top removed)
9
About This Manual
About This Manual
The following conventions are used in this document:
Software
➢ Keys or switches that must be pressed are printed in bold. Example: Press Enter.
➢ Software commands are printed in italics. Example: After the UNLOAD command …
Key Words
Warnings, cautions, and notes are used throughout this manual as illustrated below:
WARNING
Warnings alert personnel to potentially hazardous conditions or actions that may result
in personal injury.
CAUTION
Cautions alert personnel to actions that may result in equipment damage.
NOTE . . .
Notes emphasize, or expand upon, the presented information.
Safety
Before attempting any operation or service, it is essential that the information presented in
this section be read and thoroughly understood. Important information is provided regarding safety hazards that may be encountered while working with these systems.
General Requirements
Warnings and cautions are used throughout this manual to identify potential hazards to
personnel and equipment, respectively.
All warnings and cautions immediately precede the step or operation in which the hazardous condition may be encountered. All personnel operating or performing service on
Asyst equipment must fully understand warnings, cautions, and all general safety regulations associated with electromechanical equipment.
Personnel should become thoroughly familiar with all aspects of safety for individuals and
equipment prior to operating or performing service on this equipment.
10
Safety
Responsibility
It is the responsibility of the Customer to comply with all local, state, and federal ordinances, regulations, and laws applicable to the installation and operation of this equipment.
Asyst Technologies, Inc. assumes no liability, whatsoever, for any personal injuries or
damages resulting from the operation or service of this equipment in any manner inconsistent or contrary to the methods supplied in Asyst Technologies, Inc. literature including,
but not limited to, manuals, instructions, bulletins, communications, and recommendations.
ESD / EMI Precautions
The following instructions must be followed to provide ESD protection and reduced EMI
emissions:
➢ A braided copper ground wire (minimum 12 gauge) with ring-lug connectors (sized
for No. 8 screw) must be connected between the VersaPort ground connection and the
Process Tool power supply earth ground point. (See Figure 14, Ground Connection
and Cable Pass-Thru, on page 28 for VersaPort ground connection point location).
➢ Communications cables must be constructed with shielded cable and provided with
metal connector backshells (DB 9 and DB 25 where necessary) terminated to the cable
shield.
➢ The VersaPort power cable and communications cables must use ferrite cores. The
cores are to be located approximately two inches from the connector shell at the VersaPort end of the cable.
CAUTION
For ESD and EMI considerations and power supply protection, the ground cable must
be properly installed.
EMO & Electrical Power
The main electronics are fully enclosed in the lower portion of the VersaPort. Electrical
power for the VersaPort is supplied by the Process Tool. Power to the VersaPort should be
connected through the process tool EMO circuitry such that in an emergency all power can
be removed from the VersaPort by depressing the red mushroom shaped EMO switch
mounted on the Process Tool chassis.
Equipment Lockout/Tagout Procedure
Lockout/tagout procedures must be followed during installation or when service is performed on the VersaPort to prevent injury or equipment damage. Where no company procedures exist, follow the guidelines below:
1. Notify all affected employees and users that service is to be performed and that the
equipment needs to be shut down and locked out.
11
Safety
2. The Process Tool must be powered down, or the circuit that provides power to the VersaPort must be switched off.
3. Lock out the circuit with an assigned lock.
4. Test to make sure the VersaPort cannot be turned on accidentally.
5. Tag the locked circuit with a statement indicating➢ Unauthorized operation of the equipment or removal of tag is prohibited
➢ Date of service performed
➢ Names of the persons performing the service
➢ Short description of the service performed
➢ Signatures of the service supervisor and production supervisor
Laser Safety
User
Under normal operation (auto mode) using a SMIF-Pod or the Manual Open Cassette
Adapter (MOCA), the user is never exposed to direct or collateral radiation in excess of
the accessible emission limits of Class I. The laser beam is on only when the VersaPort is
in motion and the pod-in-place switch is activated; when the VersaPort is not in motion,
the laser system is inoperative.
LASER WARNING
The VersaPort contains a Class II laser diode. The VersaPort is classified as a Class I
Laser Product under the CDRH laser safety regulations and the IEC 825-1 Standard
only if the VersaPort is installed onto a Process Tool. The laser radiation must be contained inside the Tool, otherwise the VersaPort is a Class II Laser Product. Covers and/
or enclosures and a SMIF-Pod must be used with the VersaPort to prevent exposure to
the operator. Covers must never be removed by the operator.
If covers and a SMIF-Pod are not used, the VersaPort is a Class II, not a Class I Laser
Product.
Service Technician
During installation, there are no requirements for cleaning, servicing, or electro-optical
inspections of the laser system. Service procedures for laser replacement and alignment
are included in the Technical Manual (P/N 2000-1252-01).
When operating the VersaPort using ISIM software in Manual mode, the laser interlock
will be disabled. During service alignment of the laser system the technician may be
exposed to the laser beam. When power is removed from the VersaPort, the laser is inoperative.
12
Safety
Safety Interlocks
DC Voltage
The VersaPort maximum voltage is +24 vdc. This voltage is considered non-hazardous
and requires no mechanical power interlocks.
Laser Interlock
The VersaPort is designed to prevent the user from exposure to the laser beam. During
normal operation, the laser is enabled only while the port plate is in motion with a Pod
locked to the port plate. With a SMIF-Pod locked to the port plate the user cannot be
exposed to the laser beam.
LASER WARNING
The laser interlock is bypassed when using ISIM software in Manual (service) mode.
Do not stare into laser beam.
ISIM
Usage of ISIM can put the Load Port in an unsafe mode for operators, as interlocks can be
disabled. Laser exposure hazards and pinch hazards may be present. Personnel should
become thoroughly familiar with all aspects of safety for individuals and equipment prior
to using ISIM to operate this equipment.
Seismic
Follow all installation procedures to ensure compliance with S2-93; Safety Guidelines For
Semiconductor Manufacturing Equipment, Seismic Requirements.
Pinch Points
A pinch hazard exists at the port plate when the VersaPort is being serviced and the
minienvironment is removed- or when no Pod is present. Pinch points are identified by
labels (Table 2, List of VersaPort Labels, on page 14) near the pinch-point hazard. See Figure 6, VersaPort Label Placement (user side), on page 16 for the location of the pinch hazard labels.
PINCH WARNING
The user must never place fingers or hands on any part of the VersaPort while it is
operating. Failure to comply may result in bodily injury.
Ergonomic
13
Labeling
The VersaPort must be mounted in a manner to provide a minimum hand clearance of
three inches (76.2mm) from either Pod handle to the nearest adjacent object.
Environmental
The VersaPort uses no chemicals or combustibles, and creates no hazardous waste.
Labeling
Description of Labels used on the VersaPort
TABLE 2
List of VersaPort Labels
No.
Label
Description / Location
1
Laser Interlock
The interlock label warns users that an
eye hazard exists if the safety interlock of
the laser system is defeated. The label is
located on the shield for the port opening.
See Figure 6.
CAUTION
LASER RADIATION WHEN OPEN
AND INTERLOCK DEFEATED
DO NOT STARE INTO BEAM
3
CE
S/N
DATE
POWER OUTPUT <1mW
WAVELENGTH 600 - 700 nm
CLASS II LASER PRODUCT
BS 4803
The laser manufacturer’s caution label is
attached to the laser bracket cover on the
Process Tool-edge of the VersaPort port
plate. See Figure 7.
IEC 825
MANUFACTURED BY
LASER RADIATION
LASERMAX, INC.
CAUTION
3495 WINTON PL., BLDG. B
ROCHESTER, NY 14623
AVOID EXPOSURE
Laser Radiation Emitted
From This Aperture
WARRANTY IS VOID IF LABEL IS REMOVED
Laser Label
THIS EQUIPMENT CONFORMS TO PROVISIONS OF
US 21 CFR 1040.10 AND 1040.11
2
This label identifies equipment that conforms to testing and certification requirements of the European Community. The
CE label is located at the user-side of the
Versaport, behind the minienvironment
shield. See Figure 6.
14
Labeling
TABLE 2
List of VersaPort Labels (continued)
No.
Label
4
Model & Serial Number
The model and serial number label for the
VersaPort is located on the Process Toolside of the interface frame. This number
is required when contacting Asyst Technologies for any matter concerning the
equipment. See Figure 7.
TECHNOLOGIES, INC
48761 KATO RD.
FREMONT, CA 94538
MODEL:
PART NO.:
SERIAL NO.:
MANUFACTURED:
CLASS I LASER PRODUCTS EMBEDDED WITH
CLASS II 670nm LASER
“PRODUCT COMPLIES WITH RADIATION PERFORMANCE
STANDARDS 21 CFR SUBCHAPTER J”
5
Input Voltage and I/O
The input voltage and I/O label is located
below the Versaport at the interface
frame. See Figure 6.
(optional)
6
Handle at Corners
NOTICE
HANDLE CORNERS TO
MOVE AND INSTALL
7
Pinch Warning
DANGER
PINCH HAZARD
The “Handle at Corners” label is an alert
to handle the VersaPort only by the upper
corners during movement and installation. It is located on the Process Tool-side
of the interface frame. See Figure 7.
The pinch hazard label is located at the
port plate, behind the minienvironment
shield and warns of a pinch hazard when
the shield is removed. See Figure 6.
Do Not Insert Fingers Into
Vertical Opening. Failure
To Comply May Result In
Finger Injury.
15
Labeling
TABLE 2
List of VersaPort Labels (continued)
No.
Label
8
Seismic
The seismic label for the VersaPort is
located in two places on the Process
Tool-side of the interface frame, next to
each alignment plate opening. See
Figure 7.
SEISMIC
ATTACHMENT
POINT
9
Ground
The ground point label indicates the location where a ground cable from the Process Tool supply is attached to the
VersaPort. The ground point label is
located on the Process Tool-side of the
BOLTS frame, near the I/O cable passthrough. See Figure 7.
Location of Labels used on the VersaPort
TECHNOLOGIES, INC
48761 K ATO R D.
FREMONT, CA 94538
MODEL:
PART NO.:
SERIAL NO.:
MANUFACTURED:
CAUTION
LASER RADIATION WHEN OPEN
AND INTERLOCK DEFEATED
NOTE-CE label and Pinch label behind shield
DANGER
PINCH HAZARD
Do Not Insert Fingers Into
Vertical Opening. Failure
To Comply May Result In
Finger Injury.
ASCII
SECS
FIGURE 6
MSC
VersaPort Label Placement (user side)
16
Labeling
TECHNOLOGIES, INC
48761 K ATO R D.
FREMONT, CA 94538
MODEL/
SERIALNO
MODEL:
PART NO.:
SERIAL NO.:
MANUFACTURED:
NOTICE
BS 4803
IEC 825
MANUFACTURED BY
WARRANTY IS VOID IF LABEL IS REMOVED
S/N
POWER OUTPUT <1mW
WAVELENGTH 600 - 700 nm
CLASS II LASER PRODUCT
LASERMAX, INC.
LASER RADIATION
DATE
CAUTION
3495 WINTON PL., BLDG. B
ROCHESTER, NY 14623
AVOID EXPOSURE
Laser Radiation Emitted
From This Aperture
THIS EQUIPMENT CONFORMS TO PROVISIONS OF
US 21 CFR 1040.10 AND 1040.11
HANDLE CORNERS TO
MOVE AND INSTALL
SEISMIC
ATTACHMENT
POINT
FIGURE 7
VersaPort Label Placement (process tool side)
17
Installation
The section describes how to install the VersaPort 2200 (mounted to a SEMI-standard
BOLTS interface frame) to the Process Tool. The installer should be aware of all requirements outlined in the Safety Section at the beginning of this document. The VersaPort
should already be removed from the shipping crate.
Handling
CAUTION
Handle the VersaPort only by the BOLTS interface frame. Do not handle by the minienvironment or port plate assembly. Failure to comply may result in damage to the VersaPort.
GRAB/HANDLE
upper frame only.
DO NOT Grab/Handle
from these areas.
DO NOT bump against
these areas.
FIGURE 8
VersaPort Handling Points
18
Installation
Once the VersaPort is removed from the shipping container it should be placed on a level
surface. Roll the VersaPort by grasping at the upper edges of the interface frame.
CAUTION
Make sure that the VersaPort is secured in a vertical position before operating with Pod
and cassette.
Verify Asyst Supplied Materials
Unpack the shipping container and verify the contents of the packing list (see Table 3).
TABLE 3
Packing List
Description
Part Number
Quantity
VersaPort Final Assembly
9700-5384-xx
1 ea
VersaPort 200/300 BOLTS Bridge Interface
9700-5640-01
1 ea
Kit, Installation, VersaPort (platform mount)
See NOTE below table.
9700-5811-01
1 ea
Leveler, Base
4002-1429-01
2
Block, Guide Pin
4002-1595-01
1
Pin, Guide Position Lock
4002-1596-01
1
Rod, Leveling
4002-1597-01
2
Kit, Power Connector (see contents below)
9700-3379-01
1
Screw, Socket Hd Cap, SS 8-32
7000-0446-01
2
Washer, Flat, SS #1/4
7200-0014-25
2
Washer, Split Lock, SS #1/4
7200-0013-25
2
Nut, Hex, SS #1/4-20
7100-0032-50
2
Screw, Set, SS 4-40x3/16
7000-0611-03
2
9700-5864-01
1 ea
Mount, Alignment, Lower
4001-9833-01
1
Ball, Alignment, Lower
4001-9835-01
1
Plate, Bumper, Lower
4001-9832-01
1
Shaft, Alignment, Horizontal
4001-9845-01
2
Knob, Clamping, Horizontal Align
4001-9844-01
2
Screw, Soc Hd Cap, M8x40mm, SST
7000-2168-01
2
Screw, Phil Flat Hd, 10-32x3/8, SST
7000-0454-06
2
Washer, Flat, M8, SST
7200-0047-08
2
Washer, Split Lock, M8, SST
7200-0048-08
2
Set Screw, Hex Soc Hd, 10-32x5/16, Nylon
7000-1614-05
1
Plug, Hole, 0.375 Dia, Nylon, Black
7500-0798-01
4
Ferrites, Split, Snap-on, .39D
6900-1313-01
1
Interface Kit
19
Installation
TABLE 3
Packing List (continued)
Description
Part Number
Quantity
Cable Tie, 0.74 Max D, 0.3875L, 0.10W
7500-0108-01
1
Kit, Power Connector (see contents below)
9700-3379-01
1
9700-3379-01
1 ea
Connector, Cable Clamp, CPC
6100-2341-01
1
Connector, 4P, Round, Plug, 8 amps
6100-2362-04
1
Contact, Socket, 18-16 AWG, Crimp
6100-2363-01
4
Connector Kit
NOTE . . .
The Installation Kit, Platform Mount (P/N 9700-5811-01) is shipped with all VersaPort
models. The contents are not used for installation of the BOLTs interface model, since
the VersaPort is mounted to the interface frame. The Interface Kit (P/N 9700-5864-01)
shown is used to mount the VersaPort to the Process Tool.
Power Connector Kit
Clamping Knob w/Alignment Shaft (2)
Ferrite Bead
Hole Plugs (4)
Socket Head Screw w/
washers (2ea)
Lower Alignment Ball (with set screw)
Bumper Plate with Phillips screws
Lower Alignment Mount
FIGURE 9
Interface Kit P/N 9700-5864-01
20
Installation
Prepare the Installer-Provided Materials
Prepare the following items (not provided by Asyst) as directed before mounting the VersaPort to the Process Tool.
Mounting Interface Frame
The process tool must be equipped with a six point bolt pattern interface frame per SEMI
E63 (BOLTS Interface). The height from the middle holes to the floor must be between
743.75mm and 755.75mm (749.75 +/- 6mm) in order to ensure that the VersaPort can be
adjusted to meet the SEMI 900mm height requirement.
NOTE . . .
If the height measured does not fall within the acceptable range, the Process tool frame
will need to be adjusted to assure the VersaPort meets the 900mm requirement.
Power Cable
VersaPort power requirement: +24vdc (+10%, –5%) at 1.5A standby, 3.5A running (typical)
The +24 vdc power for the VersaPort must be provided by the Process Tool.
EMO Requirement. The +24 vdc supply must be connected through the emergency machine
off switch (EMO) of the Process Tool to which the VersaPort is attached. The EMO switch
provides protection to the user and the product.
Cable Assembly. The Asyst Power Connector Kit (Part No. 9700-3379-01) is packed in the
shipping container. Use the Asyst-provided plug and pins and an installer-supplied cable
to assemble the 24vdc power cable according to Figure 10.
+24VDC
1
1
CHASSIS GROUND
2
2
NO CONNECTION
3
3
POWER RETURN
4
4
OEM TOOL
ASYST CONNECTOR
FIGURE 10 VersaPort Power Cable Wiring Diagram
To reduce EMI emissions, clamp the ferrite core (supplied in the Interface Kit) around the
power cable. The core should be secured with a wire-tie near the VersaPort end of the
cable.
21
Installation
RFID Cables (Optional)
Table 4 and Table 5 show the pin assignments for the connection to the RFID or FluoroTrac option.
TABLE 4
RFID Standard
Pin Number
Signal Name
1
ANT SIG
2
ANT SIG
3
ANT SIG
4
ANT SIG
5
N.C.
6
N.C.
7
N.C.
8
N.C.
9
N.C.
TABLE 5
RFID with Card Reader
Pin Number
Signal Name
1
ANT SIG
2
ANT SIG
3
ANT SIG
4
ANT SIG
5
CASS PRESCENCE SIG
6
CASS PRESCENCE +12V
7
CASS PRESCENCE RET
8
OPERATOR PRESCENCE SIG
9
OPERATOR PRESCENCE +12V
Ground Cable
Prepare a braided copper grounding cable [4.37mm (12ga) braided wire] with No. 8 ring
lug connector for connecting the VersaPort BOLTS frame to the same earth ground used
by the process tool.
22
Installation
Communications Cables
All VersaPort communications cables must be shielded with metal backshells to reduce
EMI emissions. A installer-supplied ferrite core should be secured with a wire-tie near the
VersaPort end of any communications cable.
Serial Communications
Table 6 shows how to assemble cable(s) for the VersaPort serial interface for operation
using SECS, ASCII, and/or Smart-Tag communication.
TABLE 6
Serial Port Pin Usage
Pin
Number
Name
Serial Comm (SECS/ASCII)
without Tag.
Serial Comm (SECS/ASCII)
with Tag, or Tag only.
1
(N/C)
not used
not used
2
RX
X
X
3
TX
X
X
4
DTR
not used
not used
5
Ground
X
X
6
DSR
not used
not used
7
RTS
not used
X
8
CTS
not used
X
9
(N/C)
not used
not used
NOTE . . .
1. Serial cables must be wired as null-modem cables.
2. Cables cannot be daisy-chained.
3. If a 5-wire cable is used for Host control only (no SMART Tag read/write), then the
CTS line must not be active. The VersaPort will interpret a signal on the CTS line as
indicating Tag data being sent.
Parallel Communications
One 25-pin male D-subminiature connection is available. Parallel control is limited to
OPEN and CLOSE commands. The parallel port cannot be used for configuration control.
Configuration modifications must be made through the serial connection. (If the Process
Tool does not have serial capabilities, an external Host PC can be used to set up configuration data using ISIM.)
The inputs and outputs use optical isolation, therefore electrical isolation is maintained
only as long as a separate Host +5 VDC and ground is used to drive the LEDs. The Versa-
23
Installation
Port internal +5 VDC and Ground can be used, but will not provide electrical isolation of
I/O pins. See Table 7 for the function of each pin.
TABLE 7
Parallel Communications Interface - Asyst ALU Compatible
Pin No.
Type
Asyst ALU Configuration
ON Current
Requirement
Min.
Max.
OFF Current
Requirement
Max.
2
Input
ENABLE / DISABLE
3
20 mA
0.40 mA
4
Input
OPEN / CLOSE
3
20 mA
0.40 mA
6
Input
Not used
3
20 mA
0.40 mA
8
Input
READY TO CLOSE
3
20 mA
0.40 mA
10
Input
READY TO OPEN
3
20 mA
0.40 mA
12
Input
Not used
3
20 mA
0.40 mA
19
Input
CLEAR ERROR / HOMING CAL
3
20 mA
0.40 mA
Pin No.
Type
Asyst ALU Configuration
Minimum sinking current
capability
5
Output
AT HOME POS
8 mA @ 0.4V
7
Output
HOME
8 mA @ 0.4V
9
Output
POD IN PLACE
8 mA @ 0.4V
11
Output
READY
8 mA @ 0.4V
15
Output
Not used
8 mA @ 0.4V
16
Output
Not used
8 mA @ 0.4V
24
Output
ERROR
8 mA @ 0.4V
3
Connected internally to chassis ground.
17
Factory test usage; Do not connect to these pins.
18
23
To use external Host DC voltage
and ensure electrical isolation (see
note 5)
To Use VersaPort DC Voltage
(see Note 6)
1 & 13
Connect to Host +5 VDC
Do not connect.
14 & 25
Connect to Host signal return.
Connect to pin(s) 20 and/or 21
20 & 21
Do not connect.
Connect to pin(s) 14 and/or 15
24
Installation
.
1. I/O signals with shared labels (such as OPEN/CLOSE) are multi-purpose, with the
specific function depending on the status of other signals.
2. All I/O signals are active low.
3. Input signals are strobed. Minimum effective strobe length is 50 milliseconds.
4. Minimum time from one transition signal to another is 20 milliseconds.
5. To ensure complete electrical isolation (recommended) between the host and the
VersaPort I/O, the input LED power must be provided by the Host at J10 pins 1&13,
and the output signal ground also provided by the Host at J10- pins 14 & 25.
W22 pins 1 &2 on the I/O board must be jumpered and no jumper on W26 installed.
6. To use the VersaPort DC power and ground for input LED voltage and output
signal return, jumper W22 pins 2 & 3 and jumper W26. Connect J10 pins 20 &21 to
pins 14 & 15.
Mount the VersaPort
NOTE . . .
Follow all installation procedures carefully to ensure compliance with S2-93; Safety
Guidelines For Semiconductor Manufacturing Equipment, Seismic Requirements, and
ED-STD-209E, Cleanliness Specifications.
Installation Requirements
Airflow and Cleanliness
Installation of the VersaPort must provide the following air flow and differential pressure;
➢ Airflow- Class 1 Cleanroom air from FFU, with a maximum of 1 particle/cu.ft. @ 0.5
microns, should be diverted into the VersaPort to achieve horizontal laminar flow.
➢ Differential Pressure- A differential pressure of no less than 0.005 inches of water (1.2
Pascal) should be provided between the inside of the VersaPort body (exposed wafer/
reticle zone) and the ambient cleanroom.
➢ Cleanliness of ambient cleanroom should be Class1000 or better.
Mounting
The VersaPort must be mounted in a manner to provide a minimum of three inches
(76.2mm) hand clearance from either Pod handle to the nearest adjacent object to comply
with SEMI S2 ergonomic requirements.
25
Installation
Prepare the Process Tool
Horizontal Alignment Shaft (2 places)
Horizontal Alignment
Clamping Knob (2 places)
NOTE:
Clamping Knob can accept
a 1/8 inch hex wrench or
ball driver.
Hardware set (2 places)
M8 - Socket head cap screw
M8 - Split Lock Washer
M8 - Flat Washer
FIGURE 11 Interface Kit Components
1. Make sure that the process tool is equipped with a BOLTS interface frame and is ready
for mounting of the VersaPort.
2. Place the Lower Alignment Mount at the bottom of the Process Tool interface frame
and center the two slots in the mount on the two holes in the frame. Fasten the frame
using the socket head cap screw and washer, as shown in Figure 11.
3. Place a single drop of Loctite 242 thread-locking compound (required, but not supplied
in the interface kit) on the threaded area of one Horizontal Alignment Shaft (shown in
Figure 12). Use a Phillips screwdriver or hex wrench inserted in the hole in the Alignment Shaft to fully seat the shaft. Repeat for Alignment shaft on other side. (Set the
two Horizontal Alignment Clamping Knobs aside for use later in this procedure.)
26
Installation
Horizontal Alignment
Shaft (knob removed).
749.75mm+/-6
BOLTS Interface
attached at bottom holes.
FIGURE 12 Interface Kit Components Mounted on BOLTS Interface
Prepare the VersaPort
1. Use a 5/32 inch hex wrench to loosen the locking screws of the VersaPort alignment
plates as shown in Figure 13. Do not loosen the shoulder screw.
Shoulder screw - DO NOT
loosen
Set screw
Horizontal
Clamping
Knob
Alignment plate
locations
Base Cover
(Alignment Cam on
BOLTS frame)
Horizontal Alignment Plate screw.
(Loosen for installation.)
FIGURE 13 Alignment Plates
2. Remove the three Phillips screws securing the Base Cover to the base of the frame. Set
the cover and screws aside.
27
Installation
3. Use fingers to loosen two captive screws securing the electronics cover on the user side
of the BOLTS interface frame (under the VersaPort base assembly) and set aside.
4. Roll the VersaPort up to the Process Tool mounting frame.
5. Connect a braided copper ground wire from the Process Tool power supply earth
ground to the attachment location on the VersaPort frame, see Figure 14.
6. Route power and communications cables from the Process Tool through the VersaPort
pass-thru on the BOLTS frame. Do not connect the cables to the VersaPort.
Pass cabling from the process tool
through this pass-thru to the other
side of the VersaPort.
Attach ground cable to ground
connection point here.
FIGURE 14 Ground Connection and Cable Pass-Thru
Attach the VersaPort to the Process Tool
NOTE . . .
Have the alignment clamping knobs close by when preparing to secure the VersaPort.
Depending on the height of the process tool interface, it may be necessary to lift the
VersaPort in order to mount the cup onto the interface alignment ball. Use two people if
lifting is required.
1. Stand at the user side of the VersaPort. Tilt the top of the VersaPort frame away from
the Process Tool while pushing the bottom towards and against the Interface. Tilt the
VersaPort enough to align the cup on the BOLTS frame directly above the ball on the
lower alignment bar. See Figure 15.
2. Pivot the VersaPort frame up to engage the cup onto the ball, then continue to pivot the
frame up to the Process Tool so the horizontal alignment shafts of the process tool
extend through the VersaPort alignment plates.
28
Installation
3. While pressing the VersaPort against the interface frame, screw both horizontal alignment clamping knobs onto the alignment shafts until the frame is held in place (see
Figure 13). Do not over-tighten the knobs. They will need to be loosened during the
leveling process.
VersaPort frame bottom,
Process Tool-side
Lower Alignment Cup
(Underneath)
Interface bottom on process
tool.
Alignment Ball
FIGURE 15 VersaPort Mounting and Alignment
Adjust and Level the VersaPort
The Process Tool transfer arm must be properly adjusted and its wafer/reticle plane determined so the VersaPort can be aligned to the same plane. The installer must provide any
leveling fixtures needed during adjustment.
The recommended steps for leveling are;
1. Open (raise) the VersaPort.
2. Perform a rough horizontal and vertical positioning to the Process Tool
3. Perform the final adjustments (relative to the transfer arm) using a combination of;
➢ Lower Alignment Mount positioning
➢ Alignment Cam adjustment
➢ Horizontal Alignment Plate adjustment
➢ Front-to-back Jack screw adjustment
➢ Vertical height (alignment ball) adjustment
Open the VersaPort
Use Asyst ISIM software (provided at the back cover of the Installation Instructions) and a
PC-type computer with a null modem cable to control VersaPort operation.If the software
29
Installation
is not installed on the PC, or for instructions on using ISIM software, see "Starting ISIM"
section on page 47.
1. Plug the null modem cable into the SECS port on the VersaPort connector panel. Connect 24vdc power to the VersaPort.
(optional)
Power Cable
FIGURE 16 VersaPort Connectors
2. At the PC command line, change to the directory in which ISIM is stored. Type “isim”
and press Enter. The program will start.
3. From the Main menu select F9 (SMIF OPTION). Use the arrow keys to select LPO/
VersaPort(LPX)/VersaPort and press Enter.
4. From the Main menu select F2 (MANUAL).
5. From the Manual menu select F5 (GOTO POS). At the Target Pos (inch) line, enter
11.3. Press Enter three times to accept the default speed and acceleration values and
raise the VersaPort.
LASER WARNING
Laser radiation present when power is applied and interlock is defeated. Exposure to a
Class II laser beam is feasible during ISIM Manual mode operation. Avoid direct eye
exposure to beam.
Set Up the Rough Positioning
Adjust Centering
Center the VersaPort relative to the Process Tool. The coarse adjustment is at the Loweralignment Mounting Bar and the fine adjustment is at the Horizontal Alignment Plate.
When centered, tighten the two bolts on the lower alignment mount.
NOTE . . .
The side-to-side adjustment is limited to ±6.4mm (±0.25 inch) at the bottom (by the
mounting bolt slots in the lower-alignment mount) and to ±1.5mm (±0.06 inch) at the
middle (by the alignment plate screws).
30
Installation
Adjust the Height
Adjust the height of the VersaPort relative to the Process Tool. The horizontal datum
height needs to be at 900mm ±10mm from the floor in order to meet SEMI S2 guidelines.
1. Ensure that the horizontal adjustment clamping knobs are just loose enough to allow
adjustment.
2. On the lower alignment mount, as shown in Figure 17, loosen the Ball Setscrew with a
3/32 inch hex wrench. The lower mount is visible at the base, where the cover has been
removed.
3. Place a screwdriver shaft or hex wrench shaft through the hole in the Alignment Ball
and turn to either raise or lower the VersaPort to the desired height.
NOTE . . .
The slot in the alignment plate limits the height adjustment to ±6.4mm (0.25 inch).
4. Tighten the Ball-locking Setscrew on the lower alignment mount when the VersaPort
height is properly adjusted.
Alignment cam
Cup attaching screws
Alignment Ball
Through-holes for
turning the alignment ball.
Ball locking setscrew
FIGURE 17 Alignment Ball and Cam Adjustments
Perform Final Adjustments
Final positioning involves the coordinated adjustment at several places on the VersaPort.
Readjustment of one or more areas, including horizontal and vertical positioning from previous sections, may be required.
31
Installation
Adjust Centering and Side to Side Level
If fine adjustment is needed to align the port plate with the transfer mechanism, loosen the
two Cup Attaching Screws at the bottom of the BOLTS frame, shown in Figure 17. Ensure
the horizontal clamping knobs are slightly loosened. Use a stubby flat blade screwdriver to
move the Angular Adjustment Cam left or right as needed to adjust the centering. Tighten
the cup attaching screws and clamping knobs.
NOTE . . .
The angular adjustment is limited to ±0.5 degrees.
Adjust BOLTS Frame Front to Back Level
The BOLTS interface ball and socket mounting is designed to create a gap at the bottom of
the mount and is not adjustable. The interface frame can be adjusted front-to-back to align
the VersaPort with the transfer mechanism.
NOTE . . .
The front-to-back adjustment of the BOLTS interface frame is limited to ±1.5mm (±0.06
inch or approximately 0.1 degrees) by the jack screw length.
The VersaPort can be adjusted front to back separately on the BOLTS frame. See Adjust
VersaPort Front to Back Level on Frame, on page 32
Adjust the BOLTS frame in or out by tightening or loosening the Horizontal Alignment
clamping knobs to move the frame. When adjusted properly, use a 9/64-inch Allen wrench
to remove each jack screw from the Alignment Plate (shown in Figure 13) one at a time
and apply a drop of thread adhesive (required but not supplied). Tighten each jack screw
until it just touches the Process Tool interface frame.
Adjust VersaPort Front to Back Level on Frame
The VersaPort is mounted to a platform on the BOLTS interface frame. The platform has
one leveling screw attached through the bottom, behind the connector panel. The Process
Tool side of the VersaPort can be raised slightly to adjust to the transfer arm. To adjust the
VersaPort on the mounting platform;
1. Loosen the three hex screws on the bottom of the mounting platform that secure the
VersaPort.
2. Turn the leveling screw to raise the VersaPort at the Process Tool opening.
3. When the VersaPort is aligned with the transfer arm, tighten the three hex screws.
Final Tightening and Torque
Make sure all bolts and screws are tightened once the adjustments are complete;
➢ Tighten the Lower Alignment Mount bolts
32
Installation
➢ Tighten the Ball-locking setscrew on the lower alignment mount
➢ Tighten the Alignment Cup attaching screws on the bottom of the BOLTS frame
➢ Tighten the Alignment Plate locking screws
➢ Tighten the Clamping Knobs. Attach a 1/8 inch Allen wrench fitting to a torque
wrench and tighten each clamping knob to 80 in-lbs.
Verify Proper Operation
NOTE . . .
For operation of the VersaPort with the Asyst Manual Open Cassette Adapter (MOCA),
skip to the "Operation with Manual Open Cassette Adapter (MOCA)" section on page
40.
Asyst ISIM software can be used to check the VersaPort laser system and verify/modify
the configuration settings of the VersaPort before testing operation.
Connect the Cabling
1. If necessary, re-connect the PC type computer to the SECS serial port on the BOLTS
connector panel.
NOTE . . .
If there is not access for the PC connection, the Host or Process Tool computer must
have Asyst ISIM installed to test and cycle the VersaPort. Connect the Process Tool
communication cable to the SECS serial port.
2. Connect the Process Tool ground cable to the VersaPort. Connect Process Tool 24vdc
power.
Verify Laser System DAC Values
The laser system is aligned at the factory. The sensors can be checked during installation
to verify operation. All DAC values must be less than 30.
1. From the ISIM Main menu select F2 (MANUAL).
2. Raise the port plate:
A. From the Main menu select F2 (MANUAL).
B. From the Manual menu select F5 (GOTO POS).
C. At the dialog box, enter “9” on the Target Pos (inch) line. Press Enter three times
to accept Speed and Acceleration values and raise the port plate nine inches.
33
Installation
3. From the Manual menu select F4 (DAC).
Use the arrow keys to select Sensor Alignment and press Enter.
Use the arrow keys to select Wafer Sensor and press Enter. A window will display the
DAC value. It should be less than 30.
Press F4 to stop calibration.
4. Repeat Step 2 process to choose F4, Sensor Alignment, then select Slot Sensor and
read DAC value. Press F4 to stop calibration.
5. Repeat Step 2 to choose F4, Sensor Alignment, then select Protrude Sensor and read
DAC value. Press F4 to stop calibration.
If all DAC values are less than 30, the laser system is properly aligned. If values are not
less than 30, perform Calibration/Alignment Procedure, Align Laser Detector System in
the VersaPort Technical Manual.
With all DAC values less than 30, return the VersaPort to the Home position.
PINCH WARNING
A pinch hazard exists at the port plate as it lowers to the port door. Keep hands away
from the port plate path.
A pinch hazard may exist at the bottom of the minienvironment when the port plate
reaches the Home position. Keeps hands away from the minienvironment path.
A. From the Manual menu select F5 (GOTOPOS).
B. At the dialog box, enter “0” on the Target Pos (inch) line. Press Enter three times to
accept Speed and Acceleration values and lower the port plate to the Home position.
7. From the Manual menu select F6 (DC MOTOR).
A. From the dialog box, select Unlock Port and press Enter to release the pod latches
and pod door lock.
Perform the Self Test
Verify proper operation by performing a Self-Test using Asyst ISIM simulation software.
The process will move the port plate to the Stage (Open) position, extend the cassette shuttle forward, exercise all motors, check all laser sensors, and return the VersaPort to its
Home (Close) position. The software should return a message reading, “Errors found during Self-test: None”. If no errors are encountered, continue the installation.
NOTE . . .
If errors are encountered during the SELF-TEST, AUTOCYCLE or HOMING Calibration function, clear the error by selecting F8 (CLEAR ERROR) from the MANUAL
menu (F2). Refer to the VersaPort Technical Manual for Calibration/Alignment Procedures to resolve the problem.
34
Installation
1. At the Main Menu, select F2 (MANUAL).
A. From the MANUAL menu, select F3 (SELF TEST).
NOTE . . .
If power has been removed from the VersaPort, it will perform a Homing calibration
before performing a motion command, to ensure the port assembly is at the correct
location. Homing will slowly move the port assembly (plate and door) and perform the
calibration routine.
The VersaPort will cycle once to self-test and the software will show the results on
the PC screen. Refer to the VersaPort Technical Manual (PN 2000-1252-01) to perform any procedure necessary to align the VersaPort if errors are detected.
Verify/Modify the Device ID
The Device ID uniquely identifies each piece of equipment addressing the Host computer.
The default setting for all VersaPorts is 251. This number can be changed, if necessary to
any value from 1 to 65535.
1. From the ISIM Main menu select F6 (CONFIG).
2. From the Config menu select F4 (MODIFY CONFIG).
A. Use the Enter key to move down the list to Device ID.
B. At the dialog box, type in a new value for the Device ID and press Enter.
3. Press the Ctrl-Enter keys simultaneously to accept the change. Enter Y to confirm.
Calibrate the Cassette Offset
The VersaPort may require modification of its default cassette offset value (0) to optimize
wafer/reticle mapping. The offset value can be set by using encoder counts to determine
the center of a wafer/reticle in slot one and subtracting 3075.
1. Place a Pod with a wafer/reticle in cassette slot one on the port door.
2. From the ISIM Main menu select F1 (AUTO).
3. From the Auto menu select F8 (MISC).
A. At the dialog box, use the arrow keys to select Calibrate Homing and press Enter.
The port door will move slowly to the Home position.
4. Lift the Pod off the port plate and replace it to clear the map.
5. From the Auto menu select F1 (STAGE). The port plate will rise to the Open position.
6. Press F10 to return to the Main menu.
7. From the Main menu select F5 (STATUS).
8. From the Status menu select F7 (WAFER MAP).
35
Installation
A. At the dialog box, use the arrow keys to select Wafer Queue and press Enter.
The screen will display the encoder count at which the laser interrupt was activated
by the wafer/reticle in slot one (the ON value- at the bottom of the wafer/reticle)
and the encoder count where the laser was deactivated (the OFF value- at the top of
the wafer/reticle). The display will be similar to On: 3024 Off: 3100.
9. Add the On and Off values. Divide the sum by 2, to determine the center of the wafer/
reticle. From that number, subtract 3075 and round to the nearest whole number.
The result is the cassette offset value. Write the value down.
10.Press F10 to return to the Main menu.
11. From the Main menu select F6 (CONFIG)
12.From the Config menu select F4 (MODIFY CONFIG).
A. Use the Enter key to move down the list to Cassette Offset.
B. At the dialog box, type in a new value for the Offset and press Enter.
13.Press the Enter key until the confirmation screen appears. Select Yes to confirm.
14.Return the VersaPort to Home position:
A. From the ISIM Main menu select F1 (AUTO).
B. From the AUTO Menu select F2 (HOME).
Verify Wafer Mapping
After the cassette offset has been established, perform a wafer mapping procedure to verify its functionality.
1. Place wafers in the cassette at slots 1, 5, 6, 12, 19, 20, and 25.
NOTE . . .
A full cassette can be used for wafer mapping. The verification should be performed
with a minimum of seven wafers, placed as described above.
2. Load the cassette into a SMIF-Pod. Place the pod on the port door.
3. From the ISIM Main menu select F1 (AUTO).
4. From the Auto menu select F1 (STAGE).
LASER WARNING
Laser radiation present if SMIF Pod is not used. Exposure to a Class II laser beam is
feasible. Avoid direct eye exposure to beam.
5. The laser system will map the cassette slots. The ISIM screen will display a line at each
slot number in which a wafer is detected. Verify the wafer map is accurate for the cassette.
36
Installation
6. From the Auto menu select F2 (HOME).
Perform Auto Cycling
1. From the AUTO (F1) menu select F9 (AUTOCYCLE).
A. Observe the operation of the VersaPort during several cycles. Listen for any noises
which might indicate improper motion. When several Open and Close cycles have
been completed, select F9 to stop the VersaPort during the close cycle. The current
cycle will complete and the VersaPort will return to the Home position and stop.
After cycling successfully, select F10 to return to the Main menu.
Exit SIMulation software and Disconnect PC
2. From the MAIN menu select F8 (EXIT), then use the arrow key to choose YES and
press ENTER to close the simulation software.
3. Shutdown the PC, then disconnect the null modem cable from the VersaPort.
Complete the Installation
Connect the Cabling
Connect any serial and parallel cabling from the host (or Process Tool) to the proper connector on the Versaport panel. See Figure 16 for connector identification.
Ensure the 24vdc power is supplied through the Process Tool EMO circuit.
Replace Base Cover
Return the cover to the base of the frame and secure with captive thumb screws.
Optional Base Removal
If required after installation, the extended base may be removed. [Not recommended.]
1. On the inside of the base, using a ¼ inch allen wrench or hex driver, remove four bolts
that secure the extended base to the base assembly.
2. Plug the four holes in the base assembly with cap plugs (interface kit item- see
Figure 18).
37
Installation
Store the extended base and four bolts for later use.
FIGURE 18 VersaPort Base with Extended base Removed
38
VersaPort Configuration
VersaPort Configuration
Refer to Software Communications chapter of the VersaPort Technical Manual for an
explanation of the software configurable settings available for the Versaport. Table 8 lists
the default configuration settings as they appear in ISIM, which can be modified using the
Config menu.
TABLE 8
Default Configuration Settings
Configuration Option
Default Setup
Ref: SECS ECID
External Host control
N
ECID 4
Parallel I/O Interlock
N
ECID 6
MSC Interlock
N
ECID 13
Min Wafer Position
2990 mils
ECID 32
Open Pos
11350 mils
ECID 33
Slot Count
25(4 if MRP Reticle,
1 if other Reticle)
ECID 34
Slot Pitch
250 mils
ECID 35
Port Assignment
0
ECID 37
Comm Protocol
0
ECID 38
Cassette Size Option
0
(80 if RSP Reticle
83 if MRP Reticle
81 if 230mm Reticle)
ECID 39
Device ID
251
ECID 40
Comm Baud rate
9600
ECID 41
SECS Comm Timeout T1
1 (second)
ECID 50
2 (seconds)
ECID 51
0 (6 seconds)
ECID 52
Reticle Height
(Substrate thickness)
30
(245 if Reticle)
ECID 59
Slot Opening
120
ECID 60
El Hom Offset
0
ECID 61
Cassette Test
0
ECID 63
Cassette Offset
00
ECID 67
SPCL ASCII FSD
0
ECID 85
Stage w/Seater
0 (disabled)
ECID 86
Shuttle Open Position
4000 mils
ECID 87
Shuttle Option
Factory setting
ECID 89
Shuttle Homing Offset
Factory setting
ECID 90
FL Bridge Option
N (disabled)
ECID 91
Tag Baud Rate
9600
ECID 92
Brake Option
N (disabled)
ECID 98
39
Operation with Manual Open Cassette
Adapter (MOCA)
This section describes the operation of the VersaPort in conjunction with the Manual Open
Cassette Adapter, hereinafter referred to as MOCA.
Cassette Placement
Refer to the MOCA Configurations document, (PN 2000-1438-01) for proper MOCA configurations for various wafer cassettes.
Connect the Cabling
1. If possible, re-connect the PC type computer to the SECS serial port on the VersaPort
connector panel by routing the cable up through the mounting platform cutout (see
Figure 19).
NOTE . . .
If there is not access for the PC connection, the Host or Process Tool computer must
have Asyst ISIM installed to test and cycle the VersaPort. Connect the Process Tool
communication cable to the SECS serial port.
2. Connect the Process Tool ground cable to the VersaPort. Connect Process Tool 24vdc
power.
FIGURE 19 VersaPort Cables routed through Cutout
40
Verify Door Lock Function
Asyst ISIM software can be used to verify the door lock function of the MOCA.
1. Attach a PC computer running ISIM software to the VersaPort SECS host port and
ensure that the VersaPort is connected to a 24vdc power supply.
2. From the ISIM Main menu, select F2 (MANUAL).
3. From the Manual menu, select F6 (DC MOTOR).
Use the arrow keys to select Open Latch and press Enter.
NOTE . . .
When operating the MOCA door, do not move the door to a full open or close position.
Operators should release the door about ten to fifteen degrees from a full open or close
position; the door should then complete the movement on its own. The door should
complete the open cycle within two to four seconds after the handle is released; the
close cycle should complete within four to eight seconds. If not, complete the Door
Adjustment procedure in the MOCA Installation and Technical Manual.
WARNING
Operate the MOCA door only using the handle. Failure to comply may result in hand or
finger injury to the operator.
4. Pull the handle on MOCA door. The door should open freely. Close MOCA door.
5. From the ISIM manual menu, select F6 (DC MOTOR).
Use the arrow keys to select Close Latch and press Enter.
6. Pull MOCA handle. If the door lock is functioning properly, the door will not open as
in Step 4. (It will be possible to open the door approximately one inch; this is normal
when the lock is functioning properly.)
ECID Change
The addition of the MOCA to the VersaPort requires a PID change. To ensure proper VersaPort operation, select ECID 104 and choose “1”. If using a terminal setup program for
the ASCII port, type “ECS<space>P104=1” for the MOCA PIDs. When using the VersaPort without the MOCA, type “ECS<space>P104=0” for the standard PIDs.
Using HyperTerminal
A common method for implementing the ECID change described above involves using
HyperTerminal, which can be used as follows.
ASCII Configuration
With the VersaPort connected to a PC running ISIM and the cable connected to the SECS
port, configure the VersaPort for ASCII communications:
1. Launch ISIM
41
2. Select F6 (CONFIG)
3. In the CONFIG menu select F4 (MODIFY CONFIG).
4. Scroll down to the COMM Protocol option.
5. Select the option ASCII Serial Comm Echo option.
6. Save the configuration for the VersaPort and exit ISIM.
Start HyperTerminal
Setting the HyperTerminal Communications Properties
1. Change the serial cable from the SECS port of the VersaPort to the ASCII port.
2. Launch the HyperTerminal application. It is often found in the Windows start menu in
the Programs\accessories\HyperTerminal path.
HyperTerminal will come up with a pop up screen that states “new connection”.
3. Type in a name for the connection, then click OK.
HyperTerminal will come up with a pop up screen that states “connect to”.
4. In the “Connect To” dialog box, select the COM port that you will be using to communication with the VersaPort (typically COM 1, then click OK.
A pop up screen will come up that states “COM 1 Properties”.
5. Set the “bits per second” to 9600.
6. Set the “flow control” to NONE.
7. Click OK.
Setting the HyperTerminal File Properties
1. Select File from the top menu, then select the Properties option.
The properties dialog box will appear.
2. Choose the Settings tab.
3. Select the ASCII Setup button.
The ASCII Setup pop up will appear.
4. Check the box that states “Send line ends with line feeds”.
5. Do not check the box that states “Echo typed characters locally”.
6. Click OK, then in the File Properties box, click OK.
Setup the VersaPort
1. In the HyperTerminal text box, type EDER<space>ON and press the Enter key.
The command is sent to the VersaPort, which should reply with the message “EERA
OK”. If not then check connection to the setup.
2. Type ECR<space>P104 and press Enter.
42
The VersaPort should return the response “ECD P104=0”.
➢ If the response is “ECD P104=1”, then the VersaPort is already configured for the
MOCA. Proceed to Verify Laser System DAC Values.
3. Type ECS<space>P104=1 and press Enter.
The VersaPort should return the response “ECA OK”
4. Verify the setting by typing ECR<space>P104 and pressing the Enter key.
The VersaPort should return the message “ECD P104=1”.
Now the VersaPort should be properly configured for the MOCA.
Verify Laser System DAC Values
The laser system is aligned at the factory. The sensors can be checked during installation
to verify operation. All DAC values must be less than 30.
1. From the ISIM Main menu select F2 (MANUAL).
2. Raise the port plate:
A. From the Main menu select F2 (MANUAL).
B. From the Manual menu select F5 (GOTO POS).
C. At the dialog box, enter “9” on the Target Pos (inch) line. Press Enter three times
to accept Speed and Acceleration values and raise the port plate nine inches.
3. From the Manual menu select F4 (DAC).
Use the arrow keys to select Sensor Alignment and press Enter.
Use the arrow keys to select Wafer Sensor and press Enter. A window will display the
DAC value. It should be less than 30.
Press F4 to stop calibration.
4. Repeat Step 2 process to choose F4, Sensor Alignment, then select Slot Sensor and
read DAC value. Press F4 to stop calibration.
5. Repeat Step 2 to choose F4, Sensor Alignment, then select Protrude Sensor and read
DAC value. Press F4 to stop calibration.
If the DAC value is less than 30, the laser system is properly aligned. If value is not less
than 30, perform Calibration/Alignment Procedure, Align Laser Detector System in the
VersaPort Technical Manual.
With the DAC value less than 30, return the VersaPort to the Home position.
A. From the Manual menu select F5 (GOTOPOS).
43
At the dialog box, enter “0” on the Target Pos (inch) line. Press Enter three times to accept
Speed and Acceleration values and lower the port plate to the Home position.
PINCH WARNING
A pinch hazard exists at the port plate as it lowers to the port door. Keep hands away
from the port plate path.
A pinch hazard may exist at the bottom of the minienvironment when the port plate
reaches the Home position. Keeps hands away from the minienvironment path.
LASER WARNING
Laser radiation present if cassette is not used. Exposure to a Class II laser beam is feasible. Avoid direct eye exposure to beam.
NOTE . . .
If power has been removed from the VersaPort, it will perform a Homing calibration
before performing a motion command, to ensure the port assembly is at the correct
location. Homing will slowly move the port assembly (plate, and shuttle if equipped)
and perform the calibration routine.
7. From the Manual menu select F6 (DC MOTOR).
From the dialog box, select Unlock Port and press Enter to release the pod latches and
pod door lock.
Perform the Self Test
Verify proper operation by performing a Self-Test using Asyst ISIM simulation software.
The process will move the port plate to the Stage (Open) position, extend the cassette shuttle forward, exercise all motors, check all laser sensors, and return the VersaPort to its
Home (Close) position. The software should return a message reading, “Errors found during Self-test: None”. If no errors are encountered, continue the installation.
NOTE . . .
If errors are encountered during the SELF-TEST, AUTOCYCLE or HOMING Calibration function, clear the error by selecting F8 (CLEAR ERROR) from the MANUAL
menu (F2). Refer to the VersaPort Technical Manual for Calibration/Alignment Procedures to resolve the problem.
1. At the Main Menu, select F2 (MANUAL).
2. From the MANUAL menu, select F3 (SELF TEST)
The VersaPort will cycle once to self-test and the software will show the results on the
PC screen. Refer to the VersaPort Technical Manual (PN 2000-1252-01) to perform
any procedure necessary to align the VersaPort if errors are detected.
44
Verify/Modify the Device ID
The Device ID uniquely identifies each piece of equipment addressing the Host computer.
The default setting for all VersaPorts is 251. This number can be changed to any value
from 1 to 65535.
1. From the ISIM Main menu select F6 (CONFIG).
2. From the Config menu select F4 (MODIFY CONFIG).
A. Use the Enter key to move down the list to Device ID.
B. At the dialog box, type in a new value for the Device ID and press Enter.
Press the Ctrl-Enter keys simultaneously to accept the change. Enter Y to confirm.
Perform Auto Cycling
1. From the AUTO (F1) menu select F9 (AUTOCYCLE).
A. Observe the operation of the VersaPort during several cycles. Listen for any noises
which might indicate improper motion. When several Open and Close cycles have
been completed, select F9 to stop the VersaPort during the close cycle. The current
cycle will complete and the VersaPort will return to the Home position and stop.
After cycling successfully, select F10 to return to the Main menu.
Exit SIMulation Software and Disconnect PC
NOTE . . .
The Process Tool should move the VersaPort to the Home position after the connector
cover is installed. If the VersaPort is already being controlled by the Process Tool, proceed to Complete the Installation without exiting the software as described below.
2. From the MAIN menu select F8 (EXIT), then use the arrow key to choose Yes and
press Enter to close the simulation software.
3. Shutdown the laptop PC and disconnect the null modem cable from the VersaPort.
Leave cables connected if ISIM is run from the Process Tool.
Complete the Installation
Connect the Cabling
Connect any final serial and parallel cabling from the Process Tool to the proper connector
on the Versaport panel. Make sure that the ground and power connection are secure.
Replace Connector Cover
Replace the connector panel cover to the lower minienvironment shield and secure with
two Phillips screws.
45
Return VersaPort to Home Position
Use the Process Tool and ISIM to lower the VersaPort to the Home position.
If necessary, open the ISIM program
From the ISIM Main menu select F1 (AUTO).
From the AUTO Menu select F2 (HOME).
NOTE . . .
If power was removed from the VersaPort during final cable connections, the VersaPort
will perform a Homing calibration. It will move slowly to the Home position.
The installation is complete.
46
Introduction
ISIM (VersaPort Simulation Program)
Introduction
ISIM is the menu-driven diagnostic program supplied by Asyst for exercising the VersaPort from a standalone PC. This chapter explains how to use the software.
➢ To learn how to get started, read Starting ISIM below.
➢ To see descriptions of every function key and submenu item, see the Menu Lists section on page 48.
➢ To get familiar with typical uses, see the Typical Operations section on page 57.
WARNING
Usage of ISIM can put the Load Port in an unsafe mode for operators, as interlocks can
be disabled. Laser exposure hazards and pinch hazards may be present. Personnel
should become thoroughly familiar with all aspects of safety for individuals and equipment prior to operating this equipment. Refer to Safety section at the beginning of the
manual.
Starting ISIM
1. Copy the software program from the diskette provided at the back of the manual to a
laptop or other PC.
2. Connect a null modem cable from the computer that contains ISIM to the VersaPort
SECS port.
3. Open a MS-DOS window on the PC. Change to the directory (folder) containing the
ISIM software. Start the program by typing isim (not case sensitive) and pressing
Enter. The main menu appears. (See Figure 20, ISIM Menu Screen, on page 48)
NOTE . . .
If Com2 is being used to communicate with the VersaPort, press F6 (CONFIG) at the
Main Menu, then press F2 (COMM PORT).Use the keyboard arrow keys to change to
COM2 and press Enter.
4. From the Main Menu press other function keys to reach different menus, then select
submenu items from the pop-up window with the up/down arrows on the keyboard and
the Enter key (See Figure 20, ISIM Menu Screen, on page 48).
47
Menu Lists
5. When finished, press F10 from any submenu to return to the Main Menu. Exit the
ISIM program by pressing F8 (EXIT). Use the arrow keys to select Yes and press
Enter
To select Menus, press the corresponding function key on
To activate submenu items, use the arrow keys on the keyboard to select the item, then press the Enter key.
A description of the action selected appears here.
Use the arrow keys on the keyboard to scroll
the display screen. (These indicators will
highlight which arrow key was pressed.)
FIGURE 20 ISIM Menu Screen
Menu Lists
This section contains a description of each menu and submenu function key for the ISIM
software.
Main Menu
Five function keys are accessible upon starting ISIM.
TABLE 9
MAIN Menu Function Keys
Function
Description
(F1) AUTO
Opens the Auto Mode Menu screen. See Table 10 for description of submenus.
(F2) MANUAL
Opens the Manual Mode Menu screen. See Table 11 for description of submenus.
(F3) MSC
Sets controls for the Micro-station Controller/Smart-Comm. See Table 12.
(F4) NON PC
CYCLES
Allows the VersaPort to Autocycle without SIM connection. See Table 13.
(F5) STATUS
Opens the Status Menu screen SeeTable 14 for description of submenus.
48
Menu Lists
TABLE 9
MAIN Menu Function Keys
(F6) CONFIG
Opens the Configuration Menu screen. SeeTable 15 for description of submenus.
(F7) TAG 8400
Sets Smart-Tag communication. See Table 16 for description of submenus.
(F8) EXIT
Use to leave the ISIM program. To save the log file to the disk, from the Main Menu
press F6 (CONFIG), then F9 (FILE), then select CLOSE FILE.
(F9) SMIF OPTION
Provides a customized software command set for the Asyst SMIF product
selected. See Table 18.
AUTO (F1 from Main Menu)
TABLE 10 (F1) AUTO Mode Menus
F Key
SubMenu
F1
STAGE<OPEN>
Directs port lifter to the fully open (stage) position.
F2
HOME
Return to Home position.
F5
GOTO POS
Absolute
Relative
Absolute- from Home position, Relative- from
current position.
F6
DC MOTOR
Lock Port
Locks the port door to the pod door and pod
top to port plate.
Unlock Port
Unlatches pod top from port plate and unlocks
pod door from port door.
Reseat wafer
Moves the wafer seater mechanism away
from port plate to reseat protruding wafer.
Clear Alarm
Clears any pending alarms and resets the
servo drive.
Calibrate Homing
Calibrates the vertical drive home position.
Abort Indexer
Aborts action
Stop Indexer
Stops the VersaPort
F8
MISC
SubMenu Items
Description
F9
AUTO CYCLE /
STOP CYCLE
Starts and stops continuous cycles between
OPEN (Stage) and HOME positions with a
pause between cycles (default pause is 3 seconds and can be changed using runtime
parameter “-D”). Displays total cycles completed.
F10
EXIT
Return to Main Menu
49
Menu Lists
MANUAL (F2 from Main Menu)
WARNING
Safety interlocks are bypassed in Manual mode. Manual operation of the Versaport
does not require the use of a SMIF-Pod. Laser exposure hazards and pinch hazards may
be present. Refer to Safety section at the beginning of the manual.
TABLE 11 (F2) MANUAL Mode Menus
F Key
SubMenu
SubMenu Items
Description
F1
SERVO CRTL
Enable Servo
Disable Servo
Enables the servo motor chip
Disables the servo motor chip
F2
IO
Manually toggles output bits. Not recommended for field use.
F3
SELF TEST
Perform Self Test: Displays results of self
test.
F4
DAC
DAC Calibration
Sensor Alignment
Modify Threshold
F5
F6
GOTO POS
DC MOTOR
DAC Calib.- Reads the values of all laser sensors; Alignment & Threshold- sets individual
values for wafer, Slot, and Protrusion.
Moves port lifter to specified position.
Target Pos/Distance
(inch)
Speed (inch/sec)
Enter target position (distance) 0 to 11.4 in.)
Accel (inch/sec2)
Enter acceleration (0.1 to 5 inch/sec2)
Enter speed (0.1 to 5 inch/sec)
CAUTION- DC MOTOR performs the selected function with no collision
checks. Ensure product will not be lost or VersaPort damaged during action.
Lock Port
Unlock Port
Lock Pod Door
Unlock Pod Door
Open Latch
Close Latch
Seater In
Seater Out
Advance Shuttle
Retract Shuttle
Calib Shuttle
Release Brake
Set Brake
F7
F8
MOTOR STATUS
Returns Status condition for;
CLEAR ERROR
Clears pending alarms & resets the servo
drive.
Controller
Current Position
Desired Position
Fan Count
50
Menu Lists
TABLE 11 (F2) MANUAL Mode Menus (continued)
F Key
SubMenu
F9
AUTO CYCLE /
STOP CYCLES
SubMenu Items
Description
Cycles the port plate up and down to the position selected by user, at user-defined speed
and acceleration.
NOTE- Manual Autocycle does not return the
port plate to Home position.
F10
MAIN
Return to Main Menu.
MSC (F3 from Main Menu))
TABLE 12 (F3) MSC Menus
F Key
SubMenu
SubMenu Items
Description
Keep Port Lock
Port Immaterial
Enable VersaPort
Disable VersaPort
Blink STS LED
Performs MSC-originated commands
F10
Return to Main Menu
NON-PC CYCLES (F4 from Main Menu))
TABLE 13 (F4) NON-PC CYCLES Menus
F Key
SubMenu
SubMenu Items
Description
Autocycles VersaPort without SIM connection. Press F4 to toggle ON/OFF, without
leaving Main Menu.
STATUS (F5 from Main Menu)
TABLE 14 (F5) STATUS Menus
F Key
SubMenu
SubMenu Items
F1
ARE YOU
THERE
Sends S1,F1 message. Gets S1,F2 reply.
F2
LOOPBACK
DIAG
Sends S2,F25 message. Gets S2,F26 reply.
F3
INDEX STATUS
F4
READ PIO
Sends S2,F41 message; gives status of PIO
2A, 2B.
F5
SERVO TUNING
Adjusts servo motor settings.
F6
IRQ COUNT
Sends S2,F41. Gets back interrupt count.
Sensor status
SW Part Number
Wafer Map Status
History Data
Description
Retrieves status of VersaPort.
51
Menu Lists
TABLE 14 (F5) STATUS Menus (continued)
F Key
SubMenu
SubMenu Items
F7
WAFER MAP
Wafer data: (Enter slot
no.)
Description
Slot data: (Enter slot no.)
Flash data: (Enter slot
no.)
Wafer Queue: (Enter offset into map)
Slot Queue: (Enter offset
into map)
Flash Queue: (Enter offset into map)
F8
REVIEW MSG
Display SECS messages received from
VersaPort. Up to 100 lines displayed. The
pageup and pagedown keyboard keys can be
used to scroll the screen to see all messages.
F9
MOTOR STATUS
Displays all motor parameters.
F10
MAIN
Return to Main Menu
CONFIG (F6 from Main Menu)
TABLE 15 (F6) CONFIG Menus
F Key
SubMenu
SubMenu Items
Description
F1
DEVICE ID
Device ID
Determines the device ID for the simulated
host.
F2
COMM PORT
COM1
Determines the communications port used to
communicate with the VersaPort.
COM2
F3
READ CONFIG
F4
MODIFY
CONFIG
(see Modify Config, below)
Returns VersaPort configuration data. (See
listing under Modify Config menu below)
Allows user to modify the VersaPort configuration. To modify config:
1. If the dialog item is highlighted with no popup menu, enter the new desired value, then
press the ENTER key to go to the next dialog
item (DO NOT use arrows).
2. If a pop-up menu exists for a dialog item,
use the arrows to select a specific pop-up
item, then press ENTER to choose that item.
3. If no changes are desired for an item, just
press ENTER to go to the next item.
4. Press CTRL-ENT to skip the rest of the
configuration selection.
5. After making modifications, at the confirmation prompt, enter Y to save the modifications,
or N to cancel the modifications.
52
Menu Lists
TABLE 15 (F6) CONFIG Menus (continued)
F Key
SubMenu
SubMenu Items
Description
MODIFY
CONFIG
External Host (ECID 4)
External Host Port commands: (0) Commands not accepted / (1) Commands
accepted. (Default 1)
PIO Intlk Mode (ECID 6)
PIO enable signal (pin 2): (0) Not required /
(1) Required (Default 0)
MSC Interlock (ECID 13)
MSC enable signal: (0) Not required / (1)
Required (Default 0)
Min_Wafer_Pos (ECID 32)
Position of wafer in slot. (Default 2990mils)
Open_Pos (ECID 33)
Vertical position after STAGE command:
Height (from Home position) port plate moves
to expose cassette. (Default is 11400milsmaximum allowable)
Slot_Count (ECID 34)
Number of slots in cassette:
(Default= 25 for wafer, 1 for 150mm reticle)
Slot_Pitch (ECID 35)
Distance from center of one slot to center of
next slot. (Default 250mils)
Port Assignment ((ECID
37)
Serial port configurations:
Comm Protocol (ECID 38)
Communications Protocol used for control:
0: SECS-only/MSC-intlk & Tag8200/ ASCIIonly
1: SECS-with intlk &Tag 8200/ MSC- not
used/ ASCII-only
2: SECS-only/ MSC- Tag 8200 (w/ or w/o
RTS)/ ASCII- only
3: SECS-only/ MSC-not used/ ASCII- with
intlk & Tag8200
4: SECS-only/MSC-intlk & Tag8400/ ASCIIonly
5: SECS-with intlk &Tag 8400/ MSC- not
used/ ASCII-only
6: SECS-only/ MSC- Tag 84200 (w/ or w/o
RTS)/ ASCII- only
7: SECS-with Tag 8400/ MSC-not used/
ASCII-with intlk
(Default 0)
0: SECS (no Parallel)
1: PIO mode (ALU compatible)
3: ASCII (ASCII echo to host)
4: ASCII (no echo to Host)
5: ASCII (ASCII with checksum)
(Default 0)
Cassette Size (ECID 39)
Sets VersaPort to operate as 200mm Pod
(Default = 0 for wafers, 80 for 150mm reticle)
Device ID (ECID 40)
Used for SECS message identity. Acceptable
values are 1 - 65535 (Default 251)
53
Menu Lists
F Key
SubMenu
SubMenu Items
Description
Comm Baud Rate (ECID
41)
Host port Baud rate: 2400 / 4800 / 9600 /
19200 (Default 9600)
SECS Comm T1 (ECID
50)
T1 Time out in seconds: Acceptable values
are 0 - 3. “0” can be entered, but means 0.1
sec. (Default: 1)
SECS Comm T2 (ECID
51)
are 1 - 25 “0” can be entered, but means 0.4
sec. (Default: 2)
SECS Comm T3 (ECID
52)
are 1 - 60. “0” can be entered, but means 6
secs. (Default 0 (6secs))
CassetteTest (ECID 63)
Sets confirmation parameter.
0= Confirm cassette present, 1= Do not care,
2= Confirm cassette not present (for unload
only). (Default 0)
Stage w/Seater (ECID 86)
Moves seater out after completing Stage
operation if enabled. 0=Disable, 1=Enable
El Hm Offset (ECID 61)
Relative distance from vertical home reference.Designates “home” position. Acceptable
values; -127 to 127 (mils)
Shuttle Option (ECID 89)
Allows motion of shuttle (if installed). 0=Disable, 1=Enable
Shuttle Hm Offset (ECID
90)
Relative distance from shuttle home reference.Designates “home” position. Acceptable
values; -127 to 127 (mils)
Shuttle Open Pos (ECID
87)
Distance shuttle will advance from the
home position. Acceptable values: 0-4500
mils.
FL Bridge Option ((ECID
91)t
Sets ASCII interface option. 0= VPort usesInx-compatible interface. 1= VPort uses FLcompatible interface.
Tag Baud Rate (ECID 92)
Baud rate of RF probe. Acceptable values:
4800, 9600, 19200, 28800, 5700.
Reticle Height (ECID59)
Substrate thickness for wafer mapping for
any non-standard cassette. Acceptable values: 80-350 for reticle, 5-100 for all others.
Slot Opening (ECID 60)
Distance between two adjacent slots in a
cassette. Acceptable values: 80-1000 for reticle, 80-350 all others.
Spcl ASCII FSD (ECID 85)
Sets alarm ID as part of ASCII FSD0
response. 0= Disable, 1= Enable. NOTE- may
not accept enable setting under some configs
Cassette Offset (ECID 67)
Sets beginning position of wafer map.
Used for special cassettes. Acceptable values; -125 to 125.
54
Menu Lists
F Key
SubMenu
SubMenu Items
Description
F5
PC BAUD RATE
2400
4800
9600
19200
28800*
38400*
57000*
* speeds not supported on
VersaPort
Set baud rate of the selected comm port in
the PC.
If a new baud rate is desired, the VersaPort
baud rate should be changed prior to changing the PC baud rate.
The VersaPort can communicate at up to
28800.
F6
EVENT
OPTION
Enable All
Report all VersaPort events to the host (as
SECS messages)
Disable All
Do not report any VersaPort events to the
host.
Select Event
Select which VersaPort events to report
(as SECS messages).
Debug Msg ON
Debug option turned ON. The VersaPort will
send detailed internal state information to
ISIM.
Debug Msg OFF
Debug option turned OFF.
Comm Msg ON
Communication error messages ON.
Comm Msg OFF
Communication error messages OFF.
F7
F8
DEBUG
PRINTER
Printer On
Printer Off
F9
F10
FILE
Enable File
Open a new log file or resume a suspended
log file for capturing VersaPort event and
debug messages.
Suspend File
Suspend the log file
Close File
Closes the opened log file.
MAIN
Returns to Main Menu
TAG 8400 (F7 from Main Menu)
TABLE 16 (F7) Tag 8400 Menus
F Key
SubMenu
F1
Are you There
F2
LCD File Read
F3
Tag Status
F10
SubMenu Items
Description
Sends S100,F1 message to check if Tag is
present. Gets S100,F2 reply if Tag is present.
Enter Tag Serial Number
Sends S100F21 message to the specified Tag
requesting LCD file. Tag replies with S100F22
and LCD file is displayed.
Sends S100,F131 message to Tag requesting
status. Gets S100,F132 message with status.
Return to Main Menu
55
Menu Lists
EXIT (F8 from Main Menu)
TABLE 17 (F8) Exit Menus
F Key
SubMenu
SubMenu Items
Description
This command terminates ISIM session, are
you sure?
Use arrow keys on the keyboard to select YES
to exit and close the program or NO to return
to the MAIN menu list.
YES
NO
SMIF OPTION (F9 from Main Menu)
TABLE 18 (F9) SMIF Option Menus
F Key
SubMenu
SubMenu Items
Description
SMIF Device
Use the arrow keys on the keyboard to select
“LPO/LPX” line and press ENTER to display
the Menu list options for the VersaPort.
Indexer
LPO/LPX (VersaPort)
Ext Height INX
150mm Reticle INX
200mm Reticle INX
F10
Return to Main Menu
56
Typical Operations
Typical Operations
Self Test
During a Self Test the VersaPort will;
➢ If the VersaPort is not already at Home position, it will calibrate home.
➢ Move the port plate to the Open (Stage) position.
➢ Exercise all motors (vertical drive, shuttle- if installed, wafer seater, pod lock, pod
hold-down).
➢ Check all laser sensors.
➢ Return the port plate to the Close (Home) position.
➢ Display on the PC screen the results of the Self Test.
A successful Self Test will return the message, “Errors found during self-test: None”.
To perform the self test using ISIM, from the Main Menu press F2 (MANUAL), then
press F3 (SELF TEST).
Manual Operation
WARNING
Safety interlocks are bypassed in Manual mode. Manual operation of the Versaport
does not require the use of a SMIF-Pod. Laser exposure hazards and pinch hazards may
be present.
From the Main Menu, press F2 (MANUAL), then select the function key for the desired
task. See Table 11, (F2) MANUAL Mode Menus, on page 50 for descriptions of available
operations.
Homing the Versaport
To perform a homing calibration (calibrate vertical drive zero position reference- and horizontal “Home” position, if shuttle installed), press F1 (AUTO) from the Main Menu.
Press F8 (MISC), then use the arrow keys to select “Calibrate Homing”.
Cycling the VersaPort
To autocycle the VersaPort between Open (Stage) and Close (Home) positions, place a
Pod on the port door and press F1 (AUTO) from the Main Menu, then press F9 (AUTO
CYCLE). Press F9 again to stop the autocycle function.
Checking VersaPort Status
57
Typical Operations
From the Main Menu press F5 (STATUS), then press the desired function key from the list
of submenus. See Table 14, (F5) STATUS Menus, on page 51 for descriptions of available
operations.
Checking/Changing Configuration Data
From the Main Menu, press F6 (CONFIG), then press the desired function key from the
list of submenus:
Press F3 (READ CONFIG) from the Config Menu to check configuration. Press F4
(MODIFY CONFIG) to change those items. See Table 15, (F6) CONFIG Menus, on page
52 for descriptions of configuration items.
NOTE . . .
To create a log file to capture VersaPort events during a SIM session, press F9 (FILE)
from the CONFIG menu. Use the arrow keys to select Enable File. Enter a file name at
the prompt.
Exiting ISIM
From the Main Menu, press F8 (EXIT). Use the arrow keys to select “Yes”, then press the
Enter key.
Turn off the PC and disconnect the null modem cable from the VersaPort.
58

Installation Instructions VersaPort 2200

Transcription

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