Bare Die, Chip Scale AND WAFER SCALE - i
Transcription
Bare Die, Chip Scale AND WAFER SCALE - i
BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING For online ordering, visit Entegris’ website at www.devicecare.com BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Overview Table of Contents Entegris offers a wide selection of products to meet your specific bare die, chip scale and wafer scale package shipping and handling needs. Products are designed and manufactured to provide reliable operation and superior device protection while minimizing your shipping and storage costs. Section 1: H20 Series (2˝) Products . . . . . . . . . . . . . . . 2 Trays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Covers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 Section 2: CT3 Series (3˝) Products . . . . . . . . . . . . . . 28 Trays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29 Section 3: H44 Series (4˝) Products . . . . . . . . . . . . . . 30 Trays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31 Specialized CSP Products . . . . . . . . . . . . . . . . . . 39 Covers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 Section 4: Additional Products . . . . . . . . . . . . . . . . . . 44 Film Frame Shippers . . . . . . . . . . . . . . . . . . . . . . 45 Horizontal Wafer Shippers . . . . . . . . . . . . . . . . . 45 Other Related Products . . . . . . . . . . . . . . . . . . . . 45 Section 5: Technical Information . . . . . . . . . . . . . . . . 46 Online Assistance . . . . . . . . . . . . . . . . . . . . . . . . . 47 Entegris Regional Customer Service Centers . . . 47 DeviceCare® Services . . . . . . . . . . . . . . . . . . . . . 47 Technical Service . . . . . . . . . . . . . . . . . . . . . . . . 47 Material Information . . . . . . . . . . . . . . . . . . . . . 48 Fax It Form for Custom Trays . . . . . . . . . . . . . . 50 Index by Part Number . . . . . . . . . . . . . . . . . . . . . 51 Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52 Material Color Chart . . . . . . . . . . . . . . . . . . . . . . 53 Fast, reliable solutions are just a click away at Entegris’ website, www.devicecare.com. Select and order anytime of the day or night from our comprehensive offering of low-cost packaging systems to protect and transport microelectronic devices. It’s never been easier – or faster. And, if you need a custom bare die tray quickly, i-Tray™ Designer allows you to design a tray to your exact requirements, create a drawing and order at the click of a button. For assistance with your specific product and application issues, contact your Entegris Regional Customer Service Center listed on the ”Customer Service” page of our website at www.entegris.com When you need the right product, right now, visit Entegris’ website at www.devicecare.com. ENTEGRIS, INC. 1 Section 1: H20 Series (2˝)Products H20 Series Trays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Sizes and Tolerances . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Ordering Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part Number System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 4 4 5 Covers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21 Ordering Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Antistatic Tray Inserts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Clips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Spring Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Storage Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Tray Case . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Removable Label . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Chip Tray/Die Transfer Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Chip Washing/Jig Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Cleaning Fixture/Clip . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Jig Tray . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 23 23 24 25 25 25 26 26 27 27 For assistance with your specific product and application issues, contact your Entegris Regional Customer Service Center listed on the ”Customer Service” page of our website at www.entegris.com 2 ENTEGRIS, INC. Section 1: H20 Series (2”) Products BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Section 1: H20 Series (2”) Trays BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING H20 Series (2˝) Products Entegris offers a wide selection of H20 series 2˝ square trays, covers and accessories to meet your changing needs. H20 series trays are available in various pocket sizes and depths, with or without wash holes and tweezers slots. Trays Entegris’ H20 series products offer proven reliability for handling bare die, including: • Known Good Die (KGD) • Wafer Scale Packaging (WSP) • Chip Scale Packaging (CSP) • Flip chip • Bump die • Opto electronics • Passive and active chip components • Mechanical components Fast, reliable solutions are just a click away at Entegris’ website, www.devicecare.com. Select and order anytime of the day or night from our comprehensive offering of low-cost packaging systems to protect and transport microelectronic devices. It’s never been easier – or faster. And, if you need a custom bare die tray quickly, i-Tray™ Designer allows you to design a tray to your exact requirements, create a drawing and order at the click of a button. When you need the right product, right now, visit Entegris’ website at www.devicecare.com. 3 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Section 1: H20 Series (2”) Trays Tray Sizes and Tolerances Tray sizes and tolerances may vary by material. Provided below are dimensions and tolerances. Dimensions and Tolerances Material Description Code Overall Size (sq.) Overall Height Flatness ABS Acrylonitrile Butadiene styrene with a color additive -14XX 50.8 ±0.102 mm (2.000 ±0.004”) 3.96 +0.051 mm -0.076 mm (0.156 +0.002” -0.003”) 0.102 mm (0.004”) STAT-PRO® 150 Polypropylene with carbon powder and glass bead -62C02 50.673 ±0.254 mm (1.995 ±0.010”) 3.937 +0.076 mm -0.127 mm (0.155 +0.003” -0.005”) 0.305 mm (0.012”) STAT-PRO 400 Alloy of ABS and an intrinsically dissipative polymer -74DXX 50.8 ±0.102 mm (2.000 ±0.004”) 3.96 +0.051 mm - 0.076 mm (0.156 +0.002” -0.003”) 0.102 mm (0.004”) ChipSentry® STAT-PRO 500 Polycarbonate with carbon powder -66C02 50.8 ±0.102 mm (2.000 ±0.004”) 3.96 +0.051 mm -0.076 mm (0.156 +0.002” -0.003”) 0.102 mm (0.004”) Tray Ordering Information H20 trays are sorted by pocket size. Simply look for the pocket size you want, find the options you require and select the material. Provide tray Part Number and material code from the “Standard Materials” column. Please order in increments of 100 as trays are packaged in lots of 100 trays after the minimum order quantity is met. Cataloged Tray – Standard Material Noncataloged Tray Entegris offers many popular trays in various standard materials as listed in the “Standard Materials” column. The following ordering policies apply: Entegris offers many tray designs other than those listed in the catalog. Visit Entegris’ website at www.devicecare.com or contact an Entegris Technical Service Representative for information on available noncataloged trays. The following ordering policies apply: • Minimum order quantity 300 pieces, thereafter in quantities of 100 pieces • Shipment from stock or within four weeks after receipt of order (see www.devicecare.com for availability) Cataloged Tray – Nonstandard Material Additional material options may be available for cataloged trays. Material options not listed in the “Standard Materials” column for each tray are specials requiring the following ordering policies: • Minimum order quantity 2,000 pieces, thereafter in quantities of 100 pieces • Minimum order quantity reduced to 300 pieces with a set-up charge • Shipment within four weeks after receipt of order Custom Tray Design • Minimum order quantity reduced to 300 pieces with a set-up charge Entegris offers custom trays designed to meet your exact requirements. Visit Entegris’ website at www.devicecare.com or use the “Fax It Form for Custom Trays” in the back of the catalog. You can also contact an Entegris Customer Service representative at +1 952-556-4181. • Shipment within four weeks after receipt of order Special ordering policies apply. • Minimum order quantity 2,000 pieces, thereafter in quantities of 100 pieces ENTEGRIS, INC. 4 Section 1: H20 Series (2”) Trays BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Part Number System H20 - 015 - XXX XX Design Series H20 = 50.8 mm × 50.8 mm (2” × 2”) H20E = 50.8 mm × 50.8 mm (2” × 2”) rough surface finish (EDM) on pocket bottom Material 14XX = ABS (various colors) Color** 01 = Amber* 02 = Black 03 = Blue 62C02 = STAT-PRO 150 black conductive polypropylene 03L = Light blue 66C02 = ChipSentry STAT-PRO 500 black conductive polycarbonate 06 = Brown 74DXX = STAT-PRO 400 static dissipative colorable ABS 09 = Orange 04 = Red 05 = Green 07 = Yellow 08 = Gray 10 = Tan 11 = Pink 12 = White* 15 = Natural* * STAT-PRO 400 material not available in amber, white or natural color. ** Refer to inside back cover for complete color chart. 5 21 = Purple 26 = Maroon ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Pocket Size Pocket Depth Capacity EDM Finish 0.38 mm (0.015” sq) Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 0.23 mm (0.009”) 400 No NA NA 1–5° H20-015 -66C02 0.46 mm (0.018” sq) 0.23 mm (0.009”) 400 No NA NA 18.4° H20-018-09 -66C02 0.46 mm (0.018” sq) 0.30 mm (0.012”) 400 No NA NA 14° H20-018-12 -62C02* -66C02 0.56 mm (0.022” sq.) 0.23 mm (0.009”) 484 No NA NA 6.3° H20-021 -66C02 0.56 mm (0.022” sq.) 0.30 mm (0.012”) 400 No NA NA 14° H20-021-12 -62C02* -66C02 0.64 mm (0.025” sq.) 0.25 mm (0.010”) 100 No NA NA 5° H20-024-10 -62C02 0.66 mm (0.026” sq.) 0.30 mm (0.012”) 400 No NA NA 20° H20-026-12 -66C02 0.66 mm (0.026” sq.) 0.38 mm (0.015”) 400 No NA NA 11.3° H20-026-15 -62C02* -66C02 0.71 mm (0.028” sq.) 0.20 mm (0.008”) 484 No NA NA 1–5° H20-028 -66C02 0.76 mm (0.030” sq.) 0.25 mm (0.010”) 400 No NA NA 1–5° H20-030-10 -1415 -62C02* -66C02 0.76 mm (0.030” sq.) 0.36 mm (0.014”) 400 No NA NA 1–5° H20-030-14 -62C02* -66C02 0.76 mm (0.030” sq.) 0.41 mm (0.016”) 400 No NA NA 1–5° H20-030-16 -62C02* -66C02 0.76 mm (0.030” sq.) 0.61 mm (0.024”) 400 No NA NA 1–5° H20-030-24 -62C02 0.79 mm × 6.10 mm (0.031” × 0.240”) 0.38 mm (0.015”) 156 No NA NA 5° H20-031242 -62C02 0.89 mm (0.035” sq.) 0.38 mm (0.015”) 400 No NA NA 18° H20-035 -1405 -62C02* -66C02 0.89 mm (0.035” sq.) 0.38 mm (0.015”) 400 No NA NA 1–5° H20-037-15 -66C02 0.94 mm (0.037” sq.) 0.48 mm (0.019”) 400 No NA NA 30° H20-037 -62C02 *Pocket size may differ slightly from dimensions shown. ENTEGRIS, INC. 6 Section 1: H20 Series (2”) Trays For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Section 1: H20 Series (2”) Trays BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Pocket Size Pocket Depth Capacity EDM Finish 1.02 mm (0.040” sq.) Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 0.38 mm (0.015”) 100 No NA NA 11.3° H20-040-15 -66C02 1.02 mm (0.040” sq.) 0.41 mm (0.016”) 400 No NA NA 10.6° H20-039 -66C02 1.02 mm (0.040” sq.) 0.51 mm (0.020”) 400 No NA NA 1–5° H20-040 -62C02 1.02 mm × 1.40 mm (0.040” × 0.055”) 0.61 mm (0.024”) 360 No NA NA 1–5° H20-040055 -62C02 1.14 mm (0.045” sq.) 0.28 mm (0.011”) 400 No NA NA 1–5° H20-045 -1415 -62C02* -66C02 1.14 mm (0.045” sq.) 0.61 mm (0.024”) 400 No NA NA 7° H20-045-24 -62C02* -66C02 1.14 mm × 1.73 mm (0.045” × 0.068”) 0.61 mm (0.024”) 252 No NA NA 1–5° H20-045068 -66C02 1.19 mm (0.047” sq.) 0.51 mm (0.020”) 400 No NA NA 35° H20-047 -62C02 1.27 mm (0.050” sq.) 0.25 mm (0.010”) 100 No NA NA 35° H20-048 -62C02* -66C02 1.27 mm (0.050” sq.) 0.41 mm (0.016”) 400 No NA NA 1–5° H20-050-16 -62C02* -66C02 1.27 mm . (0.050” sq.) 0.61 mm (0.024”) 400 No NA NA 1–5° H20-050-24 -62C02* -66C02 1.30 mm × 2.29 mm (0.051” × 0.090”) 0.64 mm (0.025”) 204 No NA NA 1–5° H20-051090 -1404 1.32 mm × 1.59 mm (0.052” × 0.062”) 0.51 mm (0.020”) 400 No NA NA 1–5° H20-052062 -66C02 1.40 mm (0.055” sq.) 0.61 mm (0.024”) 400 No NA NA 7° H20-055-24 -62C02* -66C02 1.50 mm × 1.17 mm (0.059” × 0.046”) 0.41 mm (0.016”) 400 No NA NA 1–5° H20-059046 -62C02 1.50 mm × 3.99 mm (0.059” × 0.157”) 0.41 mm (0.016”) 128 No NA NA 1–5° H20-059157 -1415 1.52 mm (0.060” sq. ) 0.41 mm (0.016”) 400 No NA NA 1–5° H20-059 -1415 Nonstandard pocket orientation. *Pocket size may differ slightly from dimensions shown. 7 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Pocket Size Pocket Depth Capacity EDM Finish 1.52 mm (0.060” sq.) Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 0.46 mm (0.018”) 400 No NA NA 1–5° H20-060-18 -1415 -62C02 1.52 mm (0.060” sq.) 0.61 mm (0.024”) 400 No NA NA 1–5° H20-060-24 -62C02* -66C02 1.52 mm × 2.79 mm (0.060” × 0.110”) 1.91 mm (0.075”) 108 No NA NA 1–5° H20-059109 -1415 1.55 mm × 1.40 mm (0.061” × 0.055”) 1.27 mm (0.050”) 306 No NA NA 1–5° H20-061055 -62C02 1.57 mm × 2.34 mm (0.062” × 0.092”) 0.61 mm (0.024”) 100 No NA NA 10° H20-060090 -62C02 1.57 mm × 2.34 mm (0.062” × 0.092”) 0.89 mm (0.035”) 100 No NA NA 10° H20-062092 -62C02 1.60 mm × 16.51 mm (0.063” × 0.650”) 0.41 mm (0.016”) 30 No NA NA 1–5° H20-063650 -62C02* -66C02 1.65 mm (0.065” sq.) 0.61 mm (0.024”) 100 No NA NA 7° H20-065-24 -62C02* -66C02 1.65 mm × 3.18 mm (0.065” × 0.125”) 0.64 mm (0.025”) 170 No NA NA 1–5° H20-065125 -62C02 1.70 mm × 3.30 mm (0.067” × 0.130”) 1.65 mm (0.065”) 126 No NA NA 1–5° H20-067130 -62C02 1.78 mm (0.070” sq.) 0.28 mm (0.011”) 100 No NA NA 1–5° H20-070-11 -1401 1.78 mm (0.070” sq.) 0.41 mm (0.016”) 100 No NA NA 1–5° H20-070-16 -62C02* -66C02 1.78 mm (0.070” sq.) 0.61 mm (0.024”) 100 No NA NA 1–5° H20-070-24 -62C02 1.78 mm (0.070” sq.) 1.14 mm (0.045”) 100 No NA NA 1–5° H20-070-45 -62C02 1.83 mm × 2.29 mm (0.072” × 0.090”) 0.46 mm (0.018”) 192 No NA NA 15° H20-072090 -62C02* -66C02 1.88 mm × 16.64 mm (0.074” × 0.655”) 0.76 mm (0.030”) 28 No NA NA 1–5° H20-074655 -62C02 1.91 mm (0.075” sq.) 0.46 mm (0.018”) 324 No NA NA 1–5° H20-075-18 -66C02 1.91 mm (0.075” sq.) 0.61 mm (0.024”) 324 No NA NA 1–5° H20-075-24 -62C02 *Pocket size may differ slightly from dimensions shown. ENTEGRIS, INC. 8 Section 1: H20 Series (2”) Trays For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Section 1: H20 Series (2”) Trays BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Pocket Size Pocket Depth Capacity EDM Finish Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 1.91 mm × 2.67 mm (0.075” × 0.105”) 0.51 mm (0.020”) 221 No NA NA 1–5° H20-074104 -62C02* -66C02 1.91 mm × 2.67 mm (0.075” × 0.105”) 1.14 mm (0.045”) 221 No NA NA 1–5° H20-073103 -62C02 1.91 mm × 3.81 mm (0.075” × 0.150”) 0.41 mm (0.016”) 170 No NA NA 1–5° H20-074149 -1405 1.98 mm × 2.79 mm (0.078” × 0.110”) 0.51 mm (0.020”) 154 No NA NA 1–5° H20-078110 -1407 -66C02 2.01 mm (0.079” sq.) 0.86 mm (0.034”) 100 No NA NA 1–5° H20-080 -1415 -62C02* -66C02 2.03 mm (0.080” sq.) 0.61 mm (0.024”) 169 No NA NA 1–5° H20-080-24 -62C02 2.03 mm (0.080” sq.) 1.27 mm (0.050”) 100 No NA NA 1–5° H20-080-50 -1415 2.03 mm × 2.16 mm (0.080” × 0.085”) 0.89 mm (0.035”) 225 No NA NA 1–5° H20-080085 -66C02 2.03 mm × 5.69 mm (0.080” × 0.224”) 0.64 mm (0.025”) 90 No NA NA 1–5° H20-080225 -62C02 2.16 mm (0.085” sq.) 0.61 mm (0.024”) 100 No NA NA 7° H20-085-24 -62C02* -66C02 2.29 mm (0.090” sq.) 0.41 mm (0.016”) 100 No NA NA 1–5° H20-090-16 -66C02 2.29 mm (0.090” sq.) 0.61 mm (0.024”) 100 No NA NA 1–5° H20-090-24 -62C02* -66C02 2.29 mm (0.090” sq.) 0.89 mm (0.035”) 100 No NA NA 1–5° H20-090-35 -62C02* -66C02 2.29 mm × 2.41 mm (0.090” × 0.095”) 0.51 mm (0.020”) 256 Yes NA NA 1–5° H20E-090095 -62C02 2.29 mm × 2.69 mm (0.090” × 0.106”) 0.51 mm (0.020”) 100 No NA NA 1–5° H20-090106 -62C02 2.29 mm × 2.92 mm (0.090” × 0.115”) 0.51 mm (0.020”) 120 No NA NA 1–5° H20-091116 -62C02 2.29 mm × 2.92 mm (0.090” × 0.115”) 0.51 mm (0.020”) 180 No NA NA 30° H20-090115 -62C02 2.29 mm × 2.92 mm (0.090” × 0.115”) 1.14 mm (0.045”) 180 No NA NA 1–5° H20-089114 -62C02 *Pocket size may differ slightly from dimensions shown. 9 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Pocket Size Pocket Depth Capacity EDM Finish Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 2.29 mm × 3.30 mm (0.090” × 0.130”) 0.51 mm (0.020”) 130 No NA NA 1–5° H20-090130 -1415 -62C02* 2.39 mm × 2.64 mm (0.094” × 0.104”) 0.76 mm (0.030”) 210 No NA NA 1–5° H20-093103 -62C02 2.39 mm × 18.39 mm (0.094” × 0.724”) 0.64 mm (0.025”) 24 No NA NA 1–5° H20-094724 -62C02 2.41 mm (0.095”) 0.61 mm (0.024”) 42 No 1.27 mm (0.050” sq.) NA 5° H20-095WH -66C02 2.41 mm (0.095” sq.) 0.61 mm (0.024”) 100 No NA NA 7° H20-095-24 -1415 -62C02* -66C02 2.41 mm (0.095” sq.) 0.76 mm (0.030”) 196 Yes NA NA 1–5° H20E-095-30 -62C02 2.41 mm × 5.94 mm (0.095” × 0.234”) 0.64 mm (0.025”) 72 No NA NA 1–5° H20-095235 -62C02 2.44 mm × 3.07 mm (0.096” × 0.121”) 0.76 mm (0.030”) 130 No NA NA 1–5° H20-096121 -62C02 2.54 mm (0.100” sq.) 0.28 mm (0.011”) 100 No NA NA 1–5° H20-100-11 -62C02 2.54 mm (0.100” sq.) 0.81 mm (0.032”) 144 No NA NA 1–5° H20-099-32 -62C02 2.54 mm (0.100” sq.) 0.81 mm (0.032”) 100 No NA NA 11° H20-100-32 -1415 -62C02* Lead-in chamber (30°) begins 0.015” from bottom pocket surface. 2.54 mm × 3.18 mm (0.100” × 0.125”) 1.27 mm (0.050”) 110 No NA NA 1–5° H20-100125 -62C02 2.54 mm × 3.68 mm (0.100” × 0.145”) 0.51 mm (0.020”) 140 No NA NA 1–5° H20-100145 -62C02 2.54 mm × 3.68 mm (0.100” × 0.145”) 0.71 mm (0.028”) 140 No NA NA 1–5° H20-101146 -62C02 2.54 mm × 3.68 mm (0.100” × 0.145”) 0.81 mm (0.032”) 140 No NA NA 1–5° H20-099144 -62C02 2.54 mm × 4.45 mm (0.100” × 0.175”) 0.41 mm (0.016”) 112 No NA NA 1–5° H20-099174 -62C02* -66C02 2.54 mm × 5.08 mm (0.100” × 0.200”) 1.78 mm (0.070”) 50 No NA NA 1–5° H20-099199 -1415 -62C02* -66C02 *Pocket size may differ slightly from dimensions shown. ENTEGRIS, INC. 10 Section 1: H20 Series (2”) Trays For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Section 1: H20 Series (2”) Trays BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Pocket Size Pocket Depth Capacity EDM Finish Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 2.54 mm × 5.56 mm (0.100” × 0.219”) 0.89 mm (0.035”) 60 No NA NA 1–5° H20-100220 -62C02 2.67 mm (0.105” sq.) 0.61 mm (0.024”) 144 No NA NA 1–5° H20-105-24 -62C02 2.77 mm × 4.27 mm (0.109” × 0.168”) 0.61 mm (0.024”) 88 No NA NA 1–5° H20-109168 -66C02 2.79 mm (0.110” sq.) 0.41 mm (0.016”) 100 No NA NA 1–5° H20-110-16 -62C02 2.79 mm (0.110” sq.) 0.61 mm (0.024”) 100 No NA NA 1–5° H20-110-24 -62C02* -66C02 2.79 mm (0.110” sq.) 0.89 mm (0.035”) 100 No NA NA 1–5° H20-404 -62C02 2.79 mm × 3.68 mm (0.110” × 0.145”) 2.03 mm (0.080”) 80 No NA NA 1–5° H20-110145 -62C02 2.79 mm × 12.19 mm (0.110” × 0.480”) 0.84 mm (0.033”) 36 No NA NA 1–5° H20-110480 -66C02 2.92 mm (0.115” sq.) 0.76 mm (0.030”) 100 No NA NA 1–5° H20-115 -1415 2.92 mm × 7.24 mm (0.115” × 0.285”) 0.46 mm (0.018”) 50 No NA NA 5° H20-114284 -1415 Underside stacking clearance is 0.017.” 3.00 mm × 6.22 mm (0.118” × 0.245”) 0.76 mm (0.030”) 50 No NA NA 1–5° H20-118246 -62C02 3.05 mm (0.120” sq.) 0.61 mm (0.024”) 100 No NA NA 1–5° H20-120-24 -66C02 3.05 mm × 4.06 mm (0.120” × 0.160”) 0.51 mm (0.020”) 80 No NA NA 1–5° H20-120160 -66C02 3.05 mm × 4.70 mm (0.120” × 0.185”) 0.51 mm (0.020”) 96 No NA NA 1–5° H20-120185 -1415 -62C02* 3.05 mm × 4.70 mm (0.120” × 0.184”) 0.81 mm (0.032”) 96 No NA NA 1–5° H20-121186 -62C02 3.10 mm (0.122” sq.) 0.81 mm (0.032”) 121 No NA NA 30° H20-122 -62C02 3.10 mm × 2.87 mm (0.122” × 0.113”) 0.81 mm (0.032”) 100 No NA NA 30° H20-113122 -62C02 Pocket draft begins 0.015˝ from bottom pocket surface. *Pocket size may differ slightly from dimensions shown. 11 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Pocket Size Pocket Depth Capacity EDM Finish Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 3.12 mm × 5.00 mm (0.123” × 0.197”) 1.14 mm (0.045”) 88 No NA NA 1–5° H20-123198 -62C02 3.18 mm (0.125” sq.) 0.41 mm (0.016”) 121 No NA NA 1–5° H20-124 -66C02 3.18 mm × 5.08 mm (0.125” × 0.200”) 0.41 mm (0.016”) 88 No NA NA 1–5° H20-124199 -1408 3.18 mm × 5.84 mm (0.125” × 0.230”) 0.89 mm (0.035”) 60 No NA NA 1–5° H20-125230 -1415 -62C02* -62C02 3.18 mm × 7.60 mm (0.125” × 0.299”) 1.40 mm (0.055”) 50 No NA NA 1–5° H20-125300 -62C02 3.20 mm (0.126” sq.) 1.19 mm (0.047”) 100 No NA NA 1–5° H20-126-47 -62C02 3.23 mm × 3.51 mm (0.127” × 0.138”) 0.86 mm (0.034”) 100 No NA NA 10° H20-127138 -62C02 3.28 mm (0.129” sq.) 0.89 mm (0.035”) 100 Yes NA NA 1–5° H20E-130-35 -62C02 3.30 mm (0.130” sq.) 0.41 mm (0.016”) 100 No NA NA 1–5° H20-130-16 -66C02 3.30 mm (0.130” sq.) 0.61 mm (0.024”) 100 No NA NA 1–5° H20-130-24 -62C02* -66C02 3.30 mm (0.130” sq.) 0.89 mm (0.035”) 100 No NA NA 1–5° H20-405 -1415 -62C02* 3.30 mm × 4.62 mm (0.130” × 0.182”) 0.76 mm (0.030”) 88 No NA NA 1–5° H20-130182 -1415 -62C02* 3.30 mm × 4.62 mm (0.130” × 0.182”) 0.76 mm (0.030”) 88 No 1.14 mm ×1.27 mm NA (0.045”× 0.050”) 3.30 mm × 4.62 mm (0.130” × 0.182”) 1.14 mm (0.045”) 88 No NA NA 1–5° H20-129181 -1415 3.30 mm × 7.60 mm (0.130” × 0.299”) 0.76 mm (0.030”) 50 No NA NA 1–5° H20-130300 -62C02 3.56 mm (0.140” sq.) 0.41 mm (0.016”) 100 No NA NA 1–5° H20-414 -62C02* -66C02 3.56 mm (0.140” sq.) 0.61 mm (0.024”) 100 No NA NA 1–5° H20-140-24 -62C02 5° H20-130182WH -1415 *Pocket size may differ slightly from dimensions shown. ENTEGRIS, INC. 12 Section 1: H20 Series (2”) Trays For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Section 1: H20 Series (2”) Trays BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Pocket Size Pocket Depth 3.56 mm (0.140” sq.) 1.52 mm (0.060”) Capacity EDM Finish Wash Hole Tweezer Size Slot Width 100 No NA Pocket Draft Part Number Standard Materials NA 1–5° H20-414-60 -62C02 Not available in ChipSentry material (-66C02). 3.56 mm × 4.80 mm (0.140” × 0.189”) 1.78 mm (0.070”) 48 No NA NA 1–5° H20-140190 -62C02 3.58 mm (0.141” sq.) 0.81 mm (0.032”) 81 No NA NA 30° H20-141 -62C02 Pocket draft begins 0.015˝ from bottom pocket surface. 3.58 mm × 4.60 mm (0.141” × 0.181”) 0.41 mm (0.016”) 63 Yes NA NA 1–5° H20E-141181 -66C02 3.61 mm × 3.73 mm (0.142” × 0.147”) 0.61 mm (0.024”) 64 No NA NA 30° H20-142147 -62C02 3.79 mm × 21.64 mm (0.149” × 0.852”) 0.61 mm (0.024”) 20 No NA NA 1–5° H20-148848 -1415 3.81 mm (0.150” sq.) 0.41 mm (0.016”) 100 No NA NA 1–5° H20-150-16 -62C02 3.81 mm (0.150” sq.) 0.61 mm (0.024”) 49 No NA 1.27 mm (0.050”) 5° 3.81 mm (0.150” sq.) 0.61 mm (0.024”) 100 No NA NA 1–5° 3.81 mm (0.150” sq.) 0.61 mm (0.024”) 100 No NA 1.27 mm (0.050”) 5° H20-150-24TW -66C02 3.81 mm (0.150” sq.) 0.61 mm (0.024”) 100 No 1.27 mm (0.050” sq.) NA 7° H20-150-24WH -62C02 3.81 mm (0.150” sq.) 0.89 mm (0.035”) 49 No NA NA 1–5° H20-150-035 -62C02 3.81 mm × 5.08 mm (0.150” × 0.200”) 1.91 mm (0.075”) 42 No NA NA 1–5° H20-150200 -66C02 42 No NA NA 5° H20-149199 -62C02 H20-151-24TW -66C02 H20-150-24 -62C02* -66C02 Tray-cover stacking only. H20 clips will not work. 3.81 mm × 5.03 mm (0.150” × 0.198”) 1.90 mm (0.075”) Raised characters (0.005˝) in pocket bottom. 3.81 mm × 6.33 mm (0.150” × 0.249”) 0.61 mm (0.024”) 35 No NA NA 1–5° H20-150250 -62C02 3.81 mm × 6.35 mm (0.150” × 0.250”) 0.61 mm (0.024”) 35 Yes NA NA 1–5° H20E-150250 -66C02 *Pocket size may differ slightly from dimensions shown. 13 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Pocket Size Pocket Depth Capacity EDM Finish Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 3.81 mm × 7.21 mm (0.150” × 0.284”) 0.89 mm (0.035”) 45 No NA NA 1–5° H20-150285 -62C02 3.94 mm (0.155” sq.) 0.81 mm (0.032”) 81 No NA NA 30° H20-155 -1415 -62C02* 56 No NA NA 30° H20-156175 -62C02* -66C02 Pocket draft begins 0.015˝ from bottom pocket surface. 3.96 mm × 4.45 mm (0.156” × 0.175”) 0.81 mm (0.032”) Pocket draft begins 0.015˝ from bottom pocket surface. 4.04 mm × 12.93 mm (0.159” × 0.509”) 0.89 mm (0.035”) 24 No NA NA 30° H20-159509 -1403 -62C02* -66C02 4.06 mm × 5.18 mm (0.160” × 0.204”) 0.64 mm (0.025”) 20 No NA NA 1–5° H20-160205 -62C02 4.06 mm × 8.48 mm (0.160” × 0.334”) 0.64 mm (0.025”) 28 No NA NA 1–5° H20-159334 -62C02 4.19 mm (0.165” sq.) 0.61 mm (0.024”) 49 No NA NA 1–5° H20-165-24 -62C02 4.19 mm (0.165” sq.) 0.61 mm (0.024”) 49 No 1.27 mm (0.050” sq.) NA 7° H20-165-24WH -1415 4.27 mm (0.168” sq.) 0.89 mm (0.035”) 49 No NA NA 30° H20-169 -62C02 4.29 mm × 4.55 mm (0.169” × 0.179”) 0.61 mm (0.024”) 49 No NA NA 1–5° H20-170180 -62C02 4.29 mm × 5.31 mm (0.169” × 0.209”) 0.64 mm (0.025”) 20 No NA NA 1–5° H20-170210 -62C02 4.29 mm × 5.56 mm (0.169” × 0.219”) 0.89 mm (0.035”) 42 No NA NA 30° H20-169219 -62C02 4.32 mm × 6.86 mm (0.170” × 0.270”) 0.89 mm (0.035”) 28 No NA NA 30° H20-169269 -1403 4.32 mm × 9.40 mm (0.170” × 0.370”) 0.89 mm (0.035”) 28 No NA NA 30° H20-169369 -1403 -62C02* 4.32 mm × 11.94 mm (0.170” × 0.470”) 0.89 mm (0.035”) 21 No NA NA 30° H20-169469 -1403 4.39 mm × 3.61 mm (0.173” × 0.142”) 0.61 mm (0.024”) 80 No NA NA 1–5° H20-142173 -62C02 *Pocket size may differ slightly from dimensions shown. ENTEGRIS, INC. 14 Section 1: H20 Series (2”) Trays For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Section 1: H20 Series (2”) Trays BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Pocket Size Pocket Depth Capacity EDM Finish 4.45 mm (0.175” sq.) Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 0.81 mm (0.032”) 64 No NA NA 1–5° H20-175 -1415 -62C02* 4.45 mm × 8.26 mm (0.175” × 0.325”) 1.40 mm (0.055”) 28 No NA NA 1–5° H20-175325 -1415 4.55 mm × 6.83 mm (0.179” × 0.269”) 0.51 mm (0.020”) 35 No NA NA 1–5° H20-180270 -62C02 4.55 mm × 6.83 mm (0.179” × 0.269”) 0.81 mm (0.032”) 35 No NA NA 1–5° H20-181271 -62C02 4.57 mm (0.180” sq.) 0.41 mm (0.016”) 49 No NA NA 1–5° H20-180-16 -66C02 4.57 mm (0.180” sq.) 0.61 mm (0.024”) 49 No NA NA 1–5° H20-180-24 -1415 -62C02* -66C02 4.57 mm × 8.38 mm (0.180” × 0.330”) 0.89 mm (0.035”) 28 No NA NA 30° H20-179329 -1403 -62C02* -66C02 4.70 mm × 3.81 mm (0.185” × 0.150”) 0.61 mm (0.024”) 80 No NA NA 1–5° H20-185150 -66C02 4.83 mm (0.190” sq.) 0.61 mm (0.024”) 49 No NA NA 1–5° H20-190-24 -62C02 4.80 mm × 5.06 mm (0.189” × 0.199”) 1.91 mm (0.075”) 30 No NA NA 1–5° H20-190200 -62C02 Tray-cover stacking only. H20 clips will not work. 4.83 mm × 8.89 mm (0.190” × 0.350”) 0.61 mm (0.024”) 32 No NA NA 1–5° H20-190350 -1415 -62C02* 4.85 mm × 5.94 mm (0.191” × 0.234”) 0.64 mm (0.025”) 36 No NA NA 30° H20-191234 -66C02 49 No NA NA 30° H20-192 -62C02 49 No NA NA 30° H20-196 -62C02 30 No NA NA 1–5° H20-200265 -62C02 Not available in STAT-PRO 150 material (-62C02). 4.85 mm (0.191” sq.) 0.81 mm (0.032”) Pocket draft begins 0.015˝ from bottom pocket surface. 4.98 mm (0.196” sq.) 0.41 mm (0.016”) Pocket draft begins 0.015˝ from bottom pocket surface. 5.05 mm × 6.71 mm (0.199” × 0.264”) 1.78 mm (0.070”) *Pocket size may differ slightly from dimensions shown. 15 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Pocket Size Pocket Depth Capacity EDM Finish Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 5.08 mm × 13.46 mm (0.200” × 0.530”) 0.76 mm (0.030”) 21 No NA NA 1–5° H20-200530 -1415 5.31 mm (0.202” sq.) 0.89 mm (0.035”) 64 Yes NA NA 1–5° H20E-202-35 -66C02 5.21 mm × 6.10 mm (0.205” × 0.240”) 0.61 mm (0.024”) 42 No NA NA 1–5° H20-205240 -66C02 5.31 mm × 4.90 mm (0.209” × 0.193”) 0.81 mm (0.032”) 42 No NA NA 30° H20-194210 -62C02 Pocket draft begins 0.015˝ from bottom pocket surface. 5.33 mm (0.210” sq.) 0.41 mm (0.016”) 49 No NA NA 1–5° H20-210-16 -1415 -62C02* 5.33 mm (0.210” sq.) 0.61 mm (0.024”) 49 No NA NA 1–5° H20-210-24 -62C02* -66C02 5.33 mm (0.210” sq.) 0.76 mm (0.030”) 49 No NA NA 1–5° H20-410 -1415 -62C02* 5.44 mm (0.214” sq.) 0.81 mm (0.032”) 36 No NA NA 30° H20-215 -62C02 Pocket draft begins 0.015˝ from bottom pocket surface. 5.54 mm × 6.50 mm (0.218” × 0.256”) 0.51 mm (0.020”) 36 No NA NA 1–5° H20-218256 -66C02 5.54 mm × 9.60 mm (0.218” × 0.378”) 1.27 mm (0.050”) 20 No NA NA 1–5° H20-219379 -62C02 5.56 mm (0.219” sq.) 0.61 mm (0.024”) 36 No NA NA 1–5° H20-220-24 -62C02 5.56 mm × 9.63 mm (0.219” × 0.379”) 0.61 mm (0.024”) 20 No NA NA 1–5° H20-220380 -62C02 5.56 mm × 10.64 mm (0.219” × 0.419”) 0.89 mm (0.035”) 18 No NA NA 30° H20-219419 -62C02 5.56 mm × 11.91 mm (0.219” × 0.469”) 0.64 mm (0.025”) 15 No NA NA 30° H20-219469 -1403L 5.59 mm (0.220” sq.) 0.89 mm (0.035”) 36 No NA NA 30° H20-219 -62C02 5.59 mm × 7.37 mm (0.220” × 0.290”) 0.61 mm (0.024”) 30 No NA NA 1–5° H20-220290 -1415 5.82 mm (0.229” sq.) 0.81 mm (0.032”) 36 No NA NA 30° H20-229 -62C02 Pocket draft begins 0.015˝ from bottom pocket surface. *Pocket size may differ slightly from dimensions shown. ENTEGRIS, INC. 16 Section 1: H20 Series (2”) Trays For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Section 1: H20 Series (2”) Trays BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Pocket Size Pocket Depth Capacity EDM Finish 5.89 mm (0.232” sq.) Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 0.41 mm (0.016”) 36 No NA NA 1–5° H20-232 -1415 6.07 mm × 6.71 mm (0.239” × 0.264”) 1.78 mm (0.070”) 25 No NA NA 1–5° H20-240265 -62C02 6.10 mm (0.240” sq.) 1.14 mm (0.045”) 36 No 2.54 mm (0.100” sq.) NA 4° H20-240WH -1415 6.12 mm × 5.03 mm (0.241” × 0.198”) 0.64 mm (0.025”) 36 No NA NA 1–5° H20-199242 -62C02 6.20 mm × 4.60 mm (0.244” × 0.181”) 1.07 mm (0.042”) 48 No NA NA 30° H20-181244 -1415 -62C02* Pocket draft begins 0.017˝ from bottom pocket surface. 6.30 mm × 13.54 mm (0.248” × 0.533”) 0.89 mm (0.035”) 15 No NA NA 30° H20-248533 -1403L 6.35 mm (0.250” sq.) 0.61 mm (0.024”) 36 No NA NA 1–5° H20-250-24 -62C02* -66C02 6.35 mm × 19.05 mm (0.250” × 0.750”) 0.61 mm (0.024”) 10 No NA NA 1–5° H20-250750 -66C02 6.45 mm × 7.26 mm (0.254” × 0.286”) 0.61 mm (0.024”) 25 No NA NA 1–5° H20-256288 -62C02 6.50 mm × 10.67 mm (0.256” × 0.420”) 1.42 mm (0.056”) 15 No NA NA 1–5° H20-256420 -1415 6.53 mm (0.257” sq.) 0.81 mm (0.032”) 25 No NA NA 30° H20-258 -62C02 Pocket draft begins 0.015˝ from bottom pocket surface. 6.60 mm (0.260” sq.) 0.61 mm (0.024”) 36 No NA NA 1–5° H20-260-24 -66C02 6.83 mm (0.269” sq.) 0.89 mm (0.035”) 16 No NA NA 1–5° H20-269 -62C02 6.86 mm (0.270” sq.) 0.89 mm (0.035”) 16 No NA NA 1–5° H20-270-35 -62C02 7.09 mm (0.279” sq.) 0.41 mm (0.016”) 36 No NA NA 1–5° H20-280-16 -62C02 7.09 mm × 9.12 mm (0.279” × 0.359”) 0.61 mm (0.024”) 20 No NA NA 1–5° H20-280360 -62C02 7.11 mm (0.280” sq.) 0.61 mm (0.024”) 36 No NA NA 1–5° H20-280-24 -1415 -62C02* -66C02 *Pocket size may differ slightly from dimensions shown. 17 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Pocket Size Pocket Depth Capacity EDM Finish Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 7.11 mm × 9.14 mm (0.280” × 0.360”) 1.27 mm (0.050”) 20 No NA NA 1–5° H20-279359 -1415 -62C02* 7.26 mm (0.286” sq.) 0.81 mm (0.032”) 25 No NA NA 1–5° H20-287 -62C02 7.49 mm × 7.19 mm (0.295” × 0.283”) 0.81 mm (0.032”) 25 No NA NA 30° H20-284296 -62C02 H20-300 -1415 -62C02* -66C02 Pocket draft begins 0.015˝ from bottom pocket surface. 7.60 mm (0.299” sq.) 0.76 mm (0.030”) 25 No NA NA 1–5° 7.60 mm (0.299” sq.) 0.76 mm (0.030”) 25 No 2.54 mm (0.100” sq.) NA 6° H20-300WH -62C02 7.60 mm (0.299” sq.) 0.81 mm (0.032”) 25 No NA NA 30° H20-298 -62C02 Pocket draft begins 0.015˝ from bottom pocket surface. 7.62 mm × 21.59 mm (0.300” × 0.850”) 0.38 mm (0.015”) 10 No NA NA 1–5° H20-300850 -1415 7.82 mm (0.308” sq.) 0.81 mm (0.032”) 25 No NA NA 1–5° H20-310-32 -62C02 7.85 mm (0.309” sq.) 1.07 mm (0.042”) 25 No NA NA 1–5° H20-310-42 -62C02 7.85 mm × 11.66 mm (0.309” × 0.459”) 1.40 mm (0.055”) 15 No NA NA 1–5° H20-310460 -62C02 8.08 mm (0.318” sq.) 0.89 mm (0.035”) 16 No NA NA 30° H20-320 -62C02 8.38 mm (0.330” sq.) 0.61 mm (0.024”) 16 No NA NA 1–5° H20-330-24 -62C02 8.74 mm (0.344” sq.) 1.40 mm (0.055”) 9 No NA NA 1–5° H20-345445 -62C02 8.76 mm (0.345” sq.) 0.51 mm (0.020”) 16 Yes NA NA 1–5° H20E-345-20 -66C02 9.14 mm (0.360” sq.) 0.61 mm (0.024”) 16 No NA NA 1–5° H20-360-24 -62C02 *Pocket size may differ slightly from dimensions shown. ENTEGRIS, INC. 18 Section 1: H20 Series (2”) Trays For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Section 1: H20 Series (2”) Trays BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Pocket Size Pocket Depth Capacity EDM Finish 9.14 mm (0.360” sq.) Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 1.40 mm (0.055”) 16 No NA NA 1–5° H20-360 -1415 -62C02* 9.14 mm × 17.78 mm (0.360” × 0.700”) 0.89 mm (0.035”) 8 No NA NA 1–5° H20-360700 -62C02 9.37 mm × 4.32 mm (0.369” × 0.170”) 0.89 mm (0.035”) 28 No NA NA 30° H20-369169 -62C02 9.58 mm (0.377” sq.) 1.02 mm (0.040”) 16 No NA NA 1–5° H20-411 -1415 -62C02* -66C02 9.96 mm (0.392” sq.) 0.74 mm (0.029”) 9 No NA NA 1–5° H20-394-29 -62C02 10.16 mm × 7.61 mm (0.400” × 0.300”) 0.61 mm (0.024”) 20 No NA NA 1–5° H20-400300 -62C02* -66C02 10.77 mm (0.424” sq.) 0.76 mm (0.030”) 9 No NA NA 1–5° H20-426 -62C02 10.80 mm (0.425” sq.) 0.61 mm (0.024”) 9 No NA NA 1–5° H20-426-24 -66C02 10.90 mm (0.429” sq.) 1.40 mm (0.055”) 9 No NA NA 1–5° H20-430 -62C02 11.30 mm × 4.60 mm (0.445” × 0.181”) 0.81 mm (0.032”) 21 No NA NA 1–5° H20-181445 -62C02 11.38 mm (0.448” sq.) 0.64 mm (0.025”) 9 No NA NA 1–5° H20-450-25 -62C02 11.43 mm (0.450” sq.) 1.02 mm 0.040”) 9 No NA NA 1–5° H20-450 -1415 11.43 mm × 4.75 mm (0.450” × 0.187”) 1.78 mm (0.070”) 12 No NA 1.57 mm (0.062”) 2° H20-004 -66C02 11.94 mm (0.470” sq.) 0.61 mm (0.024”) 9 No NA NA 1–5° H20-470 -62C02* -66C02 12.32 mm (0.485” sq.) 0.89 mm (0.035”) 9 No NA NA 1–5° H20-485 -62C02* -66C02 12.70 mm × 15.24 mm (0.500” × 0.600”) 0.76 mm (0.030”) 6 No NA NA 1–5° H20-500600 -1415 -62C02* 12.70 mm × 15.94 mm (0.500” × 0.635”) 1.14 mm (0.045”) 6 No NA NA 1–5° H20-500635 -66C02 *Pocket size may differ slightly from dimensions shown. 19 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Pocket Size Pocket Depth Capacity EDM Finish Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 12.85 mm × 10.57 mm (0.506” × 0.416”) 1.14 mm (0.045”) 12 No NA NA 1–5° H20-506416 -66C02 13.06 mm × 17.86 mm (0.514” × 0.703”) 0.74 mm (0.029”) 6 Yes NA NA 1–5° H20E-514703 -66C02 13.21 mm (0.520” sq.) 0.76 mm (0.030”) 9 No NA NA 1–5° H20-520 -62C02 13.26 mm × 2.79 mm (0.522” × 0.110”) 0.56 mm (0.022”) 33 No NA NA 30° H20-522110 -62C02 13.41 mm (0.528” sq.) 1.14 mm (0.045”) 9 No 2.54 mm (0.100” sq.) NA 4° H20-530-45WH -62C02 13.89 mm × 21.44 mm (0.547” × 0.844”) 0.41 mm (0.016”) 6 No NA NA 1–5° H20-547844 -1415 14.00 mm (0.551” sq.) 0.99 mm (0.039”) 9 No NA NA 1–5° H20-551 -1415 -62C02* -66C02 14.94 mm × 15.37 mm (0.588” × 0.605”) 0.61 mm (0.024”) 4 No NA NA 1–5° H20-583600 -66C02 14.96 mm × 15.90 mm (0.589” × 0.626”) 1.07 mm (0.042”) 4 No NA NA 5° H20-588624 -62C02 15.60 mm × 17.70 mm (0.614” × 0.697”) 1.27 mm (0.050”) 4 Yes NA NA 1–5° H20E-614697 -66C02 15.93 mm (0.627” sq.) 0.89 mm (0.035”) 4 No NA NA 1–5° H20-625 -66C02 18.03 mm × 21.08 mm (0.710” × 0.830”) 0.64 mm (0.025”) 4 No NA NA 30° H20-710830 -1403 -62C02* 21.84 mm × 14.30 mm (0.860” × 0.563”) 0.76 mm (0.030”) 6 No NA NA 1–5° H20-860563 -66C02 21.84 mm × 44.45 mm (0.860” × 1.750”) 0.76 mm (0.030”) 2 No NA NA 1–5° H20-860175 -66C02 21.92 mm × 14.02 mm (0.863” × 0.552”) 0.76 mm (0.030”) 6 No NA NA 1–5° H20-550860 -1415 39.88 mm (1.57” sq.) 1.78 mm (0.070”) 1 No NA NA 1–5° H20-1580 -62C02 41.91 mm (1.650” sq.) 1.27 mm (0.050”) 1 No NA NA 1–5° H20-1650 -62C02 Nonstandard pocket orientation. *Pocket size may differ slightly from dimensions shown. ENTEGRIS, INC. 20 Section 1: H20 Series (2”) Trays For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Section 1: H20 Series (2”) Covers BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Covers Ordering Information Popular tray covers in various standard materials are shown below. The following ordering policies apply: • Minimum order quantity 300 pieces; additional quantities in increments of 100 pieces. • Delivery from stock or four weeks after receipt of order. Note: STAT-PRO 150 material covers are recommended for use only with STAT-PRO 150 material trays. H20-02A COVER H20-02 COVER • Standard cover 1.42 mm (0.056”) • Cover with bumps on the bottom surface 0.203 mm (0.008”) • For most 400 capacity trays 0.508 mm (0.020”) Part Number Material H20-02-1201 Amber styrene Part Number Material H20-02-1216 Clear styrene H20-02A-1216 Clear styrene H20-02-1415 Natural ABS H20-02A-62C02 STAT-PRO 150 H20-02-5413 Transparent, A/S Bayon™ PMMA H20-02A-66C02 ChipSentry, STAT-PRO 500 H20-02-62C02 STAT-PRO 150 H20-02-66C02 ChipSentry, STAT-PRO 500 H20-02-74D10 Tan STAT-PRO 400 H20-02-ESD COVER • Standard cover with ESD sensitive symbol (logo) 1.42 mm (0.056”) Part Number Material H20-02-ESD-66C02 ChipSentry, STAT-PRO 500 H20-02B COVER • High clearance cover 1.88 mm (0.074”) Part Number Material H20-02B-1216 Clear styrene H20-02B-62C02 STAT-PRO 150 H20-02B-66C02 ChipSentry, STAT-PRO 500 H20-02-40 COVER • High clearance cover H20-02-RM COVER • Cover with rib matrix typically found on tray bottom 0.102 mm (0.004”) 0.102 mm (0.004”) Part Number Material H20-02-RM-62C02 STAT-PRO 150 H20-02-RM-66C02 ChipSentry, STAT-PRO 500 21 1.02 mm (0.040”) Part Number Material H20-02-40-66C02 ChipSentry, STAT-PRO 500 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Section 1: H20 Series (2”) Covers Ordering Information (continued) H20-02-24 COVER • High clearance cover H20-02D COVER 0.61 mm (0.024”) • High clearance cover 0.254 mm (0.010”) Part Number Material Part Number Material H20-02-24-1415 Natural ABS H20-02D-1415 Natural ABS H20-02D-62C02 STAT-PRO 150 H20-02D-66C02 ChipSentry, STAT-PRO 500 H20-02J COVER 0.432 mm (0.017”) • High clearance cover H20-02E COVER Part Number Material H20-02J-1201 Amber styrene H20-02J-1216 Clear styrene Part Number Material H20-02J-62C02 STAT-PRO 150 H20-02E-62C02 STAT-PRO 150 H20-02J-66C02 ChipSentry, STAT-PRO 500 H20-02E-66C02 ChipSentry, STAT-PRO 500 ENTEGRIS, INC. • High clearance cover 0.152 mm (0.006”) 22 Section 1: H20 Series (2”) Accessories BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Accessories Antistatic Tray Inserts • Nest between H20 trays and/or covers • Sold in packages of 1,000 pieces • Precut to tray size • Minimum order quantity: 1 package Inserts Material Static Decay Time (seconds) H20-001C* ChipGuard™ 1000 Polyethylene 1.5 to 2.0 1011 to 1012 Transparent 0.089 mm to 0.10 mm (0.0035” to 0.004”) H20-001D ChipGuard 2000 TYVEK® 1.5 to 2.0 1011 to 1012 White 0.13 mm to 0.18 mm (0.005” to 0.007”) H20-001-0713* ChipGuard 4000 Polyethylene 1.5 to 2.0 1011 to 1012 Pink 0.08 mm to 0.13 mm (0.003” to 0.005”) H20-001B Nonantistatic rice paper inserts Paper NA NA White 0.05 mm to 0.10 mm (0.002” to 0.004”) Part Number Surface Resistivity (ohm/square) Color Thickness * Packaged with tan separator sheets between inserts. Please discard separator sheets. One Piece Clip • For tray on tray or cover on tray • Overall size: 55 mm × 50 mm × 11 mm (2.2˝ × 2.0˝ × 0.4˝) • Minimum order quantity: 50 Part Number Material H20-04B-0615 Natural polypropylene H20-04B-67C02 STAT-PRO 125 (Polypropylene with carbon powder) 23 ENTEGRIS, INC. Pair of Clips • Interlocking tabs press on the center of the tray for secure contact between the tray and cover • Sold by the pair • Capacity: H20-04: one tray and one cover H20-041: five trays and one cover H20-043: ten trays and one cover • Minimum order quantity: 50 Part Number Material H20-04-0615 Polypropylene H20-04-61C02 STAT-PRO 100 (Polypropylene with carbon powder) H20-041-0615 Polypropylene H20-041-61C02 STAT-PRO 100 (Polypropylene with carbon powder) H20-043-0615 Polypropylene H20-043-61C02 STAT-PRO 100 (Polypropylene with carbon powder) H20-SB06 Spring Box • Holds five trays and one cover or six trays • Overall size: 56 mm × 53 mm × 20 mm (2.2˝ × 2.1˝ × 0.8˝) • Minimum order quantity: 50 Part Number Material H20-SB06-0615 Natural polypropylene H20-SB06-67C02 STAT-PRO 125 H20-SB11 Spring Box • Holds ten trays and one cover or eleven trays • Overall size: 56 mm × 53 mm × 36 mm (2.2˝ × 2.1˝ × 1.4˝) • Minimum order quantity: 50 Part Number Material H20-SB11-0615 Natural polypropylene H20-SB11-67C02 STAT-PRO 125 ENTEGRIS, INC. 24 Section 1: H20 Series (2”) Accessories BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Section 1: H20 Series (2”) Accessories BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING H20-SB13 Spring Box • Holds twelve trays and one cover or thirteen trays • Overall size: 56 mm × 53 mm × 41 mm (2.2˝ × 2.1˝ × 1.6˝) • Minimum order quantity: 50 Part Number Material H20-SB13-0615 Natural polypropylene H20-SB13-67C02 STAT-PRO 125 Storage Box • Holds 12 trays and one cover, or 13 trays • Overall size: 56 mm × 38 mm × 53 mm (2.2˝ × 1.5˝ × 2.1˝ ) • Minimum order quantity: 50 Part Number Material E28-1216 Clear styrene Tray Case • Holds one tray and one cover, or two trays • Overall size: 60 mm × 57 mm × 9.8 mm (2.4˝ × 2.3˝ × .39˝ ) • Minimum order quantity: 50 Part Number Material H20-03-1216 Clear styrene Removable Label • Blank label for customized marking • Pressure-sensitive adhesive is both removable and nondepositing (leaving no adhesive residue) • Adheres well to most plastic surfaces • Packaged and sold in rolls of 1,000 • For use with all H20 chip tray covers • Overall size: 38 mm (1.5˝ sq.) • Minimum order quantity: 1 roll • Preprinted label with custom information available Part Number Material H20-002LB Polyolefin copolymer 25 ENTEGRIS, INC. Chip Tray/Die Transfer Fixture • Chip tray with die slides into bottom track of the fixture. Empty tray is placed inverted over full tray. Holding the fixture and trays, turn over, lift off fixture. The original tray with die will be empty and die will now be in new tray. • Compatible chip trays: All H20 chip trays • Overall size: 56 mm × 10 mm (2.2˝ sq. × 0.4˝) • Minimum order quantity: 50 Part Number Material H20T-1415 Natural ABS H20T-66C02 ChipSentry, STAT-PRO 500 Chip Washing Jig/Screen • Screen retains chips in the pockets of inverted chip trays while in an ultrasonic bath. • Screen hole size: 250 microns • Screen size: 95.3 mm (3.75˝ diameter) • Minimum order quantities: Washing jig: 1 Replacement screen: 10 Part Number Material H02-20-0315 (Washing jig) ETFE H02-204-0215 (Replacement screen) PFA ENTEGRIS, INC. 26 Section 1: H20 Series (2”) Accessories BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Section 1: H20 Series (2”) Accessories BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Cleaning Fixture/Clip • For H20 chip trays in wash applications • Rinser/dryer compatible • Wash openings in sides • Clip holds two H20 trays • Carrier holds ten clips • Pocket spacing: 13 mm (0.5˝) • Pocket flat: 2.5 mm (0.10˝) • Overall size: 155 mm × 79 mm × 56 mm (6.1˝ × 3.1˝ × 2.2˝) • Compatible handles: A018, A027 • Minimum order quantities: Clips: 50 Carriers and handles: 1 Part Number Description Material H20-042-0603 Clip Blue polypropylene A110-01-0603 Carrier Blue polypropylene PA018-0603 150 mm (5”) handle Blue polypropylene PA027-0603 200 mm (8”) handle Blue polypropylene H20-042-0315 Clip ETFE A110-01-0315 Carrier ETFE A018-0215 150 mm (5”) handle PFA A027-0215 200 mm (8”) handle PFA Part Number Description Material H20-JIG-0205-ALUM JEDEC jig tray Aluminum 01-004611 Replacement springs Spring steel 01-007244 PIN Brass Jig Tray • Patented JEDEC thin profile jig tray • Holds ten H20 trays • Minimum order quantities: Jig tray: 1 Replacement springs: 5 27 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Section 2: CT3 Series (3˝) Products Trays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29 Sizes and Tolerances . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29 Section 2: CT3 Series (3”) Products For assistance with your specific product and application issues, contact your Entegris Regional Customer Service Center listed on the ”Customer Service” page of our website at www.entegris.com ENTEGRIS, INC. 28 BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING CT3 Series (3˝) Trays Entegris offers a selection of CT3 series 3˝ square trays. CT3 series trays are available in various pocket sizes and depths. Ordering Information Section 2: CT3 Series (3”) Products • Minimum order quantity: 2,000 pieces • These products are manufactured in Japan, extended lead times apply CT3 Series Trays • Contact Entegris Customer Service for more information Part Number Material Pocket Size Pocket Depth Capacity CT3-10X18J-66C02 ChipSentry, STAT-PRO 500 1.05 mm × 1.85 mm (0.041” × 0.073”) 1.05 mm (0.041”) 85 CT3-12X15J-66C02 ChipSentry, STAT-PRO 500 1.20 mm × 1.50 mm (0.047” × 0.059”) 0.90 mm (0.035”) 85 CT3-42X42J-74D04 Red STAT-PRO 400 4.20 mm × 4.20 mm (0.165” × 0.165”) 1.50 mm (0.059”) 56 CT3-55X97J-74D15 Natural STAT-PRO 400 5.59 mm × 9.77 mm (0.220” × 0.385”) 0.60 mm (0.024”) 56 CT3-65X25J-66C02 ChipSentry, STAT-PRO 500 6.51 mm × 2.51 mm (0.256” × 0.099”) 0.80 mm (0.031”) 85 29 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Section 3: H44 Series (4˝) Products H44 Series Products . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31 Trays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Sizes and Tolerances . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Ordering Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part Number System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31 32 32 33 Specialized CSP Products . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39 Trays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39 Covers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39 Covers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 Ordering Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 41 41 41 42 43 For assistance with your specific product and application issues, contact your Entegris Regional Customer Service Center listed on the ”Customer Service” page of our website at www.entegris.com ENTEGRIS, INC. 30 Section 3: H44 Series (4”) Products Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Antistatic Tray Inserts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Clips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Carrier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Jig Tray . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING H44 Series (4˝) Products Entegris offers a wide selection of H44 series 4˝ square trays, covers and accessories to meet your changing needs. H44 series trays are available in various pocket sizes and depths, with or without wash holes and with or without tweezer slots. Trays Entegris’ H44 series products offer proven reliability for handling bare die, including: • Known Good Die (KGD) • Wafer Scale Packaging (WSP) • Chip Scale Packaging (CSP) • Flip chip • Bump die • Opto electronics • Passive and active chip components Section 3: H44 Series (4”) Trays • Mechanical components Fast, reliable solutions are just a click away at Entegris’ website, www.devicecare.com. Select and order anytime of the day or night from our comprehensive offering of low-cost packaging systems to protect and transport microelectronic devices. It’s never been easier – or faster. And, if you need a custom bare die tray quickly, i-Tray™ Designer allows you to design a tray to your exact requirements, create a drawing and order at the click of a button. When you need the right product, right now, visit Entegris’ website at www.devicecare.com. 31 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Tray Sizes and Tolerances Tray sizes and tolerances may vary by material. Provided below are dimensions and tolerances. Dimensions and Tolerances Material Description Code Overall Size (sq.) Overall Height Flatness ABS Acrylonitrile Butadiene styrene with a color additive -14XX 101.6 ±0.127 mm (4.000 ±0.005”) 8.001 ±0.127 mm (0.315 ±0.005”) 0.254 mm (0.010”) STAT-PRO 150 Polypropylene with carbon powder and glass bead -62C02 101.35 ±0.254 mm (3.990 ±0.010”) 8.001 ±0.127 mm (0.315 ±0.005”) 0.508 mm (0.020”) STAT-PRO 400 Alloy of ABS and an intrinsically dissipative polymer -74DXX 101.6 ±0.127 mm (4.000 ±0.005”) 8.001 ±0.127 mm (0.315 ±0.005”) 0.254 mm (0.010”) ChipSentry, STAT-PRO 500 Polycarbonate with carbon powder -66C02 101.6 ±0.127 mm (4.000 ±0.005”) 8.001 ±0.127 mm (0.315 ±0.005”) 0.254 mm (0.010”) Tray Ordering Information H44 trays are sorted by pocket size. Simply look for the pocket size you want, find the options you require and select the material. Provide tray Part Number and material code from the “Standard Materials” column. Please order in increments of 100 as trays are packaged in lots of 100 trays after the minimum order quantity is met. Noncataloged Tray Entegris offers many popular trays in various standard materials as listed in the “Standard Materials” column. The following ordering policies apply: Entegris offers many tray designs other than those listed in the catalog. Visit Entegris’ website at www.devicecare.com or contact an Entegris Technical Service Representative for information on available noncataloged trays. The following ordering policies apply: • Minimum order quantity 200 pieces, thereafter in quantities of 50 pieces • Shipment from stock or within four weeks after receipt of order (See www.devicecare.com for availability) Cataloged Tray – Nonstandard Material Additional material options may be available for cataloged trays. Material options not listed in the “Standard Materials” column for each tray are specials requiring the following ordering policies: • Minimum order quantity 1,000 pieces, thereafter in quantities of 50 pieces • Minimum order quantity reduced to 200 pieces with a set-up charge • Shipment within four weeks after receipt of order Custom Tray Design • Minimum order quantity reduced to 200 pieces with a set-up charge Entegris offers custom trays designed to meet your exact requirements. Visit Entegris’ website at www.devicecare.com or use the “Fax It Form for Custom Trays” in the back of the catalog. You can also contact an Entegris Customer Service representative at +1 952-556-4181. • Shipment within four weeks after receipt of order Special ordering policies apply. • Minimum order quantity 1,000 pieces, thereafter in quantities of 50 pieces ENTEGRIS, INC. Section 3: H44 Series (4”) Trays Cataloged Tray – Standard Material 32 BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Part Number System H44 - 158 - XXX XX Design -CXX = Cored out tray design Series H44 = 101.6 mm × 101.6 mm (4” × 4”) H44E = 101.6 mm × 101.6 mm (4” × 4”) rough surface finish (EDM) on pocket bottom Material 14XX = ABS (various colors) 62C02 = STAT-PRO 150 black conductive polypropylene Color** 01 = Amber* 02 = Black 03 = Blue 03L = Light blue 04 = Red 05 = Green 66C02 = ChipSentry STAT-PRO 500 black conductive polycarbonate 06 = Brown 74DXX = STAT-PRO 400 static dissipative colorable ABS 09 = Orange 07 = Yellow 08 = Gray 10 = Tan 11 = Pink 12 = White* 15 = Natural* 21 = Purple 26 = Maroon Section 3: H44 Series (4”) Trays * STAT-PRO 400 material not available in amber, white or natural color. ** Refer to inside back cover for complete color chart. 33 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Pocket Size 3.68 mm × 5.08 mm (0.145” × 0.200”) Pocket Depth 0.51 mm (0.020”) Capacity EDM Finish Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 252 Yes NA NA 5° H44E-C145200 -66C02 256 No NA NA 5° H44-158 Tray bottom cored out. Tray-cover stacking only. 4.01 mm (0.158” sq.) 0.61 mm (0.024”) -66C02 Lead in chamber (45°) begins 0.014 ” from bottom pocket surface. 4.34 mm (0.171” sq.) 2.16 mm (0.085”) 100 No NA 2.54 mm 5° (0.100”) all sides H44-171-85TW -66C02 4.45 mm × 3.56 mm (0.175” × 0.140”) 1.27 mm (0.050”) 195 No NA NA 5° H44-140175 -1415 -66C02 4.83 mm (0.190” sq.) 0.61 mm (0.024”) 196 No NA NA – H44-190 -1409 -66C02 Lead in chamber (45°) begins 0.014 ” from bottom pocket surface. 0.61 mm (0.024”) 156 No NA NA 5° H44-194220 -1415 4.95 mm (0.195” sq.) 0.61 mm (0.024”) 196 No NA NA 5° H44-195 -66C02 5.00 mm (0.197” sq.) 1.02 mm (0.040”) 169 No NA NA 5° H44-195-40 -1415 5.33 mm (0.210” sq.) 0.61 mm (0.24”) 144 No NA NA 5° H44-210 -1415 5.38 mm × 6.73 mm (0.212” × 0.265”) 1.02 mm (0.040”) 120 No NA NA 1–5° H44-212265 -66C02 5.46 mm (0.215” sq.) 2.16 mm (0.085”) 64 No NA 5.59 mm (0.220” sq.) 3.30 mm (0.130”) 100 No NA NA 5° H44-220 -1415 -62C02* 5.59 mm (0.220” sq.) 3.30 mm (0.130”) 100 No 3.05 mm (0.120” sq.) NA 5° H44-220WH -1415 5.59 mm × 4.45 mm (0.220” × 0.175”) 1.52 mm (0.060”) 180 No NA NA 7° H44-175220 -1415 -62C02* 5.66 mm × 3.30 mm (0.223” × 0.130”) 0.61 mm (0.024”) 216 No NA NA 5° H44-130223 -66C02 5.84 mm (0.230” sq.) 0.61 mm (0.024”) 121 No NA NA 5° H44-230 -66C02 6.10 mm × 7.37 mm (0.240” × 0.290”) 3.81 mm (0.150”) 110 No NA NA 1–5° H44E-240290 -66C02 2.54 mm 5° (0.100”) all sides Section 3: H44 Series (4”) Trays 4.93 mm × 5.59 mm (0.194” × 0.220”) H44-215-85TW -66C02 *Pocket size may differ slightly from dimensions shown. ENTEGRIS, INC. 34 BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Pocket Size Pocket Depth Capacity EDM Finish 6.25 mm (0.246” sq.) Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 0.61 mm (0.024”) 121 No NA NA 5° H44-245 -66C02 6.30 mm (0.248” sq.) 2.03 mm (0.080”) 121 No NA NA 5° H44-248-80 -66C02 6.35 mm (0.250” sq.) 0.76 mm (0.030”) 100 No NA NA 5° H44-250-30 -66C02 6.35 mm (0.250” sq.) 3.30 mm (0.130”) 100 No NA NA 5° H44-250 -1415 -62C02* 6.35 mm (0.250” sq.) 3.30 mm (0.130”) 100 No 4.06 mm (0.160” sq.) NA 5° H44-250H2 -1415 6.35 mm × 3.94 mm (0.250” × 0.155”) 2.16 mm (0.085”) 150 No NA NA 5° H44-155250 -1415 -66C02 6.48 mm (0.255” sq.) 0.61 mm (0.024”) 121 No NA NA 5° H44-255 -66C02 Section 3: H44 Series (4”) Trays Lead in chamber (45°) begins 0.014” from bottom pocket surface. 6.60 mm (0.260” sq.) 2.54 mm (0.100”) 100 No NA NA 5° H44-260 -1415 -62C02* -66C02 6.65 mm (0.262” sq.) 1.65 mm (0.065”) 121 No NA NA 5° H44-260-63 -66C02 6.81 mm (0.268” sq.) 0.61 mm (0.024”) 100 No NA NA 5° H44-270 -62C02 6.99 mm × 8.38 mm (0.275” × 0.330”) 1.02 mm (0.040”) 90 No NA NA 1–5° H44-275330 -66C02 7.11 mm (0.280” sq.) 0.69 mm (0.027”) 100 No NA NA 45° H44-281 -1407 7.11 mm (0.280” sq.) 2.54 mm (0.100”) 100 No 5.08 mm (0.200” sq.) NA 5° H44-280WH -1415 7.62 mm (0.300” sq.) 0.76 mm (0.030”) 50 No NA NA 0° H44-300 -1415 7.62 mm (0.300” sq.) 1.27 mm (0.050”) 81 No NA NA 5° H44-299 -1407 -62C02* -66C02 7.62 mm (0.300” sq.) 3.94 mm (0.155”) 64 No NA NA 5° H44-300-155 -1415 -62C02* 7.62 mm × 6.99 mm (0.300” × 0.275”) 1.02 mm (0.040”) 100 No NA NA 1–5° H44-300275 -66C02 Recessed surface for insert. *Pocket size may differ slightly from dimensions shown. 35 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Pocket Size Pocket Depth Capacity EDM Finish Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 7.62 mm × 6.35 mm (0.300” × 0.250”) 2.29 mm (0.090”) 90 No NA NA 5° H44-250300 -1415 -66C02 7.98 mm × 4.24 mm (0.314” × 0.167”) 3.18 mm (0.125”) 135 No NA NA 5° H44-167315 -1415 8.00 mm (0.315” sq.) 2.54 mm (0.100”) 81 Yes NA NA 5° H44E-315-100 -66C02 8.38 mm × 2.41 mm (0.330” × 0.095”) 0.76 mm (0.030”) 234 No NA NA 0° H44-095329 -1415 8.51 mm × 19.05 mm (0.335” × 0.750”) 0.51 mm (0.020”) 36 No NA NA 5° H44-335750 -66C02 8.89 mm × 21.59 mm (0.350” × 0850”) 1.27 mm (0.050”) 24 No NA NA 5° H44-350850 -62C02 9.14 mm (0.360” sq.) 2.54 mm (0.100”) 64 No NA NA 5° H44-359 -1415 -62C02* -66C02 9.14 mm (0.360” sq.) 0.71 mm (0.028”) 64 No NA NA 5° H44-360-28 -1415 9.14 mm (0.360” sq.) 0.43 mm (0.017”) 64 No NA NA 5° H44-360 -1415 10.16 mm (0.400” sq.) 0.76 mm (0.030”) 49 No NA NA 5° H44-400-30 -66C02 10.16 mm (0.400” sq.) 1.19 mm (0.047”) 49 No NA NA 5° H44-400-47 -62C02 10.16 mm (0.400” sq.) 2.54 mm (0.100”) 49 No NA NA 5° H44-400 -1415 -62C02* -66C02 10.21 mm × 12.75 mm (0.402” × 0.502”) 3.94 mm (0.155”) 42 No NA NA 5° H44-400500 -1415 -62C02* 10.62 mm × 5.54 mm (0.418” × 0.218”) 0.61 mm (0.024”) 60 No NA NA 45° H44-220420 -62C02 10.66 mm (0.420” sq.) 2.03 mm (0.080”) 49 No NA NA 5° H44-420-80 -62C02 10.95 mm × 14.76 mm (0.431” × 0.581”) 0.38 mm (0.015”) 35 Yes NA NA 5° H44E-C431581 -66C02 Recessed surface for insert. Section 3: H44 Series (4”) Trays Recessed surface for insert. Tray bottom cored out. Tray-cover stacking only. *Pocket size may differ slightly from dimensions shown. ENTEGRIS, INC. 36 BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Pocket Size Pocket Depth Capacity EDM Finish 11.51 mm (0.453” sq.) Wash Hole Tweezer Size Slot Width Pocket Draft Part Number Standard Materials 2.54 mm (0.100”) 36 No NA NA 5° H44-453 -62C02 11.66 mm (0.459” sq.) 2.54 mm (0.100”) 36 No NA NA 5° H44-460 -1415 11.94 mm × 8.13 mm (0.470” × 0.320”) 4.19 mm (0.165”) 48 No NA NA 5° H44-320470N -1415 -62C02* 12.45 mm × 7.11 mm (0.490” × .280”) 0.89 mm (0.035”) 60 No NA NA 5° H44-280490 -1415 -62C02* 12.68 mm (0.499” dia.) 1.02 mm (0.040”) 36 No NA NA 0° H44-500 -62C02 12.70 mm (0.500” sq.) 2.54 mm (0.100”) 36 No NA NA 5° H44-499 -1415 -62C02* -66C02 13.21 mm (0.520” sq.) 1.02 mm (0.040”) 36 No NA NA 1–5° H44-520 -66C02 13.31 mm (0.524” sq.) 0.76 mm (0.030”) 25 No NA NA 5° H44-524 -62C02 -66C02* 13.51 mm × 18.52 mm (0.532” × 0.729”) 2.54 mm (0.100”) 20 No NA NA 5° H44-532729 -62C02 13.92 mm (0.548” sq.) 0.38 mm (0.015”) 25 Yes NA NA 5° H44E-545-15 -66C02 13.95 mm × 11.41 mm (0.549” × 0.449”) 0.51 mm (0.020”) 30 No NA NA 5° H44-450550 -62C02 14.86 mm × 18.75 mm (0.585” × 0.738”) 0.51 mm (0.020”) 20 No NA NA 5° H44-585738 -66C02 15.24 mm (0.600” sq.) 2.54 mm (0.100”) 25 No NA NA 5° H44-600 -1415 -62C02* -66C02 15.88 mm × 6.35 mm (0.625” × 0.250”) 4.19 mm (0.165”) 40 No NA NA 5° H44-250625 -1415 -62C02* 16.03 mm × 6.40 mm (0.631” × 0.252”) 4.24 mm (0.167”) 40 No NA NA 5° H44-250625N -1415 -62C02* 16 No NA NA 5° H44-650 -1415 -62C02* -66C02 Section 3: H44 Series (4”) Trays Raised characters in pocket bottom. Raised characters (0.005”) on pocket bottom. 16.59 mm (0.653” sq.) 0.76 mm (0.030”) *Pocket size may differ slightly from dimensions shown. 37 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING For latest product offerings and a comprehensive, up-to-date list of products, go to www.devicecare.com Pocket Size Pocket Depth Capacity EDM Finish 16.51 mm (0.650” sq.) Wash Hole Tweezer Size Slot Width 1.14 mm (0.045”) 16 No NA 17.98 mm × 8.28 mm (0.708” × 0.326”) 1.78 mm (0.070”) 16 No NA 18.29 mm (0.720” sq.) 0.76 mm (0.030”) 16 Yes NA NA 5° H44E-C720-30 -66C02 NA Pocket Draft 1–5° 132 mm (0.520”) 5° top/bottom Part Number H44-650-45 Standard Materials -66C02 H44-326708TW -66C02 Tray bottom cored out. Tray-cover stacking only. 2.54 mm (0.100”) 16 No NA NA 5° H44-740 -1415 -62C02* 19.05 mm (0.750” sq.) 1.52 mm (0.060”) 16 No NA NA 5° H44-750 -1415 -62C02* 19.05 mm × 30.48 mm (0.750” × 1.200”) 4.57 mm (0.180”) 6 No NA NA 5° H44-1200 -62C02 21.84 mm × 16.89 mm (0.860” × 0.665”) 0.51 mm (0.020”) 12 No NA NA 5° H44-665860 -66C02 21.84 mm × 16.89 mm (0.860” × 0.665”) 0.51 mm (0.020”) 12 Yes NA NA 5° H44E-665860 -66C02 22.86 mm × 18.16 mm (0.900” × 0.715”) 3.30 mm (0.130”) 12 No NA NA 5° H44-715900 -1415 -62C02* -66C02 25.40 mm (1.000” sq.) 3.30 mm (0.130”) 9 No NA NA 7° H44-999 -1415 -62C02* -66C02 25.40 mm × 12.70 mm (1.000” × 0.500”) 3.94 mm (0.155”) 15 No NA NA 5° H44-500100 -1415 -62C02* 26.67 mm (1.050” sq.) 3.81 mm (0.150”) 9 No NA NA 5° H44-1050 -1415 -62C02* -66C02 27.08 mm (1.066” sq.) 1.02 mm (0.040”) 9 No NA NA 5° H44-106 -1403L -62C02* -66C02 38.10 mm × 25.40 mm (1.500” × 1.000”) 3.30 mm (0.130”) 6 No NA NA 5° H44-100150 -1415 -62C02* 39.37 mm (1.550” sq.) 2.79 mm (0.110”) 4 No NA NA 5° H44-1550 -1415 68.28 mm × 26.97 mm (2.688” × 1.062”) 1.02 mm (0.040”) 3 No NA NA 5° H44-106269 -1415 -62C02* Section 3: H44 Series (4”) Trays 18.80 mm (0.740” sq.) *Pocket size may differ slightly from dimensions shown. ENTEGRIS, INC. 38 BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Specialized CSP Products H44-TV46 Series Trays • “Live bug” device orientation • Pocket size: 6.35 mm × 8.13 mm (0.250˝ × 0.320˝ ) • Pocket depth: 2.03 mm (0.080˝) • Capacity: 80 Specialized CSP Products Part Number Material Pocket Style Flippable Compatible Covers H44-TV46-01-66C02 ChipSentry, STAT-PRO 500 Standard bump contact No H44-TV46-03-66C02 H44-TV46-04-66C02 H44-TV46-02-66C02 ChipSentry STAT-PRO 500 Perimeter support shelf prevents bump contact No H44-TV46-03-66C02 H44-TV46-04-66C02 H44-TV46-05-66C02 ChipSentry STAT-PRO 500 Perimeter support shelf prevents bump contact Stacked trays can be Tray on tray stacking only flipped to a “dead bug” position for bump application or inspection H44-TV46 Series Covers Section 3: H44 Series (4”) Specialized CSP Products • Compatible trays: H44-TV46-01-66C02 and H44-TV46-02-66C02 Part Number Material Special Features H44-TV46-03-66C02 ChipSentry STAT-PRO 500 Incorporates hold down features to minimize vertical (z direction) device movement H44-TV46-04-66C02 ChipSentry STAT-PRO 500 Tray and cover can be flipped to a “dead bug” position for bump application or inspection H44-328506 Tray • “Live bug” device orientation • Pocket size: 8.33 mm × 12.85 mm (0.328˝ × 0.506˝ ) • Pocket depth: 1.88 mm (0.074˝) • Capacity: 48 Part Number Material Pocket Style Flippable Compatible Covers H44-328506-66C02 ChipSentry STAT-PRO 500 Standard bump contact No Standard H44 covers 39 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Covers Ordering Information Popular tray covers in various standard materials are shown in this catalog. The following ordering policies apply: • Minimum order quantity 200 pieces; thereafter in quantities of 50 pieces. • Delivery from stock or four weeks after receipt of order. Note: STAT-PRO 150 material covers are recommended for use only with STAT-PRO 150 material trays. H44-02C COVER H44-02 COVER • Standard cover 1.78 mm (0.070”) • High clearance cover Part Number Material H44-02-1201 Amber styrene H44-02-1216 Clear styrene H44-02-1415 Natural ABS H44-02-5413 Transparent, A/S Bayon PMMA H44-02-62C02 STAT-PRO 150 H44-02-66C02 ChipSentry, STAT-PRO 500 H44-02-74D10 Tan STAT-PRO 400 Part Number Material H44-02C-1415 Natural ABS H44-02C-62C02 STAT-PRO 150 H44-02C-66C02 ChipSentry, STAT-PRO 500 H44-02-15 COVER • High clearance cover 0.38 mm (0.015”) Material H44-02-15-74D10 Tan STAT-PRO 400 Section 3: H44 Series (4”) Covers Part Number H44-02-RM COVER • Cover with rib matrix typically found on tray bottom H44-02A COVER 0.254 mm (0.010”) • High clearance cover Part Number Material H44-02-RM-66C02 ChipSentry, STAT-PRO 500 Part Number Material H44-02A-1415 Natural ABS H44-02A-62C02 STAT-PRO 150 H44-02A-66C02 ChipSentry, STAT-PRO 500 H44-02A-5413 Bayon™ PMMA Transparent, A/S H44-02B COVER • High clearance cover 2.03 mm (0.080”) Part Number Material H44-02B-1216 Clear styrene H44-02B-62C02 STAT-PRO 150 H44-02B-66C02 ChipSentry, STAT-PRO 500 H44-02LR COVER 4.064 mm (0.160”) • Tray outline cover 2.54 mm (0.10”) Part Number Material H44-02LR-66C02 ChipSentry, STAT-PRO 500 Use with H44-041LR clip and H44-041 clip ENTEGRIS, INC. 40 BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Accessories Antistatic Tray Inserts • Nest between H44 trays and/or covers • Sold in packages of 500 pieces • Precut to tray size • Minimum order quantity: 1 package Part Number Inserts Material Static Decay Time (seconds) Surface Resistivity (ohm/square) to 1012 Color Thickness White 0.13 mm to 0.18 mm (0.005” to 0.007”) H44-001D ChipGuard 2000 TYVEK 1.5 to 2.0 1011 H44-001-0713* ChipGuard 4000 Polyethylene 1.5 to 2.0 1011 to 1012 Pink 0.08 mm to 0.13 mm (0.003” to 0.005”) H44-001B Nonantistatic rice paper inserts Paper NA NA White 0.05 mm to 0.10 mm (0.002” to 0.004”) * Packaged with tan separator sheets between inserts. Please discard separator sheets. Section 3: H44 Series (4”) Accessories Pair of Clips – Tray and Cover • Interlocking tabs press on the center of the tray for secure contact between tray and cover • Sold by the pair • Capacity: one tray and one cover only • Minimum order quantity: 50 Part Number Material H44-04-0615 Natural polypropylene H44-04-61C02 STAT-PRO 100 Pair of Clips – Two Trays • Interlocking tabs press on the center of the tray for secure contact between trays or tray and H44-02LR cover • Sold by the pair • Capacity: two trays only • Minimum order quantity: 50 Part Number Material H44-041-0615 Natural polypropylene H44-041-61C02 STAT-PRO 100 41 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Pair of Clips – Six Trays, One Cover • Interlocking tabs press on the center of the tray for secure contact between the trays • Sold by the pair • Capacity: six trays and one cover only • Minimum order quantity: 50 Part Number Material H44-04B-0615 Natural polypropylene H44-04B-61C02 STAT-PRO 100 Wash Tray Clip • Holds two trays • A189-50-18 carrier holds five H44-042 clips • Minimum order quantity: 50 Part Number Material H44-042-0315 ETFE H44-042-0603 Blue polypropylene Section 3: H44 Series (4”) Accessories Carrier • Holds five H44-042 clips • Compatible handle: A058-050-0515 • Compatible box: E94-50-101-1403 • A189-50-18-0715 not recommended for use with shallow pocket chip trays • Minimum order quantity: 1 Part Number Material A189-50-18-0715 High density polyethylene A189-50-18-0515 PVDF Storage/Transport Clip • Holds two trays or H44-02LR cover and one tray • Clip is not recommended for use with trays made of STAT-PRO 150 material • Minimum order quantity: 50 Part Number Material H44-041LR-61C02 STAT-PRO 100 ENTEGRIS, INC. 42 BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Jig Tray • Patented JEDEC thick profile jig tray • Holds three H44 or P44 trays • Maximum temperature: 180°C • Order in multiples of five trays • Minimum order quantity: 5 Material P44-JIG-101-4 Carbon fiber-filled PES Section 3: H44 Series (4”) Accessories Part Number 43 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Section 4: Additional Products Film Frame Shippers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45 Horizontal Wafer Shippers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45 Other Related Products . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45 For assistance with your specific product and application issues, contact your Entegris Regional Customer Service Center listed on the ”Customer Service” page of our website at www.entegris.com Section 4: Additional Products ENTEGRIS, INC. 44 BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Additional Products Entegris offers a variety of additional products for test, assembly and packaging applications. Film Frame Shippers E400 film frame shippers provide a safe and effective method to ship and store wafers attached to film frames. The shippers are a great way to ship diced and thinned wafers (Si, GaAs, GaN, SiC, etc.) to contract assembly houses on the other side of the world. Shippers are available for 150 mm to 300 mm wafers. Horizontal Wafer Shippers Entegris horizontal wafer shippers offer secure protection for processing, storage and shipping of 150 mm to 300 mm finished wafers. The shippers protect full thickness or thinned wafers from both physical and electrostatic discharge damage. Offered with secondary packaging and recycling services. Other Related Products Entegris continues to offer select specialty products including labware, tweezers, wafer baskets and small custom carriers and handles. Entegris also offers single and multiple wafer shippers. Section Section4: 4:H44 Additional Series Products (4”) Trays For more information on any of these products or any other Entegris products contact your local Entegris sales representative or visit www.entegris.com. 45 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Section 5: Technical Information Section 5: Technical Information Online Assistance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47 Entegris Regional Customer Service Centers . . . . . . . . . . . . . . . . . . . . . . 47 DeviceCare Services . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47 Technical Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47 Material Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48 Materials for Tray Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48 Materials for Accessory Products . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48 Chemical/Material Reference Chart . . . . . . . . . . . . . . . . . . . . . . . . . 49 Fax It Form for Custom Trays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50 Index by Part Number . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51 Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52 Material Color Chart . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53 For assistance with your specific product and application issues, contact your Entegris Regional Customer Service Center listed on the ”Customer Service” page of our website at www.entegris.com ENTEGRIS, INC. 46 Section 5: Technical Information BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Online Assistance Technical Service Visit www.devicecare.com to find our online selection tool and more: Entegris offers a complete package of products, services and support for the test, assembly and packaging industry. Whether you need assistance in selecting products, require detailed material information, want assistance with product recycling or have application specific questions, you can count on Entegris to be your resource. Tray Wizard. Search from our database of over 5,000 different and exciting H20 series (2˝ square) and H44 series (4˝ square) trays to fit your specific application. Accessories. Select from a variety of complementary accessory items such as covers, clips, inserts and storage boxes that make shipping your die easy and convenient. Tray Material Technical Data. View technical data for materials used in our bare die/CSP trays. i-Tray™ Designer. Interactive, online design tool for your custom tray application. A product drawing and quotation are generated online and can be purchased online or e-mailed to your purchasing group for ordering. Custom Tray Form. Electronic form for requesting your custom tray needs. Request is submitted to factory for quote. Entegris has technical service personnel ready to assist you with your questions and concerns about Entegris products and your specific applications. Our Product Test Lab and Materials Test Lab, made up of experienced technicians, chemists and engineers, has the equipment and analytical tools to answer your questions related to Entegris products. And, our technical service representatives are available to answer any questions you may have regarding our products in your process. Technical information to answer some of your common questions is provided on the following pages. For assistance with your specific product and applications issues, contact your Regional Customer Service Center by visiting www.entegris.com. For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit www.entegris.com and select the “Customer Service” link for the center nearest you. DeviceCare Services Entegris is with you every step of the way, providing customized service offerings designed to minimize your risk, maximize your productivity and reduce your cost. Individualized programs address your requirements for certified reuse and recycling, logistics management, product cleaning and other related issues. Services are provided via Entegris regional service centers or on-site in your facility. To initiate a service program, contact your Regional Customer Service Center. 47 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Section 5: Material Information MATERIAL INFORMATION Material Code Description Color Static Protective Surface Resistivity (ohms/sq.) Static Decay Dimensional Time (sec.) Stability Chemical Resistance Temp Limit For Applications Requiring ChipSentry, STAT-PRO 500 -66C02 Polycarbonate with carbon powder Black Yes 103 - 106 <0.01 Excellent Poor 70°C Static protection and dimensional stability STAT-PRO 400 -74DXX Alloy of ABS and an intrinsically dissipative polymer Various Yes 109 - 1011 <0.5 Good Poor 70°C Static protection dimensional stability and a colorable background ABS -14XX Acrylonitrile Various butadiene styrene with a color additive No – – Good Poor 70°C Dimensional stability, not static protection STAT-PRO 150 -62C02 Polypropylene with carbon powder and glass bead Yes 102 - 105 <0.01 Fair Good 70°C Static protection not high dimensional stability Black MATERIALS FOR ACCESSORY PRODUCTS Material Code Description Color Static Protective Surface Resistivity (ohms/sq.) Static Decay Time (sec.) Dimensional Stability Chemical Resistance Temp Limit STAT-PRO 100 -61C02 Polypropylene with carbon powder Black Yes 103 - 106 <0.01 — — 70°C STAT-PRO 125 -67C02 Polypropylene with carbon powder Black Yes 109 - 1014 <0.01 — — 70°C Bayon™ -5413 Antistatic polymethylmethalate Transparent Yes 1013 0.01 — — 70°C Polypropylene -0615 Natural polypropylene Transparent No — — — — 70°C UV polypropylene -0609 UV blocking polypropylene Semitransparent No — — — — 70°C Polystyrene -1216 Polystyrene Clear No — — — — 70°C ETFE -0315 Ethylene tetrafluoroethylene Natural No — — Fair Very good 100°C ENTEGRIS, INC. 48 Section 5: Material Information BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING CHEMICAL/MATERIAL REFERENCE CHART (SEE NOTE BELOW) CHEMICALS MATERIALS ChipSentry, STAT-PRO 500 Polypropylene STAT-PRO 125 20°C STAT-PRO 100, STAT-PRO 150 65°C ABS STAT-PRO 400 20°C Polystyrene 20°C ETFE 20°C — NO — — OK — NO OK OK — NO OK NO OK NO OK OK OK NO OK NO NO NO NO NO NO NO OK NO OK — — NO NO NO NO NO NO NO — NO NO — NO NO NO — NO NO — OK OK NO NO OK OK OK OK OK OK NO OK NO NO OK OK OK OK OK NO OK OK OK OK OK — NO NO NO OK OK OK OK OK NO NO NO NO NO — — NO — OK OK NO OK — OK NO NO — NO — — NO NO OK OK NO OK NO NO — OK — OK OK OK OK NO OK OK OK NO OK NO NO OK OK — NO NO OK NO NO — OK — — — — — NO OK OK OK NO — NO NO NO NO NO NO — NO NO NO — NO — NO OK NO NO — OK NO NO — NO NO — NO NO NO NO NO NO NO NO NO NO NO — — — — OK — NO NO NO — NO NO NO NO — NO OK OK NO OK — — — OK OK OK OK — — — NO OK OK OK NO — — ACIDS Aqua Regia chromic (50%) fuming nitric glacial acetic hydrochloric (conc) hydrofluoric (40%) nitric (50%) phosphoric sulfuric (conc) trichloroacetic BASES ammonium hydroxide hydrogen peroxide potassium hydroxide sodium hydroxide SOLVENTS acetone aniline benzaldehyde benzyl alcohol carbon tetrachloride cyclohexanone dimethylphthalate ethyl alcohol ethylenediamine Freon® TE Freon TF, 113 Freon TMC Freon TMS isooctane isopropanol methyl alcohol methyl ethyl ketone methylene chloride NMP perchloroethylene tetrahydrofuran toluene trichloroethylene OK: NO: — Note: 49 Material and chemical are compatible Chemical has at least some effect on material No data available All data is taken from information supplied by material manufacturers. Entegris, Inc. is not responsible for the accuracy of this data and disclaims any obligation or liability in connection with its use in buyer’s applications. Contact Entegris if questions concerning applications arise. ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Section 5: Fax it Form Fax It Form for Custom Trays TO: TECHNICAL SERVICE REPRESENTATIVES This form can be photocopied and used to request information on a custom designed tray to meet your exact requirements. Engineering charges and minimum order quantities apply. Please visit www.entegris.com and select the ”Customer Service” link for the center nearest you. From Name ____________________________________________________________________________________________ Company __________________________________________________________________________________________ Street ____________________________________________________________________________________________ City ______________________________________________________ State ________________________________ Country ____________________________________________________ ZIP Code ____________________________ Phone ____________________________________________________________________________________________ Fax ______________________________________________________________________________________________ X X×Y Draft Depth Z Y X1 × Y1 Notes Y1 ____________________________________________________ ____________________________________________________ ____________________________________________________ X1 Tray Series Component Size ____________________________________________________ Pocket Size Material ___ H20 (2” × 2”) X ______________ X ____________ ____ ABS, Color ________________________ ___ H44 (4” × 4”) Y ______________ Y ____________ ____ STAT-PRO 150 black conductive polypropylene Application Thickness ______________ Depth __________ ___ Bare die ___ CSP, bumped die (please send device drawing) EDM Finish Yes No drawing Bump/ball contact OK? Pocket Array Yes No Tray flippability required? Yes No ENTEGRIS, INC. (subject to moldability) ___ × ___ Pockets or _____ Best Fit ____ Tray/cover stacking only ____ Tray/tray stacking only Wash Holes Yes No X1 ____________ Y1 ____________ ____ ChipSentry, STAT-PRO 500 black conductive polycarbonate ____ STAT-PRO 400 colorable static dissipative color ____________________ ____ Natural ETFE Tray Quantity ________________________ Minimum Order: H20 series – 2,000 H44 series – 1,000 50 Section 5: Index by Part Number BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Index by Part Number 01-004611 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 01-007244 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 A018 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 A027 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 A110 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 A189 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 CT3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30 E28 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 H02 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 H20 trays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21 H20 covers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22-23 H20-001 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 H20-002LB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 H20-03 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 H20-04 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25 H20-041 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25 H20-042 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 H20-043 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25 H20-04B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 H20-JIG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 H20-SB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25-26 H20T . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 H44 trays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34-40 H44 covers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 H44-001 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42 H44-04 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42 H44-041 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42-43 H44-042 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 H44-04B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 H44-TV46 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 PA018 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 PA027 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 P44-JIG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 51 ENTEGRIS, INC. BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING GENERAL LIMITED WARRANTY FOR NON-CUSTOM ENTEGRIS PRODUCTS Subject to the limitations and disclaimers set forth below, Entegris, Inc. (“Entegris”) warrants that for the Applicable Warranty Period (as defined in the section entitled “Applicable Warranty Period” below) following the date of shipment, the products manufactured by it shall be free of defects in materials and workmanship when installed, used, serviced and operated in accordance with the applicable product documentation. The Applicable Warranty Period does not apply to any lifetime performance. In the event that a product failure is caused by a defect in materials or workmanship within the Applicable Warranty Period, Entegris agrees to repair or replace, at its option and at no charge to the purchaser, any product or part thereof that proves to have such a defect, provided that prompt written notice of any such defect is given to Entegris. Entegris’ agreement to repair or replace any product found to be defective in materials or workmanship is the exclusive remedy provided herein; this remedy shall not be deemed to have failed of its essential purpose so long as Entegris is willing and able to repair or replace any such defective Entegris product or part or to refund the purchase price paid. Limitations The warranty set forth above is LIMITED and does not cover: (A) products with the identification label or serial number altered or removed; (B) products which have been repaired, or tampered with or serviced by any person other than an authorized Entegris service representative; (C) products which have been subjected to misuse, neglect or abuse (including, without limitation, exposure to overpressure, use with excessive voltage or inappropriate power source or exposure to hostile operating conditions unless the product has been expressly specified by Entegris for use therein). In the case of Entegris products which are systems that include components manufactured by companies other than Entegris or its affiliates, the foregoing warranty shall apply only to those components and subassemblies manufactured by Entegris or its affiliates; the non-Entegris components and subassemblies included in such systems are covered by the warranty, if any, extended by the manufacturer thereof. Entegris hereby assigns any such warranty to the system purchaser. Disclaimers ENTEGRIS MAKES NO OTHER WARRANTY, EXPRESSED OR IMPLIED. THERE IS NO WARRANTY OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE. THE APPLICABLE WARRANTY PERIOD IS NOT A LIFETIME PERFORMANCE WARRANTY. The warranty provided herein and the data, specifications and descriptions of Entegris products appearing in Entegris’ published catalogs and product literature may not be altered except by express written agreement signed by an officer of Entegris. Representations, oral or written, which are inconsistent with this general limited warranty or any such publications are not authorized and if given, should not be relied upon. Notwithstanding the failure of any remedy provided herein, in no event shall Entegris be liable for consequential, incidental, special or any other indirect damages resulting from economic loss or property damage sustained by any customer from the use of Entegris products. In the event of a breach of the foregoing warranty, Entegris’ sole obligation shall be to repair or replace, at its option, any product or part thereof that proves defective in materials or workmanship within the warranty period, provided the customer notifies Entegris promptly of any such defect. The exclusive remedy provided herein shall not be deemed to have failed of its essential purpose so Entegris product or part or to refund the purchase price paid. Applicable Warranty Period As used in this General Limited Warranty the term Applicable Warranty Period for the indicated product groups are as follows: Entegris Products Warranty Period Entegris Product Codes Polymeric membrane products Exceptions: Does not apply to membrane-based purifiers Metal membrane products Exceptions: Nickel membrane gas filtration products Exceptions: Nickel membrane gas diffuser products 1 year from date of shipment H4, H5, M4, M6 Polymeric membrane-based purifiers / Other liquid purifiers/ Gas purifiers / Chemical filters Dispense products and liquid subsystems Exceptions: Products and subsystems purchased by Original Equipment Manufacturers (OEM) 1 year from date of shipment I7, I8, F1, F2, F4 1 year from date of shipment H6 18 months from date of shipment H6 2 years from date of shipment 12 5 years or 100,000 cycles 12 (whichever comes first) from date of shipment 5 years or 100,000 cycles 15 (whichever comes first) from date of shipment Entegris Product Codes Entegris Products Warranty Period Non-dispense electromechanical products 1 year from date of shipment — Integrated shipping systems products 30 days from date of shipment — Wafer handling, electronic packaging products and cleaning systems 90 days from date of shipment — Liquid fittings, containers and housings 1 year from date of shipment — 18 months from date of shipment — 90 days from date of shipment 1 year from date of shipment 1 year from date of shipment — Exceptions: Sheetlined chemical container products and FluoroPure® PFA Liners (blistering, cracking or leakage only) Exceptions: FluoroPure® o-rings and gasket materials Software Products Other Products — — CUSTOM ORDER LIMITED WARRANTY FOR ENTEGRIS PRODUCTS Entegris, Inc. warrants Custom Order products against defects in materials and workmanship for a period of thirty (30) days following receipt by the purchaser. Entegris’ sole obligation shall be to repair or replace, at its option, any Custom Order product that proves to be defective in materials or workmanship within the warranty period. Disclaimers ENTEGRIS MAKES NO OTHER WARRANTY, EXPRESSED OR IMPLIED. THERE IS NO WARRANTY OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE. THE APPLICABLE WARRANTY PERIOD IS NOT A LIFETIME PERFORMANCE WARRANTY. The warranty provided herein and the data, specifications and descriptions of Entegris products appearing in Entegris’ published catalogs and product literature may not be altered except by express written agreement signed by an officer of Entegris. Representations, oral or written, which are inconsistent with this general limited warranty or any such publications are not authorized and if given, should not be relied upon. Notwithstanding the failure of any remedy provided herein, in no event shall Entegris be liable for consequential, incidental, special or any other indirect damages resulting from economic loss or property damage sustained by any customer from the use of Entegris products. In the event of a breach of the foregoing warranty, Entegris’ sole obligation shall be to repair or replace, at its option, any product or part thereof that proves defective in materials or workmanship within the warranty period, provided the customer notifies Entegris promptly of any such defect. The exclusive remedy provided herein shall not be deemed to have failed of its essential purpose so long as Entegris is willing and able to repair or replace any nonconforming Entegris product or part or to refund the purchase price paid. ENTEGRIS, INC. 52 Section 5: Warranty Entegris Standard Warranties Section 5: Material Color Chart BARE DIE, CHIP SCALE AND WAFER SCALE PACKAGE HANDLING Material Color Chart Color Options Color Code Tray Color Color Code Tray Color 01 Amber 08 Gray 02 Black 09 Orange 03 Blue 10 Tan 03L Light Blue 11 Pink 04 Red 12 White 05 Light Green 15 Natural 05D Dark Green 21 Purple 06 Brown 26 Maroon 07 Yellow Note: Color options are subject to availability at the time of order inquiry. 53 ENTEGRIS, INC. ENTEGRIS, INC. Corporate Headquarters 3500 Lyman Boulevard Chaska, Minnesota 55318 USA Customer Service Tel. +1 763-502-0200 Toll Free 877-503-0200 Customer Service Fax +1 763-502-0300 www.entegris.com Entegris®, Silicon Delivery ®, WaferCare®, DeviceCare ®, STAT-PRO®, ChipSentry®, i-Tray™ and ChipGuard™ are trademarks of Entegris, Inc. Bayon™ is a trademark of Kreha. TYVEK® and Freon® are trademarks of E.I. du Pont de Nemours and Company. © 2002–2009 Entegris, Inc. Printed in USA 2110-5595MAX-0509