Key Semiconductor Equipment
Transcription
Key Semiconductor Equipment
Website: www.amts.com Facebook: fb.com/AMTechnicalSolutions Twitter: @AMTechSol Phone: 1.888.729.1548 Key Semiconductor Equipment 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. 11. 12. 13. 14. 15. 16. 17. 18. 19. 20. 21. 22. 23. 24. 25. 26. 27. 28. 29. 30. 31. 32. 33. 34. 35. 36. 37. Accretech/TSK UF3000 Wafer Prober Advantest T5571P Memory Tester AMAT Centura 5200 CVD AMAT Centura 5200 Etcher AMAT Centura 5200 RTP AMAT Centura Advanced Gate Stack ALD AMAT Centura Super-E Etcher AMAT Centura Ultima CVD AMAT Endura PVD AMAT Mirra CMP AMAT P-5000 Etcher AMAT Producer CVD AMAT Quantum Implanter AMAT Verity CD-SEM AMAT XR80 Ion Implanter ASML 200mm PAS 5500* Axcellis GSD 200 Ion Implanter Canon FPA-3000 Stepper Canon FPA-5000 Stepper Canon FPA-5500 Stepper Canon FPA-6000 Scanner Canon TBW-CD-83 Stepper CFM 8100 Wet Bench DNS SS-80BW-AR Wafer Scrubber Eaton 8250 Ion Implanter Ebara FREX200 CMP EG (ElectroGlas) Prober Fusion 200/Gemini Resist Cure Gasonics PEP 3510 Asher Hitachi S-8820 CD-SEM Hitachi S-9200 CD-SEM HP / Agilent 4071 Tester KLA-Tencor AIT Patterned Wafer Inspection KLA-Tencor HRP Profilometer KLA-Tencor Prometrix Thin Film Measurement KLA-Tencor SP1 / 2 Surfscan Unpatterned Wafer Inspection Lam 9600 Etcher 38. 39. 40. 41. 42. 43. 44. 45. 46. 47. 48. 49. 50. 51. 52. 53. 54. 55. 56. 57. 58. 59. 60. 61. 62. 63. 64. 65. 66. 67. 68. 69. 70. 71. 72. 73. 74. 75. Lam 2300 Exelan Etcher Lam 2300 Versys Etcher Lam 9400 Etcher Lam Alliance Etcher Lam Rainbow Etcher Lam TCP Etcher Leica INM 200 Mircroscope Steag / AST / Mattson 2800 RTP Mattson Aspen Asher Microvision MVT 7080 Wafer Sorter Muratec Murata Machinery CSS10 Stocker Nikon NSR-2005 Stepper Nikon NSR-2205 Stepper Nikon NSR-4425 Stepper Nikon NSR-S2 Stepper Nikon NSR-S3 Scanner Nikon NSR-S6 Scanner Nikon NSR-SF Stepper Nikon Optishot Microscope Nikon Optistation Wafer Inspection Nissin Electric Exceed Ion Implanter Novellus Atlus CVD Novellus Speed CVD Novellus Sequel PECVD Novellus Gamma Stripper Novellus Inova PVD Novellus Pep Iridia Asher Novellus Vector PECVD Ontrak DSS-200 Series II Wafer Scrubber PRI Automation Turbo Stocker Semitool Magnum Spray Cleaner Semitool SAT Wafer Cleaner SEZ 203 Spin Processor Speedfam Auriga CMP Speedfam IPEC 472 CMP Steag AG AWP Wet Bench SVG Thermco (Aviza) AVP-8000 Vertical Furnace SVG Thermco VTR-7000 Vertical Furnace 76. 77. 78. 79. 80. 81. 82. 83. 84. 85. 86. 87. Teradyne Catalyst Tester Therma-Wave Opti-Probe Thin Film Measurement TEL Alpha-303i Vertical Furnace TEL Alpha-8 Vertical Furnace TEL Clean Track Act 12 Double Block Coater/Developer TEL Clean Track Act 12 Single Block Coater/Developer TEL Clean Track Act 8 Double Block Coater/Developer TEL Clean Track Act 8 Single Block Coater/Developer TEL Clean Track Lithius Coater/Developer TEL Clean Track Mark VII Coater/Developer TEL Clean Track Mark VIII Coater & Developer TEL P-12 Wafer Prober 88. 89. 90. 91. 92. 93. 94. 95. 96. 97. 98. 99. 100. 101. 102. 103. TEL P-8 Wafer Prober TEL TE-5000 Etcher TEL TELiNDY Vertical Furnace TEL Telius Etcher TEL Trias CVD TEL Unity II Etcher TEL Unity IIe Etcher TEL Unity M Etcher TEL Unity Me Etcher TEL UW200Z Wet Bench Ulvac Enviro Asher Varian E220 Ion Implanter Varion Viision 80 Ion Implanter Varian Viista 80 Ion Implanter Varian Viista 810HP Ion Implanter Veeco Dimension Atomic Force Profiler *ASML - AM Technical Solutions is an Authorized Service Provider for the ASML 200mm PAS 5500 Product Line. TEL Act8 Applied Centura Website: www.amts.com Facebook: fb.com/AMTechnicalSolutions Twitter: @AMTechSol Phone: 1.888.729.1548