Key Semiconductor Equipment

Transcription

Key Semiconductor Equipment
 Website: www.amts.com Facebook: fb.com/AMTechnicalSolutions Twitter: @AMTechSol Phone: 1.888.729.1548 Key Semiconductor Equipment 1.
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Accretech/TSK UF3000 Wafer Prober
Advantest T5571P Memory Tester
AMAT Centura 5200 CVD
AMAT Centura 5200 Etcher
AMAT Centura 5200 RTP
AMAT Centura Advanced Gate Stack ALD
AMAT Centura Super-E Etcher
AMAT Centura Ultima CVD
AMAT Endura PVD
AMAT Mirra CMP
AMAT P-5000 Etcher
AMAT Producer CVD
AMAT Quantum Implanter
AMAT Verity CD-SEM
AMAT XR80 Ion Implanter
ASML 200mm PAS 5500*
Axcellis GSD 200 Ion Implanter
Canon FPA-3000 Stepper
Canon FPA-5000 Stepper
Canon FPA-5500 Stepper
Canon FPA-6000 Scanner
Canon TBW-CD-83 Stepper
CFM 8100 Wet Bench
DNS SS-80BW-AR Wafer Scrubber
Eaton 8250 Ion Implanter
Ebara FREX200 CMP
EG (ElectroGlas) Prober
Fusion 200/Gemini Resist Cure
Gasonics PEP 3510 Asher
Hitachi S-8820 CD-SEM
Hitachi S-9200 CD-SEM
HP / Agilent 4071 Tester
KLA-Tencor AIT Patterned Wafer Inspection
KLA-Tencor HRP Profilometer
KLA-Tencor Prometrix Thin Film
Measurement
KLA-Tencor SP1 / 2 Surfscan Unpatterned
Wafer Inspection
Lam 9600 Etcher
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Lam 2300 Exelan Etcher
Lam 2300 Versys Etcher
Lam 9400 Etcher
Lam Alliance Etcher
Lam Rainbow Etcher
Lam TCP Etcher
Leica INM 200 Mircroscope
Steag / AST / Mattson 2800 RTP
Mattson Aspen Asher
Microvision MVT 7080 Wafer Sorter
Muratec Murata Machinery CSS10 Stocker
Nikon NSR-2005 Stepper
Nikon NSR-2205 Stepper
Nikon NSR-4425 Stepper
Nikon NSR-S2 Stepper
Nikon NSR-S3 Scanner
Nikon NSR-S6 Scanner
Nikon NSR-SF Stepper
Nikon Optishot Microscope
Nikon Optistation Wafer Inspection
Nissin Electric Exceed Ion Implanter
Novellus Atlus CVD
Novellus Speed CVD
Novellus Sequel PECVD
Novellus Gamma Stripper
Novellus Inova PVD
Novellus Pep Iridia Asher
Novellus Vector PECVD
Ontrak DSS-200 Series II Wafer Scrubber
PRI Automation Turbo Stocker
Semitool Magnum Spray Cleaner
Semitool SAT Wafer Cleaner
SEZ 203 Spin Processor
Speedfam Auriga CMP
Speedfam IPEC 472 CMP
Steag AG AWP Wet Bench
SVG Thermco (Aviza) AVP-8000 Vertical
Furnace
SVG Thermco VTR-7000 Vertical Furnace
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Teradyne Catalyst Tester
Therma-Wave Opti-Probe Thin Film
Measurement
TEL Alpha-303i Vertical Furnace
TEL Alpha-8 Vertical Furnace
TEL Clean Track Act 12 Double Block
Coater/Developer
TEL Clean Track Act 12 Single Block
Coater/Developer
TEL Clean Track Act 8 Double Block
Coater/Developer
TEL Clean Track Act 8 Single Block
Coater/Developer
TEL Clean Track Lithius Coater/Developer
TEL Clean Track Mark VII Coater/Developer
TEL Clean Track Mark VIII Coater &
Developer
TEL P-12 Wafer Prober
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TEL P-8 Wafer Prober
TEL TE-5000 Etcher
TEL TELiNDY Vertical Furnace
TEL Telius Etcher
TEL Trias CVD
TEL Unity II Etcher
TEL Unity IIe Etcher
TEL Unity M Etcher
TEL Unity Me Etcher
TEL UW200Z Wet Bench
Ulvac Enviro Asher
Varian E220 Ion Implanter
Varion Viision 80 Ion Implanter
Varian Viista 80 Ion Implanter
Varian Viista 810HP Ion Implanter
Veeco Dimension Atomic Force Profiler
*ASML - AM Technical Solutions is an Authorized Service Provider for the ASML 200mm PAS
5500 Product Line.
TEL Act8 Applied Centura Website: www.amts.com Facebook: fb.com/AMTechnicalSolutions Twitter: @AMTechSol Phone: 1.888.729.1548 

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