Thermal Properties Characterization of Advanced Materials

Transcription

Thermal Properties
Characterization of Advanced
Materials: Application to
Nanoelectronics
2011 International
Conference on
Frontiers of
Characterization and
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Stefan Dilhaire
Heterodyne Picosecond
Thermorflectance
Thermal Metrology
SThM Metrology
Laboratoire Ondes et Matière d’Aquitaine
Université Bordeaux 1 - CNRS
SThM
Tip-surface interaction
modelling
SThM vs
Thermoreflectance
Grenoble, May 23-26, 2011
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Outlook
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology at the Nanoscale
Laser temperature measurement
Simulation
Heterodyne Picosecond Thermorflectance
Thermal Metrology
SThM Metrology
Scanning Thermal Microscopy
Tip-surface interaction modelling
SThM vs Thermoreflectance
Case studies
Superlattices
Nanowires
Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Motivation : Nano Earthquakes
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
I(t).V(t)
,5+
!
p(t)
!T(x,y,t)
Thermal wave
d(x,y,t)
Thermal Metrology
Laser Metrology
Thermoelastic wave
"#$%!&'(!)*+,+-!./!,012,34!
Laser
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
!"#$%&'( "#$%&!'()!%(%&*+!),--,.'/,#(!,(!),*,/'0!0#*,12!3'4!516%7'/,1!#8!'!9'-,1!,(:%&/%&2!;6%(!/6%!0#')!1'.'1,/'(1%!!< ,-!),-16'&*%)=
C
,/-! %(%&*+! ,-! ),--,.'/%)! ,(! /6%! )&',(! #8! /6%! (>?@A! '-! )+('7,1! .#$%&! 3B" !<#$DD42! 394!@(%&*+! 1#(-E7%)! .%&! #.%&'/,#(! 3'! -,(*0%! 10#1F
.%&,#)4! 9+! '! GH>-/'*%! ,(:%&/%&! 16',(! ),-.0'+-! '! 7,(,7E7! $,/6! &%-.%1/! /#! -E..0+! :#0/'*%! -1'0,(*! IJH=!JJK2! 314!51'0,(*! #8! )+('7,1! '()
0%'F'*%!.#$%&!)%(-,/+!$,/6!LMN5!/%16(#0#*+!IOK2!P(!7#)%&(!L"Q-!/#/'0!.#$%&!),--,.'/,#(!:,'!0%'F'*%!1'(!9%!%RE'0!/#!#&!*&%'/%&!/6'(
/6%!)+('7,1!3'1/,:%4!-$,/16,(*!.#$%&2!<,(%-!-6#$!-1'0,(*!/&%()-!
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
I(t).V(t)
p(t)
!T(x,y,t)
Laser detection
d(x,y,t)
AFM detection
Fault detection
Thermal Metrology
Thermal wave
Thermoelastic wave
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
,5+
!
Position detector
"#$%!&'(!)*+,+-!./!,012,34!
Laser
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
AFM Tip
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
!"#$%&'( "#$%&!'()!%(%&*+!),--,.'/,#(!,(!),*,/'0!0#*,12!3'4!516%7'/,1!#8!'!9'-,1!,(:%&/%&2!;6%(!/6%!0#')!1'.'1,/'(1%!!< ,-!),-16'&*%)=
C
,/-! %(%&*+! ,-! ),--,.'/%)! ,(! /6%! )&',(! #8! /6%! (>?@A! '-! )+('7,1! .#$%&! 3B" !<#$DD42! 394!@(%&*+! 1#(-E7%)! .%&! #.%&'/,#(! 3'! -,(*0%! 10#1F
.%&,#)4! 9+! '! GH>-/'*%! ,(:%&/%&! 16',(! ),-.0'+-! '! 7,(,7E7! $,/6! &%-.%1/! /#! -E..0+! :#0/'*%! -1'0,(*! IJH=!JJK2! 314!51'0,(*! #8! )+('7,1! '()
0%'F'*%!.#$%&!)%(-,/+!$,/6!LMN5!/%16(#0#*+!IOK2!P(!7#)%&(!L"Q-!/#/'0!.#$%&!),--,.'/,#(!:,'!0%'F'*%!1'(!9%!%RE'0!/#!#&!*&%'/%&!/6'(
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
I(t).V(t)
p(t)
!T(x,y,t)
d(x,y,t)
Motivation
Laser detection
AFM detection
Thermal wave
,5+
!
Thermoelastic wave
Fault detection
"#$%!&'(!)*+,+-!./!,012,34! Thermal Metrology
Laser
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
Orders of Magnitude
2D Superlattices
!"#$%&'( "#$%&!'()!%(%&*+!),--,.'/,#(!,(!),*,/'0!0#*,12!3'4!516%7'/,1!#8!'!9'-,1!,(:%&/%&2!;6%(!/6%!0#')!1'.'1,/'(1%!!< ,-!),-16'&*%)= 1D Nano wires
C
,/-! %(%&*+! ,-! ),--,.'/%)! ,(! /6%! )&',(! #8! /6%! (>?@A! '-! )+('7,1! .#$%&! 3B" !<#$DD42! 394!@(%&*+! 1#(-E7%)! .%&! #.%&'/,#(! 3'! -,(*0%! 10#1F 0D Nano Dots
.%&,#)4! 9+! '! GH>-/'*%! ,(:%&/%&! 16',(! ),-.0'+-! '! 7,(,7E7! $,/6! &%-.%1/! /#! -E..0+! :#0/'*%! -1'0,(*! IJH=!JJK2! 314!51'0,(*! #8! )+('7,1! '()
0%'F'*%!.#$%&!)%(-,/+!$,/6!LMN5!/%16(#0#*+!IOK2!P(!7#)%&(!L"Q-!/#/'0!.#$%&!),--,.'/,#(!:,'!0%'F'*%!1'(!9%!%RE'0!/#!#&!*&%'/%&!/6'(Acknowledgements
/6%!)+('7,1!3'1/,:%4!-$,/16,(*!.#$%&2!<,(%-!-6#$!-1'0,(*!/&%()-!
Temperature elevation : ∆T = 1K
Heat Source Thickness : e = 100nm
Expansion coefficient : α = 10−6
(>%?;E%87$<(! B'E%8'! '976'$;J! I7?(;=! ;>'! 'XG?'((7%$!
678'$(7%$(! #$6! 9%:;#<'=! ;>'! ?%:'! %@! (ABC;>?'(>%:6!
Surface expansion : α.e.∆T = 100fm
H#(!6'?79'6!@%?!;>?''C678'$(7%$#:!67@@A(79'!;?#$(G%?;!
:'#D#<'!>#(!B'E%8'!7$E?'#(7$<:F!78G%?;#$;=!#(!(>%H$!
#E?%((! #$! '$'?<F! B#??7'?=! H>'?'#(! 8%(;! $#$%(E#:'!
BF! ;>'! ;?'$6(! 7$! I7<(J!*)B-! #$6! *)E-J! K>7(! 7(! 6A'! ;%! #!
Motivation : Fault Detection in ICs
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Motivation : Fault Detection in ICs
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
6
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Motivation : Temperature Measurement
Stefan Dilhaire
Temperature (K)
Motivation
150
Laser detection
AFM detection
Fault detection
Thermal Metrology
100
Laser Metrology
Laser temperature
measurement
50
Simulation
Thermorflectance
Thermal Metrology
0
0.2
0
0.4
0.6
Time (ms)
0.8
1
SThM Metrology
SThM
modelling
150
Temperature (K)
150
!C
Al
100
Temperature (K)
100
200
300
Time(ns)
400
0
0
2
4
6
Time (µs)
SThM vs
Thermoreflectance
Case studies
#
2D Superlattices
1D Nano wires
"
SiO
2
50
0
"
Si
140
100
50
0
145
Temperature (K)
135
0D Nano Dots
Acknowledgements
130
8
10
1
10
100
Time (µs)
1000
Motivation : Material Thermal Properties
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
Alloy limit
AFM detection
Fault detection
Thermal Metrology
low k
high k
Nano-heterostructures Nano
wires
Super-lattices
Laser Metrology
Laser temperature
measurement
Bulk Materials
Nanotubes
Simulation
Thermorflectance
Thermal Metrology
Phonon
filtering
Coherent diffusion
Diffraction
Diffusion
Guiding,
ballistic transport
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Decrease thermal conductivity of
electrical conductors through
nanostructuring
Increase thermal conductivity of
insulators with novel nanoparticles
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Motivation : Time and Space scales
Stefan Dilhaire
Motivation
Laser detection
AFM detection
acoustic and thermal time of flight
Fault detection
Thermal Metrology
Laser Metrology
1ks
Laser temperature
measurement
1s
ts=20min
1ms
1!s
Thermorflectance
Thermal Metrology
SThM Metrology
20ns
SThM
modelling
1ns
1ps
Simulation
SThM vs
Thermoreflectance
1ps
Case studies
1fs
2D Superlattices
0,1nm 1nm
1!m
Caracteristic length (R)
1mm
1m
1D Nano wires
0D Nano Dots
Acknowledgements
D=5 10-6 m2/s
vs=8nm/ps
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Pump-Probe Laser Metrology at the Nanoscale
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Thermoreflectance Principle
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
!I
I0
!R
R0
Laser detection
Calibration : determination of
!
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
! I !R
= ".!T
=
I0 R 0
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
!T
Reflectance measurement
Temperature measurement
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Thermo Acoustic effects in thin films
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Picosecond Optical Sampling
Stefan Dilhaire
∆T (∼ 10
(a)
−13
Motivation
s)
Laser detection
TP
AFM detection
Fault detection
Thermal Metrology
(b)
Laser Metrology
TS = TP + ∆T
Laser temperature
measurement
Simulation
Thermorflectance
(c)
Thermal Metrology
TP (∼ 10−8 s)
SThM Metrology
SThM
modelling
(d)
τd
SThM vs
Thermoreflectance
TS (∼ 10−8 s)
Case studies
2D Superlattices
1D Nano wires
(e)
0D Nano Dots
Ttr =
1
(∼ 10−3 s)
∆F
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Experimental set-up
Stefan Dilhaire
Nd: YAG 532nm
Motivation
Laser detection
AFM detection
Ti: Sapphire laser
100fs, F=76.0006MHz, !1
Pump beam
Fault detection
Thermal Metrology
Laser Metrology
Ti: Sapphire laser
100fs, FS=76MHz, !2
Probe beam
Acousto-optic
Modulator (fm)
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
Signal
Photodiode
Sample
Beam splitter
modelling
SThM vs
Thermoreflectance
Case studies
Beam splitter
Microscope objective
Synchro
Photodiode
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Typical Signal
Stefan Dilhaire
∆R(t)
R
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Time (ps)
Is the notion of temperature still valid ?
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Pump laser beam
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
e-
Laser Metrology
Aluminum transducer
Laser temperature
measurement
Simulation
Thermorflectance
Al phonon
bath
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Material of interest
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Is the notion of temperature still valid ?
Stefan Dilhaire
450
Motivation
400
Laser detection
AFM detection
Fault detection
350
Thermal Metrology
Laser Metrology
300
Laser temperature
measurement
Simulation
250
Thermorflectance
Fourier
Law
200
Thermal Metrology
SThM Metrology
150
SThM
modelling
100
SThM vs
Thermoreflectance
50
Case studies
2D Superlattices
1D Nano wires
0
0
0D Nano Dots
100
200
300
400
500
600
Time (fs)
700
800
900
1000
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Thermal Model
G(r).! (t)
Stefan Dilhaire
# r2 &
!tr = Q exp % " 2 ( ) (t)
$ r0 '
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
etr
Optical penetration depth
Al transducer
Laser Metrology
Laser temperature
measurement
eAl
Simulation
Thermorflectance
Thermal Metrology
Layer 1
d
SThM Metrology
SThM
modelling
Semi-infinite substrate
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
!tr = f ("tr ,thermal paramters)
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Parameter identification
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Sexp
laser
pulses
Thermal Metrology
Laser Metrology
Thermal system
!
+
Thermal model
Laser temperature
measurement
Optimization
algorithm
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
Scalculated
modelling
SThM vs
Thermoreflectance
[Parameter vector]
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Parameter identification
Sexp
laser
pulses
Stefan Dilhaire
Thermal system
!
+
Thermal model
Motivation
Optimization
algorithm
Laser detection
AFM detection
Scalculated
Fault detection
Thermal Metrology
[Parameter vector]
!
Measured thermal decay
Laser Metrology
Laser temperature
measurement
Simulation
Residual signal
Thermorflectance
+1%
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
-1%
0D Nano Dots
Acknowledgements
0
4000
8000
Time (ps)
12 000
0
4000
8000
Time (ps)
12 000
!
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
"Pump-Probe" Near Field Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
When the Tip heat and probe the
temperature : 3ω Technique
Stefan Dilhaire
Motivation
Laser detection
AFM detection
I ~ 1!
Joule Effect
I2 ~ T ~ 2!
Thermal effect
R ~ T ~ 2!
Ohm’s Law
V~ IR ~3!
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
Flux de chaleur
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Thermal Tips
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Tip-Surface Interactions
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Frequency Response
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
! experience
- model
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Thermal Lateral Resolution
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
SThM vs Thermoreflectance
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Performances SThM
Laser detection
AFM detection
Fault detection
Temperature sensitivity 100µK
Thermal Lateral resolution 100nm
Topographic Lateral resolution 10nm
Time resolution 10 ∼ 100µs
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
Performances Picosecond Thermoreflectance
Temperature sensitivity 100µK
Thermal Lateral resolution 1µm
Time resolution 100fs
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Case studies : Super Lattices
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Superlattices
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
4 nm
8 nm
SiGe
Si
Super-Lattice Si/Si0.4Ge0.6
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Nano Ultrasonics on Superlattices
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
Laser
Metal
Cap layer
modelling
Super lattice
Buffer layers
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
Time (ps)
0D Nano Dots
Acknowledgements
Mini Brillouin Zones
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Phonon Reflexion Rate
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Zoom on Thermoreflectance Signal
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Dispersion Curves
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Thermal Conductivity
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Thermal Conductivity from microscopic point of view
P R
∂n
k = 8πh 3
dk 3
ω vg2 τ ∂T
j =1...3
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
with
SThM Metrology
vg2 =
dω
dk
group velovity obtained from the Dispersion Curve
τ relaxation time
∂n
derivative of the distribution function with respect to temperature
∂T
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Thermal Conductivity
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Identified
parameters
Values
Al Thermal
conductivity
W/m-K
235
Contact
resistance Al/
SL
Km2/W
6.1 10-9
SL Thermal
conductivity
W/m-K
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
2.6
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Case studies : Nano Wires
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Silicon Nano Wires
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Silicon Nano Wires
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Silicon Nano Wires
Stefan Dilhaire
Thermal Image (V3!)
Topographic Image
Motivation
Laser detection
AFM detection
30nm
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
0nm
SThM
modelling
SThM vs
Thermoreflectance
5µm
5µm
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Nano Wire Methodology
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Heat Flux
!T2"
RContact
RIntrinsèque
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
RConstriction
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Nano Wire Methodology : Contact Resistance
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
!T2"
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Heat Flux
RContact
Simulation
Thermorflectance
Thermal Metrology
RConstriction
Si
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
Nano Wire Methodology : Identification
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
(Req – Rconstriction ) (K/W)
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
L/S (m-1)
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Case studies : Nano Dots
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Nano Silicon
Stefan Dilhaire
Motivation
a
Laser detection
b
AFM detection
4
or
10
«Precise control of thermal conductivity
at the nanoscale via individual phonon
scattering barriers»
Nature Materials (2010)
Si spacer
t = 3, 6, 9, 12 nm
L
100 nm Si buffer
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
p-Si(001)
Thermorflectance
10 nm
Thermal Metrology
c
d
SThM Metrology
SThM
3D view of an STM image (scale
56x32x3 nm3) of a Ge hut cluster.
100 nm
[100]
Height (nm) -1
3 nm
Coll.
Institute for Integrative Nanosciences, IFW Dresden,
LITEN, CEA-Grenoble, 17 rue des Martyrs, Grenoble
Fraunhofer-IPM, Heidenhostraße 8, 79110 Freiburg
Max-Planck-Institut für Festkörperforschung,Stuttgart.
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Nano Silicon
Stefan Dilhaire
4 ML Ge!
!
5 ML Ge!!
!
6 ML Ge
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
0
1.5 nm
0
2.5 nm
0
4 nm
nominal substrate temperature: 450°C
the “hut cluster” regime: islands are small, Ge rich, and have high
surface density
Case studies
2D Superlattices
1D Nano wires
hut cluster
A. Rastelli, H. von Kaenel, Surf. Sci. 532, 769 (2003)
modelling
SThM vs
Thermoreflectance
Scale 180!180 nm2 (1 ML=1 Monolayer = 0.14 nm)
0D Nano Dots
Acknowledgements
Lowest thermal conductivity obtained on a
crystalline material : <1W/m-K
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
modelling
SThM vs
Thermoreflectance
Case studies
2D Superlattices
1D Nano wires
0D Nano Dots
Si spacer (nm)
Acknowledgements
Acknowledgements
Collaborators
PhD Students : Gaetan Calbris, Etienne Puyoo
Post Docs : Gilles Pernot, Jonah Shaver
Optics : Pr Stéphane Grauby (UBx1), Pr Jean-Michel Rampnoux (UBx1),
Pr Wilfrid Claeys (UBx1), Pr Gilles Tessier (ESPCI)
Chemistry : Pr Serge Ravaine (UBx1), Dr Renaud Vallée (UBx1)
Mechanics : Pr Bertrand Audoin (UBx1), Jean-Christophe Batsale (UBx1),
Dr Christophe Pradère
Nano sciences : Dr Natalio Mingo (CEA), Dr Sebastian Volz (ECP), Pr
Bruno Palpant (INSP), Pr Younes Ezzahri, Pr Ali Shakouri (UCSC)
2011 International
Conference on
Frontiers of
Metrology for
Nanoelectronics
Stefan Dilhaire
Motivation
Laser detection
AFM detection
Fault detection
Thermal Metrology
Laser Metrology
Laser temperature
measurement
Simulation
Thermorflectance
Thermal Metrology
SThM Metrology
SThM
Sample growth and 3-omega : Dr Armando Rastelli, Dr Mathieu Stoffel,
Dr Fabio Pezzoli, Peixuan Chen, Pr Oliver G. Schmidt (IFW)
modelling
SThM vs
Thermoreflectance
Case studies
Financial Support
Conseil Régional d’Aquitaine 2007-2010 : Photons et Phonons
ANR Blanche : Picobio, OCTE,
ANR P3N : EThNA, THERMA ESCAPE, EXTRADA, Magnifico, Phemto
2D Superlattices
1D Nano wires
0D Nano Dots
Acknowledgements

Thermal Properties Characterization of Advanced Materials

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