Overview on the Application of Piezoceramics Bending Actuators
Transcription
Overview on the Application of Piezoceramics Bending Actuators
1st International Workshop on Smart Materials and Structures 7-8 October, 2004 Kiel, Germany Dipl. Phys. Andreas Joseph Schmid Argillon GmbH R & D Piezoproducts Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Ceramics Overview on the Application of Piezoceramics Bending Actuators - Piezoceramics at Argillon Abstract Overview on the Application of Piezoceramics Bending Actuators z Piezoeffect z Bending actuator structure techniques z Piezoproducts z Applications of piezoelectric bending actuators Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] PZT - Perovskite crystal structure z Pb(Zrx Ti1-x)O3 z Lead (Pb)2+ z Oxygen (O)2z Zirconium (Zr)4+ z or Titanium (Ti)4+ Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Piezoelectric effect - Curie temperature Perovskite Crystal Structure Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Piezoelectric effect Piezoelectric effect Convertion of a mechanical stress into a electrical signal. Inverse piezoelectric effect Mechanical output produced by an electrical input. Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Bending actuator structure techniques Bimorph inactive Layer Piezoceramic Monomorph Trimorph Multimorph Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Bending actuator Deflection of a trimorph bending actuator Contraction of the ceramic by appling the operating voltage Results in deflection of the bending actuator Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Bending actuator Deflection of a trimorph bending actuator Contraction of the ceramic by applying the operating voltage Results in deflection of the bending actuator Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Bending actuator - force-deflection characteristic 300 Blocking Force F0 [mN] 250 blocking force F0 200 possible operating point 150 100 bending energie 50 max. deflection ξ0 0 0 0,2 0,4 0,6 0,8 1 1,2 1,4 1,6 1,8 2 Deflection ξ [mm] Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Bending actuator - force-deflection characteristic monomorph bending actuator a) ceramic h1 passiv layer h2 maximum deflection ξ0 ξ0 = 3/4 d31 U (l2 / h12) fE a= h2 c= E2 4 a c (1 + a) h1 fE = 4 a c (1 + a)2 + (1 - a2 c)2 a) blocking force F0 Fo = 3/2 d31 U b E1 (h1 / l) fm E1 a c (1 + a) fM = 2 (1 + a c) Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Bending actuator - Performance index performance index = blocking force * max. deflection p e rfo rm a n c e in d e x 0,8 steel 0,7 0,6 0,5 aluminium 0,4 0,3 carbon fibre 0,2 0,1 0 0 0,2 0,4 0,6 0,8 1 1,2 1,4 1,6 1,8 2 thickness proportion a Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Piezoproducts - Portfolio Basic BasicMaterials Materials Bending BendingElements Elements Actuators / Sensors Actuators / Sensors Piezo Masses Ceramics likes: + Discs + Plates + Rings + Tubes + Special geometries Actuators Actuators Bending actuators Singlelayer for: + Braille modules + Textile machines + Hard disks drives + Valves + Gas flow controls + Switcher Multilayer (> 2003) for: + Textile machines + Hard disks drives + Valves + Gas flow controls + Automotive applications Stacks (> 2004) for: + Piezo generators + Piezo motors + Consumer goods Modules Modules&&Devices Devices Sensors Sensors Actuators Actuators Bending actuators for: + Medical engineering + Other applications Ultrasonic transducer for: + Flow measurement + Other applications Pattering modules for: + Jacquard machines + Raschel machines + Warp Knitting machines Sensors Sensors Ultrasonic systems for: tank level measuring SITEX M-Module for: + Circular Knitting machines Ultrasonic atomizers for: + Refrigerated cabinets + Home appliances + Toys + Inhalers for lung diseases + Humidifier Valves applications for: + Glue valves + Air pulse valves + Air sort valves + Door shuts + Hydraulic systems Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Divided into three groups Basic Materials Bending Elements Modules & Devices Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Multilayer bending actuator Design of a monomorph multilayer bending actuator with thermal tension adjustment Multilayer ceramic Inner electrods Slide Conntact Passive layer Copper contact pads Thermal tension layer Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Piezo braille module for controller keyboards Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Bending actuator for warp knitting machines Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Textile machine module for warp knitting machines Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] SITEX ® M - Textile machine module for circular knitting machines Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] SITEX ® M - Textile machine module for circular knitting machines Circular knitting machines SITEX M - Textile machine module Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] SITEX ® M - Textile machine module for circular knitting machines Housing cover Electronic control Connector Bending actuators Flaps Carrier Front plate Housing Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Piezoceramic bending actuator for fiber optical switches Advantages: · fast switching time · low insertion loss · high optical isolation · compact design · no additional wavelength dependence Applications: · optical measurement systems · spectroscopy · optical engineering · telecommunications Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] High - dynamic pressure regulator Flap On Flap Off 3 - + 2 3 1 - + 2 1 Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] The new generation of piezoelectric valves Plastic Housing + higher precision + lower weight + cheaper Elastomere enclosure + improved sealing + protection against humidity + separates medium from electric terminals Bender + „power free“ control + nearly no wear + ideal for intrinsic safety + works digital and analog + no self heating + no electromagnetic load + antimagnetic Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] 3/2 normally-closed piezoelectric micro valve Concept of a polymer micro valve with an piezoelectric multilayer actuator and an polymer strain sensor Housing cap Electronic control (closed loop control) Strain sensors Piezoelectric multilayer actuator Housing with pneumatic interface Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Micro valves for implantable microdosage systems Prestress Piezoelectric bending actuator Silicon tappet Pyrex valve seat Medicament (2.5 bar) Piezoelectric bending actuator Titanium housing Inlet Outlet Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Piezoelectric actuated suspension for hard disk drives Piezoelectric micro actuators for the positioning of write-read heads. Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Piezoelectric micro actuators Piezoelectric micro actuators for the positioning of write-read heads. Applications: tape drives, hard disk drives, DVD- and CD-writer ± 0,1 0,2 55,0 19,25 ± 0,05 55,0 ± 0,05 ± 0,25 pin ø 3,18 pin ø 3,18 ± 0,07 ± 0,05 M. : 4 : 1 5,45 28,0 94,95 ± 0,25 detail - Z 12,60 ± 0,07 Z Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Piezoceramic bending actuator and sensor for implantable hearing aids The PZT Driver converts the amplified electrical signal received from the Sensor (via the Sound Processor) into mechanical vibration to drive the stapes. The PZT Sensor fulfills the role of a microphone in a conventional air conduction hearing aid. More info at: www.stcroixmedical.com Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] EnOcean - Piezoceramic generators Conversion of mechanical energy into electrical energy. Applications: Light switch Tire guard Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Piezoceramic bending actuator for radio switches Energy generator for the radio switch Energy per one actuation = 25 µWs Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Piezoceramic Bending Actuator for radio switches Parts of the radio switch The core element is the Piezoceramic Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] EnOcean - Piezoceramic bending actuator for radio switches Batteryless radio switch Conversion of mechanical energy into electrical energy Transmitting of signals and information Radio Transmitter Actuation Generator Signal Processingunit RFTransmitter 230V≈ Radio Receiver HFReceiver Signal Processingunit Result, Value Power Switch Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] EnOcean - Piezoceramic Generators Die Betätigungsenergie wird für batterielose Transpondersysteme verwendet. Building Industry Radio sensors Radio switches • Installation • Renovation • Control Sensors • Position Indicator Switch • Monitoring Automotive Radio switches • Keyless entry • Tire Guard Medical Micro Radio Generators • Control of the human body functions Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Benefits of piezoelectric bending actuators z Rapid positioning speed results in significantly increased productivity. z High reliability dramatically reduces outage times. z The bending actuator produces no heat, therefore no cooling is required. z Energy consumption is noticeable low as with the magnet that results in reduced operating costs. z The compact construction means that the bending actuator requires significantly less space. z Silent operation provides for the most ergonomic possible workplace. z The bending actuator can be modified for specific applications. Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] Conclusion Overview on the Application of Piezoceramics Bending Actuators z Electromechanical transformer (actuator/sensor/generator) z All-purpose usable. Usable in nearly all markets z High increacing market rates Piezoproducts z Basic Materials z Bending Elements z Modules & Devices Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected] References [1] M. Laurent, H. Bödinger, T. Steinkopff, K. Lubitz, C. Schuh, S. Wagner, M. J. Hoffmann, H. MurmannBiesenecker, A. J Schmid, ”Influence of ceramic layer thickness on the properties of piezoelectric multilayer actuators”, Processing of Electroceramics, Symposium 2003, (2003) [2] U. Dibbern: Piezoelectric Actuators in Multilayer Technique. Proceedings of Actuator 94, (1994) [3] B. Anderson: Properties and Performance of Multilayer Actuators for Dynamic Applications. Proceedings of Actuator 1996, (1996) [4] A. J. Schmid, U. Töpfer, R. Ballas, H. F. Schlaak, G. Munz, M. Maichl, A. Münzenmaier, ”Piezoelectric Beam Multilayer Actuator with an Integrated Capacitive Strain Sensor to Detect Deflection”, Sensor 2003, (2003) [5] M. Weinmann, M. Maichl, G. Munz, C. Hanisch, H. P. Post, ”A 3/2 Normally Closed Polymer Piezoelectric Microvalve with Integrated MID Electronics for Industrial Automation”; Actuator 2002, (2002) [6] Y. Nui, W. Guo, G. Guo, E. Hong, T. Huang, “Piezoelectrically Actuated Suspension for Hard Disk Drives Storage“, Proc. Syst., Vol. 1.; 321 -327, (1999) [7] A. J. Schmid, U. Töpfer, ”Smart Piezoelectric Multilayer Actuator with an Integrated Sensor to Compensate External Loads”, Adaptronic Congress 2003, (2003) [8] A. J. Schmid, „Piezokeramische Systeme – Physikalische Eigenschaften und Anwendungen“, Technische Keramik in der Praxis, Verband der keramischen Industrie e.V., Selb, (2002) [9] C. Schuh, K. Lubitz, Th. Steinkopff, A. Wolff, “Piezo electric Components for Technical Applications”, Piezoelectric Materials, Ed.: C. Galassi et al., Kluwer Academic Publ. 2000, 391- 399, (2000) [10] A. J. Schmid, “Smarter Niedervoltaktor – Multilayer Biegewandler mit integrierter Sensorik”, Deutsche Keramische Gesellschaft, 10. Keramik-Tag der Bundesanstallt für Materialforschung, Symposium: Folien und Multilayertechnologie für funktionskeramische Anwendungen, (2003) Piezoproducts Dipl. Phys. Andreas Joseph Schmid Tel.: ++ 49 / 9574 / 81-250 Email: [email protected]