CIC Photonics

CIC Photonics
IRGAS Training
Schedule - Day 1
FTIR analysis
–
–
–
–
IR spectrum
Michelson
c e so interferometer
te e o ete
Fast Fourier transform and corrections
Interferogram, single beam spectrum, absorption spectrum and
transmission spectrum
– Beer’s
B ’ llaw
– Instrument resolution
– Quantification analysis
analysis--Classical Least Squares introduction
H d
Hardware
d
description
i ti
– Bomem WorkIR
– Instrument purge
– Manual manifold
SPGAS software
– IRGAS 100
– IRGAS configuration manager
– Data retrieval
Schedule - Day 2
SPGAS software cont.
– Qmax – quantification manager
– IRGAS spectra reprocessing software
Hardware installation
– System power
– Pipe installation
– Instrument purge
Software installation
– IRGAS software
– Bomem Ethernet drivers
– System
y
verification
System maintenance
Schedule - Day 3
IRGAS worksheet
IRGAS options
IRGAS p
product array
y
Marketing and selling strategies and
techniques
Competitors and competing products
S i and
Service
d maintenance
i t
FTIR Analysis
Tab 1
Light Spectrum
Infrared is invisible light ranging from 1mm to 750nm in wavelength
Infrared light can be divided into three parts:
– Far infrared -1mm to 10µm
– Mid iinfrared
f
d - 10µm
10
tto 2
2.5µm
5
– Near infrared - 2.5µm to 750 nm
Infrared (IR) Spectrum
IRGAS System mid infrared range
– 2.5µm – 25µm in wavelength
– 4000 cm-1 – 400 cm-1 in wavenumbers
Wavelength (λ
(λ)
– Wavelength
g = (1/wavenumber))*10,000
,
Wavenumber (cm-1)
– Wavenumber = (1/λ)*10
) 10,000
000
IR Molecules
Not every molecule absorbs infrared light
– Monoatomic
M
t i
He, Ar, Ne, etc…
– Homoatomic diatomic
N2, O2, H2, etc…
– N
N
M l
Molecules
l that
th t do
d absorb
b b iinfrared
f
d lilight
ht
– Water is a good example
O
H
H
Michelson Interferometer
2
1
3
4
Step
p 1: Beam leaves IR source and hits beamsplitter
p
where it is sent
straight through and at a 90°
90° angle
Step 2: The 90°
90° angle beam hits a fixed mirror and is sent back to the
beamsplitter
Step
p 3: The beam that went straight
g through
g hits a movable mirror and is
sent back to beamsplitter
Step 4: The two beams recombine, go through the gas cell and travel to the
detector
Michelson Interferometer
When AB=AC the phase of the frequencies look the same
When AB=AC+1/4λ
AB=AC+1/4λ, then the phase of the frequencies are opposite
in regards to maximums and minimums
AB
AC
Michelson Interferometer
When AB=AC and the two recombine you
gett stronger
t
maximums
i
and
d minimums
i i
When AB=AC+1/4λ
AB=AC+1/4λ and the two
recombine they cancel one another out
and result in a flat line
ABB Bomem Michelson
Interferometer
It has two sets of mirrors that move by a
pivoting motion
This design is called a wishbone
configuration
– This
Thi configuration
fi
ti iis more robust
b t
It can be placed in any orientation
This configuration only has to be smooth at one
point vs. the traditional interferogram that has to be
smooth along a rail
ABB Bomem Michelson Interferometer
ABB Bomem Michelson Interferometer
IR
Source
Laser
Fast Fourier Transform
The highest peak intensity is attained when AB=AC
The maximum of the highest intensity peak is called the zero path
difference (ZPD) point
After the interferogram has been created by the instrument, the Fourier
transform is applied to it, which then results in a single beam spectrum
Inte r fer ogr a m
ZPD
1
0
V
o
l
t
s
-1
-2
-3
3 20 0
3 00 0
2 80 0
2 60 0
2 40 0
Data Points
2 20 0
2 00 0
1 80 0
Single Beam Spectrum
28
26
24
22
Arbitrary units
20
18
16
14
12
10
8
6
4
4000
3000
2000
Wavenumbers (cm-1)
1000
Single Beam Spectrum
28
26
24
22
20
%T
18
16
14
12
10
8
6
4
4000
3000
2000
Wavenumbers (cm-1)
1000
Single Beam Spectrum
28
26
24
22
20
%T
18
16
14
12
10
8
6
4
4000
3000
2000
Wavenumbers (cm-1)
1000
Single Beam Spectrum
28
27
26
25
24
23
22
21
%T
20
19
18
17
16
15
14
13
12
11
10
9
2000
1500
Wavenumbers (cm-1)
Transmission
The ratio between the sample and the background
spectrum
⎛S⎞
T
Transmissi
i ion = ⎜ ⎟ *100
⎝ B⎠
Transmittance Spectrum
110
100
90
80
Absorbance
70
60
50
40
30
20
10
0
4000
3000
2000
Wavenumbers (cm-1)
1000
Chemometrics
Based on the transmission spectrum
chemometrics
h
t i can b
be applied
li d
– Chemometrics: The application of statistical
and
d mathematical
th
ti l methods
th d ffor th
the d
design
i or
optimization of chemical experiments and for
the efficient extraction of information from
chemical data
Two types of chemometrics:
– Qualitative (identification)
– Quantitative
Q
tit ti (quantity)
(
tit )
Absorbance
0.50
0.45
0 40
0.40
Absorban
nce
0.35
0.30
0.25
0.20
0.15
0.10
0.05
4000
3000
2000
Wavenumbers (cm-1)
100
⎛
⎞
Absorbance = log⎜
⎟
⎝ transmission ⎠
1000
Beer’s Law
Says that concentration is directly
proportional
ti
l tto absorbance
b b
(li
(linearity)
it )
Beer’s law equation is A= abC
– Where A = absorbance
a = absorptivityy of the molecule
b = pathlength that the light travels
C = concentration
Instrument Resolution
The more points per peak the higher the
resolution
l ti
The higher the resolution the more noise,
but the better peak separation
Common resolution used for an ABB
Bomem instrument is 2 cm-1
Ranges between 1 cm-1 to 128 cm-1
Why Do We Need a Gas Cell
Intensity of a peak is directly related to the
# off moles
l iin a sample
l
In the same area:
– Solid will be very packed
– Liquid will be less packed
– Gas will be even less packed
Long Path Gas Cell
Obj ti mirrors
Objective
i
¼” VCR fi
fittings
i
Field mirror
Window retainers
4Runner 6 Meter Gas Cell
Gas Cell Mirrors
Objecti ve
Mirrors
Field Mirror
Tra ns fer
Mirrors
Source
Top view of field mirror
IR Beam Path
Classical Least Squares (CLS)
The base equation is As = Ac*K + e
– Where
Wh
As
A = sample
l absorption
b
ti
Ac = calibrated absorption
K = concentration
e = noise
Using the above equation find K that
minimizes e
To minimize e we use the CLS method
In this situation there are more equations
then variables
Classical Least Squares (CLS)
To simplify matters we assume that e = 0
– The
Th equation
ti then
th b
becomes: A
As = A
Ac*K
*K
Matrix form:
A = Ac
As
A *K
⎡ As1 ⎤ ⎡ Ac1 ⎤
⎢ As
⎥ ⎢ Ac
⎥
A
A
⎢ 2⎥ ⎢ 2⎥
⎢ . ⎥ ⎢ . ⎥
⎢
⎥=⎢
⎥*K
⎢ . ⎥ ⎢ . ⎥
⎢ . ⎥ ⎢ . ⎥
⎢
⎥ ⎢
⎥
⎢⎣ Asn ⎥⎦ ⎢⎣ Acn ⎥⎦
Classical Least Squares (CLS)
In order to solve for K (Ac-1*As = K), Ac
needs
d tto be
b an iinverse matrix
ti
– Therefore: AcT*As = (AcTAc)*K
(1x1) = (1x1)*K
Problems with Initial CLS Approach
Baseline becomes unstable throughout the
day
day
– It can shift, slope, or curve
These changes can be compensated for in
the calibrated absorption matrix
Classical Least Squares (CLS)
Accounting for these baselines changes the
equation
– The eqn. becomes: As = AcK1+
⎡ As
⎢ As
⎢
⎢ .
⎢
⎢ .
⎢ .
⎢
⎢⎣ As
1
2
n
⎤
⎡ Ac
⎥
⎢ Ac
⎥
⎢
⎥
⎢ .
=
⎥
⎢
⎥
⎢ .
⎥
⎢ .
⎥
⎢
⎥⎦
⎣⎢ Ac
1
2
n
1
1
−1
.
.
.
.
0
.
.
1
1
1⎤
. ⎥⎥
.⎥
⎥ * [K
0⎥
.⎥
⎥
1 ⎥⎦
K2+
1
K
2
K
K3+
3
K
4
K4
]
The calibrated absorption matrix can be increased
to accommodate the number of species
p
being
g
tested
Weighted MultiMulti-band CLS
A more complex version
of the standard CLS
The spectrum is
separated into bands
– Each band is then
calculated
After all the bands are
calculated they are added
in a weighted averaged
fashion
– The ones with the highest
error and lowest signal are
counted for less then the
ones with the lowest error
and highest signal
Hardware Description
Tab 2, 3, & 4
IRGAS Systems
Thus far the oldest system in the field
without
ith t maintenance
i t
iis 4 yrs
Out of 2020-30 systems, there has only be a
need to perform maintenance on 3 of them
The Bomem spectrometer
p
is high
g in
reliability and low in maintenance
There has been 2 hardware failures
– There was a burned out IR source
IRGAS Systems
There is one basic package that can be
dressed up in several different ways
One reason our throughput is higher than
competitors is because of mirror quality
and coating
Our objective mirrors are adjustable
– Sideways
– Rotational
Competitors have mirror that are locked
into place
ABB Bomem WorkIR
Manual Manifold
Purge Gas In
Process Gas In
Check Valve
Maintenance Valve
P
Process
Gas
G Out
O t
Permeation Box
Purifier
Gas Cell
Nitrogen Outflow
Check Valve
Pressure/Flow
Transfer Optics
Gas Flow
Optical Path
Pressure/Flow
Spectrometer
Nitrogen Outflow
Manifold Parameters
Flow Restrictor
– A flow of 30 psi in will give a flow of 5 slpm to
the instrument
Purifier
– Gives dry N2 to below 2 ppb
– Has a lifetime of more than a year if it is used
24/7
Vibrations
There are a number of designs of
suspension
i systems
t
to
t counteract
t
t
vibrations
These designs help to keep the data from
being affected by a simple bump of the
instrument bench
Typical Gas Cells
Have a flow similar to turbulent flow and have a
longer residence time
Gas in
Exhaust
Laminar Flow Gas Cells
The flow is like a waterfall
– Therefore
Th f
there
th
will
ill b
be lless tturbulence
b l
Heated laminar flow gas cells
– The gas is in contact with the walls letting it reach a
temperature similar to the gas cell prior to entering the
cell
Gas in
Gas Cell Flow Diagrams
f/5 Beam Geometry
IR B
eam
d
Foc
use
d
f.l.
f/#= f
f.l.
l
d
f.l. = focal length
g
d = beam diameter
The higher the f / #, the smaller the objective
mirrors, the more light that is lost, the smaller the
throughput
SPGAS Software
Tab 6, 7, 8, 9, & 10
Specialty
Sp
ecialty Gas Analysis Software
(SPGAS
SPGAS))
IRGAS 100 system
– Collection & quantification
Qmax
– Quantification manager
IRGAS Configuration Manager
– Configures parameters
Quantification Reprocessing Tool
– Recalculating spectra
IRGAS 100 System
After opening the software the first window
i th
is
the monitor
it screen
– On the right side there is the available species
– On the bottom is the legend of the species
that are being shown in the top window
– The top shows the concentration of all the
species over time
IRGAS 100 Monitor Screen
Concentration of
species over time
Available
A
il bl
Species
IRGAS 100 System
Collecting a background
– After opening the program, pressing the start
button will automatically send the
spectrometer to collect a background and
then begin collecting a sample
Seeing the sample
– Clicking on the desired species tab at the top
will show you that species in real time
– That screen shows the fast concentration
tracker (FCT) and the averaged sample
Advantages to Spectra Stream
Provides high sensitivity detection of
impurities (low ppb)
Reduces the time response typically
associated with FTIR (from minutes to
seconds)
Continuous collection of background
Running average spectra
R d ti iin spectrometer
Reduction
t
t d
drift
ift
Reduction of contribution of moisture
System is very easy to use
IRGAS Configuration Manager
IRGAS Configuration Manager
IRGAS Configuration Manager
IRGAS Configuration Manager
IRGAS Configuration Manager
Data Retrieval
Data storage
– By default the data gets stored on the C drive
C:\\Program Files
C:
Files\\CIC Photonics
Photonics\\IRGAS
– IRGAS data
Quantification log
Spectral records
Quantification Log Folder
Data stored as a text file
Can be converted to an excel file
– Copy file, paste in the same folder, rename with an .xls
extension
In the excel file
Time
BMI
Species
Concen.
SE
FCT
SE-FCT
2nd Species
Concen.
SE
FCT
6/14/2005 14
14:21
21
3 17E 02
3.17E-02
H2O
0
0 06
0.06
-0.16
0 16
0 06
0.06
CO2
0 011
0.011
0 013
0.013
0 011
0.011
Data storage names
– Folder with YY
YY--MM
Folder with Quan YYYY-MM
MM--DD.log
Spectral Records Folder
Stored with a .spc extension
– All market
k t software
ft
writes
it and
d reads
d thi
this fformatt
This was created by Galatic, now ThermoGalactic
Data storage names
– Folder with YY
YY--MM
MM--DD
Absorbance File
– Abs YYYY-MM
MM--DD HH:MM.zip
Background File
– Bck YYYY-MM
MM--DD HH:MM.zip
p
Sample File
– Smp YYYY-MM
MM--DD HH:MM.zip
Residual File
– Res YYYY-MM
MM--DD HH:MM.zip
QMax
Using existing calibration file:
QMax
Quantification Set
Spectral Set
Calibrated
C
lib t d S
Spectral
t lR
Record
d off
specific molecule
Non--linear Behavior
Non
As a rule of thumb a species behaves nonnonlinear when it is higher than 0.1
01a
a.u.
u
The nonnon-linear correction graph’s curve is
modeled by ax3+bx2+cx+d = 0
– In this equation the values that are necessary
to find are a
a, b
b, and c
– To do this nonnon-linear correction there needs to
be at least 3 spectral records
In general when the residual curve is flat
line that indicates that there is nonnon-linear
behavior
QMax
Starting a calibration from scratch:
Synthetic Calibration Set
Instrument Line Shape (ILS)
– Each
E h instrument
i t
t has
h its
it own
HITRAN database
– Contains
C t i th
the absorption
b
ti coefficients
ffi i t off
different components
– Doesn
Doesn’tt contain the ILS of specific instruments
MALT software
– Created by Dr
Dr. David Griffith from the
University of Wollongong in Australia
– Models ILS parameters
MALT
Calculates spectra for single
h
homogeneous
path
th or ffor multiple
lti l llayers
Includes instrumental parameters into the
calculations so the calculated spectra
match the line shape, resolution and
wavelength shift of the measured spectra
Uses HITRAN molecular spectroscopy
p
py
databases
Gas Calibration
When a gas is not in the HITRAN system,
it is necessary to produce the calibration
non--synthetically
non
Start collecting data
Flush the gas cell several times with the
gas
– During this time find the equilibrium point of
each flush
– Take these points and average them to use
for the calibration
This will give a better signal to noise ratio
HITRAN/MALT vs. Actual
Calibration
Advantages
– Calibration data free of noise
– Best match to the measured spectrum
according to the least squares criteria
– Operational costs reduction
– Non
Non--time consuming calibrations
– Precision at least as good as that of
traditional methods ( ≤ 3%)
HITRAN/MALT vs. Actual
Calibration
Disadvantages
– Provides analysis only over gases included in
the HITRAN database*
– System requires regeneration of calibration
data if spectrometer or gas cell change
*additional gases by standard calibration procedures
IRGAS Spectra Reprocessing
IRGAS Spectra Reprocessing
Gas Analysis Modules
HITRAN
MALT
SPGAS
Gas
Weighted
Multi-Band
CLS
Analysis
Spectra
Stream TM
Improved
Gas
Analysis
Sensitivity
Absorbance Data @ 1ppm/meter
0 0028
0.0028
0.0026
H2O
NH3
0.0024
NO2
0 0022
0.0022
SO2
0.0020
CO
NO
Absorbance
0.0018
0.0016
H2CO
CO2
0.0014
0.0012
0.0010
0.0008
0.0006
0.0004
0.0002
-0.0000
3000
2000
Wavenumbers (cm-1)
1000
Software Installation
Software Installation
The installation window should
automatically
t
ti ll poppop-up
After the installation has been completed,
check that the computer and spectrometer
are communicating with each other
Establishing Communication
Network:
Instrument
Network
Computer
– Instrument address: 192.168.0.127
– Computer address: 192.168.0.YYY
Where YYY is any number between 0 and 225 that
is not 127
Establishing Communication
Two Ethernet configurations:
– Straight through
Instrument
Ethernet
Hub
Switch
Computer
– Crossover
Instrument
Computer
Ethernet Connection
Straight through configuration
1
2
3
4
5
6
7
8
1
2
3
4
5
6
7
8
Ethernet Connection
Crossover configuration
1
2
3
4
5
6
7
8
1
2
3
4
5
6
7
8
Verifying Communication
Changing network address
– Control panel
Network connection
– Local
L
l network
t
k
Properties
Last check for communication
– Control panel
ABB Bomem
M k ti and
Marketing
d Selling
S lli
Strategies and Techniques
Tab 13
Worldwide Customers
Semiconductor Applications
Wafer yield enhancement
– By reducing O
O--atom defects
Process reaction monitoring
– By confirming reactants/products
Supply gas quality monitoring
Abatement tool efficiency
Semiconductor Dry Process
http://www.jp.horiba.com/semicon_e/measurement/gas.htm
Semiconductor Industry
SemiConductor Fab
a) Thin films
b) Etching
c) Implant
Raw Material
a) Silicon Wafer (EPI)
b) Hi Purity Gases
c) Photomasks
1.Thin Film
2. Etching
Equipment
a)) Thin films
1. HDP-CVD
2. In-situ EPI
b) Etching
c) Implant
Semiconductor Applications
A large amount is spent on equipment in the fab
area
In--situ monitoring is being looked at to prevent
In
the damage of large quantities of goods
The equipment section is also supplying the raw
materials section
section, not just the Semi fab
Getting the companies to upgrade current
equipment is difficult but results is a large sale
Chemical Applications
Specialty gas purification
Combustion thermodynamics
Aero--engine optimization
Aero
Destructive testing: release of
hazardous gases
Gas blending
Environmental Applications
Plant air monitoring
Stack gas emissions
PFC emissions
Homeland Security
– Chemical Weapon Agents
– Toxic Industrial Chemicals
– Illicit Drugs
Our Product Line
FTIR gas analyzer systems
Long and short path gas cells
Custom g
gas cells
Fiber optic probes (UV/VIS/NIR)
Resell UV/VIS FO spectrometers
FTIR sampling accessories
– ATR, transmission, reflectance, MM-Press
Competitor Analysis
Ideal
Characteristics
Customer Needs
Detection of impurities
C
C
Low ppb & high S/N
IR
Reflectivity &
throughput
g p
C
C
Process control
C
IR
C
IR
Fast & correctable
C
C
FTIR response time
Baseline drift
High
IR
None
C
CIR
C
C
No false positives
Customizable
Total cost of
C
C
C
None
IR
C
C
Competitor
Research conducted by Los Alamos National Laboratories marketing interns
Fast (min --> sec)
IR
IR
Highly
Low
IR IRGAS Total Solution
C
Competitors
tit
and
dC
Competing
ti
Products
Tab 5,12,14
Competitors
FTIR gas analyzers
– MKS Instrument
– MIDAC
– Thermo Nicolet
Other technologies
g
– Tiger Optics
– Delta
e ta F
Other Technology Competitors
Tiger Optics
– Cavity Ring Down Spectroscopy (CRDS)
– Single gas at a time
Delta F
– Tunable laser
– Single gas at a time
Differentiators
Gas Cells
Laminar flow
– Faster g
gas exchange
g
– Eliminates dead space
316L Stainless steel / Nickel plated body
– More chemically resistant to acid gases and retain less moisture
304 Stainless steel mirror
Proprietary fabrication and coating process
– Radius of curvature
– Surface finish smoothness
– 98.5% reflectivity
High pressure tolerance
– 20 atm, 300 psi
Hand aligned by expert personal to maximize throughput
IRGAS System
Spectrometer
– ABB Bomem WorkIR
Industrial ruggedness
Compactness
Very low failure rate
Cost competitive
Software
– Unique
q because it offers the weighted
g
multi-band,, multimultimulti-variant
classical least squares method
– Patented on Spectra Stream w/ the fast tracker for early warning
– User friendly
Configurations
– One package that can be dressed different ways
Pre and post technical support
Scientific Package
4Runner gas
cell
ABB Bomem
WorkIR
spectrometer
Coupling optics
Suspension
system
The 4Runner
0.6 liter volume
125 mm base path
304 stainless
i l
steell
body
Metal and Kalrez®
seals
Welded VCR fittings for
gas porting
Heatable to 260°
260°C
I t
Integrated
t d purge box
b
with movable reference
optics
MgF
g 2p
protected,, g
goldgoldcoated stainless steel
mirrors
Evacuable &
pressurizable: 1010-4
Torr to 300 psig
Ranger--EN
Ranger
9.6 meter fixed
pathlength
1.7 liter cell volume
0.05 sq. m/L
surface/volume
Gold--coated SS
Gold
mirrors
All--metal,
All
electropolished SS
body
External transfer optics
p
Heatable to 200°
200°C
Optional aluminum
body & glass mirror
Pathfinder--EN
Pathfinder
0.4-10 meter variable
0.4pathlength
Pressurizable to 50 psig
Heatable to 200°
200°C
Gold--coated SS mirrors
Gold
All--metal, electropolished
All
SS body
Very high energy
throughput
Extremely chemicallychemicallyinert
Scout--EN
Scout
Nickel plated stainless steel
10cm gas cell for toxic and
corrosive gas analyses; heated
and unheated versions.
28--cm3 volume
28
Teflon--encapsulated Viton®,
Teflon
Viton®, or Kalrez® O
O--rings for
chemical resistance and
temperature considerations
KBr, CaF2, ZnSe, quartz, or
sapphire window materials for
UV--VIS and FTIR applications
UV
Evacuable and pressurizable:
10
100-4 Torr
o to 150
50 ps
psig
g
Heatable to 200°
200°C with heating
mantle, tape, or dual bands
5 cm & 15 cm pathlength
versions also available
O i
Optional
l temperature controller
ll
Easy adaptation to all
spectrometers
Montero
1.0 meter fixed
pathlength
82 6 mm basepath
82.6
Anodized aluminum cell
body
Gold--coated Pyrex
Gold
mirrors
Internal transfer optics
Low 600 ml volume
Purgeable beam
conduits
Swagelok (tm) gas ports
Viton® OO-rings
Choice of windows
High energy throughput
Unheated and heated
versions
Fits totally inside FTIR
compartments
CR--V
CR
Extremely short path
length
– 0.5mm to 1cm
High Pressure
– Up to 100 atm
Heated Option
IRGAS Options
Tab 11
O-Ring Material Working
Temperature Ranges
Modulus of
p
(p
(psi))
Rupture
m
Window Thickness
Unsupported
Diameter ((mm))
d
Window Thickness Analysis
AgCl
19
400.0
Pressure (psi)
p
Unclamped
p
Clamped
0.866
1.05
14.0
9.5
56.1
38.2
126.3
85.9
224.6
152.8
350.9
238.7
350.0
Thickness
(mm)
1
2
3
4
5
300.0
250.0
PSI
3,800
200.0
150.0
1
Material
AgCl
BaF2
C B
CsBr
CaF2
CsI
Diamond
KBr
Sapphire
ZnSe
Custom
Modulus of
Rupture (psi)
3,800
3,900
1 220
1,220
5,300
800
54,400
160
65,000
8 000
8,000
900
100.0
50 0
50.0
0.0
1
2
3
4
5
Thickness (mm)
Clamped Window
Unclamped Window
The modulus of rupture, m , determines the size of the window needed to withstand a pressure, p .
For a four times safety factor, the thickness of a mounted window, t , with an unsupported diameter, d , is:
⎛ t Clamped
p = m ⎜⎜
⎝ 0 . 866 d
⎞
⎟⎟
⎠
2
⎛ t Unclam ped
p = m ⎜⎜
⎝ 1 . 05 d
⎞
⎟⎟
⎠
2
Options
Pressure and temperature based on ideal
gas parameters
t
Automated manifold systems
System outputs
– Text based
– Analog and digital outputs
IRGAS Moisture+ Plus
IRGAS--SP
IRGAS
IRGAS EPI
IRGAS 100T
IRGAS 100MT
IRGAS 200RM
IRGAS 400
IRGAS XFlo
IRGAS Worksheet
Tab 13
IRGAS Worksheet
Important because it guides us in system
parameters,, options,
p
p
, and price
p
q
quoting
g
Important parameters
– Gases present in the mixture
Estimated concentrations
– Temperature and pressure range
– Sampling time
The parameters help to determine:
– O-Ring material
– Window material
– Gas cell
All of these can really vary the price of the
product
d t
IRGAS Worksheet
Part A of the worksheet is for customers
that
th t only
l wantt a gas cellll
The entire worksheet is necessary for
customers that want the whole IRGAS
system
Customers should fill out as much of the
worksheet as possible
p
W
Warranties
ti and
d Technical
T h i l
Support
Tab 16
Warranty
1 yr parts and labor for gas cell and
software
ft
30 day on critical optical elements, ex.
mirrors
– This is because we have no control over how
the system is treated by the user
1 yyr telephone
p
and ee-mail technical supprt
pp
Technical Support
24/7 technical support is provided to the
b t off our abilities
best
biliti
System Maintenance
Tab 15
Service and Maintenance
Handled on a case to case basis
Repair, test, ship
– System repaired
– Quality tested
– Shipped
pp back to customer
CIC Photonics pays the shipment back to
customer if still under warranty, if not it is paid both
ways by the user
C
Contact
Information
f
(505) 343343-1489
(505) 343343-9520
[email protected]