ABTOPEOEPAT HA flMCEPTAUMfl

MHEH CHMC-bK HA nO/4EPAHM nyBJlMKAUMM C PE3KDMETA
Ha A-P EJ1EHA MOPflAHOBA XAJIOBA
npeACT3BeHM 33 peu.eH3HpaHe no npoijeAypa 33 saeiuaHe Ha
flJTb>KHOCT
flOLJEHT
no npocpecMOHajiHO HanpdBJietme 5.1. MaiiiMHHO
naysna M yne6H3 cneu,najiHOCT
33 Hy>KflMTe H3 flenapT3MeHT3 no npn/ro)KHa
B flB 6p. NO 35 OT 08.05.2012r.
M3KJ1KDHEHM3 OT
cnnci>K ca:
ABTOPEOEPAT HA flMCEPTAUMfl
flOKTOp
33 nOJiyH3B3He H3 o6p33OB3TeJ1H3 M H3yHH3
,,H3CJieABaHe
Ha MHTepdjeftcHMTe csoiicTBa
CJIOM SiOxNyn SiO2", Cocpun, 2004r.
Ha
MOC
CTpyKiypw
c
YHEBHM
HoMep:
3arji3BMe:
ABTOP /M/:
M3AaHMe:
1
C6opHMK "3adawu no cf)U3UKa"
C. CTOSHOB, Jl. HeflflnKosa, E. Xajiosa
BHBTY "T. KaS/ieiuKOB", Cocpun, 1994.
Pe3K)Me:
C6opHMKbT e npeflHasHaneH sa nonsBaHe or ciyfleHTM n KypcaHin
BBTY ,,T. Ka6jieiUKOB" npw noAroTOBKaia MM no yMeSnaia flucqMnnnHa
,,<t»M3HKa". MajiKoro npeflBMfleHu Hacose aa ceMMHapHM ynpa>KHeHMfl
B yneSHara nporpaMa, npeAno^ara peiiiaBaHero Ha
f\a crasa rnaeHO B nacoBeie sa caMonoflroioeKa, icbflero Ha
Mflsa TOSH c6opHMK. Bts BBTY ,,T. KaSneiuKOB" OnanKara ce
B I M III ceMecrbp B flsa ceiuecrbpa B ntpeaia roflnna Ha
o6yneHne B TexHunecKMie yHMBepCMT6TM_M aaBbpiuBa npeflM noBeneio
Kypcose na BMCiuara MajeMarnKa. flopaflu rosa
60J1LUMHCTBOTO
3aflaHM,
BKJIKDHeHM
B c6opHMK3
MOfaT
fl3
pemeHM c MareMaTHMecKM anapsr MaynaBan B cpeflHOTO
A-p Xajiosa E.H. - XpoHOJiorHHCH cnnctK H pesiOMeia
Page 1/22
CSopHMKvr Moxe fl3 npeACTasrmBS unrepec 33 tunpoK Kptr yH3U4M ce,
KOMTO >KeJ13flT RB
peiII3B3HeTO
H3
yCtBtpUJeHCTBST
CpMSMHHM
np3KTMH6CKMTe
33A3HM.
CSopHMKVT
CM yMCHMfl B
BKJ1K)HB3
BCMHKM
pssAejriM OT ntriHMH Kypc no O6ii|3 cpusuKS. B HananoTO Ha BCCKM
P33A6J1 C3 yK333HM H6O6xOAMMMTe OCHOBHM BeriMHMHM M CpOpMyjlM,
H606XOAMMM 33 peiU3B3He H3 33A3HMT6 H C3 peiiJeHM P33J1MHHM
TMHOBM 33A3HM. CJ16A TOB3 C3 A3A6HM M 33A3HH 33 C3MOCTOflT6JlHO
peiu3B3He. OTroBopme Ha BCUHKM 33A3HH ca npeACTaseHM B Kpaa Ha
BceKM paaflen. B Kpaa Ha c6opHMKa, ca aanncann n H
OCHOBHMT6 CJ3M3MHHM KOHCTaHTM.
Howep:
3amaBMe:
ABTOP /M/:
PeaiOMe:
C6opnnK " Tecmoeu et,npocu u aadavu no cpuauKa" - wacm /
E. Xa/iosa, P. KoSunapos, C. HMKOJIOB
"CT3HA3PTM33UMJ1 npuHT" EOOfl, Codpufl, 2006.
C6opHMKvr e npeAHSSHanen n ce
Msnonssa OT cryAeHTure 33
C3MOnOArOTOBK3 33 M3nMT3 no CJ3M3MK3 B HHXCHepHMTe BY3, K3KTO M 33
noAnoMaraHe HS npenoA3B3TennTe, KOMTO B'bBe>KAaT TBCTOBM
BtnpocM M saAaHM B MsnwT3 no OSLLja cpM3MKa. C6opHMKtT Mox<e f\a ce
MsnonsBS M KSTO PI>KOBOACTBO 33 npOBe>KA3He na ceMMHapHM
ynpa>KHeHMfl. MaTepMantT ctOTBeTCTBS HS yMe6HMTe nporpSMM 33
KypC3 no CpM3MK3, KOMTO C6 H6T6 B P3MKMT6 H3 AB3 CeM6CTbp3 B
TOAMHS HS oSyHenne B TexHMHecKMTe ynMBepcuTeTM M BMCIUM
yMMJlUlHS. B H3CTOflli|3T3 ntpB3 M3CT H3 C6OPHMK3 C3
A3A6HM T6CTOBM BtnpOCM M 33A3HM, CtOTBeTCTB3U4M H3 HeKL|MOHHMfl
M3TepM3/i HS Kypcs no cpM3MK3 I H3CT, npenoAaB3H B TY-CocpMfl. TyK
ca
BKJitOHeHM
pasAenMTe:
,,Mex3HMK3",
,,TepMOAMH3MMK3 M
CT3TMCTMMeCKa (|)M3MK3" M ,,EneKTpMHeCTBO M MSfHeTMStM". KBM'BCeKM
P33A6J1
e
npeACT3B6H3
C-bOTB6TH3T3
H606XOAMM3
Cnp3BK3
C
OCHOBHMT6 CpOpMyjlM, AeCpMHMU,MM, 33KOHM, 3 HflKbA6 M nO-nOApo6HM
o6flCHeHMH c npMwiepw M cpurypM 33 Aa ynecnn CTyAeHTUTe npM
nOArOTOBK3T3 H3 M3nMT3. B Kp3fl H3 c6opHMK3 C3 A3fl6HM OTfOBOpMTe
H3
TBCTOBMTe
BtnpOCM
M
33A3HM
M
H606xOAHMMTe
H3 T6CTOBM
KOHCT3HTM. OT c6opHMK3 MO>Ke A3 C6
BBnpOCM M 33A3MM no
CtOTBCTHMTe
M T6MM OT O6U43T3
HS yneGHMn M3TepM3n,
cpMSMKa, cto6pasHO o6eMa M
BKTIK)MeH
B
cneu,M3iiHOCTM.
yHe6HMT6
nn3HOB6
BtBeASHMeTO
d3M3MHHM
H3
CBOTBCTHMTe
BKJIIOHBS
H3HMH3 H3 nOArOTOBK3 H3 CTyA6HTMT6 33
MH>K6HepHM
yK333HM$i
33
no CJ3M3MK3, K3KTO M
npMMepM c noApoSen snanMS sa peiuaBsne HS pssjiMHHMTe no CTenen
H3 TpyAHOCT 4 TMn3 T6CTOBM BtnpOCM M 33A3HM.
A-p XanoBa E.H. - XpOHOJiorHHen cnnctK H pesiOMexa
Page 2/22
HoMep:
3amaBiie:
Aerop /M/:
PeatOMe:
C6opnm< " Tecmoeu ei>npocu u sadavu no (pusuKa"- vacm II
P. Ko6nnapOB, E. Xajioea, C. HMKOJIOB
npunr" EOOfl, CodDun, 2006, 2010.
B HSCTOHLHSTS sropa MSCT HS c6opHMKa ca BKntOMenn TeciOBn
BtnpOCM M SaflaHM, CtOTBeTCTBaiUM H3 JieKLJMOHHMfl M3T6PM3J1 H3
Kypcs no cpM3MK3 II HacT, npenoflasaH B TY-Codpufl. CSopnmcbT
o6xBain3 pasflenme "TpenieHMfl, BbnHM n ssyK", ,,Bt>^HOB3 oninKa",
na KBaHTOBara dpusuKa" n „ EneivieHTM H3
", Maiepnan TBtpfle oOiunpeH n ipyflen 33 cryfleHTMTe
. OCHOBHOTO npeflHasHaneHne HS HacTOflLqufl c6opnnK, KOMTO
ce Msnonssa or cryflenTUTe, e fla noflnoMorne caMOCTOflTejiHara MM
noflroioBKa 33 ycneiuHoio ycsoflBane na neKUMOHHua MSTepna/i, KSKTO
n fla ce nanonsBa KSTO ptKOBOflCTBO 33 npoee>KflaHe Ha
ynpa>KHeHMfl. KbM BCBKH pasflen e yiosaHS cbOTBeiHSTa
cnpaBKs c ocHOBHHie cpopMynn, fledpunnunn, SSKOHM, 3 nnicbfle M nonoflpo6nn o6flCH6HMfl c npuMepn n cpurypn 33 fla ynecnn
npn noflroroBKara Ha nanma. B Kpaa Ha c6opHMKa ca
orroBOpme na recTOBMre Btnpocn n saflsnn n Heo6xoAHMnre
CpMSMHHM
KOHCT3HTM.
OCHOBHMT6
MeTOflMHHM
yK333HMfl
11
na TecroBMTe Btnpocn n saflann no Tflxnars
M npeflHasHaneHne, npeflciaBeHu B ntpsars Maci na
c6opHMKa, ca BannflHH M 33 rasn nacr. OsHaneHMflTa na BenuMMHure M
BBB BceKM OT pasflennre ca ctrnacno
M dpopiviynM, npeflciaBenn KtM BCBKH OT Tax.
-p Xanoea E.H. - XpoHOJiorHHCH cnnctK H pesiOMexa
Page 3/22
MSnOJISBAHA JlEfEHflA:
1 . ntpenTe H6TMpn uncppn ca roflMHara Ha OTnenaTBaHe;
2. CneABa 6yKBa: A - CTainn B Me>KflyHapoflHii cnncaHfifl; B - CTarnn B
C - floicnaflu Ha KOHCpepeHunn B ntnen TBKCT; D B pesioMe;
3. nocneflHara Mucppa e aa nopeAen HOMep B rpynaia sa ctoTBerHaia
Ha
HoMep:
3amaBMe:
Aerop /M/:
M3flaHne:
1988C1
"OnmoeneKmpOHHU cucmeMu e weneson-bmnun mpancnopm",
Jl. HeA^nKOBa, T. ^HaKnesa, E. Xajioea, fl. SnnKOB, C. CTOJIHOB
flbpsa MnaAe>KKa Haynna cecnn Ha BHBTY "T. Ka6neniKOB",
, TOM I, (1988), 131-136.
PeaiOMe:
B AOxnaAa e HanpaeeH ntneH ananna Ha usnomBaHero Ha
onroeneicrpoHUKaTa B >KFI rpancnopTa. Hanpasen e KpartK npemeA
Ha paaBMTnero na onToejieicrpoHHMTe cucieMM B rpaHcnopra no cseia.
ca nepcneKTHBUTe n npeAHMCTBara na raan TexHonorun aa
naAe>KAHOCTTa na ynpasnenne na >KF1 ctciaBa n
noBmuaBane
KanecTBOTO
n KonnMecTBOTO
na
npeAaBanaia
. C Men paswupflBaHe nanonaBaHero Ha BnaKHecioCMCT6MM B Haujara cipana, asTopme npaBfir ananiia na
MOM6HTHOTO
CtCTOflHMe
H3
pa3BMTM6TO
H3
T63M
TeXHOJIOrMM
B
FlocoHeHM ca: HeoSxoAMMOcrra OT MsnpesapBaLua
na KaApn, ny>i<AaTa OT pastunpflBane na npoqeca na
nponsBOACTBO na oniMMHH M3JTbHBaTenn M npneMHMMM OT 6tnrapcKaTa
npoMMiuneHOCT n ronaMOTO SHanenne na HayHHO-nscneAOBaTencKaTa
n BHeApnTencKa ASMHOCT, poAcurypeHa OT cbOTBeTHaTa MaTepnanHO6a3a. CnoAenen e onuTa n f\ocTv\yKe»v\f\ia Ha
KoneKTMB BtB BBTY ,,T. KaSneujKos" no
n BneApflBaneTO na onToeneKrpOHHMTe cucTeMU B TpancnopTa.
HJOMep:
3amaBMe:
Aerop /M/:
1988C2
"Anapamypa sa uscnedeane Ha 6i*p3u npexodHU npou,ecu no Memoda
na epeMeHHO paadenumennama cneKmpocKonun",
fl. SanKOB, Jl. HeA^JiKOBa, T. flnaicMeBa, E. Xanosa, B. FawAapoB,
C. CTOHHOB
fl-bpsa MnaAe>KKa naynna cecufl na BHBTY "T. KaSneiuKOB", c6opnnK
, TOM I, (1988), 137-142.
-p Xajioea E.H. - XpoHOJiorHHen cnnctK H
Page 4/22
PestoMe:
B
ca paameflaHM n noflpo6HO oSflcneHM MCTC-AHTC aa
Ha 6tpan npexoflHM npouecu B Maiepnann aa
onToeneKipoHMKaia npea speivieHHo paaflenmejiHa cneKipocKonna.
Ormcana e Heo6xoflMMaTa anapaiypa aa Mac/ieABane, Kaicro n uenna
pa6oT6H npouec Ha nonyHasaHe na eKcnepuMeHTannn pesynrarn.
rionyMeHMTe flannn or nacneAOBaTejiCKara paOoia, flupeicrHO ce
apxuBupar B rpacpimen M TaOnnneH BHA, npea noflxoflfliy cocjDTyep.
MscneflBaHero MMa flcna npaKTimecKa HaconeHOCT. rionyMeHme
pesyjiTam
cnocoScTBai
aa
noflo6pfiBaHe
KanecTBOTO
Ha
npon3Be>KflaHMTe y nac orrroeneiapoHHti MaTepnann n ycipoMCTsa,
33114010 ca nonyneHM B ycnoena MaKCUMajino
pa6oTHMTe (flMHaiviMHeH pe>KMM na nacneABane na
HoMep:
1998C1
3amaBMe: "MuKpome-bpdocmHu usc/iedeaHun na detpopMupanu odpasmj om
nuHeen HucKonirbmHocmeH nonuemufien",
ABTOP /M/: P. SaMCpuposa, E. Xanoea
M3AaHMe:
K)6nneiiHa naynna cecnfl'98 c Me>KAyHapoAHO ynacine, c6opnnK
"HayMHn ipyAOBe", ..CBtpaoHHa rexnuKa. XHMMS, OnanKa n EKonorun",
KH. 67, (1998), 267-274.
PeaiOMe:
L^en na HacTOHLnaia pa6ora e MMKPOTBI>PAOCTHO nacjieABane na
CTpyicrypHMTe npOMenn npn AecpopMaMMfl B oSnacira na HananoTO na
nnacTMMHO Teneniie npn nuneen HMCKonnvmocTeH nonneTuneH. O6eKT
na nacneABane ca oSpaami or nuneen HMCKoniTbTHOCTeH nonneinneH
c paannHHa cienen na Ae4>opMaunn (Q, 20, 30, 50 n 100%).To3M
nonnMep noKaasa HeoSunai/iHo MexaHMHHO noeeAeHne. B AnarpaMme
HanpexeHne - flec^opMaunfl ce noasflBa fleoeH MaKCMMyM npn
AecpopMaiiMM B o6nacrra na nnacrnMHO TeneHne. yciaHOBeHo e, He
BCMHKM
MMKpOTBtpAOCTHM
XapaKTepMCTMKM,
neHeTpai4MOHHM
KpMBM,
MMKpOTBtpAOCT HO BMKepC M oGLLja MMKpOTBbpAOCT, K3TO CpyHKUMfl H3
AecpopMauMH MunasaT npea MaKCMMyM B MHTepsana 20-30%. B raan
o6nacT MarepnantT oKaasa HaM-ronnMO nnaciMMHo n enacrnMHo
cpeu^y nponnKBane. B o6nacrra Me>KAy
HacrbnaaT CTpyicrypHM npOMeHM, BOAeLqn AO
na Marepnana cpemy npOHMKBane, Koeio oananaBa,
ne seAnara CJICA ntpBun MaKcmviyM aanoHBar npoqecu na nnacrnHna
A-p XanoBa E.H. - XpOHOJiorHHen cnnctK H pesiOMexa
Page 5/22
HoMep:
3arjiaBne:
ABTOP /M/:
PeatOMe:
1998D2
"HadMoneKynna
cmpyKmypa
na
nojiu(6u6eH3oamu)",
f. SaMcpMposa, X. flepena, M. KptCTesa, E. Xa/iosa, M. MnxaiinoBa,
B. KptcTes
TpeTa HaunoHanna KoncpepeHMMJi no XHMMS, 14-16 anpun 1998,
MscneABaHM ca HaAMoneKynHme crpyicrypM M MUKpOTSbpflocTra na
Asa BMAa TeHHOKpuciafiHH nonn(6n6eH3oaTn) (P7MB), pa3nnHaBamn
ce no cipyKTypara Ha cneMcepme CM - nonn(xenTaMeTnneH
6n6eH3oaT) (P7MB), M nonn(AneTnneHOKCHA 6n6eH3oaT) (PDEB).
HanonssaHM ca LunpoKO tr/iOBO peHireHOBO paaceMeaHe M
MMKpOTBtpAOCTHM
M6TOAM.
3a
BTOpMfl
nOJIUMep 6 M3CJieABaHO M
BnnflHueio Ha speivieTo na (J)M3MHecKO ciapeene Btpxy naMeHeHMflia
na cipyKTypaia M MUKpoTBtpAOcrra M e ycTaHOseno, ne speMero na
ciapeeHe BOAH AO ynnbTHflBaHe M noAo6pflBane Ha noApeflenocTra na
MeaoreHnre B cnoa,
Koero
Kopenupa c
napacTBane na
MUKpoTBtpAOCTra no BuKepc M oSmara MUKporBtpAOCT. FlpecivieTHaT
e paaMepa Ha CMeKTMHHiifl nepnoA, KOMTO He ce Bnnne OT CTapeeHero.
KoHCTainpano e, ne B nonniviepa nojin(xenTaMeTtineH 6n6eH3oaj)
ctiiiecTByBaT eAHOBpeivieHHO KpucranHa, CMeKTunna M awiopcpna cpasn.
CpaBHSBane na pesyniaTMTe, nonyneHM sa ABaia nonniviepa noKassaj,
ne
HannHnero
na
KucnopoAeH
aiOM
B
cneticepa
na
nonn(AneTHJieHOKCMA 6n6eH3oaT) noAoSpnBa cnoco6HOCTra ICBM
MonexyjiHa
penaKcauna,
HO Haiviaji^Ba
cnoco6Hoci na TeMHOKucTanHme 6n6eH3oarii.
HoMep:
3arnaBiie:
ABTOP /M/:
PestOMe:
1998D3
"MuKpome'bpdocm
u
MUKpocKonun
Ha
aaiua
no/iuoKcuemufieH",
f. SaMCJDnpoBa, E. Xajioea, E. HSAKOB
TpeTa HamionajiHa KOHCpepenunfl no XMMMH, 14-16 anpun 1998,
e
MUKpoiBtpAOcrra
no
BuKepc
(MHV)
na
CBptXBMCOKOMOJieKyJieH nOJlMOKCUeTHJieH o6jTbM6H C P33J1MHHM AO3M
OT 0 AO 20 kGy B JiorapnTMMHHa CKana. 3a o6pa3Ljn o6ntM6HM c AOSM
no-roneMM OT 0,1 kGy B saBiicuMOcrra na MHV OT A"t>Ji6oHMHaTa na
npoHHKsane ce noaBflea MaKCMMyM, r.e. MMa noBtpxHOCTHO
KOBTO e noTBtpAeno M OT MUKpocKoncKH
,H-p XanoBa E.H. - XpOHOJiorHHCH crractK H pe3K)Mexa
Page 6/22
Ha cpesose Ha o6pa3L4MTe, icbflero nepcJDeKTHOCTra n pasMepme na
ccpepojiMTMTe ca MaKCHMajinn HenocpeflCTBeno HOA
enow. Ha6nK)flaBaHM ca pasiiMHHM crpyicrypHM npoMenn npi/i
AO3M. npM M3J1KM AO3M C6 OCtLHeCTBflBa paflMaL|MOHHO
KoraTo Aosme napacnar AMCTpyKLjHara n ctLUMBaHero npoiMMai
eflHOBpeivieHHo n sanoHBa cfjopMnpaHeio Ha ?ICHO
npocrpaHCTBena Mpexa c OTAennHe Ha MUKpore/i n son
CrpyKrypHMTe npoMenn npn BUCOKM AOSM ce A^fwaT na
Tonene na nonnMepa.
na npeKpuciannaaLtufl o6paai4H noKaasaT no-niicKa
CjieA npeKpucTannsaMMflTa ce oGpasysar
crpyicrypM no Mexannaivia na AUCpyanoHHUfl KOHipo^.
ripe-Menu ca cBtpaann c OTAenaHeio Ha MMKporen, son n MaKporen B
o6eM Ha o6pa3ei4a.
HoMep:
3amaBne:
ABTOP /M/:
1999D1
"Onpedefinne na aKmueaijuoHeH o6eM e CTsnonuMepu na emufien u
HopdopneH wpes MUKpome-bpdocmnu usMepeanun" ,
f. 3aMdpv\posa, E. Xajioea, E. MsaHOB, M. Mmuesa, J. Perefla, V.
Lorenzo
XIII HaunonajieH cuMnosnyivi "nonnMepn-99", 23-25 cenreMBpn 1999,
Byprac, Btnrapun.
PeatoMe:
CKOpocira
na
e eKcnoHeHquanHOTo ypaBHenne Ha Eyring sa
AecpopMaiinfl sa ctOTBeTHMTe BennMnnn or
MMKpOTBtpAOCTHMTe M3MepBaHMfl. O66KT H3 M3CneABaH6 C3 H6T BMA3
ctnonmviepii na en/men c HOp6opneH, nonyMenn Btpxy pasnunnn
KarannsaTopHM cucieMM.
OnpeAenenn ca
cioiiHOCTMTe sa
aKTMBaqnoHHUfl o6eM, KOMTO ca or cbinna nopnAt>K, KaKTO resn,
ycraHOBeHM sa HMCTUJI nuneeH nonneTuneH.
Mpes nosurpoHHa aHMXunauna ca nscneABann v\n
cioiiHocTMTe M MHTeHSMTeiMTe na BpewenaTa na >KMBOT na
opronosnTpoHnyMa M cpeAHun paAnyc na nopMTe B resn nonnMepn.
Hanpasena e KopenaMMft Me>KAy MUKpOTBtpAOCTHO onpeAe/ieHme
CTpyicrypHM xapaKTepucTMKM M nonyMeHme c wieioAa na nosmpoHHara
HoMep:
3arjiaBne:
ABTOP /M/:
2000D1
"C-V frequency analysis of LPCVD-silicon oxynitride films
S. Alexandrova, A. Szekeres, E. Halova and M. Modreanu
A-p Xanosa E.H. - XpOHOJiorHHen cnactK H
Page 7/22
1 1th International School on Condensed Matter Physics, "Materials for
Information Technology in the new millenium ", September 3-8, 2000,
Varna, Bulgaria.
PesiOMe:
B HacTOflLnaia paSoiaia ca npeflCTaBenn peaynraTMTe OT
eneicrpuMHUTe cBOMCTsa na SiOxNy cnoese, Bts ocnosa na HecioreH
ananna na BonT-KanaiinTHBHn (C-V) xapaKrepucTHKM, onpeflenenn
flpn MacjieflBaneTo e npmiOKena C-V TexHMKa npn
Tewneparypa npn pasjinnnn HecroTH or 100 Hz flo 1 MHz.
MscjieflBaHM ca CBOMCTBara na SiOxNy/Si crpyicrypM npea cpaBnenne
na HecTOTHaia aaBUCMMOcr na C-V xapaKrepucTUKme na ABOMKH p- n
n-Tun Si noAno>KKii. Or BucoKOHecTOTHara rpaHMija na nanpe>KeHMfiTa
na nnocKure SOHM e nanpasena oqeHKa na o6uinfl cpuKcupan aapnfl B
OKCMfla. Paanpeflenennero na n/rbTHOcrra na MHiepcbeiiCHMTe ynoBKH
e npecMeiHaro OT BucoKOHecToreH ana/ins na 1 MHz C-V
MSMepsaHMfl. PeayniaTMTe ce flMCKympaT B KOHieKcra na
HaTpynBanero na OTpnuarejiHH aapaflu B MHTepcpeiica na
OKCMHUTpHfl.
HoMep:
Samaene:
2003A1
"Sensitivity of hydrogen plasma-treated SiO2/Si structures to high
Aerop /H/:
energy electron irradiation",
S. Alexandrova, S. Kaschieva, E. Halova, E. Valcheva, A. Szekeres
Vacuum 69, (2003), 103-106.
PeatOMe:
HscneflBana e paAwaLjHOHHara MyBCTBHTennocT na nanoKenn na
BMCOKonecTOTHa Boflopoflna H nnaaivia, repiviMHHO napacHain SiO2
cnoese, npea nsnarane na AI/SiO2/p-(100)Si cipyKrypn na oSntMBane
c BucoKoenepreTUHHH eneicrpoHM. floKaaano e, He BucoKOHecTOTHara
Boflopoflna nnaaMa, Karo npeABapureriHa oSpaSoiKa 6es
na Si noAJio>KKa, renepupa waxiKO no-sucoKa CTOMHOCT na
aapnfl B OKCMfla, HO yBennHaBaHero na n/rbTHOCTra na MHiepcbePicHMTe
ynoBKM e no-SHaHHTenno B cpaBnenne c pecbepeHTHme o6pa3un 6ea
Ha BOAOpoAHa nnaaivia.
nanarane na BucoKOMecroTHa BOAOpoAHa nnaawa
na sarpern AO 300 °C Si HOAJIO>KKM, noKaaa Me o6jitHBaneTO
npeAM3BMKBa BnoLuaeaHe Ha KanecTBOTo Ha uHiepcpeftca, npoflBflBamo
C6
BtB BHCOKMT6 CTOMHOCTM
H3 CbUKCHpaHU^
33pflA
B OKCMfla H
nntTHOCTTa na MHTepcpeMCHHie
a-p Xanosa E.H. - XponojiorHHCH cnnctK H pesiOMexa
Page 8/22
HoMep:
3amaBMe:
Asrop /M/:
2003C2
"Ana/ius Ha pesynmamume om KaHdudam-cmydeHmcKun usnum no
cbuauKa 3a UHxenepu e TY-Cocpua"
C. HMKOJIOB, P. Ko6nnapOB, E. Xanoea
XXXI HaqnoHajiHa KoHcbepeHU,nfl no OMSMIO, ..FlpexoAtr Me>KAy
M BMCLUeTO o6p33OB3HM6 M o6yHeHM6TO no 0M3MK3",
, (2003), 156-160.
PeatoMe:
B paOoiara e npeACTasena craTMCTMHecioTa o6p36orK3 na
pesyniaTMie or KaHAMAaicryAeHTCKM KOHKypCHM nsnum no cpMSMKa B
TY-Cocpufl, nposeAenn npes 2001 n 2002 TOAMHS. Hanpasena e
ouenKa na noKassHi/ue snaHun no ocnoBHUje pasAenn na cpusuKara,
cnopeA orroBOpme na ctoTBeiHMTe rpynM or recTosn Btnpocn n
33A3HM. CpasHmeriHO roneMMflT Spofi na yHacTHMLjM B KOHKypca
a ce HanpasnT o6ii|M sa CTPSHSTS MSBOAH OTHOCHO
na Marepnana no dpusuKS B cpeAnme yHmimi^a.
nonyneHme ASHHH nosBOJiflBai Aa ce onpeAenaT pasAenme, Btpxy
KOMTO e neoSxoAMMO Aa ce oStpne no-cepnosno BHUMsnue B xypcs no
CpM3MK3 33 MH>KeHepM B TY-CoCpMyi, 3 CtU^O H 33 APyrHTB BMCUJM
HoMep:
3arjiaeMe:
ABTOP /M/:
2004C1
"Formation of thin SiOxNy films on Si by ion implantation",
S. Alexandrova, V. Mikhailovs, R. Kobilsrov, E. Halova
ELECTRONICS ET 2004, book 4, pp 78-82.
PesiOMe:
B T33M CT3TMH 6 AHCKyTMpaH3 BtSMOMCHOCTTa 33 dpOpMMp3H6 H3
SiOxNy cjioese npes MOHHa MMnnaHTSLjMfl H3 N+ B Si, noc/ieABana OT
repMMHHO OKMcneHMe npn 1000 °C. MoAerwpSHM cs npocpunMie HS
33OT3 B Si nOAJ1O>KK3 Hp63 MOHTB Ksp/IO CMMyJ13U,MM.
EneprMflTS,
MOHnaia Aosa M trbJiBT na MMnnaHTau,Mfl ce npoMenfli c u,en Aa ce
nonynaj cnoese c pasnMMHM AeSe/iMHM. EHeprMMie B MHTepsana or 5
AO 25 keV M AOSMTB na MOHMTB - OT 1013 AO 1016 cm"2, Kaiao M
na MMnnaHTMpane ca pasnMHHM, 33 Aa ce nonynsr cjioese c
Ae6enMHM. npocpM/iMie HS MMnnsHTMpsHMie MOHM cneA OKMc/ienne ca
c Msnonssane na CTaHAaprno AncpysMOHHO ypasneHMe.
e ponaia na AedpeKTMie, dpopMMpaHM no speivie na
MMnnaHT3U.MflT3, B npoqeca na OKMcneHMe.
-p XajiOBa E.H. - XpoHOJioraHeH crmcbK H
Page 9/22
Hoiwiep:
SamasMe:
Aerop /M/:
2005A1
"LPCVD-silicon oxynitride films: interface properties"
E. Halova, S. Alexandrova, A. Szekeres, M. Modreanu
Microelectronics Reliability, 45, (2005), 982-985.
PesioMe:
MacneflBaHM
ca
MHiepcpeMCHUTe
csoMCTBa
Ha
OKCMHurpuflHH SiOxNy cnoese, OTJioKenn OT raaosa cpaaa npn HMCKO
Harmrane, npn TCMneparypa OT 860 °C, spea ananna na BOJITC-V M npoBOflMMOCTHM G-V xapaKrepucTHKM na Meran(MOS) KOHflenaaTopM. nonyneHUTe peaynTarn aa
nnvmocTTa na MHTepcpeMCHme ynoBKM npea rexnuKU na
eAHonecioTHo npn6nn>KeHMe npn G-V MaiviepBaHMfl, na C-V
M3MepBaHMfl M OT eHepreTMHHMfl HM cneicrbp ca B MHoro flo6po
ctmacne. flocjieflBanoTo oTrpflsane nofloSp^Ba MHTepcpeficHMTe
O6ctfleH e npunoca na MHTepcpeiicHMTe ynoBKM aa
na cpUKCupannfl aapafl B oKCMAa, KOCTO e Ba>KHO sa
KOHTpon Ha nparosoTo nanpexenne na MOC npn6opHTe.
HoMep:
Sarnaetie:
2006A1
"Investigation ofp-Type MOS Structure Irradiated with 23 MeV
ABTOP /M/:
PeaiOMe:
Electrons"
S. Kaschieva, E. Halova, E. Vlaikova, S. Alexandrova, E. Valcheva,
S. Dmitriev
Plasma Process. Polym., 3, (2006), 237-240.
MacneflBaHM ca p-Tun cunnMneBM MOC CTpyicrypn o6jrbHeHn c 23 MeV
eneiapoHM BtB saKyyw c pasnunna npofltn>KMTenHOCT. FlpoMeHMTe B
eneicrpuHHUTe xapaKTepucTMKa na MOC CTpyicrypnTe cnefl oSirbMBane
c eneiapoHM ca nacneflBaHM npea BoriT-KanaMHTMBHH C-V, BOJITaivinepHM I-V M na nposoflmviocT G-V MCTOAM. HaLUMTe pesyriTa™
, ne o6jTbHBane c BMCOKoenepreTUHHn eneiapoHM renepupa
aapaflu B OKCMfla M B Si-SiO2 MHTepdpeiic, KOMTO ca
saBMCMMM. Cnefl oGntMBane c eneiapoHM, e KOHCTaTupano
na flsa BMfla MHTepdpeMCHM y/ioBKH. EnepreTMMHOTO
nono>KeHne na ynoBKUTe, oueneHM OT Tesn Tpn HesasucMMH MeTOfla e
MHoro 6nn3O flo Ev +0,16 eV M Ev +0,36 eV. Ha6n»oflaBaHMTe ynoBKM
MoraT fla StflaT CBtpaaHU c BtSHMKBaHeTO Ha KOMrmeKCn 6opV/B M KMCJiopofl-BaKaHLjmi V/O. Tean pesynTaTu ca B MHoro
ctrnacne c naiun no-pannn pesynTaTM, nonyneHM OT TSC M
DLTS MCTOflM.
^-p XanoBa E.H. - XponojiorHHCH CHHCBK H peaiOMexa
Page 10/22
Hoiuep:
2006B2
3amaBne: "Defect formation in 18MeV electron irradiated MOS structures
ABTOP /M/: S. Kaschieva, V. Gueorguiev, E. Halova, S. N. Dmitriev
Bulgarian Journal of Physics, 33, (2006), 48-54.
PeaiOMe:
HacneABano e oSpaayBaneTo na paAnau.noHHM AecpeKTM B MOC crpyKTypn,
o6jTbH6Hn c 18 MeV eneicrpoHM npea BucoKOHecToreH BonT-KanamirnBeH (HF
C-V) n cneicrpocKoni/ifl na AtnSoKM Husa (DLTS) MSTOA. FlOKaaaHo e, ne npn
oSiTbHBaHe c BMCOKoenepreTHHHH e/ieicrpOHn KanaunTera na OKCMAa, IOKTO n
nono>KMTeneH sap^A B OKCMAa HaMannsaT n ctaflaea nostpxHocTHM ynoBKn B
Si/SiO2 MHTep0eiic na CTpyKrypure. OnpeAenenn ca eneprnflia n
HanpesHoro ce^enne Ha aanaeaHe Ha paAnaunoHHo nHAYMnpaHM
ynoBKM B Si/SiO2 MHrepdpeiic na cipyKTypme, nopoAenn or
c BucoKoenepreTHMHH eneicrpoHM. fl^CKyrnpana e npupoAara
Ha jean paAnaqnoHHo HHflyunpaHM ynosKn. floKaaaho e ctiqc, ne
na KucnopOAHara nostpXHOCt B Si/SiO2 MHTepcpeiic aasucn or
na OKCMAa, Kaicro n or Aoaara na eneicrpoHHOio
HoMep:
3arnaBne:
2006B3
"llpeduMcmea Ha mecmoeun Memod 3a npoeepKa u ou,eHKa Ha
SHanunma, yMenunma u Haeuu,ume na odyvaeMume"
Enena Xanoea
M3BECTM51 Ha Ctioaa Ha yneHMTe - CnneeH, TOM 11, KH. 4, (2006), 8-
Aerop /M/:
10.
PeatoMe:
B npeflCTaBeHaia pa6oia e a^eHinpaHo Ha npeflUMCTBara Ha
TeCTOBMfl M6TOfl 33 npOB6pK3 M OLjeHKa H3 3H3HMflTa M yM6HMflTa H3
oCynaeMMTe. TecToeeie ca SAMH OT HaM-aKTyanHMTe n yflaMHM MSTOAM
3a npoBepKa n ouenKa - ocuirypaBST MSCOBOCT n no-BncoK3
o6eKTHBHOCT; nosBormBST OTKpuBaHe na Tunnnnn rpeiuKM n
33TpyAH6HMfl H3 o6yMaeMHTe; npeAOCTaBflT BBSMOKHOCT 33
G3MonoAroTOBK3 n C3MOOL46HK3; nosBonflBST yctBtpiiieHCTBane na
nporpaMM n MeTOAMKSTS HS npenoASBane n APyrn. OT
nperneA Ha npeAMMCTBaTa Ha aKrysjiHun npes
T6CTOBM M6TOA CH6AB3 M3BOA"bT, H6 TOM 6 H3nbJ1HO
33 npoBepxs n oueHKa Ha 3HaHHflia n yMeHnaia Ha o6ynaeMMTe aa
BC3K3 o6pa3OBaTenH3 CTenen.
HoMep:
3amaBMe:
2006B4
"CmpyKmypa na mecm 3a ceMecmpuanen uanum no cpusuKa sa
UH)Kenepu e TY-Cocpun"
a-p XanoBa E.H. - XpoHOJiorHHen CHHCI.K H peaioMexa
Page 11/22
ABTOP /M/:
M3flaHne:
EneHa Xanoea
M3BECTM5R na Ctiosa na ynennTe - CnMBen, TOM 11, KH. 4, (2006),
11-13.
PeaioMe:
B HSCTOHIHSTS psSoTa e npeAJiowena KOHKpeTHS CTpyicryps H3 TBCT 33
ceMecTpMsnen nsnuT no cpn3HK3, CboCpssens c
nporpsM3 sa MHwenepHO oSyneHne Bte BY3. l/lsnonsBana e
CTeneHHS CTpyicryps HS TecT3 onpeAenena OT pasnunnaTa CTenen na
TpyAHOCT M Heo6xOAMMMfl O66M 3H3HMfl H3 BKJIIOMeHMTe BtnpOCM.
TecTbT ctA"bp>K3 30 Btnpocs c 4 Bt3MO>KHM OTroBOps n
cpeAHO no 2 MunyTM speMe 33 OTrosop H3 sceKM Btnpoc.
e M TOHKOB3 CX6M3 33 OMeHflBSHe, OCHOB3B3U43 C6 H3 CTpOFM
n nonyneHM onpeAenen 6poii TOMKH sa npssmieH OTrosop.
HoMep:
3arnaBiie:
ABTOP /M/:
2006B5
"Ananus na pesynmamume om ceMecmpuanen uanum no tpusuKa
mecm sa t/Hxewepu e TY-Cocpun"
EneHa Xanoea
M3BECTM51 HS Ctioss na ynennTe - CJIUBBH, TOM 11, KH. 4, (2006),
14-15.
Pe3K>Me:
flpeACTaBens e CTaTMCTimecKaTS oSpsSoTKs H3 pesynTaTMTe OT
ceMecTpnanHM nsniiTM no cpusuKa npes TecT 33 CTyAeHTM ntpsn Kypc B
TY-CocpMfl, npOBeAenn npes nocneAHMTe HHKO.TIKO FOAMHM. OiteneHM cs
nOK333HMT6 3H3HMH no OCHOBHMT6 P33A6J111 H3 4>M3MK3Ta,
CnOpeA
OTroBOpnTe na ctOTBCTHUTe rpynn OT TecTOBM Btnpocn. Hanpasenn ca
M3BOAM OTHOCHO yCBOflB3HeTO H3 M3T6PM3J13 no C|DM3MK3 B TY-CoCpHfl.
nojiyneHMTe pesynTSTM nosBonaBST Aa ce onpeAenn nocoK3T3 B KOSTO
e Heo6xoAMMO AS ce ps6oTM 33 noBMniaBane ecpeKTHBHOCTra OT Kypca
no CpM3MK3 B 63K3J13B~bpCK3T3 npOrp3M3 33 o6yM6HHe H3 MH>KeHepM B
TY-Codpufl. PesynTaTMTe MoraT Aa StAaT nonesnn ctmo T3K3 n 33
Apyrw
HoMep:
Sarnaene:
ABTOP /M/:
2006B6
"FlpeduMcmea na MynmuMedunma npu npoeewdane na
Kypc no cpusuKa"
CaiuKa AneKcanflpoBa M EneHa Xanosa
M3BECTM51 na Ctrasa HS yqennTe - CjiMBen, TOM 11, KH. 4, (2006),
16-19.
A-p XanoBa E.H. - XpoHOJiorHHCH cnnctK H pesioMexa
Page 12/22
PeatOMe:
B npeflCTasenaTa paSoTa e aKLjeHTMpano na npeflMMCTBaTa na
npM npoBe>KAaHe na neKLtnoHHun Kypc no cpMSMKa.
npeseHTaijMfl e eflna OT naM-aioyanHMTe M
TexHMKM MsnoiiSBaHM sa oHarneflflBaHe na jneKUMOHHMfl
Kypc no cpMSMKa. PeflMua ca npeflMMCTBaTa M - noBMiiiena
aTpaKTMBHOCT M HameflHOCT na CPMSMHHMTB HsneHMfl M ecpeKTM npefl
ronaivia rpyna OT CTyfleHTM; BKSMOWHOCT sa Msnonssane na BMpTyanHM
M TpyflHO octuoecTBMMM eKcnepuMeHTM npw ecTecTBenn
M flpyrM. OT KpaTKMH npemefl Ha npeflMMCTsaTa cneflsa
ne MynTMMeflMMHaTa npesenTauMn 1146 cnoMome sa
noBMLuasaHe Ha: BtanpneMaHeTO Ha Marepnana, TpaMHOCTTa Ha
SHaHMflTa, MOTMBaLtMflTa 33 M3yM3B3H6 M MHT6P6C3 KbM flMCMMnJ1MHaT3
CpM3MK3.
HoMep:
SarnaeMe:
ABTOP /M/:
UsaaHUG:
PesKDMe:
2007A1
"Electrical characterization of MOS structures with 10 nm SiO2,
thermally grown on plasma hydrogenated (100)-pSi"
E. Halova, S. Alexandrova
Journal of Optoelectronics and Advsnced Materials (JOAM), vol. 9, ISS.
2, (2007), p 402-405.
B Tasn CTSTMJI, cpOKycvr e Btpxy eneKrpMMHMTe CBOMCTBS H3 SiO2/pTMn (100)Si MHTepCpeilC, KtfleTO TbHKMflT CMJIMUMeB OKCMflBH CJ10M e
TepMMMHO
M3P3CH3T
Btpxy
BMCOKOH6CTOTHO
rf
RJlSSMeHO-
xMflporeHMpsHM CMJ1ML4M6BM noflno>KKM. FlpeflCTaseHM ca nonyneHMTe
pesynTaTMTe 33 MHTepcpeiiCHMTe CBoPicTBa na MOC CTpyicrypM Bts
ocHOBa na noflpo6no MScneflBane na BOJiT-KansunTMBHM C-V M
npOBOflMMOCTHM G-V
X3p3KT6pMCTMKM npM pSSflMHHM M6CTOTM M6>Kfly
500 HZ M 300 KHZ. MHCpOpM3U.Mfl 33 33pefl6HMTe fleCpeKTM B SJ/SJO2
MHTepcpeiic e nonyMens OT necTOTHOTO xspsicrepMSMpsne. MBCTOTHSTS
flMCnepCMfl
P33KPMB3T HanMHM6TO MJ1M H3 MHTepCp6MCHM VJ1OBKM MUM H3
nexoMoreHHO pasnpeflenenMe na flecpemHMTe qeHTpM B OKCMAS B
6J1M3OCT flo Si/SiO2 MHTepcpeiic. npeflno>KeH3 e npoMeflyps 33
npeoflonassHe HS npoGneivia c oSMHaiiHO nsSnioflSBSHOTo ysenMMeHMe
na yreMKa npes OKCMfls H3 p-Si, KoeTO 33TpyflHflB3 TOMHOTO
onpeflermne HS nmsTHOCTTa na MHTepcpeiicHMTe ynoBKM flOpM M B nofle6e/iM OKCMflM. MscjieflBano e BJiMflHMeTO na BMCOKOMecTOTnaTa rf
BoflopoflHa nnasivia Btpxy CMJiMMMesMTe CTpyicrypM. YcTaHOBeno e, He
KoriMHecTBOTO M npMpoflaTa Ha flecpeKTMTe saBMCM OT TeivinepaTypaTa
na noflno>KKaTa no speivie na nsnaraneTO na BoflopoflHa nnasivia M OT
opMeHTau,MflTa na Si.
-p XanoBa E.H. - XpoHOJiorHHen cnnctK H pesioMexa
Page 13/22
HoMep:
3amaBne:
ABTOP /M/:
PeaiOMe:
2007B2
"MH(popMau,uoHHO
Ha fieKU,uu npu MynmuMeduunu
npedcmaenHun"
Ejiena M. Xanoea n CaniKa IT AneKcaHflpoea
MSBECTMfl na Cbiosa na yneHme - CjiMBen, TOM 12, (2007), 146-149.
MyjiTHMeflMMHara npeseHTaijMfl e eflna or
cbepeivieHHn TexHMKM MsnonsBaHM sa npOBe>KA3He Ha
Kypcose BBB BMcmeTO M cpeflHo oSpaaosaHne. HeMHme
- no-ronflMa arpaKTMBHocT n HarneAHOCT naflBneHMflran edpeKrn
Bt3MO>KHOCT sa BnpryanHM fleMOHCTpamin n TPYAHO
eKcnepuMeHTM or npupOASTa - a npasHT nesaMenuM
M6TOA-
I~l0
T63M
npUHMHM
Tfl
H3Bne36
LUMpOKO
B
HS BCMMKM ussecTHM ynnBepcMTeTM B cseTOBeH M3ii|36.
BHUManne ce o6ptLMa H3 cneuncpuMHUTe ocoSenocTM H3
H3 neKMMOHHMfl M3Tepnan, KOMTO MoraTA3 npeACTasiiflBST
33TpyAH6Hne npn BtsnpMflTiieTO OT CTPSHS na CTyAeHTMTe. B
H3CTOflLL|MflT
p36OT3
OnTMMM3Mp3H6
H3
C6
CHMpaiVie
MHCpOpMSLlMOHHO
MM6HHO
H3
CtAtp^SHUe
npo6neMMT6
H3
H3
JieKLJHOHHHH
Maiepnan.
HoMep:
3arnaBne:
ABTOP /M/:
Pe3K)Me:
2007D3
"Study of the charged defects in MOS structures with thin 10 nm SiO2
thermally grown on plasma hydrogenated (100)-pSf
E. Halova, S. Alexandrova and A Szekeres
Proc.15th International Summer School on Vacuum, Electron and Ion
Technologies (2007), 108
Pipes nocneAHMTe TOAMHM noMMCTBsneTO na Si nostpxHOCT
TepMMMHO OKMcneHne, K3TO eian OT npoMSBOflCTBOTO na npn6opn, e
o6eKT na noBMiueHO BHUManne. B HacTOflii|OTO
e nacoMeno Btpxy npunoxeHne na
nnasMa, KSTO npeAOKucnuTeriHa o6pa6oTKa na Si
noBtpxHOCT. YcTaHOBeHO e, ne B cpSBHenne etc CTSHASPTHOTO RCA
nOMMCTB3H6
H3
Si
HOBtpXHOCT
BKJIIOMBSHeTO H3 BOAOpOA
B Si
npeAM
TepMMMHO
OKMCJieHMC,
6/1M3O AO nOBtpXHOCTTa, BOAM AO
wspacTsane na no-KanecTBeHM SiO2 cnoese npM TeMnepaTypM OT 850
°C. HanpSBeno e npeAnonoxeHMe, ne TeMnepaTypaTa HS OKMcneHMe
MO>Ke A3 6tAe AontriHUTenno naManena, AO nonynaBane na noAo6nM
CBOMCTB3 H3 OKCMA3, 3KO C6 yBCJIMMM KOflMMeCTBOTO H3
o6n3CTT3 na Si 6/1M3O AO noBtpxHOcrra.
K-p Xajiosa E.H. - XpoHOJiorHHen cnnc-bK H pesiOMexa
Page 14/22
HoMep:
SamaBMe:
ABTOP /M/:
MsflaHMe:
PesiOMe:
2009A1
"Fixed oxide charge, interface traps and border traps in MOS structures,
grown on plasma hydrogenated (100)-pSi"
E. Halova, S. Alexandrova and A Szekeres
Journal of Optoelectronics and Advanced Materials (JOAM), vol. 11,
ISS. 10, (2009) p.1498-1501.
FlpeflMeT na nacToamoTO npoyHBane e MHTepcpeMCHara oSnacr na
MOC CTpyKiypw c OKCMflu, nspacnaTu etpxy (100)-pSi xnflporeHnpaHM
noflno>KKM. XnflporeHnpanero na Si noflJio>KKM e naBtpnieHO
BucoKOHecTOTHa rf njia3M3 MJIM 6ea sarpaBane, nnti npw
na reiyinepaiypa OT 300 °C. OKCMflme ca repwinHHO Mspacnarn B cyx
O2 npw reMnepaiypa 850 °C. nonyHena e HHdpopMaumq sa
na sapeflenme fledpeKTu, Kaicro n sa TSXHOTO
B oGnacrra na Si/SiO2 nHTepdpewc, onpefleneHM OT
Bonr-KanamiTMBHM (C-V) saBMCMMOCTM. FlpoBeAeH e
cpaBHUienen ana/ins na eneicrpMHecKM aicrnBHM fledpeicru Ha
CTpyKrypme, nonyHenn npn pasnimnn ycnoBun na xnflporeHnpane.
na SasHme ynoBKM ca onpeflenenn OT anannsa na
C-V Kpusn. npodpmrbT na nirbTHOCTra na
MHTepcpeiicHMTe y/iosKM Btpxy saSpanenaTa aona na Si ce onpeflenn
Hpea CTanflapTen BucoKOMecTOTen (HF) C-V MeTOfl OT 300 kHz C-V
xapaiaepucTHKM na MOC CTpyicrypnTe. Onpefle^enn ca co6cTBeHMTe
aapaflM B oKCMfla Mpea rpaHMHHMTe MBCTOTH pasAenfli^n HUCKMTB OT
BMCOKMTe
H6CTOTH
33
paSJIMHHMTe
MSCJTieflBaHM
o6pa3L|M.
KoHMeHTpauMflTa M npnpoflaTa
na
flecpeianTe
sasucn
TeivinepaTypaTa na noflnoxKaTa no epeivie na nanaraneTO
nnaaivia. PeaynTaTUTe noKaaaxa renepupane
aapaflu B OKCHfl, wapacnaT Btpxy Si xnflporennpan
sarpneaHe.
Howep:
3amaBue:
Aerop /M/:
MaaaHMe:
PeatoMe:
OT
na
na
6es
2009D2
"Investigation of interface traps p-type MOS structure irradiated with 23
MeV electrons"
E Halova, S Alexandrova, S. Kaschieva and S.N.Dmitriev
Proc.16th International Summer School on Vacuum, Electron and Ion
Technologies (2009), 87.
B Tosa npoyHBane ca nacneflBann p-Tun <100> Si MOC CTpyicrypn,
oSntneHM c eneiopOHH c eHeprnn 23 MeV. O6pa3u.nTe ca oSntHBaHM
B npOA"bJi>KeHMe na 30 n 120 s. Eneiapi/mecKMTe csoiicTBa na MOC
fl-p Xajioea E.H. - XpoHonorHHCH cnnctK H pesioMexa
Page 15/22
CTpyKTypme ca M3CJieflB3Hii nocpeflCTBOM BOJiT-KanaqnTHBHn (C-V) n
(G-V) n BOJiT-aivinepHM (I-V) xapaKTepMCTMKM, npn
MeciOTn or 500 Hz flo 300 kHz, npeflM n cnefl o6rrbHBaHe.
L|e;iT3 Ha anannaa Ha eKcnepmvieHTajiHMTe C-V flannM e fla ce
onpefleriM enepreTHMHOTO nonoKenne na paflnaLjuoHHo
ynoBKM, paanonoKen B Si/SiO2 MHTepcpewc, n fla ce
MHflymipaHMfl 3apafl B SiO2 cnefl oGjitHBane c eneiopOHM c
enepriifl. AnajinstT Ha G-V xapaKrepucTHKure noKaasaT
na KOHLieHTpaMMflTa MHiepdpePicHMTe fle4)eKTM na MOC CTpyKTypme c
na floaaia eneiapOHM.
HoMep:
Sarnaene:
Aerop /w/:
M3flaHne:
Pe3K>Me:
2010A1
"Advantages and Disadvantages of the Test Method for Checking and
Evaluating of the Knowledge, the Skills and the Habits of Students"
E. Y. Halova and R. G. Kobilarov
AIP Conference Proceedings, vol. 1203, (2010), p. 1325-1328, Melville,
New York.
HacToainaTa
pa6oia
aKLienrupa
Btpxy
npeflUMCTBaia
n
na TecTOBna wieiofl sa nposepKa n oi^eHKa na
n yMennnTa na CTyfleHime. TecTOBeie ca eflun OT natin naM-noflxoflflinn MeTOflM sa nposepKa n oqeHflBaHe - re
06x6311437 na roiiflMO KonnnecTBO nayHasaH Marepnan n ocurypaBar
Heo6xoflnwiaTa o6eKTMBHOCT, orKpuBane na TMHUHHH rpeiuKM M
jpyflHOCTM na cryfleHTme, caMOCTOflTenna pa6oia n caiviooueHKs,
yctBtpiueHCTBSHe HS ciyfleHTCKUTe nporpawn n Meioflu na
npenoflSBsne n MHoro flpyrn. OT flpyra crpans, TecioBmiT Meiofl na
nannTBane MMS HeflociaTtun: ie noKaasaT KpafiHHH orroBOp, KSTO ce
nponycKa MMCJIOBHHH npouec HS CTyfleHTMTe,_KOMTO e flosen flo JOBS
pemenne; mmHure cnocoGnocTM n CTSHOBume na BCBKH ciyfleHT ne
MO>Ke fla crane BUflno cawo OT TecTa, Tbv\o TecTtT aKMeHTMpa
caMO H3 onpeflenenn xapaKTepucTUKM. OT KpaTKua npernefl na
npeflMMCTBaTS n HeflOCTarbunTe na nonyrmpHMn npea nocneflHMTe
rOflMHM T6CTOBM MCTOfl H3 M3nMTB3He, MO>KeM fl3 33KJUOHMM, H6 TO3M
MeTOfl e noflxoflflut sa npoeepKa M oueHKa Ha SHaHHflia n yMeHnaia Ha
CTyfleHTMTe, sa scaKa o6pa3OBaTenHa CTenen, caMO aKo e npnflpy>KeH
c flpyrn MeTOflii sa
HoMep:
Samaene:
2010A2
"Electric Field Pressure and Its Application in Material Science"
Zi-p Xajioea E.H. - XpoHOJiorHHCH cnnctK H pesiOMexa
Page 16/22
ABTOP /M/:
R. G. Kobilarov and E. Y. Halova
AIP Conference Proceedings, vol. 1203, (2010), p. 1424-1425, Melville,
New York.
PeaioMe:
B crarnfiTa e npeACTasen eHeprernHeH MBTOA aa onpeAermne Ha
HajiflraneTO na e/ietcrpuHHOTO none B nposoflHUK. ToaM Merofl e nopaa6MpaeM aa ciyfleHTM or ManinHHure cpaKy/vreTM, Koero e
npeflnocraBKa aa ycneniHOTO ycBOHBane Ha roan Marepnan. noKaaano
e, Me MoneKynapHMTe eneicrpMHHM no/ieia OT nopaflBKa na 1011 V/m,
orpOMno nanpe^enne (~ 1010 Pa) n re ca orroBopnn aa
na TBtpflme rena. Flo roan HaHMH ce BtBe^a eneiapuMHa
Kapmna npn onpeAenflne na flKocira na TBtpflOio THJIO n e efliin
npmviep
aa
npunoweHMfrra
cpnanKaia
B
Kypcosere
no
n ctnpOTMBneHne na no
HoMep:
2010A3
Samaene: ,,Defects in SiO /Si Structures Formed by Dry Thermal Oxidation ofRF
ABTOP /M/:
H3AaHne:
Hydrogen Plasma Cleaned Si"
S Alexandrova, A Szekeres, E Halova
IOP Conf. Series: Materials Science and Engineering 15 (2010)
012037; doi: 10.1088/1757-899X/15/17012037
PeaiOMe:
B HacTomJuaia paSoia e npeflcraseHa Kaprnna na fledpeKTme B
CBptxrbHKM (~10 nm) OKcuflu, napacHain npes HMCKO-TeMneparypHO
(850°C) repMMHHO OKMcnenne, Btpxy nnasMeno xnAporennpaHM
(100)Si n (111)Si noAJio>KKM. HaSnioAaBaHa e HecroiHa Ancnepcun na
BOJiT-KanamiTMBHUTe (C-V) n npOBOAMMOCTHnre (G-V) xapaKTepucrnKH,
onpeAenena OT AMCKPCTHM MHTepdpeiicHM nnsa na AecpeKTM c
enepreTMHHO nonoKenne B aa6paHenaTa aona na Si,
ynosKn n ynosKM B npunoBtpxHOCTHaTa o6nacT na Si.
ca npeKypcopn na ynosKM, KOMTO ca AecpeKTM B
npunoBbpxHOCTeH CJIOM c no-HMCKa nnbTHOCT B Si, c-bA"t»P>Kau4
KOMTO ce cpopivrnpaT no BpeMe na XMAporeHMpaHeTO M ce BKnKDMBaT B
paCTflLMMfl OKCMA6H CJ1OM.
MexaHMMHMTB HanpexeHMfl, OI46H6HM OT
anariMaa Ha AannMTe, nojiyneHM OT cneiapajinaTa enMncoMeTpMfl M
eneKTpooTpa>KaTenHa cneicrpocKonMfl, ca OT nopnA^Ka na 108 N/m2.
HoMep:
3amaBne:
201OA4
"Interface trap generation in MOS structures by high-energy electron
irradiation"
fl-p XajioBa E.H. - XpOHonorHHCH CIIHCT>K H pesioMexa
Page 17/22
ABTOP /M/:
H3flaHne:
E Halova, S Alexandrova, S Kaschieva and S N Dmitriev
Journal of physics: Conference Series 253 (2010) 012047; doi:
10.1088/1742-6596/253/1 /012047
PesiOMe:
MacjieflBanii ca npOMennie B xapaKrepucTUKMTe na flecpeKrure Ha
MOS crpyKTypn, npeflnsBUKanii npes o6jrbHBaHe c eneicrpoHM c
eneprnfl 23 MeV, c pasriMHHa npofl-bJi>KHTenHocT. PaanpefleneHMero
na paAnaunoHHO MHAyu.npaHMTe MHTepcpeficHM ynoBKH, naMnpai^n ce B
Si/SiC>2 MHTepcpefic, nonyneHM OT BonT-Kanai4MTMBHM xapaKrepucTHKM n
pasnaraneTO Ha MynTn-HecTOTHn RPOBOAHMOCTHM xapaKrepwcTHKM, ca
OT OTfleriHUTe AecpeKTM, c enepreTMMHM nnea
B Si 3a6panena sona. MHTepcpewcHMTe ynoBKM ce
C Pb M6HTPM, HMflTO KOHLieHTpai4Mfl 33BMCM OT BpeMCTO H3
KonuenTpamiflTa Ha Pbi ueHTpMTe noKasa na
yBennHeHne B cpasneHne c pecpepeHTHun
o6paseL4, AOKaTO Pbo ueHTpnTe ca HaGnfOAaBann caivio cneA
o6iTbHBaHe. BonT-KanaL|MTMBHMTe (C-V) xapaiaepucTHKM
ysennHaBaHe na
nonoKMTenHMfl sap^A
B OKCMAa,
renepupaneTo na E1 ijeHTpM. FenepupaHM ca ctmo AecpeK™ n B Si
noA/io>KKa B o6nacTTa na npocTpancTBen sap^A, KOHTO ce cBtpssaT c
6op (V/B) n KucnopOA (V/O)
HoMep:
3arnaBne:
2010B5
"Ocodenocmu npu npoeexdane u oi4enaeaHe na nadopamopnu
ABTOP /M/:
Enena M. Xanoea
M3BECTM?1 na Ctwaa na ynenuTe - CnnseH, TOM 17, (2010), 108-111.
PesiOMe:
Jla6opaTopHMTe aaHflTna, KBTO nacT OT saAtn^MTennaTa o6ynaeMa
nporpaMa, nrpanT sa>KHa B-bannTaTenna n o6pa3OBaTenna pona B
pasBMTneTo na CTyASHTMTe. Flo spewie na ynpa>KHeHneTo ce
3aTBtp>KAaBa MsynaBaHna MaTepnan, dpopMnpaT ce Hasnun n
sa pa6oTa
c npuSopn n oSopyABane n ce
caMOCTOflTenHOCT na MMCJieneTO na CTyAeHTHTe.
y6e>KAaBaT CTyAenTMTe B ncTHHHOcira na TeopunTa, IOTO B CI.IHOTO
speivie nosBOJiflsaT Aa ce Ha6nK)AaBa MHAUBMAyariHOTO passnTue n
pa6oTa na BCBKH CTyAeHT. JlaSopaTOpnoTO sanaTue ce oqeHflBa na
6asaTa na Tpn nacTM - TeopeTunna, eKcnepuMeHTanna n
na npoTOKon, sa Aa ce CTMMynupa aKTMBHOTO y^acTue na
npes BceKM eTan. TaKa BcnKa OMeHKa OT 6 AO 2 sasucn OT
KOMnOHCHTM H3 SaHflTMeTO.
Ol|eHKaTa CtlilO SaBMCM OT
-p XajioBa E.H. - XpoHOJiorHHen cnnctK H pesiOMexa
H3
Page 18/22
flonycnaTMTe rpeiiJKM, KOMTO Morar fla 6tflar rpy6n, HerpySn MJIM
HoMep:
3arnaBne:
Asrop /M/:
2010B6
"flHume Ha cpusuKama - cpopyM sa usnea Ha mananmu"
Enena M. Xa/ioea
MSBECTHfl Ha Cbiosa Ha yHenme - CnMBen, TOM 17, (2010), 41-44.
PeaiOMe:
,,flHM na dprnmara" ce npoBe>KflaT ecflKa roflnna c uen f\a ce
MHiepeca na ciyfleHTme KtM cpusMKaja. CtGnTMeio ce CBCTOM OT
npeflcraBflHe na AQKnaflu or cryfleHTu, npenoflaeaTejin n yrBtpflmin
Ce rOCT-C|DM3ML4M H3 T6MM OT LUMpOK CfieKTbp OT HayHHM o6naCTM H3
cJ3M3MKaTa. FocTMTe na cjsopyMa, KOMTO BKniOHBaT n yMeHnqn OT
n cpeflHMTe yMminma, MoraT fla ce nacnaflflT n na
,,JlaypeaTM na HoGenosa narpafla no cJDnanKa", na M3no>K6a
Ha nocTepn n MaKeTM Ha onpefleneHu cpusuHHki TGMM n HaKpaa
ctCTeaanne aa eHTycuaanpaHMTe c narpafln. FlporpaiviaTa na
ctOnTneTO ce onosecTflBa na suflnn MecTa. SaSenasBa ce TeHfleHMnn,
c BCHKa M3MMHana roflnna, ace no-aacuneH MHTepec KbM cpopyivia.
Cnefl K3TO ,,flHM na cpnanKaTa" npuKntOHn, npeflCTasennTe
ce npeflnaraT flocTtnno na ye6cafiTa na TexHunecKHfl
K3KTO M 6MB3T ny6j1MKyBaHM B c6opHMK.
HoMep:
2010C7
SarnaBue: "Mnadume yvenu u eenuKume omKpumun"
Aerop /M/: E. Xanoea
klsAaHne: flnn na cpM3MKaTa'2010, C6. nonynapHM n naynnn flOKnaflu, Hsfl. TYCodpw, ISSN 1313-9576, (2010), 14-23.
Peaioiue:
B flOKnafla e nanpasen ncTopMHecKH npernefl na BennKUTe OTKpnTun
Bi>B cjDnanKaTa HanpaBeHM OT MnaflM ynenn. npeACTaBenn ca
MCTOpMHeCKM A3HHM, K3KTO M MHTepeCHM C-b6nTMjq, (|)aKTM M JiereHflM 33
peflMLja MJiaflu yneHM, KaKTo n Ha yneHM HanpaBunn ceonTe eennKn
OTKpMTMfl B MJiaflMTe CM FOflMHM.
HoMep:
2011C1
Samaeiie: "ModucpuKamjn na Si noei>pxHOcm vpea N* uMnnanmauuft"
Asrop /M/: AneKcaHflposa C., E. Xanosa, f\. fluMHTpoe
flHM na cpM3MKaTa'2011, C6. flonyjiapHM n nayMHM flOKnaflM, Msfl. TYCocpMfl, ISSN 1313-9576, (2011), 100-106.
A-p XanoBa E.H. - XpoHOJiorHHen CHHCI>K H peaiOMexa
Page 19/22
PeatoMe:
MacneflBaHn ca TbHKM SiOxNy, dpopMMpaHM cjioese B Si,
npea nnasMeHO-MMepcuoHHa MMnnaHTaunfl na aaornn MOHM. Cnoese
ca CMHTeanpaHM npn noc/ieflBamo BMCOKOTeMnepaiypHO orrpflBane na
Si nofljio>KKM B Oa cpefla. AnannatT na MHcppanepBeHUTe cneiapn
noKasa, ne nonyneHMTe HanopasMepnn OKCMHMTPMAHM SiOxNy cnoese
ca o6oraT6HM etc CMJIMLIMM Si n ca etc cpaBHUTenno HMCKO
na aaoT N. noKaaarejiflT na npeMynsane na cnoeBere ce
c MOHHara floaa flo 1.52, KOSTO noKaasa noBmiiaBane na
creneHra na Hmpuflnpane na cnoeBere. PeaynraTM ca B ctrnacne c
npoBeflenoTO CMMyniipaHe na paanpefleneHnaja na MOHme n
MM B Si noflno>KKM.
HoMep:
2011 D2
Samaene: "Nitrogen Ion Implantation into Nanoscaled Si Surface Layer for
Oxynitride Synthesis"
ABTOP /M/: Alexandrova S., A. Szekeres, E. Vlaikova, E. Halova
E-MRS IUMRS ICAM 2011, May 9-1 3 201 1 , Acropolis Congress
Center, Nice, France.
PeaiOMe:
MacneflBaHero Ha ctepeMeHHM cunnmieBM Maiepnajin e BtawioxHocT fla ce
oiroBOpn
Ha MSMCKBaHM^ra
Ha StfleiL^aia
HanoeneicrpoHMKa
n
MMKpoc|30TOHMKa. C perynnpane na crpyicrypaTa n noKaaarenfl na
npenynBane Ha cminuneBna OKCMHurpufl ce ocurypnBa rbBKasocT npn
npOM3BOACTBO H3 3KT11BHH M naCMBHM yCTpOMCTBa
H3 OCHOB3Ta
H3
Si.
Ha
Si
noflno>KKa,
npes
nnaaMeHO-nMepciiOHHa
na aaoTHM MOHM n nocneflBamo OKucnenne e a^TepHarnsa na
CVD wieiofl aa ornarane n e eflna Bt3MO>KHOCT aa
Ha BMcoKOKanecTBeHM Si HaHocrpyKrypn c
KOHrponnpyeMM
napaMerpn.
npeflCTaBenn
ca
MSCJieABane na nojiyneHMTe no TOSH Merofl SiOxNy c/ioese. OnTUHHure n
CTpyxrypHM ceoiicTBa na SiOxNy cnoese ca nacjieflBann npea cneiapanna
ennncoMerpufl SE, MHCppaHepBena cneKipocKonun FTIR n penrreHOBa
cfjOToeneicrpoHHa cneKrpocKonnfl XPS v\M MOflennpane.
HoMep:
3arnaBiie:
ABTOP /M/:
M 3 Aa HUG:
2012A1
"Annealing of Si surface modified by plasma immersion implantation of
nitrogen"
Alexandrova S , E Halova, A Szekeres, E Vlaikova, M Gartner and M
Anastasescu
Journal of Physics: Conference Series 356 (2012) 012031
doi: 10.1088/1742-6596/356/1/012031
A-p Xajiosa E.H. - XpoHOnorHHCH CIIHCT>K H peaiOMexa
Page 20/22
B HacTOfliiiara pa6ora e MscneABano dpopMUpanero na HanopasMepnn
Si noBtpxHOCTHM cjioese npn BMCOKOTeMnepaiypHO oirpflBane na Si,
MOAMCpMU.MpaH npea nnuiKa nnasMeHO-HMepcuoHHa MMnjiaHTaqMH na
MOHM c AO3M OT 1016 - 1018 cm"2. flpodpMJiMTe na
MMnnaHTMpaHMTe asoTHM MOHM, (N+) M (N2+), ca MOAenMpaHM
nocpeACTBOM SRIM CMMynau,Mfl sa pasiiMHHa npOAt/WMTermocT na
OTrpaBane, IOTO ce sseivie npeABMA npoi^eca na AKdpysMfl. YcTaHOBeno
e HaiiMMMeTo na Si-O M Si-N spt3KM Bta ocnoBa na MHdppanepBeH
cneicrpaneH ana/ins FTIR M cneiapanna eriMncoMeTpMfl SE.
OnpeAenenn ca noKaaaTennTe na npenynBane npw At>Ji>KMHa na
BtJiHaTa 632.8 nm, KOMTO sapMpaT OT 1,46 AO 1,59, KOBTO
na HMCKO y/x ctoTHOiueHMe. MoAeriMTe OCHOBaHM Ha
A3HHM OT VIS M IR cneKTpanna enMncoMeTpMfl, paaKpMxa cpopMMpane
Ha HanocTpyKTypwpaHM SiOxNy cnoese c BKnioMBaHMfl na Si.
HoMep:
3amaBMe:
ABTOP /M/:
H3A3HMe:
Peatoiue:
2012A2
"Infrared elHpsometry as an investigation tool of thin layers grown into
plasma immersion A/+ implanted silicon"
M. Gartner, A. Szekeres, S. Alexandrova, P. Osicianu, M. Stoica, A.
Marin, E. Vlaikova, E. Halova
Applied Surface Science, vol. 258, Issue 18, (2012), p 7195-7201
Mpea erwncoMeTpMMHM MaMepsaHUfl M pasujMpeHM MSMepBanuFi OT
AO cpeAaTa Ha MH(J>paHepBeHMfl cneicrpaneH Ananason ca
KOMnneKcnaTa AneneKTpMMHa dpyHKMna n AnejieKTpuMHUTe
3ary6M na TBHKM cnoese, napacnaTM Btpxy CMJIMUMM, CnoeseTe ca
npn BMCOKa TeivinepaTypa (1050°C) na OTrpaBane B 02
na rmasMeno MMnnaHTMpaHii c N+ MOHM Si OOAJIOKKM.
MA6HTMdpMi4MpaHMTe Si-N, Si-N-O M Si-Si XMMMHHMTB eptSKM B wipewa
CMfiMMMes OKCMA 6axa noTBtpAeHM M OT peHTrenosa cpOToeneKrpoHHa
cneKTpocKonMfl (XPS) pesyrrraTM. B saBMCMMOCT OT AoaaTa Ha
asoTHMTe MOHM N"1" (1016-1018 N+/cm2) M npoA"bn>KMTenHOCTTa Ha
OTrpflBaneOO and 20 min), MapacnaTMTe cnoese ca MAeHTMdpMMMpaHM
MJ1M
K3TO
CMJ1M14M6BM
OKCMHMTpMAM,
CtC
SHaMMTeilHO
HO-HMCKM
Cl>A"bp>KaHMfl H3 33OT N MHM K3TO CMflMLlMeB A^OKCMA, o6oraT6HM C N.
HoMep:
3amaBne:
Aerop /M/:
2012B3
"Oxidation of Si surface nitrogenated by plasma immersion AT ion
implantation"
A. Szekeres, S. Alexandrova, E. Vlaikova, E. Halova
fl-p Xajiosa E.H. - XponojiorHHCH cnnctK H pesioMexa
Page 21/22
M3flaHne:
Bulgarian Journal of Physics, 39, (2012), pp. 178-185
PeaioMe:
MscneflBano e OKucneHneio na noBtpxHOCien nanopasMepen Si CJIOM,
MOflncpMLtupaH
npea
njiMTKa
HMCKO-enepreTHMHa
nnasMenoMMepcnoHHa MMnnaHTaui/m na asoinn MOHM. Cnefl tuvmnaHTaiiMflTa
SiOxNy cnoeBeie ce cnHTesupar Mpes OKMCJienne B cyxa 02 cpefla.
FlpeflCTaBeHM ca pesyniaTM sa KMHernKaja na oSpasysane na SiOxNy,
Bts ocHosa na MOflena sa OKucnenne na Deal&Grove. KoHCTaTupano
e, He CKOpocrra na OKMcnenne HaMannsa c napacTBane na MOHnaia
AO3a. OSflCHenneTO e, He Mi\/irmaHTai4iifl na asora N B Si noflno>KKa
sa6aBfl npoqeca na oKucnenne. BasupawKn ce na pesyjiTarme OT
onTMHHMTe n crpyicrypHM csoiiCTBa na cnoeBere, npoynenn
nocpeflCTBOM FTIR n ennncoMeTpuHna cneKipocKonun, cnoese ca
onpefleneHM Kaio CMec OT cmimineB AMOKCMA SiO2 n cunnMnes nuipufl
SJ3N4, CbC CBOTHOLIieHMfl H3 o6eMHMT6 CppaKU.Mf!, KOMTO C6 M3M6HflT C
flosa. FTIR cneicrpanen ananns noKasa tunpoKa
Me>KAy 650 n 1000 cm"1, cs-bpsana c acMMeTpuneH MOA na
pasTnrane na sptaKaTa Si-N, KoeTO ce noTB-bp>KAaBa n OT
MOflennpane.
HoMep:
3arjiaene:
Asrop /M/:
201 2C4
10'mu tO6uneu na
Xanoea
Ha
na c|DM3MKaTa'2012, C6. nonynHpnn n naynnn
ISSN 131 3-9576, (2012), 3-10.
PeaioMe:
, Hsfl.
,,flHM na d)M3MKaTa" ce npoBe>KflaT scnKa roAnna OT 2002r. c u,en fla ce
MHTepeca na CTyfleHTMTe KtM dpusuKaTa. Hanpaeen e
npemefl na ctSMTneTO, KBTO ca npeACTaseHU OTAennnTe
py6pnKM n samasMflTa na HHKOM OT npeACTaseHMTe AotcnaflM OT
, npenoAasaTenn n noKanenn rocT-dpusmin. flpeACTaBen e B
nnaH n pasBMTneTO na ,,flHM na dpusuKaTa" c
na HOBM py6pMKM n ynacTue na npenoAasaTeiiM OT
Apyrn BY3, yHeHM-dpusnun, KBTO n ynenn OT
-p XanoBa E.H. - XponojiorHHen CHHCI.K H peatOMeia
Page 22/22