Mathematical model of electromigration-driven evolution

Transcription

Mathematical model of electromigration-driven evolution
Mathematical model of electromigration-driven
evolution of the surface morphology and
composition for a bi-component solid film
Mikhail Khenner, Mahdi Bandegi
Department of Mathematics, Western Kentucky University
SIAM-SEAS, University of Alabama at Birmingham,
March 22, 2015
Mikhail Khenner, Mahdi Bandegi
Electromigration-driven evolution of the surface morphology and
Introduction: Surface electromigration
Figure : Single-crystal, metallic film grown on a substrate by MBE or
CVD.
Surface electromigration: Drift of adatoms on heated crystal
surfaces of metals in response to applied DC current, due to the
momentum transfer from electrons to adatoms through scattering ↔
“Electron wind”
Adatom = mobile, adsorbed atom or ion
Mikhail Khenner, Mahdi Bandegi
Electromigration-driven evolution of the surface morphology and
Introduction: Example: Current-driven surface faceting of surfaces
Continuum theory of surface dynamics on length scales much
larger than the interstep distance: Krug & Dobbs’1994, Schimschak
& Krug’1997
If the electric field is horizontal (along planar, unperturbed surface), then:
1. Facet orientations are first established locally,
2. Further evolution proceeds through a coarsening process
Facet size (hill-to-hill distance) X ∼ t n , where n ≈ 0.25
Each facet = many monoatomic crystal steps
Mikhail Khenner, Mahdi Bandegi
Electromigration-driven evolution of the surface morphology and
Introduction: Morphological evolution of a single-component surface
(W.W. Mullins’57-65)
ν
j = − kT
DM(θ) (µs + qE cos θ): adatoms flux on the film surface when
E is along the x-axis
DM(θ): anisotropic diffusivity of the adatoms (surface
orientation-dependent), where M(θ) is the mobility
µ(s) = Ωγκ: the chemical potential (Mullins’57)
Mikhail Khenner, Mahdi Bandegi
Electromigration-driven evolution of the surface morphology and
The model for a bi-component surface
∂JA
∂JB
+
,
∂s
∂s
where JA and JB are the surface diffusion fluxes of the components A
and B:
∂µi
νDi
Mi (θ)Ci (s, t)
+ qE cos θ , i = A, B
Ji = −
kT
∂s
ht = V / cos θ, V = −Ω
Here CA (x, t) and CB (x, t) are the dimensionless surface concentrations
of adatoms A and B, defined as products of a volumetric number
densities and the atomic volume. Then,
CA (x, t) + CB (x, t) = 1.
Ci
≈ Ωγi κ + −2kT + 4kTCi ,
1 − Ci
when the “mixture” contribution is linearized about Ci = 1/2.
µi = Ωγi κ + kTln
This form of the “mixture” contribution implies a thermodynamically stable alloy, thus
the natural surface diffusion acts to smooth out any compositional nonuniformities.
On the other hand, the electromigration may be the cause of their emergence and
development.
Mikhail Khenner, Mahdi Bandegi
Electromigration-driven evolution of the surface morphology and
The model for a bi-component surface, continued
The anisotropic adatom mobility (Schimschak & Krug’1997):
Mi (θ) =
1 + βi cos2 [Ni (θ + φi )]
,
1 + βi cos2 [Ni φi ]
where
Ni : the number of symmetry axes, φi : the angle between a symmetry
direction and the average surface orientation, βi : anisotropy strength.
PDE governing evolution of the surface concentration CB (s, t) (Spencer,
Voorhees and Tersoff’93):
δ
∂CB
∂JB
+ CB V = −Ω
,
∂t
∂s
where δ is the thickness of the surface layer and quantifies the “coverage”.
Mikhail Khenner, Mahdi Bandegi
Electromigration-driven evolution of the surface morphology and
The dimensionless problem (using [x] = h0 , [t] = h02 /DB )
∂κ ∂CB
DMA (hx ) (1 − CB ) RA
−
+F +
∂x
∂x
∂κ ∂CB
MB (hx ) CB RB
+
+F
,
∂x
∂x
−1/2
4
∂CB
= − 1 + hx2
QCB ht −
∂t
m
∂
∂κ ∂CB
2 −1/2
1 + hx
MB (hx ) CB RB
+
+F
.
∂x
∂x
∂x
Here the parameters are:
α∆Vq
h0
DA
Ωγi
, F =
, Q=
, D=
.
Ri =
4kTh0
4nkT
mΩν
DB
This assumes:
ht =
4 ∂
mQ ∂x
1 + hx2
−1/2
E = ∆V /L, where ∆V is the applied potential difference and
L = nh0 is the lateral dimension of the film (n > 0 is a parameter),
δ = mΩν, where m > 0 is a parameter; Ων is monolayer thickness
Mikhail Khenner, Mahdi Bandegi
Electromigration-driven evolution of the surface morphology and
Linear stability analysis (LSA), general idea
(i) Perturb the surface about the equilibrium constant height h0 by the
perturbation ξ(x, t), obtain PDE for ξ
(ii) Linearize PDE for ξ and obtain linear PDE ξt = F (ξ, ξx , ξxx , ...)
(iii) Take ξ = e ωt cos kx and substitute in PDE → ω(h0 , k, Ri , n, m, D)
(iv) Examine for what values of the parameters the growth rate is
positive or negative. ω < 0: surface is stable; ω > 0: surface is
unstable
Long-wave instability. kc : the cut-off wavenumber; kmax : a wavenumber detected in
experiment
Mikhail Khenner, Mahdi Bandegi
Electromigration-driven evolution of the surface morphology and
LSA
h(x, t) = 1 + ξ(x, t), CB (x, t) = CB0 + ĈB (x, t): the perturbations
ξ(x, t) = Ue ω(k)t e ikx , ĈB (x, t) = Ve ω(k)t e ikx , where U, V are
(unknown) constant and real-valued amplitudes
ω = ω (r ) (k) + iω (i) (k)
Also expand: Mi (hx ) = Mi (0) + Mi0 (0)hx , where Mi (0), Mi0 (0) are
the parameters
This results in the quadratic eqn. for ω (r ) (k):
m MA (0)
ω (r ) (k)2 +ω (r ) (k) k 2 CB0 MB (0) 1 − CB0 +
mD 1 − CB0 +
4
4
k2 DFMA0 (0) 1 − CB0 + FMB0 (0)CB0 + k 2 DRA MA (0) 1 − CB0 +
Q
k 4 k 2 RB MB (0)CB0 +
DF (MB (0)MA0 (0) + MA (0)MB0 (0)) CB0 1 − CB0 +
Q
k 2 D (RA + RB ) MA (0)MB (0) 1 − CB0 = 0,
Mikhail Khenner, Mahdi Bandegi
Electromigration-driven evolution of the surface morphology and
LSA, continued
And,
MA (0)
mCB0
+
DmCB0 kF .
ω (i) (k) = MB (0) 1 −
4
4
Thus the perturbations experience the lateral drift with the speed
v = |ω (i) (k)/k| ∼ F , which does not depend on k.
Mikhail Khenner, Mahdi Bandegi
Electromigration-driven evolution of the surface morphology and
LSA, continued: analysis of ω (r ) (k)
The limit of vanishing surface layer thickness: As δ → 0 (Q → ∞),
ω (r ) (k) < 0
For finite Q, the longwave instability with
1/2
MB (0)MA0 (0) + MA (0)MB0 (0)
kc = F 1 − CB0
∼ F 1/2
MA (0)MB (0) (CB0 − 1) (RA + RB )
√
Note that kmax 6= kc / 2; obtain λmax = 2π/kmax numerically
0.2
8
0.22
0
0.08
400
-40
0
2
4
8 12 16 20
F
lmax
40
0.12
w(r)max
4
0.2
500
80
lmax
w(r)max
6
lmax
0.16
120
300
8
12
-0
0.18
1
2
3
-MA,B'(0)
200
100
0.04
0.16
0
D
0
4
60
50
40
30
20
10
0 20 40 60 80 100
0
0
(a)
w(r)max
160
16
20
F
0
(b)
20
40
60
80
100
D
0.14
-0
(c)
1
2
3
-MA,B'(0)
(r )
λmax ∼ F −1/2 , ωmax ∼ F 2 ; Dashed lines in (c): fits
(r )
0 (0)), ω
0
λmax = 0.212 exp (0.123MA,B
max = 13.8 exp (−0.493MA,B (0)).
Mikhail Khenner, Mahdi Bandegi
Electromigration-driven evolution of the surface morphology and
Nonlinear surface dynamics
Comp. domain 0 ≤ x ≤ 20λmax , initial condition:
h(x, 0) = 1 + small random perturbation, CB (x, 0) = 1/2, periodic b.c.’s
Perpetual coarsening → hill-and-valey structure → scaling law ?
Most interesting nontrivial results for βA 6= βB
βA = 0.1, βB = 1.
βA = 1, βB = 0.1.
Mikhail Khenner, Mahdi Bandegi
Electromigration-driven evolution of the surface morphology and
Nonlinear surface dynamics, continued
1.06
h, CB+0.64
1.04
1.02
1
0.98
0.96
0.94
0
1
2
x
3
4
Concentration of B adatoms (dashed line) superposed over the corresponding surface
shape (solid line). βA = 0.1, βB = 1.
Let Lx be the mean distance between neighbor valleys
Mikhail Khenner, Mahdi Bandegi
Electromigration-driven evolution of the surface morphology and
Nonlinear surface dynamics, continued
Coarsening on the comp. domain 0 ≤ x ≤ 20λmax , periodic b.c.’s
2
0.6
D=10
D=1
DV = 0.01V
1.6
0.5
1.2
Lx
Lx
0.4
DV = 0.1V
0.8
0.3
D=0.1
0.4
0.2
DV = 1V
DV = 10V
0
0.1
0
2
4
-2
(b)
Log10t
0
2
4
Log10t
0.8
bA=0.1, bB=1
0.6
bA=1, bB=0.1
Lx
-2
(a)
0.4
bA=bB=1
0.2
0
-2
(c)
Mikhail Khenner, Mahdi Bandegi
0
2
4
Log10t
Electromigration-driven evolution of the surface morphology and
Nonlinear surface dynamics, continued
Coarsening laws:
vs. ∆V :
(∆V =0.01V )
(∆V =0.1V )
= 0.77t 0.138 , Lx
= 0.46t 0.126 ,
Lx
(∆V =10V )
(∆V =1V )
0.118
, Lx
= 0.156t 0.074
Lx
= 0.273t
vs. D:
(D=0.1)
Lx
(D=1)
= 0.205t 0.138 , Lx
(D=10)
= 0.273t 0.118 , Lx
= 0.29t 0.104
For βA = 0.1, βB = 1:
(β =0.1,β =1)
B
Lx A
= 0.318t 0.143 for 0 ≤ Log10 t ≤ 1.22,
(βA =0.1,βB =1)
Lx
= 0.04t 0.905 for 1.22 ≤ Log10 t ≤ 1.38
For βA = 1, βB = 0.1:
(β =1,β =0.1)
B
Lx A
= 0.3t 0.135 for 0 ≤ Log10 t ≤ 1,
(βA =1,βB =0.1)
Lx
= 0.128t 0.514 for 1 ≤ Log10 t ≤ 1.38
Mikhail Khenner, Mahdi Bandegi
Electromigration-driven evolution of the surface morphology and
Summary
Found the long-wavelength instability coupled to the lateral surface drift. The
drift is not present in the similar model for the one-component film
(r )
The perturbations wavelength λmax and the growth rate ωmax scale as F −1/2
and F 2 , respectively, where F is the applied electric field parameter
λmax sharply decreases when the derivatives of the diffusional mobilities increase
If βA differs significantly from βB , the surface is enriched by one atomic
component. The second component is absorbed into the solid
Increase of ∆V makes the surface rougher (coarsening slows down)
If βA differs significantly from βB , then there is a pronounced speed-up of
coarsening at the late times (a factor of 4-6 increase in the coarsening exponent)
THANKS !1
1
To appear in the special issue on modeling on nano- and micro-scale of
Mathematical Modelling of Natural Phenomena, Ed. A.A. Nepomnyashchy
Mikhail Khenner, Mahdi Bandegi
Electromigration-driven evolution of the surface morphology and

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