Zeitplan farbig mit Sitzungsleiter.xlsx
Transcription
Zeitplan farbig mit Sitzungsleiter.xlsx
M o n d a y, 1 9 . S e p t e m b e r 2 0 1 1 ( m o r n i n g ) 09:00 09:30 09:40 10:10 10:20 10:50 Keynote paper I Keynote paper II Surface functionalization by using mechanical and thermal effects in grinding The Manufacture of Metre-Scale Precision Optics 11:00 11:30 Welcome Room Maritim Prof. Dr. Schofer, President of Hochschule Furtwangen University Prof. T. Kuriyagawa, Chairman of ICAT and Co-Chairman ISAAT 2011 Prof. H. Oshita, President of JSAT Prof. Dr.-Ing. Tawakoli, Director Institute of Grinding and Precision Technology (KSF) and Conference-Chairman 11:30 11:45 Coffee Break E. Brinksmeier P. Comley University of Bremen Germany Cranfield University UK 12:10 12:25 12:30 12:45 11:50 12:05 12:50 14:00 Grinding Process and Principles I Room Maritim Research on Workpiece Surface Temperature and Surface Quality in HighSpeed Cylindrical Grinding and its Inspiration Beizhi Li, Dahu Zhu, Zhenxin Zhou, Qiang Zhang, Yichu Yuan chairman: Jun Wang (Australia) Characterization of the Response of Research on Heat Transfer and Calculation Embeded Thermocouples in Grinding Method of Workpiece Surface Temperature in High Speed Grinding I. Pombo, J.A. Sánchez, N. Ortega, B. Izquierdo and S. Plaza Beizhi Li, Dahu Zhu, Jingzhu Pang, Jianguo Yang and Zhouping Wu Heat Transfer in Grinding-Hardening of a Cylindrical Component Thai Nguyen, L.C. Zhang, and Dale Sun Machining of Composites and Titanium and Nickel-Based Alloys I Drilling of CFRP/Ti-6Al-4V Stacks Room Köln Tetsuya Tashiro, Junsuke Fujiwara and Keiko Inada chairman: Yasuhiro Kakinuma (Japan) Tool Wear and Cutting Temperature at Influences of Processing Parameters on Machining of Composites Hole Shape Accuracy in Drilling Carbon Fiber Reinforced Composite Guiyu Li, Jianfeng Li, Jie Sun János Líska, János Kodácsy Drilling CFRP Thermosets using Mounted Points Lunch D. Biermann and M. Feldhoff Polishing and Lapping I Room Bonn Research on the Polishing Performance of CMP Slurry for the Sapphire Crystal S. Gao, R.K. Kang, Z.J. Jin and Z.G. Dong chairman: K. Tanaka (Japan) An Investigation on the Chemical Effect in Tribological Aspects of Chemical Chemo-Mechanical Polishing Mechanical Polishing Diamond Surfaces X.L. Jin, L.C. Zhang Z.J. Jin, Z.W. Yuan, Q. Li and K.Wang Precision Polishing of Micro Mold by using Piezoelectric Actuator Incorporated with Mechanical Amplitude Expansion Mechanism Hirofumi Suzuki, Sze Keat Chee, Mutsumi g and Okada,, Takeshi Yano,, Toshiro Higuchi Weimin Lin ISAAT 2011 The 14th International Symposium on Advances in Abrasive Technology 18.‐21. September 2011 Stuttgart Germany Stuttgart, Germany M o n d a y, 1 9 . S e p t e m b e r 2 0 1 1 ( a f t e r n o o n ) 14:00 14:15 14:20 14:35 14:40 14:55 15:00 15:15 15:20 15:35 Analysis of Effective Cutting-Edge Distribution of Grinding Wheel Based on Topography of Working and Ground Surfaces 3-D CFD Parametric Study of the Impact of the Fluid Properties and Delivery Conditions on Flow and Heat Transfer in Grinding Haruhisa Sakamoto, Kyoko Nakamura, Yoshinori Sasaki and Shinji Shimizu Stefan Mihić, Sorin Cioc, Ioan Marinescu and Michael Weismiller 15:40 16:15 Grinding Process and Principles II Room Maritim Calculation of the Contact Stiffness of Grinding Wheel Deformation Mechanisms and Abrasive Machining of Nanoscale Thin Film Multilayered Solar Panels: A Focused Review Takazo Yamada, Michael Morgan, Hwa-Soo Lee and Kohichi Miura Han Huang chairman: H.Z. Choi (Korea) Single Grain Scratch Tests to Determine Elastic and Plastic Material Behavior in Grinding J.C. Aurich, M. Steffes Machining of Composites, Titanium and Nickel-Based Alloys II The Influence of SiC Particles on Tool Wear The Cutting Performance of Ultra-Smooth Composite Diamond Coated WC-Co Inserts in Machining of Al/SiC Metal Matrix Room in Dry Turning Al/SiC-MMC Köln Composites Produced by Powder Extrusion R. Yousefi, M.A. Kuchekzadeh, J. Rahiminasab and M.A. Kadivar Bin Shen, and Fanghong Sun chairman: Hirofumi Suzuki (Japan) Milling Experimental Investigation on Titanium Alloy Ti6Al4V under Different Cooling/Lubrication Conditions Machined Surface Analysis in High Speed Dry Milling of Ti-6Al-4V Alloy with Coated Carbide Inserts Prediction of Surface Roughness using Back-Propagation Neural Network in End Milling Ti-6Al-4V alloy He Yong, Yujing Sun, Maojie Ge, Jianfeng Li, Jie Sun Anhai Li, Jun Zhao, Hanbing Luo and Wei Zheng S. Zhang, and J.F. Li Studies on the Lapping of Polycrystalline Diamond Compact A Novel Desktop Device for Lapping Milled Micro Thin-walled Structure Jason Sowers, Alex Fang Peng Zhang, Bo Wang, Mark J. Jackson and Xing Mao 17:15 17:30 17:35 17:50 17:55 18:10 Effects of Cutting Edge Truncation on Ultrasonically Assisted Grinding Wear Behavior of a Vitrified Bond CBN Wheel by Ultrasonic-Assisted Creep Feed Profile Grinding of Inconel 718 Coffee break Polishing and Lapping II Investigation of a Polishing Pad and a Room Carrier Film for Decreasing Edge Roll Off of Workpiece Bonn chairman: R.K. Kang (China) Verification of Polishing Phenomena of Nickel Cylinder using Photocatalyst and Luminous Dye Excited by Ultraviolet Ray B18 - Study of Ultraviolet-Ray Aided M hi Tanaka i Takeshi Buffing Performance Analysis of Viscoelastic Polymer with Sensor-less Polishing Pressure Control Urara Satake, Wenxiao Wang, Toshiyuki Enomoto and Norikazu Tabata Keisuke Igarashi, Masayuki Sato, Yasuhiro Kakinuma 16:15 16:30 16:35 16:50 16:55 17:10 Grinding Process and Principles III / Grinding of Difficult-to-Cut Materials I Room Maritim Research on Macro Simulation of Surface Grinding Based on FEM Wanshan Wang, Peng Guan, Yuansuo Xian, Tianbiao Yu chairman: Han Huang (Australia) An Experimental Study on a Flexible Nano-Topography Distribution on NonPreparation and Characterization of SelfGrinding Tool Axisymmetric Aspherical Ground Surface Lubrication CBN Grinding Wheel Containing Graphite as Lubricant Nobuhito Yoshihara, Shin Fujimura, Naohiro Nishikawa, Masahiro Mizuno and Toshiro Iyama W.F. Ding, J.H. Xu, J.L. Huang, Z.Z. Chen, H.H. Su, Y.C. Fu C. Vogt, S. Sinzinger, H. Adelsberger, R. Keisuke Hara, Hiromi Isobe,MohdFauzi Ismail Maurer, F. Schneider, R. Mandler, L. Kuepper, and Sho-ichi Kaihotsu R. Rascher , P. Sperber Taghi Tawakoli, Bahman Azarhoushang, Abdolreza Rasifard Machining of Composites and Titanium and Nickel-Based Alloys III / Glass Machining / Machining Process and Tools and Machine Tools I chairman: János Kodácsy (Hungary) High Speed Milling of Titanium Alloy Ultrasonic Coring of Glass Disk using Double Core Tool Drilling of Borosilicate Glass with Feedback Control Based on Cutting Force Numerical Study on Constant-flow Hydrostatic Water Bearing for a Machinetool Table Hiro Ohzeki and Fumihito Arai Go Okahata, Shigeki Okuyama and Akinori Yui chairman: E. Brinksmeier (Germany) Effect of Microshot Peening on Residual Advanced Diamond Charging Process using Effect of Heating and Subsequent Re-Shot Transfer of Nanocarbon Induced by Fine Stress of High-toughness Spring Steel Room Vibrating Charging Ring in Fixed Abrasive Peening on Surface Characteristics of Shot- Particle Peening using Carbon-Black/Steel Hybridized Particles Peened Carbon Steel Lapping Bonn Development of Three-Dimensional Measurement System of a Grinding Wheel Surface with Image Processing Evaluation of Vibration Finished Surfaces Using Image Processing Method Yasunori Harada, Daisuke Gowa, Toshiya y Tsujij and Yujij Kobayashi Akihiro Sakaguchi, Tomoyuki Kawashita, and Shujij Matsuo Shizuichi Higuchi, Hiroaki Takai, Hideo Kato y Okawa and Kazuya Room Köln Lubricant Applying Effect Mechanism in Inconel 718 Cutting - Effects of Cutting Speed and Depth of Cut - Empirical Modeling and Analysis of Surface Roughness in Milling Process of NickelBased Super Alloy Nimonic 115 through Response Surface Methodology T. Kaneeda, K. Ishioka, L. Anthony, Y. Goto H.Hassanpour, M.H.Sadeghi, Sh.shajari and M.Emami Junsuke Fujiwara, Takaaki Arimoto, Kazuya Tanaka Shigeomi Koshimizu Polishing and Lapping III / Peening Process / Image Processing H.Tanaka, H.Horita, T.Yoshikawa, K.Iwatsuka and Y.Maeda Yasunori Harada Yutaka Kameyama, Yukihiko Mizutani, Hideaki y p Shimpo Sato,, and Ryokichi T u e s d a y, 2 0. S e p t e m b e r 2 0 1 1 ( m o r n i n g ) 08:00 08:15 08:20 08:35 08:40 08:55 09:00 09:15 09:20 09:35 09:40 09:55 A Study of High Speed Grinding Alumina Ceramic for a Small Diameter of Diamond Tool Grinding of Steel-Ceramic-Composites 10:00 10:30 Grinding of Difficult-to-Cut Materials II FEM Analysis of Single Grit Chip Formation Experimental Study on Grinding of a Nickelbased Alloy Using Vitrified CBN Wheels in Creep-feed Grinding of Inconel 718 Room Superalloy Maritim Ali Zahedi, Javad Akbari chairman: Jun’ichi Tamaki (Japan) High Speed Grinding of Nickel-based Ceramic Balls Machining by Centerless Superalloy with Single Diamond Grit Grinding using a Surface Grinder Zhongde Shi, Amr Elfizy, Benoit St-Pierre, and Z.Z. Chen, J.H.Xu, Z.Cheng, W.F. Ding, Y.C. Helmi Attia Fu Y. Wu, W. Xu, M. Fujimoto and T. Tachibana Shenq-Yih Luo, Chia-Lin Lee, Yi-Xian Liu, WeiEn Chen Berend Denkena, Jens Köhler, Dennis Hahmann Machining Process and Tools and Machine Tools II Room Köln Effect of Ground Surface Roughness of Tool Experimental Study on the Cutting Performance of TiC-Based Nanocomposite on Adhesion Characteristics by PVD Ceramic Tools in Turning 40Cr Steel Coating Hanlian Liu, Ming Hong, Chuanzhen Huang, Bin Zou Masahiro Furuno, Koichi Kitajima, Yousuke Tsukuda, and Takeshi Akamatsu chairman: Chengyong Wang (China) Ultra High-Speed Cutting Experiment under Study on Processing Property of Thinthe Cutting Condition that Cutting Speed Walled Titanium Alloy Component with Exceeds Plastic Wave Speed of Workpiece Paraffin Reinforcement Maojie Ge, Jie Sun, Jianfeng Li Jun Shinozuka, Masato Sando and Tasuku Horie Defect Structures in Diamond Composite Coated Cemented Tungsten Carbide Substrates Atmosphere Effects on the Machinability of Cutting Tools with Micro- and Nanoscale Textures Coffee Break J.N. Boland, X.S. Li, D. Hay, C. MacRae, S. Noritaka Kawasegi, Hiroshi Sugimori, Noboru Elbracht, R. Rassool, V. Luzin, Paolo Imperia Morita,and Minchao Xue Magnet Finishing Room Bonn chairman: Shinichi Ninomiya (Japan) Composite Tools Design for Electrolytic Machining Characteristics of Magnetic Force- Characterization of Silicon Carbide Grit for Magnetic Abrasive Finishing Process with Magnesium Oxy-Chloride Bond Silicon Assisted Electrolytic Machining for FEM Carbide Abrasives Polycrystalline Silicon Study on Internal Magnetic Field Assisted Finishing Process Using a Magnetic Machining Jig for Thick Non-ferromagnetic Tube Finishing of Metal Parts in Magnetic Field Based on Abrasion Yanhua Zou, Jiangnan Liu, Takeo Shinmura János Kodácsy G.Y.Liu, Z.N.Guo, Y.B.Li, and J.W.Liu 10:30 10:45 10:50 11:05 11:10 11:25 Po-Huai Jung-Chou Shin-Min Po Huai Yu, Jung Chou Hung, Shin Min Lee, Catia Chiamulera, Leandro Lima Evangelista, Kun-Ling Wu and Biing-Hwa Yan Fernanda Gonçalves Fernandes, Walter Lindolfo Weingaertner, … 11:30 11:45 11:50 12:05 Influence of Abrasive on Planarization Grinding Based on the Cluster Magnetorheological Effect Qiusheng Yan, Jiewen Yan, Jiabin Lu, Weiqiang Gao and Min Li 12:10 12:25 12:30 13:45 Grinding of Difficult-to-Cut Materials III Analysis of Specific Energy of TC18 & TA19 Wear Characteristics of Various Diamond Titanium Alloys in Surface Grinding Tools in Cutting of Tungsten Carbide Room Maritim Qiulin Niu, Guoqiang Guo, Xiaojiang Cai, Zhiqiang Liu, Ming Chen chairman: Ioan Marinescu (US) Effect of Lubricants on Precision Planing of Study on Complex Helical Drill Grinding Using the Grinder with Tripod Parallel Tungsten Carbide using Mono-Crystalline Universal Moving Platform Diamond Tool Akihiko Kubo, Yasushi Mochida, Jun’ichi Akinori Yui, Hiroshi Matsuoka, Shigeki ZOU Ping, YANG Xulei, XU Jinzhong and HU Tamaki, Katsuko Harano, Hitoshi Sumiya and Okuyama, Takayuki Kitajima and Go Okahata Ming A.M.M. Sharif Ullah Particularities of Grinding High Speed Steel Creep-Feed Grinding of Tungsten Carbide Punching Tools by Using Resin-Bonded Nickel-Coated Diamond Wheel Peter Krajnik, Radovan Drazumeric, Jeffrey Badger, Janez Kopac and Cornel Mihai Nicolescu Abbas Pak, Amir Abdullah Machining Process and Tools and Machine Tools III / Micro and Nano Machining I Room Köln Aid of End-milling Condition Decision Using Data Mining from Tool Catalog Data for Rough Processing An Experimental Study On the Effects of Ultrasonic Assisted Drilling on Chip Characteristics and Tool Life Hiroyuki Kodama, Toshiki Hirogaki, Eiichi Aoyama and Keiji Ogawa Bijan Vakili Azghandi, Mohammad Reza Razfar chairman: Jolong Yuan (China) A Study of the Micro-end Milling of Titanium Study on Surface Roughness in Micro End Alloy Milling of Mold Material Koji Tsuda , Koichi Okuda, Hiroo Shizuka and Masayuki Nunobiki Hiroo Shizuka, Koichi Okuda, Masayuki Nunobiki and Yasuhito Inada Effect of Tool Tilting Angle on Tool Wear and Surface Roughness in Micro Ball End Milling Research on Modeling of Burr Formation Process in Micro Ball End Milling Operation on Ti-6Al-4V Kazuya Hamaguchi, Yuji Kagata, Hiroo Shizuka and Koichi Okuda Mingjun Chen, Haibo Ni, Zhi Jun Wang, Yan Jiang Evaluation of Hard Materials using EcoAttributes Development of Electric Rust Preventive Machining Method -Water using for Machining : Improvement of Water Recycle System- Abrasive Jet Machining and Formation / ECO-Manufacturing Room Bonn Experimental Research on the Surface Roughness of Metal Kerf by Abrasive Waterjet Cutting A Study of Material Removal Process in Abrasive Waterjet Milling Hongtao Zhu, Chuanzhen Huang, Shuguang g, Jun Wangg and Cuilian Che Zhang, Keivan Dadkhahipour, Jun Wang chairman: C.Z. Huang (China) A Study of Jet Formation for Premixed An Experimental Study of the Nanoparticle Slurry Jet Nozzle using the Discrete Phase Colloid Hydrodynamic Cavitation Jet Model Polishing Performance under Different Nozzle Designs Wang Xing, Zhang Feihu, Zhang Yong and Zhou Mingg Wusheng Luo , Chengyong Wang, Jun Wang, Md. Mamunur Rashid, A.M.M. Sharif Ullah and N. Nishikawa, Y. Sato, T. Kato, K. Karita, Y. g , N. Yoshihara,, H. Okawai,, H. Kato,, T. Yuexian Songg Jun’ichi Tamaki Hagihara, Iyama, M. Mizuno and S. Tsukamoto Lunch T u e s d a y, 2 0. S e p t e m b e r 2 0 1 1 ( a f t e r n o o n ) 13:45 14:00 14:05 14:20 14:25 14:40 14:45 15:00 15:05 15:20 15:25 15:40 15:45 16:15 Dressing / Non-Traditional Grinding Process, Grinding Tools, AE and Image Processing I Chairman: Manabu Iwai (Japan) Dressing Process of Porous Self-Generation Analysis of EDD Accuracy for Profiling Metal Corrosion Wear Characteristics of ELIDExperimental Study on Performance of Influence of Picosecond Laser Touch Superabrasive Tool Dressing of Electroplated Eiamond Wheels Bonded Grinding Wheels Ground Co-Cr Alloy with Applying Abrasion Chemical Mechanical Dressed Monolayer Room Brazed Diamond Wheel on the Dressing of SiC Vitrified Bond Wheel by Ultra High Molecular Weight Polyethylene Maritim Binghai Lv, Zhe Wu, Hongwei Fan and Julong M. Rabiey, C.Dold, R. Transchel, K. Wegener Ortega, N. , Pombo, I. , Sanchez, J.A., Plaza, M. Mizutani, N. Hisamori, T. Mizuno, A. Edura, Honghua Su, Jiuhua Xu, Yucan Fu, Wenfeng Yuan S., Izquierdo, B. I. Ohuchi, H. Ohmori, K. Fujiwara, K. Doi and Ding and Shuai Wang K. Kuramoto Research on the Chemical-Mechanical Grinding Tools for Al2O3 Ceramic H.Z. Dai, Z.J. Jin, S. Gao, Z.C. Tao and F.W.Huo Micro and Nano Machining II Room Köln Nano-Grooving on Copper by Nano-milling and Nano-cutting A Micro Grinding Experimental Study on AISI 1020 Steel D. D. Cui, K. Mylvaganam and L.C. Zhang Jun Cheng,Yadong Gong,Yueming Liu Chairman: Akinori Yui (Japan) Statistical Approach Calculating Ground Ultra-Precision Cutting of Roll Die with Micro Surface Roughness of Ultrasonic-assisted Lens Arrays for Plastic Film Micro-grinding Keita Shimada, Tianfeng Zhou, Jiwang Yan and Tsunemoto Kuriyagawa YOSHIKAWA Takehisa, KYOI Masayuki, ONOZUKA Hideaki, TANAKA Hideaki, MAEDA Yukio, TAYA Masato Fabrication and Characterization of High Quality Micro Diamonds by Hot Filament CVD Machining Characteristics of Cylindrical Blasting and Application to Micro Patterning T. Zhang, F.H. Sun, B. Shen, Z.M. Zhang E. Sogabe, K. Ohashi, N. Lu, M. Fujiwara, T. Onishi and S. Tsukamoto Deformation Behavior Simulation in Laser Forming of Titanium Sheet - Influence of Free Edge on Deformation Behavior in Laser Forming - Evaluation of Surface Roughness of Quartz Glass Substrate in Fabrication Process for Neutron Focusing Mirror Coffee Break Molding, Sintering and Forming / Machining of Silicon-Wafer and Glass I Room Bonn Chairman: Tsunemoto Kuriyagawa (Japan) Study on Surface Roughness During Metal Implementation of Glass Transition Physics Investigation of the Effect of Addition of Ultraprecision Mass Fabrication of Manufacturing Process in Glass Molding Simulation Zirconia and Talc on Sintering Behavior and Aspherical Fresnel Lens by Glass Molding Mechanical Properties of B4C Press Tianfeng Zhou, Jiwang Yan, Jun Masuda, K i T t Kuriyagawa Tsunemoto H.H. Ruan and L.C. Zhang M. Tajdari, H.R. Baharvandi and A.R. N b di Nezamabadi Zhengyi Jiang, Shujun Wang, Dongbin Wei, H ji Li ib Xi Hejie Li, H Haibo Xie Masayuki Nunobiki, Koichi Okuda, Toshiyuki T k Hi Shizuka Shi k Takagawa andd Hiroo Mikinori Nagano, Fumiya Yamaga, Kenta Y ki N b ki ZZettsu, tt D ki Yamasaki, Nobuyuki Daii Y Yamazaki, Ryuji Maruyama, Kazuhiko Soyama … 16:15 16:30 16:35 16:50 16:55 17:10 17:15 17:30 17:35 17:50 17:55 18:10 Process Parameters Influence on SemiFixed Abrasive Tool Wear Study on Electrolytic Re-Insulation Grinding in Soft Magnetic Powder Cores Qianfa Deng, Ping Zhao,Binghai Lv,Julong Yuan,Zhiwei Wang Tomoyuki Ueno, Kenji Matsunuma, Takao Nishioka Study on the Effects of Abrasive and Coolant-Lubricant Types on Minimum Quantity Lubrication-MQL Grinding Modeling of Specific Grinding Energy Based on Wheel Topography T. Tawakoli, M.J. Hadad, A. Daneshi, M.H. Sadeghi, B. Sadeghi Abdolhamid Azizi, Hamed Adibi, Seyed Mehdi Rezaei and Hamid Baseri On the Reliability of Nanoindentation on Si Wafer at Elevated Temperatures Development of CMG Wheels for Stress Relief in Si Wafer Thinning Process Fengzai Tang and L.C. Zhang Yuki Mikami, Libo Zhou, Jun Shimizu, Hirotaka Ojima, Yoshiaki Tashiro and Sumio Kamiya 19:30 Non-Traditional Grinding Process, Grinding Tools, AE and Image Processing II / Grinding Tools Effect of Complex Electrodischarge Grinding for Electrically Conductive PCD Room Maritim Manabu Iwai, Shinichi Ninomiya and Kiyoshi Suzuki Wire Cutting Tool Concepts for Steel Machining Berend Denkena, Jens Köhler, Andreas Ermisch chairman: Feihu Zhang (China) The Mechanics and Mechanisms of Material Modeling Effects of Compliance in Coated Abrasive Tools Removal in Abrasive Drilling C/E Composites Q. Wen, D.M. Guo, H. Gao and B. Wang Nagarajan Balasubramnian, Chee Wei Jian and Subbiah Sathyan AE / MQL-Fluid-Coolant Room Köln A Quick-Test Method to Determine the Grinding Wheel Topography Based on Acoustic Emission Grinding Monitoring through Thermal Acoustic Emission Signatures Walter Lindolfo Weingaertner , Adriano Boaron Xun Chen, Arif Mohamed and Janet Folkes chairman: Stuart Salmon (US) Filter-less Purification of Grinding Fluid by Improvement of the Grinding Performance Using PGA Based Flocculant of a CBN Wheel using a New Grinding-FluidSupply System Shinichi Ninomiya, Manabu Iwai and Kiyoshi Suzuki Takayuki Kitajima, Shigeki Okuyama and Akinori Yui Machining of Silicon-Wafer and Glass II Room Bonn On-Machine Measurement and Statistical Analysis of Wheel WearAfterGrinding of Optical Glass Peng Yao, Takeshi Matsuda, Tianfeng Zhou, Jiwang Yan, Tsunemoto Kuriyagawa, Yadong Gong chairman: L.C. Zhang (Australia) Spectroscopic Measurements of Silicon Influence of Wafer Grinding and Etching Silicon Electrochemical Etching for 3D Wafer Thickness for Backgrinding Process Techniques on the Fracture Strength of Thin Microforms with High Quality Surfaces Silicon Substrates Teppei Onuki, Naoto Takagi, Jun Shimizu, Hirotaka Ojima and Libo Zhou Christof Landesberger, Christoph Paschke and Karlheinz Bock Alexey Ivanov and Ulrich Mescheder Closing and Banquet