Embedded ultrasound sensor in a silicon-on

Embedded ultrasound sensor in a silicon-on

Embedded ultrasound sensor in a silicon-on-insulator photonic platform
Amir Rosenthal, Murad Omar, Hector Estrada, Stephan Kellnberger, Daniel Razansky, Vasilis
Ntziachristos
Citation: Applied Physics Letters 104, 021116 (2014); doi: 10.1063/1.4860983
View online: http://dx.doi.org/10.1063/1.4860983
View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/104/2?ver=pdfcov
Published by the AIP Publishing
Embedded ultrasound sensor in a silicon-on-insulator photonic platform
Amir Rosenthal, Murad Omar, H_ector Estrada, Stephan Kellnberger, Daniel Razansky,
and Vasilis Ntziachristos
Institute for Biological and Medical Imaging (IBMI), Technische Universität München and Helmholtz Zentrum
München, Ingoldstädter Landstraße 1, 85764 Neuherberg, Germany
(Received 30 August 2013; accepted 16 December 2013; published online 15 January 2014)
A miniaturized ultrasound sensor is demonstrated in a silicon-on-insulator platform. The sensor is based on a pphase-shifted Bragg grating formed by waveguide corrugation. Ultrasound detection is performed by monitoring
shifts in the resonance frequency of the grating using pulse interferometry. The device is characterized by
measuring its response to a wideband acoustic point source generated using the optoacoustic effect.
Experimental results show that the sensor’s response is dominated by the formation of surface acoustic waves.