Y, XY, XYZ and Sample Manipulators MultiCentre Sample Handling Systems MultiCentre XYZ Stages

Y, XY, XYZ and Sample Manipulators
MultiCentre Sample Handling
Systems
MultiCentre XYZ Stages
¡ Complete engineered solution for
scientific and analytical application s
¡ High stability/precision stages
¡ Up to +/-31 mm XY motion
¡ 25 mm-1000 mm Z motion
¡ Tilt and azimuthal sample rotation
¡ 33mm Ø sample puck or stub system
¡ Failsafe hand-off to Power Probe
transfer systems
¡ Heating, e-beam Heating, Cooling to
LN2 and biasing options
The MultiCentre provides a complete solution
for sample transfer and manipulation. Typical
applications include analytical instrumentation for
surface analysis equipment and synchrotron end
stations.
MultiCentres are modular by design (as shown to
the right), utilising the MultiStage range to provide
X, Y and Z translations. The unique ‘Rotatable Axis’
X/Y stages can also be incorporated to provide a
truly eucentric stage (see page 121 for a detailed
explanation). UHV Design’s MagiDrive rotary
feedthroughs are also utilised to provide the basic
rotations. The MultiCentre range provides sample
transfer pucks and sophisticated manipulator end
stations / receptors with optional heating and
cooling, to provide the complete sample handling
solution.
The MultiCentre range includes two discrete sample mounting and transfer systems. The first is based upon
a large 33 mm diameter puck, whereas the second employs a sample stub (compatible with those used in
the past by VG Scientific’s surface analysis instrument - the ESCALAB), and ‘wobble stick’ transfer fork.
The general capabilities of each range are summarised below, with a more detailed section for each on the
following pages.
Summary table
Puck system
X-Y travel
Z travel
Up to +/- 29 mm
25, 50, 100, 150, 200, 300, 500, and 1000 mm
Polar rotation
Azimuthal rotation
+/- 200o
Continuous or +/- 100o with cooling
N/A
33 mm diameter
14 mm diameter
Heating
> 1000 C
> 800oC
e-beam heating
> 1200oC
N/A
Cooling
< -150oC
< -130oC
Maximum sample size
Sample current measurement
116
Stub system
o
Isolation > +/- 500 V Resistance > 500 M Ohm.
www.uhvdesign.com
[email protected]
Tel:+44(0)1323 811188
Y, XY, XYZ and Sample Manipulators
MultiCentre XYZ Stages
MULTICENTRE
Stacked MagiDrive rotary feedthroughs to provide
polar and azimuthal rotation
Heater, cooling, power and bias service collar
Linear shift mechanism for Z translation
MultiBase X Y stage
MultiBase micrometer actuator
System mounting flange
Heater and sample bias wiring
Heated sample holder with polar and azimuthal rotation
(LN2 cooling not pictured).
Tel:+44(0)1323 811188
[email protected]
www.uhvdesign.com
117
Y, XY, XYZ and Sample Manipulators
Puck handling system
MultiCentre XYZ Stages
To provide flexibility the sample transfer puck is larger than most competing
products, at 33 mm diameter, such that a multitude of small samples can be
mounted simultaneously, or a single larger sample can be mounted. A range of
puck materials can be provided:
•
•
•
316 stainless steel is used for the basic unit
Molybdenum pucks are provided when heating and heating / cooling
options are selected
For the best in cooling with limited heating, copper pucks can be supplied
End receptors
Receptors come in two basic configurations. One, providing sample tilt only (i.e.
rotation about an axis lying in the plane of the sample), and one providing both tilt
and azimuthal rotation (about the sample surface normal).
Both receptors accept the same sample puck which is latched in place through a
positive bayonet actuation. The sample is electrically isolated to 500 V to provide
for sample current measurement and biasing.
Cooling
The Receptors can be provided with an LN2 cooling system, which employs an
ingenious LN2 tank design where the LN2 is in direct thermal contact with the
receptor and provides the electrical isolation. There is no need for separate electrical
insulation which then also acts as a good thermal insulator. In this way even the
relatively large Puck can still be cooled to LN2 temperatures quickly.
K-type thermocouples are normally supplied unless there is a need for very low
residual magnetic fields, in which case N type are preferred.
PBN heater
A 200 W PBN coated graphite disc heater is installed immediately beneath the
sample puck which can rapidly heat the sample to 1000oC. A thermocouple is located
inside the Puck receptor in close proximity to the Puck to measure temperature.
e-beam heating
For even higher temperature ‘flash heating’ of the Puck, an electrically floating
filament is located immediately beneath the Puck, which when heated emits
electrons that are accelerated onto the back side of the Puck. This can heat the
Puck up to 1200oC.
Sample transfer
Sample transfer from an entry lock for example is accomplished using a PowerProbe
magnetic transfer arm (see section 4) with a puck transfer fork mounted on the
end.
118
www.uhvdesign.com
[email protected]
Tel:+44(0)1323 811188
Y, XY, XYZ and Sample Manipulators
MultiCentre model
XY travel
Mounting flange
options
MC-P14
MC-P31
+/-7 mm (+/- 9.9 mm vector)
+/-20.5 mm (+/- 29 mm vector)
114 mm (4.5”) OD
CF64 with M8
straddled holes
152 mm (6”) OD CF100 with M8 straddled
holes
XY resolution
Manual drive +/- 0.01 mm, Stepping +/- 0.0005 mm
XY Actuation
Manual via combined micrometer handwheel and linear scale.
Motorised units are stepper motor driven.
Z travel
Manual handwheel actuation.
Motorisation via side-mounted DC or stepper motors.
Z resolution
Manual drive +/- 0.25 mm with engraved shaft,
Digital linear scale +/- 0.005 mm,
Stepping motor +/- 0.0005 mm.
Azimuthal rotation
and resolution
203 mm (8”) OD
CF150 with M8
straddled holes
Z-shifts are available with following strokes as standard
25, 50, 100, 200, 400, 600, and 1000 mm.
Z Actuation
Polar rotation
and resolution
MultiCentre XYZ Stages
Puck handling system: General Specifications
Maximum rotation = +/- 200o Resolution < 1.0o when driven from the same direction
Manual and stepper motor driven actuation.
Continuous without cooling
Maximum rotation = +/- 100o with cooling
Resolution< 0.5o when driven from the same direction.
Heating
PBN:
Maximum temperature measured using in-situ thermocouple at the sample puck > 1000oC
E-Beam:
Maximum temperature measured using in-situ thermocouple at the sample puck > 1200oC
Cooling
Electrical isolation
Sample transfer
Tel:+44(0)1323 811188
Ultimate low temperature measured using in-situ thermocouple at the sample puck
< -150oC Cool down time to ultimate < 30 min
Sample transfer puck :Electrical isolation > +/- 500 V
Electrical leakage resistance > 500 MOhm.
Via UHV Design’s Power Probe transfer arms
[email protected]
www.uhvdesign.com
119
Y, XY, XYZ and Sample Manipulators
Stub handling system
MultiCentre XYZ Stages
The sample transfer stub is compatible with the well known ESCALAB stub
system:
•
•
•
•
316 stainless steel is used for the basic unit
Molybdenum stubs are provided when heating and heating / cooling
options are selected
For the best in cooling with limited heating copper stubs can be supplied
Standard stub sizes of 10 mm and 14 mm diameter
End receptors
Provide electrical isolation to 500 V for sample current measurement and biasing.
Cooling
The receptor can be provided with an LN2 cooling system, which employs an
ingenious Cold Lance design, where the LN2 is transmitted through a co-axial
tube which is docked into the receptor using an additional sprung-loaded z-shift.
This has the advantage of being able to provide continuous polar rotation, when
disconnected and obviates the need for coiled cooling pipes. When disengaged,
heat loss to the cooling circuit is eliminated improving heating performance. K-type
thermocouples are normally supplied unless there is a need for very low residual
magnetic fields, in which case N-type are preferred.
Heater
For heating, a tantalum wire heater is installed in the end receptor which can heat
the sample to 800oC.
Sample transfer – from an entry lock for example, is accomplished using a our
PowerProbe magnetic transfer arms (see section 4) in conjunction with our bellows
sealed wobble stick.
MultiCentre model
XY travel
Mounting flange
options
MC-S31
+/-7 mm (+/- 9.9 mm vector)
+/-20.5 mm (+/- 29 mm vector)
114 mm (4.5”) OD CF64
with M8 straddled holes
152 mm (6”) OD CF100 with M8
straddled holes
203 mm (8”) OD CF150
with M8 straddled holes
XY resolution
Manual drive +/- 0.01 mm, Stepping +/- 0.0005 mm
XY Actuation
Manual via combined micrometer handwheel and linear scale.
Motorised units are stepper motor driven.
Z travel
Z-shifts are available with following strokes as standard 25, 50, 100, 200, 400,
600 and 1000 mm.
Actuation
Manual handwheel actuation.
Motorisation via side-mounted DC or stepper motors.
Z Resolution
Polar rotation
and resolution
Manual drive +/- 0.25 mm with engraved shaft, with digital linear scale 0.01 mm,
Stepping motor +/- 0.0005 mm
Rotation = continuous Resolution < 1.0o when driven from the same direction
Heating
Tantalum wire heater around the stub holder
Maximum temperature measured using in-situ thermocouple at the sample stub > 800oC
Cooling
Ultimate low temperature measured using in-situ thermocouple at the sample stub < -130oC Cool
down time to ultimate < 45 min
Electrical isolation
Sample Transfer
120
MC-S14
Electrical isolation > +/- 500 V Electrical leakage resistance > 500 MOhm.
Via UHV Design’s Power Probe transfer arms
www.uhvdesign.com
[email protected]
Tel:+44(0)1323 811188
Y, XY, XYZ and Sample Manipulators
Eucentricity
MultiCentre XYZ Stages
The ‘Puck’ and ‘Stub’ MultiCentre manipulators can
be fitted with the unique Rotatable Axis MultiBase
XY stage (RAMB). Using the RAMB as a platform,
it is possible for the first time to configure a UHV
modular MultiCentre as a truly eucentric stage.
Eucentric stages are used almost exclusively for
applications requiring the ultimate in alignment and
analytical precision. All electron microscopes both
SEMs (Secondary Electron Microscope) and TEMs
(Transmission Electron Microscope) are equipped
with eucentric stages for example, although these
are more often than not simply ‘O’ ring sealed.
Eucentric stages have the lateral translations ‘inside’
the tilt motion and differ quite fundamentally from a
more standard configuration where the tilt is ‘inside’
the translations. This is represented pictorially
below. It can be seen that using a eucentric stage,
once the sample is brought into focus it can be
translated at will and remain in focus – this is
quite different to the standard configuration where
tilting the sample results in a loss of focus plus an
unwanted lateral translation.
Tel:+44(0)1323 811188
[email protected]
www.uhvdesign.com
121
Y, XY, XYZ and Sample Manipulators
MultiCentre Customer Questionnaire
To request a quotation please fax a completed questionnaire to UHV Design on +44 (0)1323 811999.
Alternatively complete our online form at http://www.uhvdesign.com/multicentre_form.htm
MultiCentre XYZ Stages
Customer name:
Company name and address:
Telephone Number:
Fax Number:
Email address:
What is your application?
What size are your samples?
What is the size and type of your system mounting flange?
What is the systems operating pressure?
What is the systems ultimate pressure?
Are gases involved with your process? If so please state partial pressures of each and at what sample temperatures
they will be present.
Are any of the following incompatible with your process (i.e will they react):Tantalum
Molybdenum
Stainless steel
What Type of Thermocouple do you require?
Type K Thermocouple
Type N Thermocouple
Other
Do you wish to heat the samples? If so to what temperature?
How long will the sample be heated for during a cycle?
Do you wish to cool the samples? If so to what temperature?
What is the maximum X motion you require (mm)?
What is the maximum Y motion you require (mm)?
What is the maximum Z motion you require (mm)?
Do you require rotation?
Azimuthal
Primary
Do you need to bias or electrically isolate your sample? If so to what level?
Do you require rotation of the axes about the manipulator axis (R.A.M.B option)?
Please indicate the actuation method for each axis of manipulation:
X Motion
Manual
Stepper Motor
DC Motor
Y Motion
Manual
Stepper Motor
DC Motor
Z Motion
Manual
Stepper Motor
DC Motor
Azimuthal
Manual
Stepper Motor
DC Motor
Primary
Manual
Stepper Motor
DC Motor
R.A.M.B
Manual
Stepper Motor
DC Motor
Do you need temperature controllers and/or power supplies?
Additional comments or requirements:
122
www.uhvdesign.com
[email protected]
Tel:+44(0)1323 811188
Y, XY, XYZ and Sample Manipulators
Liquid Helium Cooling
Liquid Helium Cryostats
A range of helium cryostats can be installed on the UHV Design XYZ MultiStage manipulators – most notably
those from Advanced Research Systems and Janis, although others could be considered on request.
ST-400
Helitran
The ST-400 continuous flow
crysostat from Janis provides a
cost effective solution for less
demanding applications.
The Helitran LT-3M continuous
flow cryostat from ARS offers
certain unique performance
advantages for demanding
applications.
Page 124
Tel:+44(0)1323 811188
Page 125
[email protected]
www.uhvdesign.com
Displex
Where continuous flow cryostats
cannot be used for reasons
of safety or simply cost of He
consumption, we also offer a
closed cycle cryostat from ARS
– the Displex CS202B. This unit
also has two alternative heads/
expanders – the DE-202AB and
202NB offering different levels
of performance.
Page 126
123
Y, XY, XYZ and Sample Manipulators
Continuous Flow Cryostat
Continuous Flow Cryostat
Introduction
The ST-400 is a true UHV continuous flow cryostat
from Janis Research Company Inc.
It is fully compatible with UHV Design’s ‘XY31-‘
series of XYZ MultiStage manipulators (see pages
112-115 for further information), which when
combined, provide +/-19.8 mm of X/Y motion (+/28 mm vectorial motion), up to 1 m of Z motion
and 4.2 K base temperatures. Their combined use
provides an economical solution to liquid helium
cooling requirements.
Each MultiStage / cryostat is built to order so that
the cold finger length and conflat-style vacuum
flange may be sized to fit the user’s chamber.
Features for UHV include:
¡ Bakeable to 200°C.
¡ Sample temperatures from 4.2
standard, or > 700 K optional.
to
475
K
¡ Heater and temperature sensor in the
cryostat helium space (not exposed to UHV
environment).
¡ Electropolished stainless steel construction.
¡ Gold plated copper radiation shield and sample
mount.
¡ UHV-compatible electrical feedthroughs for user
wiring.
¡ Low cryogen usage @ 0.5 L/hr.
¡ Initial cool down time <15 mins.
For more information and order codes please
contact sales.
124
www.uhvdesign.com
[email protected]
Tel:+44(0)1323 811188
Y, XY, XYZ and Sample Manipulators
Helitran Liquid Helium Cryostat
Continuous Flow Cryostat
Introduction
The Helitran LT-3M is a continuous flow cryostat
from Advanced research Systems Inc. It is fully
compatible with UHV Design’s ‘XY31-’ series of
XYZ Multi-Stage manipulators (see pages 112115 for further information), and can be used to
accomplish +/- 14 mm X/Y motion (+/-20 mm of
vectorial motion), up to 1 m of Z motion and 2K
base temperatures.
The Helitran LT-3M has some unique design features
giving significant performance benefits, particularly
in terms of low vibration, temperature stability,
efficiency and cooling power:¡ Built-in impedance valve at the sample tip
means sub 4.2 K (1.7 K operation when the He
exhaust is pumped).
¡ Patented matrix heat exchanger providing high
cooling power (1.5 W @ 4.2 K, 20 W @ 50 K),
and very efficient heat transfer. This results in
the efficient use of cryogen – up to 40 times
less cryogen required compared to some
competitive product, and therefore also gives a
concomitant reduction in operating costs.
General Specification
Cryo-cooler Model:
Temperature Min
Temperature Max
L He
L N2
4.2k (<2k
with
pumping)
77k (70k
with
pumping)
350k
¡ Co-axial shielded flow transfer system, contributes
to this efficiency but more importantly ensures
single phase tip flow – i.e. eliminates boiling.
This provides excellent temperature stability,
and freedom from mechanical vibration at the
tip. The intrinsic vibrational stability is stated as
less than 0.1 nm in STM applications.
Cooling Power 4.2k
1.5 watts (2 l/Hr flow)
Cooling Power 20k
8 watts (2 l/Hr flow)
¡ An exhaust gas heater eliminates condensation
and icing at the exhaust port.
Cooling Power 50k
20 watts (2 l/Hr flow)
(500k or 800k available as
options)
¡ A flow control panel provides precise, repeatable
flow / temperature control and optimisation.
Cooldown time to 4.2k
20 minutes
¡ Heating and temperature control to 500 K using
a Silicon diode sensor, and to 800 K using a K
type thermocouple.
Consumption (4k min)
0.75 l/Hr. lower at higher
temperatures
Orientation
Vibration at sample
Tel:+44(0)1323 811188
[email protected]
www.uhvdesign.com
Any
0.1 Nm
125
Y, XY, XYZ and Sample Manipulators
Displex Closed Cycle Cryostat
Closed Cycle Cryostat
Introduction
The Displex is a versatile closed cycle cryostat
package from Advanced Research Systems Inc.
that has many applications in ultra-high vacuum
research. The system typically includes a compressor,
hoses, DE-202AB expander, temperature controller
/ sensor and heater instrumentation. It is fully
compatible with UHV Design’s ‘XY31-’ series of XYZ
Multi-Stage manipulators (see pages 112-115 for
further information), and can be used to accomplish
+/- 18.8 mm X/Y motion (+/-26.5 mm of vectorial
motion), up to 1 m of Z motion and 10 K base
temperatures.
Alternatively the DE-202NB is a modified version
that achieves a 6.5 K bottom out temperature and
higher capacity at 10 K. There are also higher speed
versions for faster cool-down times, viz DE202AB(T)
– contact the factory for full details. The Displex
Cryostats have some unique design features giving
significant performance benefits which include:¡ 10 K to 350 K operation or 6.5 K to 350 K and
(Options for 450 K and 800 K heating).
General Specification (without options)
Type
Refrigeration capacity
(without attachments)
Temperature range
Cooldown
time to 20
Kelvins
Lines
DE-202AB
DE-202NB
10 to 350 kelvin
6.5 to 350 kelvin
2.0 W @
50 Hz
20 k
0.4 W @
50 Hz
8k
0.5 W @
60 Hz
10 k
2.5 W @
60 Hz
60 Hz - 50 minutes
50 Hz - 60 minutes
20 k
¡ Iron - doped gold (0.07% atomic wt. Iron)
Chromel thermocouple temperature sensors,
silicon diodes, or other sensors available upon
request.
¡ Metallized thermofoil heater for long heater life
- 36 W, 36 V resistance heater.
¡ UHV construction and instrumentation wiring.
¡ Bakeable to 200°C with displacer removed
(400°C without instrumentation).
0.8 W @
50 Hz
¡ Vacuum Level 1E-11 Torr.
1 W @ 60
Hz
¡ Operates in any position.
2 W @ 60
Hz
¡ The Displex is a Pneumatic Drive cryo-cooler
with no mechanical drive components such as
cams, push rods, and poppet valves. The motor
is axial which further reduces the vibrations in
the horizontal plane. The vibrations at the tip
are lower than the pulse tube cryo-coolers, and
lower by a factor of 4 than mechanical drive GM
Cryo-coolers. Vibrations at the sample are the
lowest in the class at :+/- 15 Microns - Z
+/- 5 Microns - X and Y
2.5 W @
60 Hz
60 Hz - 65 minutes
50 Hz - 75 minutes
3 m (10ft) flexible stainless steel lines as
standard
Power
requirements
208/230 V, 50/60 Hz, 1.7 kW typical
Other voltages available upon request
Weights
System - 91Kg (200 lb)
Compressor 80 Kg (165 lb)
Expander - 7Kg (16 lb)
¡ Only two moving parts, easily maintained in the
field without breaking vacuum.
¡ Requires only electricity and cooling water for
operation.
Note: these specifications are for the Cryocooler only. Actual performance will depend on parasitic and experimental heat loads. For
more information and order codes please contact sales.
126
www.uhvdesign.com
[email protected]
Tel:+44(0)1323 811188