Introduction To Electromigration
Transcription
Introduction To Electromigration
PREREQUISITE Basic technical background or working experience in a science or engineering discipline. WHO SHOULD ATTEND? Technicians, engineers, and researchers Decision makers, policy makers, and managers Dates : 17 April 2015 (Friday). Time : 9:00 a.m. – 5:00 p.m. Venue : Kompleks ЄUREKA, Universiti Sains Malaysia, Penang. PUSAT PENGAJIAN KEJURUTERAAN BAHAN & SUMBER MINERAL SCHOOL OF MATERIALS & MINERAL RESOURCES ENGINEERING in collaboration with: REGISTRATION FEE Fee inclusive of GST (GST registration no : 0012 9141 9648). Fee covers tea breaks and lunches, workshop materials and Certificate of Attendance. Normal : MYR 2,050.00 per participant Group : MYR 1,845.00 per participant (Minimum 3 participants from the same company / organisation) (wholly-owned by Universiti Sains Malaysia) (Co. No. 473883-H) HRDF : 0159 HRDF Claimable* *Subject to HRDF Approval INTRODUCTION The effects of electro- and electrochemical (as well as stress-) migration on metal interconnects are reviewed and explained in this course. Theoretical background related to these phenomena will be described. The evaluation of measurement techniques of these migrations are also being explained in this subject. Examples related to issues for wafer and packaging levels are provided. Factors affecting electro- and electrochemical (as well as stress-) migration will be presented and statistical models predicting the reliability of these phenomena are briefly explained. COURSE OUTCOMES Upon completion of this course, participants will be able to: i. Differential among electro-, electrochemical, and stress-migration. ii. Describe the physical mechanism of electromigration. iii. List down models explaining electromigration. iv. Explain electromigration-induced mechanical stress. v. Relate electromigration to reliability of an interconnection. vi. Suggest characterization methods to measure electromigration. vii. Cite factors affecting electro- and stressmigration. ENQUIRY Technical: Professor Dr. Ir. Cheong Kuan Yew School of Materials & Mineral Resources Engineering, Universiti Sains Malaysia. (Off): +604-653 3888 ext 5259 (E): [email protected] Registration and others: Khairol Anuar Mohammed USAINS Holding Sdn. Bhd. (Off) +604 – 643 7420 ext 5714 (DL) +604 – 653 5714 / (M) +6012-286 9048 (E) [email protected] / [email protected] COURSE METHODOLOGY This course is conducted in a seminar room. Each participant will receive a set of course materials. COURSE CO-ORDINATOR PROFESSOR DR. IR. CHEONG KUAN YEW Kuan Yew Cheong was born in Ipoh, Perak (1972) and received the B. Eng (1st Hons.) in Materials Engineering from Universiti Sains Malaysia (USM), Malaysia in 1997. After graduation, he worked for two years as a project engineer and quality assurance engineer in a project management company and a semiconductor-device manufacturing factory in Malaysia. End of 1999, he decided to pursue his postgraduate study (M.Sc.) after being awarded a Fellowship under the Academic Staff Training Scheme from USM. After completion his M.Sc. in Materials Engineering (Thin Film Technology) in 2001, he continued his Ph.D. in the School of Microelectronic Engineering, Griffith University, Australia and the degree was awarded in 2004. This study was fully sponsored by Australian Research Council, USM, and Griffith University Postgraduate Research Scholarship. In 2005, he was awarded a Certificate of Teaching and Learning from USM. Now he is serving as a full Professor at the School of Materials & Mineral Resources Engineering, USM. He teaches under- and post-graduate courses related to quality control and management, fabrication and characterization of engineering & electronic materials and devices for more than 10 years. Dr. Cheong’s main research area is on semiconductor device fabrication, electronic packaging, and characterization. Outcomes of his research have been published in more than 150 high impact-factor journals and 4 book chapters. Due to his expertise in wide-bandgap semiconductor-based device fabrication technology, he has been invited three times as a Visiting Scientist to Korea Electrotechnology Research Institute (KERI), Korea. He has being invited as Keynote and Invited Speaker in International Conference on Electronic Materials 2010 (ICEM 2010) - International Union of Materials Research Societies (IUMRS), Korea, CIE & IEM International Seminar on Electrical, Electronic and Energy Saving 2010, Taiwan, and Infineon Technologies (Kulim) Sdn Bhd (IFKM) Technical Symposium 2010, Malaysia, Surface Engineering 2011 at Bangkok, Thailand, and Collaborative Conference on Crystal Growth 2012 at Orlando, USA, International Conference on Materials and Characterization Techniques, India, 2014, and The 8th International Conference in Materials Processing (ICAMP8) 2014, Australia. Dr Cheong is serving as a reviewer for numerous referred journals and theses examiner both local and abroad. He has reviewed more than 550 manuscripts and now serving as an Advisory Editorial Board Member of Materials Science in Semiconductor Processing published by Elsevier Science B.V. and Associate Editor of Physics Express Recently, he is being invited by Science Publisher (an imprint of CRC Press/Taylor & Francis Group) to edit a book entitled “Two-Dimensional Nanostructures for Energy Related Applications”. Honoring his excellent contribution in research, the Academy of Sciences Malaysia (ASM) has accoladed Dr Cheong with ‘Top Research Scientists Malaysia’ (TRSM) 2013. Dr. Cheong is registered with the Board of Engineers, Malaysia, as a Professional Engineers in Material Engineering discipline. Outside university, he is very active in professional and community activities. He is a member of Materials Research Society (USA). He was the honorary treasurer for Electron Microscopy Society, Malaysia (2005/2006), was elected as one of the Ex-comms of the Institute of Electrical, Electronic Engineers (IEEE) – Component, Package, and Manufacturing Technology (CPMT) Society (2005 – 2014) and Electron Device Society (EDS), Malaysia Chapter (2005 – 2010), was the Chairman (2009 – 2011) and Advisor (2011 – 2012) of the Electronic Engineering Technical Division under The Institution of Engineers Malaysia (IEM), and was a Council Member of IEM (2009 – 2012). Dr Cheong, who is a Certified PSMB Trainer, registered with the Ministry of Human Resource, Malaysia, has been delivering technical training courses for local and multinational industries for the past 5 years and more than 2,000 engineers and researchers have benefited from those courses. INTRODUCTION TO ELECTROMIGRATION COURSE OUTLINE 1. Introduction 2. Background of Electro-, Electrochemical, and Stress-migration 3. Theory of related migration 4. Tests of Electromigration 5. Factors affecting Electromigration 6. Conclusion Disclaimer The Organizer reserves the right to reschedule or cancel any part of its published programme or venue due to unforeseen circumstances and will not accept liability for costs incurred by participants or their organizations for the cancellation of travel arrangements and/or accommodation reservations as a result of the course being cancelled or postponed. Advance notice will be given if there are such changes or cancellation. RECOMMENDED ACCOMMODATION: Alora Hotel (formerly known as B-Suite) (Nearby Bukit Jambul Shopping Complex) B Tower, Bayan Point, 19, Medan Kampung Relau, 11900 Bayan Lepas, Penang. (M) : Ms. Hazliza (016 – 458 3568) (T) : 04 – 646 7777 / 04 – 644 4000 (Reservation) (E) : [email protected] / [email protected] (URL) : http://www.b-suite.com.my Hotel Vistana (Nearby Bukit Jambul Shopping Complex) 213, Jalan Bukit Gambir, Bukit Jambul, 11950 Penang. (M) : Ms. Roslinda (018–308 5876) (T) : 04 – 646 8000 (E) : [email protected] (URL) : http://www.vistanahotels.com/VistanaPG/Default.aspx Hotel Equatorial Penang 1, Jalan Bukit Jambul, 11900 Bayan Lepas, Penang. (T) : 04 – 632 7000 (E) : [email protected] (URL) : http://www.equatorial.com/pen/ USM Guest House (inside USM compound) Universiti Sains Malaysia, 11800 Minden, Penang. (M) : Ms. Ruzana (012 – 581 4702) (T) : 04 – 653 2030 / 04 – 653 2050 (E) : [email protected] Apple 1 Hotel (nearby Queensbay shopping mall) (Budget Hotel) 33 Persiaran Bayan Indah, Sungai Nibong, Bayan Lepas, 11900 Penang. (T) : 04 – 640 6666 (URL) : http://www.apple1hotel.com/index.php Eastin Hotel Penang (nearby Queensbay shopping mall) 1, Solok Bayan Indah, Queensbay, 11900 Bayan Lepas, Penang. (T) : 04 – 612 1111 (E) : [email protected] (URL) : http:// http://www.eastinhotelpenang.com/ppc/index.html REGISTRATION FORM INTRODUCTION TO ELECTROMIGRATION – APRIL 2015 Send registration form to : Khairol Anuar, Usains Holding Sdn. Bhd., Level 2, Block C, Sains@USM, No.10, Persiaran Bukit Jambul, 11900 Bayan Lepas, Penang. Fax : +604 – 643 0490 or Email : [email protected] / [email protected] NO. PARTICIPANT NAME POSITION & EMAIL 1. 2. 3. 4. 5. Organisation Address: Postcode: Contact Person: Tel: Fax: E-mail: Mobile: MODE OF PAYMENT I enclosed Cheque NUMBER BANK NO. OF PARTICIPANTS: MYR Normal Bank Draft Money Order LO / PO Group TOTAL Cheque / Bank Draft / Money Order / LO / PO must be made payable to ‘USAINS HOLDING SDN. BHD.’. 1. Bank Transfer [Please fax your Bank-in Slip (Print your name & details on the slip)]. Payee Name : USAINS Holding Sdn. Bhd. Details : INTRODUCTION TO ELECTROMIGRATION – APRIL 2015. Name of Bank : CIMB Bank Berhad (USM Branch), Universiti Sains Malaysia, 11800 USM Penang. Account Number : 800 – 381 – 7364. 2. A Local Order (LO) or Purchase Order (PO) must be presented before the event. The Organizer reserves the right to refrain a registered participant from taking part in the event if no proof of payment can be presented. This only applies to registered participants who have NOT paid the registration fee PRIOR to the event date. 3. Cancellation / Substitution A full refund less administration cost of 10% (from normal fee) will be given for cancellation received not later than 10 working days before the event. No refund will be made after this period. However, substitute participants are welcomed at no extra charge provided written notice of at least 5 working days before the event is given to the Organizer.