Baltic ALD 2014 - Atomic Layer Deposition

Transcription

Baltic ALD 2014 - Atomic Layer Deposition
May 12-13, 2014
Helsinki, Finland
th
12 International Baltic Conference on Atomic Layer Deposition
Sponsors
Baltic ALD 2014
12th International Baltic Conference on Atomic Layer Deposition
Physicum (Gustaf Hällströmin katu 2A), Helsinki, Finland
May 12-13, 2014
Call for Abstracts
Submission deadline January 31, 2014
Topics
Invited Speakers
Fundamentals
- Precursor Chemistry
- Film Growth and
Nucleation
- Novel Materials
- Characterization
- Modelling
Nanostructure Synthesis
Applications
Industrialization
Professor Jaan Aarik,
University of Tartu, Estonia
Professor Victor Drozd
St. Petersburg State University, Russia
Professor Marc Heyns,
IMEC, Belgium
Professor Kornelius Nielsch,
University of Hamburg, Germany
Professor Shi-Woo Rhee,
POSTECH, Korea
Professor Xueliang (Andy) Sun,
The University of Western Ontario, Canada
Dr. Jonas Sundqvist,
Fraunhofer CNT, Germany
Dr. Tuomo Suntola,
Picosun Ltd, Finland
Professor Roger Webb,
University of Surrey, England
International Advisory Board
Professor Jaan Aarik, University of Tartu, Estonia
Professor Mats Boman, University of Uppsala, Sweden
Professor David Cameron, Lappeenranta University of Technology, Finland
Professor Victor Drozd, St. Petersburg State University, Russia
Professor Marek Godlewski, Polish Academy of Sciences, Poland
Dr. Suvi Haukka, ASM Microchemistry, Finland
Professor Leif Højslet Christensen, Danish Technological Institute, Denmark
Dr. Konstantinas Leinartas, State Research Institute, Vilnius, Lithuania
Professor Kornelius Nielsch, University of Hamburg, Germany
Professor Ola Nilsen, University of Oslo, Norway
Local Organizing Committee
Professor Markku Leskelä, University of Helsinki
Conference Chair
Ms. Emma Härkönen, University of Helsinki
Coordinator
Professor Jouni Ahopelto, VTT
Mr. Markus Bosund, Beneq
Professor Maarit Karppinen, Aalto University
Additional information from
www.aldcoe.fi/bald2014
Dr. Wei-Min Li, Picosun Ltd
Professor Harri Lipsanen, Aalto University
Dr. Riikka Puurunen, VTT
Professor Mikko Ritala, University of Helsinki
Professor Jyrki Räisänen, University of Helsinki
Dr. Marko Tuominen, ASM Microchemistry