Glancing Angle Deposition(GLAD)

Transcription

Glancing Angle Deposition(GLAD)
Progress report
Glancing Angle Deposition
(GLAD)
Reporter: Zhibin Luo
Jul 11th 2013
Glancing angle deposition JVSTA 2007 Matthew M. Hawkeye
Thin Film Deposition
Substrate
Vapor
Deposition
Source
UHV
PVD
CVD
Atomic Layer Deposition Chem. Rev. 2010 Steven M. George
Initial growth of the thin film
Layer growth
The atoms are more strongly bound to the
substrate than to each other
Atoms
Substrate
Island growth
Atoms
The interaction between the atoms is greater
than the interaction with the substrate
Substrate
Layer plus island growth
Atoms will initially cover the surface in
monolayers due to the strong interaction with
the substrate, but after the deposition of one
or several layers, islanding will occur
Atoms
Substrate
Structure zone models
Substrate temperature T/Tm
The temperature is
too low for any
significant diffusion
to occur
Surface diffusion
strongly influences
the growth
There is sufficient
energy for bulk
diffusion to occur
Glancing Angle Deposition
Substrate
ψ
α
Vapor
Deposition
Source
Substrate
UHV
GLAD
Archetypal GLAD fabricated microstructures
Tilted columns
Zig-zag columns
Helical columns
Vertical columns
Self-shadowing
StageⅠ
StageⅡ
tanα=2tanβ
The atoms evaporate from the surface or buried by the arrival of new atoms
Deposition onto nonplanar substrates
Improving the uniformity
Postdeposition processing
or initial seeds for column
growth
Embossing、laser-direct write
lithography、monolayers of
self-assembled nanospheres、
optical lithography, etc
Archetypal GLAD fabricated microstructures
Tilted columns
Zig-zag columns
Helical columns
Vertical columns
PhiSweep
Orientation
Sweep axis
Angle from central sweep axis
Orientation
Sweep axis
90°turn to create square helix
Film properties and applications
First, because the films possess an internal microstructure, the exposed surface area
of the film is dramatically higher than in a dense coating
Second, the particular geometry of the micro and nanostructures produced with the
GLAD technique can directly impact various physical properties
Dichrosim、birefringence and anisotropic resitivity
Applications
Dye sensitized solar cells(DSSCs)
Sensor devices
Photocatalyze the degradation of organic chemicals
Materials for electrochemical supercapacitors
Surface chemistry applications
It’s my great honour to have your precious opinions.

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