APPLIED MATERIALS – ENDURA AMAT

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APPLIED MATERIALS – ENDURA AMAT
EQUIPMENT DATASHEET
APPLIED MATERIALS – ENDURA
AMAT – 2xPC2 Chambers, 2xWB PVD Chambers – METAL
Tool ID
M4TSP282
OEM/Model
APPLIED MATERIALS ENDURA
Serial Number
20461
Process
PVD
Vintage
June, 2004
Wafer Size
200 mm
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