(MPM)™ to Improve Endura Performance

Educational Series:
Improving Endura PVD
Maintenance Performance
With MPM™
FOA July 2015
Fab Overview
■ 
■ 
■ 
■ 
■ 
■ 
Location: EU
Cleanroom size: 50K Sq.Ft. / 5000m2
Wafer size: 200mm
Volume: 4200 wspm
Number of Tools: 265
Technology node: 0.18um capable, 0.35um volume
production
■  Automation: 90% recipe select / download
Goals & Objectives
■  For top 3 toolsets
ì  Improve Availability to >90%.
ì  Decrease CV of AV to <10% for all chambers/mainframes
ì  Top priority AMAT Endura PVD toolset – 6 Tools
■  Opportunities in Availability by:
ì  Challenging unscheduled downtime.
ì  Reducing variation in scheduled downtime.
MPM™ Scorecard
■  Performed multi site
high level review
■  Major functions and
practices benchmarked
ì  People
ì  Systems
ì  Performance
■  Identify and prioritize
initial processes to focus
on
■  Busy improving them
Data Integrity
■ 
■ 
■ 
■ 
Data integrity / quality issues hindered analysis.
All information in free text form.
Incorrect logging of Scheduled/Unscheduled work.
Initial improvement through application of SEMI E10 & E58
states.
■  Fault Codes were introduced enabling categorization.
■  Training carried out to support.
Equipment Uptime and
Variability of Uptime
Availability - Coefficient of Variation by Toolset
M-Ratio – Scheduled vs
Unscheduled Downtime
54% M-­‐Ra<o Endura & CL200 MF's and Chambers Ini<al Assessment 6 5 Number of Tools 5 4 3 3 2 1 1 1 0 0 0.5 1 1.5 2 3 4 5 6 7 8 9 10 M-­‐Ra<o ■  PVD System CL200 is Golden tool.
■  >50% of chambers are below 1:1.
■  High Unscheduled downtime leads to high variability.
MPM™ KPI Setup
■  KPI’s are required to establish a baseline & track
performance.
■  The following KPI’s were installed.
ì  Output.
ì  Availability.
ì  CV of AV.
ì  Scheduled & Unscheduled downtime.
ì  M-Ratio.
ì  Fails within 48 Hours.
ì  Green-Green time for scheduled work.
ì  First Time Qual.
ì  Response Time.
Examples of MPM™ KPIs
CV of AV
M Ratio
Fail within 48 Hours
MPM ™ KPI Reporting
Automation
■  Data automatically extracted from database, summary table
generated, analysis carried out and charts produced.
MPM™ Endura Tiger Team
■  Tiger teams were formed in each of the areas of focus.
ì  These were cross functional teams including:
●  Equipment Engineering.
●  Process Engineering.
●  Operations.
●  Industrial Engineering.
As Required
■  The task of the Tiger Team is to Review the data, identify
opportunities, prioritise, create action plans and execute.
■  Initial focus was on reduction of Unscheduled Downtime.
Unscheduled D/T Pareto
■  Pareto Analysis indicated that for the Endura toolset the
main contributors were Handling/Breakage & Pressure
related issues. (480 & 330 Hours resp)
M-Ratio: Scheduled /
Unscheduled Downtime
■  Handling faults - source of the issues was defective chucks
in the Endura SIP chambers. Chuck types replaced.
■  Handling/Breakage failures have reduced to a total of 3.4
hrs/quarter vs. 240
■  Chamber pressure related failure reduced to 1 hr/quarter vs.
168 hrs/quarter
M-Ratio Increased
■  Focussed on unscheduled downtime taking action to:
ì  Determine the root cause and eliminate
ì  Updating PM content to mitigate this fail mode.
■  As a result the Endura
M-Ratio has Increased
significantly over the last
6 Months.
MTTR/MTBF Variability
■  Data Analysis highlighted significant
variation in the duration of scheduled
tasks
■  Delivered improvement in 2 phases:
ì  Phase 1: Reduce the variation in
completion of the scheduled work.
ì  Phase 2: Reduce the mean time to to
complete the scheduled work.
■  RCA carried out to identify phase 1
improvement opportunities.
MTTR/MTBF Variability
■  As a result variance and average duration for scheduled
tasks are reducing, Specs Updated.
Green to Green Time for Scheduled Work
CL200
Chamber 1 Kit
Chamber 2 Kit
Chamber 3 Kit
Chamber 3 Kit & Target
Chamber 4 Kit
Chamber 4 Kit & Target
Chamber 5 Kit
Chamber 5 Kit & Target
Chamber 6 Kit
Chamber 6 Kit & Target
Long Term Mean WK18
WK19
WK20
WK21
WK22
WK23
WK24
WK25
WK26
7:30:00
4:50:00 5:47:00
4:14:00 3:45:00
4:20:00
8:30:00
7:09:00 4:50:00 4:59:00
3:55:00
5:40 3:54:00
12:30:00
28:30:00
15:30:00
10:55:00 8:43:00
3:06:00 7:39:00 9:55:00
12:54:00
11:30:00
12:08:00
18:00:00
11:30:00
14:00:00
14:25:00
14:00:00
26:00:00
4:55:00
19:30:00
17:55:00
WK27
4:48:00
5:48:00
6:05:00
Green to Green Time for Scheduled Work
ENDURA
Long Term Mean
WK18
WK19
WK20
WK21
WK22
WK23
WK24
WK25
WK26
WK27
Chamber 1 Kit
Chamber 1 Kit & Target
Chamber 2 Kit
Chamber 2 Kit & Target
Chamber 3 Kit
Chamber 3 Kit & Target
Chamber 4 Kit
Chamber 4 Kit & Target
Chamber C Kit
Chamber D Kit
15:00:00
21:00:00
28:30:00
27:00:00
39:00:00
27:30:00
22:00:00
14:00:00
18:00:00
17:05:00
17:55
32:00:00
18:30:00
16:00:00 22:54:00
22:12:00
23:48:00
4:48:00
WK28
WK29
Results To Date - PVD
The results of the joint MPM™ Tiger Team work:
Increasing the PVD perfromance enabled a significant
reduction in a BEOL WIP bubble -> higher TPT, faster CT
Low CV => uniform output, higher predictability, lower
maintenance costs
Fab Wide
On track to deliver a quarterly Gross Margin growth of
$25M