SMC Pneumatics FGH High Precision Filter for

High Precision Filter for Liquids
Series FGH
Filtration efficiency: 99% or more
HEPO2element
Filtration accuracy: 2, 4, 6 or 13 µm (Filtration efficiency 99%)
Membrane element
Filtration accuracy: 0.2 or 0.4 µm (Filtration efficiency 99.9%)
FGD
FGE
FGG
FGA
FGB
FGC
FGF
FGH
EJ
ED
FQ1
FN
EB첸
ES첸
797
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High Precision Filter for Liquids
Series FGH
Filtration efficiency: 99% or more
Prevents particle
generation in the
housing
Internal particle generation is eliminated by using stainless steel 316 and
PTFE for the wetted material and
adopting a clamp ring system.
High cleanliness
and high quality
High cleanliness and high quality are
ensured by manufacturing elements in
a clean room (Class M 5.5 (ISO Class
7)∗) and performing 100% inspection of
integrity.
∗ Per FED-STD 209E (ISO14644-1).
Prevents residual liquid accumulation in
the case
A simple structure prevents the residual liquid from
accumulating in the case.
Application examples
Ultrasonic cleaning machine
• Manufacture of electric and electronic industrial components
• Manufacture of semiconductor-related components
Dual chamber ultrasonic
cleaning machine
Jet cleaning machine
• Camera, lens and bearing for
Triple chamber ultrasonic
cleaning machine
manufacture of highprecision processing components
• Nozzle for manufacture of automobile components
Series FGH
Cleaning
Cleaning
Steam
Dipping
Ultrasonic
chamber
chamber
Ultrasonic
Boiling
chamber chamber
Pre-filter
Series
FGH
Series
FGH
Steam
chamber
Clean
tank
Dirty tank
Clean
tank
Dirty tank
Pre-filter
Pre-filter
Series
FGH
Pre-filter
798
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HEPO1
1Element
Filtration accuracy: 2, 4, 6 or 13 µ m (Filtration efficiency 99%)
High precision filtration:
99% or more
High accuracy filtration is achieved by using a HEPO1
1element with filtration
accuracy of 2, 4, 6 or 13 µm (Filtration efficiency 99%).
Schematic diagram of filtration efficiency
data measuring circuit
m
EJ-2 µ
Dust
feeder
µm
100
99
EJ-4
Tank
Differential
pressure
gauge
EJ-13
95
µm
EJ-6 µm
Initial filtration efficiency (%)
[Test conditions]
Fluid: water / Test dust: ACFTD / Flow rate: 35 l/min
Dust concentration: 10 mg/l / Temperature: 20°C
Element: EJ801S
Pressure gauge
90
0
2
4
6
8
Flow meter
10
12 13 14
Downstream
side sampling
Pump
Upstream side
sampling
Particle diameter (µm)
Measuring
filter
Automatic particle
measuring instrument
No outflow of fibers or elution of components
from the filter media
There is almost no outflow of fibers or elution of components from the filter media because it
uses ultrafine and long polyester fiber nonwoven fabric with no binder.
FGD
Applicable for a wide range
of liquids
FGE
The element is applicable for a wide range of liquids because it
adopts PTFE seals.
FGA
FGG
FGB
Applicable fluids
Classification
Water
Alcohol
Hydrocarbon
Ester
Oil/fuel oil
Others
FGC
Description
Tap water, industrial water, distilled water,
ion-exchange water, pure water, ultrapure water
Isopropyl alcohol (IPA, propanol)
Ethyl alcohol (ethanol)
Methyl alcohol (methanol)
Butyl alcohol (butanol)
Ethylene glycol
FGF
FGH
EJ
Petroleum ether, petroleum benzene
ED
Methyl acetate, ethyl acetate, methyl acrylate
Hydraulic fluid, lubricating oil, light oil,
kerosene, cutting oil, grinding oil
FQ1
Ammonia (10% solvent),
ethyl ether, isopropyl ether
FN
EB첸
ES첸
799
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Membrane Element
Filtration accuracy: 0.2 or 0.4 µ m (Filtration efficiency 99.9%)
High precision filtration:
99.9% or more
High accuracy filtration is achieved by using a membrane element with filtration
accuracy of 0.2 or 0.4 µm (Filtration efficiency 99.9%)
Schematic diagram of filtration
efficiency data measuring circuit
Test conditions
Fluid: pure water
Contaminant: polystyrene latex particles
Particle measuring method: 0.2 µm automatic particle measuring instrument
Filtration Particle Number of particles (/10 ml) Filtration
rating diameter
efficiency
(µm) Upstream side Downstream side
(µm)
(%)
0.208
99.999
146380
1
0.2
0.4
0.309
103957
2727
97.4
0.41
95019
29.9
99.97
Tank
Differential Flow meter
pressure
gauge
Pressure gauge
Downstream
side sampling
Measuring
filter
Pump
Upstream side
sampling
Automatic particle
measuring instrument
Easy to handle
There is no need of hydrophilic treatment using IPA and the like, because
the element uses a hydrophilic filter
media.
Long filtration life
The element has a long filtration life because
of the high porosity and low pressure drop of
the filter media.
The dust retention amount of the 0.2 µm version is 90 g.
Pre-rinsed with ultrapure water
(0.2 µm version only)
Resistivity recovery characteristics
Classification
Water
Alkalis
Aldehyde
Alcohol
Ether
Hydrocarbon
0.2 µm
0.4 µm
Tap water, ultrapure water,
ion-exchange water, distilled water
Sodium hydroxide (10%)
Potassium hydroxide (10%)
Ammonia water (28%)
Ammonia water (28%)∗
Formaldehyde (35%)
Formaldehyde (35%)∗
Methyl alcohol, butyl alcohol,
ethyl alcohol, propyl alcohol
Dioxane∗
Ethyl ether∗
Ethyl ether∗
Benzene∗, toluene∗,
Benzene∗
hexane∗, xylene∗
Hexane∗
∗ Can be used depending on temperature conditions (please consult with
SMC).
[Measuring conditions]
Element used: ED801S-X20
Element size: ø70 x L247
Filtration area: 4000 cm2
Fluid: Ultrapure water
(resistivity value 17.9 MΩ·cm)
Flow rate: 10l/min
20
18
Resistivity value (MΩ·cm)
Applicable fluids
16
14
12
10
8
0
0
5
10 15 20 25 30 35 40 45 50 55 60
Flow time (min)
∗ Per JISK3834
800
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RoHS-FGH.qxd
10.7.26 5:21 PM
Page 1
High Precision Filter for Liquids
Series FGH
RoHS
How to Order
FGH 100
03
J 002 T
High precision
filter for liquids
Element seal
Symbol Material
PTFE
T
Filtration accuracy
Body size
Symbol Element length
l117
100
l246
200
l496
300
Symbol Filtration accuracy Applicable for: Applicable body
2 µm
002
Filtration
4 µm
004
HEPO 2 FGH100 to 300
efficiency
6 µm
006
99%
13 µm
013
X20 0.2 µm Filtration
efficiency Membrane FGH200 to 300
X40 0.4 µm 99.9%
Applicable element
EJ701S
EJ801S, ED801S
EJ901S, ED901S
∗ The membrane element cannot be selected for
FGH100.
Element classification Note)
Port size
03
04
06
10
Rc3/8
Rc1/2
Rc3/4
Rc1
Symbol
J
D
Element
HEPO 2
Membrane
Note) Refer to pages 806 to 809 for
details about specifications,
models, dimensions, etc. regarding the elements.
Specifications
Model
FGH100
FGH200
FGH300
1(125)
1(250)
1(500)
Number of built-in elements
(element length) (mm)
Operating pressure
Operating temperature
MAX. 80°C (Not above the boiling point)
FGE
Each kind of fluid (See the table of applicable
fluids on pages 799 and 800)
Applicable fluid
Port size (Rc)
Material
FGD
MAX. 1 MPa
FGG
3/8, 1/2, 3/4, 1
FGA
Stainless steel 316 (Electrolytic polishing)
Housing
FGB
PTFE
Seals
Mass (kg)
2.6
3.2
4.3
Internal capacity (l)
1.0
1.8
3.3
FGC
FGF
Accessories for FGH 100-300 (Option)
FGH
Tool for tightening clamp rings
Description
Part number
Tightening tool
FTT410S
EJ
ED
FQ1
FN
EB첸
ES첸
801
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Series FGH
Flow Rate Characteristics of Built-in HEPO 2 Elements (Fluid: water, temperature: 20°C)
Series FGH100
FGH100-03 {Rc3/8}
Series FGH200
FGH200-03 {Rc3/8}
0.005
30
50
70
0.01
0.005
0.001
10
100
Flow rate (l/min)
50
70
50
70
30
50
Pressure drop (MPa)
0.005
30
50
70
Flow rate (l/min)
0.005
100
50
70
100
FGH300-10 {Rc1}
0.05
0.01
0.005
0.001
10
30
Flow rate (l/min)
0.05
0.01
100
0.01
0.001
10
70 100
FGH200-10 {Rc1}
0.05
70
0.05
Flow rate (l/min)
FGH100-10 {Rc1}
50
FGH300-06 {Rc3/4}
0.005
0.001
10
100
30
Flow rate (l/min)
Pressure drop (MPa)
Pressure drop (MPa)
Pressure drop (MPa)
0.005
30
0.005
0.001
10
70 100
0.01
Flow rate (l/min)
Pressure drop (MPa)
50
0.05
0.01
0.001
10
30
FGH200-06 {Rc3/4}
0.05
100
0.01
Flow rate (l/min)
FGH100-06 {Rc3/4}
70
0.05
0.005
Flow rate (l/min)
50
FGH300-04 {Rc1/2}
0.01
0.001
10
100
30
Flow rate (l/min)
Pressure drop (MPa)
Pressure drop (MPa)
Pressure drop (MPa)
0.005
30
0.005
0.001
10
70 100
0.05
0.01
0.001
10
50
FGH200-04 {Rc1/2}
0.05
013 (13 µm)
0.01
Flow rate (l/min)
FGH100-04 {Rc1/2}
0.001
10
30
Pressure drop (MPa)
0.001
10
006 (6 µm)
0.05
Pressure drop (MPa)
0.01
004 (4 µm)
Series FGH300
FGH300-03 {Rc3/8}
0.05
Pressure drop (MPa)
Pressure drop (MPa)
0.05
002 (2 µm)
30
50
70 100
Flow rate (l/min)
0.01
0.005
0.001
10
30
50
70
100
Flow rate (l/min)
802
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
High Precision Filter for Liquids
Series FGH
Flow Rate Characteristics of Built-in Membrane Elements (Fluid: water, temperature: 20°C)
Series FGH200
FGH200-04 {Rc1/2}
Pressure drop (MPa)
X20 (0.2 µm)
X40 (0.4 µm)
Pressure drop (MPa)
FGH200-03 {Rc3/8}
Flow rate (l/min)
FGH200-10 {Rc1}
Pressure drop (MPa)
Pressure drop (MPa)
FGH200-06 {Rc3/4}
Flow rate (l/min)
Flow rate (l/min)
Flow rate (l/min)
Series FGH300
FGH300-04 {Rc1/2}
FGD
Pressure drop (MPa)
X20 (0.2 µm)
X40 (0.4 µm)
Pressure drop (MPa)
FGH300-03 {Rc3/8}
FGE
FGG
FGA
FGB
Flow rate (l/min)
FGH300-06 {Rc3/4}
Flow rate (l/min)
FGC
FGH300-10 {Rc1}
FGH
Pressure drop (MPa)
Pressure drop (MPa)
FGF
EJ
ED
FQ1
FN
Flow rate (l/min)
EB첸
ES첸
Flow rate (l/min)
803
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Series FGH
Construction / Spare Parts and Seal List
Hexagon head bolt
w Seal
Cover
AIRVENT
q Gasket
Clamp ring
Name plate
Element
Case
e Seal
Plug
Spare Parts and Seal List
No.
Description
Part number
FGH100
FGH200
1
Gasket
AL-58S
2
Seal
AL-43S
3
Seal
AL-53S
FGH300
Note) Use each one of the above parts for each filter unit.
804
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
High Precision Filter for Liquids
Series FGH
Dimensions
2 x Rc
M6 x 1
2 x Rc
FGH300
M6 x 1
FGH100/200
FGD
FGE
FGG
FGB
Pull-out
dimension
Pull-out
dimension
FGA
FGC
FGF
FGH
Dimensions
EJ
Model
Element length
FGH100
ø70 x L117
FGH200
ø70 x L246
FGH300
ø70 x L496
Port size (Rc)
A
3/8, 1/2
235
3/4, 1
240
3/8, 1/2
364
3/4, 1
369
3/8, 1/2
615
3/4, 1
620
B
211
340
591
ED
FQ1
FN
EB첸
ES첸
805
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
RoHS-FGH.qxd
10.7.26 5:21 PM
Page 2
HEPO2Element for Series FGH
EJ
Series
RoHS
Specifications
EJ첸S-002
EJ첸S-004
EJ첸S-006
EJ첸S-013
2
4
6
13
117 mm
1890
2310
2090
2490
246 mm
4250
5200
4700
5600
496 mm
8500
10400
9400
11200
Model
Filtration area
(cm2)
Length
Filtration accuracy
(Filtration efficiency 99%)
Heat resistant temperature (°C)
80
Filter media
Material
Polyester
Reinforcement material
Polypropylene
Others
Polypropylene
Pressure resistance
0.5 MPa at 20°C, 0.125 MPa at 80°C
Note) See "How to Order" below for items represented by 첸.
How to Order Elements
EJ 701 S
002 T
Element seal
Element classification
EJ
T
HEPO 2
Element size symbol
701 For FGH100
801 For FGH200
901 For FGH300
PTFE
Filtration accuracy
(Filtration efficiency 99%)
002
004
006
013
2 µm
4 µm
6 µm
13 µm
806
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HEPO 2 Element for Series FGH
Series
EJ
Construction
EJ701S, 801S, 901S
Reinforcement material
Filter media
Dimensions
A
FGD
B
FGE
FGG
ø53
ø70
FGA
FGB
FGC
FGF
FGH
Element Dimensions
EJ
Model
A
B
Applicable container
EJ701S-첸T
EJ801S-첸T
EJ901S-첸T
157
117
FGH100
286
246
FGH200
536
496
FGH300
ED
FQ1
FN
EB
ES
807
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
RoHS-FGH.qxd
10.7.26 5:21 PM
Page 3
Membrane Element for Series FGH
ED
Series
RoHS
Specifications
ED첸S-X20
ED첸S-X40
Filtration accuracy
(Filtration efficiency 99.9%) Note 1)
0.2
0.4
247 mm
4,000
6,200
495 mm
8,000
Filtration area
(cm2)
Length
Model
12,400
Heat resistant temperature (°C)
80
Cellulose acetate & polyester
Polyether sulfone
Filter media
Material
Reinforcement material
Polypropylene
Polyester
Others
Polypropylene
Polypropylene
Pressure resistance
0.5 MPa at 20°C, 0.125 MPa at 80°C
Resistivity recovery Note 2)
Others
—
60 min at 10 l/min
100 l/4000
cm2
—
Pure water cleaning
Note 1) Filtration accuracy: tested with ultrapure water, flow rate at ∆P = 0.01 MPa.
Note 2) Resistivity recovery: time taken to recover to 18 MΩ·cm with ultrapure water.
Note 3) See “How to Order” below for items represented by 첸.
How to Order Elements
ED 801 S
X20 T
Element classification
Element seal
T
ED Membrane
Element size symbol
801 For FGH200
901 For FGH300
PTFE
Filtration accuracy
(Filtration efficiency 99.9%)
X20
X40
0.2 µm
0.4 µm
∗ Cannot be used for FGH100.
808
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Membrane Element for Series FGH Series
ED
Construction
0.2 µm
0.4 µm
ED첸S-X20
ED첸S-X40
Reinforcement
material
Reinforcement
material
Filter media
0.2 µm
Filter media
0.4 µm
Dimensions
FGD
FGE
FGG
FGA
FGB
FGC
FGF
FGH
Element Dimensions
EJ
Model
A
B
Applicable container
ED801S-X첸T
ED901S-X첸T
285
247
FGH200
533
495
FGH300
ED
FQ1
FN
EB
ES
809
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com