Role of Research Centers in Innovation

NSF Nanoscale Science and Engineering Center for High-rate
Nanomanufacturing (CHN)
Innovation and Industrial Collaboration in
NSECs and Nanomanufacturing
Ahmed Busnaina, W.L. Smith Professor and Director
Director: Ahmed Busnaina, NEU
Deputy Director: Joey Mead, UML, Associate Directors: Carol Barry, UML; Nick McGruer, NEU; Glen Miller,
UNH; Jacqueline Isaacs, NEU, Group Leader: David Tomanek, MSU
www.nano.neu.edu
Outline
 What is High-rate Nanomanufacturing?
 CHN Team and Research Thrusts
 Research Focus at the Center for High-rate
Nanomanufacturing NSEC
 Interaction and Collaboration with Industry
 Innovation and Ideation Workshops
 Applications
The CHN Team Strength and Capability
Semiconductor & MEMs fab
 7,000 ft2 class 10 and 100
cleanrooms
 6 inch completer wafer fab,
nanolithography capabilities
NEU: Directed assembly,
MEMS, fabrication,
nanoscale contamination
control
UML: High volume polymer processing
and assembly
UNH: Synthesis, self-assembly
A unique partnership
Plastics processing labs
 20,000 ft2 +
Fully-equipped synthetic labs
 10,000 ft2 +
 Compounding and forming equipment
Institution
Faculty
Post-docs
Graduate
Undergrad.
Total
NEU
14
3
19
14
50
UML
18
6
35
16
75
UNH
6
5
12
13
36
MSU
1
1
1
0
3
TOTAL
39
15
67
43
164
What is High-rate Nanomanufacturing?
Nanomanufacturing: Directed Assembly and Transfer
Process Flow for the CHN Testbeds: System-level Focus
Level 1
Level 2
Level 3
Spin-off
companies
Commercialize Technology
Electronics, Energy, Biotechnology,
Nanomaterials
Applications
Thrust 3
Reliability, Defects
Multi-scale
Modeling
Transfer
Nanoelements
to Substrate
Exposure
Monitoring
and Control
Environmental
& Economic
Uncertainties
Regulatory
& Ethical
Issues
Thrust 2
Synthesize and
Functionalize
Nanoelements
Process &
Quality
Control
High-rate Tox
Screening
Assemble
Nanoelements
at high-rate
Thrust 1
Thrust 4
Licensing and
partnerships
Fabricate
Templates
CHN Breakthrough; First Example of A
Persistent Nonacene
S
S
S
S
1
S
S
S
S
S
S
Kaur, I.; Jazdzyk, M.; Stein, N. N.; Prusevich, P.; Miller, G. P., “Design, Synthesis, and
Characterization of a Persistent Nonacene Derivative,” J. Amer. Chem. Soc., 2010,
132, 1261-1263.
Novel Nanoelements;
Nano-cups and Nano-rings with
Adjustable L/D Ratios
L/D ~ 1
10
Variable L/D Ratio
H. Chun, M. G. Hahm, Y. Homma, R. Meritz, K. Kuramochi, L. Menon,
L. Ci , P. M. Ajayan, and Y. J. Jung, ACS Nano , 2009.
Template Directed Assembly
High-rate (< 1 min.)
Nanoparticles
down to 10 nm
Pat. Pend.
Polymer
blends
Pat. Pend.
Carbon
nanotubes
Pat Pend.
down to
80 nm
lines
Xiong, X, Busnaina, A, et. Al., Appl. Phys. Lett. 2007.
Wei, M. Liang F., Lee, J. Somu, S., Xiong, X, , Barry, C., Busnaina, A., Mead, J, Advanced Materials, 2009.
Xiong, X, Jaberabsari, L, Hahm, M G, Busnaina, A, and Jung, Y, J, Small, 2007.
Makaram, P, Somu, S, Xiong, X, Busnaina, A, Jung,Y J, and McGruer, N, Appl. Phys. Lett., 2007.
Template Directed Assembly of SWNTs
• Assembly of CNTs over large areas on templates with different
surface energies
– Hydrophobic and hydrophilic regions assist fluidic assembly
Crossbar structure
Xiong, X, Jaberabsari, L, Hahm, M G, Busnaina, A, and Jung, Y, J, Small, 3(12) 2006 (2007)
Jaber-Ansari, L, Hahm, M G, Somu, S, Echegoyen Sanz, Y, Busnaina, A, and Jung, Y J, J. Am.
Chem. Soc., 131 (2), pp 804 (2009)
Jaberasani, L., Somu, S. Hahm, M G, Busnaina, A, and Jung, Y J, Appl. Phys. A., 5194 (2009)
Template Directed Fluidic Assembly
• Large scale assembly on polymer substrates
– Enables assembly of lines over large areas (i.e., centimeters)
SWNT
Parylene
100 µm
Patterned, aligned CNTs on a parylene,
polycarbonate or polystyrene wafers
Nanotechnology 2009
High-rate Multi-scale Directed Assembly of
Polymer Blends
• Chemically functionalized templates
assemble PS/PMMA polymer
blends into non-uniform geometries.
• Polymer domains were patterned
from 300 nm down to 100 nm on
the same template.
PS/PMMA (50/50 ratio)
Chiota et al., Small, 2009 Dec;5(24):2788-91
Wei, M. L. Fang, J. Lee, S. Somu, X. Xiong, C. Barry, A. Busnaina,
and J. Mead, Advanced Materials, 21(7), 735 (2009).
PMMA
(Light)
PS
(Dark)
High-rate Transfer (< 1 min)
Transfer of conductive polymer wires
Transfer of assembled nanoparticles
Assembled polymer
Langmuir, 2009
Transfer to polyurethane
Template is Reused
40 µm
Template after transfer
Transfer of assembled
SWNT Wires
Peeling Off
SWNT/Polymer Film
Polymer Spin Coating
J. of Macromolecular Rapid Comm, 2006
PMM
A
SWNT
s
CHN Industrial Partnerships
Interaction with Industry
Partnership with Industry is Key
Interaction with Industry
 IAB membership is open to companies without a fee, why?
 Membership grew from 20 in year 2 to 37 in year 5.
 Considerable industrial partnerships started in year 3
and funding significantly increased after Ideation
workshop run by the Center for Innovation Management
Systems (CIMS) at NC State.
Engagement Mechanisms
 Joint exploratory ideation workshops for individual or groups
of companies
 Industry day events
 International Nanomanufacturing Workshops
 COOP students at IAB companies
 IAB performs SWOT analysis for CHN
CHN Entrepreneurial Activities
 Entrepreneurship pilot program with business schools and
school of Technological Entrepreneurship to facilitate Spin-offs
at CHN
Interaction with Industry
Annual Industry Day
 First suggested by the Industrial Advisory Board
 Over 100 attendees from 45 companies
 Short presentations by
 CHN Director Ahmed Busnaina
 Industrial Advisory Board Chair, Dr. Brent Segal
 Poster session with more than 50 posters displaying
CHN research
Annual N.E. Nanomanufacturing Workshop
 Over 100 attendees from industry and
academia every year
 Over 30 speakers and panelists
 Industry, academia, government, and
others
 Many international speakers
Seven workshops held from 2003 – 2009
CHN Industrial Partnerships
Did it work?
Strong Industrial Partnerships
Over 30 Companies
Support for Application Drives Funding Increases
Companies Contributing Financially:
Amberwave, Draper Labs, EMC, Intel, Konarka Technologies, Kuraray, Lockheed
Martin, Nantero, Nypro, Raytheon, Textron Systems, Ticona, Triton Systems,
Velcro Group
CHN Commercialization Strategy
State Investment in CHN
• CHN has received a $2 million grant from the John Adams Innovation
Institute (MTC) to support technology development over 5 years
– Supports expansion of CHN’s commercialization activities
– Leverages and compliments NSF funding in fundamental research
Leverage
– Over the past 6 years, CHN has attracted $36.44 million in funding
(other federal, NSF, state, industry, etc.)
Spin-offs
– Innovacene, based on CHN technology, officially launched June,
2010
Business Development
• Business schools are evaluating markets and developing business plans
for CHN products
Innovation Path at CHN
How do we create
applications?
CHN Commercialization Strategy
 Ideation Workshop initially developed and supported and
promoted by NSF to support Commercialization
 Earlier CIMS “Ideation” Workshop conducted at NEU (2007)
proved successful
 Mass Tech Collaborative/John Adams Innovation Institute
Commercialization grant (2010 $2 million) awarded to
fund Ideation Workshops and subsequent Seed funding
CHN Ideation Workshop
 The CHN Ideation workshop joins CHN researchers (faculty, post-docs
and students) with industry to discuss CHN capabilities and explore its
applications, led by Professor Angus I. Kingon of Brown University
 Prospective companies are pre-qualified, and invited to attend
 Seed program enables emerging companies to collabortively work with
CHN on new applications on cost-share basis
 Helps to build the Application based research to support Center growth,
and long-term Center sustainability
22
Ideation Workshops in 2010
1. Three pre-workshops ; university technological capabilities
– Faculty Researchers, Post-Docs and selected grad students
2. Technology capabilities summary and “packaging” review
3. Two Ideation industry collaboration workshops
Bringing Industry and Researchers together 50 researchers
(50% from NSEC and 50% from industry)
4. Industry workshop follow-up – directed, specific activities
5. Identify specific projects for collaboration based on the
ideation workshop
CHN Industrial Partnerships
How did it work?
CHN Applications Roadmap
Acenes for
OLEDs and
Photovoltaics
Assembly of
CNTs and NPs
for Batteries
Flexible
SWNT NEMS
Electronics Switch for
Memory Devices
Nano multibiomarker
Biosensors
2-D Assembly
for Structural
App.
EMIshielding
SWNT & NP
Interconnects
Energy
Electronics
Materials
Bio/Med
Directed
Assembly and
Transfer
Nanoscale Science
NP based
Delivery
Chips
1
0
m
m
CHN Toolbox
Connects Research to Applications
Nanoelements
Assembly
Processes
Transfer
Processes
Microwires
template
Nanoparticles
Electrophoretic
2-D and 3-D
Nanowires
templates
Carbon
nanotubes
(SWNTs and
MWNTs)
Templates
Substrates
Applications
Direct transfer (no
functionalization)
Silicon
SWNT switch
for memory
devices
Chemical
Functionalization
Direct transfer with
chemical
functionalization
Polymer
Polymer-based
Biosensors
Conductive
polymers
(PANi)
Electrophoretic
and chemical
functionalization
No transfer
needed
Metal
Nanoparticlebased
Biosensors
Template-free
Polymer blends
Dielectrophoretic
2-D and 3-D
Damascene
Template
Fullerenes
Convective
Acenes
Convective
interfacial
SWNT Chem
Sensors
Graphene
Self assembly
EMI Shielding
Nanotrench
template
Reel-to-reel
transfer
Switchable
functionalization
SWNT
Batteries
Photovoltaics
Process Flow for SWNT Chemical Sensors
Templates
Nanoelements
Assembly
Processes
Transfer
Processes
Substrates
Applications
Silicon
SWNT switch
for memory
devices
Polymer
Polymer-based
Biosensors
Metal
Nanoparticlebased
Biosensors
Microwires
template
Nanoparticles
Electrophoretic
Direct transfer (no
functionalization)
Nanowires
templates
Carbon
nanotubes
(SWNTs and
MWNTs)
Chemical
Functionalization
Direct transfer
with chemical
functionalization
Nanotrench
template
Conductive
polymers
(PANi)
Electrophoretic
and chemical
functionalization
No transfer
needed
Template-free
Polymer blends
Dielectrophoretic
Reel-to-reel
transfer
SWNT
Batteries
Damascene
Templates
Fullerenes
Convective
Switchable
functionalization
Photovoltaics
Acenes
Convective
interfacial
SWNT Chem
Sensors
Graphene
Self assembly
EMI Shielding
Applications
SWNT Switch for
Memory Devices
 SWNT Battery
 Energy Harvesting
 SWNT Interconnects
Biosensor for Multiple
Biomarkers
SWNT Chemical Sensor
In vivo Nano Biosensor
Image of the in-vivo biosensor
(0.1 mm x 0.1 mm) after animal testing
10
mm
Incubated with human
plasma spiked with CEA
Detection limit: 15 pg/ml
Current technology detection
limit is 3000 pg/ml
Chemical Sensors
Optical images of the sensor
Fabrication procedure
for the sensor has been
established.
Sensors have been
fabricated and tested
in different
environments
20 µm
Source of noise has
been minimized to
obtain better
Signal to Noise ratio.
Top viewed SEM micrographs of the sensor
12/7/2010
12/7/2010
30
30
Applications Expansion
 CHN emerging applications led to increased
industrial sponsorship

SWNT sensors

CNT- battery

Photovoltaics

Nonvolatile memory

EMI shielding

Metamaterials

Biosensor

SWNT composites
CHN Spin-off Company: Innovacene
 Winner of State of NH’s “Green Launching Pad”
Competition
 Innovacene officially launched June, 2010
 Innovacene manufactures organic semiconductors for
thin-film electronic applications including OPVs and
OLEDs
 Flexible Nanomanufacturing spinout is in discussion
with angel investors
 SWNT Battery and Sensor spin out are under
discussion
CHN Responsible Manufacturing
Exposure Assessment
& Control
High-rate Toxicity
Screening
EHS
Assessment,
Screening &
EOL Impacts
End-of-Life Impacts
Enviro & Economic
Uncertainties
Environmental &
Economic Uncertainties
Regulatory Issues
Regulatory Issues
CHN researchers are helping Companies meet EPA new Nanoscale
Materials Stewardship Program TSCA requirements
33
Formation of CHN-NHC to Aid Industry
CHN Nanomaterials and Health Consortium (CHN-NHC)
•
•
•
•
•
•
Comprehensive exposure monitoring and assessment in facilities
Risk assessment
Advice/assistance in development, implementation, evaluation of controls
Best practices documentation and/or training in handling of nanomaterials
Targeted research projects governed by industry partners
Dedicated CHN-NHC web page
N
H
www.uml.edu/nano/nanoehs
C
Nanomaterials and
Health Consortium
Acknowledgement
National Science Foundation (NSEC NSF Grant No. 0425826)
W. M. Keck Foundation
Advanced Energy Consortium
Lockheed Martin
Department of Defense