Axiotron 2

Microelectronic Systems from Carl Zeiss
Using the control panel, you can conveniently choose
Upgrading the Axiotron 2 with the CSM vis-uv tube
one of five objectives. With their optimum contrast
allows observation in the real time confocal mode
and maximum resolution, the Zeiss Epiplan Neofluar
with visual or ultraviolet light (365 nm). A special
series are the truly first class. These outstanding
feature of this system is extreme extension of the
objectives can be combined with long-working-
depth of focus (EDOF) by combination with an optical
distance Epiplan objectives or the unsurpassed top
element called chromat C. Observation with UV-
of the line Epi-Planapochromats. All objectives use the
illumination (I-line) by using our excellent Epi-Ultrafluar
ICS principle (Infinity Color-corrected System).
UV objectives is possible not only in bright field, but
i
The 10x wide angle eyepieces, with a field of view
also in the confocal mode.
only reliable, easy to handle and ergonomically
designed, but which also offer diversity of
3.9
8.6, 3.0
13.7, 5.5, 5.5
5.7, 3.5, 3.5
2.1, 1.7, 1.7
0.54, 0.57, 0.57
0.32, 0.27, 0.27
configuration and outstanding performance. The
Zeiss Axiotron 2 gives you all of this, and much more.
270
Reliability, comfort and reduced
contamination
The base of Axiotron 2 is a sturdy metal stand with
556
high quality mechanical components for focus, stage
0.47
0.25
0.23
0.25
0.30
movement and turrets for objectives and contrasting
methods. The microscope is designed for fatigue free
operation. It is possible to adapt the height of the
binocular phototube to the requirements of different
12.6, 12.5
9.8, 8.0
6.9, 6.5
3.0
358
operators. The inclination of the tube can be varied
410
between 5° and 30°. The handling of the Axiotron 2
is facilitated by easy access to important functions
using keys on a panel. This keyboard can be positioned
as required on the desk.
260.2
Real Time Confocal UV
industry are great. Operators need tools that are not
126.2
The Axiotron 2 offers brilliant images at your fingertips.
EpiplanNeofluar
1.25x/0.035
H
2.5x/0.075
H, HD
5x/0.15
H, HD, HD DIC
10x/0.30
H, HD, HD DIC
20x/0.50
H, HD, HD DIC
50x/0.80
H, HD, HD DIC
100x/0.90
H, HD, HD DIC
EpiplanApochromat
50x/0.90
HD DIC
100x/0.95
HD DIC
120x/0.95 AF
H DIC
150x/0.95
H DIC
150x/1.25 W
H
Epiplan LD
10x/0.25
H DIC, HD DIC
20x/0.40
H, HD DIC
50x/0.50
H, HD DIC
100x/0.75
HD DIC
Objective "Epi-Ultrafluar"
120x/0.95 AF for 365 nm (UV)
(only for Axiotron 2 CSM uv-vis)
If the optional autofocus device is added, a fully
automatic, heavy duty inspection microscope results.
Than the electronic system sets the magnifications
and inspection methods automatically , as well as
505
780
H = Brightfield
HD = Brightfield and Darkfield
DIC = Differential Interference Contrast (DIC)
150
the programmed focusing of each. The laser diode
autofocus instantly compensates for any irregularities,
even if the distance from the objective is extremely
of up to 25 mm, are your guarantee of maximum
short and during rapid stage movements. Not only
resolution. An Optovar intermediate tube 1x -1.25x-
do you benefit from more operating convenience,
1.6x-2x allows the further magnification of small
but you get the best protection for your costly wafers
details.
as well.
The objectives are not only available for bright field
For further details, please contact:
and differential interference contrast (for checking
Worldwide headquarters:
surfaces and layers) are standard for the usual objective
Carl Zeiss
Microelectronic Systems GmbH
D-07740 Jena
Phone: +49-(0)3641/64-2563
Telefax: +49-(0)3641/64-2938
E-mail: [email protected]
types including long distance versions.
The excellent ICS objectives
from Carl Zeiss
Your local support center:
www.zeiss.de/semiconductor
We reserve the right of product and design changes and improvements.
Printed on environment-friendly paper,
bleached without the use of chlorine.
observation. Darkfield (to check for example impurities)
7
High Performance ...
The demands on microscopy in the semiconductor
Working Distance
in mm
232
164
Image in differential interference contrast (DIC)
Application
390
Recommended
Objectives
Brightfield image
Axiotron 2
Inspection Microscope
Axiotron 2
Technical Data
395
... and Optical Competence
41-009 e/03.02
The ergonomical binocular
phototube 25 with inclinable
eyepieces
Ease of use and reliability
for semiconductor microscopy
2
Microelectronic Systems from Carl Zeiss
Using the control panel, you can conveniently choose
Upgrading the Axiotron 2 with the CSM vis-uv tube
one of five objectives. With their optimum contrast
allows observation in the real time confocal mode
and maximum resolution, the Zeiss Epiplan Neofluar
with visual or ultraviolet light (365 nm). A special
series are the truly first class. These outstanding
feature of this system is extreme extension of the
objectives can be combined with long-working-
depth of focus (EDOF) by combination with an optical
distance Epiplan objectives or the unsurpassed top
element called chromat C. Observation with UV-
of the line Epi-Planapochromats. All objectives use the
illumination (I-line) by using our excellent Epi-Ultrafluar
ICS principle (Infinity Color-corrected System).
UV objectives is possible not only in bright field, but
i
The 10x wide angle eyepieces, with a field of view
also in the confocal mode.
only reliable, easy to handle and ergonomically
designed, but which also offer diversity of
3.9
8.6, 3.0
13.7, 5.5, 5.5
5.7, 3.5, 3.5
2.1, 1.7, 1.7
0.54, 0.57, 0.57
0.32, 0.27, 0.27
configuration and outstanding performance. The
Zeiss Axiotron 2 gives you all of this, and much more.
270
Reliability, comfort and reduced
contamination
The base of Axiotron 2 is a sturdy metal stand with
556
high quality mechanical components for focus, stage
0.47
0.25
0.23
0.25
0.30
movement and turrets for objectives and contrasting
methods. The microscope is designed for fatigue free
operation. It is possible to adapt the height of the
binocular phototube to the requirements of different
12.6, 12.5
9.8, 8.0
6.9, 6.5
3.0
358
operators. The inclination of the tube can be varied
410
between 5° and 30°. The handling of the Axiotron 2
is facilitated by easy access to important functions
using keys on a panel. This keyboard can be positioned
as required on the desk.
260.2
Real Time Confocal UV
industry are great. Operators need tools that are not
126.2
The Axiotron 2 offers brilliant images at your fingertips.
EpiplanNeofluar
1.25x/0.035
H
2.5x/0.075
H, HD
5x/0.15
H, HD, HD DIC
10x/0.30
H, HD, HD DIC
20x/0.50
H, HD, HD DIC
50x/0.80
H, HD, HD DIC
100x/0.90
H, HD, HD DIC
EpiplanApochromat
50x/0.90
HD DIC
100x/0.95
HD DIC
120x/0.95 AF
H DIC
150x/0.95
H DIC
150x/1.25 W
H
Epiplan LD
10x/0.25
H DIC, HD DIC
20x/0.40
H, HD DIC
50x/0.50
H, HD DIC
100x/0.75
HD DIC
Objective "Epi-Ultrafluar"
120x/0.95 AF for 365 nm (UV)
(only for Axiotron 2 CSM uv-vis)
If the optional autofocus device is added, a fully
automatic, heavy duty inspection microscope results.
Than the electronic system sets the magnifications
and inspection methods automatically , as well as
505
780
H = Brightfield
HD = Brightfield and Darkfield
DIC = Differential Interference Contrast (DIC)
150
the programmed focusing of each. The laser diode
autofocus instantly compensates for any irregularities,
even if the distance from the objective is extremely
of up to 25 mm, are your guarantee of maximum
short and during rapid stage movements. Not only
resolution. An Optovar intermediate tube 1x -1.25x-
do you benefit from more operating convenience,
1.6x-2x allows the further magnification of small
but you get the best protection for your costly wafers
details.
as well.
The objectives are not only available for bright field
For further details, please contact:
and differential interference contrast (for checking
Worldwide headquarters:
surfaces and layers) are standard for the usual objective
Carl Zeiss
Microelectronic Systems GmbH
D-07740 Jena
Phone: +49-(0)3641/64-2563
Telefax: +49-(0)3641/64-2938
E-mail: [email protected]
types including long distance versions.
The excellent ICS objectives
from Carl Zeiss
Your local support center:
www.zeiss.de/semiconductor
We reserve the right of product and design changes and improvements.
Printed on environment-friendly paper,
bleached without the use of chlorine.
observation. Darkfield (to check for example impurities)
7
High Performance ...
The demands on microscopy in the semiconductor
Working Distance
in mm
232
164
Image in differential interference contrast (DIC)
Application
390
Recommended
Objectives
Brightfield image
Axiotron 2
Inspection Microscope
Axiotron 2
Technical Data
395
... and Optical Competence
41-009 e/03.02
The ergonomical binocular
phototube 25 with inclinable
eyepieces
Ease of use and reliability
for semiconductor microscopy
2
Preprogrammed
Functions
Variable
Configurations
The Axiotron 2 is a high performance microscope that
Different applications of the Axiotron 2 require the
is simple to use because it has been programmed for
appropriate illumination. In addition to the normal
optimum image quality and easy switching between
halogen illumination, xenon lamps, mercury lamps
inspection methods. The Axiotron’s built-in intelligence
and mixed-gas illumination are available. Two
coordinates all image related functions — lamp
illumination sources can be attached at one time with
brightness, aperture diaphragm, analyzer, different
manual or motorized switching mirrors.
Halogen
illumination
reflectors for various contrasting techniques
(brightfield, darkfield, DIC and fluorescence), as well
The specimen movement can be performed either by
as an optional laser autofocus. It is based on an
manual stages with rotating wafer holders (4“-8“)
internal standardized CAN bus system which
or motorized scanning stages with vacuum chucks
guarantees that all microscope parameters are
for 6“ and 8“ wafers. Computer control of the
automatically optimized as soon as you select an
Axiotron 2 allows positioning with very high accuracy.
application method on the control panel. The same
If reticles are to be observed in transmitted light a
applies, of course, if you change the magnification.
special stage version includes 5”, 6” and 7” mask
Illuminator
Hg 100 for
fluorescence
observation
holders.
Handling, inspection and review
The control of the microscope can also be performed
Image evaluation
by an external computer system and RS 232
For attachment of different video cameras the
connection. This mode is used when the Axiotron 2
appropriate special c-mount adapters are available.
is combined with a wafer loader or if it is integrated
The electronic images can be printed out for
into complex inspection/review systems such as our
documentation or stored in a computer.
Special light
guide for the
attachment
of illumination
unit XBO 180 W
remote by
Axiotron 2
Axiospect or Axiosprint. These systems combine the
functionality of the Axiotron 2 with wafer handling
and precise positioning.
A special Axiospeed spectroscopic measurement
system can be attached, to allow the analysis of
Axiotron 2 as the
inspection tool of the
Axiosprint system
surface and layer reflectance and in particular the
thickness measurement of thin films in the range 10 nm
up to 50µm.
Attachment of
Axiospeed diode
array spectrometer
4
6
CCD video camera
connected to Axiotron 2
Preprogrammed
Functions
Variable
Configurations
The Axiotron 2 is a high performance microscope that
Different applications of the Axiotron 2 require the
is simple to use because it has been programmed for
appropriate illumination. In addition to the normal
optimum image quality and easy switching between
halogen illumination, xenon lamps, mercury lamps
inspection methods. The Axiotron’s built-in intelligence
and mixed-gas illumination are available. Two
coordinates all image related functions — lamp
illumination sources can be attached at one time with
brightness, aperture diaphragm, analyzer, different
manual or motorized switching mirrors.
Halogen
illumination
reflectors for various contrasting techniques
(brightfield, darkfield, DIC and fluorescence), as well
The specimen movement can be performed either by
as an optional laser autofocus. It is based on an
manual stages with rotating wafer holders (4“-8“)
internal standardized CAN bus system which
or motorized scanning stages with vacuum chucks
guarantees that all microscope parameters are
for 6“ and 8“ wafers. Computer control of the
automatically optimized as soon as you select an
Axiotron 2 allows positioning with very high accuracy.
application method on the control panel. The same
If reticles are to be observed in transmitted light a
applies, of course, if you change the magnification.
special stage version includes 5”, 6” and 7” mask
Illuminator
Hg 100 for
fluorescence
observation
holders.
Handling, inspection and review
The control of the microscope can also be performed
Image evaluation
by an external computer system and RS 232
For attachment of different video cameras the
connection. This mode is used when the Axiotron 2
appropriate special c-mount adapters are available.
is combined with a wafer loader or if it is integrated
The electronic images can be printed out for
into complex inspection/review systems such as our
documentation or stored in a computer.
Special light
guide for the
attachment
of illumination
unit XBO 180 W
remote by
Axiotron 2
Axiospect or Axiosprint. These systems combine the
functionality of the Axiotron 2 with wafer handling
and precise positioning.
A special Axiospeed spectroscopic measurement
system can be attached, to allow the analysis of
Axiotron 2 as the
inspection tool of the
Axiosprint system
surface and layer reflectance and in particular the
thickness measurement of thin films in the range 10 nm
up to 50µm.
Attachment of
Axiospeed diode
array spectrometer
4
6
CCD video camera
connected to Axiotron 2
Preprogrammed
Functions
Variable
Configurations
The Axiotron 2 is a high performance microscope that
Different applications of the Axiotron 2 require the
is simple to use because it has been programmed for
appropriate illumination. In addition to the normal
optimum image quality and easy switching between
halogen illumination, xenon lamps, mercury lamps
inspection methods. The Axiotron’s built-in intelligence
and mixed-gas illumination are available. Two
coordinates all image related functions — lamp
illumination sources can be attached at one time with
brightness, aperture diaphragm, analyzer, different
manual or motorized switching mirrors.
Halogen
illumination
reflectors for various contrasting techniques
(brightfield, darkfield, DIC and fluorescence), as well
The specimen movement can be performed either by
as an optional laser autofocus. It is based on an
manual stages with rotating wafer holders (4“-8“)
internal standardized CAN bus system which
or motorized scanning stages with vacuum chucks
guarantees that all microscope parameters are
for 6“ and 8“ wafers. Computer control of the
automatically optimized as soon as you select an
Axiotron 2 allows positioning with very high accuracy.
application method on the control panel. The same
If reticles are to be observed in transmitted light a
applies, of course, if you change the magnification.
special stage version includes 5”, 6” and 7” mask
Illuminator
Hg 100 for
fluorescence
observation
holders.
Handling, inspection and review
The control of the microscope can also be performed
Image evaluation
by an external computer system and RS 232
For attachment of different video cameras the
connection. This mode is used when the Axiotron 2
appropriate special c-mount adapters are available.
is combined with a wafer loader or if it is integrated
The electronic images can be printed out for
into complex inspection/review systems such as our
documentation or stored in a computer.
Special light
guide for the
attachment
of illumination
unit XBO 180 W
remote by
Axiotron 2
Axiospect or Axiosprint. These systems combine the
functionality of the Axiotron 2 with wafer handling
and precise positioning.
A special Axiospeed spectroscopic measurement
system can be attached, to allow the analysis of
Axiotron 2 as the
inspection tool of the
Axiosprint system
surface and layer reflectance and in particular the
thickness measurement of thin films in the range 10 nm
up to 50µm.
Attachment of
Axiospeed diode
array spectrometer
4
6
CCD video camera
connected to Axiotron 2
Preprogrammed
Functions
Variable
Configurations
The Axiotron 2 is a high performance microscope that
Different applications of the Axiotron 2 require the
is simple to use because it has been programmed for
appropriate illumination. In addition to the normal
optimum image quality and easy switching between
halogen illumination, xenon lamps, mercury lamps
inspection methods. The Axiotron’s built-in intelligence
and mixed-gas illumination are available. Two
coordinates all image related functions — lamp
illumination sources can be attached at one time with
brightness, aperture diaphragm, analyzer, different
manual or motorized switching mirrors.
Halogen
illumination
reflectors for various contrasting techniques
(brightfield, darkfield, DIC and fluorescence), as well
The specimen movement can be performed either by
as an optional laser autofocus. It is based on an
manual stages with rotating wafer holders (4“-8“)
internal standardized CAN bus system which
or motorized scanning stages with vacuum chucks
guarantees that all microscope parameters are
for 6“ and 8“ wafers. Computer control of the
automatically optimized as soon as you select an
Axiotron 2 allows positioning with very high accuracy.
application method on the control panel. The same
If reticles are to be observed in transmitted light a
applies, of course, if you change the magnification.
special stage version includes 5”, 6” and 7” mask
Illuminator
Hg 100 for
fluorescence
observation
holders.
Handling, inspection and review
The control of the microscope can also be performed
Image evaluation
by an external computer system and RS 232
For attachment of different video cameras the
connection. This mode is used when the Axiotron 2
appropriate special c-mount adapters are available.
is combined with a wafer loader or if it is integrated
The electronic images can be printed out for
into complex inspection/review systems such as our
documentation or stored in a computer.
Special light
guide for the
attachment
of illumination
unit XBO 180 W
remote by
Axiotron 2
Axiospect or Axiosprint. These systems combine the
functionality of the Axiotron 2 with wafer handling
and precise positioning.
A special Axiospeed spectroscopic measurement
system can be attached, to allow the analysis of
Axiotron 2 as the
inspection tool of the
Axiosprint system
surface and layer reflectance and in particular the
thickness measurement of thin films in the range 10 nm
up to 50µm.
Attachment of
Axiospeed diode
array spectrometer
4
6
CCD video camera
connected to Axiotron 2
Microelectronic Systems from Carl Zeiss
Using the control panel, you can conveniently choose
Upgrading the Axiotron 2 with the CSM vis-uv tube
one of five objectives. With their optimum contrast
allows observation in the real time confocal mode
and maximum resolution, the Zeiss Epiplan Neofluar
with visual or ultraviolet light (365 nm). A special
series are the truly first class. These outstanding
feature of this system is extreme extension of the
objectives can be combined with long-working-
depth of focus (EDOF) by combination with an optical
distance Epiplan objectives or the unsurpassed top
element called chromat C. Observation with UV-
of the line Epi-Planapochromats. All objectives use the
illumination (I-line) by using our excellent Epi-Ultrafluar
ICS principle (Infinity Color-corrected System).
UV objectives is possible not only in bright field, but
i
The 10x wide angle eyepieces, with a field of view
also in the confocal mode.
only reliable, easy to handle and ergonomically
designed, but which also offer diversity of
3.9
8.6, 3.0
13.7, 5.5, 5.5
5.7, 3.5, 3.5
2.1, 1.7, 1.7
0.54, 0.57, 0.57
0.32, 0.27, 0.27
configuration and outstanding performance. The
Zeiss Axiotron 2 gives you all of this, and much more.
270
Reliability, comfort and reduced
contamination
The base of Axiotron 2 is a sturdy metal stand with
556
high quality mechanical components for focus, stage
0.47
0.25
0.23
0.25
0.30
movement and turrets for objectives and contrasting
methods. The microscope is designed for fatigue free
operation. It is possible to adapt the height of the
binocular phototube to the requirements of different
12.6, 12.5
9.8, 8.0
6.9, 6.5
3.0
358
operators. The inclination of the tube can be varied
410
between 5° and 30°. The handling of the Axiotron 2
is facilitated by easy access to important functions
using keys on a panel. This keyboard can be positioned
as required on the desk.
260.2
Real Time Confocal UV
industry are great. Operators need tools that are not
126.2
The Axiotron 2 offers brilliant images at your fingertips.
EpiplanNeofluar
1.25x/0.035
H
2.5x/0.075
H, HD
5x/0.15
H, HD, HD DIC
10x/0.30
H, HD, HD DIC
20x/0.50
H, HD, HD DIC
50x/0.80
H, HD, HD DIC
100x/0.90
H, HD, HD DIC
EpiplanApochromat
50x/0.90
HD DIC
100x/0.95
HD DIC
120x/0.95 AF
H DIC
150x/0.95
H DIC
150x/1.25 W
H
Epiplan LD
10x/0.25
H DIC, HD DIC
20x/0.40
H, HD DIC
50x/0.50
H, HD DIC
100x/0.75
HD DIC
Objective "Epi-Ultrafluar"
120x/0.95 AF for 365 nm (UV)
(only for Axiotron 2 CSM uv-vis)
If the optional autofocus device is added, a fully
automatic, heavy duty inspection microscope results.
Than the electronic system sets the magnifications
and inspection methods automatically , as well as
505
780
H = Brightfield
HD = Brightfield and Darkfield
DIC = Differential Interference Contrast (DIC)
150
the programmed focusing of each. The laser diode
autofocus instantly compensates for any irregularities,
even if the distance from the objective is extremely
of up to 25 mm, are your guarantee of maximum
short and during rapid stage movements. Not only
resolution. An Optovar intermediate tube 1x -1.25x-
do you benefit from more operating convenience,
1.6x-2x allows the further magnification of small
but you get the best protection for your costly wafers
details.
as well.
The objectives are not only available for bright field
For further details, please contact:
and differential interference contrast (for checking
Worldwide headquarters:
surfaces and layers) are standard for the usual objective
Carl Zeiss
Microelectronic Systems GmbH
D-07740 Jena
Phone: +49-(0)3641/64-2563
Telefax: +49-(0)3641/64-2938
E-mail: [email protected]
types including long distance versions.
The excellent ICS objectives
from Carl Zeiss
Your local support center:
www.zeiss.de/semiconductor
We reserve the right of product and design changes and improvements.
Printed on environment-friendly paper,
bleached without the use of chlorine.
observation. Darkfield (to check for example impurities)
7
High Performance ...
The demands on microscopy in the semiconductor
Working Distance
in mm
232
164
Image in differential interference contrast (DIC)
Application
390
Recommended
Objectives
Brightfield image
Axiotron 2
Inspection Microscope
Axiotron 2
Technical Data
395
... and Optical Competence
41-009 e/03.02
The ergonomical binocular
phototube 25 with inclinable
eyepieces
Ease of use and reliability
for semiconductor microscopy
2
Microelectronic Systems from Carl Zeiss
Using the control panel, you can conveniently choose
Upgrading the Axiotron 2 with the CSM vis-uv tube
one of five objectives. With their optimum contrast
allows observation in the real time confocal mode
and maximum resolution, the Zeiss Epiplan Neofluar
with visual or ultraviolet light (365 nm). A special
series are the truly first class. These outstanding
feature of this system is extreme extension of the
objectives can be combined with long-working-
depth of focus (EDOF) by combination with an optical
distance Epiplan objectives or the unsurpassed top
element called chromat C. Observation with UV-
of the line Epi-Planapochromats. All objectives use the
illumination (I-line) by using our excellent Epi-Ultrafluar
ICS principle (Infinity Color-corrected System).
UV objectives is possible not only in bright field, but
i
The 10x wide angle eyepieces, with a field of view
also in the confocal mode.
only reliable, easy to handle and ergonomically
designed, but which also offer diversity of
3.9
8.6, 3.0
13.7, 5.5, 5.5
5.7, 3.5, 3.5
2.1, 1.7, 1.7
0.54, 0.57, 0.57
0.32, 0.27, 0.27
configuration and outstanding performance. The
Zeiss Axiotron 2 gives you all of this, and much more.
270
Reliability, comfort and reduced
contamination
The base of Axiotron 2 is a sturdy metal stand with
556
high quality mechanical components for focus, stage
0.47
0.25
0.23
0.25
0.30
movement and turrets for objectives and contrasting
methods. The microscope is designed for fatigue free
operation. It is possible to adapt the height of the
binocular phototube to the requirements of different
12.6, 12.5
9.8, 8.0
6.9, 6.5
3.0
358
operators. The inclination of the tube can be varied
410
between 5° and 30°. The handling of the Axiotron 2
is facilitated by easy access to important functions
using keys on a panel. This keyboard can be positioned
as required on the desk.
260.2
Real Time Confocal UV
industry are great. Operators need tools that are not
126.2
The Axiotron 2 offers brilliant images at your fingertips.
EpiplanNeofluar
1.25x/0.035
H
2.5x/0.075
H, HD
5x/0.15
H, HD, HD DIC
10x/0.30
H, HD, HD DIC
20x/0.50
H, HD, HD DIC
50x/0.80
H, HD, HD DIC
100x/0.90
H, HD, HD DIC
EpiplanApochromat
50x/0.90
HD DIC
100x/0.95
HD DIC
120x/0.95 AF
H DIC
150x/0.95
H DIC
150x/1.25 W
H
Epiplan LD
10x/0.25
H DIC, HD DIC
20x/0.40
H, HD DIC
50x/0.50
H, HD DIC
100x/0.75
HD DIC
Objective "Epi-Ultrafluar"
120x/0.95 AF for 365 nm (UV)
(only for Axiotron 2 CSM uv-vis)
If the optional autofocus device is added, a fully
automatic, heavy duty inspection microscope results.
Than the electronic system sets the magnifications
and inspection methods automatically , as well as
505
780
H = Brightfield
HD = Brightfield and Darkfield
DIC = Differential Interference Contrast (DIC)
150
the programmed focusing of each. The laser diode
autofocus instantly compensates for any irregularities,
even if the distance from the objective is extremely
of up to 25 mm, are your guarantee of maximum
short and during rapid stage movements. Not only
resolution. An Optovar intermediate tube 1x -1.25x-
do you benefit from more operating convenience,
1.6x-2x allows the further magnification of small
but you get the best protection for your costly wafers
details.
as well.
The objectives are not only available for bright field
For further details, please contact:
and differential interference contrast (for checking
Worldwide headquarters:
surfaces and layers) are standard for the usual objective
Carl Zeiss
Microelectronic Systems GmbH
D-07740 Jena
Phone: +49-(0)3641/64-2563
Telefax: +49-(0)3641/64-2938
E-mail: [email protected]
types including long distance versions.
The excellent ICS objectives
from Carl Zeiss
Your local support center:
www.zeiss.de/semiconductor
We reserve the right of product and design changes and improvements.
Printed on environment-friendly paper,
bleached without the use of chlorine.
observation. Darkfield (to check for example impurities)
7
High Performance ...
The demands on microscopy in the semiconductor
Working Distance
in mm
232
164
Image in differential interference contrast (DIC)
Application
390
Recommended
Objectives
Brightfield image
Axiotron 2
Inspection Microscope
Axiotron 2
Technical Data
395
... and Optical Competence
41-009 e/03.02
The ergonomical binocular
phototube 25 with inclinable
eyepieces
Ease of use and reliability
for semiconductor microscopy
2