2013 version_NB3 - ASM Assembly Systems
Transcription
2013 version_NB3 - ASM Assembly Systems
SEMICONDUCTOR EQUIPMENT http://www.asmpacific.com ASM Semiconductor Equipment Products Index Process Materials Handling Process Model AD9312 AD9212 AD8312FC 8” Wafer Handling 12” Wafer Handling AD838FC Display Equipment Flip Chip 12” Wafer Handling AD8312 / AD8312R ISLinDA Epoxy DA 8” Wafer Handling AD838 / AD838P AD838R Die Attach Equipment AD838L / AD838LM Flex on Glass (FOG) COG900 / COG902 / COG930 FOG900 / FOG902 / FOG930 Panel Lamination Touch Panel Bonding GEMINI Series Reflow Oven Snap Curing Oven Process IS898GA TWIN833 AD830 Plus / AD830R Plus AD210 AD880 Series Eutectic DA AD830U / AD830UR 8” Wafer Handling AD211 Plus / AD212 AD220 Other DA Epoxy DA Misc AD881 Series 6” Wafer Handling AD100 Series AD819-PD / AD819-LD CIS Equipment DI-Wafer Cleaning System ISCM868 Camera Module Auto Focusing & Electrical-Test Process eClip IS868LA3 Lens Holder Alignment Ultrasonic Wedge Wire Bond SR902 Series PC139 Series COE139 Series Materials Handling Au Ball Bond Heavy Aluminum Wire Fine Aluminum Wire Model TwinEagle Xtreme GoCu Harrier Xtreme GoCu iHawk Xtreme GoCu Eagle Xtreme GoCu Eagle Xpress GoCu iHawk Xpress Opto iHawk Xtreme Harrier Xtreme Xpress-LB iHawk-V AL501 TwinPhonon AB589 Series SD890A Lens Holder Attach Waterless Base Cleaning System Thermosonic Wire Bond Model AB530 CMOS Camera Module AOI / FOL Equipment PD & LD Eutectic DA Strip Form Substrate Strip / Reel Form Substrate SD832D Soft Solder DA Solder Paste DA / Clip Attach Materials Handling Au / Cu / CuPd Ball Bond Wire Bondiing Equipment 6” Wafer Handling TWIN830UR 1 Curing Oven TWIN832 Model STN, CSTN, TFT and other types of Glass Panel Chip on Glass (COG) Process MCM12 Materials Handling Advanced Optical Inspection (AOI) 4” Wafer Handling Strip Form Substrate Chip Probing 6” Wafer Handling Die Sorting Map Sorting ISCM139B IS600G2 IS300-AF Materials Handling Wafer Form Model ES101 VIM300 CP100 AS899 MS100 Plus MS109 ASM Semiconductor Equipment Products Index Process Materials Handling Glob-top Glob-top, Dam & Fill DS86 Strip Form Substrate DS830 DS530H Potting DS520V Glob-top DS830LB Materials Handling Transfer Molding Strip Form Substrate OSPREY 12” Wafer WLP300 Compression Molding Transfer Molding Process Strip Form Substrate Singulation, Trim & Form System Process Test & Finish Handling System Turret Based Test Handler IDEALcompress™ IDEALmold™ Materials Handling Model All kinds of IC and Power Device Matrix Leadframes LS1000 Ball Placement CSBGA / PBGA, flex BGA & etc. BP2000 Tape Sorting CSBGA, MLP, QFN, SiP & etc. CS900 Lead Frame Cutting Reel Form Substrate LFC130 Series Process Materials Handling Model Laser Mark Handler SIPLACE SX-Series SMT Placement SMD Components Bonding SIPLACE X-Series SIPLACE Di-Series SIPLACE CA IDEALab™ Materials Handling Saw and Pick & Place Mechanical Press Trim / Form Model SMT Placement Equipment Molding Equipment Process Process Other Equipment Dispensing Equipment Dispensing + Testing + Compensating Model Model iSAP Strip Form Substrate MPHENIX MP-TAB Materials Handling Discrete Package Model FT2026 FT2018 Mini-Discrete FT-Mini Package Process LED Testing, Sorting & Taping System Panel Testing Testing & Sorting Taping Testing & Sorting Taping Materials Handling MCPCB, Ceramic SMD Type LED HP LED Model PT86 SLS230 Series SLT400 Plus IP360 Series AT410 2 AD9312 12” Thermocompression Flip Chip System HIGH PRECISION 3 TC BONDING PROCESS AD9212 12” Dual Head Flip Chip System HIGH PRECISION Features Features Individually controlled dual bond head with shared Providing dual flip chip head bonding process up/down-look inspection Equipping with pre-dispensing station for TC NCP process (option) Suitable for 2.5D / 3D IC packaging Advanced PR inspection system for high precision Applications Applications Singulated BGA Singulated BGA BGA BGA Ceramic panel Ceramic panel Singulated substrate on carrier Singulated substrate on carrier Lead frame Lead frame And more…… And more…… *Remark: All performance is package dependent bonding Thin dice handling capability FLIP CHIP SOLUTIONS AD8312FC 12” High Speed Flip Chip System HIGH SPEED HD LF THIN DIE HANDLING AD838FC 8” High Speed Flip Chip System HIGH SPEED FLUX DISPENSING Features Features Supporting both flip chip and direct die bonding Supporting both flip chip and direct die bonding processes Up to 100 mm substrate width handling Flux dipping and dual flux dispensing capability ASM in-house developed Archerfish dispensing system In-lining with oven for solder reflow Optional for thin die handling processes Dual flux dispensing capability ASM in-house developed Archerfish dispensing system In-lining with oven for reflow process Machine cascade for multi-die handling Applications Applications QFN / DFN QFN / DFN SOIC SOIC SO SO And more…… And more…… *Remark: All performance is package dependent 4 AD8312 12” Epoxy Die Attach System (For Strip Form Substrate Handling) AD8312R 12” Epoxy Die Attach System (For Reel Form Substrate Handling) HIGH SPEED HD LF for AD8312 12” Thin Die Attach System THIN DIE HANDLING CLASS 100 STANDARD HD LF Features Features World’s first 12” dual dispensing die bonding series High density lead frame (100 x 300 mm²) handling AD8312: High density lead frame (100 x 300 mm²) World’s first 12” dual dispensing die bonding series handling and universal workholder design for various packages AD8312R: strategic designs for handling backside plated substrates In-lining with curing oven (option) Individual pick and bond system Applications Applications Thin die handling capability with patented design Panel bonding capability Mini-BGA PLCC Mini-BGA PLCC Flex BGA MEMS Flex BGA Image sensor CSPBGA PDIP CSPBGA And more…… MLP/QFN Smartcard (AD8312R) MLP/QFN QFP And more…… QFP TQFP 5 ISLinDA *Remark: All performance is package dependent TQFP 12” EPOXY DA SOLUTIONS MCM12 12” Multi-Chip System X-LARGE SUBSTRATE HD LF Features Working range up to 330 x 210 mm² Up to 14 types of picking tools handling capability Up to 5 types of ejecting kits installation SMD bonding capability Direct die attach / flip chip bonding capability Supporting auxiliary dispensing system Applications BGA Wafer submount MLP/QFN Metal can And more…… *Remark: All performance is package dependent 6 AD838 8” Epoxy Die Attach System TWIN832 8” Dual Epoxy Die Attach System DUAL WAFERS AD838P AD838R (for High Precision Placement) (for Reel Form Substrate) 8” Epoxy Die Attach System HIGH SPEED HD LF HD LF for AD838 8” Epoxy Die Attach System HIGH SPEED HD LF Features Features Features Highest throughput per footprint AD838: up to 100 mm substrate width High density reel form substrate up to Single machine for dual dice packages AD838P: high precision placement High density lead frame (100 x 300 mm²) Patented bond head design Patented bond head design Dual dispensing system Dual dispensing system Providing graphical SPC data with latest Providing graphical SPC data with IQC handling Patented bond head and dispensing system IQC system 100 mm width system In-lining with curing oven or pressing system (option) Applications Applications SOT QFN / DFN SOT Smartcard TQFP And more HD TQFP And more HD RFID package PLCC 7 Applications QFN / DFN lead frames…… PLCC TSSOP TSSOP TSOP TSOP SOIC SOIC *Remark: All performance is package dependent lead frames…… Any reel form substrate 8” EPOXY DA SOLUTIONS AD838L 8” Epoxy Die Attach System (for Direct Substrate Indexing) AD838LM 8” Epoxy Die Attach System (for Vibration Boat Inputting) DIRECT CERAMIC HANDLING VIBRATION BOAT FEEDER INPUT IS898GA 8” Epoxy Glass Attach System CLASS 100 STANDARD UV SNAP CURE Features Features Direct ceramic substrate indexing Various cleaning modules during glass attach process Anvil block with clamp force self-compensation design Dual glue writing capability Panel bonding capability with intelligent global Suitable for strip form substrate or boat carrier substrate alignment Dual stamping/ dispensing process AD838LM with input vibration boat feeding system Supporting glass presentation on mylar / waffle pack Applications Applications Ceramic BT MCPCB CLCC MLP/QFN PLCC QFP Singulated lens holder TQFP And more…… UV snap curing system (option) *Remark: All performance is package dependent 8 AD830 Plus 6” Epoxy Die Attach System TWIN833 6” Dual Epoxy Die Attach System DUAL WAFERS HD LF AD830R Plus 6” Epoxy Die Attach System (for Reel Form Substrate) HIGH SPEED HD LF OPTICS ARRAY Features Features Single machine for dual-die packages Patented bond head design High density lead frame (100 x 300 mm²) handling High density lead frame (100 x 300 mm²) handling Highest throughput with smallest footprint Optics array system enhancing bonding cycle time Patented bond head design True color camera with white LED lighting for handling 8” wafer handling (option) various materials AD830R Plus with reel form substrate handling 8” wafer handling (option) Applications Applications SMD LED SMD LED Pre-molded lead frame Chip LED EMC lead frame Top LED High Power LED EMC lead frame And more HD lead frames…… Side view LED And more…… 9 *Remark: All performance is package dependent 6” EPOXY DA SOLUTIONS AD210 6” Epoxy Die Attach System X-LARGE SUBSTRATE UV SNAP CURE Features Achieving ±5 µm @ 3 sigma XY placement AD880 Series Epoxy Die Attach System X-LARGE SUBSTRATE Features Up to 8” x 8” substrate handling Up to 8” x 8” bonding area DDR rotary bond arm system Individual control of pick and bond process Dual loading system for automatic materials handling, Patented bond head design substrate & wafer loading (option) UV snap curing system (option) Applications Applications Silicon wafer submount Silicon wafer submount Large PCB substrate PCB High precision photonics device Ceramic And more…… And more…… *Remark: All performance is package dependent 10 AD830U Eutectic Die Attach System TWIN830UR AD830UR (for Reel Form Substrate) (for Reel Form Substrate) Dual Eutectic Die Attach System HIGH SPEED DUAL WAFERS Eutectic Die Attach System HIGH SPEED Features Features Single machine for dual dice packages Independent temperature control in each heating zone Highest throughput per footprint Patented bond head design Patented bond head design Forming gas supply during process Forming gas supply during process Dispensing system for flux eutectic (option) In-lining with lead frame cutting system and automatic AD830UR: in-lining with lead frame cutting system and wire bonding system automatic wire bonding system Applications Applications SOD SOD SOIC SOIC SOT SOT And more…… And more…… 11 *Remark: All performance is package dependent EUTECTIC DA SOLUTIONS AD211 Plus / AD212 AD220 Direct Eutectic Die Attach System HEATED COLLET B/H PANEL FORM SUBSTRATE Direct Eutectic Die Attach System X-LARGE SUBSTRATE HEATED COLLET B/H STRIP FORM SUBSTRATE Features Features Direct ceramic substrate handling Patented process and designs Patented process and modules design Individual control pick and bond system Individual control pick and bond system Up to 300 mm long lead frame handling Graphical SPC data with IQC system Graphical SPC data with IQC system Anti-thermal shock design for eutectic process Providing 8 (heating zones) + 3 (cooling zones) Forming gas supply during process eutectic bonding environment AD212: up to 8” x 8” substrate handling Forming gas supply during process Applications Applications Ceramic based high power LED Strip form high power LED Silicon based high power LED Premold lead frame *Remark: All performance is package dependent 12 SD832D SD890A Soft Solder Die Attach System PATENTED DESIGN HD LF Soft Solder Die Attach System LEADING THROUGHPUT XY B/H SHUTTLING eClip Clip Bonding System ALL-IN-ONE SOLUTION PATENTED DESIGN Features Features Features Industry’s leading throughput Matrix lead frame handling with XY All-in-one bonding solution from die Up to 100 x 300 mm² HD lead frame handling Patented bond head system Patented solder writing technology AB dice handling with rotary collet bond arm design Oxygen level control with forming gas supply shuttling bond head system Motorized solder wire feeding and spanking system AB dice handling with rotary collet bond arm design Automatic die theta alignment Oxygen level control with forming gas supply bonding, clip bonding to reflow process Patented bond head design Supporting dual dispensing system Array clip bonding capability Supporting independent temperature controlling regions for reflow process Optional configurations with 12” wafer handling Flip chip bonding Multi-die bonding Applications Applications Applications High power device High power device High power discrete package TO-220 TO-220 DPAK matrix SOT SOT Power SO DPAK DPAK And more…… DPAK matrix DPAK matrix PowerSO PowerSO And more HD high power lead frame…… And more high power lead frame…… 13 *Remark: All performance is package dependent OTHER DA SOLUTIONS AD819-PD Photo Diode Epoxy Die Attach System AD881 Series Flexible Epoxy Die Attach System MULTI WAFER NON-STOP OPERATION AD100 Series Vertical LED Epoxy Die Attach System PATENTED DESIGN AD819-LD Laser Diode Eutectic Die Attach System PRECISION PLACEMENT METAL CAN HANDLING Features Features Features DDR rotary bond arm system Dual stacks loading system Carrier free design for materials handling AD881 with 8” x 5” dual workholders Dual clamps indexing algorithm AD819-PD with “Two-in-One stamp and system AD881H with automatic substrate load/ unload system AD881M with up to 3 wafers handling AD881MH with up to 3 wafers handling and automatic substrate loading / unloading system Pre-bond and post-bond inspections simultaneously Providing different algorithms for die alignments AD100MM with automatic input magazine system AD819-LD with “Moving Temperature Applications Applications Applications Top LED Vertical lead frame Metal can handling bond system” Control Profile” for eutectic process AD819-LD with submount and top dice handling Chip LED PCB Bent lead frame And move...... *Remark: All performance is package dependent 14 IS868LA3 ISCM868 Lens Holder Attach System CLASS 10 STANDARD QUAD-EPOXY WRITING DI-Water Cleaning System PRECISION PLACEMENT CLASS 100 STANDARD ISCM139B Waterless Base Cleaning System DI-WATER SPRAY Features Features Features World’s first quad dispensing system for Spraying of DI-water cleaning with dual In-lining cleaning system with CIS bonding process Strategic module design for FM control ULPA filter implementation Multiple rotary clean bath High resolution up-look and bond optics air atomizing nozzles Programmable motion of swing spray arm and spinner table High speed centrifugal drying In-line capability with ASM’s AOI system and lens holder bonding system programmable air blowing Achieving factory automation by fully automatic materials handling ISCM868 + VIM300 + IS868LA3 Applications Applications Applications CLCC CLCC CLCC PLCC PLCC PLCC BGA BGA BGA PCB PCB PCB Singulated unit And more...... And more strip form substrate for And more...... 15 *Remark: All performance is package dependent cleaning process…… IMAGE SENSOR SOLUTIONS IS600G2 Active Alignment Lens Holder Attach System CLEAN 10 STANDARD NON-STOP OPERATION IS300-AF Camera Module Auto Focusing & Electrical-Test System DUAL SETS OF TEST STATIONS Features Features Class 10 cleanliness Supporting both FPC type and non-FPC type of CMOS Active alignment of camera module camera module Leading throughput among same type of bonders Providing open/short test and current test Equipping with four dispensing and active alignment Dual test charts for auto-focusing (AF) station with (AA) stations Utilization of relay lens for smaller machine footprint In-line capability with multiple IS600G2 for mass production (option) built-in backlight illumination In-line capability with dispensing and UV pre-curing station (option) Applications Applications CLCC CLCC PLCC PLCC BGA BGA PCB PCB And more…… And more singulated image sensor packages…… *Remark: All performance is package dependent 16 DISPLAY SOLUTIONS COG900 / COG902 / COG930 Chip on Glass (COG) Bonding System FOG900 / FOG902 / FOG930 Flex on Glass (FOG) Bonding System QUAD-EPOXY WRITING FLEX on FILM (FoF) SOLUTION GEMINI Series Panel Lamination System NAKED EYE 3D SOLUTION PATENTED DESIGN Features Features Features True colour LED inspection True colour LED inspection Supporting pre-defined computer aid Supporting belt input/output system and Supporting belt input/output system and tray handling system COG930: up to 13.4” glass handling COG902 for high speed bonding for mobile phone application COG900 for all round COG application In-line capability with glass edge cleaning system and FOG system tray handling system FOG930: up to 13.4” glass handling FOG902 for high speed bonding for mobile phone application FOG900 for all round FOG application In-line capability with COG system dispensing patterns Up to 310 x 190 mm glass handling Gemini-RTA provides real time alignment for precision control UV line scan cure system covers full area pre-curing after lamination Applications Applications Applications STN STN Touch panel bonding CSTN CSTN Naked eye 3D application TFT TFT And more types of glass and LSI for And more types of glass and LSI for COG bonding…… 17 *Remark: All performance is package dependent FOG bonding…… CURING SOLUTIONS SR902 Series Reflow Oven CONVECTION + RADIATION HEATING PC139 Series Snap Curing Oven COE139 Series Snap Curing Oven REEL FORM SUBSTRATE HANDLING Features Features Features Independent temperature controlling Independent temperature controlling zones Sophisticated oxygen level control PC139R-5Z: up to 5 temperature Independent temperature controlling zones Combination of convection and radiation heating modes SR902L with automatic off-loading system SR902W for manual loading wafer substrate for reflow In-line capability with AD9212 (option) controlling zones and reel form substrate handling PC139R-10Z: up to 10 temperature controlling zones and reel form substrate handling In-line capability with AD838R, AD8312R, etc. (option) zones COE139: strip form substrate handling COE139R: reel form substrate handling In-line capability with AD830 Plus, and other die attach system (option) Applications Applications Applications Reflowing process for high lead (> 85% Smartcard SOT SOT Top LED And more strip / reel form substrates...... And more strip / reel form substrates...... Pb) solder, lead free solder, flux reflow, etc.. *Remark: All performance is package dependent 18 TwinEagle Xtreme GoCu Harrier Xtreme GoCu Dual Heads Gold Wire Bonder PATENTED TECHNOLOGY HIGH RESOLUTION iHawk Xtreme GoCu Dual Heads Wire Bonder AWRS LOW LOOP ~ 35 µm Cu WIRE BONDING Ultra High Throughput Discrete / Opto Wire Bonder AWRS HIGHER UPH OPTICS PR SYSTEM AWRS Features Features Features Auto Wire Rethreading System (AWRS) Auto Wire Rethreading System (AWRS) Auto Wire Rethreading System (AWRS) Fine pitch capability: 30 µm BPP Up to 20% higher UPH compared to Simple package conversion with fully Bond placement: 2 µm @ 3 sigma Harrier User-friendly, intelligent Windows-based interface Cu wire bonding & Cu BSOB Smart Skip – for skipping missing die Extensive field knowledge & reliability proven solutions for 2 N wires, ultra low-k, 45 nm technology dies motorized material handling system Robust indexer to handle high density discrete package Bonding Capabilities Bonding Capabilities Bonding Capabilities Bonding method: thermosonic Bonding method: thermosonic Bonding method: thermosonic Cu wire size: 0.6 mil ~ 2.0 mils Cu wire size: 0.6 mil ~ 2.0 mils Cu wire size: 0.6 mil ~ 2.0 mils Wire length: max. 8 mm Wire length: max. 8 mm Wire length: max. 8 mm Bonding speed: 20 wires/sec for 2 mm Bonding speed: 20 wires/sec for 2 mm Bonding speed: 20 wires/sec for 2 mm Lead locator detection: 5 ms / lead Lead locator detection: 5 ms / lead Lead locator detection: 5 ms / lead 19 *Remark: All performance is package dependent Eagle Xtreme GoCu Eagle Xpress GoCu Model Based Wire Bonder AUTO PR AUTO LOOPING Wider Substrates Wire Bonder AWRS FASTER THAN Au AWRS Features Features Auto Wire Rethreading System (AWRS) Auto Wire Rethreading System (AWRS) Bonding area: 56 x 70 mm @ LF < 80 mm Bonding area: 56 x 90 mm @ LF 100 x 300 mm Placement accuracy: 2.0 µm @ 3 sigma Placement accuracy: 2.0 µm @ 3 sigma Eagle Xtreme is upgradable Revolutionary auto PRS Loop definition Bonding Capabilities Bonding Capabilities Bonding method: thermosonic Bonding method: thermosonic Cu wire size: 0.6 mil ~ 2.0 mils Cu wire size: 0.6 mil ~ 2.0mils Wire length: max. 8 mm Wire length: max. 8 mm Bonding speed: 20 wires/sec for 2 mm Bonding speed: 20 wires/sec for 2 mm Lead locator detection: 5 ms / lead Lead locator detection: 5 ms / lead *Remark: All performance is package dependent 20 iHawk Xpress Opto iHawk Xtreme Wire Bonder CERAMIC WIDER SUBSTRATES Harrier Xtreme Wire Bonder AWRS Dual Heads Wire Bonder AWRS Features Features Auto Wire Rethreading System (AWRS) Auto Wire Rethreading System (AWRS) Wider bonding area – 56 mm x 90 mm Easy conversion from Au to non-Au wire handling (substrate width < 102 mm) Capable of handling 4” x 4” ceramic substrate Optional non-Au wire bonding upgrade kits (GoCAP) and vice versa Optional non-Au wire bonding upgrade kits (GoCAP) Bonding Capabilities Bonding Capabilities Bonding method: thermosonic Bonding method: thermosonic Copper wire bonding: option with Cu Wire Bonding: option with conversion kit conversion kit Wire length: max. 8 mm Bonding speed: 20 wires/sec for 2 mm Lead locator detection: 5 ms / lead Wire length: max. 8 mm 21 *Remark: All performance is package dependent Bonding speed: 20 wires/sec for 2 mm Lead locator detection: 5 ms / lead LED OPTO SOLUTIONS Xpress - LB iHawk-V Long Bar Lighting Application Wire Bonder 720 mm LONG LEAD FRAME HIGH PERFORMANCE Wire Bonder AWRS Features Features Auto Wire Rethreading System (AWRS) High speed wire bonding capability Up to 720 mm long magazine application Pro-longing MTBA with latest input / output magazine Up to 100 mm width lead frame handling COB programming feature handling Extended workholder - support up to 2 strips in waiting Easy loop control Optional non-Au wire bonding upgrade kits (GoCAP) Bonding Capabilities Applications Bonding method: thermosonic Vertical lead frame Cu wire size: 0.7 ~ 2.0 mils Wire length: max. 8 mm Bonding speed: 20 wires/sec for 2 mm Lead locator detection: 5 ms / lead *Remark: All performance is package dependent 22 AL501 Heavy Aluminum Wire Bonding System DUAL BOND HEAD PATENTED DESIGN TwinPhonon Dual Head Fine Aluminum Wire Bonding System DUAL ROTARY TABLE PATENTED DESIGN Features Features 5 – 20 mil aluminum wire handling PATENTED dual workchucks design Hybrid wire bonding capability with dual bond Achieving “non-stop" operation heads system Implementing linear motor and DDR system “Smart BQM” system supervising bonding quality Wire pull testing system integration (option) Linear motor with DDR driven rotary worktable Applications Applications TO-220 Toy DPAK matrix Game And more power discrete packages…… Melody And more other COB packages…… 23 *Remark: All performance is package dependent ALUMINUM WIRE BONDING SOLUTIONS AB589 Series Rotary Head Fine Aluminum Wire Bonding System LARGE WORKTABLE ROTARY BOND HEAD AB530 Rotary Table Fine Aluminum Wire Bonding System HIGH SPEED HIGH LEAD COUNT APP. Features Features Fine pitch capability for advanced packages Fine pitch capability for advanced packages High precision rotary bond head design Widely implementing linear and DDR motor system Patented “PR on the Fly” capability Multi-unit / multi-PCB bonding capabilities Standard 8” x 6” large effective bonding area Supporting various bonding requirements for different Supporting universal carrier design for full range products application (option) Deep access bonding capability (option) Automatic material handling capability (option) Applications Applications Chip-on-board (COB) Chip-on-board (COB) Multi-die Multi-die/multi-PCB LED display High lead count bonding Chip-on-flex (COF) And more…… Chip-on-glass (COG) Ceramic And more…… *Remark: All performance is package dependent 24 INSPECTION SOLUTIONS ES101 VIM300 CP100 Features Features Features True colour AOI capability True colour AOI capability Probing area up to 6” diameter Direct foton ring handling 2D / 3D inspection Supporting 2” ISP and PD handling Dual wafers loading system Dual substrates loading system Supporting ESD testing Prolonging MTBA with up to 72 ring on Individual control dual main stations Built-in ASM in-house developed testing Automatic AOI System (Wafer Level Inspection) frame handling Automatic AOI System (DIE / WIRE Inspection) Supporting X-Y motion Automatic Chip Probing System system Defect identification system with laser marking for rejected units Applications Applications Applications Automatic advanced optical inspection Die bonded and wire bonded substrate Blue LED wafer system for die, e.g. LED die…… 25 *Remark: All performance is package dependent on either substrate / lead frame…… Green LED wafer DIE / MAP SORTING SOLUTIONS AS899 Die Sorting System CONVECTION + RADIATION HEATING MS100 Plus Map Sorting System 200 O/P BIN 80 x 80 MM BINNING AREA MS109 Map Sorting System (for 8.8” Picking Area) 8.8” PICKING AREA 100 x 100 MM BINNING AREA Features Features Features Parallel pick, test and sort process with Dual bond arms design Dual bond arms design Up to 200 output bin frames Up to 8.8” picking area Up to 80 x 80 mm binning area Up to 100 x 100 mm binning area Supporting post-sort inspection Up to 200 output bin frames handling rotary turret design Supporting various types of detectors and testers integration Flexible bin block arrangement Supporting XYZ prober motions Simple “click & fit” bin block design” Supporting post-sort inspection Applications Applications Applications Individual LED dice testing and sorting Sorting die, e.g. blue LED, white LED, Sorting die, e.g. blue LED, white LED, solution laser diode, etc. based on wafer map information laser diode, etc. based on wafer map information *Remark: All performance is package dependent 26 DS86 Automatic Dispensing System (With Compensation) 3 – IN – 1 DISPENSING WHITE LED APPLICATION DS830 Automatic Dispensing System 8 DISPENSING HEADS CONTROL Features Features Dispensing + testing + compensating in one pass Up to 8 dispensing heads handling capability Enhancing production yield Automatic encapsulant compensation by inspection Automatic materials handling system Equipping with integrated sphere for light collection, optional up to 8” integrated sphere handling feedback Implementing ASM in-house developed Archerfish dispensing control system Applications Applications MCPCB Photo-coupler LED lighting module Lead frame based substrate And more LED applications…… And more…… 27 *Remark: All performance is package dependent DISPENSING SOLUTIONS DS530H DS520V DS830LB (for Horizontal Substrate Applications) (for Vertical LED Applications) (for Light Bar Applications) Automatic Dispensing System 4 – PUMP DISPENSING PHOSPHOR APPLICATION Automatic Dispensing System NON-STOP OPERATION VERTICAL LED Automatic Dispensing System 650 MM EXTRA LONG Features Features Features Dual workholders with dual elevators Engineered for vertical LED application Tailor-made for LED light bar handling Automatic materials handling system Automatic materials handling system Up to 18 magazines at once Up to 650 mm length of substrate handling system Supporting “Left-in, Left-out; Right-in, Right-out” operation Quad-pump dispensing implementation Phosphor handling capability Supporting various dispensing technologies Supporting “Left-in, Left-out; Right-in, Right-out” operation Dual pumps implementation (option) Applications Applications Applications SMD LED Vertical LED LED light bar Ceramic MCPCB And more LED applications…… *Remark: All performance is package dependent 28 OSPREY Small Lot Molding System SMALLEST SIZE MOLDING WLP300 12” Wafer Level Molding System 12” WAFER LEVEL MOLDING Features Features World smallest footprint automatic molding machine World’s first 12” automated WLP compression Built-in PGS™ molding capability encapsulation system Minimum tooling cost and shortest lead time Flexible to handle wafer size ranging from 4” to 12” Ideal for small lot, high product mix production Equipped with encapsulant weight compensation Optional for liquid epoxy, clear silicone and granular powder handling Applications Applications BGA Wafer level packaging QFN Wafer level LED SOT Cu bump pillar WLP PDIP PoP 29 *Remark: All performance is package dependent MOLDING SOLUTIONS IDEALcompress™ IDEALmold™ (Strip Form Substrate Handling) (Strip / Reel Form Substrate Handling) Automatic Molding System Automatic Molding System FLEXIBLE DISPENSING CONFIGURATION IDEALab™ Manual Molding System PGS™ MOLDING Features Features Features Ideal for ECO friendly manufacturing Suitable for standalone or in-line Manual molding system derived from Various dispensing configuration, including, liquid epoxy, clear silicone, granular powder dispensing configuration Flexible press configuration of 1 to 4 presses Input and output pattern recognition features Vacuum and wedge molding capability High pre-heat temperature capability Pinnacle Gating System (PGS™) molding capability (option) IDEALmold™ Mold chase compability with IDEALmold™ Process parameter portability to IDEALmold™ Suitable for R&D Applications Applications Applications Up to 150 x 300 mm substrate Mini-BGA Taped / Tapeless QFN Flex BGA Mini-BGA QFN Flex BGA PLCC SOT TSSOP Punch type micro QFN molding PoP *Remark: All performance is package dependent 30 SINGULATION, TRIM & FORM SOLUTIONS iSAP Integrated Saw and Pick & Place System SMART BLADE HEIG HT CHECK PATENTED DESIGN MPHENIX Automatic Trim & Form System HD IDF LF MP-TAB Series Automatic Trim & Form System AUTO TUBE LOADER Features Features Features Single chuck table with dual chuck tables 100 x 300 mm high density lead frame Cost effective discrete package speed Robust chuck table design for warpage handling & high saw speed Eagle View vision to overcome vision stoppage during alignment Blade height check on each substrate without affecting cycle time handling High tonnage application Vision inspection for orientation and uncut dam bar Applications Applications Applications BGA QFP SOT CSBGA TQFP SOD QFN SOIC (IDF) QFN Micro SD QFN DFN and more...... and more...... and more...... 31 *Remark: All performance is package dependent singulation platform Suitable for ultra high density lead frames Modular construction for various integration TEST HANDLING SOLUTIONS FT2026 Turret-Based Test & Finish Handler 16 TEST SITES FT2018 Turret-Based Test & Finish Handler iCONTACT HIGH SPEED WITH ARC FT-Mini Turret-Based Test & Finish Handler HIGH ACCURACY AUTO UNIT REPLACEMENT Features Features Features 26 pick heads for multiple process steps 18 pick heads for multiple process steps 18 pick heads for multiple process steps Selectable for various onloading / iContact for double unit detection & good High accuracy for mini package offloading system Supporting various vision inspection technologies testing yield Vacuum stopper to prevent chipping Best fit for small size IC/discrete packages Auto reel changer (ARC) (option) Vacuum stopper to prevent chipping Applications Applications Applications SOIC SC70 SOD923 TSSOP SOT23 / 25 / 26 SOT113 QFN / MLP SOD123 DFN1006 and more...... QFN (1 – 5 mm) DFN0603 SOIC / MSOP and more...... Best fit for mini-discrete packages and more...... *Remark: All performance is package dependent 32 PT86 SLS230 Series Features Features Testing packaged LED for both optical & electrical Wide range of application SLS230: chip LED SLS230S: sideview LED SLS230T Plus: top LED Automatic Panel Testing System properties Back-side probing capability Co-operating with dual workholders and dual materials handling system Simple conversion with universal workholder design Built-in ASM in-house developed testing system Integrated sphere for light collection, up to 8” ISP (option) Automatic LED (SMD) Sorting System Anti-bin mixing design with digital labeling design Compatible to integrate with various types of detectors and testers Supporting 256 output bins Applications Applications MCPCB SLS230: chip LED, e.g. 0402, 0603, 0605, 0805, Ceramic LED substrate 1206, etc. SLS230S: sideview LED, e.g. 008, 010, 020, 215, 335, etc. SLS230T Plus: top LED, e.g. 3528, 5050, 5252, 5450, 5630, 6045, 7020, 7474, etc. 33 *Remark: All performance is package dependent TEST, SORT & TAPE SOLUTIONS IP360 Series SLT400 Plus AT410 Features Features Features One-stop solution from test, sort and Applicable to wide range of top LED, Applicable for ceramic or silicon sawn Automatic LED Sorting System output with good traceability Materials handling Input system: wafer frame / bowl feeding system Output system: tape-and-reel output, bin frames and / or bins Wafer barcode scanning, unit map, label printing and output file generation package for good traceability of devices (option) Automatic LED (SMD) Taping System sideview LED and chip LED High throughput PPH: 45,000 + Built-in ASM in-house developed checking system For checking Vf, Ir & POL and optical parameters Advanced in-pocket inspection system Automatic repick package to ensure good package in pocket Supporting automatic reel change capability (option) Automatic LED Taping System package All in one solution for inspection, checking & taping High throughput 8,000+ PPH* Up to 8” picking area Advanced inspection capability Package surface inspection Up-look inspection In-pocket inspection Automatic repick package to ensure good package in pocket Applications Applications Applications Ceramic based molded LED Chip LED Ceramic based molded LED Silicon based molded LED Top LED Silicon based molded LED Molded LED with lens Sideview LED Molded LED with lens And more…… *Remark: All performance is package dependent 34 LS1000 BP2000 Features Features Laser handling for mold body mark or 2D mark High flexibility in material handling (e.g. strip, JEDEC Laser Mark Handler Experience with various third party laser gun integration In-line capability with trim/form system or standalone system Ball Placement System tray, carrier..) Fully modular design/construction Fine pitch capability: Ø0.2 mm/0.4 mm Applications Applications All kinds of IC and power device lead CSBGA / PBGA frames Flex BGA And more…… 35 *Remark: All performance is package dependent OTHER SOLUTIONS CS900 LFC130 Series Features Features Pick and Place (PnP) from wafer ring to tube/tray LFC130: standalone cutting system offload 100% 4S-inspection + mark inspection without UPH deduction LFC130NU-P / LFC130NU-S: in-line capability with Applications Applications CSBGA Precision cutting reel form lead frame High Speed Tape Sorting System MLP Lead Frame Cutter System other ASM die bonding systems, e.g. AD830UR, Twin830UR, etc. High throughput: up to 6 cutting cycles per minute Reliable cutting system with excellent accuracy and burr control into strip form QFN SiP And more…… *Remark: All performance is package dependent 36 SIPLACE SX-Series SIPLACE X-Series Features Features High flexibility – a revolutionary placement solution that New generation of the high speed SIPLACE X-Series sets New Dimension of Flexibility and Maximum Speed scales flexibility across the entire line Capacity on demand – machine’s performance adjusted to the orders thanks to replaceable gantries and intelligent placement heads Equipping with the SIPLACE MultiStar head – a wide range of components can be handled State-of-the art software – fast and easy to use SIPLACE station software The Ultimate High-end SMT Solution for High Volume Production new industry record Excellent price-performance and floorspace-performance ratio Features like SIPLACE Smart Pin Support, barcode reading and gantry exchange add more flexibility to the line Low dpm rate with set-up verification and sophfisticated sensors Facts and Figures Facts and Figures Placement performance: up to 60,000 cph (benchmark) Placement performance: up to 120,000 cph (benchmark) Placement heads SIPLACE SpeedStar SIPLACE MultiStar SIPLACE TwinStar Placement heads SIPLACE SpeedStar SIPLACE MultiStar SIPLACE TwinStar Component spectrum: 01005 – 200 mm x 110 mm Component spectrum: 01005 – 200 mm x 125 mm 37 *Remark: All performance is package dependent PLACEMENT SOLUTIONS SIPLACE Di-Series SIPLACE CA Features Features An extremely powerful placement machine with With the groundbreaking SIPLACE solution, the parallel maximal four gantries The high-speed SIPLACE Di-Series combines proven technology with high-tech innovations, thus guarantees fast return on investment With the digital SIPLACE Vision System even 01005 components can be placed with the highest accuracy Flexible SIPLACE Software with advanced functions placement of bare dies and SMD components in single pass mode during the same process, was made possible The SIPLACE CA with integrated wafer feeder, can place bare dies directly from wafers via the “die attach” or “flip chip” processes. In addition, the SMT placement process is supported and can be implement on demand Dual conveyor system allows simultaneously assembly of two various products in asynchronous mode Facts and Figures Facts and Figures Placement performance: up to 66,000 cph (benchmark) Placement performance: Flip Chip: 9,000 per SWS Die Attach: 6,000 per SWS SMD: 20.250 per head High-Tech Innovations at an Attractive Price-performance Ratio Placement heads SIPLACE 12-Nozzle Collect&Place SIPLACE 6-Nozzle Collect&Place SIPLACE Pick&Place Component spectrum: 01005 – 200 mm x 125 mm Direct placement of dies along with the SMD components SIPLACE Wafer System Horizontal system Automatic wafer exchange Wafer size: 4” – 12” *Remark: All performance is package dependent 38 China 中國 ASM Microelectronics Technical Services (Shanghai) Co Ltd 2/F, No. 55 Zu Chong Zhi Road Lot 1505 Shanghai Zhangjiang Hi-Tech Park Shanghai 201203, China Tel : 86-21-5080 5465 Fax : 86-21-5080 5467 ASM Microelectronics Technical Services (Shanghai) Co Ltd Room 704~706, Da An Building B No. 41 You Yi Road, He Xi District Tianjin 300211, China Tel : 86-22-5881 3008 Fax : 86-22-5881 3009 ASM Microelectronics Technical Services (Shanghai) Co Ltd Room D348, Chengdu Hi-Tech Zone Innovation Service Centre Chengdu 611731, China Tel : 86-28-8784 6551 Fax : 86-28-8784 6562 ASM Microelectronics Technical Services (Shanghai) Co Ltd Room B, 31/F, Bi Li Da Building No. 22 Lv Ling Road Xiamen 361009, China Tel : 86-592-550 9125 Fax : 86-592-550 9121 ASM Microelectronics Technical Services (Shanghai) Co Ltd Room 05-03/06, Block A No. 5 Xing Han Street Suzhou Industrial Park Suzhou 215021, China Tel : 86-512-6762 6278 Fax : 86-512-6762 6378 ASM Microelectronics Technical Services (Shanghai) Co Ltd Room 7-11, 4th Floor, Block A Tai'an Square, Dongshen Road Zhang Mu Tou Town Dongguan 523620, China Tel : 86-769-8712 5600 Fax : 86-769-8712 5601 ASM Microelectronics Technical Services (Shanghai) Co Ltd East Wing, 4/F, Block 2 CATIC (Zhonghang) Shahe Industrial Zone Qiao Xiang Road, Nanshan District Shenzhen 518053, China Tel : 86-755-8830 8533 Fax : 86-755-8344 6245 ASM Microelectronics Technical Services (Shanghai) Co Ltd Room 1402-4 Jiangxin Guoji Jiayuan Yinzuo No. 85 Jiefangxi Road, Qingyunpu District Nanchang 330002, China Tel : 86-791-8820 1517 Fax : 86-791-8820 7178 Hong Kong 香港 Japan 日本 Korea 韓國 ASM Pacific (Hong Kong) Ltd 4/F Watson Centre, 16-22 Kung Yip Street Kwai Chung, Hong Kong Tel : 852-2619 2000 Fax : 852-2619 2118/9 ASM Assembly Technology Co Ltd 5F, Tachikawa F-Bldg, 1-7-18 Nishiki-Cho, Tachikawa-Shi Tokyo 190-0022, Japan Tel : 81-42-521 7751 Fax : 81-42-521 7750 ASM Pacific (Hong Kong) Limited Korea Branch 4F, 628-6, Deungchon-dong Kangseo-gu, Seoul 157-030, Korea Tel : 82-2-2659 4174 Fax : 82-2-2659 4216 ASM Pacific (Hong Kong) Limited Korea Branch Room 501, 5/F, Hi-Tech Center 958-14 Daechon-Dong, Buk-Gu Gwangju 500-470, Korea Tel : 82-62-973 4174 Fax : 82-62-973 4216 ASM Pacific (Holding) Limited Taiwan Branch 10F, No. 530, Sec. 2, Chung Shan Road Chung Ho Dist, New Taipei City, Taiwan Tel : 886-2-2227 3388 Fax : 886-2-2227 3399 ASM Pacific (Holding) Limited Taiwan Branch 1F, No. 7, Lane 91, Dongmei Road Hsinchu, Taiwan Tel : 886-3-573 3750 Fax : 886-3-573 3551 ASM Pacific (Holding) Limited Taiwan Branch 8F-1, No. 135, Sec 2 Chung Shan Road, Tantzu Taichung, Taiwan Tel : 886-4-2535 6390 Fax : 886-4-2535 6820 ASM Assembly Equipment Malaysia Sdn Bhd 24A, Jalan Medan Ipoh 1B Medan Ipoh Bistarli 31400 Ipoh Perak, Malaysia Tel : 605-542 3991 Fax : 605-542 3992 ASM Assembly Equipment Malaysia Sdn Bhd B-1-12, Jalan SS6/20, Dataran Glomac Pusat Bandar Kelana Jaya 47301 Petaling Jaya, Malaysia Tel : 603-7806 4942 Fax : 603-7806 4943 ASM Assembly Equipment Malaysia Sdn Bhd 1, Tingkat Satu, Jalan Warisan 1 Taman Warisan Jalan Junid 84000, Muar, Johor, Malaysia Tel : 606-951 5713 Fax : 606-951 5786 Taiwan 台灣 ASM Pacific (Holding) Limited Taiwan Branch No. 4-2, East 3 Road Street N.E.P.Z. Kaohsiung, Taiwan Tel : 886-7-367 6300 Fax : 886-7-367 6399 Malaysia 馬來西亞 ASM Assembly Equipment Malaysia Sdn Bhd Bayan Point, Block A, No. 15-1-23, 15-1-24 Medan Kampung Relau 11900 Penang, Malaysia Tel : 604-644 9490 Fax : 604-645 1294 Philippines 菲律賓 Singapore 新加坡 Thailand 泰國 Germany 德國 Edgeward Development Limited Philippines Branch 7th Floor, NOL Tower, Commerce Avenue Madrigal Business Park Barangay Ayala Alabang Muntinlupa City, Philippines 1770 Tel : 63-2-850 4543 Fax : 63-2-850 4547 ASM Technology Singapore Pte Ltd ASM Assembly Equipment Bangkok Ltd ASM Assembly Systems GMBH & Co. KG ASMPT Europe 51/3, Vibhavadi Tower, 18/2 Floor Ngamwongwan Road, Ladyao, Chathuchak, Bangkok 10900 Thailand Tel : 66-2-941 3181/2 Fax : 66-2-941 3183 Rupert-Mayer-Street 44 81379 Munich Germany Tel : 49-89-20800-20900 Fax : 49-89-20800-41868 Email : [email protected] 2 Yishun Avenue 7 Singapore 768924 Tel : 65-6752 6311 Fax : 65-6758 2287 U.S.A. 美國 ASM Pacific Assembly Products Inc. 3440 East University Drive, Phoenix Arizona 85034-7200 U.S.A. Tel : 1-602-437 4760 Fax : 1-602-437 4630 ASM Pacific Assembly Products Inc. (Western Regional Office) 97 East Brokaw Road, Suite 100 San Jose, California 95112-4209 U.S.A. Tel : 1-408-451 0800 Fax : 1-408-451 0808 http://www.asmpacific.com NB3
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