led packaging - ASM Assembly Systems
Transcription
led packaging - ASM Assembly Systems
TOTAL SOLUTIONS FOR LED PACKAGING Total Solutions For Light Emitting Diode (LED) Packaging Die Level Scribing, Inspection, Sorting LS100 ES100 MS100 Plus AS899 Epoxy Die Attach Eutectic Die Attach AD830 / AD830R AD211 / AD212 AD838L AD220 AD880 AD819-LD AD881 Series AD100 AD819-PD Curing Oven COE139 / R SR902W Gold / Copper Ball Wire Bonding Aluminium Wedge Wire Bonding Harrier Xtreme AB559A Series iHawk Xtreme AB530 Eagle60X2L Cheetah Gold Stud Bumping Hummingbird iHawk-V iHawk-02 Eagle60AP-LD Silicon Liquid Molding Encapsulation / Phosphors Application IDEALcompress™ DS500 Series IDEALab™ - WLP DS520 Series Package Sorting / Taping SLS230 / S TLB203 SLS230T Plus TLC203 SLT400 IP360 Series 1 Testers Die Level Scribing, Inspection, Sorting Die Level Scribing, Inspection, Sorting Laser Scribing System Automatic AOI System LS100 ES100 Map Sorter Die Sorter MS100 Plus AS899 Applications: Scribing die, e.g. LED, laser diode, etc. High speed laser scribing driven by latest actuating system User-friendly interface Flexible to implement with various laser with different wavelengths for different substrates Applications: Sorting die, e.g. blue LED, white LED, laser diode, etc. according to wafer map information High speed sorting driven by • Dual heads sorting system • Direct drive rotary (DDR) motor and linear motor system User-friendly interface with Windows® operating system Extra large bin area Supporting pre-scan capability Applications: Automatic advanced optical inspection system for die, e.g. LED die High speed and accurate inspection performance True color inspection capability Supporting pre-scan capability Picking “No-Good (NG) die” capability (option) Applications: Individual LED die testing and sorting solution High speed die testing and sorting system with rotary testing station design • Dual individual linear bond heads for pick and place processes • Parallel pick, test and sort processes • Sorting good die only with advanced die surface defect detection at wafer stage Excellent flexibilities • Supporting various types of testers • Flexible bin block combination • Up to 56 bin blocks can be installed at one time (option) Precision probing performance with XYZ testing stage motions User-friendly interface with Windows® operating system *Remark: All machine performance data are package dependent 2 Epoxy Die Attach US PATENTED US PATENTED Automatic High Speed Die Bonder Automatic High Speed Epoxy Die Bonder AD830 / AD830R AD838L Applications: High density substrates, e.g. chip LED, top LED, side view LED, SOIC, SOD, etc. High speed performance • Implementing patented bond head design • Supporting dual dispensing system Widely implementing linear motor systems Graphical user interface with multi-language support AD830R for reel form materials handling Up to 8” wafer handling capability (option) Applications: Direct substrate indexing, e.g. ceramic substrates for high power LED, etc. Strategic direct indexing algorithm suitable for direct ceramic indexing or other materials handling Implementing excellent precision with • Various inspection systems during bonding process • Patented bond head design Extra large bonding area: up to 4” width substrate handling capability Excellent substrate warpage control Implementing latest global substrate alignment Automatic Die Bonder Automatic Die Bonder AD880 AD881 Series Applications: Suitable for large area epoxy die bonding process Extra large bonding area: 8” x 8” substrate handling Providing high speed die attach with DDR bond head system Implementing excellent flexibility – capability of handling various substrates with corresponding carrier design 6 mil small die handling capability Graphical user friendly interface with MS Windows® operating system Applications: Flexible of handling various substrates, e.g. metal cans, bent lead frames, etc. Wide range of substrates handling capability Excellent flexibility • AD881M: up to 3 wafers handling capability (with similar die sizes) • AD881H: automatic materials handling • AD881MH: up to 3 wafers and automatic substrate handling capability Providing extremely high speed die attach with DDR bond head system Powerful inspection system providing excellent bonding quality • Wafer PRS with PR look ahead capability • Advanced die surface defect inspection at wafer stage 3 *Remark: All machine performance data are package dependent Epoxy Die Attach Epoxy Die Attach PATENT PENDING Automatic High Precision Epoxy Die Bonder (for Vertical Lead Frame Application) (for Photo Diode Application) AD100 AD819-PD Applications: Vertical LED, photo transistors, infrared diodes, etc. World’s fastest epoxy die bonding system with patent pending technologies – dual shuttling system Pro-longing MTBA with new inputting / outputting systems • Inputting system: dual stack loading inputting system / multi-magazine inputting elevator system • Outputting system: multi-magazine outputting elevator system Precise epoxy stamping capability with pre-bond inspection Getting advantages between quality control and bonding speed Applications: Metal can packages, e.g. photo diodes on stem, etc. High precision epoxy die bonding with • 2-in-1 stamping and bonding system • Widely implementing linear motor systems • Full range of PR inspection at various stages for precision bonding Eutectic Die Attach High Speed Epoxy Die Bonder Carrier free metal cans handling design Supporting various configurations to fit different applications • Programmable tilting workchuck for PD application • Rotary workchuck for VCSEL application (option) with latest post-bond inspection system Eutectic Die Attach US PATENTED US PATENTED Automatic Eutectic Die Bonder Automatic Eutectic Die Bonder AD211 / AD212 AD220 Applications: Panel form of high power LED packages, e.g. ceramic/wafer submount for direct eutectic process Implementing patented technologies • Double decoupling bond head system • Heated collet die attach process Applications: Strip form of high power LED lead frames for direct eutectic die attach process Implementing patented technologies • Double decoupling bond head system • Heated collet die attach process Extra large bonding area: • AD211: up to 4” x 4” bonding area • AD212: up to 8” x 8” bonding area Providing excellent oxygen level control Providing excellent oxygen level control Automatic die theta alignment with precision stage Excellent void control with mature process know-how Minimizing thermal shock with pre-heat and post-heat stations Excellent void control with proven heat tunnel design and mature process know-how Automatic lead frame input and output handling capability Automatic materials handling for AD211 *Remark: All machine performance data are package dependent 4 Eutectic Die Attach Curing Oven Automatic High Precision Eutectic Die Bonder Snap Curing Oven (for Laser Diode Application) AD819-LD Applications: Metal can packages, e.g. one pass LD and submount on stem Precision placement with • Widely implementing linear motor systems • Full range of PR inspection at various stages for precision bonding Carrier free metal cans handling design Individual bonding system for submount and LD attach Providing consistent eutectic environment • Excellent oxygen level control with nitrogen gas supply • Programmable temperature profile on various stations COE139 / COE139R Applications: Curing process for die attached substrates in either strip or reel form, e.g. SOT, top LED, etc. Excellent oxygen level control with • N2 curtains at oven’s input and output sides Consistent curing temperature control with 6 temperature control zones Selectable for various substrates handling • COE139: strip form substrate handling • COE139R: reel form substrate handling In-line capability, e.g. AD830 or other die attach system (option) Anti-thermal shock with pre-heating and post-heating stations Gold / Copper Ball Wire Bonding Reflow Oven Extreme High Speed Wire Bonder SR902W Harrier Xtreme Applications: Reflowing process for large substrate Up to 8 independent temperature controlling regions • 6 heating zones and 2 cooling zones Combination of convection and radiation heating modes Sophisticated oxdiation level control 5 *Remark: All machine performance data are package dependent Applications: QFN, SMD LED, HP LED, high density discrete packages, etc. Dual high speed wire bond heads system Highest output per square foot area User-friendly, intelligent Windows® based interface Innovative algorithm for high speed PR Supporting copper wire bonding & copper BSOB (option) Gold / Copper Ball Wire Bonding Ultra High Speed Wire Bonder (for Discrete/Opto Applications) (for Hybrid Application) iHawk Xtreme Eagle60X2L Applications: One pass solution for large bond area packages, e.g. multi-chip modules, SiP, etc. Ultra fast speed: up to 12 wires/sec with extreme precision Compact and low inertia digitally controlled bond head with built-in features Advanced loop algorithm with superior looping trajectory profile and auto-tuning technology Bond process monitoring with post-bond inspection, free air ball formation monitoring and non-stick detection monitoring Extra large bonding area Automatic Gold Ball Wire Bonder Automatic Gold Ball Wire Bonder (for Vertical Lead Frame Application) (for Bent Lead Frame Application) iHawk-V iHawk-02 Applications: Gold ball wire bonding on vertical lead frames Innovative dual track design enhancing bonding speed Long MTBA with latest input / output magazine handling Innovation in optics & PR system especially for smaller LED dice *Remark: All machine performance data are package dependent Gold / Copper Ball Wire Bonding • Up to 54 mm x 102 mm for LF width < 125 mm Curing Oven Applications: Gold ball wire bonding, QFN, SMD LED, HP LED, high density discrete packages, etc. Innovation in optics & PR system for smaller dice Advanced PR algorithm with PR look ahead capability Faster package conversion with fully motorized material handling system Eutectic Die Attach High Speed Wire Bonder Applications: Bent lead frame handling capability, e.g. piranha LED application High speed wire bonding capability Long MTBA with latest input / output magazine handling Saving cost of ownership by direct bent lead frame indexing 6 Gold / Copper Ball Wire Bonding Aluminium Wedge Wire Bonding Automatic Gold Wire Bonder Rotary Bondhead Wedge Bonder (for Laser Diode Application) AB559A Series Eagle60AP-LD Applications: Metal can packages with three dimensional bonding, e.g. LD assembly, etc. Rotary workholder system for multi-plane bonding • 0° to 90° programmable rotation One pass LD and submount bonding Specially designed for photonics and optoelectronic application Custom-made top plate and carrier for large range of laser diode products Applications: Chip-on-board, multi-die, LED display, chip-on-flex, chip-on-glass, ceramic, etc. Fine pitch capability for advanced packages Large effective bonding area Vision Lead Locator (VLL) to adapt lead width variation Dual colour (red-blue) LED lighting for different substrates surface reflection Gold wire wedge bonding application (option) 60° wire feeding angle capability (option) PATENTED Automatic Ultrasonic Wedge Bonder Automatic Ultrasonic Wedge Bonder AB530 Cheetah Applications: Chip-on-board, multi-die / multi-PCB, high lead count, etc. High speed bonding Fine pitch capability for advanced packages Cost saving by widely implementing linear and DDR motor systems Multi-unit / multi-PCB bonding capabilities 7 *Remark: All machine performance data are package dependent Applications: suitable for leaded substrate, e.g. dot matrix display, numerical display, etc. High speed bonding Up to 4" diameter bonding area Saving cost of ownership by widely implementing linear and DDR motor system Multi-unit / multi-PCB bonding capability Silicon Liquid Molding Wafer Level Stud Bumping System IDEALcompress™ Hummingbird Applications: Gold / copper stud bumping on wafer High speed bumping performance Excellent bumping control Implementing flexibility • Large bumping area: up to 12” wafer handling capability • Supporting gold / copper stud bumping • Automatic wafer loading system (option) • Equipping with pre-heat / post-heat system (option) • Small lot assembly • Compact Ideal for eco-friendly manufacturing • No material wastage • No mold cleaning required Various dispensing applications, including liquid epoxy, clear silicone, granular powder dispensing Aluminium Wedge Wire Bonding • Fine pitch bumping capability • Stack bumping capability Applications: Large substrate molding: W150mm x L300mm, LED Ideal for high-mix, low volume manufacturing Gold / Copper Ball Wire Bonding Gold Stud Bumping Encapsulation / Phosphors Application DS500-IL IDEALab™ - WLP Quick change mold chase concept with aid of IDEALtrolley™ *Remark: All machine performance data are package dependent DS500 Series Applications: Die coat, adhesive dispensing, sealing, gel coating, underfill dispensing, etc. Excellent encapsulant placement repeatability and dispensing quality Extra large dispensing area with gantry table design Glob top, dam and fill dispensing mechanism Custom programmable dispensing patterns & parameters Automatic substrate handling capability with input / output elevator systems (option) Dual dispensing heads with adjustable pitch (option) Reel-to-reel handling capability (option) Encapsulation / Phosphors Application • Liquid epoxy • Clear silicone • Granular powder Precision Dispensing System Molding Applications: WLP, wafer level LED, exposed solder ball WLP, Cu bump pillar WLP, embedded wafer ball grid array, redistributed chip package Tape assisted to release Dispensing options Gold Stud Bumping DS500 8 Encapsulation / Phosphors Application Package Sorting / Taping PATENT PENDING Precision Jetting System Automatic LED (SMD) Sorting System DS520 Series SLS230 / S Applications: Jetting encapsulant onto various substrates, including phosphors mixed silicone on LED packages, etc. Extremely high speed jetting with in-house developed jetting system Excellent performance • High accuracy & repeatability • Easy to operate & maintain • Durable consumables Maintaining fluid homogeneity by strategic agitating system Supporting individual dual workholders control Applications: Chip LED, sideview LED, etc. Excellent performance by implementing patent pending design Prevent mixing design by detecting bin removal and automatic label printing the bin data Optional vision inspection for multi-chip LED to screen out package with missing chip, defected chip, etc. before sorting Wide range of applications • SLS230: chip LED devices, e.g. 0402, 0603, 0605, 0805, 1206, etc. • SLS230S: sideview LED devices, e.g. 008, 010, 020, 215, 335, etc. Automatic materials handling with DS520M DS520V for vertical leadframe application Automatic LED (SMD) Sorting System Automatic LED (SMD) Taping System SLS230T Plus SLT400 Applications: Top LED, e.g. 3014, 3020, 3528, 5050, etc. Prevent mixing design by detecting bin removal and automatic label printing the bin data Long lasting performance with latest XY table design Increasing bin capacity for large lot size Optional with vision inspection for multi-chip LED to screen out package with missing chip, defected chip, etc. before sorting Applications: Chip LED, top LED, sideview LED, etc. In-house developed direct drive rotary motor and linear up down motor to maximize system throughput Advanced inspection algorithm for high accurate inspection Ensuring taping only good units with supporting test contact technology Simple and easy operation with MS Windows® operating system Wide range of applications • Chip LED devices: 0402, 0603, 0805, etc. • Top LED devices: 3014, 3020, 3528, 5050, etc. • Sideview LED devices: 008, 010, 020, etc. 9 *Remark: All machine performance data are package dependent Package Sorting / Taping Ingenious (LED) Packing System Encapsulation / Phosphors Application IP360 Series Applications: Ceramic, silicon molded LED One-stop solution for test, sort and output with good traceability In-house developed direct drive rotary motor and linear up down motor to maximize system throughput Flexible materials handling input material handling • Input system: wafer frame / bowl feeding system • Output system: tape-and-reel output, bin frames and / or bins Powerful inspection capability • Wafer inspection • Tape-and-reel in-pocket inspection, etc. Optional input barcode scanning, unit map, label printing and Package Sorting / Taping output file generation package for good tractability of devices Tester Tester LED Tester System LED Full Function Checker TLB203 TLC203 Applications: Measuring electrical and optical characteristics on wafer prober or handler, e.g. AS899, SLS230 series, IP360 series, etc. for die / package level sorting Large range of power supply Precision measurement Flexible implementation • Supporting up to two testing stations simultaneously • Multiple drivers and photo-detectors handling capability Applications: Measuring both electrical and optical characteristics such as VF, IR, polarity and CIE1931 (x,y) of LED and detect discrepancy before taping the work pieces to taping system. All test items can be programmed by user. This checker is designed as standalone system and communicate with SLT400 taping system or any 3rd party system through I/O. Driving source range • Current: up to 100 mA • Voltage: up to 10V *Remark: All machine performance data are package dependent 10 China 中國 ASM Microelectronics Technical Services (Shanghai) Co Ltd 2/F, Zu Chong Zhi Road Lot 1505 Shanghai Zhangjiang Hi-Tech Park Shanghai 201203, China 先域微電子技術服務(上海)有限公司 上海市 張江高科技園區 祖冲之路 1505 弄 55 號 2 樓 Tel : 86-21-5080 5465 Fax : 86-21-5080 5467 ASM Microelectronics Technical Services (Shanghai) Co Ltd Room 705, Da An Building B No. 41 You Yi Road, He Xi District Tianjin 300211, China 先域微電子技術服務(上海)有限公司 天津分公司 天津市 河西區 友誼路 41 號 大安大厦 B 座 705 室 Tel : 86-22-5881 3008 Fax : 86-22-5881 3009 ASM Microelectronics Technical Services (Shanghai) Co Ltd Room C345-4, Chengdu Hi-Tech Zone Innovation Service Centre Chengdu 611731, China 先域微電子技術服務(上海)有限公司 成都辦事處 成都 西芯大道四號 西部園區基地 孵化樓 C345-4 號 Tel : 86-28-8784 6551 Fax : 86-28-8784 6562 ASM Microelectronics Technical Services (Shanghai) Co Ltd Room B, 31/F, Bi Li Da Building No. 22 Lv Ling Road Xiamen 361009, China 先域微電子技術服務(上海)有限公司 廈門分公司 廈門市 呂岭路 22 號 必利達大廈 31B 室 Tel : 86-592-550 9125 Fax : 86-592-550 9121 ASM Microelectronics Technical Services (Shanghai) Co Ltd Room 05-03/06, Block A No. 5 Xing Han Street Suzhou Industrial Park Suzhou 215021, China 先域微電子技術服務(上海)有限公司 蘇州分公司 蘇州市 蘇州工業園 星漢街 五號A幢 05-03/06 室 Tel : 86-512-6762 6278 Fax : 86-512-6762 6378 ASM Microelectronics Technical Services (Shanghai) Co Ltd Room 7-11, 4th Floor, Block A Tai'an Square, Dongshen Road Zhang Mu Tou Town Dongguan 523620, China 先域微電子技術服務(上海)有限公司 東莞分公司 東莞市 樟木頭鎮 東深公路旁荔苑大道 泰安廣場 A 棟四樓 A7-A11 Tel : 86-769-8712 5600 Fax : 86-769-8712 5601 ASM Microelectronics Technical Services (Shanghai) Co Ltd East Wing, 4/F, Block 2 CATIC (Zhonghang) Shahe Industrial Zone Qiao Xiang Road, Nanshan District Shenzhen 518053, China 先域微電子技術服務(上海)有限公司 深圳分公司 深圳市 南山區 僑香路 中航沙河工業區(北區) 2 號樓 4 層東 Tel : 86-755-8830 8533 Fax : 86-755-8344 6245 ASM Microelectronics Technical Services (Shanghai) Co Ltd Room 1402-4 Jiangxin Guoji Jiayuan Yinzuo No. 85 Jiefangxi Road, Qingyunpu District Nanchang 330002, China 先域微電子技術服務(上海)有限公司 南昌分公司 江西省 南昌市 解放西路 江信國際嘉園銀座大廈 1402-1404 Tel : 86-791-8820 1517 Fax : 86-791-8820 7178 China 中國 Europe 歐洲 Hong Kong 香港 Japan 日本 ASM Materials China Block 15, Fuqiao 2nd Industrial Estate Gong Ye Road, Fuyong Town Baoan District, Shenzhen 518103, China 先進半導體材料(深圳)有限公司 深圳 寶安區 福永工業大道 富橋第二工業區 15 棟 Tel : 86-755-2961 8000 Fax : 86-755-2733 5548 ASM Assembly Products B.V. Weltevreden 4 A, 3731 Al De Bilt The Netherlands Tel : 31-30-890 6310 Fax : 31-30-890 6320 ASM Pacific (Hong Kong) Ltd 4/F Watson Centre, 16-22 Kung Yip Street Kwai Chung, Hong Kong 先進太平洋(香港)有限公司 香港 葵涌 工業街 16-22 號 屈臣氏中心 4 樓 Tel : 852-2619 2000 Fax : 852-2619 2118/9 ASM Assembly Technology Co Ltd 5F, Tachikawa F-Bldg, 1-7-18 Nishiki-Cho, Tachikawa-Shi Tokyo 190-0022, Japan 〒190-0022 東京都立川市錦町 1-7-18 立川エフビル 5 階 Tel : 81-42-521 7751 Fax : 81-42-521 7750 Philippines 菲律賓 Singapore 新加坡 ASM Pacific Kor Ltd. Room 501, 5F, Hi-Tech Center 958-14 Daechon-dong, Buk-gu Gwangju 500-470, Korea 광주광역시 북구 대촌동 958-14 하이테크센터 501 호 500-470 Tel : 82-62-973 4174 Fax : 82-62-973 4216 Edgeward Development Limited Philippines Branch 2108, Prime Street Corner Enterprise Street Madrigal Business Park, Alabang Muntinlupa City, Philippines 1770 Tel : 63-2-850 4543 Fax : 63-2-850 4547 ASM Technology Singapore Pte Ltd 2 Yishun Avenue 7 Singapore 768924 Tel : 65-6752 6311 Fax : 65-6758 2287 ASM Assembly Equipment Malaysia Sdn Bhd 24A, Jalan Medan Ipoh 1B Medan Ipoh Bistarli 31400 Ipoh Perak, Malaysia Tel : 605-542 3991 Fax : 605-542 3992 ASM Assembly Equipment Malaysia Sdn Bhd B-1-12, Jalan SS6/20, Dataran Glomac Pusat Bandar Kelana Jaya 47301 Petaling Jaya, Malaysia Tel : 603-7806 4942 Fax : 603-7806 4943 ASM Assembly Equipment Malaysia Sdn Bhd 1, Tingkat Satu, Jalan Warisan 1 Taman Warisan Jalan Junid 84000, Muar, Johor, Malaysia Tel : 606-951 5713 Fax : 606-951 5786 ASM Pacific (Holding) Limited Taiwan Branch 10F, No. 530, Sec. 2, Chung Shan Road Chung Ho Dist, New Taipei City, Taiwan 香港商先進太平洋股份有限公司 台灣分公司 台北辦事處 新北市 中和區 中山路二段 530 號 10 樓 Tel : 886-2-2227 3388 Fax : 886-2-2227 3399 ASM Pacific (Holding) Limited Taiwan Branch 1F, No. 7, Lane 91, Dongmei Road Hsinchu, Taiwan 香港商先進太平洋股份有限公司 台灣分公司 新竹辦事處 新竹市 東美路 91 巷 7 號 1 樓 Tel : 886-3-573 3750 Fax : 886-3-573 3551 ASM Pacific (Holding) Limited Taiwan Branch 8F-1, No. 135, Sec 2 Chung Shan Road, Tantzu Taichung, Taiwan 香港商先進太平洋股份有限公司 台灣分公司 台中辦事處 台中市 潭子區 中山路 2 段 135 號 8F-1 Tel : 886-4-2535 6390 Fax : 886-4-2535 6820 Korea 韓國 ZEMOS Korea Inc. / ASM Pacific Kor Ltd. 3F, 628-6, Deung Chon Dong Kangseo Gu, Seoul 157-030, Korea 서울시 강서구 등촌동 628-6 3층 157-030 Tel : 82-2-538 5900 Fax : 82-2-561 5905 Malaysia 馬來西亞 ASM Assembly Equipment Malaysia Sdn Bhd Bayan Point, Block A, No. 15-1-23, 15-1-24 Medan Kampung Relau 11900 Penang, Malaysia Tel : 604-644 9490 Fax : 604-645 1294 Taiwan 台灣 ASM Pacific (Holding) Limited Taiwan Branch No. 4-2, East 3 Road Street N.E.P.Z. Kaohsiung, Taiwan 香港商先進太平洋股份有限公司 台灣分公司 高雄市 811 楠梓加工出口區東三街 4-2 號 Tel : 886-7-367 6300 Fax : 886-7-367 6399 Thailand 泰國 U.S.A. 美國 ASM Assembly Equipment Bangkok Ltd 51/3, Vibhavadi Tower, 18/2 Floor Ngamwongwan Road, Ladyao, Chathuchak, Bangkok 10900 Thailand Tel : 66-2-941 3181/2 Fax : 66-2-941 3183 ASM Pacific Assembly Products Inc. 3440 East University Drive, Phoenix Arizona 85034-7200 U.S.A. Tel : 1-602-437 4760 Fax : 1-602-437 4630 ASM Pacific Assembly Products Inc. (West Regional Office) 97 East Brokaw Road, Suite 100 San Jose, California 95112-4209 U.S.A. Tel : 1-408-451 0800 Fax : 1-408-451 0808 http://www.asmpacific.com DB1
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