Motion And Manipulation

Transcription

SECTION 8
INTRODUCTION
Rotary Motion
Bellows sealed - Our range of high torque rotary motion feedthroughs
are designed to operate at temperatures as high as 250°C and rotational
torque up to 1.766Nm.
Feedthroughs are constructed from black anodized aluminium and
stainless steel, with only stainless steel faces being exposed to the
vacuum environment.
In-vacuum bearings are dry-film lubricated with tungsten-disulphide,
while air side bearings are lubricated with high-temperature Krytox®
lubricant. The rotational shaft is sealed with an AM-350 edge welded
bellows.
Elastomer sealed - Our elastomer sealed rotary motion feedthroughs
have several revolutionary features that have received tremendous
response from the vacuum industry. The 6.35mm shaft is supported by
two ball bearings for smooth, friction-free operation at a relatively low
cost. The 9.23mm & 12.7mm feedthroughs utilize bronze bearings to
support the shaft. The shaft is sealed by a preloaded Viton® o-ring. The
greatest feature of this feedthrough is that the o-ring may be regreased
or serviced by removing and replacing all components from the air side
of the feedthrough, in only a few seconds and without the need for any
tools.
Ferro-fluid sealed - Ferro fluid seals are based on the formation
of liquid o-rings which create a hermetic seal on the shaft of the
feedthrough. This is accomplished by the retension of magnetic fluid
(ferro-fluid) by powerful magnetic fields created by precise placement
of high energy magnets within the body of the feedthrough. With the
seals in place the smooth rotation and higher numbers of rotations per
minute are possible because of a precise roller bearing spindle design.
Linear Motion
Bellows sealed - Our range of high torque linear motion feedthroughs
are designed to operate at temperatures as high as 250°C. Linear
movement is measured in 0.001” (0.254mm) increments on the rotary
barrel scale and 1mm increments on the linear body scale, which are
laser etched into the black anodised aluminium finish.
Feedthroughs are constructed from black anodized aluminium and
stainless steel, with only stainless steel faces being exposed to the
vacuum environment.
In-vacuum bearings are film lubricated with a UHV compatible Krytox®
lubricant. The linear shaft is sealed with an AM-350 edge welded
bellows.
All dimensions are nominal in millimetres unless otherwise specified
Email : [email protected] - Tel : +44 (0)1444 233372 - Fax : +44 (0)1444 233392 - Website : www.lewvac.co.uk
MOTION AND MANIPULATION
Motion And Manipulation
8.1
SECTION 8
INTRODUCTION
SECTION 8
INTRODUCTION
Sample Manipulation, Transfer and Transport
Magnetically coupled - The quality and performance of our
X-Y-Z Translators
magnetically driven wobblestick manipulators and linear-rotary drives
is unique in the field of ultra high vacuum technology. In the past ten
years these wobblesticks have set the new benchmark for convenient
and reliable sample handling and transfer solutions. We have pincers,
forks, receptors and carriers for most types of sample holder and can
provide solutions for heating, cooling, applying magnetic field and much
more. We supply a vast range of customer designed positioning and
manipulation devices.
Translators are available as single, dual and triple axis variants, providing
solutions to many manipulation requirements within vacuum systems.
Our range of translators employ edge welded bellows seals to ensure
vacuum integrity and precision cross roller bearings for rigidity and
accuracy of movement. Motion is controlled by either basic leadscrews
or precision micrometers dependant upon the customers required level
of accuracy and repeatability.
Please contact our sales office for further details of the available range
of X, X-Y & X-Y-Z translators.
Wobblesticks
Stepper Motors and Controllers
Magnetically coupled wobblesticks provide a combination of linear travel
coupled with angular movement and rotation allowing in-vacuum sample
manipulation in all planes. Dual shaft versions also allow for pincer grip
of samples. A variety of pincer grips and forks are available to allow you
to integrate these products within existing OEM equipment. Cooled or
heated sample holders or pincers are also available.
Combined Linear and Rotary Motion
In-vacuum stepper motors are very well suited for achieving precise
movements of the most delicate in-vacuum transport systems and
samples. In-vacuum motors can achieve considerable cost savings
over the use of external motors and expensive motion feedthroughs
and motion systems. Our stepper motors have very low particulate
generation, as they have no moving metal to metal surfaces, they also
demonstrate favourable outgassing properties, making them the ideal
choice for sensitive semiconductor applications along with many other
in-vacuum uses.
Magnetically coupled combination linear and rotary motion feedthroughs
are available in a variety of sizes and configurations allowing you to
manipulate samples within your vacuum system along and about the
axis of the linear motion. Dual shaft versions also allow for pincer grip
of samples. A variety of pincer grips and forks are available to allow you
to integrate these products within existing OEM equipment. Cooled or
heated sample holders or pincers are also available.
Fast Entry Load Locks
Our fast entry locks are designed to facilitate for the fast and clean
introduction of samples, STM tips or crucibles into a UHV system. They
can handle samples typically up to 35mm in diameter. Samples are
loaded through a o-ring sealed door at one end of the load lock, usually
onto a M-MD16 magnetically driven linear-rotary feedthrough. Typically
four CF ports are provided: mounting flange (rotatable); pumping port
(rotatable); viewport flange (fixed, tapped M6); vacuum gauge port
(fixed, tapped M6). On request, the fast entry load lock can be supplied
with a suitable gate valve, ion gauge, viewport, and turbo molecular
pump.
8.3
8.2
Rotary Feedthroughs - Bellows Sealed
SECTION 8.1
Specifications:
ROTARY MOTION
CF Flanged
Materials
BodySt.St.
Housing
Flange
A
B
Price £
Price €
DN16CF
39.9
105.9
Part Code
M-BRM16CF
£356
€499
DN40CF
39.9
105.9
M-BRM40CF
£362
€507
Anodized aluminium
Bellows, edge welded
AM-350
Vacuum Range
CF flanged
atm to 1x10-10mbar
KF flanged
atm to 1x10-8mbar
KF Flanged
Temperature Range*
Flange
A
B
Price £
Price €
DN16KF
38.6
107.2
M-BRM16KF
£356
€499
CF flanged
DN40KF
41.1
104.6
M-BRM40KF
£362
€507
-196 to 250°C
KF flanged (Viton® seals)
Part Code
-20 to 150°C
Load
Features:
• All precision bearings.
• Improved shaft coupling designed for
high torque, rated to 1.766Nm.
• High temperature rated to 250°C.
• UHV compatible construction.
• Welded bellows seal.
• Manual actuator.
• Continuous rotary motion.
• Rotary position lock.
• Optional stepper motor or air actuator.
Torque
1.766Nm max
Axial
2.7kg max
Lateral
4.5kg max
Speed
Rotary
1000rpm max
Resolution
Rotary scale
5°
Actuator Options
Description
Fig.
Price £
Price €
DC stepper motor actuation
1
Add -SM
£413
€579
High torque DC stepper motor actuation
2
Add -HTSM
£395
€553
90° pneumatic actuator with solenoid valve
3
Add -PN
£551
€772
Cylinder speed control for pneumatic actuator (pair)
-
M-PASCS
£76
€107
Fig. 1.
Fig. 2.
CF
149.1
KF16
150.4
KF40
147.8
30 60
300 330 0 30 60
KF40
147.8
B
56.6
41.9
Please see pages 8.14 - 8.17 for details of actuator options and specifications.
Locknut
300 330 0 30 60
6.35
KF16
150.4
300 330 0 30 60
26.7
A
CF
149.1
56.6
57.2
76.7
6.35
KF40
147.8 56.1
300 330 0
B
KF16
150.4
50.6
Fig. 3.
A
CF
149.1
51.3
300 330 0 30 60
* - Assembly rating must be reduced to that of lowest
rated component.
Part Code
8.5
SECTION 8.1
ROTARY MOTION
8.4
Rotary Feedthroughs - Elastomer Sealed
SECTION 8.1
Specifications:
1” Bolt Mount
Materials
Body
St.St. or Aluminium
ShaftSt.St.
SealViton®
Vacuum Range
Bolt fitting
atm to 1x10 mbar
Bolt fitting (Viton® seals)
-20 to 100°C
Load
Torque
• 6.35mm shaft has ball bearings for
smooth operation.
• 9.53mm & 12.7mm shaft has bronze
bearings.
• Temperature rated to 100°C.
• Manual actuator.
Material
Shaft dia
(mm)
Part Code
Price £
Price €
Aluminium
6.35
M-ERM-A-B
£147
€206
Stainless steel
6.35
M-ERM-S-B
£266
€373
Aluminium
9.53
M-ERM-A-B-9.53
£179
€251
Stainless steel
9.53
M-ERM-S-B-9.53
£305
€427
Aluminium
12.7
M-ERM-A-B-12.7
£179
€251
Stainless steel
12.7
M-ERM-S-B-12.7
£305
€427
Price £
Price €
-8
Temperature Range*
Features:
ROTARY MOTION
11.3Nm max
Spares
Description
Replacement bearings & o-ring
Part Code
M-ERM-125-BK
£20
€28
Aluminium nut
M-ERM-AN
£8
€12
Aluminium washer
M-ERM-AW
£4
€6
Stainless steel nut
M-ERM-SN
£12
€17
M-ERM-SW
£7
€10
M-ERM-125-KC
£12
€17
Axial
1.1kg max
Stainless steel washer
Lateral
2.3kg max
Knurled cap
Speed
Rotary
500rpm max
rated component.
31.7
Max
5.6
25.4 44.5
27.2
47.6
111.1
8.7
SECTION 8.1
ROTARY MOTION
8.6
Rotary Feedthroughs - Ferro-fluid Sealed
SECTION 8.1
Specifications:
ROTARY MOTION
Baseplate Connection
Materials
Body & shaft
17-4 PH St.St.
Flange
Fig.
Shaft dia
Price £
Price €
1” Baseplate
1
6.35
Part Code
M-FRM-6.35-BP
£384
€538
1” Baseplate
1
9.53
M-FRM-9.53-BP
£384
€538
Vacuum Range
Operating pressure
atm to 1x10-8mbar
Max pressure differential
2.5atm
<5x10-9 std.cc/sec
Helium leak tested to
Temperature Range
*
KF Flanged
up to 80°C
Drag Torque
@ Breakaway
Flange
Fig.
Shaft dia
Price £
Price €
DN25KF
2
6.35
Part Code
M-FRM-6.35-25KF
£384
€538
DN25KF
2
9.53
M-FRM-9.53-25KF
£384
€538
0.077Nm
@100rpm0.042Nm
@1000rpm0.064Nm
Features:
• Hermetically sealed with the Rigaku
SuperSeal ® ferro-fluid technology.
• Very low stray magnetic fields.
• No magnets in vacuum environment.
• High torque capacity.
• Krytox/fomblin blended lubricant.
• Multiple connection options.
CF Flanged
Speed
Rotary
5000rpm max
Load
Static
138kg max
Dynamic
261kg max
rated component.
Flange
Fig.
Shaft dia
Price £
Price €
DN16CF
3
6.35
M-FRM-6.35-16CF
£432
€605
DN40CF
4
6.35
M-FRM-6.35-40CF
£480
€672
DN40CF
4
9.53
M-FRM-9.53-40CF
£480
€672
Fig. 1.
Fig. 2.
25.3
35.5
9.53
9.51
Shaft dia.
5.59
2 pl.
22.1
41.4
Ferrofluid forms liquid o-rings with
the help of strong, high-energy magnets
Part Code
8.9
22.4
8.9
33.0
29.3
28.2
21.8
86.1
25.4
86.1
6.351
6.338
2 pl.
Pole Piece
Vac.
S
N
N
Magnet
S
Atm.
Fig. 3.
Fig. 4.
28.1
27.4
Magnet
87.4
19.05
18.92
10.2
2 pl.
35.4
29.2
28.1
21.8
69.3
33.78
Shaft
40.6
38.087
38.037
86.1
8.9
SECTION 8.1
ROTARY MOTION
8.8
SECTION 8.2
LINEAR MOTION
SECTION 8.2
LINEAR MOTION
Linear Feedthroughs - Bellows Sealed
Specifications:
CF Flanged
Materials
BodySt.St.
Housing
Anodized aluminium
AM-350
Vacuum Range
CF flanged
atm to 1x10-10mbar
KF flanged
atm to 1x10-8mbar
B
90.2 - 115.5
139.7
M-BLM25-16CF
£350
€490
DN40CF
25.4
90.2 - 115.5
139.7
M-BLM25-40CF
£356
€499
Price €
DN16CF
50.8
90.2 - 140.9
175.3
M-BLM50-16CF
£440
€616
50.8
90.2 - 140.9
175.3
M-BLM50-40CF
£446
€625
DN16CF
101.6
92.4 - 193.6
243.1
M-BLM100-16CF
£661
€926
DN40CF
101.6
92.4 - 193.6
243.1
M-BLM100-40CF
£667
€934
Flange
Linear travel
A
B
Price £
Price €
25.4
88.9 - 114.3
141.2
M-BLM25-16KF
£359
€503
CF flanged
DN40KF
25.4
91.4 - 116.8
138.7
M-BLM25-40KF
£365
€511
DN16KF
50.8
88.9 - 139.7
176.8
M-BLM50-16KF
£455
€637
DN40KF
50.8
91.4 - 142.2
174.2
M-BLM50-40KF
£461
€646
DN16KF
101.6
92.7 - 194.3
244.6
M-BLM100-16KF
£658
€922
DN40KF
101.6
95.2 - 196.8
242.0
M-BLM100-40KF
£661
€926
-196 to 250°C
-29 to 150°C
2.2kg max
Lateral (at 50.8mm extension) 2.2kg max
Resolution
Description
Linear scale
1mm
Rotary scale
0.025mm
Price £
Price €
Speed knob winding handle
Part Code
M-SPKN
£61
€86
Add -SM
£395
€553
Add -HTSM
£380
€532
25.4
50.8
101.6
CF
KF16
184.2 185.7
219.7 221.2
287.6 289.1
0
.25
.50
.75
1.0
IN
1 DIV. =.001 IN.(.025MM)
5
20
0
0
8
4
12
0
.25
.50
.75
1.0
IN
1 DIV. =.001 IN.(.025MM)
5
20
0
0
4
8
12
16
20
24
MM
B
56.6
Please see pages 8.14 - 8.17 for details of actuator options and specifications.
41.9
Locknut
0
.25
.50
.75
1.0
IN
1 DIV. =.001 IN.(.025MM)
5
20
0
0
4
8
12
16
20
24
MM
6.35
16
26.7
A
KF40
183.1
218.7
286.5
Standard motor = 51.3
HT motor
= 56.1
19.1
14.2
20
B
24
MM
A
6.35
Part Code
Actuator Options
Travel
4.8
Price £
DN40CF
rated component.
5.3
Part Code
DN16KF
Axial
All precision bearings.
25.4, 50.8 & 101.6mm travel.
High temperature rated to 250°C.
UHV compatible construction.
Welded bellows seal.
Manual actuator.
Linear position lock.
Optional stepper motor actuator.
A
25.4
KF Flanged
Load
•
•
•
•
•
•
•
•
Linear travel
Temperature Range*
Features:
Flange
DN16CF
2 x 6-32 thread
Supplied complete with 2 x 6-32 screws to suit tapped
holes in shaft.
8.11
8.10
SECTION 8.2
LINEAR MOTION
LINEAR MOTION
SECTION 8.2
Specifications:
CF Flanged
Materials
Flange
Linear
travel
A
B
C
BodySt.St.
DN16CF
25.4
90.2-115.6
127.0
66.5-91.9
DN40CF
25.4
90.2-115.6
127.0
66.5-91.9
DN16CF
50.8
90.2-141.0
162.6
DN40CF
50.8
90.2-141.0
162.6
Housing
Anodized aluminium
AM350
Part Code
Price £
Price €
M-PPLM25-16CF
£383
€537
M-PPLM25-40CF
£389
€545
63.5-114.3
M-PPLM50-16CF
£473
€663
63.5-114.3
M-PPLM50-40CF
£479
€671
Vacuum Range
CF flanged
atm to 1x10-10mbar
KF flanged
atm to 1x10-8mbar
Temperature Range*
CF flanged
A
-196 to 250°C
5.3
-20 to 150°C
0
4
8
12
16
0
.25
.50
.75
37.5
2 x 6-32 thread
Resolution
1.0
14.2
Lateral (at 50.8mm extension) 2.2kg max
Linear scale
IN
All precision bearings.
25.4mm & 50.8mm travel.
High temperature rated to 250°C.
Welded bellows seal.
Manual actuator.
Linear position lock.
2.2kg max
20
4.8
24
•
•
•
•
•
•
•
Axial
C
19.1
Load
Features:
B
39.9
1mm
KF Flanged
rated component.
Flange
Linear
travel
A
B
C
DN16KF
25.4
88.9-114.3
128.5
66.5-91.9
DN40KF
25.4
91.4-116.8
126.0
66.5-91.9
DN16KF
50.8
88.9-139.7
164.1
DN40KF
50.8
91.4-142.2
161.5
Part Code
Price £
Price €
M-PPLM25-16KF
£383
€537
M-PPLM25-40KF
£389
€545
63.5-114.3
M-PPLM50-16KF
£473
€663
63.5-114.3
M-PPLM50-40KF
£479
€671
A
5.3
B
C
19.1
0
4
8
12
0
.25
.50
.75
1.0
IN
37.5
16
2 x 6-32 thread
20
14.2
24
MM
4.8
39.9
Supplied complete with 2 x 6-32 screws to suit tapped
holes in shaft.
8.13
Linear Feedthroughs - Push-pull - Bellows Sealed
MM
8.12
SECTION 8.3
MOTION FEEDTHROUGH OPTIONS
SECTION 8.3
Motion Feedthrough Actuator Options
Specifications:
Specifications:
Connections
Connections
TypeLeads
TypeLeads
Number of leads
6
Number of leads
6
Input Voltage
5 VDC
Input Voltage
3 VDC
Input Current
0.7A
Input Current
2A
Temperature Range
Features:
•
•
•
•
•
NEMA standards 23D frame size.
±3%non cumulative step accuracy.
48-50 tooth pitch.
6 wire leads.
For unipolar operation, contact sales
office.
Temperature Range
-40°C to 65°C
200
Steps Per Revolution
Torque
200
Holding with 2 phases on
0.52Nm
Holding with 2 phases on
1.2Nm
Residual0.007Nm
Residual0.007Nm
Rotor Inertia
Overhang Load
Thrust Load
Weight
Rotor Inertia
Overhang Load
Thrust Load
Weight
0.005kg/m2
6.8kg
11.3kg
0.7kg
Features:
• NEMA standards 23D frame size.
• ±2%non cumulative step accuracy.
• Full step, 1.8° or half step 0.9°
increments.
• Microstepped to 0.0072°.
• Up to 20,000 steps/second (6000rpm).
Ø38.2
Stepper Motor
Type KML061S04
3.0 VDC 2.06 Amp
1.3
51.3
1.3
56.9
DC Stepper Motor option
6.8kg
11.3kg
0.7kg
56.9
19.3
Ø5.2, 4 places, equally
spaced on 66.675 PCD.
0.0004kg/m2
Ø38.2
Ø6.35
Ground screw
56.9
56.9
-40°C to 65°C
Steps Per Revolution
Torque
Ø6.35
Stepper Motor
Type MO61-LS02
5.0 VDC 1.0 Amp
51.3
19.3
Ø5.2, 4 places, equally
spaced on 66.675 PCD.
High Torque DC Stepper Motor option
Description
Part Code
Add - SM
Price £
Price €
Description
Part Code
Price £
Price €
£395
€553
Add - HTSM
£380
€532
8.15
8.14
SECTION 8.3
SECTION 8.3
Stepper Motor Driver & Controller
Specifications:
Features:
Air Connections
10-32
Air Pressure
150 psi max
Torque Capacity
Temperature Range
Rotation Angle
Stop Adjustment
Weight
0.007Nm/psi
-29°C to 90°C
90° max
30° both ends
0.2kg
Features:
The M-MC-3540 stepper motor controller is
suitable for controlling both stepper motor
versions supplied with our rotary and linear
motion devices as shown on pages 8.5, 8.11,
8.14 & 8.15.
• Drives two-position in-vacuum rotary
devices, such as shutters.
• 90° Rotation.
• 30° adjustment at each end of travel.
• Includes air control solenoid, air fittings
and air lines.
• 150psi maximum operating pressure.
Ø17.1
• Powerful, precise and efficient MOSFET
driver, providing up to 3.5 Amps per
phase and microstepping to 50,800 steps
per revolution.
• Reliable, efficient, low noise 40VDC
linear, torroidal power supply.
• Powerful, flexible, easy to use indexer.
• Connects by a simple cable to your PC
for programming, (cable included).
• Microsoft Windows™ based software for
easy setup and programming.
• Eight inputs for interacting with the user
and other equipment.
• Three outputs for coordinating external
equipment.
• Accepts 110 or 220 VAC power (factory
preset for 110 VAC).
• External trigger I/O is optically isolated,
5-24V, sinking or sourcing signals. PC/
MMI port is RS-232.
• Sturdy 57.2 x 198.1 x 127.0mm metal
chassis.
• Pluggable screw terminal connectors for
motor, AC power and I/O signals.
• Optional man machine interface (MMI)
allows operator to enter distances,
speeds, cycle counts and more.
• CE compliant.
25.4
Stepper Motor Driver & Controller
36.8
Flange
Linear travel
A
B
Stepper motor driver
Keypad controller for M-MC-3540 stepper motor driver
1.5
Part Code
Price £
Price €
M-MC-3540
£899
€1259
M-MC-MMI-01
POA
POA
139.7 max
28.7
10-32 tapped access hole
for air fitting, two places.
Woodruff key #202.5.
Pneumatic Actuator
Price £
Price €
90° pneumatic actuator with 12VDC solenoid valve
Description
Part Code
Add - PN
£551
€772
Cylinder speed control for pneumatic actuator
M-PASCS
£76
€107
8.17
8.16
SECTION 8.3
MOTION ACCESSORIES
SECTION 8.3
MOTION ACCESSORIES
Precision Bearings
Features:
• Dicronite™Lubricated as standard.
• Non lubricated bearings available upon
request.
• Ceramic balls available on request.
• Long life
Precision Bearings - Stainless Steel Balls With Dicronite™ Coating
ID
OD
A
Part Code
Price £
Price €
1.5
4.0
1.2
M-PBSD1.5-4
POA
POA
3.0
6.0
2.0
M-PBSD3-6
POA
POA
3.0
10.0
4.0
M-PBSD3-10
POA
POA
4.0
9.0
2.5
M-PBSD4-9
POA
POA
5.0
8.0
2.0
M-PBSD5-8
POA
POA
5.0
11.0
3.0
M-PBSD5-11
POA
POA
5.0
16.0
5.0
M-PBSD5-16
POA
POA
6.0
15.0
5.0
M-PBSD6-15
POA
POA
6.0
16.0
5.0
M-PBSD6-16
POA
POA
6.35
12.7
3.18
M-PBSD1/4-1/2
POA
POA
Please note, these bearings may be subject to minimum
order quantities. Please check with our sales office.
Precision Bearings - Stainless Steel Balls Without Lubrication
Precision bearings are available in a variety
of sizes including the standard 6.25mm
(¼”) size. They are available with either
stainless steel balls or for more demanding
UHV applications ceramic balls are used.
As standard bearings are supplied with
Dicronite™ dry lubricant coating. Non
lubricated, bearings can be supplied to
special order.
Please contact our sales office for further
details.
ID
OD
A
6.35
12.7
2.18
OD
Part Code
M-RB
Price £
Price €
27
€38
A
ID
8.19
8.18
SECTION 8.3
MOTION ACCESSORIES
SECTION 8.3
MOTION ACCESSORIES
Rotary & Linear Motion Accessories
LewVac rotary & linear motion accesories for 6.35mm (¼”) are an assortment of in-vacuum
hardware components to assist the user when installing motion feedthroughs. Various types of
drive shaft components are provided, including bellows couplings, universal joints, extension
couplings, bearings, bearing mounts, ground shaft and collars.
For custom solutions, please contact our sales office.
Bellow Coupling
Part Code
Ø6.35 / 3.18
7.1
19.1
Radial Bearing Mount
Part Code
7.9
19.1
31.8
M-RBM
25.4
Ø12.7 (½”)
Ø3.6 x 2
Price £
Price €
£39
€55
Manufactured from aluminium, these
mounts are designed to hold bearings
with 12.7mm (½”) OD x 3.17mm (⅛”)
wide (see previous page). The bearing
is held in place with 2 x C clips.
Ø11.1
Ø12.7 (½”)
19.1
M-LB
Price £
Price €
£75
€105
Linear bearing for 6.35mm (¼”) shaft
with UHV compatible dry lubricant.
Ø15.2
Ø6.35 / 3.18
14.3/11.1
3.6/2.8
38.1
11.4
Linear Bearing Mount
23.4
17.4
19.1
25.4
31.8
Ø12.7 (½”)
Ø3.6 x 4
M-LBM
£48
€68
Manufactured from aluminium, these
mounts are designed to hold bearings with 12.7mm (½”) OD x 19.1mm
(¾”) long. The bearing is held in place
with 2 x C clips.
A/Ø
A
Part Code
Price £
7.6
4.7
12.715.9
Price €
M-PGS-025-152
£9
€13
304.8/6.35
M-PGS-025-304
£12
€17
609.6/6.35
M-PGS-025-609
£21
€30
152.4/3.18
M-PGS-0125-152
£12
€17
Precision ground shaft, 6.35mm (¼”)
& 3.18mm (⅛”) dia.
Ø6.35
Ø6.35 (¼”)
Part Code
23.0
M-FLEXC-025
Price £
Price €
£63
€89
Price €
£18
€26
M-SC-0125
£21
€30
Part Code
Price £
Price €
M-UJ-025
£126
€177
M-UJ-0125
£126
€177
Part Code
Price £
Price €
M-MBG-025
£102
€143
M-MBG-0125
£102
€143
Part Code
Price £
Price €
M-CS-025
£12
€17
M-CS-0125
£15
€21
Mitre & bevel gears to suit 6.35mm (¼”)
& 3.18mm (⅛”) dia shafts. These allow
output motion at 90° to input motion to
be achieved. Has 2 x 6-32 set screws.
(Call for dimensions for M-MBG-0125)
Set Screw Collar
Ø6.35 / 3.18
6.4
Flexible Coupling
Ø19.0
Price £
M-SC-025
Mitre & Bevel Gear
17.4
152.4/6.35
Part Code
Universal joint to suit 6.35mm (¼”) &
3.18mm (⅛”) dia shafts. Up to 30° angular displacement. Has 2 x 6-32 set
screws.
Ø12.7
Precision Ground Shaft
Ø6.35 / 3.18
€194
Universal Joint
19.1
Price €
£138
Sleeve coupling to suit 6.35mm (¼”)
& 3.18mm (⅛”) dia shafts. Has 2 x
6-32 set screws.
Ø12.7 / 7.9
Ø6.35 (¼”)
Price £
€177
M-BELC-0125
Sleeve Coupling
Ø6.35 / 3.18
Part Code
Price €
£126
Bellows coupling to suit 6.35mm (¼”)
& 3.18mm (⅛”) dia shafts. Has 6-32
set screws. Max torque = 0.35Nm.
Max angle = 5°
Linear Bearing
Part Code
Price £
M-BELC-025
Ø12.7 / 7.9
Collar to suit 6.35mm (¼”) & 3.18mm
(⅛”) dia shafts. Often used as an end
stop. Has 1 x 6-32 set screw.
Flexible coupling to suit 6.35mm (¼”)
dia. shafts.
Max torque = 0.35Nm.
Max angle = 5°
8.21
8.20
SECTION 8.4 SAMPLE MANIPULATION, TRANSFER AND TRANSPORT
Wobblesticks
Specifications:
Wobblestick - CF flange
Materials
Rod & flanges
St.St.
Bellows
AM350 St.St.
Flange
Angular
Deflection
Linear
Travel
DN16CF
±22°
12.7
DN40CF
±30°
25.4
Part Code
Price £
Price €
M-WS12-16CF
£198
€278
M-WS25-40CF
£185
€259
Price £
Price €
Vacuum Range
CF flanged
atm to 1x10-11mbar
KF flanged
atm to 1x10-8mbar
Temperature Range*
CF flanged
up to 250°C
KF flanged
up to 150°C
Load
Axial2.2kg
Lateral
Features:
2.2kg at 50mm extension
rated component.
• 12.7mm or 25.4mm linear travel.
• 44° or 60° angular motion.
69.8 min
82.5 max
22°
127.0 min
152.4 max
DN16CF
Linear
Travel
A
B
Part Code
DN16KF
±22°
12.7
69.8 - 82.5
69.8 - 82.5
M-WS12-16KF
£192
€269
DN40KF
±22°
12.7
82.5 - 95.3
57.2 - 69.8
M-WS12-40KF
£207
€290
DN40KF
±30°
25.4
-
-
M-WS25-40KF
£216
€303
50.8
DN40CF
69.8 min
82.5 max
76.2 min
101.6 max
Ø3.2
69.8 min
38.1
82.5max
DN16/40KF
Angular
Deflection
Ø6.4
30°
38.1
22°
Flange
76.2 min
101.6 max
Ø3.2
69.8 min
82.5max
Wobblestick - KF flange
Ø6.4
30°
127.0 min
152.4 max
50.4
DN40KF
8.23
8.22
Magnetically Coupled Wobblesticks Single Shaft
Specifications:
Single Shaft Wobblestick
Materials
All UHV compatible
Vacuum Range
CF flanged
atm to 1x10-11mbar
Temperature Range*
CF flanged
-196 to 150°C
Linear force, single shaft
Torque, single shaft
30N typical
0.5Nm typical
Angular Deflection
•
•
•
•
•
•
•
Standard version
±20°
Wide Angle -WA version
±28°
Magnetically coupled.
Rotatable shaft.
Forks available.
Standard or custom lengths available.
Choice of angular deflection.
High linear force and torque rated.
DN40CF
1
±20°
100
DN40CF
1
±20°
150
DN40CF
1
±20°
DN40CF
1
±20°
DN40CF
1
DN40CF
1
Price £
Price €
M-WM40-100
POA
POA
M-WM40-150
POA
POA
200
M-WM40-200
POA
POA
250
M-WM40-250
POA
POA
±20°
300
M-WM40-300
POA
POA
±20°
X/Y
M-WM40-X-Y
POA
POA
M-WM-TS
POA
POA
M-WM-TSIL
POA
POA
Part Code
Price £
Price €
External support for wobblestick - straddled bolt holes
Part Code
Single Shaft Wide Angle Wobblestick
Flange
Fig.
Angular
Deflection
Linear Travel (X)
/ Shaft (Y)
DN40CF
2
±28°
100
M-WM40-WA-100
POA
POA
DN40CF
2
±28°
150
M-WM40-WA-150
POA
POA
DN40CF
2
±28°
200
M-WM40-WA-200
POA
POA
DN40CF
2
±28°
250
M-WM40-WA-250
POA
POA
DN40CF
2
±28°
300
M-WM40-WA-300
POA
POA
DN40CF
2
±28°
X/Y
M-WM40-WA-X-Y
POA
POA
M-WM-TS
POA
POA
M-WM-TSIL
POA
POA
Please note: External support for wobble stick must be ordered separately.
Pincer Grips & Accessories
Y
In addition to the above range of wobblesticks, we also offer a wide range of standard pincer
grips, forks, other accessories and spare parts to suit. Pincer grips are available in many designs,
including drop-in replacements for Omicron style pincers.
For further information and pricing, please contact our sales office.
Y standard = 60
Y minimum = 42
13
Ø35
Shaft end detail
14.5
M4
M4
6
25
2.5
8
R2
2.5
±20°
X + 80.6
Linear Travel (X)
/ Shaft (Y)
External support for wobblestick - in-lne bolt holes
Linear travel, X
X + 5.6
Angular
Deflection
rated component.
Fig. 1
Fig.
External support for wobblestick - in-line bolt holes
Load
Features:
Flange
Ø7
42
Fig. 2
Linear travel, X
Y standard = 74
Y minimum = 56
Y
13
Shaft end detail
Ø35
±20°
X + 16.6
X + 91.6
14.5
R2
39
56
8
6
Ø7
8.25
8.24
Magnetically Coupled Wobblesticks Dual Shaft
Specifications:
Dual Shaft Wobblestick
Materials
All UHV compatible
Vacuum Range
CF flanged
atm to 1x10-11mbar
Temperature Range*
CF flanged
-196 to 150°C
•
•
•
•
•
•
•
30N typical
Linear force, dual shaft
23N typical
0.5Nm typical
Torque, dual shaft
0.4Nm typical
Angular Deflection
Rotatable shafts.
Pincer grip and forks available.
Standard version
±20°
±28°
Angular
Deflection
Linear Travel
Price £
Price €
DN40CF
1
±20°
100
DN40CF
1
±20°
150
M-WMG40-100
POA
POA
M-WMG40-150
POA
POA
DN40CF
1
±20°
DN40CF
1
±20°
200
M-WMG40-200
POA
POA
250
M-WMG40-250
POA
DN40CF
1
POA
±20°
300
M-WMG40-300
POA
DN40CF
1
POA
±20°
X
M-WMG40-X-Y
POA
POA
M-WM-TS
POA
POA
M-WM-TSIL
POA
POA
Part Code
Price £
Price €
Please note, that the pictured pincer grip is
not included in the standard price shown
Part Code
Dual Shaft Wide Angle Wobblestick
Flange
Fig.
Angular
Deflection
Linear Travel
DN40CF
2
±28°
100
M-WMG40-WA-100
POA
POA
DN40CF
2
±28°
150
M-WMG40-WA-150
POA
POA
DN40CF
2
±28°
200
M-WMG40-WA-200
POA
POA
DN40CF
2
±28°
250
M-WMG40-WA-250
POA
POA
DN40CF
2
±28°
300
M-WMG40-WA-300
POA
POA
DN40CF
2
±28°
X
M-WMG40-WA-X-Y
POA
POA
M-WM-TS
POA
POA
M-WM-TSIL
POA
POA
rated component.
Fig. 1
±20°
2.8
13
Ø35
Linear travel, X
Ø6.8
Ø7 h6
Y
X + 115.6
Ø3 h6
Y standard / Minimum = 63
86
Fig.
Load
Features:
Flange
4
3
Ø50
X + 50
25
7
17
3
Shown with external support
Shaft end detail
Fig. 2
86
Y
Linear travel, X
11
56
±28°
Ø35
X + 121.6
Shaft end detail
39
9
3
2.8
Ø3 h6
39
Ø6.8
Ø7 h6
Ø50
Ø20
4
8.27
8.26
Magnetically Coupled Wobblesticks Dual Shaft, High Precision Actuator
Specifications:
Dual Shaft Wobblestick, High Precision Actuator
Materials
All UHV compatible
Vacuum Range
CF flanged
atm to 1x10-11mbar
Temperature Range*
CF flanged
-196 to 150°C
Load
Features:
•
•
•
•
•
•
•
30N typical
Linear force, dual shaft
23N typical
0.5Nm typical
Torque, dual shaft
0.4Nm typical
Standard version
±20°
±28°
Please note, that the pictured pincer grip is
not included in the standard price shown
X + 115.6
Y
42
Ø35
5
Linear Travel
DN40CF
1
±20°
100
DN40CF
1
±20°
150
DN40CF
1
±20°
DN40CF
1
±20°
DN40CF
1
DN40CF
1
Price £
Price €
M-WMGHP40-100
POA
POA
M-WMGHP40-150
POA
POA
200
M-WMGHP40-200
POA
POA
250
M-WMGHP40-250
POA
POA
±20°
300
M-WMGHP40-300
POA
POA
±20°
X/Y
M-WMGHP40-X-Y
POA
POA
M-WM-TS
POA
POA
M-WM-TSIL
POA
POA
Part Code
Dual Shaft Wide Angle Wobblestick, High Precision Actuator
Flange
Fig.
Angular
Deflection
Linear Travel
DN40CF
2
±28°
100
DN40CF
2
±28°
150
DN40CF
2
±28°
DN40CF
2
DN40CF
2
DN40CF
2
Price £
Price €
M-WMGHP40-WA-100
POA
POA
M-WMGHP40-WA-150
POA
POA
200
M-WMGHP40-WA-200
POA
POA
±28°
250
M-WMGHP40-WA-250
POA
POA
±28°
300
M-WMGHP40-WA-300
POA
POA
±28°
X/Y
M-WMGHP40-WA-X-Y
POA
POA
M-WM-TS
POA
POA
M-WM-TSIL
POA
POA
Part Code
Fig. 1
Linear travel, X
Angular
Deflection
rated component.
83
Fig.
Angular Deflection
Rotatable shafts.
Pincer grip and forks available.
Flange
25
12
9
3
±20°
4
Ø3 h6
13
2.8
Ø20
3
Ø7
Ø32
Shaft end detail
Fig. 2
X + 121.6
Y
Linear travel, X
5
56
39
Shaft end detail
Ø35
83
12
9
3
±28°
4
Ø3 h6
2.8
3
Ø7
11
Ø20
Ø32
8.29
8.28
Combined Linear & Rotary Motion
Specifications:
Single Shaft Transporter
Materials
All UHV compatible
Vacuum Range
CF flanged
atm to 1x10-11mbar
Temperature Range
*
CF flanged
-196 to 150°C
Load
Linear force, MD version
30N typical
Linear force, MDG version
23N typical
Linear force, GMD version
70N
Linear force, RMD version
70N
Fig.
Tube OD
Linear travel
Price £
Price €
1
11
100
Part Code
M-MD16-100
POA
POA
DN16CF
1
11
200
M-MD16-200
POA
POA
DN16CF
1
11
300
M-MD16-300
POA
POA
DN16CF
1
11
400
M-MD16-400
POA
POA
DN16CF
1
11
X
M-MD16-X
POA
POA
DN40CF
1
11
100
M-MD40-100
POA
POA
DN40CF
1
11
200
M-MD40-200
POA
POA
DN40CF
1
11
300
M-MD40-300
POA
POA
DN40CF
1
11
400
M-MD40-400
POA
POA
DN40CF
1
11
X
M-MD40-X
POA
POA
DN40CF
2
40
500
M-RM40-500-30
POA
POA
DN40CF
2
40
750
M-RM40-750-30
POA
POA
DN40CF
2
40
1000
M-RM40-1000-30
POA
POA
DN40CF
2
40
1250
M-RM40-1250-30
POA
POA
DN40CF
2
40
X
M-GMD40-X-Y
POA
POA
M-TSMD40-X
POA
POA
M-TSMD40-X-RL
POA
POA
Price £
Price €
Features:
Linear force, RMDG version
Torque, MD version
0.5Nm typical
•
•
•
•
•
•
•
Torque, MDG version
0.4Nm typical
Torque, GMD version
5Nm
Torque, RMD version
5Nm
Flange
Fig.
Tube OD
Linear travel
DN40CF
3
11
275
M-MDG40-275-OM
POA
POA
Torque, RMDG version
5Nm
DN40CF
3
11
325
M-MDG40-325-OM
POA
POA
DN40CF
3
11
375
M-MDG40-375-OM
POA
POA
DN40CF
3
11
425
M-MDG40-425-OM
POA
POA
DN40CF
3
11
X
M-MDG40-X-Y
POA
POA
Fixed or rotatable shafts.
Pincer grip or forks available.
Position locks.
Retracted Shaft Length
rated component.
Dual shaft
50mm
55
7
Adjustable stop ring
22
A
10
8
X +120mm
X
60
12.7
Y
53
Ø60
Linear travel
Fig 2
Ø40
10
30mm
Fig 1
Ø11
Ø23.7
Ø26
8 g6
m4
M4
Detail A
Single shaft
12 h6
8
2 x 70N
Flange
DN16CF
Ø8
Section A-A
A
Support & rotary lock for M-MD40-XXX
Dual Shaft Transporter
Part Code
DN40CF
3
11
X
M-MDG40-X-Y-OM
POA
POA
DN40CF
4
40
400
M-RMD40-400-50
POA
POA
DN40CF
4
40
500
M-RMD40-500-50
POA
POA
DN40CF
4
40
750
M-RMD40-750-50
POA
POA
DN40CF
4
40
1000
M-RMD40-1000-50
POA
POA
M-RMD40-X-Y
POA
POA
M-RMDG40-400-50*
POA
POA
M-RMDG40-X-Y*
POA
POA
M-ZDRV-RMD(G)-X
POA
POA
DN40CF
4
40
X
DN40CF
5
40
400
DN40CF
5
40
X
Linear drive for M-RMD(G)40
A
5
27
Support for M-MD40-XXX
Linear travel + 84mm
91
Linear travel +114mm
Linear travel - X
In addition to the above range, we also offer a wide range of standard pincer grips, forks, other
accessories and spare parts to suit. Pincer grips are available in many designs, including drop-in
replacements for Omicron style pincers.
Y
9 - 15
Ø7
Linear travel +173mm
X
Y >=40
Y-13
11
Ø40
Ø60
Ø40
Ø60
Fig 4
Y
67
Ø6.35
15 x 15
67
Ø6.35
15 x 15
Linear travel + 120mm
Linear travel - X
Ø3
Ø32
Fig 3
Fig 5
* - Both inner and outer shafts are independantly rotatable
8.31
8.30
Fast Entry Load Locks
Specifications:
Fast Entry Load Lock Chamber
Mounting
Flange
Materials
BodySt.St.
Seal
Viton o-ring
Vacuum Range
-20 to 150°C
M-KS40
POA
POA
DN63CF
M-KS63
POA
POA
DN100CF
M-KS-100
POA
POA
DN40CF
M-KSTL40-63
POA
POA
DN63CF
M-KSWM63-63
POA
POA
Mounting
Flange
Linear travel
DN40CF
250
DN40CF
DN40CF
• Fast sample transfer from atmosphere to
UHV.
• Choice of mounting flange sizes.
• O-ring sealed door.
• Magnetically coupled linear / rotary
transfer arm.
• Vertical or horizontal mount.
• Custom sizes available on request.
rated component.
KS-63
Price €
Fast Entry Load Lock Chamber With Manipulator
Features:
KS-40
Price £
DN40CF
atm to 1x10-8mbar
Temperature Range*
Part Code
Part Code
Price £
Price €
M-KS40-MD16-250
POA
POA
300
M-KS40-MD16-300
POA
POA
350
M-KS40-MD16-350
POA
POA
DN40CF
400
M-KS40-MD16-400
POA
POA
DN40CF
450
M-KS40-MD16-450
POA
POA
DN40CF
X
M-KS40-MD16-X
POA
POA
DN63CF
250
M-KS63-MD16-250
POA
POA
DN63CF
300
M-KS63-MD16-300
POA
POA
DN63CF
350
M-KS63-MD16-350
POA
POA
DN63CF
400
M-KS63-MD16-400
POA
POA
DN63CF
450
M-KS63-MD16-450
POA
POA
DN63CF
X
M-KS63-MD16-X
POA
POA
DN100CF
250
M-KS100-MD16-250
POA
POA
DN100CF
300
M-KS100-MD16-300
POA
POA
DN100CF
350
M-KS100-MD16-350
POA
POA
DN100CF
400
M-KS100-MD16-400
POA
POA
DN100CF
450
M-KS100-MD16-450
POA
POA
DN100CF
X
M-KS100-MD16-X
POA
POA
KSC-100
8.33
8.32
SECTION 8.5 X-Y-Z TRANSLATORS
Compact & Mini Z Translators
Specifications:
With Rotatable Flanges
Materials
Bellow & flanges
St.St.
Mounting brackets
Anodised Al
Lead screw
St.St.
Bushing
Bearing bronze
Vacuum Range
CF flanged
atm to 1x10-11mbar
Flange
Stroke
Comp
H
DN16CF
25.4
62.5
131.1
M-CZ25R-16CF
POA
POA
DN16CF
50.8
75.2
169.2
M-CZ50R-16CF
POA
POA
Price £
Price €
DN16CF
76.2
87.4
206.8
M-CZ76R-16CF
POA
POA
DN16CF
101.6
100.1
244.9
M-CZ101R-16CF
POA
POA
DN16CF
152.4
124.5
320.1
M-CZ152R-16CF
POA
POA
Price £
Price €
Mini Z - With Fixed Flanges
Description
Temperature Range*
CF flanged
Part Code
-20 to 210°C
Part Code
Mini Z translator 25mm stroke 14mm bore DN16CF
M-MZ25-16CF
£521
€730
Mini Z translator 48mm stroke 14mm bore DN16CF
M-MZ48-16CF
£788
€1104
rated component.
(Photo shows special version with special micrometer in
place of standard hand wheel).
Features:
(Details on facing page do not apply to the Mini Z
translators).
45.7
15.7mm bore
• UHV compatible construction with edge
welded bellows.
• Bakeable to 230°C.
• 25mm or 48mm travel.
• Tapped flanges.
99.1
29.0 - 54.0
35.3 - 83.5
34.0
52.0
0
10
20
30
40
50
Comp
Stroke
This range of DN16CF Z translators has
cantilevered flange supports with wrap
around flange brackets (see drawing). A total
of six locking screws (three for each flange)
hold the flanges within the brackets. The
advantage of this design is that these screws
can be loosened, even while the translator
is installed, and the actuator portion of
the translator can be repositioned radially
around the flange. This allows positioning of
the translator to clear other equipment. The
guide rods and actuation screw are set back
from the flange to give maximum access to
the flange bolts. Despite their modest price,
these will provide years of trouble-free
service, especially if the simple maintenance
is performed. Bearings are lubricated with
MoS2 grease for low friction and long life. All
parts are field replaceable. All translators
are also available with long strokes, motor
drives, linear encoders, tapped flanges and
special height.
Standard specifications are shown here,
special versions can be made to suit your
individual requirements.
information.
99.1
8.35
8.34
Compact Z Translators
Specifications:
With Rotatable Flanges
Materials
Bellow & flanges
St.St.
Mounting brackets
Anodised Al
Lead screw
St.St.
Bushing
Bearing bronze
Flange
Stroke
Comp
DN40CF
50.8
63.5
M-CZ50R-40CF
Part Code
Price £
POA
Price €
POA
DN40CF
76.2
69.9
M-CZ76R-40CF
POA
POA
DN40CF
101.6
76.2
M-CZ101R-40CF
POA
POA
DN40CF
152.4
88.9
M-CZ152R-40CF
POA
POA
DN40CF
203.2
101.6
M-CZ203R-40CF
POA
POA
Vacuum Range
CF flanged
atm to 1x10-11mbar
Temperature Range*
CF flanged
-20 to 210°C
rated component.
cantilevered flange supports with wraparound flange brackets (see drawing).
A total of six locking screws (three for
each flange) hold the flanges within the
brackets. The advantage of this design is
that these screws can be loosened, even
while the translator is installed, and the
actuator portion of the translator can be
repositioned radially around the flange. This
allows positioning of the translator to clear
equipment. The guide rods and actuation
screw are set back from the flange to give
maximum access to the flange bolts. Despite
their modest price, these will provide years
of trouble-free service, especially if the
simple maintenance is performed. The ball
bearings are lubricated with MoS2 grease for
low friction and long life. All parts are field
replaceable. All translators are also available
with long strokes, micrometer actuation,
tapped flanges and special height.
information.
95.3
38.3mm bore
104.9
47.7
Comp
Stroke
47.8
152.6
8.37
8.36
Specifications:
With Fixed Flanges
Materials
Bellow & flanges
St.St.
Mounting brackets
Anodised Al
Lead screw
St.St
Bushing
Bearing bronze
Vacuum Range
CF flanged
atm to 1x10-11mbar
Temperature Range
*
CF flanged
Flange
Stroke
Comp
Price £
Price €
DN40CF
50.8
63.5
Part Code
M-CZ50-40CF
POA
POA
DN40CF
76.2
69.9
M-CZ76-40CF
POA
POA
DN40CF
101.6
76.2
M-CZ101-40CF
POA
POA
DN40CF
152.4
88.9
M-CZ152-40CF
POA
POA
DN40CF
203.2
101.6
M-CZ203-40CF
POA
POA
DN40CF
254.0
114.3
M-CZ254-40CF
POA
POA
DN40CF
304.8
127.0
M-CZ304-40CF
POA
POA
DN40CF
406.4
152.4
M-CZ406-40CF
POA
POA
DN40CF
508.0
177.8
M-CZ508-40CF
POA
POA
DN40CF
609.6
203.2
M-CZ609-40CF
POA
POA
-20 to 210°C
rated component.
cantilever brackets (see drawing) bolted to
the side of the flange. The advantage here is
that the cantilever brackets leave 75% of the
circumference of the flange unobstructed.
This allows the translator to be mounted in
very close quarters without interfering with
other, nearby flanges.
The bottom (or fixed) flange of the translator
is available with an optional 12-hole pattern
for further flexibility. Since the actuator
cannot be repositioned relative to the bolt
holes, the 12-hole feature allows the user
more options in mounting orientation.
Despite the modest price, these translators
will provide years of trouble-free service,
especially if the simple maintenance is
performed.
All Z translator lead screws use ball bearings.
The lead screws are dry lubricated with bakedon molybdenum disulphide and the bearings
are lubricated with molybdenum disulphide
grease for low friction and long life. All parts
are field replaceable, including the bellows.
All translators are also available with long
strokes, motor drives, linear encoders,
tapped flanges and special heights.
information.
70.0
69.9
143.0
38.8mm bore
35.0
Comp
Stroke
46.0
178.0
8.39
8.38
Specifications:
With Fixed Flanges
Materials
Bellow & flanges
St.St.
Mounting brackets
Anodised Al
Lead screw
St.St.
Bushing
Bearing bronze
Vacuum Range
CF flanged
atm to 1x10-11mbar
Flange
Stroke
Comp
Price £
Price €
DN63CF
50.8
73.7
Part Code
M-CZ50-63CF
POA
POA
DN63CF
76.2
81.3
M-CZ76-63CF
POA
POA
DN63CF
101.6
88.9
M-CZ101-63CF
POA
POA
DN63CF
152.4
96.5
M-CZ152-63CF
POA
POA
DN63CF
203.2
109.2
M-CZ203-63CF
POA
POA
DN63CF
304.8
129.5
M-CZ304-63CF
POA
POA
DN63CF
406.4
149.9
M-CZ406-63CF
POA
POA
DN63CF
508.0
190.5
M-CZ508-63CF
POA
POA
Temperature Range*
CF flanged
-20 to 210°C
rated component.
73.2
113.5
cantilever brackets (see drawing) bolted to
the side of the flange. The advantage here is
that the cantilever brackets leave 75% of the
circumference of the flange unobstructed.
This allows the translator to mount in very
close quarters without interfering with other,
nearby flanges.
The bottom (or fixed) flange of the translator
is available with an optional 16-hole pattern
for further flexibility. Since the actuator
cannot be repositioned relative to the bolt
holes, the 16-hole feature allows the user
more options in mounting orientation.
Despite the modest price, these translators
will provide years of trouble-free service,
especially if the simple maintenance is
performed.
All Z translator lead screws use ball bearings.
The lead screws are dry lubricated with bakedon molybdenum disulphide and the bearings
are lubricated with molybdenum disulphide
grease for low friction and long life. All parts
are field replaceable, including the bellows.
information.
201.7
57.0
65.0
Comp
Stroke
72.9mm bore
258.7
8.41
8.40
Z Translators
The lower flange can be fitted with support
guides for long sample probes. This
significantly reduces sag and vibrations in
things like long, slim LN2 dewars, sample
holders and intro rods. The support
bearings are vented and allow clearance for
thermocouple and power wires.
Options include both stepper motors and
DC motors. Both motor options include limit
switches. The DC motor option includes
a hand held forward/reverse switch and a
variable speed control. These Z translators
have been designed to allow motors to be
easily added in the field, thereby avoiding
time consuming and costly factory returns.
information.
These Z translators can be used either
as a stand-alone Z axis translator or in
combination with an XY platform to produce
a long travel XYZ manipulator that is both
rigid and cost effective. Despite their modest
price, these Z translators will provide years
simple maintenance is performed.
These Z translators feature precision ground
guide rods that are fully supported the
entire length of travel. This feature is not
found on many other brands. This provides
even greater stability and rigidity, especially
on long travel models. Z translators with
strokes of up to 152cm (60”) are available,
and can be mounted either horizontally or
vertically.
With DN63CF Base Flange & DN40CF Top Flange
Stroke
Comp
A
Price £
Price €
152.4
63.5
57.0
M-Z152-63/40CF
POA
POA
203.2
73.7
57.0
M-Z203-63/40CF
POA
POA
304.8
94.0
57.0
M-Z304-63/40CF
POA
POA
406.4
114.3
57.0
M-Z406-63/40CF
POA
POA
508.0
134.6
57.0
M-Z508-63/40CF
POA
POA
609.6
157.5
57.0
M-Z609-63/40CF
POA
POA
762.0
185.4
57.0
M-Z762-63/40CF
POA
POA
914.4
215.9
57.0
M-Z914-63/40CF
POA
POA
Stroke
Comp
A
Price £
Price €
152.4
63.5
76.0
M-Z152-100/40CF
POA
POA
203.2
73.7
76.0
M-Z203-100/40CF
POA
POA
304.8
94.0
76.0
M-Z304-100/40CF
POA
POA
406.4
114.3
76.0
M-Z406-100/40CF
POA
POA
508.0
134.6
76.0
M-Z508-100/40CF
POA
POA
609.6
157.5
76.0
M-Z609-100/40CF
POA
POA
762.0
185.4
76.0
M-Z762-100/40CF
POA
POA
914.4
215.9
76.0
M-Z914-100/40CF
POA
POA
Specifications:
Materials
Bellow & flanges
Part Code
Part Code
St.St.
Mounting brackets
Anodised Al
Lead screw
St.St.
Bushing
Bearing bronze
165.1
Vacuum Range
CF flanged
atm to 1x10-11mbar
Temperature Range*
CF flanged
-20 to 210°C
rated component.
38.1mm bore
With DN40CF Base & Top Flanges
Comp
A
152.4
63.5
35.0
203.2
73.7
35.0
304.8
94.0
406.4
Part Code
Price £
Price €
M-Z152-40/40CF
POA
POA
M-Z203-40/40CF
POA
POA
35.0
M-Z304-40/40CF
POA
POA
114.3
35.0
M-Z406-40/40CF
POA
POA
508.0
134.6
35.0
M-Z508-40/40CF
POA
POA
609.6
157.5
35.0
M-Z609-40/40CF
POA
POA
762.0
185.4
35.0
M-Z762-40/40CF
POA
POA
914.4
215.9
35.0
M-Z914-40/40CF
POA
POA
Comp
Stroke
Stroke
87.9
A
151.4
8.43
8.42
Z Translators
Specifications:
Materials
Bellow & flanges
St.St.
Mounting brackets
Anodised Al
Lead screw
St.St.
Bushing
Bearing bronze
Vacuum Range
CF flanged
atm to 1x10-11mbar
Temperature Range*
CF flanged
Comp
A
Price £
Price €
152.4
73.7
57.0
Part Code
M-Z152-63/63CF
POA
POA
203.2
81.3
57.0
M-Z203-63/63CF
POA
POA
304.8
99.1
57.0
M-Z304-63/63CF
POA
POA
406.4
119.4
57.0
M-Z406-63/63CF
POA
POA
508.0
139.7
57.0
M-Z508-63/63CF
POA
POA
609.6
160.0
57.0
M-Z609-63/63CF
POA
POA
762.0
190.5
57.0
M-Z762-63/63CF
POA
POA
914.4
221.0
57.0
M-Z914-63/63CF
POA
POA
-20 to 210°C
rated component.
as a stand-alone Z Axis translator or in
vertically.
information.
Stroke
Stroke
Comp
A
Price £
Price €
152.4
73.7
76.0
Part Code
M-Z152-100/63CF
POA
POA
203.2
81.3
76.0
M-Z203-100/63CF
POA
POA
304.8
99.1
76.0
M-Z304-100/63CF
POA
POA
406.4
119.4
76.0
M-Z406-100/63CF
POA
POA
508.0
139.7
76.0
M-Z508-100/63CF
POA
POA
609.6
160.0
76.0
M-Z609-100/63CF
POA
POA
762.0
190.5
76.0
M-Z762-100/63CF
POA
POA
914.4
221.0
76.0
M-Z914-100/63CF
POA
POA
165.1
87.4
Comp
Stroke
72.9mm bore
A
151.6
8.45
8.44
Z Translators
Specifications:
Materials
Bellow & flanges
St.St.
Mounting brackets
Anodised Al
Lead screw
St.St.
Bushing
Bearing bronze
Vacuum Range
CF flanged
atm to 1x10-11mbar
Temperature Range*
CF flanged
Comp
A
Price £
Price €
152.4
185.4
76.0
Part Code
M-Z152-100/100CF
POA
POA
203.2
185.4
76.0
M-Z203-100/100CF
POA
POA
304.8
185.4
76.0
M-Z304-100/100CF
POA
POA
406.4
185.4
76.0
M-Z406-100/100CF
POA
POA
508.0
190.5
76.0
M-Z508-100/100CF
POA
POA
609.6
213.4
76.0
M-Z609-100/100CF
POA
POA
762.0
251.5
76.0
M-Z762-100/100CF
POA
POA
914.4
289.6
76.0
M-Z914-100/100CF
POA
POA
-20 to 210°C
rated component.
as a stand-alone Z Axis translator or in
vertically.
information.
Stroke
Stroke
Comp
A
Price £
Price €
152.4
185.4
101.6
M-Z152-160/100CF
POA
POA
203.2
185.4
101.6
M-Z203-160/100CF
POA
POA
304.8
185.4
101.6
M-Z304-160/100CF
POA
POA
406.4
185.4
101.6
M-Z406-160/100CF
POA
POA
508.0
190.5
101.6
M-Z508-160/100CF
POA
POA
609.6
213.4
101.6
M-Z609-160/100CF
POA
POA
762.0
251.5
101.6
M-Z762-160/100CF
POA
POA
914.4
289.6
101.6
M-Z914-160/100CF
POA
POA
254.0
Part Code
272.8
101.6mm bore
Comp
Stroke
114.3
A
190.5
8.47
8.46
Heavy Duty Z Translators
Specifications:
With DN40CF Flanges
Materials
St.St.
Anodised Al
Lead screw
St.St.
Bushing
Bearing bronze
Vacuum Range
CF flanged
atm to 1x10-11mbar
-20 to 210°C
rated component.
Despite its modest price, these heavy duty Z
translators will provide years of trouble-free
service, especially if simple maintenance is
performed. Due to the three jacking-screw
pattern (see drawing), these Z translators
provide the maximum rigidity of any
translator on the market and is capable of
holding axial loads in excess of 68 kilograms
with no deflection problems. A total of six
locking screws (three for each flange)
hold the flanges within the brackets. The
advantage of this design is that the screws
can be loosened, even while the translator
is installed, and the actuator portion of
the translator can be repositioned radially
around the flange. This feature allows repositioning of the mechanism to clear other
equipment.
information.
Price £
Price €
63.5
Part Code
M-HDZ50-40CF
POA
POA
1
76.2
69.9
M-HDZ76-40CF
POA
POA
1
101.6
76.2
M-HDZ101-40CF
POA
POA
1
152.4
88.9
M-HDZ152-40CF
POA
POA
1
203.2
101.6
M-HDZ203-40CF
POA
POA
Fig.
Stroke
Comp
Part Code
Price £
Price €
2
50.8
73.7
M-HDZ50-63CF
POA
POA
2
76.2
81.3
M-HDZ76-63CF
POA
POA
2
101.6
86.4
M-HDZ101-63CF
POA
POA
2
152.4
96.5
M-HDZ152-63CF
POA
POA
2
203.2
109.2
M-HDZ203-63CF
POA
POA
With DN63CF Flanges
Temperature Range*
CF flanged
Comp
50.8
Fig. 1.
Fig. 2.
110.0
70.4
44.7
38.1mm bore
66.2
63.5
Comp
Stroke
72.9mm bore
98.3
Stroke
Mounting brackets
Stroke
1
Comp
Bellow & flanges
Fig.
8.49
8.48
Heavy Duty Z Translators
Specifications:
With DN100CF Flanges
Materials
Bellow & flanges
St.St.
Mounting brackets
Anodised Al
Lead screw
St.St.
Bushing
Bearing bronze
Vacuum Range
CF flanged
atm to 1x10-11mbar
-20 to 210°C
rated component.
Despite its modest price, these heavy duty Z
translators will provide years of trouble-free
service, especially if the simple maintenance
is performed. These Z translators use double
ball bearings on the jacking screws. The
screws and bearings are lubricated with
MoS2 for low friction and long life. All parts
are field replaceable. The traveling flange
is supported by three jacking screws and
aligned by three guide rods (see drawing).
These Z translators need only minimal
maintenance. The linear bearings are bronze,
and the guide rods need only be kept lightly
lubricated and free from dirt, dust and
debris. The jacking screws and bearings do,
however, need periodic lubrication. Standard
specifications are shown here, special
versions can be made to suit your individual
requirements.
information.
Stroke
Comp
Price £
Price €
1
50.8
86.4
Part Code
M-HDZ50-100CF
POA
POA
1
76.2
90.2
M-HDZ76-100CF
POA
POA
1
101.6
94.0
M-HDZ101-100CF
POA
POA
1
152.4
101.6
M-HDZ152-100CF
POA
POA
1
203.2
109.2
M-HDZ203-100CF
POA
POA
1
254.0
116.8
M-HDZ254-100CF
POA
POA
Fig.
Stroke
Comp
Part Code
Price £
Price €
2
50.8
82.6
M-HDZ50-160CF
POA
POA
2
76.2
88.9
M-HDZ76-160CF
POA
POA
2
101.6
95.3
M-HDZ101-160CF
POA
POA
2
152.4
108.0
M-HDZ152-160CF
POA
POA
2
203.2
120.7
M-HDZ203-160CF
POA
POA
2
254.0
133.4
M-HDZ254-160CF
POA
POA
2
304.8
146.1
M-HDZ304-160CF
POA
POA
Fig.
Stroke
Comp
Part Code
Price £
Price €
3
50.8
91.4
M-HDZ50-200CF
POA
POA
3
76.2
95.5
M-HDZ76-200CF
POA
POA
3
101.6
99.8
M-HDZ101-200CF
POA
POA
3
152.4
108.2
M-HDZ152-200CF
POA
POA
3
203.2
116.6
M-HDZ203-200CF
POA
POA
3
254.0
125.0
M-HDZ254-200CF
POA
POA
3
304.8
133.4
M-HDZ304-200CF
POA
POA
Temperature Range*
CF flanged
Fig.
Fig. 1.
Fig. 2.
Fig. 3
131.6
354.3
137.4
199.8mm bore
101.6mm bore
232.9
Comp
Comp
Comp
Stroke
Stroke
374.9
Stroke
149.4mm bore
275.9
8.51
8.50
Precision X-Y Manipulator Stages
available.
information.
With DN40CF Flanges
X-Y
Travel
Clear
ID
A
B
C
H
±12.7
38.0
202.7
129.5
267.5
114.3
Part Code
M-XY12-38-40CF
Price £
Price €
POA
POA
H distance shown in the table is based on the stage having tapped flanges top & bottom.
Clearance flanges available if required, please call sales office for further details.
Specifications:
Materials
Bellow & flanges
St.St.
Mounting brackets
Anodised Al
With DN63CF Flanges
BearingsSt.St.
Resolution
With small micrometers (standard) >10µm
With large micrometers
Our range of X-Y stages combine extremely
high rigidity, a large working bore and
affordable cost. They are available in both
± 25.4mm (± 1 inch) and ± 12.7mm (±
1/2 inch) travel, circular pattern, with both
manual and stepper motorized versions.
In fact, conversion from micrometers to
stepper motors can be done in 15 minutes at
the user’s site. Both sizes have features not
found on translators available elsewhere,
such as tilt adjustment on the top flange as
standard.
One distinct advantage of these stages is the
cost savings when long Z axis strokes are
required. Since only the bellows in the XY
portion needs to be larger than the probe,
the user can extend the Z axis stroke using
a smaller diameter (less costly) bellows that
just clears the probe running through it.
Simply select the model from the tables that
best suits your needs.
For horizontal mounting, i.e., with the
flange faces vertical, dual constant force
counterbalance springs are available that
compensate for gravitational loads. If
required, this feature can be added in the
field, after the user accurately determines
the weight of the devices to be mounted.
To make your selection, add the total travel
required in either the X or Y axis to the
maximum diameter of the device that will
pass through the stage. This sum determines
the minimum bellows inside diameter (clear
ID).
Next, select the bottom flange that best
mates to your chamber or other equipment.
While the most common size is DN100CF,
either tapped or non-tapped flange sizes of
DN63CF, DN100CF, DN160CF and larger are
X-Y
Travel
Clear
ID
A
B
C
H
±12.7
72.0
226.8
182.6
316.2
117.4
±25.4
72.0
297.4
208.0
401.4
142.7
Part Code
Price £
Price €
M-XY12-72-63CF
POA
POA
M-XY25-72-63CF
POA
POA
>2.5µm
Repeatability
>1.25µm
Vacuum Range
CF flanged
A
atm to 1x10-11mbar
Temperature Range*
CF flanged
-20 to 210°C
rated component.
C
Options:
• DN40CF versions also available.
• Clearance hole flanges available on both top
& bottom flanges, (Height, H increases).
• Large micrometers.
• Stepper motor actuation.
• Horizontal mount kit.
• Additional axis.
Clear ID
H
B
8.53
8.52
Precision X-Y Manipulator Stages
available.
information.
X-Y
Travel
Specifications:
Materials
Bellow & flanges
St.St.
Mounting brackets
Anodised Al
B
C
H
Part Code
Price £
Price €
±12.7
72.0
253.5
242.3
374.7
120.7
M-XY12-72-100CF
POA
POA
±25.4
72.0
253.5
242.3
374.7
146.1
M-XY25-72-100CF
POA
POA
±12.7
100.3
253.5
242.3
374.7
127.0
M-XY12-101-100CF
POA
POA
±25.4
100.3
253.5
242.3
374.7
155.4
M-XY25-101-100CF
POA
POA
Resolution
Our range of X-Y stages combine extremely
high rigidity, a large working bore and
affordable cost. They are available in both
± 25.4mm (± 1 inch) and ± 12.7mm (±
1/2 inch) travel, circular pattern, with both
manual and stepper motorized versions.
In fact, conversion from micrometers to
stepper motors can be done in 15 minutes at
the user’s site. Both sizes have features not
found on translators available elsewhere,
such as tilt adjustment on the top flange as
standard.
One distinct advantage of these stages is the
cost savings when long Z axis strokes are
required. Since only the bellows in the XY
portion needs to be larger than the probe,
the user can extend the Z axis stroke using
a smaller diameter (less costly) bellows that
just clears the probe running through it.
Simply select the model from the tables that
best suits your needs.
For horizontal mounting, i.e., with the
flange faces vertical, dual constant force
counterbalance springs are available that
compensate for gravitational loads. If
required, this feature can be added in the
field, after the user accurately determines
the weight of the devices to be mounted.
To make your selection, add the total travel
required in either the X or Y axis to the
maximum diameter of the device that will
pass through the stage. This sum determines
the minimum bellows inside diameter (clear
ID).
Next, select the bottom flange that best
mates to your chamber or other equipment.
While the most common size is DN100CF,
either tapped or non-tapped flange sizes of
DN63CF, DN100CF, DN160CF and larger are
A
BearingsSt.St.
Clear
ID
>2.5µm
X-Y
Travel
Clear
ID
A
B
C
H
±12.7
149.1
330.2
292.1
476.3
165.1
±25.4
149.1
330.2
292.1
476.3
TBA
Part Code
Price £
Price €
M-XY12-150-160CF
POA
POA
M-XY25-150-160CF
POA
POA
Repeatability
>1.25µm
Vacuum Range
CF flanged
A
atm to 1x10-11mbar
Temperature Range*
CF flanged
-20 to 210°C
rated component.
Options:
C
• DN40CF versions also available.
• Clearance hole flanges available on both
top & bottom flanges, (Height, H increases).
• Horizontal mount kit.
• Additional axis.
Clear ID
H
B
8.55
8.54
Precision X-Y-Z Manipulator Stages
Specifications:
With DN100CF Base Flange, DN40CF Top Flange
Clear ID
Stroke
St.St.
±12.7
38.0
50.8
Bellow & flanges
±12.7
38.0
101.6
Mounting brackets
Anodised Al
±12.7
38.0
152.4
±12.7
38.0
203.2
±12.7
38.0
254.0
±12.7
38.0
304.8
BearingsSt.St.
Resolution X & Y
X & Y with small micrometers (standard)
>10µm
X & Y with large micrometers
Z
Comp
Call sales office for details
of compressed heights
between flanges.
X-Y Travel
Materials
Price £
Price €
M-XYZ-12S-50-100/40CF
Part Code
POA
POA
M-XYZ-12S-101-100/40CF
POA
POA
M-XYZ-12S-152-100/40CF
POA
POA
M-XYZ-12S-203-100/40CF
POA
POA
M-XYZ-12S-254-100/40CF
POA
POA
M-XYZ-12S-304-100/40CF
POA
POA
Above X-Y travel measured in square pattern.
>2.5µm
205.5
>25µm
Repeatability
These manipulators can be in-the-field
converted to stepper motor actuation in 15
minutes. All models are pre-threaded for
limit switches. In-the-field conversion to
tilting top flange is also possible.
information.
>1.25µm
Z
>12.5µm
133.4
Vacuum Range
CF flanged
atm to 1x10-11mbar
Temperature Range*
CF flanged
-20 to 210°C
rated component.
78.0
• Clearance holes in top flange, tapped
holes in bottom flange.
• Alternative base flange sizes, DN40CF,
DN63CF, DN160CF & DN200CF.
• Additional DN16CF ports on base flange.
details of the above options.
Stroke
Options:
Comp
This range of precision XYZ manipulators
is in our opinion, the best value for money
manipulator on the market today. In terms
of features, quality, possible configurations
and cost, they set the standard.
Standard features and benefits include;
• Adjustable, crossed roller bearings for
extra rigidity,
• Bellows ID of 35.3mm (1.39”) giving
±12.7mm (½”) movement in a circular
pattern or 48.0mm (1.89”) giving
±12.7mm (½”) in a square pattern.
• Compact, rugged design with full Z axis
frame provides extra rigidity to allow
strokes to 300mm (12”). No flimsy,
unsupported guide rods!
• Tilting top flange; 2° tilt angle.
>5µm
133.6
Note : Photo shows model with large micrometers,
tilting top flange & DN100CF base flange with 5 off
DN16CF ports
8.57
8.56
Specifications:
With DN63CF Flanges
Stroke
Price £
Price €
±12.7
101.6
M-XYZ-12-101-63CF
POA
POA
±12.7
152.4
M-XYZ-12-152-63CF
POA
POA
±12.7
203.2
M-XYZ-12-203-63CF
POA
POA
±12.7
254.0
M-XYZ-12-254-63CF
POA
POA
±12.7
304.8
M-XYZ-12-304-63CF
POA
POA
±12.7
406.4
M-XYZ-12-406-63CF
POA
POA
>12.5µm
±12.7
508.0
M-XYZ-12-508-63CF
POA
POA
±12.7
609.6
M-XYZ-12-609-63CF
POA
POA
±25.4
101.6
M-XYZ-25-101-63CF
POA
POA
±25.4
152.4
M-XYZ-25-152-63CF
POA
POA
±25.4
203.2
M-XYZ-25-203-63CF
POA
POA
Repeatability
±25.4
254.0
M-XYZ-25-254-63CF
POA
POA
>5µm
±25.4
304.8
M-XYZ-25-304-63CF
POA
POA
±25.4
406.4
M-XYZ-25-406-63CF
POA
POA
±25.4
508.0
M-XYZ-25-508-63CF
POA
POA
±25.4
609.6
M-XYZ-25-609-63CF
POA
POA
Bellow & flanges
St.St.
Mounting brackets
Anodised Al
BearingsSt.St.
Resolution X & Y
Z
>1.25µm
Z
>12.5µm
Above X-Y travel measured in circular pattern.
Vacuum Range
CF flanged
atm to 1x10-11mbar
Temperature Range*
-20 to 210°C
208.0
CF flanged
rated component.
Options:
• Alternative base flange sizes, DN100CF,
DN160CF & DN200CF.
72.9mm bore
116.3
Stroke
These manipulators can be in-the-field
converted to stepper motor actuation in 15
minutes. All models are pre-threaded for
limit switches. In-the-field conversion to
tilting top flange is also possible.
information.
>25µm
Part Code
Comp
This range of precision XYZ manipulators
is in our opinion, the best value for money
manipulator on the market today. In terms
of features, quality, possible configurations
and cost, they set the standard.
Standard features and benefits include:
extra rigidity.
• Bellows ID of 72.9mm (2.87”) giving
±12.7mm (½”) or ±25.4mm (1”)
movement in a circular pattern.
strokes to 914mm (36”). No flimsy,
unsupported guide rods!
• Tilting top flange; 2° tilt angle.
>2.5µm
Comp
Call sales office for details of compressed heights between flanges.
X-Y Travel
Materials
179.8
244.6
8.59
8.58
Specifications:
Stroke
Price £
Price €
St.St.
±12.7
101.6
M-XYZ-12-101-100CF
POA
POA
±12.7
152.4
M-XYZ-12-152-100CF
POA
POA
Anodised Al
±12.7
203.2
M-XYZ-12-203-100CF
POA
POA
±12.7
254.0
M-XYZ-12-254-100CF
POA
POA
±12.7
304.8
M-XYZ-12-304-100CF
POA
POA
±12.7
406.4
M-XYZ-12-406-100CF
POA
POA
>10µm
±12.7
508.0
M-XYZ-12-508-100CF
POA
POA
±12.7
609.6
M-XYZ-12-609-100CF
POA
POA
±25.4
101.6
M-XYZ-25-101-100CF
POA
POA
±25.4
152.4
M-XYZ-25-152-100CF
POA
POA
±25.4
203.2
M-XYZ-25-203-100CF
POA
POA
Repeatability
±25.4
254.0
M-XYZ-25-254-100CF
POA
POA
>5µm
±25.4
304.8
M-XYZ-25-304-100CF
POA
POA
±25.4
406.4
M-XYZ-25-406-100CF
POA
POA
±25.4
508.0
M-XYZ-25-508-100CF
POA
POA
±25.4
609.6
M-XYZ-25-609-100CF
POA
POA
±25.4
762.0
M-XYZ-25-762-100CF
POA
POA
±25.4
914.4
M-XYZ-25-914-100CF
POA
POA
Bellow & flanges
Mounting brackets
BearingsSt.St.
Resolution X & Y
Z
>25µm
>1.25µm
Z
>12.5µm
Vacuum Range
CF flanged
Above X-Y travel measured in circular pattern.
atm to 1x10-11mbar
Temperature Range*
250.2
rated component.
Options:
• Alternative base flange sizes, DN160CF
& DN200CF.
241.3
-20 to 210°C
324.4
248.4
CF flanged
Part Code
Stroke
138.2
Comp
These larger precision X-Y-Z manipulators
provide unmatched performance at an
exceptional price.
The rugged construction is designed to
withstand the heaviest loads from both
atmosphere as well as from scientific
instruments.
• Bellows I.D. 4.0” (101 mm) (circular
pattern).
strokes in excess of 914mm (36”).
extra rigidity.
• XY travel ±12.7mm (0.5”) or ±25.4mm
(1.0”) circular pattern.
• Z travel 101.6mm - 914mm (4” -36”).
• Field conversion to stepper motors in 15
minutes.Top flange may be either tapped
or non-tapped to suit your equipment.
• Top flange tilt of ± 2° for alignment.
information.
>2.5µm
Comp
Call sales office for details of compressed heights between flanges.
X-Y Travel
Materials
201.7
72.6
8.61
8.60
Two Stage Differentially Pumped Rotary Platforms
Features:
Two Stage Differentially Pumped Rotary Platforms
• 360° continuous rotation.
• Includes fine adjust drive and 0.1° vernier scale.
• Extra large bore for maximum clearance.
• Exclusive bearing seal reduces costly
maintenance and prolongs life.
• Standard, full depth threads need no
special fasteners.
• Optional integral half nipple saves time,
money & space.
Fig.
Flange
ID
1
DN40CF
38.8
2
DN63CF
72.9
3
DN100CF
102.8
4
DN160CF
153.6
5
DN200CF
204.4
Fig. 2.
Part Code
Price £
Price €
68kg
M-RP-40CF
POA
POA
122kg
M-RP-63CF
POA
POA
204kg
M-RP-100CF
POA
POA
270kg
M-RP-160CF
POA
POA
545kg
M-RP-200CF
POA
POA
Max Axial
Load
Fig. 3.
Specifications:
Materials
97.5
FlangesSt.St.
The excellent performance of our rotary
platform coupled with a simple, low
maintenance design gives maximum value.
The fine adjust worm drive has bearings at
both ends, thereby eliminating deflection
and inaccuracies. Worm gear backlash is
reduced to <0.05 degrees. The bolt holes on
both flanges are tapped full depth for use
with standard length flange hardware. This
means no need to shorten standard fasteners.
Fluorocarbon seals are double-differentially
pumped to provide base pressures in the 1011
Torr range and will withstand bakeouts up
to 210 degrees C.
An integral half-nipple option, for mounting
to an existing tapped flange, saves space,
hardware, time and money. Stepper motor
drives are also available.
information.
Mounting brackets
45°
Anodised Al
SealsElastomer
Worm & gear
131.3
St.St & bearing bronze
Vacuum Range
CF flanged
Ø 152.4
atm to 1x10-11Torr
106.4
Temperature Range*
CF flanged
142.5
Ø 215.9
30°
-20 to 210°C
rated component.
48.3
Fig. 1.
63.5
Fig. 4.
Fig. 5.
Ø 325.1
Ø 266.7
36°
59.4
30°
193.8
166.6
60°
88.6
157.2
Ø 114.3
196.9
69.9
Between faces
50.3
66.5
8.63
8.62
Precision Tilt Port Aligners
Features:
•
•
•
•
•
•
•
Precision Tilt Port Aligners
Bellows included.
±10° tilt in both axes.
Tilt position lock.
Precision micrometer adjustment.
Extra large bore for maximum clearance.
Self lubricating bearings.
Short length.
Specifications:
Fig.
Flange
ID
Price £
Price €
1
DN40CF
38.1
Part Code
M-TPA-40CF
POA
POA
2
DN63CF
73.4
M-TPA-63CF
POA
POA
3
DN100CF
102.8
M-TPA-100CF
POA
POA
4
DN160CF
153.6
M-TPA-160CF
POA
POA
5
DN200CF
204.4
M-TPA-200CF
POA
POA
Fig. 3.
Fig. 2.
Materials
Flanges & bellows
St.St.
Mounting brackets
Anodised Al
Often a probe or other device mounted on a
chamber flange is not precisely aligned with
a specified point inside the chamber. This
can be due to the mass on the end bending
the device and/or inaccuracies of chamber
port alignments. Using a precision tilt port
aligner mounted between the device and the
chamber port, this problem can be easily
and accurately overcome.
Our range of precision tilt port aligners are
the finest 2-axis tilt stages available. From
the self lubricating pivot bearings to the
rugged construction, everything speaks of
quality.
These aligners have the shortest overall
height of any similar gimbal on the market.
The clear inside diameter is the largest
possible to clear obstructions and tilt angle
is greater. Motorized and extra heavy duty
versions are also available.
Tilt port aligners are offered in 5 standard
sizes, ranging from DN40CF to DN200CF.
Custom sizes are also available. All versions
are fully bakeable to 210°C.
Tilt port aligners with DN63CF and larger
flanges use welded bellows. This further
minimizes the overall height and provides
maximum clear ID, without increasing the
cost. All of the tilt port aligners have a total
angular movement of 20° (±10°) in both
axes.
information.
CF flanged
atm to 1x10-11Torr
Temperature Range*
CF flanged
203.2
165.1
Vacuum Range
73.2mm
Bore
97.3mm
Bore
165.1
-20 to 210°C
rated component.
203.2
90° ±10°
Both axes
90° ±10°
Both axes
104.1
Fig. 1.
Fig. 4.
101.6
Fig. 5.
285.8
114.3
311.2
38.1mm Bore
254.0
114.3
199.9mm
Bore
149.4mm
Bore
311.2
90° ±10°
Both axes
90° ±10°
Both axes
81.3
120.7
90° ±10°
Both axes
139.7
8.65
8.64
Port Aligners
Multi-Port Adapters & Support Tubes
Specifications:
Specifications:
Materials
Materials
Flanges & bellows
St.St.
St.St.
Clamping brackets
Anodised Al
Vacuum Range
Vacuum Range
CF flanged
CF flanged
atm to 1x10-11Torr
Temperature Range*
Temperature Range*
CF flanged
atm to 1x10-11Torr
CF flanged
rated component.
-20 to 210°C
rated component.
Sometimes a port on the vacuum chamber
just doesn’t quite point where it should.
The MPA’ port aligner solves this with two
UHV flanges connected by a short section
of welded bellows and a sturdy clamping
mechanism. The bellows allows the flanges
to tilt ± 1 degrees, total. This makes for
easy alignment of long devices like magnetic
introduction and sample transfer rods. An
arc of 2 degrees subtends a chordal distance
of more than 25mm (1”) at a distance of
750mm (30”), giving lots of adjustment
range.
Port Aligners
Flange
A
Bore
OD
Part Code
Price £
Price €
DN40CF
44.5
38.1
108.0
M-PA-40CF
POA
POA
DN63CF
66.8
72.8
146.1
M-PA-63CF
POA
POA
-20 to 210°C
Multi-port adaptors are useful for adding
power, thermocouple, liquid nitrogen and other
feedthroughs to existing (usually larger) flanges.
These adaptors can also be devised to provide
outboard support for things like rotary and / or
linear motion feedthroughs so the motion can
be delivered where it is actually needed. The
“standard” support tube is 31.8mm (1.25”) OD
with pumpout holes, slots for wires and LN2
lines and a removable adaptor with ball bearing
(usually 9.5mm (0.375”) ID).
Many different configurations are available,
including different size flanges, different
numbers of flanges and radial spacing of the
smaller flanges. The most common size uses
DN40CF flanges on the top and bottom with
four off DN16CF flanges around the body. Zerolength adaptor flanges can be used to mate the
multi-port adapters to other flanges.
90° (Optional
72° or 135°)
37.5°
101.9
18.0
67.3
Multiport Adapters & Support Tubes
Description
Multiport adapter DN40CF top & bottom, 4 x DN16CF @ 90° spacing
Part Code
M-MPA-40CF
Price £
Price €
POA
POA
Alternative flange configurations and lengths are available, please
contact sales office for further details.
Support tubes are also available in many different configurations of
flange size, tube diameter and length etc. A schematic diagram below
shows the general appearance of the support tube. Please contact our
sales office to discuss your specific requirements for support tube.
Flange size as required
Pump out / access
openings as required
Optional bearing mount
OD as
required
A
±1°
Bore
OD
Length as required
8.67
8.66
SECTION 8.6 STEPPER MOTORS AND CONTROLLERS
UHV In-vacuum Stepper Motors
Features:
Speed vs torque characteristics
• 1.8° step angle
• UHV compatible materials, suitable for
use below 1 x 10-10 mbar.
• Bakeable to 200°C.
• Embedded K type thermocouple
• Operating temperature -65°C to 175°C.*
• Continuous in-vacuum operation with
M-SMD2 controller.
• Long life bearings with very low particulate
generation.
• Custom / Radiation hard versions
available.
• Shaft modifications available.
The performance shown on these graphs was obtained using an M-SMD210 drive operating with
standard settings for step division. M-SMD210 is a switch-mode, bipolar, current-regulating
drive with a nominal source of 67volts, optimised for use with vacuum motors. At low speed
where step division is active the RSS (root sum of squares) of phase current is set to the
nominal current. Over most of the speed range the drive operates in wave mode with nominal
set current in only one energised phase.
Different drives will produce different speed / torque curves. Drives capable of producing a total
phase current of more than 1A RSS may damage the insulation. Drives with significantly lower
source voltages may result in poor high speed performance. Use of the embedded thermocouple
is essential for motor protection.
M-D35.1
150
rated component.
Torque (mNm)
1.0A
Fourth Generation Hybrid UHV Stepper Motors
Holding
torqu
mNm
Detent
torque
mNm
Rotor
inertia
gcm2
Max. Axial
force
kgf
Max. Radial
Force (1)
kgf
Mass
g
Current
per phase
A
Phase
resistance @ 20°C
Ω
Phase
inductance
mH
M-D35.1
70
8
10
9
15
190
1.0
4.7
3.8
M-D42.1
180
8
35
9
15
350
1.0
5.3
6.6
M-D42.2
360
14
68
9
15
470
1.0
6.8
10.5
M-D42.3
450
20
102
9
15
610
1.0
8.5
19.5
M-D57.1
800
30
300
20
60
700
1.0
10.5
27.0
Operating temperature
-65 to +175°C
Bakeout temperature
200°C
Step angle1.8°
Step angle tolerance
5%
Lead length1.5m
M-D42.1
1000
10000
500
450
200
1.0A
400
1.0A
Torque (mNm)
350
150
0.8A
0.6A
100
0.4A
300
0.8A
0.6A
250
200
0.4A
150
50
100
50
0
10
100
1000
0
10000
10
100
Step Frequency (Hz)
1000
M-SMD210 Drive, nominal source of 67 Volts.
M-D42.3
M-D57.0
1.0A
0
8A
0.8A
Torque (mNm)
0.6A
250
200
0.4A
1.0A
800
750
0.8A
600
0.6A
0
6A
550
500
450
400
350
0.4A
300
250
200
150
150
100
100
50
50
0
900
850
700
650
350
300
10000
Step Frequency (Hz)
400
10
100
1000
Step Frequency (Hz)
100
M-D42.2
250
450
10
500
- Refer to sales office for details
0.4A
Step Frequency (Hz)
Torque (mNm)
(1)
0
Torque (mNm)
Technical Data
0.8A
0.6A
50
AML stepper motors are specifically designed for use in UHV environments making them ideally
suited for low speed precision in-vacuum manipulation without the use of particle generating
motion feedthroughs. The considerable reduction in mechanical complexity, absence of metal to
metal sliding surfaces and low outgassing characteristics make these motors especially suitable
for sensitive handling applications.The model D motors are two phase hybrid stepper motors,
available in a range of standard sizes and torque ratings. Standard motors provide 200 full steps
per revolution and are suitable for use between -65°C to +175°C. Extended low temperature
range (-196°C) versions, radiation hard versions (1 x 107 Gy), shaft modifications and hybrid
bearings are all available options.
All motors are designed, cleaned and hand assembled to UHV standards in an ISO Class 7
cleanroom.
Model
100
10000
0
10
100
1000
10000
Step Frequency (Hz)
8.69
8.68
UHV In-vacuum Stepper Motors
Miniature Stepper Motors
Fig.
Description
Price £
Price €
1
UHV mini stepper motor 70mNm
Part Code
M-D35.1
£600
€840
2
M-D42.1
£600
€840
2
M-D42.2
£700
€980
2
M-D42.3
POA
POA
3
M-D57.1
£950
€1330
Bearings
Standard motors are fitted with open stainless steel bearings lubricated with NyeTorr® 6300
UHV grease.
Option ‘H’ motors have hybrid bearings with silicon nitride ceramic balls, dry lubricated with
molybdenum disulfide.
Options
4 X Ø3.2 pumping
ports on 26.0 PCD
both ends
Fig. 1.
1.5m lead
length
Leads terminated with
1.5mm crimp sockets
H - Hybrid ceramic bearings
R - Radiation hardened to 1 x 107 Gy
X - Shaft modifi cation. Please provide a sketch of your requirement
C - Cryogenic. Extended operating temperature range. -196°C to +175°C
M3 x 6.5
Please call our sales office to discuss youir requirement for motor options.
35 26
Ø
22.0
21.9
Ø
31
35
1.35m lead
length
2.0
20
8 X Ø3.2 pumping
ports on 31.0 PCD
both ends
Fig. 2.
5.00
4.98
27±1
Leads terminated with
1.5mm crimp sockets
M3 x 8.5
22.0
Ø
21.9
42 31
5.00
Ø
4.98
31
42
47
56
M-D42.2
49
M-D42.3
61
Leads terminated
with 1.5mm crimp
sockets
5.4
Ø
35
L±1
Fig. 3.
56 47
Length, L
2.0
23
1.35m lead
length
Motor
M-D42.1
38.13
38.07
Ø
6.35
6.34
20
1.6
55±1
8 X Ø3.3 pumping
ports on 44.0 PCD
both ends
8.71
8.70
Stepper Motor Controller, Feedthroughs and Cables
• 3 user inputs for interaction with program
execution, in addition to two “End of
travel” inputs for each motor.
• 3 user outputs for switching under
program control.
• Simple control language has many
powerful commands which allow control
of all aspects of motion or position.
Conditional operation, loops and jumps
are possible.
• 1U high full-width, steel-cased instrument
for easy rack-mounting.
• Operates from 100 to 240V, 50/60 Hz
supply.
Stepper Motor Controller
Description
Part Code
Price £
Price €
Dual sequential UHV stepper motor driver
M-SMD210
£950
€1330
M-SMD210JOY
£68
€96
Two button joystick for M-SMD210
Stepper Motor Feedthroughs and Cables
Description
Part Code
Price £
Price €
Electrical 18 way feedthrough on DN40CF
M-MLF18F
£213
€299
Air side bakeable connector 18 way
M-MLF18AC
£136
€191
Lead non bakeable 18 way for 3 motors / SMD2 3 metres
M-MLF18NBL
£215
€301
In vacuum bakeable connector 18 way female
M-MLF18VCF
£60
€84
In vacuum bakeable connector 18 way male
M-MLF18VCM
£60
€84
Features:
• Drives 2 UHV stepper motors sequentially.
• Advanced low-power drive techniques
for minimum motor temperature rise
and outgassing and maximum operating
time.
• Phase currents can be set from 0.1 to 1A
in increments of 0.1A.
• Holding torque can be controlled
independently of dynamic torque under
program control, to reduce power.
• Full, half, ÷4, ÷8 step drive modes with
automatic transition at user selectable
speeds. (Stops on full step positions
only. Micro-stepping used for control of
resonance and smoother step transition.)
• Thermocouple amplifiers (type K) for
motor temperature indication, protection
and control of motor bakeout.
• RS232C interface for host computer
control.
Drive
programs
can
be
developed and run from the computer
console (Remote Program Control) or
downloaded for stand-alone operation
(Internal Program Control).
• Motors may be operated manually with
the front panel ‘STEP’ switches or with
a joystick. Single-step or multiple-step
operation with smooth acceleration to
the selected speed.
8.73
8.72
VACUUM ACCESSORIES

Motion And Manipulation

Transcription

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