0.MN Semeria

Leti’s innovative route with
industry
Marie Séméria - CEO / CEA - Leti
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Agenda
Technology
HITS
17 Leti IEDM
papers!
Healthy
IoT Alliance
Design to
prototypes
Leti
Lasker &
Breakthrough
Awards
Start-ups
Pr Benabib
M.N Séméria| 14/12/2014
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|2
Advanced Litho programs
Multibeam (ML2):
Flexibility
Manufacturing COST advantage
DSA:
High resolution
Low COST
Imprint:
Resolution & 3D shapes
Low COST
Large surface,
Support low cost lithography technology take-off
Integrated IP solutions for manufacturing
M.N Séméria| 14/12/2014
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|3
Multi-beam MAPPER program achievements
Pre-production Platform installation MAPPER MATRIX 06/13
1st full 300mm wafer
MATRIX@Leti
hp 42nm
1er maskless multibeam litho cluster
MAPPER MATRIX – SOKUDO DUO
1300 beams
2015 target: 1Wph
CoO model
M.N Séméria| 14/12/2014
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Device scaling: technology driven performance improvement
Scaling
28FD
14FD
14FD+
10FD
Early material
and process
coupling
< 7nm
Non planar / trigate / stacked NW
High-mobility materials Ge and III-V
Drain
FinFET
n
Fi
Source
Gate
2012
2009
14nm
Alternative to scaling
10nm
5nm
2018
2015
7nm
Disruptive scaling
2021
Hybrid
logic
28nm
Steep slope devices
Mechanical switches
Single-electron transistor
CoolCubeTM for 3D VLSI
Early design and process coupling
M.N Séméria| 14/12/2014
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FDSOI Leti current focus: beyond 14FD
at same Vdd
+30%
Performance
10FD
at same Vdd
+30%
14FD+
Strained CMOS
In situ doped RSDGen3
Gate last
SAC
Strained CMOS
In situ doped RSDGen2
Gate first
at same Vdd
+30%
14FD
Strained PFET
In situ doped RSDGen1
Gate first
+30%
28FD+
28FD
Unstrained Si channel
Implanted RSD
Gate first
Global technology
ecosystem
IBM-ST-GF-SAMSUNG
M.N Séméria| 14/12/2014
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17 authors and co-authors Leti papers
Zero Power
Invited- S. Deleonibus
Mobility boosted
sub 14 FDSOI
28nm UTBB
Re RAM
FDSOI
CoolCube
FDSOI
Invited- E. Vianello
10nm
CBRAM CMOS Imager
sensor
NW
15-10nm
RF Front End
Invited – Ch Raynaud
CMOS - NEMS
Invited – J. Arcamone
CMOS eNEMS
TSV based 3D
M.N Séméria| 14/12/2014
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Alliance for connected and computing solution
for IoT – One stop shop
Innovators (SME & New entrants)
Innovative solutions
Enabler
(CEA-Leti)
Design center
P1
• Competences
• Infrastructure
• Indus. partners
P2
Pn
Prototypes/Prods
World class experts
Process circuit co-design
Advanced equipment
Silicon prototyping
Industrialization partners
Industrial platform access
Ecosystem
(IPs & Tools)
Industrial Platforms
(Silicon & Computing)
Breaking cost barriers
Serve SME and New entrants to access innovative markets
O. Thomas | 2014/12/14 | 8
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Outstanding awards
for Pr BENABID
Clinical Medical Research Award
Award Description
For the development of deep brain stimulation of the sub thalamic nucleus, a surgical
technique that reduces tremors and restores motor function in patients with advanced
Parkinson's disease.
The 2015 Breakthrough Prizes in Life Sciences
Award Description
for the discovery and pioneering work on the development of high-frequency
deep brain stimulation (DBS), which has revolutionized the treatment of
Parkinson’s disease.
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|9
Startup highlights
Nobel Prize to Prof. Hiroshi Amano, Aledia's Scientific
Advisor
ALL acquired by ILLUMINA
Movea acquired by Invensense
Fluoptics raises 2M€
Primo1D raises 3M€
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Program
Auteur | Date | 11
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Thank you for your attention!
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