3. JPhPolizzi

TOWARDS NEMS SENSING
Leti Workshop @ Semicon West | Polizzi Jean-Philippe | July 12, 2016
30+ YEARS BACKGROUND IN MEMS SENSORS
Thin Film
Technology
Bulk
Technology
Surface
Technology
(Vac.dep. / shadow mask)
(Litho / wet etching)
(Litho / DRIE on SOI)
Nano-scale
Technology
(DUV litho on thin SOI)
2010 – joint lab.
1996 - Startup
creation
2007 - Caltech
Alliance
2013 - Startup
2011 - Startup
2014
Startup
year
Impossible d’afficher l’image.
2005
Impossible d’afficher l’image.
Miniature
pressure sensor
Above-IC
GMR
Technology
XXXXXX
Inertial
platform
2011
High perf.
pressure
sensor
1996
1998
Hygrometer
20
Accelerometer
Geophone
1996
1987
Impossible d’afficher l’image.
10
M&NEMS
platform
2013
Pacemaker
accelerometer
Quartz
accelerometer
Weight sensor
1981
00
90
2012
80
1980
Transfers
Key dates
1984 - Comb drive
accelero patent
Leti Workshop @ Semicon West | Polizzi Jean-Philippe | July 12, 2016 | 2
A LARGE PANEL OF SENSOR TECHNOLOGIES
INERTIAL SENSOR
3-axis accelerometer
3-axis gyroscope
PRESSURE SENSOR
Capacitive pressure sensor
Piezoresistive pressure sensor
High temperature P sensor
ACOUSTIC SENSOR
Microphone
cMUT
pMUT
MAGNETIC SENSOR
Above-IC GMR sensor
TMR sensor and resonator
3-axis compass
Leti Workshop @ Semicon West | Polizzi Jean-Philippe | July 12, 2016 | 3
A LARGE PANEL OF SENSOR TECHNOLOGIES
CHEMICAL SENSORS
Ionic sensor
conductivity
Multi-parameter metabolic sensor
GAS SENSORS
NEMS-based
NDIR CO2 sensors
Photoacoustic detector
IMAGING SENSORS
IR bolometer
Cooled IR MCT PD
VIS CMOS cameras
X-rays
OTHER SENSORS
3-axis force sensor
µ-TOF mass-spec
Leti Workshop @ Semicon West | Polizzi Jean-Philippe | July 12, 2016 | 4
LETI STARTUPS IN MICROSYSTEMS
IN THE LAST 5 YEARS
Innovative piezoelectric
energy harvesting
Multi-gas analyzers coupling
gas chromatography and
NEMS
Integration of MEMS and
electronic devices into
textiles
MEMS-based NDIR
sensor for air quality
monitoring
Piezo-MEMS variable focus
lens for mobile phone
camera
MEMS and QCL-based
photo-acoustic gas
analyzer
Leti Workshop @ Semicon West | Polizzi Jean-Philippe | July 12, 2016 | 5
CHALLENGES IN MEMS SENSORS
INNOVATION
Disruptive solutions:
Products/technologies
First product on market
"I want 500, 5,000 different types of sensors in
the next five years”
From Device to System
The importance of software
“Not Enough Money in MEMS,
Own the Data”
Sean Ding, chief scientific officer for
sensing solutions at telecom giant
Huawei Technologies
Behrooz Abdi, CEO of InvenSense
PRODUCT LINE
Reduce NRE and time to market
Ending the « one product one process » rule
Technological platforms
“MEMS platforms are way to go”
Stefan Finkbeiner, CEO of Bosch
Sensortec
Leti Workshop @ Semicon West | Polizzi Jean-Philippe | July 12, 2016 | 6
M&NEMS "GENERIC" PLATFORM
Generic platform
Miniaturized sensors
Well known and robust
piezoresisitive detection
Not sensitive to parasitics
Very short duty cycle
and multiplexing
MEMS size mechanical part
Separate
optimization
+
Simple electronics
common for all the axis
Nano-size piezoresistive gauge
3-axis
Accelero
Y
3-axis
Gyroscope
3-axis
Magneto
Pressure
Sensor
High-SNR
Microphone
Z
X
Leti Workshop @ Semicon West | Polizzi Jean-Philippe | July 12, 2016 | 7
M&NEMS "GENERIC" PLATFORM
• 9-axis M&NEMS has been transferred to Tronics
• Tronics’ goals
6DOF on a 4mm²
9DOF on a 5 mm²
2,5mm
1,6mm
•
•
6-axis M&NEMS
sensor
The smallest combo sensor
in the industry on a single die
(less than 4mm²)
Leti Workshop @ Semicon West | Polizzi Jean-Philippe | July 12, 2016 | 8
NEMS-BASED SENSORS PLATFORM
FOR GAS AND BIO-SENSING
Responsivity ℜ = −
Resolution
•
•
•
Gas detection
δf
f0
=
∝ l −4
δ m 2 M eff
δ m = − 2M
δω
∝ l3
ω0
High resolution
Very short response time
High integration
Mass-spec for Bio
applications
µbolometer
Cellular force
sensor
Leti Workshop @ Semicon West | Polizzi Jean-Philippe | July 12, 2016 | 9
NEMS-BASED MULTI-GAS SYSTEM
Carrier
gas
Gas
mixture
Silicon MEMS injector
• Low dead volume (LOD)
• High reliability (million cycles)
Analytical module
Sampling
GC
separation
NEMS
detection
Thermal regulation
Control electronics
Data transmission & processing
Silicon MEMS pre-concentrator
• High amplification factor in short
period (factor 1000 for Toluene
with Tenax)
• Fast amplication (1 min)
Silicon NEMS detector
• Sensitive (nano size)
ppm/ppb
• Small
direct integration into
microfluidic architecture without
dead volume
• Fast
compatible with GC
Silicon MEMS GC
• High selectivity
• Thermal regulation
• Speed
Leti Workshop @ Semicon West | Polizzi Jean-Philippe | July 12, 2016 | 10
NEMS-BASED MULTI-GAS SYSTEM
EXAMPLES OF ANALYSIS PERFORMED WITH APIX SYSTEM
• Industrial (Gas&Oil) application:
Chromatogram performed
on a fuel gas mixture
LOD < ppm
Ex: Nonane 33ppb
• Indoor air quality application
Chromatogram performed
on a BTEX mixture
LOD < ppm
Ex: Ethylbenzene 50ppb
LOD < ppb with pre-concentrator
Leti Workshop @ Semicon West | Polizzi Jean-Philippe | July 12, 2016 | 11
MASS DETECTION - ROADMAP
… avoid ionization …
… open new applications …
Neutral species spectrometer
•
•
Residual diseases
Airborne particle monitoring
NEMS for integrated chromatography
•
Multi gas analysis (APIX)
Leti Workshop @ Semicon West | Polizzi Jean-Philippe | July 12, 2016 | 12
NEMS-BASED SPECTROMETRY (MS)
MASS FOR BIO-DETECTION
Particles capture with NEMS array
Single NEMS device
Preprocessing with microfluidic device
•
•
•
•
•
Neutral particle (no need to ionize) detection at the single
level
Fast measurements, parallel analysis
Constant resolution over a large dynamic range
Si VLSI compatible
Replacement of costly (0.1-1 M$), bulky (m3) tools
First-ever NEMS-MS mass spectrum of human IgM
antibody measured in real-time
Hanay et al, Nature Nanotechnology, 2012
Caltech set-up - Leti NEMS devices
Leti Workshop @ Semicon West | Polizzi Jean-Philippe | July 12, 2016 | 13
THE LEADING R&D INSTITUTE IN MEMS
• 30 years experience in MEMS
• 200 people involved in MEMS
•
(sensor, actuator, RF, packaging, process, characterization)
• All 200mm MEMS/NEMS technologies in-house
• 330 patent portfolio in the MEMS field
• 35 % under license or on co-ownership
• 35 new patents/year
•
•
•
•
25 on-going industrial collaborations
10 long-term strategic partnerships
18 industrial transfers
7 startups created
Leti Workshop @ Semicon West | Polizzi Jean-Philippe | July 12, 2016 | 14
Leti, technology research institute
Commissariat à l’énergie atomique et aux énergies alternatives
Minatec Campus | 17 rue des Martyrs | 38054 Grenoble Cedex | France
www.leti.fr