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High efficiency solar cells by
nanophotonic design
Albert Polman
Piero Spinelli
Claire van Lare
Jorik van de Groep
Bonna Newman
Mark Knight
Paula Bronsveld
Frank Lenzmann
Ruud Schropp
Wim Sinke
Center for Nanophotonics
FOM-Institute AMOLF
Amsterdam, The Netherlands
Marc Verschuuren
Guanchao Yin
Martina Schmid
Dhritiman Gupta
Martijn Wienk
Bart Macco
Erwin Kessels
Rene Janssen
Lourens van Dijk
Vivian Ferry
Dennis Calahan
Matt Sheldon
Harry Atwater
Outline
Light coupling
and trapping
Nanopatterned ARC
on glass
Transparent metal
nanowire networks
Plasmoelectric effect in
metal nanostructures
Jsc and Voc relative to SQ limit (at given bandgap)
carrier management
light management
© AMOLF
The scattering solar cell
Light coupling and trapping by resonant light scatterers
4%
n=1.0
n=3.5
96%
H.A. Atwater and A. Polman
Nature Mater. 9, 205 (2010), Nature Mater. 11, 174 (2012)
Silicon Mie scatterer on a Si substrate
Si sphere
Si cylinder
Si
Si
Mie resonance
Si
Silicon nano-cylinders act as cavities for
light and direct light into the substrate
Si
Piero Spinelli
Nature Comm. 3, 692 (2012)
Black silicon using leaky Mie resonances
Average reflectivity: 1.3%
Si3N4
Si
Si
Piero Spinelli
Nature Comm. 3, 692 (2012)
Substrate conformal imprint lithography
PDMS Stamp
Thin glass
PDMS stamp (6”) on 200 µm AF-45
glass
1
m
Full-wafer soft nano-imprint
• Flexible rubber on thin glass
• Conform to substrate bow and roughness
• No stamp damage due to particles
Marc Verschuuren
PhD thesis, Utrecht University (2010)
Light trapping in 5 m crystalline Si slab
FDTD simulation
Absorption (%)
100
Mie (random)
80
Si
t = 5µm
Back reflector
Mie (periodic)
60
40
Si3N4
flat coating
20
0
400
600
800
1000
Wavelength (nm)
Piero Spinelli
IEEE J. Photovolt. 4, 554 (2014)
Optimizing spatial frequency of scattering pattern
Asahi U-type
Claire van Lare
ACS Photon. 2, 822 (2015)
Effect of EVA encapsulation
EVA
Si
Si
Piero Spinelli
IEEE J. Photovolt. 5, 559 (2015)
TiO2 nanoscatterers on Si Al2O3 surface passivation
TiO2 Mie coating
5 nm Al2O3
Si wafer
( = 3 ms)
5 nm Al2O3
Bare Si wafer
32.1%
TiO2 Mie coating
2.6%
1.6%
Piero Spinelli, Bart Macco
Appl. Phys. Lett. 102, 233902 (2013)
Nanopatterned Si solar cell designs
Piero Spinelli, Bonna Newman
Ultra-thin a-Si:H solar cell: 90 nm i–layer
Experiment
400 nm
pitch
patterned
flat
enhanced red and blue response by
Simulation
resonant dielectric
scatterers
400 nm
pitch
400 nm
pitch
flat
500 nm
pitch
500 nm
ITO
pitch
a-Si:H
ZnO:Al
Ag
sol-gel
flat
500
nm
Vivian Ferry, Claire van Lare
Nano Lett. 11, 4239 (2011), Optics Express 21, 20739 (2013)
Nanopatterned CIGS solar cell designs
TiO2
AZO (240 nm)
ITO (130 nm)
CdS (100 nm)
CIGS (460 nm)
Mo (800 nm)
nano
nano
flat
flat
+ enhanced Voc
reduced backrecombination
Claire van Lare, Guanchao Yin
ACS Nano 9, 9603 (2015)
Nanopatterned GaAs, thin crystalline Si
simulations
Piero Spinelli, Dennis Callahan,
Lourens van Dijk
The solar cell as an optical integrated circuit
=670 nm
ITO
a-Si:H
ZnO:Al
Ag
sol-gel
500 nm
Vivian Ferry, Claire van Lare
Nano Lett. 11, 4239 (2011), Optics Express 21, 20739 (2013)
Soft-imprinted nanopatterned AR interference coating
Silica sol-gel
Rubber stamp
Nanoglass
Flexible
Silica nanopattern with effective index n=1.22
100 nm
d = 240 nm
h = 120 nm
p = 325 nm
Jorik van de Groep, Piero Spinelli
Nano Lett. 15, 4223 (2015)
Measured total reflection
Silica nanopattern on glass substrate
7.3 %
4.3 %
1.1 %
Jorik van de Groep, Piero Spinelli
Nano Lett. 15, 4223 (2015)
Nano-imprinted encapsulated Si solar cells
3.8% increase in
photocurrent
Jorik van de Groep, Piero Spinelli
Nano Lett. 15, 4223 (2015)
Nano-imprinted smart phones
flat
patterned
Jorik van de Groep, Piero Spinelli
Nano Lett. 15, 4223 (2015)
Hydrophobicity
Jorik van de Groep, Piero Spinelli
Nano Lett. 15, 4223 (2015)
Transparent conductive silver nanowire network
2 m
Ag nanowire network fabricated with
electron beam lithography
width: 45-110 nm
height: 60 nm
Jorik van de Groep, Piero Spinelli
Nano Lett. 12, 3138 (2012)
Transparent conductive silver nanowire network
Optical transmission
45 nm
110 nm
MIM
plasmons
I-V
Localized
plasmons
Surface
plasmons
Ag nanowires
can replace ITO
Jorik van de Groep, Piero Spinelli
Nano Lett. 12, 3138 (2012)
Ag nanowire network transparent conductors
pitch
100 nm
Ag nanowires
on glass
Jorik van de Groep, Dhritiman Gupta
Sci. Rep. 5, 11414 (2015)
Metal nanowire printed Si HIT cells
ITO: reduces Jsc
– Ohmic losses
– Shading by Ag fingers
– Optical absorption
– Light reflection
sunlight
shading
Ag fingers
Ohmic losses ITO
ITO dielectric function
2.5
Drude absorption
0.8
0.6
1
0.4
80 nm
≈
c-Si wafer
n type, FZ or CZ, <111>
≈
k
n
1.5
optical
attenuation
p+ a-Si:H
i a-Si:H
1
2
50 µm
interband
absorption
0.5
0.2
a-Si:H i
n+ a-Si:H
ITO
0
500
1000
0
1500
Ag
Wavelength (nm)
Synowicki, Thin Solid Films 313, 394 (1998)
Mark Knight
Jorik van de Groep
Metal nanowire printed Si HIT solar cells
SCIL in silica sol-gel + Ag evaporation + lift-off
Varying array pitch
Width
~80 nm
1000 nm
800 nm
600 nm
400 nm
Varying wire width
Pitch
500 nm
63 nm
82 nm
101 nm
113 nm
Mark Knight
Jorik van de Groep
SCIL on FZ and CZ Si wafers
Float-zone Si(100)
mechanically polished
Czochralski-grown Si(111)
chemically polished
5 mm
• Flexible PDMS stamp conforms to rough substrate
• No stamp damage due to dust, roughness
Mark Knight
Jorik van de Groep
Nanoscale conformality of SCIL soft imprint
Rough CZ Si
height (nm)
height (nm)
Polished FZ Si
200
NW height: 50 nm
100
0
0
5
10
position (m)
15
20
NW height: 50 nm
200
100
0
0
5
10
position (m)
15
20
Mark Knight
Jorik van de Groep
Ag nanowire patterned Si heterojunction solar cells
80 nm ITO
20 nm ITO +
Ag NW + SiNx
Mark Knight, Jorik van de Groep, Paula Bronsveld
Ag nanowire patterned Si heterojunction solar cells
NW pitch : 1 µm
2 µm
4 µm
ITO only
1 cm
1 µm
80 nm ITO
4.0 7.2
15
width: 80 nm
height: 120 nm
Mark Knight, Jorik van de Groep, Paula Bronsveld
2 µm
4 µm
FF
1 µm
Jsc (mA cm-2)
Voc (mW)
Ag nanowire patterned Si heterojunction solar cells
Efficiency (%)
no NW
Mark Knight, Jorik van de Groep, Paula Bronsveld
Soft imprinted nanowire networks
100 nm
Jorik van de Groep, Dhritiman Gupta
Sci. Rep. 5, 11414 (2015)
20 nm Ag sphere in vacuum
ne e2
R   p 
m* 0
Absorption cross section (10-19 cm2)
Plasmon resonance depends on charge density
Wavelength (nm)
Jorik van de Groep, Matt Sheldon
Science 346, 828 (2014)
F ( N , T )  F   F  T

0
 

N
 N T  T  N N
S
T
(N ,T )  S (N ,T )
N
T/N
n/n0
T
0
N
Voltage (V)
 
o
T(K)
Minimize free energy F(N,T)
(nm)
Plasmo-electric effect in metal nanostructures:
thermodynamics
(nm)
Jorik van de Groep, Matt Sheldon
Science 346, 828 (2014)
Plasmo-electric potential: experiments
Ag colloids on ITO
Kelvin probe
microscopy
60 nm Au
Jorik van de Groep, Matt Sheldon
Science 346, 828 (2014)
Plasmo-electric effect in metal nanostructures
Jorik van de Groep, Matt Sheldon
Science 346, 828 (2014)
Plasmo-electric effect on resonant Au hole arrays
100 mW/cm2
Plasmo-electric potential spectral
dependence shifts with array resonance
Jorik van de Groep, Matt Sheldon
Science 346, 828 (2014)
Plasmo-electric effect in metal nanostructures
Jorik van de Groep, Matt Sheldon
Science 346, 828 (2014)
Conclusions
Light coupling
and trapping
Nanopatterned ARC
on glass
Transparent metal
nanowire networks
Plasmoelectric effect in
metal nanostructures
For details: see www.erbium.nl