intellicube

Transcription

intellicube
Principle of Operation
Legend
1 RTC® control boards
(PCI, PCI-Express, PC/104-Plus,
PCIe/104, SCANalone-USB)
2 Digital interface
3 Digital or analog
servo amplifier boards
Optics
The laser beam is deflected via scan mirrors that are quickly and
precisely positioned by galvanometer scanners. A sealed housing
compactly integrates all components, including the electronics.
The laser beam is focused via an objective at the scan system’s beam
exit and/or a varioSCAN focusing unit at the beam entrance. For optical monitoring of work processes, SCANLAB offers camera adapters.
8
Control
RTC® control boards from SCANLAB provide synchronous control
of your scan systems, lasers and peripheral equipment. SCANLAB’s
laserDESK® laser processing software is perfectly matched to our
RTC®5 boards. Comprehensive DLLs also facilitate customer-developed software solutions.
The status information generated by SCANLAB’s scan systems can be
utilized for monitoring and optimization.
Scan Systems
dynAXIS®
intelliDRILL®
1D Scanners
SCANLAB’s galvanometer scanners and servo amplifiers are the core
components for reliable laser positioning systems. The most basic
product type − the single-axis module − allows positioning of laser
beams in one dimension with up to 20 bits of positioning resolution.
2D Scan Heads
A 2D scan module (consisting of two single-axis modules) deflects
laser beams in two dimensions. Its mounting blocks are optimized
for correct geometric orientation of the scanners and also provide
mechanical stability to the scan system. A scan head also integrates
all components in a sealed housing.
10
varioSCAN
intellicube®
3D Scan Systems
To position the laser spot along the beam axis, the system’s focal length
needs to be dynamically varied. As an add-on to our 2D scan systems,
SCANLAB offers its line of varioSCAN focusing units. 3D scan systems
can be easily controlled by SCANLAB’s RTC® boards, thus turning the
laser beam into a flexible tool for 3D materials processing.
Newest Technologies
SCANLAB continually introduces new scan technologies such as
digital encoders for maximum positioning accuracy and iDRIVE ® for
fully digital systems with comprehensive status monitoring, flexible
tunings and top speeds.
intelliWELD®
powerSCAN
Apertures
Scan mirror size decisively influences the scan system’s overall
dimensions and dynamic properties. Higher laser powers or smaller
focus diameters require larger scan mirrors (and apertures). However,
maximum speeds can only be obtained via small apertures. SCANLAB
offers scan systems with beam-entrance apertures normally ranging
from 7 to 70 mm.
• 7-14 mm Aperture
- intelliSCAN ® and hurrySCAN ® (same housing, while offering
different dynamic capabilities)
- intellicube ® and SCANcube ® (extraordinarily compact housing,
while offering different dynamic capabilities)
hurrySCAN®
intelliSCAN®
• 20-30 mm Aperture
- intelliSCAN ®, intelliDRILL® and hurrySCAN ® (offer outstanding
dynamic performance even at high laser powers and innovative
design including air and/or water cooling)
- intelliWELD ® (developed for robot-assisted welding applications
with fiber-coupled high power lasers)
• > 30 mm Aperture
- powerSCAN (for applications requiring very high laser powers
up to the multi-kW range; large working fields are achievable
while maintaining small spot diameters)
www.scanlab.de
Components for System Integration
RTC® 4
®
RTC 5
Control Boards
SCANLAB’s RTC® control boards provide precise, real-time synchronous control of scan heads, lasers and peripheral equipment.
Further key features:
• Up to 20-bit positioning resolution
• Status signal evaluation
• Processing-on-the-fly
• 2D and 3D image field correction
• Full iDRIVE ® support
• Multiple boards in one PC
• Multitude of application-specific functions
12
Discover New Possibilities with iDRIVE ®
SCANLAB’s iDRIVE ® technology redefines the industry standard for
galvanometer scan head control and is featured in the intelliSCAN ®,
intellicube ®, intelliWELD ® and intelliDRILL® series.
Advantages of iDRIVE ®:
• Fully digital control of scan systems
• Multiple dynamics settings (tunings)
• Automatic switching between different tunings
• Customer-specific and application-specific tunings
• Servo algorithm precisely models the scanner’s behavior
• Simulation and optimization of work processes
• Enhanced production safety via operational-state feedback
RTC® SCANalone
®
laserDESK
laserDESK® Software
laserDESK® is SCANLAB’s professional laser marking and processing
software. It controls your hardware via SCANLAB’s RTC®5 controller
board and thereby unlocks the advantages of iDRIVE ® functionality
in SCANLAB’s newest-generation scan heads.
Its modern user interface also helps you configure, test, calibrate and
monitor your system components and facilitates straight-forward
integration into your production lines. A remote control option is
also available.
System Extensions
varioSCAN dynamic focusing units transform 2D scanners into 3D
scan systems and can replace elaborate flat field objectives.
Camera adapters, SCANalign and the Teach-in Module add processmonitoring and calibration functionality to SCANLAB scan systems.
When needed, our systems can also be equipped with water and air
cooling or sensors for Automatic Self-Calibration.
www.scanlab.de
System and Optical Configurations
Suitable Solutions for Every Need
SCANLAB’s scan systems can be ordered with an assortment of objectives, mirrors, interfaces and dynamic capabilities. Scan housings, too,
are available in a wide variety of formats. This is our way of offering
customers the optimal system tailored to their requirements.
Customer-specific system designs are also available upon request.
14
System Configuration
The system’s optical and dynamic capabilities are determined by
considering many factors, including:
• Focal diameter
• Working distance
• Image field size or working volume
• Wavelength, laser power, pulse length
• Positioning accuracy
• Dynamics
We extensively advise each customer to assure the optimal product
configuration.
s = λ · f · M2 · k / d
s
Focal diameter (1/e2)
λ
Wavelength (typically 193 nm – 10.6 µm)
f
Focal length (typically 30 mm – 2,000 mm)
M2
Beam quality (laser-dependent)
k
Correction factor (ideally 1.27; more typically between 1.5 and 2.0)
d
Beam diameter prior to focusing (typically 6 – 70 mm)
Image
field size
Wavelength, Laser Power, Pulse Length
Our scan systems are equipped with optically coated deflection mirrors and objectives or varioSCAN focusing units appropriate for your
laser’s wavelength, power and pulse length.
Focal Diameter
The focal diameter (1/e2), which the above equation approximates,
depends on the light source (laser wavelength and quality of the
coupled laser beam) as well as the scan system’s aperture and focal
length.
Working Distance and Image Field Size or Working Volume
The available working distance depends primarily on the focusing
optic’s focal length and design. The image field size depends on the
scan system’s scan angle as well as the objective’s focal length and
design.
www.scanlab.de
Application Matrix
2D Scan Systems
Entrance aperture [mm]
Max. laser
power [W]
Writing speed
[cps] (1)
intellicube ®
SCAN cube®
hurrySCAN ® (2)
hurrySCAN ® II
hurrySCAN ®
intelliSCAN ®
intelliSCANde ®
intelliDRILL®
intelliDRILLde®
powerSCAN
powerSCAN i (2)
7
8.5
10
14
10
14
7
10
14
10
14
20
25
30
20
25
30
20
30
33
50
Nd:YAG at1064 nm
100
150
150
250
150
250
100
150
250
150
250
4000
4000
4000
4000
4000
4000
4000
4000
5000
-
-
CO2
50
75
100
200
100
200
50
100
200
100
200
750
1000
1500
750
1000
1500
750
1500
3000
5000
5000
good quality
900
900
640
410
800
460
1100
800
500
1150
500
320
260
220
340
260
220
-
-
-
high quality
600
600
400
280
500
320
800
500
340
800
340
210
170
150
230
170
150
-
-
-
Marking
●
●
●
Welding
Coding
Laser Materials Processing
intelliSCAN ®
intelliSCANde ®
●
●
●
●
●
●
●
●
●
●
●
Remote welding
●
●
●
Cutting
●
●
●
Drilling
●
●
●
●
Scribing, deep-engraving
●
●
●
●
●
●
●
●
●
●
Soldering
Trimming
●
●
Texturing
●
●
Structuring
Perforating
●
●
●
●
●
●
●
●
●
●
●
●
Heat treatment
●
●
●
●
●
●
●
●
●
●
●
●
Processing of curved surfaces
Rapid
Manufacturing
Micro-machining
Stereolithography
●
●
●
●
Laser sintering
●
●
●
Rapid tooling
●
●
●
Laser engraving
●
●
●
●
●
Processing-on-the-fly
●
●
●
●
●
●
Inspection, identification
●
●
●
●
●
●
●
●
●
●
Large field scanning
Precision display systems
Material sorting
●
●
●
●
●
Biomedical systems
●
●
●
Ophthalmology
●
●
●
●
●
●
Product individualizing
Medical
Systems
●
●
●
●
●
●
Dermatology
Science and Research
●
(1)
characters per second with single-stroke characters of 1 mm height, f = 160 mm F-Theta objective (f = 163 mm F-Theta objective for hurrySCAN 20 / 25 / 30 and intelliSCAN ® 20 / 25 / 30)
(2)
hurrySCAN® only with 10 mm aperture;
(3)
powerSCAN i only with 50 and 70 mm aperture
© SCANLAB 05 / 2012 Information is subject to change without notice.
●
●
●
●
70
Application Matrix
3D Scan Systems
Entrance aperture [mm]
Max. laser
power [W]
intelliSCAN ®
with
varioSCANde 20i
Scan Head
with
varioSCAN 20
intelliSCAN ® 20 / 25 / 30
with
varioSCANde 40i (1)
hurrySCAN ® 20 / 25 / 30
with
varioSCAN 40
intelliWELD ®
powerSCAN 33
with
varioSCAN 40
powerSCAN 50i
with
varioSCAN 60i
powerSCAN 70i
with
varioSCAN 80i
max. 16
max. 8
max. 8
max. 16
max. 16
30 FC
max. 16
max. 16
Nd:YAG at 1064 nm
200
200
4000 / 4000 / 4000
4000 / 4000 / 4000
8000
4000
4000
-
CO2
200
200
750 / 1000 / 1500
750 / 1000 / 1500
-
2000
2000
2000
Typical processing speed [rad/s]
20
8
20
5
-
3
2.5
1.5
Typical positioning speed [rad/s]
35
18
20
9
100% in 10 ms
9
9
9
●
●
●
●
●
●
●
●
●
●
●
●
Remote welding
●
●
●
●
●
●
Cutting
●
●
●
●
●
●
●
●
●
●
●
Marking
Welding
Laser Materials Processing
Coding
Drilling
●
●
●
●
Scribing, deep-engraving
●
●
●
●
Soldering
●
●
●
●
Texturing
●
●
●
●
Structuring
●
●
●
●
Trimming
Perforating
●
●
●
●
●
●
●
Heat treatment
●
●
●
●
●
●
●
●
Processing of curved surfaces
●
●
●
●
●
●
●
●
●
●
●
●
Stereolithography
●
●
Laser sintering
●
●
●
●
●
Rapid tooling
●
●
●
●
●
Laser engraving
●
●
●
●
●
●
●
●
●
●
●
●
●
●
Rapid
Manufacturing
Micro-machining
Processing-on-the-fly
●
●
Inspection, identification
●
●
Large field scanning
●
●
●
Precision display systems
Material sorting
Medical
Systems
Product individualizing
Ophthalmology
●
●
●
●
Dermatology
Science and Research
(1)
●
Biomedical systems
●
preliminary specifications
© SCANLAB 05 / 2012 Information is subject to change without notice.
●
●
●
●
●
dynAXIS, dynAXIS 3
system components for integrators
dynAXIS galvanometer scanners are high-performance rotary
motors for optical applications. They consist of a motor section
based on moving magnet technology and a high-precision position detector. The primary area of application is the fast and precise positioning of mirrors for the deflection of laser beams.
The exceptional dynamics of SCANLAB’s dynAXIS scanners are the
result of years of experience in developing and manufacturing scanners, scan systems and scan solutions for industrial use.
The motor section of each dynAXIS is ideally matched to the
deflection mirror´s inertial load. The optimized rotor design is largely
responsible for the favorable dynamic properties and resonance
characteristics. Axially pre-loaded precision ball bearings guarantee
a backlash-free rotor assembly with high stiffness and low friction.
Special attention has been paid to long bearing lifetimes.
The optical position detector system is characterized by high resolution, as well as good repeatability and drift values. The scanners
are equipped with heaters and temperature sensors (except
dynAXIS XS and dynAXIS T). This allows temperature stabiliza-tion
for further enhancing long-term stability, even under fluctua-ting
ambient conditions.
The new scanners of the dynAXIS 3 series feature a revised position
detector for exceptionally low drift, highest linearity and, optionally, extended deflection angles.
For all dynAXIS scanners, SCANLAB provides suitable mirrors and
mirror coatings for all common laser wavelengths and power levels.
In addition to excellent reflection properties, the mirrors are also
optimized with respect to inertial load, stiffness and flatness.
The high quality of SCANLAB’s galvanometer scanners enables errorfree operation in long-term and continuous use. Comprehensive
measurements on custom test benches assure that the highest level
of quality is continuously maintained.
dynAXIS, dynAXIS 3
Mounting
A rotation-symmetric flange facilitates
mounting of the galvanometer scanner.
When mounting, ensure that the galvanometer housing is electrically insulated
from the machine assembly. Mirror stoppers
are already integrated in the scanners.
Mirrors are directly bonded to the
galvanometer´s shaft. The mirrors of the
dynAXIS M and dynAXIS L are attached via a
mirror mount to the shaft.
Type-Dependent Specifications
dynAXIS, dynAXIS 3 (1)
XS
T
S
M
L
Rotor inertia (2)
Torque constant
Coil resistance
Coil inductance
Max. RMS current
0.028 g·cm2
2.3 N·mm/A
3.9 Ω
90 µH
1.8 A
0.125 g·cm2
5.3 N·mm/A
2.8 Ω
145 µH
2.2 A
0.34 g·cm2
7.5 N·mm/A
2.7 Ω
165 µH
2.5 A
1.2 g·cm2
15 N·mm/A
2.2 Ω
275 µH
3.5 A
5.1 g·cm2
24 N·mm/A
0.85 Ω
300 µH
5A
6A
10 A
10 A
10 A
15 A
Common Specifications
(with SCANLAB control board, all angles are in mechanical degrees)
Maximum scan angle
Position detector
Nonlinearity (7)
Offset drift
Gain drift
Repeatability (RMS)
Typical output signal
- differential mode
- common mode
Supply current
dynAXIS 3 (6)
up to ± 20°
< 0.4 %
< 15 µrad/K
< 50 ppm/K
< 1 µrad
< 0.1 %
< 3 µrad/K (8)
< 12 ppm/K(8)
< 1 µrad
–11 µA / °
–140 µA
35 – 60 mA
–10.5 µA / °
–110 µA
max. 45 mA
Heater (3)
Heater resistance
120 Ω
Max. heater current
1000 Ω at 25 °C
578 Ω at 40 °C
0.25 A
Cable length
Installation
Operating temperature
standard 0.22 m
electrically insulated
5 – 50 °C noncondensing
Temperature sensor
resistance
(max. case temp. 50 °C)
Peak current
Weight
Without cable
Connector
Without heater (3)
With heater (3)
Inertial load
Recommended
Maximum
Recommended aperture
dynAXIS
±12°
approx. 25 g approx. 40 g (5) approx. 220 g approx. 300 g approx. 400 g
(6)
DE9M
Dynamic performance
(with SCANLAB control board)
Step response time 1% of full scale (4)
only available as dynAXIS 3 T, 3 S, 3 M and 3 L; preliminary
values
for scan angles from –11° to +11°
(8)
without temperature control < 5 µrad/K and < 25 ppm/K
DE9M
DA15F
DA15F
DA15F
DA15F
0.02 g·cm2
0.05 g·cm2
7 mm
0.1 g·cm2
0.5 g·cm2
8.5 mm
0.35 g·cm2
1.5 g·cm2
10 mm
1.2 g·cm2
6 g·cm2
14 mm
8 g·cm2
25 g·cm2
20 – 30 mm
0.23 ms
0.24 ms
0.25 ms
0.40 ms
0.70 ms
(7)
(1)
only available as dynAXIS 3 T, 3 S, 3 M and 3 L
dynAXIS XS, S and T with integrated mirror mount, dynAXIS M and L without mirror mount
D-sub plugs resp. sockets; heating available for dynAXIS 3 T, but not dynAXIS XS or dynAXIS T
(4)
rated for 1/1000 of full scale, with mirrors for the recommended aperture
(5)
weight for dynAXIS 3 T: approx. 100 g
(2)
(3)
Ø38
8
Ø6.5
11.75
Ø5.5
8
1+0.03
94.5 (dynAXIS® 3 L)
92.5 (dynAXIS® L)
75.1
Ø6.5
(dynAXIS®
64.1
56.8 (mounting area)
3.05+0.05
removable
mirror mount
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
Ø 6.99 - 0.01
Ø 38
Ø9
Ø 22-0.03
Ø 38
74
3 M)
72 (dynAXIS® M)
39.5
2.5
dynAXIS L, dynAXIS 3 L
optional
mirror mount
all dimensions in mm
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001
[email protected] · www.scanlab-america.com
Ø 30.48 - 0.03
12 / 2014 Information is subject to change without notice.
Product photos are non-binding and may show customized features.
1.7
51
1.95+0.05
2.5
1.75 +0.05
dynAXIS M, dynAXIS 3 M
12.5
2
16.7
39.2
57.2 (dynAXIS® S)
59.2 (dynAXIS® 3 S)
Ø16.5
1.75+0.05
2
dynAXIS S, dynAXIS 3 S
Ø14-0.03
29.1
Ø14-0.03
29.1
11
Ø12.68-0.03
45
1.7
dynAXIS 3 T
Ø8
Ø 22-0.03
Ø 38
dynAXIS T
20
Ø16
Ø12.6
40.2
22.9
15.5
1.3
dynAXIS XS
basiCube
New!
compact and economic
SCANLAB's product range now includes the basiCube scan head,
an easily-integrated standard solution for laser marking. This
product is manufactured in Germany to the highest quality
standards.
Key benefits:
• Very fast writing speed
• Ideal for fiber lasers (full 10-mm aperture)
• Ultra-compact scan head, for easy integration
With impressive dynamics, basiCube is perfectly tailored for
typical laser marking applications. The scan head achieves
800 characters per second with good marking quality, thus
setting new standards in its class. basiCube's 10-mm aperture is
ideal for use with typical fiber lasers. And the housing's minimal
volume facilitates integration into even the tightest spaces.
basiCube is available for three laser wavelengths (355 nm, 1064 nm
or 10600 nm) and combinable with a number of objectives.
Control is via the widely-used digital XY2-100 protocol.
• Excellent price/performance ratio
• Dependable SCANLAB quality – Made in Germany
Typical Applications:
• Marking
• Coding
• Processing-on-the-fly
Typical Industries:
• Food & Beverages
• Packaging
• Electronics & Semiconductors
basiCube
Quality
Specifications
basiCube 10
Aperture
Tracking error
10 mm
0.14 ms
Positioning resolution
16 bit (4)
Repeatability (RMS)
< 2.0 µrad
Optical performance
Step response time (1)
1% of full scale
0.35 ms
Typical scan angle
±0.35 rad
10% of full scale
1.0 ms
Gain error
< 5 mrad
Zero offset
< 5 mrad
Typical speeds (2)
Marking speed
2.5 m/s
Nonlinearity
< 3.5 mrad (5)
Positioning speed
12.0 m/s
Power requirements
Interface (digital)
±15 V DC,
max. 3 A each
XY2-100
Operating temperature
25 °C ± 10 °C
Writing speed
Good writing quality
800 cps
High writing quality
570 cps
(all angles are in optical degrees)
Long-term drift
(4)
8-h-drift (after 30 min warm-up) (3)
Offset
< 100 µrad
Gain
< 250 ppm
(5)
based on the full angle range (e.g. positioning resolution
11 µrad for angle range ±0.36 rad)
with respect to 44° = 0.768 rad
The high quality of SCANLAB’s scan solutions is the result of years of experience
in the development and manufacture of
galvanometer scanners and scan systems.
In addition, every scan system must first
pass the SCAN check burn-in test before it
is released for shipment to the customer.
Options
• Assortment of objectives
• varioSCAN: upgrade to a 3-axis
scan system
• Camera adapter for optical process
monitoring
Temperature drift
Offset
< 30 µrad/K
Gain
< 160 ppm/K
(all angles are in optical degrees)
(1)
settling to 1/1000 of full scale
with F-Theta objective, f = 160 mm
(3)
at constant ambient temperature and load
(2)
9.
90.5
8
35.4
91
Beam in
.4
5.6
10
Beam exit side
Beam out
Beam in
x1
M79 ep)
e
(6 d
12.54
43.46
basiCube 10
42.52
Aperture
Beam displacement
10 mm
12.54 mm
Weight
1.5 kg
all dimensions in mm
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001
[email protected] · www.scanlab-america.com
02 / 2015 Information is subject to change without notice.
Product photos are non-binding and may show customized features.
Ø
22.41
Beam entrance side
basiCube 10
SCANcube, intellicube
scanning in pocket size
The ultra-compact scan heads of the SCANcube series deliver
excellent dynamics and superior SCANLAB product quality in a
minimum-size package. The scan heads of the intellicube series
advantageously combine the features of the successful SCANcube
and intelliSCAN platforms.
SCANcube and intellicube scan heads bring success to applications demanding very fast marking speeds and integration in the
tightest of spaces. Applications include packaging-industry coding
and marking of electronic components, i.e. market domains typically served in the past by inkjet systems.
Sealed against water and dust, the SCANcube’s and intellicube’s
robust and exceptionally compact housing facilitates straightforward integration into production environments – even confined,
difficult-to-access locations. A wide variety of objectives can be
used with these scan heads.
The intellicube is also ideal for applications requiring very high
dynamics or the acquisition of important status information.
Typical Applications:
• Marking and coding
• Semiconductor and electronics industry
• Processing-on-the-fly
SCANcube 7, 8.5 , 10, 14
SCAN cube 7
12.9
77.9
H7 )
14 deep
(4
Ø6.8
Beam entrance side
29.38
Beam exit side with
x1
M55eep)
(6 d
.5
78
69
9.98
29.64
Beam in
SCAN cube 8.5
32.5
Beam entrance side
12.9
82.1
.5
0.5
Beam exit side
9
69
.5
10.17
29.95
Beam in
x1
M55eep)
(6 d
32.69
SCAN cube 10
94
.8
Ø9
22.41
Beam entrance side
40.5
Beam exit side
14
1
Beam in
12.54
.5
x1
M79 eep)
(6 d
SCAN cube 14
43.46
96
42.52
Beam entrance side
105.5
22.41
3.8
Ø1
39.5
Beam exit side
.5
3
13
1
9x )
M7 deep
(5
Beam in
16.42
43.58
.5
SCANLAB precisely optimizes and tunes
all optical components to one another to
ensure maximum focus quality and stable
process parameters. Optical components
offered by SCANLAB include compact
objectives, as well as objective mounts
for standard objectives. Optics for various
wavelengths, power densities, focal
lengths and image fields are available.
Control
Ø8
29.38
99
Optics
42.52
all dimensions in mm
Dimensions
SCANcube
Aperture
Beam displacement
7 mm
9.98 mm
8,5 mm
10.17 mm
10 mm
12.54 mm
14 mm
16.42 mm
SCAN cube scan heads are equipped
with either an analog or a digital standard
interface accessible via a 25-pin D-SUB
connector.
They are easily controlled via SCANLAB’s
RTC PC interface board or the PC-independent RTC SCAN alone board from
SCANLAB.
intellicube scan heads are equipped with
a digital standard interface. They are easily
controlled via SCANLAB’s RTC4 or RTC5 PC
interface board. Scan head diagnosis and
all essential configuration parameters are
controlled via software commands.
Options
• For optical process monitoring,
SCANLAB offers a camera adapter.
intellicube 10, 14
SCANcube or intellicube?
intellicube 10
2
1
40.5
Beam exit side
4
11
96
The intellicube provides improved dynamic
performance. And as a direct beneficiary
of SCANLAB’s years of experience developing digitally controlled intelliSCAN scan
systems, the intellicube also offers all the
advantages of iDRIVE technology: high
flexibility, superior dynamics, real-time monitoring of actual position and advanced
status information, etc.
.5
x1
M79 eep)
(6 d
Beam in
12.54
3
intellicube 14
42.52
Beam entrance side
Ø1
105.5
2
1
39.5
Beam exit side
3.5
1
9x )
M7 deep
(5
13
99
.5
Beam in
3
16.42
43.58
The high quality of SCANLAB’s scan solutions is the result of years of experience
in the development and manufacture of
galvanometer scanners and scan systems.
In addition, every scan system must first
pass the SCAN check burn-in test before it
is released for shipment to the customer.
3.8
Quality
22.41
intellicube scan heads are available with
vector-tuning or step-tuning.
22.41
94
.8
Ø9
In addition to the 10 and 14 mm apertures,
the SCAN cube series also offers extremely
compact scan heads with 7 or 8.5 mm
apertures. Further the SCAN cube can be
equipped with either a digital or an analog
interface.
Beam entrance side
43.46
The intellicube and SCAN cube are electrically and mechanically inter-compatible.
42.52
Legend
1 Beam in
2Connector
3 Beam out
all dimensions in mm
The housing dimensions of intellicube 10 and 14 are identical to
SCANcube 10 and 14.
Dimensions
intellicube
Aperture
Beam displacement
10 mm
12.54 mm
14 mm
16.42 mm
SCANcube, intellicube
Type-Dependent Specifications
(all angles are in optical degrees)
SCAN cube 7
SCAN cube 8.5
SCAN cube 10
intellicube 10
SCAN cube 14
intellicube 14
Aperture
7 mm
8.5 mm
10 mm
10 mm
14 mm
14 mm
Beam displacement
9.98 mm
10.17 mm
12.54 mm
12.54 mm
16.42 mm
16.42 mm
Dynamic performance
Tracking error
0.14 ms
0.14 ms
0.16 ms
0.14 ms
0.30 ms
0.24 ms
1 % of full scale
0.25 ms
0.30 ms
0.40 ms
0.35 ms
0.65 ms
0.50 ms
10% of full scale
0.70 ms
0.70 ms
1.2 ms
1.2 ms
1.6 ms
1.4 ms
Marking speed
2.5 m/s
2.5 m/s
2.0 m/s
2.5 m/s
1.0 m/s
1.5 m/s
Positioning speed
15.0 m/s
15.0 m/s
10.0 m/s
15.0 m/s
7.0 m/s
12.0 m/s
good writing quality
900 cps
900 cps
640 cps
800 cps
410 cps
460 cps
high writing quality
600 cps
600 cps
400 cps
500 cps
280 cps
320 cps
650 g
1 kg
1.9 kg
1.9 kg
2.3 kg
2.3 kg
Step response time
(settling to 1/1000 of full scale)
Typical speeds (1)
Writing speed(2)
Weight (without objective)
(1)
(2)
with F-Theta objective, f = 160 mm
single-stroke characters of 1 mm height
Common Specifications
(all angles are in optical degrees)
Dynamic performance
Repeatability (RMS)
< 2 µrad
Offset drift
< 30 µrad/K
Gain drift
< 80 ppm/K
Long-term drift over 8 hours
< 0.3 mrad
plus temperature-induced gain and offset drift
Optical performance
Typical scan angle
±0.35 rad
Gain error
< 5 mrad
Zero offset
< 5 mrad
Nonlinearity
< 3.5 mrad / 44°
Power requirements
±15 V DC,
max. 3 A each
(SCANcube 7 max. 2 A)
Interface
Analog version (SCANcube)
±4,8 V
Digital version
XY2-100 (3)
or SL2-100
25 °C ± 10 °C
Operating temperature
intellicube XY2-100 Enhanced, SCANcube XY2-100 Standard
12 / 2014 Information is subject to change without notice.
Product photos are non-binding and may show customized features.
(3)
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001
[email protected] · www.scanlab-america.com
SCANcube III
high speed scanning in pocket size
The exceptionally compact scan heads of the new SCANcube III
series establish industry standards for accuracy and dynamic
performance.
• Far higher scan speeds (up to 100%)
• Significantly improved dynamic performance (up to 50%)
• Much lower long-term drift (- 50%)
• Substantially reduced temperature drift (more than 40%)
• Clearly lower heat generation (approx. 50%)
SCANcube III scan heads take advantage of the new dynAXIS 3
series galvanometer scanners for the first time. In conjunction
with new electronics, these galvos deliver highest dynamic performance, lowest drift and best linearity.
The SCANcube III series of scan heads continue to feature a robust,
sealed housing for protection against water and dust. And the
housing‘s extremely compact dimensions facilitate easy integration
into your production lines. Full mechanical and electronic compatibility with previous SCANcube series is retained, thus
simplifying upgrades.
Typical Applications:
•
•
•
•
Marking applications
Materials processing in the semiconductor industry
Microstructuring
Processing-on-the-fly
SCANcube III
Quality
Specifications
The high quality of SCANLAB’s scan solutions is the result of years of experience
in the development and manufacture of
galvanometer scanners and scan systems.
In addition, every scan system must first
pass the SCAN check burn-in test before it
is released for shipment to the customer.
SCAN cube III 10
SCAN cube III 14
Aperture
Tracking error
10 mm
0.12 ms
14 mm
0.15 ms
Step response time (1)
1% of full scale
0.30 ms
0.35 ms
10% of full scale
0.80 ms
0.90 ms
Marking speed
3.0 m/s
2.0 m/s
Positioning speed
16.0 m/s
14.0 m/s
Good writing quality
925 cps
740 cps
High writing quality
700 cps
500 cps
• varioSCAN: upgrade to a 3-axis
scan system
Offset
< 100 µrad
< 100 µrad
Gain
< 100 ppm
< 100 ppm
• Camera adapter for optical process
monitoring
Offset
< 25 µrad/K
< 25 µrad/K
Gain
< 25 ppm/K
< 25 ppm/K
Typical speeds (2)
Options
Writing speed
• Assortment of objectives
Long-term drift
(8-h-drift after 30 min warm-up) (3)
Temperature drift
Common Specifications
(all angles are in optical degrees)
Repeatability (RMS)
< 2 µrad
(1)
Positioning resolution
16 bit (4)
settling to 1/1000 of full scale
(2)
with F-Theta objective, f = 160 mm
(3)
at constant ambient temperature and load, without water cooling;
Optical performance
Typical scan angle
±0.35 rad
Gain error
< 5 mrad
Zero offset
< 5 mrad
Nonlinearity
< 0.9 mrad / 44°
Power requirements
±15 V DC,
max. 3 A each
Interface
Digital version
SL2-100 or XY2-100
Analog version
±4.8 V
Operating temperature
25 °C ± 10 °C
(all angles are in optical degrees)
(4)
SCANcube III 10
based on the full angle range (e.g. positioning resolution
11 µrad for angle range ±0.36 rad)
SCANcube III 14
Strahleintrittsseite
Strahleintrittsseite
x1
M79ief)
(6 t
4
Strahleintritt
,5
99
3
13
9x1
M7 tief)
(5
Strahleintritt
16,42
43,5
,5
43,46
11
12,54
,5
Strahlaustrittsseite
42,52
42,5
SCANcube III Aperture
Beam displacement
10 mm
12.54 mm
14 mm
16.42 mm
Weight
1.9 kg
2.3 kg
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
The housings of the SCANcube III series are identical
with those of the SCANcube scan heads.
all dimensions in mm
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001
[email protected] · www.scanlab-america.com
06 / 2014 Information is subject to change without notice.
Product photos are non-binding and may show customized features.
105,5
94
39,
Strahlaustrittsseite
96
22,4
3,8
22,41
Ø1
,8
Ø9
40,5
hurrySCAN III, hurrySCAN II, hurrySCAN
universal and compatible
These compact scan heads from SCANLAB provide optimal solutions for nearly all challenges found in industrial laser materials
processing. The mechanically and electrically inter-compatible scan
heads have apertures ranging from 7 to 30 mm and various levels
of dynamics. High long-term stability and low drift values are ensured via integrated temperature stabilization.
SCANLAB has products for practically every customer need. Smallaperture systems optimally combine top speed and exceptional
precision. Marking speeds exceeding 1000 characters per second
can be achieved.
Also available are large-aperture scan heads offering small spot
size, high speed and laser-power handling up to the multikilowatt range.
The housing concept as well as tight manufacturing and assembly
tolerances bring high flexibility and certainty to the design and
operation of laser materials processing systems. This also facilitates
speedy adaptation to individual customer requirements.
hurrySCAN III scan heads take advantage of the new dynAXIS 3
series galvanometer scanners. In conjunction with new electronics,
these galvos deliver highest dynamic performance, lowest drift
and best linearity.
Typical Applications:
•
•
•
•
•
•
Materials processing
Marking
Microstructuring
Rapid manufacturing
3D applications
Processing-on-the-fly
hurrySCAN III 10, 14 + hurrySCAN II 7, 10, 14
Optics
To optimally utilize standard objectives,
the hurrySCAN 25’s two scan axes have
differing maximum scan angles. This results
in an elliptical image field with the larger
semi-axis perpendicular to the entrance
beam axis.
Control
All scan heads of these series are equipped
with either analog or digital standard interfaces and are easily controlled via SCANLAB’s
RTC control boards. All scan heads are
optionally available with an optical fiber
data interface.
Denoted dimensions refer to the standard housing type with 10 mm aperture.
Variations in height and depth of the housing are possible; also housings with water cooling
have other dimensions.
Legend
1 Beam in
2 Screws (M6 thread) (#)
(#)
3Flange 4 Alignment pins (6h6) (#)
5 Mounting bracket
6Connectors
7Objective
8 Beam out
Threaded and non-threaded holes at the
housing’s beam entrance side of
hurrySCAN 20, 25 and 30 facilitate mounting of the scan head and installation of
fiber optic outputs.
not included
all dimensiions in mm
Standard mounting bracket (10 mm aperture): rectangular, without cut-out
* The hurrySCAN II 7´s mounting bracket is higher (101.6 mm instead of 91.6 mm)
and the bore holes are horizontally displaced (45.3 mm instead of 42.8 mm).
** True for 10 mm aperture scan heads, for hurrySCAN II 14 and hurrySCAN III14
the dimension is 50.1 mm.
Dimensions
Aperture
Beam displacement (dimension b)
7 mm
9.98 mm
10 mm
12.56 mm
On the beam exit side, threaded holes are
available for attaching add-on components
such as cross jets, illumination, distance
sensors or thermal shields.
Cooling
The hurrySCAN 20, 25 and 30 scan heads
provide water-cooling connections for the
entrance aperture, electronics and galvanometer scanners, along with air-cooling
of the deflection mirrors. This ensures
constant working conditions and excellent
long-term stability, thus guaranteeing
reliable operation even in high-laser-power
applications.
Attachment Provisions
(#)
Scan mirrors and objectives with optimized
mounts are available for all typical laser
types and working fields.
14 mm
16.42 mm
hurrySCAN 20, 25, 30
Options
• varioSCAN: upgrade to a 3-axis
scan system
(hurrySCAN 20, 25 and 30 also with
varioSCAN 40FLEX )
W
180
A
E
• Additional reference sensor system (ASC)
for automatic self-calibration
(10 mm apertures and higher;
not needed with hurrySCAN III)
6.9
• High-performance variants with lightweight mirrors
(14 mm apertures and higher)
20
3
5
14
4
2
0
• Available as a scan module without housing (except hurrySCAN 30)
6
1
Legend
• Camera adapter for optical process
monitoring
Beam exit side with
beam displacement
72
42
1 Beam in
2 Mounting screws (M6 threads) (#)
3 Flange (#)
4 Alignment pins (6h6) (#)
5 Objective
6 Beam out
7 Wider construction (drawn
dashed) only for hurrySCAN 30
E Electrical connectors
A Connection for cooling air
WConnections for cooling water
The high quality of SCANLAB’s scan heads
is the result of years of experience in the
development and manufacture of galvanometer scanners and scan systems. In
addition, every scan system must first pass
the SCANcheck burn-in test before it is
released for shipment to the customer.
5
6x
M
4x
4
7x
6H
not included
7
72
42
(#)
6x
72
Quality
60
• Water and air cooling
(10 mm apertures and higher; standard
for hurrySCAN 20, 25 and 30)
57.15
all dimensions in mm
Beam entrance side
50
dimension b
dimension c
4x
M dimension a
6H 2x 4
4H
7
7
5.5*
25
57.15
25
38.1
140
typ. 5
7
34.93
6
13 13
10*
2x
M
30
3x
85
Beam in
*Dimensions only relevant for the hurrySCAN 30
Dimensions
hurrySCAN 20
hurrySCAN 25
hurrySCAN 30
Aperture (dimension a)
20 mm
25 mm
30 mm
Beam displacement (dimension b)
25.25 mm
29.88 mm
35.53 mm
Dimension c
67.25 mm
72.00 mm
72.00 mm
hurrySCAN III, hurrySCAN II, hurrySCAN Common Specifications
Type-Dependent Specifications
hurrySCAN III 10
hurrySCAN III 14
Repeatability (RMS)
< 2 µrad
Aperture
Tracking error
10 mm
0.12 ms
14 mm
0.18 ms
Positioning resolution
18 bit (8)
Step response time (1)
1% of full scale
Gain error
< 5 mrad
0.35 ms
0.35 ms
Zero offset
< 5 mrad
10% of full scale
1.7 ms
1.2 ms
Skew
< 1,5 mrad
Power requirements
±(15 +1.5) V DC, max. 3 A
(max. 6 A for hurrySCAN 20-30)
Optical performance
Typical speeds (2)
Marking speed
3.0 m/s
2.0 m/s
Positioning speed
12 m/s
12 m/s
Good writing quality
1000 cps
660 cps
High writing quality
700 cps
410 cps
Offset
< 100 µrad
< 100 µrad
Gain
< 100 ppm
< 100 ppm
Analog version
SL2-100, XY2-100 Standard
or optical data transfer
TTL level
Offset
< 100 µrad
< 100 µrad
Operating temperature
25 °C ± 10 °C
Gain
< 100 ppm
< 100 ppm
Typical air requirements (9)
Offset
< 15 µrad/K
< 15 µrad/K
Typical water requirements
Gain
< 25 ppm/K
< 25 ppm/K
clean, filtered air
20 l/min at ∆p < 2 bar
5 l/min at
∆p < 0.1 bar, p < 4 bar
Typical scan angle of scanner 1
±0.35 rad
±0.35 rad
Typical scan angle of scanner 2
±0.35 rad
±0.35 rad
Typical field size – square (2), (4)
110 x 110 mm2
90 x 90 mm2
Nonlinearity
< 0.9 mrad / 44°
approx. 3 kg (5)
< 0.9 mrad / 44°
approx. 3 kg (5)
Input signals
Digital version
Writing speed
SL2-100, XY2-100 Standard
or optical data transfer
alternatively:
±4.8 V; ±9.6 V;
±4.8 mA; ±9.6 mA
3 status signals per axis
Analog version
Long-term drift
8-h-drift (after 30 min warm-up) (3)
Output signals
Digital version
24-h-drift (after 3 h warm-up) (3)
Temperature drift
(all angles are in optical degrees)
Optical performance
Weight (without objective)
(9)
(8)
based on the full angle range (e.g. positioning resolution 2.8 µrad for angle range
±0.36 rad), resolutions better than 16 bit (11 µrad) only together with SL2-100
interface
(9)
air and water cooling optional for hurrySCAN III 10 and 14, hurrySCAN II 7-14
and hurrySCAN 10
(all angles are in optical degrees)
Type-Dependent Specifications
hurrySCAN II
hurrySCAN
7 mm
10 mm
14 mm
10 mm
20 mm
25 mm
30 mm
0.11 ms
0.12 ms
0.24 ms
0.18 ms
0.35 ms
0.50 ms
0.55 ms
Step response time (1)
1% of full scale
0.23 ms
0.35 ms
0.40 ms
0.35 ms
0.80 ms
0.90 ms
1.20 ms
10% of full scale
-
1.70 ms
1.60 ms
0.90 ms
2.50 ms
3.20 ms
4.50 ms
Marking speed
3.5 m/s
3.0 m/s
1.5 m/s
2.0 m/s
1.0 m/s
0.8 m/s
0.7 m/s
Positioning speed
15.0 m/s
12.0 m/s
7.0 m/s
7.0 m/s
6.0 m/s
5.0 m/s
3.0 m/s
Good writing quality
1100 cps
1000 cps
500 cps
640 cps
320 cps
260 cps
220 cps
High writing quality
800 cps
700 cps
340 cps
400 cps
< 0.3 mrad (6)
< 0.6 mrad (7)
< 0.6 mrad (7)
< 0.6 mrad (7)
210 cps
< 0.6 mrad (7)
170 cps
< 0.6 mrad (7)
150 cps
< 0.6 mrad (7)
Typical scan angle of scanner 1
±0.35 rad
±0.35 rad
±0.35 rad
±0.35 rad
±0.35 rad
±0.26 rad
±0.35 rad
Typical scan angle of scanner 2
±0.35 rad
±0.35 rad
±0.35 rad
±0.35 rad
±0.35 rad
±0.40 rad
±0.35 rad
Typical field size – ellipse (2), (4)
-
-
-
-
-
80 x 130 mm2
-
Typical field size – square (2), (4)
110 x 110 mm2
110 x 110 mm2
90 x 90 mm2
110 x 110 mm2
90 x 90 mm2
75 x 75 mm2
50 x 50 mm2
Nonlinearity
< 3.5 mrad / 44° < 3.5 mrad / 44° < 3.5 mrad / 44° < 3.5 mrad / 44° < 3.5 mrad / 44° < 3.5 mrad / 44° < 3.5 mrad / 44°
approx. 3 kg (5)
approx. 3 kg (5)
approx. 3 kg (5)
approx. 3 kg (5)
approx. 5.8 kg
approx. 5.8 kg
approx. 5.8 kg
Aperture
Tracking error
Typical speeds (2)
Writing speed
Long-term drift (8-h-drift)
Weight (without objective)
(all angles are in optical degrees)
(1)
settling to 1/1000 of full scale
with F-Theta objective, f = 160 mm respectively f = 163 mm (hurrySCAN 20-30)
at constant ambient temperature and load, without water cooling;
achievable even under varying load when equipped with temperature-controlled water cooling
(4)
limited by vignetting at objective
(5)
with optional water cooling up to 4.7 kg
(6)
at constant ambient conditions, plus offset drift < 30 µrad/K and gain drift < 100 ppm/K
(7)
after warm-up
(2)
(3)
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001
[email protected] · www.scanlab-america.com
12 / 2014 Information is subject to change without notice.
Product photos are non-binding and may show customized features.
Optical performance
intelliSCAN se smart scanning meets precision
Thanks to digital encoder technology, intelliSCANse scan heads
deliver unparalleled positioning accuracy, along with highest dynamic performance. Featuring lowest drift and dither values, they set
new standards for the ultra-precise scanning typically demanded by
high-end applications. The perfect working scenario for these scan
heads: applications involving precision positioning stages with challenging throughput, productivity and accuracy requirements.
SCANLAB‘s self-developed dynAXISse galvanometer scanners help
the intelliSCANse attain a combination of superior precision and
dynamics. Here, SCANLAB‘s patented digital encoder technology
is implemented with stationary scales and extremely low inertia.
This ensures highest processing accuracy, even under fluctuating
ambient and processing conditions, and makes intelliSCANse 10 the
market‘s fastest available high-precision 10-mm scan head – with
an outstanding price/performance ratio.
The intelliSCANse series of scan heads excels with industry-proven
digital servo electronics, whose powerful algorithms enable top
dynamics and processing quality. The electronics can be equipped
and enhanced with several servo algorithms and parameter sets
(tunings).
Furthermore, the electronics offers comprehensive possibilities for
tracking status values, diagnostics and communication between
scan heads and control computers. All the scan system‘s key status
values are collected (e.g. positions, mirror speeds, output stage currents, supply voltage and temperature). These values can be used
for process simulation, monitoring and documentation, as well as
process optimization in safety-critical applications.
Typical Applications:
•
•
•
•
Microprocessing
Microstructuring
Materials processing
Processing-on-the-fly
Typical Industries:
• Display and electronics manufacturing
• Semiconductor and photovoltaic industries
• Automotive industry
intelliSCAN se Options
Specifications
intelliSCAN se 10
intelliSCANse 14
Aperture
Tuning
10 mm
Fast Vector
14 mm
Sharp Edge
Tracking error
0.11 ms
0.15 ms
Marking speed
3.5 m/s
2.0 m/s
Positioning speed
12.0 m/s
5.0 m/s
Good writing quality
1080 cps
680 cps
High writing quality
760 cps
480 cps
Step response time (2)
1% of full scale
0.40 ms
0.45 ms
Offset
< 20 µrad
< 20 µrad
Gain
< 20 ppm
< 20 ppm
Repeatability (RMS)
< 0.4 µrad
Offset
< 20 µrad
< 20 µrad
Positioning resolution
20 bit (4)
Gain
< 25 ppm
< 25 ppm
Optical performance
Typical scan angle
±0.35 rad
Offset
< 15 µrad/K
< 15 µrad/K
Gain error
< 5 mrad
Gain
< 8 ppm/K
< 8 ppm/K
Zero offset
< 5 mrad
< 2.0 µrad
< 1.6 µrad
Nonlinearity
< 0.5 mrad / 44°
(all angles are in optical degrees)
Power requirements
30 V DC, max. 3 A
(1)
Interface
Operating temperature
SL2-100,
XY2-100 Enhanced
or optical data transfer
25 °C ± 10 °C
Weight
approx. 3 kg
• Assortment of objectives
• varioSCAN: upgrade to a 3-axis
scan system
Typical speeds (1)
• High-performance variant with lightweight mirrors
• Water and air cooling
Writing speed
• Available as a scan module without
housing
• Camera adapter for optical process
monitoring
Long-term drift
8-h-drift (after 30 min warm-up) (3)
Common Specifications
24-h-drift (after 3 h warm-up) (3)
Temperature drift
Dither (position noise, RMS)
with F-Theta objective, f = 160 mm
(2)
settling to 1/1000 of full scale
(3)
at constant ambient temperature and load, without water cooling;
achievable even under varying load when equipped with temperature-controlled water cooling
(all angles are in optical degrees)
(4)
intelliSCANse 10, 14
Legend
8
5
147
156
91.6
The housings of the intelliSCAN se series are identical with
those of the intelliSCAN and hurrySCAN series.
6
5
Denoted dimensions refer to the standard housing type (with standard
mounting bracket, 10 mm aperture). Variations in size and form are
possible; also housings with water cooling have other dimensions.
4
7
11
5
17
all dimensions in mm
4
2
5 Mounting bracket
6 Electrical connectors
7Objective
8 Beam out
8
1
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001
[email protected] · www.scanlab-america.com
01 / 2015 Information is subject to change without notice.
Product photos are non-binding and may show customized features.
1 Beam in
2 Screws (M6 threads) *
3 Flange *
4 Alignment pins (6h6) *
(* not included)
11
16
3
based on the full angle range (e.g. positioning resolution
0.7 µrad for angle range ±0.36 rad), resolutions better than
16 bit (11 µrad) only together with SL2-100 interface
intelliSCAN III
smart scanning meets low drift
The new intelliSCAN III series of scan heads establishes industry
standards for long-term stability and dynamic performance.
• Much lower long-term drift (- 50%)
• Significantly reduced temperature drift
• Multitude of switchable tunings for shorter process times
• Application-specific and customer-specific tunings
• Realtime acquisition of all key operational states
• Comprehensive diagnostic possibilities
intelliSCAN III scan heads take advantage of the new dynAXIS 3
series galvanometer scanners for the first time. In conjunction
with new electronics, these galvos deliver highest dynamic performance, lowest drift and best linearity.
intelliSCAN III scan heads continue to offer all advantages of the
intelliSCAN product line, including a wide assortment of options.
Efficient algorithms of the digital servo electronics enable very high
dynamic performance and marking quality. And the scan head
electronics provide extensive possibilities for diagnostics and communication between the scan system and your control computer,
as well as acquisition of all the scan system‘s key operational states.
Typical Applications:
•
•
•
•
•
Micromachining
Marking, welding, drilling
Rapid prototyping, rapid tooling
Materials processing in the semiconductor industry
Processing-on-the-fly
intelliSCAN III
Options
Specifications
• varioSCAN: upgrade to a 3-axis
scan system
(4)
intelliSCAN III 10 intelliSCAN III 14 intelliSCAN III 20
intelliSCAN III 30 10 mm
Fast Vector
14 mm
Sharp Edge
20 mm
Fast Vector III (5)
30 mm
Fast Vector III (5)
0.11 ms
0.13 ms
0.30 ms
0.45 ms
Step response time 1% of full scale
• High-performance variants with lightweight mirrors
0.40 ms
0.40 ms
0.65 ms
1.0 ms
• Water and air cooling
10% of full scale
1.1 ms
2.2 ms
2.2 ms
3.2 ms
Marking speed
3.5 m/s
2.5 m/s
1.0 m/s
0.8 m/s
Positioning speed
12 m/s
6.0 m/s
9.0 m/s
6.0 m/s
Aperture
Tuning
Tracking error
(1)
• Camera adapter for optical process
monitoring
Typical speeds (2)
Writing speed
Good writing quality
1080 cps
800 cps
400 cps
320 cps
High writing quality
760 cps
550 cps
270 cps
250 cps
Common Specifications
Long-term drift
Offset
< 100 µrad
< 100 µrad
< 100 µrad
< 100 µrad
Gain
< 100 ppm
< 100 ppm
< 100 ppm
< 100 ppm
Offset
< 100 µrad
< 100 µrad
< 100 µrad
< 100 µrad
Gain
< 100 ppm
< 100 ppm
< 100 ppm
< 100 ppm
Offset
< 15 µrad/K
< 15 µrad/K
< 20 µrad/K
< 20 µrad/K
Gain
< 25 ppm/K
< 25 ppm/K
< 15 ppm/K
< 15 ppm/K
Beam displacement
12.56 mm
16.42 mm
25.25 mm
35.53 mm
Weight
ca. 3 kg
ca. 3 kg
ca. 5.8 kg
ca. 5.8 kg
24-h-drift (after 3 h warm-up)
Repeatability (RMS)
< 2 µrad
Positioning resolution
18 bit (6)
Optical performance
(3)
Temperature drift
Typical scan angle
±0.35 rad
Gain error
< 5 mrad
Zero offset
< 5 mrad
Nonlinearity
< 0.9 mrad / 44°
Power requirements
30 V DC, max. 3 A
or 48 V DC, max. 3 A
Interface
SL2-100 ,
XY2-100 Enhanced,
or optical data transfer
25 °C ± 10 °C
Operating temperature
(all angles are in optical degrees)
(all angles are in optical degrees)
(1)
(6)
settling to 1/1000 of full scale
(2)
with F-Theta objective, f = 160 mm
(3)
at constant ambient temperature and load, without water cooling;
achievable even under varying load when equipped with temperature-controlled water cooling
(4)
preliminary specifications
(5)
also available with the classic intelliSCAN tuning
intelliSCAN III 10, 14
(**)
based on the full angle range (e.g. positioning resolution
2.8 µrad for angle range ±0.36 rad), resolutions better than
16 bit (11 µrad) only together with SL2-100 interface
intelliSCAN III 20, 30
11
8
5
16
W
180
147
156
91.6
3
L
6
6
5
4
7
5
17
6.9
11
20
3
4
7
14
2
4
2
8
1
8
Legend
**
Denoted dimensions refer to the standard housing type
(with standard mounting bracket, 10 mm aperture). Variations in size and form are possible; also housings with water
cooling have other dimensions.
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
0
1
1 Beam in
2 Screws (M6 threads) *
3 Flange *
4 Alignment pins (6h6) *
(* not included)
5 Mounting bracket
6 Electrical connectors
7Objective
8 Beam out
W Connections for cooling water
A Connection for cooling air
all dimensions in mm
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001
[email protected] · www.scanlab-america.com
12 / 2015 Information is subject to change without notice.
Product photos are non-binding and may show customized features.
8-h-drift (after 30 min warm-up)
(3)
intelliSCANde , intelliSCAN
smart scanning
intelliSCAN series scan heads offer advantages such as expandability and digital servo circuitry, whose powerful algorithms can
boost both dynamic performance and marking quality. In addition,
the electronics extensively enhances the range of diagnosis possibilities as well as communication between the scan system and
the customer’s control computer.
SCANLAB can equip its digital servo firmware with multiple control algorithms and parameter sets (tunings). Switching between
different algorithms or sets (even during processing) allows scan
head dynamics etc. to be reconfigured and thereby optimally
adapted to particular task requirements. Application-specific
tunings can boost speed and/or positioning accuracy.
intelliSCAN scan heads allow real-time monitoring of all key
operational states of the scan system, such as mirror positions,
mirror speeds, drive currents, supply voltage and temperature.
As a result, the scan process can be simulated or – especially in
safety-critical applications – monitored, logged and modified if
required.
Scan heads of the intelliSCAN series also create new remotediagnosis possibilities. They have the necessary facilities to support
software-querying of accumulated operating hours, serial number,
date-of-manufacture and essential operational states. Thus, deviations can be quickly detected and corrected.
intelliSCANde is the high-end member of this scan head series.
Using galvanometer scanners with digital encoders, the
intelliSCANde features remarkably low drift and dither values,
making it ideal for high-end applications.
Typical Applications:
•
•
•
•
•
Micromachining
Marking, welding, drilling
Rapid prototyping, rapid tooling
Photovoltaic production
Processing-on-the-fly
intelliSCAN 10, 14 + intelliSCAN 20, 25, 30
Housing
intelliSCANde 14 and intelliSCAN 10, 14
Dimensions: same as hurrySCAN II 10,14
Weight: approx. 3 kg (without objective)
The housings of all intelliSCAN scan heads
are identical with those of the hurrySCAN
series.
Optics
Galvanometer mirrors and objectives with
optimized mounts are available for all typical laser types and image fields. Customerspecific configurations are also possible.
Control
The intelliSCAN is equipped with a
digital standard interface and is easily
controlled via SCANLAB’s RTC4 or RTC5
control board. Scan head diagnosis and
all essential configuration parameters are
controlled via software commands.
intelliSCAN scan heads are available with
either an SL2-100 interface (20 bits) or an
XY2-100 enhanced interface (16 bits, optical also optionally available).
Denoted dimensions refer to the standard housing type (with standard mounting bracket).
Variations in size and form are possible; also housings with water cooling have other
dimensions.
intelliSCAN de 20, 25, 30 and intelliSCAN 20, 25, 30
Options
Dimensions: same as hurrySCAN 20, 25 and 30
• Extendable into a three-axis scan system
with varioSCAN focusing units
Weight: approx. 5.8 kg (without objective)
• Various water-cooling implementations
for all scan heads either as standard
equipment or optionally (for 10 and 14mm apertures)
• Additional reference sensor system
(ASC) for automatic self-calibration (not
required for intelliSCANde )
Legend
all dimensions in mm
• Air cooling for all scan heads either as
standard equipment or optionally (for 10
and 14-mm apertures)
• Scan modules without a housing also
possible
1 Beam in
2 Screws (M6 threads) *
3 Flange *
4 Alignment pins (6h6) *
(* not included)
• Also available as a high-performance
version with light-weight mirrors (for 14,
20 and 30 mm apertures)
5 Mounting bracket
6 Electrical connectors
7Objective
8 Beam out
A Connection for
cooling air
W Connections for
cooling water
• Application-specific and customerspecific tunings (servo algorithms and
parameter sets)
• Camera adapter for process monitoring
intelliSCANde 14 + intelliSCANde 20, 25, 30
Digital Encoder Technology
intelliSCANde scan heads equipped with
digital encoder technology are specifically
optimized to enhance positioning accuracy
without impairing dynamics or mechanical
dimensions. This brings maximized dynamic
performance and positioning accuracy to
application areas needing XY-stage precision
and enables applications that demand the
highest throughput and accuracy.
Featuring dynAXISde galvanometer scanners
with digital encoders, intelliSCANde scan
heads match the high dynamic performance
of the industry-proven dynAXIS (with analog
position detectors). They enable a positioning resolution of 19-20 bits, exceptionally
low dither (electronic noise), best linearity and lowest drift. An SL2-100 interface
facilitates comprehensive 20-bit control via
Quality
SCANLAB’s RTC5 control board. Thanks to
the extended resolution, line pitch can be
precisely adjusted for applications such as
scribing and to eliminate effects such as
Moiré patterns.
Compatibility
Integration of digital encoders does not
appreciably change the outer dimensions
of the galvanometer scanners. Therefore
the housings of all intelliSCANde scan heads
are identical to those of the
hurrySCAN and intelliSCAN series.
Moreover, intelliSCANde scan heads are
electrically and optically fully compatible
with hurrySCAN and intelliSCAN scan
heads.
Example Processing Result
Structure parameters
approx. 40 µm line spacing
approx. 60 µm and 90 µm corner radii
System
intelliSCANde 14
f = 170 mm objective
Process parameters
sharp edge tuning
2 m/s marking speed
5 m/s positioning speed
0.10 ms tracking error
Results
smooth corners with small corner radii
(low tracking error)
excellent line straightness (low dither)
The high quality, dependability and industrial ruggedness of SCANLAB’s scan solutions are the result of years of experience
in the development and manufacture of
galvanometer scanners and scan systems.
intelliSCAN scan heads have accumulated
years of usage deployed in large quantities
across industries worldwide. In addition,
every individual scan system must first pass
the SCAN check burn-in test before it is
released for shipment to the customer.
intelliSCANde , intelliSCAN
Dynamic Specifications
Aperture [mm]
Tuning
Typical speed (2)
Marking speed
Positioning speed
Writing speed
Good writing quality
High writing quality
Dynamic performance
Tracking error
Step response time (3)
1% of full scale
Step tuning
Step response time (3)
10% of full scale
100% of full scale
(1)
(2)
(3)
Common Specifications
intelliSCAN / intelliSCANde 10 (1)
14
20
25
30
Fast Vector
Sharp Edge
Fast Vector
Fast Vector
Fast Vector
3.5 m/s
12.0 m/s
2.0 m/s
5.0 m/s
1.0 m/s
11.0 m/s
0.8 m/s
10.0 m/s
0.7 m/s
9.0 m/s
1080 cps
760 cps
680 cps
480 cps
340 cps
230 cps
260 cps
170 cps
220 cps
150 cps
0.11 ms
0.15 ms
0.32 ms
0.50 ms
0.55 ms
0.40 ms
0.45 ms
0.70 ms
1.0 ms
1.1 ms
1.0 ms
3.0 ms
1.4 ms
3.7 ms
1.9 ms
5.3 ms
2.7 ms
8.0 ms
3.5 ms
11.0 ms
currently not available as intelliSCANde
with F-Theta objective, f = 160 mm (f = 163 mm for intelliSCAN 20, 25 and 30)
settling to 1/1000 of full scale
Optical performance
Typical scan angle
Gain error
Zero offset
Power requirements
±0.35 rad (7)
< 5 mrad
< 5 mrad
30 V DC, max. 6 A (8)
or 48 V DC, max. 6 A (8)
Interface
XY2-100 Enhanced,
SL2-100 or optical
data transfer
Operating temperature 25 °C ± 10 °C
Typical air
clean, filtered air
requirements (9)
20 l/min at ∆p < 2 bar
Typical water
5 l/min at
requirements (9)
∆p < 0.1 bar, p < 4 bar
Weight and dimensions see illustration
(all angles are in optical degrees)
(7)
(8)
(9)
for intelliSCAN 25: ±0.26 rad (scanner 1), ±0.40 rad (scanner 2)
max. 3A with intelliSCAN 10, 14 and intelliSCANde 14
standard for intelliSCAN and intelliSCANde 20, 25, 30;
optional for intelliSCAN 10 and 14 and intelliSCANde 14
Precision Specifications
Angle measurement
Repeatability (RMS)
Positioning resolution
Dither (position noise, RMS)
Temperature drift
Offset
Gain
8-h-drift (after 30 min warm-up) (6)
Offset
Gain
24-h-drift (after 3 h warm-up) (6)
Offset
Gain
Nonlinearity
(all angles are in optical degrees)
intelliSCAN de
digital encoder
< 0.4 µrad
20 Bit (4)
< 1.6 µrad
intelliSCAN analog detector
< 2 µrad
18 Bit (4)
< 5 µrad (5)
< 15 µrad/K
< 8 ppm/K
< 0.6 mrad
< 20 µrad
< 20 ppm
< 20 µrad
< 25 ppm
< 0.5 mrad / 44°
< 3.5 mrad / 44°
(4)
based on the full angle range (e.g. for angle range ±0.36 rad: positioning resolution 0.7 µrad for
intelliSCANde and 2.8 µrad for intelliSCAN), resolutions better than 16 bit (11 µrad) only
together with SL2-100 interface
(5)
for micromachining tuning
(6)
at constant ambient temperature and load, without water cooling;
achievable even under varying load when equipped with temperature-controlled water cooling
Tuning
Optimized for
Application
Fast vector tuning
balanced optimum of all parameters in a wide range of applications
vector marking
Step tuning
minimal step response time
drilling
Sharp edge tuning
low acceleration time, small edge rounding
micro structures
Micromachining tuning
low dither, low line waviness
vector marking, micro structures
Micromachining-sharp edge tuning
low acceleration time, low dither
micro structures
Line scan tuning
highest marking speed (limitation: higher acceleration time)
ultrashort pulse laser processing
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001
[email protected] · www.scanlab-america.com
01 / 2015 Information is subject to change without notice.
Product photos are non-binding and may show customized features.
Some of the available application-optimized tunings:
varioSCAN, varioSCANde i
new dimensions – optics in motion
The dynamic focusing units of the varioSCAN and varioSCANde i
series enable exceptionally precise, high-performance positioning
of the laser focus along the optical axis.
In XY scan systems, the varioSCAN can replace costly flat field objectives. Therefore, the varioSCAN is an ideal solution in applications for which standard flat field objectives are unavailable. The
varioSCAN can also extend XY scan systems into 3D beam deflection systems. The laser focus is guided along the contour of the
workpiece being processed, thus enabling processing in three
dimensions. The varioSCANFLEX additionally allows continuously
adjusting the image field size, working distance and spot size.
The varioSCANde i offers double the maximum travel of conventional varioSCANs and much lower tracking error, resulting in a
larger focus-shift range and better spot quality. Its accuracy, speed,
resolution and linearity, too, are clearly superior to those of all
other varioSCAN units, while substantially eliminating the effects
of drift.
In addition, the varioSCANde i delivers all advantages of iDRIVE
technology: extensive flexibility, high dynamic performance, realtime querying of actual position and other status parameters, etc.
The high-end member of the varioSCAN series of focusing units is
the varioSCANde i. It is equipped with a digital linear encoder.
Typical Applications:
•
•
•
•
•
Drilling, cutting, welding
Laser deep engraving
Rapid prototyping, rapid tooling
Microstructuring
3D workpiece processing
varioSCAN Functionality
varioSCAN 20, 40 + varioSCANde 20i, 40i
z
Working
volume
Scan head
varioSCAN
Adjustable
mirrors
F-Theta
objective
(optional)
Beam expander
(optional)
Laser
z
Working
volume
During the scanning process, a diverging
optic in the varioSCANde and varioSCANde i
is positioned with high dynamics along the
optical axis with respect to a stationary
focusing optic. This produces a change
in the system’s overall focal length, synchronized with the mirror motion. The
varioSCAN and varioSCANde i focusing unit
can thereby expand 2D scan systems into
3-axis scan systems. In 2D applications, the
varioSCAN and varioSCANde i can replace
costly flat field objectives. In 3D beam deflection systems it enables processing in
three dimensions.
SCANLAB offers – for varioSCAN,
varioSCANde i and the whole scan system –
optical configurations for a wide variety of
working distances, image field sizes, beam
diameters, wavelengths and laser powers
for optimally tuning the system to the
customer’s particular application. Thus, a
maximum image field size is achieved with
the minimum spot size.
The focusing optic of the varioSCAN 40FLEX
is motor-driven, enabling continuously variable image field sizes and working distances.
The varioSCAN 40FLEX’s housing contains all
optical components and the electronics.
For scan systems with apertures exceeding
40 mm, SCANLAB offers the varioSCAN
60, 60i, 80 and 80i and the varioSCAN FC.
The varioSCAN 40 and varioSCANde 40i
allows the customer to self-install
various exchangeable optics sets. The
varioSCAN 40´s and varioSCANde 40i’s
integrated air and water cooling ensure
operation at very high laser powers. The
varioSCANde 20i is equipped with a watercooled entrance aperture.
varioSCAN 20
Approx. 105 bis 200
(depending on the version)
30 x Ø 44 h6
19
W
5
2
1
6
varioSCANde 20i
Approx. 105 bis 200
(depending on the version)
35.5 x Ø43
16.5
15 30 x Ø44h6
19
19
W
Options
4
3
33
Beam expander
(optional)
Laser
Optics
43
varioSCAN
Adjustable
mirrors
How it Works
2
5
43
Scan head
• varioSCAN 20 also available with water
cooling
(standard for varioSCANde i systems)
1
3
4
6
The varioSCANde i is equipped with a digital
standard interface and is easily controlled
– even synchronously with a 2D scan
system – via SCANLAB’s RTC 4 or RTC 5
PC interface board.
varioSCAN 40FLEX
1
W
3
2
The varioSCAN is available for digital and
analog-based control.
4
A
varioSCAN 40/40i
Approx. 190 (depending on the version)
36 x Ø 60 h6
W
A
2
5
Ø88
195
182.5
Control
Scan head
226.2
1
(Width: 126)
z
Working
volume
Legend
1 Water-cooled aperture
(optional for varioSCAN 20)
2 Linear motor with
diverging optic
Legend
1 Water-cooled aperture
2 Linear motor with diverging optic
3 Focusing optic
4 Motorized deflection mirrors
A Connection for cooling air
W Connections for cooling water
all dimensions in mm
3 Clamping surface
4 Objective adapter
5 Focusing optic
6 Focusing ring
A Connection for cooling air
W Connections for cooling water
all dimensions in mm
3
6
varioSCAN, varioSCANde i
Typical 3-Axis Scan System Optical Configurations
varioSCANde 40i
varioSCAN 40FLEX / varioSCANde 40iFLEX
Laser
varioSCANde 20i
Nd:YAG
Nd:YAG x 3
CO2
CO2
Wavelength
1064 nm
355 nm
10.6 µm
10.6 µm
XY scan unit
10 mm aperture
14 mm aperture
30 mm aperture
30 mm aperture
Flat field objective
with f = 160 mm
without
without
2
2
without
2
(200 x 200) mm2
to (2000 x 2000) mm2
[e.g.(1) (600 x 600) mm2]
Image field size
(110 x 110) mm
(600 x 600) mm
(500 x 500) mm
Focus range in z direction
± 32 mm
± 80 mm
± 70 mm
± 2 mm to ± 400 mm
[e.g.(1) ± 40 mm]
[e.g.(1) 550 µm (M2=1)]
Focus diameter (1/e2)
< 35 µm (M2= 1)
< 70 µm (M2= 1)
570 µm (M2= 1)
200 µm (M2=1)
to 1.8 mm (M2=1)
Beam expansion factor
2.8
3.8
2.05
2.4 to 1.9
[e.g.(1) 2.1]
Average focus shift
per lens travel
16 mm/mm
71 mm/mm
40 mm/mm
-
-
Focal length varioSCAN
-
(1390 ± 143) mm
(850 ± 118) mm
(395 ± 18) mm
to (2850 ± 600) mm
[e.g.(1) (940 ± 60) mm]
Max. laser power cw
60 W
25 W
2000 W
500 W
(1)
Example for a possible position of the focusing unit
Type-Dependent Specifications
varioSCANde 20i
varioSCAN 20
varioSCANde 40i / 40iFLEX varioSCAN 40 / 40FLEX
Beam input aperture
Output aperture
Motor specifications
up to max. 8 mm
up to max. 20 mm
up to max. 8 mm
up to max. 20 mm
up to max. 16 mm
up to max. 40 mm
up to max. 16 mm
up to max. 40 mm
Maximum lens travel
Tracking error
Typical travel speed
Repeatability
Nonlinearity
Long-term drift (over 8 hours, at constant
±2 mm
0.55 ms
≤280 mm/s
< 0.5 µm
0.05 % FS
< 3 µm
±1 mm
0.9 ms
≤140 mm/s
< 1 µm
1.5 % FS
< 6 µm
±3 mm
0.7 ms
≤140 mm/s
< 0.5 µm
0.05 % FS
< 3 µm
±1.5 mm
1.4 ms
≤100 mm/s
< 1 µm
1.5 % FS
< 10 µm
Power requirements
30 V DC (29-33V),
max. 1.5 A each
XY2-100 Enhanced,
SL2-100
±(15+1.5) V DC,
max. 1.5 A each
XY2-100 Standard,
SL2-100 or
analog (2)
30 V DC (29-33V),
max. 1.5 A each
XY2-100 Enhanced,
SL2-100 or
optical data transfer (3)
DSCB + interface board
500 g to 700 g
SSV30
500 g to 700 g
DSCB + interface board
approx. 2.4 kg / 5.0 kg (4)
±(15+1.5) V DC,
max. 1.5 A each
XY2-100 Standard,
SL2-100,
optical data transfer (3)
or analog (2)
SSV30
approx. 2.4 kg / 4.4 kg (4)
environmental conditions)
Electrical connections
Boards included
Weight (depending on
optical configuration)
(2)
(3)
(4)
analog version: input signals alternatively: ±4.8 V; ±9.6 V / ±4.8 mA; ±9.6 mA; output signals: TTL level
optical data transfer only with varioSCAN 40FLEX and 40iFLEX; additional step motor inputs and limit-switch output signals
higher value with FLEX housing
Common Specifications
Operating temperature 25 °C ± 10 °C
horizontal position,
electrically insulated,
thermally connected
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
10 / 2015 Information is subject to change without notice.
Product photos are non-binding and may show customized features.
Installation
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001
[email protected] · www.scanlab-america.com
Camera Adapter
vision for scan heads
The camera adapter enables camera-based observation of a galvanometer scan head’s working field. Typical applications include
process monitoring or determination of a workpiece’s orientation
during laser processing.
The camera adapter ensures easy integration into new as well as
existing systems. The adapter’s mechanical interfaces enable straightforward mounting between the scan head and laser flange. The
system allows 4 alternative orientations of the objective with camera.
To facilitate monitoring of work surfaces, light arriving from the
workpiece is decoupled via the adapter’s beam splitter and directed through the camera’s objective onto its imaging chip. The laser
beam on the other hand passes practically unattenuated through
the beam splitter to the scan system. Optical configurations are
available for various wavelengths. Customers can freely select a
camera suitable for their requirements and attach it via a C-mount.
The camera adapter is specifically designed for maximum observation field size and its integrated iris diaphragm can be adjusted for
optimal imaging quality. In addition, color or interference filters
can be installed.
The camera adapter is also available as a part of SCANLAB’s
camera vision package.
Camera Adapter
Installation
Principle of Operation
The camera adapter is mounted between
the scan head’s beam entrance and the
laser flange (see drawing). The bore holes at
the camera adapter’s beam entrance and
exit side are compatible with the mounting
holes of the hurrySCAN/ hurrySCAN II,
intelliSCAN, SCANgine, SCANcube or
intellicube scan heads from SCANLAB.
The beam splitter housing can be adjusted
so that the camera and objective unit are
oriented either up, down or sideways (see
drawing).
The camera adapter enables camera-based
observation of a scan head’s working field.
Therefore, a dichroitic beam splitter inside
the beam splitter housing decouples light
reflected from the illuminated workpiece
and arriving the scan head’s beam entrance
via the scan objective and the scan mirrors.
The light is decoupled from the beam path
and then directed to the camera. The laser
bam on the other hand passes through the
beam splitter practically unattenuated.
objective unit contains the camera objective, an iris diaphragm and provisions at the
beam entrance side for mounting a color
filter. Camera image sharpness is achieved
by manually adjusting the objective unit’s
focus ring.
Customers can select an illumination wavelength compatible with the optical specifications of the beam splitter, scan mirrors
and other system optics.
Observation Field and Resolution
The size of the observation field depends
on the focal lengths of the scan objective
and camera objective and on the camera
chip’s size. A scan objective focal length of
163 mm typically produces a camera image
field size of approx. 7.5 mm x 10 mm and
a maximum optical resolution of around
10 µm (see table).
The decoupled light is directed through the
camera objective onto the active imaging
surface of the camera (e.g. CCD chip).
Threaded in the beam splitter housing, the
Typical Optical Configurations with Scan Head
Laser wavelength
1064 nm
532 nm
355 nm
266 nm
Observation wavelength
880 nm
635 nm
635 nm
635 nm
Scan head aperture
14 mm
10 mm
10 mm
10 mm
Scan head mirror coating (1)
1064 nm + 880 nm 532 nm + 635 nm
355 nm + 635 nm
266 nm + 635 nm
Flat field objective
163 mm
160 mm
100 mm
103 mm
Processing field size
Beam splitter
Laser wavelength
Range for observation wavelength(1)
Focal length camera objective
Camera chip size
110 x 110 mm2
110 x 110 mm2
50 x 50 mm2
50 x 50 mm2
1030 nm - 1110 nm
450 nm - 900 nm
105 mm
1/2”
488 nm - 532 nm
615 nm - 900 nm
105 mm
1/2”
350 nm - 360 nm
510 nm - 680 nm
105 mm
1/2”
257 nm - 266 nm
630 nm - 670 nm
105 mm
1/2”
Interference filter
Observation field size
880 nm
approx.
7.5 x 10 mm2
approx. 10 µm
635 nm
approx.
7 x 9.5 mm2
approx. 15 µm
635 nm
approx.
5 x 6.5 mm2
approx. 10 µm
635 nm
approx.
5 x 6.5 mm2
approx. 10 µm
Common Specifications
Weight
(without camera)
Operating temperature
(1)
observation only in the wavelength range reflected by the scan mirrors
1
2
3
4
5
6
Legend
Entering beam
Laser flange (a)
Mounting screws (a)
Alignment pins (a)
Beam-entrance side camera adapter
Beam splitter housing
7 Objective unit
8Camera (a)
9 Beam-exit side camera adapter (b)
10 Alternative orientation
11 Scan head (a)
12 Emerging beam
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
13
14
15
16
17
18
C-mount extension (optional)
all dimensions in mm
Focus ring
Camera objective
(a)
Iris diaphragm
not included
(b)
Color filter (a)
for SCANcube and intellicube scan heads, the camera adapter is
Beam splitter
equipped with a special adapter plate at its beam-exit side
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001
[email protected] · www.scanlab-america.com
Information isvorbehalten.
subject to change without notice.
12 / 2011 Änderungen
Product photos are non-binding and may show customized features.
25 °C ± 10 °C
depending on the scan head
C-Mount
2/3”
approx. 1.6 kg
Max. optical resolution
(1)
max. 30 mm (1)
Diameter of entering
beam
Camera
Connection type
Maximum chip size
from process development to processing
laserDESK is the program professionals use to set up and perform
laser processing. It takes full advantage of the functionality in
SCANLAB's newest control boards and scan systems.
• Intuitive operation thanks to clearly structured, compact and
consistent visualization of all system parameters and object
properties
laserDESK enables:
• Integration in diverse manufacturing environments via
support for numerous laser types and axis controllers
• Easy setup and execution of laser processing jobs for diverse
applications
• Simplified equipment setup and workflow thanks to modal
wizards
• Professional process development for laser applications
utilizing the entire functionality of RTC boards with the SL2-100
interface
• Quick time-to-market of innovative projects and processes via
unified software for development and series production
• Series-production safety via integrated automation and userprivilege capabilities
• Optimal integration of SCANLAB components such as
SCANalign, 3D systems or varioSCANFLEX
Our team of expert programmers ensures future-proof, on-going
development using .NET Frameworks.
Operational Flexibility
laserDESK lets you create or execute laser jobs and professionally
set up your laser systems. It features an intuitive graphical user
interface. Automation solutions are implemented in a variety of
ways to accommodate particular system designs.
Graphical Processing
Visualization and Object Editing
• Comprehensive functionality for object editing and creation
• User management with different privilege levels
• Visualization of process sequences, output data and protocolled
data
Dialog-based Control
• Wizards for hardware configuration and calibration, e.g. the
Parameter Wizard
• Modal dialogs for hardware configuration
• Interactive dialoges, e.g. for laser and motor control
Sequence Control
• Define the job's process sequence
• Automatic sorting of fillings and graphic sets
• Variants for conditional execution triggered by hardware signals
Parameter Sets
• Object-dependend definitions
•Assignment to groups or layers
• Library management
Switchable program profiles
• Creation and direct testing with the design profile
• Projection-based positioning and previewing with the pilot laser
profile
• Simple series production with the production profile
Automated Processing
The programmable remote interface provides countless possibilities for intelligent integration into automated manufacturing environments – e.g. within the framework of Industry 4.0. Processes
can be flexibly executed. laserDESK's diverse communication options allow integration in production systems as master or slave.
Automation by Remote Interface
Machine Control
Interface (TCP/IP, RS232)
Remote
Interface
Remote
Interface
Remote
Interface
RTC
RTC
RTC
Machine
1
Machine
2
Machine
n
• Activation of hardware and laser system
• Loading and execution of jobs and variants
• Updating of text content or vector data
•System-status monitoring during execution
• Integration of external sensors into the processing sequence
Comprehensive Toolbox
laserDESK provides diverse tools for setting up, executing, optimizing and managing complex laser processing tasks, as well as for directly controlling RTC boards.
Markable Objects
In addition to point and line objects, complex marking objects such as graphic paths or
3D spirals are available. For creation, you can use Bézier curves or circle segments, which
will be automatically prepared for laser processing. Those marking objects can be previewed graphically prior to execution. All objects are easily created, modified or positioned
with the mouse or via direct input of coordinates.
Typography and Numerals
All TrueType fonts are available for text marking. Coding algorithms are integrated for
outputting barcodes or 2D codes. At runtime, the content of text objects can be automatically sequenced and loaded, or individually assigned by remote control.
Safety and Control Elements
Analog and digital inputs and outputs of the RTC boards are fully integrated. This facilitates implementation of safety circuits and allows signals for initialization and monitoring
of specialized laser types during job execution. Additionally, control signals can be outputted or queried during job processing.
File Import
Import lets you load image files for bitmap processing and vector files for pre-defined 2D
shapes or 3D object structures. During import, vector data can be sorted and collected.
These objects are scalable, rotatable and positionable. Vector data can also be post-processed at the point level.
Parameter Sets
All object parameters can be easily edited in a clearly-structured properties list. Here,
separate data sets are defined for object, text, fill and bitmap parameters. These parameters can be assigned individually to each object or managed collectively via the library. You
can easily assign parameters collectively to objects in groups or layers.
Positioning Corrections
SCANLAB correction files ensure correctly scaled object processing by the scan system.
Positioning corrections are globally defined in the job via offset, scaling and rotation. The
integrated pilot-laser profile lets you visually place marking positions relative to the workpiece. SCANLAB also offers it's fully integrated, camera-based SCANalign software package as an alternative process calibration solution.
www.laserdesk.info
Protocol Function
In conjunction with digital-servo scan systems of the intelliSCAN,
intellicube and excelliSCAN product families, laserDESK can query
the traversed trajectory after processing and display it graphically.
This enables tuning of marking parameters dependently of contour fidelity or downstream quality control.
Calibration and Positioning with SCANalign
The SCANalign stand-alone software package is perfectly integrated in laserDESK and enables optimal inclusion of a camera calibrated to the scan system. Varied optical coupling allows mounting of the camera coaxially or side-ways. SCANalign provides easy
visualization of sequences for calibration and job creation, thus
significantly boosting the accuracy of text positioning and sizing.
Task examples:
• Before labeling, locations of components in the image field will
be determined so processing can be perfectly aligned to the
components' orientations. Thus markings are precisely placed,
e.g. to within 5 µm at f = 255 mm.
• The system can be calibrated with high precision. Marking will
be as exact as the object designs themselves. The overall laser
system's absolute accuracy can be precisely calibrated, e.g. to
within 10 µm at f = 255 mm.
Seamless, dimensionally-correct transfer of images from
SCANalign into laserDESK's working field even allows laser processes to be developed, tested or optimized directly on the components.
Basic
Standard Premium Office
RTC integration
•
•
•
n. a.
Markable objects
•
•
•
•
•
•
Graphical editing
•
•
•
Fillings
•
•
•
Typography
•
•
n. a.
Control elements
-
•
•
•
Variants
-
•
•
•
Pilot laser mode
-
•
•
n. a.
Privilege settings
-
•
•
•
Marking on the fly
-
•
•
n. a.
Layers
-
•
•
Wizard-based control
-
•
•
n. a.
Protocol function
-
•
•
n. a.
Sky-Writing
-
•
•
•
Laser support
2nd scan head
-
•
•
n. a.
Remote interface
-
-
•
•
Tiling
-
-
•
•
SCANalign integration
-
-
•
•
Working volumes
2D
2,5D
3D
3D
Languages
en
de, en, ru, cn
limited
- not activated
Support and Service
Comprehensive English-language laserDESK documentation is
provided as context-sensitive help. Responsive customer support
is offered for laserDESK and SCANLAB regularly posts software
updates on its website.
• PC with Windows OS (.NET 3.5)
• USB port for dongle
• RTC5 or RTC6 board
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
Test laserDESK now!
At www.scanlab.de/downloads you can download the software. When used without a dongle, laserDESK operates in
demo mode for testing. The entire GUI is active, enabling
creation and loading of jobs. Saving and executing is deactivated in demo mode.
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001
[email protected] · www.scanlab-america.com
12 / 2015 Information is subject to change without notice. Product photos are non-binding and may show customized features.
Hardware Requirements
high-speed z axis
z-shifting that breaks the speed limit
The achieved identical dynamics of all three
axes now opens up entirely new processing
strategies and opportunities. Furthermore,
this new technology uses only reflective
optical components. This allows using different wavelengths without dispersion and
reduces thermal lens effects at power laser
applications. The new z-axis system can be
perfectly combined with the field-proven
intelliSCAN and SCANcube 2D scan system families.
Key advantages:
Preliminary specifications
• Extends 2D scan heads into 3D scan
systems
Aperture
Wavelength
Beam expansion
Tracking error
Beam guidance
Dimensions L x W x H
Weight
• Scan system dynamics not limited by
z axis
• Designed to use only reflective optical
components
• F-Theta objective can be eliminated
without dynamic limitations
14 mm
(355 nm) -10600 nm
1-fold
≥ 0.1 ms
reflective
(142 x 160 x 131) mm3
approx. 4,2 kg
Focal-length-dependent specifications
Focus range (1)
±15 mm
Focus speed in image field (1) up to 30 m/s
(1)
in conjunction with a typical scan head and objective with
f = 163mm
2
14
16
0
Beam out
•
•
•
•
Micromachining
Marking of curved surfaces
Deep engraving
Ultra-fast 3D processing
131
Typical applications:
SL2-100 / POWER IN
connector
Beam in
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001
[email protected] · www.scanlab-america.com
all dimensions in mm
06 / 2015 Information is subject to change without notice.
Product photos are non-binding and may show customized features.
SCANLAB‘s new dynamic z axis extends
your 2D scan system to a 3D system. Due
to its highly innovative design and field-proven galvanometer technology, it drastically
raises dynamic performance unreached by
conventional z adjusters.
RTC 5
control and versatility
The RTC5 control board provides synchronous, interferenceresistant control of scan systems, lasers and peripheral equipment
in real time. It is available as a PC interface board, as a PCI-Express
board, or as a PCIe/104 module module.
A high-performance signal processor and the supplied DLL simplify
programming under Windows. Software commands are loaded
into the RTC5’s freely-configurable list buffer and processed by
the DSP. Every 10 µs, appropriate signals are output to or read-out
from the scan system, laser and peripheral equipment.
provide automatic position/speed/vector-dependent readjustment
of laser power. Furthermore, the scan system can be synchronized to the laser. This “output synchronization” is a prerequisite
for exact and reproducible laser processing when the laser-pulse
signal is defined by a fixed (external) laser clock, as is the case
for ultrashort pulse lasers.
The RTC5 communicates with scan systems via the new SL2-100
data transfer protocol. This protocol supports 20-bit control signals and thereby a 16x higher positioning resolution compared to
the RTC4 predecessor board. The RTC5’s processor automatically
performs micro-vectorization and image field correction.
For SCANLAB scan systems with fully digital servo electronics
(e.g. intelliSCAN, intellicube, intelliDRILL, intelliWELD,
powerSCAN i), the RTC5 also supports all possibilities arising
from the iDRIVE technology. This includes real-time monitoring
and remote diagnosis of key operational parameters, simulationassisted process optimization and the use of different dynamics
tunings. The feedback of the scan-system speed can be used for
speed-dependent laser control.
For laser control, various programmable laser signals are available
for vector and bitmap processing. During execution, the board can
Numerous options provide the extensive flexibility system integrators need for meeting diverse customer requirements.
RTC 5
System Integration
Laser Control
• Download verification
• PCI bus interface, PCI-Express
interface (PCIe-x1 version 1.0) or
PCIe/104-interface
• 15-pin D-Sub connector
• Enhanced list and list execution status
• Laser signals with 15 ns resolution and
20 mA output current
• Definable and selectable
character sets
• Any number of RTC5 PCI or PCIe boards
in one PC
• Various laser modes for controlling all
typical lasers
• Marking of dates, times and serial
numbers
• Master/slave synchronization
• Bitmap mode with pixel frequencies up
to 300 kHz, 15 ns resolution,
0-100% laser pulse width
• Marking of circles and ellipses
• Drivers for (32-bit and 64-bit)
Windows 8 / 7 / Vista / XP (SP2 or later)
• Multi threading, multi processing
• RS232 interface
• Conditioning of all list commands
possible
Scan System Control
• Speed- and position-dependent laser
control
Options
• SL2-100 transfer protocol
(control of scan systems per
XY2-100 transfer protocol via an
optional converter)
• 20-bit positioning resolution
• Virtual processing field (24 bit)
• 10 µs output period
• Galvanically isolated signals
• Tuning selection
• Vector and jump mode,
tuning auto-switching
• Scan-system diagnosis
• Reading back actual-position values
• Synchronization of scanning motions
to the laser clock (e.g. ultrashort pulse
lasers) – “output synchronization”
• Sky writing
• Control of 3-axis scan systems
Control of Peripheral Equipment
• Processing-on-the-fly functionality for
objects in motion (two encoder inputs
with 32-bit counter, up to 8 objects
between trigger and marking position,
etc.)
• 16-bit digital output and input
• 8-bit digital output
• 2-bit digital output and input
• 12-bit analog output (0...10 V)
• Dual-head capability for simultaneous
control of two scan systems
• McBSP interface
• Stepper motor signals
• Customer-specific extensions possible
Command Management
• Configurable list buffers with 1,000,000
list positions, protected memory area
definable
Still Available
• RTC4 (PCI, PCIe, Ethernet)
• RTC SCANalone board (USB)
• Lists and subroutines
Accessories
• “Short” list commands for changing
(laser) output signals without
interrupting polygonal traversal
(the laser remains on)
•
PCI, PCIe,
PCIe/104 or
PC/104-Plus
RTC5 software
SL2-100
SL2-100
Drivers
laserDESK or
customer-specific
user program
●
Laser control
●
Scan-system control
●
Scan-system diagnosis
●
Image-field correction
●
Processing-on-the-fly
●
Communication with peripherals
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
16-bit digital
8-bit digital
2-bit digital
12-bit analog
RS232
etc.
DLL
Scan head
Utility files
Laser
varioSCAN
Correction files
Processing-on-the-fly
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001
[email protected] · www.scanlab-america.com
Peripherals
04 / 2016 Information is subject to change without notice.
Product photos are non-binding and may show customized features.
RTC5
excelliSCAN
the new premium scanning standard
SCANLAB's excelliSCAN scan head sets new high-end standards
for meeting the most challenging demands. Its groundbreaking
SCANahead control technology and field-proven dynAXISse digitalencoder galvanometers attain previously unreachable dynamic
performance and precision. This translates to enormous gains in
productivity and process accuracy.
Innovative excelliSCAN design features:
New SCANahead control
• Full utilization of scanner dynamics for higher throughput
• No unwanted necking effects when rapidly processing circles
• Universal tuning optimized for all applications
dynAXISse digital-encoder galvanometers
• Maximum linearity and minimum position noise ensure highest
positioning accuracy
• High long-term stability even with ambient temperature fluctuations and 24/7-operation
Housing innovations
• Enhanced thermal management for higher load resilience
• Variant with active air cooling available for applications that
don't allow water as a coolant
• Increased tightness (IP56) and robustness
SCANLAB offers excelliSCAN in combination with the RTC6 PCIExpress control board. With its substantially increased processing
power and optimum support of SCANahead control technology,
the RTC6 opens up new system-control possibilities.
excelliSCAN
SCANahead control
SCANahead principle of operation
Conventional control
x
x
tp
ts
slow
slow
t
t
ta
x
x
ts
tp
fast
fast
t
ta
t
ta
SCANahead control allows excelliSCAN to deliver full acceleration even at slow scan speeds (i.e. with minimum acceleration duration ta). Pre-computed set-point trajectories make this possible.
Computation occurs in real time, offset by the look-ahead time tp,
prior to actual execution.
Limiting trajectory acceleration to the scanner axes' full acceleration produces a set-point trajectory (blue curve) that the
SCANahead control can track without tracking error (red curve).
Thus, the galvos' dynamic performance potential is optimally utilized.
In contrast, conventional control is afflicted with a constant
tracking error ts, independent of scan speed. Likewise constant
is the acceleration duration ta until reaching the intended scan
speed.
The higher the maximum speed, the higher the tracking error and
longer the acceleration duration. As maximum speed goes up, the
scan axes' acceleration potential gets decreasingly utilized at low
scan speeds.
Application Benefits
Enhanced accuracy
Fast and precise circle processing
Corner
v=1m/s:
Circle
v=2,8m/s:
300µm
SCANahead
300µm
conventional
150µm
SCANahead
150µm
conventional
SCANahead control fully exploits the galvos' dynamic performance potential. Hence traversal of 90° corners at a wide
range of speeds produces far less corner-rounding. Additionally,
SCANahead allows faster traversal of corners having identical radii.
SCANahead control ensures precise traversal of the defined set
circle even at high circle speeds. This substantially simplifies correct
processing of circles and boosts productivity thanks to increased
trajectory velocities.
In contrast, traditional control with tracking error may cause substantial corner rounding – speed-dependent and if no delays were
implemented.
In contrast, tracking errors of traditional scanner control produce
a necking effect during high-speed circle traversal. The control
effectively behaves as a low-pass filter that attenuates controlsignal amplitudes at high circle frequencies.
Dynamics
Processing circles, arcs
Tracking error
Use of delays
SCANahead control
• Scanner axis acceleration always at maximum:
acceleration time is minimized.
• Necking effects avoided.
• Concept fundamentally eliminates it.
Conventional control
• Acceleration time is constant at all scan speeds:
acceleration potential isn't fully utilized.
• Necking effects (caused by tracking error) need
to be offset by adjusting circle diameters.
• Finite, constant value
• Precise image field correction even at high
speeds
• Limits precision of image field correction at high
speeds
• Only one tuning needed. Optimum
performance across all applications.
• Optimized typically for a single application.
Digital scan systems allow a variety of tunings.
• A uniform look-ahead time tp is used to
determine the navigable trajectory.
• Auto-delay eliminates the need to set delays for
high-quality results.
• Need to be set in advance
• User must monitor processing results and needs
to optimize delay settings iteratively.
Control via RTC 6
Innovative Housing
Equipped with expanded memory and a high-performance DSP
and FPGA, the new RTC6 enables powerful applications and is
ready for future functional extensions.
• Robust, tight shell construction
When synchronously controlling the excelliSCAN and a laser, the
RTC6 board takes into account the SCANahead control's lookahead time (used for computing scanner trajectories) so as to
optimally utilize dynamic performance and accuracy. The RTC6's
auto-delay functionality facilitates simple, fast excelliSCAN deployment. This frees users from needing to determine or define laser
and scanner delays.
• Two cooling variants available:
- Water cooling for maximum cooling performance
- Active air cooling with innovative heat-pipe technology
for applications that prohibit using water coolant
• Broad assortment of objectives available, thanks to proven
standard interface
• Electrical connections can be positioned at either the beam
entrance or opposite to the beam exit side
• Optional air-cooling connection for mirrors
© TRUMPF GmbH + Co. KG
© EWAG
© DMG MORI
©
© iStock:
EWAG visdia
excelliSCAN + RTC 6
Preliminary specifications excelliSCAN 14
Aperture
Tuning
Tracking error
Acceleration
14 mm
universal
0 ms
51 000 m/s2
Repeatability (RMS)
Positioning resolution
Optical performance
Typical scan angle
Gain error
Zero offset
Nonlinearity
Power requirements
Interface
Operating temperature
Weight
(1),(2)
Typical speeds (1)
Positioning, jump & shoot
< 30 m/s
Line scan / raster scan
< 30 m/s
Typical vector marking
< 4 m/s
Good writing quality
1000 cps
High writing quality
850 cps
(1)
Positioning times 1 mm jump width
10 mm jump width
100 mm jump width
with F-Theta objective, f = 160 mm
this corresponds to an angular acceleration of 3.2·105 rad/s2
(3)
at constant ambient temperature and load
(4)
with water cooling
(5)
based on the full angle range (e.g. positioning resolution
0.7 µrad for angle range ±0.36 rad)
(2)
8-h-drift (after 30 min warm-up)
< 20 µrad
< 20 ppm
±0.35 rad
< 5 mrad
< 5 mrad
< 0.5 mrad / 44°
30 V DC, max. 3 A
SL2-100
25 °C ± 10 °C
approx. 7 kg
(1)
Long-term drift (3), (4)
Gain
< 0.4 µrad
20 bit (5)
(all angles are in optical degrees)
0.28 ms
0.88 ms
3.70 ms
Offset
Preliminary specifications RTC 6
24-h-drift (after 3 h warm-up)
Offset
< 20 µrad
Gain
< 25 ppm
< 10 µrad/K
Gain
< 4 ppm/K
• PC interface: PCI-Express (in preparation:
Ethernet with standalone functionality)
• Supported Windows versions (driver and
DLL): 32-bit and 64-bit Windows 8, 7,
Vista, XP (SP2 or higher)
• Any number of RTC6 boards installable
in one PC
• Performance enhancements: processing
power, memory, FPGA, allows future
implementation of more complex
functionalities
• Pixel output mode with pixel frequencies
up to 1 MHz
• List memory with over 2 million list
positions
• Expanded measurement-value recording:
4 recording channels, each for
2 million data values
Temperature drift (4)
Offset
• Enables excelliSCAN SCANahead
functionality
• Multiple 3D correction files storable
• Fully downward compatible with RTC5
Housing variants
11
8
Connections
for cooling water
11
158.5
Optional
connection
for mirror
air cooling
171.5
Optional
connection
for mirror
air cooling
4
24
9.1
18
Beam in
Beam in
Beam out
Beam out
all dimensions in mm
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001
[email protected] · www.scanlab-america.com
06 / 2015 Information is subject to change without notice.
Product photos are non-binding and may show customized features.
8
self-aligned laser processing
SCANalign is a complete, easy-to-use vision solution specifically
developed for laser scan systems. SCANalign extends your scan
system with highly precise calibration of the whole working field,
automatic process alignment and visual quality control of laser
processing results.
SCANalign's key components are a software package, a camera,
suitable illumination and a high-precision calibration plate.
SCANalign's software enables:
•All SCANalign packages are adaptable to customers' specific
laser application requirements.
• Fast, high-precision calibration of the complete laser system,
• Ultra-accurate measuring of positions within the scan system's
working field,
• Automatic alignment of laser processes to workpiece positions,
• Capture of correctly-scaled and straightened images in the scan
system's working field before and after laser processing,
• Integration with laserDESK laser processing software.
• All components seamlessly integrate with SCANLAB's scan heads,
camera adapters and RTC5 control boards.
• All components are perfectly matched to each other.
The camera captures images either coaxially via a camera adapter
or side-mounted via a standard objective. SCANalign's algorithms
ensure transfer of generated image data as laser coordinates, thus
enabling direct correction of laser scan processes.
All SCANalign functionality is accessible via a graphic user interface (GUI), eliminating the need for programming expertise.
A complete system calibration can thus be performed within a
short period of time. The GUI lets you directly create new vision
jobs or modify existing ones. These typically contain functions for
image capture and smoothing, as well as for pattern recognition
and defining position data.
System Set-Up and Control
The diagrams on the left depict two different approaches to configuring a laser
scan system for SCANalign: with a sidemounted camera (a) or with an integrated
camera (b). Both configurations allow
GUI-based calibration and control, thereby
enabling adaptation of camera hardware
to your system's design specifics.
Camera
Scan head
Camera
Objective
Camera adapter
In addition to the software and camera,
SCANalign also includes interfaces and
complete pluggable cabling for communication between the RTC 5 board, camera,
illumination and laserDESK software.
SCANalign provides two software GUIs:
a Development Interface and a Production
Interface. These configure the software and
facilitate definition and execution of vision
jobs. The Vision Engine runs in the background and communicates with the GUIs,
laserDESK, an RTC 5 board, the camera and
an included database. Vision jobs created
with the Development Interface can be
started directly over TCP/IP on the Vision
Engine for automatic processing via the
laser processing software. These coordinate
image capturing and analysis.
(a) side-mounted camera set-up(b) coaxial camera set-up
Result monitor
laserDESK
remote client
Remote control (optional)
Images/results
TCP/IP
Functional Principle
Commands
TCP/IP
SCANalign software
Production GUI
Development GUI
laserDESK software
Vision Engine
Database
Vision tasks/results
TCP/IP
Control
DLL/ RS 232
Stages (optional)
Commands
DLL
other peripherals
(optional)
Ready
Parallel port
SCANalign
I/O board
RTC5 board
Trigger/control
TTL
Images
TCP/IP
External Start/Stop
(optional)
Handling system
(optional)
Trigger
TTL
Intensity
TTL
Control
TTL
Control
SL2-100
Motion encoder
(optional)
Trigger
TTL
Camera
Illumination
Laser system
Scan head
PLC (optional)
Camera calibration is performed for the laser coordinates of each mirror position. This
ensures that the laser will mark the exact
position determined by software analysis
of the camera's images. Calibration takes
all possible influencing factors into account
– e.g. mirror positions, objective distortion
and system alignment tolerances.
A calibration plate is used to perform absolute calibration of field coordinates for the
overall laser scan system. This is a straightforward way to quickly, economically and
precisely optimize each system's laser processing. For production involving multiple
systems, this substantially simplifies systemspecific correction of processing jobs.
SCANalign's Vision Engine automatically
provides undistorted, correctly-scaled
camera images – as shown top right.
SCANalign vision jobs can automatically
analyze these corrected images, e.g. for
determining a workpiece's position and
orientation using reference marks or other
geometric properties of the workpiece. The
Vision Engine provides analysis results that
the laser scan application can use to align
scan patterns relative to a workpiece's
actual position and orientation. By creating this automation, SCANalign delivers
optimal processing results while eliminating
the need to precisely position workpieces
within a scan head's working field.
Uncorrected images of the working field
Corrected and merged image of the working field
Development GUI (development of a pattern matching vision job for fiducial detection on an electronic board )
User-Friendly GUIs
The easy-to-use Development Interface
lets users calibrate the scan system, as
well as define and execute vision jobs – as
shown on the right. Jobs can be stored in
the associated database as a starting point
for further job definitions. The software
includes a set of predefined job templates.
The Production Interface enables users
to view SCANalign's intermediate results
(e.g. images) and corrections. You can run
it either on your local computer or over
TCP/IP on a remote PC for monitoring
results during production.
Integration with laserDESK
SCANalign seamlessly integrates with
the laserDESK software. Predefined vision
jobs can be easily integrated into a
laserDESK job. The Vision Engine executes
and returns results for jobs launched via
laserDESK. Additionally, laserDESK can
directly display the most recently captured,
correctly-scaled camera image as a GUIbackground image. This facilitates straightforward manual alignment for laser marking, as well as direct process structuring
on workpieces.
job explorer
full working field with image locations
laserDESK GUI with background image
tapped images of detected features
PC System Requirements
Example Configuration
coaxial camera set-up
side-mounted camera set-up
Scan head aperture
14 mm
14 mm
Scan objective
Control board
255 mm
RTC 5
255 mm
RTC 5
Laser wavelength
1064 nm
1064 nm
Camera
1 megapixel
5 megapixel
Camera triggering
hardware signal
software signal
Power supply
via PC
via PC (PoE possible)
Camera objective
f = 105 mm (camera adapter)
f = 8 mm (standard camera objective)
Calibration plate
glass plate (180 x 180) mm2
mylar (180 x 180) mm2
Illumination / Filter
Processing field size
Camera field of view (max.)
617 nm, included in package
(170 x 170) mm2
ambient light
(170 x 170) mm2
(16 x 13) mm2 single image,
merged images possible
13 µm
(180 x 180) mm2
• PC internal power supply with
12 V and 5 V;
- max. 0.5 A for camera and controls,
- max. 2 A when used for lighting
100 µm
Service Offerings
Absolute accuracies
(by calibration)
Relative accuracies
(position detection)
Scaled and undistorted images
10 µm
50 µm
• Training on a demo system at SCANLAB
5 µm
50 µm
yes
yes
• Development of customer-specific vision
jobs
Position detection
yes
yes (optional)
Laser systems calibration
yes
yes (optional)
Drift compensation
yes
no (by calibration)
Effective pixel resolution
coaxial camera set-up
SCANalign software
SCANalign IO board
side-mounted camera set-up
SCANalign software
SCANalign IO board
Cabling, 5m
Cabling, 5m
Camera
Camera incl. objective
Camera filter and mount
Illumination at 617 nm
Illumination controller
Options
System requirements
• 32-bit or 64-bit operating system:
Windows 7, Windows XP
• USB ports for SCANalign / laserDESK
dongles
• Customer support on illumination and
installation
Key Functions of SCANalign Software:
Calibration plate
laserDESK software (premium)
Various illumination options
(e.g. illumination at 850 nm)
RTC5 board
RTC5 board
Scan head
Scan head
Laser System
Laser System
Scan head objective
Scan head objective
Desktop PC
Desktop PC
Camera adapter
Camera mounting fixture
• Highly precise detection of workpiece
positions (e.g. edge finder, ridge finder,
pattern matching)
• Ultra-accurate positioning of the laser
beam for marking applications and
other laser processes
• Straightforward integration into existing
systems
• Documentation of laser processing
results
• Laser processes previewed as
background images in laserDESK GUI
All components (especially illumination parts and camera as well as scan head and camera adapter optics) must be selected
according to the requirements of the specific laser application.
06 / 2015 Information is subject to change without notice.
Product photos are non-binding and may show customized features.
(1)
Calibration plate
laserDESK software (premium)
• RTC5 control board
• Calibration of the scan head's working
field
Typical SCANalign Packages (1)
Included parts
• Desctop PC with PCI or PCIe bus
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001
[email protected] · www.scanlab-america.com