hurrySCAN ®, hurrySCAN ® II

Transcription

hurrySCAN ®, hurrySCAN ® II
more Information at:
universal and compatible
These compact scan heads from SCANLAB provide optimal solutions for nearly all challenges found in industrial laser materials
processing. The mechanically and electrically inter-compatible scan
heads have apertures ranging from 7 to 30 mm and various levels
of dynamics. High long-term stability and low drift values are ensured via integrated temperature stabilization.
SCANLAB has products for practically every customer need. Smallaperture systems optimally combine top speed and exceptional
precision along with large image fields, enabling marking speeds
exceeding 1000 characters per second when used with appropriate lasers. Also available are large-aperture scan heads offering
small spot size, high speed and laser-power handling up to the
multi-kilowatt range.
The housing concept as well as tight manufacturing and assembly
tolerances bring high flexibility and certainty to the design and
operation of laser materials processing systems. This also facilitates
speedy adaptation to individual customer requirements.
The hurrySCAN ® II scan heads set high-end performance standards
with their optimized combination of dynAXIS ® galvanometer scanners, mirror designs and high-performance electronics.
Typical applications:
•
•
•
•
•
•
Materials processing
Marking
Microstructuring
Rapid manufacturing
3D applications
Processing-on-the-fly
hurrySCAN ® 10, 14 + hurrySCAN ®II 7, 10, 14
Optics
Scan mirrors and objectives with optimized
mounts are available for all typical laser
types and working fields.
To optimally utilize standard objectives,
the hurrySCAN ® 25’s two scan axes have
differing maximum scan angles. This results
in an elliptical image field with the larger
semi-axis perpendicular to the entrance
beam axis.
Control
All scan heads of these series are equipped
with either analog or digital standard interfaces and are easily controlled via SCANLAB’s
RTC® controle boards. All scan heads are
optionally available with an optical fiber
data interface.
Legend
(#)
Beam in
Screws (M6 thread) (#)
Flange (#)
Alignment pins (6h6) (#)
Mounting bracket
Connectors
Objective
Beam out
Attachment Provisions
not included
all dimensiions in mm
The hurrySCAN ® 20, 25 and 30 scan heads
provide water-cooling connections for the
entrance aperture, electronics and galvanometer scanners, along with air-cooling
of the deﬂection mirrors. This ensures
constant working conditions and excellent
long-term stability, thus guaranteeing
reliable operation even in high-laser-power
applications. Cooling is also available optionally for the hurrySCAN ® 7, 10 and 14.
Cooling
Threaded and non-threaded holes at the
housing’s beam entrance side at
hurrySCAN ® 20, 25 and 30 facilitate mounting of the scan head and installation of
fiber optic outputs. On the beam exit side,
threaded holes are available for attaching
add-on components such as cross jets,
illumination, distance sensors or thermal
shields.
1
2
3
4
5
6
7
8

* The hurrySCAN ® II 7´s mounting bracket is higher (101.6 mm instead of 91.6 mm)
and the bore holes are horizontally displaced (45.3 mm instead of 42.8 mm).
Dimensions
hurrySCAN ® II
Aperture
7 mm
9.98 mm
Beam displacement (dimension b)
10 mm
12.56 mm
hurrySCAN ®
14 mm
16.42 mm
10 mm
12.56 mm
14 mm
15.79 mm
hurrySCAN ® 20, 25, 30
Options
• Extendable into a 3-axis scan system
with varioSCAN
(hurrySCAN ® 20, 25 and 30 also with
varioSCAN 40FLEX )
• Can be equipped with an additional
reference sensor system
(10 mm apertures and higher)
• Can be equipped with high-performance
light-weight mirrors
(14 mm apertures and higher)
• Available without a housing as a scan
module (except hurrySCAN ® 30)
• Available with water cooling
(standard for hurrySCAN ® 20, 25
and 30)
1
2
3
4
5
6
7
Beam in
Mounting screws (M6 threads) (#)
Flange (#)
Alignment pins (6h6) (#)
Objective
Beam out
Wider construction (drawn
dashed) only for hurrySCAN ® 30
E Electrical connectors
A Connection for cooling air
W Connections for cooling water
The high quality of SCANLAB’s scan heads
is the result of years of experience in the
development and manufacture of galvanometer scanners and scan systems. In
addition, every scan system must first pass
the SCAN check burn-in test before it is
released for shipment to the customer.
(#)
Quality
not included
• All scan heads can be supplemented via
a camera adapter for process monitoring
Legend
• For extremely conditions available with
air-cooling of the deﬂection mirrors
(standard for hurrySCAN ® 20, 25
and 30)
all dimensions in mm

Dimensions
hurrySCAN ® 20
hurrySCAN ® 25
hurrySCAN ® 30
Aperture (dimension a)
20 mm
25 mm
30 mm
Beam displacement (dimension b)
25.25 mm
29.88 mm
35.53 mm
Dimension c
67.25 mm
72.00 mm
72.00 mm
hurrySCAN ® II, hurrySCAN ®
Type-Dependent Specifications
(all angles are in optical degrees)
hurrySCAN ®II
Aperture
7 mm
10 mm
14 mm
10 mm
14 mm
20 mm
25 mm
30 mm
Typical scan angle of scanner 1
±0.35 rad
±0.35 rad
±0.35 rad
±0.35 rad
±0.35 rad
±0.35 rad
±0.26 rad
±0.35 rad
Typical scan angle of scanner 2
±0.35 rad
±0.35 rad
±0.35 rad
±0.35 rad
±0.35 rad
±0.35 rad
±0.40 rad
±0.35 rad
Typical field size – ellipse (1), (2)
-
-
-
-
-
-
80 x 130 mm2 -
hurrySCAN ®
Optical performance
Typical field size – square (1), (2)
110 x 110 mm2 110 x 110 mm2 90 x 90 mm2
110 x 110 mm2 90 x 90 mm2
90 x 90 mm2
75 x 75 mm2
50 x 50 mm2
Nonlinearity
Dynamic performance
< 3.5 mrad
< 3.5 mrad
< 3.5 mrad
< 3.5 mrad
< 3.5 mrad
Tracking error
0.11 ms
0.14 ms
0.24 ms
0.18 ms
0.42 ms
0.35 ms
0.50 ms
0.55 ms
Long-term drift over 8 hours
< 0.3 mrad (4)
< 0.6 mrad (5)
< 0.6 mrad (5)
< 0.6 mrad (5)
< 0.6 mrad (5)
< 0.6 mrad (5)
< 0.6 mrad (5)
< 0.6 mrad (5)
1 % of full scale
10 % of full scale
0.23 ms
-
0.25 ms
-
0.40 ms
1.60 ms
0.35 ms
0.90 ms
0.80 ms
2.20 ms
0.80 ms
2.50 ms
0.90 ms
3.20 ms
1.20 ms
4.50 ms
Typical speeds (1)
Marking speed
3.5 m/s
2.5 m/s
1.5 m/s
2.0 m/s
1.0 m/s
1.0 m/s
0.8 m/s
0.7 m/s
Positioning speed
15.0 m/s
10.0 m/s
7.0 m/s
7.0 m/s
7.0 m/s
6.0 m/s
5.0 m/s
3.0 m/s
good writing quality
1100 cps
800 cps
500 cps
640 cps
350 cps
320 cps
260 cps
220 cps
high writing quality
800 cps
500 cps
340 cps
400 cps
220 cps
210 cps
170 cps
150 cps
approx. 5.8 kg approx. 5.8 kg approx. 5.8 kg
< 3.5 mrad
< 3.5 mrad
< 2.1 mrad
Step response time
(settling to 1/1000 of full scale)
Writing speed(3)
approx. 3 kg (6) approx. 3 kg (6) approx. 3 kg (6) approx. 3 kg (6) approx. 3 kg (6)
Weight (without objective)
with F-Theta objective, f = 160 mm (hurrySCAN ®II 7-14 and hurrySCAN ® 10-14) or f = 163 mm (hurrySCAN ® 20-30)
(2)
limited by vignetting at objective
(3)
single-stroke characters of 1mm height
(4)
at constant ambient conditions, plus offset drift < 30 µrad/K and gain drift < 100 ppm/K
(5)
after warm-up
(6)
with optional water cooling up to 4.7 kg
(1)
Common Specifications
Dynamic performance
Repeatability
Optical performance
Gain error
Zero offset
Skew
< 22 µrad
Power requirements
Input signals
Analog version
Digital version
Output signals
Analog version
Digital version
Operating temperature
Typical air requirements (1)
Typical water requirements
(1)
(1)
alternatively:
±4.8 V; ±9.6 V;
±4.8 mA; ±9.6 mA
XY2-100 Standard, SL2-100
or optical data transfer
3 status signals per axis
TTL level
XY2-100 Standard, SL2-100
or optical data transfer
25 °C ± 10 °C
clean, filtered air
20 l/min at ∆p < 2 bar
5 l/min at
∆p < 0.1 bar, p < 4 bar
air and water cooling optional for hurrySCAN ®II 7-14 and hurrySCAN ® 10-14
SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
[email protected] · www.scanlab.de
SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001 ·
[email protected] · www.scanlab-america.com
12 / 2011 Information is subject to change without notice.
< 5 mrad
< 5 mrad
< 1.5 mrad
±(15+1.5) V DC
max. 3 A
(max. 6 A for hurrySCAN ® 20-30)
SCANcube®, intellicube®
scanning in pocket size
The ultra-compact scan heads of the SCANcube® series deliver
excellent dynamics and superior SCANLAB product quality in a
minimum-size package. The scan heads of the intellicube® series
advantageously combine the features of the successful SCANcube®
and intelliSCAN ® platforms.
SCANcube® and intellicube® scan heads bring success to applications demanding very fast marking speeds and integration in the
tightest of spaces. Applications include packaging-industry coding
and marking of electronic components, i.e. market domains typically served in the past by inkjet systems.
Sealed against water and dust, the SCANcube®’s and intellicube®’s
robust and exceptionally compact housing facilitates straightforward integration into production environments – even confined,
difficult-to-access locations. A wide variety of objectives can be
used with these scan heads.
The intellicube ® is also ideal for applications requiring very high
dynamics or the acquisition of important status information.
• Marking and coding
• Semiconductor and electronics industry
• Processing-on-the-fly
SCANcube® 7, 8.5 , 10, 14
Legend
1 Beam in
2 Connector
3 Beam out
Dimensions
SCANcube®
Aperture
Beam displacement
7 mm
9.98 mm
8,5 mm
10.17 mm
10 mm
12.54 mm
SCANLAB precisely optimizes and tunes
all optical components to one another to
ensure maximum focus quality and stable
process parameters. Optical components
offered by SCANLAB include compact
objectives, as well as objective mounts
for standard objectives. Optics for various
wavelengths, power densities, focal
lengths and image fields are available.
Control
SCAN cube® scan heads are equipped
with either an analog or a digital standard
interface accessible via a 25-pin D-SUB
connector.
They are easily controlled via SCANLAB’s
RTC® PC interface board or the PC-independent RTC® SCAN alone board from
SCANLAB.
intellicube® scan heads are equipped with
a digital standard interface. They are easily
controlled via SCANLAB’s RTC®4 or RTC®5
PC interface board. Scan head diagnosis
and all essential configuration parameters
are controlled via software commands.
Options
Optics
14 mm
16.42 mm
• For optical process monitoring,
SCANLAB offers a camera adapter.
intellicube® 10, 14
SCANcube® or intellicube®?
The intellicube® provides improved dynamic
performance. And as a direct beneficiary
of SCANLAB’s years of experience developing digitally controlled intelliSCAN ® scan
systems, the intellicube® also offers all the
advantages of iDRIVE ® technology: high
flexibility, superior dynamics, real-time monitoring of actual position and advanced
status information, etc.
The high quality of SCANLAB’s scan solutions is the result of years of experience
in the development and manufacture of
galvanometer scanners and scan systems.
In addition, every scan system must first
pass the SCAN check burn-in test before it
is released for shipment to the customer.
Quality
intellicube® scan heads are available with
vector-tuning or step-tuning.
In addition to the 10 and 14 mm apertures,
the SCAN cube® series also offers extremely
compact scan heads with 7 or 8.5 mm
apertures. Further the SCAN cube® can be
equipped with either a digital or an analog
interface.
The intellicube ® and SCAN cube® are electrically and mechanically inter-compatible.
Legend
1 Beam in
2 Connector
3 Beam out
The housing dimensions of intellicube® 10 and 14 are identical to
SCANcube® 10 and 14.
Dimensions
intellicube®
Aperture
Beam displacement
10 mm
12.54 mm
14 mm
16.42 mm
SCANcube®, intellicube®
SCAN cube® 7
SCAN cube® 8.5
SCAN cube® 10
intellicube® 10
SCAN cube® 14
intellicube® 14
Aperture
7 mm
8.5 mm
10 mm
10 mm
14 mm
14 mm
Beam displacement
9.98 mm
10.17 mm
12.54 mm
12.54 mm
16.42 mm
16.42 mm
Dynamic performance
Tracking error
0.14 ms
0.14 ms
0.16 ms
0.14 ms
0.30 ms
0.24 ms
1 % of full scale
0.25 ms
0.30 ms
0.40 ms
0.35 ms
0.65 ms
0.50 ms
10% of full scale
0.70 ms
0.70 ms
1.2 ms
1.2 ms
1.6 ms
1.4 ms
Marking speed
2.5 m/s
2.5 m/s
2.0 m/s
2.5 m/s
1.0 m/s
1.5 m/s
Positioning speed
15.0 m/s
15.0 m/s
10.0 m/s
15.0 m/s
7.0 m/s
12.0 m/s
good writing quality
900 cps
900 cps
640 cps
800 cps
410 cps
460 cps
high writing quality
600 cps
600 cps
400 cps
500 cps
280 cps
320 cps
650 g
1 kg
1.9 kg
1.9 kg
2.3 kg
2.3 kg
Step response time
(settling to 1/1000 of full scale)
Typical speeds (1)
Writing speed(2)
Weight (without objective)
(1)
(2)
with F-Theta objective, f = 160 mm
single-stroke characters of 1 mm height
Dynamic performance
Repeatability
Offset drift
Gain drift
Optical performance
Typical scan angle
Gain error
Zero offset
Nonlinearity
Power requirements
Interface
Analog version (SCAN cube®)
Digital version
80 ppm/K
< 0.3 mrad
plus temperature-induced
gain and offset drift
±0.35 rad
< 5 mrad
< 5 mrad
< 3.5 mrad
±15 V DC,
max. 3 A each
(SCAN cube® 7 max. 2 A)
±4,8 V
XY2-100 (3)
or SL2-100
25 °C ± 10 °C
intellicube® XY2-100 Enhanced,
SCAN cube® XY2-100 Standard
12 / 2011 Information is subject to change without notice.
(3)
< 22 µrad
30 µrad/K
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001 ·
intelliSCAN ®, intelliSCANde®
smart scanning
intelliSCAN® series scan heads offer advantages such as digital
servo circuitry, whose powerful algorithms can boost both dynamic performance and marking quality. In addition, the electronics
extensively enhance the range of diagnosis possibilities as well as
communication between the scan system and the customer’s control computer.
SCANLAB can equip its digital servo firmware with multiple control algorithms and parameter sets. Switching between different
algorithms or sets (even during processing) allows scan head dynamics etc. to be reconfigured and thereby optimally adapted to
particular task requirements.
intelliSCAN ® scan heads allow real-time monitoring of all key
operational states of the scan system, such as mirror positions,
mirror speeds, drive currents, supply voltage and temperature.
As a result, the scan process can be simulated or – especially in
safety-critical applications – monitored, logged and modified if
required.
Scan heads of the intelliSCAN ® series also create new remotediagnosis possibilities. They have the necessary facilities to support
software-querying of accumulated operating hours, serial number,
date-of-manufacture and essential operational states. Thus, deviations can be quickly detected and corrected.
intelliSCANde® is the high-end member of this scan head series.
Using galvanometer scanners with digital encoders, the
intelliSCANde® features remarkably low drift and dither values,
making it ideal for high-end applications.
•
•
•
•
•
Micromachining
Marking, welding, drilling
Rapid prototyping, rapid tooling
Photovoltaic production
Processing-on-the-fly
intelliSCAN ® 10, 14 + intelliSCAN ® 20, 25, 30
Housing
intelliSCAN ® 10, 14 and intelliSCANde ® 14
Dimensions: same as hurrySCAN ® II 10,14
®
Weight: approx. 3 kg (without objective)
The housings of all intelliSCAN scan heads
®
are identical with those of the hurrySCAN
series. For detailed dimensions, refer to
these products’ data sheets.
Optics
Galvanometer mirrors and objectives with
optimized mounts are available for all typical laser types and image fields. Customerspecific configurations are also possible.
Control
The intelliSCAN ® is equipped with a digital
standard interface and is easily controlled
via SCANLAB’s RTC®4 or RTC®5 PC interface board. Scan head diagnosis and all
essential configuration parameters are controlled via software commands.
intelliSCAN ® scan heads are available with
either an SL2-100 interface (20 bits) or an
XY2-100 enhanced interface (16 bits, optical also optionally available).
intelliSCAN ® 20, 25, 30 and intelliSCANde ® 20, 25, 30
Dimensions: same as hurrySCAN ® 20, 25 and 30
Weight: approx. 5.8 kg (without objective)
Options
• As high-performance version available
with high-performance light-weight
mirrors (for 14, 20 and 30 mm apertures)
• Additional reference sensor system
for automatic self-calibration (not for
intelliSCANde® and intelliSCAN ® 7 )
• Application-specific and customerspecific tunings
Legend
• Available with water cooling
(standard for 20, 25 and 30 mm
apertures)
• Available without a housing as a scan
module
1 Beam in
2 Screws (M6 threads) *
3 Flange *
4 Alignment pins (6h6) *
(* not included)
• Extendable into a three-axis scan system
with varioSCAN focusing units
5
6
7
8
Mounting bracket
Electrical connectors
Objective
Beam out
A Connection for
cooling air
W Connections for
cooling water
• Camera adapter for process monitoring
intelliSCANde® 14 + intelliSCANde ® 20, 25, 30
Digital Encoder Technology
®
intelliSCANde scan heads equipped with
digital encoder technology are specifically
optimized to enhance positioning accuracy
without impairing dynamics or mechanical
dimensions. This brings maximized dynamic
performance and positioning accuracy to
application areas needing XY-stage precision
and enables applications that demand the
highest throughput and accuracy.
®
The intelliSCANde scan heads base upon
the dynAXISde® galvanometer scanners and
equal or exceed the high dynamic performance of the industry-proven dynAXIS ®
(with analog position detectors). They enable laser scanning with a positioning resolution of 19-20 bits, exceptionally low dither
(electronic noise), best linearity and lowest
Quality
drift. An SL2-100 interface facilitates comprehensive 20-bit control via SCANLAB’s
RTC®5 PC control board. Line pitch can be
precisely adjusted for scribing applications
and to eliminate effects such as Moiré patterns.
Compatibility
Integration of digital encoders does not
appreciably change the outer dimensions
of the galvanometer scanners. Therefore
the housings of all intelliSCANde® scan
heads are identical to those of the
hurrySCAN ® and intelliSCAN ® series.
Moreover, intelliSCANde® scan heads are
electrically and optically fully compatible
with hurrySCAN ® and intelliSCAN ® scan
heads.
Example Processing Result
Structure parameters
approx. 40 µm line spacing
approx. 60 µm and 90 µm corner radii
System
intelliSCANde® 14
f = 170 mm objective
Process parameters
sharp edge tuning
2 m/s marking speed
5 m/s positioning speed
0.10 ms tracking error
Results
smooth corners with small corner radii
(low tracking error)
excellent line straightness (low dither)
The high quality of SCANLAB’s scan solutions is the result of years of experience in
the development and manufacture of galvanometer scanners and scan systems. In
addition, every scan system must first pass
the SCAN check burn-in test before it is
released for shipment to the customer.
®
intelliSCAN , intelliSCANde
®
Type- and Tuning-Dependent Specifications
Aperture
„Fast Vector“ tuning
Typical speed (2)
Marking speed
Positioning speed
Writing speed
Good writing quality
High writing quality
Dynamic performance
Tracking error
„Step“ tuning
Step response time (3)
1% of full scale
10% of full scale
100% of full scale
®
®
intelliSCAN / intelliSCANde 10 (1)
14
20
25
30
3.0 m/s
14.0 m/s
1.5 m/s
12.0 m/s
1.0 m/s
11.0 m/s
0.8 m/s
10.0 m/s
0.7 m/s
9.0 m/s
1150 cps
800 cps
500 cps
340 cps
340 cps
230 cps
260 cps
170 cps
220 cps
150 cps
0.12 ms
0.21 ms
0.32 ms
0.50 ms
0.55 ms
0.37 ms
1.0 ms
3.0 ms
0.7 ms
1.4 ms
3.7 ms
0.75 ms
1.9 ms
5.3 ms
1.0 ms
2.7 ms
8.0 ms
1.2 ms
3.5 ms
11.0 ms
(1)
currently not available as intelliSCANde®
with F-Theta objective, f = 160 mm (f = 163 mm for intelliSCAN ® 20, 25 and 30)
(3)
settling to 1/1000 of full scale
(2)
Optical performance
Typical scan angle
Gain error
Zero offset
Power requirements
Interface
Typical air
requirements (3)
Typical water
requirements (4)
±0.35 rad (1)
< 5 mrad
< 5 mrad
±15 V DC,
max. 6 A each (2)
or 30 V DC, max. 6 A (2)
XY2-100 Enhanced,
SL2-100 or optical
data transfer
25 °C ± 10 °C
clean, filtered air
20 l/min at ∆p < 2 bar
5 l/min at
∆p < 0.1 bar, p < 4 bar
(1)
for intelliSCAN ® 25: ±0.26 rad (scanner 1), ±0.40 rad (scanner 2)
max. 3A with intelliSCAN ® 10, 14
(3)
only with intelliSCAN ® 20, 25, 30
(4)
optional for intelliSCAN ® 10, 14
(2)
Optimized for Client-Specific Applications,
these Tunings are available:
Tuning
optimized for
„Step“ tuning
minimal step response time
„Sharp Edge“ tuning
high marking speed,
small edge rounding
low dither
„Micromachining“ tuning
Dynamical performance
Repeatability
Dither (position noise, maximum
amplitude)
Offset drift
Gain drift
Optical performance
Nonlinearity
Positioning resolution
intelliSCAN de®
intelliSCAN ®
< 11 µrad (*)
< 5 µrad
< 22 µrad
< 22 µrad (1)
< 0.1 mrad (2)
< 15 µrad/K
< 8 ppm/K
< 0.6 mrad (3)
-
< 0.5 mrad
up to 0.41 µrad (4)
< 3.5 mrad
up to 1.6 µrad (*)
preliminary
for “Micromachining” tuning
at constant environmental conditions
(3)
after warm-up
(4)
for intelliSCANde® 14 positioning resolution up to 0.65 µrad
(1)
(2)
*
Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199
*
Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001 ·
12 / 2011 Information is subject to change without notice. * Samples provided by EOS.