Section 3 - Valves - Nor

Transcription

IsolationSection
Valves
Three
3
3.1
General Information
96
3.2
N-Series Valves
98
3.3
Poppet Valves
100
3.4
Ball Valves
112
3.5
Genesis Valves & Fittings
114
3.6
Manual Butterfly Valves
121
3.7
Pendulum Valves
122
3.8
Linear Gate Valves
123
3.9
Bellowless Poppet Valves & Leak Valves
126
3.10 Isolation Valve Heaters
3.11
Bakeable All Metal Valves
Nor-Cal Products, Inc.
1967 South Oregon Street
Yreka, CA 96097 USA
127
128
Tel: 800-824-4166
or 530-842-4457
Main Fax: 530-842-9130
Sales Fax: 530-841-9189
www.n-c.com
95
3
Isolation Valves
SECTION 3.1
General Information
Since 1962, Nor-Cal Products has been improving our valve designs and expanding our product line in order to offer valves for almost every vacuum application.
Our valves provide outstanding performance in the most demanding applications such as semiconductor and compound semiconductor processing.
Valve Applications
PROCESS
APPLICATION
VALVE
TYPE
UNIQUE
FEATURES
N-Series
Compact. High Cycle.
Poppet
Large stroke
Genesis
Small footprint.
Low profile
Bellowless
Poppet
O-ring sealed shaft
Butterfly
Low profile. 1/4 swing
UHV ROUGHING
All-metal
HV, UHV PUMP
ISOLATION
Gate
HIGH-VACUUM
PUMP ISOLATION
Pendulum
PUMP EXHAUST
Ball
GAS INTRODUCTION
Leak
HIGH-VACUUM
ROUGHING
(1) MTBF
96
SEAT
SEAL
TEMPERATURE
RANGE
PRESSURE
RANGE
ACTUATION
to 2 (19 to 50)
Viton
-20º to 150ºC
1000 to 10-9 mbar
Pneumatic
3/8
to 4 (10 to 100)
Viton
-20º to 150ºC
1000 to 10-9 mbar
Manual
or Pneumatic
3/4
to 4 (19 to 100)
Viton
-20º to 150ºC
1000 to 10-9 mbar
Pneumatic
1,000,000
to 2 (10 to 50)
Viton
-20° to 150°C
1000 to 10-9 mbar
Pneumatic
250,000
3/4
to 11/2 (19 to 38)
Viton
-20º to 150ºC
1000 to 10-9 mbar
Manual
30,000
All-metal seals
3/4
to 11/2 (19 to 38)
Copper
-250º to 400ºC
1000 to 10-11 mbar
Manual
10,000 (2)
Highest conductance
5 /8
to 12 (16 to 300)
Viton
-20º to 150ºC
1000 to 10-10 mbar
Manual
or Pneumatic
Low particle generation.
6 to 16 (150 to 400)
Low vibration
Viton
-20º to 150ºC
1000 to 10-9 mbar
Pneumatic
200,000
Teflon
20º to 150ºC
1000 to 10-4 mbar
Manual
20,000
1000 to >1x 10-11 mbar
Manual
1 /4
SIZES
(NOMINAL ID)
3 /4
3 /8
swing open/close
Variable leak
(2) Cycle life is reduced with high temperature bakeouts
3 /4
to 2 (19 to 50)
N/A
Copper
-250° to 450°C
CYCLES (1)
3,000,000
250,000
100,000 (3)
300 (2)
(3) Optional Million Cycle Valve is available.
Poppet Valves
Ball Valves
Genesis Valves
Linear Gate Valves
All-Metal Valves
Our poppet valves are fully
opening for high conductance
and to prevent bellows contamination while the valve is in the
open position, reducing particle
contamination when the valve
is cycled. Our bodies are dieformed from 304 stainless steel
to eliminate sharp inside corners
and improve conductance.
The valves are electropolished
for lower outgassing and better
corrosion resistance. The welded
bellows are made from AM-350
stainless steel to provide excellent
corrosion resistance and flexibility. They are designed with
additional segments to provide
extended life.
Ball valves are a low cost,
manually or pneumatically
operated, straight through isolation device. Their simple, robust
design provides high reliability in
“dirty” applications. They are
commonly used on MOCVD
and CVD equipment downstream from the chamber or
vacuum pump to isolate traps
or abatement tools. A stainless
steel body and Teflon seat make
these valves ideal for corrosive
environments. Other applications include vacuum and other
facilities requirements.
The Genesis modular vacuum
valve system provides semiconductor equipment designers with
unlimited possibilities for downstream vacuum subassemblies.
Nippleless valve bodies and
block fittings can be assembled
by two attachment methods
using universal ISO-KF centering
ring/O-ring hardware, providing maximum flexibility and
the smallest footprint possible.
Additionally these valves feature
million cycle reliability, integrated
low-cost soft start circuit and
modular heaters.
Our linear gate valves have
an ultra-slim profile, which makes
them perfect for applications
where space is limited, and their
smaller volume results in lower
outgassing and faster pumpdown. Larger sizes have a
unique feature in the actuator,
which dampens the vibration,
which can arise when the
gate is opened. This makes
these valves ideal for semiconductor and other vibration
sensitive processes.
Nor-Cal’s bakeable all-metal seal
angle valves are intended for use
in UHV or cryogenic applications
where temperature extremes
preclude the use of our elastomer
seal valves. Approved for use in
beamline facilities, these valves
have a temperature operating
range from -250°C to 400°C.
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
Isolation
Valves
General Information
3
SECTION 3.1
New Products
Custom Valves
N-Series Poppet Valves
The new N-Series poppet valves are an
innovative, compact design with an MTBF of
3 million cycles. A bellows-sealed stem and
electropolished stainless steel body provides
long life even in the most demanding applications. Standard pneumatic actuation is normally
closed. N-series valves are available in right angle
or angle-in-line body styles with tube ends, NW
flanges and CF rotatable flanges. Optional air
solenoids are available in multiple voltages and
can be ordered factory installed or as separate
kits for easy field installation.
Nor-Cal frequently provides custom and modified standard isolation valves to meet
our customer’s specific requirements. Single or multiple valves can be integrated with
manifolds, chambers and other components. Many special features can be specified
by adding options. See page 98.
Standard Options
•
•
•
•
•
•
Normally open pneumatic actuation
Microswitch position indication
Special O-rings
Various air solenoid voltages
Fitting options for bypass lines
Heater jackets, insulators
and controllers
Custom Features
Leak Valves
Leak valves are used for controlling
gas introduction into high and ultrahigh vacuum systems. They utilize an
optically flat sapphire poppet and a
metal seal seat, allowing bakeout
temperatures to 450ºC.
• Special port lengths and
configurations for drop-in
compatibility with other
manufacturer’s valves
• Custom flange configurations
• Special position indicators
• Pump out ports
• Custom finishes
• Gate shields for linear
gate valve O-rings
Spring-to-close
pneumatic
actuator with
gate shield
These Viton O-ring sealed valves provide
a low-cost alternative to bellows sealed
gate valves. Quarter-turn actuation, small
footprint and the shortest possible gas path
make manual butterfly valves the preferred
choice for many applications.
Custom
fitting
option
Machined
Ball Valves
Our new ball valves are a low cost,
manually or pneumatically operated,
straight through isolation device. Their
simple, robust design provides high
reliability in “dirty” applications. They
are commonly used on MOCVD and
CVD equipment downstream from the
chamber or vacuum pump to isolate
traps or abatement tools. A stainless
steel body and Teflon seat make these
valves ideal for corrosive environments.
A quarter turn of the handle quickly
switches the valve from open to close.
They are available with NW-16 through
NW-50 flanges as standards. Heater
jackets are available to reduce process
by-product accumulation.
Custom valve
manifold
97
3
SECTION 3.2
Isolation Valves
N-Series Valves
SPECIFICATIONS
Nominal Port OD’s: ¾ (19), 1 (25) and 1 ½ (38)
inches (mm)
Materials
Body: Electropolished 304 stainless steel
Bellows: Welded AM-350 stainless steel
Bonnet seal: Viton
Poppet seal: Viton
Other O-ring compounds available
Actuation: Spring / Pneumatic
Air-to-open, spring-to-close
Helium leak tested: <10 -9 mbar l/sec.
Operating Temperature: 150°C Max.
Supply Pressure: 60 to100 psig (4-7 bar)
Differential pressure: Maximum 6 psi (0.4 bar)
differential across the valve seat
Maximum temperature with Viton seals:
150ºC Max
Vacuum Range: 1000 to 1x10 -9 mbar
Options: Solenoids, optical sensors, Heater
jackets and controllers available for all valves.
The new N-Series poppet valves are an
innovative, compact design with an
MTBF of 3 million cycles. A bellowssealed stem and electropolished stainless
steel body provides long life even in the
most demanding applications. Standard
pneumatic actuation is normally closed
(Air-to-Open / Spring-to-Close). N-series
valves are available in right angle or anglein-line body styles with tube ends, NW
flanges or CF rotatable flanges. Optional
air solenoids are available in
multiple voltages and can be ordered
factory installed or as separate kits for easy
field installation.
be ordered factory installed or as separate
kits for easy field installation.
Mounting slots for optional position indicators are incorporated into the actuator
body resulting in a reduction in overall
size and elimination of the risk of physical
damage to the sensors. Sensors are easily installed without adjustment. Optical
switch sensors indicate both the open &
closed valve positions. It is possible for
each valve to have two sensors installed
for redundancy. Position indicators can
One rebuild kit fits the four valve sizes
from NW-16 through NW-50 to reduce
maintenance inventory costs. Viton
O-ring seals are standard, however the
valve is designed to accept alternate seal
compounds to satisfy your application
requirements.
N-Series Options
Please use the following part numbering
tree to add the appropriate options to a
standard N-Series valve model number.
See tables below for option codes.
O-ring Material Options
SEAL
MATERIAL
Viton
Kalrez 4079
Kalrez 8085
Kalrez 8575
Kalrez 9100
Chemraz E38
Dupra 192
Perlast G74P
All dimensions are in inches (mm) & weights
are in pounds (kg), unless otherwise noted.
98
CODE
Default (no code)
-K79
-K85
-K75
-K91
-C38
-D19
-PP7
Valve
Model Number
Position
Indicator
O-ring
Type
Air
Solenoid
Example: NAP-150-NW-NPN-K91-S11
Right angle N-Series valve with 1.5 inch(38.1) bore, NW-40 flanges, optical position
indicators, Kalrez 9100 O-rings, 120VAC and air solenoid option.
Air Solenoid Option
DESCRIPTION
CODE
KIT
120VAC, 50/60 Hz
24VDC
240VAC, 50/60 Hz
24VAC, 50/60 Hz
-S11
-S21
-S31
-S41
N-S11-K
N-S21-K
N-S31-K
N-S41-K
Position Indicator Option
DESCRIPTION
Optical - main valve open & closed
Optical - main valve open & closed
CODE
KIT
NPN
PNP
N-NPN-K
N-PNP-K
3
Isolation
Valves
N-Series Valves
Pneumatic N-Series Angle Valve
MODEL
NUMBER
NOMINAL
PORT OD
NAP-075
NAP-075-NW
NAP-075-CF
NAP-100
NAP-100-NW
NAP-100-CF
NAP-150
NAP-150-NW
NAP-150-CF
NAP-200
NAP-200-NW
NAP-200-CF
3/4 (19)
3/4 (19)
1 (25)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
11/2 (38)
11/2 (38)
11/2 (38)
11/2 (38)
No Flanges
NW-16
CF-133, Rotatable
No Flanges
NW-25
CF-212, Rotatable
No Flanges
NW-40
CF-275, Rotatable
No Flanges
NW-50
CF-338, Rotatable
2.77 (70)
A
B
C
1.42 (36)
1.57 (40)
1.91 (48)
1.82 (46)
1.97 (50)
2.28 (58)
2.41 (61)
2.56 (65)
2.62 (67)
2.61 (66)
2.76 (70)
2.84 (72)
3.95 (100)
4.10 (104)
4.73 (120)
4.35 (111)
4.50 (114)
4.81 (122)
4.94 (125)
5.09 (129)
5.15 (131)
5.14 (131)
5.29 (134)
5.37 (136)
4.90 (124)
5.05 (128)
5.68 (144)
5.30 (135)
5.45 (138)
5.76 (146)
5.89 (150)
6.04 (153)
6.09 (155)
6.09 (155)
6.24 (159)
6.32 (161)
DESCRIPTION
3/4 (19)
SECTION 3.2
0.95 (24)
C
B
A
Pneumatic N-Series Angle In-Line Valve
MODEL
NUMBER
NOMINAL
PORT OD
NAIP-075
NAIP-075-NW
NAIP-075-CF
NAIP-100
NAIP-100-NW
NAIP-100-CF
NAIP-150
NAIP-150-NW
NAIP-150-CF
NAIP-200
NAIP-200-NW
NAIP-200-CF
3/4 (19)
3/4 (19)
3/4 (19)
1 (25)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
11/2 (38)
11/2 (38)
11/2 (38)
11/2 (38)
DESCRIPTION
No Flanges
NW-16
CF-133, Rotatable
No Flanges
NW-25
CF-212, Rotatable
No Flanges
NW-40
CF-275, Rotatable
No Flanges
NW-50
CF-338, Rotatable
A
3.64 (92)
3.94 (100)
4.20 (107)
3.64 (92)
3.94 (100)
4.75 (121)
4.82 (122)
5.12 (130)
5.24 (133)
5.21 (132)
5.51 (140)
5.66 (144)
2.77 (70)
B
4.60 (117)
4.60 (117)
4.60 (117)
4.00 (102)
4.00 (102)
4.00 (102)
4.37 (111)
4.37 (111)
4.37 (111)
4.37 (111)
4.37 (111)
4.37 (111)
0.95 (24)
B
A
N-Series Seal Kit
MODEL
NUMBER
DESCRIPTION
NA-075-95
Seal kit for 0.75 (19) through 2 (50) inch (mm) sizes, Viton. Includes (1) poppet and (1)
bonnet O-ring.
N-Series Rebuild Kit
MODEL
NUMBER
DESCRIPTION
NA-075-99
Valve rebuild kit for 0.75 (19) through 2 (50) inch (mm) sizes. Includes valve actuator/
bellows assembly.
Note: Seals are not included. Recommend use of the NA-075-95 Seal Kit.
99
3
SECTION 3.3
Isolation Valves
Poppet Valve General Information
Construction
SPECIFICATIONS
Nominal port ODs: 3 / 8 to 4 inch (10-102)
Bonnet seal: Viton or Copper
Poppet seal: Viton
Flanges: CF, NW, ISO or ASA
Maximum temperature with Viton seals
See bakeability chart this page
Sustained: <150°C
Intermittent: <204°C
Helium leak tested: <10 -9 mbar l/sec.
Vacuum range
Viton bonnet seal: > 1 x 10-9 mbar - High
Vacuum
Copper bonnet seal: > 1 x 10 -10 mbar - UHV
Manual actuation: Bronze nuts/ACME threads
Pneumatic actuation: Normally closed
Operating Pressure: 60 to 80 psig
3/4 to 2 inch (19-50) ODs: Air-to-open/
spring-to-close
21/2 to 4 inch (63-101) ODs: Air-to-open/airto-close
Options: See facing page.
Thermal: Heater jackets and controllers
available for all valves. Call for details
Bodies are die-formed from 304 stainless steel to eliminate
sharp inside corners and improve conductance. The valves
are electropolished for faster pumpdown, lower outgassing
and better corrosion resistance. The welded bellows
are made from AM-350 stainless steel to provide corrosion
resistance and excellent flexibility. The bellows fully retract
from the side port when the valve is open, eliminating
buildup of by-products on the bellows and subsequent
particle generation during operation. They are designed
with additional segments to provide extended life.
Nor-Cal valves can be operated in any position and
actuators can be removed quickly for routine inspection
without disassembling the system.
Models
Our poppet valves are available in most port configurations with CF, NW, ISO or ASA flanges. Valves through 3 inch (76) OD’s are
available with manual or pneumatic actuators and Viton or copper bonnet seals. Valves over 3 inches (76) are available with
pneumatic actuators only. Custom port lengths, flange configurations and bellowless valves are also available.
Vacuum Range
Valve Actuation
Thermal Products
Poppet seals have helium leak rates of
<10 -9 mbar l/sec. Viton bonnet sealed
valves can be used in the 10 -9 mbar range,
while copper bonnet seal valves are suited
for use in the 10 -10 range.
Manually operated valves utilize Acme
threads and a self-lubricating bronze nut
for fewer turns and smooth, trouble-free
operation. Pneumatic valves are normally air-to-open, spring-to-close in port
ODs through 2 inches (50) for immediate
closure in case of electrical or air failure.
Larger valves are normally air-to-open,
air-to-close. This actuation option is available on all valves. Most sizes are available
with air-to open, air-to-close with spring
assist as an option. Operating air pressure
for all pneumatic valves is 60 to 80 psig
(4-5.5 bar).
All Nor-Cal poppet valves and gate
valves can be provided with silicone
foam or fiberglass insulated heater
jackets to reduce resident time of
corrosives or particle buildup in semiconductor applications. These jackets are
available with PID controllers or thermostats with high temperature shutoffs.
Jacket and control specifications can be
tailored to meet your specific needs.
Call for price and model number.
Refer to Section 11, Thermal Products,
for more information.
Copper Bonnet Seal
Copper bonnet seal poppet valves with
CF flanges provide metal seals between
the inside of the valve and the atmosphere. They are available in all standard
sizes and port configurations.
Bakeability
ESVP
cutaway
view
The valve’s bakeout temperature should not exceed that of the elastomer that is used in it. See chart below. Standard Viton sealed
valves are bakeable to 150ºC sustained and 204°C for intermittent periods. However, the Viton O-rings begin to take a set at 150°C.
High temperature Kalrez O-rings are available as an option.
BONNET/POPPET
SEAL
APPLICATION
Viton
Kalrez 4079
Kalrez 2037
Chemraz
Silicone
General purpose
High temperature
Chemical resistant
Chemical resistant
High temperature
PNEUMATIC VALVES
OPEN
CLOSED
150°C
280°C
218°C
210°C
232°C
MANUAL VALVES
OPEN
CLOSED
120°C
220°C
218°C
210°C
232°C
150°C
280°C
218°C
210°C
232°C
120°C
220°C
218°C
210°C
232°C
Poppet Valve Conductance (Liters per second)
The conductance values in the table below have been calculated for air at room temperature using the formulas for tubes and elbows
presented in the third edition of Roth’s Vacuum Technology: Cv =182(D4/L’)P for viscous flow or Cm =12(D3/L’) for molecular flow.
Port lengths without flanges and inner diameters for the valve sizes and configurations were used. This method is an approximation,
use values accordingly.
NOMINAL
ANGLE OR TEE
PORT OD VISCOUS MOLECULAR
1/2 (13)
3/4 (19.
Valve rebuild kits are on page 111
1 (25)
11/8 (28)
11/2 (38)
2 (50)
21/2 (63)
3 (76)
4 (100)
60
135
391
1925
4677
12332
23263
57994
3
5
12
37
65
136
217
396
ANGLE-IN-LINE
VISCOUS MOLECULAR
120
286
1324
3459
7505
12558
-
4
9
25
48
83
115
-
IN-LINE
VISCOUS MOLECULAR
45
105
270
1263
3113
7610
14258
34577
2
4
8
24
44
84
130
236
STRAIGHT-THROUGH
VISCOUS MOLECULAR
90
436
1203
-
Note: P=air at 1 mbar. L’=Laxial +1.33(0/180)D for elbows.
100
4
11
23
-
3
Isolation Valves
SECTION 3.3
Poppet Valve Options
One or more options can be added to a particular valve by adding the option suffix to the basic valve model number as
shown below. Heater jackets and controllers are also available for all poppet valves. Call for details and pricing.
Add option suffixes in the following order:
Valve
Model Number
Actuation MicroType
Switch
O-ring
Type
Valve
Fitting
Right Angle Valve Fitting Option
Air
Solenoid
OPTION
Example of a model number with options: ESVP-1502-CF-AS-M-S11
-F1
-F2
-F3
-F4
-F5
-F6
Actuation Option
OPTION
-A
-AS
-SA
PROFILE
DESCRIPTION
Air-to-open/air-to-close
Air-to-open/air-to-close with spring assist
Spring-to-open/air-to-close
Left
Left
Left
Right
Right
Right
Micro-Switch
1 ⁄ 8 female NPT
1 ⁄4 female VCR
3 ⁄ 8 female VCR
1 ⁄ 8 female NPT
All Nor-Cal right angle valves (ESV, CSV, ESVP and CSVP models) are available with the six
fitting options described in the table above. These options are designed to make it easy
for our customers to retrofit our valves with thermocouple gauges, leak valves, up-to-air
valves or gas introduction lines. Other fittings or configurations are available.
Micro-Switch Option
Pneumatic
actuator
OPTION
E
Manual
NOMINAL PORT
OD
-M
Micro-switches are available on all
pneumatically actuated Nor-Cal valves.
A pair of 5-amp micro-switches are
opened or closed by the movement of
the valve stem. One switch closes when
the valve is fully open and the other
when it is fully closed. These can be
connected to control panels with alarms
or lights for positive position indication.
Electrical leads are approximately 10
inches (254) long, but may be cut to any
length upon request.
NOMINAL
PORT OD
3/4 (19)
3/4 (19)
1 (25)
11/2 (38)
2 (50)
3 (76)
4 (100)
A
Viton
Kalrez 4079
Kalrez 2037
Chemraz 513
Silicone
A
Air Solenoid Option
O-ring Option
Standard
-KT
-KC
-CR
-S
1 (25)
11/2 (38)
2 - 21/4 (50-57)
21/2 (63)
3 (76)
4 (100)
A
1.50 (38)
1.22 (31)
1.62 (41)
2.25 (57)
2.25 (57)
2.44 (62)
3.22 (82)
A
2.06 (52)
2.06 (52)
2.06 (52)
2.06 (52)
2.06 (52)
3.54 (90)
3.54 (90)
5.01 (127)
1/2 (13)
Right
profile
Left
profile
E
3/8 (10)
COMPOUND
Both
Both
Bottom
Both
Both
Bottom
3 ⁄ 8 female VCR
Note: Available on ESV, ESVP, CSV and CSVP models only.
Pneumatic valves with port ODs through 2 inches (50) are normally air-to-open/
spring-to-close for immediate closure in case of electrical or air failure. Larger valves
are normally air-to-open/air-to close. These actuation options are available on nearly
all sizes and port configurations of Nor-Cal pneumatically actuated poppet valves.
OPTION
VALVE
PORTS
DESCRIPTION
1 ⁄4 female VCR
OPTION
KIT
-S11
-S21
-S31
-S41
-S12
-S22
-S32
-S42
S11-K
S21-K
S31-K
S41-K
S12-K
S22-K
S32-K
S42-K
NOMINAL PORT OD
3/8 to 2 (10 to 50)
3/8 to 2 (10 to 50)
3/8 to 2 (10 to 50)
3/8 to 2 (10 to 50)
21/2 to 3 (63 to 76)
21/2 to 3 (63 to 76)
21/2 to 3 (63 to 76)
21/2 to 3 (63 to 76)
DESCRIPTION
3-way, 120VAC, 50/60 Hz
3-way, 24VDC
3-way, 240VAC, 50/60 Hz
3-way, 24VAC, 50/60 Hz
4-way, 120VAC, 50/60 Hz
4-way, 24VDC
4-way, 240VAC, 50/60 Hz
4-way, 24VAC, 50/60 Hz
Note: Use 4-way solenoid option for 1.12 and 1.5 (28-38) OD STVP and CSTVP models.
TEMPERATURE
MIN. MAX.
-29°C
-50°C
-54°C
-30°C
-55°C
204°C
316°C
220°C
210°C
232°C
APPLICATION
Industry standard
High temperatures
Chemical resistant
Chemical resistant
High temperatures
Standard Nor-Cal valves use chemical resistant Viton O-rings. Viton O-rings should not be
heated to above 204°C. Even prolonged exposures of 150°C may degrade the O-rings.
High temp Kalrez O-rings allow valve bakeouts to higher temperature. Silicone O-rings
provide adequate sealing performance in thermal
cycling from -55°C to 230°C.
All pneumatic poppet valves can be provided with air solenoids with several current
ratings for electropneumatic actuation. Valves with air-to-open, spring-to-close actuation
require three-way air solenoids, while air-to-open, air-to-close actuators require four-way
solenoids. Both three and four-way air solenoids are available in four current
ratings. A pneumatic valve ordered with this option will arrive with an air solenoid
installed. 18 inch (450) long electrical leads are provided for connection to the power supply.
Air solenoids can be purchased separately in
a kit complete with instructions for
installation by the customer.
When placing your order please
specify the model number of the
valve that the air solenoid will be
installed on, so that our sales staff
can confirm whether a three-way
or four-way solenoid is required.
101
3
Isolation Valves
SECTION 3.3
Manual Angle Valves
Manual Viton Seal Angle Valves
MODEL
NUMBER
SPECIFICATIONS
Port ODs: 3 / 8 to 3 inches (10 to 76)
Materials
Bonnet seal: Copper or Viton
Poppet seal: Viton
Actuation: Self-lubricating bronze nuts
with ACME threads
Sustained: <150°C
Vacuum range
Viton bonnet seal: >1x 10-9 mbar - High Vacuum
Copper bonnet seal: >1x 10 -10 mbar - UHV
Options: Fittings and O-rings. See page 101
available for all valves. See page 127
ESV-038
ESV-0382-CF
ESV-0382-NWB
ESV-050
ESV-0502-CF
ESV-0502-NWB
ESV-075
ESV-0752-CF
ESV-0752-NWB
ESV-100
ESV-1002-CF
ESV-1002-NWB
ESV-150
ESV-1502-CF
ESV-1502-NWB
ESV-200
ESV-2002-CF
ESV-2002-NWB
ESV-2002-ASA
ESV-250
ESV-2502-CF
ESV-2502-ISO
ESV-2502-ASA
ESV-300
ESV-3002-CF
ESV-3002-ISO
ESV-3002-ASA
NOMINAL
PORT OD
3/8 (10)
3/8 (10)
3/8 (10)
1/2 (13)
1/2 (13)
1/2 (13)
3/4 (19)
3/4 (19)
3/4 (19)
1 (25)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
3 (76)
3 (76)
DESCRIPTION
No flanges
Rotatable 1.33 CF
NW-10B
No flanges
Rotatable 1.33 CF
NW-10B
No flanges
Rotatable 1.33 CF
NW-16B
No flanges
Rotatable 2.12 CF
NW-25B
No flanges
Rotatable 2.75 CF
NW-40B
No flanges
Rotatable 3.38 CF
NW-50B
Rotatable ASA-5-200R
No flanges
Rotatable 4.50 CF
ISO-63-250-OF
No flanges
Rotatable 4.62 CF
ISO-80-300-OF
A
B
1.50 (38.1)
1.60 (40.6)
1.65 (41.9)
1.50 (38.1)
1.60 (40.6)
1.65 (41.9)
2.00 (50.8)
2.50 (63.5)
2.15 (54.6)
1.88 (47.8)
2.05 (52.1)
2.03 (51.6)
2.25 (57.2)
2.46 (62.5)
2.40 (62.0)
3.25 (82.6)
3.48 (88.4)
3.40 (86.4)
3.50 (88.9)
3.00 (76.2)
3.38 (85.9)
3.25 (82.6)
3.25 (82.6)
3.25 (82.6)
3.53 (89.7)
3.50 (89.0)
3.50 (89.0)
C
4.06 (103)
4.16 (106)
4.21 (107)
4.06 (103)
4.16 (106)
4.21 (107)
4.56 (116)
5.06 (129)
4.71 (120)
4.32 (110)
4.49 (114)
4.47 (114)
5.63 (143)
5.84 (148)
5.78 (147)
7.85 (199)
8.08 (205)
8.00 (203)
8.10 (206)
8.27 (210)
8.65 (220)
8.52 (216)
8.52 (216)
8.68 (220)
8.96 (228)
8.93 (227)
8.93 (227)
D
4.44 (113)
4.54 115)
4.59 (117)
4.56 (116)
4.66 (118)
4.71 (120)
5.31 (135)
5.81 (148)
5.46 (139)
5.32 (135)
5.49 (139)
5.47 (139)
7.13 (181)
7.34 (186)
7.28 (185)
9.85 (250)
10.08 (256)
10.00 (254)
10.10 (257)
10.77 (274)
11.15 (283)
11.02 (280)
11.02 (280)
11.68 (297)
11.96 (304)
11.93 (303)
11.93 (303)
Manual Copper Seal Bonnet Angle Valves
D
MODEL
NUMBER
C
B
A
A
CSV-038
CSV-0382-CF
CSV-050
CSV-0502-CF
CSV-075
CSV-0752-CF
CSV-100
CSV-1002-CF
CSV-150
CSV-1502-CF
CSV-200
CSV-2002-CF
CSV-250
CSV-2502-CF
CSV-300
CSV-3002-CF
NOMINAL
PORT OD
3/8 (10)
3/8 (10)
1/2 (13)
1/2 (13)
3/4 (19)
3/4 (19)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
DESCRIPTION
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 2.12 CF
No flanges
Rotatable 2.75 CF
No flanges
Rotatable 3.38 CF
No flanges
Rotatable 4.50 CF
No flanges
Rotatable 4.62 CF
A
B
1.50 (38.1)
1.60 (40.6)
1.50 (38.1)
1.60 (40.6)
2.00 (50.8)
2.50 (63.5)
1.88 (47.8)
2.05 (52.1)
2.25 (57.2)
2.46 (62.5)
3.25 (82.6)
3.48 (88.4)
3.00 (76.2)
3.38 (85.9)
3.25 (82.6)
3.53 (89.7)
ESV O-ring Kits
MODEL
NUMBER
NOMINAL
PORT OD
ESV-075-95
ESV-150-95
ESV-200-95
ESV-250-95
ESV-300-95
3/8-1 (10-25)
11/2 (38)
2 (50)
21/2 (63)
3 (76)
C
4.06 (103)
4.16 (106)
4.06 (103)
4.16 (106)
4.56 (116)
5.06 (129)
4.32 (110)
4.49 (114)
5.63 (143)
5.84 (148)
7.85 (199)
8.08 (205)
8.27 (210)
8.65 (220)
8.68 (220)
8.96 (228)
4.44 (113)
4.54 115)
4.56 (116)
4.66 (118)
5.31 (135)
5.81 (148)
5.32 (135)
5.49 (139)
7.13 (181)
7.34 (186)
9.85 (250)
10.08 (256)
10.77 (274)
11.15 (283)
11.68 (297)
11.96 (304)
D
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
3.25 (83)
3.25 (83)
4.05 (103)
4.05 (103)
4.61 (117)
4.61 (117)
5.62 (143)
5.62 (143)
CSV O-ring
& Gasket Kits
MODEL NUMBER
CSV-075-95
CSV-150-95
CSV-200-95
CSV-250-95
CSV-300-95
Valve rebuild kits available. See page 111
102
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
3.00 (76)
3.00 (76)
3.00 (76)
3.50 (89)
3.50 (89)
3.50 (89)
3.50 (89)
4.00 (102)
4.00 (102)
4.00 (102)
4.00 (102)
4.50 (114)
4.50 (114)
4.50 (114)
4.50 (114)
NOMINAL
PORT OD
3/8-1 (10-25)
11/2 (38)
2 (50)
21/2 (63)
3 (76)
3
Isolation
Valves
Pneumatic Angle Valves
SECTION 3.3
Pneumatic Viton Seal Angle Valves
MODEL
NUMBER
NOMINAL
PORT OD
ESVP-038
ESVP-0382-CF
ESVP-0382-NWB
ESVP-050
ESVP-0502-CF
ESVP-0502-NWB
ESVP-075
ESVP-0752-CF
ESVP-0752-NWB
ESVP-100
ESVP-1002-CF
ESVP-1002-NWB
ESVP-150
ESVP-1502-CF
ESVP-1502-NWB
ESVP-200
ESVP-2002-CF
ESVP-2002-NWB
ESVP-2002-ASA
ESVP-250
ESVP-2502-CF
ESVP-2502-ISO
ESVP-2502-ASA
ESVP-300
ESVP-3002-CF
ESVP-3002-ISO
ESVP-3002-ASA
ESVP-400
ESVP-4002-CF
ESVP-4002-ISO
ESVP-4002-ASA
3/8 (10)
3/8 (10)
3/8 (10)
1/2 (13)
1/2 (13)
1/2 (13)
3/4 (19)
3/4 (19)
3/4 (19)
1 (25)
1 (25)
1 (25)
1
1 /2 (38)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
3 (76)
3 (76)
4 (100)
4 (100)
4 (100)
4 (100)
DESCRIPTION
No flanges
Rotatable 1.33 CF
NW-10B
No flanges
Rotatable 1.33 CF
NW-10B
No flanges
Rotatable 1.33 CF
NW-16B
No flanges
Rotatable 2.12 CF
NW-25B
No flanges
Rotatable 2.75 CF
NW-40B
No flanges
Rotatable 3.38 CF
NW-50B
No flanges
4.50 CF
ISO-63-250-OF
No flanges
Rotatable 4.62 CF
ISO-80-300-OF
No flanges
Rotatable 6.00 CF
ISO-100-400-OF
Rotatable ASA-7.5-400R
A
B
1.50 (38.1)
1.60 (40.6)
1.65 (41.9)
1.50 (38.1)
1.60 (40.6)
1.65 (41.9)
2.00 (50.8)
2.50 (63.5)
2.15 (54.6)
1.88 (47.8)
2.05 (52.1)
2.03 (51.6)
2.25 (57.2)
2.46 (62.5)
2.40 (61.0)
3.25 (82.6)
3.48 (88.4)
3.40 (86.4)
3.50 (88.9)
3.00 (76.2)
3.38 (85.9)
3.25 (82.6)
3.25 (82.6)
3.25 (82.6)
3.53 (90.0)
3.50 (88.9)
3.50 (88.9)
4.22 (107)
4.66 (118)
4.47 (114)
4.47 (114)
3.62 (92)
3.72 (95)
3.77 (96)
3.62 (92)
3.72 (95)
3.77 (96)
4.12 (105)
4.62 (117)
4.27 (109)
3.88 (98.6)
4.05 (103)
4.03 (102)
4.98 (127)
5.19 (132)
5.13 (130)
6.74 (171)
6.97 (177)
6.89 (175)
6.99 (178)
7.18 (182)
7.56 (192)
7.43 (189)
7.43 (189)
7.62 (194)
7.90 (201)
7.87 (200)
7.87 (200)
9.55 (243)
9.99 (254)
9.80 (249)
9.80 (249)
C
5.77 (147)
5.87 (149)
5.92 (150)
5.77 (147)
5.87 (149)
5.92 (150)
6.26 (159)
6.76 (171)
6.41 (163)
6.02 (152)
6.19 (157)
6.17 (157)
7.56 (192)
7.77 (197)
7.71 (196)
11.23 (285)
11.46 (291)
11.38 (289)
11.48 (292)
10.1 (257)
10.48 (266)
10.35 (263)
10.35 (263)
11.00 (297)
11.28 (287)
11.25 (286)
11.25 (286)
14.99 (381)
15.43 (392)
15.24 (387)
15.24 (387)
D
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
3.00 (76)
3.00 (76)
3.00 (76)
3.50 (89)
3.50 (89)
3.50 (89)
3.50 (89)
4.00 (100)
4.00 (100)
4.00 (100)
4.00 (100)
4.5 (114)
4.5 (114)
4.5 (114)
4.5 (114)
6.50 (165)
6.50 (165)
6.50 (165)
6.50 (165)
Pneumatic Copper Seal Bonnet Angle Valves
MODEL
NUMBER
NOMINAL
PORT OD
CSVP-038
CSVP-0382-CF
CSVP-050
CSVP-0502-CF
CSVP-075
CSVP-0752-CF
CSVP-100
CSVP-1002-CF
CSVP-150
CSVP-1502-CF
CSVP-200
CSVP-2002-CF
CSVP-250
CSVP-2502-CF
CSVP-300
CSVP-3002-CF
CSVP-400
CSVP-4002-CF
3/8 (10)
3/8 (10)
1/2 (13)
1/2 (13)
3/4 (19)
3/4 (19)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
4 (100)
4 (100)
DESCRIPTION
A
B
C
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 2.12 CF
No flanges
Rotatable 2.75 CF
No flanges
Rotatable 3.38 CF
No flanges
Rotatable 4.50 CF
No flanges
Rotatable 4.62 CF
No flanges
Rotatable 6.00 CF
1.50 (38.1)
1.60 (40.6)
1.50 (38.1)
160 (40.6)
2.00 (50.8)
2.50 (63.5)
1.88 (47.8)
2.05 (52.1)
2.25 (57.2)
2.46 (62.5)
3.25 (82.6)
3.48 (88.4)
3.00 (76.2)
3.38 (85.9)
3.25 (82.6)
3.53 (89.7)
4.22 (107)
4.66 (118)
3.75 (95)
3.85 (98)
3.75 (95)
3.85 (98)
4.25 (108)
4.75 (121)
4.00 (102)
4.17 (106)
4.98 (126)
5.19 (132)
6.62 (168)
6.85 (174)
7.18 (182)
7.56 (192)
7.62 (194)
7.90 (201)
9.55 (243)
9.99 (254)
5.77 (147)
5.82 (148)
5.77 (147)
5.82 (148)
6.26 (159)
6.76 (172)
6.02 (153)
6.19 (157)
7.56 (192)
7.77 (197)
11.23 (285)
11.45 (291)
10.10 (257)
10.48 (266)
11.00 (279)
11.28 (287)
14.99 (381)
15.43 (392)
ESVP O-Ring Kits
CSVP O-Ring
& Gasket Kits
MODEL
NUMBER
NOMINAL
PORT OD
MODEL
NUMBER
ESVP-075-95
ESVP-150-95
ESVP-200-95
ESVP-250-95
ESVP-300-95
ESVP-400-95
3/8-1 (10-25)
CSVP-075-95
CSVP-150-95
CSVP-200-95
CSVP-250-95
CSVP-300-95
CSVP-400-95
11/2 (38)
2 (50)
21/2 (63)
3 (76)
4 (100)
D
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
3.25 (83)
3.25 (83)
4.05 (103)
4.05 (103)
4.61 (117)
4.61 (117)
5.62 (143)
5.62 (143)
6.73 (171)
6.73 (171)
SPECIFICATIONS
Port ODs: 3 / 8 to 4 inches (10-100)
Materials
Poppet seal: Viton
Actuation: Normally closed
3 / 8 to 2 inch (10-50) ODs: Air-to-open,
spring-to-close
21/ 2 to 4 inch (63-100) ODs: Air-to-open,
air-to-close
See page 101 for more actuation options
Operating pressure: 60 to 80 psig (4-5.5 bar)
Sustained: <150°C
Vacuum range
Viton bonnet seal: >1x 10-9mbar - High Vacuum
Options: Fittings, O-rings, air solenoids,
micro-switches and actuators. See page 101
D
C
B
A
A
NOMINAL
PORT OD
3/8-1 (10-25)
11/2 (38)
2 (50)
21/2 (63)
3 (76)
4 (100)
103
3
Isolation
Valves
Manual Angle-In-Line Valves
SECTION 3.3
Manual Viton Seal Angle-In-Line Valves
D
B
C
MODEL NUMBER NOMINAL
PORT OD
DESCRIPTION
A
B
C
D
AIV-075
AIV-0752-CF
AIV-0752-NWB
AIV-100
AIV-1002-CF
AIV-1002-NWB
AIV-150
AIV-1502-CF
AIV-1502-NWB
AIV-200
AIV-2002-CF
AIV-2002-NWB
AIV-250
AIV-2502-CF
AIV-2502-ISO
AIV-300
AIV-3002-CF
AIV-3002-ISO
No flanges
Rotatable 1.33 CF
NW-16B
No flanges
Rotatable 2.12 CF
NW-25B
No flanges
Rotatable 2.75 CF
NW-40B
No flanges
Rotatable 3.38 CF
NW-50B
No flanges
Rotatable 4.50 CF
ISO-63-250-OF
No flanges
Rotatable 4.62 CF
ISO-80-300-OF
3.70 (94)
4.70 (119)
4.00 (102)
3.90 (99)
4.23 (107)
4.20 (107)
4.82 (122)
5.24 (133)
5.12 (130)
6.70 (170)
7.15 (181)
7.00 (178)
7.75 (197)
8.50 (216)
8.25 (210)
10.05 (255)
10.61 (269)
10.55 (268)
3.47 (88)
3.47 (88)
3.47 (88)
3.42 (87)
3.42 (87)
3.42 (87)
4.55 (116)
4.55 (116)
4.55 (116)
6.19 (157)
6.19 (157)
6.19 (157)
6.99 (178)
6.99 (178)
6.99 (178)
7.71 (196)
7.71 (196)
7.71 (196)
4.01 (102)
4.01 (102)
4.01 (102)
4.14 (105)
4.14 (105)
4.14 (105)
5.61 (142)
5.61 (142)
5.61 (142)
9.15 (232)
9.15 (232)
9.15 (232)
10.31 (262)
10.31 (262)
10.31 (262)
11.38 (289)
11.38 (289)
11.38 (289)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
3.00 (76)
3.00 (76)
3.00 (76)
3.50 (89)
3.50 (89)
3.50 (89)
4.00 (100)
4.00 (100)
4.00 (100)
4.50 (114)
4.50 (114)
4.50 (114)
3/4 (19)
3/4 (19)
3/4 (19)
1 (25)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
3 (76)
A
Manual Copper Seal Bonnet Angle-In-Line Valves
SPECIFICATIONS
Materials
Poppet seal: Viton
with ACME threads
Sustained: <150°C
Vacuum range
MODEL
NUMBER
CAIV-075
CAIV-0752-CF
CAIV-100
CAIV-1002-CF
CAIV-150
CAIV-1502-CF
CAIV-200
CAIV-2002-CF
CAIV-250
CAIV-2502-CF
CAIV-300
CAIV-3002-CF
NOMINAL
PORT OD
3/4 (19)
3/4 (19)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
DESCRIPTION
A
B
C
D
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 2.12 CF
No flanges
Rotatable 2.75 CF
No flanges
Rotatable 3.38 CF
No flanges
Rotatable 4.50 CF
No flanges
Rotatable 4.62 CF
3.70 (94)
4.70 (119)
3.90 (99.1)
4.48 (114)
4.82 (122)
5.24 (133)
6.70 (170)
7.15 (182)
7.75 (197)
8.50 (216)
10.05 (255)
10.61 (269)
3.47 (88)
3.47 (88)
3.42 (87)
3.42 (87)
4.55 (116)
4.55 (116)
6.19 (157)
6.19 (157)
6.99 (178)
6.99 (178)
7.71 (196)
7.71 (196)
4.01 (102)
4.01 (102)
4.14 (105)
4.14 (105)
5.61 (142)
5.61 (142)
9.15 (232)
9.15 (232)
10.31 (262)
10.31 (262)
11.38 (289)
11.38 (289)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
3.25 (83)
3.25 (83)
4.05 (103)
4.05 (103)
4.61 (117)
4.61 (117)
5.62 (143)
5.62 (143)
AIV O-Ring Kits
MODEL NUMBER
ESV-075-95
ESV-150-95
ESV-200-95
ESV-250-95
ESV-300-95
CAIVP O-Ring
& Gasket Kits
NOMINAL
PORT OD
MODEL
NUMBER
NOMINAL
PORT OD
3/8-1 (10-25)
CSVP-075-95
CSVP-150-95
CSVP-200-95
CSVP-250-95
CSVP-300-95
3/8-1 (10-25)
11/2 (38)
2 (50)
21/2 (63)
3 (76)
104
11/2 (38)
2 (50)
21/2 (63)
3 (76)
3
Isolation Valves
Pneumatic Angle-In-Line Valves
SECTION 3.3
Pneumatic Viton Seal Angle-In-Line Valves
MODEL
NUMBER
NOMINAL
PORT OD
3/4 (19)
3/4 (19)
3/4 (19)
1 (25)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
3 (76)
DESCRIPTION
A
No flanges
Rotatable 1.33 CF
NW-16B
No flanges
Rotatable 2.12 CF
NW-25B
No flanges
Rotatable 2.75 CF
NW-40B
No flanges
Rotatable 3.38 CF
NW-50B
No flanges
Rotatable 4.50 CF
ISO-63-250-OF
No flanges
Rotatable 4.62 CF
ISO-80-300-OF
3.70 (94)
4.70 (119)
4.00 (102)
3.90 (99)
4.23 (107)
4.20 (107)
4.82 (122)
5.24 (133)
5.12 (130)
6.70 (170)
7.15 (182)
7.00 (178)
7.75 (197)
8.50 (216)
8.25 (210)
10.05 (255)
10.61 (269)
10.55 (268)
B
4.32 (110)
4.32 (110)
4.32 (110)
4.27 (108)
4.27 (108)
4.27 (108)
5.69 (145)
5.69 (145)
5.69 (145)
7.94 (202)
7.94 (202)
7.94 (202)
7.64 (194)
7.64 (194)
7.64 (194)
8.7 (221)
8.7 (221)
8.7 (221)
C
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
3.00 (76)
3.00 (76)
3.00 (76)
3.50 (89)
3.50 (89)
3.50 (89)
4.00 (100)
4.00 (100)
4.00 (100)
4.50 (114)
4.50 (114)
4.50 (114)
C
AIVP-075
AIVP-0752-CF
AIVP-0752-NWB
AIVP-100
AIVP-1002-CF
AIVP-1002-NWB
AIVP-150
AIVP-1502-CF
AIVP-1502-NWB
AIVP-200
AIVP-2002-CF
AIVP-2002-NWB
AIVP-250
AIVP-2502-CF
AIVP-2502-ISO
AIVP-300
AIVP-3002-CF
AIVP-3002-ISO
B
A
Pneumatic Copper Seal Bonnet Angle-In-Line Valves
MODEL
NUMBER
NOMINAL
PORT OD
CAIVP-075
CAIVP-0752-CF
CAIVP-100
CAIVP-1002-CF
CAIVP-150
CAIVP-1502-CF
CAIVP-200
CAIVP-2002-CF
CAIVP-250
CAIVP-2502-CF
CAIVP-300
CAIVP-3002-CF
3/4 (19)
3/4 (19)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
AIVP O-Ring Kits
MODEL NUMBER
ESVP-075-95
ESVP-150-95
ESVP-200-95
ESVP-250-95
ESVP-300-95
DESCRIPTION
A
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 2.12 CF
No flanges
Rotatable 2.75 CF
No flanges
Rotatable 3.38 CF
No flanges
Rotatable 4.50 CF
No flanges
Rotatable 4.62 CF
3.70 (94)
4.70 (119)
3.90 (99)
4.48 (114)
4.82 (122)
5.24 (133)
6.70 (170)
7.15 (182)
7.75 (197)
8.50 (216)
10.05 (255)
10.61 (269)
CAIVP O-Ring
& Gasket Kits
NOMINAL
PORT OD
MODEL
NUMBER
NOMINAL
PORT OD
3/8-1 (10-25)
CSVP-075-95
CSVP-150-95
CSVP-200-95
CSVP-250-95
CSVP-300-95
3/8-1 (10-25)
11/2 (38)
2 (50)
21/2 (63)
3 (76)
B
4.32 (110)
4.32 (110)
4.27 (108)
4.27 (108)
5.69 (145)
5.69 (145)
7.94 (202)
7.94 (202)
7.64 (194)
7.64 (194)
8.70 (221)
8.70 (221)
C
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
3.25 (82)
3.25 (82)
4.05 (103)
4.05 (103)
4.61 (117)
4.61 (117)
5.62 (143)
5.62 (143)
SPECIFICATIONS
Port ODs: 3 / 8 to 3 inches (10 to 76).
Materials
Poppet seal: Viton
3 / 8 to 2 inch (9.5-50.8) ODs: Air-to-open, spring-to-close
21/ 2 to 3 inch (63.5-76.2) ODs: Air-to-open, air-to-close
Sustained: <150°C
Vacuum range
11/2 (38)
2 (50)
21/2 (63)
3 (76)
105
3
Isolation Valves
SECTION 3.3
Manual In-Line Valves
Manual Viton Seal In-Line Valves
MODEL
NUMBER
ILV-038
ILV-0382-CF
ILV-0382-NWB
ILV-050
ILV-0502-CF
ILV-0502-NWB
ILV-075
ILV-0752-CF
ILV-0752-NWB
ILV-100
ILV-1002-CF
ILV-1002-NWB
ILV-150
ILV-1502-CF
ILV-1502-NWB
ILV-200
ILV-2002-CF
ILV-2002-NWB
ILV-2002-ASA
ILV-250
ILV-2502-CF
ILV-2502-ISO
ILV-2502-ASA
ILV-300
ILV-3002-CF
ILV-3002-ISO
ILV-3002-ASA
SPECIFICATIONS
Materials
Poppet seal: Viton
with ACME threads
Sustained: <150°C
Vacuum range
NOMINAL
PORT OD DESCRIPTION
3/8 (10)
3/8 (10)
3/8 (10)
1/2 (13)
1/2 (13)
1/2 (13)
3/4 (19)
3/4 (19)
3/4 (19)
1 (25)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
3 (76)
3 (76)
A
No flanges
Rotatable 1.33 CF
NW-10B
No flanges
Rotatable 1.33 CF
NW-10B
No flanges
Rotatable 1.33 CF
NW-16B
No flanges
Rotatable 2.12 CF
NW-25B
No flanges
Rotatable 2.75 CF
NW-40B
No flanges
Rotatable 3.38 CF
NW-50B
No flanges
Rotatable 4.50 CF
ISO-63-250-OF
No flanges
Rotatable 4.62 CF
ISO-80-300-OF
1.50 (38.1)
1.60 (40.6)
1.65 (41.91
1.50 (38.1)
1.60 (40.6)
1.65 (41.9)
2.00 (50.8)
2.50 (63.5)
2.15 (54.6)
1.88 (47.8)
2.05 (52.1)
2.03 (51.6)
2.25 (57.2)
2.46 (56.5)
2.40 (61.0)
3.25 (82.6)
3.48 (88.4)
3.40 (86.4)
3.50 (88.9)
3.00 (76.2)
3.38 (85.9)
3.25 (82.6)
3.25 (82.6)
3.25 (82.6)
3.53 (89.7)
3.50 (88.9)
3.50 (88.9)
B
0.94 (24)
0.94 (24)
0.94 (24)
1.00 (25)
1.00 (25)
1.00 (25)
1.12 (28)
1.12 (28)
1.12 (28)
1.37 (35)
1.37 (35)
1.37 (35)
1.88 (48)
1.88 (48)
1.88 (48)
2.62 (67)
2.62 (67)
2.62 (67)
2.62 (67)
3.12 (79)
3.12 (79)
3.12 (79)
3.12 (79)
3.68 (93)
3.68 (93)
3.68 (93)
3.68 (93)
C
D
E
F
1.50 (38)
1.50 (38)
1.50 (38)
1.62 (41)
1.62 (41)
1.62 (41)
1.87 (47)
1.87 (47)
1.87 (47)
2.25 (57)
2.25 (57)
2.25 (57)
3.12 (79)
3.12 (79)
3.12 (79)
4.12 (105)
4.12 (105)
4.12 (105)
4.12 (105)
4.93 (125)
4.93 (125)
4.93 (125)
4.93 (125)
5.62 (143)
5.62 (143)
5.62 (143)
5.62 (143)
4.06 (103)
4.06 (103)
4.06 (103)
4.19 (106)
4.19 (106)
4.19 (106)
4.44 (113)
4.44 (113)
4.44 (113)
4.69 (119)
4.69 (119)
4.69 (119)
6.52 (166)
6.52 (166)
6.52 (166)
8.73 (222)
8.73 (222)
8.73 (222)
8.73 (222)
10.2 (259)
10.2 (259)
10.2 (259)
10.2 (259)
11.04 (280)
11.04 (280)
11.04 (280)
11.04 (280)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
3.00 (76)
3.00 (76)
3.00 (76)
3.50 (89)
3.50 (89)
3.50 (89)
3.50 (89)
4.00 (102)
4.00 (102)
4.00 (102)
4.00 (102)
4.50 (114)
4.50 (114)
4.50 (114)
4.50 (114)
4.44 (113)
4.44 (113)
4.44 (113)
4.69 (119)
4.69 (119)
4.69 (119)
5.19 (132)
5.19 (132)
5.19 (132)
5.69 (145)
5.69 (145)
5.69 (145)
8.02 (204)
8.02 (204)
8.02 (204)
10.73 (273)
10.73 (273)
10.73 (273)
10.73 (273)
12.7 (323)
12.7 (323)
12.7 (323)
12.7 (323)
14.04 (357)
14.04 (357)
14.04 (357)
14.04 (357)
Manual Copper Seal Bonnet In-Line Valves
MODEL
NUMBER
E
F
D
B
C
A
A
CILV-038
CILV-0382-CF
CILV-050
CILV-0502-CF
CILV-075
CILV-0752-CF
CILV-100
CILV-1002-CF
CILV-150
CILV-1502-CF
CILV-200
CILV-2002-CF
CILV-250
CILV-2502-CF
CILV-300
CILV-3002-CF
NOMINAL
PORT OD DESCRIPTION
3/8 (10)
3/8 (10)
1/2 (13)
1/2 (13)
3/4 (19)
3/4 (19)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 2.12 CF
No flanges
Rotatable 2.75 CF
No flanges
Rotatable 3.38 CF
No flanges
Rotatable 4.50 CF
No flanges
Rotatable 4.62 CF
A
1.50 (38.1)
1.60 (40.6)
1.50 (38.1)
1.60 (40.6)
2.00 (50.8)
2.50 (63.5)
1.88 (47.8)
2.05 (52.1)
2.25 (57.2)
2.46 (62.5)
3.25 (82.6)
3.48 (88.4)
3.00 (76.2)
3.38 (85.9)
3.25 (82.6)
3.53 (89.7)
B
0.94 (24)
0.94 (24)
1.00 (25)
1.00 (25)
1.12 (28)
1.12 (28)
1.37 (35)
1.37 (35)
1.88 (48)
1.88 (48)
2.62 (67)
2.62 (67)
3.12 (79)
3.12 (79)
3.62 (92)
3.62 (92)
C
D
E
F
1.50 (38)
1.50 (38)
1.62 (41)
1.62 (41)
1.87 (47)
1.87 (47)
2.25 (57)
2.25 (57)
3.12 (79)
3.12 (79)
4.12 (105)
4.12 (105)
4.93 (125)
4.93 (125)
5.55 (141)
5.55 (141)
4.06 (103)
4.06 (103)
4.19 (106)
4.19 (106)
4.44 (113)
4.44 (113)
4.69 (119)
4.69 (119)
6.52 (166)
6.52 (166)
8.73 (222)
8.73 (222)
10.2 (259)
10.2 (259)
11.04 (280)
11.04 (280)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
3.25 (83)
3.25 (83)
4.05 (103)
4.05 (103)
4.61 (117)
4.61 (117)
5.62 (143)
5.62 (143)
4.44 (113)
4.44 (113)
4.69 (119)
4.69 (119)
5.19 (132)
5.19 (132)
5.69 (145)
5.69 (145)
8.02 (204)
8.02 (204)
10.73 (273)
10.73 (273)
12.7 (323)
12.7 (323)
14.04 (357)
14.04 (357)
CILV O-Ring
and Gasket Kits
ILV O-Ring Kits
MODEL NUMBER
ESV-075-95
ESV-150-95
ESV-200-95
ESV-250-95
ESV-300-95
NOMINAL
PORT OD
3/8-1 (10-25)
11/2 (38)
2 (50)
21/2 (63)
3 (76)
MODEL NUMBER
CSV-075-95
CSV-150-95
CSV-200-95
CSV-250-95
CSV-300-95
106
NOMINAL
PORT OD
3/8-1 (10-25)
11/2 (38)
2 (50)
21/2 (63)
3 (76)
3
Isolation Valves
SECTION 3.3
Pneumatic In-Line Valves
Pneumatic Viton Seal In-Line Valves
MODEL
NUMBER
NOMINAL
PORT OD DESCRIPTION
ILVP-038
ILVP-0382-CF
ILVP-0382-NWB
ILVP-050
ILVP-0502-CF
ILVP-0502-NWB
ILVP-075
ILVP-0752-CF
ILVP-0752-NWB
ILVP-100
ILVP-1002-CF
ILVP-1002-NWB
ILVP-150
ILVP-1502-CF
ILVP-1502-NWB
ILVP-200
ILVP-2002-CF
ILVP-2002-NWB
ILVP-2002-ASA
ILVP-250
ILVP-2502-CF
ILVP-2502-ISO
ILVP-2502-ASA
ILVP-300
ILVP-3002-CF
ILVP-3002-ISO
ILVP-3002-ASA
ILVP-400
ILVP-4002-CF
ILVP-4002-ISO
ILVP-4002-ASA
3/8 (10)
A
No flanges
Rotatable 1.33 CF
NW-10B
No flanges
Rotatable 1.33 CF
NW-10B
No flanges
Rotatable 1.33 CF
NW-16B
No flanges
Rotatable 2.12 CF
NW-25B
No flanges
Rotatable 2.75 CF
NW-40B
No flanges
Rotatable 3.38 CF
NW-50B
No flanges
Rotatable 4.50 CF
ISO-63-250-OF
NNo flanges
Rotatable 4.62 CF
ISO-80-300-OF
No flanges
Rotatable 6.00 CF
ISO-100-400-OF
3/8 (10)
3/8 (10)
1/2 (12)
1/2 (12)
1/2 (12)
3/4 (19)
3/4 (19)
3/4 (19)
1 (25)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
3 (76)
3 (76)
4 (100)
4 (100)
4 (100)
4 (10)
1.50 (38.1)
1.60 (40.6)
1.65 (41.9)
1.50 (38.1)
1.60 (40.6)
1.65 (41.9)
2.00 (50.8)
2.50 (63.5)
2.15 (54.6)
1.88 (47.8)
2.05 (52.1)
2.03 (51.6)
2.25 (57.2)
2.46 (62.5)
2.40 (61.0)
3.25 (82.6)
3.48 (88.4)
3.40 (86.4)
3.50 (88.9)
3.00 (76.2)
3.38 (85.9)
3.25 (82.6)
3.50 (88.9)
3.25 (82.6)
3.53 (89.7)
3.50 (88.9)
3.50 (88.9)
4.22 (107)
4.66 (118)
4.47 (114)
4.47 (114)
B
C
0.94 (24)
0.94 (24)
0.94 (24)
1.00 (25)
1.00 (25)
1.00 (25)
1.12 (28)
1.12 (28)
1.12 (28)
1.37 (35)
1.37 (35)
1.37 (35)
1.88 (48)
1.88 (48)
1.88 (48)
2.62 (67)
2.62 (67)
2.62 (67)
2.62 (67)
3.12 (79)
3.12 (79)
3.12 (79)
3.12 (79)
3.68 (93)
3.68 (93)
3.68 (93)
3.68 (93)
4.88 (124)
4.88 (124)
4.88 (124)
4.88 (124)
1.50 (38)
1.50 (38)
1.50 (38)
1.62 (41)
1.62 (41)
1.62 (41)
1.87 (47)
1.87 (47)
1.87 (47)
2.25 (57)
2.25 (57)
2.25 (57)
3.12 (79)
3.12 (79)
3.12 (79)
4.12 (105)
4.12 (105)
4.12 (105)
4.12 (105)
4.93 (125)
4.93 (125)
4.93 (125)
4.93 (125)
5.62 (143)
5.62 (143)
5.62 (143)
5.62 (143)
7.38 (187)
7.38 (187)
7.38 (187)
7.38 (187)
D
3.62 (92)
3.62 (92)
3.62 (92)
3.75 (95)
3.75 (95)
3.75 (95)
4.00 (102)
4.00 (102)
4.00 (102)
4.25 (108)
4.25 (108)
4.25 (108)
5.86 (149)
5.86 (149)
5.86 (149)
7.62 (194)
7.62 (194)
7.62 (194)
7.62 (194)
9.11 (231)
9.11 (231)
9.11 (231)
9.11 (231)
9.98 (253)
9.98 (253)
9.98 (253)
9.98 (253)
12.83 (326)
12.83 (326)
12.83 (326)
12.83 (326)
E
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
3.00 (76)
3.00 (76)
3.00 (76)
3.50 (89)
3.50 (89)
3.50 (89)
3.50 (89)
4.00 (102)
4.00 (102)
4.00 (102)
4.00 (102)
4.50 (114)
4.50 (114)
4.50 (114)
4.50 (114)
6.50 (165)
6.50 (165)
6.50 (165)
6.50 (165)
F
5.76 (146)
5.76 (146)
5.76 (146)
5.89 (150)
5.89 (150)
5.89 (150)
6.14 (156)
6.14 (156)
6.14 (156)
6.39 (162)
6.39 (162)
6.39 (162)
8.45 (215)
8.45 (215)
8.45 (215)
12.11 (308)
12.11 (308)
12.11 (308)
12.11 (308)
12.03 (306)
12.03 (306)
12.03 (306)
12.03 (306)
13.38 (340)
13.38 (340)
13.38 (340)
13.38 (340)
18.27 (464)
18.27 (464)
18.27 (464)
18.27 (464)
SPECIFICATIONS
Materials
Poppet seal: Viton
21/ 2 to 4 inch (63.5-102) ODs: Air-to-open, air-to-close
Sustained: <150°C
Vacuum range
Pneumatic Copper Seal Bonnet In-Line Valves
MODEL
NUMBER
NOMINAL
PORT OD DESCRIPTION
CILVP-038
CILVP-0382-CF
CILVP-050
CILVP-0502-CF
CILVP-075
CILVP-0752-CF
CILVP-100
CILVP-1002-CF
CILVP-150
CILVP-1502-CF
CILVP-200
CILVP-2002-CF
CILVP-250
CILVP-2502-CF
CILVP-300
CILVP-3002-CF
CILVP-400
CILVP-4002-CF
3/8 (10)
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 2.12 CF
No flanges
Rotatable 2.75 CF
No flanges
Rotatable 3.38 CF
No flanges
Rotatable 4.50 CF
No flanges
Rotatable 4.62 CF
No flanges
Rotatable 6.00 CF
3/8 (10)
1/2 (12)
1/2 (12)
3/4 (19)
3/4 (19)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
4 (100)
4 (100)
ILVP O-Ring Kits
MODEL
NUMBER
NOMINAL
PORT OD
ESVP-075-95
ESVP-150-95
ESVP-200-95
ESVP-250-95
ESVP-300-95
ESVP-400-95
3/8-1 (10-25)
11/2 (38)
2 (50)
21/2 (63)
3 (76)
4 (100)
A
1.50 (38.1)
1.60 (40.6)
1.50 (38.1)
1.60 (40.6)
2.00 (50.8)
2.50 (63.5)
1.88 (47.8)
2.05 (52.1)
2.25 (57.2)
2.46 (62.5)
3.25 (82.6)
3.48 (88.4)
3.00 (76.2)
3.38 (85.9)
3.25 (82.6)
3.53 (89.7)
4.22 (107)
4.66 (118)
B
C
0.94 (24)
0.94 (24)
1.00 (25)
1.00 (25)
1.12 (28)
1.12 (28)
1.37 (35)
1.37 (35)
1.88 (48)
1.88 (48)
2.62 (67)
2.62 (67)
3.12 (79)
3.12 (79)
3.62 (92)
3.62 (92)
4.88 (124)
4.88 (124)
1.50 (38)
1.50 (38)
1.62 (41)
1.62 (41)
1.87 (47)
1.87 (47)
2.25 (57)
2.25 (57)
3.12 (79)
3.12 (79)
4.12 (105)
4.12 (105)
4.93 (125)
4.93 (125)
5.55 (141)
5.55 (141)
7.38 (187)
7.38 (187)
D
3.74 (95)
3.74 (95)
3.88 (99)
3.88 (99)
4.12 (105)
4.12 (105)
4.38 (111)
4.38 (111)
5.86 (149)
5.86 (149)
7.50 (191)
7.50 (191)
9.11 (231)
9.11 (231)
9.98 (253)
9.98 (253)
12.83 (326)
12.83 (326)
E
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
3.25 (83)
3.25 (83)
4.05 (103)
4.05 (103)
4.61 (117)
4.61 (117)
5.62 (143)
5.62 (143)
6.73 (171)
6.73 (171)
F
5.76 (146)
5.76 (146)
5.89 (150)
5.89 (150)
6.14 (156)
6.14 (156)
6.39 (162)
6.39 (162)
8.44 (214)
8.44 (214)
12.11 (308)
12.11 (308)
12.03 (306)
12.03 (306)
13.38 (340)
13.38 (340)
18.27 (464)
18.27 (464)
E
F
D
B
C
A
A
CILVP O-Ring
& Gasket Kits
MODEL NUMBER
CSVP-075-95
CSVP-150-95
CSVP-200-95
CSVP-250-95
CSVP-300-95
CSVP-400-95
NOMINAL
PORT OD
3/8-1 (10-25)
11/2 (38)
2 (50)
21/2 (63)
3 (76)
4 (100)
107
3
Isolation Valves
SECTION 3.3
Manual Tee Valves
Manual Viton Seal Tee Valves
MODEL
NUMBER
SPECIFICATIONS
Port ODs:
3 / 8 to 3 inches (10 to 76)
Materials
Poppet seal: Viton
with ACME threads
Sustained: <150°C
Vacuum range
Viton bonnet seal: >1x 10 -9 mbar - High
Vacuum
ESV-038T
ESV-0383T-CF
ESV-0383T-NWB
ESV-050T
ESV-0503T-CF
ESV-0503T-NWB
ESV-075T
ESV-0753T-CF
ESV-0753T-NWB
ESV-100T
ESV-1003T-CF
ESV-1003T-NWB
ESV-150T
ESV-1503T-CF
ESV-1503T-NWB
ESV-200T
ESV-2003T-CF
ESV-2003T-NWB
ESV-2003T-ASA
ESV-250T
ESV-2503T-CF
ESV-2503T-ISO
ESV-2503T-ASA
ESV-300T
ESV-3003T-CF
ESV-3003T-ISO
ESV-3003T-ASA
3/8 (10)
3/8 (10)
3/8 (10)
1/2 (12)
1/2 (12)
1/2 (12)
3/4 (19)
3/4 (19)
3/4 (19)
1 (25)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
3 (76)
3 (76)
DESCRIPTION
No flanges
Rotatable 1.33 CF
NW-10B
No flanges
Rotatable 1.33 CF
NW-10B
No flanges
Rotatable 1.33 CF
NW-16B
No flanges
Rotatable 2.12 CF
NW-25B
No flanges
Rotatable 2.75 CF
NW-40B
No flanges
Rotatable 3.38 CF
NW-50B
No flanges
Rotatable 4.50 CF
ISO-63-250-OF
No flanges
Rotatable 4.62 CF
ISO-80-300-OF
A
B
C
D
1.50 (38.1)
1.60 (40.6)
1.65 (41.9)
1.50 (38.1)
1.60 (40.6)
1.65 (41.9)
2.00 (50.8)
2.50 (63.5)
2.15 (54.6)
1.88 (47.8)
2.05 (52.1)
2.03 (51.6)
2.25 (57.2)
2.46 (62.5)
2.40 (61.0)
3.25 (82.6)
3.48 (88.4)
3.40 (86.4)
3.25 (82.6)
3.00 (76.2)
3.38 (85.9)
3.25 (82.6)
3.25 (82.6)
3.25 (82.6)
3.53 (89.7)
3.50 (88.9)
3.50 (88.9)
4.06 (103)
4.16 (106)
4.21 (107)
4.06 (103)
4.16 (106)
4.21 (107)
4.56 (116)
5.06 (129)
4.71 (120)
4.32 (110)
4.49 (114)
4.47 (114)
5.63 (143)
5.84 (148)
5.78 (147)
7.85 (199)
8.08 (205)
8.00 (203)
8.10 (206)
8.27 (210)
8.65 (220)
8.52 (216)
8.52 (216)
8.68 (220)
8.96 (228)
8.93 (227)
8.93 (227)
4.44 (113)
4.54 (115)
4.59 (117)
4.56 (116)
4.54 (115)
4.71 (120)
5.31 (135)
5.81 (148)
5.46 (139)
5.32 (135)
5.49 (140)
5.47 (139)
7.13 (181)
7.34 (186)
7.28 (185)
9.85 (250)
10.08 (256)
10.00 (254)
10.10 (257)
10.77 (274)
11.15 (283)
11.02 (280)
11.02 (280)
11.68 (297)
11.96 (304)
11.93 (303)
11.93 (303)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
3.00 (76)
3.00 (76)
3.00 (76)
3.50 (89)
3.50 (89)
3.50 (89)
3.50 (89)
4.00 (100)
4.00 (100)
4.00 (100)
4.00 (100)
4.50 (114)
4.50 (114)
4.50 (114)
4.50 (114)
Manual Copper Seal Bonnet Tee Valves
D
MODEL
NUMBER
C
B
A
A
NOMINAL
PORT OD
A
CSV-038T
CSV-0383T-CF
CSV-050T
CSV-0503T-CF
CSV-075T
CSV-0753T-CF
CSV-100T
CSV-1003T-CF
CSV-150T
CSV-1503T-CF
CSV-200T
CSV-2003T-CF
CSV-250T
CSV-2503T-CF
CSV-300T
CSV-3003T-CF
NOMINAL
PORT OD
3/8 (10)
3/8 (10)
1/2 (12)
1/2 (12)
3/4 (19)
3/4 (19)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
DESCRIPTION
A
B
C
D
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 2.12 CF
No flanges
Rotatable 2.75 CF
No flanges
Rotatable 3.38 CF
No flanges
Rotatable 3.38 CF
No flanges
Rotatable 4.62 CF
1.50 (38.1)
1.60 (40.6)
1.50 (38.1)
1.60 (40.6)
2.00 (50.8)
2.50 (63.5)
1.88 (47.8)
2.05 (52.1)
2.25 (57.2)
2.46 (62.5)
3.25 (82.6)
3.48 (88.4)
3.00 (76.2)
3.38 (85.9)
3.25 (82.6)
3.53 (89.7)
4.06 (103.
4.16 (106)
4.06 (103)
4.16 (106)
4.56 (116)
5.06 (129)
4.32 (110)
4.49 (114)
5.63 (143)
5.84 (148)
7.85 (199)
8.08 (205)
8.27 (210)
8.65 (220)
8.68 (220)
8.96 (228)
4.44 (113)
4.54 (115)
4.56 (116)
4.66 (118)
5.31 (135)
5.81 (148)
5.32 (135)
5.49 (139)
7.13 (181)
7.34 (186)
9.85 (250)
10.08 (256)
10.77 (274)
11.15 (283)
11.68 (297)
11.96 (304)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
3.25 (83)
3.25 (83)
4.05 (103)
4.05 (103)
4.61 (117)
4.61 (117)
5.62 (143)
5.62 (143)
ESV-T O-Ring Kits
CSV-T O-Ring
& Gasket Kits
MODEL
NUMBER
NOMINAL
PORT OD
MODEL
NUMBER
NOMINAL
PORT OD
ESV-075-95
ESV-150-95
ESV-200-95
ESV-250-95
ESV-300-95
3/8-1 (10-25)
CSV-075-95
CSV-150-95
CSV-200-95
CSV-250-95
CSV-300-95
3/8-1 (10-25)
11/2 (38)
2 (50)
21/2 (63)
3 (76)
108
11/2 (38)
2 (50)
21/2 (63)
3 (76)
3
Isolation Valves
SECTION 3.3
Pneumatic Tee Valves
Pneumatic Viton Seal Tee Valves
MODEL
NUMBER
NOMINAL
PORT OD
ESVP-038T
ESVP-0383T-CF
ESVP-0383T-NWB
ESVP-050T
ESVP-0503T-CF
ESVP-0503T-NWB
ESVP-075T
ESVP-0753T-CF
ESVP-0753T-NWB
ESVP-100T
ESVP-1003T-CF
ESVP-1003T-NWB
ESVP-150T
ESVP-1503T-CF
ESVP-1503T-NWB
ESVP-200T
ESVP-2003T-CF
ESVP-2003T-NWB
ESVP-2003T-ASA
ESVP-250T
ESVP-2503T-CF
ESVP-2503T-ISO
ESVP-2503T-ASA
ESVP-300T
ESVP-3003T-CF
ESVP-3003T-ISO
ESVP-3003T-ASA
ESVP-400T
ESVP-4003T-CF
ESVP-4003T-ISO
ESVP-4003T-ASA
3/8 (10)
3/8 (10)
3/8 (10)
1/2 (12)
1/2 (12)
1/2 (12)
3/4 (19)
3/4 (19)
3/4 (19)
1 (25)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
3 (76)
3 (76)
4 (100)
4 (100)
4 (100)
4 (100)
DESCRIPTION
No flanges
Rotatable 1.33 CF
NW-10B
No flanges
Rotatable 1.33 CF
NW-10B
No flanges
Rotatable 1.33 CF
NW-16B
No flanges
Rotatable 2.12 CF
NW-25B
No flanges
Rotatable 2.75 CF
NW-40B
No flanges
Rotatable 3.38 CF
NW-50B
No flanges
Rotatable 4.50 CF
ISO-63-250-OF
No flanges
Rotatable 4.62 CF
ISO-80-300-OF
No flanges
Rotatable 6.00 CF
ISO-100-400-OF
A
B
1.50 (38.1)
1.60 (40.6)
1.65 (41.9)
1.50 (38.1)
1.60 (40.6)
1.65 (41.9)
2.00 (50.8)
2.50 (63.5)
2.15 (54.6)
1.88 (47.8)
2.05 (52.1)
2.03 (51.6)
2.25 (57.2)
2.45 (62.2)
2.40 (61.0)
3.25 (82.6)
3.48 (88.4)
3.40 (86.4)
3.50 (88.9)
3.00 (76.2)
3.38 (85.9)
3.25 (82.6)
3.25 (82.6)
3.25 (82.6)
3.53 (89.7)
3.50 (88.9)
3.50 (88.9)
4.22 (107)
4.66 (118)
4.47 (114)
4.47 (114)
3.62 (92)
3.67 (93)
3.77 (96)
3.62 (92)
3.67 (93)
3.77 (96)
4.12 (105)
4.62 (117)
4.27 (108)
3.88 (99.0)
4.05 (102)
4.03 (102)
4.98 (126)
5.19 (132)
5.13 (130)
6.74 (171)
6.97 (177)
6.89 (175)
6.99 (178)
7.18 (182)
7.56 (192)
7.43 (189)
7.43 (189)
7.62 (194)
7.90 (201)
7.87 (200)
7.87 (200)
9.55 (243)
9.99 (254)
9.80 (249)
9.80 (249)
C
5.77 (147)
5.87 (149)
5.92 (150)
5.77 (147)
5.87 (149)
5.92 (150)
6.26 (159)
6.76 (172)
6.41 (163)
6.02 (153)
6.19 (157)
6.17 (157)
7.56 (192)
7.77 (197)
7.71 (196)
11.23 (285)
11.46 (291)
11.38 (289)
11.48 (292)
10.10 (257)
10.48 (266)
10.35 (263)
10.35 (263)
11.00 (279)
11.28 (287)
11.25 (286)
11.25 (286)
14.99 (381)
14.43 (392)
15.24 (387)
15.24 (387)
D
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
2.25 (57)
3.00 (76)
3.00 (76)
3.00 (76)
3.50 (89)
3.50 (89)
3.50 (89)
3.50 (89)
4.00 (100)
4.00 (100)
4.00 (100)
4.00 (100)
4.50 (114)
4.50 (114)
4.50 (114)
4.50 (114)
6.50 (165)
6.50 (165)
6.50 (165)
6.50 (165)
SPECIFICATIONS
Materials
Poppet seal: Viton
21/ 2 to 4 inch (63.5-102) ODs: Air-to-open, air-to-close
Operating pressure:60 to 80 psig (4-5.5 bar)
Sustained: <150°C
Vacuum range
Pneumatic Copper Seal Bonnet Tee Valves
MODEL
NUMBER
NOMINAL
PORT OD
CSVP-038T
CSVP-0383T-CF
CSVP-050T
CSVP-0503T-CF
CSVP-075T
CSVP-0753T-CF
CSVP-100T
CSVP-1003T-CF
CSVP-150T
CSVP-1503T-CF
CSVP-200T
CSVP-2003T-CF
CSVP-250T
CSVP-2503T-CF
CSVP-300T
CSVP-3003T-CF
CSVP-400T
CSVP-4003T-CF
3/8 (10)
3/8 (10)
1/2 (12)
1/2 (12)
3/4 (19)
3/4 (19)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
4 (100)
4 (100)
ESVP-T O-Ring Kits
MODEL NUMBER
ESVP-075-95
ESVP-150-95
ESVP-200-95
ESVP-250-95
ESVP-300-95
ESVP-400-95
NOMINAL
PORT OD
3/8-1 (10-25)
11/2 (38)
2 (50)
21/2 (63)
3 (76)
4 (100)
DESCRIPTION
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 2.12 CF
No flanges
Rotatable 2.75 CF
No flanges
Rotatable 3.38 CF
No flanges
Rotatable 4.50 CF
No flanges
Rotatable 4.62 CF
No flanges
Rotatable 6.00 CF
A
1.50 (38.1)
1.60 (40.6)
1.50 (38.1)
1.60 (40.6)
2.00 (50.8)
2.50 (63.5)
1.88 (47.8)
2.05 (52.1)
2.25 (57.2)
2.46 (62.5)
3.25 (82.6)
3.48 (88.4)
3.00 (76.2)
3.38 (85.9)
3.25 (82.6)
3.53 (89.7)
4.22 (107.2)
4.66 (118.4)
B
3.75 (95)
3.85 (98)
3.75 (95)
3.85 (98)
4.25 (108)
4.75 (121)
4.00 (102)
4.17 (106)
4.98 (126)
5.19 (132)
6.62 (168)
6.85 (174)
7.18 (182)
7.56 (192)
7.62 (194)
7.90 (201)
9.55 (243)
9.99 (254)
C
5.77 (147)
5.82 (148)
5.77 (147)
5.82 (148)
6.26 (159)
6.76 (172)
6.02 (153)
6.19 (157)
7.56 (192)
7.77 (197)
11.23 (285)
10.58 (269)
10.10 (257)
10.48 (266)
11.00 (279)
11.28 (287)
14.99 (381)
15.43 (392)
D
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
2.73 (69)
3.25 (83)
3.25 (83)
4.05 (103)
4.05 (103)
4.61 (117)
4.61 (117)
5.62 (143)
5.62 (143)
6.73 (171)
6.73 (171)
D
C
B
A
A
A
CSVP-T O-Ring
& Gasket Kits
MODEL NUMBER
CSVP-075-95
CSVP-150-95
CSVP-200-95
CSVP-250-95
CSVP-300-95
CSVP-400-95
NOMINAL
PORT OD
3/8-1 (10-25)
11/2 (38)
2 (50)
21/2 (63)
3 (76)
4 (100)
109
3
Isolation Valves
SECTION 3.3
Straight-Through Valves
Manual Viton Seal Straight-Through Valves
MODEL
NUMBER
D
C B
STV-075
STV-0752-CF
STV-0752-NWB
STV-112
STV-1122-CF
STV-1122-NWB
STV-150
STV-1502-CF
STV-1502-NWB
PORT
ID
NOMINAL
PORT OD
0.65 (16.5)
0.65 (16.5)
0.65 (16.5)
1.00 (25.4)
1.00 (25.4)
1.00 (25.4)
1.38 (35.1)
1.38 (35.1)
1.38 (35.1)
3/4 (19)
DESCRIPTION
No flanges
Rotatable 1.33 CF
NW-16B
No flanges
Rotatable 2.12 CF
NW-40B
No flanges
Rotatable 2.75 CF
NW-40B
3/4 (19)
3/4 (19)
11/8 (29)
11/8 (29)
11/8 (29)
11/2 (38)
11/2 (38)
11/2 (38)
A
B
5.00 (127)
6.00 (152)
5.30 (135)
5.50 (140)
5.83 (148)
5.80 (147)
7.00 (178)
7.42 (188)
7.30 (185)
C
3.30 (84)
3.30 (84)
3.30 (84)
3.86 (98)
3.86 (98)
3.86 (98)
5.47 (139)
5.47 (139)
5.47 (139)
D
4.50 (114)
4.50 (114)
4.50 (114)
5.15 (131)
5.15 (131)
5.15 (131)
7.69 (195)
7.69 (195)
7.69 (195)
2.25 (57)
2.25 (57)
2.25 (57)
3.00 (76)
3.00 (76)
3.00 (76)
3.50 (89)
3.50 (89)
3.50 (89)
Manual Copper Seal Bonnet Straight-Through Valves
MODEL
NUMBER
A
CSTV-075
CSTV-0752-CF
CSTV-150
CSTV-1502-CF
SPECIFICATIONS
Port ODs: 3 / 4 to 11/ 2 inches (19 to 38)
PORT
ID
NOMINAL
PORT OD
0.65 (16.5)
0.65 (16.5)
1.38 (35.1)
1.38 (35.1)
3/4 (19)
3/4 (19)
11/2 (38)
11/2 (38)
DESCRIPTION
A
B
C
D
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 2.75 CF
5.00 (127)
6.00 (152)
7.00 (178)
7.42 (188)
3.51 (89)
3.51 (89)
5.47 (139)
5.47 (139)
4.71 (120)
4.71 (120)
7.69 (195)
7.69 (195)
2.73 (69)
2.73 (69)
4.05 (103)
4.05 (103)
Materials
Poppet seal: Viton
STV O-Ring Kits
MODEL
NUMBER
ESV-075-95
STV-112-95
STV-150-95
Manual actuation: Self-lubricating
bronze nuts with ACME threads
Pneumatic actuation: Normally closed
3 / 4 inch (19.05) ODs: Air-to-open,
spring-to-close
11/ 8 to 11/ 2 inch (29-38) ODs: Air-to-open,
air-to-close
MODEL
NUMBER
Vacuum range
3/4 (19)
11/8 (29)
11/2 (38)
CSTV O-Ring
& Gasket Kits
Sustained: <150°C
NOMINAL
PORT OD
NOMINAL
PORT OD
CSV-075-95
CSV-150-95
3/4 (19)
11/2 (38)
Pneumatic Viton Seal Straight-Through Valves
MODEL
NUMBER
C
STVP-075
STVP-0752-CF
STVP-0752-NWB
STVP-112
STVP-1122-CF
STVP-1122-NWB
STVP-150
STVP-1502-CF
STVP-1502-NWB
PORT
ID
0.65 (16.5)
0.65 (16.5)
0.65 (16.5)
1.00 (25.4)
1.00 (25.4)
1.00 (25.4)
1.38 (35.1)
1.38 (35.1)
1.38 (35.1)
NOMINAL
PORT OD
3/4 (19)
3/4 (19)
3/4 (19)
11/8 (29)
11/8 (29)
11/8 (29)
11/2 (38)
11/2 (38)
11/2 (38)
DESCRIPTION
A
B
C
No flanges
Rotatable 1.33 CF
NW-16B
No flanges
Rotatable 2.12 CF
NW-40B
No flanges
Rotatable 2.75 CF
NW-40B
5.00 (127)
6.00 (152)
5.30 (135)
5.50 (140)
5.83 (148)
5.80 (147)
7.00 (178)
7.42 (188)
7.30 (185)
3.92 (100)
3.92 (100)
3.92 (100)
5.10 (130)
5.10 (130)
5.10 (130)
6.11 (155)
6.11 (155)
6.11 (155)
2.25 (57)
2.25 (57)
2.25 (57)
3.00 (76)
3.00 (76)
3.00 (76)
3.50 (89)
3.50 (89)
3.50 (89)
Pneumatic Copper Seal Bonnet Straight-Through Valves
B
MODEL
NUMBER
CSTVP-075
CSTVP-0752-CF
CSTVP-150
CSTVP-1502-CF
PORT
ID
0.65 (16.5)
0.65 (16.5)
1.38 (35.0)
1.38 (35.0)
NOMINAL
PORT OD
3/4 (19)
3/4 (19)
11/2 (38)
11/2 (38)
DESCRIPTION
A
B
C
No flanges
Rotatable 1.33 CF
No flanges
Rotatable 2.75 CF
5.00 (127)
6.00 (152)
7.00 (178)
7.42 (188)
3.92 (100)
3.92 (100)
6.11 (155)
6.11 (155)
2.73 (69)
2.73 (69)
4.05 (103)
4.05 (103)
A
STVP O-Ring Kits
MODEL
NUMBER
All dimensions are in inches (mm) & weights are
in pounds (kg), unless otherwise noted.
110
ESVP-075-95
STVP-112-95
STVP-150-95
NOMINAL
PORT OD
3/4 (19)
11/8 (29)
11/2 (38)
CSTVP O-Ring
& Gasket Kits
MODEL
NUMBER
CSVP-075-95
CSTVP-150-95
NOMINAL
PORT OD
3/4 (19)
11/2 (38)
3
Isolation Valves
SECTION 3.3
Replacement Parts & Rebuild Kits
Complete Valve Rebuild Kits
Contains all items except valve body (#7), refer to kit contents diagram at right.
MODEL
NUMBER
FOR VALVE
MODEL NUMBERS
CSV-075-99
CSV-150-99
CSV-200-99
CSV-250-99
CSV-300-99
CSVP-075-99
CSVP-150-99
CSVP-200-99
CSVP-250-99
CSVP-300-99
CSVP-400-99
ESV-075-99
ESV-150-99
ESV-200-99
ESV-250-99
ESV-300-99
ESVP-075-99
ESVP-150-99
ESVP-200-99
ESVP-250-99
ESVP-300-99
ESVP-400-99
STV-112-99
STVP-112-99
STV-150-99
STVP-150-99
CSV, CILV and CAIV, -038 to -100
CSV, CILV and CAIV-150
CSVP, CILVP and CAIVP, -038 to -100
CSVP, CILVP and CAIVP-150
ESV, ILV, AIV, STV, -038 to -100
ESV, ILV, AIV, STV, -150
ESV, ILV and AIV-200
ESVP, ILVP, AIVP, STVP, -038 to -100
ESVP, ILVP, AIVP, STVP, -150
ESVP, ILVP and AIVP-200
STV-112
STVP-112
STV-150
STVP-150
8
Kit Contents Diagram
1.
2.
3.
4.
5.
6.
7.
8.
9.
10.
11.
12.
13.
14.
15.
Air cylinder
Stem O-ring*
Retaining plate
1
Center plate
Stem shaft
Set screw
2*
Body
Air filter
3
Air cylinder spring
4
Jam nut
Spring retainer
Piston cup
Bonnet screws
5
Air cylinder O-ring
Body flange O-ring
6
or gasket
16. Bellows assembly
17. Poppet O-ring
* 2 inch (50) ID valves are assembled
O-Ring or Gasket Kits
MODEL
NUMBER
KIT CONTENTS
(See drawing)
ESV-075-95
ESV-150-95
ESV-200-95
ESV-250-95
ESV-300-95
STV-112-95
STV-150-95
ESVP-075-95
ESVP-150-95
ESVP-200-95
ESVP-250-95
ESVP-300-95
ESVP-400-95
STVP-112-95
STVP-150-95
CSV-075-95
CSV-150-95
CSV-200-95
CSV-250-95
CSV-300-95
CSTV-150-95
CSVP-075-95
CSVP-150-95
CSVP-200-95
CSVP-250-95
CSVP-300-95
CSVP-400-95
CSTVP-150-95
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
2, 14, 15, 17
with two stem O-rings.
9
10
11
12
13
14
15
16
17
7
Bellows Assembly Kits
FOR VALVE MODEL NUMBERS
ESV, AIV, ILV, ESV-T, STV, -038 to -100
ESV, AIV, ILV, ESV-T, -150
STV-112
STV-150
ESVP, AIVP, ILVP, ESVP-T, STVP, -038 to -100
ESVP, AIVP, ILVP, ESVP-T, -150
STVP-112
STVP-150
CSV, CAIV, CILV, CSTV, -038 to -100
CSV, CAIV, CILV, -150
CSTV-150
CSVP, CAIVP, CILVP, CSTVP, -038 to -100
CSVP, CAIVP, CILVP, -150
CSTVP-150
MODEL
NUMBER
CSV-075-16K
CSV-150-16K
CSV-200-16K
CSV-250-16K
CSV-300-16K
CSVP-400-16K
ESV-075-16K
ESV-150-16K
ESV-200-16K
ESVP-200-16K
ESV-250-16K
ESVP-250-16K
ESV-300-16K
ESVP-300-16K
ESVP-400-16K
CONTENTS
(See drawing) FOR VALVE MODEL NUMBERS
6, 16, 17
6, 16, 17
6, 16, 17
6, 16, 17
6, 16, 17
6, 16, 17
6, 16, 17
6, 16, 17
6, 16, 17
6, 16, 17
6, 16, 17
6, 16, 17
6, 16, 17
6, 16, 17
16, 17
CSV, CILV, CAIV, CSTV, manual or pneumatic, -038 to -100
CSV, CILV, CAIV, CSTV, manual or pneumatic, -150
CSV, CILV, CAIV, manual or pneumatic, -200
CSVP and CILVP-400
ESV, ILV and AIV, manual or pneumatic, -038 to -100
ESV, ILV and AIV-150, manual or pneumatic
ESV, ILV and AIV-200, manual
ESVP, ILVP and AIVP-200, pneumatic
ESV, ILV and AIV-250, pneumatic
ESV, ILV and AIV-300, pneumatic
ESV, ILV and AIV-400, manual or pneumatic
111
3
SECTION 3.4
SPECIFICATIONS
Port OD’s: ¾, 1, 1 ½ and 2 inches (19, 25,
38 and 50)
Materials:
Body: 304 stainless steel
Ball: 316L stainless steel
Stem seal: Viton
(other O-ring compounds available)
Ball seal: Teflon
Actuation: Manual and pneumatic/spring
Helium Leak Rates: <1x10 -9 mbar l/sec to
atmosphere, <1x10 -7mbar l/sec across the seat.
Supply Pressure (pneumatic/spring version):
60-100 psig (4-7 bar)
Options: Heater jackets and controllers
available for all valves.
Isolation Valves
Ball Valves
Ball valves are a low cost, manually or
pneumatically operated, straight through
isolation device. Their simple, robust
design provides high reliability in “dirty”
applications. They are commonly used
on MOCVD and CVD equipment downstream from the chamber or vacuum
pump to isolate traps or abatement tools.
A stainless steel body and Teflon seat
make these valves ideal for corrosive environments. A quarter turn of the
handle quickly switches the valve from
open to close. They are available with
NW-16 through NW-50 flanges as standards. Heater jackets are available to
reduce process by-product accumulation.
Ball Valve Options
Please use the following part numbering
tree to add the appropriate options to a
standard ball valve model number. See
tables below for option codes.
Valve
Model Number
Actuator Position
Type
Indicator
O-ring
Type
Air
Solenoid
Example: BVP-2003-NW-NPN-S21
Pneumatic ball valve with 1.5 inch (38) bore, NW-50 flanges, air-to-open/
spring-to-close, position indicators and 24VDC air solenoid.
O-ring Material Option
CODE
DESCRIPTION
Default (no code)
-K79
-K85
-K75
-K91
-C38
-D19
-PP7
Viton
Kalrez 4079
Kalrez 8085
Kalrez 8575
Kalrez 9100
Chemraz E38
Dupra 192
Perlast G74P
Actuator Option - BVM
Air Solenoid Option - BVP
CODE
KIT
-S11
-S21
-S31
-S41
-S12
-S22
-S32
-S42
BVP-S11-K
BVP-S21-K
BVP-S31-K
BVP-S41-K
BVP-S12-K
BVP-S22-K
BVP-S32-K
BVP-S42-K
DESCRIPTION
120VAC, 50/60 Hz
24VDC
240VAC, 50/60 Hz
24VAC, 50/60 Hz
120VAC, 50/60 Hz (Use with -A actuator option)
24VDC (Use with -A actuator option)
Actuator Option - BVP
CODE
DESCRIPTION
DESCRIPTION
(Default)
-L
Non-locking handle
Locking handle
Air-to-Open/Spring-to-Close (Normally Closed)
Spring-to-Open/Air-to-Close (Normally Open)
Air-to-Open/Air-to-Close
CODE
(Default)
-SA
-A
Position Indicator Option - BVP
Open/closed position indicators detect the valve position. 24 VDC powered.
DESCRIPTION
Optical sensor
CODE
KIT
NPN
PNP
B-NPN-K
B-PNP-K
112
3
Isolation Valves
SECTION 3.4
Ball Valves
Manual Ball Valve - BVM
MODEL
NUMBER
BALL
ID
NOMINAL
PORT OD
BVM-0751
0.75 (19) 0.56 (14.2)
BVM-0751-NW
0.75 (19) 0.56 (14.2)
BVM-1001-NW
0.75 (19) 0.56 (14.2)
BVM-1002
1.0 (25) 0.85 (21.6)
BVM-1002-NW
1.0 (25) 0.85 (21.6)
BVM-1502-NW
1.0 (25) 0.85 (21.6)
BVM-1503
1.5 (38) 1.25 (31.8)
BVM-1503-NW
1.5 (38) 1.25 (31.8)
BVM-2003-NW
1.5 (38) 1.25 (31.8)
BVM-2004
2.0 (50) 1.50 (38.1)
BVM-2004-NW
2.0 (50) 1.50 (38.1)
Call for information on larger sizes.
A
B
C
D
E
F
DESCRIPTION
No Flanges
NW-16
NW-25
No Flanges
NW-25
NW-40
No Flanges
NW-40
NW-50
No Flanges
NW-50
3.47 (88.1)
3.93 (99.8)
3.93 (99.8)
4.66 (118)
4.66 (118)
4.97 (126)
4.97 (126)
1.85 (47)
1.85 (47)
1.85 (47)
2.13 (54)
2.13 (54)
2.13 (54)
2.80 (71)
2.80 (71)
2.80 (71)
3.33 (85)
3.33 (85)
2.94 (75)
2.94 (75)
2.94 (75)
3.33 (85)
3.33 (85)
3.33 (85)
4.04 (103)
4.04 (103)
4.04 (103)
4.56 (116)
4.56 (116)
1.85 (47)
1.85 (47)
1.85 (47)
1.90 (48)
1.90 (48)
1.90 (48)
2.80 (71)
2.80 (71)
2.80 (71)
3.33 (85)
3.33 (85)
5.80 (147)
5.80 (147)
5.80 (147)
6.20 (157)
6.20 (157)
6.20 (157)
7.20 (183)
7.20 (183)
7.20 (183)
7.20 (183)
7.20 (183)
0.93 (24)
0.93 (24)
0.93 (24)
0.98 (25)
0.98 (25)
0.98 (25)
1.40 (36)
1.40 (36)
1.40 (36)
1.66 (42)
1.66 (42)
E
C
SPECIFICATIONS
Port OD’s: ¾, 1, 1 ½ and 2 inches (19, 25,
38 and 50)
Materials:
Body: 316L stainless steel
Ball: 316L stainless steel
Stem seal: Viton
(other O-ring compounds available)
Ball seal: Teflon
Actuation: Manual and pneumatic/spring
Helium Leak Rates: <1x10 -9 mbar l/sec to
atmosphere, <1x10 -7 mbar l/sec across
the seat.
Supply Pressure (pneumatic/spring version):
60-100 psig (4-7 bar)
available for all valves.
B
F
A
D
Pneumatic Ball Valve - BVP
MODEL
NUMBER
NOMINAL
PORT OD
BVP-0751
BVP-0751-NW
BVP-1001-NW
BVP-1002
BVP-1002-NW
BVP-1502-NW
BVP-1503
BVP-1503-NW
BVP-2003-NW
BVP-2004
BVP-2004-NW
0.75 (19)
0.75 (19)
0.75 (19)
1.0 (25)
1.0 (25)
1.0 (25)
1.5 (38)
1.5 (38)
1.5 (38)
2.0 (50)
2.0 (50)
BALL ID
DESCRIPTION
0.56 (14.2)
0.56 (14.2)
0.56 (14.2)
0.85 (21.6)
0.85 (21.6)
0.85 (21.6)
1.25 (31.8)
1.25 (31.8)
1.25 (31.8)
1.50 (38.1)
1.50 (38.1)
No Flanges
NW-16
NW-25
No Flanges
NW-25
NW-40
No Flanges
NW-40
NW-50
No Flanges
NW-50
A
B
3.47 (88.1)
3.93 (99.8)
3.93 (99.8)
4.66 (118)
4.66 (118)
4.97 (126)
4.97 (126)
C
10.20 (259)
10.20 (259)
10.20 (259)
10.20 (259)
10.20 (259)
10.20 (259)
10.20 (259)
10.20 (259)
10.20 (259)
10.20 (259)
10.20 (259)
6.62 (168)
6.62 (168)
6.62 (168)
6.90 (175)
6.90 (175)
6.90 (175)
7.57 (192)
7.57 (192)
7.57 (192)
8.10 (206)
8.10 (206)
D
1.85 (47)
1.85 (47)
1.85 (47)
1.90 (48)
1.90 (48)
1.90 (48)
2.80 (71)
2.80 (71)
2.80 (71)
3.33 (85)
3.33 (85)
E
2.77 (70)
2.77 (70)
2.77 (70)
2.77 (70)
2.77 (70)
2.77 (70)
2.77 (70)
2.77 (70)
2.77 (70)
2.77 (70)
2.77 (70)
F
0.93 (24)
0.93 (24)
0.93 (24)
0.98 (25)
0.98 (25)
0.98 (25)
1.40 (36)
1.40 (36)
1.40 (36)
1.66 (42)
1.66 (42)
Call for information on larger sizes.
B
E
*
C
F
D
*B Actuator option -A (air-to-open / air-to-close)
reduces dimension to 6.76” (172).
A
Ball Valve Seal Kit
Ball Valve Rebuild Kit
MODEL
NUMBER
DESCRIPTION
MODEL
NUMBER
DESCRIPTION
BVM-1-95
BVM-2-95
BVM-3-95
BVM-4-95
Flange, ball & stem seals
BVM-1-99
BVM-2-99
BVM-3-99
BVM-4-99
SS ball & seal kit
SS ball & seal kit
SS ball & seal kit
SS ball & seal kit
113
3
SECTION 3.5
Isolation Valves
Genesis Modular Valves
Bulkhead Attachment
to Chamber with
Double Stud
Fasteners
SPECIFICATIONS
Larger sizes and metric tubing diameters
available on request
Mating flanges: NW -16 through 50 standard
Air fittings: 5 / 32 inch (4) One-Touch
Materials
Body: Electroless nickel coated aluminum
O-rings: Viton standard
Other compounds available.
Air cylinder: Teflon coated aluminum
Service interval: One million cycles
Actuation: Air-to-open/spring-to-close
Operating pressure: 60 to 80 psig (4 -5.5 bar)
differential across the valve seat.
Helium leak rate: <1x10 -9 mbar l/sec.
Operating temperature
Sustained: <150ºC
Intermittent: <204ºC
Options: Soft Start actuator with or without
orifice, position indicators, air solenoids,
and various O-ring compounds
Thermal: Heaters and insulators available.
See page 120
Optional
Modular Heater
The Genesis modular vacuum valve
system provides equipment designers with unlimited possibilities for
downstream vacuum subassemblies.
Nippleless valve bodies and block
fittings can be assembled by two
attachment methods using universal
ISO-KF centering ring/O-ring hardware,
providing maximum flexibility and the
smallest footprint possible.
Simple and robust, Genesis valves are
rated at one million cycles before service.
During testing, these valves were cycled
millions of times while maintaining
vacuum integrity. The welded bellows
is AM-350 stainless steel for corrosion
resistance, longevity and flexibility.
The bellows fully retract from the side
port when the valve is open, eliminating
buildup of process by-products on the
bellows and subsequent particle generation during operation. Valve center plates
have been eliminated in order to provide
precise alignment between the poppet
and valve seat. A composite stem bushing resists wear even at high temperatures.
Valve return springs are shot peened in
order to provide millions of cycles without
loss of force. Teflon coated air cylinders
feature a 15 micron air filter to prevent
particle migration either into or out
of the air cylinder.
Genesis
Tee Fitting
VCR Test Port
attached with
Finger Clamps
Finger Clamp
Attachment
Genesis Valve with
Soft Start Actuator
Foreline to
Vacuum Pump
Genesis valves and fittings have a patented
nippleless body, which provides the highest
conductance and smallest footprint available. Air solenoids, open/closed position
indicators, and soft start actuators can be
added with no addition to size. All valves
are designed for easy O-ring or bellows
replacement. Design symmetry allows the
air actuator to be oriented at 90º increments
for easy access to the air solenoid and visibility of position indicators.
Genesis valve bodies and fittings are
electroless nickel coated aluminum for
excellent thermal characteristics and
corrosion resistance. Components are
machined from solid 6061-T6 aluminum
to eliminate welds, leak paths and
entrapments. All tapped holes are
supplied with stainless steel threaded
inserts for long term serviceability.
D
Genesis Aluminum Modular Valves
MODEL NOMINAL
NUMBER PORT OD FLANGE
A
B
C
D
BOLT
THREAD CIRCLE
GNV-072
3/4 (19)
NW-16
1.15 (29.2) 2.31 (58.7) 3.04 (77.2)
1.46 (37.1)
12-24
GNV-102
1 (25)
NW-25
1.06 (26.9)
1.46 (37.1)
12-24
GNV-152
11/2 (38)
NW-40
1.25 (31.8) 2.50 (63.5) 3.71 (94.2) 1.88 (47.8)
12-24
GNV-202
2 (50)
NW-50
1.63 (41.4) 3.25 (82.6)
1/4-20
2.13 (54.1)
3.14 (79.8)
4.44 (113) 2.25 (57.2)
2.031
(51.59)
2.031
(51.59)
2.616
(66.45)
3.406
(86.51)
C
Note: For option descriptions and how to add options, see next page.
A
Teflon Coated
Air Cylinder
B
Double Acting
Air Piston
Main Valve Stem
Soft Start
Stem Option
High Temp.
Composite
Stem Bushing
Heaters, insulators, replacement parts and
valve rebuild kits are located on Page 120
Welded
AM-350
Bellows
Interchangeable
Orifice
Nickel Coated
Aluminum
Body
114
Conductance
The conductance values in the table below have been calculated
for air at room temperature using the formulas for tubes and
elbows presented in the third edition of Roth’s Vacuum Technology:
Cv =182(D4/L’)P for viscous flow or Cm =12(D3/L’) for molecular
flow, Port lengths without flanges and inner diameters for the valve
sizes and configurations were used. This method is an approximation, use values accordingly.
GENESIS
VALVE
MOLECULAR FLOW
C M (LITERS/SEC.)
VISCOUS FLOW
C V (LITERS/SEC.)
GNV-10
GNV-15
GNV-20
21
59
114
717
3115
8183
Note: P=air at 1 mbar. L’=Laxial +1.33(0/180)D for elbows.
3
Isolation Valves
SECTION 3.5
Genesis Modular Valve Options
Follow this part tree to add one or more options to a Genesis valve.
Add options to the basic valve part number in the order shown. Example: GNV-152-S2-P10-KT-B21
Valve Model Number
Orifice Option
Position Indicator
O-ring
Air Solenoid
Valve/Orifice Pumpdown Curves Charts
Soft Start Valve Actuator Option
Orifice Parts & Kits
OPTION
VALVE
SIZE
ORIFICE
SIZE
MODEL
NUMBER
-S0
-S1
-S2
-S3
No orifice
3/4 - 2 (19-50)
3/4 - 2 (19-50)
3/4 - 2 (19-50)
.147 (3.7)
.109 (2.8)
.070 (1.8)
GNV-075-SO-1
GNV-075-SO-2
GNV-075-SO-3
GNV-075-SO-K
GNV-075-SO-T
NOTE: Refer to diagrams for orifice selection
VALVE
SIZE
ORIFICE
SIZE
3/4 - 2 (19-50)
.070 (1.8)
.109 (2.8)
.147 (3.7)
Kit*
Wrench
3/4 - 2 (19-50)
3/4 - 2 (19-50)
3/4 - 2 (19-50)
All
-P1O
-P1C
-P2
Soft Start/Standard
Standard
Standard
500
Open valve at desired
cross-over pressure
400
300
Main Valve
Only
100
0
0
5
10
15
20
2.55
(64.8)
1 (25) 2.55
(64.8)
11/2 (38) 2.73
(69.3)
2 (50) 3.11
(79.0)
3/4 (19)
C
D
4.82
(122)
4.82
(122)
5.31
(135)
6.05
(154)
3.76
(95.5)
3.76
(95.5)
4.06
(103)
4.42
(112)
1.66
(42.2)
1.66
(42.2)
1.82
(46.2)
2.03
(51.6)
No Orifice
0.147" Orifice
0.109" Orifice
0.070" Orifice
600
500
400
300
200
0
0
30
60
C
B
D
A
Genesis modular valves use chemical resistant Viton O-rings for closure. Viton O-rings
should not be heated to above 204°C. Even prolonged exposures of 150°C may
degrade the O-rings. High temp Kalrez O-rings allow valve bakeouts to 220°C intermittently or 170°C for extended periods. Silicone O-rings provide adequate sealing
performance in thermal cycling from -55°C to 230°C.
COMPOUND
Standard
-KT
-KC
-CR
-S
Viton
Kalrez 4079
Kalrez 2037
Chemraz 513
Silicone
90
120
TIME (Seconds)
150
180
210
Air Solenoid Option
O-ring Option
OPTION
45
40
11/2 & 2 inch valves tested on a 30 liter chamber
1 position indicator - main valve open only
1 position indicator - main valve closed only
2 position indicators - main valve open & closed
B
35
100
DESCRIPTION
Air Solenoid & Position
Indicator Dimensions
A
30
800
Refer to diagram below for dimensions.
SIZE
25
TIME (Seconds)
700
Nor-Cal’s CE certified, shielded, open/closed position indicators detect the piston
position in the valve’s air cylinder. The technician has a visual indication of power to the
circuit (12 to 24 VDC) and the valve position, as does the operator watching the panel.
With the soft start option only one position indicator can be provided for the fully open
position. Operating temperature range is -25ºC to 70ºC for valves with position indicators. Call for more information on heated valves with position indicators.
VALVE
ACTUATOR
Open soft-start with 0.070" orifice
600
200
* Kits include all orifice sizes and an installation
wrench for the specified valve size
Position Indicator Option
OPTION
800
700
Chamber Pressure (Torr)
Orifice Option
Diagram A - TYPICAL PUMP-DOWN
WITH SOFT-START
or 2 inch valve on 30 Liter Chamber
11/2
For reduced particle contamination in load locks and process chambers, Genesis
valves can be provided with a patented low cost soft start actuator with no increase
in valve size. A double-acting air piston, opens a soft start circuit inside the valve
when air is supplied to the top of the air cylinder. The soft start by-pass opening
can be provided fully open or with a specified orifice, depending on the desired
pumpdown. (See diagram.) After the chamber has been pumped from atmosphere
to the desired cross over pressure, the main valve circuit is opened by supplying air to
the bottom of the air cylinder. Each circuit can be operated independently and is
air-to-open, spring-to-close.
TEMPERATURE
MIN. MAX.
-29ºC
-50ºC
-54ºC
-30ºC
-55ºC
204ºC
316ºC
220ºC
210ºC
232ºC
DESCRIPTION
Industry standard
High temperatures
Chemical resistant
Chemical resistant
Extreme temps
Low 1.8 wattage, CE certified air solenoids in several current ratings can be provided on
the valve, ready to attach to the house air supply. One three-way air solenoid is required
for a standard Genesis valve and two three-way air solenoids are required for a soft start
version. This option includes 24 inch (610) quick disconnect electrical leads and 5/32 inch (4)
one-touch air fittings. Remote mount required on heated valves. Air solenoids can also be
supplied as a kit with assembly hardware and instructions. Kit part numbers are in
the second column below.
OPTION
KIT
ACTUATOR
-A11
-A21
-A31
-A41
-B11
-B21
-B31
-B41
A11-K
A21-K
A31-K
A41-K
B11-K
B21-K
B31-K
B41-K
Standard
Standard
Standard
Standard
Soft Start
Soft Start
Soft Start
Soft Start
DESCRIPTION
120 VAC, 50/60 Hz
24 VDC
240 VAC, 50/60 Hz
24 VAC, 50/60 Hz
120 VAC, 50/60 Hz
24 VDC
240 VAC, 50/60 Hz
24 VAC, 50/60 Hz
QUANTITY
1
1
1
1
2
2
2
2
Refer to diagram at left for dimensions.
Valve heaters, insulators, rebuild and
replacement part kits are located on page 120
115
3
Isolation Valves
SECTION 3.5
Genesis Modular Valve Assembly Hardware
Finger Clamp Component Assembly
Stainless steel finger clamps allow a standard ISO-KF flange to be attached directly to a Genesis valve or
fitting using a standard ISO-KF centering ring and O-ring. Elbows, reducers, chamber ports, roughing
lines, or other vacuum components can be attached directly to valve bodies or fittings with finger clamps.
Unnecessary valve ports have been eliminated, shortening the gas path and increasing system
conductance. For ultimate versatility standard nipples and elbows can be attached with finger
clamps in order to make a drop-in replacement valve, such as an angle-in-line or tee valve.
Once the finger clamp bolt is loosened it can be pivoted out of the way in order to
remove or install the flange and centering ring. The finger clamp does not need
to be removed from the valve or fitting. The clamp is self-aligning when tightened, for ease of flange installation. Each kit contains four finger clamps, hex
head bolts and washers for one connection.
0.815
MODEL
NUMBER
GNCP-150-S
GNCP-200-S
VALVE
SIZE
3/4 to 11/2 (19 to 38)
2 (50)
BOLT
TORQUE
12-24 x 7/8
1/4-20 x 7/8
6.8 Nm.
11.3 Nm.
Block Subassemblies with
Double Stud Fasteners
A
0.375
C B
0.15
Stainless steel double stud fasteners allow two Genesis components to be connected
using a standard ISO-KF centering ring and O-ring. Special subassemblies, such as
diverter valves or roughing/high vacuum circuits can be assembled quickly using
double stud fasteners with valves and block fittings. These subassemblies can be
provided as a unit from Nor-Cal or you may choose to assemble them from
individual components. They are ideal for limited space
installations, such as on cluster tool frames, and provide
highest conductance, while eliminating unnecessary
hardware. Double stud fasteners can be used to make a
bulkhead attachment from a valve directly to a chamber.
Stud fasteners can be installed using a jeweler’s screwdriver and a 3 / 8 inch (9.53) ignition wrench. An installation
tool for stud fasteners is provided with each stud fastener
kit or assembly, or one can be purchased separately. Each
kit contains four double stud fasteners for one connection
and an installation tool.
MODEL
NUMBER
GNSF-150
GNSF-150
GNSF-150-K
GNSF-200
GNSF-200-K
GNSF-T
VALVE
SIZE
3/4 to 1 (19 to 25)
11/2 (38)
3/4 to 11/2 (19 to 38)
2 (50)
2 (50)
All
DESCRIPTION
(4) double stud fasteners
(4) double stud fasteners with install tool
(4) double stud fasteners with install tool
Double stud install tool
THREAD
A
B
C
12-24
12-24
12-24
1/4-20
1/4-20
-
0.63 (15.9)
0.63 (15.9)
0.63 (15.9)
0.73 (18.5)
0.73 (18.5)
-
2.3 (57.9)
2.7 (67.3)
3.4 (86.4)
-
4.40 (111.8)
5.15 (130.8)
6.65 (168.9)
-
Valve heaters, insulators, rebuild and
replacement part kits are located on page 120
116
3
OPTIONAL HEATER
Isolation
Valves
Genesis Modular Fittings
A Typ.
Genesis Modular Fittings
Genesis fittings provide the most compact, highest conductance, corrosion resistant
vacuum connection available when used with Genesis valves, fittings and double
stud fasteners. These fittings can also attach with finger clamps to standard ISO-KF
components with universal O-rings, which are also available from Nor-Cal Products.
0.750
OPTIONAL HEATER
B Typ.
SECTION 3.5
90º Elbow
MODEL
NUMBER
VALVE
SIZE
A
B
THREAD
BOLT
CIRCLE
GNF-102
GNF-152
GNF-202
1 (25)
11/2 (38)
2 (50)
2.125 (54.0)
2.500 (63.5)
3.250 (82.6)
1.063 (27.0)
1.250 (31.8)
1.625 (41.3)
12-24
12-24
1/4-20
2.031 (51.6)
2.616 (66.4)
3.406 (86.4)
B Typ.
SPECIFICATIONS
Port ODs: 1, 11/ 2 and 2 inches (25, 38 and
50). Other size tubing diameters available
Body: Electroless nickel coated 6061 T-6
aluminum with SS threaded inserts
Assembly
Fitting to fitting: Double-stud fasteners
Fitting to flange: Finger clamps
Sustained: 150ºC
Intermittent: 204ºC
Options: Modular heaters and heater jackets
Tee
A Typ.
MODEL
NUMBER
VALVE
SIZE
A
B
THREAD
BOLT
CIRCLE
GNF-103
GNF-153
GNF-203
1 (25)
11/2 (38)
2 (50)
2.125 (54.0)
2.500 (63.5)
3.250 (82.6)
1.063 (27.0)
1.250 (31.8)
1.625 (41.3)
12-24
12-24
1/4-20
2.031 (51.6)
2.616 (66.4)
3.406 (86.4)
B Typ.
4-Way Cross
A Typ.
MODEL
NUMBER
VALVE
SIZE
A
B
THREAD
BOLT
CIRCLE
GNF-104
GNF-154
GNF-204
1 (25)
11/2 (38)
2 (50)
2.125 (54.0)
2.500 (63.5)
3.250 (82.6)
1.063 (27.0)
1.250 (31.8)
1.625 (41.3)
12-24
12-24
1/4-20
2.031 (51.6)
2.616 (66.4)
3.406 (86.4)
B Typ.
5-Way Cross
A Typ.
MODEL
NUMBER
VALVE
SIZE
A
B
THREAD
BOLT
CIRCLE
GNF-105
GNF-155
GNF-205
1 (25)
11/2 (38)
2 (50)
2.125 (54.0)
2.500 (63.5)
3.250 (82.6)
1.063 (27.0)
1.250 (31.8)
1.625 (41.3)
12-24
12-24
1/4-20
2.031 (51.6)
2.616 (66.4)
3.406 (86.4)
B Typ.
6-Way Cross
A Typ.
MODEL
NUMBER
VALVE
SIZE
A
B
THREAD
BOLT
CIRCLE
GNF-106
GNF-156
GNF-206
1 (25)
11/2 (38)
2 (50)
2.125 (54.0)
2.500 (63.5)
3.250 (82.6)
1.063 (27.0)
1.250 (31.8)
1.625 (41.3)
12-24
12-24
1/4-20
2.031 (51.6)
2.616 (66.4)
3.406 (86.4)
MODEL
NUMBER
VALVE
SIZE
A
B
THREAD
BOLT
CIRCLE
GNF-107
GNF-157
GNF-207
1 (25)
11/2 (38)
2 (50)
2.125 (54.0)
2.500 (63.5)
3.250 (82.6)
1.063 (27.0)
1.250 (31.8)
1.625 (41.3)
12-24
12-24
1/4-20
2.031 (51.6)
2.616 (66.4)
3.406 (86.4)
B Typ.
Tri-Bow
A Typ.
Heaters and insulators are available on page 120
117
3
Isolation Valves
SECTION 3.5
Genesis Stainless Steel Valves
Genesis stainless steel poppet valves offer equipment designers the high performance and optimized conductance of Genesis
modular valves in Nor-Cal’s standard stainless steel poppet valve body. These simple, robust valves are available with standard and
soft start air-to-open/spring-to-close actuation in port sizes from 3 /4 to 4 inches (19.05-101.6). Viton O-ring seals are standard.
Other O-ring compounds, open/closed position indicators and air solenoids are available as options. Heater jackets and insulators are
also available.
SPECIFICATIONS
Larger sizes and metric tubing
diameters available on request
Mating flanges: NW -16 through ISO-100
standard
Air fittings: 5 / 32 inch(4) One-Touch
Materials
(Other compounds available.)
Air cylinder: Teflon coated aluminum
Service interval: One million cycles
Air-to-open/spring-to-close
During testing, the valves were cycled millions of times while maintaining vacuum integrity. The welded bellows is AM-350 for
corrosion resistance, longevity and flexibility. The bellows fully retracts from the side port when the valve is open, eliminating
buildup of process by-products on the bellows and subsequent particle generation during operation. Valve center plates have been
eliminated in order to provide precise alignment between the poppet and valve seat. A composite stem bushing resists wear even
at high temperatures. Valve return springs are shot peened in order to provide millions of cycles without loss of force. Teflon coated
air cylinders feature a 15 micron air filter to prevent particle migration either into or out of the air cylinder. All valves are designed for
easy O-ring or bellows replacement. Design symmetry allows the air actuator to be oriented at 90º increments for easy access to the
air solenoid and visibility of position indicators.
For reduced particle contamination in load locks and process chambers, Genesis stainless steel valves are offered with a patented low
cost soft start actuator with no increase in valve size. A double-acting air piston, opens a soft start circuit inside the valve when air is
supplied to the top of the air cylinder. The soft start by-pass opening can be provided fully open or with a specified orifice, depending on the desired pump down. After the chamber has been pumped from atmosphere to the desired cross over pressure, the main
valve circuit is opened by supplying air to the bottom of the air cylinder. Each circuit can be operated independently and is air-toopen/spring-to-close. Soft start Genesis stainless steel valves are offered standard with no orifice. Various orifice size options and
multiple size orifice kits are available. See next page.
Conductance
This table has been calculated in liters per second for air at room temperature using the
formulas for tubes and
ANGLE
ANGLE-IN-LINE
elbows presented in the third NOMINAL
VISCOUS MOLECULAR VISCOUS MOLECULAR
PORT OD
edition of Roth’s Vacuum
1/2 (13)
60
3
Technology.
3/4 (19)
135
5
120
4
Sustained: <150ºC
Intermittent: <204ºC
Option: Air solenoids, open/closed position
indicators, soft start with various orifice
sizes and various O-ring compounds
Cv =182(D4/L’)P for viscous
flow or Cm =12(D3/L’) for
molecular flow
Note: Calculations were based
on port lengths without flanges
and inner diameters for the valve
sizes and configurations.
P = air at 1 mbar.
L’=Laxial +1.33(0/180)D for
elbows.
E
D
1 (25)
11/8 (29)
11/2 (38)
2 (50)
21/2 (63)
3 (76)
4 (100)
391
1925
4677
12332
23763
57994
12
37
65
136
217
396
285
1324
3459
7505
12558
-
9
25
48
83
115
-
Genesis Stainless Steel Angle Valves
MODEL
NUMBER
C
B
A
A
E
D
GNVS-072-NWB
GNVS-072-NWB-S0
GNVS-102-NWB
GNVS-102-NWB-S0
GNVS-152-NWB
GNVS-152-NWB-S0
GNVS-202-NWB
GNVS-202-NWB-S0
GNVS-302-ISO
GNVS-302-ISO-S0
GNVS-402-ISO
GNVS-402-ISO-S0
ACTUATION
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
FLANGE NOMINAL
TYPE
PORT OD
NW-16
NW-16
NW-25
NW-25
NW-40
NW-40
NW-50
NW-50
ISO-80
ISO-80
ISO-100
ISO-100
3/4 (19)
3/4 (19)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
3 (76)
3 (76)
4 (100)
4 (100)
A
B
1.50 (38.1)
1.50 (38.1)
2.42 (61.47)
2.42 (61.47)
2.49 (63.2)
2.49 (63.2)
3.22 (81.9)
3.22 (81.9)
3.86 (98.0)
3.86 (98.0)
4.25 (108)
4.25 (108)
3.40 (86)
3.40 (86)
4.19 (106)
4.19 (106)
4.51 (115)
4.51 (115)
5.56 (141)
5.56 (141)
7.33 (186)
7.33 (186)
8.38 (213)
8.38 (213)
C
4.78 (121)
4.78 (121)
5.57 (141)
5.57 (141)
6.20 (157)
6.20 (157)
7.66 (195)
7.66 (195)
10.85 (276)
10.85 (276)
13.04 (331)
13.04 (331)
D
1.46 (37)
1.46 (37)
1.46 (37)
1.46 (37)
1.88 (48)
1.88 (48)
2.25 (57)
2.25 (57)
4.13 (105)
4.13 (105)
5.00 (127)
5.00 (127)
E
2.13 (54)
2.13 (54)
2.13 (54)
2.13 (54)
2.50 (63)
2.50 (63)
3.25 (83)
3.25 (83)
5.45 (138)
5.45 (138)
6.40 (163)
6.40 (163)
Genesis Stainless Steel Angle-In-Line Valves
MODEL
NUMBER
B
A
C
Valve rebuild and replacement part
kits are available on page 120
118
GNVSAI-072-NWB
GNVSAI-072-NWB-S0
GNVSAI-102-NWB
GNVSAI-102-NWB-S0
GNVSAI-152-NWB
GNVSAI-152-NWB-S0
GNVSAI-202-NWB
GNVSAI-202-NWB-S0
GNVSAI-302-ISO
GNVSAI-302-ISO-S0
GNVSAI-402-ISO
GNVSAI-402-ISO-S0
ACTUATION
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
FLANGE
TYPE
NW-16
NW-16
NW-25
NW-25
NW-40
NW-40
NW-50
NW-50
ISO-80
ISO-80
ISO-100
ISO-100
NOMINAL
PORT OD
3/4 (19)
3/4 (19)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
3 (76)
3 (76)
4 (100)
4 (100)
A
4.20 (107)
4.20 (107)
4.00 (102)
4.00 (102)
5.12 (130)
5.12 (130)
7.00 (178)
7.00 (178)
10.55 (268)
10.55 (268)
12.00 (305)
12.00 (305)
B
C
3.76 (95)
3.76 (95)
3.85 (98)
3.85 (98)
4.47 (114)
4.47 (114)
5.79 (147)
5.79 (147)
8.88 (226)
8.88 (226)
10.75 (273)
10.75 (273)
4.37 (111)
4.37 (111)
4.63 (118)
4.63 (118)
5.28 (134)
5.28 (134)
7.00 (178)
7.00 (178)
11.62 (295)
11.62 (295)
13.81 (351)
13.81 (351)
D
1.46 (37)
1.46 (37)
1.46 (37)
1.46 (37)
1.88 (48)
1.88 (48)
2.25 (57)
2.25 (57)
4.13 (105)
4.13 (105)
5.00 (127)
5.00 (127)
E
2.13 (54)
2.13 (54)
2.13 (54)
2.13 (54)
2.50 (63)
2.50 (63)
3.25 (83)
3.25 (83)
5.45 (138)
5.45 (138)
6.40 (163)
6.40 (163)
3
Isolation Valves
SECTION 3.5
Genesis Stainless Steel Valve Options
Follow this part tree to add one or more options to a Genesis valve.
Add options to the basic valve part number in the order shown.
Valve Model Number
Orifice Option Position Indicator
O-ring
Air Solenoid
Example: GNVSAI-302-ISO-P1O-KT-A11
Valve/Orifice Pumpdown Curves Charts
Orifice Option
ORIFICE
OPTION
VALVE
SIZE
-S0
-S1
-S2
-S3
-S4
-S5
-S6
-S7
ORIFICE
SIZE
No orifice
3/4 to 2 (19-50)
3/4 to 2 (19-50)
3/4 to 2 (19-50)
3 & 4 (76 & 100)
3 & 4 (76 & 100)
3 & 4 (76 & 100)
3 & 4 (76 & 100)
.147 (3.7)
.109 (2.8)
.070 (1.8)
.055 (1.4)
.093 (2.4)
.128 (3.3)
.201 (5.1)
NOTE: Refer to diagrams for
orifice option selection
ORIFICE
REPLACEMENTS
GNV-075-S0-1
GNV-075-S0-2
GNV-075-S0-3
GNV-300-S0-1
GNV-300-S0-2
GNV-300-S0-3
GNV-300-S0-4
GNV-075-S0-K
GNV-300-S0-K
GNV-075-S0-T
VALVE
SIZE
3/4 to 2 (19-50)
3/4 to 2 (19-50)
3/4 to 2 (19-50)
3 & 4 (76 & 100)
3 & 4 (76 & 100)
3 & 4 (76 & 100)
3 & 4 (76 & 100)
3/4 to 2 (19-50)
3 & 4 (76 & 100)
3/4 to 4 (76 & 100)
ORIFICE
SIZE
.070 (1.8)
.109 (2.8)
.147 (3.7)
.055 (1.4)
.093 (2.4)
.128 (3.3)
.201 (5.1)
Kit*
Kit*
Wrench
11/2 & 2 inch valves tested on a 30 liter chamber
800
700
Genesis stainless steel valves with Soft Start actuation come standard with no orifice.
To order these valves with an orifice replace the “S0” part number suffix with one of the
following options. Example: Change standard valve part number
GNVS-072-NWB-S0 to GNVS-072-NWB-S1.
No Orifice
0.147" Orifice
0.109" Orifice
0.070" Orifice
600
500
400
300
200
100
0
0
30
60
90
120
TIME (Seconds)
150
3 and 4 inch valves tested with various Soft-Start orifices on a 30 liter
chamber and 232 CFM Edwards mechanical blower pump package.
No Orifice
0.201" Orifice
0.128" Orifice
0.093" Orifice
0.055" Orifice
OPTION
VALVE
ACTUATOR
-P1O
-P1C
-P2
Soft Start/Standard
Standard
Standard
700
Nor-Cal’s CE certified, shielded, open/closed position indicators detect the piston
position in the valve’s air cylinder. The technician has a visual indication of power to the
circuit (12 to 24 VDC) and the valve position, as does the operator watching the panel.
With the soft start option only one position indicator can be provided for the fully
open position. Operating temperature range is -25ºC to 70ºC for valves with position
indicators. Call for more information on high temperature position indicators.
210
800
* Kits include all orifice sizes and an installation
wrench for the specified valve size
Open/Closed Position Indicator Option
180
600
500
400
300
200
100
DESCRIPTION
0
1 position indicator - main valve open only
1 position indicator - main valve closed only
2 position indicators - main valve open & closed
0
10
20
30
40
50
60
70
TIME (Seconds)
80
90
100
110
120
Air Solenoid Option
O-ring Option
Standard Genesis valves are furnished with Viton O-rings which are resistant to most
chemicals, but should not be heated to temperatures in excess 204ºC. Even prolonged
exposures of 150ºC may degrade the O-rings. High temperature Kalrez O-rings allow
the valve to be heated to 220ºC intermittently or 170ºC for prolonged periods .
OPTION
-KT
-KC
-CR
-S
COMPOUND
APPLICATIONS
4079 Kalrez
2037 Kalrez
513 Chemraz
Silicone
High temperature
Chemical resistant
Chemical resistant
Extreme temperatures
Low 1.8 wattage, CE certified three-way air solenoids can be provided on the valve in several electrical current ratings, with 24 inch (610) quick disconnect electrical leads, and 5/32
inch (3.97) one-touch air fittings - ready to attach to the house air supply. One solenoid
is required for standard Genesis stainless valves. Two solenoids are required for soft start
versions. Remote mount is required on heated valves. Air solenoid kits with assembly hardware and instructions are available. Kit part numbers are in the second column below.
OPTION
KIT
ACTUATOR
-A11
-A21
-A31
-A41
-B11
-B21
-B31
-B41
A11-K
A21-K
A31-K
A41-K
B11-K
B21-K
B31-K
B41-K
Standard
Standard
Standard
Standard
Soft Start
Soft Start
Soft Start
Soft Start
DESCRIPTION
120 VAC, 50/60 Hz
24 VDC
240 VAC, 50/60 Hz
24 VAC, 50/60 Hz
120 VAC, 50/60 Hz
24 VDC
240 VAC, 50/60 Hz
24 VAC, 50/60 Hz
QUANTITY
1
1
1
1
2
2
2
2
119
3
Isolation
Valves
Genesis Heaters & Replacement Kits
SECTION 3.5
Genesis Modular Valve Heaters & Insulators
Compatible Valves: Genesis Modular Valves
Heaters and controllers for stainless steel
Genesis Valves available. Call for details.
Insulator Body: 1/2 inch (13) thick, trimable,
molded silicone construction. Touch safe
exterior
Heater
Voltage: 120 or 240 VAC standard
Set points: 120ºC or 150ºC
Manual reset: 200ºC with over temp shutoff
Low temperature alert: standard on
11/2 and 2 inch (38-50) valves
Connections
Power cord: 12 inch (305) with AMP
3-pin
Alert cords: Two 12 inch (305) with
AMP MR connectors standard
on 11/ 2 & 2 (38 & 50) inch valves
Certification
Insulators: UL 94 V-O
Heaters: UL listed. CE certification pending
Heaters
MODEL
NUMBER
HT-GN-100-120-1
HT-GN-100-150-1
HT-GN-150-120-1
HT-GN-150-150-1
HT-GN-200-120-1
HT-GN-200-150-1
VALVE
SIZE
SET
POINT
WATTS
3/4 & 1 (19 & 25)
120ºC
150ºC
120ºC
150ºC
120ºC
150ºC
120
120
120
120
160
160
3/4 & 1 (19 & 25)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
A
2.13 (54)
2.13 (54)
2.50 (63)
2.50 (63)
3.25 (83)
3.25 (83)
F
A
B
Optional Heater
SPECIFICATIONS
A unique, UL listed modular heater provides 120ºC or 150ºC internal temperatures in valves or fittings at a fraction of the cost
of other heaters. Genesis heaters use thick film technology to provide uniform heat throughout the component. Each heater
contains a control set point and a resetable high temperature shut off. The 11/2 and 2 inch (38.1 and 50.8) sizes also have a low
temperature alert that can be connected to a remote alarm. Each thermostat can be replaced without destroying the heater.
The same heater can be attached to a valve body or fitting with two screws. A trim-to-fit, molded insulator covers the heated
component and mating flanges. These clean room compatible insulators are constructed of 1/2 inch (12.7) thick molded silicone.
When in use, the exterior surface remains touch-safe. Insulators meet UL 94 V-O requirements. Insulators for other components
C
are available upon request. Heater jackets and controllers for Genesis
E
D
Stainless Steel Valves are available. Call for information and pricing.
0.75
NOTE: Replace “-1” with “-2” for 240V heaters.
Heater Insulators
Molded Insulator
Replaceable
Set Point
Thermostat
Resetable
High Temp
Thermostat
MODEL
NUMBER
VALVE
SIZE
HI-GNV-100
HI-GNV-150
HI-GNV-200
3/4 & 1 (19 & 25)
11/2 (38)
2 (50)
C
E
F
2.50 (63)
2.88 (73)
3.31 (84)
3.64 (92)
4.25 (108)
5.00 (127)
6 ft.
12 ft.
Genesis Valve Assembly Kits and
Replacement Hardware
The kits below are for use with Genesis modular valves and
with Genesis stainless steel valves. First maintenance is
recommended at one million cycles, depending on the
cleanliness of the process. Typical valve service will require
O-ring replacement.
Bellows assembly
Includes bellows, top flange and poppet weldment
assembly. Requires O-ring kit to seal.
KIT
NUMBER
GNV-100-16
GNV-100-16-S0
GNV-150-16
GNV-150-16-S0
GNV-200-16
GNV-200-16-S0
GNV-300-16
GNV-300-16-S0
GNV-400-16
GNV-400-16-S0
VALVE
SIZE
3/4 & 1 (19 & 25)
3/4 & 1 (19 & 25)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
3 (76)
3 (76)
4 (100)
4 (100)
Viton O-Ring Kits
Includes bellows O-ring and poppet O-ring.
Other O-ring compounds are available on request.
KIT
NUMBER
GNV-100-95
GNV-100-95-S0
GNV-150-95
GNV-150-95-S0
GNV-200-95
GNV-200-95-S0
GNV-300-95
GNV-300-95-S0
GNV-400-95
GNV-400-95-S0
VALVE
SIZE
ACTUATOR
3/4 & 1 (19 & 25)
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
3/4 & 1 (19 & 25)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
3 (76)
3 (76)
4 (100)
4 (100)
Valve Rebuild Kits
Bellows Assembly Kits
120
3.13 (80)
3.63 (92)
4.38 (111)
LENGTH
HT-GN-PCD-6
HT-GN-PCD-12
D
4.50 (114)
5.00 (127)
5.88 (149)
Heater Power Cords
MODEL
NUMBER
Modular Thick
Film Heater
B
6.00 (152)
6.63 (168)
8.00 (203)
ACTUATOR
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
Includes all standard parts except valve body and position
indicator. Your valve’s position indicator type must be specified
when ordering. Example: GNV-150-99-S0-P10
KIT
NUMBER
GNV-100-99
GNV-100-99-S0
GNV-150-99
GNV-150-99-S0
GNV-200-99
GNV-200-99-S0
GNV-300-99
GNV-300-99-S0
GNV-400-99
GNV-400-99-S0
VALVE
SIZE
ACTUATOR
3/4 & 1 (19 & 25)
3/4 & 1 (19 & 25)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
3 (76)
3 (76)
4 (100)
4 (100)
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
Standard
Soft Start
3
Isolation
Valves
SECTION 3.6
SPECIFICATIONS
Materials
Knob: Aluminum
Port seal: Viton
Actuation: Manual using knurled knob
Sustained: <150°C
Vacuum range
Viton o-ring: >1x 10-9 mbar - High vacuum
Patented design
Our manual butterfly valves provide a low-cost alternative to bellows sealed gate valves. These valves easily actuate from the
fully-closed position to fully open with only a quarter turn of the knob. A patented design allows the sealing disk to center itself when
closing, with even pressure around the Viton O-ring seal. This design also helps to lower the amount of scuffing or rolling of the
o-ring. Quarter-turn actuation, small footprint and the shortest possible gas path make manual butterfly valves the preferred choice
for many applications.
MODEL
NUMBER
VALVE
SIZE
DIAGRAM
BFV-0752-CF
BFV-0752-NWB
BFV-1002-CF
BFV-1002-NWB
BFV-1502-CF
BFV-1502-NWB
BFV-2002-CF
BFV-2002-NWB
3/4 (19)
1
2
1
2
1
2
1
2
3/4 (19)
1 (25)
1 (25)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
FLANGE
TYPE
1.33 CF
NW 16
2.12 CF
NW 25
2.75 CF
NW 40
3.38 CF
NW 50
A
0.75 (19)
0.75 (19)
1.00 (25)
1.00 (25)
1.25 (32)
1.25 (32)
1.75 (44)
1.75 (44)
B
C
2.01 (51)
2.01 (51)
2.75 (70)
2.75 (70)
3.71 (94)
3.71 (94)
4.90 (124)
4.90 (124)
B
B
C
D
1.75 (44)
1.04 (26)
2.00 (50)
1.34 (34)
2.25 (57)
1.90 (48)
2.25 (57)
A
A
Diagram 1
D
0.75 (19)
0.75 (19)
1.00 (25)
1.00 (25)
0.75 (19)
1.37 (35)
1.00 (25)
1.00 (25)
Diagram 2
C
D
Replacement O-rings
MODEL
NUMBER
VALVE
SIZE
O-RING
COMPOUND
BFV-075-95
BFV-100-95
BFV-150-95
BFV-200-95
3/4 (19.1)
Viton
Viton
Viton
Viton
1 (25.4)
11/2 (38.1)
2 (50.8)
121
3
Isolation Valves
SECTION 3.7
Isolation Pendulum Valves
SPECIFICATIONS
Materials
Body: Cast aluminum A356.0
Valve plate: Aluminum 6061-T6
Other parts: A6061, A7075, SS304,
SS316, Inconel X-750 and Viton
Seals: Viton standard. Kalrez, Chemraz,
Perlast and other materials available
Body and plate surface treatment
Bare aluminum standard.
Hard Type III anodizing optional
Compressed air source
CDA or equivalent at 65 to 85 psig
Differential pressure
With valve fully sealed: 1.02 bar
maximum across the valve plate
While opening the valve
20 mbar (DN160 and DN200)
24 mbar (DN250)
29 mbar (DN350)
Operating pressure: 3.8 × 10 -8 to 1000 mbar
Heating or bakeout capabilities
Body: 150ºC maximum with
optional heater kits
Actuator: 60ºC maximum
Nor-Cal Products’ pneumatically actuated
isolation pendulum valves contain the same patented Penduroll mechanism that is found in the
Intellisys throttling pendulum valves. These valves
offer the user a highly reliable, compact and low
cost alternative to competitive designs. In addition,
the smooth actuation results in low particle
generation and rapid open-to-close speeds.
In-situ serviceability of the valve is made possible
through the incorporation of a removable bonnet
cover. The entire gate assembly and sealing O-ring
can be accessed without removing the valve from
the system, making regular inspections, cleanings
and O-ring replacements quick and easy.
The valve body can be heated to 150ºC with
optional heater jackets. Call for information
and pricing.
Heated pendulum valve assembly in our 3000 square foot Class 1000 clean room
Isolation Pendulum Valves
Ambient operating temps: 0 - 60ºC
MODEL
NUMBER
Helium Leak rate: <10 -9 mbar l/sec
across seat and to atmosphere
(1 × 10 -6 mbar·l/sec He for
hard anodized body or gate)
IPV-600-ISO-160
IPV-800-ISO-200
IPV-1000-ISO-250
IPV-1200-ISO-320
IPV-1400-JIS-350
IPV-1600-ISO-400
Maximum speed: Customer adjustable
depending on size
Reliability: 99% confidence level
in clean environment
O-ring cycle life: 200K cycles open
to fully closed
MTBF: >10,000 hrs. continuous operation
NOMINAL
ID
6 (150)
8 (200)
10 (254)
12 (300)
14 (350)
16 (400)
A
3.15 (80)
3.46 (88)
3.94 (100)
4.72 (120)
4.92 (125)
5.91 (150)
B
3.78 (96)
3.78 (96)
3.78 (96)
4.06 (103)
4.06 (103)
5 (127)
C
D
15.9 (404)
19.9 (505)
23.8 (605)
30.2 (767)
32.3 (820)
36 (914)
12.2 (310)
14.4 (366)
16.6 (422)
22 (559)
22 (559)
24.7 (627)
E
5.32 (135)
6.5 (165)
8.46 (215)
10.6 (269)
12.2 (310)
12.8 (325)
F
5.87 (149)
5.28 (134)
5.47 (139)
7.24 (184)
7.64 (194)
7.83 (199)
WEIGHT
IN LBS.
G
8.5 (216)
9.29 (236)
9.49 (241)
12.8 (325)
12.8 (325)
15 (381)
40 lbs.
49 lbs.
62 lbs.
123 lbs.
143 lbs.
231 lbs.
Note: Other sizes and flange configurations available. Call for details. See page 141 for bolt hole specifications. N-MxL
Options: Heater jackets, other O-ring materials
and flange configurations available
C
E
(Maintenance Space)
G
JIS Flange O-Rings
SIZE
O-RINGS
350
OR-JIS-350
D
Position R
(Default)
N-MxL
F
Position T
B
A
122
3
Isolation Valves
SECTION 3.8
Gate Valve General Information & Options
Nor-Cal stainless steel gate valves share with our poppet valves
the innovative design, highest grade materials and superior
workmanship that has made us a major supplier of valves to the
vacuum industry. The estimated service interval on these valves
is 100,000 cycles, depending on the application.
Our gate valves have an ultra-slim profile which makes them
perfect for applications where space is limited, and their smaller
volume results in lower outgassing and faster pumpdown.
Larger sizes have a unique feature in the actuator which dampens the vibration which can arise when the gate is opened. This
makes these valves ideal for semiconductor and other vibration
sensitive processes. The carriage assembly and actuator can be
removed without disassembling the body from the system for
easy maintenance. The 304 stainless steel bodies are vacuum
furnace brazed to 1100°C at 10-6 mbar before being electropolished inside and out. The welded AM-350 bellows have a
short stroke for a longer cycle life.
Nor-Cal gate valves are available with NW (ISO-KF), ISO (clamp
and bolt type), CF and ASA flanges in port sizes from 5 / 8 to 12
inches (16-300). Larger sizes are available upon request. Choose
from manual or pneumatic actuation and Viton or copper seal
bonnet.
Nor-Cal gate valves with Viton seal bonnet and gate and standard
Reed-switch position indicators are bakeable to 150°C, as long as
the actuator is not baked above 60°C. A gate valve with copper
seal bonnet, Viton gate and micro-switch option can be baked to
200°C, except for the actuator. With the air solenoid and position indicators removed, a copper seal bonnet valve with high
temperature Kalrez gate O-ring can be baked to 250°C with the
gate in the open position. Silicone heater jackets for bakeouts up
to 200°C can be provided. Please call for pricing.
Gate Valve Options
One or more options can be ordered by adding the option
suffix to the basic valve model number. Please add the option
suffixes in the following order:
Valve Model Number
Micro-Switch
O-ring Type
SPECIFICATIONS
General
Nominal IDs: 5 / 8 to 12 inch (16 to 300)
Materials
Body: 304 SS vacuum furnace brazed body
Bellows: Welded AM-350
O-ring: Viton (standard)
Finish: Electropolished inside and out
Maximum pressure differential
At opening: 20 mbar
Closed: 1000 mbar in either direction
Vacuum range
Viton Seal Bonnet: >10 -9 mbar
Copper Seal Bonnet: >10 -10 mbar
Temperature range
Viton Seal Bonnet: <150°C
Copper Seal Bonnet: <200°C with CF
flanges and gate in open position
Pneumatically actuated:
Air-to-Open, Air-to-Close (standard)
80 psig (5.5 bar) max. air pressure
(Higher operating pressures available upon
request)
Position indicator:
Reed-switch position indicator, standard
on 1.5” (38) and larger valves
Manually actuated
Acme threads for fewer turns
available. Call for information and pricing
Options:
• Air solenoid
• Microswitch position indicator
• O-ring compounds
• Spring-to-Close Option
• Million Cycle Option
• High pressure air actuator
Air Solenoid
Example: GVMP-4002-CF-KT-S22
Micro-Switch
O-rings
OPTION
COMPOUND
Standard
-KT
-KC
-CR
-S
Viton
Kalrez 4079
Kalrez 2037
Chemraz 513
Silicone
TEMPERATURE
MIN. MAX.
DESCRIPTION
-29ºC
-50ºC
-54ºC
-30ºC
-55ºC
Industry standard
High temperatures
Chemical resistant.
Chemical resistant
Extreme temperatures
204ºC
316ºC
220ºC
210ºC
232ºC
Air Solenoids
OPTION
-S12
-S22
-S32
-S42
OPTION
-M
Micro-switches are available on all pneumatically
actuated Nor-Cal valves.
One switch closes when the valve is fully open and the
other when it is fully closed. These can be connected
to control panels with alarms or lights for positive
position indication.
DESCRIPTION
4-way, 120V AC, 60 Hz
4-way, 24V DC
4-way, 240V AC, 50/60 Hz
4-way, 24V AC, 50/60 Hz
Air solenoids require 4 watts of power to actuate. Solenoids are mounted on all Viton
seal bonnet gate valves with 4 inch (100) ID and larger. Solenoids for Viton seal bonnet
gate valves with under 4 inch (100) ID and all sizes of copper seal gate valves are shipped
unmounted with the valve.
Silicone heater jackets for bakeouts up to
200°C can be provided for all gate valves.
(See page 127 for details.)
123
3
SECTION 3.8
Isolation Valves
Gate Valves
Manually Operated Viton Seal Gate Valves
MODEL
NUMBER
NOM.
ID
FLANGE
L/SEC
TYPE
(molecular)
A
B
C
D
E
Materials
GV-0622-NW
GV-0622-CF
GV-1502-NW
GV-1502-CF
GV-2002-NW
GV-2002-CF
GV-2502-CF
GV-2502-ASA
GV-2502-ISO
GV-2502-ISO-OF
GV-3002-CF
GV-3002-ASA
GV-3002-ISO
GV-3002-ISO-OF
GV-4002-CF
GV-4002-ASA
GV-4002-ISO
GV-4002-ISO-OF
GV-6002-CF
GV-6002-ASA
GV-6002-ISO
GV-6002-ISO-OF
GV-8002-CF
GV-8002-ASA
GV-8002-ISO
GV-8002-ISO-OF
GV-10002-CF
GV-10002-ASA
GV-10002-ISO
GV-10002-ISO-OF
GV-12002-CF
GV-12002-ASA
GV-12002-ISO
*Note: All ASA flanged valves are provided without O-ring grooves. Grooves can be provided on request.
At opening: 20 mbar
Manually Operated Copper Seal Bonnet Gate Valves
SPECIFICATIONS
General
Vacuum range
Viton seal bonnet: >10 -9 mbar
Copper seal bonnet: >10 -10 mbar
Temperature range
Viton Seal Bonnet: <150°C
Copper Seal Bonnet: <200°C with
CF flanges and gate in open position
Manually actuated
Acme threads for fewer turns
Options:
• Heater Jackets
MODEL
NUMBER
GVM-0622-CF
GVM-1502-CF
GVM-2002-CF
GVM-2502-CF
GVM-3002-CF
GVM-4002-CF
GVM-6002-CF
GVM-8002-CF
GVM-10002-CF
GVM-12002-CF
5/8 (16)
5/8 (16)
11/2 (38)
11/2 (38)
2 (50)
2 (50)
21/2 (63)
21/2 (63)
21/2 (63)
21/2 (63)
3 (76)
3 (76)
3 (76)
3 (76)
4 (100)
4 (100)
4 (100)
4 (100)
6 (150)
6 (150)
6 (150)
6 (150)
8 (200)
8 (200)
8 (200)
8 (200)
10 (254)
10 (254)
10 (254)
10 (254)
12 (300)
12 (300)
12 (300)
NOM.
ID
NW-16
1.33 CF
NW-40
2.75 CF
NW-50
3.38 CF
4.50 CF
ASA-6*
ISO-63
ISO-63-OF
4.62 CF
ASA-7.5*
ISO-80
ISO-80-OF
6.00 CF
ASA-9*
ISO-100
ISO-100-OF
8.00 CF
ASA-11*
ISO-160
ISO-160-OF
10.00 CF
ASA-11*
ISO-200
ISO-200-OF
12.00 CF
ASA-16*
ISO-250
ISO-250-OF
14.00 CF
ASA-16*
ISO-320
12
12
98
130
220
300
520
610
610
320
840
1,070
1,070
550
1,700
2,100
2,100
1,400
5,400
7,100
7,100
4,000
12,200
14,500
15,200
9,500
24,900
24,800
26,900
15,400
34,600
42,800
42,800
FLANGE
L/SEC
(molecular)
TYPE
5/8 (16)
1.33 CF
12
11/2 (38)
2 (50)
21/2 (63)
3 (76)
4 (100)
6 (150)
8 (200)
10 (254)
12 (300)
2.75 CF
3.38 CF
4.50 CF
4.62 CF
6.00 CF
8.00 CF
10.00 CF
12.00 CF
14.00 CF
130
300
520
840
1,700
5,400
12,200
24,900
34,600
2.39 (61)
2.39 (61)
4.69 (119)
4.69 (119)
5.60 (142)
5.60 (142)
6.50 (165)
6.50 (165)
6.50 (165)
6.50 (165)
7.70 (196)
7.70 (196)
7.70 (196)
7.70 (196)
10.76 (273)
10.76 (273)
10.76 (273)
10.76 (273)
14.07 (357)
14.07 (357)
14.07 (357)
14.07 (357)
18.42 (468)
18.42 (468)
18.42 (468)
18.42 (468)
24.04 (611)
24.04 (611)
24.04 (611)
24.04 (611)
28.89 (734)
28.89 (734)
28.89 (734)
1.75 (44)
1.75 (44)
3.40 (86)
3.40 (86)
4.12 (105)
4.12 (105)
4.81 (122)
4.81 (122)
4.81 (122)
4.81 (122)
5.77 (147)
5.77 (147)
5.77 (147)
5.77 (147)
8.13 (207)
8.13 (207)
8.13 (207)
8.13 (207)
10.64 (270)
10.64 (270)
10.64 (270)
10.64 (270)
13.93 (354)
13.93 (354)
13.93 (354)
13.93 (354)
18.30 (465)
18.30 (465)
18.30 (465)
18.30 (465)
22.03 (560)
22.03 (560)
22.03 (560)
A
2.96 (75.2)
1.56 (39.6)
1.99 (50.6)
2.03 (51.6)
1.99 (50.6)
2.28 (57.9)
2.40 (61.0)
2.03 (51.6)
2.03 (51.6)
3.46 (87.9)
2.53 (64.3)
2.03 (51.6)
1.97 (50.0)
3.84 (97.5)
2.97 (75.4)
2.41 (61.2)
2.41 (61.2)
4.25 (108)
3.17 (80.5)
2.41 (61.2)
2.36 (59.9)
4.25 (108)
3.35 (85.1)
2.76 (70.1)
2.66 (67.5)
4.25 (108)
3.65 (92.7)
3.15 (80.0)
3.15 (80.0)
5.51 (140)
3.89 (98.8)
3.15 (80.0)
3.15 (80.0)
B
1.49 (38)
1.49 (38)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
3.11 (79)
3.11 (79)
3.11 (79)
3.11 (79)
3.11 (79)
3.11 (79)
3.11 (79)
3.11 (79)
3.11 (79)
3.11 (79)
3.11 (79)
3.11 (79)
8.98 (228)
8.98 (228)
8.98 (228)
8.98 (228)
8.98 (228)
8.98 (228)
8.98 (228)
C
D
1.80 (46)
1.80 (46)
3.61 (92)
3.61 (92)
3.61 (92)
3.61 (92)
3.61 (92)
3.61 (92)
3.61 (92)
3.61 (92)
3.61 (92)
3.61 (92)
3.61 (92)
3.61 (92)
7.90 (201)
7.90 (201)
7.90 (201)
7.90 (201)
7.90 (201)
7.90 (201)
7.90 (201)
7.90 (201)
7.90 (201)
7.90 (201)
7.90 (201)
7.90 (201)
12.00 (305)
12.00 (305)
12.00 (305)
12.00 (305)
12.00 (305)
12.00 (305)
12.00 (305)
E
F
1.88 (48)
1.88 (48)
3.31 (84)
3.31 (84)
3.81 (97)
3.81 (97)
4.37 (111)
4.37 (111)
4.37 (111)
4.37 (111)
4.94 (125)
4.94 (125)
4.94 (125)
4.94 (125)
7.00 (178)
7.00 (178)
7.00 (178)
7.00 (178)
8.75 (222)
8.75 (222)
8.75 (222)
8.75 (222)
11.25 (286)
11.25 (286)
11.25 (286)
11.25 (286)
13.44 (341)
13.44 (341)
13.44 (341)
13.44 (341)
15.9 (404)
15.9 (404)
15.9 (404)
F
G
2.39 (61)
1.75 (44)
1.56 (39.6)
1.49 (38)
1.80 (46)
1.88 (47.8)
1.31 (33)
4.69 (119)
5.60 (142)
6.50 (165)
7.70 (196)
10.76 (273)
14.07 (357)
18.42 (468)
24.04 (611)
28.89 (734)
3.40 (86)
4.12 (105)
4.81 (122)
5.77 (147)
8.13 (207)
10.64 (207)
13.93 (354)
18.30 (465)
22.03 (560)
2.03 (51.6)
2.28 (57.9)
2.40 (61.0)
2.53 (64.3)
2.97 (75.4)
3.17 (80.5)
3.35 (85.1)
3.65 (92.7)
3.89 (98.8)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
3.11 (79)
3.11 (79)
3.11 (79)
8.98 (228)
8.98 (228)
3.57 (91)
3.61 (92)
3.61 (92)
3.61 (92)
7.90 (201)
7.90 (201)
7.90 (201)
12.12 (308)
12.12 (308)
3.31 (84.1)
3.81 (96.8)
4.37 (111)
5.24 (133)
7.00 (178)
8.75 (222)
11.25 (286)
13.44 (341)
15.90 (404)
2.45 (62)
2.96 (75)
3.52 (89)
4.28 (109)
5.65 (144)
7.55 (192)
10.02 (255)
11.99 (305)
14.28 (363)
D
F
E
Handles
extend on all
10" and 12"
manual gate
valves
B
A
To order gate valve replacement O-rings, pin
and bearing kits or O-ring/gasket kits, you must
provide us with your valve’s serial number.
G
124
G
1.31 (33)
1.31 (33)
2.45 (62)
2.45 (62)
2.96 (75)
2.96 (75)
3.52 (89)
3.52 (89)
3.52 (89)
3.52 (89)
4.28 (109)
4.28 (109)
4.28 (109)
4.28 (109)
5.65 (144)
5.65 (144)
5.65 (144)
5.65 (144)
7.55 (192)
7.55 (192)
7.55 (192)
7.55 (192)
10.02 (255)
10.02 (255)
10.02 (255)
10.02 (255)
11.99 (305)
11.99 (305)
11.99 (305)
11.99 (305)
14.28 (363)
14.28 (363)
14.28 (363)
C
3
Isolation Valves
SECTION 3.8
Gate Valves
Pneumatically Actuated Viton Seal Gate Valves
MODEL
NUMBER
NOM.
ID
GVP-0622-NW
GVP-0622-CF
GVP-1502-NW
GVP-1502-CF
GVP-2002-NW
GVP-2002-CF
GVP-2502-CF
GVP-2502-ASA
GVP-2502-ISO
GVP-2502-ISO-OF
GVP-3002-CF
GVP-3002-ASA
GVP-3002-ISO
GVP-3002-ISO-OF
GVP-4002-CF
GVP-4002-ASA
GVP-4002-ISO
GVP-4002-ISO-OF
GVP-6002-CF
GVP-6002-ASA
GVP-6002-ISO
GVP-6002-ISO-OF
GVP-8002-CF
GVP-8002-ASA
GVP-8002-ISO
GVP-8002-ISO-OF
GVP-10002-CF
GVP-10002-ASA
GVP-10002-ISO
GVP-10002-ISO-OF
GVP-12002-CF
GVP-12002-ASA
GVP-12002-ISO
FLANGE
L/SEC
(molecular)
TYPE
5/8 (16)
NW-16
5/8 (16)
1.33 CF
11/2 (38)
NW-40
11/2 (38)
2.75 CF
2 (50)
NW-50
2 (50)
3.38 CF
4.50 CF
21/2 (63)
ASA-6*
21/2 (63)
ISO-63
21/2 (63)
21/2 (63) ISO-63-OF
3 (76)
4.62 CF
3 (76) ASA-7.5*
3 (76)
ISO-80
3 (76) ISO-80-OF
4 (100)
6.00 CF
4 (100)
ASA-9*
4 (100)
ISO-100
4 (100) ISO-100-OF
6 (150)
8.00 CF
6 (150)
ASA-11*
6 (150)
ISO-160
6 (150) ISO-160-OF
8 (200) 10.00 CF
8 (200)
ASA-11*
8 (200)
ISO-200
8 (200) ISO-200-OF
10 (254) 12.00 CF
10 (254)
ASA-16*
10 (254)
ISO-250
10 (254) ISO-250-OF
12 (300) 14.00 CF
12 (300)
ASA-16*
12 (300)
ISO-320
12
12
98
130
220
300
520
610
610
320
840
1,070
1,070
550
1,700
2,100
2,100
1,400
5,400
7,100
7,100
4,000
12,200
14,500
15,200
9,500
24,900
24,800
26,900
15,400
34,600
42,800
42,800
A
B
2.39 (61)
2.39 (61)
4.69 (119)
4.69 (119)
5.60 (142)
5.60 (142)
6.50 (165)
6.50 (165)
6.50 (165)
6.50 (165)
7.7 (196)
7.7 (196)
7.7 (196)
7.7 (196)
10.76 (273)
10.76 (273)
10.76 (273)
10.76 (273)
14.07 (357)
14.07 (357)
14.07 (357)
14.07 (357)
18.42 (468)
18.42 (468)
18.42 (468)
18.42 (468)
24.04 (611)
24.04 (611)
24.04 (611)
24.04 (611)
28.89 (734)
28.89 (734)
28.89 (734)
C
1.75 (44)
1.75 (44)
3.40 (86)
3.40 (86)
4.12 (105)
4.12 (105)
4.81 (122)
4.81 (122)
4.81 (122)
4.81 (122)
5.77 (147)
5.77 (147)
5.77 (147)
5.77 (147)
8.13 (207)
8.13 (207)
8.13 (207)
8.13 (207)
10.64 (270)
10.64 (270)
10.64 (270)
10.64 (270)
13.93 (354)
13.93 (354)
13.93 (354)
13.93 (354)
18.30 (465)
18.30 (465)
18.30 (465)
18.30 (465)
22.03 (560)
22.03 (560)
22.03 (560)
2.96 (75.2)
1.56 (39.6)
1.99 (50.6)
2.03 (51.6)
1.99 (50.6)
2.28 (57.9)
2.40 (61.0)
2.03 (51.6)
2.03 (51.6)
3.46 (87.9)
2.53 (64.3)
2.03 (51.6)
1.97 (50.0)
3.84 (97.5)
2.97 (75.4)
2.41 (61.2)
2.41 (61.2)
4.25 (108)
3.17 (80.5)
2.41 (61.2)
2.36 (59.9)
4.25 (108)
3.35 (85.1)
2.76 (70.1)
2.66 (67.6)
4.25 (108)
3.65 (92.7)
3.15 (80.0)
3.15 (80.0)
5.51 (140)
3.89 (98.8)
3.15 (80.0)
3.15 (80.0)
D
1.00 (25)
1.00 (25)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.97 (75)
2.97 (75)
2.97 (75)
2.97 (75)
2.97 (75)
2.97 (75)
2.97 (75)
2.97 (75)
2.97 (75)
2.97 (75)
2.97 (75)
2.97 (75)
4.75 (121)
4.75 (121.)
4.75 (121)
4.75 (121)
4.75 (121)
4.75 (121)
4.75 (121)
E
2.55 (65)
2.55 (65)
5.29 (134)
5.29 (134)
5.29 (134)
5.29 (134)
5.29 (134)
5.29 (134)
5.29 (134)
5.29 (134)
5.29 (134)
5.29 (134)
5.29 (134)
5.29 (134)
6.95 (177)
6.95 (177)
6.95 (177)
6.95 (177)
6.95 (177)
6.95 (177)
6.95 (177)
6.95 (177)
6.95 (177)
6.95 (177)
6.95 (177)
6.95 (177)
9.47 (241)
9.47 (241)
9.47 (241)
9.47 (241)
9.47 (241)
9.47 (241)
9.47 (241)
F
1.88 (48)
1.55 (39)
3.31 (84)
3.31 (84)
3.81 (97)
3.81 (97)
4.37 (111)
4.37 (111)
4.37 (111)
4.37 (111)
4.94 (125)
4.94 (125)
4.94 (125)
4.94 (125)
7.00 (178)
7.00 (178)
7.00 (178)
7.00 (178)
8.75 (222)
8.75 (222)
8.75 (222)
8.75 (222)
11.25 (286)
11.25 (286)
11.25 (286)
11.25 (286)
13.44 (341)
13.44 (341)
13.44 (341)
13.44 (341)
15.90 (404)
15.90 (404)
15.90 (404)
G
1.31 (33)
1.31 (33)
2.45 (62)
2.45 (62)
2.96 (75)
2.96 (75)
3.52 (89)
3.52 (89)
3.52 (89)
3.52 (89)
4.28 (109)
4.28 (109)
4.28 (109)
4.28 (109)
5.65 (144)
5.65 (144)
5.65 (144)
5.65 (144)
7.55 (192)
7.55 (192)
7.55 (192)
7.55 (192)
10.02 (255)
10.02 (255)
10.02 (255)
10.02 (255)
11.9 (305)
11.9 (305)
11.9 (305)
11.9 (305)
14.28 (363)
14.28 (363)
14.28 (363)
*Note: All ASA flanged valves are provided without O-ring grooves. Grooves can be provided on request
Pneumatically Actuated Copper Seal Bonnet Gate Valves
MODEL
NUMBER
NOM.
ID
GVMP-0622-CF
GVMP-1502-CF
GVMP-2002-CF
GVMP-2502-CF
GVMP-3002-CF
GVMP-4002-CF
GVMP-6002-CF
GVMP-8002-CF
GVMP-10002-CF
GVMP-12002-CF
5/8 (16)
11/2 (38)
2 (50)
21/2 (63)
3 (76)
4 (100)
6 (150)
8 (200)
10 (254)
12 (300)
FLANGE
L/SEC
TYPE
(molecular)
1.33 CF
2.75 CF
3.38 CF
4.50 CF
4.62 CF
6.00 CF
8.00 CF
10.00 CF
12.00 CF
14.00 CF
12
130
300
520
840
1,700
5,400
12,200
24,900
34,600
A
B
2.39 (61)
4.69 (119)
5.6 (142)
6.5 (165)
7.7 (196)
10.76 (273)
14.07 (357)
18.42 (468)
24.04 (611)
28.89 (734)
C
1.75 (44)
3.4 (86)
4.12 (105)
4.81 (122)
5.77 (147)
8.13 (207)
10.64 (270)
13.93 (354)
18.3 (465)
22.03 (560)
1.56 (39.6)
2.03 (51.6)
2.28 (57.9)
2.4 (61.0)
2.53 (64.3)
2.97 (75.4)
3.17 (80.5)
3.35 (85.1)
3.65 (92.7)
3.89 (98.8)
D
1.00 (25)
2.00 (50)
2.00 (50)
2.00 (50)
2.00 (50)
2.97 (75)
2.97 (75)
2.97 (75)
4.75 (121)
4.75 (121)
E
2.55 (65)
5.29 (134)
5.29 (134)
5.29 (134)
5.29 (134)
6.95 (177)
6.95 (177)
6.95 (177)
9.47 (241)
9.47 (241)
D
F
E
F
1.88 (48)
3.31 (84)
3.81 (97)
4.37 (111)
5.24 (133)
7.00 (178)
8.75 (222)
11.25 (286)
13.44 (341)
15.9 (404)
G
1.31 (33)
2.45 (62)
2.96 (75)
3.52 (89.4)
4.28 (109)
5.65 (144)
7.55 (192)
10.02 (255)
11.99 (305)
14.28 (363)
SPECIFICATIONS
General
Materials
At opening: 20 mbar
Vacuum range
Viton seal bonnet: >10 -9 mbar
Copper seal bonnet: >10 -10 mbar
Temperature range
Viton seal bonnet: <150°C
Copper seal bonnet: <200°C with CF flanges
and gate in open position
Pneumatically actuated:
Air-to-Open, Air-to-Close (standard)
80 psig (5.5 bar) max. air pressure
(Higher operating pressures available upon
request)
Position indicator:
Reed-switch position indicator, standard
on 1.5” (38) and larger valves
Options:
• Air solenoid
• Microswitch position indicator
• High pressure air actuator
• Heater Jackets
B
A
To order gate valve replacement O-rings, pin
and bearing kits or O-ring/gasket kits, you
must provide us with your valve’s serial number.
G
C
125
3
Isolation Valves
SECTION 3.9
Bellowless Poppet Valves & Leak Valves
Pneumatic Bellowless Angle Valves
Right angle bellowless poppet valves are now available in sizes from 3 / 8 thru 11/2 inches (9.53-38.1). These valves are typically used
for applications with large differential pressures, extremely high cycle rates or “dirty” processes that cause frequent bellows failures.
Poppet shafts are sealed with double O-rings. Heater jackets and other port and flange configurations are available on request.
MODEL
NUMBER
ESVP-0382-NWB-5
ESVP-0752-NWB-5
ESVP-1002-NWB-5
ESVP-1502-NWB-5
NOMINAL
PORT OD
FLANGE
TYPE
L/SEC
(molecular)
3/8 (10)
NW-10B
NW-16B
NW-25B
NW-40B
0.66
5.00
12.00
128.00
3/4 (19)
1 (25)
11/2 (38)
A
1.65 (41.9)
2.15 (54.6)
2.03 (51.6)
2.40 (61.0)
B
3.77 (96)
4.27 (108)
4.03 (102)
5.13 (130)
C
5.92 (150)
6.41 (163)
6.17 (157)
7.71 (196)
D
2.25 (57)
2.25 (57)
2.25 (57)
3.00(76)
D
Replacement O-Ring & Valve Rebuild Kits
SPECIFICATIONS
Nominal Port ODs: 3 / 8 to 11/ 2 inches (10 to
38)
MODEL
NUMBER
NOMINAL
PORT OD
Materials
Bonnet seal: Viton
Poppet seal: Viton
ESVP-075-95-5
ESVP-150-95-5
3/8-1 (10-25)
ESVP-075-99-5
3/8-1 (10-25)
ESVP-150-99-5
11/2 (38)
C
3/ 8 to 11/2 inch (10 to 38) ODs: Air-to-open,
spring-to-close
See page 101 for actuation options
11/2 (38)
DESCRIPTION
O-ring kit
O-ring kit
Complete rebuild kit, includes all valve parts except
valve body
Complete rebuild kit, includes all valve parts except
valve body
B
A
Differential pressure
Port side: Maximum 100 psig (7 bar)
Poppet: Maximum 6psi (0.4 bar)
differential across the valve seat.
A
Sustained: <150°C
Vacuum range: >1x 10-9 mbar - High Vacuum
SPECIFICATIONS
Materials
Flanges
Inlet: 1.33 CF, rotatable,
clearance bolt holes
Outlet: 2.75 CF, nonrotatable,
clearance bolt holes
Poppet: Sapphire
Poppet seat: Copper
Actuation: Manual, adjustable set point
Leak Valves
Leak valves are used for controlling gas introduction into high- and ultra-high vacuum systems. They utilize an optically flat sapphire
poppet and a metal seal seat, allowing bakeout temperatures to 450ºC. These valves are manually actuated by a cantilever arm with
precision adjustment threads. The adjustment knobs can be set to allow controlled leak rates as small as 1x10 -10 mbar l/sec.
Replacement sapphire and gasket assemblies are available. Call for pricing.
MODEL
NUMBER
LL-275-133
Maximum temperature
Sustained: <250°C
Vacuum range:
1.750
(44.45)
>1x 10 -11 mbar - UHV
Minimum leak rate
Normal: 1x10 -10 mbar l/sec.
Non-condensible gas: 1x10 -8 mbar l/sec.
Inlet gas pressure: maximum 500 psig
(34 bar)
Poppet seat life
Unbaked: 250 to 300 closures
<250ºC: 80 to 100 closures
<450ºC: 20 to 30 closures
4.350 Rotatable
(110.49)
1.298
(32.97)
Nonrotatable
126
1.717
(43.61)
1.190
(30.23)
3
Isolation Valves
SECTION 3.10
Isolation Valve Heaters
Poppet Valve, Ball Valve and Gate Valve Heaters
Many semiconductor processes are
carried out in vacuum chambers with
internal temperatures of several hundred
degrees Celsius. Process by-products exit
the chamber in vapor phase, but sublimate in the foreline and vacuum pump
exhaust when gas temperatures drop
sufficiently for them to form solids. The
resultant buildup can increase wafer
defects from particle backstreaming,
reduce throughput of vacuum lines,
impede the function of throttle valves
and isolation valves, damage some dry
pumps and reduce the efficiency of the
scrubber. This buildup can be reduced
or eliminated by heating vacuum lines
and associated components from the
chamber to the scrubber, or by using a
combination of heaters and foreline traps,
which collect the by-products preventing
them from continuing downstream.
Heater jackets with a UL recognized
electronic thermostat for fixed set-point
applications is available for temperatures
up to 150ºC. For fully adjustable
temperature set-points up to 200 ºC,
a UR/CE certified heater with a Type K
thermocouple and PID controller can provide precise temperature control.
Standard ½” insulation add-on heaters
are available for all poppet valves and gate
valves. (Aluminum Genesis valves have
their own integrated heater.) These can
be purchased and installed separately
provided that the valve is fitted with the
proper high temperature seals and other
thermally compatible components.
Heater Jacket Part Number and Ordering Information
Please use the following part numbering tree to specify the heater jacket to fit your poppet
valve or gate valve.
Note: All part number combinations may not be valid or available. Contact Nor-Cal
Products for the latest pricing, availability and other options.
Control Type
CONTROL
TYPE
CODE
PID control*
Electronic thermostat
* Requires separate PID controller.
(See controllers Section 6.)
HC
HTE
Angle-in-line
Manual Ball valve
Pneumatic Ball Valve
Angle valve
SS Genesis (stainless steel)
SS Genesis angle-in-line
Gate valve with CF flange
Gate valve with ISO flange
In-line valve
N-Series angle
N-Series angle-in-line
Valve Type
Valve Size
Valve Type
VALVE
TYPE
Control Type
CODE
AIV
BVM
BVP
ESV
GNVS
GNVSAI
GVC
GVI
ILV
NAP
NAIP
VALVE
SIZE
0.38 (10)
0.50 (13)
0.75 (19)
1.00 (25)
1.50 (38)
2.00 (50)
2.50 (63)
3.00 (76)
4.00 (100)
6.00 (150)
8.00 (200)
10.00 (254)
Valve Size
Temp. / Voltage
Temperature/Voltage
CODE
038
050
075
100
150
200
250
300
400
600
800
1000
TEMPERATURE
& VOLTAGE
HC type, 120 VAC
HC Type, 208 VAC
HTE type, 90ºC, 120 VAC
CODE
201
202
091
092
121
122
151
152
Example: HTE-NAP-150-091
Electronic thermostatically controlled heater jacket for 1.5 inch (38) N-Series
angle valve, 90ºC, 120VAC.
127
3
SECTION 3.11
Isolation Valves
Bakeable All Metal Valves
Nor-Cal’s metal seal angle valves are
intended for use in UHV or cryogenic
applications where temperature extremes
preclude the use of our elastomer seal
valves. Approved for use in beamline
facilities, these valves have a temperature
operating range from -250°C to 400°C.
Heater jackets and controllers are
available on request.
The pulled-port method is used for
the fabrication of the stainless steel
bodies resulting in higher conductance
and better cleanliness. Heater jackets
and controllers are available on request.
The life of the copper poppet seal is
dependent upon the temperature at
which the valve is used. Maximum
temperature bakeouts may require copper
poppet seal replacement after 50 cycles,
while hundreds of cycles are possible
with moderate bakeouts. As many as
10,000 cycles have been obtained
from the same seal during testing.
A dial indicator at the top of the valve
indicates the proper torque for closure
and also when the seal should be replaced.
The copper poppet seal is easily replaced
by opening the valve with a slotted screw
driver. The seal is removed through the
side port and a new one replaced in a
like manner. After seal replacement the
valve must be torqued to a higher value
than during normal operation to make it
seat. Do not exceed the maximum torque
SPECIFICATIONS
Port ODs: 3 / 4 and 11/ 2 inch (19 to 38)
Finish: Electropolished
Assembly: Clean room
Materials
Pulled port body: 304 stainless steel
Bellows: Formed 321 stainless steel
Poppet seal: OFHC Copper
MODEL
NUMBER
AMV-0752-CF
AMV-1502-CF
specifications. (See torque specifications table.) After closing the valve to its
normal torque value loosen the set screw
below the closure nut, rotate the indicator to the furthest counter-clockwise line
on top of the valve and retighten the set
NOMINAL
PORT OD
FLANGE
TYPE
3/4 (19)
Rotatable 1.33 CF
Rotatable 2.75 CF
11/2 (38)
CONDUCTANCE (L/sec )
MOLECULAR VISCOUS
3
10
56
356
screw. The valve may be closed to this
mark indefinitely. Periodic checks with a
torque wrench will indicate seat wear
and the proper mark to use for alignment.
When the indicator has reached the last
mark we recommend seal replacement.
A
(OPEN)
B
C
1.50 (38)
2.45 (62)
5.40 (137)
6.87 (175)
1.50 (38)
1.50 (38)
NOTE: Port lengths that match other manufacturers’ products are available upon request.
C
Closure nut
Actuation: Manual using self-lubricating
bronze nuts with ACME threads
Replacement Seals
Indicator collar
with set screw
Operating temperature: -250ºC to 400ºC
Maximum bakeout temperature
Open: 400°C
Closed: 300°C
321 stainless steel bellows
MODEL
NUMBER
NOMINAL
PORT OD
AMV-075-95
AMV-150-95
Copper poppet seal
Vacuum rated: >1x 10 -10 mbar - UHV
0.75 (19)
1.50 (38)
Helium leak rate: <10 -10 mbar l/sec.
B
S.S. knife
edge seal
Side Port
Torque Specifications
MODEL
NUMBER
A
AMV-075-CF
AMV-150-CF
SEATING NORMAL
Nm
6.8
13.6
MAXIMUM
Nm
5.6
11.3
A
Bottom Port
128
Nm
13.6
22.6

Section 3 - Valves - Nor

Transcription

Similar documents

Maxseal Solenoid Valves

ADDITIONAL 1.2mm PLATES

Diagnos-Techs, Inc.

Aceco Components Guide