SERC Nanofabrication and Characterisation (SNFC) Pamphlet

A platform facilitating ideas and innovations
The SERC (Science and Engineering Research Council) nano Fabrication, Processing
and Characterisation (SnFPC) platform aims to make the extensive research facilities
at the Agency for Science, Technology and Research (A*STAR) accessible to all
researchers. The facility at the Institute of Materials Research and Engineering
(IMRE) forms the hub of a wide network and provides easy access to a wide range
of micro/nano fabrication and material characterisation techniques and the related
expertise.
SnFPC AT IMRE
The SnFPC group manages the maintenance and operation of the relevant IMRE
facilities, and encourages researchers from other organisations to base associated
research projects here.
The IMRE facilities include a large clean room which is purpose-built for research work
into a variety of different materials, and an impressive range of major equipment.
SnFPC employs dedicated staff that are trained and experienced in the use of its
specialist equipment. These staff are on hand to train and assist new users of such
facilities, offer the service of baseline processes and characterisation as well as to
contribute in research projects whenever necessary.
SCOPE AND OBJECTIVES
• SnFPC encompasses a network of world-class facilities and expertise from
across the SERC Research Institutes.
• SnFPC offers an extensive range of characterisation, nanofabrication services
and advice to all parties across Singapore.
• The range of baseline fabrication processes offered by SnFPC is constantly
being updated through the results of research projects across the SnFPC user
community.
• The dedicated facility staff are highly trained in the use of the equipment and its
associated processes.
• The SnFPC staff contribute as team members in research projects, for
consultancy or service work or to train new users on the equipment.
SnFPC is fully committed to provide efficient and excellent quality service in
nanofabrication and material characterisation.
Institute of
Materials Research
and Engineering
LIST OF FABRICATION EQUIPMENT
Deposition
• Plasma Enhanced Chemical Vapour
Deposition System (Nextral)
• Low Pressure Chemical Vapour Deposition
System (Centrotherm)
• RF/DC Sputtering System 1 (Denton)
• RF/DC Sputtering System 2 (Denton)
• Unbalanced Magnetron Sputtering System
(Nanofilm)
• E-Beam Evaporation System 1 (Edwards)
• E-Beam Evaporation System 2 (Edwards)
• Thermal Evaporation System (Edwards)
Dry Etching
• Shuttle Lock Inductive Coupled Plasma (ICP)
Etching System (Unaxis)
• DRIE/ICP Etching System (Oxford)
• RIE II Etching System (Oxford)
• RIE I Etching System (Trion Sirus)
• UV & Ozone Dry Stripper (Samco)
Patterning
• Mask & Bond Aligner, MA 8 (Karl Suss)
• Mask & Bond Aligner, MA 6 (Karl Suss)
• E-beam Direct Write Lithography System
(Elionix)
• Laser Pattern Generator (Heidelberg)
• HMDS/Image Reversal Oven (YES)
• Inkjet Printer (Litrex)
UltraViolet-assisted Rapid Thermal Annealing (UV-RTA)
Annealing
• Rapid Thermal Processing System
(Jipelec)
• Rapid Thermal Processing System
(Unaxis)
• Vacuum Furnace (Jipelec)
• Conventional Furnace
Metrology
• Optical Microscope (Olympus)
• Optical Microscope (Zeiss)
• Film Thickness Measurement
(Nanocalc)
• Surface Profiler (KLA-Tencor)
Backend Process
Meta
• Lapping & Polishing System (Logitech)
• Wafer Dicing System (Disco)
• Wire Bonding System
(K&S)
• Laser Ablation System
(ESI)
• Freeze Drying System
(Labconco)
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Inductively Coupled Plasma Etching
r De
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sition
LIST OF CHARACTERIsATION EQUIPMENT
Microscopy
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X-ray
Transmission Electron Microscope (Philips)
Transmission Electron Microscope (JEOL)
Field Emission Scanning Electron Microscope (JEOL)
Scanning Electron Microscope (JEOL)
Ion Miller (EAF)
Ion Miller (Fischione)
Focused Ion Beam Single Beam (FEI)
Focused Ion Beam Dual Beam (FEI)
Multimode AFM (Veeco)
Microtome (Leica)
Phot
oelec
tron
Spec
trosc
opy (
XPS)
Surface & X-ray Analysis
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Time 0f Flight - Secondary Ion Mass Spectrometer (ION)
GADDS Wide Angle XRD (Bruker)
MultiPurpose Diffractometer (Philips )
High Resolution XRD (PANalytical)
X-ray Photoelectron Spectroscopy (ESCALab)
X-ray Photoelectron Spectroscopy (Thetaprobe)
Spectroscopy
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Nuclear Magnetic Resonance (Bruker)
Nuclear Magnetic Resonance (Varian)
Fourier Transform Infrared Spectrometer (Perkin Elmer)
Fourier Transform Infra Red Spectrometer (Bruker)
Micro Raman System (Jobin Yvon)
Photoluminescence Mapping System (Accent)
UV-Visible-NIR Range Micro-Spectrophometer (Craic)
Variable Angle Spectroscopic Ellipsometry (Woollam)
CHNS-O Element Analyser (Flash)
Mechanical Analysis
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Universal Tester (Instron)
Zwick Mechanical Tester (Instron)
Microforce Tester (Instron)
Servohydraulic Universal Tester (Instron)
Impact Tester (Instron)
Nanoindentation System (UMIS)
Nano-Mechanical Probe (MTS)
Time of Flight - Secondary Ion Mass
Spectrometer (ToF - SIMS)
Thermal Analysis
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Thermo Gravimetric Analyzer (Perkin Elmer)
Thermo Gravimetric-Infra Red Analyzer (Perkin Elmer)
Micro Thermal Analyzer (Thermal Advantage)
Modulated Differential Scanning Calorimeter (TA instruments)
Photo Differential Scanning Calorimeter (TA instruments)
Dynamic Mechanical Analyzer (TA instruments)
Thermo Mechanical Analyzer (TA instruments)
Simultaneous DSC/TGA (TA instruments)
Electrical Analysis
• Hall Equipment (Accent)
• Electrochemical Capacitance Voltage Profiler
(Accent)
• I-V Measurement System (Agilent)
Others
• High Performance Liquid Chromatography (Waters)
• Gel Permeation Chromatography (Waters)
• Liquid Chromatography –Mass Spectrum
(Shimadzu)
• Gass Chromatography Mass Spectroscopy
(Varian)
• Rheometer (Rheometric)
• Viscometer (BrookField)
• Tensiometer (Kruss)
• Brunaeur, Emmet and Teller Analyzer
(Quantachrome Nova)
• Water Permeation system (Mocon)
• Contact Angle Goniometer (Rame-Hart)
High-Resolution X-ray Diffractometry
Na
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atio
ent
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About IMRE
At the Institute of Materials Research and Engineering (IMRE),
we are committed to high-quality, extensive materials research
and development to bring about the latest in innovation and
technology. We stand by the importance of materials research,
which represents a vital platform for building Singapore’s
competitive advantage in a knowledge-based economy.
Established in 1997, IMRE undertakes research in selected fields
of materials science and engineering, including optoelectronics,
nanomaterials, chemicals, and polymers. Our new innovations
and discoveries are constantly being explored to help further the
applications of advanced materials and processes.
IMRE is a member of the Agency for Science, Technology and
Research (A*STAR), and is closely linked with the National
University of Singapore (NUS) and Nanyang Technological
University (NTU).
We develop core competence and interdisciplinary teams in
critical technology areas, enabling fundamental new discoveries,
the development of advanced materials that lead to new
commercial products, and the transformation of various
technologies.
Partnering international organisations, research institutes
and industry in a synergistic, multidisciplinary and collaborative
approach to materials research further fulfils IMRE’s vision
to be the leading research institute for materials science and
engineering.
Institute of Materials Research and Engineering (IMRE)
A research institute of the Agency for Science, Technology and Research
3 Research Link, Singapore 117602
Tel: +65 6874 8111 Fax: +65 6872 0785
Email:[email protected]
www.imre.a-star.edu.sg
Published May 2012