AC SERVO DRIVES DIRECT DRIVE DYNASERV

AC SERVO DRIVES
DIRECT DRIVE
DYNASERV
Certified for
ISO9001 and
ISO14001
JQA-0422 JQA-EM0202
Proposing positioning solutions to support
the latest manufacturing equipment
Flat Profile Models: DR5H00
10 N∙m and 20 N∙m models with a thickness of 42 mm
40 N∙m model with a thickness of 62 mm
Absolute Model: DB5C
Built-in absolute encoder
2
Direct Drive
DYNASERV
High-accuracy and High-resolution Models: DM1
High absolute accuracy of ±15 arc seconds (DM1A,DM1B*)
High resolution of 4,096,000 pulses/rev (DM1A)
*: Except the DM1B-006
Large Center Aperture, High-speed, and High-torque
Models: DR1 , DR5
Large center aperture of ϕ 150 mm (DR1A, DR5A)
High speed (DR5 )
High torque up to max. 500 N∙m (DR5A)
3
DYNASERV
Direct Drive
Accurate Positioning
High resolution of up to 4,096,000 divisions per revolution.
This is equivalent to 1.5 µm at the tip of a 1,000 mm arm. Absolute
accuracy of ±15 arc seconds, repeatable accuracy of ±1 arc second.
Low Heat Generation and
Energy Saving
The magnetic circuit uses the hybrid method (magnetic bias method).
This allows achievement of powerful torque at low current and reduces
unnecessary heat generation, which contributes greatly to energy savings.
Employs I-PD control that is ideal for direct-drive motors.
High servo stiffness enables remaining motionless even when
subjected to external force.
Resistant to External
Force
cy
h
Hig
ra
cu
ac
DM1A
Why use a direct-drive motor? (Comparison with a conventional AC servomotor)
The load is mounted directly to the motor, so the motor accuracy becomes the equipment accuracy, which
contributes greatly to increasing the equipment accuracy.
Furthermore, there is no drop in efficiency due to the presence of a reduction gear or other parts, which helps to
save energy.
The motor’s compact size also enables reducing the equipment size, which helps to reduce both the design
process time and maintenance costs.
The desired operation angle and number of divisions can easily be set, simply by changing the command values.
Index table
Example) Index table
Reduction gear
+ encoder
DYNASERV
DR5H00
High accuracy
Compact equipment
size saves space
Outer Roto
Oute
Rotor
Maintenance-free
f
Direct-drive motor
Coupling
AC servomotor
Reduced design process time
No backlash or play
The outside of
the motor rotates.
4
Energy saving
Encoder
Conventional AC servomotor
Direct Drive
DYNASERV’s high accuracy becomes the
equipment accuracy.
The motor force can be directly transmitted, and there is no drop in efficiency due
to the presence of a reduction gear or other
parts.
Load-mounting surface
Absolute accuracy: ±15 arc seconds
Repeatable accuracy: ±1 arc second
Resolution: 4,096,000 pulses/rev
Positioning can be performed in pulse units.
Rotor
The outside rotates.
DM1A
Convenient Large Center Aperture
Large center aperture
This is a very convenient structure
that enables passing of wiring, a
shaft, a laser or other items through
the center of the motor.
Large center aperture: ϕ150 mm
DR1A
DR5A
Rotation is supported by cross roller bearings, so
minimal dust is produced, enabling achievement of
Class 10 cleanliness (10 or fewer dust particles of
diameter 0.5 µm per 1 cubic feet).
Quantity
・3 minute)
(Particles/ft
Clean Structure
The inside of the motor is
maintenance-free.
Cross roller bearing
50
30
10
0
0
0.3
0.5
Particle diameter ( μm)
DM1A
0.8
High Energy Efficiency
The hybrid method (magnetic bias method) magnetic circuit
achieves powerful torque at low current.
In addition, low heat generation is also a major feature of
DYNASERV, which suppresses drops in efficiency due to heat
generation and other factors.
Stator
Teeth
Winding
Permanent magnet flux
Permanent magnet
Rotor
Electromagnet flux
Precision Machining Accuracy
Models can be selected with an accuracy of up to 5 µm for axial
and radial run-out of the load-mounting surface.
Axial run-out
Radial run-out
When a machining accuracy of less than 5 µm is required, please
contact your Yaskawa representative.
Measurement standard for run-out (axial and radial) accuracy
5
Reasons why customers around the world choose DYNASERV
High Accuracy, High Resolution
and High Stiffness
Low Heat Generation and
Improved Takt Time Save Energy
High accuracy
The highly-efficient magnetic circuit (hybrid
method) reduces motor heat generation and has a
high duty, enabling continuous operation.
Absolute accuracy: ±15 arc seconds
Repeatable accuracy: ±1 arc second
High resolution
High stiffness
Encoder resolution:
4,096,000 pulse/rev
I-PD control
The high-resolution encoder enables
highly accurate positioning. In addition,
high holding force when stopped makes
DYNASERV ideal for applications that
require positioning accuracy when
stopped.
DM1A
High Displacement Stiffness and
Superior Load Capacity
The use of special high-stiffness bearings (cross
roller bearings) increases the resistance to displacement and provides excellent load capacity.
The motor can also directly support the load.
For this reason, DYNASERV is widely used in
semiconductor-related equipment. Feed-forward
adjustment also enables adjustment time to be
shortened and shot yield increased, which helps
to greatly improve takt time.
Contributes to energy saving
Flexible Response to Design Changes
The working range such as the number of divisions or
arms can be changed, simply by adjusting the command
values.
The motor directly supports the load.
DM1A
DR1A
DR1E
DR5A
DR5E
Easier-to-use Motors
Dedicated Drivers
Built-in absolute encoder
Motors equipped with an absolute position detection
function are also available.
Dedicated intelligent drivers for DYNASERV
These intelligent drivers aim to enhance control performance and operability. The built-in auto tuning function
enables automatic setting of the optimum servo parameters according to the load inertia, and various field
networks are also supported.
Intelligent Driver DrvG
DB5C-005
DB5C-010
DB5C-015
DB5C
6
/DrvP
500 W Class
2 kW Class
4 kW Class
Extensive Lineup of Over 45 Models
With compact models, slim-type models and large high-output models, the DYNASERV
series offers choices well suited to the user’s intended applications.
For details, refer to the lineup on page 10.
DM1A
(100 N·m)
DM1B
(15 N·m)
DM1C
(4 N·m)
DR5H00
(20 N·m)
DR5H00
(40 N·m)
DR1A
(50 N·m)
DR5A
(500 N·m)
DB5C
(15 N·m)
Conscientious Service and Support
Convenient Tool
A convenient support tool is provided for startup, servo adjustment and maintenance.
Extensive Product Information
Numerous technical materials and other information required for motor and driver operation are available.
Contact Support
Contact your Yaskawa representative for inquiries ranging from estimates to troubleshooting.
Support for Various Field Networks
Supports high-speed pulse interfaces, MECHATROLINK- , CC-Link and PROFIBUS-DP.
Support for Overseas Standards
UL, CE and KC can also be supported.
For more information, contact your Yaskawa sales representative
or sales agent.
7
Dedicated DYNASERV Support Tool
A convenient support tool is provided for startup, servo adjustment
and maintenance.
This tool helps to shorten equipment startup and adjustment times.
Startup and Servo Adjustment
A wizard-format support tool helps users navigate through motor startup.
This allows even novice users to perform motor adjustment tasks.
Connection
Auto-tuning
DYNASERV is connected to a
computer in which the support tool
is installed.
Ready!
The auto-tuning function is used to
oscillate the motor, measure the load
inertia and load mass, and
automatically set the parameters.
Auto filter
The auto filter function measures the
frequency response characteristics
(FFT measurement), monitors the
servo adjustment status, and
automatically sets the mechanical
resonance suppression filter.
Start of operation
When More Detailed Servo Adjustment is Required
To further increase the servo stiffness
The servo stiffness can be set by setting the servo
adjustment parameters.
This enables adjustment while checking the actual motor
status.
To shorten the adjustment time
Manual fine adjustment of the feed-forward amount
helps to shorten the adjustment time.
The servo stiffness can be adjusted and set
by cursor operations.
The feed-forward amount can be finely adjusted manually.
Other useful and convenient functions are also provided.
8
Even More Detailed and Convenient
Oscilloscope function capable of simultaneously measuring 4 channels
A 4-channel oscilloscope function is provided that can monitor all
parameters.
This enables complete comprehension of the motor operation.
The acquired waveforms can be stored in files for use in analysis.
Motor-less operation
function
Operation simulations can
be performed using only the
support tool and driver.
This is convenient for
debugging control operation
with upper equipment, such
as during device startup.
Multiple language support
Japanese, English and Chinese (both
simplified and traditional Chinese characters)
are supported.
The display language can easily be changed.
Maintenance and Troubleshooting
Downloading of user data
Parameters can be downloaded and copied.
This eliminates the need to adjust each unit separately when manufacturing
multiple devices with the same structure.
Error log display
An error log with up to 16 errors can
be displayed.
In addition, selecting a displayed
error number shows a detailed
explanation of that error.
For more information, contact your Yaskawa sales representative or sales agent.
For a list of sales offices in each district, check the “Contact” page at
http://www.e-mechatronics.com/en/index.html
9
M
od
el
Di
a
（ m
m et
m e
Ce ） r
(m nter
m) Ap
e rt
ure
D
iam
et e
r
Extensive Lineup
or
Maximum Output Torque (N･m)
M
ot
4
5
6
8
10
15
20
30
40
45
50
60
70
100
High-accuracy and High-resolution Models
DM1A
264
58
DM1A-050
DM1B
158
160
25
DM1B-015
DM1B-006
DM1C
116
DM1A-100
DM1B-030
DM1B-045
DM1B-060
25
DM1C-004
Flat Profile Models
DR5H00 224
50
DR5H00-010
DR5H00-020
DR5H00-040
DR1A-100
Large Center Aperture, High-speed, and High-torque Models
DR1A
264 150
DR1A-050
DR1E
205
76
DR1E-030
DR1B
145
150
DR1E-070
DR1E-100
56
DR1B-008
DR5A
264 150
DR5E
205
DR1B-015
DR1B-030
DR1B-045
DR1B-060
76
DR5E-100
DR5B
150
56
DR5B-030
DR5C
107
26
DR5C-005
DR5C-010
DR5C-015
DB5C-010
DB5C-015
Absolute Models
DB5C
107
26
DB5C-005
An extensive lineup supports selection of
the ideal motor for the user’s equipment.
10
DR5B-050
DR5B-070
150
160
200
220
250
300
400
500
En
co
(p der
uls R
e/ eso
re lu
v) tio
n
Ab
s
(Ty olu
p. t e
) (a Ac
rc cu
se rac
Re
c) y
pe
at
a
(ar ble
cs A
ec cc
M
) ura
ax
im
cy
um
(rp S
s ) pe
ed
130
4,096,000
±15
±1
1.2
High accuracy and high
resolution
DM1A-200
DM1A-150
Features
2,621,440
±15
±20
±60
±1
±3
2.4
2.5
2,621,440
±20
±60
±3
2.5
3,407,872
±80
±0.4
3.6
1,638,400
±30
±3
0.8/1.0
1.2/1.8
1,228,800
±45
±3
1.2
2.4
Built-in optical encoder
Excellent torque-to-weight
ratio
Aluminum chassis type
Slim shape with low height
DR1A-150
DR1E-130
DR1A-200
DR1E-160
DR1A-300
DR1E-220
Built-in magnetic encoder
DR1A-400
DR1E-250
Large center aperture:
DR1A, DR5A (Max. ϕ 150 mm)
1,015,808
±45
±3
2.4
High-speed type: DR5
High-torque type:
DR5A (Max. 500 N∙m)
851,968
DR5A-300
DR5A-400
±45
±3
2.0
Built-in magnetic encoder
DR5A-500
638,976
±90
±4
4.0
Wide output torque range:
DR1A (50 N∙m to 400 N∙m)
Wide variety of models:
DR1E (7 models)
557,056
±90
±5
5.0
425,984
±150
±5
6.0
425,984
±150
±5
6.0
Built-in absolute encoder
High-speed type
Direct Drive
DYNASERV
11
Examples of Applications
DYNASERV supports the latest manufacturing equipment.
High-function Film
Secondary Batteries
LED
Roll to Roll
LED inspection
equipment
DYNASERV directly drives the roll.
Improved takt time and accuracy
Reduced effects of temperature
and dust
High-accuracy feed on the order of several μ m
No backlash, and reduced torsion and response delay
Space-saving, simple configuration
Reduced design process time and maintenance costs
Smartphones
Touch panel glass bonding equipment
Photovoltaic Solar Cells
Positioning accuracy ±6 μ m
Crystalline solar cell electrode
forming equipment
800m
m
Camera
Electrode forming (Al)
Electrode forming (Ag)
Firing furnace
(fire-through)
Increased bonding accuracy
Can be used in clean environments
Improved takt time and design process time
Electrode forming
(solder)
Reduced shadow loss
(increased printing accuracy)
Easy setup changes
(cell size changes)
Improved takt time and
simple configuration
High-accuracy positioning increases equipment performance
Semiconductors
Handler for IC test system
Supports variable indexing and design changes
High-accuracy positioning and higher inspection levels
Improved takt time
Achieves faster test process times and high-speed transportation.
12
Enables improved takt time and saving of space
Recording Media
Electronic Components
DVD spattering equipment
Electronic component transportation
equipment and robots
Transportation from previous process
Machine tool
transportation
Disk import from
manufacturing line
Transportation of imported
disks to vacuum chamber
Reduced size (space saving) and cost
Concentrates the transport functions of two units into a single unit
Improved takt time
Example of improvement: 180° operating time shortened from 0.35 s to 0.25 s
Cycle time 1.8 s (improvement of 10%)
Space saving
Supports design changes
Reduced equipment design process time
Improved takt time
DYNASERV also plays an active role in the following fields
Science
Automotive
Large-scale astronomical telescopes
Dynamic steering tester
Low heat generation and high stiffness
High-accuracy rotational positioning
Environmental resistance and optimization of wiring
Increased reproducibility of evaluation results
13
Examples of Applications
Clean applications
Recording Media
Machine Tools
DVD bonding equipment
Assembly lines
Variable indexing
Reduced design process time
Improved takt time
Increased bonding accuracy
Highly reliable automated lines
Improved takt time
Reduced equipment design process time
Supports design changes
DYNASERV’s high servo stiffness is ideal for applications needing to
remain motionless after stopping.
Semiconductors
14
Machine Tools
Wafer dicing equipment
Servo press
Increased cutting accuracy and higher yield
Improved takt time
Clamp or brake mechanism not required
High stiffness and high torque
Space saving
High-speed transport and high-accuracy
positioning
LCD
Semiconductors
LCD Scriber
Electrode forming equipment
Scribing linearity: within
20 µm/1,000 mm
Wafer
90° operating time: 0.4 s or less
Repeatable accuracy: ±6 μ m (±3 arc seconds) or less at a distance of
400 mm from the rotation center
1 pixel
Alignment and repeating motion
between 0 and 90°
Turning: 90°/s
High stiffness
Increased yield
Reduced number of parts
Increased machining accuracy and higher yield
Improved takt time
Recording Media
Offset CD and DVD printers
DYNASERV reduces costs
Semiconductors
CVD and PVD spattering equipment
Increased accuracy
Reduced mechanical interference with
vacuum chambers during transportation
Shorter cycle times
Simultaneous transportation of multiple
high-load panels
Cost reduction
Reduced number of parts
Printing table
Vacuum chamber
Variable indexing
Reduced design process time
Supports larger indexing table sizes
Improved takt time
Increased printing accuracy and higher yield
15
DIRECT DRIVE
DYNASERV
IRUMA BUSINESS CENTER (SOLUTION CENTER)
480, Kamifujisawa, Iruma, Saitama 358-8555, Japan
Phone 81-4-2962-5151 Fax 81-4-2962-6138
http://www.yaskawa.co.jp
YASKAWA AMERICA, INC.
2121 Norman Drive South, Waukegan, IL 60085, U.S.A.
Phone 1-800-YASKAWA (927-5292) or 1-847-887-7000 Fax 1-847-887-7310
http://www.yaskawa.com
YASKAWA ELÉTRICO DO BRASIL LTDA.
Avenida Piraporinha 777, Diadema, São Paulo, 09950-000, Brazil
Phone 55-11-3585-1100 Fax 55-11-3585-1187
http://www.yaskawa.com.br
YASKAWA EUROPE GmbH
Hauptstrasse 185, Eschborn 65760, Germany
Phone 49-6196-569-300 Fax 49-6196-569-398
http://www.yaskawa.eu.com
YASKAWA ELECTRIC KOREA CORPORATION
9F, Kyobo Securities Bldg., 26-4, Yeouido-dong, Yeongdeungpo-gu, Seoul, 150-737, Korea
Phone 82-2-784-7844 Fax 82-2-784-8495
http://www.yaskawa.co.kr
YASKAWA ELECTRIC (SINGAPORE) PTE. LTD.
151 Lorong Chuan, #04-02A, New Tech Park 556741, Singapore
Phone 65-6282-3003 Fax 65-6289-3003
http://www.yaskawa.com.sg
YASKAWA ELECTRIC (THAILAND) CO., LTD.
252/125-126 27th Floor,Tower B Muang Thai-Phatra Complex Building,
Rachadaphisek Road, Huaykwang, Bangkok 10310, Thailand
Phone 66-2693-2200 Fax 66-2693-4200
http://www.yaskawa.co.th
YASKAWA ELECTRIC (CHINA) CO., LTD.
22F, One Corporate Avenue, No.222 Hubin Road, Huangpu District, Shanghai 200021, China
Phone 86-21-5385-2200 Fax 86-21-5385-3299
http://www.yaskawa.com.cn
YASKAWA ELECTRIC (CHINA) CO., LTD. BEIJING OFFICE
Room 1011, Tower W3 Oriental Plaza, No.1 East Chang An Ave.,
Dong Cheng District, Beijing 100738, China
Phone 86-10-8518-4086 Fax 86-10-8518-4082
YASKAWA ELECTRIC TAIWAN CORPORATION
9F, 16, Nanking E. Rd., Sec. 3, Taipei 104, Taiwan
Phone 886-2-2502-5003 Fax 886-2-2505-1280
http://www.yaskawa-taiwan.com.tw
YASKAWA ELECTRIC CORPORATION
In the event that the end user of this product is to be the military and said product is to be
employed in any weapons systems or the manufacture thereof, the export will fall under
the relevant regulations as stipulated in the Foreign Exchange and Foreign Trade
Regulations. Therefore, be sure to follow all procedures and submit all relevant
documentation according to any and all rules, regulations and laws that may apply.
LITERATURE NO. CHEP S800001 51A
Specifications are subject to change without notice
for ongoing product modifications and improvements.
Published in Japan September 2014 14-5 0 -1
© 2014 YASKAWA ELECTRIC CORPORATION. All rights reserved.
14-7-11