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Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Table of contents of the delivery program
Page
1.
1.1
Manual positioners with fine pitch screw
Miniature Positioning Stage HS 30
2.
Linear positioning systems with piezo inertial drives
2.1
Linear positioners for one dimension (open design)
2
2.1.1 Miniature Positioning Stage MS 15
2.1.2 Miniature Positioning Stage MS 30
2.1.3 Miniature Positioning Stage MS 38 with free aperture
2.2
Linear positioners for one dimension (closed design)
2.2.1 Miniature Positioning Stage DS 30
2.2.2 Miniature Positioning Stage DS 40
2.2.3 Positioning Stage ML 17 for ultra low temperatures (4 K)
2.3
16
18
Linear positioners for the Nova-System
2.4.1 Miniature Positioning Stage NDS 40 (open loop operation)
2.4.2 Miniature Positioning Stage NDS 70 (closed loop operation)
mechOnics ag
10
12
14
Linear positioners for three dimensions
2.3.1 Miniature Positioners MX 25 and MX 35
2.3.2 Miniature Monomode Coupler MK 25
2.4
4
6
8
20
22
3.
Tilting systems with piezo inertial drives
3.1
Mirror tilting stage MT 25
4.
Position sensors for piezo inertial drives
4.1
Position Sensor PS 30 for Miniature Positioning Stage MS 30
5.
Motor Controllers
5.1
5.1.1
5.1.2
5.1.3
5.1.4
Controllers for piezo inertial drives
Handheld controller CN 30 for piezo inertial drives
USB – Controller CU 30 for piezo inertial drives
USB – Controller CF 30 for piezo inertial drives
USB – CAN – Controllers of the Nova Series
28
29
30
31
5.2
Connecting cables for linear positioning systems
35
5.3
Autonomous controller CD 85 for DC-Motors
36
5.4
Autonomous controller CS 85 for stepper motors
38
6.
Customized Items
6.1
Linear Positioning Stage MS 30 with linear measuring system
and vacuum preparation
40
6.2
Motorized aperture for REM
40
6.3
XYZ – Positioner for ultra low temperature microscope (4 K)
40
6.4
Fiber Positioner with MX 25
40
Unnützstr. 2B
81825 Munich
24
Fon +49 (0) 89/4202 4207
Fax +49 (0) 89/4202 4206
26
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series HS
HS 30
Miniature Translation Stages
with fine pitch screws
Technical Data
Specifications
¾
¾
¾
¾
¾
¾
¾
¾
¾
¾
compatible with MS 30 series
deformation-resistant aluminium, black anodized
mountable on slides (OWIS and LINOS)
setting sensitivity better than 1 µm
self-locking
compact design
xy or xyz combinations
precision ball bearing guides
vacuum preparation optionally
customized designs possible
Travel:
Spindle pitch:
Graduation of scale:
Setting sensitivity:
Mass:
8, 18 or 30 mm
0.25 mm
10 µm
2 µm
35, 41 or 50 g
Load characteristics
Max. load capacity
Mx, My, Mz
Fx, Fy, Fz
1.5 Nm
50 N
Guidance accuracy (without load)
For 8 mm travel:
Yaw angle
< 20 arc sec
Pitch angle
< 60 arc sec
Vertical deviation
< 1 µm
Lateral deviation
< 2 µm
Miniature Translation
Stage HS 30
HS.030.0
Application Examples
¾
¾
¾
¾
¾
¾
Micro-/Nano Technology
Bio Technology
Microscopy
Quality Control
Metrology
R&D
mechOnics ag
Unnützstr. 2B
Part no.
Travel
Vacuum
81825 Munich
Fon +49 (0) 89/4202 4207
08
18
30
8 mm
18 mm
30 mm
0
6
9
no
10-6
10-9
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series HS
HS 30, 8 mm travel
HS 30, 18 and 30 mm travel
Travel
A
B
C
D
18
40
33.2
10.5
15.5
30
52
45.2
16.5
21.5
mechOnics ag
Unnützstr. 2B
81825 Munich
Fon +49 (0) 89/4202 4207
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MS
MS 15
Ultra small Miniature Translation Stages
with piezo electric inertial drive
Technical Data
Travel:
Max. speed:
Specifications
Piezo driven step motor with low hysteresis
holds reached position without current
step width about 15 nm (depends on controller)
positioning accuracy better than 50 nm
velocity up to 1.5 mm/s (depends on controller)
travel 3.5 mm
CNC-machined aluminium body
no limit switches necessary
driven by hand-held (CN.030.0001)
or USB controller (CU.030.xx0x)
or USB controller (CF.030.xx0x)
connection cable CK.030.1003 recommended
Mass:
3.5 mm
1.5 mm/s
(depends on controller)
6g
Max. load
Mx, My, Mz
Fx (blocking force)
F y, F z
0.4 Nm
3 (4) N
20 N
Resolution (calculated)
Single step
~ 450 nm
1/16-step
~ 30 nm
(with controller CU 30)
1/64-step
~ 10 nm
(with controller CF 30)
Half step
Double step
(with controller CN 30)
~ 250 nm
~ 900 nm
Yaw angle
< 20 arc sec
Pitch angle
< 60 arc sec
Vertical deviation
< 1 µm
Lateral deviation
< 2 µm
Stage MS 15
Part no.
MS.015.04
Vacuum
Bio Technology
Microscopy
Quality Control
Metrology
R&D
mechOnics ag
Unnützstr. 2B
Mounting
81825 Munich
Fon +49 (0) 89/4202 4207
0
6
no
10
0
2
x
-6
xy
(not removable)
Fax +49 (0)89/4202 4206
9
10-9
3
xyz
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MS
1,5
7,0
15,0
7,5
1,5
13,5
8 x M1
7,5
1,5
13,5
8 x M1
15,0
MS 15, 3.5 mm travel
1,5
7,5
7,5
13,5
13,5
15,0
Dimensions for xy – combination (not removable)
Dimensions for xyz – combination (xy – combination not removable)
mechOnics ag
Unnützstr. 2B
81825 Munich
Fon +49 (0) 89/4202 4207
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MS
MS 30
Technical Data
Travel:
Max. speed:
Specifications
travels up to 60 mm possible
open- or closed loop-application
Mass:
8, 18 or 30 mm
1.2 mm/s
32, 38 or 54 g
Max. load
Mx, My, Mz
Fx (blocking force)
F y, F z
0.5 Nm
4.5 (5) N
30 N
Single step
~ 450 nm
1/16-step
~ 30 nm
1/64-step
~ 10 nm
Half step
Double step
~ 250 nm
~ 900 nm
For 8 mm travel:
Yaw angle
< 20 arc sec
Pitch angle
< 60 arc sec
Vertical deviation
< 1 µm
Lateral deviation
< 2 µm
Stage MS 30
Part no.
MS.030.
Travel
Bio Technology
Microscopy
Quality Control
Metrology
R&D
mechOnics ag
Unnützstr. 2B
Vacuum
08
18
30
8 mm
18 mm
30 mm
0
6
9
no
10-6
10-9
0
1
Measuring- without
system
81825 Munich
Fon +49 (0) 89/4202 4207
with (please specify with sensor)
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MS
B
4
15.0
H7
2 x Ø 1.5 - 3
2 x M2.5 - 3
MS 30, 8 mm travel
View X / Ansicht X
12
12.5
X
10
Snkg./cntrb. f. M2.5
M2.5 - 7
10
5.75
12.5
D
H7
1.75
3
2 x Ø 1.5 - 3
C
H7
H7
2 x Ø 1.5 - 3
7.5
2 x Ø 1.5 - 5
10
30
10
10
MMCXBuchse/
Socket
20
15
5,75
2
6
1.4
A
10
2 x M2.5 - 3 / 2 x Ø 5
20
4 x M3 - 3
B
C
D
18
40
33
10
15
30
52
45
16
21
B
10
6
1.4
5,75
M2.5 - 7
10
12.5
5.75
3
1.75
D
H7
2 x Ø 1.5 - 3
C
H7
10
H7
2 x Ø 1.5 - 3
7.5
2 x Ø 1.5 - 5
20
MMCXBuchse/
Socket
30
10
10
15
View X / Ansicht X
X
12.5
12
15.0
2
4
H7
A
2 x M2.5 - 3
Travel
2 x Ø 1.5 - 3
MS 30, 18 and 30 mm travel
A
mechOnics ag
Unnützstr. 2B
81825 Munich
Fon +49 (0) 89/4202 4207
10
2 x M2.5 - 3 / 2 x Ø 5
20
4 x M3 - 3
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MS
MS 38
Miniature Translation Stages with free opening dia 10 mm
and piezo electric inertial drive
Technical Data
Travel:
Free opening
Max. speed:
Specifications
¾
¾
¾
¾
¾
¾
¾
¾
¾
¾
¾
¾
¾
¾
¾
travel up to 8 mm
free opening of 10 mm (on whole travel)
fits to optical bench systems (LINOS, OWIS aso.)
Mass:
8 mm
10 mm
1.5 mm/s
32 g
Max. load
Mx, My, Mz
Fx (blocking force)
Fy, Fz
0.4 Nm
4.5 (5) N
20 N
Single step
~ 450 nm
1/16-step
~ 30 nm
1/64-step
~ 10 nm
Half step
Double step
~ 250 nm
~ 900 nm
Yaw angle
< 20 arc sec
Pitch angle
< 60 arc sec
Vertical deviation
< 1 µm
Lateral deviation
< 2 µm
Stage MS 38
Part no.
MS.038.080
¾
¾
¾
¾
¾
¾
Vacuum
0
6
9
no
10-6
10-9
Bio Technology
Microscopy
Quality Control
Metrology
R&D
mechOnics ag
Unnützstr. 2B
81825 Munich
Fon +49 (0) 89/4202 4207
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MS
MS 38, 8 mm travel
20
View X / Ansicht X
2 x M2.5
3
ø
,0
12
7
M3
MMCXBuchse/
Socket
2 x M2.5, 1 x M3
6
9
14
19
24
29
14
9
10 mm
4 x M2.5
X
38
31
29
24
9
10
24
2 x M1.0
15
10.0 Snkg./cntrb. f. M2.5
1.4
9.5
6
6
2,9
40
Snkg./cntrb. f. M1
8
10
2 x M3
30
Snkg./cntrb. f. M1
2 x M3
32
xy and xyz combinations
mechOnics ag
Unnützstr. 2B
81825 Munich
Fon +49 (0) 89/4202 4207
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series DS
DS 30
Technical Data
Travel:
Max. speed:
Specifications













only open-loop application
xy combinations
Mass:
Electrical connector:
8 mm
1.2 mm/s
32 g
2pin MMCX-plug
Max. load
Mx, My, Mz
Fx (blocking force)
Fy , Fz
0.5 Nm
4.5 (5) N
30 N
Single step
~ 450 nm
1/16-step
~ 30 nm
1/64-step
~ 10 nm
Half step
Double step
~ 250 nm
~ 900 nm
Yaw angle
< 20 arc sec
Pitch angle
< 60 arc sec
Vertical deviation
< 1 µm
Lateral deviation
< 2 µm
Stage DS 30
Part no.
DS.030.
0






08
Bio Technology
Microscopy
Quality Control
Metrology
R&D
mechOnics ag
Unnützstr. 2B
Travel
8 mm
Vacuum
81825 Munich
Fon +49 (0) 89/4202 4207
0
6
no
10
-6
Fax +49 (0)89/4202 4206
9
10
-9
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series DS
DS 30, 8 mm travel
Front view:
Top view:
Rear view:
mechOnics ag
Unnützstr. 2B
81825 Munich
Fon +49 (0) 89/4202 4207
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series DS
DS 40
Technical Data
Travel:
Max. speed:
Specifications













xy combinations
Mass:
11 mm
1.2 mm/s
50 g
2pin MMCX-plug
Max. load
Mx, My, Mz
Fx (blocking force)
Fy , Fz
0.5 Nm
4.5 (5) N
30 N
Single step
~ 450 nm
1/16-step
~ 30 nm
1/64-step
~ 10 nm
Half step
Double step
~ 250 nm
~ 900 nm
Yaw angle
< 20 arc sec
Pitch angle
< 60 arc sec
Vertical deviation
< 1 µm
Lateral deviation
< 2 µm
Stage DS 40
Part no.
DS.040.
0
11






Travel
Bio Technology
Microscopy
Quality Control
Metrology
R&D
mechOnics ag
Unnützstr. 2B
11 mm
Vacuum
81825 Munich
Fon +49 (0) 89/4202 4207
0
6
no
10
-6
Fax +49 (0)89/4202 4206
9
10
-9
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series DS
DS 40, 11 mm travel
Front view:
Top view:
Rear view:
mechOnics ag
Unnützstr. 2B
81825 Munich
Fon +49 (0) 89/4202 4207
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series ML
ML 17
Miniature Translation Stages for Ultra Low Temperatures
Technical Data
Travel:
Max. speed:
Specifications
for use at ultra low temperatures up to 4 K
step width about 200 nm
positioning accuracy better than 1 µm
velocity up to 1.0 mm/s
travels up to 5 mm
xy or xyz combinations possible
(L-bracket ML.017.9001 for xyz needed)
CNC-machined steel body
precision linear bearings
driven by USB controller (CU.017.0003)
¾
¾
¾
¾
¾
¾
¾
¾
¾
¾
¾
¾
¾
¾
Max. load
Mx
My, Mz
Fx (blocking force)
Fy, Fz
3.0 Ncm
1.5 Ncm
1.0 (1.5) N
1.0 N
Single step
with 22 V (at 4.2 K)
~ 200 nm
~ 500 nm
~ 1 µm
(with controller CU 17 LT)
For 5 mm travel:
Vertical deviation
< 2 µm
Lateral deviation
< 2 µm
Low Temperature
Stage ML 17
¾
¾
¾
¾
¾
¾
¾
Electrical connection:
Mass:
5 mm
1.0 mm/s
(with controller CU 17 LT)
2 solder points
25 g
ML.017.0
Cryo - applications
Bio Technology
Microscopy
Quality Control
Metrology
R&D
Travel
Vacuum
mechOnics ag
Unnützstr. 2B
Part no.
81825 Munich
Fon +49 (0) 89/4202 4207
05
xx
5 mm
customized
6
9
10-6
10-9
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series ML
Dimensions of the ML 17
32
31
24
16
9
1
15
8
17
16
1
10 x M1 - 1.5
4 x M1 - 1.5
6
21
27
xyz – combination of ML 17
mechOnics ag
Unnützstr. 2B
81825 Munich
Fon +49 (0) 89/4202 4207
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MX
MX 25/35
Miniature XYZ Positioners
Technical Data
Travel:
MX 25
MX 35
Max. speed:
MX 25 with 2 mm travel in xyz-direction
Specifications
holds position without power
up to 10 mm travel in xyz
or USB controller (CU.030.0003)
2 mm in xyz
10 mm in xyz
1.2 mm/s (depends on
the controller)
Mass:
MX 25
MX 35
46 g
76 g
Type of load
Mx, My, Mz
Fx, Fy (jamming force)
Fz (jamming force)
0.15 Nm
<2N
<2N
Single step
~ 450 nm
1/16-step
~ 30 nm
1/64-step
~ 10 nm
Half step
Double step
~ 250 nm
~ 900 nm
Vertical deviation
< 2 µm
Lateral deviation
< 2 µm
Miniature XYZ Positioner
Part no.
MX.0 5.1
2
Type
0
3
MX 25
MX 35
0
Bio Technology
Microscopy
Quality Control
Metrology
R&D
mechOnics ag
Unnützstr. 2B
Top plate
design
Vacuum
81825 Munich
Fon +49 (0) 89/4202 4207
x
Standard
custom design
0
6
9
no
10-6
10-9
Fax +49 (0) 89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MX
4
17
1.5 ± 1
Drawings of the MX 25:
8 ±1
12
M1 - 3
10
4.75
6.5 ± 1
35
20
20
M2.3 - 5
15
10.5
25
12
M1-3
3
M2.3 - 5
4pin - inline socket/
4pol. Steckerleiste
M2.3 - 5
20
4
30.5
5.5 ± 5
Drawings of the MX 35:
4pol. Steckerleiste
M1 - 3
4,65
M2.5 - 5
5
12
20
7.5
15
8 ±5
12
35
10.5
M1-3
14.5 ± 5
45
mechOnics ag
Unnützstr. 2B
4.75
81825 Munich
Fon +49 (0) 89/4202 4207
10
M2.5 - 5
Fax +49 (0) 89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MK
MK 25
Miniature Monomode Coupler MK 25
with piezo electric inertial motor
Technical Data
Travel:
Max. speed:
2 mm in xyz
1.2 mm/s
20 mm
58 g
Optical height:
Mass:
Single step
~ 450 nm
1/16-step
~ 30 nm
Half step
Double step
Specifications
aspherical lenses with different NA
optical height 20 mm
2 mm travel in xyz
different fibre couplers
positioning accuracy better than 100 nm with CU 30
Lens type
Type A:
Numerical aperture
Clear aperture
Focal length
~ 250 nm
~ 900 nm
0.40
3.7 mm
4.60 (670 nm)
4.64 (785 nm)
Type B:
Numerical aperture
Clear aperture
0.38
2.5 mm
Miniature MonomodeCoupler MK 25
Part no.
MK.025.1
0
1
Coupler type FC
Bio Technology
Microscopy
Telecommunication
Metrology
R&D
mechOnics ag
Unnützstr. 2B
Vacuum
Numerical
aperture
81825 Munich
Fon +49 (0) 89/4202 4207
SMA
0
6
x
no
10-6
customized
A
B
x
0.40
0.38
customized
Fax +49 (0) 89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MK
Ø4
4pol. Steckerleiste
27.5
4.7
mechOnics ag
35
Unnützstr. 2B
4.75
81825 Munich
10
FC / SMA
3
20
10.5
25
20
M2.3 - 5
4
20
Dimensions of the Monomode Coupler MK 25
Fon +49 (0) 89/4202 4207
20
M2.3 - 5
Fax +49 (0) 89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series NDS
NDS 40
Miniature Translation Stages with piezo
electric inertial drive for NOVA system
Technical Data
Specifications













xy combinations
driven by NOVA controller (NC.00x.x000)
Travel:
Max. speed:
Mass:
11 mm
1.5 mm/s
70 g
8pin SRC-MiniBridge
Max. load
Mx, My, Mz
Fx (blocking force)
Fy , Fz
0.5 Nm
4.5 (5) N
30 N
Single step
~ 450 nm
1/64-step
~ 10 nm
Yaw angle
< 20 arc sec
Pitch angle
< 60 arc sec
Vertical deviation
< 1 µm
Lateral deviation
< 2 µm
Stage NDS 40 NOVA
NDS.040.11 0






Bio Technology
Microscopy
Quality Control
Metrology
R&D
mechOnics ag
Unnützstr. 2B
Part no.
Vacuum
0
6
no
10
9
-6
10
-9
Remarks:
Vacuum application is possible only without electrical
circuit. You need the electronic module NDEM 3 as
driving unit.
81825 Munich
Fon +49 (0) 89/4202 4207
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series NDS
NDS 40, 11 mm travel
Front view:
Top view:
Rear view:
mechOnics ag
Unnützstr. 2B
81825 Munich
Fon +49 (0) 89/4202 4207
Fax +49 (0)89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series NDS
NDS 70
Miniature Translation Stages with piezo
electric inertial drive for NOVA system
Technical Data
Specifications
Travel:
Max. speed:
Mass:
15 mm
1.5 mm/s
120 g
8pin SRC-MiniBridge
Max. load
Mx, My, Mz
Fx (blocking force)
Fy , Fz
0.5 Nm
9 (10) N
30 N
Resolution
Standard
Premium
High End
Excellence
1 µm
0.5 µm
0.1 µm
0.05 µm
(other resolutions on request)













only closed-loop application
xy combinations
driven by NOVA controller (NC.00x.x000)
Scale tape
Material
Grating period
Length of scale
mm
Reference mark
Linear expansion
coefficient
Accuracy class
Steel
20 µm
measuring length + 22
at the center of the scale
23.8 x 10-6 grd-1
± 1 µm/m
Electrical Data
Scanning frequency
Output signal
Supply voltage
Power consumption
Cable length
Operating temperature
Vibration (50 – 2,000 Hz)
Shock (11 ms)
max. 400 kHz
RS 422 with interpolation
5 V DC +/- 10%
150 mA
1.5 m
0° – 55° C
-2
< 200 ms
< 400 ms-2
Stage NDS 70 NOVA
Part no.
NDS.070.15






Vacuum
Bio Technology
Microscopy
Quality Control
Metrology
R&D
mechOnics ag
Unnützstr. 2B
Resolution
0
6
no
10
2
3
1 µm
0.5 µm
9
-6
10
5
0.1 µm
-9
6
0.05 µm
Remarks:
Vacuum application is possible only without electrical
circuit. You need the electronic module NDEM 3 for
closed loop application as driving unit.
81825 Munich
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Micropositioners
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Index
Series NDS
NDS 70, 15 mm travel
Front view:
Top view:
Rear view:
mechOnics ag
Unnützstr. 2B
81825 Munich
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Micropositioners
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Motor Controllers
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Index
Series MT
MT 25
Kinematical Mirror Tilting Stage
Technical Data
Angular adjustment:
6 deg (± 3 deg) in two
orthogonal axes
25 mrad/s
11.5 mm (on rod)
12.5 mm (in plate)
dia. 12.7 mm (1/2 inch)
dia. 9 mm
46 g
100 g
Max. speed:
Optical height:
Mirror mount:
Free opening:
Mass:
Max mass of mirror:
Single step
~ 14 µrad
1/16 step
~ 1 µrad
1/64-step
~ 0.3 µrad
Specifications
optical height 11.5 mm (on rod)
angular adjustment 6 deg (± 3 deg) in two axes
for mirror with dia. 12.7 mm
(with mirror adapter also for larger mirrors)
free opening of 9 mm
solid state hinges
step width about 0.3 µrad with CF 30
velocity up to 25 mrad/s (> 1 deg/s)
also usable as prism stage
Half step
Double step
~ 7 µrad
~ 28 µrad
Mirror Tilting Stage
MT 25
Part no.
MT.025.0
0
Bio Technology
Microscopy
Telecommunication
Metrology
R&D
mechOnics ag
Unnützstr. 2B
Mirror adapter
Vacuum
81825 München
Fon +49 (0) 89/4202 4207
0
1
without
glas substrate
0
6
no
10-6
x
customized
Fax +49 (0) 89/4202 4206
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Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series MT
Dimensions of the Mirror Tilting Stage MT 25
24
ø1
0
17.5
24
30.5
M4-5
12.7
25 g6
3-
5
5
25
11.5
9
g6
M
M3
12.7
19
2.5
3pol. Steckerleiste
13,50
4,75
Coordinates of the two tilting axes
6,75
ca. 9
13,50
MT 25 with beamsplitter cube on optical rail
mechOnics ag
Unnützstr. 2B
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Micropositioners
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Customized Items
Index
for Series MS
PS 30
Linear Measuring System for Miniature Translation
Stage MS 30
Technical Data
Measuring length
Mass
8, 18 or 30 mm
about 20 g
Resolution
Standard
Premium
High End
Excellence
1 µm
0.5 µm
0.1 µm
0.05 µm
(other resolutions on request)
Miniature Translation Stage MS 30, 8 mm travel with PS 30
Spezifications
measuring lengths up to 30 mm
resolution better than 50 nm
open- or closed loop-application
xy combinations
ultra high vacuum preparation optionally
driven by USB-Controller CU 30 (CU.030.xx0x)
¾
¾
¾
¾
¾
¾
¾
Scale tape
Material
Grating period
Length of scale
Reference mark
Linear expansion
coefficient
Accuracy class
23.8 x 10-6 grd-1
± 1 µm/m
Electrical Data
Scanning frequency
Output signal
Supply voltage
Power consumption
Cable length
Operating temperature
Vibration (50 – 2,000 Hz)
Shock (11 ms)
max. 400 kHz
RS 422 with interpolation
5 V DC +/- 10%
150 mA
1.5 m
0° – 55° C
< 200 ms-2
< 400 ms-2
Steel
20 µm
measuring length + 22 mm
at the center of the scale
Linear Measuring System
Part no.
PS30 for Miniature Stage MS 30
PS.030.
¾
¾
¾
¾
¾
¾
Travel
Bio Technology
Microscopy
Quality Control
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mechOnics ag
Unnützstr. 2B
Vacuum
Resolution
81825 Munich
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08
18
30
8 mm
18 mm
30 mm
0
3
6
9
no
10-3
10-6
10-9
2
3
5
6
1 µm
0.5 µm
0.1 µm
Fax +49 (0) 89/4202 4206
0.05 µm
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
for Series MS
3.5
Linear Measuring System PS 30 with adapter plate for MS 30
34
5.3
10
20
20
44
15.4
8
16
20
10
4 x Snkg./cntrb. f. M3
20
H7
2 x M2.3 - 3 / 2 x Ø 1.5 - 3
4 x M3 - 3
XYZ-arrangement with MS 30 (8 mm travel) and PS 30 (8 mm travel and 50 nm resolution)
mechOnics ag
Unnützstr. 2B
81825 Munich
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Micropositioners
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Motor Controllers
Index
Series CN
CN 30
Controller for Piezo Electric Inertial Motors
Technical Data
Power supply:
Operation modes: “Local” with keyboard
(current consumption ~ 20 µA)
“Remote” with RS 232-Interface
(current consumption ~6 mA incl.
LED)
change switch for both modes on
keyboard
Specifications
4 x round cell LR6
(Alkaline ~ 2000 mAh)
and
portable power supply
in: 100 – 240 V
out: 6 VDC with user-plug
Ø 5.5/2.1 mm
Special design for piezo driven step motor
works with batteries or external power supply
operates up to 3 axes
USB-interface optionally
Connections:
9pin Sub D-connector (male)
9pin Sub D-connector (female)
2pin Socket (female)
Speed modes:
“Fast” (ca. 0.7 mm/s)
“Slow” (“Fast”/2)
“Single step”
Step modes:
“Full step”
“Half step” (“full step”/2)
“Double step” (“full step” x 2)
RS 232-interface to the internal controller
Connection:
Data rate:
19200 Baud
Software for PC
- for DOS, Win 95, Win 2000, Win XP and Win NT:
executable software with action
buttons (similar to the stand-alone
keyboard)
- for use with own programs:
Borland Pascal Unit (DOS)
DLL for Windows
Bio Technology
Microscopy
Quality Control
Metrology
R&D
mechOnics ag
Unnützstr. 2B
370 g incl. batteries
Dimensions:
158 x 96 x 52 mm
Delivery includes: - miniature power supply
- 4 x round cell LR6
- RS 232 connecting cable
Mass:
CN 30 Controller
81825 Munich
Fon +49 (0) 89/4202 4207
Part no.
CN.030.0001
Fax +49 (0) 89/4202 4206
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Micropositioners
Positionsensors
Customized Items
Motor Controllers
Index
Series CU
CU 30
USB-Controller for Piezo Electric Inertial Drives
Technical Data
Power supply:
USB-interface (without sensor)
or
portable power supply (for CU 30CL)
in: 100 – 240 V
Operation:
via USB-Interface 1.1 (without sensor)
via USB-Interface 2.0 (closed loop)
Connections:
without sensor
CU 30 without sensor (for three axes)
1 x 9pin Sub D-connector (female)
1 x USB Type B socket (USB 1.1)
3 x 2pin MMCX sockets (female)
3 x 9pin Sub D-connectors (female)
1 x USB Type B socket (USB 2.0)
closed loop
Specifications
Special design for piezo driven inertial motors
works with USB-voltage (without sensor)
or an additional power supply (closed loop controller)
applications without position sensor or closed loop
operates up to 3 axes
(interfaces or number of axes)
Speed modes:
0 to 1000 (0 to ca. 1.2 mm/s) for CU 30
0 to 255 (0 to ca. 1.2 mm/s) for CU 30CL
Software for PC
- for DOS, Win 95, Win 2000, Win XP and Win NT:
executable software with action
buttons
Borland Delphi 7.0 Unit
DLL for Windows
Wrapper-DLL for LabView etc.
Mass:
about 150 g (without sensor)
(also closed loop for 1 axis)
about 470 g (closed loop for 3 axes)
Dimensions:
without sensor
closed loop
118 x 86 x 26 mm (L x W x H)
124 x 170 x 55 mm (L x W x H)
Delivery includes: USB connecting cable (CK.030.USB0)
power supply (for 3 axes closed loop)
CU 30 closed loop (for three axes)
USB-Controller CU 30
0
Operation
Bio Technology
Microscopy
Quality Control
Metrology
R&D
without
sensor
0
Interface
USB
3
No. of axes 3
mechOnics ag
Unnützstr. 2B
81825 München
Fon +49 (0) 89/4202 4207
Part no.
CU.030. 0
1
closed loop (CL)
(with position sensor)
X
customized
X
customized
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Micropositioners
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Motor Controllers
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Index
Series CF
CF 30
USB-Controller for Piezo Electric Inertial Drives
Technical Data
Specifications
Special design for piezo driven inertial motors
Works with USB-voltage only (one axis move at the
same time
Works with an additional power supply (simultaneous
move off three axes possible)
Auto detection of the power supply
Operates up to 3 axes
Plain text ASCII commands for easy integration in your
own environment
Drivers for many operating systems
Every full step has 64 micro steps
Special wave forms for smooth movement
(interfaces or number of axes)
USB-interface (one axis)
or
in: 100 – 240 V
Interface (host):
Via USB 1.1
Via USB 2.0 (Full speed)
Interface (client): USB to serial converter
FT232R from FTDI
(www.ftdichip.com)
CF 30 (for three axes)
Power supply:
Connections:
Stage: 9pin Sub D-connector (female)
PC:
USB Type B socket (USB 1.1)
Speed modes:
-32767 to 32767 (0 to about 1.5 mm/s)
Sawtooth voltage (0 to 3.1 KHz)
Up to 800 commands/s
Software for PC
- for
Win XP and Vista (32 bit):
Executable software with GUI
Drivers from FTDI: Future Technology
Devices International Ltd.
Plain text ASCII commands
FTDI Drivers for Windows, Linux,
Mac OS X, ….
Mass:
about 195 g
Dimensions:
118 x 86 x 26 mm (L x W x H)
Power supply (for 3 axes)
USB-Controller CF 30
0
Operation
Bio Technology
Microscopy
Quality Control
Metrology
R&D
without
sensor
0
Interface
USB
3
No. of axes 3
mechOnics ag
Unnützstr. 2B
81825 München
Fon +49 (0) 89/4202 4207
Part no.
CF.030. 0
X
customized
X
customized
X
customized
Fax +49 (0) 89/4202 4206
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Micropositioners
Positionsensors
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Index
Series Nova
Nova
USB-Controller for Nova Devices
With the new Nova-Series you get a really inNOVAtive new controller system which is developed both for use in
university labs and for industrial uses.
The NOVA controller gives you the possibility to drive different positioning devices – piezo inertial drives (with or
without integrated electronic circuits), dynamic piezo motors, stepper motor drives with integrated electronic circuits
and switches or something equivalent at one PC.
The system is based on the industrial CAN – Bus which supplies both the needed power and the controlling data to
the end devices. These end devices has either to be intelligent (with own electronic circuits) or a special controller
device is needed, especially to connect the former piezo inertial drives as MS 30/38, MX 25/35 stages and so on.
The NOVA system gives you also the possibility to connect additional controllers via the CAN to CAN controller
together. This gives you the advantage to upgrade the number of the end devices which are controlled by one PC to fit
your requirements.
The following sketch shows the connection possibilities of the NOVA system.
data & power
CAN & 42 V (DC)
NOVA-System
NOVA-Controller
(NC6C)
CAN to CAN
electronics module
(NDEM 3)
electronics module
(NDEM 3)
MX 35
MS 38
piezo inertial device (NDS 40)
supply voltage 220 V (AC)
piezo motor devices
USB
PC
NOVA-Controller
(NC6U)
USB to Can
closed loop positioner (NDS 70)
switches (NDED 16), laser ...
supply voltage 220 V (AC)
stepper motor device (NDR 40)
NOVA-Controller (NC3)
supply voltage 12..24 V (DC)
For this new NOVA System we have developed the first linear positioning devices with piezo inertial drives and
integrated electronic circuit.
The NDS 40 is an open loop stage with 11 mm in travel and the NDS 70 stage is a closed loop stage with integrated
linear measuring system with 15 mm in travel and a resolution of up to 50 nm.
The following devices will be developed in the near future:
NDR 40 – Rotary stage with stepping motor
NDED 16 – switches for optical parts
Devices to control lasers and other parts in your optical assembly
mechOnics ag
Unnützstr. 2B
81825 München
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Series Nova
Nova
The following sketch shows you the driving possibilities and the stack based server client architecture of the NOVA
System.
Client Software
- GUI for single devices
- GUI for same device types
- GUI for bus management
Client DLL
Integration
- LabView
- VEE
- Matlab
- Delphi
- C/C++,C#
Client DLL
NOVA-Server
- independent process
- CAN-Stack
- interprocess communication
Technical specifications
- underlying CAN bus
- easy integration (client dll)
- mixing code from different
programming languages
- data and power use the same wire
- Client-Server communication
(running several applications
simultaneously)
- use of several NOVA-Controller
at the same time (up to 16)
- different controller sizes (ports)
- maximum 256 devices (one type)
USB
NOVA-Controller
USB-Driver
For integration in your software environment we offer a wide range of interfaces as LabView, MatLab, VEE, Delphi
and C/C++/C#.
Mechonics AG
Unnützstr. 2B
81825 München
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Micropositioners
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Series Nova
Nova
Technical Data
Power supply:
in: 100 – 240 V
out: 12 - 24 VDC with user-plug
or
220 V (AC)
Interface (host):
Via USB 2.0 (Full speed)
Interface (client): USB to CAN bus
Connections:
Stages:
PC:
RJ 45 (8pin)
USB Type B socket (USB 2.0)
Software for PC
Specifications
- for
 CAN-based USB-controller for piezo inertial, stepping
motor and dynamical piezo motor devices
 Several controllers for different numbers of end
devices available
 Possibility of easy connection for additional controllers
 Drivers for many operating systems
Win XP and Vista (32 bit):
Executable software with GUI
LabView, MatLab, VEE, Delphi and
C/C++/C#
Mass:
about 195 g (3 axes)
about 500 g (6 axes)
Dimensions:
3 axes
6 axes
118 x 86 x 26 mm (L x W x H)
124 x 170 x 55 mm (L x W x H)
Power supply (for 3 axes)
NOVA - Controller
Part no.
NC.00 . 000






3
Bio Technology
Microscopy
Quality Control
Metrology
R&D
Mechonics AG
Unnützstr. 2B
No. axes 3 axes
Interface
81825 München
Fon +49 (0) 89/4202 4207
6
6 axes
U
C
USB
CAN
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Micropositioners
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Series Nova
Technical Data
Power supply:
Connections to:
controller:
stages:
via CAN – Bus from NOVA controller
Erni SRCA (8pin)
Erni SRCA(4pin) open loop
Erni SRCA(12pin) closed loop
Step modes:
1/ 64 step
Mass:
about 50 g
Dimensions:
72 x 50 x 22 mm (L x W x H)
Specifications
 CAN-based controller for piezo inertial devices
 Open or closed loop controllers available
 Possibility of easy connection of former piezo inertial
devices as MS 30/38, MX 25/35 or MT 25
NOVA - Electronic module
Part no.
microstep
ND.EM .0000






Bio Technology
Microscopy
Quality Control
Metrology
R&D
Mechonics AG
Unnützstr. 2B
1
Operation
mode
81825 München
Fon +49 (0) 89/4202 4207
closed
loop
(1 axis)
3
open
loop
(3 axes)
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Micropositioners
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Customized Items
Index
Connecting cables
CK 25/30
Connecting Cables for Piezo Electric Inertial Drives
Part-no.
Description
Connections
Length
CK.025.0002
connecting cable for
1 x MT 25 (standard)
to 3pin inline plug
1m
CK.025.0003
connecting cable for 1 x MK 25
or 1 x MX 25/35 (standard)
to 4pin inline plug
1m
CK.025.1002
1 x MT 25 (open wires)
to 3 open wires
1m
CK.025.1003
connecting cable for 1 x MK 25
or 1 x MX 25/35 (open wires)
to 4 open wires
1m
CK.025.1062
vacuum connecting cable (up to10
mbar) for 1 x MT 25 (open wires)
-6
3pin inline plug to
to 3pin inline plug
1m
CK.025.1063
mbar) for1 x MK 25 or 1 x MX 25/35
(open wires)
-6
4pin inline plug
to 4pin inline plug
1m
CK.025.1092
mbar) for 1 x MT 25 (open wires)
-9
3pin inline plug to
directly mounting to MT 25
1m
CK.025.1093
mbar) for 1 x MK 25 or 1 x MX 25/35
(open wires)
-9
4pin inline plug to
directly mounting to MX 25/35
1m
CK.030.0001
1 x MS 30
(for closed loop controller CU 30 CL)
1 MMCX-plug (angled)
to 1 MMCX-plug (angled)
1m
CK.030.0001.3m
1 x MS 30
(for closed loop controller CU 30 CL)
1 MMCX-plug (angled)
to 1 MMCX-plug (angled)
3m
CK.030.0003
up to 3 x MS 30
(standard)
to 3 MMCX-plugs (angled)
1m
CK.030.0003.2m
up to 3 x MS 30
(standard)
2m
CK.030.0003.3m
up to 3 x MS 30
(standard)
3m
-6
2pin inline plug to
to 1 MMCX-plug
1m
-9
CK.030.1061
mbar) for 1 x MS 30 (open wires)
CK.030.1091
mbar) for 1 x MS 30 (open wires)
2pin inline plug to
directly mounting to MS 30
1m
CK.030.USBU
RS 232 – USB Transformer
(only applicable with CN 30)
to USB A – plug
1m
CK.030.USB0
USB connecting cable
USB A – to USB B connectors
1.8 m
For vacuum connections please ask with detailed technical specifications.
Mechonics AG
Unnützstr. 2B
81825 München
Fon +49 (0) 89/4202 4207
Fax +49 (0) 89/4202 4206
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Micropositioners
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Index
Series CD
CD 85
Controller for Servo Motors
Technical Data
No. of motors:
Types of motors:
Encoder:
Types of profiles:
Specifications
¾
¾
¾
¾
compact design, only 146 x 85 x 55 mm
for up to 4 motors with 100 Watts
power supply 24 Volts
I/O card with 16 cannels optionally
Controller for Servo Motors Part no.
CD.085.00
1
Motion control in
¾ Bio Technology
¾ Microscopy
¾ Quality Control
¾ Metrology
¾ R&D
mechOnics ag
Unnützstr. 2B
1 to 4 motors
brushed or brushless servo
incremental
trapezoidal, s-curve, velocity
profile, electronical gear, closed
curves
Contr. commands:
user friendly and selfinstructional commands and
parameters
Electronical gear:
master encoder selectable, slaveaxis selectable, factor “in motion”
alterable
Outline buffer:
any outline with up to 65,000
points programmable
Control parameter:
PID-portion, acceleration/velocity
parameter changeable during
motion
Monitoring functions: error limit and position error
window selectable,
comparator function, simultaneous
tracing of different parameters
during motion
Inputs per axis:
Encoder signals A, B, Index,
Home, End+, EndFree inputs:
16 inputs, protected against
misconnection, short-circuit proof
Free outputs:
16 outputs
Status/Errordisplay: 6 LED
Interfaces:
RS 232, CAN-Bus (standard
CAN 2.0B)
Supply voltage:
24 V
Servo-type
No. of axes
81825 München
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2
Brushed servo
Brushless servo
1
2
3
4
1
2
3
4
Fax +49 (0) 89/4202 4206
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Micropositioners
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Motor Controllers
Customized Items
Index
Series CD
Dimensions:
mechOnics ag
Unnützstr. 2B
81825 München
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Micropositioners
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Motor Controllers
Customized Items
Index
Series CS
CS 85
Controller for Stepper Motors
Technical Data
No. of motors:
Types of motors:
Encoder:
Types of profiles:
Specifications
¾
¾
¾
¾
compact design, only 146 x 85 x 55 mm
for up to 4 motors with 100 Watts
power supply 24 Volts
I/O card with 16 cannels optionally
Controller for Stepper Motors Part no.
CS.085.00
1
Motion control in
¾ Bio Technology
¾ Microscopy
¾ Quality Control
¾ Metrology
¾ R&D
mechOnics ag
Unnützstr. 2B
1 to 4 motors
stepper or micro stepper motors
incremental
trapezoidal, s-curve, velocity
profile, electronical gear, closed
curves
Contr. commands:
user friendly and selfinstructional commands and
parameters
Electronical gear:
master encoder selectable, slaveaxis selectable, factor “in motion”
alterable
Outline buffer:
any outline with up to 65,000
points programmable
Control parameter:
PID-portion, acceleration/velocity
parameter changeable during
motion
Monitoring functions: error limit and position error
window selectable,
comparator function, simultaneous
tracing of different parameters
during motion
Inputs per axis:
Encoder signals A, B, Index,
Home, End+, EndFree inputs:
16 inputs, protected against
misconnection, short-circuit proof
Free outputs:
16 outputs
Status/Errordisplay: 6 LED
Interfaces:
RS 232, CAN-Bus (standard
CAN 2.0B)
Supply voltage:
24 V
Type
No. of axes
81825 München
Fon +49 (0) 89/4202 4207
2
Stepper
Micro stepper
1
2
3
4
1
2
3
4
Fax +49 (0) 89/4202 4206
www.mechOnics.de
Micropositioners
Positionsensors
Motor Controllers
Customized Items
Index
Series CS
Dimensions:
mechOnics ag
Unnützstr. 2B
81825 München
Fon +49 (0) 89/4202 4207
Fax +49 (0) 89/4202 4206
www.mechOnics.de
Micropositioners
Position sensors
Motor Controllers
Customized Items
Index
Customized items of the mechOnics ag
Linear measuring stage MS 30 with linear measuring system and vacuum preparation
MS 30 with
- 8 mm travel
- vacuum preparation for 10-6 mbar
Linear measuring system PS 30 with
- grating period 20 µm
- measuring increments 0.1 µm
Motorized aperture for REM
Linear positioner for an aperture with
- 7 mm travel in x – direction
- 1 mm travel in y – direction
- positioning accuracy better 1 µm
- nonmagnetic materials
XYZ – Positioner for ultra low temperature microscope
-
3 mm travel in xyz
About 250 nm step width
Working temperature 4.2K
vacuum preparation for 10-6 mbar
Compact design
XYZ – Positioner MX 25 as Fiberpositioner
XYZ – Positioner MX 25 with
- 2 mm travel
- About 200 nm step width
- Velocity about 0.5 mm
- On profile rail with optical height 40 mm
mechOnics ag
Unnützstr. 2B
81825 Munich
Fon +49 (0) 89/4202 4207
Fax +49 (0) 89/4202 4206
www.mechOnics.de

complete product catalogue here

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