Oerlikon Leybold High Vac Pump Range

Transcription

240.00.02
Excerpt from the Oerlikon Leybold Vacuum Full Line Catalog 2013
Catalog Part High Vacuum Pumps
Edition 07/2013
High Vacuum Pumps
TURBOVAC / TURBOVAC MAG
DIP / LEYBOJET
COOLVAC / COOLPOWER / COOLPAK
Oerlikon Leybold Vacuum Full Line Catalog 07/2013
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Contents
High Vacuum Pumps
Turbomolecular Pumps TURBOVAC / TURBOVAC MAG . . . . . . . . . . . . . . . . . . . . . 321
General
General to TURBOVAC Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 324
Applications for TURBOVAC Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 330
Accessories for TURBOVAC Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 331
Products
332
356
360
364
368
Special Turbomolecular Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 376
Turbomolecular Pumps with Magnetic Rotor Suspension
MAG INTEGRA
with integrated Frequency Converter
with Compound Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 378
MAG DIGITAL
with separate Frequency Converter
with Compound Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 392
Accessories
Electronic Frequency Converters
for Turbomolecular Pumps with Mechanical Rotor Suspension . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 420
for Turbomolecular Pumps with Magnetic Rotor Suspension . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 428
Vibration Absorber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 434
Air Cooling Unit
for TURBOVAC ClassicLine Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 434
for TURBOVAC SL Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 435
Flange Heater for CF High Vacuum Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 435
Fine Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 436
Securing Collar for Octal Socket Plugs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 436
Solenoid Venting Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 436
Power Failure Venting Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 436
Power Failure Venting Valve, electromagnetically actuated . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 437
Purge Gas and Venting Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 437
for ClassicLine and SL Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 438
Adapter Set for Seal Gas and Venting Valve for the SL pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 438
Gas Filter to G 1/4" for Purge Gas and Venting Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 438
Accessories for Serial Interfaces RS 232 C and RS 485 C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 439
Miscellaneous
Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 440
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High
Vacuum Pumps
Turbomolecular Pumps with Mechanical Rotor Suspension
without Compound Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
with or without Compound Stage
with Frequency Converter for Attaching or Separate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
with Compound Stage
with Frequency Converter for Attaching or Separate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
with integrated Frequency Converter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
without integrated Frequency Converter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Oil Diffusion Pumps DIP, LEYBOJET . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 442
General
Applications and Accessories for Oil Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 442
Oil for Diffusion Pumps, for different fields of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 443
Oil for Diffusion Pumps, for different pump types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 444
Products
DIP Pumps, Water-Cooled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 458
LEYBOJET 630, Water-Cooled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 452
Accessories
Astrotorus Baffles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 454
Temperature dependant Switching Components for Automatic Pump System Control . . . . . . . . . . . . . . . . . . 456
Adsorption Traps with Aluminium Oxide Insert . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 457
Cryo Pumps, Cold Heads and Compressor Units
COOLVAC / COOLPOWER / COOLPAK . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 459
General
Applications and Accessories
Cryo Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 459
Cryogenics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 460
Cryo Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 461
Refrigerating Capacity of Cryogenic Cold Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 463
Cold Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 464
Compressor Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 467
Products
Cryo Pumps
Standard Cryo Pumps
BasicLine
COOLVAC 800 BL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Cryo Pumps with Fully Automatic Control
ClassicLine
COOLVAC 800 CL, 1.500 CL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
COOLVAC 2.000 CL, 3.000 CL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
COOLVAC 5.000 CL, 10.000 CL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
COOLVAC 18.000 CL, 30.000, 60.000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
468
470
474
478
482
Cryogenics
Cold Heads
Pneumatically driven
Single-Stage Cold Head COOLPOWER 50 and 140 T . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 484
Dual-Stage Cold Heads COOLPOWER 7/25, 5/100 and 5/100 T . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 486
Mechanically driven
Dual-Stage Cold Heads COOLPOWER 10 MD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 488
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Compressor Units
for pneumatically driven cold heads and pumps
with air cooling
COOLPAK 2000 A/2200 A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
with water cooling
COOLPAK 2000/2200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
COOLPAK 6000 H/6200 H/6000 HD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
for mechanically driven cold heads and pumps
with water cooling
COOLPAK 6000 HMD/6200 HMD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
490
492
494
496
General Accessories for Compressor Units COOLPAK . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 498
Refrigerator Cryostats
based on the RDK 6-320 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 499
optical, based on the RDK 6-320 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 500
Cryo Pumps / Cryogenics
Controllers and Monitoring Units for Cryo Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 502
COOLVAC ClassicLine, System Configuration
Single Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 505
Dual Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 506
Dual and Mutiple Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 507
Low Temperature Controller MODEL 9700 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 508
Low Temperature Measurement Instrument MODEL 211S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 509
Temperature Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 511
Safety Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 512
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High
Vacuum Pumps
Accessories
General to TURBOVAC Pumps
The turbomolecular pumps from
Oerlikon Leybold Vacuum generate a
clean high and ultra-high vacuum, are
easy to o
perate and are exceptionally
reliable. In connection with a well rated
backing pump, pressures below
10-10 mbar (0.75 x 10-10 Torr) can be
attained.
Hence, the pumping process in a
turbomolecular pump results from the
directed motion of the gas molecules
from the inlet flange to the fore-
vacuum port.
Oerlikon Leybold Vacuum offers two
product lines:
1.
2.
TURBOVAC line
Turbomolecular pumps with mechanical rotor suspension
TURBOVAC MAG line
Turbomolecular pumps with magnetic rotor suspension
TURBOVAC SL 80 turbomolecular pump
with frequency converter for attaching or separate
and compound stage
Each of the two product lines contains
“classic” turbomolecular pumps as
well as turbomolecular pumps with a
compound stage.
Oerlikon Leybold Vacuum is one of the
world’s leading manufacturer of turbomolecular pumps. Consequently, the
TURBOVAC and the TURBOVAC MAG
pumps are successfully used in many
applications. A list of the most important ones is given in the table
“Applications” in the chapter “General”.
Principle of Operation
TURBOVAC TW 361 turbomolecular pump
with mechanical rotor suspension
The turbomolecular pump is a turbine
with blades. By the momentum transfer from the rapidly rotating rotor
blades to the gas molecules their ini
tially non-directed thermal motion is
changed to a directed motion.
In the molecular flow range - i.e. at
pressures below 10-3 mbar
(0.75 x 10-3 Torr) - the mean free path
of the gas molecules is larger than the
spacing between rotor and stator
blades (typically some tenths of a milli
meter). Consequently, the m
olecules
collide primarily with the rotor blades
with the result that the pumping process is highly efficient.
In the range of laminar flow, i.e. at
pressures over 10-1 mbar
(0.75 x 10-1 Torr) the situation is completely different. The effect of the rotor
is impaired by the frequent collisions
between the molecules. Therefore, a
turbomolecular pump is not capable of
pumping gases at atmospheric pres
sure thus necessitating the use of a
suitably rated forevacuum pump.
To create the directed motion of the
gas molecules, the tips of the rotor
blades have to move at high speeds.
Hence, a high rotational speed of the
rotor is required. In the case of Oerlikon
Leybold Vacuum turbomolecular
pumps the rotor speeds vary from
about 36,000 rpm for the larger rotor
diameters (e.g. TURBOVAC 1000
about 20 cm (7.87 in.)) to 72,000 rpm.
for small rotor diameters (e.g.
TURBOVAC 50 about 6 cm (2.36 in.))
TURBOVAC MAG W 1500 CT turbomolecular
pump with magnetic rotor suspension and
compound stage
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Pumping speed (volume flow rate),
S, [l x s-1]
The pumping speed for a given type of
gas depends on the diameter of the
rotor and the high vacuum flange, the
rotor/stator design, the rotor speed and
the molecular weight of the gas.
The pumping speed S is a non-linear
function of the inlet pressure p1:
S = S(p1).
Gas throughput, Q, [mbar x l x s-1]
Gas throughput Q is linked to the
pumping speed S and the inlet
pressure p1 through the relationship
Q = Q(p1) = p1 x S(p1).
The maximum permissible gas through
put Qmax is attained at the maximum
permissible inlet pressure p1, max:
Qmax = Q(p1, max).
Compression, K
For a given type of gas, compression K
is defined as the ratio between forevacuum pressure pVV (= pressure on the
forevacuum side of the turbomolecular
pump) and the high vacuum pressure
pHV (= pressure on the high vacuum
side of the turbomolecular pump):
k = k(pVV) = pVV / pHV = pVV / pHV(pVV).
TURBOVAC Product Line
Compression depends very much on
the gas throughput: at a given forevacuum pressure, compression increases
when the gas throughput is reduced.
Idle compression, K0
Idle compression K0 of a turbomolecular pump is defined as the amount of
compression of this pump at “Zero”
gas throughput. What is problematic
about this definition is the fact that the
demanded “Zero” throughput can
never be implemented in practice (finite
leak rate, degassing of sealing components, desorption from wall surfaces).
Data on idle compression need therefore to be gained from measurements
run at extremely low throughputs.
Idle compression of a pump e
quipped
with metal seals is s ignificantly higher
compared to the same pump sealed
with O-rings.
Ultimate pressure (base pressure),
pult , [mbar]
The ultimate pressure of a turbomole
cular pump is defined as that pressure
which is attained in the test chamber
48 hours after a 24 hour degassing
period of the measurement system.
The ultimate pressure will chiefly depend on the foreline pump used
and the type of seal used at the high
vacuum flange.
The TURBOVAC pumps are turbo
molecular pumps with mechanical
rotor suspension which are used in
the pressure range from 10-1 mbar
(0.75 x 10-1 Torr) to 10-10 mbar
(0.75 x 10-10 Torr). Pumping speeds
for air vary from 35 l x s-1 (inlet flange
diameter = 40 mm (1.57 in.)) to
1,600 l x s-1 (inlet flange diameter
= 250 mm (9.84 in.)).
Through the compact design, the
most reliable ceramics ball bearings
and the simplicity of operation, this
line of pumps is used in all high
vacuum and ultra-high vacuum
areas of application.
In particular the TURBOVAC pumps are
very successfully operated in mass
spectroscopy applications, gas and
liquid chromatographic analysis, CD,
DVD and hard disk production, manufacturing of large-surface o
ptical layers,
and non-corrosive semiconductor
fabrication processes.
The most important advantages of
the TURBOVAC product line are:
- Oil-free pumps for the generation of
clean high and ultra-high v acuum
conditions
- Highly performance in any
orientation
- Highly degree of operating reliability
- Easy to operate
- Compact design
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High
Vacuum Pumps
Characteristic Quantities
Ceramic Ball Bearings
Technology
Components supplied with
the Turbomolecular Pumps
TURBOVAC MAG
Product Line
All TURBOVAC pumps are fitted with
ceramic ball bearings, i.e. ceramic
balls are running in steel races. The
bearings are lubricated for life by
grease.
Ceramic balls are lighter, harder and
smoother than balls made of steel.
Therefore, with ceramic balls the wear
on the races is significantly reduced.
Consequently, the lifetime of the bear
ings, and hence the lifetime of the
pump, is increased.
The TURBOVAC pumps fitted with
grease-lubricated ceramic ball bearings
can be mounted in any orientation.
As the ball bearing is encapsulated, the
grease can not enter the high vacuum
space, even if the pump is
mounted up-side-down.
High vacuum Flange
ISO-KF, ISO-K and ISO-F models
- Accessories need to be ordered
separately
The TURBOVAC MAG pumps are
turbomolecular pumps with
magnetic rotor suspension which are
used in the pressure range from
10-1 mbar (0.75 x 10-1 Torr) to
10-10 mbar (0.75 x 10-10 Torr).
Pumping speeds for air vary from
300 l x s-1 (inlet flange diameter =
100 mm (3.94 in.)) to 3,200 l x s-1
(inlet flange diameter = 320 mm
(12.6 in.)).
The TURBOVAC MAG pumps are
mostly installed on semiconductor processing lines like etching, CVD, PVD
and ion implantation, i.e. in applications
where corrosive gases need to be
pumped. Also electron beam micro
scopy is an important area of application for these pumps.
ANSI Models
- O-ring included in the delivery
CF Models
- Without gaskets 1),
but with screws 2)
Forevacuum Port
- Centering rings, O-rings and clamps
for all ISO-KF type forevacuum
flanges are included.
Purge / vent ports are blanked-off
1)
For CF gaskets, see Catalog Part “Flanges and
Fittings”
2)
Only for MAG pumps
The most important advantages of
the T
URBOVAC MAG product line
are:
- Hydrocarbon-free pumps for the
generation of clean high and ultrahigh vacuum c
onditions
- High performance in any o
rienta-tion
- High degree of operating reliability
- Extremely low vibration
- Designed for pumping of corrosive
gases
- Almost maintenance-free
F1,2,3
A
B
C
D
E
F
F1
F2
F3
High vacuum flange
Forevacuum flange
Venting flange
Purge gas flange
Water cooling connection
Electrical connection
Connection for DC motor
Connection for regulator
Connection for axial sensor
Flange designations used in this catalog part
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All modern analytical methods for gas,
liquid and plasma analysis – like for
example GC-MS, LC-MS and ICP-MS
– rely on mass spectrometers and for
this reason require adequate high
vacuum conditions. Also in e
lectron
microscopes and many s urface
analysis instruments the production of
a high vacuum is e
ssential.
In over 90% of all high vacuum applications, the turbomolecular pump has
been found to be ideal. Thanks to the
hydrocarbon-free vacuum, most simple
operation, compact design and almost
maintenance-free operation it has in
most cases displaced above all the
diffusion pump.
On the basis of decades of experience
and in cooperation with research facilities and the manufacturers of analytical
instruments,
Oerlikon Leybold Vacuum has continually optimized its products.
Through the TURBOVAC wide range
series, a further improvement has been
attained, making available to users in
the area of analytical engineering highly
flexible and reliable products.
Owing to the modular concept the user
may
- adapt his vacuum system p
recisely
to his requirements
Cartridge benefits, which
convince
- perfectly integrate the components
within his system and
- Higher effective pumping speed
find the most cost-effective system
configuration for his needs.
- Compact vacuum system
Moreover, in response to special cus
tomer requirements, though Oerlikon
Leybold Vacuum has, through the
introduction of the TURBOVAC multi
inlet series, achieved a major step
ahead for analytical instruments.
Up to three analysis chambers can be
pumped down simultaneously by a
single multi inlet pump. These pumps
are fine tuned with regard to pumping
speed and gas throughput so as to
attain higher detection sensitivities for
analytical systems, a smaller footprint
and an increased sample throughput.
The benefits for the customers are the
extreme compactness of the vacuum
systems without sacrificing performance density, simple installation,
stable vacuum connections and, compared to the use of discrete individual
pumps, significantly lower investment
costs for the entire system. The cartridge solution, moreover, allows for an
innovative and cost-effective design of
the customer’s system and during
servicing a simple replacement of the
active unit without involved assembly
work and leak searching.
- No losses in conductance
- Easy pump replacement without
having to disassemble the highly
sensitive mass spectrometer
chambers
The benefits for the customers using
Oerlikon Leybold Vacuum products are
reflected by the efficiency of the analy
tical instruments:
- Increase in detection sensitivity
- Smaller analytical systems
High
Vacuum Pumps
Use of Turbomolecular Pumps
in Analytical Instruments
- Increase in sample throughput
- Reduction of system costs
- Lower maintenance costs
In combination with backing pumps
like the TRIVAC or SCROLL pump,
Oerlikon Leybold Vacuum is able to
offer the best vacuum system opti
mized for all major applications in the
area of a
nalytical instrumentation.
TURBOVAC multi Inlet TW 220/150/15 fitted in an analytical instrument
(by courtesy of Thermo Fisher Scientific)
leybold
327
in the Area of Semiconductor
Processes
in the Area of Coating
Systems
In the semiconductor industry turbomolecular pumps are used on the
following processes, among others:
Coating of optical and magnetic stor
age media, optical components as well
as architectural glass requires high
vacuum conditions. This is the only way
to ensure that the formed layers will be
uniform and adhere to the substrate.
-Etching
-Sputtering
- Ion implantation
-CVD
-Lithography.
In these applications pumping of
aggressive gases is often required.
This may necessitate the use of pumps
equipped with a purge gas facility or a
magnetic suspension in order to avoid
damaged bearings. Especially during
metal etching, deposits may occur in
the forevacuum space of the turbomolecular pump. In order to prevent this
the pumps must be heated to a certain
temperature. Such temperature
controlled variants are optionally available for the MAG 1500 C, MAG 2000 C,
MAG 2800 and MAG 3200. In contrast
to turbomolecular pumps with
mechanical bearings, magnetically levitated pumps provide the advantage
that they prevent overheating of the
bearings at high gas flows and
effectively exclude any damage to the
magnetic bearings by aggressive
media.
In electron microscopes and in lithographic equipment, low vibration levels
are exceptionally important. For this
reason magnetically levitated turbomolecular pumps should be used here.
The way in which the vacuum is
generated has a significant impact on
the quality of the coating. By pumping
the vacuum chamber down to
pressures in the range of 10-6 mbar
(0.75 x 10-6 Torr), interfering gas and
water molecules are removed from the
processing chamber. In the case of
sputtering the coating process is run
in the pressure range between 10-3
and 10-2 mbar (0.75 x 10-3 and
0.75 x 10-2 Torr), and in the case of
evaporation coating, p
ressures below
10-4 mbar (0.75 x 10-4 Torr) are utilized.
The turbomolecular pump meets all
requirements of the customers as to a
hydrocarbon-free vacuum, very simple
operation, compact design and almost
maintenance-free operation in an
almost ideal manner. The range of
pumps from Oerlikon Leybold Vacuum
includes pumps with flange diameters
ranging from 40 mm to 250 mm
(1.57 in. to 9.84 in.) nominal width.
Thus the right pump is available for
each application, be it coating of data
memories (CD, DVD, hard discs), coat
ing of tools and coating of precision
lenses in the area of optical components, displays or architectural glass.
Research and Development
In the area of research, all types of
turbomolecular pumps from Oerlikon
Leybold Vacuum are being used.
In the case of particularly stringent
requirements such as low vibration
levels, a TURBOVAC with magnetic
bearings should be selected; the same
applies to those applications in which
entirely hydrocarbon-free pump
systems are required.
Nuclear fusion technology
High performance glass coating plant
The recommended backing pumps are
rotary vane pumps from the TRIVAC
range, possibly fitted with the BCS
system.
Entire high vacuum equipment of a CD/DVD
coating system with TURBOVAC TW 250 S
pumps
328
leybold
Magnetic Bearings
Technology
TURBOVAC MAG W 1600 iP turbomolecular pump with magnetic rotor suspension, compound stage
and integrated frequency converter
leybold
In 1976 Oerlikon Leybold Vacuum
started the market introduction of the
famous T
URBOVAC 560 M. This was
the first magnetically levitated turbo
molecular pump which became commercially available. Today, Oerlikon
Leybold Vacuum is employing the
well-proven and reliable 5-axes active
suspension design principle.
Five axes with active bearings
The rotor position is actively c
ontrolled
by electromagnets in all 5 degrees of
freedom. The T
URBOVAC
MAG 300/400, MAG 600/700,
MAG 830/1300, MAG 1500,
MAG 1600/1700, MAG 2000,
MAG 2200 and MAG 2800/3200 are
equipped with such a bearing system.
329
High
Vacuum Pumps
The world-wide success of the
TURBOVAC MAG product line results
from more than 30 years of
experience of Oerlikon Leybold
Vacuum in the d
evelopment and
manufacturing of turbomolecular
pumps with m
agnetically levitated
rotors.
1,
60 361
0
C (C)
10
00
11 C
00
SL C
80
SL
3
TW 00
2
TW 50
S
2
M 40
AG 1
M W
AG 3
0
M W 0/4
AG 1 0
0
M W 300 /60
AG 3 /1 0
0 6 /
M W 0/ 00 700
AG 8 40 /1
0 7 iP
M W 30/ /60 00
AG 1 13 0 /2
2
5 0 /
M W 00 0 C 700 00
AG 2 C
iP
P
(L
00 T
)
M
AG W 2 0 C
20 /C
W
0 T
28 C
00
/3
20
0
C/
CT
15
50
Pu
m
ps
Applications for TURBOVAC Pumps
Applications
Analytical Instruments
Leak detectors
Mass spectrometers
n nn nnn n n
n nn n nnnn
Gas chromatography
(GC-MS)
n nn n nnn n
Liquid chromatography
(LC-MS)
Quadrupol time of flight (Q-TOF)
n nn nn nnn n
n nnn n
Matrix assisted laser
desorption time of flight
(MALDI-TOF)
nn
Inductively coupled
plasma mass spectrometry
(ICP-MS)
nn n
Electron beam microscopy
nnn n
nnn n
nn nnn n
Coating
Data storage / optical
Data storage / magnetic
Flat panel displays
Optical coating
Large area coating
Decorative coating
Metallization
Wear protection
Metallurgy
TV tube manufacturing
nn
nnnnn nnn
n n nn nnnnn nnn
n n n nnnnn nnn
n n n nn nnnnnn nnn
n n nn nnnn
n n nn nnnn
n n nn nnnn
n n n nn nnnn
n n nnnnnn
nn n
R&D
(Research and Development)
Surface analysis
nnn nn n n n n n
UHV / XHV systems
n n n n n n
Particle accelerators
Fusion experiments
Space simulation
nn nn n n n n n n nnnn
nnnn
n n nn
n n nn
nn
nn n
n n n n
n n n n
n
n
n
n
Semiconductor Processes
Load locks and transfer chambers
n n n n n n n n n n nnn
Etch
n n
PECVD
n nn n n n n n
PVD
n n nn n n n n n
Ion implantation
n
330
n
n n n n n n
leybold
Accessories
1,
3
60 61
0
10 C
00
11 C
00
SL C
8
SL 0
3
TW 00
2
TW 50
24 S
M 01
AG
M W
AG 3
M W 00/
AG 1 40
0
M W 300 /6
AG 3 /1 00
00 60 /7
M W /4 0/ 00
AG 8 0 1
3 0 7 iP
M W 0/1 /60 00/
AG 1 3 0/ 22
50 00 70 0
M
AG W 0 C C 0 P 0 iP
2
(L
T
)
M W 000
AG 2
20 C/C
W 0
T
28 C
00
/3
20
0
C/
CT
15
50
Pu
m
ps
Accessories for TURBOVAC Pumps
Page
Frequency Converters
Turbo.Drive TD 20
420
classic
n n n n
422
n
TURBO.DRIVE TD 240
423
n
TURBO.DRIVE TD 400
424
n n n
Power supply
TURBO.POWER 300
426
n n n
Power supply
TURBO.CONTROL 300
426
n n n
MAG.DRIVE S
428
nn
MAG.DRIVE digital
430
n n n n n
Power supply
TURBO.POWER 500
432
n
Vibration absorber
434
n n n n n n n n nn
Air cooling unit
434
n n n nn nn
Air cooling unit
for SL pumps
435
n n
Flange heaters
for CF flanges
435
n n n nn n n n nn
Fine filter
436
n n
Securing collar
for octal socket plugs
436
n n n n
436
n n n n nn n n n n n nn
Venting valve
Power failure venting valve 436/437 n n n n nn n n n n nn n n n
Purge gas and venting valve
437
n n n nnn n n
for ClassicLine and SL Pumps
438
n n n n n n
Adapter set
438
n n
Gas filter G 1/4"
438
n n n n n n
Water cooling kit
–
Accessories for serial interfaces
RS 232 C and RS 485 C
leybold
439
High
Vacuum Pumps
NT 10
n
nn n n n nn
n n n n n n n n nnn n n n n
331
Products
Mechanical Rotor Suspension
without Compound Stage
TURBOVAC 50
Typical Applications
- Leak detectors
- Mass spectrometers
- Electron beam microscopy
- TV tube manufacturing
- Load locks and transfer chambers
- High vacuum chambers
Technical Features
DN
A
- Small footprint
C
- Installation in any orientation
a
C
- Cooling by convection is sufficient
for most applications
B
h
- Air and water cooling can be added
easily
B
b
h2
h1
- Oil-free pump for generating
clean high and ultra-high vacuum
conditions
Top view
DN 16 KF
Ød
DNa b d hh1h2
40 ISO-KFmm 54.5 55 93 16671.5119
in. 2.152.173.666.542.814.69
63 ISO-K mm 54.5 55 93157.571.5119
in. 2.152.173.666.202.814.69
Dimensional drawing for the TURBOVAC 50
Advantages to the User
10 3
Pumping Speed
l x s -1
10
-Space-saving
N2
He
H2
- Easy to integrate into complex
vacuum systems
2
- Low operating costs
- Highly reliable operation also in
processes loaded with particles
10 1
10
0
10
-5
2
4
6 8
10
-4
10
-3
10
-2
Inlet Pressure
10
-1
10
0
mbar
10
1
Pumping speed as a function of the inlet pressure (TURBOVAC 50 with flange DN 63 ISO-K)
Turbovac50-Saugverm.
332
leybold
Technical Data
Connection
Inlet
Outlet
DN DN Pumping speed
N2
Ar
He
H2
Gas throughput
N2
Ar
He
H2
mbar
mbar
mbar
mbar
·
·
·
·
40 ISO-KF • 40 CF
16 ISO-KF
63 ISO-K • 63 ICF
16 ISO-KF
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
33
30
36
28
55
50
48
30
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
0,90
0,70
0,30
0,25
1,00
0,80
0,40
0,30
Compression ratio
N2
Ar
He
H2
Ultimate pressure
mbar (Torr) < 5 x 10-8 (< 3.8 x 10-8)
< 5 x 10-8 (< 3.8 x 10-8)
Max. foreline pressure for N2
mbar (Torr) 1 x 10-1 (7.5 x 10-2)
1 x 10-1 (7.5 x 10-2)
TRIVAC D 2,5 E
TRIVAC D 2,5 E
72 000
72 000
Recommended forevacuum pump
Nominal rotation speed
min-1 (rpm) Run-up time, approx.
Max. power consumption
2
2
5
2
x
x
x
x
106
106
102
102
2
2
5
2
2
W 45
45
°C (°F) Cooling
standard
optional
+10 bis +55 (+50 to +131)
Convection
Air / Water
Convection
Air / Water
I x h-1 Permissible cooling water pressurebar Permissible cooling water temperature
Weight
10 mm hose nozzle
10 mm hose nozzle
15 to 25
15 to 25
3 to 7
3 to 7
°C (°F) +10 to +35 (+50 to +95)
+10 to +35 (+50 to +95)
kg (lbs) 2.0 (4.4)
2.0 (4.4)
Technical Data
Mains connection
15
+10 to +55 (+50 to +131)
Cooling water connection
Cooling water consumption
TURBOTRONIK NT 10
50/60 Hz
100-120 or 200-240 V
W
45
Max. output voltage
V
3 x 150
Max. output current
A
6
Protection rating
Admissible ambient temperature
Dimensions (W x H x D)
Weight, approx.
leybold
106
106
102
102
min 2
Power consumption at ultimate pressure W 15
x
x
x
x
High
Vacuum Pumps
TURBOVAC 50
IP
°C (°F)
20
0 to +40 (+32 to +104)
mm (in.)
106 x 128 x 233 (4.17 x 5.04 x 9.17)
kg (lbs)
1.5 (3.3)
333
TURBOVAC 50
Ordering Information
TURBOVAC 50
DN
DN
DN
DN
40
40
63
63
P
854
853
854
854
ISO-KF, convection
CF, convection
ISO-K, convection
CF, convection
00
99
01
02
FC PS
Mandatory Accessories
Electronic frequency converter TURBOTRONIK NT 10
with EURO plug, 180-240 V
with US plug, 90-140 V
Connecting cable converter – TURBOVAC
01.0 m (03.5 ft)
03.0 m (10.5 ft)
05.0 m (17.5 ft)
10.0 m (35.0 ft)
20.0 m (70.0 ft)
Forevacuum pump
TRIVAC D 2,5 E
220-240 V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version
110-120 V, 200-240 V, 50/60 Hz; without plug, world version
110-120 V, 50/60 Hz; NEMA plug, US version
100 V, 50/60 Hz; NEMA plug, Japan version
Part No.
859 00
859 01
200 11 609
121 08
121 09
161 10
800150V2000
140
140
140
140
000
001
002
003
For further types, see Catalog Part “Oil sealed Vacuum Pumps”
334
leybold
P
Connecting cable,
max. 20 m
TURBOVAC 50
FC
Mains cable
PS
TURBOVAC 50
Accessories, optional
Part No.
Air cooling unit
230 V AC
100 - 115 V AC
Water cooling kit (hose nozzles
High
Vacuum Pumps
NT 10
854 05
800152V0015
 10
800135V0003
mm (0.4 in.)
Vibration absorber
DN 63 ISO-K
800131V0063
Solenoid venting valve, normally closed
24 V DC, DN 16 ISO-KF
800120V0011
Power failure venting valve, normally open
800120V0021
Included in the Delivery of the Pump
P
ISO-K
Inlet screen, centering ring with FPM sealing ring, outer ring
ISO-KF
Inlet screen, centering ring with FPM O-ring, Spannring
Foreline Flange
Centering ring with O-ring, Clamping ring
Included in the Delivery of the Frequency Converter
FC PS
Mains cable
leybold
335
TURBOVAC 151, 151 C
ClassicLine
Turbomolecular pumps without a
purge gas facility are only suited for
pumping of air or inert gases.
They are not suited for pumping of
aggressive or reactive gases.
TURBOVAC pumps with a “C” in the
type designation are equipped with a
purge gas facility.
The purge gas protects the bearing
area and the motor of the TURBOVAC.
DN
A
- Leak detectors
F
60°
C
a1
a
30°
a2
C
h
D
D
E
h3
h1
h4
E
20°
h2
- Optical coating
- R & D
-UHV systems
-Particle accelerators
B
B
ød1
l
Top view
b
Technical Features
ød
151
151 C
b dd1l
DNh h h1h2h3h4aa1a2
100 ISO-K mm20720788 4712673 76 79 78 7613210136
in. 8.148.143.461.854.962.872.993.113.072.995.200.395.35
100 CF
mm224 – – 4712673 76 79 78 7613210136
in. 8.82 – – 1.854.962.872.993.113.072.995.200.395.35
- Small footprint
- Operation in any orientation
- Oil-free pump for generating clean
high and ultra-high vacuum
conditions
- Bearing temperature measurement
through the TURBO.DRIVE
TD 20 classic
Dimensional drawing for the TURBOVAC 151 and 151 C
1000
500
Pumping Speed
Ixs
-1
-Space-saving
200
vacuum systems
100
10
-6
10
2
4
6
N2
Ar
He
H2
8
10
-5
10
-4
10
-3
10
-2
mbar
10
-1
Inlet Pressure
Pumping speed as a function of the inlet pressure (TURBOVAC 151 with flange DN 100)
336
leybold
Connection
Inlet
Outlet
DN DN Pumping speed
N2
Ar
He
H2
Gas throughput
N2
Ar
He
H2
mbar
mbar
mbar
mbar
·
·
·
·
100 ISO-K
25 ISO-KF
100 CF
25 ISO-KF
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
145
150
135
115
145
150
135
115
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
1.5
1.3
1.5
1.0
1.5
1.3
1.5
1.0
Compression ratio
N2
Ar
He
H2
Ultimate pressure
mbar (Torr) < 1 x 10-10 (< 7.5 x 10-11)
< 1 x 10-10 (< 7.5 x 10-11)
mbar (Torr) 5 x 10-1 (3.8 x 10-1)
5 x 10-1 (3.8 x 10-1)
from TRIVAC D 4 B to D 16 B
50 000
50 000
1
1
2
8
x
x
x
x
109
109
104
102
1
1
2
8
min 2
°C (°F) Cooling
standard
optional
300
10 to 55 (50 to 131)
Water
Air
Water
Air
10 mm hose nozzle
10 mm hose nozzle
15 to 35
15 to 35
3 to 7
3 to 7
°C (°F) 10 to 25 (50 to 77)
10 to 25 (50 to 77)
kg (lbs) 8 (17)
8 (17)
Weight
Technical Data
Mains connection
Turbo.Drive TD 20
50/60 Hz
500
Max. output voltage
V
3 x 47
Max. output current
A
5
Without, RS 232 C, RS 485 C, Profibus or 25-way terminal strip
Interface
Protection rating
Weight, approx.
leybold
classic
100 to 240 V (+15 % / -10 %)
W
70
10 to 55 (50 to 131)
109
109
104
102
2
W 300
x
x
x
x
High
Vacuum Pumps
TURBOVAC 151 (C)
Technical Data
IP
°C (°F)
20
0 to +45 (+32 to +113)
mm (in.)
213 x 128 x 315 (8.39 x 5.04 x 12.40)
kg (lbs)
4.0 (8.8)
337
TURBOVAC 151 (C)
TURBOVAC 151 (C)
DN
DN
DN
DN
100
100
100
100
P
ISO-K, water-cooled
ISO-K, water-cooled (C version)
CF, water-cooled
CF, water-cooled (C version)
Part No.
856
856
856
103
31
35
32
41
FC PS
Turbo.Drive TD 20
without interface
with RS 232 C interface
with Profibus
with 25-pol I/O
800075V0001
800075V0002
800075V0004
800075V0003
800075V0005
Connecting cable TURBOVAC - frequency converter
003 m (10.5 ft)
005 m (17.5 ft)
010 m (35.0 ft)
020 m (70.0 ft)
050 m (175.0 ft)
060 m (210.0 ft)
080 m (280.0 ft)
140 m (490.0 ft)
857 65
857 66
857 67
857 68
800152V0008
800152V0007
800152V0080
800152V0140
classic
Mains cable
3 m (10.5 ft)
EURO plug
UK plug
US plug 5-15 P
2 m (7.5 ft)
US plug 115 V AC
800102V0002
800102V0003
800102V1002
992 76 513
Forevacuum pump
TRIVAC D 4 B
1 phase motor; 230 V, 50 Hz
1 phase dual voltage motor; 100-120 V / 200-240 V; 50/60 Hz
112 45
112 55
140 082
1)
TRIVAC D 16 B
112 65
1 phase motor; 230 V, 50/60 Hz
113 25
3 phase motor; 200-240 V/380-400 V, 50 Hz / 200-240 V/380-480 V, 60 Hz
112 66
1)
TRIVAC D 8 B
140 081
SCROLLVAC SC 30 D
1 phase motor; 200-230 V, 50/60 Hz
133 002
1 phase motor; 100-115 V, 50/60 Hz
133 102
3 phase motor; 380-415 V, 50 Hz / 200-230 V, 460 V 60 Hz
133 004
1)
For further types, see Catalog Parts
“Oil Sealed Vacuum Pumps” and “Dry Compressing Vacuum Pumps”
The mains cord (Part No. 200 81 091) must be ordered additionally
338
leybold
P
Connecting cable
TURBOVAC 151 (C)
FC
Mains cable
PS
TURBOVAC 151 (C)
Part No.
Air cooling unit
230 V AC
100 - 115 V AC
855 31
800152V0016
Flange heater
DN 100 CF, 230 V, 50 Hz
DN 100 CF, 115 V, 60 Hz
854 27
854 28
Vibration absorber
DN 100 ISO-K
DN 100 CF
800131V0100
500 071
Solenoid venting valve, with gas admission filter, normally closed
800120V0011
Power failure venting valve, with gas admission filter, normally open
800120V0021
gas flow at 1 bar 0.4 mbar x l x s-1 (24 sccm),
pump connection DN 10 ISO-KF / gas connection G 1/4"
230 V AC
100 - 115 V AC
24 V DC
800152V0014
800152V0041
800152V0013
Gas filter to G 1/4" for purge gas and venting valve
800110V0012
Replacement filter (for gas filter to G 1/4" for purge gas and venting valve)
E 200 18 515
P
ISO-K
CF
Inlet screen
Foreline Flange
Centering ring with O-ring, clamping ring
Pivoted threaded fittings to replace the included hose nipples
leybold
High
Vacuum Pumps
TURBO.DRIVE TD20 classic
Water Cooling
339
TURBOVAC 361, 361 C
ClassicLine
Turbomolecular pumps without a purge
gas facility are only suited for pumping
of air or inert gases.
They are not suited for pumping of
aggressive or reactive gases.
TURBOVAC pumps with a “C” in the
type designation are equipped with a
purge gas facility.
The purge gas protects the bearing
area and the motor of the TURBOVAC.
A
DN
60∞
C
C
ød
a
a
h4
ød
B
h3
a
h4
D
E
h
D
E
C B
h3
Top view
30∞
60∞
Aa
a DN
- Leak detectors
b
l
F
CB
D
B
E
ø d1
20∞
D
E
ø d1
h1
Dimensional drawing for the TURBOVAC 361 and 361 C
-6
10
-5
10
-4
10
-3
10
-2
Torr
500
cfm
500
Pumping speed
Technical Features
- Small footprint
conditions
TD 20 classic
-Space-saving
-1
200
100
100
50
10
10
-6
10
- R & D
-UHV systems
-Particle accelerators
750
1000
Ixs
- Optical coating
20∞
h2
361
361 C
a
DNh
h h1h2h3h4a bd1l
100 ISO-Kmm25425488 4713577 98 94 10166
in. 10 10 3.461.855.313.033.863.700.396.54
100 CF mm268 – – 4713577 98 94 10166
in.10.55 – – 1.855.313.033.863.700.396.54
160 ISO-Kmm22722788 4713577 98 94 10166
in. 8.948.943.461.855.313.033.863.700.396.54
160 CF mm226 – – 4713577 98 94 10166
in. 8.90 – – 1.855.313.033.863.700.396.54
10
- Data storage
b
30∞
hh1
h2
l
F
2
4 6
N2
Ar
He
H2
8
10
-5
10
-4
10
Intake Pressure
-3
10
-2
mbar
10
vacuum systems
-1
Pumping speed as a function of the inlet pressure (TURBOVAC 361 with flange DN 100)
340
leybold
Connection
Inlet
Outlet
DN DN Pumping speed
N2
Ar
He
H2
Gas throughput
N2
Ar
He
H2
mbar
mbar
mbar
mbar
·
·
·
·
100 ISO-K • 100 CF
25 ISO-KF
160 ISO-K • 160 CF
25 ISO-KF
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
345
350
340
340
400
410
380
370
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
3.0
2.5
3.0
2.0
3.0
2.5
3.0
2.0
Compression ratio
N2
Ar
He
H2
Ultimate pressure
mbar (Torr) < 1 x 10-10 (< 7.5 x 10-11)
< 1 x 10-10 (< 7.5 x 10-11)
mbar (Torr) 5 x 10-1 (4 x 10-1)
5 x 10-1 (3.8 x 10-1)
45 000
45 000
1
1
6
3
x
x
x
x
109
109
104
103
1
1
6
3
min 2
°C (°F) Cooling
standard
optional
300
10 to 55 (50 to 131)
Water
Air
Water
Air
10 mm hose nozzle
10 mm hose nozzle
15 to 35
15 to 35
3 to 7
3 to 7
°C (°F) 10 to 25 (50 to 77)
10 to 25 (50 to 77)
kg (lbs) 12 (26)
12 (26)
Weight
Technical Data
Mains connection
Turbo.Drive TD 20
50/60 Hz
500
Max. output voltage
V
3 x 47
Max. output current
A
5
Interface
Protection rating
Weight, approx.
leybold
classic
100 to 240 V (+15 % / -10 %)
W
70
10 to 55 (50 to 131)
109
109
104
103
2
W 300
x
x
x
x
High
Vacuum Pumps
TURBOVAC 361 (C)
Technical Data
IP
°C (°F)
20
0 to +45 (+32 to +113)
mm (in.)
213 x 128 x 315 (8.39 x 5.04 x 12.40)
kg (lbs)
4.0 (8.8)
341
TURBOVAC 361 (C)
TURBOVAC 361 (C)
DN
DN
DN
DN
DN
DN
DN
100
100
100
100
160
160
160
P
ISO-K, water-cooled
CF, water-cooled
CF, water-cooled (C version)
ISO-K, water-cooled
CF, water-cooled
Part No.
856
856
856
112
856
856
856
70
75
71
09
72
77
73
FC PS
Turbo.Drive TD 20 classic
without interface
with Profibus
with 25-pol I/O
800075V0001
800075V0002
800075V0004
800075V0003
800075V0005
003 m (10.5 ft)
005 m (17.5 ft)
010 m (35.0 ft)
020 m (70.0 ft)
050 m (175.0 ft)
060 m (210.0 ft)
080 m (280.0 ft)
140 m (490.0 ft)
857 65
857 66
857 67
857 68
800152V0008
800152V0007
800152V0080
800152V0140
Mains cable
3 m (10.5 ft)
EURO plug
UK plug
US plug 5-15 P
2 m (7.5 ft)
US plug 115 V AC
800102V0002
800102V0003
800102V1002
992 76 513
Forevacuum pump
TRIVAC D 16 B
112 65
113 25
3 phase motor; 200-240 V/380-400 V, 50 Hz / 200-240 V/380-480 V, 60 Hz
112 66
TRIVAC D 25 B
112 75
113 35
3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz
112 76
SCROLLVAC SC 30 D
1 phase motor; 200-230 V, 50/60 Hz
133 002
1 phase motor; 100-115 V, 50/60 Hz
133 102
3 phase motor; 380-415 V, 50 Hz / 200-230 V, 460 V, 60 Hz
133 004
342
leybold
P
Connecting cable
TURBOVAC 361 (C)
FC
Mains cable
PS
TURBOVAC 361 (C)
Part No.
Air cooling unit
230 V AC
100 - 115 V AC
Flange heater
DN 100 CF,
DN 100 CF,
DN 160 CF,
DN 100 CF,
230
115
230
115
855 31
800152V0016
V,
V,
V,
V,
50
60
50
60
854
854
854
854
Hz
Hz
Hz
Hz
27
28
37
38
Vibration absorber
DN 100 ISO-K
DN 100 CF
DN 160 ISO-K
DN 160 CF
800131V0100
500 071
500 073
500 072
800120V0011
800120V0021
230 V AC
100 - 115 V AC
24 V DC
800152V0014
800152V0042
800152V0013
800110V0012
Replacement filter
E 200 18 515
P
ISO-K
CF
Inlet screen
Foreline Flange
leybold
High
Vacuum Pumps
Water Cooling
343
TURBOVAC 600 C
ClassicLine
- Optical coating
- Flat panel displays
- R & D
a
a1
C
E
b
b1
F
90°
B
E
b
D 2
DN
Technical Features
Bottom view
a
A
- Small footprint
a1
C
E
d
b
C*
D*
E B h h2
3
h5
b1
high and ultra-high vacuum condi
tions
F
90°
B
E
b
D 2
h
h1
DN
TD 20 classic
A
- Seal gas connection
* drawn offset by 45°
h4
- Venting connection
d
DNh h1h2h3h4h5a a1bb1b2
d
160 ISO-K mm 317 175 116 97 28 105 134124.5178124.7
124.5225
C*
in.12.48 6.894.573.821.104.135.28 4.90 7.01 4.91 4.90 8.86
160 CF
mm 323 175 116 97 28 105 134124.5178124.7124.5225
D*
in.12.72 6.894.573.821.104.135.28 4.90 7.01 4.91 4.90 8.86
E B h h2
3
h5
Dimensional drawing for the TURBOVAC 600 C
h
h1
h4
1000
Pumping speed
600
500
l x s -1
200
- Highly reliable due to hybrid c
eramic
ball bearings
He
H2
N2
Ar
100
10 2
10 -6
468
10 -5
10 -4
10 -3
10 -2mbar10 -1
Pressure
Pumping speed for different gases as a function of intake pressure
(TURBOVAC 600 C with flange DN 160 ISO-K)
344
leybold
TURBOVAC 600 C
Connection
Inlet
Outlet
DN
DN
Pumping speed
N2
Ar
He
H2
Gas throughput
N2
Ar
He
H2
mbar
mbar
mbar
mbar
·
·
·
·
160 ISO-K • 160 CF
40 ISO-KF
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
560
550
600
570
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
4.0
4.0
5.5
4.0
Compression ratio
N2
Ar
He
H2
>
>
2.0
1.1
109
109
x 104
x 103
Ultimate pressure
mbar (Torr)
< 1.0 x 10-10 (< 7.5 x 10-11)
mbar (Torr)
1.0 x 10-1 (7.5 x 10-2)
TRIVAC D 25 B / D 40 B
min-1 (rpm)
Run-up time, approx.
min
W
Power consumption at ultimate pressure W
°C (°F)
Cooling
standard
optional
Weight
90
10 to 55 (50 to 131)
20 to 80
3 to 7
°C (°F)
10 to 30 (50 to 86)
kg (lbs)
17.0 (37.5)
Technical Data
Mains connection
3
400
10 mm hose nozzle
I x h-1
Permissible cooling water pressurebar
Permissible cooling water temperature
36 000
Water
Air
Turbo.Drive TD 20
50/60 Hz
500
Max. output voltage
V
3 x 47
Max. output current
A
5
Interface
Protection rating
Weight, approx.
leybold
classic
100 to 240 V (+15 % / -10 %)
W
High
Vacuum Pumps
Technical Data
IP
°C (°F)
20
0 to +45 (+32 to +113)
mm (in.)
213 x 128 x 315 (8.39 x 5.04 x 12.40)
kg (lbs)
4.0 (8.8)
345
TURBOVAC 600 C
TURBOVAC 600 C
P
DN 160 ISO-K, water-cooled
DN 160 CF, water-cooled
Part No.
800150V0015
800150V0017
FC PS
without interface
with Profibus
with 25-pol I/O
800075V0001
800075V0002
800075V0004
800075V0003
800075V0005
003 m (10.5 ft)
005 m (17.5 ft)
010 m (35.0 ft)
020 m (70.0 ft)
050 m (175.0 ft)
060 m (210.0 ft)
080 m (280.0 ft)
140 m (490.0 ft)
857 65
857 66
857 67
857 68
800152V0008
800152V0007
800152V0080
800152V0140
Mains cable
3 m (10.5 ft)
EURO plug
UK plug
US plug 5-15 P
2 m (7.5 ft)
US plug 115 V AC
800102V0002
800102V0003
800102V1002
992 76 513
Forevacuum pump
TRIVAC D 25 B
112 75
113 35
3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz;
112 76
TRIVAC D 40 B
112 86
113 47
SCROLLVAC SC 30 D
1 phase motor; 200-230 V, 50/60 Hz
133 002
1 phase motor; 100-115 V, 50/60 Hz
133 102
133 004
346
leybold
P
Connecting cable
TURBOVAC 600 C
FC
Mains cable
PS
TURBOVAC 600 C
Part No.
Air cooling unit
230 V AC
100 - 115 V AC
855 41
800152V0017
Flange heater
DN 160 CF, 230 V, 50 Hz
DN 100 CF, 115 V, 60 Hz
854 37
854 38
Vibration absorber
DN 160 ISO-K
DN 160 CF
500 073
500 072
800120V0011
800120V0021
230 V AC
100 - 115 V AC
24 V DC
800152V0040
800152V0043
800152V0012
800110V0012
Replacement filter
E 200 18 515
P
ISO-K
CF
Inlet screen
Foreline Flange
leybold
High
Vacuum Pumps
Water Cooling
347
TURBOVAC 1000 C
ClassicLine
- Research systems
D
E
F
45°α
B
(C) α
E
b
d
d1
h
Technical Features
Bottom view
A
DN
DN 40 ISO-KF,
cast base flange
2)
DN 63 ISO-K,
screwed in
1)
D
a1
E
C
h4
D
F
E B h2
F
h1
h3
E
45°α
B
(C) α
b
a
DNhh1hDN
h3A
h4aa1b
2
160 ISO-K/40 ISO-KF 1)
 d  d1
mm 338 111102123 62 140133141241258
d
in. 13.31 4.374.024.842.445.515.245.559.49
10.16
160 ISO-K/63 ISO-K 2)
a
C
1
mm 341
133152241
258
d1
h 1119412362153
h
D
4
in. 13.43 4.37 3.7 4.842.446.025.245.989.49
10.16
- Robust rotor design
- Highest pumping speed and
highest throughput
TD 20 classic
mm 348 1089912183140
133141241
258
E B
160 CF/40 ISO-KF 1)
h1
h2
h3
in. 13.70 4.253.904.763.275.515.245.559.49
10.16
F
mm 351 111102123
62 140133141241258
a
in. 13.82 4.374.024.842.445.515.245.559.49
10.16
200 CF/40 ISO-KF 1)
mm 336 1089912183140133141241
258
in. 13.23 4.253.904.763.275.515.245.559.49
10.16
mm 307 1089912183140133141241
258
in. 12.09 4.253.904.763.275.515.245.559.49
10.16
250 ISO-K/63 ISO-K ISO-KF 2)mm 310 1119412191153133141241
258
in. 12.20 4.373.704.763.586.025.245.559.49
10.16
10000
Pumping speed
l x s -1
1500
1000
500
- Highly reliable due to hybrid c
eramic
ball bearings
TURBOV AC 1000 C
- Standard model:
water cooling
200
100
- Purge gas facility
10 2
10 -6
4 68
10 -5
10 -4
10 -3
10 -2 mbar 10 -1
Pressure
Pumping speed for air as a function of intake pressure (TURBOVAC 1000 C with DN 250 flange)
348
leybold
TURBOVAC 1000 C
Connection
Inlet
Outlet
DN DN Pumping speed
N2
Ar
He
H2
Gas throughput
N2
Ar
He
H2
mbar
mbar
mbar
mbar
·
·
·
·
160 ISO-K • 160 CF
40 ISO-KF • 63 ISO-K
200 ISO-K • 200 CF
40 ISO-KF
250 ISO-K
40 ISO-KF • 63 ISO-K
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
850
810
880
900
1100
1050
975
970
1150
1100
1000
1000
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
6.5
4.0
7.0
8.0
6.5
4.0
7.0
8.0
6.5
4.0
7.0
8.0
Compression ratio
N2
Ar
He
H2
> 1 x 109
> 1 x 109
5 x 104
1 x 104
> 1 x 109
> 1 x 109
5 x 104
1 x 104
> 1 x 109
> 1 x 109
5 x 104
1 x 104
High
Vacuum Pumps
Technical Data
Ultimate pressure
mbar (Torr) < 1 x 10-10 (< 7.5 x 10-11)
< 1 x 10-10 (< 7.5 x 10-11)
< 1 x 10-10 (< 7.5 x 10-11)
mbar (Torr) 5 x 10-2 (3.8 x 10-2)
5 x 10-2 (3.8 x 10-2)
5 x 10-2 (3.8 x 10-2)
36 000
36 000
for standard operation
for purge gas operation
36 000
min 9
9
9
W 300
300
300
200
200
°C (°F) Cooling
standard
optional
10 mm hose nozzle
20 to 80
20 to 80
3 to 7
3 to 7
°C (°F) 10 to 30 (50 to 86)
10 to 30 (50 to 86)
kg (lbs) 25.0 (55.1)
25.0 (55.1)
Ixh Weight
Turbo.Drive TD 20
Technical Data
Mains connection
50/60 Hz
500
Max. output voltage
V
3 x 47
Max. output current
A
Weight, approx.
leybold
10 mm hose nozzle
20 to 80
3 to 7
10 to 30 (50 to 86)
25 (55.1)
classic
5
Interface
Protection rating
Water
Air
100 to 240 V (+15 % / -10 %)
W
10 to 55 (50 to 131)
Water
Air
10 mm hose nozzle
-1
Permissible cooling water pressurebar Permissible cooling water temperature
10 to 55 (50 to 131)
Water
Air
10 to 55 (50 to 131)
IP
°C (°F)
20
0 to +45 (+32 to +113)
mm (in.)
213 x 128 x 315 (8.39 x 5.04 x 12.40)
kg (lbs)
4.0 (8.8)
349
TURBOVAC 1000 C
TURBOVAC 1000 C
DN
DN
DN
DN
DN
DN
DN
160
160
160
200
200
250
250
P
ISO-K / DN 40 ISO-KF, water-cooled
ISO-K / DN 63 ISO-K, water-cooled
CF / DN 40 ISO-KF, water-cooled
CF / DN 40 ISO-KF, water-cooled
ISO-K / DN 63 ISO-K, water-cooled
Part No.
855
855
854
153
117
855
855
35
38
91
00
64
36
39
FC PS
without interface
with Profibus
with 25-pol I/O
800075V0001
800075V0002
800075V0004
800075V0003
800075V0005
003 m (10.5 ft)
005 m (17.5 ft)
010 m (35.0 ft)
020 m (70.0 ft)
050 m (175.0 ft)
060 m (210.0 ft)
080 m (280.0 ft)
140 m (490.0 ft)
857 65
857 66
857 67
857 68
800152V0008
800152V0007
800152V0080
800152V0140
Mains cable
3 m (10.5 ft)
EURO plug
UK plug
US plug 5-15 P
2 m (7.5 ft)
US plug 115 V AC
800102V0002
800102V0003
800102V1002
992 76 513
Forevacuum pump
TRIVAC D 25 B
112 75
113 35
112 76
TRIVAC D 40 B
112 86
113 47
TRIVAC D 65 B
112 96
113 57
SCROLLVAC SC 30 D
1 phase motor; 200-230 V, 50/60 Hz
133 002
1 phase motor; 100-115 V, 50/60 Hz
133 102
133 004
350
leybold
P
Connecting cable
TURBOVAC 1000 C
FC
Mains
PS
TURBOVAC 1000 C
Part No.
Air cooling unit
230 V AC
100 - 115 V AC
855 41
800152V0017
Flange heater
DN 160 CF, 230 V, 50 Hz
DN 100 CF, 115 V, 60 Hz
854 37
854 38
Vibration absorber
DN 160 ISO-K
DN 160 CF
500 073
500 072
800120V0011
800120V0021
230 V AC
100-115 V AC
24 V DC
800152V0040
800152V0043
800152V0012
800110V0012
Replacement filter
E 200 18 515
P
ISO-K
CF
Inlet screen
Foreline Flange
leybold
High
Vacuum Pumps
Water Cooling
351
TURBOVAC 1100 C
ClassicLine
- Data storage
- Flat panel displays
- Optical coating
- Large area coating
DN
Technical Features
Top view
A
b
h1
a
ød
h
C
h6
D
B
E
h3
E
h2
F
(C)
F
h5
E
h4
45∞
B
45∞ 45∞
D
a1
DNh h1h2h3h4h5h6aa1b d
160 ISO-Kmm341230247111 94 63 28.5133153141258
in.13.439.069.724.373.702.481.125.246.025.5510.16
200 ISO-Kmm325214231111 94 63 28.5133153141258
in.12.808.439.094.373.702.481.125.246.025.5510.16
250 ISO-Kmm310200217111 94 63 28.5133153141258
in.12.207.878.544.373.702.481.125.246.025.5510.16
- Highest pumping speed and
highest throughput
TD 20 classic
conditions
10
10
Ixs
-5
10
-4
10
-3
10
-2
10
-1
Torr
750
-Space-saving
4
vacuum systems
-1
10
3
Pumping Speed
- High productivity
10
2
1
10 8
6
4
2
10
0
10
-5
2
4
6 8 -4
10
N2
Ar
H2
10
-3
10
-2
10
-1
mbar
1
Inlet Pressure
Pumping speed as a function of the inlet pressure (TURBOVAC 1100 C with flange DN 250)
352
leybold
TURBOVAC 1100 C
Connection
Inlet
Outlet
DN DN Pumping speed
N2
Ar
He
H2
Gas throughput
N2
Ar
He
H2
mbar
mbar
mbar
mbar
·
·
·
·
160 ISO-K
63 ISO-K
200 ISO-K
63 ISO-K
250 ISO-K
63 ISO-K
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
710
660
650
520
830
760
750
600
1050
980
850
630
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
6.5
6.5
8.0
9.0
6.5
6.5
8.0
9.0
6.5
6.5
8.0
9.0
Compression ratio
N2
Ar
He
H2
> 1 x 107
> 1 x 107
3 x 104
1 x 103
> 1 x 107
> 1 x 107
3 x 104
1 x 103
> 1 x 107
> 1 x 107
3 x 104
1 x 103
High
Vacuum Pumps
Technical Data
Ultimate pressure
mbar (Torr) < 3.0 x 10-10 (< 2.3 x 10-10)
< 3.0 x 10-10 (< 2.3 x 10-10)
< 3.0 x 10-10 (< 2.3 x 10-10)
mbar (Torr) < 1.0 x 10-1 (< 7.5 x 10-2)
< 1.0 x 10-1 (< 7.5 x 10-2)
< 1.0 x 10-1 (< 7.5 x 10-2)
TRIVAC D 65 B / ScrollVac SC 15/30 D
30 000
30 000
min-1 (rpm) 30 000
min 9
9
9
W 400
400
400
300
300
°C (°F) Cooling
standard
optional
Weight
Water
Air
24 to 60
24 to 60
24 to 60
3 to 7
3 to 7
3 to 7
°C (°F) 10 to 30 (50 to 86)
10 to 30 (50 to 86)
kg (lbs) 22 (48)
22 (48)
Ixh Turbo.Drive TD 20
50/60 Hz
W
500
V
3 x 47
Max. output current
A
Weight, approx.
leybold
10 to 30 (50 to 86)
22 (48)
classic
5
Interface
Protection rating
10 mm hose nozzle
100 to 240 V (+15 % / -10 %)
Max. output voltage
Water
Air
10 mm hose nozzle
Technical Data
Mains connection
10 to 55 (50 to 131)
10 mm hose nozzle
-1
10 to 55 (50 to 131)
Water
Air
10 to 55 (50 to 131)
IP
°C (°F)
20
0 to +45 (+32 to +113)
mm (in.)
213 x 128 x 315 (8.39 x 5.04 x 12.40)
kg (lbs)
4.0 (8.8)
353
TURBOVAC 1100 C
TURBOVAC 1100 C
P
DN 160 ISO-K / DN 63 ISO-K, water-cooled
Part No.
800150V0030
800150V0031
800150V0032
FC PS
without interface
with Profibus
with 25-pol I/O
800075V0001
800075V0002
800075V0004
800075V0003
800075V0005
003 m (10.5 ft)
005 m (17.5 ft)
010 m (35.0 ft)
020 m (70.0 ft)
050 m (175.0 ft)
060 m (210.0 ft)
080 m (280.0 ft)
140 m (490.0 ft)
857 65
857 66
857 67
857 68
800152V0008
800152V0007
800152V0080
800152V0140
Mains cable
3 m (10.5 ft)
EURO plug
UK plug
US plug 5-15 P
2 m (7.5 ft)
US plug 115 V AC
800102V0002
800102V0003
800102V1002
992 76 513
Forevacuum pump
TRIVAC D 65 B
112 96
113 57
SCROLLVAC SC 30 D
1 phase motor; 200-230 V, 50/60 Hz
133 002
1 phase motor; 100-115 V, 50/60 Hz
133 102
133 004
354
leybold
P
Connecting cable
TURBOVAC 1100 C
FC
Mains cable
PS
TURBOVAC 1100 C
Part No.
Vibration absorber
DN 160 ISO-K
500 073
800120V0011
800120V0021
230 V AC
100-115 V AC
24 V DC
800152V0040
800152V0043
800152V0012
800110V0012
Replacement filter
E 200 18 515
P
ISO-K
CF
Inlet screen
Foreline Flange
leybold
High
Vacuum Pumps
Water Cooling
355
with Frequency Converter for Attaching or Separate
with or without Compound Stage
TURBOVAC SL 80 / L 80 H / SL 80 C
- Helium leak detectors
- Mass spectrometers (gas chromato
graphy GC-MS), liquid chromato
graphy (LC-MS), residual gas analysis, mobile analytical systems, etc.)
- XHV-/UHV systems
- Transfer chambers
Technical Features
DNd hh1
h2
63 ISO-K mm
95 145
-
22
ISO-K
in.3.74
5.71-0.87
CF
63 CF mm 9516615027
Ød
Ød
in. 3.745.715.911.06
h3bb1
63 ISO-Kmm 1711466
in. 0.674.492.60
63 CF mm 2211466
in. 0.874.492.60
b2b3b4
63 ISO-K
mm--°
in.--63 CF
mm
59 101 117
°
in. 2.323.984.61
ISO-K
Ød
°
- Oil-free pump
CF
- Purge gas/venting connection
°
°
- Small footprint
- Delayed venting through the frequency converter TURBO.DRIVE
TD 400 (optional)
°
S
S
- Flexible attachment of the frequency
converter to the pump
°
°
°
°
- Excellent resistance to vibration due
to proven mechanical bearings
- Efficient convection cooling due to a
large number of cooling fins
°
°
- High pressure foreline tolerance
Ød
°
°
- Selection of interfaces, USB,
RS 232 C, RS 485 C, Profibus
°
°
Ø
Ø for theSL
TURBOVAC
80
Dimensional drawing
TURBOVAC
SL 80: attachment examples
70
l x s -1
60
Pumping Speed
50
vacuum systems
N2
Ar
He
-Space-saving
H2
- Prepared for pumping of slightly
corrosive gases owing to the seal
gas connection
40
30
20°
°
°
- High reliability,
MTTF over 200,000 hours
°
° °
10
°
°
0
10-6
10-5
10-4
10-3
10-2
10-1
mbar
1
Inlet Pressure
- Matching accessories (fan, water
cooling, seal gas/venting valves,
power failure venting valves, flange
heaters, different cable lengths etc.)
- High reliability due to self-monitoring
Pumping speed as a function of the inlet pressure
°
356
°
leybold
TURBOVAC
Connection
Inlet
Outlet
SL 80 H
SL 80 C
63 ISO-K
63 CF
DN 40 ISO-KF 63 ISO-K 63 CF
16 ISO-KF 16 ISO-KF
DN Pumping speed
N2
Ar
He
H2
Gas throughput
N2
Ar
He
H2
SL 80
mbar
mbar
mbar
mbar
·
·
·
·
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
Compression ratio
N2
Ar
He
H2
Ultimate pressure
40 65 6565
70
34 60 6060
65
44 55 5555
50
40 49 4949
45
2.00.9
3.5
1.60.8
3.5
1.21.5
2.0
0.50.6
1.0
> 1 x 1011
> 1 x 1011
2 x 106
> 1 x 1011
> 1 x 1011
2 x 106
2 x 106
6 x 106
6 x 102
4 x 104
8 x 104
2 x 102
mbar Torr) < 2 x 10-10
< 2 x 10-10
< 5 x 10-8
16 (12)
(< 4.0 x 10-8)
16 (12)
0.35 (0.26)
TRIVAC D 2,5 E / D 4 B
SCROLLVAC SC 5 D / 15 D
DIVAC 1.4 HV3
DIVAC 1.4 HV3
(< 1.5 x 10-10) (< 1.5 x 10-10)
mbar (Torr) Recommended forevacuum pump
63 ISO-K
16 ISO-KF
72 000
–
72 000
72 000
min 1.51.5
1.5
W 120120
120
17
High
Vacuum Pumps
Technical Data
°C (°F) +15 to +45 (+50 to +113)
+15 to +45 (+50 to +113)
+15 to +45 (+50 to +113)
Cooling
standard
optional
ConvectionConvection
Water / Air
G 1/8", inside thread /
8 mm hose nozzle
8 mm hose nozzle
8 mm hose nozzle
Ixh
-1
Weight, approx.
°C (°F) 15 to 60
15 to 60
2 to 7
2 to 7
10 to 40 (50 to 104)
10 to 40 (50 to 104)
1.8 1.9) 3.1
1.93.1
kg (3.97)(4.19)(6.84) (4.19)(6.84)
(lbs) Technical Data
Mains connection
Water / Air
V DC
A
8
W
190
V
Weight, approx.
leybold
2 to 7
10 to 40 (50 to 104)
1.9
(4.19)
3 x 24
USB, RS 232 C, RS 485 C or Profibus
Interface
15 to 60
24
Protection rating
Water / Air
TURBO.DRIVE TD 400
Max. current consumption
Max. output voltage
Convection
IP
°C (°F)
20
+5 to +45 (+41 to +113)
mm (in.)
100 x 90 x 100 (3.9 x 3.5 x 3.9)
kg (lbs)
0.7 (1.6)
357
TURBOVAC
SL 80 / SL 80 H / SL 80 C
P
TURBOVAC SL 80
with compound stage
DN 40 ISO-KF
DN 63 ISO-K / DN 16 ISO-KF
DN 63 ISO-K / DN 16 ISO-KF (SL 80 H)
DN 63 CF / DN 16 ISO-KF
DN 63 CF / DN 16 ISO-KF (SL 80 H)
without compound stage
DN 63 ISO-K / DN 16 ISO-KF (SL 80 C)
Part No.
800002V3004
800002V3001
800002V3005
800002V3002
800002V3006
800002V3008
P FC PS
Electronic frequency converter Turbo.Drive TD 400
with USB interface
with Profibus
Connecting cable pump - frequency converter
00.2 m (0.7 ft)
00.3 m (1.1 ft)
00.4 m (1.4 ft)
00.5 m (1.75 ft)
01.0 m (3.5 ft)
02.5 m (8.75 ft)
03.0 m (10.5 ft)
05,0 m (17.5 ft)
10.0 m (35.0 ft)
800073V0008
800073V0002
800073V0003
800073V0004
800152V0021
800152V0023
800152V0022
800152V0050
152 47
864 49
864 40
864 50
800080V10000
Power supply and control unit Turbo.CONTROL 300
800100V0001
24
800091V0100
800091V0300
800091V0500
800091V1000
800091V2000
V connecting cable power supply - Turbo.CONTROL 300
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
Power supply Turbo.POWER 300
800100V0002
24
800094V0100
800094V0300
800094V0500
800094V1000
800094V2000
V connecting cable power supply - Turbo.POWER 300
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
Mains cable 3 m (10.5 ft) - Turbo.CONTROL 300 / Turbo.POWER 300
with EURO plug
with UK plug
with US plug 5-15 P
with US plug 115 V AC, 2 m (7.5 ft)
START/STOP switch for manual operation of the turbomolecular pump
800102V0002
800102V0003
800102V1002
992 76 513
152 48
Forevacuum pump
TRIVAC D 2,5 E
110-120 V / 220-240 V, 50/60 Hz, without plug, (world version)
140 000
140 001
TRIVAC D 4 B
1 phase EURO motor; 230 V, 50 Hz
112 45
140 081 1)
DIVAC 1.4 HV3
90-230 V, 50/60 Hz
127 90 V
SCROLLVAC SC 5 D
1 phase motor; 200-230 V, 50/60 Hz
1 phase motor; 100-115 V, 50/60 Hz
133 000
133 100
SCROLLVAC SC 15 D
1 phase motor; 200-230 V, 50/60 Hz
1 phase motor; 100-115 V, 50/60 Hz
133 001
133 101
133 003
1)
358
leybold
P
Connecting cable
TURBOVAC SL 80
FC
Connecting cable
TURBO.DRIVE TD 400
PS
Mains cable
TURBO.POWER 300
TURBO.CONTROL 300
TURBOVAC
SL 80 / SL 80 H / SL 80 C
Part No.
Mounting kit TD 400 for SL 80,
incl. 0.2 m (0.7 ft.) long connecting cable pump - frequency converter
for installing the frequency converter beside the pump
for installing the frequency converter beneath the pump (not for 800073V0007)
800110V0005
800110V0008
Water cooling unit with 2x G 1/8" connections,
including 2 hose nozzles G 1/8" 8 mm (0.3 in.) OD,
2 gaskets (copper) 10 x 14 x 1 mm (0.4 x 0.6 x 0.04 in.) and hose clamps
800135V0001
Air cooling unit
800136V0001
Flange heater
DN 63 CF, 230 V, 50 Hz
DN 63 CF, 115 V, 60 Hz
854 04
854 07
Inlet screen
DN 40 ISO-KF
DN 63 ISO-K (coarse)
DN 63 CF (coarse)
E 200 17 169
E 200 17 170
E 200 17 171
Fine filter with centering ring
DN 63 ISO-K
887 20
Vibration absorber
DN 63 ISO-K
DN 63 CF
800131V0063
500 070
Pump connection adapter DN 10 ISO-KF / pump connection M 8
(incl. O-ring, filter and clamping ring)
800110V0011
230 V AC
100 - 115 V AC
24 V DC
800152V0014
800152V0042
800152V0013
800110V0012
Replacement filter
E 200 18 515
800120V0021
230 V AC / 50/60 Hz, DN 10 ISO-KF
174 46
174 26
Hat rail adaptor as mounting aid
800110V0003
Fin type cooler
800110V0001
leybold
High
Vacuum Pumps
P FC PS
359
with Frequency Converter for Attaching or Separate
with Compound Stage
TURBOVAC SL 300
- Particle accelerators
- Mass spectrometers (gas chromatography GC-MS), liquid chromato
graphy (LC-MS), time of flight
(TOF-MS), residual gas analysis,
etc.)
- Coating technology
- XHV-/UHV systems
- Transfer chambers
Technical Features
DNd d1d2
F
100 ISO-Kmm130140154
100 CF
- Oil-free pump
F
in. 5.125.516.06
mm130140154
in. 5.125.516.06
- Excellent resistance to vibration due
to proven mechanical bearings
- Efficient convection cooling due to a
large number of cooling fins
h h1h2
100 ISO-K mm 181 28 15
in. 7.131.100.59
100 CF
mm 183 35
in. 7.211.38 -
°
°
- Flexible attachment of the frequency
converter to the pump
b b1
100 ISO-K mm 170 93
in. 6.693.66
100 CF
mm 170 93
in. 6.693.66
- Small footprint
- Delayed venting through the frequency converter TURBO.DRIVE
TD 400 (optional)
°
Fan connection
°
Fan connection
°
°
°
°
- Selection of interfaces, USB,
RS 232 C, RS 485 C, Profibus
Dimensional drawing for the TURBOVAC SL 300
TURBOVAC SL 300
350
vacuum systems
l x s -1
300
N2
- Prepared for pumping of slightly
corrosive gases owing to the seal
gas connection
He
°
200°
°
°
H2
- High reliability,
MTTF over 200,000 hours
100
- Matching accessories (fan, water
cooling, seal gas/venting valves,
power failure venting valves, flange
heaters, different cable lengths etc.)
50
0
10-6
°
°
°
150
°
Pumping Speed
°
°
-Space-saving
Ar
250
10-5
10-4
10-3
°
Inlet Pressure
10-2
10-1
mbar
1
°
Pumping speed as a function of the inlet pressure
360
leybold
Technical Data
Connection
Inlet
Outlet
DN DN Pumping speed
N2
Ar
He
H2
Gas throughput
N2
Ar
He
H2
mbar
mbar
mbar
mbar
·
·
·
·
100 CF
16 ISO-KF
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
270
260
255
190
270
260
255
190
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
2.9
2.0
1.9
0.9
2.9
2.0
1.9
1.9
Compression ratio
N2
Ar
He
H2
Ultimate pressure
> 1 x 1011
> 1 x 1011
1 x 107
2 x 105
> 1 x 1011
> 1 x 1011
1 x 107
2 x 105
mbar (Torr) < 1 x 10-10 (< 7.5 x 10-11)
< 1 x 10-10 (< 7.5 x 10-11)
mbar (Torr) 8 (6)
8 (6)
TRIVAC D 2,5 E / TRIVAC D 4 B
SCROLLVAC SC 5 /15 D
DIVAC 3.8 HV3
TRIVAC D 2,5 E / TRIVAC D 4 B
SCROLLVAC SC 5 /15 D
DIVAC 3.8 HV3
60 000
60 000
100 ISO-K
16 ISO-KF
min 4
4
W 115
115
°C (°F) Cooling
standard
optional
+15 to +45 (+50 to +113)
Convection
Water / Air
Convection
Water / Air
Weight
18
+15 to +45 (+50 to +113)
G 1/8", inside thread / 8 mm hose nozzle
30 to 60
30 to 60
3 to 7
3 to 7
°C (°F) 15 to 35 (59 to 95)
15 to 35 (59 to 95)
kg (lbs) 5.2 (11.5)
7.4 (16.3)
Technical Data
TURBO.DRIVE TD 400
V DC
24
A
8
W
190
V
3 x 24
Mains connection
Max. output voltage
Interface
Protection rating
Weight, approx.
leybold
High
Vacuum Pumps
TURBOVAC SL 300
IP
°C (°F)
20
+5 to +45 (+41 to +113)
mm (in.)
100 x 90 x 100 (3.9 x 3.5 x 3.9)
kg (lbs)
0.7 (1.6)
361
TURBOVAC SL 300
TURBOVAC SL 300
with Compound Stage
P
DN 100 ISO-K / DN 16 ISO-KF
DN 100 CF / DN 16 ISO-KF
Part No.
800170V3005
800170V3006
P FC PS
Electronic frequency converter Turbo.Drive TD 400
with USB interface
with Profibus
Connecting cable pump - frequency converter
00.2 m (00.7 ft)
00.3 m (01.1 ft)
00.4 m (01.4 ft)
00.5 m (1.75 ft)
01.0 m (03.5 ft)
02.5 m (8.75 ft)
03.0 m (10.5 ft)
05,0 m (17.5 ft)
10.0 m (35.0 ft)
800073V0008
800073V0002
800073V0003
800073V0004
800152V0021
800152V0023
800152V0022
800152V0050
152 47
864 49
864 40
864 50
800080V10000
800100V0001
24
800091V0100
800091V0300
800091V0500
800091V1000
800091V2000
V connecting cable power supply - Turbo.CONTROL 300
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
800100V0002
24
800094V0100
800094V0300
800094V0500
800094V1000
800094V2000
V connecting cable power supply - Turbo.POWER 300
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
with EURO plug
with UK plug
with US plug 5-15 P
800102V0002
800102V0003
800102V1002
992 76 513
152 48
Forevacuum pump
TRIVAC D 2,5 E
140 000
140 001
DIVAC 3.8 HV3
230 V, 50-60 Hz
127 95 V
TRIVAC D 4 B
112 45
140 081 1)
SCROLLVAC SC 5 D
1 phase motor; 200-230 V, 50/60 Hz
1 phase motor; 100-115 V, 50/60 Hz
133 000
133 100
SCROLLVAC SC 15 D
1 phase motor; 200-230 V, 50/60 Hz
1 phase motor; 100-115 V, 50/60 Hz
133 001
133 101
133 003
1)
362
leybold
TURBOVAC SL 300
FC
Connecting cable
TURBO.DRIVE TD 400
PS
Mains cable
TURBO.POWER 300
TURBO.CONTROL 300
TURBOVAC SL 300
P FC PS
Part No.
Mounting kit TD 400 for SL 300,
incl. 0.2 m (0.7 ft.) long connecting cable pump - frequency converter
for installing the frequency converter beside the pump
for installing the frequency converter beneath the pump (not for 800073V0007)
800110V0006
800110V0009
Water cooling unit with 2x G 1/8" connections,
including 2 hose nozzles G 1/8" 8 mm (0.3 in.) OD,
2 gaskets (copper) 10 x 14 x 1 mm (0.4 x 0.6 x 0.04 in.) and hose clamps
800135V0002
Air cooling unit
800136V0002
Flange heater
DN 100 CF, 230 V, 50 Hz
DN 100 CF, 115 V, 60 Hz
854 27
854 28
Inlet screen
DN 100 ISO-K (fine)
DN 100 ISO-CF (coarse)
DN 100 ISO-CF (fine)
800132V0101
800132V0102
20091514
E20017195
Vibration absorber
DN 100 ISO-K
DN 100 CF
800131V0100
500 071
High
Vacuum Pumps
P
Connecting cable
Pump connection adapter DN 10 ISO-KF / pump connection M 8
800110V0011
(incl. O-ring, filter and clamping ring)
230 V AC
100 - 115 V AC
24 V DC
800152V0019
800152V0041
113 50
800110V0012
Replacement filter
E 200 18 515
800120V0021
230 V AC / 50/60 Hz, DN 10 ISO-KF
174 46
174 26
800110V0003
Fin type cooler
800110V0001
leybold
363
with integrated Frequency Converter
with Compound Stage
TURBOVAC TW 250 S
- Analytical Instruments
-Coating
- R & D
- Transfer chambers
Technical Features
Bottom view
b b1dd1h
DN 100 ISO-K
mm 20
22 160 146.6 175
in.0.790.876.305.776.89
DN 100 CF
mm 20
22 160 146.6 175
in.0.790.876.305.776.89
- High gas throughput
7,5°
120°
h1h2h3h4h5
DN 100 ISO-K
mm 37
14
4
20
40
in.1.460.550.160.791.57
DN 100 CF
mm 37
14
4
20
40
in.1.460.550.160.791.57
- Oil-free pump
105°
- Insensitive to impact and movement
due to the mechanical bearing
concept
d1
M4
DN
- Small footprint
h
- Integrated fan
h1
h5
b b1
d
h2
h3 h4
Dimensional drawing for the TURBOVAC TW 250 S without frequency converter
102
-1
- Highest throughput for N2 and Ar
10
- Highest reliability in operation
-Space-saving
B
vacuum systems
16
TW
D
C
VA
TU
B
A
8
TR
IV
A
C
D
O
RB
S
IV
10-2
0
25
C
10-1
TR
Throughput
1
10-3
10-4
10-5 -5
10
10-4
10 -3
10-2
10-1
1
mbar
10
Inlet pressure
Operation diagram for nitrogen for TURBOVAC TW 250 S
364
leybold
TURBOVAC TW 250 S
Connection
Inlet
Outlet
DN
DN
Pumping speed
N2
Ar
He
H2
Gas throughput
N2
Ar
He
H2
mbar
mbar
mbar
mbar
·
·
·
·
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
230
210
150
80
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
3.7
3.5
2.4
1.1
Compression ratio
N2
Ar
He
H2
1
1
1
5
Ultimate pressure
mbar (Torr)
mbar (Torr)
diaphragm pump
with an ultimate pressure
< 3 mbar (< 2.3 Torr)
x
x
x
x
108
108
104
102
< 2 x 10-8 (< 1.5 x 10-8)
3.0 (2.3)
TRIVAC D 2,5 E
TRIVAC D 8 B (at purge gas operation)
100 ISO-K • 100 CF
16 ISO-KF
upon request
min-1 (rpm)
min
51 600
3
W
140
20
°C (°F)
Cooling
standard
optional
Ixh
-1
+15 to +40 (+59 to +104)
Air
Water
Weight
30 to 60
3 to 7
°C (°F)
20 to 40 (+68 to +104)
kg (lbs)
5.8 (12.8)
TURBO.DRIVE TD 400
Technical Data
V DC
24
A
8
W
190
V
3 x 24
Mains connection
Max. output voltage
Interface
Protection rating
Weight, approx.
leybold
High
Vacuum Pumps
Technical Data
IP
°C (°F)
20
+5 to +45 (+41 to +113)
mm (in.)
100 x 90 x 100 (3.9 x 3.5 x 3.9)
kg (lbs)
0.7 (1.6)
365
TURBOVAC TW 250 S
TURBOVAC TW 250 S
with Compound Stage
DN
DN
DN
DN
DN
DN
DN
100
100
100
100
100
100
100
P
ISO-K / DN 16 ISO-KF, water-cooled, Profibus
ISO-K / DN 16 ISO-KF, water-cooled, Profibus, inlet screen coarse
ISO-K / DN 16 ISO-KF, air-cooled, Profibus, inlet screen coarse
ISO-K / DN 16 ISO-KF, air-cooled, RS 232 C interface
ISO-K / DN 16 ISO-KF, air-cooled, RS 485 C interface
CF/ DN 16 ISO-KF, air-cooled, RS 232 C interface
CF / DN 16 ISO-KF, air-cooled, RS 485 C interface
Part No.
114 37
800150V0016
800150V0009
800150V0011
800150V0013
800150V0012
800150V0014
P FC PS
800100V0001
24
800091V0100
800091V0300
800091V0500
800091V1000
800091V2000
V connection line frequency converter TD 400 - Turbo.CONTROL 300
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
800100V0002
24
V connection line frequency converter TD 400 - Turbo.POWER 300
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
800094V0100
800094V0300
800094V0500
800094V1000
800094V2000
with EURO plug
with UK plug
with US plug 5-15 P
800102V0002
800102V0003
800102V1002
992 76 513
152 48
Forevacuum pump
TRIVAC D 2,5 E
140 000
140 001
TRIVAC D 8 B
112 55
140 082 1)
1)
For further types, see Catalog Part “Oil Sealed Vacuum Pumps”
366
leybold
P
PS
TURBOVAC TW 250 S
Mains cable
TURBO.CONTROL 300
TURBO.POWER 300
TURBOVAC TW 250 S
P FC PS
Flange heater
DN 100 CF, 230 V, 50 Hz
DN 100 CF, 115 V, 60 Hz
Part No.
High
Vacuum Pumps
FC
Connecting cable
854 27
854 28
Inlet screen
DN 100 ISO-K (fine)
800132V0101
800132V0102
Vibration absorber
DN 100 ISO-K
DN 100 CF
800131V0100
500 071
P
Centering ring with FPM sealing ring, clamping shoe with gasket
Foreline Flange
Vent Port
Sealing screw and a gasket ring
High vacuum connection elements are not part of the supplied equipment
leybold
367
without integrated Frequency Converter
with Compound Stage
TURBOVAC TW 250 S
- Analytical Instruments
-Coating
- R & D
- Transfer chambers
Technical Features
Bottom view
b b1dd1h
DN 100 ISO-K
mm 20
22 160 146.6 175
in.0.790.876.305.776.89
DN 100 CF
mm 20
22 160 146.6 175
in.0.790.876.305.776.89
7,5°
120°
h1h2h3h4h5
DN 100 ISO-K
mm 37
14
4
20
40
in.1.460.550.160.791.57
DN 100 CF
mm 37
14
4
20
40
in.1.460.550.160.791.57
- Oil-free pump
105°
- Insensitive to impact and movement
due to the mechanical bearing
concept
d1
M4
DN
- Small footprint
h
- Integrated fan
h1
h5
b b1
d
h2
h3 h4
Dimensional drawing for the TURBOVAC TW 250 S without frequency converter
102
-1
- Highest throughput for N2 and Ar
10
- Highest reliability in operation
-Space-saving
1
B
16
B
8
IV
R
D
TU
vacuum systems
D
TW
C
C
VA
A
BO
S
TR
IV
A
C
10-2
0
25
TR
Throughput
10-1
10-3
10-4
10-5 -5
10
10-4
10 -3
10-2
10-1
1
mbar
10
Inlet pressure
Operation diagram for nitrogen for TURBOVAC TW 250 S
368
leybold
TURBOVAC TW 250 S
Connection
Inlet
Outlet
DN
DN
Pumping speed
N2
Ar
He
H2
Gas throughput
N2
Ar
He
H2
mbar
mbar
mbar
mbar
·
·
·
·
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
230
210
150
80
I
I
I
I
x
x
x
x
s-1
s-1
s-1
s-1
3.7
3.5
2.4
1.1
Compression ratio
N2
Ar
He
H2
1
1
1
5
Ultimate pressure
mbar (Torr)
mbar (Torr)
diaphragm pump
with an ultimate pressure
< 3 mbar (< 2.3 Torr)
x
x
x
x
108
108
104
102
< 2 x 10-8 (< 1.5 x 10-8)
3.0 (2.3)
TRIVAC D 2,5 E
TRIVAC D 8 B (at purge gas operation)
100 ISO-K
16 ISO-KF
upon request
min-1 (rpm)
51 600
min
≈3
W
140
20
°C (°F)
Cooling
standard
optional
I x h-1
+15 to +40 (+59 to +104)
Air
Water
Weight
30 to 60
3 to 7
°C (°F)
+20 to +40 (+68 to +104)
kg (lbs)
5 (11)
TURBO.DRIVE TD 400
Technical Data
V DC
24
A
8
W
190
V
3 x 24
Mains connection
Max. output voltage
Interface
Protection rating
Weight, approx.
leybold
High
Vacuum Pumps
Technical Data
IP
°C (°F)
20
+5 to +45 (+41 to +113)
mm (in.)
100 x 90 x 100 (3.9 x 3.5 x 3.9)
kg (lbs)
0.7 (1.6)
369
TURBOVAC TW 250 S
TURBOVAC TW 250 S
with Compound Stage
P
DN 100 ISO-K / DN 16 ISO-KF, air-cooled, inlet screen coarse
DN 100 ISO-K / DN 16 ISO-KF, air-cooled, inlet screen coarse
(with vibration absorber)
Part No.
113 52
800150V0007
P FC PS
Electronic frequency converter TURBO.DRIVE TD 400
with USB interface
RS 232 C interface
RS 485 C interface
Connecting cable pump - TURBO.DRIVE TD 400
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)
800073V0008
800073V0002
800073V0003
152 47
864 40
864 50
800100V0001
24
800091V0100
800091V0300
800091V0500
800091V1000
800091V2000
V connecting cable TURBO.DRIVE TD 400 - Turbo.CONTROL 300
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
800100V0002
24
V connecting cable TURBO.DRIVE TD 400 - Turbo.POWER 300
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
800094V0100
800094V0300
800094V0500
800094V1000
800094V2000
with EURO plug
with UK plug
with US plug 5-15 P
800102V0002
800102V0003
800102V1002
992 76 513
Forevacuum pump
TRIVAC D 2,5 E
140 000
140 001
TRIVAC D 8 B
112 55
140 082 1)
1)
370
leybold
TURBOVAC TW 250 S
FC
Connecting cable
TURBO.DRIVE 400
PS
Mains cable
TURBO.CONTROL 300
TURBO.POWER 300
TURBOVAC TW 250 S
P FC PS
Part No.
Inlet screen
DN 100 ISO-K (fine)
800132V0101
800132V0102
Vibration absorber
DN 100 ISO-K
DN 100 CF
800131V0100
500 071
High
Vacuum Pumps
P
Connecting cable
P
Centering ring with FPM sealing ring, blank flange with clamping shoe
Sealing screw and a gasket ring
Foreline Flange
Vent Port
DC coupling for the power supply is included
leybold
371
with Compound Stage
TURBOVAC TW 2401
- R & D
- Thermonuclear fusion
- Space simulation
- Data memories
-Coating
Technical Features
DN 250 ISO-F
Ød
high vacuum conditions
h3
Ød1
c
h2
h5
h6
h1
h
KF 40
Ød2
h4
Venting connection
ISO-G1/4
Seal gas inlet
ISO-G1/4
35∞
Connection
b1
l
- Seal gas/venting connection
(purge/vent)
- Water cooling
- CE and NRTL compliant
- RS 232 C interface
- Electronic frequency converter
TD 240 with integrated power
supply and display for controlling
and monitoring the pump
l1
Cooling water
inlet / outlet
ISO-Rc1/4
b
6x M16 DP25 PCD255
- Compact, space saving design
DNd d1d2bb1c l l1
250 ISO-Fmm335310286200186180181 54
in.13.19
12.21
11.267.877.327.097.132.13
- Extremely rugged and maintenancefree
h h1h2h3h4h5h6
250 ISO-F
mm
340
292.5
244.5
16121938
in.13.39
11.529.630.630.470.751.50
Dimensional drawing for the TURBOVAC TW 2401 with air cooling
372
leybold
TURBOVAC TW 2401
Connection
Inlet
Outlet
DN
DN
250 ISO-F
40 ISO-KF
Pumping speed
N2
Ar
H2
I x s-1
I x s-1
I x s-1
2400
2400
1100
Gas throughput
N2
Ar
mbar · I x s-1
mbar · I x s-1
16.6
13.8
Compression ratio
N2
Ar
H2
1.0 x 108
2.0 x 108
1.4 x 103
Ultimate pressure
mbar (Torr)
< 1 x 10-8 (< 7.5 x 10-9)
mbar (Torr)
2.0 (1.5)
min-1 (rpm)
≈ 18
W
1200
°C (°F)
Cooling
standard
ISO-Rc 1/4"
I x h-1
Max. output voltage
Weight, approx.
leybold
3 to 6
10 to 35 (50 to 95)
kg (lbs)
47 (104)
Turbo.Drive TD 240
50/60 Hz
W
V
180 to 253
1200
3 x 110
RS 232 C
Interface
Protection rating
> 90
°C (°F)
Technical Data
Mains connection
140
10 to 40 (50 to 104)
Water
31 200
min
Weight
High
Vacuum Pumps
Technical Data
IP
°C (°F)
20
-5 to +40 (+23 to +104)
mm (in.)
209 x 149 x 400 (8.2 x 5.7 x 15.7)
kg (lbs)
8.2 (18.1)
373
TURBOVAC TW 2401
TURBOVAC TW 2401
P
DN 250 ISO-F, water-cooled
Part No.
800150V0108
P FC PS
Electronic frequency converter TURBO.DRIVE TD 240
RS 232 C interface
800150V0112
03 m (10.5 ft)
10 m (35.0 ft)
800150V0114
800150V0119
Mains cable
3 m (10.5 ft)
EURO plug
UK plug
US plug 5-15 P
800102V0002
800102V0003
800102V1002
Forevacuum pump
TRIVAC D 25 B
112 75
113 35
112 76
SCROLLVAC SC 30 D
1 phase motor; 200-230 V, 50/60 Hz
133 002
1 phase motor; 100-115 V, 50/60 Hz
133 102
133 004
104
I x s-1
Ar
N2
Pumping speed
103
H2
102
101 8
6
4
2
1
10-5
2
4 6 8
10-4
10-3
10-2
10-1
mbar
1
High vacuum pressure
Pumping speed for nitrogen for the TURBOVAC TW 2401
374
leybold
P
Connecting cable
TURBOVAC TW 2401
FC
Mains cable
PS
TURBO.DRIVE 240
TURBOVAC TW 2401
P
High
Vacuum Pumps
800150V0120
Purge gas adaptor DN 16 ISO-KF, angled
P
leybold
Part No.
ISO-F
375
Special Turbomolecular Pumps
- Reduction of system costs
- Smaller size of the analysis system
- Reduction in the number of individual vacuum components
- Choice between cartridge or cus
tomized pump housing
For example
- LC-MS (linking of a liquid chromatograph to a mass spectrometer)
TURBOVAC Multi Inlet
- GC/MS (linking of a gas chromatograph to a mass spectrometer)
Sample
Inlet
Ion Source
Data Base
Mass Analyser
Detector
- TOF-MS (time-of-flight mass spectrometer)
- ICP-MS (inductively coupled plasma
mass spectrometry)
- Helium leak detectors
Vacuum System
Sample
inlet
Technical Features
ionisation
mass filter
detector
2-6
mbar
10-2 - 10-4
mbar
< 10-5 - 10-7
mbar
IS 1
HV
Multi Inlet
Turbomolecular Pump
- Dual Inlet (pumping down of two
analysis chambers)
- Triple inlet (pumping down of three
analysis chambers)
- High effective pumping speed
HV stage
S = 60 to 400 l/s
Interstage IS1 S = 30 to 300 l/s
Interstage IS2 S = 05 to 30 l/s
- Cartridge solutions (without pump
housing) are available
Forevacuum Pump
- Compact vacuum system
Application example: GC-MS
Customized versions are available
upon request
Multi inlet product examples
left: cartridge, right: dual inlet
376
leybold
High
Vacuum Pumps
Notes
leybold
377
MAG INTEGRA - Magnetic Rotor Suspension
with integrated Frequency Converter,
with Compound Stage
TURBOVAC MAG W 300/400 iP
- Gas analysis systems
- Electron microscopes
-Research
- Coating systems
Technical Features
- DN 100 or 160 ISO-K and/or
CF high vacuum connection
- DN 16 ISO-KF with clamped fore
vacuum connection
DN 16 ISO-KF with clamped con
nection (purge/vent)
- Water or air cooling optional
- CE and RoHS compliant; fulfilment
of UL requirements
h
h
DN  d1

h
d2hh1h2l b b*
s1s2
MAG W 300 iPmm100 ISO-K
130.0155.0250.077.770.0156.0250.0233.016° 19.0103.0
in.
5.126.109.843.06
2.766.149.849.17
16°0.754.06
mm 100 CF 151.5155.0264.377.770.0156.0250.0233.016° 15.0129.0
in.
5.966.1010.41
3.06
2.766.149.849.17
16°0.595.08
180.0155.0241.077.770.0168.5262.5245.516° 19.0106.0
in.
7.09 6.10 9.493.062.766.63 10.33 9.6716° 0.754.17
mm 160 CF 202.5155.0234.777.770.0181.2273.7256.716° 14.0129.0
in.
7.97 6.10 9.243.062.769.13 10.7810.11
16° 0.555.08
b* = width with plug of the DRIVE/BEARING cable connected instead of MAG.DRIVE iS
Dimensional drawing for the TURBOVAC MAG W 300/400 iP
700
600
Pumping speed
500
- Highest pumping speed from the
smallest possible size
- New standard regarding mainte
nance-free systems
- Flexibility due to the modular concept; the converter is optionally also
available by way of a bench top unit
MAG W 400
300
- Suitability for vibration sensitive
applications in the area of analytical
engineering, thin-film technology,
electron microscopes, research,
development among others
l x s -1
400
- 2 slots for industrial communications
modules
-Standard 9 pin 24 V SPS PLC-IO in Control Slot
-RS 232 C in Service Slot
-further interfaces can be fitted:
Profibus, RS 485 C
MAG W 300
200
100
0
10-6
10-5
10-4
10-3
10-2
10-1
mbar
1
Inlet pressure
Pumping speed for N2 of the TURBOVAC MAG W 300/400 iP as a function of the inlet pressure
378
leybold
TURBOVAC MAG
Inlet flange
DN Pumping speed
N2
Ar
He
H2
I
I
I
I
Operating speed
min-1 x
x
x
x
s-1
s-1
s-1
s-1
Ultimate pressure
mbar (Torr) Max. foreline pressure for N2
100 ISO-K
Recommended backing pump
300
260
260
190
160 ISO-K
365
330
280
200
160 CF
365
330
280
200
58 800
58 800
58 800
58 800
1.0 x 1010
3.2 x 103
9.2 x 104
1.0 x 1010
3.2 x 103
9.2 x 104
1.0 x 1010
3.2 x 103
9.2 x 104
1.0 x 1010
3.2 x 103
9.2 x 104
< 10-8
(< 0.75 x 10-8)
< 10-10
(< 0.75 x 10-10)
< 10-8
(< 0.75 x 10-8)
< 10-10
(< 0.75 x 10-10)
80 (176)
–
80 (176)
8 (6)
8 (6)
8 (6)
8 (6)
TRIVAC D 2,5 E
TRIVAC D 8 B
TRIVAC D 2,5 E
TRIVAC D 8 B
TRIVAC D 2,5 E
TRIVAC D 8 B
TRIVAC D 2,5 E
TRIVAC D 8 B
°C (°F) –
mbar (Torr) W 400 iP
100 CF
300
260
260
190
Compression ratio
N2
H2
He
Max. degassing temperature
W 300 iP
Run-up time min < 5
< 5
< 5
<5
Foreline flange (clamped)
DN 16 ISO-KF
16 ISO-KF
16 ISO-KF
16 ISO-KF
Purge / vent port (clamped)
DN 16 ISO-KF
16 ISO-KF
16 ISO-KF
16 ISO-KF
Water cooling connection (optional)
Weight, approx.
G 1/8"
kg (lbs) 12 (26)
Technical Data
1/8"
12 (26)
1/8"
12 (26)
1/8"
12 (26)
Integrated Frequency Converter
TURBO.DRIVE iS
V
48
48
48
48
Ripple% < 2
< 2
< 2
<2
400
259
400
259
400
259
Power supply
Power consumption
maximum
at ultimate pressure
W 400
W 259
DC current consumption, max.
A
7.5 to 9.3
7.5 to 9.3
7.5 to 9.3
7.5 to 9.3
DC power supply voltage range
V
43 to 53
43 to 53
43 to 53
43 to 53
Length of the DC connection cable, max.
at 3 x 1.5 mm2
m (ft) at 3 x 2.5 mm2
m (ft) 5 (17.5)
20 (70.0)
5 (17.5)
20 (70.0)
5 (17.5)
20 (70.0)
5 (17.5)
20 (70.0)
32 V; 0,5 A
32 V; 0,5 A
32 V; 0,5 A
32 V; 0,5 A
+10 to +40
(+50 to +104)
0 to +60
(0 to +140)
+10 to +40
(+50 to +104)
0 to +60
(0 to +140)
+10 to +40
(+50 to +104)
0 to +60
(0 to +140)
+10 to +40
(+50 to +104)
0 to +60
(0 to +140)
5 to 85
5 to 85
5 to 85
Contact rating for the relays, max.
Permissible ambient temperature
during operation
during storage
°C
(°F)
°C
(°F)
Relative humidity of the air,
non-condensing% Protection class
IP 30
30
30
5 to 85
30
Overvoltage category
II
II
II
II
Pollution category
2
2
2
2
leybold
379
High
Vacuum Pumps
Technical Data
P
TURBOVAC MAG W 300 iP
with Integrated Frequency Converter and Seal Gas Connection
Part No.
410300V0505
410300V0506
DN 100 ISO-K
DN 100 CF
P
FC
FC
410400V0505
410400V0506
DN 160 ISO-K
DN 160 CF
P FC
Power supply TURBO.POWER 500
410300V0221
DC cable frequency converter - power supply
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
410300V2001
410300V2003
410300V2005
410300V2010
410300V2020
Mains cable, 3 m (10.5 ft)
with EURO plug
with US plug 5-15 P
800102V0002
800102V1002
Forevacuum pump
140 000
TRIVAC D 2,5 E
112 55
TRIVAC D 8 B
112 56
3 phase motor; 230/400 V, 50 Hz; 250/440 V, 60 Hz
380
140 002
leybold
With integrated Frequency Converter
P
FC
DC connecting cable
max. 20 m
PS
Mains cable
P
Inlet screen
DN 100 ISO-K
coarse (3.2 x 3.2 mm (0.13 x 0.13 in.))
fine (1.6 x 1.6 mm (0.06 x 0.06 in.))
DN 100 CF
coarse (3.2 x 3.2 mm (0.13 x 0.13 in.))
fine (1.6 x 1.6 mm (0.06 x 0.06 in.))
DN 160 ISO-K
DN 160 CF
Flange heater
100 CF, 230
100 CF, 115
160 CF, 230
160 CF, 115
V,
V,
V,
V,
50
60
50
60
Part No.
800132V0101
800132V0102
200 91 514
E 200 17 195
E 200 00 307
E 200 17 247
854
854
854
854
Hz
Hz
Hz
Hz
27
28
37
38
Water cooling unit
410300V0101
Air cooling unit
410300V0102
152 48
DC plug
800 001 694
800120V0011
800120V0021
P
Flanges for forevacuum, venting and purge gas are blank-flanged
Centering ring with FPM sealing ring and a clamping yoke
leybold
381
High
Vacuum Pumps
MAG W 300/400 iP
TURBO.POWER 500
with Compound Stage
-Research
- Coating systems
Technical Features
- DN 25 ISO-KF with clamped fore
vacuum connection
DN 16 ISO-KF with clamped con
nection (purge/vent)
of UL requirements
h
h
DN  d1

h
d2hh1h2l b b*
s1s2
180.0204.0281.5 90 80 204.0274.5257.521° 13.0121.0
in.
7.09 8.03 11.083.543.158.03 10.8110.14
21° 0.514.76
mm 160 CF 202.5204.0294.0 90 80 204.0274.5257.521° 10.0150.0
in.
7.97 8.03 11.573.543.158.03 10.8110.14
16° 0.395.91
modules
-Standard 9 pin 24 V SPS PLC-IO in Control Slot
Profibus, RS 485 C
240.0204.0280.5 90 80 240.0292.5275.521° 13.0130.0
in.
9.45 8.03 11.043.543.159.45 11.5210.85
21° 0.515.12
mm 200 CF 253.0204.0275.0 90 80 253.0299.0282.021° 9.0156.0
in.
9.96 8.03 10.833.543.159.96 11.7711.10
21° 0.356.14
Dimensional drawing for the TURBOVAC MAG W 600/700 iP
700
MAG W 700
MAG W 600
Pumping speed
500
nance-free systems
l x s -1
600
400
- Flexibility due to the modular concept; the converter is optionally also
available by way of a bench top unit
300
200
100
0
”
10-6
10-5
10-4
10-3
10-2
10-1
mbar
1
Inlet pressure
Pumping speed for N2 of the TURBOVAC MAG W 600/700 iP as a function of the inlet pressure
382
leybold
TURBOVAC MAG
DN Inlet flange
Pumping speed
N2
Ar
He
H2
I
I
I
I
Operating speed
min-1 x
x
x
x
s-1
s-1
s-1
s-1
160 ISO-K
Ultimate pressure
mbar (Torr) mbar (Torr) Recommended backing pump
550
520
570
410
200 ISO-K
590
540
600
430
200 CF
590
540
600
430
48 000
48 000
48 000
48 000
1.6 x 1010
3.4 x 104
1.7 x 106
1.6 x 1010
3.4 x 104
1.7 x 106
1.6 x 1010
3.4 x 104
1.7 x 106
1.6 x 1010
3.4 x 104
1.7 x 106
< 10-8
(< 0.75 x 10-8)
< 10-10
(< 0.75 x 10-10)
< 10-8
(< 0.75 x 10-8)
< 10-10
(< 0.75 x 10-10)
80 (176)
–
80 (176)
6.0 (4.5)
6.0 (4.5)
6.0 (4.5)
6.0 (4.5)
TRIVAC D 2,5 E
TRIVAC D 8 B
TRIVAC D 2,5 E
TRIVAC D 8 B
TRIVAC D 2,5 E
TRIVAC D 8 B
TRIVAC D 2,5 E
TRIVAC D 8 B
°C (°F) –
W 700 iP
160 CF
550
520
570
410
Compression ratio
N2
H2
He
W 600 iP
Run-up time min < 6
< 6
< 6
<6
DN 25 ISO-KF
25 ISO-KF
25 ISO-KF
25 ISO-KF
Purge / vent port
(clamped)
DN 16 ISO-KF
16 ISO-KF
16 ISO-KF
16 ISO-KF
Weight, approx.
G 1/8"
kg (lbs) 17 (37.5)
Technical Data
1/8"
17 (37.5)
1/8"
17 (37.5)
1/8"
17 (37.5)
TURBO.DRIVE iS
V
48
48
48
48
Ripple% < 2
< 2
< 2
<2
400
259
400
259
400
259
Power supply
Power consumption
maximum
W 400
W 259
DC current consumption, max.
A
7.5 to 9.3
7.5 to 9.3
7.5 to 9.3
7.5 to 9.3
DC power supply voltage range
V
43 to 53
43 to 53
43 to 53
43 to 53
at 3 x 1.5 mm2
m (ft) at 3 x 2.5 mm2
m (ft) 5 (17.5)
20 (70.0)
5 (17.5)
20 (70.0)
5 (17.5)
20 (70.0)
5 (17.5)
20 (70.0)
32 V; 0,5 A
32 V; 0,5 A
32 V; 0,5 A
32 V; 0,5 A
+10 to +40
(+50 to +104)
0 to +60
(0 to +140)
+10 to +40
(+50 to +104)
0 to +60
(0 to +140)
+10 to +40
(+50 to +104)
0 to +60
(0 to +140)
+10 to +40
(+50 to +104)
0 to +60
(0 to +140)
5 to 85
5 to 85
5 to 85
5 to 85
during operation
during storage
°C
(°F)
°C
(°F)
non-condensing% IP 30
30
30
30
II
II
II
II
Pollution category
2
2
2
2
Protection class
leybold
383
High
Vacuum Pumps
Technical Data
P
DN 160 ISO-K
DN 160 CF
Part No.
410600V0505
410600V0506
P
FC
FC
DN 200 ISO-K
DN 200 CF
410700V0505
410700V0506
P FC
410300V0221
DC cable frequency converter - power supply
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
410300V2001
410300V2003
410300V2005
410300V2010
410300V2020
Mains cable, 3 m (10.5 ft)
with EURO plug
with US plug 5-15 P
800102V0002
800102V1002
Forevacuum pump
TRIVAC D 2,5 E
140 000
140 002
TRIVAC D 8 B
112 55
112 56
384
leybold
With integrated Frequency Converter
P
FC
DC connecting cable
max. 20 m
PS
Mains cable
P
Inlet screen
DN 160 ISO-K
DN 160 CF
DN 200 ISO-K
DN 200 CF
Part No.
E 200 00 307
E 200 17 247
200 91 639
400 001 515
Flange heater
160 CF, 230 V, 50 Hz
160 CF, 115 V, 60 Hz
854 37
854 38
Water cooling unit
410600V0101
Air cooling unit
410600V0102
152 48
DC plug
800 001 694
800120V0011
800120V0021
P
leybold
385
High
Vacuum Pumps
MAG W 600/700 iP
TURBO.POWER 500
with Compound Stage
TURBOVAC MAG W 1300 iP(L) to 2200 iP(L)
- PVD coatings systems
- Coating of architectural glass
- Optical coatings
- LC displays
- Flat panels
Similar
-Research
17°
17°
iP
Ø d1
iPL
- Analytical systems
DN
Technical Features
I
h
s3
h5
- DN 200 and/or 250 in ISO-F and/or
h7
s5
h6
b
Ø d1
s4
s6
Ø d2
of UL requirements
h4
- Protection class IP 54
h2
h1
s2
h3
s1
Forevacuum
l1
Purge gas
l2
Type
DNb
MAG W 1300
200 ISO-F
200 CF
MAG W 1600/1700
250 CF
MAG W 2200
250 CF
in.16.54 1)11.2211.2212.01 4.49 3.70 0.38 10.2417.40 9.88
200 ISO-F
in. 16.3810.0011.2213.19 4.49 3.70 0.38 10.2418.58 9.88
in. 17.4013.1912.4812.80 4.49 3.70 0.38 10.2418.23 9.88
mm 432305317330114 94 7 260467251
in. 17.0112.0112.4812.99 4.49 3.70 0.38 10.2418.39 9.88
in. 17.1813.1913.7413.19 4.49 3.70 0.38 10.2419.37 9.88
mm 446305349372114 94 7 260506251
in. 17.5612.0113.7414.65 4.49 3.70 0.38 10.2419.92 9.88
250 CF
MAG W 2200
in.
114
s1
s2s3s4s5s6
311 1)311 1)332 1)4214001524198
4.4912.24 1)12.24 1) 13.07 1) 1.655.51 0 0.599.493.86
in.4.49
12.09
12.09 –1.26
6.46
0 – –3.86
250 ISO-Fmm114
335 331 3743915401425998
mm
ll1l2
200 CF mm
114
307307 –32
164
0– –98
MAG W 1600/1700
in. 4.4913.19 12.24
14.721.54 6.06 0 0.5510.203.86
mm114
335 322 – 291730 9 28598
in. 4.4913.19 12.68
–
1.14 6.81 0 0.3511.223.86
250 ISO-Fmm114
343 340 3923416501227298
250 CF
modules
-Standard ProfiBus
RS 485 C, 9 pin 24 V PLC, ...
mm 416254285335114 94 7 260472251
h7
MAG W 1300
d1d2hh1h2h3h4h5h6
420 1)285285305114 94 7 260442251
250 ISO-F mm 450335349355114 94 7 260492251
mm
250 ISO-F mm 442335317325114 94 7 260463251
1)
DN 16 KF with clamped connection
(purge/vent)
- Water cooling
h
- DN 40 KF forevacuum connection
in. 4.4913.50 13.39 15.431.34 6.50 0 0.4710.713.86
mm114
339 340 – 261870 8 30298
in. 4.4913.35 13.39
–
1.02 7.36 0 0.3211.893.86
- Highest pumping speed and gas
throughput from a very small size
- Rugged and reliable operation in
industrial applications
- Sets new benchmarks for mainte
nance-free systems
- Suited for vibration sensitive appli
cations in the areas of analytical,
thin-film, electron microscopy,
research and development among
others.
- Flexibility through the modular concept; the converter is either a
ttached
to the side or under the pump
4 mm (o.16 in.) for cooling coil
Dimensional drawing for the MAG INTEGRA, dimensions in mm
386
leybold
TURBOVAC MAG W
Inlet flange
DN Pumping speed
N2 I x s-1
Ar I x s-1
He I x s-1
H2 I x s-1
Operating speed
min-1
standby speed adjustable from
min-1
to nominal speed
Max. compression ratio
N2
Ar
He at 1 sccm
H2 at 1 sccm
Max. gas throughput
N2 briefly, e.g. during pumpdown
mbar x I x s-1
N2 in continuous operation
mbar x I x s-1
Ar briefly, e.g. during pumpdown
mbar x I x s-1
Ar in continuous operation
mbar x I x s-1
Ultimate pressure
ISO-F flange
mbar (Torr)
CF flange
mbar (Torr)
°C (°F)
Max. foreline pressure
N2
mbar (Torr)
Ar
mbar (Torr)
Run-up time
min
Foreline flange
DN
DN
Water cooling connection
G
Weight, approx. kg (lbs)
Noise level acc. ISO 3744
dB(A)
Vibration level at high vacuum flange
at max. speed
µm
1300 iP(L)
1700 iP(L)
200 ISO-F
250 ISO-F
200 CF
1100
1050
1220
1130
37 800
13 800 (230 Hz)
1600 iP(L) Booster
>
>
2.0
8.0
108
108
x 105
x 103
250 ISO-F
250 CF
1600
1470
1770
1570
33 000
13 800 (230 Hz)
>
>
6.0
1.0
1610
1480
1710
1660
33 000
13 800 (230 Hz)
107
107
x 104
x 103
>
>
2.0
4.0
108
108
x 105
x 103
2200 iP(L)
250 ISO-F
250 CF
2100
1900
2050
1750
30 600
13 800 (230 Hz)
>
>
5.0
5.0
108
108
x 104
x 103
30
60
30
30
20
30
20
17
20
30
20
20
15
20
15
12
< 10-8 (< 7.5 x 10-9)
< 10-8 (< 7.5 x 10-9)
–
< 10-10 (< 7.5 x 10-11)
80 (176)
4.0 (3.00)
0.6 (0.45)
< 5
40 KF
16 KF
1/8"
40 (88)
< 41
0.01
Technical Data
High
Vacuum Pumps
Technical Data
< 10-8 (< 7.5 x 10-9) < 10-8 (< 7.5 x 10-9)
< 10-10 (< 7.5 x 10-11) < 10-10 (< 7.5 x 10-11)
80 (176)
80 (176)
1.0 (0.75)
4.0 (3.00)
1.0 (0.75)
0.6 (0.45)
TRIVAC B or dry compressing pumps
< 7
< 7
40 KF
40 KF
16 KF
16 KF
1/8"
1/8"
45 (99)
45 (99)
< 41
< 41
0.01
0.01
80 (176)
2.5 (1.9)
2.5 (1.9)
<10
40 KF
16 KF
1/8"
50 (110)
< 41
0.01
MAG.DRIVE iM
Power supply
V
Mains frequency
Hz
Power consumption
maximum
W
W
during operation
°C (°F)
during storage
°C (°F)
non-condensing%
Protection class
IP
Pollution category
leybold
200 - 240 ±10%
50 / 60
750
150
32 V, 0.5 A
+10 to +45 (+50 to +113)
-10 to +60 (+14 to +140)
5 to 85
54
II
2
387
TURBOVAC MAG
W 1300/1600/1700/2200 iP(L)
TURBOVAC MAG W 1300
P FC PS
with Integrated Frequency Converter and Purge Gas Connection
MAG
MAG
MAG
MAG
MAG
MAG
MAG
MAG
W
W
W
W
W
W
W
W
1300
1300
1300
1300
1300
1300
1300
1300
iP, DN 200 ISO-F, Profibus
iP, DN 200 ISO-F, 24 V SPS interface
iP, DN 200 CF, Profibus
iP, DN 200 CF, 24 V SPS interface
iPL, DN 200 ISO-F, Profibus
iPL, DN 200 ISO-F, 24 V SPS interface
iPL, DN 200 CF, Profibus
iPL, DN 200 CF 24 V SPS interface
Part No.
411300V0504
411300V0514
411300V0506
411300V0516
411300V0704
411300V0714
411300V0706
411300V0716
TURBOVAC MAG W 1600 Booster
P FC PS
MAG
MAG
MAG
MAG
W
W
W
W
1600
1600
1600
1600
iP Booster, DN 250 ISO-F, Profibus
iP Booster, DN 250 ISO-F, 24 V SPS interface
iPL Booster, DN 250 ISO-F, Profibus
iPL Booster, DN 250 ISO-F, 24 V SPS interface
411600V0504
411600V0514
411600V0704
411600V0714
TURBOVAC MAG W 1700
P FC PS
MAG
MAG
MAG
MAG
MAG
MAG
MAG
MAG
W
W
W
W
W
W
W
W
1700
1700
1700
1700
1700
1700
1700
1700
iPL, DN 250 CF, 24 V SPS interface
411700V0504
411700V0514
411700V0506
411700V0516
411700V0704
411700V0714
411700V0706
411700V0716
TURBOVAC MAG W 2200
P FC PS
MAG
MAG
MAG
MAG
MAG
MAG
MAG
MAG
W
W
W
W
W
W
W
W
2200
2200
2200
2200
2200
2200
2200
2200
iPL, DN 250 CF, 24 V SPS interface
412200V0504
412200V0514
412200V0506
412200V0516
412200V0704
412200V0714
412200V0706
412200V0716
Other interfaces upon request
388
leybold
With integrated Frequency Converter and Power Supply
P
FC
Mains cable
PS
1300 iP(L),
1600 iP(L) Booster,
1700 iP(L),
2200 iP(L)
TURBOVAC MAG
W 1300/1600/1700/2200 iP(L)
P
Set of bolts, nuts and washers for ISO-F flange (12 each)
Bolts M 10 x 50
Bolts M 10 x 35
Part No.
400153V0012
400153V0010
Centering with O-ring
Al/FPM
DN 200
DN 250
Stainless steel/FPM
DN 200
DN 250
268 44
268 45
887 02
887 08
Set of bolts, nuts and washers for CF flange (12 each)
Bolts M 8 x 40
(For DN 200, 3 sets are required; for DN 250, 4 sets)
400153V0016
Copper gasket rings for CF flange
DN 200 (Set of 10 pieces)
DN 250 (Set of 5 pieces)
839 47
839 48
Set of hex. bolts with nuts, bolts and washers for CF flange
DN 200
DN 250 (2 sets required)
839 07
839 07
P FC PS
Mains cable, 2.5 m (8.75 ft)
with EURO plug
with US plug
411310V03
411320V03
Seal Kit DN 250 Metal
200 07 901
Seal kit, metal, for other flanges
upon request
Purge gas and venting valve 24 V DC
0.6 mbar·l/s at 1.5 to 6 bar
0.6 mbar·l/s at 1 to 1.5 bar
Cable set (2 pieces) for connection to the pump
121 33
800152V0010
411300V01
Cooling water valve kit
411300V02
Spare Parts
Inlet screen
DN 200 ISO-F and DN 200 CF
DN 250 ISO-F and DN 250 CF
E 200 04 558
E 200 04 557
P
Converter-side mains plug (IP 54)
Inlet screen
leybold
389
High
Vacuum Pumps
MAG W
MAG W
MAG W
MAG W
2200
1600
1600
1400
1400
1200
1000
800
600
400
He
H2
N2
Ar
10-5
1000
800
400
10-4
10-3
Highvacuum pressure
0
10-6
10-2 mbar 10-1
1400
1400
Pumping speed
1600
1000
600
400
He
H2
N2
Ar
10-5
10-2 mbar 10-1
MAG W 2200
1200
1000
800
600
400
He
H2
N2
Ar
200
200
0
10-6
10-4
10-3
Highvacuum pressure
2000
l x s-1
1800
1600
1200
10-5
2200
MAG W 1700
2000
l x s-1
1800
800
He
H2
N2
Ar
200
2200
Pumping speed
1200
600
200
0
10-6
MAG W 1600
2000
l x s-1
1800
Pumping speed
Pumping speed
2200
MAG W 1300
2000
l x s-1
1800
10-4
10-3
Highvacuum pressure
10-2 mbar 10-1
0
10-6
10-5
10-4
10-3
Highvacuum pressure
10-2 mbar 10-1
Pumping speed curves of the MAG W 1300, W 1600, W 1700 and W 2200
390
leybold
High
Vacuum Pumps
Notes
leybold
391
MAG DIGITAL - Magnetic Rotor Suspension
with separate Frequency Converter,
with Compound Stage
TURBOVAC MAG W 300/400 P
-Research
- Coating systems
Technical Features
- DN 16 ISO-KF with clamped
forevacuum connection
DN 16 ISO-KF with clamped
connection (purge/vent)
of UL requirements
h
h
h
DN
 d1  d2h h1h2l b b*s1s2
MAG W 300 P 100 ISO-K mm
100 CF
70.0 156.0 250.0 233.0 16° 19.0 103.0
in. 5.97 6.10 10.413.06 2.766.14 9.84 9.1716°0.595.08
180.0 155.0
241.0 77.7
70.0 168.5 262.5 245.5 16° 19.0 106.0
in. 7.09 6.10 9.49 3.06 2.766.63 10.34 9.6716°0.754.17
160 CF
250.0 77.7
mm 151.5 155.0 264.3 77.7 70.0156.0 250.0 233.016°15.0129.0
MAG W 400 P 160 ISO-K mm
130.0 155.0
in. 5.12 6.10 9.84 3.06 2.766.14 9.84 9.1716°0.754.06
mm 202.5 155.0 234.7 77.7 70.0181.2 273.7 256.716°14.0129.0
in. 7.97 6.10 9.24 3.06 2.767.13 10.78 10.1116°0.555.08
nance-free systems
- Flexibility due to the modular
concept; alternatively the pump is
available also with an integrated
frequency converter
Dimensional drawing for the TURBOVAC MAG W 300/400 P
700
l x s -1
600
Pumping speed
500
400
MAG W 400
300
MAG W 300
200
100
0
10-6
10-5
10-4
10-3
10-2
10-1
mbar
1
Inlet pressure
Pumping speed for N2 of the TURBOVAC MAG W 300/400 P as a function of the inlet pressure
392
leybold
Technical Data
TURBOVAC MAG
DN Inlet flange
Pumping speed
N2
Ar
He
H2
I
I
I
I
Operating speed
min-1 x
x
x
x
s-1
s-1
s-1
s-1
Ultimate pressure
100 CF
160 ISO-K
300
260
260
190
365
330
280
200
160 CF
365
330
280
200
58 800
58 800
58 800
58 800
1.0 x 1010
3.2 x 103
9.2 x 104
1.0 x 1010
3.2 x 103
9.2 x 104
1.0 x 1010
3.2 x 103
9.2 x 104
1.0 x 1010
3.2 x 103
9.2 x 104
< 10-8
(< 0.75 x 10-8)
< 10-10
(< 0.75 x 10-10)
< 10-8
(< 0.75 x 10-8)
< 10-10
(< 0.75 x 10-10)
80 (176)
–
80 (176)
8 (6)
8 (6)
8 (6)
8 (6)
TRIVAC D 2,5 E
TRIVAC D 8 B
TRIVAC D 2,5 E
TRIVAC D 8 B
TRIVAC D 2,5 E
TRIVAC D 8 B
TRIVAC D 2,5 E
TRIVAC D 8 B
°C (°F) –
100 ISO-K
300
260
260
190
Compression ratio
N2
H2
He
W 400 P
W 300 P
Run-up time min < 5
< 5
< 5
<5
DN 16 ISO-KF
16 ISO-KF
16 ISO-KF
16 ISO-KF
DN 16 ISO-KF
16 ISO-KF
16 ISO-KF
16 ISO-KF
Weight, approx.
G 1/8"
kg (lbs) Technical Data
Voltage range
12 (26)
1/8"
12 (26)
12 (26)
V
50 / 60
Power consumption
stand-by
maximum
W
W
100
400
Max. motor voltage
V
48
Max. pump current
A
L or G characteristic
System fuse
Relative humidity of the air
leybold
6
10 A fast blow
high breaking capacity 250 V
Fuses F1, F2 5 x 20 mm
Load capability, relay output X1
12 (26)
100 - 240, ±10 %
Hz
Temperature
during operation
during storage
1/8"
MAG.DRIVE S
Nominal frequency
Max. frequency
1/8"
Hz
V / A
°C (°F)
°C (°F)
%
0 to 2000
32 / 0,5
0 to +45 (+32 to +113)
-10 to +60 (+14 to +140)
95 (non-condensing)
393
High
Vacuum Pumps
TURBOVAC MAG W 300 P
with separate Frequency Converter and Compound Stage
P
DN 100 ISO-K
DN 100 CF
Part No.
410300V0005
410300V0006
P
DN 160 ISO-K
DN 160 CF
410400V0005
410400V0006
P FC
Electronic frequency converter
MAG.DRIVE S
MAG.DRIVE S with display
410300V0202
410300V0212
Connecting cable DRIVE/BEARING
(connection between pump and MAG.DRIVE S)
03.0 m (10.5 ft)
05.0 m (17.5 ft)
10.0 m (35.0 ft)
20.0 m (70.0 ft) 1)
410300V4003
410300V4005
410300V4010
410300V4020
Mains cable
03.0 m (10.5 ft)
EURO plug
0 US plug 5-15 P
2.0 m (7.5 ft)
US plug 115 V AC
800102V0002
800102V1002
992 76 513
Forevacuum pump
TRIVAC D 2,5 E
TRIVAC D 8 B
140 000
140 002
112 55
112 56
Suited for operating the MAG W 300/400 only
1)
394
leybold
With separate Frequency Converter
P
Connecting cable
max. 20 m
MAG W 300/400 P
FC
PS
Mains cable
P
Inlet screen
DN 100 ISO-K
coarse (3.2 x 3.2 mm (0.13 x 0.13 in.)
fine (1.6 x 1.6 mm (0.06 x 0.06 in.))
DN 100 CF
coarse (3.2 x 3.2 mm (0.13 x 0.13 in.))
fine (1.6 x 1.6 mm (0.06 x 0.06 in.))
DN 160 ISO-K
DN 160 CF
Flange heater
100 CF, 230
100 CF, 115
160 CF, 230
160 CF, 115
V,
V,
V,
V,
50
60
50
60
Part No.
800132V0101
800132V0102
200 91 514
E 200 17 195
E 200 00 307
E 200 17 247
854
854
854
854
Hz
Hz
Hz
Hz
27
28
37
38
Water cooling unit
410300V0101
Air cooling unit
410300V0102
800120V0011
800120V0021
P
leybold
395
High
Vacuum Pumps
MAG.DRIVE S
with Compound Stage
-Research
- Coating systems
Technical Features
- DN 25 ISO-KF with clamped
forevacuum connection
DN 16 ISO-KF with clamped
connection (purge/vent)
of UL requirements
h
h
DN
ø d1
h
ø d2hh1h2l b b*
s1s2
MAG W 600 Pmm160 ISO-K
180.0204.0281.5 90 80 204.0274.5257.521° 13.0121.0
in.
7.09 8.03 11.083.543.158.03 10.8110.14
21° 0.514.76
mm 160 CF 202.5204.0294.0 90 80 204.0274.5257.521° 10.0150.0
in.
7.97 8.03 11.573.543.158.03 10.8110.14
21° 0.395.91
MAG W 700 Pmm200 ISO-K
240.0204.0280.5 90 80 240.0292.5275.521° 13.0130.0
in.
9.45 8.03 11.043.543.159.45 11.5210.85
21° 0.515.12
mm 200 CF 253.0204.0275.0 90 80 253.0299.0282.021° 9.0156.0
in.
9.96 8.03 10.833.543.159.96 11.7711.10
21° 0.356.14
Dimensional drawing for the TURBOVAC MAG W 600/700 P
700
MAG W 700
MAG W 600
500
Pumping speed
nance-free systems
- Flexibility due to the modular
concept; alternatively the pump is
available also with an integrated
frequency converter
l x s -1
600
400
300
200
100
0
”
10-6
10-5
10-4
10-3
10-2
10-1
mbar
1
Inlet pressure
Pumping speed for N2 of the TURBOVAC MAG W 600/700 P as a function of the inlet pressure
396
leybold
Technical Data
TURBOVAC MAG
DN Inlet flange
Pumping speed
N2
Ar
He
H2
I
I
I
I
Operating speed
min-1 x
x
x
x
s-1
s-1
s-1
s-1
160 ISO-K
550
520
570
410
Compression ratio
N2
H2
He
Ultimate pressure
W 700 P
160 CF
200 ISO-K
550
520
570
410
590
540
600
430
200 CF
590
540
600
430
48 000
48 000
48 000
48 000
1.6 x 1010
3.4 x 104
1.7 x 106
1.6 x 1010
3.4 x 104
1.7 x 106
1.6 x 1010
3.4 x 104
1.7 x 106
1.6 x 1010
3.4 x 104
1.7 x 106
< 10-8
(< 0.75 x 10-8)
< 10-10
(< 0.75 x 10-10)
< 10-8
(< 0.75 x 10-8)
< 10-10
(< 0.75 x 10-10)
80 (176)
–
80 (176)
6.0 (4.5)
6.0 (4.5)
6.0 (4.5)
6.0 (4.5)
TRIVAC D 2,5 E
TRIVAC D 8 B
TRIVAC D 2,5 E
TRIVAC D 8 B
TRIVAC D 2,5 E
TRIVAC D 8 B
TRIVAC D 2,5 E
TRIVAC D 8 B
°C (°F) –
W 600 P
Run-up time min < 6
< 6
< 6
<6
DN 25 ISO-KF
25 ISO-KF
25 ISO-KF
25 ISO-KF
DN 16 ISO-KF
16 ISO-KF
16 ISO-KF
16 ISO-KF
Weight, approx.
G 1/8"
Voltage range
17 (37.5)
1/8"
17 (37.5)
17 (37.5)
V
50 / 60
Power consumption
stand-by
maximum
W
W
100
400
Max. motor voltage
V
48
Max. pump current
A
System fuse
leybold
6
10 A fast blow
17 (37.5)
100 - 240, ±10 %
Hz
Temperature
during operation
during storage
1/8"
MAG.DRIVE S
Nominal frequency
Max. frequency
1/8"
Hz
V / A
°C (°F)
°C (°F)
%
0 to 2000
32 / 0,5
0 to +45 (+32 to +113)
-10 to +60 (+14 to +140)
95 (non-condensing)
397
High
Vacuum Pumps
P
DN 160 ISO-K
DN 160 CF
Part No.
410600V0005
410600V0006
P
DN 200 ISO-K
DN 200 CF
410700V0005
410700V0006
P FC
MAG.DRIVE S
410300V0202
410300V0212
(connection between pump and MAG.DRIVE S)
003.0 m (10.5 ft)
005.0 m (17.5 ft)
10.0 m (35.0 ft)
410300V4003
410300V4005
410300V4010
Mains cable
3.0 m (10.5 ft)
EURO plug
0 US plug 5-15 P
2.0 m (7.5 ft)
US plug 115 V AC
800102V0002
800102V1002
992 76 513
Forevacuum pump
TRIVAC D 2,5 E
140 000
140 002
TRIVAC D 8 B
112 55
112 56
398
leybold
P
Connecting cable
max. 20 m
MAG W 600/700 P
FC
PS
Mains cable
P
Inlet screen
DN 160 ISO-K
DN 160 CF
DN 200 ISO-K
DN 200 CF
Part No.
E 200 00 307
E 200 17 247
200 91 639
400 001 515
Flange heater
160 CF, 230 V, 50 Hz
160 CF, 115 V, 60 Hz
854 37
854 38
Water cooling unit
410600V0101
Air cooling unit
410600V0102
800120V0011
800120V0021
P
leybold
399
High
Vacuum Pumps
MAG.DRIVE S
with Compound Stage
TURBOVAC MAG W 830/1300 C
- Semiconductor processes, like PVD
and ion implantation
- Transfer chambers
-Research
- Coating systems
Technical Features
Bottom view
A
20∞
30∞
E
40∞
- Active 5-axis magnetic bearing
system
- Digital monitoring of the bearing
system
ØN
ØB
O
F
P
- Low noise and vibration levels
Forevacuum
connection
ØC
R
Q
M8
- Advanced rotor design for high
throughput
∞
50
G
L
H
T
K
30∞
ØD
J
M
S
Forevacuum flange
Inlet flange
A
MAG W 830 C
DN 40 ISO-KF
160 ISO-F
mm
225
DN 40 ISO-KF
160 ISO-F
in.
8.86
MAG W 1300 C
DN 40 ISO-KF / DN 25 ISO-KF 200 ISO-F
mm
DN 40 ISO-KF / DN 25 ISO-KF 250 ISO-F
in.
MAG W 1300 C
DN 40 ISO-KF
250 ISO-F
mm
DN 40 ISO-KF
250 ISO-F
in.
285
B
C
262
260
10.31 10.24
262
260
11.22 10.31 10.24
335
262
- Purge gas connection
30∞
30∞
260
13.19 10.31 10.24
D
- Intelligent power control system
E
175
16
6.89
0.63
175
16
6.89
0.63
175
16
6.89
0.63
F GH J K LMN
MAG W 830 C
MAG W 1300 C
MAG W 1300 C
MAG W 1300 C
mm
353
72
50
113
35
109.5
163
243
in. 13.92.831.974.451.384.316.429.57
mm
306
72
50
113
35
109.5
163
243
in. 12.052.831.974.451.384.316.429.57
mm
306
72
50
113
35
109.5
163
243
in. 12.052.831.974.451.384.316.429.57
OPQRST
MAG W 830 C
MAG W 1300 C
MAG W 1300 C
mm
103
114.7
98
8.3
85
31
in. 4.064.523.860.333.351.22
mm
103
114.7
98
8.3
85
31
in. 4.064.523.860.333.351.22
mm
103
114.7
98
8.3
85
31
-Maintenance-free
- High throughput for all process
gases
- High pumping speed at low
pressure
- High foreline pressure tolerance:
up to 2 mbar (1.5 Torr)
- Lowest weight and size in its class
- Application specific design
in. 4.064.523.860.333.351.22
Dimensional drawing for the TURBOVAC MAG W 830/1300 C
400
leybold
TURBOVAC MAG
Technical Data
DN Inlet flange
W 830 W 830 C
160 CF
160 ISO-F
W 1300
200 CF
W 1300 C
200 ISO-F
250 ISO-F
Pumping speed according to PNEUROP
I x s-1 N2
900 700 117011001220
Ar
I x s-1 750 650 110010501180
He
I x s-1 900 500 115011001200
H2
I x s-1 7403509209201020
Compression ratio
N2
36 000
24 000
36 000
36 000
36 000
1.5 x 108
> 5 x 107
1.5 x 108
> 108
> 108
< 10-8
(< 0.75 x 10-8)
< 1 x 10-10
(< 0.75 x 10-10)
< 10-8
(< 0.75 x 10-8)
< 10-8
(< 0.75 x 10-8)
Ultimate pressure according to DIN 28 400 mbar < 1 x 10-10
(Torr) (< 0.75 x 10-10)
with convection cooling
with water cooling
Rotary vane pump
High
Vacuum Pumps
min-1 Operating speed
mbar (Torr)
mbar (Torr) 0.2 (0.15)–0.2 (0.15)–
–
2.0 (1.5)
2.0 (1.5)
2.0 (1.5)
2.0 (1.5)
2.0 (1.5)
TRIVACTRIVACTRIVACTRIVAC TRIVAC
D 65 BCS
D 65 BCS
D 65 BCS
D 65 BCS
D 65 BCS
or dry compressing pump
offering a pumping speed of 100 m3/h
Run-up time min < 6
< 4
< 6
< 6
<6
Foreline flange
DN 40 ISO-KF
40 ISO-KF
40 ISO-KF
40 ISO-KF
40 ISO-KF
Purge and vent port
DN 10 ISO-KF/
16 ISO-KF
10 ISO-KF/
16 ISO-KF
10 ISO-KF/
16 ISO-KF
10 ISO-KF/
16 ISO-KF
10 ISO-KF/
16 ISO-KF
(OD of tube)
Weight, approx.
mm (in.) 1/4"1/4"1/4" 6
35 (77.3)
32 (70.6)
35 (77.3)
V
200 - 240, +10 %/-15 %
Current for connected consumers
max. A
20
Max. motor voltage
V
60
Weight, approx.
leybold
32 (70.6)
MAG.DRIVE digital
Mains connection, 50/60 Hz
Nominal frequency
32 (70.6)
6
Hz
°C (°F)
50/60
0 to +45 (+32 to +113)
mm (in.)
483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19")
kg (lbs)
10 (22)
401
TURBOVAC MAG
W 830 (C) / W 1300 (C)
TURBOVAC MAG W 830 (C)
P
400100V0041
400100V0005
DN 160 CF (MAG W 830)
DN 160 ISO-F (MAG W 830 C)
TURBOVAC MAG W 1300 (C)
Part No.
P
400110V0051
400110V0011
400110V0021
DN 200 CF (MAG W 1300)
P FC
MAG.DRIVE digital
MAG.DRIVE digital, Profibus
MAG.DRIVE digital, RS 232 C interface
1)
400035V0011
400035V0013
400035V0014
121 36
Plug-in control
Connecting cable
01.5 m (5.25 ft)
03.0 m (10.5 ft)
05.0 m (17.5 ft)
10.0 m (35.0 ft)
20.0 m (70.0 ft)
converter – pump
DRIVE/BEARING
DRIVE/BEARING
DRIVE/BEARING
DRIVE/BEARING
DRIVE/BEARING
2)
400036V0001
400036V0008
400036V0004
400036V0002
400036V0003
Forevacuum pump
TRIVAC D 65 B
3 phase motor; 208-23/460 V, 60 Hz / 200-220/380 V, 60 Hz
113 98
913 98-2
1)
Included are 2 mains cords. One with EURO plug and one with US plug (220 V AC).
Replacement mains cord are Part Numbers 180 097 or 180 096 respectively
2)
Further connecting cables can be found under MAG.DRIVE digital in the chapter
“Turbomolecular Pumps with Magnetic Rotor Suspension”,
para. “Electronic Frequency Converters”
10000
Ixs
-1
Pumping Speed
1000
100
N2
He
H2
10
8
6
4
2
1
-4
10
2
4
6
8
10
-3
10
-2
10
-1
mbar
1
Inlet Pressure
Pumping speed of the TURBOVAC MAG W 1300 C (DN 250) as a function of the inlet pressure
402
leybold
P
Connecting cable
max. 20 m
MAG W 830/1300 (C)
FC
PS
Mains cable
High
Vacuum Pumps
MAG.DRIVE digital
TURBOVAC MAG
W 830 (C) / W 1300 (C)
P
121 33
Connecting cable for optional purge gas valve (pump/converter)
01.5 m (5.25 ft)
03.0 m (10.5 ft)
10.0 m (35.0 ft)
20.0 m (70.0 ft)
400038V0007
400038V0006
400038V0002
400038V0009
P
Inlet screen
DN 160 ISO-F
DN 160 CF
DN 200 ISO-F
DN 200 CF
DN 250 ISO-F
leybold
Part No.
E 200 00 307
E 200 17 247
200 91 470
E 200 17 248
200 91 471
403
with Compound Stage
TURBOVAC MAG W 1500 CT
-All major semiconductor processes
such as Etch, CVD, PVD and Ion
Implantation
Technical Features
system
- Bearing and temperature system
are controlled digitally
- Corrosion resistant
pump speeds and forevacuum
pressures
26∞
ød
a2
70
a1
∞
h5
ød1
ød2
∞
60
h4
h2
b1
ød5
DN 40 KF
b2
a3
h7
h6
a4
a5
a
ød4
105∞
Bottom view
a a1a2a3a4a5bb1b2dd1d2
200 ISO-F mm 164.5 159 116.5 M8 x 15 32
9
182
3
150 285 260 213
in.6.486.264.59M8 x 0.61.260.357.170.125.9111.22
10.248.39
250 ISO-F mm 164.5 159 116.5 M8 x 15 32
9
182
3
150 335 310 261
in.6.486.264.59M8 x 0.61.260.357.170.125.9111.22
12.20
10.28
d3d4d5d6 hh1h2h3h4h5h6h7
200 ISO-F mm262175285 243 307296279231200 16 84 118
in. 10.316.8911.22 9.57 12.0911.6510.98 9.09 7.87 0.63 3.31 4.65
250 ISO-F mm262175285 243 307296279231200 16 84 118
in. 10.316.8911.22 9.57 12.0911.6510.98 9.09 7.87 0.63 3.31 4.65
Dimensional drawing for the TURBOVAC MAG W 1500 CT
404
- Integrated temperature management system (TMS)
ød6
30∞
ød3
∞
h
h3
60
h1
Heatband
b
- Integrated purge gas system
-Maintenance-free
gases
pressure
up to 2.6 mbar (1.95 Torr)
- High resistance against corrosive
gases
- Robust against particles and
deposits
- Temperature control up to 90 °C
(194 °F) to avoid condensation
leybold
DN Inlet flange
200 ISO-F
250 ISO-F
I x s-1 1100
N2
Ar
I x s-1 1050
He
I x s-1 1100
H2
I x s-1 920
Compression ratio
N2
Ultimate pressure according to DIN 28 400
mbar (Torr) Recommended backing pump
Rotary vane pump
200 CF
1220
1180
1200
1020
1100
1050
1100
920
36 000
36 000
36 000
> 108
> 108
> 108
< 10-8 (< 0.75 x 10-8)
< 10-8 (< 0.75 x 10-8)
< 10-10 (< 0.75 10-10)
2.6 (1.95)
2.6 (1.95)
2.6 (1.95)
TRIVAC D 65 BCS
TRIVAC D 65 BCS
TRIVAC D 65 BCS
Run-up time
at 95% of nominal speed
min < 6
< 6
<6
Foreline flange
DN 40 ISO-KF
40 ISO-KF
40 ISO-KF
Purge and vent port
(OD of tube)
Weight, approx.
VCR 1/4"
1/4"
6.4 (0.25)
6.4 (0.25)
6.4 (0.25)
kg (lbs) 32 (70.6)
32 (70.6)
32 (70.6)
MAG.DRIVE digital
V
200 - 240, +10 %/-15 %
max. A
20
Max. motor voltage
V
Nominal frequency
Weight, approx.
leybold
1/4"
mm (in.) Technical Data
High
Vacuum Pumps
Technical Data
Hz
°C (°F)
60
50/60
0 to +45 (+32 to +113)
mm (in.)
483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19")
kg (lbs)
10 (22)
405
TURBOVAC MAG vcW 1500 CT
P
Part No.
400026V0002
400027V0002
400030V0002
DN 200 ISO-F
DN 250 ISO-F
DN 200 CF
P FC
Electronic frequency converter 1)
MAG.DRIVE digital
400035V0011
400035V0013
400035V0014
Connecting cable
01.5 m (5.25 ft)
01.5 m (5.25 ft)
03.0 m (10.5 ft)
03.0 m (10.5 ft)
05.0 m (17.5 ft)
05.0 m (17.5 ft)
10.0 m (35.0 ft)
10.0 m (35.0 ft)
20.0 m (70.0 ft)
20.0 m (70.0 ft)
400036V0001
400037V0001
400036V0008
400037V0008
400036V0004
400037V0004
400036V0002
400037V0002
400036V0003
400037V0003
converter – pump
DRIVE/BEARING
TMS
DRIVE/BEARING
TMS
DRIVE/BEARING
TMS
DRIVE/BEARING
TMS
DRIVE/BEARING
TMS
2)
121 36
Plug-in control
Forevacuum pump
TRIVAC D 65 B
113 98
913 98-2
1)
2)
406
leybold
P
Connecting cable
FC
max. 20 m
MAG W 1500 CT
PS
Mains cable
P
Seal kit
DN 250 metal
Part No.
200 07 901
P
Inlet screen
DN 200 ISO-F
DN 250 ISO-F
DN 250 CF
200 91 470
200 91 471
200 91 638
Integrated purge gas system VRC nut 1/4"
Integrated temperature management system
Cooling water connection Swagelock 1/4" tube
FC
Mains cord, 3 m (10.5 ft.) long, approx. with EURO or US plug
10000
Ixs
-1
Pumping Speed
1000
100
N2
He
H2
10
8
6
4
2
1
10
-4
2
4
6
8
10
-3
10
-2
10
-1
mbar
1
Inlet Pressure
Pumping speed of the TURBOVAC MAG W 1500 CT (DN 250) as a function of the inlet pressure
leybold
407
High
Vacuum Pumps
MAG.DRIVE digital
with separate Frequency Converter
with Compound Stage
TURBOVAC MAG W 2000 C/CT
Implantation
Technical Features
Ø 335
system
DN 250 ISO-F
- Patented KEPLA-COAT® for rotor
and stator to prevent corrosion
273
303
Ø 339
388
Forevacuum
flange DN 40 KF
47
Bottom view “C”
Ø 335
DN 250 ISO-F
Cooling water IN
167
43°
DN 250 ISO-F
32
5
197
273303
273
40°
388
Forevacuum
flange DN 40 KF
Ø 339
113
Forevacuum
flange DN 40 KF
43°
Forevacuum
flange DN 40 KF
42°
Cooling water IN
Bottom view “CT”
43°
Ø 199
Cooling water OUT
7
160
Heater
197
113
Ø3
10
40°
113
113
11
38°
11
gases
42°
11x30°
pressure
up to 5.3 mbar (4 Torr)
160
42°
Purge gas connector 11x30°
05
16
5
32
Ø 310
-Maintenance-free
- High throughput for all etch gases
R2
40°
Ø 310
11
Drive Bearing connector
43°
5
197
35
38°
67
67
Purge gas connector
Cooling water OUT
167
32
38
35
Cooling water IN
Purge gas connector
Ø 199
Cooling water OUT
67
47
47
38
35
Cooling water IN
167
- CT versions: Integratedtemperature
management system (TMS)
273
388
160
47
Ø 199
Ø310
Ø 339
303
339
38
DN 250 ISO-F
Ø 335
67
pressures
Purge gas connector
Cooling water OUT
38
Ø 335
Ø 199
35
11
11x30°
38°
deposits
°
11x 30
Dimensional drawing for the TURBOVAC MAG W 2000 C/CT
- Temperature management system
(TMS) to avoid condensation
10000
Pumping Speed
Ixs
-1
1000
100
N2
He
H2
10
8
6
4
2
1
10
-4
2
4
6
8
10
-3
10
-2
10
-1
mbar
1
Inlet Pressure
Pumping speed of the TURBOVAC MAG W 2000 CT (DN 250) as a function of the inlet pressure
408
leybold
Technical Data
TURBOVAC MAG
DN Inlet flange
W 2000 C
W 2000 CT
250 ISO-F
250 ISO-F
I x s-1 1760
N2
Ar
I x s-1 1650
He
I x s-1 1800
H2
I x s-1 1500
Compression ratio
N2
Rotary vane pump
1760
1650
1800
1500
28 800
28 800
> 108
> 108
< 10-8 (< 0.75 x 10-8)
< 10-8 (< 0.75 x 10-8)
3.5 (2.63)
3.5 (2.63)
TRIVAC D 65 BCS
TRIVAC D 65 BCS
Run-up time min < 8
<8
Foreline flange
DN 40 ISO-KF
40 ISO-KF
Purge and vent port
(OD of tube)
Weight, approx.
VCR 1/4"
6.4 (0.25)
6.4 (0.25)
kg (lbs) 68 (150)
68 (150)
MAG.DRIVE digital
V
200 - 240, +10 %/-15 %
max. A
20
Nominal frequency
Weight, approx.
leybold
1/4"
mm (in.) Technical Data
Max. motor voltage
High
Vacuum Pumps
V
Hz
°C (°F)
60
50/60
0 to +45 (+32 to +113)
mm (in.)
483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19")
kg (lbs)
10 (22)
409
P
Part No.
400047V0001
400047V0002
DN 250 ISO-F (MAG W 2000 CT)
P FC
Electronic frequency converter 1)
MAG.DRIVE digital
400035V0011
400035V0013
400035V0014
Connecting cable
01.5 m (5.25 ft)
01.5 m (5.25 ft)
03.0 m (10.5 ft)
03.0 m (10.5 ft)
05.0 m (17.5 ft)
05.0 m (17.5 ft)
10.0 m (35.0 ft)
10.0 m (35.0 ft)
20.0 m (70.0 ft)
20.0 m (70.0 ft)
400036V0001
400037V0001
400036V0008
400037V0008
400036V0004
400037V0004
400036V0002
400037V0002
400036V0003
400037V0003
converter – pump
DRIVE/BEARING
TMS
DRIVE/BEARING
TMS
DRIVE/BEARING
TMS
DRIVE/BEARING
TMS
DRIVE/BEARING
TMS
2)
121 36
Plug-in control
Forevacuum pump
TRIVAC D 65 B
113 98
913 98-2
1)
2)
410
leybold
P
Connecting cable
max. 20 m
MAG W 2000 (C/CT)
FC
PS
Mains cable
P
Inlet screen
DN 250 ISO-F
Part No.
200 91 471
Integrated purge gas system VRC nut 1/4"
Integrated temperature management system (only CT version)
Cooling water connection Swagelock 1/4" tube
FC
leybold
411
High
Vacuum Pumps
MAG.DRIVE digital
with Compound Stage
TURBOVAC MAG W 2200 C
- All major semiconductor p
rocesses
Implantation
- Coating systems
Versions with CF high vacuum
connection
-Research
Technical Features
system
- Digital monitoring of the bearing
system
ØA
36.5
∞
M
pressures
J
D
K
45∞
DN 40 KF
36∞
L
ØB
E
H
8∞
G
- Purge gas connection
- Integrated temperature
management System (TMS)
(“CT” version only)
F
Bottom view
ØC
ABCDEFGHJKLM
200 ISO-F mm 28531719939685.5
164.623 78 117120155 39
in. 11.22
12.487.8315.593.376.480.913.074.614.726.101.54
250 ISO-F mm 33531719937185.5
164.623 78 117120155 39
in. 13.19
12.487.8314.613.376.480.913.074.614.726.101.54
250 CF
mm 30531719940185.5
164.623 78 117120155 39
in. 12.01
12.487.8315.793.376.480.913.074.614.726.101.54
Dimensional drawing for the TURBOVAC MAG W 2200 C
-Maintenance-free
gases
pressure
412
leybold
Technical Data
TURBOVAC MAG
DN Inlet flange
W 2200 C/CT
200 ISO-F
250 ISO-F
I x s-1 1600
N2
Ar
I x s-1 1450
He
I x s-1 1780
H2
I x s-1 1720
Compression ratio
N2
with water cooling
Rotary vane pump
W 2200
250 CF
2000
1900
1980
1930
1800
1700
1980
1930
29 400
29 400
29 400
> 1 x 108
> 1 x 108
1 x 108
< 10-8 (< 0.75 x 10-8)
< 10-8 (< 0.75 x 10-8)
< 1 x 10-10 (< 0.75 x 10-10)
–
2 (1.5)
–
2 (1.5)
0.1 (0.075)
1 (0.75)
TRIVAC D 65 BCS
TRIVAC D 65 BCS
TRIVAC D 65 BCS
Run-up time
at 95% of nominal speed
min < 8
< 8
<8
Foreline flange
DN 40 ISO-KF
40 ISO-KF
40 ISO-KF
1/4" VCR
1/4" VCR
DN 10/16
1/2"
1/2"
Swagelok tube 1/4"
48 (106)
48 (106)
60 (132)
Purge and vent port
(OD of tube)
Weight, approx.
MAG.DRIVE digital
V
200 - 240, +10 %/-15 %
max. A
20
Max. motor voltage
V
60
Nominal frequency
Weight, approx.
leybold
Hz
°C (°F)
50/60
0 to +45 (+32 to +113)
mm (in.)
483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19")
kg (lbs)
10 (22)
413
High
Vacuum Pumps
DN
DN
DN
DN
DN
200
250
250
200
250
ISO-F (MAG W 2200
ISO-F (MAG W 2200
CF (MAG W 2200)
ISO-F (MAG W 2200
ISO-F (MAG W 2200
P
C)
C)
Part No.
400081V0011
400081V0021
400081V0061
400081V0013
400081V0023
CT)
CT)
P FC
MAG.DRIVE digital
1)
Connecting cable
01.5 m (5.25 ft)
01.5 m (5.25 ft)
03.0 m (10.5 ft)
03.0 m (10.5 ft)
05.0 m (17.5 ft)
05.0 m (17.5 ft)
converter – pump
DRIVE/BEARING
TMS 3)
DRIVE/BEARING
TMS 3)
DRIVE/BEARING
TMS 3)
DRIVE/BEARING
TMS 3)
DRIVE/BEARING
TMS 3)
10.0
10.0
20.0
20.0
m
m
m
m
(35.0
(35.0
(70.0
(70.0
ft)
ft)
ft)
ft)
2)
400036V0001
400037V0001
400036V0008
400037V0008
400036V0004
400037V0004
400036V0002
400037V0002
400036V0003
400037V0003
Plug-in control
121 36
Forevacuum pump
TRIVAC D 65 B
400035V0011
400035V0013
400035V0014
113 98
913 98-2
1)
2)
3)
TMS connecting cables are only needed for the “CT” version of the TURBOVAC MAG W 2200
414
leybold
P
Connecting cable
FC
max. 20 m
MAG W 2200 (C/CT)
PS
Mains cable
P
Part No.
121 33
Connection cable for optional seal gas valve (pump/converter)
01.5 m (5.25 ft)
03.0 m (10.5 ft)
10.0 m (35.0 ft)
20.0 m (70.0 ft)
400038V0007
400038V0006
400038V0002
400038V0009
Seal kit
DN 250 metal
200 07 901
P
Inlet screen
DN 200 ISO-F
DN 250 ISO-F
DN 250 CF
E 400 000 096
E 400 000 100
E 200 15 157
FC
10000
Ixs
-1
Pumping Speed
1000
100
N2
He
H2
10
8
6
4
2
1
-4
10
2
4
6
8
10
-3
10
-2
10
-1
mbar
1
Inlet Pressure
leybold
415
High
Vacuum Pumps
MAG.DRIVE digital
with Compound Stage
TURBOVAC MAG W 2800/3200 (C/CT)
Implantation
Versions with CF high vacuum
connection
-Research
Technical Features
system
TURBOVAC MAG W 2800 CT (left) and TURBOVAC MAG W 3200 CT (right)
- Bearing and temperature system
are controlled digitally
Top view
Bottom
view
Top view
ØA
Ø AØ B
Ø BØ C
ØC
O
- Corrosion resistant
O
50.5°
50.5°
30°
30°
J
H
M 8, 14 depth
H
E
E
M 8, 14 depth
J
ØD
ØD
F
F
G
DN 40 KF
DN 40 KF
G
42°
42°
102°
102°
137°
137°
L
K
ØN
ØN
ØM
ØM
L
pressures
- CT versions: Integratedtemperature
K
ABCDEFGHJ
250 ISO-Fmm335310261293408176 89 361293
in. 13.19 12.2 10.2811.5416.06 6.93 3.50 14.2111.54
250 CF mm305284268307422176 89 391248
in. 12.0111.1810.5512.0916.61 6.93 3.50 15.39 9.76
320 ISO-Fmm425395318248363176 89 316248
in. 16.7315.5512.529.7614.296.93 3.5012.449.76
K L M N O
250 ISO-F mm 199196.5353 415 32
in. 7.83 7.74 13.916.341.26
250 CF
mm 199196.5353 415 32
in. 7.83 7.74 13.916.341.26
320 ISO-F mm 199196.5353 415 32
in. 7.83 7.74 13.916.341.26
Dimensional drawing for the TURBOVAC MAG W 2800/3200 C/CT
-Maintenance-free
gases
pressure
gases
deposits
- Temperature control up to 90 °C
(194 °F) to avoid condensation
416
leybold
Technical Data
TURBOVAC MAG
DN Inlet flange
W 2800 C
250 ISO-F
W 2800 CT W 2800 250 ISO-F
250 CF
W 3200 CT
320 ISO-F
Operating speed
min-1 28 800
28 800
28 800
28 800
1 x 108
1 x 108
1 x 109
1 x 108
< 10-8
(< 0.75 x 10-8)
< 10-8
(< 0.75 x 10-8)
< 1 x 10-10
(< 0.75 x 10-10)
< 10-8
(< 0.75 x 10-8)
Compression ratio
N2
Ultimate pressure according to DIN 28 400 mbar (Torr) Max. foreline pressure for N2
with water cooling
–
–0.3 (0.23)–
mbar (Torr) 2.0 (1.5)
2.0 (1.5)
3.0 (2.3)
2.0 (1.5)
Rotary vane pump
TRIVAC D 65 BCS
TRIVAC D 65 BCS
TRIVAC D 65 BCS
TRIVAC D 65 BCS
Run-up time min < 10
< 10
< 10
< 10
Foreline flange
DN 40 ISO-KF
40 ISO-KF
40 ISO-KF
40 ISO-KF
1/4" VCR
1/4" VCR
DN 10/16
1/4" VCR
Purge / vent port
Cooling water connection 1/4"1/4"1/4"1/4"
Swagelok tube Weight, approx.
kg (lbs) Mains connection, 50/60 Hz
64 (141.3)
64 (141.3)
75 (165.6)
V
200 - 240, +10 %/-15 %
Current for connected consumers, max. A
20
Max. motor voltage
60
Nominal frequency
Weight, approx.
leybold
65 (143.5)
MAG.DRIVE digital
Technical Data
High
Vacuum Pumps
2650265026503200
I x s-1 N2
2450245024503000
Ar
I x s-1 2650265026503000
He
I x s-1 2100210021002250
H2
I x s-1 V
Hz
°C (°F)
50/60
0 to +45 (+32 to +113)
mm (in.)
483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19")
kg (lbs)
10 (22)
417
TURBOVAC
MAG W 2800 / 3200 (C/CT)
TURBOVAC MAG W 2800 (C/CT)
P
Part No.
400006V0071
400000V0001
400000V0002
DN 250 CF (MAG W 2800)
TURBOVAC MAG W 3200 (C/CT)
P
400003V0003
400003V0001
400003V0002
DN 320 ISO-F (MAG W 3200)
P FC
MAG.DRIVE digital
1)
121 36
Plug-in control
Connecting cable
01.5 m (5.25 ft)
01.5 m (5.25 ft)
03.0 m (10.5 ft)
03.0 m (10.5 ft)
05.0 m (17.5 ft)
05.0 m (17.5 ft)
10.0 m (35.0 ft)
10.0 m (35.0 ft)
20.0 m (70.0 ft)
20.0 m (70.0 ft)
converter – pump
DRIVE/BEARING
TMS
DRIVE/BEARING
TMS
DRIVE/BEARING
TMS
DRIVE/BEARING
TMS
DRIVE/BEARING
TMS
2)
400036V0001
400037V0001
400036V0008
400037V0008
400036V0004
400037V0004
400036V0002
400037V0002
400036V0003
400037V0003
Forevacuum pump
TRIVAC D 65 B
400035V0011
400035V0013
400035V0014
112 96
912 96-2
1)
2)
418
leybold
P
Connecting cable
FC
max. 20 m
MAG W 2800/3200 (C/CT)
PS
Mains cable
TURBOVAC
MAG W 2800 C/CT / 3200 CT
P
Part No.
121 33
Seal kit
DN 250 metal
200 07 901
P
Inlet screen
DN 250 ISO-F
DN 250 CF
DN 320 ISO-F
E 400 000 100
200 15 157
E 400 000 134
FC
10000
Ixs
-1
Pumping Speed
1000
100
N2
He
H2
10
8
6
4
2
1
-4
10
2
4
6
8
10
-3
10
-2
10
-1
mbar
1
Inlet Pressure
leybold
419
High
Vacuum Pumps
MAG.DRIVE digital
Accessories
for Pumps with Mechanical Rotor Suspension
Technical Features
- For operating the TURBOVAC
151 (C), 361 (C), 600 C, 1000 C and
1100 C turbomolecular pump
- Easy integration within a vacuum
system owing to the large variety of
different modern interfaces as well
as for modernising older systems
- Front panel with LED
-Status, Power, Error, pump run-up,
pumping power
- Wide voltage range mains input
- Current interfaces like Profibus,
DeviceNet, Ethernet/IP, RS 232 C,
RS 485 C and 25-way terminal strip,
available as options
- Start/stop function through keys on
the front panel
- Remote control and process
control through analog and PLC
compatible inputs and outputs
- Compatible to frequency converter
NT 20, NT 151/361 and NT 361
213
198
135
128
122,4
315
107
196
Dimensional drawing for the electronic frequency
converter Turbo.Drive TD 20 classic
420
leybold
Technical Data
Turbo.Drive TD 20
Mains connection
50/60 Hz
100 to 240 V (+15 % / -10 %)
W
500
Max. output voltage
V
3 x 47
Max. output current
A
classic
5
Protection rating
IP
°C (°F)
Weight, approx.
20
0 to +45 (+32 to +113)
mm (in.)
213 x 128 x 315 (8.39 x 5.04 x 12.40)
kg (lbs)
4.0 (8.8)
Turbo.Drive TD 20
High
Vacuum Pumps
Interface
classic
Part No.
Turbo.Drive TD 20
without interface
with Profibus
with 25-pol I/O
classic
800075V0001
800075V0002
800075V0004
800075V0003
800075V0005
Mains cable
3 m (10.5 ft)
EURO plug
UK plug
US plug 5-15 P
2 m (7.5 ft)
US plug 115 V AC
800102V0002
800102V0003
800102V1002
992 76 513
Connecting cable
TURBOVAC - frequency converter
003 m (010.5 ft)
005 m (017.5 ft)
010 m (035.0 ft)
020 m (070.0 ft)
050 m (175.0 ft)
060 m (210.0 ft)
080 m (280.0 ft)
140 m (490.0 ft)
857 65
857 66
857 67
857 68
800152V0008
800152V0007
800152V0080
800152V0140
19" rack mounting frame 3 HU
161 00
Pump adapter cable
800 000 006
Adapter cable, 0.2 m (0.7 ft) long
25-way PLC interface to 2x Phoenix plugs
(required when a NT 20 with connected
PLC interface needs to be replaced)
800152V0020
PC software TURBO.DRIVE Server
1)
800110V0102
(see Chapter “Accessories” at the end of the section)
1)
Software supports only RS 232 C, RS 485 C and Profibus
leybold
421
TURBOTRONIK NT 10
Technical Features
- For operating the TURBOVAC 50
turbomolecular pump
- Controls and indicators on the front
panel
- Bench top unit
- Inputs for remote control and
process controller
- Also for rack mounting
(1/4 19", 3 HU)
TURBOTRONIK NT 10
Technical Data
Mains connection
- Freely assignable relays (e.g. to
control the backing pumps)
50/60 Hz
Max. output voltage
100-120 or 200-240 V
W
45
V
3 x 150
Max. output current
A
6
Protection rating
IP
20
Weight, approx.
°C (°F)
0 to +40 (+32 to +104)
mm (in.)
106 x 128 x 233 (4.17 x 5.04 x 9.17)
kg (lbs)
1.5 (3.3)
TURBOTRONIK NT 10
Part No.
100 - 120 V (with US plug)
859 01
200 - 240 V (with EURO plug)
859 00
Connecting cable pump - converter
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
15 m (52.5 ft)
20 m (70.0 ft)
422
200 11 609
121 08
121 09
161 10
119 90
800150V2000
leybold
TURBO.DRIVE TD 240
Technical Features
- Operation of the turbomolecular
pump TURBOVAC TW 2401
- Control pushbuttons and display
on the front panel
- Benchtop unit
- Inputs for remote control and
process control (RS 232 C)
- Display of operating status
Technical Data
50/60 Hz
Max. output voltage
Weight, approx.
180 to 253
W
1200
V
3 x 110
RS 232 C
Interface
Protection rating
High
Vacuum Pumps
Mains connection
TURBO.DRIVE TD 240
IP
°C (°F)
20
-5 to +40 (+23 to +104)
mm (in.)
209 x 149 x 400 (8.2 x 5.7 x 15.7)
kg (lbs)
8.2 (18.1)
TURBO.DRIVE TD 240
Part No.
TURBO.DRIVE TD 240
800150V0112
Connecting cable pump - converter
3 m (10.5 ft)
800150V0114
Connection line air cooler
3 m (10.5 ft)
800150V0116
leybold
423
TURBO.DRIVE TD 400 (TD 400)
for TURBOVAC SL 80 and SL 300
73,3
100
24 V DC (X4)
DRIVE (X3)
27,6
18,5
HEAT SINK
HEAT SINK
100
79,0
41,0
TURBO.DRIVE
TD 400
50
15,9
18,2
TURBO.DRIVE TD 400 (Front side)
63,8
Dimensional drawing for the TURBO.DRIVE TD 400
Technical Features
-Configurations:
-as a separate frequency converter
-integrated within the turbomole cular pump
- Small footprint
- USB, RS 232 C, RS 485 C,
Profibus or Ethernet/IP interface
Technical Data
Mains connection
- Remote control via remote interface
- Flexible mounting options
- Cost-effective supply of 24 V DC
TURBO.DRIVE TD 400
V DC
24
A
8
W
190
V
3 x 24
Max. output voltage
Interface
Protection rating
Weight, approx.
IP
°C (°F)
20
+5 to +45 (+41 to +113)
mm (in.)
100 x 90 x 100 (3.9 x 3.5 x 3.9)
kg (lbs)
0.7 (1.6)
TURBO.DRIVE TD 400
Part No.
TURBO.DRIVE TD 400
with USB interface
with Profibus
800073V0008
800073V0002
800073V0003
800073V0004
Connecting cable TD 400 - Pump
0.2 m (0.70 ft)
0.3 m (1.15 ft)
0.4 m (1.40 ft)
0.5 m (1.75 ft)
1.0 m (3.50 ft)
2.5 m (8.75 ft)
3.0 m (10.5 ft)
5.0 m (17.5 ft)
800152V0021
800152V0023
800152V0022
800152V0050
P152 47
864 49
864 40
864 50
START/STOP switch (for manual operation)
Accessories for RS 232 C
and RS 485 C interfaces
424
152 48
800110V0003
(see Chapter “Accessories” at the end of the section)
leybold
High
Vacuum Pumps
Notes
leybold
425
Power Supply Units for
TURBO.DRIVE TD 400
246
211
53
266
Front view
315
5
Ø4
4
213
263
START
NORMAL
111
116
70
POWER
198,1
128,4
START
1
0
STOP
122,4
ERROR
TURBO.CONTROL 300/700
Ø
3,2
Dimensional drawing for the power supply
TURBO.POWER 300
Dimensional drawing for the power supply
TURBO.CONTROL 300
Technical Features
Technical Features
power for SL 80, SL 300, TW 250 S
and TURBO.DRIVE TD 400
power for SL 80, SL 300, TW 250 S
and TURBO.DRIVE TD 400
- Plug & play
- Plug & play
- Bench top unit or for cabinet
mounting
mounting
- Mains switch
- START/STOP switch for the turbomolecular pump
- Remote control via remote interface
- Status indicating LEDs and status
relays
426
leybold
Mains connection
50/60 Hz Power Supply
TURBO.POWER 300
85-264 V
TURBO.CONTROL 300
85-264 V
W 300
300
V DC 24
24
A 8.4
8.4
Protection rating
IP 30
20
Max. output voltage
Weight, approx.
°C (°F) mm (in.) kg (lbs) 0 to +40 (+32 to +104)
116 x 53 x 260
(4.6 x 2.1 x 10.2)
213 x 129 x 320
(8.4 x 5.1 x 12.6)
1.5 (3.3)
1.5 (3.3)
Power Supply
Power supply
TURBO.POWER 300
TURBO.CONTROL 300
0 to +40 (+32 to +104)
TURBO.POWER 300
Part No.
800100V0002
–
24 V DC power cable
DC cable
frequency converter - power supply
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
Mains cable
3 m (10.5 ft)
with EURO plug
with UK plug
with US plug 5-15 P
2 m (7.5 ft)
US plug 115 V AC
800110V0003
leybold
High
Vacuum Pumps
Technical Data
800094V0100
800094V0300
800094V0500
800094V1000
800094V2000
800102V0002
800102V0003
800102V1002
992 76 513
TURBO.CONTROL 300
Part No.
–
800100V0001
24 V DC control cable
800091V0100
800091V0300
800091V0500
800091V1000
800091V2000
800102V0002
800102V0003
800102V1002
992 76 513
–
427
for Pumps with Magnetic Rotor Suspension
MAG.DRIVE S
MAG.DRIVE S without display
- Setting of speed and other functions
- Operation of turbomolecular pumps
with magnetically levitated rotors:
MAG W 300/400 P and
MAG W 600/700 P
- Warning in case the pump is r unning
out of specification
- Storing of all parameters in the
pump’s memory
- Easy operation through the controls
- Small size and low weight
- Communication to host computer of
the customer via serial interface and
conventional interface p
ossible
- Integrated fan
modules
-rear side:
Standard 9 pin 24 V SPS PLC-IO in Control Slot
-front side:
RS 232 C in Service Slot
Ethernet, Profibus, DeviceNet,
RS 485 C
Space for DRIVE/BEARING cable
l2
111
h2
122,5
h
1
SERVICE
STOP START
ERR
PWR
STS
347
l1
h4
129
h111
3
129
h
MAG.DRIVE S
327l
198b1
213 b(Frontplatte)
2l
3
bb1hh1h2h3h4l l1l2l3
mm213198129.0
122.5111111129327347220 2
in. 8.397.805.084.824.374.375.0812.87
13.668.660.08
Dimensional drawing for the MAG.DRIVE S
RS 232 C interface
Mains (100 - 240 V)
MainS
upply
ON
HV PE ET
OFF
F1
F2
DRIVE
Power
ON
CONT
PLC or
optional interface
/BEAR
ING
ROL
DRIVE/BEARING cable
Pump accessories,
e.g. air cooling
Overview connection lines
428
leybold
Technical Data
MAG.DRIVE S
Voltage range
V
100 - 240, ± 10%
Nominal frequency
Hz
50 / 60
Power consumption
stand-by
maximum
W
W
100
400
Max. motor voltage
V
48
Max. pump current
A
Max. frequency
Temperature
during operation
during storage
Hz
V / A
°C (°F)
°C (°F)
Weight, approx.
%
kg (lbs)
High
Vacuum Pumps
System fuse
6
10 A fast blow
0 to 2000
32 / 0,5
0 to +45 (+32 to +113)
-10 to +60 (+14 to +140)
95 (non-condensing)
65 (14.35)
MAG.DRIVE S
Part No.
MAG.DRIVE S
410300V0202
410300V0212
(connection between pump
and MAG.DRIVE S)
03.0 m (10.5 ft)
05.0 m (17.5 ft)
10.0 m (35.0 ft) 1)
20.0 m (70.0 ft) 1)
410300V4003
410300V4005
410300V4010
410300V4020
Mains cable
3.0 m (10.5 ft)
EURO plug
US plug 5-15 P
2.0 m (7.5 ft)
US plug 115 V AC
1)
800102V0002
800102V1002
992 76 513
Suited for operating the MAG W 300/400 only
leybold
429
MAG.DRIVE digital
MAG.DRIVE digital with plug-in control
MAG.DRIVE digital without plug-in control
- Communication to host computer
of the customer via serial interface
and conventional interface p
ossible
- Operation of turbomolecular pumps
with magnetically levitated rotors:
MAG W 830/1300 C,
MAG (W) 1500 CT,
MAG W 2000 C/CT,
MAG W 2200 C/CT und
MAG W 2800/3200 C/CT
- Setting of speed, temperature of the
basic flange and other functions
- Warning in case the pump is r unning
out of specification
- Easy operation through the controls
or the use of plug-in control unit
40∞
l1
b
h1
h2
- Plug-in control
- Small size and low weight
- Integrated fan
- Integrated temperature
- Storing of all parameters in the
pump’s memory
l2
l
ød
b1
h3
h
l3
bb1d hh1h2h3l l1l2l3
mm213198 3.3 113135128122.4455 27 100 70
in. 8.397.800.134.455.315.044.8217.911.063.942.76
Dimensional drawing for the MAG.DRIVE digital
0°
0°
90°
270°
90°
270°
225°
180°
Connection
DRIVE/BEARING
Connection
TMS
180°
Overview connection lines
430
leybold
Technical Data
MAG.DRIVE digital
V
200 - 240, +10%/-15%
Current for connected consumers, max. A
20
Max. motor voltage
V
60
Nominal frequency
50/60
Hz
0 to +45 (+32 to +113)
°C (°F)
Weight, approx.
mm (in.)
483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19")
kg (lbs)
10 (22)
MAG.DRIVE digital
Part No.
1)
400035V0011
400035V0013
400035V0014
Plug-in control
121 36
Connection line leading to the
DRIVE/BEARING of the TURBOVAC MAG ... C/CT
Cable outlet
Cable outlet pump
frequency converter
DRIVE/BEARING
DRIVE/BEARING
PK
01.5 m (5.25 ft)
bended 225°
straight
straight
01.5 m (5.25 ft)
bended 40°
bended 180°
straight
03.0 m (10.5 ft)
straight
bended 180°
straight
03.0 m (10.5 ft)
bended 225°
straight
straight
03.0 m (10.5 ft)
straight
bended 270°
straight
05.0 m (17.5 ft)
bended 225°
straight
straight
05.0 m (17.5 ft)
straight
straight
straight
08.0 m (28.0 ft)
bended 225°
straight
straight
10.0 m (35.0 ft)
bended 225°
straight
straight
20.0 m (70.0 ft)
bended 225°
straight
straight
23.0 m (80.5 ft)
bended 225°
straight
straight
30.0 m (105 ft)
bended 225°
straight
straight
TMS
(only for CT versions)
Cable outlet
Cable outlet pump
frequency converter
TMS
TMS
Heater
01.5 m (5.25 ft)
bended 225°
straight
bended 180°
01.5 m (5.25 ft)
bended 40°
straight
bended 180°
03.0 m (10.5 ft)
bended 225°
straight
bended 180°
05.0 m (17.5 ft)
bended 225°
straight
bended 180°
08.0 m (28.0 ft)
bended 225°
straight
bended 180°
10.0 m (35.0 ft)
bended 225°
straight
bended 180°
20.0 m (70.0 ft)
bended 225°
straight
bended 180°
Purge / Vent (only for optional purge vent valve Part No. 121 33)
Cable outlet
Cable outlet pump
frequency converter
TMS
Purge
Vent
01.5 m (5.25 ft)
straight
bended
bended
03.0 m (10.5 ft)
bended 225°
bended
bended
10.0 m (35.0 ft)
bended 225°
bended
bended
20.0 m (70.0 ft)
straight
bended
bended
400038V0007
400038V0006
400038V0002
400038V0009
Connector for hardware interface
upon request
19" installation frame
High
Vacuum Pumps
MAG.DRIVE digital
with Profibus interface
400036V0001
400036V0025
400036V0006
400036V0008
400036V0009
400036V0004
400036V0010
400036V0005
400036V0002
400036V0003
400036V0012
400036V0011
400037V0001
400037V0025
400037V0008
400037V0004
400037V0005
400037V0002
400037V0003
161 00
1)
leybold
431
Power Supply TURBO.POWER 500
for TURBOVAC MAG W 300/400/600/700 iP
Min. distance for venting
80
Top view
POWER IN
60
POWER OUT
F1
100
100
F2
TURBO.POWER 500
130
5
15
250
15
Dimensional drawing for the power supply TURBO.POWER 500
Technical Features
- For supplying 48 V DC power to
the MAG W 300/400/600/700 iP
mounting
432
leybold
Technical Data
Power Supply
TURBO.POWER 500
V
Hz
50 / 60
VA
650
VA
450
V DC
A
48
10
Nominal frequency
Power consumption
maximum
at ultimate pressure operation
of the pump
DC voltage range
POWER OUT
max.
m (ft)
at 3 x 1.5 mm2
at 3 x 2.5 mm2
m (ft)
Ambient temperature
during operation
during storage
100 - 240, ± 10%
5 (17.5)
20 (70.0)
°C (°F)
°C (°F)
+10 to +40 (+50 to +104)
-10 to -70 (+14 to -94)
%
5 to 85 (non-condensing)
Protection class
IP
30
II
Pollution category
2
Weight, approx.
kg (lbs)
High
Vacuum Pumps
Power supply (POWER IN)
4.0 (8.8)
Power Supply
TURBO.POWER 500
Part No.
410300V0221
DC cable (connection between
TURBO.POWER 500 and MAG.DRIVE iS)
01.0 m (03.5 ft)
03.0 m (10.5 ft)
05.0 m (17.5 ft)
10.0 m (35.0 ft)
20.0 m (70.0 ft)
410300V2001
410300V2003
410300V2005
410300V2010
410300V2020
Mains cable
3.0 m (10.5 ft)
EURO plug
US plug 5-15 P
2.0 m (7.5 ft)
US plug 115 V AC
leybold
800102V0002
800102V1002
992 76 513
433
Vibration Absorber
Vibration absorbers are used to inhibit
the propagation of vibrations from the
turbomolecular pump to highly sensi
tive instruments like e
lectron beam
microscopes, micro-balances or analytical instruments.
Vibration Absorber
Part No.
Vibration absorber
DN 063 ISO-K
DN 063 CF
DN 100 ISO-K
DN 100 CF
DN 160 ISO-K
DN 160 CF
066
081
084
100
084
104
mm
mm
mm
mm
mm
mm
(2.60
(3.19
(3.31
(4.09
(3.31
(4.09
in.)
in.)
in.)
in.)
in.)
in.)
800131V0063
500 070
800131V0100
500 071
500 073
500 072
long
long
long
long
long
long
Air Cooling Unit for TURBOVAC ClassicLine Pumps
For the purpose of retrofitting the
TURBOVAC 50, 151, 361 and 600
pumps for air cooling, an air cooling
unit is available by way of a retrofit kit.
This kit can be easily fitted to the
respective pump using the fitting components included with the accessories.
Air Cooling Unit
Technical Data
Rated power consumption of
the air cooling unit when connected to
TURBOVAC 50, 151 (C)/361 (C)
TURBOVAC 600 C, 1000 C
W
W
10.5
21.0
Air Cooling Unit
Air cooling unit for
TURBOVAC 50
TURBOVAC 1 51 (C)/361 (C)
TURBOVAC 600 C, 1000 C
434
Part No.
Part No.
230 V
854 05
855 31
855 41
100-115 V
800152V0015
800152V0016
800152V0017
leybold
Air Cooling Unit for TURBOVAC SL Pumps
For fitting to the turbomolecular pumps SL 80 and SL 300
Air cooling units for the SL pumps, from left to right for: SL 80 and SL 300
Air Cooling Unit
Power supply voltage
Current rating
SL 80
SL 300
V DC 24
24
mA 39
260
PowerW 0.9
Operating temperature
°C (°F) Protection class
Weight, approx. 6,2
+10 to +40 (+50 to +104)
+10 to +40 (+50 to +104)
IP 20
kg (lbs) Volume flow
20
0.23 (0.51)
0.48 (1.1)
m3/h 20
High
Vacuum Pumps
Technical Data
80
Air Cooling Unit
Part No.
Part No.
SL 80
SL 300
800136V0001
–
–800136V0002
Air cooling unit for
TURBOVAC SL 80
TURBOVAC SL 300
Flange Heater for CF High Vacuum Flanges
Most TURBOVAC pumps can be
baked out in order to improve the
ultimate pressure attained in the
UHV range. Degassing of the turbomolecular pump will only be useful
when simultaneously baking out the
vacuum chamber.
Technical Data
Rated power consumption of
the flange heater
DN 063 CF, DN 100 CF
DN 160 CF
Flange Heater
W
W
100
150
Flange heater
DN 063 CF
DN 100 CF
DN 160 CF
leybold
Flange Heater
Part No.
Part No.
230 V
854 04
854 27
854 37
115 V
854 07
854 28
854 38
435
Fine Filter
A fine filter integrated in the centering
ring protects the pump against parti
cles and dust on the high vacuum side.
Fine Filter
Part No.
Connection flange of the fine filter
DN 040 ISO-KF
DN 063 ISO-K
DN 100 ISO-K
883 98
887 20
887 21
Securing Collar for Octal Socket Plugs
for ClassicLine Pumps TURBOVAC 151 (C), 361 (C), 600 C, 1000 C and 1100 C
The securing collar serves the purpose
of securing the plug on the ClassicLine
pumps TURBOVAC 151 (C), 361 (C),
600 C, 1000 C and 1100 C against
being disconnected inadvertently.
Securing Collar for Octal Socket Plugs
Part No.
800001830
Securing collar for octal socket plugs
Solenoid Venting Valve
Venting Valve
Technical Data
Drive voltage
Power consumption
Connecting flange
Weight, approx.
V DC
24
W
4
DN
16 ISO-KF
kg (lbs)
0.3 (0.66)
Venting Valve
Part No.
Solenoid venting valve,
normally closed
800120V0011
Power Failure Venting Valve
Technical Data
Drive voltage
Power consumption
Connecting flange
Weight, approx.
V DC
24
W
4
DN
16 ISO-KF
kg (lbs)
0.3 (0.66)
Part No.
436
800120V0021
leybold
Power Failure Venting Valve, Electromagnetically Actuated
Technical Data
See Catalog “Valves”,
para. “Special Valves”
Technical data
65,8
Part No.
DN 10 ISO-KF
30
27
41
Power failure venting valve DN 10 ISO-KF,
electromagnetically actuated
024 V DC
230 V AC / 50/60 Hz
174 46
174 26
64
Purge Gas and Venting Valve
Technical Data
DN
10 ISO-KF
kg (lbs)
0.7 (1.55)
Connecting flange
Weight, approx.
Part No.
Purge gas and venting valve, 230 V
0.2 mbar x l x s-1 (12 sccm)
0.4 mbar x l x s-1 (24 sccm)
855 19
855 29
Technical Data
Connecting flange
Inlet
Outlet
1/4" tube
pump specific or DN 16 ISO-KF
Purge gas pressure, abs.
Weight, approx.
bar
kg (lbs)
1.5 to 6,0
0.5 (1.1)
Part No.
Purge gas and venting valve, 24 V DC
0.6 mbar x l x s-1
121 33
Further 0.6 mbar x l x s-1 valves upon request
leybold
437
High
Vacuum Pumps
Dimensional drawing for the electromagnetically
astuated power failure venting valve
Purge Gas and Venting Valve for ClassicLine and SL Pumps
Technical Data
Connecting flange
Pump side
Gas connection
DN
G
10 ISO-KF
1/4"
Seal gas pressure, abs.
bar
1
Weight, approx.
0.3 (0.66)
kg (lbs)
Part No.
Purge gas and venting valve at 1 bar
0.2 mbar x l x s-1 (12 sccm), 24 V DC
0.2 mbar x l x s-1 (12 sccm), 110 - 115 V AC
0.2 mbar x l x s-1 (12 sccm), 230 V AC
113 50
800152V0041
800152V0019
800152V0013
800152V0042
800152V0014
800152V0012
800152V0043
800152V0040
Adapter Set for Seal Gas and Venting Valve for the SL pumps
Technical Data
Adapter Set
M8 / DN 10 ISO-KF
Pump flange adapter
incl. adapter centering ring
with sinter filter insert and clamping ring
DN 10/DN 16 ISO-KF
Adapter Set
Part No.
Adapter set for
purge gas and venting valve
800110V0011
800152V0013
800110V0011
800110V0012
Gas Filter to G 1/4" for Purge Gas and Venting Valve
Technical Data
Gas Filter
Gasfilter
including fitting G 1/4" and 2 gaskets
Gas Filter
Part No.
52V0013
800110V0012
Gas filter to G 1/4"
for seal gas and venting valve
Replacement filter for gas filter to G 1/4"
for seal gas and venting valve
438
800110V0012
E 200 18 515
leybold
Accessories for Serial Interfaces
RS 232 C and RS 485 C
Through these accessories many
control, monitoring and information
capabilities can be implemented in
connection with the electronic frequency converters and turbomolecular
pumps.
The following turbomolecular pumps or
electronic frequency converters are
supported:
SL 80, SL 300 /
TURBO.DRIVE TD 400
TW 250 S / TURBO.DRIVE S / TURBO.DRIVE TD 300 / TURBO.DRIVE TD 400
T 1600, TW 1600
SL 700 / TURBO.DRIVE TD 700
PC Software
Technical Features
- Convenient graphical user interface

- Several turbomolecular pumps can
be operated in parallel
- Display, modify, save and compare
the parameter lists of the turbo
molecular pumps
- Integration of customer’s software
- Recording parameter data over time
(for example, temperatures, rotor
frequency)
PC Software
Part No.
PC software
“Turbo.Drive Server”, CD-Rom
800110V0102
1)
1)
1)
The PC software can be downloaded from “www.oerlikon.com/leyboldvacuum”
Software supports only RS 232 C, RS 485 C and Profibus
Interface Adaptor for Frequency Converter
with RS 232 C/RS 485 C Interface
Interface Adaptor RS 232 C/RS 485 C
Part No.
Adaptor RS 232 C/RS 485 C
mains connection 230 V, 50 Hz, EURO plug
800110V0101
Adaptor USB/RS 232 C
for connection of RS 232 C to USB (PC),
including CD with drivers and manual
800110V0103
leybold
439
High
Vacuum Pumps
PC software for Windows 95 or higher.
Miscellaneous
Services for Mechanically Suspended
Turbomolecular Pumps
Complete Refurbishing at the Service Centre
Complete refurbishing at the service centre includes the following:
Complete disassembly, cleaning, replacement of all wearing parts, mounting, electrical safety test, final test including vibration
measurement
Complete Refurbishing with Decontamination at the Service Centre
Complete refurbishing with decontamination at the service centre includes the following:
Complete disassembly, cleaning and decontamination, replacement of all wearing parts, mounting, electrical safety test, final
test including vibration measurement
Complete Refurbishing
at the Service Centre
Part No.
Complete Refurbishing
with Decontamination
at the Service Centre
Part No.
For pump
TURBOVAC 35 / 50D
AS 2165
AS 2165 D
TURBOVAC 50
AS 2133
AS 2133 D
TURBOVAC SL 80
LAS 2368
LAS 2368 D
TURBOVAC TW 70 H
AS 2368
AS 2368 D
TURBOVAC 151
AS 2134
AS 2134 D
TURBOVAC TW 250 S
AS 2168
AS 2168 D
TURBOVAC SL 300
LAS 2369
LAS 2369 D
TURBOVAC TW 300
AS 2369
AS 2369 D
TURBOVAC 361
AS 2135
AS 2135 D
TURBOVAC 600 / 1000
AS 2136
AS 2136 D
TURBOVAC TW 701 / 690
AS 2330
AS 2330 D
TURBOVAC 1100
AS 2137
AS 2137 D
440
leybold
High
Vacuum Pumps
leybold
Sales and Service
Germany
Oerlikon
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone:
+49-(0)221-347 1234
Fax:
+49-(0)221-347 1245
[email protected]
www.oerlikon.com
Oerlikon
Leybold Vacuum GmbH
Sales Area North/Northeast
Branch Office Berlin
Industriestrasse 10b
D-12099 Berlin
Phone:
+49-(0)30-435 609 0
Fax:
+49-(0)30-435 609 10
[email protected]
Oerlikon
Leybold Vacuum GmbH
Sales Area South/Southwest
Branch Office Munich
Karl-Hammerschmidt-Strasse 34
D-85609 Aschheim-Dornach
Phone:
+49-(0)89-357 33 9-10
Fax:
+49-(0)89-357 33 9-33
[email protected]
[email protected]
Oerlikon
Leybold Vacuum GmbH
Sales Area West & Benelux
Branch Office Cologne
Bonner Strasse 498
D-50968 Cologne
Phone:
+49-(0)221-347 1270
Fax:
+49-(0)221-347 1291
[email protected]
Oerlikon
Leybold Vacuum GmbH
Service Competence Center
Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone:
+49-(0)221-347 1538
Fax:
+49-(0)221-347 1945
[email protected]
Oerlikon
Leybold Vacuum GmbH
Mobil Customer Service
Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone:
+49-(0)221-347 2001
Fax:
+49-(0)221-347 1944
[email protected]
Oerlikon
Leybold Vacuum
Dresden GmbH
Service Competence Center
Zur Wetterwarte 50, Haus 304
D-01109 Dresden
Service:
Phone:
+49-(0)351-88 55 00
Fax:
+49-(0)351-88 55 041
[email protected]
Europe
Asia
Belgium
Netherlands
P.R. China
Japan
Oerlikon
Leybold Vacuum Nederland B.V.
Belgisch bijkantoor
Leuvensesteenweg 542-9A
B-1930 Zaventem
Sales:
Phone:
+32-2-711 00 83
Fax:
+32-2-720 83 38
[email protected]
Service:
Phone:
+32-2-711 00 82
Fax:
+32-2-720 83 38
[email protected]
Oerlikon
Leybold Vacuum Nederland B.V.
Proostwetering 24N
NL-3543 AE Utrecht
Sales and Service:
Phone:
+31-(30) 242 6330
Fax:
+31-(30) 242 6331
[email protected]
[email protected]
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Beichen Economic
Development Area (BEDA),
No.8 Western Shuangchen Road
Tianjin 300400
China
Sales and Service:
Phone:
+86-22-2697 0808
Fax:
+86-22-2697 4061
Fax:
+86-22-2697 2017
[email protected]
[email protected]
[email protected]
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Headquarter
23-3, Shin-Yokohama
3-chome
Tobu A.K. Bldg. 4th Floor
Kohoku-ku
Yokohama-shi 222-0033
Sales:
Phone:+81-45-471-3330
Fax:
+81-45-471-3323
[email protected]
[email protected]
France
Oerlikon
Leybold Vacuum France S.A.S.
7, Avenue du Québec
Z.A. de Courtaboeuf 1 - B.P. 42
F-91140 Villebon-sur-yvette
Sales and Service:
Phone:
+33-1-69 82 48 00
Fax:
+33-1-69 07 57 38
[email protected]
[email protected]
Oerlikon
Leybold Vacuum France S.A.S.
Valence Factory
640, Rue A. Bergès
B.P. 107
F-26501 Bourg-lès-Valence Cedex
Phone:
+33-4-75 82 33 00
Fax:
+33-4-75 82 92 69
[email protected]
Great Britain
Oerlikon
Leybold Vacuum UK LTD.
Silverglade Business Park
Leatherhead Road Unit 2
KT9 2QL Chessington, Surrey
(London)
Sales:
Phone:
+44-13-7273 7300
Fax:
+44-13-7273 7301
[email protected]
Service:
Phone:
+44-13-7273 7320
Fax:
+44-13-7273 7303
[email protected]
Italy
Oerlikon
Leybold Vacuum Italia S.r.l.
Via Trasimeno 8
I-20128 Milano
Sales:
Phone:
+39-02-27 22 31
Fax:
+39-02-27 20 96 41
[email protected]
Service:
Phone:
+39-02-27 22 31
Fax:
+39-02-27 22 32 17
[email protected]
Spain
Oerlikon
Leybold Vacuum Spain, S.A.
C/ Huelva 7
E-08940 Cornellà de Llobregat
(Barcelona)
Sales:
Phone:
+34-93-666 43 11
Fax:
+34-93-666 43 70
[email protected]
Service:
Phone:
+34-93-666 46 16
Fax:
+34-93-685 43 70
[email protected]
Switzerland
Oerlikon
Leybold Vacuum Schweiz AG
Leutschenbachstrasse 55
CH-8050 Zürich
Sales:
Phone:
+41-44-308 40 50
Fax:
+41-44-302 43 73
[email protected]
Service:
Phone:
+41-44-308 40 62
Fax:
+41-44-308 40 60
[email protected]
America
Oerlikon
Leybold Vacuum USA Inc.
5700 Mellon Road
USA-Export, PA 15632
Sales:
Phone:+1-724-327-5700
Fax:+1-724-325-1217
[email protected]
Service:
Phone:+1-724-327-5700
Fax:+1-724-333-3577
[email protected]
Oerlikon
Leybold Vacuum
(Tianjin) Co. Ltd.
Beichen Economic
Development Area (BEDA),
No.8 Western Shuangchen Road
Tianjin 300400
China
Sales and Service:
Phone:
+86-22-2697 0808
Fax:
+86-22-2697 4061
[email protected]
[email protected]
[email protected]
Oerlikon
Shanghai Branch:
No. 10 Building
816 Ronghua Road
Songijang District
Shanghai 201611
China
Sales and Service:
Phone:
+86-21-5288 5863
Fax:
+86-21-5288 5836
[email protected]
[email protected]
[email protected]
Oerlikon
Guangzhou Office and
Service Center
1st F, Main Building
Science City Plaza,
No.111 Science Revenue,
Guangzhou Science City
(GZSC) 510663, Guangzhou,
China
Sales and Service:
Phone:
+86-20-223 23 980
Fax:
+86-20-223 23 990
[email protected]
[email protected]
[email protected]
Oerlikon
Beijing Branch:
1-908, Beijing Landmark Towers
8 North Dongsanhuan Road
Beijing 100004
China
Sales:
Phone:+86-10-6590-7622
Fax:
+86-10-6590-7607
[email protected]
[email protected]
India
Oerlikon
Leybold Vacuum USA Inc.
5700 Mellon Road
USA-Export, PA 15632
Phone:+1-724-327-5700
Fax:+1-724-325-1217
[email protected]
Oerlikon
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 0
Fax: +49-(0)221-347 1250
[email protected]
Oerlikon
Leybold Vacuum India Pvt Ltd.
EL 22, J-Block
MIDC Bhosari
Pune 411026
India
Sales and Service:
Phone:
+91-20-3061 6000
Fax:
+91-20-2712 1571
[email protected]
[email protected]
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Osaka Sales Office
3F, Shin-Osaka Terasaki
No.3 Bldg.
1-5-28 Nishi-Miyahara
Yodogawa-ku, Osaka-shi
Osaka 532-0004
Phone:+81-6-6399-6271
Fax:
+81-6-6399-6273
[email protected]
[email protected]
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Tsukuba Technical Service Center
1959, Kamiyokoba
Tsukuba, Ibaraki,
305-0854 Japan
Service:
Phone:
+81-29 839 5480
Fax:
+81-29 839 5484
[email protected]
[email protected]
South Korea
Oerlikon
Leybold Vacuum Korea Ltd.
3F. Jellzone 2 Tower
Jeongja-dong 159-4
Bundang-gu Sungnam-si
Gyeonggi-do
Bundang 463-384, Korea
Sales:
Phone:
+82-31 785 1367
Fax:
+82-31 785 1359
[email protected]
Service:
623-7, Upsung-Dong
Cheonan-Si
Chungcheongnam-Do
Korea 330-290
Phone:
+82-41 589 3035
Fax:
+82-41 588 0166
[email protected]
Singapore
Oerlikon
Leybold Vacuum
Singapore Pte Ltd.
1 Science Park Road
Singapore Science Park 2
#02-12, Capricorn Building
Singapore 117528
Sales and Service:
Phone:
+65-6303 7030
Fax:
+65-6773 0039
[email protected]
[email protected]
Taiwan
Oerlikon
Leybold Vacuum Taiwan Ltd.
No 416-1, Sec. 3
Chunghsin Road., Chutung
Hsinchu County 310
Taiwan, R.O.C.
Sales and Service:
Phone:
+886-3-500 1688
Fax:
+886-3-583 3999
[email protected]
[email protected]
www.oerlikon.com/
leyboldvacuum

Oerlikon Leybold High Vac Pump Range

Transcription

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